Magnetorheological polishing equipment and method based on ribbon size adjustment

Abstract

The present invention relates to the field of optical processing technology, and in particular to a magnetorheological polishing device and method based on ribbon size adjustment. The device comprises a robot, a control unit, an actuator group, a magnetorheological processing module, and a ribbon measuring assembly. The magnetorheological processing module is arranged at the free end of the robot via the actuator group. The robot drives a polishing wheel in the magnetorheological processing module to process an optical element using magnetorheological fluid as a medium, and the ribbon measuring assembly measures the ribbon thickness of the magnetorheological fluid during the processing. In the method, the ribbon measuring assembly measures the real-time change of the ribbon thickness of the magnetorheological fluid during the magnetorheological processing, thereby performing real-time regulation and control on a supply system, a nozzle, and the actuator group, thereby achieving real-time constant control of a removal function.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical processing, and in particular relates to a magnetorheological polishing device and method based on ribbon size adjustment. Background Art

[0002] Magnetorheological finishing (MRF) is an advanced optical manufacturing technology that has been developed in recent years. It offers numerous advantages, including stable removal function, controllable edge effects, minimal subsurface damage, no photocopying, strong reshaping capabilities, and high machining accuracy. Consequently, MRF has garnered widespread attention in high-precision optical processing. Existing MRF machining centers primarily integrate polishing components onto CNC machine tools. However, CNC machine tools have limitations (such as low degrees of freedom, large footprint, and high cost) that limit the deviation of aspheric surfaces and hinder precise position control along the surface normal. In response to these shortcomings of CNC machine tools, researchers have introduced six-degree-of-freedom industrial robots into the field of optical processing in recent years. Six-degree-of-freedom industrial robots have the advantages of high degrees of freedom, small footprint, large processing range, and low cost, which make up for the shortcomings of CNC machine tools. Therefore, when the polishing component is integrated into the industrial robot, theoretically, high-precision processing of large-aperture complex curved optical components can be achieved. However, due to the influence of factors such as processing, assembly, load, trajectory planning, and reduction ratio, the robot end execution accuracy is low, and the polishing gap changes greatly during the processing. At the same time, magnetorheological polishing technology is an optical processing technology with high certainty of the removal function. It has high requirements for the change of the polishing gap during the polishing process. Generally, the polishing gap of the magnetorheological CNC machining center changes in tens of microns (PV<0.1mm), while the trajectory accuracy of common commercial robots is generally in the sub-millimeter to millimeter range, which cannot meet the requirements of magnetorheological polishing technology for polishing gap changes during high-precision polishing.

[0003] Force-position control is currently gaining popularity as a new approach to robotic constant-force controlled polishing. A common application involves placing a force sensor between the machining tool and the robot. The force sensor is first calibrated with gravity to ensure measurement accuracy. The position error is calculated by measuring force changes. This position error is then compensated for using the robot itself or other motion compensation mechanisms to achieve constant force control. Efficient machining of large-aperture optical components requires magnetorheological (MR) machining equipment with large polishing wheels. These MR machining modules typically weigh hundreds of kilograms. However, for these MR machining modules, the force variation caused by the robot's position error is only tens of Newtons. High-precision machining requires maintaining a constant force of a few Newtons or even a fraction of a Newton. This requires measurement equipment such as force sensors to achieve an absolute accuracy of one part per ten thousand. Furthermore, the force sensor must be capable of varying speed and position. Force sensors that meet these requirements are often extremely expensive, significantly increasing the cost of the equipment. Summary of the Invention

[0004] In view of this, the present invention aims to provide a magnetorheological polishing device and method based on ribbon size adjustment. The ribbon measuring component measures the real-time change of the ribbon thickness of the magnetorheological fluid during the magnetorheological processing, and the supply system, nozzle and actuator in the magnetorheological processing module are regulated in real time, thereby realizing real-time constant control of the removal function.

[0005] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0006] A magnetorheological polishing device based on ribbon size adjustment includes a robot, a control unit, an actuator group, a magnetorheological processing module, and a ribbon measuring component. The actuator group is arranged at the free end of the robot, and the magnetorheological processing module is arranged at the output end of the actuator group. The robot drives the polishing wheel in the magnetorheological processing module to process the optical element using magnetorheological fluid as the medium, and the ribbon measuring component measures the thickness of the magnetorheological fluid ribbon during the processing. The control unit includes a time calculation module for calculating the measurement time of the ribbon measuring component and the adjustment time of the magnetorheological processing module, and adjusting the ribbon measuring component and the magnetorheological processing module according to the measurement time and adjustment time; a conversion relationship module for A first conversion relationship is obtained by fitting the ribbon thickness with a first position of a supply system in a magnetorheological processing module, a second conversion relationship is obtained by fitting the ribbon thickness with a second position of a nozzle in the magnetorheological processing module, and a third conversion relationship is obtained by fitting the ribbon thickness with an actuator group output of an actuator group. A processing program module obtains a processing program based on a removal function generated when the magnetorheological processing module processes an optical element, and imports the processing program into the magnetorheological processing module. A real-time control module adjusts the first position according to the first conversion relationship, adjusts the second position according to the second conversion relationship, or adjusts the actuator group output to maintain the stability of the removal function when processing the optical element.

[0007] Furthermore, the ribbon measuring assembly includes a ribbon measuring device and an adjustment bracket; the ribbon measuring device is arranged on the adjustment bracket; the ribbon measuring device measures the thickness of the ribbon and transmits the measured ribbon thickness to the control unit; the adjustment bracket is arranged on the magnetorheological processing module to adjust the posture of the ribbon measuring device.

[0008] Furthermore, the magnetorheological processing module also includes a polishing motor, a magnet and a magnetorheological mounting frame; wherein, the magnetorheological mounting frame is arranged on the output end of the actuator group, the polishing wheel is arranged on the magnetorheological mounting frame, and the adjustment bracket is arranged on the magnetorheological mounting frame; the polishing motor is arranged on the magnetorheological mounting frame and connected to the polishing wheel, so that the polishing motor controls the rotation of the polishing wheel; the nozzle is installed on the magnetorheological mounting frame along the rotation direction of the polishing wheel through the nozzle mounting seat, and the nozzle mounting seat adjusts the installation angle of the nozzle, thereby changing the second position; the supply system delivers magnetorheological fluid to the nozzle; the magnet is arranged on the magnetorheological mounting frame and close to the working point of the polishing wheel, so that the magnetorheological fluid is affected by the magnetic field strength of the magnet to change the stiffness of the magnetorheological fluid, thereby processing the optical element.

[0009] Furthermore, the supply system includes a liquid pump, a supply mounting bracket, a supply motor and a ball screw; wherein, the supply motor and the ball screw are arranged on the supply mounting bracket, so that the supply motor drives the ball screw to rotate; the liquid pump is arranged on the ball screw, so that the ball screw drives the liquid pump to move, thereby changing the first position; the liquid pump transports magnetorheological fluid to the nozzle through a pipeline.

[0010] Furthermore, the nozzle mounting bracket includes a fixing bracket, a nozzle adjustment motor, a push rod and a nozzle support bracket; wherein, the fixing bracket is arranged on the magnetorheological mounting bracket, and an arc slide rail is arranged on the inner side wall of the fixing bracket; the nozzle adjustment motor is arranged on the magnetorheological mounting bracket, and one end of the push rod passes through the fixing bracket and is connected to the nozzle adjustment motor, so that the nozzle adjustment motor pushes the slider on the arc slide rail to move through the push rod; one end of the nozzle support bracket is arranged on the slider, and the nozzle is connected to the other end of the nozzle support bracket, so that the nozzle adjustment motor pushes the slider through the push rod, and then the nozzle support bracket drives the nozzle to move, thereby completing the adjustment of the second position.

[0011] Furthermore, the adjustment bracket includes a support frame, a longitudinal sliding assembly, a transverse sliding assembly and an axially rotating connecting plate; wherein, one end of the support frame is connected to the magnetorheological mounting frame; the longitudinal sliding assembly is arranged on the other end of the support frame, the transverse sliding assembly is arranged on the longitudinal sliding assembly, the axially rotating connecting plate is arranged on the transverse sliding assembly, and the ribbon measuring device is arranged on the axially rotating connecting plate, so that the axially rotating connecting plate drives the ribbon measuring device to rotate while the longitudinal sliding assembly and the transverse sliding assembly drive the ribbon measuring device to move longitudinally and transversely.

[0012] Furthermore, the ribbon measuring assembly, the robot, the actuator assembly, the nozzle mounting seat and the supply system are respectively connected to the control unit to form respective communication lines, so that the control unit receives and sends signals through the corresponding communication lines.

[0013] A magnetorheological polishing method with supply system position adjustment, based on the magnetorheological polishing device based on ribbon size adjustment provided by the present invention, comprises the following steps:

[0014] A1: Controlling the magnetorheological processing module to process the test optical element, and obtaining a first conversion relationship through the conversion relationship module during the processing;

[0015] A2: Setting a first variable range of the first position and obtaining a second variable range corresponding to the ribbon thickness according to the first conversion relationship; setting a maximum first position and obtaining a corresponding maximum ribbon thickness according to the first conversion relationship;

[0016] A3: The control time calculation module adjusts the ribbon measurement component and the magnetorheological processing module in combination with the maximum first position;

[0017] A4: The optical element to be processed is processed in combination with the second variable range, the maximum first position and the maximum ribbon thickness. During the processing, the real-time control module adjusts the first position in real time.

