Tilt detection device and tilt detection method

Abstract

A tilt detection device is provided with a deflection member, an angle of which is controlled, the deflection member having a reflecting surface for reflecting first light and a light guide part for guiding second light from one of the reflecting surface side and the surface on the opposite side of the reflecting surface to the other, a detection part for detecting the second light guided by the light guide part, and a control part. In addition, the light guide portion displaces the optical axis position of the second light in accordance with the inclination of the deflection member. The control unit detects the inclination of the deflection member on the basis of the optical axis position of the second light detected by the detection unit.

Description

Technical Field

[0001] The present disclosure relates to an inclination detection device and an inclination detection method. Background Art

[0002] Conventionally, a technique related to a scanning device having a mirror that reflects light has been proposed. For example, in Patent Document 1, a mirror rotation angle detection unit is disclosed, which has a mirror that changes the emission direction of laser light emitted from a laser source, and a light receiving sensor that receives the reflected light reflected by a second reflection surface among a first reflection surface and a second reflection surface provided on the mirror.

[0003] Prior Art Documents Patent Documents Patent Document 1: Japanese Patent No. 5293686 Summary of the Invention Problems to be Solved by the Invention In the scanning device of Patent Document 1, since the light reflected at a reflection angle generated by the inclination of the mirror is detected, the detection range of the light receiving sensor required to receive the reflected light is large. Therefore, the light receiving sensor becomes large, and it is difficult to miniaturize the scanning device.

[0004] An object of the present disclosure is to provide an inclination detection device and an inclination detection method that can simply and highly accurately detect the inclination state of a controlled member.

[0005] Means for Solving the Problems The inclination detection device of the present disclosure includes: a deflection member whose angle is controlled, having a reflection surface that reflects first light and a light guiding portion that guides second light from one of the surface on the reflection surface side and the surface opposite to the reflection surface to the other; a detection portion that detects the second light guided by the light guiding portion; and a control portion; the light guiding portion displaces the optical axis position of the second light corresponding to the inclination of the deflection member, and the control portion detects the inclination of the deflection member based on the optical axis position of the second light detected by the detection portion.

[0006] The inclination detection method of the present disclosure is an inclination detection method of an inclination detection device, the inclination detection device including: a deflection member whose angle is controlled, having a reflection surface that reflects first light and a light guiding portion that guides second light from one of the surface on the reflection surface side and the surface opposite to the reflection surface to the other; a detection portion that detects the second light guided by the light guiding portion; and a control portion; the light guiding portion displaces the optical axis position of the second light corresponding to the inclination of the deflection member, and the control portion detects the inclination of the deflection member based on the optical axis position of the second light detected by the detection portion.

[0007] Advantages of the Invention The tilt detection device and tilt detection method of the present disclosure using the above means can simply and highly accurately detect the tilt state of the controlled member. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a structural diagram of a light source device according to an embodiment of the present disclosure.

[0009] Figure 2 It is a perspective view of a part of the structure of the scanning device.

[0010] Figure 3 It is an exploded perspective view of a part of the structure of the scanning device.

[0011] Figure 4 It is a sectional view taken along line IV-IV of a part of the structure of the scanning device.

[0012] Figure 5 It is a sectional view taken along line V-V of the yoke member.

[0013] Figure 6 It is Figure 4 An enlarged view at the IV-IV section of

[0014] Figure 7 It is a top view schematic diagram of the detection unit.

[0015] Figure 8 It is a diagram showing the irradiation area of the laser irradiated to the light receiving unit via the light selection unit in Embodiment 2 and Embodiment 3.

[0016] Figure 9 It is a schematic diagram for observing the change in the intensity distribution of the laser on the optical path from the light source to the detection unit in two orthogonal directions.

[0017] Figure 10 It is a diagram showing the irradiation area of the laser irradiated to the light receiving unit via the light selection unit in Embodiment 4 and Embodiment 5.

[0018] Figure 11 It is an enlarged view at a position corresponding to the IV-IV section of the scanning device including the deflection member in Embodiment 6.

[0019] Figure 12 It is a perspective view of the yoke member in Embodiment 7.

[0020] Figure 13 It is Figure 12 A sectional view taken along line XIII-XIII of the yoke member of

[0021] Figure 14 It is a sectional view of the yoke member in Embodiment 8, showing the position corresponding to the XIII-XIII section.

[0022] Figure 15 This is a perspective view of the yoke member of Embodiment 9.

[0023] Figure 16 This is Figure 15 a cross-sectional view taken along line XVI-XVI of the yoke member.

[0024] Figure 17 This is a perspective view of the yoke member of Embodiment 10. Specific Embodiments

[0025] Hereinafter, embodiments of the present disclosure will be described based on the drawings. Figure 1 This is a structural diagram of the light source device 1. The light source device 1 has a function of emitting laser light into space. The light source device 1 is used, for example, as a light source for a laser distance measuring device or a LiDAR (Light Detection And Ranging) sensor. The light source device 1 includes a control unit 11, a ranging light optical system 12, an optical system drive circuit 13, and a scanning device 2.

[0026] The control unit 11 controls the operations of the optical system drive circuit 13, the scanning device drive circuit 14, the angle sensor circuit 15, etc. The control unit 11 executes functions and / or methods implemented by codes or commands included in a program stored in a storage unit (not shown). As an example, the control unit 11 can be implemented using a 4-core central processing unit (CPU: Central Processing Unit), MPU (Micro-Processing Unit), GPU (Graphics Processing Unit), MCU (Microcontroller Unit), processor core, multi-processor, ASIC (Application-Specific Integrated Circuit), FPGA (Field Programmable Gate Array), etc., and each process disclosed in each embodiment can also be implemented by a logic circuit or a dedicated circuit formed in an integrated circuit or the like. In addition, these circuits can be implemented by one or more integrated circuits, or multiple processes shown in each embodiment can be implemented by one integrated circuit.

[0027] The storage unit (not shown) of the light source device 1 has a function of storing various programs and various data required. In addition, acquired information such as measured signals can be stored. The storage unit can be implemented using various storage media such as an HDD (Hard Disk Drive), SSD (Solid State Drive), and flash memory.

[0028] The distance measuring optical system 12 includes a light emitting element that emits a laser, optical elements such as a lens or a mirror that guides the laser emitted from the laser light emitting element, and a light receiving element that detects the laser. The optical element may also include a diffuser plate, a light tunnel, a microlens array, a condenser lens, or a filter that adjusts the light beam width or the brightness distribution. The light receiving element can receive the return light that is emitted from the laser light emitting element and reflected by an object outside the light source device 1. The distance measuring optical system 12 emits a laser L1 as distance measuring light (first light) to the deflection member 7 of the scanning device 2.

