Semiconductor part three-coordinate surface precision measuring instrument and measuring method thereof

Abstract

The invention relates to the technical field of three-coordinate measuring equipment, in particular to a semiconductor part three-coordinate surface precision measuring instrument and a measuring method thereof.The measuring instrument comprises a machine table, a detecting table, a transverse moving module, a measuring module and a corrugated pipe are installed on the machine table, an installing disc for fixing the corrugated pipe is installed on the machine table and the detecting table, and an inserting plate is installed on the corrugated pipe; a slot is formed in the mounting disc; a fixing rod is mounted on the mounting disc, a pressing plate is rotatably mounted on the fixing rod, a lifting rod is slidably mounted on the mounting disc, the lifting rod abuts against the pressing plate, a fixing disc is mounted on the lifting rod, the lifting rod is sleeved with a second spring, and a limiting strip is mounted at the end, away from the pressing plate, of the lifting rod; a connecting rod is mounted on the fixing disc, a supporting plate is mounted on the mounting disc, a rotating rod is rotationally mounted on the supporting plate, the connecting rod is in sliding connection with the rotating rod, and a baffle for fixing the pressing plate is connected to the rotating rod. The method has the effect of improving the convenience of the three-coordinate surface precision measuring instrument of the semiconductor part in the operation process.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor measurement equipment, in particular to a three-coordinate surface precision measuring instrument for semiconductor parts and its measuring method. Background Art

[0002] A three-coordinate measuring instrument refers to an instrument that can exhibit measurement capabilities such as geometric shape, length, and circumferential indexing within a six-sided space range, also known as a three-coordinate measuring machine or a three-coordinate measuring bed. In some high-precision semiconductor processing equipment, there are high requirements for the surface precision of processed parts and products. After production, it is necessary to use a three-coordinate measuring instrument to detect the precision of some parts to ensure the processing quality.

[0003] On a three-coordinate measuring instrument, a detection table is usually provided to carry and move parts. To ensure that the detection table can accurately move to a specified position, a bellows is usually installed on the three-coordinate measuring instrument to protect the components that control the movement of the detection table and prevent the components from being damaged and affecting the measurement accuracy. After long-term use of the bellows, the bellows may be damaged or cracked. Therefore, it is necessary to replace and maintain the bellows. When most equipment installs the bellows, it is fastened and installed through a flange and bolts. When disassembling and assembling the bellows, auxiliary tools such as wrenches are required, and it is difficult to control the tightening degree of the bolts. Over-tightening the bolts will also increase the difficulty of disassembly and assembly. Summary of the Invention

[0004] In order to improve the convenience of the three-coordinate surface precision measuring instrument for semiconductor parts during operation, this application provides a three-coordinate surface precision measuring instrument for semiconductor parts.

[0005] This application provides a three-coordinate surface precision measuring instrument for semiconductor parts, adopting the following technical solutions: A three-coordinate surface precision measuring instrument for semiconductor parts includes a machine table. A detection table is installed on the machine table. A transverse movement module for controlling the movement of the detection table is installed on the machine table. A bellows for protecting the transverse movement module is installed on the detection table. An installation plate for fixing the bellows is installed on the machine table and the detection table. An insertion plate is installed on the bellows. A slot for accommodating the insertion plate is opened on the installation plate. A fixing rod is installed on the installation plate. A pressing plate is rotatably installed on the fixing rod. A lifting rod is slidably installed on the installation plate. One end of the lifting rod close to the pressing plate abuts against the pressing plate. A fixing disk is installed on the lifting rod. A second spring is sleeved on the lifting rod. A limiting strip is installed at the end of the lifting rod away from the pressing plate. A connecting rod is installed on the fixing disk. A support plate is installed on the installation plate. A rotating rod is rotatably installed on the support plate. The connecting rod is slidably connected to the rotating rod. A baffle for fixing the pressing plate is connected to the rotating rod. A measuring module for performing measurements is installed on the machine table.