[0018] Furthermore, step A1 includes the following steps:

[0019] A11: Control the polishing wheel to process the test optical element at different polishing gaps, calculate the removal function volume removal rate corresponding to each processing point, and use the ribbon measurement component to measure the ribbon thickness at each processing position in real time. In the conversion relationship module, fit the fourth conversion relationship between the ribbon thickness and the removal function volume removal rate;

[0020] A12: Change the first position and control the polishing wheel to process the test optical element at different polishing gaps. Calculate the volume removal rate of the removal function corresponding to each processing point. During the processing, keep the ribbon thickness constant. Simultaneously record the changes in the polishing gap and the first position. In the conversion relationship module, fit the fifth conversion relationship between the volume removal rate of the removal function and the first position.

[0021] A13: Obtain the first conversion relationship according to the fourth conversion relationship and the fifth conversion relationship.

[0022] Furthermore, in step A4, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the ribbon measuring component is compared with the second variable range:

[0023] If the current ribbon thickness is within the second variable range, there is no need to adjust the current first position;

[0024] If the current ribbon thickness is not within the second variable range, the current first position needs to be adjusted:

[0025] If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjust the current first position to the maximum first position;

[0026] If the current ribbon thickness is less than the maximum ribbon thickness, adjust the current first position according to the following formula:

[0027] ;

[0028] in, Represents the first conversion relationship, Indicates the current ribbon thickness, Indicates the current first position.

[0029] A nozzle-adjustable magnetorheological polishing method, based on the magnetorheological polishing device based on ribbon size adjustment provided by the present invention, comprises the following steps:

[0030] B1: Controlling the magnetorheological processing module to process the test optical element, and obtaining the second conversion relationship through the conversion relationship module during the processing;

[0031] B2: Setting the third variable range of the second position and obtaining the fourth variable range corresponding to the ribbon thickness according to the second conversion relationship; setting the maximum second position and obtaining the corresponding maximum ribbon thickness according to the second conversion relationship;

[0032] B3: Control the time calculation module in combination with the maximum second position to adjust the ribbon measurement component and the magnetorheological processing module;

[0033] B4: The optical element to be processed is processed in combination with the fourth variable range, the maximum second position and the maximum ribbon thickness. During the processing, the real-time control module adjusts the second position in real time.

[0034] Furthermore, step B1 includes the following steps:

[0035] B11: Controlling the polishing wheel to process the test optical element at different polishing gaps, calculating the volume removal rate of the removal function corresponding to each processing point, and using the ribbon measurement component to measure the ribbon thickness at each processing position in real time. The sixth conversion relationship between the ribbon thickness and the volume removal rate of the removal function is obtained by fitting in the conversion relationship module;

[0036] B12: Keeping the ribbon thickness constant, change the second position individually at different polishing gaps. Calculate the volume removal rate of the removal function corresponding to each processing point. Perform processing at different positions on the test optical element while recording the changes in polishing gap and second position. Use the conversion relationship module to fit the seventh conversion relationship between the volume removal rate of the removal function and the second position.

[0037] B13: Obtain a second conversion level according to the sixth conversion relationship and the seventh conversion relationship.

[0038] Furthermore, in step B4, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the ribbon measuring component is compared with the fourth variable range:

[0039] If the current ribbon thickness is within the fourth variable range, there is no need to adjust the current second position;

[0040] If the current ribbon thickness is not within the fourth variable range, the current second position needs to be adjusted:

[0041] If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjust the current second position to the maximum second position;

[0042] If the current ribbon thickness is less than the maximum ribbon thickness, the current second position is adjusted according to the following formula:

[0043]

[0044] in, Represents the second conversion relationship, Indicates the current ribbon thickness, Indicates the current second position.

[0045] A magnetorheological polishing method with a variable removal function, based on a magnetorheological polishing device based on ribbon size adjustment provided by the present invention, comprises the following steps:

[0046] C1: Control the polishing wheel to process the test optical element with different polishing gaps to obtain the removal function. At the same time, the ribbon measurement component records the change in ribbon thickness at each processing point during the processing. The conversion relationship module then obtains the eighth conversion relationship between the volume removal rate of the removal function and the ribbon thickness at each processing point.

[0047] C2: Using the machining program module to obtain the machining program according to the removal function, and importing the machining program into the magnetorheological machining module;

[0048] C3: Setting the fifth variable range of the volume removal rate of the removal function, and obtaining the sixth variable range corresponding to the ribbon thickness according to the eighth conversion relationship; setting the maximum volume removal rate of the removal function, and obtaining the corresponding maximum ribbon thickness according to the eighth conversion relationship;

[0049] C4: Control time calculation module combined with maximum removal function volume removal rate to adjust ribbon measurement component and magnetorheological processing module;

[0050] C5: controlling the magnetorheological processing module to process the optical element to be processed according to the sixth variable range, and calculating the removal function of each processing point during the processing to obtain a variable removal function set, thereby generating a new processing program;

[0051] C6: Import the new processing program into the magnetorheological processing module, and then perform secondary processing on the optical component to be processed.

[0052] Furthermore, obtaining the eighth conversion relationship in step C1 includes the following steps:

[0053] C11: Control the polishing wheel to process the test optical element with different polishing gaps, and use the ribbon measurement component to record the change in ribbon thickness at each processing point, and fit the ribbon thickness in the conversion relationship module The ninth conversion relationship between the polishing gap;

[0054] C12: Control the polishing wheel to process different positions of the test optical element with different polishing gaps, calculate the removal function volume removal rate of each processing point, and fit the tenth conversion relationship between the removal function volume removal rate and the polishing gap in the conversion relationship module;

[0055] C13: In the conversion relationship module, the eighth conversion relationship is calculated based on the ninth conversion relationship and the tenth conversion relationship.

[0056] Furthermore, in step C5, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the ribbon measuring component is compared with the sixth variable range:

[0057] If the current ribbon thickness is within the sixth variable range, there is no need to adjust the current removal function;

[0058] If the current ribbon thickness is not within the sixth variable range, the current removal function needs to be calculated:

[0059] If the current ribbon thickness is less than the maximum ribbon thickness, the removal function of the current processing point is calculated by the following formula: :

[0060] ;

[0061] in, Indicates the volume removal rate of the removal function corresponding to the current processing point, Indicates the current ribbon thickness, Represents the eighth conversion relationship, Indicates the removal function of the current processing point; and then obtains the set of variable removal functions

[0062] Remove the function set The next processing parameter input generates a new processing control program;

[0063] If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, the removal function of the current processing point is calculated by the following formula, and then the variable removal function set is obtained: :

[0064] ;

[0065] in, Indicates the maximum ribbon thickness The corresponding maximum removal function volume removal rate;

[0066] Remove the function set The next time the processing parameters are input, a new processing control program is generated.

[0067] An actuator-regulated magnetorheological polishing method, based on the magnetorheological polishing device based on ribbon size regulation provided by the present invention, comprises the following steps:

[0068] D1: Control the polishing wheel to process the test optical element with different polishing gaps, and obtain the third conversion relationship in the conversion relationship module;

[0069] D2: Set the seventh variable range of the actuator group output and obtain the eighth variable range corresponding to the ribbon thickness according to the third conversion relationship; set the maximum actuator group output and obtain the corresponding maximum ribbon thickness according to the third conversion relationship;

[0070] D3: The control time calculation module adjusts the ribbon measurement component and the magnetorheological processing module in combination with the maximum actuator group output;

[0071] D4: The optical element to be processed is processed in combination with the eighth variable range, the maximum output of the actuator group, and the maximum ribbon thickness. During the processing, the real-time control module adjusts the output of the actuator group in real time until the magnetorheological processing module is controlled to traverse all processing points on the optical element to be processed.

[0072] Furthermore, step D1 includes the following steps:

[0073] D11: Control the polishing wheel to process the test optical element at different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, and use the ribbon measurement component to measure the ribbon thickness at each processing position in real time. In the conversion relationship module, fit the eleventh conversion relationship between the ribbon thickness and the volume removal rate of the removal function;

[0074] D12: Control the output of the actuator group to process the test optical element at different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, control the ribbon thickness to remain unchanged during the processing, and simultaneously record the changes in the polishing gap and the output of the actuator group. In the conversion relationship module, fit the twelfth conversion relationship between the volume removal rate of the removal function and the output of the actuator group;

[0075] D13: Obtain a third conversion relationship according to the eleventh conversion relationship and the twelfth conversion relationship.

[0076] Furthermore, in step D4, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the ribbon measuring component is compared with the eighth variable range:

[0077] If the current ribbon thickness is within the eighth variable range, there is no need to adjust the output of the current actuator group;

[0078] If the current ribbon thickness is not within the eighth variable range, the output of the current actuator group needs to be adjusted:

[0079] If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, the current actuator group output is adjusted to the maximum actuator group output;

[0080] If the current ribbon thickness is less than the maximum ribbon thickness, the output of the current actuator group is adjusted according to the following formula:

[0081]

[0082] in, Represents the third conversion relationship, Indicates the current ribbon thickness, Indicates the current output of the actuator group.

