Resonant pressure sensor driving circuit, method, equipment, medium and product based on AGC closed-loop control

Abstract

The invention discloses a resonant pressure sensor driving circuit based on AGC closed-loop control, a method, equipment, a medium and a product, and relates to the field of sensor technology and analog and mixed signal circuit design. The oscillation signal is amplified and subjected to phase shift through a signal reading circuit, and a sine voltage signal after phase shift is output; the gain control loop is used for extracting the vibration amplitude of the resonant structure, comparing the vibration amplitude with a direct-current reference voltage signal and outputting an error signal; the voltage-controlled gain amplifier circuit is used for performing gain amplification on the sinusoidal voltage signal and the error signal after phase shift; the AGC loop circuit performs multi-path feed-forward compensation through a K5 and a full-wave rectifier; a zero point of a complex left plane is introduced into a resonant pressure sensor driving circuit under AGC closed-loop control, the influence of a secondary point of the driving circuit is counteracted, and the problem that the circuit is unstable is solved.

Description

Technical Field

[0001] The present application relates to the fields of sensor technology, analog and mixed-signal circuit design, and particularly to a resonant pressure sensor drive circuit, method, device, medium, and product based on AGC closed-loop control. Background Art

[0002] Resonant pressure sensors are usually controlled by a closed-loop drive circuit based on Automatic Gain Control (AGC) technology and Phase-Locked Loop (PLL) technology. Using AGC technology has the advantage of faster system response than PLL technology. However, the closed-loop drive system based on AGC technology often has problems with system stability. The resonant pressure sensor drive circuit with AGC closed-loop control can be obtained by using the loop linearization method. The main pole of the system is determined by the parameters of the resonant structure, and the secondary pole is determined by the parameters of the AGC loop low-pass filter. However, in practice, in order to meet the requirements of the AGC loop low-pass filter, the secondary pole needs to be designed to be lower, and in order to ensure the loop stability and the system startup speed requirements, the secondary pole needs to be designed to be higher, and the design conflict of the secondary pole needs to be solved. Summary of the Invention

[0003] The purpose of the present application is to provide a resonant pressure sensor drive circuit, method, device, medium, and product based on AGC closed-loop control, which solves the problem of unstable system of closed-loop drive based on AGC technology.

[0004] To achieve the above purpose, the present application provides the following solutions:

[0005] In a first aspect, the present application provides a resonant pressure sensor drive circuit based on AGC closed-loop control, including:

[0006] The phase control loop, including a resonant structure, a torquer, and a signal readout circuit, is used to excite the mechanical vibration of the resonant structure by the torquer, and amplify and phase-shift the oscillation signal after the mechanical vibration of the resonant structure through the signal readout circuit, and output a phase-shifted sinusoidal voltage signal.

[0007] The gain control loop, including K4, K5, a full-wave rectifier, a low-pass filter, and a voltage-controlled gain amplifier, is used to extract the vibration amplitude of the resonant structure, compare it with a DC reference voltage signal, and output an error signal.

[0008] The voltage-controlled gain amplifier circuit is used to perform gain amplification on the phase-shifted sinusoidal voltage signal and the error signal.

[0009] An AGC loop circuit for multi-path feedforward compensation through K5 and a full-wave rectifier, and for adjusting the oscillation amplitude of a resonant structure based on the error signal; introducing a zero point in the left half-plane of complex numbers in the resonant pressure sensor driving circuit under AGC closed-loop control.

[0010] In a second aspect, the present application provides a method for driving a resonant pressure sensor based on AGC closed-loop control, including:

[0011] Exciting the mechanical vibration of the resonant structure according to a phase control loop, amplifying and phase-shifting the vibration signal after the mechanical vibration of the resonant structure, and outputting a phase-shifted sinusoidal voltage signal; the phase control loop includes a resonant structure, a torquer, and a signal reading circuit.

[0012] Extracting the oscillation amplitude of the resonant structure according to a gain control loop, comparing it with a DC reference voltage signal, and outputting an error signal; the gain control loop includes K4, K5, a full-wave rectifier, a low-pass filter, and a voltage-controlled gain amplifier.

[0013] Performing gain amplification on the phase-shifted sinusoidal voltage signal and the error signal according to a voltage-controlled gain amplifier.

[0014] Based on K5 and a full-wave rectifier, introducing a zero point in the left half-plane of complex numbers in the resonant pressure sensor driving circuit under AGC closed-loop control according to the AGC loop circuit.

[0015] In a third aspect, the present application provides a computer device, including: a memory, a processor, and a computer program stored on the memory and executable on the processor, where the processor executes the computer program to implement the steps of the method for driving a resonant pressure sensor based on AGC closed-loop control described in any one of the above.

[0016] In a fourth aspect, the present application provides a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the steps of the method for driving a resonant pressure sensor based on AGC closed-loop control described in any one of the above are implemented.

[0017] In a fifth aspect, the present application provides a computer program product, including a computer program, and when the computer program is executed by a processor, the steps of the method for driving a resonant pressure sensor based on AGC closed-loop control described in any one of the above are implemented.