[0006] By adopting the above technical solution, the parts are placed on the inspection table, and the inspection table is controlled by the transverse movement module to move the parts to the inspection position, and the measurement module is used for rapid measurement, so as to facilitate quickly obtaining the dimensions and precision of the parts. When it is necessary to replace and maintain the bellows on the measuring instrument, when installing the bellows, the plug plate on the bellows is inserted into the slot on the mounting plate, and the pressure plate is pressed to make the pressure plate rotate. The pressure plate will push the lifting rod to move in the direction close to the plug plate, and finally push the limiting strip against the vertical side wall of the plug plate to limit the plug plate and prevent the plug plate from falling off the mounting plate, so that the bellows can be quickly fixed. The fixed plate drives the connecting rod to move, and the connecting rod drives the baffle to move to facilitate the fixing of the pressure plate; when it is necessary to unlock the bellows, the baffle is pushed away from the pressure plate to unlock the pressure plate, and the pressure plate is released. The second spring rebounds to control the movement of the lifting rod to make the limiting strip leave the plug plate, so as to facilitate quickly unlocking the plug plate. The whole process completes the quick disassembly and assembly of the bellows by controlling the pressing of the pressure plate, without borrowing other auxiliary tools, which is beneficial to enhancing the convenience of the coordinate measuring instrument during use and maintenance.

[0007] In a specific feasible embodiment, an adjusting rod is slidably mounted on the mounting plate. A meshing tooth is provided on the side wall of the adjusting rod close to the rotating rod. A toothed disc is mounted at one end of the rotating rod close to the adjusting rod. The toothed disc is meshed and connected with the adjusting rod. A carrier plate is mounted on the adjusting rod. A receiving groove is provided on the carrier plate. The baffle is slidably mounted on the carrier plate through the receiving groove.

[0008] By adopting the above technical solution, the baffle is connected as a movable part by using the connecting rod, the toothed disc and the adjusting rod. When the baffle fixes the pressure plate, the second spring rebounds, so that the pressure plate and the baffle interact with each other. The mutual pressing between the pressure plate and the baffle can also enhance the stability of the baffle against the pressure plate and prevent the baffle from moving into the receiving groove during use.

[0009] In a specific feasible embodiment, a second guide rod is mounted on the mounting plate. A lifting block is slidably mounted on the second guide rod. A first spring is sleeved on the second guide rod. One end of the first spring is connected with the lifting block, and the other end is connected with the mounting plate. One end of the lifting block close to the pressure plate is set as an outward convex arc surface. A convex block is mounted on the pressure plate. The convex block abuts against the arc surface of the lifting block. A pressing strip is mounted at the end of the lifting block away from the pressure plate.

[0010] By adopting the above technical solution, pressing the pressing plate causes the pressing plate to rotate. The convex block on the pressing plate will squeeze the lifting block. Through the action of the arc surface, the convex block will press the lifting block to move closer to the plug board, and finally the pressing strip will press on the plug board. By pressing the plug board with the pressing strip, the corrugated pipe can be quickly fixed, enhancing the stability of the installation plate for fixing the corrugated pipe and making the installation of the corrugated pipe more stable.

[0011] In a specific feasible implementation, the pressing strip is made of rubber material.

[0012] By adopting the above technical solution, the pressing strip is made of rubber material, which can increase the friction with the plug board and also protect the plug board to prevent the plug board from coming into hard contact with the pressing strip, resulting in wear and breakage of the pressing strip.

[0013] In a specific feasible implementation, a dial plate is installed on the pressing plate, a limiting rod is slidably installed on the installation plate, a dial groove is formed on the limiting rod, one end of the dial plate away from the pressing plate extends into the dial groove, and the dial plate is movably connected to the limiting rod through the dial groove.

[0014] By adopting the above technical solution, after unlocking the pressing plate, the dial plate will push the limiting rod against the installation plate to limit the pressing plate, preventing the pressing plate from rotating too much, so that the pressing plate can stay and press against the lifting rod, facilitating the staff to press the pressing plate next time.