[0083] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0084] In the ribbon-size-adjustable magnetorheological polishing device and method described in the present invention, a ribbon measuring assembly performs non-contact measurement of the magnetorheological fluid ribbon thickness. While the magnetorheological polishing device is polishing a test optical element, the device collects information about different nozzle control parameters and supply system heights, along with their corresponding ribbon thicknesses. The corresponding relationships between the nozzle control parameters and supply system heights and the ribbon thicknesses are calculated. The optical element being processed is then processed using these corresponding relationships to determine the current ribbon thickness. The comparison of the ribbon thicknesses determines whether to adjust the nozzle control parameters or supply system height. Alternatively, the removal function for each processing point in the first processing step is combined into a variable removal function set, and the second processing step is performed in conjunction with the variable removal function set. This process does not require calibration steps for parameters such as gravity compensation, and will not be affected by the weight of the robotic arm and the magnetorheological processing equipment's magnetorheological processing module, the equipment's own operating accuracy, operating speed, posture, inertia, and other factors. It only performs real-time adjustment of the nozzle control parameters or the height change of the supply system, and more comprehensively and accurately realizes the measurement of the dimensional parameters of the magnetorheological medium ribbon under multi-factor coupling during the processing process, thereby adjusting the nozzle control parameters or the height of the supply system, without the need for other auxiliary operating mechanisms and without adding additional costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0085] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0086] Figure 1A schematic structural diagram of a magnetorheological polishing device based on ribbon size adjustment according to an embodiment of the present invention from one perspective;

[0087] Figure 2 A schematic structural diagram of the magnetorheological polishing device based on ribbon size adjustment according to an embodiment of the present invention from another perspective;

[0088] Figure 3 This is a schematic structural diagram of the ribbon measuring assembly according to an embodiment of the present invention;

[0089] Figure 4 A schematic structural diagram of the adjustment bracket according to an embodiment of the present invention;

[0090] Figure 5 A schematic diagram of the structure of the supply system according to an embodiment of the present invention;

[0091] Figure 6 A schematic structural diagram of a liquid pump according to an embodiment of the present invention;

[0092] Figure 7 This is a schematic structural diagram of the nozzle mounting base according to an embodiment of the present invention;

[0093] Figure 8 A schematic diagram of an actuator according to an embodiment of the present invention.

[0094] Description of reference numerals:

[0095] 1. Robot; 2. Control unit; 3. Actuator assembly; 4. Magnetorheological processing module; 5. Ribbon measurement assembly; 6. Polishing wheel; 7. Laboratory table; 8. Optical element to be processed; 9. Optical element to be tested; 10. Supply system; 11. Nozzle; 12. Polishing motor; 13. Magnet; 14. Magnetorheological mounting bracket; 15. Nozzle mounting base; 16. Connecting plate; 17. Drive belt; 18. Ribbon measurement device; 19. Adjustment bracket; 20. Support frame; 21. Longitudinal sliding assembly; 22. Transverse sliding assembly; 23. Axial rotation connecting plate; 24. Liquid Pump; 25. Supply mounting bracket; 26. Supply motor; 27. Ball screw; 28. Slide rail; 29. ​​Mounting plate; 30. Liquid pump body; 31. Cooling chamber; 32. Magnetorheological fluid storage chamber; 33. Cooling water inlet; 34. Magnetorheological fluid inlet; 35. Cooling water outlet; 36. Magnetorheological fluid outlet; 37. Fixing bracket; 38. Nozzle adjustment motor; 39. Push rod; 40. Nozzle support bracket; 41. Arc slide rail; 42. Transition plate; 43. Cylinder body; 44. Cavity A; 45. Cavity B; 46. Oil scraper ring; 47. Moving piston. DETAILED DESCRIPTION

[0096] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.

[0097] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0098] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, features defined as "first", "second" and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0099] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0100] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0101] like Figures 1 to 2 As shown, the ribbon-size-adjustable magnetorheological polishing apparatus described in an embodiment of the present invention includes a robot 1, a control unit 2, an actuator assembly 3, a magnetorheological processing module 4, and a ribbon measurement assembly 5. The actuator assembly is secured to the free end of the robot 1, and the magnetorheological processing module 4 is secured to the output end of the actuator assembly 3. The robot 1 drives the polishing wheel 6 in the magnetorheological processing module 4 to process an optical component 8 or a test optical component 9 placed on a laboratory table 7 using magnetorheological fluid as a medium. The ribbon measurement assembly 5 measures the thickness of the magnetorheological fluid ribbon during the processing process.

[0102] The control unit 2 includes a time calculation module, a conversion relationship module, a processing program module, and a real-time control module. The time calculation module calculates the measurement time of the ribbon measurement assembly 5 and the adjustment time of the magnetorheological processing module 4, and adjusts the ribbon measurement assembly 5 and the magnetorheological processing module 4 based on the measurement and adjustment times. The conversion relationship module fits the ribbon thickness to the first position of the supply system 10 in the magnetorheological processing module 4 to obtain a first conversion relationship, fits the ribbon thickness to the second position of the nozzle 11 in the magnetorheological processing module 4 to obtain a second conversion relationship, and fits the ribbon thickness to the actuator group output of the actuator group 3 to obtain a third conversion relationship. In this embodiment of the present invention, the first position of the supply system 10 is defined as the vertical distance between the nozzle opening of the nozzle 11 and the working point of the supply system 10 (i.e., the liquid outlet of the supply system 10). A change in this vertical distance between the nozzle opening of the nozzle 11 and the working point of the supply system 10 causes a change in the flow rate, and thus a change in the removal function. The second position of the nozzle 11 is defined as the vertical distance between the nozzle opening of the nozzle 11 and the working point of the polishing wheel 6 (i.e., the point of closest approach between the polishing wheel 6 and the surface of the optical element 8 or test optical element 9 along the normal to the surface of the optical element 8 or test optical element 9). The processing program module generates a processing program based on the removal function generated by the magnetorheological processing module 4 when processing the optical element 8 or test optical element 9, and imports the processing program into the magnetorheological processing module 4. The real-time control module adjusts the first position according to the first conversion relationship, adjusts the second position according to the second conversion relationship, or adjusts the output of the actuator group to maintain a stable removal function during processing of the optical element.

[0103] The magnetorheological processing module 4 also includes a polishing motor 12, a magnet 13, and a magnetorheological mounting frame 14. The magnetorheological mounting frame 14 is fixedly mounted on the output end of the actuator assembly 3. The ribbon measuring assembly 5 is disposed on the magnetorheological mounting frame 14. Specifically, the ribbon measuring assembly 5 is mounted on the magnetorheological mounting frame 14 via a connecting plate 16. The polishing wheel 6 is mounted on the magnetorheological mounting frame 14 via the connecting plate 16. The polishing motor 12 is mounted on the magnetorheological mounting frame 14 and connected to the polishing wheel 6, so that the polishing motor 12 controls the rotation of the polishing wheel 6. Specifically, the output end of the polishing motor 12 is connected to the bearing of the polishing wheel 6 via a transmission belt 17, so that the polishing motor 12 controls the rotation of the polishing wheel 6. The nozzle 11 is mounted on the magnetorheological mounting frame 14 along the rotation direction of the polishing wheel 6 via a nozzle mounting bracket 15. The nozzle mounting bracket 15 adjusts the installation angle of the nozzle 11, thereby changing the second position of the nozzle opening of the nozzle 11. Supply system 10 delivers magnetorheological fluid to nozzle 11 via a pipe. Nozzle 11 sprays the magnetorheological fluid toward the working point of polishing wheel 6, allowing polishing wheel 6 to process optical element 8 or test optical element 9 using the magnetorheological fluid as a medium. Magnet 13 is mounted on magnetorheological mounting frame 14 via connecting plate 16, near the working point of polishing wheel 6. The magnetic field strength of magnet 13 influences the magnetorheological fluid, causing its stiffness to change.

[0104] The structure of the ribbon measuring component 5 is as follows Figure 3 As shown, it includes a ribbon measuring device 18 and an adjustment bracket 19. The ribbon measuring device 18 measures the thickness of the ribbon and transmits the measured ribbon thickness to the control unit 2. The adjustment bracket 19 is installed on the magnetorheological mounting bracket 14 in the magnetorheological processing module through the connecting plate 16, and is used to control and adjust the posture of the ribbon measuring device 18. When the magnetorheological processing equipment is polishing, the ribbon measuring component 5 does not contact the optical element. Due to the properties of the magnetorheological medium in the magnetic field: the magnetorheological medium will undergo elastic deformation after passing through the polishing gap, and the change in the polishing gap will be "copied" to the magnetorheological fluid satin after passing through the polishing gap, which is mainly manifested in the change in the ribbon thickness. Therefore, the change in the ribbon thickness of the magnetorheological fluid can reflect the change in the volume removal rate of the removal function.

[0105] In an embodiment of the present invention, the ribbon measuring device 18 preferably uses a line laser measuring instrument to measure the thickness of the ribbon. Specifically, the line laser measuring instrument emits a line beam on the magnetorheological fluid ribbon for measurement. The adjustment bracket 19 includes a support frame 20, a longitudinal sliding component 21, a transverse sliding component 22, and an axial rotation connecting plate 23. Among them, one end of the support frame 20 is connected to the magnetorheological mounting frame 14 through the connecting plate 16, the longitudinal sliding component 21 is arranged on the other end of the support frame 20, the transverse sliding component 22 is arranged on the longitudinal sliding component 21, the axial rotation connecting plate 23 is arranged on the transverse sliding component 22, and the ribbon measuring device 18 is arranged on the axial rotation connecting plate 23. When the axial rotation connecting plate 23 drives the ribbon measuring device 18 to rotate, the longitudinal sliding component 21 and the transverse sliding component 22 drive the ribbon measuring device 18 to move longitudinally and transversely.