[0018] According to the specific embodiments provided by the present application, the following technical effects are disclosed in the present application:

[0019] The present application provides a driving circuit, method, device, medium and product for a resonant pressure sensor based on AGC closed-loop control, including a phase control loop, which uses a torquer to excite the mechanical vibration of a resonant structure, and amplifies and phase-shifts the oscillation signal through a signal reading circuit to output a phase-shifted sinusoidal voltage signal; a gain control loop is used to extract the vibration amplitude of the resonant structure and compare it with a DC reference voltage signal to output an error signal; a voltage-controlled gain amplifier circuit is used to perform gain amplification on the phase-shifted sinusoidal voltage signal and the error signal; the AGC loop circuit performs multi-path feed-forward compensation through K5 and a full-wave rectifier, and adjusts the oscillation amplitude of the resonant structure based on the error signal; the response speed of the AGC technology is faster, the main pole is determined by the mechanical parameters of the resonator, and the secondary pole is determined by the parameters of the low-pass filter. The low-pass filter requires the secondary pole to be low to reduce the AC component of the DC reference voltage signal. At this time, the driving circuit is unstable. A zero point in the complex left half-plane is introduced into the driving circuit of the resonant pressure sensor with AGC closed-loop control to offset the influence of the secondary pole in the driving circuit, solve the problem of circuit instability, make the driving circuit of the resonant pressure sensor with AGC closed-loop control approach a single-pole system, and significantly enhance the stability of the driving circuit of the resonant pressure sensor with AGC closed-loop control. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0021] Figure 1 FIG. is a schematic structural diagram of a driving circuit for a resonant pressure sensor based on AGC closed-loop control provided by an embodiment of the present application;

[0022] Figure 2 FIG. is a schematic structural diagram of a circuit provided by an embodiment of the present application;

[0023] Figure 3 FIG. is a schematic structural diagram of an optimized closed-loop self-excited system implemented by using a multi-path feed-forward compensation technology provided by an embodiment of the present application; Figure 3 In (a) is a block diagram of a multi-path feed-forward compensation closed-loop self-excited system; Figure 3 In (b) is a linearized model of a multi-path feed-forward compensation closed-loop self-excited system;

[0024] Figure 4 FIG. is a schematic connection diagram of a voltage-controlled gain amplifier provided by an embodiment of the present application;

[0025] Figure 5Schematic diagram of the AGC loop circuit connection provided by an embodiment of the present application;

[0026] Figure 6 Schematic diagram of the signal readout circuit connection provided by an embodiment of the present application;

[0027] Figure 7 Flow schematic diagram of a resonant pressure sensor driving method based on AGC closed-loop control in an embodiment of the present application;

[0028] Figure 8 Schematic diagram of the open-loop transfer function frequency characteristics of the multi-path feedforward compensation technology provided by an embodiment of the present application;

[0029] Figure 9 Schematic diagram of the structure of a computer device provided by an embodiment of the present application. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0031] To make the above objects, features, and advantages of the present application more obvious and understandable, the present application will be further described in detail below with reference to the accompanying drawings and specific implementation manners.

[0032] As Figure 1 shown, an embodiment of the present application provides a resonant pressure sensor driving circuit based on AGC closed-loop control, and the specific content is as follows.

[0033] The resonant pressure sensor driving circuit based on AGC closed-loop control includes a phase control loop, a gain control loop, a voltage-controlled gain amplifier circuit, and an AGC loop circuit;

[0034] The phase control loop includes a resonant structure, a torquer, and a signal readout circuit, and is used to excite the mechanical vibration of the resonant structure by the torquer, and amplify and phase-shift the oscillation signal after the mechanical vibration of the resonant structure through the signal readout circuit, and output a phase-shifted sinusoidal voltage signal;

[0035] The gain control loop includes K4, K5, a full-wave rectifier, a low-pass filter, and a voltage-controlled gain amplifier, and is used to extract the vibration amplitude of the resonant structure, compare it with a DC reference voltage signal, and output an error signal;

[0036] A voltage-controlled gain amplifier circuit is used to amplify the gain of the phase-shifted sine voltage signal and the error signal;

[0037] An AGC loop circuit is used to perform multi-path feed-forward compensation through K5 and a full-wave rectifier, and adjust the oscillation amplitude of the resonant structure based on the error signal; a zero point in the complex left half-plane is introduced into the resonant pressure sensor drive circuit with AGC closed-loop control to cancel the influence of the secondary point in the resonant pressure sensor drive circuit with AGC closed-loop control.

[0038] As Figure 2 shown, in an exemplary embodiment, the resonant pressure sensor drive circuit with AGC closed-loop control further includes a resonant pressure sensor.

[0039] Excitation electrodes, bias electrodes, and detection electrodes are distributed within the detection range of the resonant pressure sensor.

[0040] The signal readout circuit includes an RC high-pass filter, a capacitive feedthrough cancellation circuit, a first-stage amplifier circuit, and a phase shifter circuit.