[0015] In a specific feasible implementation, anti-slip patterns are provided on the pressing plate and / or the baffle plate.

[0016] By adopting the above technical solution, the anti-slip patterns on the pressing plate and the baffle plate facilitate the staff to control the pressing plate and the baffle plate, and press the pressing plate and push the baffle plate.

[0017] In a specific feasible implementation, the transverse movement module includes a lead screw, the lead screw is rotatably installed on the machine table, a motor for controlling the rotation of the lead screw is fixedly installed on the machine table, the detection table is threadedly connected to the lead screw, a first guide rod is fixedly installed on the machine table, the first guide rod is arranged parallel to the lead screw, and the first guide rod passes through the detection table and is slidably connected to the detection table.

[0018] By adopting the above technical solution, the motor drives the lead screw to rotate, controlling the detection table to slide on the first guide rod and the lead screw, facilitating the rapid and stable movement of the detection table to the detection position.

[0019] In a specific feasible implementation, a cushion block is fixedly installed on the detection table.

[0020] By adopting the above technical solution, placing the parts on the cushion block facilitates the rapid positioning of the parts.

[0021] A method for measuring a semiconductor component, based on the three-coordinate surface precision measuring instrument for semiconductor components described in claims 1-8, characterized in that it includes the following steps: Step 1: Environmental inspection, ensuring that the temperature of the measurement environment is controlled within 20±2°C, the humidity is 40%-60%, and vibration interference is avoided; Step 2; Clean the equipment, and clean the guide rail and the workbench surface; Step 3: Fix the workpiece, place the component on the spacer block 21, ensure no displacement during the measurement process, and adjust complex workpieces to the optimal measurement posture; Step 4: Probe configuration, select the probe type and probe attachment according to the measured feature, and check the collision protection function after installation; Step 5: Probe calibration, calibrate the probe using a standard ball to ensure the measurement accuracy; Step 6: Establish a coordinate system, collect more than three points on the surface of the workpiece, and define the reference plane; Step 7: Measurement, preset the program control path, cooperate with the measurement module, and complete the efficient measurement of complex shapes by combining multi-point sampling.

[0022] By adopting the above technical solutions, the three-coordinate measuring instrument adopts advanced measurement technologies and precise mechanical systems, such as the application of high-precision self-cleaning air bearings, hollow granite, and aviation aluminum alloy and other materials, as well as configurations such as high-precision grating scales and DC servo drives, and can achieve high-precision measurements. Its system resolution can reach 0.078 microns, ensuring the accuracy and reliability of the measurement results. The three-coordinate measuring instrument is equipped with a computer program control system, making the measurement process automated, reducing manual intervention, and lowering the operation difficulty. Through automated measurement and data processing, the measurement efficiency can be greatly improved. Especially in mass production inspections, its automated features will greatly enhance the production efficiency.

[0023] In summary, the present application includes at least one of the following beneficial technical effects: 1. Place the part on the inspection table. The inspection table is controlled by the transverse movement module to move the part to the inspection position, and the measurement module is used for rapid measurement, so as to facilitate quickly obtaining the size and precision of the part. When it is necessary to replace and maintain the bellows on the measuring instrument, during the installation of the bellows, insert the insertion plate on the bellows into the slot on the installation disk, press the pressure plate to make the pressure plate rotate. The pressure plate will push the lifting rod to move in the direction close to the insertion plate, and finally push the limiting strip against the vertical side wall of the insertion plate to limit the insertion plate and prevent the insertion plate from falling off the installation disk, enabling rapid fixation of the bellows. The fixed disk drives the connecting rod to move, and the connecting rod drives the baffle to move to facilitate the fixation of the pressure plate; when it is necessary to unlock the bellows, push the baffle away from the pressure plate to unlock the pressure plate, release the pressure plate, and the second spring rebounds to control the movement of the lifting rod to make the limiting strip leave the insertion plate, thus facilitating rapid unlocking of the insertion plate. The entire process completes the rapid disassembly and assembly of the bellows by controlling the pressing of the pressure plate, without borrowing other auxiliary tools, which is beneficial to enhancing the convenience of the coordinate measuring instrument during use and maintenance. Description of the Drawings

[0024] Figure 1 is the overall structural schematic diagram of the coordinate measuring instrument according to the embodiment of the present application.