[0029] The optical system drive circuit 13 controls the emission of the light emitting element of the distance measuring optical system 12. In addition, the optical system drive circuit 13 transmits the information obtained by detecting the light received by the light receiving element of the distance measuring optical system 12 and converting it into an electrical signal to the control unit 11.

[0030] The scanning device 2 reflects the laser L1 emitted from the distance measuring optical system 12 in a direction and at an angle selected from a predetermined solid angle range, and emits it as outgoing light to the outside of the light source device 1. The scanning device 2 can reflect the laser L1 in different directions exemplified by the laser L11 or the laser L12 by controlling the angle of the deflection member 7. In addition, the scanning device 2 guides the light incident from the outside of the light source device 1 to the distance measuring optical system 12. The light incident from the outside of the light source device 1 is the reflected light L3 reflected by an object outside the light source device 1. In addition, depending on the structure of the light source device 1, the laser L1 emitted from the light source device 1 may also be guided to other optical systems within the device of the light source device 1.

[0031] The scanning device 2 includes a mirror control device 3, an inclination detection device 4, and a support member 6. The mirror control device 3 of the present embodiment includes a yoke member 5, a deflection member 7, and a scanning device drive circuit 14. In addition, the inclination detection device 4 of the present embodiment includes a light source 41 that emits a laser L2 used as inclination detection light (second light), a lens 42, a deflection member 43 (second deflection member), a detection circuit board 44, and an angle sensor circuit 15. In addition, the deflection member 7 also functions as a part of the inclination detection device 4.

[0032] Figure 2 It is a perspective view of a part of the structure of the mirror control device 3 and the inclination detection device 4 of the scanning device 2. In addition, in the description of the scanning device 2, the side of the deflection member 7 is regarded as the upper side of the scanning device 2, and the side of the base member 55 is regarded as the lower side. In addition, Figure 3Exploded perspective view of a part of the mirror control device 3 and the tilt detection device 4 of the scanning device 2.

[0033] The yoke member 5 has a first yoke 51 and a second yoke 52. The second yoke 52 is different from the first yoke 51 and is arranged at a rotationally symmetric position around the axis P of the scanning device 2. The first yoke 51 has: a pair of first arm members 53, 53, each having a first end 532a, 532a; and a base member 55, which is connected to the parts on the opposite sides of the first ends 532a, 532a of the first arm members 53, 53. In addition, the second yoke 52 has: a pair of second arm members 54, 54, each having a second end 542a, 542a; and a base member 55, which is connected to the parts on the opposite sides of the second ends 542a, 542a of the second arm members 54, 54 (see Figure 2 and Figure 4 ).

[0034] The first yoke 51 and the second yoke 52 have magnetic properties. The first arm member 53 and the second arm member 54 have: a main body part 531, 541 with a substantially square prism shape and a rectangular cross-sectional shape; and a protruding part 532, 542, which extends in a bent manner to be substantially L-shaped on one side of the main body parts 531, 541. The front ends of the protruding parts 532, 542 have a planar first end 532a and a second end 542a respectively.

[0035] The main body part 531 of the first arm member 53 has a yoke coil 533 wound around its outer periphery. The yoke coils 533 of the pair of first arm members 53 are connected in series with each other. In addition, the main body part 541 of the second arm member 54 has a yoke coil 543 wound around its outer periphery. The yoke coils 543 of the pair of second arm members 54 are also connected in series with each other. Therefore, the yoke member 5 and the yoke coils 533, 543 form an electromagnet. The scanning device drive circuit 14 drives the electromagnet according to the instruction of the control unit 11, thereby controlling the angle of the deflection member 7.

[0036] The base member 55 is a member with magnetic properties. The base member 55 has a disc-shaped first base member 55-1 and a disc-shaped second base member 55-2, and has cutout parts 551 at two sets of opposite side edges 55a of the first base member 55-1. The outer peripheral diameter of the first base member 55-1 is substantially the same as the outer peripheral diameter of the second base member 55-2 (also see Figure 2 and Figure 4). The first base member 55-1 has a cutout portion 551 that is substantially rectangular in a top view. Further, the cutout portion 551 has a groove-shaped recess portion 552 at the boundary portion between the inner surface 551a on the center side of the first base member 55-1 and one inner surface 551b adjacent to the inner surface 551a. The first base member 55-1 has a circular opening portion 553 that penetrates in the thickness direction. As shown in the assembled state of the yoke member 5 in Figure 2 and Figure 4 , the opening portion 553 is disposed on the axis P passing through the gap G (magnetic gap), and the gap G is provided between a pair of first end portions 532a and between a pair of second end portions 542a.

[0037] The thickness of the second base member 55-2 is substantially the same as the thickness of the first base member 55-1. The second base member 55-2 has a circular opening portion 554 that penetrates in the thickness direction. As shown in Figure 2 and Figure 4 , the opening portion 554 is disposed on the axis P passing through the gap G. Therefore, the opening portion 554 and the opening portion 553 are coaxially disposed. Further, the inner diameter of the opening portion 554 is substantially the same as the inner diameter of the opening portion 553.

[0038] Figure 5 is a V-V cross-sectional view showing the first base member 55-1 and the second base member 55-2 of the yoke member 5 shown in Figure 2 . As shown in Figure 5 , the first arm member 53 and the second arm member 54 are respectively accommodated in the cutout portion 551 and connected to the first base member 55-1. The first arm member 53 is accommodated in the cutout portion 551 in such a manner that it abuts against the inner surface 551a in the central direction of the first base member 55-1 and the end portion 531a substantially abuts against the upper surface of the second base member 55-2 (also refer to Figure 4 ). Similarly, the second arm member 54 is accommodated in the cutout portion 551 in such a manner that it abuts against the inner surface 551a in the central direction of the first base member 55-1 and the end portion 541a substantially abuts against the upper surface of the second base member 55-2 (also refer to Figure 4 ). Therefore, the second base member 55-2 is overlapped and disposed with the first base member 55-1 in such a manner as to cover the end portions 531a and 541a of the first arm member 53 and the second arm member 54 accommodated in the cutout portion 551.

[0039] Further, the width of the cutout portion 551 (the internal width in the circumferential direction around the axis P) is wider than the first arm member 53 and the second arm member 54, and has a clearance such that it is not squeezed (refer to Figure 5). The first arm member 53 and the second arm member 54 are fixed to the first base member 55-1 in a state of being in contact with the inner surface 551b on the retracted portion 552 side within the cutout portion 551.