[0041] The excitation electrode is connected to the RC high-pass filter; the bias electrode is connected to the ground potential GND; the detection electrode is connected to the bias electrode and the first-stage amplifier circuit; the input end of the first-stage amplifier circuit is connected to the capacitive feedthrough cancellation circuit, and the output end of the first-stage amplifier circuit is connected to the phase shifter circuit.

[0042] The resonant pressure sensor drive circuit with AGC closed-loop control includes a resonant pressure sensor, a signal readout circuit, a voltage-controlled gain amplifier circuit, and an AGC loop circuit.

[0043] The signal readout circuit includes an RC high-pass filter, a capacitive feedthrough cancellation circuit, a first-stage amplifier circuit, and a phase shifter circuit. The RC high-pass filter is used to couple the AC excitation signal, the capacitive feedthrough cancellation circuit is used to eliminate the feedthrough effect of the parasitic capacitance of the resonant pressure sensor, the first-stage amplifier circuit is used to amplify the vibration signal of the resonant pressure sensor, and the phase shifter circuit is used to achieve a 90° phase shift of the signal to compensate for the 90° phase shift of the resonator.

[0044] When the resonant pressure sensor drive circuit with AGC closed-loop control works, the resonator oscillation signal is amplified by K2 and converted into a sine voltage output signal, then passes through the phase shifter composed of K3 / S to output a sine voltage signal after 90° phase shift, and then passes through a comparator and a proportional adjustment stage K p, The voltage-controlled gain amplifier (VGA) composed of a multiplier adjusts the signal amplitude. Finally, the signal passes through the resonator torque actuator K1 to convert the voltage signal into a force signal to drive the resonator to vibrate. The phase control loop consists of a resonator, a resonator torque actuator K1, a readout circuit K2, and a phase shifter K3 / S. This loop mainly ensures that the closed-loop phase is 2nπ, where n is an integer.

[0045] The gain control loop consists of K4, K5, a full-wave rectifier, a low-pass filter, and a voltage-controlled gain amplifier (VGA) composed of a comparator and a proportional adjustment stage K p , and a multiplier. The function of this path is to extract the vibration amplitude of the resonator, compare it with the target value Vref, and output an error signal e(t) to adjust the gain of the VGA until the entire loop reaches a stable state.

[0046] As Figure 3 (b) shows, the AGC loop circuit is used to extract the vibration amplitude information of the resonator and output a DC signal to the gain control terminal of the voltage-controlled gain amplifier, forming a closed-loop control loop for the loop gain. Generally, the closed-loop drive system of a resonant pressure sensor based on AGC only includes K4 and a full-wave rectifier to extract the vibration amplitude of the resonator, and does not include the branch of K5 and the full-wave rectifier. By linearizing the loop of the closed-loop system, it can be obtained that the system includes two poles. The main pole is determined by the resonator parameters, and the secondary pole is determined by the low-pass filter parameters. The requirements for loop stability and the starting speed of the resonator require the secondary pole to be high, while the function of the low-pass filter requires the secondary pole to be low to reduce the AC component in u(t), so the entire system has a stability problem. As Figure 8 shown, since the system open-loop transfer function of the multi-path feedforward technology is introduced in the embodiment of the present application, through the multi-path feedforward compensation of introducing K5 and a full-wave rectifier, a zero point in the complex left half plane is introduced at high frequencies. This zero point can offset the influence of the secondary pole, making the entire system approach a single-pole system, significantly enhancing the loop stability. By introducing multi-path feedforward compensation, the loop gain can also be increased to improve the loop GBW and increase the starting speed of the system without affecting the loop stability.

[0047] As Figure 4 shown, in an exemplary embodiment, the input end of the voltage-controlled gain amplifier is connected to the phase shifter circuit; the output end of the voltage-controlled gain amplifier is connected to the RC high-pass filter.

[0048] The voltage-controlled gain amplifier circuit includes an amplifier A11, a junction field effect transistor, a first resistor R11, a second resistor R21, a third resistor R31, a fourth resistor R41, a fifth resistor R51, a sixth resistor R61, a seventh resistor R71, and a first capacitor C11.

[0049] One end of the second resistor R21 is connected to the power supply voltage VDD / 2; the other end of the second resistor R21 is connected to the first resistor R11, the third resistor R31, and the negative terminal of the amplifier A11.

[0050] One end of the third resistor R31 is connected to the first resistor R11 and the amplifier A11; the other end of the third resistor R31 is connected to the output terminal of the amplifier A11 and the output signal V in connection; the output signal V in is the output signal of the amplifier A11.

[0051] One end of the first resistor R11 is connected to the output signal V out2 and the seventh resistor R71; the other end of the first resistor R11 is connected to the amplifier A11.

[0052] One end of the seventh resistor R71 is connected to the output signal V out2 connection; the other end of the seventh resistor R71 is connected to the first capacitor C11, the fourth resistor R41, and the amplifier A11.