[0106] Specifically, the installation process of the adjustment bracket 19 is as follows Figure 4 As shown in (a) to (c) in Figure 4 As shown in (a), the slide rail of the longitudinal sliding assembly 21 is fixedly mounted on the other end of the support frame 20; Figure 4 As shown in (b), the slider of the longitudinal sliding assembly 21 is fixedly connected to the slide rail of the transverse sliding assembly 22; Figure 4 As shown in (c), the axially rotating connecting plate 23 is fixedly connected to the slider of the transverse sliding assembly 22. The longitudinal sliding assembly 21 and the transverse sliding assembly 22 can now drive the axially rotating connecting plate 23 to move in the same direction as the longitudinal sliding assembly 21 and the transverse sliding assembly 22. A damped rotatable turntable is provided on the longitudinal sliding assembly 21, and the ribbon measuring device 18 is mounted on this rotatable turntable. The longitudinal sliding assembly 21, the transverse sliding assembly 22, and the axially rotating connecting plate 23 cooperate to adjust the position of the ribbon measuring device 18.

[0107] In the embodiment of the present invention, the structure of the supply system 10 is as follows Figure 1 and Figure 5As shown, it includes a liquid pump 24, a supply mounting bracket 25, a supply motor 26, and a ball screw 27. The supply motor 26 and the ball screw 27 are mounted on the supply mounting bracket 25. The supply motor 26 drives the ball screw 27 to rotate. The liquid pump 24 is disposed on the ball screw 27 so that the ball screw 27 drives the liquid pump 24 to move, thereby changing the first position. Specifically, the screw in the ball screw 27 is mounted on the supply mounting bracket 25 and is connected to the output end of the supply motor 26. The liquid pump 24 is connected to the nut of the ball screw 27. The supply motor 26 drives the screw to rotate. The nut cooperates with the screw to pull the liquid pump 24 along the screw direction, thereby changing the first position. The liquid pump 24 delivers magnetorheological fluid to the nozzle 11 through a pipeline. In an embodiment of the present invention, in order to enable the liquid pump 24 to move smoothly along the direction of the ball screw 27 without offset, a slide rail 28 parallel to the ball screw 27 is installed on both sides of the ball screw 27, and the liquid pump 24 is fixedly connected to the nut of the ball screw 27 and the sliders on the two slide rails 28 through the mounting plate 29, so that the supply motor 26 drives the ball screw 27, thereby driving the mounting plate 29 and the liquid pump 24 on the mounting plate 29 to move smoothly.

[0108] The structure of the liquid pump 24 is as follows Figure 6 As shown, the apparatus comprises a liquid pump body 30, a cooling chamber 31, and a magnetorheological fluid storage chamber 32. The liquid pump body 30 is used to supply magnetorheological fluid. In this embodiment of the present invention, a DFLD vertical multi-stage pump from Shanghai Dongfang Pump Industry Co., Ltd. is selected as the liquid pump body 30. The cooling chamber 31 is mainly used to store cooling water and cool the magnetorheological fluid. The magnetorheological fluid storage chamber 32 is mainly used to store magnetorheological fluid. When the liquid pump 24 is working, cooling water enters the cooling chamber 31 from the cooling water inlet 33 to cool the magnetorheological fluid, and the magnetorheological fluid enters the liquid pump body 30 from the magnetorheological fluid inlet 34 through the magnetorheological fluid storage chamber 32; the cooling water completes cooling the magnetorheological fluid in the cooling chamber 31 and is discharged from the cooling water outlet 35; the cooled magnetorheological fluid is output from the magnetorheological fluid outlet 36 and transported to the nozzle 11 through the pipeline. At this time, the outlet of the supply system 10 is the magnetorheological fluid outlet 36. Furthermore, the first position of the supply system 10 is the vertical distance between the nozzle opening of the nozzle 11 and the magnetorheological fluid outlet 36.

[0109] The structure of the nozzle mounting seat 15 is as follows Figure 7 As shown. Figure 7 (a) shows a schematic structural diagram of the nozzle 11 when it is installed on the nozzle mounting seat 15. Figure 7 (b) shows a schematic structural diagram when the nozzle 11 is not installed on the nozzle mounting seat 15. Figure 7As shown, the nozzle mount 15 includes a fixed frame 37, a nozzle adjustment motor 38, a push rod 39, and a nozzle support frame 40. The fixed frame 37 is L-shaped and fixed to the magnetorheological mount 14. A circular arc slide 41 is arranged on the inner side wall of the fixed frame 37. The nozzle adjustment motor 38 is mounted on the magnetorheological mount 14. One end of the push rod 39 passes through the bottom edge of the fixed frame 37 and connects to the output end of the nozzle adjustment motor 38. The nozzle adjustment motor 38 pushes the push rod 39, which in turn pushes the slider on the circular arc slide 41 along the circular arc slide 41. One end of the nozzle support frame 40 is fixed to the slider, and the nozzle 11 is mounted on the other end of the nozzle support frame 40. When the nozzle mount 15 is controlled to adjust the position of the nozzle 11, the nozzle adjustment motor 38 outputs a displacement, causing the push rod 39 to push the slider, which in turn causes the nozzle support frame 40 to move the nozzle 11, thereby adjusting the nozzle 11 to the second position.

[0110] In the embodiment of the present invention, the actuator group 3 is composed of two cascaded high-frequency actuators, that is, one high-frequency actuator is installed on the output end of the other high-frequency actuator, so that the output of the actuator group 3 is the sum of the output displacements of the two high-frequency actuators. In the embodiment of the present invention, the high-frequency actuator is preferably a SG model static pressure linear cylinder produced by Jilin Huakong Testing Instrument Co., Ltd. The structure of each high-frequency actuator is as follows: Figure 8 As shown, the robot comprises a transition plate 42, a cylinder 43, a cavity A 44, a cavity B 45, an oil scraper ring 46, and a moving piston 47. The transition plate 42 connects the end flange of the robot 1 to the cylinder 43 of the high-frequency actuator. Cavities A 44 and B 45 control the flow of hydraulic oil. The oil scraper ring 46 prevents the flow of hydraulic oil out of the cylinder 43. The moving piston 47 outputs position information. The moving piston 47 connects to the magnetorheological processing module 4 or another high-frequency actuator via the connecting plate 16, thereby outputting displacement to the magnetorheological processing module 4 or another high-frequency actuator.

[0111] The robot 1, ribbon measuring assembly 5, supply system 10, actuator assembly 3, and nozzle mounting bracket 15 are each connected to the control unit 2 to form a communication circuit, enabling the control unit 2 to receive and send signals via the corresponding communication circuit. Specifically, the control unit 2 is in communication with the supply motor 26 via a circuit. During operation, the control unit 2 issues control instructions to the supply motor 26, which drives the ball screw 27 to rotate. The rotating ball screw 27 drives the mounting plate 29 up and down, thereby changing the vertical position of the liquid pump 24 and thus the first position of the supply system 10. The control unit 2 controls the hydraulic oil pressure in the high-frequency actuator, thereby controlling the extension and retraction of the moving piston 47, achieving position control of the magnetorheological processing module 4 and changing the output of the actuator assembly. The control unit 2 controls the nozzle adjustment motor 38 to change the position of the nozzle support frame 40, which moves along the arc slide 41, thereby changing the second position of the nozzle 11. Because the polishing wheel 6 generates a strong magnetic field around it during polishing, the communication circuit avoids this strong magnetic field.

[0112] Based on the magnetorheological polishing device based on ribbon size adjustment described in the embodiment of the present invention, the embodiment of the present invention also provides a magnetorheological polishing method based on ribbon size adjustment, which includes a magnetorheological polishing method with supply system position adjustment, a magnetorheological polishing method with nozzle adjustment, a magnetorheological polishing method with variable removal function, and a magnetorheological polishing method with actuator adjustment.

[0113] Specific embodiment 1: The magnetorheological polishing method for adjusting the position of the supply system provided in this specific embodiment, according to the magnetorheological polishing device based on ribbon size adjustment described in the embodiment of the invention, combined with Figures 1 to 5 , including the following steps:

[0114] A1: Control the magnetorheological processing module 4 to process the test optical element 9, and obtain a first conversion relationship through the conversion relationship module during the processing. Step A1 includes the following steps:

[0115] A11: Control the polishing wheel 6 to process the test optical element 9 with different polishing gaps, calculate the removal function volume removal rate corresponding to each processing point, and use the ribbon measurement component 5 to measure the ribbon thickness at each processing position in real time. Fit the result in the conversion relationship module:

[0116]

[0117] in, Represents the ribbon thickness T and the removal function volume removal rate In this specific implementation, the polishing wheel 6 is controlled to perform fixed-point processing on the test optical element 9 for a period of time with different polishing gaps.

[0118] A12: Change the first position and control the polishing wheel 6 to process the test optical element 9 at different polishing gaps. Calculate the volume removal rate of the removal function corresponding to each processing point. During the processing, keep the ribbon thickness unchanged. Meanwhile, record the changes in the volume removal rate of the removal function and the first position. Fit the result in the conversion relationship module:

[0119]

[0120] in, Represents the removal function volume removal rate With the first position in this specific implementation, specifically to change the first position, control the polishing wheel 6 to polish the test optical element 9 for a period of time under different fixed-point processing.