[0040] In Figure 2 (also refer to Figure 4 ), in the assembled state shown, the first ends 532a, 532a of the pair of first yokes 51 are arranged facing each other. In addition, the second ends 542a, 542a of the pair of second yokes 52 face each other in a direction different from the facing direction of the first ends 532a, 532a (in this embodiment, the direction orthogonal to the facing direction of the first ends 532a, 532a in the plan view).

[0041] The support member 6 is disposed between the first ends 532a of the first arm member 53 and supports the state in which the gap length of the gap G provided between the first ends 532a is stabilized. The support member 6 has a circular opening 61 that penetrates in the thickness direction (vertical direction) coaxially with the axis P. As Figure 4 shown, the inner diameter of the opening 61 becomes wider as it approaches the inner side (lower side) of the yoke member 5.

[0042] As Figure 3 shown in the exploded perspective view, the support member 6 is formed to be substantially rotationally symmetric about the axis P (about the opening 61). The support member 6 has a recess 62 that is recessed to be substantially rectangular on the outer peripheral portion. The recess 62 is provided at four positions that are rotated 90 degrees about the axis P. The bottom surface 621 on the opening 61 side of the recess 62 is provided in a planar shape. The protruding portion 532 of the first arm member 53 and the protruding portion 542 of the second arm member 54 are accommodated in the recess 62. In the recess 62, the first end 532a of the first arm member 53 and the second end 542a of the second arm member 54 are in surface contact with the bottom surface 621. In addition, the support member 6 has a flange portion 631 that protrudes radially outward with respect to the axis P of the opening 61 on the upper portion of the outer peripheral surface 63.

[0043] The deflection member 7 is disposed between the pair of first ends 532a and between the pair of second ends 542a. The deflection member 7 has a permanent magnet 71 and a reflector 72. The permanent magnet 71 has a substantially annular (doughnut-shaped) shape. The permanent magnet 71 has a circular opening 711 that penetrates in the thickness direction at the center portion. In addition, the permanent magnet 71 has one of the magnetic poles of S and N at one end side in the thickness direction (the axial direction of the opening 711), and the other of the magnetic poles of S and N at the other end side.

[0044] As Figure 6As shown, the reflector 72 has a circular flat main body portion 721 and a supported portion 722 that protrudes toward the back side of the main body portion 721. The main body portion 721 and the supported portion 722 are members made of light-transmissive glass, plastic, or the like. The main body portion 721 has a reflecting surface 721a that selectively reflects the laser L1 and the laser L2. The reflecting surface 721a has a light selection portion 721a1 (second light selection portion) that reflects the laser L1 and the laser L2 and a light selection portion 721a2 (first light selection portion) that reflects the laser L1 and allows the laser L2 to pass through. The light selection portion 721a2 functions as an opening (aperture) that allows the laser L2 to pass through in a specified opening shape. The light selection portion 721a1 is, for example, a metal reflection film or a dichroic filter formed by evaporation or the like. In addition, the light selection portion 721a2 is, for example, a dichroic filter. In the present embodiment, the laser L2 is the tilt detection light incident from the side of the reflecting surface 721a. As Figure 1 shown, the laser L2 is emitted from the light source 41, condensed by the lens 42, and then incident on the deflection member 43 (second deflection member). The deflection member 43 reflects the laser L2 emitted from the light source 41 toward the deflection member 7 and irradiates the reflecting surface 721a including the light selection portion 721a2.

[0045] The laser L1 is the ranging light guided to be incident and reflected at an angle different from that of the laser L2 incident on the light guide portion 723 described later. For example, by making the wavelength of the laser L2 used as the tilt detection light different from the wavelength of the laser L1 and making the light selection portion 721a2 a dichroic filter, a region that reflects the laser L1 and allows the laser L2 to pass through can be provided on the reflecting surface 721a.

[0046] The region of the reflecting surface 721a where the light selection portion 721a2 is provided is a circular region whose diameter is formed smaller than the beam cross-sectional diameter of the laser L2 incident on the deflection member 7. Therefore, the light selection portion 721a2 reduces the laser L2 to a small diameter and allows it to pass through. The laser L2 incident from the light selection portion 721a2 passes through the inside of the main body portion 721 and the supported portion 722 and exits from the surface on the opposite side of the reflecting surface 721a. Therefore, the deflection member 7 has a light guide portion 723 that guides the laser L2 from one of the side of the reflecting surface 721a and the surface on the opposite side of the reflecting surface 721a to the other. In the present embodiment, the surface on the opposite side of the reflecting surface 721a functions as the exit surface 722a of the laser L2.

[0047] The supported portion 722 has a short cylindrical shape. The supported portion 722 is configured to be engaged or fitted with the opening portion 711 provided in the permanent magnet 71 and is a part of the deflection member 7 integrated with the permanent magnet 71. The deflection member 7 has a rotation center point Q on the reflection surface 721a side. The rotation center point Q is a virtual point. The deflection member 7 is supported by a support portion (not shown) so as to be rotatable about the rotation center point Q in two axes, and can rotate about the rotation center point Q. For example, the deflection member 7 can rotate about the rotation center point Q in the first direction D1 or the second direction D2. In addition, the deflection member 7 can also be supported by a support portion that can rotate in three or more axes so as to be rotatable about the rotation center point Q.

[0048] In addition, the light guide portion 723 of the present embodiment is an optical member disposed at the rotation center point Q of the reflection surface 721a. The incident surface of the laser L2 in the light guide portion 723 (the region where the light selection portion 721a2 is provided in the reflection surface 721a) and the exit surface 722a are parallel surfaces. In addition, most of the light guide portion 723 is provided on the surface on the side far from the rotation center point Q. The light guide portion 723 has a function of displacing the optical axis position of the laser L2 by a displacement amount d from the optical axis A to the optical axis B corresponding to the inclination of the deflection member 7 as shown in Figure 6 the figure.

[0049] Figure 1 As shown in the figure, the scanning device drive circuit 14 has yoke coils 533, 543 serving as load circuits, and a drive circuit (or a switching circuit) not shown. The control unit 11 controls to supply an exciting current to the yoke coil 533 and the yoke coil 543 through the scanning device drive circuit 14. As a result, magnetic fields are generated in the first magnetic path C1 of the first yoke 51 and the second magnetic path C2 of the second yoke 52 (refer to Figure 4 and Figure 5 ), and a magnetic field H1 in the first direction D1 between the first end portions 532a of the first yoke 51 and a magnetic field H2 in the second direction D2 between the second end portions 542a of the second yoke 52 are generated with intensities indicated by the control unit 11 (refer to Figure 6 ). The permanent magnet 71 is attracted or repelled by the magnetic fields H1 and H2 generated in the first direction D1 and the second direction D2. According to the intensities of the magnetic fields H1 and H2, the angle of the deflection member 7 is controlled about the rotation center point Q so that the deflection member 7 becomes a specified inclination angle. The magnetic path lengths of the magnetic paths including the pair of first arm members 53, 53 and the gap G in the first magnetic path C1 and the magnetic paths including the pair of second arm members 54, 54 and the gap G in the second magnetic path C2 are set to be equal.

