SiC ultrathin reflector pressing device

Abstract

The invention discloses a SiC ultrathin reflector press-fit device, and relates to the technical field of optical assembly press-fit, the SiC ultrathin reflector press-fit device comprises a machine shell, a center sliding rail penetrating through the front and back of the machine shell is arranged in the machine shell, and a first workpiece table and a second workpiece table which are driven by servo are arranged in the center sliding rail in a sliding mode; the machine shell is further provided with an X-axis guide rail parallel to the center sliding rail, a Y-axis guide rail is arranged on the X-axis guide rail in a sliding mode, and a transplanting assembly is arranged in the Y-axis guide rail. A discharging assembly is arranged on one side of the center sliding rail. The transplanting assembly comprises a support, a connecting disc is fixed to the lower end of the support, a suction cup is arranged in the center of the lower portion of the connecting disc, multiple sliding grooves extending in the radial direction are distributed in the circumference of the upper surface of the connecting disc, and a clamping block assembly is arranged in each sliding groove in a sliding mode. According to the invention, through the multi-stage linkage mechanism and action separation design in the press-fit stage, precise control of the bonding layer and zero damage in the press-fit process are realized.

Description

Technical Field

[0001] The present invention relates to the technical field of optical component pressing, and specifically to a pressing device for SiC ultra-thin mirrors. Background Art

[0002] Silicon carbide (SiC) mirrors have become the core optical elements of space optical systems due to their high specific stiffness, low thermal expansion coefficient, and excellent thermal stability. To achieve the goal of light weight, modern space optical devices generally adopt the design of ultra-thin SiC mirrors. However, their extremely thin structure makes the surface shape accuracy vulnerable to assembly stress, and the brittle material characteristics pose a risk of fragmentation during the pressing process.

[0003] Ultra-thin mirrors need to be reliably connected to the substrate and the pressure ring through double-sided pressing. The double-sided pressing forms a symmetric support structure, which can offset the shrinkage stress of the single-sided adhesive layer, prevent the mirror surface from warping, and can also protect the edge of the mirror surface. The pressure ring provides a standardized mechanical interface, facilitating the modular integration of the mirror into optical equipment.

[0004] The current mainstream process adopts a step-by-step pressing technology. The operator places the mirror on the substrate, applies a pre-pressure after aligning with the positioning pins, and then places the pressure ring for secondary pressing. The manual alignment error is difficult to meet the coaxiality requirements of high-curvature mirrors. The adhesive layer is prone to uneven thickness, and local stress concentration after curing leads to surface shape distortion. The single-piece assembly takes a long time, resulting in poor product consistency. Moreover, the bonding, pressure ring alignment, and mirror pressing are carried out step by step, and the process connection errors accumulate.

[0005] Therefore, it is necessary to provide a pressing device for SiC ultra-thin mirrors to solve the problems raised in the above background art. Summary of the Invention

[0006] To achieve the above object, the present invention provides the following technical solution: A pressing device for SiC ultra-thin mirrors, including a machine shell. A central slide rail running through the front and rear of the machine shell is provided inside the machine shell. A servo-driven first workpiece table and a second workpiece table are respectively slidably arranged in the central slide rail. The machine shell is also provided with an X-axis guide rail parallel to the central slide rail. A Y-axis guide rail is slidably arranged on the X-axis guide rail, and a transplanting assembly is arranged in the Y-axis guide rail. An unloading assembly is arranged on one side of the central slide rail. The transplanting assembly includes a bracket. A connecting disc is fixed at the lower end of the bracket. A suction cup is arranged at the center below the connecting disc. A plurality of radially extending chutes are circumferentially distributed on the upper surface of the connecting disc. A clamping block assembly is slidably arranged in each chute.

[0007] Further, the transplanting assembly further includes a sliding seat. The sliding seat is slidably arranged in the Y-axis guide rail. The bracket is slidably arranged in the sliding seat, and an electric lead screw capable of driving the bracket to slide up and down is further arranged in the sliding seat.

[0008] Further, a connecting pipe connected to a vacuum pump is fixed in the bracket. A sleeve is slidably and rotatably arranged below the connecting pipe. The sleeve slidably penetrates through the connecting disk and is fixed to the suction disk.

[0009] Further, a sliding sleeve is rotatably and slidably restrictedly sleeved outside the sleeve. A vertical synchronous belt is arranged in the bracket. The sliding sleeve is fixed to one side of the vertical synchronous belt.