[0053] One end of the first capacitor C11 is connected to the sixth resistor R61; the other end of the first capacitor C11 is connected to the junction field effect transistor.

[0054] One end of the sixth resistor R61 is connected to the fifth resistor R51 and the power supply voltage VDD / 2.

[0055] One end of the fifth resistor R51 is connected to the control signal V ctrl connection; the other end of the fifth resistor R51 is connected to the power supply voltage VDD / 2 and the fourth resistor R41.

[0056] One end of the fourth resistor R41 is connected to the power supply voltage VDD / 2; the other end of the fourth resistor R41 is connected to the positive terminal of the amplifier A11.

[0057] As Figure 5 shown, in an exemplary embodiment, the input terminal of the AGC loop circuit is connected to the output terminal of the first-stage amplifier circuit; the output terminal of the AGC loop circuit is connected to the gain control terminal of the voltage-controlled gain amplifier circuit.

[0058] The AGC loop circuit includes amplifier A12, amplifier A22, amplifier A32, diode Q12, diode Q22, first resistor R12, second resistor R22, third resistor R32, fourth resistor R42, fifth resistor R52, sixth resistor R62, seventh resistor R72, eighth resistor R82, ninth resistor R92, first capacitor C12, second capacitor C22, third capacitor C32, fourth capacitor C42, and fifth capacitor C52.

[0059] One end of the second capacitor C22 is connected to the output signal V in ; the other end of the second capacitor C22 is connected to the first resistor R12, the second resistor R22, and the third capacitor C32.

[0060] One end of the third capacitor R32 is connected to the first resistor R12, the amplifier A12, and the second resistor R22; the other end of the third capacitor R32 is connected to the fourth capacitor R42 and the amplifier A12.

[0061] One end of the first capacitor C12 is connected to the output signal V out1 ; the other end of the first capacitor C12 is connected to the first resistor R12.

[0062] One end of the first resistor R12 is connected to the second resistor R22 and the amplifier A12.

[0063] One end of the second resistor R22 is connected to the amplifier A12; the other end of the second resistor R22 is connected to the fourth capacitor R42 and the amplifier A12.

[0064] The positive terminal of the amplifier A12 is connected to the power supply voltage VDD / 2; the output terminal of the amplifier A12 is connected to the fourth capacitor R42.

[0065] One end of the fourth capacitor R42 is connected to the sixth resistor R62 and the ninth resistor R92.

[0066] One end of the sixth resistor R62 is connected to the ninth resistor R92; the other end of the sixth resistor R62 is connected to the negative terminal of the amplifier A22, the negative terminal of the diode Q12, and the seventh resistor R72.

[0067] One end of the seventh resistor R72 is connected to the diode Q12 and the amplifier A22; the other end of the seventh resistor R72 is connected to the eighth resistor R82 and the positive terminal of the diode Q22.

[0068] The negative terminal of the diode Q12 is connected to the negative terminal of the amplifier A22; the positive terminal of the diode Q12 is connected to the negative terminal of the diode Q22 and the output terminal of the amplifier A22.

[0069] The positive terminal of the amplifier A22 is connected to the power supply voltage VDD / 2; the output terminal of the amplifier A22 is connected to the negative terminal of the diode Q22.

[0070] The positive terminal of the diode is connected to the eighth resistor R82.

[0071] One end of the eighth resistor R82 is connected to the negative terminal of the amplifier A32, the ninth resistor R92, the third resistor R32, the fifth capacitor C52, the fifth resistor R52, and the fourth resistor R42.

[0072] One end of the ninth resistor R92 is connected to the negative terminal of the amplifier A32, the third resistor R32, the fifth capacitor C52, the fifth resistor R52, and the fourth resistor R42.

[0073] One end of the fourth resistor R42 is connected to the ground GND; the other end of the fourth resistor R42 is connected to the negative terminal of the amplifier A32, the third resistor R32, the fifth capacitor C52, and the fifth resistor R52.

[0074] One end of the fifth resistor R52 is connected to the power supply voltage VDD; the other end of the fifth resistor R52 is connected to the negative terminal of the amplifier A32, the third resistor R32, and the fifth capacitor C52.

[0075] One end of the fifth capacitor C52 is connected to the negative terminal of the amplifier A32 and the third resistor R32.

[0076] One end of the third resistor R32 is connected to the negative terminal of the amplifier A32; the other end of the third resistor R32 is connected to the control signal V ctrl connected.

[0077] The positive terminal of the amplifier A32 is connected to the power supply voltage VDD / 2; the output terminal of the amplifier A32 is connected to the control signal V ctrl connected.

[0078] As Figure 6As shown, in an exemplary embodiment, the signal readout circuit specifically includes: amplifier A13, amplifier A23, amplifier A33, first resistor R13, second resistor R23, third resistor R33, fourth resistor R43, fifth resistor R53, sixth resistor R63, seventh resistor R73, eighth resistor R83, ninth resistor R93, tenth resistor R103, first capacitor C13, second capacitor C23, third capacitor C33, fourth capacitor C43, fifth capacitor C53, sixth capacitor C63, seventh capacitor C73, and eighth capacitor C83.