[0050] In addition, Figure 5The first magnetic circuit C1 and the second magnetic circuit C2 shown bypass the opening 553 (554) and cross around the opening 553 (554). Therefore, the first magnetic circuit C1 and the second magnetic circuit C2 have magnetic circuit lengths of approximately the same length within the base member 55. In this way, the first magnetic yoke 51 and the second magnetic yoke 52 each include the base member 55 as a common structure, cross a part of the magnetic circuit, and are connected to each other in such a way that the magnetic circuit lengths of the closed loops are equal.

[0051] The detection circuit board 44 has a detection unit 441 as a light receiving element. The detection unit 441 is disposed on the opposite side of the reflection surface 721a with respect to the deflection member 7 (see Figure 4 etc.). The detection unit 441 detects the tilt detection light (second light), that is, the laser L2, guided by the light guide unit 723.

[0052] Figure 7 is a top view schematic diagram of the detection unit 441 of the present embodiment. The detection unit 441 is a quadrant photodetector (QPD: quadrant photodetector or quadrant photodiode), and has four light receiving parts 442a to 442d. The center point O of the light receiving parts 442a to 442d is arranged on the axis P of the scanning device 2. The control unit 11 can detect the tilt (tilt direction and tilt angle) of the deflection member 7 according to the position of the optical axis B (or the center of gravity) of the laser L2 detected by the detection unit 441 or according to the distribution position of the laser L2. Specifically, the control unit 11 has a function of detecting the tilt of the deflection member 7 according to the light receiving intensity of the laser L2 detected by each of the light receiving parts 442a to 442d of the quadrant photodetector.

[0053] For example, when the optical axis A of the laser L2 coincides with the axis P and the deflection member 7 is in a state of not being tilted with respect to the optical axis A, the detection unit 441 is irradiated with the laser L22 whose center point O is substantially coincident with the optical axis B. In addition, if the deflection member 7 tilts to the left in the first direction D1 Figure 6 , the laser L2 is refracted at the light guide unit 723 and exits the light guide unit 723 as the laser L23 having an optical axis B that moves to the right with respect to the optical axis A at the time of incidence. Since the optical axis A and the optical axis B are parallel, the laser L23 with the optical axis B located to the right of the center point O is formed and irradiated to the Figure 6 shown detection unit 441. On the contrary, if the deflection member 7 tilts to the right in the first direction D1 Figure 7 , the laser L2 is refracted at the light guide unit 723 and exits the light guide unit 723 as the laser L23 having an optical axis B that moves to the left with respect to the optical axis A at the time of incidence. Since the optical axis A and the optical axis B are parallel, the laser L23 with the optical axis B located to the left of the center point O is formed and irradiated to the Figure 6 shown detection unit 441. On the contrary, if the deflection member 7 tilts to the right in the first direction D1 Figure 6The laser beam L21 of the optical axis B that moves to the left exits from the light guide unit 723. In this case, the laser beam L21 with the optical axis B located to the left of the center point O is irradiated onto Figure 7 the detection unit 441 shown.

[0054] The control unit 11 determines the inclination (inclination direction and inclination angle) of the deflection member 7 based on the ratio of the received light intensities of the laser beam L2 received by the respective light receiving units 442a to 442d. The control unit 11 can calculate the position of the optical axis B (or the center of gravity of the received light intensity) of the laser beam L2 irradiated onto the light receiving unit 442 with respect to the center point O (positions in the first direction D1 and the second direction D2), and obtain the inclination of the deflection member 7. The distance of the optical axis B from the center point O corresponds to the inclination angle of the deflection member 7. In addition, the displacement components of the optical axis B in the first direction D1 and the second direction D2 with respect to the center point O correspond to the inclination direction of the deflection member 7. The control unit 11 can determine the correspondence relationship between the position of the optical axis B with respect to the center point O and the inclination of the deflection member 7 by calculation, or can also determine it by referring to a correspondence table in advance.

[0055] The movement range of the laser beam L2 is preferably at most 50% of the irradiation diameter (radius) of the laser beam L2. That is, even when the deflection member 7 is inclined at the maximum inclination angle, the movement width of the optical axis B of the laser beam L2 is set to be at most 50% of the irradiation diameter (radius) of the laser beam L2. Thereby, the linearity of the detection signal accompanying the angle change of the deflection members 7 and 7A can be ensured. In addition, even when affected by external disturbances such as changes over time or vibrations, it is possible to prevent the irradiation area of the laser beam L2 from exceeding the boundary lines of the light receiving units 442a to 442d and being outside the detectable range.

[0056] In Figure 7 the description, the case where the laser beam L2 passing through the light guide unit 723 moves in the first direction D1 is shown. Similarly, when the laser beam L2 moves in the second direction D2, the inclination of the deflection member 7 with respect to the second direction D2 can be detected.

[0057] Regarding the inclination detection device 4 of the present embodiment, since the optical axis A and the optical axis B are parallel, the amount of movement of the position of the laser beam L2 does not depend on the distance from the light exit surface 722a of the light guide unit 723 to the detection unit 441. Therefore, for the detection unit 441, it is only necessary that the center point O of the light receiving units 442a to 442d is arranged on the axis P. Therefore, regarding the arrangement of the detection unit 441, the scanning device 2 has a high degree of freedom.

[0058] In addition, the optical axis A and the center point O do not necessarily have to coincide. By previously obtaining the position (center of gravity position) of the optical axis B of the laser L2 detected by the detection unit 441 in a state where the deflection member 7 is not inclined as a reference position, the relationship between the position of the optical axis B of the laser L2 detected by the detection unit 441 and the inclination of the deflection member 7 can be corrected in advance.

[0059] (Embodiment 2) Next, Embodiment 2 will be described. In Embodiment 2, the light selection unit 721a2 is a rectangular region instead of a circular region. Therefore, the laser L2 passing through the light selection unit 721a2 has a rectangular beam cross-sectional shape. Figure 8 The irradiation area of the laser L24 irradiated onto the light receiving unit 442 via the light selection unit 721a2 set to be substantially square is shown.