[0010] Further, a horizontal synchronous belt is arranged in the bracket. One synchronous pulley of the horizontal synchronous belt is slidably and rotationally restrictedly connected to the sleeve.

[0011] Further, a turntable is rotatably arranged on the connecting disk. A plurality of arc-shaped grooves are formed in the turntable. Sliding pins are slidably arranged in the arc-shaped grooves. Each sliding pin is respectively connected to each clamping block assembly.

[0012] Further, a bevel gear ring is arranged at the edge of the turntable. A driving bevel gear is arranged in the bracket. The driving bevel gear meshes with the bevel gear ring.

[0013] Further, the clamping block assembly includes a sliding rod. The sliding rod is slidably arranged in a chute. A vertical rod is fixed at the end of the sliding rod. An upper pressing block is fixed on one side of the vertical rod close to the axis of the connecting disk. A lower clamping plate is slidably arranged at the lower end of the vertical rod.

[0014] Further, a sliding plate is slidably arranged on the upper surface of the sliding rod. The sliding pin is fixed in the sliding plate. A sliding shaft is slidably connected above the vertical rod. A spring is sleeved outside the sliding shaft between the sliding plate and the vertical rod. A central connecting rod is rotatably arranged on one side of the vertical rod away from the axis of the connecting disk. A lower connecting rod is hinged in the lower clamping plate. An upper connecting rod is hinged at one end of the sliding shaft away from the sliding plate. The lower connecting rod and the upper connecting rod are respectively hinged to both ends of the central connecting rod.

[0015] Further, the discharging assembly includes a discharging valve with a double output head. The discharging valve is connected to a feeding pump. A vertical sliding rail is fixed at one end of the discharging valve. Sliding blocks are symmetrically arranged above and below the vertical sliding rail. Two discharging nozzles are arranged facing each other on the two sliding blocks. The discharging nozzles are respectively connected to the output heads of the discharging valve. A side sliding rail is fixed on one side of the discharging valve. A side sliding block is slidably arranged in the side sliding rail. Side connecting rods are respectively hinged in the two sliding blocks. Both side connecting rods are hinged to the side sliding block. An electric cylinder is further connected between the side sliding block and the discharging valve.

[0016] Compared with the prior art, the beneficial effects of the present invention are:

[0017] The present invention adopts a dual independent workpiece stage and a multi-axis linkage transfer system, realizing the parallel processing of the substrate, the mirror, and the pressure ring. Through the coordinated motion control of the X / Y / Z three axes, the transfer assembly can accurately complete the continuous operations of pressure ring clamping, mirror adsorption, bonding path positioning, and pressing processes.

[0018] Under the action of the lower clamping plate in the present invention, the distance between the pressure ring and the substrate is fixed. The suction cup drives the mirror to rotate actively, enabling the bonding material to uniformly extend along the circumferential direction. The shear force generated by the rotation can effectively discharge the microbubbles in the bonding material, improving the uniformity of the bonding layer and avoiding the distortion of the mirror surface shape caused by the stress of the bonding layer after curing.

[0019] In the present invention, when the rotation angle of the turntable is less than the preset value, the lower clamping plate remains in the extended state. At this time, the Z-axis movement of the bracket is restricted to a safe height to avoid mechanical collision. After the rotation angle of the turntable is greater than the preset value and triggers the complete retraction of the lower clamping plate, the full-stroke downward pressure permission of the bracket is unlocked. This hardware and software interlock design fundamentally eliminates the risk of equipment collision caused by timing errors and is applicable to the assembly of ultra-thin mirrors. Moreover, the linear motion is converted into the horizontal withdrawal action of the lower clamping plate through a linkage mechanism. This process does not require an additional drive unit to achieve constraint release and ensures that the lower clamping plate withdraws from the working area before the pressing force is applied.

[0020] In the present invention, the transfer assembly adopts a layered structure and realizes the intelligent distance adjustment between the mirror and the pressure ring through vertical synchronous belt control. During the discharging process, the pressure ring is automatically lifted to a safe height to avoid interference with the discharging nozzle. During the pressing stage, the downward pressure is accurately controlled to ensure that the optical elements are not damaged by impact.