[0121] A13: The first conversion relationship is obtained based on the fourth conversion relationship and the fifth conversion relationship, namely:

[0122] ;

[0123] in, Indicates the first conversion relationship.

[0124] A2: Set the first variable range of the first position , and according to the first conversion relationship Get the second variable range corresponding to the ribbon thickness ,Right now:

[0125] ;

[0126] ;

[0127] Set the maximum first position , and according to the first conversion relationship Get the corresponding maximum ribbon thickness ,Right now:

[0128] ;

[0129] Among them, the largest first position and the first variable range Adaptively set and adjust according to actual conditions.

[0130] A3: The control time calculation module adjusts the ribbon measurement component 5 and the magnetorheological processing module 4 in combination with the maximum first position. Step B3 includes the following steps:

[0131] A31. Count b data points measured by the ribbon measurement component 5 within a second, and obtain the time it takes for the ribbon measurement component 5 to measure a point. ;

[0132] ;

[0133] A32. Calculate the maximum supply system position adjustment The time required to regulate the magnetorheological processing module 4 :

[0134] ;

[0135] in, Indicates the change control rate of the first position; the maximum supply system position adjustment , Indicates the minimum first position. This value is adaptively set and adjusted according to actual conditions.

[0136] A33, measure the vertical distance between the measuring position of the ribbon measuring component 5 and the working point of the polishing wheel 6 , according to the vertical distance and the set polishing wheel speed Calculate the time required for polishing wheel 6 to reach the working point :

[0137] ;

[0138] in, Indicates the radius of the polishing wheel 6 and the polishing wheel speed Adaptive setting and adjustment based on actual conditions;

[0139] A34, calculate the maximum speed of robot 1 Minimum moving time between two adjacent processing positions :

[0140] ;

[0141] in, Indicates the distance between two adjacent processing positions;

[0142] A35. Calculation conditions Is it true: If the condition is true, there is no need to adjust the ribbon measuring component 5 and the polishing wheel 6; if the condition is not true, the data sampling frequency of the ribbon measuring component 5 and the polishing wheel speed need to be adjusted. Make adjustments to make the conditions true;

[0143] A36, the measurement data between each two adjacent processing positions are processed by mean filtering and then output, and the number of mean filtered data is Needs to be satisfied .

[0144] Since the magnetorheological fluid ejected from the supply system needs to be transported through the pipeline and driven by the polishing wheel 6 to reach the working area, in order to ensure that the adjustment of the removal function change is achieved at the target trajectory point, it is necessary to set the residence time of the processing point. The specific setting method is as follows:

[0145] The Z-axis coordinate of the nozzle opening position of the nozzle 11 is measured by the ribbon measuring component 5 The Z-axis coordinate of the lowest point of the polishing wheel 6 , the vertical distance between the nozzle 11 and the lowest point of the polishing wheel 6 is |Z4-Z5|, and the time required for the magnetorheological fluid ejected from the nozzle 11 to reach the lowest point of the polishing wheel 6 is for:

[0146] ;

[0147] Wherein, n represents the number of revolutions per second of the polishing wheel 6, L represents the length of the pipeline, Indicates the flow rate of magnetorheological fluid. When generating the machining control program, if the dwell time of each point is If the dwell time of some processing points exists, the generated processing control program is appropriate. , it is necessary to increase the material removal thickness, extend the processing time, and regenerate the processing control program so that the processing residence time of each point is .

[0148] A4: Combined with the second variable range , the largest first position and maximum ribbon thickness , the optical element 8 to be processed is processed, and during the processing, the real-time control module adjusts the first position SP in real time. In step A4, when the polishing wheel 6 is controlled to move to the current processing position i, the current ribbon thickness measured by the ribbon measuring component 5 is With the second variable range Compare:

[0149] If the current ribbon thickness In the second variable range Within, that is , then there is no need to Make adjustments;

[0150] If the current ribbon thickness Not in the second variable range Within, that is , you need to change the current first position Make adjustments:

[0151] If the current ribbon thickness Greater than or equal to the maximum ribbon thickness ,Right now , the current first position Adjust to the maximum first position ;

[0152] If the current ribbon thickness Less than the maximum ribbon thickness ,Right now , according to the following formula, the current first position Make adjustments:

[0153] .

[0154] Specific embodiment 2: The magnetorheological polishing method with nozzle adjustment provided in this specific embodiment is based on the magnetorheological polishing device based on ribbon size adjustment described in the embodiment of the present invention, combined with Figures 1 to 4 、 Figure 6 and Figure 7 , including the following steps:

[0155] B1: Control the magnetorheological processing module 4 to process the test optical element 9, and obtain the second conversion relationship through the conversion relationship module during the processing. Step B1 includes the following steps:

[0156] B11: Control the polishing wheel 6 to process the test optical element 9 with different polishing gaps, calculate the removal function volume removal rate corresponding to each processing point, and use the ribbon measurement component 5 to measure the ribbon thickness at each processing position in real time. Fit the result in the conversion relationship module:

[0157]

[0158] in, Represents the ribbon thickness T and the removal function volume removal rate In this specific implementation, specifically controlling the polishing wheel 6 to perform fixed-point processing on the test optical element 9 for a period of time with different polishing gaps;

[0159] B12: Keeping the ribbon thickness constant, change the second position individually under different polishing gaps, and perform processing at different positions of the test optical element 9. Calculate the volume removal rate of the removal function corresponding to each processing point. Simultaneously record the changes in the polishing gap and the second position, and fit the result in the conversion relationship module:

[0160]

[0161] in, Represents the removal function volume removal rate With the second position In this specific implementation, specifically, the second position is changed separately, and the polishing wheel 6 is controlled to perform fixed-point processing at different positions of the test optical element 9 for a period of time;

[0162] B13: Obtain the second conversion relationship based on the sixth conversion relationship and the seventh conversion relationship, namely:

[0163]

[0164] in, Indicates the second conversion relationship.

[0165] B2: Set the third variable range of the second position , and according to the second conversion relationship Get the fourth variable range corresponding to the ribbon thickness ,Right now:

[0166] ;

[0167] ;

[0168] Set the maximum second position , and according to the second conversion relationship Get the corresponding maximum ribbon thickness ,Right now:

[0169] ;

[0170] Among them, the second largest position and the third variable range Adaptively set and adjust according to actual conditions.

[0171] B3: The control time calculation module adjusts the ribbon measurement component 5 and the magnetorheological processing module 4 in combination with the maximum second position. Step B3 includes the following steps:

[0172] B31. Count b data points measured by the ribbon measurement component 5 within a second, and obtain the time it takes for the ribbon measurement component 5 to measure a point. ;

[0173] ;

[0174] B32. Calculate the adjustment amount at the maximum second position The time required to regulate the magnetorheological processing module 4 :

[0175] ;

[0176] in, Indicates the maximum speed of nozzle position control; maximum second position adjustment amount , Indicates the minimum second position. This value is adaptively set and adjusted according to actual conditions.

[0177] B33, measure the vertical distance between the measuring position of the ribbon measuring component 5 and the working point of the polishing wheel 6 , according to the vertical distance and the set polishing wheel speed Calculate the time required for polishing wheel 6 to reach the working point :

[0178] ;

[0179] in, Indicates the radius of the polishing wheel 6 and the polishing wheel speed Adaptive setting and adjustment based on actual conditions;

[0180] B34. Calculate the maximum speed of robot 1 Minimum moving time between two adjacent processing positions :

[0181] ;

[0182] in, Indicates the distance between two adjacent processing positions;

[0183] B35. Calculation conditions Is it true: If the condition is true, there is no need to adjust the ribbon measuring component 5 and the polishing wheel 6; if the condition is not true, the data sampling frequency of the ribbon measuring component 5 and the polishing wheel speed need to be adjusted. Make adjustments to make the conditions true;

[0184] B36, perform mean filtering on the measurement data between each two adjacent processing positions before outputting them, and the number of mean filtered data Needs to be satisfied .

[0185] Since the magnetorheological fluid ejected from the nozzle 11 needs to be driven by the polishing wheel 6 to reach the working area, in order to ensure that the adjustment of the removal function change is achieved at the target trajectory point, it is necessary to set the dwell time of the processing point. The specific setting method is as follows:

[0186] The Z-axis coordinate of the nozzle opening position of the nozzle 11 is measured by the ribbon measuring component 5 The Z-axis coordinate of the lowest point of the polishing wheel 6 , the vertical distance between the nozzle 11 and the lowest point of the polishing wheel 6 is |Z4-Z5|, and the time required for the magnetorheological fluid ejected from the nozzle 11 to reach the lowest point of the polishing wheel 6 is for:

[0187] ;

[0188] Where n represents the number of revolutions per second of the polishing wheel 6. When generating the machining control program, if the dwell time of each point is If the dwell time of some processing points exists, the generated processing control program is appropriate. , it is necessary to increase the material removal thickness, extend the processing time, and regenerate the processing control program so that the processing residence time of each point is B4: Combined with the fourth variable range , Maximum second position and maximum ribbon thickness , the optical element 8 to be processed is processed, and during the processing, the real-time control module adjusts the second position NL in real time. In step B4, when the polishing wheel 6 is controlled to move to the current processing position i, the current ribbon thickness measured by the ribbon measuring component 5 is With the fourth variable range Compare:

[0189] If the current ribbon thickness In the fourth variable range Within, that is , then there is no need to Make adjustments;

[0190] If the current ribbon thickness Not in the fourth variable range Within, that is , you need to change the current second position Make adjustments:

[0191] If the current ribbon thickness Greater than or equal to the maximum ribbon thickness ,Right now , change the current second position Adjust to the second maximum position ;

[0192] If the current ribbon thickness Less than the maximum ribbon thickness ,Right now , according to the following formula, the current second position Make adjustments:

[0193] .