[0060] In this way, when using the rectangular laser L24, when the optical axis B (or the center of gravity) of the laser L24 moves in the first direction D1 or the second direction D2, the decrease in the light receiving intensity of the light receiving units 442a to 442d on the opposite side of the moving direction of the optical axis B is reduced. Therefore, the linearity of the relationship between the displacement amount of the optical axis B and the change in the light receiving intensity detected by the light receiving units 442a to 442d can be improved. Therefore, the inclination amount of the deflection member 7 can be obtained more accurately.

[0061] (Embodiment 3) Next, Embodiment 3 of the light selection unit 721a2 will be described. In a plan view of the reflection surface 721a, the light selection unit 721a2 of the deflection member 7 is formed in a rectangular shape. Figure 9 It is a schematic diagram for observing the change in the intensity distribution of the laser L25 in the optical path from the light source 41 to the detection unit 441 in two orthogonal directions. The laser L25 emitted from the light source 41 has different divergence angles in two orthogonal directions. That is, the laser L25 has a substantially elliptical beam cross-sectional shape. In Figure 9 the example, the changes in the intensity distributions P1a and P1b when observing the major axis direction of the laser L25 from the side along the first direction D1, and the changes in the intensity distributions P2a and P2b when observing the minor axis direction of the laser L25 from the side along the second direction D2 are shown.

[0062] The component L25b in the minor axis direction of the laser L25 has a distribution concentrated on the optical axis A side compared to the component L25a in the major axis direction. The light selection unit 721a2 of Embodiment 3 has a rectangular region with an opening width where the component L25b in the minor axis direction is larger than the component L25a in the minor axis direction. Figure 8The irradiation area of the laser beam L25 irradiated onto the light-receiving part 442 via the optical selection part 721a2 of Embodiment 3 is shown. In addition, the light and dark within the irradiation area of the laser beam L25 indicates the strength of the received light intensity. In this way, by narrowing the opening width in the direction where the intensity of the laser beam L25 is relatively uniform and widening the opening width in the direction where the intensity of the laser beam L25 is biased toward the optical axes A and B, it is possible to adjust so that the total amounts of the received light intensities in the first direction D1 and the second direction D2 are equal or close. Thereby, when the optical axis B of the laser beam L25 detected by the detection part 441 moves, the sensitivity difference between the first direction D1 and the second direction D2 can be reduced.

[0063] In addition, when the opening shape of the optical selection part 721a2 is rectangular, the orientation of the optical selection part 721a2 can be set such that the major axis direction of the opening shape coincides with the direction in which the light intensity of the laser beam L25 is weak.

[0064] (Embodiment 4) Next, Embodiment 4 will be described. In the plan view of the reflecting surface 721a, the optical selection part 721a2 of the deflecting member 7 of Embodiment 4 is formed in a substantially rectangular shape that is curved with each side recessed toward the axis P in a concave shape. Figure 10 The irradiation area of the laser beam L26 irradiated onto the light-receiving part 442 via the optical selection part 721a2 that is set in a substantially rectangular shape with each side recessed in a concave shape is shown. In this way, the laser beam L2 passing through the optical selection part 721a2 has a beam cross-sectional shape that is substantially rectangular with each side recessed in a concave shape toward the optical axes A and B.

[0065] (Embodiment 5) Next, Embodiment 5 will be described. In the plan view of the reflecting surface 721a, the optical selection part 721a2 of the deflecting member 7 of Embodiment 5 is formed in a substantially rectangular shape that is curved with each side protruding radially outward relative to the axis P in a convex shape. Figure 10 The irradiation area of the laser beam L27 irradiated onto the light-receiving part 442 via the optical selection part 721a2 that is set in a substantially rectangular shape with each side protruding in a convex shape is shown. In this way, the laser beam L2 passing through the optical selection part 721a2 has a beam cross-sectional shape that is substantially rectangular with each side protruding in a convex shape toward the optical axes A and B.

[0066] As described above, in the present embodiment, the tilt detection method of the tilt detection device 4 has been described. The tilt detection device 4 includes: a deflection member 7 having a reflecting surface 721a that reflects the laser beam L1 (first light) and a light guiding portion 723 that guides the laser beam L2 (second light) from one of the reflecting surface 721a side and the opposite side of the reflecting surface 721a to the other, and the angle of the deflection member 7 is controlled; and a detection unit 441 that detects the laser beam L2 (second light) guided by the light guiding portion 723. In this tilt detection method, the light guiding portion 723 displaces the position of the optical axis A of the laser beam L2 (second light) corresponding to the tilt of the deflection member 7, and the control unit 11 detects the tilt of the deflection member 7 based on the position of the optical axis B of the laser beam L2 (second light) detected by the detection unit 441.

[0067] According to such a configuration, the tilt detection device 4 and the tilt detection method can simply and highly accurately detect the tilt state of the controlled member (deflection member 7 or the deflection member 7A described later).

[0068] (Embodiment 6) Next, the scanning device 2 of Embodiment 6 will be described. Figure 11 FIG. 10 is an enlarged sectional view of a part of the structure of the scanning device 2 of Embodiment 6, which is equivalent to the IV-IV sectional view of Embodiment 1. The light source device 1 of Embodiment 6 has a deflection member 7A instead of the deflection member 7. In addition, in the structure of the deflection member 7A, the description of the same structure as that of the deflection member 7 is omitted or simplified.

[0069] The deflection member 7A has a light selection portion 712a2 on the reflecting surface 721a with an opening diameter (or opening width) larger than that of the light selection portion 712a2 of the light selection unit 712a2 in Embodiment 1. The light selection portion 712a2 provided on the reflecting surface 721a of the deflection member 7A allows the laser beam L2 guided as the detection light to pass through and guides it into the main body portion 721 on the emission surface 722a side and the supported portion 722.

[0070] In addition, the deflection member 7A has a light selection portion 722a1 (second light selection portion) and a light selection portion 722a2 (first light selection portion) on the emission surface 722a. The light selection portion 722a1 reflects or absorbs the laser beam L2. In addition, the light selection portion 722a2 allows the laser beam L2 to pass through. The light selection portion 722a1 is, for example, a metal reflection film or a dichroic filter. In addition, the light selection portion 722a2 is, for example, a dichroic filter or a region where the supported portion 722 is exposed (that is, a region where nothing is provided).