[0021] The present invention adopts a dual-output discharging assembly, which can adjust the distance between the upper and lower discharging nozzles in real time to adapt to mirrors of different thicknesses. Combining with the rotation drive function of the transfer assembly, the mirror rotates at a constant speed during the discharging process, realizing the 360° circumferential discharging of the bonding material. Brief Description of the Drawings

[0022] Figure 1 is the overall structural schematic diagram of the present invention;

[0023] Figure 2 is the structural schematic diagram inside the machine shell of the present invention;

[0024] Figure 3 is the structural schematic diagram of the transfer assembly of the present invention;

[0025] Figure 4 is the cross-sectional structural schematic diagram of the connecting disk of the present invention;

[0026] Figure 5 is the cross-sectional structural schematic diagram of the clamping block assembly of the present invention;

[0027] Figure 6Schematic diagram of the structure of the discharging component in the present invention;

[0028] In the figure: 1, machine housing; 2, central slide rail; 21, first workpiece table; 22, second workpiece table; 3, X-axis guide rail; 4, Y-axis guide rail; 5, transplanting component; 51, sliding seat; 52, bracket; 53, electric screw rod; 54, connecting disk; 541, chute; 542, turntable; 543, arc groove; 544, sliding pin; 545, bevel gear ring; 546, driving bevel gear; 55, suction cup; 551, connecting pipe; 552, sliding sleeve; 553, sleeve; 56, clamping block component; 561, sliding rod; 562, vertical rod; 563, upper pressing block; 564, lower clamping plate; 565, sliding plate; 566, sliding shaft; 567, spring; 568, lower connecting rod; 569, upper connecting rod; 5610, central connecting rod; 57, vertical synchronous belt; 58, horizontal synchronous belt; 6, discharging component; 61, discharging valve; 62, vertical slide rail; 63, slider; 64, discharging nozzle; 65, side slide rail; 66, side slider; 67, side connecting rod; 68, electric cylinder. Detailed implementation manners

[0029] Please refer to Figures 1-5 In an embodiment of the present invention, a SiC ultra-thin mirror pressing device includes a machine housing 1. A central slide rail 2 penetrating the front and rear of the machine housing 1 is arranged inside the machine housing 1. A servo-driven first workpiece table 21 and a second workpiece table 22 are respectively slidably arranged in the central slide rail 2;

[0030] The machine housing 1 is further provided with an X-axis guide rail 3 parallel to the central slide rail 2. A Y-axis guide rail 4 is slidably arranged on the X-axis guide rail 3, and a transplanting component 5 is arranged in the Y-axis guide rail 4;

[0031] A discharging component 6 is arranged on one side of the central slide rail 2;

[0032] The transplanting component 5 includes a bracket 52. A connecting disk 54 is fixed at the lower end of the bracket 52. A suction cup 55 is arranged at the center below the connecting disk 54. A plurality of radially extending chutes 541 are circumferentially distributed on the upper surface of the connecting disk 54. A clamping block component 56 is slidably arranged in each chute 541.

[0033] The substrate to be processed is placed on the first workpiece table 21, and the mirror to be processed is placed on the substrate. The pressing ring to be processed is placed on the second workpiece table 22;

[0034] The first workpiece table 21 and the second workpiece table 22 enter the housing 1 from the front and back of the housing 1 respectively. The X-axis guide rail 3 and the Y-axis guide rail 4 drive the transplanting assembly 5 to move onto the second workpiece table 22. The pressing ring is clamped and centered by the clamping block assembly 56. Subsequently, the transplanting assembly 5 moves onto the first workpiece table 21, where the suction cup 55 sucks the mirror and moves it into the discharging assembly 6. Adhesive material is applied to the edges of the upper and lower surfaces of the mirror. Then it moves back onto the first workpiece table 21 and presses the mirror and the pressing ring onto the substrate in sequence, thereby performing double-sided pressing, so that the pressing ring and the substrate are respectively pressed on the upper and lower surfaces of the mirror, improving the protection effect on the mirror and making it convenient to connect the mirror to the optical device.

[0035] In this embodiment, the transplanting assembly 5 further includes a sliding seat 51. The sliding seat 51 is slidably disposed in the Y-axis guide rail 4. The bracket 52 is slidably disposed in the sliding seat 51, and an electric screw rod 53 capable of driving the bracket 52 to slide up and down is further provided in the sliding seat 51.

[0036] The electric screw rod 53 can lift the bracket 52 to pick up and place the mirror and the pressing ring.

[0037] In this embodiment, a connecting pipe 551 connected to a vacuum pump is fixed in the bracket 52. A sleeve 553 is slidably and rotatably disposed below the connecting pipe 551. The sleeve 553 slidably penetrates the connecting disk 54 and is fixed to the suction cup 55.

