A vacuum robotic arm

Abstract

The present invention discloses a vacuum robot arm, which relates to the technical field of semiconductor wafer transfer equipment, and includes a torque transmission mechanism, which includes: at least two pulleys, each pulley having an outer peripheral surface surrounding its own central axis and end surfaces located on both sides of the axial direction; a double opposing belt, including at least two torque transmission belts of different height levels; a receiving groove, which is cut along one end surface of the pulley in the direction of the other end surface, and passes through one of the two end surfaces and forms an opening on the outer peripheral surface of the pulley; an anchor point, which is arranged on the wall surface of the receiving groove; an end cap, which is embedded in the opening, and the side facing away from the pulley is a smooth surface, and the smooth surface has the same curvature as the outer peripheral surface of the pulley; wherein, after a portion of the torque transmission belt is guided out of the accommodating space, it is completely covered on the circumferential surface formed by the embedded splicing of the outer peripheral surface of the pulley and the smooth surface of the end cap. The above scheme is adopted to expand the rotation angle of the joint in the robot arm.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer transfer equipment, and in particular to a vacuum robotic arm. Background Art

[0002] Robotic manipulators play a central role in industrial automation, especially in areas with extremely high requirements for cleanliness, precision, and reliability, such as semiconductor manufacturing, flat-panel displays, and precision instrument assembly. To achieve complex spatial trajectories and precise positioning, these robots typically use a multi-joint serial structure, and their joint motion requires an efficient, pollution-free, and stable torque transmission method. The drive system composed of metal belts and pulleys, with its compact structure, smooth transmission, no lubrication requirements, and high rigidity, has become a preferred solution for driving joint rotation in such demanding environments. It is widely used in key joints connecting the robot's upper arm, forearm, and end effector.

[0003] However, the current mainstream metal belt and pulley drive system generally relies on a direct mechanical fixation method to achieve joint torque transmission - that is, rigidly fastening the end of the metal belt to the corresponding pulley through screws. Although this screw connection method is simple in structure and reliable in connection, it introduces a fundamental movement restriction: it strictly limits the effective wrapping range of the metal belt on the pulley, that is, the contact angle. When the joint needs to perform a large range of rotational movement, especially when the pulley rotation angle approaches or attempts to exceed the wrapping limit allowed by the fixed point of the metal belt on the pulley, the metal belt will interfere with the screw, resulting in permanent plastic deformation or fracture of the metal belt, causing system failure. Therefore, in order to avoid such catastrophic consequences, the rotation range of robot joints using this type of conventional screw-fixed pulley system is strictly limited to approximately 360°, usually smaller to meet the safety margin.

[0004] However, in applications where multiple continuous rotations are required, such as infinite position adjustment or large-scale scanning in a confined space, the above-mentioned fixing method is difficult to meet the requirements. Therefore, it is necessary to provide a vacuum robot arm to solve the above-mentioned problems in the prior art. Summary of the Invention

[0005] The object of the present invention is to provide a vacuum robot arm to solve the problem of limited rotation angle of the robot arm joint in the prior art.

[0006] To achieve the above object, the technical solution of the present invention is as follows:

[0007] A vacuum robot arm comprises an upper arm, a forearm pivotally connected to an end of the upper arm, and an end effector pivotally connected to the end of the forearm, wherein at least one of the upper arm and the forearm has a transmission path, and a torque transmission mechanism is provided in the transmission path, wherein the torque transmission mechanism comprises:

[0008] At least two pulleys, located at both ends of the transmission path, each pulley having an outer peripheral surface surrounding its own central axis and end surfaces located on both sides of the axial direction;

[0009] A double opposing belt, comprising at least two torque transmission belts of different height levels, each of the torque transmission belts being connected between two pulleys and being tensioned and wrapped around a portion of the outer circumference of two adjacent pulleys;

[0010] an accommodating groove formed by sectioning along one end surface of the pulley toward the other end surface and penetrating one of the two end surfaces, the accommodating groove having an accommodating space respectively communicating with one end surface and an outer peripheral surface of the pulley, and the accommodating groove forming an opening on the outer peripheral surface of the pulley;

[0011] An anchor point, provided on a wall surface of the receiving groove, for detachably fixing an end portion of the torque transmission belt;

[0012] An end cover is embedded in the opening, wherein a side of the end cover facing away from the pulley is a smooth surface, and the curvature of the smooth surface is consistent with that of the outer peripheral surface of the pulley;

[0013] In which, at least one end portion of the torque transmission belt is detachably fixed by the anchor point and accommodated in the accommodating space. After a portion of the torque transmission belt is led out from the accommodating space, it is completely covered on the circumferential surface formed by the interlocking splicing of the outer circumferential surface of the pulley and the smooth surface of the end cover, and is covered and wrapped relative to the torque transmission belt itself as the pulley rotates.