[0071] The region of the light selection portion 722a2 provided in the exit surface 722a is formed as a circular region having a diameter smaller than the beam cross-sectional diameter of the laser beam L2 transmitted through the reflection surface 721a of the deflection member 7A. Therefore, the light selection portion 722a2 reduces the diameter of the laser beam L2 and allows it to pass through. The laser beam L2 incident on the region of the light selection portion 722a2 from the supported portion 722 side is emitted from the exit surface 722a toward the detection portion 441 side.

[0072] Regarding the tilt detection device 4, in the case of using the deflection member 7A, the light selection portion 722a2 that reduces the laser beam L2 is provided at a position closer to the detection portion 441 side. Therefore, even when the deviation width between the optical axis B and the axis P is large, or when the laser beam L2 transmitted through the light guide portion 723 includes a diffusion component, it is possible to reduce the detection error of the position of the optical axis B and more accurately obtain the tilt of the deflection member 7A.

[0073] (Embodiment 7) Next, the light source device 1 of Embodiment 7 will be described. Figure 12 FIG. is a perspective view of the yoke member 5G of Embodiment 7. The light source device 1 has a yoke member 5G in the structure of the scanning device 2, instead of the yoke member 5 described in Embodiment 1. In addition, in the description of Embodiment 7, the same components as those of the light source device 1 of Embodiment 1 are denoted by the same reference numerals, and their description is omitted or simplified.

[0074] The yoke member 5G has a structure in which the second base member 55-2 is omitted from the structure of the yoke member 5. Specifically, the yoke member 5G has a first yoke 51G and a second yoke 52G, and the second yoke 52G is arranged at a rotationally symmetric position about the axis P different from that of the first yoke 51G. The first yoke 51G has a pair of first arm members 53, 53 and a base member 55G. In addition, the second yoke 52G has a pair of second arm members 54, 54 and a base member 55G. The base member 55G has the aforementioned first base member 55-1. The connection method of the first arm member 53 and the second arm member 54 to the first base member 55-1 is the same as that of the yoke member 5 of Embodiment 1.

[0075] The first magnetic circuit C1 in the yoke member 5G forms a closed loop by a pair of first arm members 53, the base member 55G (first base member 55-1), and a gap G provided between the first end portions 532a of the first arm members 53. In addition, the second magnetic circuit C2 forms a closed loop by a pair of second arm members 54, the base member 55G (first base member 55-1), and a gap G provided between the second end portions 542a of the second arm members 54.

[0076] Figure 13 is Figure 12Cross-sectional view taken along line XIII-XIII of the yoke member 5G. Similar to the cross-section taken along line V-V of the base member 55 of Embodiment 1 (see Figure 5 ), the first magnetic circuit C1 and the second magnetic circuit C2 bypass around the opening 553 and cross each other around the opening 553. Therefore, the first magnetic circuit C1 and the second magnetic circuit C2 have substantially the same magnetic path length within the base member 55. In addition, the magnetic path length of the magnetic path including a pair of first arm members 53, 53 and the gap G in the first magnetic circuit C1 is equal to the magnetic path length of the magnetic path including a pair of second arm members 54, 54 and the gap G in the second magnetic circuit C2. Therefore, the first yoke 51G and the second yoke 52G are connected in such a way that a part of the magnetic paths cross each other and the magnetic path lengths of the closed loops are equal.

[0077] In this way, due to the structure of the yoke member 5G, the entire yoke member 5G can be made small in size.

[0078] (Embodiment 8) Next, the light source device 1 of Embodiment 8 will be described. Figure 14 is a cross-sectional view in which the base member 55H, the first arm member 53, and the second arm member 54 of the yoke member 5H of Embodiment 8 are cut at a position corresponding to the cross-section position taken along line XIII-XIII of the yoke member 5G of Figure 12 . In addition, in the description of Embodiment 8, for the same structures as those of the light source device 1 of Embodiment 7, the same reference numerals are given, and their descriptions are omitted or simplified.

[0079] The light source device 1 of Embodiment 8 has a yoke member 5H in the structure of the scanning device 2 instead of the yoke member 5G of Embodiment 7. That is, the yoke member 5H has a base member 55H instead of the base member 55G. This base member 55H has the same structure as the first base member 55-1, but has a rectangular opening 553H such as a square that penetrates in the thickness direction of the base member 55H instead of the circular opening 553.

[0080] Since the yoke member 5H has a rectangular opening 553H, a large irradiation area of the laser L2 irradiated onto the rectangular light-receiving portion 442 can be ensured. In addition, in the case of irradiating the laser L24 to L27 having an approximately rectangular shape shown in Figure 8 and Figure 10 , the detection range of the light-receiving portion 442 can also be fully utilized. Therefore, the moving range of the optical axis B of the laser L2 can be increased with respect to the tilt angle of the deflection member 7, and the detection sensitivity of the light-receiving portion 442 can be improved.

[0081] (Embodiment 9) Next, the light source device 1 of Embodiment 9 will be described. Figure 15This is a perspective view of the yoke member 5I of Embodiment 9. In the structure of the scanning device 2, the light source device 1 has a yoke member 5I instead of the yoke member 5 described in Embodiment 1. In addition, in the description of Embodiment 9, for the same structures as those of the light source device 1 in Embodiment 1, the same reference numerals are used, and their descriptions are omitted or simplified.

[0082] Regarding the structure of the yoke member 5, the yoke member 5I has a base member 55I formed in a quadrilateral plate shape instead of the base member 55. The base member 55I is configured as a base member corresponding to the first base member 55-1 of the base member 55. Specifically, the yoke member 5I has a first yoke 51I and a second yoke 52I arranged at a rotationally symmetric position about the axis P different from the first yoke 51I. The first yoke 51I respectively has a pair of first arm members 53, 53 and the base member 55I. In addition, the second yoke 52I has a pair of second arm members 54, 54 and the base member 55I. The connection methods of the first arm member 53 and the second arm member 54 to the cutout portion 551 of the base member 55I are the same as those of the yoke member 5 in Embodiment 1.

[0083] The first magnetic circuit C1 in the yoke member 5I forms a closed loop by a pair of first arm members 53, the base member 55I, and the gap G provided between the first end portions 532a of the first arm members 53. In addition, the second magnetic circuit C2 forms a closed loop by a pair of second arm members 54, the base member 55I, and the gap G provided between the second end portions 542a of the second arm members 54.