[0038] In this embodiment, a sliding sleeve 552 is rotatably and non-slidingly sleeved outside the sleeve 553. A vertical synchronous belt 57 is disposed in the bracket 52. The sliding sleeve 552 is fixed to one side of the vertical synchronous belt 57.

[0039] That is to say, the vertical synchronous belt 57 can drive the sleeve 553 and the suction cup 55 to lift, so as to change the distance between the mirror and the pressing ring in the transplanting assembly 5: when the adhesive material is applied to the mirror, the pressing ring is moved away from the mirror to avoid collision with the discharging assembly 6, and when the transplanting assembly 5 performs pressing on the first workpiece table 21, the pressing ring approaches the mirror to play a pressing role.

[0040] In this embodiment, a horizontal synchronous belt 58 is disposed in the bracket 52. One synchronous pulley of the horizontal synchronous belt 58 is slidably and non-rotatably connected to the sleeve 553.

[0041] That is to say, the horizontal synchronous belt 58 can drive the sleeve 553 and the suction cup 55 to rotate, so that the mirror can rotate. During the pressing process, by rotating the mirror, the adhesive material can be evenly smeared circumferentially, so as to reduce the thickness of the adhesive layer and eliminate the bubbles in the adhesive material, improving the bonding degree and the uniformity of the adhesive material.

[0042] In this embodiment, a turntable 542 is rotatably arranged on the connecting plate 54. A plurality of arc-shaped grooves 543 are formed in the turntable 542. A sliding pin 544 is slidably arranged in each arc-shaped groove 543, and each sliding pin 544 is respectively connected to each clamping block assembly 56.

[0043] In this embodiment, a bevel gear ring 545 is provided at the edge of the turntable 542. A driving bevel gear 546 is arranged in the bracket 52, and the driving bevel gear 546 meshes with the bevel gear ring 545.

[0044] That is to say, by driving the turntable 542 to rotate through the driving bevel gear 546, the position of the sliding pin 544 in the arc-shaped groove 543 can be changed, so as to change the radial position of each clamping block assembly 56, so that the clamping block assembly 56 contracts or expands.

[0045] In this embodiment, the clamping block assembly 56 includes a sliding rod 561. The sliding rod 561 is slidably arranged in a sliding groove 541. A vertical rod 562 is fixed at the end of the sliding rod 561. An upper pressing block 563 is fixed on one side of the vertical rod 562 close to the axis of the connecting plate 54. A lower clamping plate 564 is slidably arranged at the lower end of the vertical rod 562.

[0046] The thickness of the lower clamping plate 564 is slightly greater than the thickness of the reflecting mirror. The distance between the upper pressing block 563 and the lower clamping plate 564 is slightly greater than the thickness of the pressing ring. When the sliding rod 561 slides towards the axis of the connecting plate 54, the vertical rod 562 can clamp the pressing ring, and the pressing ring can be clamped between the upper pressing block 563 and the lower clamping plate 564, thereby restricting the up and down displacement of the pressing ring and improving the stability of the pressing ring.

[0047] In this embodiment, a sliding plate 565 is slidably arranged on the upper surface of the sliding rod 561. The sliding pin 544 is fixed in the sliding plate 565. A sliding shaft 566 is slidably connected above the vertical rod 562. A spring 567 is sleeved outside the sliding shaft 566 between the sliding plate 565 and the vertical rod 562;

[0048] A central connecting rod 5610 is rotatably arranged on one side of the vertical rod 562 away from the axis of the connecting plate 54. A lower connecting rod 568 is hinged in the lower clamping plate 564. One end of the sliding shaft 566 away from the sliding plate 565 is hinged with an upper connecting rod 569. The lower connecting rod 568 and the upper connecting rod 569 are respectively hinged to both ends of the central connecting rod 5610.

[0049] That is to say, during the process of clamping the pressing ring, when the turntable 542 rotates to push the sliding pin 544 to slide towards the axis of the connecting plate 54, under the action of the spring 567, the sliding plate 565 and the sliding rod 561 slide simultaneously, so that the sliding rod 561 fits against the side wall of the pressing ring, and the pressing ring is clamped between the upper pressing block 563 and the lower clamping plate 564;

[0050] When the pressing ring moves to the first workpiece table 21 for pressing, the lower clamping plate 564 is stuck between the pressing ring and the substrate, such that the distance between the pressing ring and the substrate is greater than the thickness of the mirror. At this time, the sleeve 553 and the chuck 55 rotate to drive the mirror to rotate, so as to evenly apply the bonding material on the upper and lower surfaces of the mirror circumferentially.