[0025] Figure 2 is the schematic diagram of the transverse movement module according to the embodiment of the present application.

[0026] Figure 3 is the schematic diagram of the installation disk according to the embodiment of the present application.

[0027] Figure 4 is the cross-sectional view of the installation disk according to the embodiment of the present application.

[0028] Figure 5 is the schematic diagram of the installation structure of the lifting block reflecting the embodiment of the present application.

[0029] Figure 6 is the schematic diagram of the installation structure of the lifting rod reflecting the embodiment of the present application.

[0030] Figure 7 is Figure 6 the enlarged view of part A in

[0031] Reference numerals: 1, machine platform; 2, inspection table; 21, cushion block; 22, corrugated pipe; 221, insertion plate; 23, mounting plate; 231, slot; 232, mounting groove; 241, fixing rod; 242, pressing plate; 243, second guide rod; 244, lifting block; 245, first spring; 246, convex block; 247, pressing strip; 251, lifting rod; 252, fixing disk; 253, second spring; 254, limiting strip; 261, support plate; 262, rotating rod; 2621, sliding groove; 263, connecting rod; 2631, sliding rod; 264, adjusting rod; 265, gear disk; 266, carrier plate; 2661, folding groove; 267, baffle; 27, third spring; 281, dialing plate; 282, limiting rod; 2821, dialing groove; 3, transverse movement module; 31, lead screw; 32, motor; 33, first guide rod; 4, measuring module. Detailed implementation manners

[0032] The following further elaborates on this application in conjunction with the attached Figures 1-7 drawings.

[0033] The embodiment of this application discloses a three - coordinate surface precision measuring instrument for semiconductor parts. Referring to Figure 1 and Figure 2 , it includes a machine platform 1, an inspection table 2 is installed on the machine platform 1, a transverse movement module 3 for controlling the movement of the inspection table 2 is installed on the machine platform 1, and a measuring module 4 for measurement is installed on the machine platform 1.

[0034] Place the part on the inspection table 2, and the transverse movement module 3 controls the movement of the inspection table 2 to transport the part to the inspection position, and the measuring module 4 is used for rapid measurement, so as to facilitate quickly obtaining the size and precision of the part.

[0035] The transverse movement module 3 includes a lead screw 31, the lead screw 31 is rotatably installed on the machine platform 1, a motor 32 for controlling the rotation of the lead screw 31 is fixedly installed on the machine platform 1, the inspection table 2 is threadedly connected to the lead screw 31, and a first guide rod 33 is fixedly installed on the machine platform 1. The first guide rod 33 is arranged parallel to the lead screw 31, and the first guide rod 33 passes through the inspection table 2 and is slidably connected to the inspection table 2.

[0036] The motor 32 drives the lead screw 31 to rotate, controlling the inspection table 2 to slide on the first guide rod 33 and the lead screw 31, which is convenient for quickly and stably moving the inspection table 2 to the inspection position.

[0037] A cushion block 21 is fixedly installed on the inspection table 2. When the part needs to be supported, place the part on the cushion block 21, and the cushion block 21 supports the part.

[0038] In the embodiments of the present application, the measurement module 4 is a prior art, and its measurement principle is the same as that of the measurement module of a basic three-coordinate measuring instrument. In the embodiments of the present application, the measurement module 4 of the three-coordinate measuring instrument will not be elaborated.