[0079] One end of the fifth capacitor C53 is connected to the output signal V out1 ; the other end of the fifth resistor R53 is connected to the sixth resistor R63.

[0080] One end of the sixth resistor R63 is connected to the negative terminal of the amplifier A33, the seventh resistor R73, and the sixth capacitor C63.

[0081] One end of the sixth capacitor C63 is connected to the seventh resistor R73 and the negative terminal of the amplifier A33; the other end of the sixth capacitor C63 is connected to the amplifier A33 and the seventh capacitor C73.

[0082] One end of the seventh resistor R73 is connected to the amplifier A33 and the seventh capacitor C73.

[0083] The positive terminal of the amplifier A33 is connected to the output voltage V ref ; the output terminal of the amplifier A33 is connected to the seventh capacitor C73.

[0084] One end of the seventh capacitor C73 is connected to the second capacitor C23, the third resistor R33, the first capacitor C13, and the negative terminal of the amplifier A13.

[0085] One end of the eighth resistor R83 is connected to the power supply voltage VDD; the other end of the eighth resistor R83 is connected to the eighth capacitor C83.

[0086] One end of the eighth capacitor C83 is connected to the output signal V in ; the other end is connected.

[0087] One end of the second resistor R23 is connected to the power supply voltage VDD; the other end of the second resistor R23 is connected to the first resistor R., the first capacitor C13, and the first capacitor C13.

[0088] One end of the first resistor R13 is connected to the first capacitor C13; the other end of the first resistor R13 is grounded.

[0089] One end of the first capacitor C13 is connected to one end of the second capacitor C23, the third resistor R33, and the negative terminal of the amplifier A13.

[0090] One end of the second capacitor C23 is connected to the third resistor R33 and the negative terminal of the amplifier A13; the other end of the second capacitor C23 is connected to the output signal V out1 , the third capacitor C33, and the amplifier A13.

[0091] One end of the third resistor R33 is connected to the negative terminal of the amplifier A13; the other end of the third resistor R33 is connected to the output signal V out1 , the output terminal of the amplifier A13, and the third capacitor C33;

[0092] The positive terminal of the amplifier A13 is connected to the output voltage V ref ; the output terminal of the amplifier A13 is connected to the third capacitor C33.

[0093] One end of the third capacitor C33 is connected to the fourth resistor R43.

[0094] One end of the fourth resistor R43 is connected to the fourth capacitor C43, the fifth resistor R53, and the negative terminal of the amplifier A23.

[0095] One end of the fourth capacitor C43 is connected to the fifth resistor R53 and the negative terminal of the amplifier A23; the other end of the fourth capacitor C43 is connected to the output signal V out2 and the output terminal of the amplifier A23.

[0096] One end of the fifth resistor R53 is connected to the negative terminal of the amplifier A23; the other end of the fifth resistor R53 is connected to the output terminal of the amplifier A23 and the output signal V out2 .

[0097] The positive terminal of the amplifier A23 is connected to the output voltage V ref ; the other end of the amplifier A23 is connected to the output signal V out2 .

[0098] One end of the ninth resistor R93 is connected to the power supply voltage VDD; the other end of the ninth resistor R93 is connected to the tenth resistor R103 and the output voltage V ref .

[0099] One end of the tenth resistor R103 is connected to the output voltage V ref ; the other end of the tenth resistor R103 is grounded.

[0100] Such as Figure 7As shown in the figure, an embodiment of the present application further provides a driving method for a resonant pressure sensor based on AGC closed-loop control, and the specific content is as follows.

[0101] S1: Excite the mechanical vibration of the resonant structure according to the phase control loop, amplify and phase-shift the vibration signal after the mechanical vibration of the resonant structure, and output a sinusoidal voltage signal after phase-shifting; the phase control loop includes a resonant structure, a torque generator, and a signal reading circuit.

[0102] S2: Extract the oscillation amplitude of the resonant structure according to the gain control loop, compare it with the DC reference voltage signal, and output an error signal; the gain control loop includes K4, K5, a full-wave rectifier, a low-pass filter, and a voltage-controlled gain amplifier.

[0103] S3: Perform gain amplification on the sinusoidal voltage signal after phase-shifting and the error signal according to the voltage-controlled gain amplifier.

[0104] S4: Based on K5 and the full-wave rectifier, introduce a zero point in the complex left half-plane in the driving circuit of the resonant pressure sensor under AGC closed-loop control according to the AGC loop circuit, cancel the influence of the secondary point in the driving circuit of the resonant pressure sensor, and adjust the oscillation amplitude of the resonant structure based on the error signal.

[0105] A driving method for a resonant pressure sensor based on AGC closed-loop control is applicable to various closed-loop driving circuits of resonant sensors using AGC closed-loop control, including but not limited to various driving circuit systems of resonant pressure sensors, driving circuit systems of resonant gyroscopes, driving circuit systems of resonant accelerometers, etc. A typical system block diagram of a closed-loop driving circuit of a resonant sensor using AGC closed-loop control is as Figure 3 shown in (a), and the model obtained by linearizing its loop is as Figure 3 shown in (b). This method includes the following steps:

[0106] (1) The resonator is driven by the excitation signal F(t) to output the displacement signal x(t).