[0051] Since the sliding rod 561 fits against the side wall of the pressing ring, the position of the sliding rod 561 is restricted. The turntable 542 continues to rotate, and the sliding plate 565 pulls the sliding shaft 566 to slide towards the center of the connecting plate 54 against the elastic force of the spring 567. At this time, the upper connecting rod 569 drives the central connecting rod 5610 to rotate, such that the lower connecting rod 568 pulls the lower clamping plate 564 to slide away from the center of the connecting plate 54, so as to withdraw the lower clamping plate 564 from between the pressing ring and the substrate. At this time, by further pressing the bracket 52, the pressing block 563 can generate pressure on the pressing ring and the mirror, so as to press the pressing ring and the mirror onto the substrate.

[0052] In this embodiment, the discharging assembly 6 includes a discharging valve 61 with a double output head. The discharging valve 61 is connected to a feeding pump. One end of the discharging valve 61 is fixed with a vertical slide rail 62. Sliders 63 are symmetrically arranged above and below the vertical slide rail 62. Two discharging nozzles 64 are arranged facing each other on the two sliders 63. The discharging nozzles 64 are respectively connected to the output heads of the discharging valve 61.

[0053] One side of the discharging valve 61 is fixed with a side slide rail 65. A side slider 66 is slidably arranged in the side slide rail 65. Side connecting rods 67 are respectively hinged to the two sliders 63. The two side connecting rods 67 are both hinged to the side slider 66. An electric cylinder 68 is further connected between the side slider 66 and the discharging valve 61.

[0054] That is to say, by pushing the side slider 66 with the electric cylinder 68, the two sliders 63 can be synchronously driven to approach or move away from each other. When the edge of the mirror is between the two discharging nozzles 64, by making the two sliders 63 approach each other, the discharging nozzles 64 can be accurately and evenly attached to the mirror, so as to evenly apply the bonding material on the edges of the upper and lower surfaces of the mirror as the mirror rotates.

[0055] During specific implementation, the substrate to be processed is placed on the first workpiece table 21, the mirror is placed on the substrate, and the pressing ring is placed on the second workpiece table 22.

[0056] The X-axis guide rail 3 and the Y-axis guide rail 4 drive the transplanting assembly 5 to move above the second workpiece table 22. The electric screw rod 53 makes the bracket 52 descend. The clamping block assembly 56 approaches the pressing ring. The driving bevel gear 546 makes the turntable 542 rotate. The sliding pin 544 moves along the arc-shaped groove 543, and pushes the sliding rod 561 of the clamping block assembly 56 to radially contract. The pressing ring is clamped by the upper pressing block 563 and the lower clamping plate 564 to complete the center alignment.

[0057] The transplanting assembly 5 moves to the first workpiece table 21, the suction cup 55 descends to adsorb the mirror, the vertical synchronous belt 57 drives the sleeve 553 to descend, so that the pressing ring keeps a safe distance from the mirror, the transplanting assembly 5 moves to the position of the discharging assembly 6, the electric cylinder 68 pushes the side slider 66, drives the side connecting rod 67 to adjust the distance between the discharging nozzles 64, fits the edge of the mirror, the horizontal synchronous belt 58 drives the suction cup 55 to rotate, the mirror rotates synchronously, and the discharging valve 61 uniformly applies the bonding material to the upper and lower edges of the mirror;

[0058] The transplanting assembly 5 returns to the first workpiece table 21, the pressing ring moves onto the first workpiece table 21 for pressing, the lower clamping plate 564 is stuck between the pressing ring and the substrate, the sleeve 553 and the suction cup 55 rotate to drive the mirror to rotate, so as to evenly apply the bonding material on the upper and lower surfaces of the mirror circumferentially;

[0059] The turntable 542 continues to rotate to pull out the lower clamping plate 564 from between the pressing ring and the substrate, the bracket 52 continues to press down, and generates pressure on the pressing ring and the mirror through the upper pressing block 563, so as to press the pressing ring and the mirror onto the substrate.

[0060] The above is only the preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent replacements or changes, and should be covered by the protection scope of the present invention.