[0014] The vacuum robotic arm provided by the present invention offers the following advantages: by accommodating the end of the torque transmission belt within a pulley's receiving groove, rather than directly locking it with screws, the belt's wraparound range is avoided by the fixed point. End caps, whose curvature matches the pulley's, cover a portion of the belt, providing radial restraint to ensure reliable torque transmission while allowing the belt to adaptively adjust its path along a smooth surface during rotation. This solution, while maintaining the high rigidity and pollution-free properties of the metal torque transmission belt, completely overcomes the 360-degree rotation limitation of traditional screw-fixing methods, enabling greater joint rotation capabilities.

[0015] Furthermore, each of the torque transmission belts has a belt body, which has a first end and a second end, and the first end and the second end are respectively fixedly connected to two different pulleys, and are at least partially wound around the outer circumference of one of the pulleys clockwise or counterclockwise with the first end as the starting point, and the belt body is wound clockwise or counterclockwise toward the outer circumference of the other adjacent pulley, and the belt body is completely wound around the outer circumference of the other pulley and is covered and wound relative to itself.

[0016] With the above solution, the two ends of the belt are fixed to different pulleys to form a closed-loop path, which automatically maintains constant system tension during joint movement, avoiding tension fluctuations or relaxation caused by single-point fixation in traditional open-loop belt transmission, and significantly improving transmission stability.

[0017] Furthermore, a sunken groove is provided on the side of the end cover facing away from the smooth surface, and the sunken groove and the inner wall of the accommodating groove form a accommodating space for accommodating the end of the torque transmission belt. The accommodating space has a lead-out port for leading out the torque transmission belt, and the torque transmission belt can start from the accommodating groove and be led out from the lead-out port.

[0018] Furthermore, the torque transmission mechanism also includes a pin shaft and a clamping member, the anchor point is located on the pin shaft, the pin shaft is fixedly connected to the wall surface of the accommodating groove, and both ends of the torque transmission belt are provided with a fixing block, and the fixing block is provided with a fixing hole, the pin shaft is inserted into the fixing hole and is detachably connected to the torque transmission belt through the clamping member.

[0019] Furthermore, the pin shaft includes a base, a shaft and a limit portion connected in sequence along the axial direction, the radius of the shaft portion is smaller than the base and the limit portion, the torque transmission belt is sleeved on the shaft portion, and the base is fixedly connected to the inner wall of the accommodating groove.

[0020] Furthermore, a transition groove is provided on the outer circumferential surface of the pulley, the transition groove is communicated with the guide outlet, and the transition groove is used to guide the torque transmission belt to smoothly transition to the outer circumferential surface of the pulley.

[0021] Furthermore, the accommodating groove has a side wall, a bottom wall and an inner wall, the pin shaft is arranged on the inner wall in a direction perpendicular to the inner wall of the accommodating groove, and the side wall abuts against one end of the end cover.

[0022] Furthermore, a sunken mounting hole is provided on the end cover, and a screw hole is provided on the pulley;

[0023] Wherein, when the end cover is embedded in the accommodating groove and the smooth surface is engaged with the outer peripheral surface of the pulley, the sunken mounting hole corresponds to and communicates with the screw hole.

[0024] Furthermore, a relief groove is provided on the bottom wall of the sinking trough, and the relief groove is used to accommodate the limiting portion.