[0039] Referring to Figure 2 and Figure 3 , bellows 22 for protecting the lead screw 31 and the first guide rod 33 are installed on the machine table 1 and the inspection table 2. Mounting disks 23 for quickly disassembling and assembling the bellows 22 are installed on the machine table 1 and the inspection table 2, and the cross-sectional shape of the mounting disk 23 is hexagonal. Referring to Figure 4 and Figure 5 , an insertion plate 221 is fixedly installed on the bellows 22. The insertion plate 221 is an L-shaped plate, and a slot 231 for accommodating the insertion plate 221 is formed on the mounting disk 23. An installation groove 232 is formed on the mounting disk 23, and a fixing rod 241 is fixedly installed on the mounting disk 23. The fixing rod 241 is arranged in the installation groove 232, and a pressing plate 242 is rotatably installed on the fixing rod 241. Anti-slip lines are provided on the pressing plate 242. A second guide rod 243 is fixedly installed on the mounting disk 23, and a lifting block 244 is slidably installed on the second guide rod 243. A first spring 245 is sleeved on the second guide rod 243. One end of the first spring 245 is fixedly connected to the lifting block 244, and the other end is fixedly connected to the mounting disk 23. The end of the lifting block 244 close to the pressing plate 242 is formed into a convex arc surface, and a convex block 246 is fixedly installed on the pressing plate 242. The convex block 246 abuts against the arc surface of the lifting block 244. A pressing strip 247 is fixedly installed on the bottom surface of the lifting block 244, and the pressing strip 247 is made of soft rubber material.

[0040] When installing the bellows 22, insert the insertion plate 221 on the bellows 22 into the slot 231 on the mounting disk 23, press the pressing plate 242 to make the pressing plate 242 rotate on the fixing rod 241. The convex block 246 on the pressing plate 242 will squeeze the lifting block 244. Through the action of the arc surface, the convex block 246 will press the lifting block 244 to move close to the insertion plate 221, and finally the pressing strip 247 will press on the insertion plate 221. By pressing the insertion plate 221 with the pressing strip 247, the bellows 22 can be quickly fixed. The pressing strip 247 is made of rubber material, which can increase the friction with the insertion plate 221 and can also protect the insertion plate 221 to prevent the insertion plate 221 from being worn and broken due to hard contact with the pressing strip 247.

[0041] Referring to Figure 4 and Figure 6A lifting rod 251 is slidably installed on the mounting plate 23, and a fixed plate 252 is fixedly installed on the lifting rod 251. A second spring 253 is sleeved on the lifting rod 251, and one end of the second spring 253 is fixedly connected to the fixed plate 252, and the other end is fixedly connected to the mounting plate 23. The lifting rod 251 is vertically arranged below the pressure plate 242, and the end of the lifting rod 251 close to the pressure plate 242 abuts against the pressure plate 242, and the end of the lifting rod 251 away from the pressure plate 242 is fixedly installed with a limit strip 254.

[0042] When the pressing plate 242 is pressed, the pressing plate 242 will also push the lifting rod 251 to move towards the plugging plate 221, and finally push the limiting bar 254 against the vertical side wall of the plugging plate 221, limiting the plugging plate 221 and preventing the plugging plate 221 from falling off the mounting plate 23.

[0043] Reference Figure 5 、 Figure 6 and Figure 7 A support plate 261 is fixedly mounted on the mounting plate 23. A rotating rod 262 is rotatably mounted on the support plate 261. A sliding groove 2621 is defined on the end of the rotating rod 262 near the lifting rod 251. A connecting rod 263 is fixedly mounted on the fixed plate 252. A sliding rod 2631 is mounted on the connecting rod 263. The sliding rod 2631 passes through the sliding groove 2621 and is slidably connected to the rotating rod 262 via the sliding groove 2621. An adjusting rod 264 is slidably mounted on the mounting plate 23. Meshing teeth are defined on the sidewall of the adjusting rod 264 near the rotating rod 262. A toothed disc 265 is mounted on the end of the rotating rod 262 near the adjusting rod 264. The toothed disc 265 is meshed with the adjusting rod 264. A carrier plate 266 is fixedly mounted on the adjustment rod 264. The carrier plate 266 defines a retractable slot 2661. A baffle 267 is slidably mounted on the carrier plate 266. The baffle 267 is positioned within the retractable slot 2661 and has anti-slip grooves. A third spring 27 is fixedly mounted on the mounting plate 23. The third spring 27 is positioned below the pressure plate 242, and the end of the third spring 27 facing away from the mounting plate 23 is fixedly connected to the pressure plate 242.