[0194] Specific embodiment 3: The magnetorheological polishing method with variable removal function provided in this specific embodiment, according to the magnetorheological polishing device based on ribbon size adjustment described in the embodiment of the invention, combined with Figures 1 to 4 , including the following steps:

[0195] C1: Controlling the polishing wheel 6 to process the test optical element 9 at different polishing gaps to obtain a removal function; simultaneously, the ribbon measurement component 5 records the change in ribbon thickness at each processing point during the processing, and obtains the eighth conversion relationship between the volume removal rate of the removal function and the ribbon thickness at each processing point in the conversion relationship module. Specifically, the following steps are included:

[0196] C11: Control the polishing wheel 6 to process the test optical element 9 with different polishing gaps, and use the ribbon measurement component 5 to record the change in ribbon thickness at each processing point. Fitting in the conversion relationship module yields:

[0197]

[0198] in, Indicates ribbon thickness Between polishing gap In this specific embodiment, specifically, the polishing wheel 6 is controlled to perform fixed-point processing on the test optical element 9 for a period of time with different polishing gaps;

[0199] C12: Control the polishing wheel 6 to process different positions of the test optical element 9 with different polishing gaps, and calculate the removal function volume removal rate of each processing point, and fit it in the conversion relationship module to obtain:

[0200]

[0201] in, Represents the removal function volume removal rate Polishing gap In this specific embodiment, specifically, the polishing wheel 6 is controlled to perform fixed-point processing at different positions of the test optical element 9 for a period of time with different polishing gaps;

[0202] C13: In the conversion relationship module, the eighth conversion relationship is calculated based on the ninth conversion relationship and the tenth conversion relationship, that is:

[0203]

[0204] in, Represents the eighth conversion relationship.

[0205] C2: Utilize the machining program module to obtain a machining program according to the removal function, and import the machining program into the magnetorheological machining module 4 .

[0206] C3: Set the fifth variable range of the removal function volume removal rate , and according to the eighth conversion relationship Get the sixth variable range corresponding to the ribbon thickness ,Right now:

[0207] ;

[0208] ;

[0209] Set the maximum removal function volume removal rate , and according to the eighth conversion relationship Get the corresponding maximum ribbon thickness ,Right now:

[0210] .

[0211] Fifth variable range and the maximum removal function volume removal rate Adaptively set and adjust according to actual conditions.

[0212] C4: Control the time calculation module and adjust the ribbon measurement component and magnetorheological processing module 4 in combination with the maximum removal function volume removal rate. Specifically, it includes the following steps:

[0213] C41. Count b data points measured by the ribbon measurement component 5 within a second, and obtain the time it takes for the ribbon measurement component 5 to measure a point. ;

[0214] ;

[0215] C42, measure the vertical distance between the measuring position of the ribbon measuring component 5 and the working point of the polishing wheel 6 , according to the vertical distance and the set polishing wheel speed Calculate the time required for polishing wheel 6 to reach the working point :

[0216] ;

[0217] in, Indicates the radius of the polishing wheel 6 and the polishing wheel speed Adaptive setting and adjustment based on actual conditions;

[0218] C43, calculate the maximum speed of robot 1 Minimum moving time between two adjacent processing positions :

[0219] ;

[0220] in, Indicates the distance between two adjacent processing positions;

[0221] C44. Calculation conditions Is it true: If the condition is true, there is no need to adjust the ribbon measuring component 5 and the polishing wheel 6; if the condition is not true, the data sampling frequency of the ribbon measuring component 5 and the polishing wheel speed need to be adjusted. Make adjustments to make the conditions true;

[0222] C45, perform mean filtering on the measurement data between each two adjacent processing positions before outputting it, and the number of mean filtered data Needs to be satisfied .

[0223] C5: According to the sixth variable range , control the magnetorheological processing module 4 to process the optical element 8 to be processed, and during the processing, calculate the removal function of each processing point, obtain the variable removal function set, and then generate a new processing program. In step C5, when the polishing wheel 6 is controlled to move to the current processing position i, the current ribbon thickness measured by the ribbon measuring component 5 is With the sixth variable range Compare:

[0224] If the current ribbon thickness In the sixth variable range Within, that is , then there is no need to remove the current function Make adjustments;

[0225] If the current ribbon thickness Not in the sixth variable range Within, that is , you need to remove the current function Perform the following calculations:

[0226] If the current ribbon thickness Less than the maximum ribbon thickness ,Right now , then the removal function of the current processing point is calculated by the following formula , and then get the set of variable removal functions :

[0227] ;

[0228] in, Indicates the volume removal rate of the removal function corresponding to the current processing point;

[0229] Remove the function set The next processing parameter input generates a new processing control program;

[0230] If the current ribbon thickness Greater than or equal to the maximum ribbon thickness ,Right now , then the removal function of the current processing point is calculated by the following formula , and then get the set of variable removal functions :

[0231] ;

[0232] in, Indicates the maximum ribbon thickness The corresponding maximum removal function volume removal rate;

[0233] Remove the function set The next time the processing parameters are input, a new processing control program is generated.

[0234] C6: Import the new processing program into the magnetorheological processing module 4, and then perform secondary processing on the optical element to be processed.

[0235] Specific embodiment 4: The magnetorheological polishing method of the actuator adjustment provided in this specific embodiment is based on the magnetorheological polishing device based on ribbon size adjustment described in the embodiment of the invention, combined with Figures 1 to 4 and Figure 8 , including the following steps:

[0236] D1: Control the polishing wheel 6 to process the test optical element 9 with different polishing gaps, and obtain a third conversion relationship in the conversion relationship module. Step D1 includes the following steps:

[0237] D11: Control the polishing wheel 6 to process the test optical element 9 with different polishing gaps, calculate the removal function volume removal rate corresponding to each processing point, and use the ribbon measurement component 5 to measure the ribbon thickness at each processing position in real time. Fit the conversion relationship module to obtain:

[0238] ;

[0239] in, Indicates ribbon thickness Volume removal rate with removal function In this specific embodiment, specifically for controlling the polishing wheel 6 to perform fixed-point processing on the test optical element 9 for a period of time with different polishing gaps;

[0240] D12: Control the output of the actuator group to process the test optical element 9 at different polishing gaps, calculate the removal function volume removal rate corresponding to each processing point, control the ribbon thickness to remain unchanged during the processing, and record the changes in the removal function volume removal rate and the output of the actuator group. Fit it in the conversion relationship module to obtain

[0241]

[0242] in, Represents the removal function volume removal rate The twelfth conversion relationship between the output L of the actuator group; in this specific embodiment, specifically controlling the output of the actuator group to perform fixed-point processing on the test optical element 9 for a period of time under different polishing gaps;

[0243] D13: The third conversion relationship is obtained based on the eleventh conversion relationship and the twelfth conversion relationship, namely:

[0244] ;

[0245] in, Indicates the third conversion relationship.

[0246] D2: Set the seventh variable range of the actuator group output , and according to the third conversion relationship Get the eighth variable range corresponding to the ribbon thickness ,Right now:

[0247] ;

[0248] ;

[0249] Set the maximum output of the actuator group , and according to the third conversion relationship Get the corresponding maximum ribbon thickness ,Right now:

[0250] .

[0251] Seventh variable range and the maximum actuator group output Adaptively set and adjust according to actual conditions.

[0252] D3: The control time calculation module adjusts the ribbon measurement component 5 and the magnetorheological processing module 4 in combination with the maximum actuator group output; specifically, the following steps are included:

[0253] D31. Count b data points measured by the ribbon measurement component 5 within a second, and obtain the time it takes for the ribbon measurement component 5 to measure a point. ;

[0254] ;

[0255] D32, calculate the maximum actuator output change The time required to regulate the magnetorheological processing module 4 :

[0256] ;

[0257] in, Indicates the output change control rate of the actuator group;

[0258] D33, measure the vertical distance between the measuring position of the ribbon measuring component 5 and the working point of the polishing wheel 6 , according to the vertical distance and the set polishing wheel speed Calculate the time required for polishing wheel 6 to reach the working point :

[0259] ;

[0260] in, Indicates the radius of the polishing wheel 6 and the polishing wheel speed Adaptive setting and adjustment based on actual conditions;

[0261] D34. Calculate the robot's maximum speed Minimum moving time between two adjacent processing positions :

[0262] ;

[0263] in, Indicates the distance between two adjacent processing positions;

[0264] D35. Calculation conditions Is it true: If the condition is true, there is no need to adjust the ribbon measuring component 5 and the polishing wheel 6; if the condition is not true, the data sampling frequency of the ribbon measuring component 5 and the polishing wheel speed need to be adjusted. Make adjustments to make the conditions true;

[0265] D36, perform mean filtering on the measurement data between each two adjacent processing positions before outputting it, and the number of mean filtered data Needs to be satisfied .

[0266] D4: Combined with the eighth variable range , Maximum actuator group output and maximum ribbon thickness , the optical element 8 to be processed is processed, and during the processing, the real-time control module adjusts the output L of the actuator group in real time until the magnetorheological processing module 4 is controlled to traverse all processing points on the optical element 8 to be processed.