[0025] Furthermore, a floating gap is formed between the guide outlet and the torque transmission belt passing through the guide outlet, and the floating gap is used to provide a floating margin for vibration of the torque transmission belt. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a schematic diagram of the overall structure of a vacuum robotic arm according to an embodiment of the present invention;

[0027] Figure 2 This is a schematic structural diagram of a torque transmission mechanism according to an embodiment of the present invention;

[0028] Figure 3 This is a schematic diagram of a double opposing belt structure according to an embodiment of the present invention;

[0029] Figure 4 This is a schematic diagram of the torque transmission belt structure according to an embodiment of the present invention;

[0030] Figure 5 This is a schematic diagram of the first end structure of an embodiment of the present invention;

[0031] Figure 6 This is a schematic diagram of the second end structure of an embodiment of the present invention;

[0032] Figure 7 This is an exploded schematic diagram of a pulley and an end cover according to an embodiment of the present invention;

[0033] Figure 8 This is a schematic structural diagram of a pulley according to an embodiment of the present invention;

[0034] Figure 9 This is a schematic structural diagram of an axle pin according to an embodiment of the present invention;

[0035] Figure 10 This is a structural diagram of a clamping member according to an embodiment of the present invention;

[0036] Figure 11 This is a schematic structural diagram of an end cover according to an embodiment of the present invention;

[0037] Figure 12 This is a top view of the pulley and end cover after being fixed according to an embodiment of the present invention.

[0038] Figure markings: 1. upper arm; 2. forearm; 3. end effector; 4. torque transmission mechanism; 41. first pulley; 411. accommodating groove; 4111. side wall; 4112. inner wall; 4113. bottom wall; 412. transition groove; 413. end face; 414. screw hole; 42. second pulley; 43. torque transmission belt; 431. belt body; 432. first end; 433. second end; 434. fixing block; 435. fixing hole; 44. end cover; 441. smooth surface; 442. sinking groove; 443. guide outlet; 444. sinking mounting hole; 445. avoidance groove; 45. pin shaft; 451. base; 452. shaft; 453. limiting portion; 46. clip. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0040] The following is combined with Figure 1 - Attachment Figure 12 , the specific implementation methods of the present invention are further described in detail.

[0041] Reference Figure 1 A vacuum robot arm includes an upper arm 1, a forearm 2 pivotally connected to the end of the upper arm 1, an end effector 3 pivotally connected to the end of the forearm 2, and a torque transmission mechanism 4. In some embodiments of the invention, there are at least two end joint effectors, and both end effectors 3 are pivotally connected to the end of the forearm 2, and adjacent end effectors 3 can rotate relative to each other at the same hinge point. At least one of the upper arm 1 and the forearm 2 has a transmission path, and a torque transmission mechanism 4 is provided in the transmission path. At least one of the upper arm 1 and the forearm 2 has two joints distributed adjacent to each other in the horizontal direction, and the transmission path is defined between the two joints.

[0042] Reference Figure 2 and Figure 3The torque transmission mechanism 4 includes at least two pulleys and a dual opposing belt that connects and transmits torque. The two pulleys are located at either end of the transmission path, each having an outer circumference surrounding its own central axis and end surfaces located axially on either side. The dual opposing belt comprises at least two torque transmission belts 43 tensioned and wrapped around the outer circumferences of the pulleys. In some specific embodiments of the present invention, the pulleys include a first pulley 41 and a second pulley 42. The dual opposing belt connects the first pulley 41 and the second pulley 42 and is capable of transmitting torque.

[0043] Reference Figure 3 In some embodiments of the present invention, the dual relative belt includes a first torque transmission belt 43 and a second torque transmission belt 43, and the first torque transmission belt 43 and the second torque transmission belt 43 are both wrapped around the outer circumference of the pulley with constant tension; at least one end of each torque transmission belt 43 is wrapped relative to itself.

[0044] Reference Figure 4 In some embodiments of the present invention, each torque transmission belt 43 has a belt body 431, wherein the belt body 431 has a first end 432 and a second end 433, wherein the first end 432 and the second end 433 are respectively fixedly connected to two different pulleys, and the belt body 431 is at least partially wound around the outer circumference of one of the pulleys in a clockwise or counterclockwise direction starting from the first end 432, and the belt body 431 is wound clockwise or counterclockwise toward the outer circumference of the other adjacent pulley, and the belt body 431 is completely wound around the outer circumference of the other pulley and is wrapped relative to itself. It should be noted that both torque transmission belts 43 are under constant tension so that neither torque transmission belt 43 will loosen. The winding directions of the two torque transmission belts 43 are opposite, with one winding clockwise and the other winding counterclockwise. Specifically, the two torque transmission belts 43 are arranged opposite to each other, wherein one torque transmission belt 43 covers the first pulley 41 and the second pulley 42 in a clockwise direction, and the other torque transmission belt 43 covers the first pulley 41 and the second pulley 42 in a counterclockwise direction.