[0044] When the pressing plate 242 presses the lifting rod 251 to move, the lifting rod 251 drives the connecting rod 263 to move. The connecting rod 263 presses the rotating rod 262 to rotate through the sliding rod 2631. One end of the rotating rod 262 close to the lifting rod 251 descends, and one end of the rotating rod 262 where the gear disk 265 is installed ascends. The gear disk 265 will push the adjusting rod 264 to ascend, and the adjusting rod 264 drives the carrier plate 266 to rise. When the pressing strip 247 and the limiting strip 254 abut against the insertion plate 221, the carrier plate 266 and the baffle 267 just move above the pressing plate 242. At this time, the pressing plate 242 is also in a horizontal state. Push the baffle 267 to move onto the pressing plate 242. At this time, stop pressing the pressing plate 242. The third spring 27 will rebound to support the pressing plate 242 and cause the pressing plate 242 to have a tendency to rotate, so that the top surface of the pressing plate 242 can abut tightly against the bottom surface of the baffle 267. At the same time, the second spring 253 will generate an upward thrust on the lifting rod 251. The lifting rod 251 has a tendency to move upward, and will push the pressing plate 242 to rotate together with the third spring 27. Moreover, the lifting rod 251 will also drive the connecting rod 263 to push the rotating rod 262 to rotate. The rotating rod 262 will drive the carrier plate 266 and the baffle 267 to move downward so that the bottom surface of the baffle 267 presses tightly against the top surface of the pressing plate 242, thus completing the rapid locking of the pressing plate 242. The mutual abutment between the pressing plate 242 and the baffle 267 can also enhance the stability of the baffle 267 against the pressing plate 242 and prevent the baffle 267 from moving into the receiving groove 2661 during use.

[0045] A dial plate 281 is fixedly installed on the pressing plate 242. A limiting rod 282 is slidably installed on the mounting disc 23. A dial groove 2821 is formed on the limiting rod 282. One end of the dial plate 281 away from the pressing plate 242 extends into the dial groove 2821. The dial plate 281 is movably connected with the limiting rod 282 through the dial groove 2821.

[0046] When the pressing plate 242 rotates clockwise, the dial plate 281 will drive the limiting rod 282 to lift. When the corrugated pipe 22 is damaged or needs to be replaced and maintained, push the baffle 267 into the receiving groove 2661. The third spring 27 pushes the pressing plate 242 to rotate counterclockwise. The dial plate 281 will push the limiting rod 282 to abut against the mounting disc 23 to limit the pressing plate 242 and prevent the pressing plate 242 from rotating too much. When the lifting block 244 and the lifting rod 251 lose the pressure of the pressing plate 242, the first spring 245 will push the lifting block 244 away from the insertion plate 221, and the second spring 253 will push the limiting strip 254 away from the insertion plate 221, achieving the rapid unlocking of the insertion plate 221, facilitating the replacement of the corrugated pipe 22, and being beneficial to improving the convenience during the replacement of the corrugated pipe 22 in the maintenance process of the measuring instrument.

[0047] The embodiment of the present application also provides a measuring method for semiconductor parts, including the following steps: Step 1: Environmental inspection. Ensure that the temperature of the measurement environment is controlled within 20±2°C, the humidity is 40%-60%, and vibration interference is avoided. Step 2: Clean the equipment, including the guide rail and the workbench surface. Step 3: Fix the workpiece. Place the part on the spacer 21 to ensure no displacement during the measurement process. For complex workpieces, move and adjust them on the spacer 21 to the optimal measurement posture. Step 4: Probe configuration. Select the probe type and probe accessories according to the measured feature. After installation, check the collision protection function. Step 5: Probe calibration. Calibrate the probe using a standard ball to ensure the measurement accuracy. Step 6: Establish a coordinate system. Collect more than three points on the workpiece surface and define the reference plane. Step 7: Measurement. Preset the program control path and complete the efficient measurement of complex shapes by combining multi-point sampling.