[0107] (2) The displacement signal x(t) of the resonator passes through the gain stage K2 to output the signal V1.

[0108] (3) The signal V1 passes through the phase shifter K3 / S to output the phase-shifted signal Vx(t), and the signal V1 passes through the gain stage K4 and the full-wave rectifier |·| to output the signal V2.

[0109] (4) The signal Vx(t) passes through the multiplier to output the signal V3.

[0110] (5) The signal V3 passes through the gain stage K1 to output the excitation signal F(t).

[0111] (6) The signal V3 passes through the gain stage K5 and the full-wave rectifier |·| to output the signal V4.

[0112] (7) The signal V2 and the signal V4 are added and passed through the low-pass filter 1 / (τs + 1) to output the DC signal u(t).

[0113] (8) The DC signal u(t) is compared with the target signal V ref to output the error signal e(t), and then the error signal e(t) is amplified by the gain stage Kp to adjust the gain of the multiplier.

[0114] (9) The system block Figure 3 (a) The branch of the gain stage K5 and the full-wave rectifier |·| shown is the multi-path feed-forward compensation path.

[0115] In the related technology, there are no steps (6) and (7), that is, there is no branch of the gain stage K5 and the full-wave rectifier |·|. By the loop linearization method, the open-loop transfer function of the loop can be obtained as:

[0116]

[0117] where, Wn is the resonant frequency of the resonator, and Q is the quality factor of the resonator. It can be seen from the open-loop transfer function H(s) that when there is no multi-path feed-forward compensation path, the open-loop transfer function of the system includes two poles, and the system gain bandwidth and loop stability are affected by the two poles and cannot be further improved. After introducing the branch of the gain stage K5 and the full-wave rectifier |·|, a high-frequency complex left-half plane zero is introduced into the system open-loop transfer function H(s), which cancels the influence of the secondary pole, making the system behavior approach that of a single-pole system. The influence of the multi-path feed-forward compensation technology on the system open-loop transfer function is as Figure 8 shown.

[0118] (6) and (7) The introduction of these steps enhances the loop stability of the resonator pressure sensor driving circuit based on AGC closed-loop control, reduces the time from system startup to stable operation, and improves the system startup speed.

[0119] Figures 4 to 6 This is a scheme for a driving method of a resonator pressure sensor based on AGC closed-loop control. The signal readout circuit of the resonant pressure sensor is as Figure 6 shown, Figure 6The circuit shown mainly includes three parts: (1) Capacitive feedthrough cancellation circuit, which is used to cancel the feedthrough of the parasitic capacitance between the sensor input and output pads. The voltage output caused by the parasitic capacitance is opposite to the voltage output caused by the resonator vibration, reducing the output signal of the resonator. By changing the values of R63, R73, and C73, the parasitic capacitance feedthrough effect can be matched and eliminated. C53 is used to isolate DC signals, and C63 is used for lead compensation. (2) Silicon piezoresistive change to voltage output circuit, which consists of an inverting amplifier and passive devices. R23, C13, C23, and R33. R23 is used to set the DC bias voltage of the silicon piezoresistor. When R23 = R13, the maximum signal output can be obtained. C13 is only used to isolate DC signals, and C23 is used for lead compensation. (3) Phase shifter circuit, which is implemented by a simple low-pass filter. In the circuit, C33 is used to isolate DC signals, and R43, R53, and C43 are used to set the bandwidth and gain of the low-pass filter.

[0120] The designed voltage-controlled gain amplifier is as Figure 4 shown. The JFET is an N-channel JFET transistor, which is made to operate in the linear region. By adjusting the gate-source voltage of the JFET, the resistance value in its linear region is adjusted to achieve the voltage change of the in-phase terminal gain. R41 is connected in parallel with the JFET to limit the gain and improve the linearity of the voltage-controlled gain amplifier when the resistance value of the JFET in the linear region is large. The capacitor C71 and the resistors R51 and R61 form negative feedback to reduce the distortion brought by the JFET. R21 can change the gain adjustment range of the in-phase terminal, and thus change the gain range of the voltage-controlled gain amplifier.

[0121] The AGC loop circuit is as Figure 5 shown. In the circuit, C12 and C42 are used to isolate DC signals, and C32 is used for lead compensation. C22 is used to couple the excitation signal. Because the phase shifter introduces a phase shift to the signal, a capacitor is needed to couple the signal so that the two signal amplitudes can be directly added, and then pass through a full-wave rectifier circuit, without the need to additionally use a full-wave rectifier circuit to increase the cost of the circuit. The full-wave rectifier circuit at the back end can achieve the function of filtering and outputting a DC control signal by connecting a capacitor C52 in parallel with R32. The functions of R42 and R52 are to combine Figure 4 the cut-off voltage of the voltage-controlled gain amplifier in ref to set the V in the system block diagram.