[0045] Reference Figure 5 and Figure 6 In some specific embodiments of the present invention, the first end 432 and the second end 433 of the torque transmission belt 43 are both provided with a fixing block 434, and the fixing block 434 is provided with a fixing hole 435, which facilitates fixing the belt body 431 on the pulley.

[0046] Reference Figure 7In some embodiments of the present invention, a receiving groove 411 is provided on the outer circumference of the pulley, and an end cap 44 for fastening the torque transmission belt 43 is detachably connected to the pulley; the receiving groove 411 is partially cut along one end face of the pulley toward the other end face, that is, the receiving groove 411 does not penetrate the two end faces 413 on both sides of the axial direction. The receiving groove 411 has a receiving space that is connected to one end face and the outer circumference of the pulley respectively. The side of the end cap 44 facing away from the pulley is a smooth surface 441, and the smooth surface 441 matches the curvature of the pulley; at least one end of the torque transmission belt 43 is received in the receiving groove 411 and can extend from the receiving groove 411 to completely wrap around the outer circumference of the pulley, and a partial section of the torque transmission belt 43 covers the smooth surface 441. The end cap 44, whose curvature matches the pulley, covers a portion of the belt body 431, allowing the belt body 431 to adaptively adjust its path along the smooth surface 441 during rotation. Moreover, the torque transmission belt 43 starts from the receiving groove 411 and can extend without interference to completely wrap around the outer circumference of the pulley, forming a closed-loop transmission path. When the pulley rotates faster than 360° or exceeds 360°, the torque transmission belt 43 can be guided by the smooth surface 441 to achieve multi-layer orderly winding, completely avoiding the risk of reverse folding, plastic deformation or fracture of the belt body 431 caused by interference from fixed points in traditional structures. The above solution completely breaks through the rotation limitation of the traditional screw fixing method while maintaining the high transmission rigidity and pollution-free characteristics of the metal torque transmission belt 43, and realizes the ability of the joint to rotate at a larger angle.

[0047] In some specific embodiments of the present invention, referring to Figure 8 The receiving groove 411 is radially extended from the outside to the inside along the outer circumference of the pulley, and has a bottom wall 4113, an inner wall 4112, and a side wall 4111. In some embodiments of the present invention, the pin 45 is perpendicular to the inner wall 4112 of the receiving groove 411 and is installed on the inner wall 4112 of the receiving groove 411, and the side wall 4111 abuts against one end of the end cover 44. In other embodiments of the present invention, the pin 45 is installed on the side wall 4111. In this case, the smooth surface 441 of the end cover 44 leaves a clearance space for the pin 45, provided that a complete outer circumference can be formed after the pulleys are spliced.

[0048] In some embodiments of the present invention, reference Figure 1The end cap 44 is a partially circular structure. A recessed groove 442 is defined on the side of the end cap 44 facing away from the smooth surface 441. The recessed groove 442 and the inner wall of the receiving groove 411 form a space for accommodating the end of the torque transmission belt 43. This space has an outlet 443 for the torque transmission belt 43 to exit from the receiving groove 411. The space formed by the recessed groove 442 and the inner wall of the receiving groove 411 completely encloses the end of the torque transmission belt 43, particularly the fixed end, within the pulley, completely isolating the end of the belt body 431 from moving parts. While conventional screw fastening creates a rigid obstruction, the recessed groove 442 creates a space to accommodate the end. This prevents interference with the fasteners even during multiple pulley rotations, completely eliminating the risk of collision or friction between the conventional exposed fixed end and the wrapped belt body 431, thus fundamentally preventing deformation or breakage of the end. The guide outlet 443 serves as the only transition channel for the belt body 431 from the accommodating space to the dynamic winding path, forcing the belt body 431 to be smoothly guided out in a preset direction.