[0267] In step D4, when the polishing wheel 6 is controlled to move to the current processing position i, the current ribbon thickness measured by the ribbon measuring component 5 is With the eighth variable range Compare:

[0268] If the current ribbon thickness In the eighth variable range Within, that is , then there is no need to adjust the output of the current actuator group Make adjustments;

[0269] If the current ribbon thickness Not in the eighth variable range Within, that is , then the output of the current actuator group needs to be Make adjustments:

[0270] If the current ribbon thickness Greater than or equal to the maximum ribbon thickness ,Right now , the current actuator group output Adjusted to the maximum actuator group output ;

[0271] If the current ribbon thickness Less than the maximum ribbon thickness ,Right now , according to the following formula, the output of the current actuator group is Make adjustments:

[0272] .

[0273] The fitting process in the above two specific embodiments includes but is not limited to fitting the working speed and the ribbon thickness. The discrete data was imported into Matlab software. Using the Polyfit command, the data were fitted to determine the corresponding relationships between the first position of the supply system, the second position of the nozzle, the volumetric removal rate of the removal function, and the output of the actuator group, all of which were associated with the ribbon thickness. The Polyfit command is a basic, general command in Matlab. This method allows for a more intuitive visualization of the corresponding relationships and function curves between the first position of the supply system, the second position of the nozzle, the volumetric removal rate of the removal function, and the output of the actuator group, all of which were associated with the ribbon thickness.

[0274] In the above two specific embodiments, the calculation conditions are The corresponding relationship between the four time elements is given, namely: within a single sampling cycle, the robot 1 can adjust the magnetorheological processing equipment, so that after the magnetorheological processing equipment is moved, the ribbon measurement component 5 performs the next sampling, avoiding the sampling cycle being too long and resulting in a too slow sampling frequency, which makes the sampling frequency mismatched with the adjustment speed of the moving component.

[0275] Among them, about The selection of this parameter has the following significance:

[0276] Driven by the polishing wheel 6, the magnetorheological fluid enters the magnetic field working area. Under the action of the magnetic field, the magnetorheological fluid is converted into a high-viscosity, low-fluidity Bingham fluid. The Bingham fluid is squeezed through the polishing gap (the distance between the lowest point of the polishing wheel 6 and the workpiece) to form a ribbon. The thickness and width of the ribbon carry information about the volume removal rate. That is, the change in volume removal rate is correlated with the change in ribbon thickness. Therefore, as long as the change in ribbon thickness is collected, the change in volume removal rate can be reflected.

[0277] The ribbon measuring assembly 5 is used to measure the ribbon thickness. In order to avoid collision between the ribbon measuring assembly 5 and the optical element to be processed 8 and the test optical element 9 during processing, the ribbon measuring assembly 5 needs to be tilted. There is an angle between the measuring direction of the ribbon measuring assembly 5 and the horizontal line. As a result, the collected data is not the ribbon thickness information at the volume removal rate, but the data collected when the polishing wheel drives the magnetorheological fluid from the lowest point of the polishing wheel to the measuring range of the ribbon measuring assembly 5 after a certain period of time. This time is .

[0278] Assume that if The time is very long, and the whole equipment moves very fast, resulting in the entire processing being completed, but the change in ribbon thickness is not collected in time, and the purpose of real-time control cannot be achieved during the entire processing process, so the time must be considered when.

[0279] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present disclosure can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solutions disclosed in the present disclosure can be achieved. This is not limited herein.

[0280] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. A magnetorheological polishing device based on ribbon size adjustment, characterized by: The invention comprises a robot, a control unit, an actuator group, a magnetorheological processing module, and a ribbon measuring assembly; wherein: the actuator group is arranged at the free end of the robot, and the magnetorheological processing module is arranged at the output end of the actuator group; the robot drives the polishing wheel in the magnetorheological processing module to process the optical element using magnetorheological fluid as the medium, and the ribbon measuring assembly measures the thickness of the magnetorheological fluid ribbon during the processing; The interior of the control unit includes: a time calculation module for calculating the measurement time of the ribbon measurement component and the adjustment time of the magnetorheological processing module, and adjusting the ribbon measurement component and the magnetorheological processing module according to the measurement time and the adjustment time; a conversion relationship module, fitting the ribbon thickness with a first position of a supply system in the magnetorheological processing module to obtain a first conversion relationship, fitting the ribbon thickness with a second position of a nozzle in the magnetorheological processing module to obtain a second conversion relationship, and fitting the ribbon thickness with an actuator group output of the actuator group to obtain a third conversion relationship; a processing program module, which obtains a processing program according to a removal function generated when the magnetorheological processing module processes the optical element, and imports the processing program into the magnetorheological processing module; The real-time control module adjusts the first position according to the first conversion relationship, or adjusts the second position according to the second conversion relationship, or adjusts the output of the actuator group to maintain the stability of the removal function when processing the optical element.

2. The magnetorheological polishing device based on ribbon size adjustment according to claim 1, characterized in that: The ribbon measuring assembly includes a ribbon measuring device and an adjustment bracket; the ribbon measuring device is arranged on the adjustment bracket; the ribbon measuring device measures the thickness of the ribbon and transmits the measured ribbon thickness to the control unit; the adjustment bracket is arranged on the magnetorheological processing module and is used to adjust the posture of the ribbon measuring device.

3. The magnetorheological polishing device based on ribbon size adjustment according to claim 2, characterized in that: The magnetorheological processing module also includes a polishing motor, a magnet and a magnetorheological mounting frame; wherein, The magnetorheological mounting frame is arranged on the output end of the actuator group, the polishing wheel is arranged on the magnetorheological mounting frame, and the adjustment bracket is arranged on the magnetorheological mounting frame; The polishing motor is arranged on the magnetorheological mounting frame and connected to the polishing wheel, so that the polishing motor controls the polishing wheel to rotate; The nozzle is mounted on the magnetorheological mounting bracket along the rotation direction of the polishing wheel via a nozzle mounting bracket, and the nozzle mounting bracket adjusts the mounting angle of the nozzle to thereby change the second position; the supply system delivers the magnetorheological fluid to the nozzle; The magnet is arranged on the magnetorheological mounting frame and close to the working point of the polishing wheel, so that the magnetorheological fluid is affected by the magnetic field strength of the magnet and the rigidity of the magnetorheological fluid is changed, thereby processing the optical element.

4. The magnetorheological polishing device based on ribbon size adjustment according to claim 3, characterized in that: The supply system includes a liquid pump, a supply mounting bracket, a supply motor and a ball screw; wherein, the supply motor and the ball screw are arranged on the supply mounting bracket, so that the supply motor drives the ball screw to rotate; the liquid pump is arranged on the ball screw, and the ball screw drives the liquid pump to move, thereby changing the first position; the liquid pump transports magnetorheological fluid to the nozzle through a pipeline.

5. The magnetorheological polishing device based on ribbon size adjustment according to claim 4, characterized in that: The nozzle mounting seat includes a fixing frame, a nozzle adjustment motor, a pushing rod and a nozzle support frame; wherein, the fixing frame is arranged on the magnetorheological mounting frame, and an arc slide rail is arranged on the inner side wall of the fixing frame; the nozzle adjustment motor is arranged on the magnetorheological mounting frame, and one end of the pushing rod passes through the fixing frame and is connected to the nozzle adjustment motor, so that the nozzle adjustment motor pushes the slider on the arc slide rail to move through the pushing rod; one end of the nozzle support frame is arranged on the slider, and the nozzle is connected to the other end of the nozzle support frame, so that the nozzle adjustment motor pushes the slider through the pushing rod, and then the nozzle support frame drives the nozzle to move, thereby completing the adjustment of the second position.

6. The magnetorheological polishing device based on ribbon size adjustment according to claim 3, characterized in that: The adjustment bracket includes a support frame, a longitudinal sliding assembly, a transverse sliding assembly and an axially rotating connecting plate; wherein, one end of the support frame is connected to the magnetorheological mounting frame; the longitudinal sliding assembly is arranged on the other end of the support frame, the transverse sliding assembly is arranged on the longitudinal sliding assembly, the axially rotating connecting plate is arranged on the transverse sliding assembly, and the ribbon measuring device is arranged on the axially rotating connecting plate, so that the axially rotating connecting plate drives the ribbon measuring device to rotate, while the longitudinal sliding assembly and the transverse sliding assembly drive the ribbon measuring device to move longitudinally and transversely.

7. The magnetorheological polishing device based on ribbon size adjustment according to claim 3, characterized in that: The ribbon measuring assembly, the robot, the actuator group, the nozzle mounting seat and the supply system are respectively connected to the control unit to form respective communication lines, so that the control unit receives and sends signals through the corresponding communication lines.

8. A magnetorheological polishing method with position adjustment of a supply system, based on the magnetorheological polishing device with ribbon size adjustment according to any one of claims 1 to 6, characterized in that: The following steps are involved: A1: controlling the magnetorheological processing module to process the test optical element, and obtaining the first conversion relationship through the conversion relationship module during the processing; A2: setting a first variable range of the first position, and obtaining a second variable range corresponding to the ribbon thickness according to the first conversion relationship; setting a maximum first position, and obtaining a corresponding maximum ribbon thickness according to the first conversion relationship; A3: Controlling the time calculation module to adjust the ribbon measurement component and the magnetorheological processing module in combination with the maximum first position; A4: The optical element to be processed is processed in combination with the second variable range, the maximum first position and the maximum ribbon thickness. During the processing, the real-time control module adjusts the first position in real time.