[0048] High-precision measurement: The coordinate measuring machine adopts advanced measurement technologies and precise mechanical systems. For example, the application of high-precision self-cleaning air bearings, materials such as hollow granite and aerospace aluminum alloy, as well as configurations such as high-precision grating scales and DC servo drives, enables high-precision measurement. Its system resolution can reach 0.078 microns, ensuring the accuracy and reliability of the measurement results.

[0049] Automation and high efficiency: The coordinate measuring machine is equipped with a computer program control system, which makes the measurement process automated, reduces manual intervention, and lowers the operation difficulty. Through automated measurement and data processing, the measurement efficiency can be greatly improved. Especially in mass production inspections, its automated features will significantly enhance the production efficiency.

[0050] Wide applicability: The coordinate measuring machine is applicable to various types and shapes of workpieces, including parts, assemblies, plastic parts, rubber parts, etc. It has a wide range of applications in multiple fields such as automotive manufacturing, aerospace, electronics manufacturing, mold manufacturing, etc. In addition, it can be used in conjunction with other equipment to achieve a more efficient automated production line.

[0051] Data traceability: The coordinate measuring machine can record the measurement data of the workpiece and generate a measurement report. These data can be used for product quality control, production process monitoring, and product traceability, etc. By comparing the measurement data with the design drawings, the consistency between product quality and design requirements can be ensured.

[0052] Efficient measurement: Compared with traditional manual measurement methods, the coordinate measuring machine shows significant advantages in terms of time efficiency and measurement complexity. Its high-speed motion system and optimized measurement algorithms greatly shorten the entire measurement cycle, thus saving valuable time and costs.

[0053] Stability and reliability: The coordinate measuring machine has high stability and reliability and can maintain the measurement accuracy during long-term use. This is very important for the production and quality control of high-precision parts and can ensure the stability and consistency of product quality.

[0054] The implementation principle of the embodiment of this application is as follows: Place the part on the detection table 2, and the detection table 2 is controlled by the transverse movement module 3 to move the part to the detection position, and the measurement module 4 is used for rapid measurement, so as to facilitate quickly obtaining the size and accuracy of the part.

[0055] The above are all preferred embodiments of this application. The protection scope of this application is not limited accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of this application shall be covered within the protection scope of this application.

Claims

1. A three - coordinate surface precision measuring instrument for semiconductor parts, characterized in that: It includes a machine table (1), on which a detection table (2) is installed. A cross-movement module (3) for controlling the movement of the detection table (2) is installed on the machine table (1). A bellows (22) for protecting the cross-movement module (3) is installed on the detection table (2). Mounting plates (23) for fixing the bellows (22) are installed on the machine table (1) and the detection table (2). An insertion plate (221) is installed on the bellows (22). A slot (231) for accommodating the insertion plate (221) is formed on the mounting plate (23). A fixing rod (241) is installed on the mounting plate (23). A pressing plate (242) is rotatably installed on the fixing rod (241). A lifting rod (251) is slidably installed on the mounting plate (23). One end of the lifting rod (251) close to the pressing plate (242) abuts against the pressing plate (242). A fixing disk (252) is installed on the lifting rod (251). A second spring (253) is sleeved on the lifting rod (251). A limiting strip (254) is installed at the end of the lifting rod (251) away from the pressing plate (242). A connecting rod (263) is installed on the fixing disk (252). A support plate (261) is installed on the mounting plate (23). A rotating rod (262) is rotatably installed on the support plate (261). The connecting rod (263) is slidably connected to the rotating rod (262). A baffle (267) for fixing the pressing plate (242) is connected to the rotating rod (262). A measuring module (4) for measurement is installed on the machine table (1).