[0049] In some specific embodiments of the present invention, a transition groove 412 is defined on the outer circumference of the pulley. This transition groove 412 communicates with the guide outlet 443 and serves to guide the torque transmission belt 43 to smoothly transition to the outer circumference of the pulley. After the belt body 431 originates from the receiving groove 411, it passes through the guide outlet 443 and naturally transitions tangentially through the transition groove 412 to the outer circumference of the pulley. This eliminates the sharp bend in the initial section of the belt body 431 and significantly reduces local stress concentration.

[0050] In some embodiments of the present invention, reference Figure 9 and Figure 1 The torque transmission mechanism 4 also includes a pin 45 and a clip 46. The pin 45 is fixedly connected to the inner wall of the receiving groove 411. The pin 45 is inserted into the fixing hole 435 and is detachably connected to the torque transmission belt 43 via the clip 46. The fixing block 434 is completely embedded in the receiving groove 411, and its outer surface does not protrude from the outer peripheral surface of the pulley, ensuring that the belt body 431 is in smooth contact with the pulley surface when multiple layers are wound. The provision of the fixing block 434 on the belt body 431 strengthens the connection strength between the pulley and the belt body 431. The plug-in cooperation between the fixing block 434 and the pin 45 avoids the local stress concentration caused by traditional screw locking, significantly reduces the risk of metal fatigue at the belt end, and extends the service life of the belt body 431.

[0051] In some specific embodiments of the present invention, the clamping member 46 is a spring or a quick-release pin. After the end of the torque transmission belt 43 is sleeved on the shaft 452 of the pin 45 through the fixing hole 435, the spring or the quick-release pin is used to limit the position, thereby realizing the quick disassembly of the pin 45 and the fixing block 434. Figure 10 As shown, the clip 46 is a clip spring.

[0052] In some embodiments of the present invention, reference Figures 9-11 The pin 45 comprises a base 451, a shaft 452, and a stopper 453, connected axially in sequence. The shaft 452 has a smaller radius than the base 451 and stopper 453, forming an annular groove. This annular groove is designed to engage the torque transmission band 43, and its width is greater than the thickness of the fixing block 434. The torque transmission band 43 is sleeved onto the shaft 452, with the base 451 securely connected to the inner wall of the receiving groove 411. The double-ended large-diameter structure of the base 451 and stopper 453, combined with the clip 46, creates an axial clamping force on the fixing block 434. The sidewalls of the annular groove withstand tangential tension from the torque transmission band 43, enhancing shear resistance. Furthermore, the groove width, which is greater than the thickness of the fixing block 434, creates an axial floating gap, allowing the band 431 to slightly deflect adaptively in the event of vibration or thermal deformation, eliminating local overload caused by assembly stress and centrifugal force.

[0053] In some embodiments of the present invention, a relief groove 445 is defined at the bottom of the sunken trough 442 to accommodate the stopper 453. The key to the relief groove 445 lies in the three-dimensional spatial reconstruction. The relief groove 445 at the bottom of the sunken trough 442 effectively creates a precise "negative" space for the stopper 453. This allows the stopper 453 to be completely recessed within the pulley body, without adding any additional axial dimension. Traditional designs that leave the stopper 453 exposed would increase the axial length of the entire pulley assembly by at least the thickness of the stopper 453. However, the "embedded" design of the relief groove 445 achieves zero axial space occupation, making the structure even more compact when multiple pulleys are stacked. Furthermore, the sidewalls of the relief groove 445 form a surface-to-surface fit with the stopper 453, diverting the axial load previously borne solely by the end cap 44 to the pulley body. This effectively adds a rigid support base to the fastener, significantly improving its ability to resist bending moments.

[0054] In some embodiments of the present invention, the receiving groove 411 and the transition groove 412 axially extend through one axial end surface 413 and do not extend through the other end surface 413. Pulley assemblies in semiconductor equipment typically require complete disassembly for internal inspection, which is time-consuming and disrupts the vacuum environment. However, pulleys that extend through the outer circumference allow for inspection and maintenance by removing the outer end caps when the pulleys are stacked. This is more convenient and eliminates the need for disassembly, further improving accuracy.