9. The magnetorheological polishing method with supply system position adjustment according to claim 8, characterized in that: Step A1 includes the following steps: A11: Controlling the polishing wheel to process the test optical element at different polishing gaps, calculating the removal function volume removal rate corresponding to each processing point, and measuring the ribbon thickness at each processing position in real time using the ribbon measurement component, and fitting a fourth conversion relationship between the ribbon thickness and the removal function volume removal rate in the conversion relationship module; A12: Changing the first position, controlling the polishing wheel to process the test optical element at different polishing gaps, calculating the removal function volume removal rate corresponding to each processing point, controlling the thickness of the ribbon to remain unchanged during the processing, and recording the changes in the polishing gap and the first position. Fitting a fifth conversion relationship between the removal function volume removal rate and the first position in the conversion relationship module; A13: Obtain the first conversion relationship according to the fourth conversion relationship and the fifth conversion relationship.

10. The magnetorheological polishing method with supply system position adjustment according to claim 9, characterized in that: In step A4, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the ribbon measuring component is compared with the second variable range: If the current ribbon thickness is within the second variable range, there is no need to adjust the current first position; If the current ribbon thickness is not within the second variable range, the current first position needs to be adjusted: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjusting the current first position to the maximum first position; If the current ribbon thickness is less than the maximum ribbon thickness, the current first position is adjusted according to the following formula: ； in, represents the first conversion relationship, Indicates the current ribbon thickness, Indicates the current first position.

11. A nozzle-adjustable magnetorheological polishing method, based on the magnetorheological polishing device based on ribbon size adjustment according to any one of claims 1 to 6, characterized in that: The following steps are involved: B1: controlling the magnetorheological processing module to process the test optical element, and obtaining the second conversion relationship through the conversion relationship module during the processing; B2: setting a third variable range of the second position, and obtaining a fourth variable range corresponding to the ribbon thickness according to the second conversion relationship; setting a maximum second position, and obtaining a corresponding maximum ribbon thickness according to the second conversion relationship; B3: controlling the time calculation module to adjust the ribbon measurement component and the magnetorheological processing module in combination with the maximum second position; B4: The optical element to be processed is processed in combination with the fourth variable range, the maximum second position and the maximum ribbon thickness. During the processing, the real-time control module adjusts the second position in real time.

12. The nozzle-adjustable magnetorheological polishing method according to claim 11, characterized in that: Step B1 includes the following steps: B11: Controlling the polishing wheel to process the test optical element at different polishing gaps, calculating the removal function volume removal rate corresponding to each processing point, and measuring the ribbon thickness at each processing position in real time using the ribbon measurement component, and fitting a sixth conversion relationship between the ribbon thickness and the removal function volume removal rate in the conversion relationship module; B12: While maintaining the thickness of the ribbon unchanged, the second position is individually changed at different polishing gaps, the volume removal rate of the removal function corresponding to each processing point is calculated, and processing is performed at different positions of the test optical element. The changes in the polishing gap and the second position are simultaneously recorded, and a seventh conversion relationship between the volume removal rate of the removal function and the second position is obtained by fitting in the conversion relationship module; B13: Obtain the second conversion relationship according to the sixth conversion relationship and the seventh conversion relationship.

13. The nozzle-adjustable magnetorheological polishing method according to claim 12, characterized in that: In step B4, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the ribbon measuring component is compared with the fourth variable range: If the current ribbon thickness is within the fourth variable range, there is no need to adjust the current second position; If the current ribbon thickness is not within the fourth variable range, the current second position needs to be adjusted: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjusting the current second position to the maximum second position; If the current ribbon thickness is less than the maximum ribbon thickness, the current second position is adjusted according to the following formula: in, represents the second conversion relationship, Indicates the current ribbon thickness, Indicates the current second position.

14. A magnetorheological polishing method with a variable removal function, based on the magnetorheological polishing device based on ribbon size adjustment according to any one of claims 1 to 6, characterized in that: The following steps are involved: C1: Controlling the polishing wheel to process the test optical element with different polishing gaps to obtain the removal function; simultaneously, recording the change in ribbon thickness at each processing point through the ribbon measurement component during the processing, and obtaining an eighth conversion relationship between the volume removal rate of the removal function at each processing point and the ribbon thickness in the conversion relationship module; C2: using the processing program module to obtain the processing program according to the removal function, and importing the processing program into the magnetorheological processing module; C3: setting a fifth variable range of the volume removal rate of the removal function, and obtaining a sixth variable range corresponding to the ribbon thickness according to the eighth conversion relationship; Setting a maximum removal function volume removal rate, and obtaining a corresponding maximum ribbon thickness according to the eighth conversion relationship; C4: controlling the time calculation module to adjust the ribbon measurement component and the magnetorheological processing module in combination with the maximum removal function volume removal rate; C5: controlling the magnetorheological processing module to process the optical element to be processed according to the sixth variable range, and calculating the removal function of each processing point during the processing to obtain a set of variable removal functions, thereby generating a new processing program; C6: Importing a new processing program into the magnetorheological processing module, and then performing secondary processing on the optical element to be processed.

15. The magnetorheological polishing method with variable removal function according to claim 14, characterized in that: Obtaining the eighth conversion relationship in step C1 includes the following steps: C11: Controlling the polishing wheel to process the test optical element with different polishing gaps, and recording the change in ribbon thickness at each processing point through the ribbon measurement component, and fitting a ninth conversion relationship between the ribbon thickness and the polishing gap in the conversion relationship module; C12: controlling the polishing wheel to process different positions of the test optical element with different polishing gaps, calculating the removal function volume removal rate of each processing point, and fitting in the conversion relationship module to obtain a tenth conversion relationship between the removal function volume removal rate and the polishing gap; C13: In the conversion relationship module, the eighth conversion relationship is calculated based on the ninth conversion relationship and the tenth conversion relationship.

16. The magnetorheological polishing method with variable removal function according to claim 15, characterized in that: In step C5, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the ribbon measuring component is compared with the sixth variable range: If the current ribbon thickness is within the sixth variable range, there is no need to adjust the current removal function; If the current ribbon thickness is not within the sixth variable range, the current removal function needs to be calculated: If the current ribbon thickness is less than the maximum ribbon thickness, the removal function of the current processing point is calculated by the following formula: : ； in, Indicates the volume removal rate of the removal function corresponding to the current processing point, Indicates the current ribbon thickness, represents the eighth conversion relationship, Represents the removal function of the current processing point; and then obtains the variable removal function set Remove the function set The next processing parameter input generates a new processing control program; If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, the removal function of the current processing point is calculated by the following formula, and then the variable removal function set is obtained: : ； in, Indicates the maximum ribbon thickness The corresponding maximum removal function volume removal rate; Remove the function set The next time the processing parameters are input, a new processing control program is generated.

17. A magnetorheological polishing method with actuator adjustment, based on the magnetorheological polishing device with ribbon size adjustment according to any one of claims 1 to 6, characterized in that: The following steps are involved: D1: controlling the polishing wheel to process the test optical element with different polishing gaps, and obtaining the third conversion relationship in the conversion relationship module; D2: Setting the seventh variable range of the actuator group output and obtaining the eighth variable range corresponding to the ribbon thickness according to the third conversion relationship; setting the maximum actuator group output and obtaining the corresponding maximum ribbon thickness according to the third conversion relationship; D3: controlling the time calculation module to adjust the ribbon measurement component and the magnetorheological processing module in combination with the maximum actuator group output; D4: In combination with the eighth variable range, the maximum output of the actuator group and the maximum ribbon thickness, the optical element to be processed is processed. During the processing, the real-time control module adjusts the output of the actuator group in real time until the magnetorheological processing module is controlled to traverse all processing points on the optical element to be processed.

18. The magnetorheological polishing method with actuator adjustment according to claim 17, characterized in that: Step D1 includes the following steps: D11: Controlling the polishing wheel to process the test optical element at different polishing gaps, calculating the removal function volume removal rate corresponding to each processing point, and measuring the ribbon thickness at each processing position in real time by the ribbon measurement component, and fitting the conversion relationship module to obtain an eleventh conversion relationship between the ribbon thickness and the removal function volume removal rate; D12: Controlling the output of the actuator group to process the test optical element at different polishing gaps, calculating the volume removal rate of the removal function corresponding to each processing point, controlling the thickness of the ribbon to remain unchanged during the processing, and recording the changes in the polishing gap and the output of the actuator group. Fitting the twelfth conversion relationship between the volume removal rate of the removal function and the output of the actuator group in the conversion relationship module; D13: Obtain the third conversion relationship according to the eleventh conversion relationship and the twelfth conversion relationship.

19. The actuator-regulated magnetorheological polishing method according to claim 18, characterized in that: In step D4, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the ribbon measuring component is compared with the eighth variable range: If the current ribbon thickness is within the eighth variable range, there is no need to adjust the current output of the actuator group; If the current ribbon thickness is not within the eighth variable range, the output of the current actuator group needs to be adjusted: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjusting the current actuator group output to the maximum actuator group output; If the current ribbon thickness is less than the maximum ribbon thickness, the output of the current actuator group is adjusted according to the following formula: in, represents the third conversion relationship, Indicates the current ribbon thickness, Indicates the current output of the actuator group.

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