Claims

1. A SiC ultra-thin mirror pressing device, characterized in that It includes a housing (1), and a central slide rail (2) running through the front and back thereof is arranged inside the housing (1). A servo-driven first workpiece table (21) and a second workpiece table (22) are respectively slidably arranged in the central slide rail (2); The housing (1) is further provided with an X-axis guide rail (3) parallel to the central slide rail (2). A Y-axis guide rail (4) is slidably arranged on the X-axis guide rail (3), and a transplanting assembly (5) is arranged in the Y-axis guide rail (4); A discharging assembly (6) is arranged on one side of the central slide rail (2); The transplanting assembly (5) includes a bracket (52). A connecting disc (54) is fixed to the lower end of the bracket (52). A suction cup (55) is arranged at the center below the connecting disc (54). A plurality of radially extending chutes (541) are circumferentially distributed on the upper surface of the connecting disc (54). A clamping block assembly (56) is slidably arranged in each chute (541).

2. The SiC ultra-thin mirror pressing device according to claim 1, wherein, The transplanting assembly (5) further includes a sliding seat (51). The sliding seat (51) is slidably arranged in the Y-axis guide rail (4). The bracket (52) is slidably arranged in the sliding seat (51), and an electric lead screw (53) capable of driving the bracket (52) to slide up and down is further arranged in the sliding seat (51).

3. The SiC ultra-thin mirror pressing device according to claim 1, characterized in that, A connecting pipe (551) connected to a vacuum pump is fixed in the bracket (52). A sleeve (553) is slidably and rotatably arranged below the connecting pipe (551). The sleeve (553) slidably penetrates the connecting disc (54) and is fixed to the suction cup (55).

4. A SiC ultra-thin mirror pressing device according to claim 3, characterized in that, A sliding sleeve (552) is rotatably and non-slidingly sleeved outside the sleeve (553). A vertical synchronous belt (57) is arranged in the bracket (52). The sliding sleeve (552) is fixed to one side of the vertical synchronous belt (57).

5. The SiC ultra-thin mirror pressing device according to claim 3, characterized in that, A horizontal synchronous belt (58) is arranged in the bracket (52). One synchronous pulley of the horizontal synchronous belt (58) is slidably and non-rotatably connected to the sleeve (553).

6. The SiC ultra-thin mirror pressing device according to claim 1, characterized in that, A turntable (542) is rotatably arranged on the connecting disc (54). A plurality of arc-shaped grooves (543) are formed in the turntable (542). A sliding pin (544) is slidably arranged in each arc-shaped groove (543). Each sliding pin (544) is respectively connected to each clamping block assembly (56).

7. The SiC ultra-thin mirror pressing device according to claim 6, characterized in that, There is a ring of bevel gear rings (545) at the edge of the turntable (542). A driving bevel gear (546) is arranged in the bracket (52). The driving bevel gear (546) meshes with the bevel gear ring (545).

8. A SiC ultra-thin mirror pressing device according to claim 6, characterized in that, The clamping block assembly (56) includes a slide bar (561). The slide bar (561) is slidably arranged in the chute (541). A vertical rod (562) is fixed to the end of the slide bar (561). An upper pressing block (563) is fixed to the side of the vertical rod (562) close to the axis of the connecting disc (54). A lower clamping plate (564) is slidably arranged at the lower end of the vertical rod (562).

9. A SiC ultra-thin mirror pressing device according to claim 8, characterized in that, A slide plate (565) is slidably arranged on the upper surface of the slide bar (561). The sliding pin (544) is fixed to the slide plate (565). A slide shaft (566) is slidably connected above the vertical rod (562). A spring (567) is sleeved outside the slide shaft (566) between the slide plate (565) and the vertical rod (562). A central connecting rod (5610) is rotatably arranged on one side of the vertical rod (562) away from the axis of the connecting disk (54). A lower connecting rod (568) is hinged in the lower clamping plate (564). One end of the slide shaft (566) away from the slide plate (565) is hinged with an upper connecting rod (569). The lower connecting rod (568) and the upper connecting rod (569) are respectively hinged to both ends of the central connecting rod (5610).

10. The SiC ultra-thin mirror pressing device according to claim 1, wherein, The discharging assembly (6) includes a discharging valve (61) with a double output head. The discharging valve (61) is connected to a feeding pump. A vertical slide rail (62) is fixed to one end of the discharging valve (61). Sliders (63) are symmetrically arranged above and below the vertical slide rail (62). Two discharging nozzles (64) are arranged facing each other between the two sliders (63). The discharging nozzles (64) are respectively connected to the output heads of the discharging valve (61). A side slide rail (65) is fixed to one side of the discharging valve (61). A side slider (66) is slidably arranged in the side slide rail (65). Side connecting rods (67) are respectively hinged in the two sliders (63). Both of the two side connecting rods (67) are hinged to the side slider (66). An electric cylinder (68) is further connected between the side slider (66) and the discharging valve (61).

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