2. The three - coordinate surface precision measuring instrument for semiconductor parts according to claim 1, wherein: An adjusting rod (264) is slidably installed on the mounting plate (23). Meshing teeth are formed on the side wall of one side of the adjusting rod (264) close to the rotating rod (262). A toothed disk (265) is installed at the end of the rotating rod (262) close to the adjusting rod (264). The toothed disk (265) is meshingly connected to the adjusting rod (264). A carrier plate (266) is installed on the adjusting rod (264). A receiving groove (2661) is formed on the carrier plate (266). The baffle (267) is slidably installed on the carrier plate (266) through the receiving groove (2661).

3. The three-coordinate surface precision measuring instrument for semiconductor parts according to claim 1, characterized in that: A second guiding rod (243) is installed on the mounting plate (23). A lifting block (244) is slidably installed on the second guiding rod (243). A first spring (245) is sleeved on the second guiding rod (243). One end of the first spring (245) is connected to the lifting block (244), and the other end is connected to the mounting plate (23). One end of the lifting block (244) close to the pressing plate (242) is set as an outwardly convex arc surface. A convex block (246) is installed on the pressing plate (242). The convex block (246) abuts against the arc surface of the lifting block (244). A pressing strip (247) is installed at the end of the lifting block (244) away from the pressing plate (242).

4. The three - coordinate surface precision measuring instrument for semiconductor parts according to claim 3, characterized in that: The pressing strip (247) is made of rubber material.

5. The three - coordinate surface precision measuring instrument for semiconductor parts according to claim 1, wherein: A dialing plate (281) is installed on the pressing plate (242). A limiting rod (282) is slidably installed on the mounting disc (23). A dialing groove (2821) is formed in the limiting rod (282). One end of the dialing plate (281) away from the pressing plate (242) extends into the dialing groove (2821). The dialing plate (281) is movably connected to the limiting rod (282) through the dialing groove (2821).

6. The three-coordinate surface accuracy measuring instrument for semiconductor parts according to claim 1, wherein: Anti-slip patterns are provided on the pressing plate (242) and / or the baffle plate (267).

7. The three-coordinate surface precision measuring instrument for semiconductor parts according to claim 1, characterized in that: The transverse movement module (3) includes a lead screw (31). The lead screw (31) is rotatably installed on the machine table (1). A motor (32) for controlling the rotation of the lead screw (31) is fixedly installed on the machine table (1). The inspection table (2) is threadedly connected to the lead screw (31). A first guide rod (33) is fixedly installed on the machine table (1). The first guide rod (33) is arranged parallel to the lead screw (31). The first guide rod (33) passes through the inspection table (2) and is slidably connected to the inspection table (2).

8. The three - coordinate surface precision measuring instrument for semiconductor parts according to claim 1, characterized in that: A cushion block (21) is fixedly installed on the inspection table (2).

9. A measuring method for semiconductor parts, which is carried out by using the three-coordinate surface accuracy measuring instrument for semiconductor parts described in claims 1-8, characterized in that: It includes the following steps: Step 1: Environment inspection, ensure that the temperature of the measurement environment is controlled at 20±2°C, the humidity is 40%-60%, and avoid vibration interference; Step 2: Clean the equipment, clean the guide rail and the workbench surface; Step 3: Fix the workpiece, place the part on the cushion block, ensure no displacement during the measurement process, and move and place the complex workpiece on the cushion block to adjust to the best measurement posture; Step 4: Probe configuration, select the probe type and probe attachment according to the measured feature, and check the collision protection function after installation; Step 5: Probe calibration, calibrate the probe with a standard ball to ensure the measurement accuracy; Step 6: Establish a coordinate system, collect more than three points on the workpiece surface, and define the reference plane; Step 7: Measurement, preset the program control path, cooperate with the measurement module, and complete the efficient measurement of complex shapes by combining multi-point sampling.

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