[0122] Further, in an exemplary embodiment, S4 can be replaced by the following steps.

[0123] By introducing K5 and a full-wave rectifier for multi-path feedforward compensation, a zero in the complex left half-plane is introduced at high frequencies in the resonant pressure sensor drive circuit of the AGC closed-loop control, canceling the influence of the secondary point in the resonant pressure sensor drive circuit, making the resonant pressure sensor drive circuit of the AGC closed-loop control approach a single-pole system.

[0124] This application significantly enhances the stability of the system and the startup speed of the system by introducing multi-path feedforward compensation technology. This advantage comes from the feedforward effect of K5 and the full-wave rectifier. By linearizing the loop of the closed-loop system, it can be obtained that the system includes two poles, as Figure 3 (b) shows. The main pole is determined by the resonator parameters, and the secondary pole is determined by the low-pass filter parameters. The requirements for loop stability and the resonator startup speed require the secondary pole to be high, while the low-pass filter function requires the secondary pole to be low to reduce the AC component in u(t), resulting in stability problems for the entire system. By introducing the multi-path feedforward compensation of K5 and the full-wave rectifier, a zero in the complex left half-plane is introduced at high frequencies in the system. This zero can cancel the influence of the secondary pole, making the entire system approach a single-pole system, significantly enhancing the loop stability. By introducing multi-path feedforward compensation, the loop gain can also be increased to improve the loop GBW and the startup speed of the system without affecting the loop stability.

[0125] In an exemplary embodiment, a computer device is provided. The computer device can be a server or a terminal, and its internal structure diagram can be as Figure 9 shown. The computer device includes a processor, a memory, an input / output interface (Input / Output, abbreviated as I / O), and a communication interface. Among them, the processor, the memory, and the input / output interface are connected through a system bus, and the communication interface is connected to the system bus through the input / output interface. Among them, the processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program, and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The database of the computer device is used for driving the resonant pressure sensor based on AGC closed-loop control. The input / output interface of the computer device is used to exchange information between the processor and external devices. The communication interface of the computer device is used to communicate with external terminals through a network connection. When the computer program is executed by the processor, it realizes the driving of the resonant pressure sensor based on AGC closed-loop control.

[0126] Those skilled in the art can understand, Figure 9The structure shown is only a block diagram of some structures related to the solution of this application, and does not constitute a limitation on the computer device to which the solution of this application is applied. The specific computer device may include more or fewer components than those shown in the figure, or combine some components, or have different component arrangements.

[0127] In an exemplary embodiment, a computer device is further provided, including a memory and a processor. A computer program is stored in the memory, and when the processor executes the computer program, the steps in the above method embodiments are implemented.

[0128] In an exemplary embodiment, a computer-readable storage medium is provided, storing a computer program, and when the computer program is executed by a processor, the steps in the above method embodiments are implemented.

[0129] In an exemplary embodiment, a computer program product is provided, including a computer program, and when the computer program is executed by a processor, the steps in the above method embodiments are implemented.

[0130] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data for analysis, stored data, displayed data, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties, and the collection, use, and processing of relevant data need to comply with relevant regulations.

[0131] Those of ordinary skill in the art can understand that all or part of the processes in the methods of the above embodiments can be completed by instructing relevant hardware through a computer program. The computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above methods. Among them, any reference to a memory, database, or other medium used in the various embodiments provided in the present application can include at least one of non-volatile and volatile memories. Non-volatile memories can include read-only memory (ROM), magnetic tapes, floppy disks, flash memories, optical memories, high-density embedded non-volatile memories, resistive random access memories (ReRAM), magnetoresistive random access memories (MRAM), ferroelectric random access memories (FRAM), phase change memories (PCM), graphene memories, etc. Volatile memories can include random access memory (RAM) or external cache memories, etc. By way of illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc.

[0132] The databases involved in the various embodiments provided in the present application can include at least one of relational databases and non-relational databases. Non-relational databases can include distributed databases based on blockchain, etc., without limitation. The processors involved in the various embodiments provided in the present application can be general-purpose processors, central processors, graphics processors, digital signal processors, programmable logics, data processing logics based on quantum computing, etc., without limitation.

[0133] The technical features of the above embodiments can be combined arbitrarily. For the sake of concise description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered to be within the scope described in this specification.