[0084] In addition, Figure 16 is Figure 15 a XVI-XVI cross-sectional view of the yoke member 5I. Similar to the V-V cross-section of the base member 55 in Embodiment 1 (refer to Figure 5 ), the first magnetic circuit C1 and the second magnetic circuit C2 bypass around the opening portion 553 and cross at the periphery of the opening portion 553. Therefore, the first magnetic circuit C1 and the second magnetic circuit C2 have magnetic path lengths of substantially the same length within the base member 55. In addition, the magnetic path lengths of the magnetic paths including the pair of first arm members 53, 53 and the gap G in the first magnetic circuit C1 are equal to the magnetic path lengths of the magnetic paths including the pair of second arm members 54, 54 and the gap G in the second magnetic circuit C2. Therefore, the first yoke 51I and the second yoke 52I are connected in such a way that a part of the magnetic paths cross and the magnetic path lengths of the closed loops are equal.

[0085] (Embodiment 10) Next, the light source device 1 of Embodiment 10 will be described. Figure 17It is a perspective view of the yoke member 5J of Embodiment 10. In the structure of the scanning device 2, the light source device 1 has a yoke member 5J instead of the yoke member 5 described in Embodiment 1. In addition, in the description of Embodiment 10, for the same structures as those of the light source device 1 of Embodiment 1, the same reference numerals are given, and their descriptions are omitted or simplified.

[0086] The yoke member 5J has a first yoke 51J and a second yoke 52J disposed at a rotationally symmetric position around an axis P different from that of the first yoke 51J. The first yoke 51J has a pair of first arm members 53, 53 and a base member 55J respectively. In addition, the second yoke 52J has a pair of second arm members 54, 54 and a base member 55J. The base member 55J has the same shape as the aforementioned second base member 55-2 and has a disc shape. The first arm member 53 and the second arm member 54 are fixed in a state where the respective end portions (the first base end portion 531a of the first arm member 53 and the second base end portion 541a of the second arm member 54) are in contact with one surface 55J1 of the base member 55J. In addition, the first arm member 53 and the second arm member 54 are fixed to the base member 55J by fixing members (not shown).

[0087] The first magnetic circuit C1 in the yoke member 5J forms a closed loop by a pair of first arm members 53, the base member 55J, and a gap G provided between the first end portions 532a of the first arm members 53. In addition, the second magnetic circuit C2 forms a closed loop by a pair of second arm members 54, the base member 55J, and a gap G provided between the second end portions 542a of the second arm members 54.

[0088] The first magnetic circuit C1 and the second magnetic circuit C2 in the base member 55J are the same as the V-V cross section (refer to Figure 5 ) of the base member 55 of Embodiment 1, bypass around the opening 553, and cross at the periphery of the opening 553 (not shown). Therefore, the first magnetic circuit C1 and the second magnetic circuit C2 have substantially the same magnetic path length in the base member 55. In addition, the magnetic path length of the magnetic path including the pair of first arm members 53, 53 and the gap G in the first magnetic circuit C1 is equal to the magnetic path length of the magnetic path including the pair of second arm members 54, 54 and the gap G in the second magnetic circuit C2. Therefore, the first yoke 51J and the second yoke 52J are connected in such a way that a part of the magnetic path crosses and the magnetic path lengths of the closed loops are equal.

[0089] In this way, with the structure of the yoke member 5J, the entire yoke member 5J can be made small.

[0090] As described above, the light guide unit 723 displaces the position of the optical axis B of the second light (laser L2) corresponding to the inclination of the deflection members 7 and 7A, and the control unit 11 detects the inclination of the deflection members 7 and 7A based on the optical axis position of the second light detected by the detection unit 441. The movement width of the laser L2 incident on the detection unit 441 is smaller than the case where the deflection members 7 and 7A reflect it. Therefore, the detection unit 441 can be made small-sized. As a result, the inclination detection device 4 can easily and highly accurately detect the inclination state of the member to be controlled.

[0091] In addition, the yoke members 5, 5G to 5J will be described. The yoke members 5, 5G to 5J include first yokes 51, 51G, 51I, 51J and second yokes 52, 52G, 52I, 52J. The first yokes 51, 51G, 51I, 51J have a pair of first end portions 532a facing each other, and the second yokes 52, 52G, 52I, 52J have a pair of second end portions 542a facing each other in a direction different from the facing direction of the first end portions 532a. In each of the yoke members 5, 5G to 5J, the first yokes 51, 51G, 51I, 51J and the second yokes 52, 52G, 52I, 52J are connected in such a way that a part of the magnetic circuit crosses and the magnetic circuit lengths are equal. Therefore, the members constituting the first magnetic circuit C1 and the second magnetic circuit C2 are made common, and thus, the structures of the yoke members 5, 5G to 5J and the scanning device 2 can be made small-sized.

[0092] The description of the embodiment of the present disclosure is completed above, and the embodiments of the present disclosure are not limited to this embodiment.

[0093] For example, when the rotation direction of the deflection members 7 and 7A is one direction, the detection unit 441 may be a two-quadrant photodetector. In addition, the detection unit 44 may also be an image sensor.

[0094] In addition, the light selection unit 721a2 may also be configured to transmit both the laser L1 and the laser L2.

[0095] In addition, the laser L2 may be irradiated onto the reflection surface 721a of the deflection members 7 and 7A together with the laser L1 as ranging light. In this case, the optical axis A of the laser L2 may not coincide with the axis P of the scanning device 2. As long as the light guide unit 723 is configured such that the refraction angle of the laser L2 incident from the reflection surface 721a changes according to the inclination of the deflection members 7 and 7A, the optical axis B of the laser L2 after exiting from the light guide unit 723 changes corresponding to the inclination of the deflection members 7 and 7A. Therefore, even when the laser L2 is guided together with the laser L1 as ranging light, the inclination state of the deflection members 7 and 7A (member to be controlled) can be easily and highly accurately detected.

[0096] In addition, Figure 1The positional relationship between the light source 41 and the detection unit 441 shown can also be reversed. That is, the laser beam L2 can also be incident from the surface shown as the emission surface 722a of the deflection members 7, 7A (refer to Figure 6 etc.), and be guided in the optical path that exits from the side of the reflection surface 721a.

[0097] In addition, the detection unit 441 can also be provided between the deflection member 7 and the base member 55. Thereby, the overall configuration of the scanning device 2 can be made compact.

[0098] In addition, the distance measurement optical system 12 of the present disclosure can also be used to guide light used for purposes other than distance measurement light.

[0099] The configuration of the present disclosure is exemplified as follows.

[0100] [1] An inclination detection device, comprising: A deflection member, the angle of which is controlled, having a reflection surface that reflects first light and a light guiding portion that guides second light from one of the side of the reflection surface and the surface opposite to the reflection surface to the other, A detection unit that detects the second light guided by the light guiding portion, and A control unit; The light guiding portion displaces the optical axis position of the second light corresponding to the inclination of the deflection member, The control unit detects the inclination of the deflection member based on the optical axis position of the second light detected by the detection unit.