[0055] In some embodiments of the present invention, a sunken mounting hole 444 is defined in the end cap 44, and a screw hole 414 is defined in the pulley. When the end cap 44 is embedded in the receiving groove 411 and the smooth surface 441 engages with the outer circumference of the pulley, the sunken mounting hole 444 corresponds to and communicates with the screw hole 414. Using this solution, a screw is passed through the sunken mounting hole 444 and screwed into the screw hole 414 to secure the end cap 44 to the inner wall of the receiving groove 411 of the pulley. It is necessary to ensure that the end cap 44 is completely in contact with the sidewall of the receiving groove 411 before screwing in to secure the end cap 44. Specifically, when the torque transmission belt 43 is connected to the pulley, the present invention first sleeves the fixing hole 435 of the torque transmission belt 43 on the shaft 452 of the pin 45, then clamps the retaining spring between the fixing block 434 of the torque transmission belt 43 and the limiting portion 453 of the pin 45, and then snaps the end cover 44 into the receiving groove 411, engages the smooth surface 441 of the end cover 44 with the outer peripheral surface of the pulley, and aligns the position of the sinking hole with the screw hole 414. Screw in and fix the end cover 44 in the receiving groove 411 of the pulley, and covers the fixed position of the end of the steel torque transmission belt 43.

[0056] In some embodiments of the present invention, the end of the torque transmission belt 43 can swing slightly relative to the shaft 452 of the pin 45 to adapt to the working conditions of the torque transmission belt 43. A floating gap is formed between the outlet 443 and the torque transmission belt 43 passing through the outlet 443, and the floating gap is used to provide a floating margin for the vibration of the torque transmission belt 43. When the existing vacuum robot arm rotates at high speed, it will cause the torque transmission belt 43 to vibrate. However, the present application converts rigid fixation into articulated micro-motion by providing a floating gap and small swing, thereby absorbing high-frequency vibration energy during the transmission process and avoiding fatigue fracture or even breakage of the belt body 431 caused by stress concentration.

[0057] In some specific embodiments of the present invention, when processing the pulley and the end cover 44, the end cover 44 is first fixed to the pulley, and then the outer peripheral surface of the pulley and the smooth surface 441 of the sliding fastener are processed simultaneously so that their edges are on the same circle to ensure accuracy and concentricity.

[0058] The vacuum manipulator provided by the present invention has the following beneficial effects: by providing a receiving groove 411 on the outer circumferential surface of the pulley and utilizing the end cover 44, not only the end of the torque transmission belt 43 is hidden and fixed in the receiving groove 411, but also the torque transmission belt 43 can be smoothly guided by utilizing the smooth surface 441. Thus, when the pulley rotates more than 360°, the torque transmission belt can wrap relative to itself and the wrapped portion can not contact the fixed point, thereby expanding the rotation angle of the vacuum manipulator joint, increasing the arm posture, and expanding the working range of the arm. Moreover, the fixing method of the end of the torque transmission belt 43 provides a floating amount of the torque transmission belt 43 to adapt to the high-speed rotation of the vacuum manipulator through floating gap and small swing. In addition, the two circumferential end faces of the pulley are open, which makes maintenance easier and improves accuracy when multiple pulleys are stacked.

[0059] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations of these embodiments are possible. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention. Furthermore, the invention described herein is susceptible to other embodiments and may be practiced or implemented in a variety of ways.

Claims

1. A vacuum robot arm, comprising an upper arm (1), a forearm (2) pivotally connected to an end of the upper arm (1), and an end effector (3) pivotally connected to an end of the forearm (2), wherein at least one of the upper arm (1) and the forearm (2) has a transmission path, wherein a torque transmission mechanism (4) is provided in the transmission path, and wherein: The torque transmission mechanism (4) comprises: At least two pulleys, respectively located at two ends of the transmission path, each pulley having an outer peripheral surface surrounding its own central axis and end surfaces (413) located on both sides of the axial direction; A double opposing belt, comprising at least two torque transmission belts (43) of different height levels, each of the torque transmission belts (43) being connected between two pulleys and being tensioned and wrapped around a portion of the outer circumference of two adjacent pulleys; An accommodating groove (411) is formed by cutting along one end surface of the pulley toward the other end surface and passes through one of the two end surfaces (413). The accommodating groove (411) has an accommodating space that is respectively connected to one end surface and the outer peripheral surface of the pulley. The accommodating groove (411) forms an opening on the outer peripheral surface of the pulley. An anchor point, provided on a wall surface of the accommodating groove (411), for detachably fixing an end portion of the torque transmission belt (43); An end cover (44) is embedded in the opening, and an end of the end cover (44) facing away from the pulley is a smooth surface (441), and the curvature of the smooth surface (441) is consistent with that of the outer peripheral surface of the pulley; In which, at least one end portion of the torque transmission belt (43) is detachably fixed by the anchor point and accommodated in the accommodating space. After a portion of the torque transmission belt (43) is guided out of the accommodating space, it is completely covered on the circumferential surface formed by the outer circumferential surface of the pulley and the smooth surface (441) of the end cover (44), and is covered and wound relative to the torque transmission belt (43) itself as the pulley rotates.

2. A vacuum robot arm according to claim 1, characterized in that: Each of the torque transmission belts (43) has a belt body (431), and the belt body (431) has a first end (432) and a second end (433), and the first end (432) and the second end (433) are respectively fixedly connected to two different pulleys, and are at least partially wound around the outer peripheral surface of one of the pulleys in a clockwise or counterclockwise direction with the first end (432) as a starting point, and the belt body (431) is wound clockwise or counterclockwise toward the outer peripheral surface of another adjacent pulley, and the belt body (431) is completely wound around the outer peripheral surface of the other pulley and is wrapped relative to itself.

3. The vacuum robot arm according to claim 1, characterized in that: A sinking groove (442) is provided on a side of the end cover (44) facing away from the smooth surface (441), and the accommodating space has a guide outlet (443) for guiding out the torque transmission belt (43). The torque transmission belt (43) can start from the accommodating groove (411) and be guided out from the guide outlet (443).

4. A vacuum robot arm according to claim 3, characterized in that: The torque transmission mechanism (4) further comprises a pin (45) and a clamping member (46), wherein the anchor point is located on the pin (45), and the pin (45) is fixedly connected to the wall surface of the accommodating groove (411). Both ends of the torque transmission belt (43) are provided with fixing blocks (434), and the fixing blocks (434) are provided with fixing holes (435). The pin (45) is inserted into the fixing holes (435) and is detachably connected to the torque transmission belt (43) via the clamping member (46).

5. A vacuum robot arm according to claim 4, characterized in that: The pin shaft (45) comprises a base portion (451), a shaft portion (452) and a limiting portion (453) connected in sequence along the axial direction. The radius of the shaft portion (452) is smaller than that of the base portion (451) and the limiting portion (453). The torque transmission belt (43) is sleeved on the shaft portion (452). The base portion (451) is fixedly connected to the inner wall of the accommodating groove (411).

6. The vacuum robot arm according to claim 3, characterized in that: A transition groove (412) is provided on the outer circumference of the pulley, the transition groove (412) being in communication with the guide outlet (443), and the transition groove (412) being used to guide the torque transmission belt (43) to smoothly transition to the outer circumference of the pulley.

7. The vacuum robot arm according to claim 4, characterized in that: The accommodating groove (411) has a side wall (4111), a bottom wall (4113), and an inner wall (4112); the pin (45) is arranged on the inner wall (4112) in a direction perpendicular to the inner wall (4112) of the accommodating groove (411); and the side wall (4111) abuts against one end of the end cover (44).

8. The vacuum robot arm according to claim 7, characterized in that: The end cover (44) is provided with a sunken mounting hole (444), and the pulley is provided with a screw hole (414); When the end cover (44) is embedded in the accommodating groove (411) and the smooth surface (441) is engaged with the outer peripheral surface of the pulley, the sunken mounting hole (444) corresponds to and communicates with the screw hole (414).

9. The vacuum robot arm according to claim 5, characterized in that: The bottom wall of the sinking groove (442) is provided with an avoidance groove (445), and the avoidance groove (445) is used to accommodate the limiting portion (453).

10. The vacuum robot arm according to claim 3, characterized in that: A floating gap is formed between the guide port (443) and the torque transmission belt (43) passing through the guide port (443), and the floating gap is used to provide a floating margin for vibration of the torque transmission belt (43).

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