[0101] [2] The inclination detection device according to [1], The light guiding portion is an optical member disposed at the rotation center point of the reflection surface, The incident surface and the emission surface of the second light in the light guiding portion are parallel surfaces.

[0102] [3] The inclination detection device according to [2], The reflection surface has a light selection portion that reflects the first light and transmits the second light.

[0103] [4] The inclination detection device according to [3], The light selection portion is formed to have a diameter smaller than the beam cross-sectional diameter of the second light incident on the deflection member.

[0104] [5] The inclination detection device according to [1], The second light is inclination detection light incident from the side of the reflection surface, The first light is distance measurement light guided in such a way that it is incident and reflected at an angle different from that of the second light incident on the light guiding portion, The detection unit is disposed on the opposite side of the reflection surface with respect to the deflection member.

[0105] [6] The tilt detection device according to [5], the tilt detection device further having: A light source that emits the second light; and A second deflection member that reflects the second light emitted from the light source toward the deflection member.

[0106] [7] The tilt detection device according to [1], The deflection member has a rotation center point on the reflection surface side, The reflection surface has a first light selection portion that reflects the first light and transmits the second light, The light guide portion has a second light selection portion on the surface on the side away from the rotation center point that reduces the diameter of the second light.

[0107] [8] The tilt detection device according to [1], The detection unit is a quadrant photodetector, The control unit detects the tilt of the deflection member based on the light reception intensity of the second light detected by each light reception portion of the quadrant photodetector.

[0108] [9] A tilt detection method, which is a tilt detection method of a tilt detection device, the tilt detection device having: A deflection member whose angle is controlled, having a reflection surface that reflects the first light and a light guide portion that guides the second light from one side of the reflection surface and the opposite side of the reflection surface to the other, A detection unit that detects the second light guided by the light guide portion, and A control unit; The light guide portion displaces the optical axis position of the second light corresponding to the tilt of the deflection member, The control unit detects the tilt of the deflection member based on the optical axis position of the second light detected by the detection unit.

[0109] Description of Reference Numerals 1 Light source device, 2 Scanning device, 3 Mirror control device, 4 Tilt detection device, 5, 5G to 5J Yoke members, 6 Support member, 7, 7A Deflection members, 11 Control unit, 12 Distance measurement optical system, 13 Optical system drive circuit, 14 Scanning device drive circuit, 15 Angle sensor circuit, 41 Light source, 42 Lens, 43 Deflection member, 44 Detection circuit board, 51, 51G, 51I, 51J First yoke, 52, 52G, 52I, 52J Second yoke, 53 First arm member, 54 Second arm member, 55, 55G~55J Base member, 55-1 First base member, 55-2 Second base member, 55J1 surface, 55a Side edge, 61 Opening, 62 Recess, 63 Outer peripheral surface, 71 Permanent magnet, 72 Reflector, 441 Detection part, 442, 442a~442d Light receiving part, 531 Main trunk, 531a First base end, 532 Protrusion, 532a First end, 533 Yoke coil, 553H Opening, 541 Main trunk, 541a Second base end, 542 Protrusion, 542a Second end, 543 Yoke coil, 551 Cutout, 551a Inner surface, 551b Inner surface, 552 Retreating part, 553 Opening, 554 Opening, 621 Bottom surface, 631 Flange part, 711 Opening, 712a2 Light selection part, 721 Main body part, 721a Reflecting surface, 721a1 optical selection unit, 721a2 optical selection unit, 722 supported part, 722a exit surface, 722a1 optical selection unit, 722a2 optical selection unit, 723 light guide unit, Optical axes A and B, C1 First magnetic circuit, C2 Second magnetic circuit, D1 First direction, D2 Second direction, G Gap, L1 (L11, L12) Laser, L2 (L21~L27, L25a, L25b) Laser, L3 Reflected light, O Center point, P Axis, Q Rotation center point.

Claims

1. An inclination detection device, characterized in that, comprising: a deflection member whose angle is controlled, having a reflecting surface for reflecting first light and a light guiding portion for guiding second light from one of the surface on the reflecting surface side and the surface opposite to the reflecting surface side to the other, a detection unit for detecting the second light guided by the light guiding portion, and a control unit; the light guiding portion displaces the optical axis position of the second light corresponding to the inclination of the deflection member, the control unit detects the inclination of the deflection member based on the optical axis position of the second light detected by the detection unit.

2. The inclination detection device according to claim 1, characterized in that the light guiding portion is an optical member disposed at the rotation center point of the reflecting surface, the incident surface and the exit surface of the second light in the light guiding portion are parallel surfaces.

3. The inclination detection device according to claim 2, characterized in that the reflecting surface has a light selection portion for reflecting the first light and transmitting the second light.

4. The inclination detection device according to claim 3, characterized in that the light selection portion is formed to have a diameter smaller than the beam cross-sectional diameter of the second light incident on the deflection member.

5. The inclination detection device according to claim 1, characterized in that the second light is inclination detection light incident from the reflecting surface side, the first light is ranging light guided in a manner of being incident and reflected at an angle different from that of the second light incident on the light guiding portion, the detection unit is disposed on the side opposite to the reflecting surface with respect to the deflection member.

6. The tilt detection device according to claim 5, characterized in that, The inclination detection device further comprises: a light source for emitting the second light; and a second deflection member for reflecting the second light emitted from the light source toward the deflection member.

7. The inclination detection device according to claim 1, characterized in that the deflection member has a rotation center point on the reflecting surface side, the reflecting surface has a first light selection portion for reflecting the first light and transmitting the second light, the light guiding portion has a second light selection portion for reducing the diameter of the second light on the surface on the side away from the rotation center point.

8. The inclination detection device according to claim 1, characterized in that the detection unit is a quadrant photodetector, the control unit detects the inclination of the deflection member based on the light reception intensity of the second light detected by each light receiving portion of the quadrant photodetector.

9. A tilt detection method, which is a tilt detection method of a tilt detection device, is characterized in that, The inclination detection device has: a deflection member whose angle is controlled, having a reflecting surface for reflecting first light and a light guiding portion for guiding second light from one of the surface on the reflecting surface side and the surface opposite to the reflecting surface side to the other, a detection unit for detecting the second light guided by the light guiding portion, and a control unit; the light guiding portion displaces the optical axis position of the second light corresponding to the inclination of the deflection member, the control unit detects the inclination of the deflection member based on the optical axis position of the second light detected by the detection unit.

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