[0134] Specific examples are used in this article to elaborate on the principles and implementation manners of the present application. The description of the above embodiments is only used to help understand the method and its core idea of the present application; at the same time, for those of ordinary skill in the art, according to the idea of the present application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. A driving circuit for a resonant pressure sensor based on AGC closed-loop control, characterized in that The resonant pressure sensor drive circuit based on AGC closed-loop control includes a phase control loop, a gain control loop, a voltage-controlled gain amplifier circuit, and an AGC loop circuit; The phase control loop includes a resonant structure, a torquer, and a signal readout circuit, and is used to excite the mechanical vibration of the resonant structure by using the torquer, and amplify and phase-shift the oscillation signal after the mechanical vibration of the resonant structure through the signal readout circuit, and output a phase-shifted sinusoidal voltage signal; The gain control loop includes K4, K5, a full-wave rectifier, a low-pass filter, and a voltage-controlled gain amplifier, and is used to extract the vibration amplitude of the resonant structure, compare it with a DC reference voltage signal, and output an error signal; The voltage-controlled gain amplifier circuit is used to perform gain amplification on the phase-shifted sinusoidal voltage signal and the error signal; The AGC loop circuit is used to perform multi-path feedforward compensation through K5 and the full-wave rectifier, and adjust the oscillation amplitude of the resonant structure based on the error signal; A zero point in the complex left half-plane is introduced into the resonant pressure sensor drive circuit based on AGC closed-loop control.

2. The resonant pressure sensor drive circuit based on AGC closed-loop control according to claim 1, wherein the resonant pressure sensor drive circuit based on AGC closed-loop control further includes a resonant pressure sensor; Excitation electrodes, bias electrodes, and detection electrodes are distributed within the detection range of the resonant pressure sensor; The signal readout circuit includes an RC high-pass filter, a capacitive feedthrough cancellation circuit, a first-stage amplifier circuit, and a phase shifter circuit; The excitation electrode is connected to the RC high-pass filter; the bias electrode is connected to the ground potential GND; the detection electrode is connected to the bias electrode and the first-stage amplifier circuit; the input end of the first-stage amplifier circuit is connected to the capacitive feedthrough cancellation circuit, and the output end of the first-stage amplifier circuit is connected to the phase shifter circuit.

3. The resonant pressure sensor driving circuit based on AGC closed-loop control according to claim 2, wherein, The input end of the voltage-controlled gain amplifier is connected to the phase shifter circuit; the output end of the voltage-controlled gain amplifier is connected to the RC high-pass filter; The voltage-controlled gain amplifier circuit includes an amplifier A11, a junction field-effect transistor, a first resistor R11, a second resistor R21, a third resistor R31, a fourth resistor R41, a fifth resistor R51, a sixth resistor R61, a seventh resistor R71, and a first capacitor C11; One end of the second resistor R21 is connected to the power supply voltage VDD / 2; the other end of the second resistor R21 is connected to the first resistor R11, the third resistor R31, and the negative terminal of the amplifier A11; One end of the third resistor R31 is connected to the first resistor R11 and the amplifier A11; the other end of the third resistor R31 is connected to the output end of the amplifier A11 and the output signal V in ; the output signal V in is the output signal of the amplifier A11; One end of the first resistor R11 is connected to the output signal V out2 and the seventh resistor R71; the other end of the first resistor R11 is connected to the amplifier A11; One end of the seventh resistor R71 is connected to the output signal V out2 ; the other end of the seventh resistor R71 is connected to the first capacitor C11, the fourth resistor R41, and the amplifier A11; One end of the first capacitor C11 is connected to the sixth resistor R61; the other end of the first capacitor C11 is connected to the junction field-effect transistor; One end of the sixth resistor R61 is connected to the fifth resistor R51 and the power supply voltage VDD / 2; One end of the fifth resistor R51 is connected to the control signal V ctrl ; the other end of the fifth resistor R51 is connected to the power supply voltage VDD / 2 and the fourth resistor R41; One end of the fourth resistor R41 is connected to the power supply voltage VDD / 2; the other end of the fourth resistor R41 is connected to the positive terminal of the amplifier A11.

4. The driving circuit of the resonant pressure sensor based on AGC closed-loop control according to claim 2, characterized in that The input end of the AGC loop circuit is connected to the output end of the first-stage amplifier circuit; the output end of the AGC loop circuit is connected to the gain control end of the voltage-controlled gain amplifier circuit; The AGC loop circuit includes amplifier A12, amplifier A22, amplifier A32, diode Q12, diode Q22, first resistor R12, second resistor R22, third resistor R32, fourth resistor R42, fifth resistor R52, sixth resistor R62, seventh resistor R72, eighth resistor R82, ninth resistor R92, first capacitor C12, second capacitor C22, third capacitor C32, fourth capacitor C42, fifth capacitor C52; One end of the second capacitor C22 is connected to the output signal V in ; the other end of the second capacitor C22 is connected to the first resistor R12, the second resistor R22, and the third capacitor C32; One end of the third capacitor R32 is connected to the first resistor R12, the amplifier A12 and the second resistor R22; the other end of the third capacitor R32 is connected to the fourth capacitor R42 and the amplifier A12; One end of the first capacitor C12 is connected to the output signal V out1 ; The other end of the first capacitor C12 is connected to the first resistor R12; One end of the first resistor R12 is connected to the second resistor R22 and the amplifier A12; One end of the second resistor R22 is connected to the amplifier A12; the other end of the second resistor R22 is connected to the fourth capacitor R42 and the amplifier A12; The positive terminal of the amplifier A12 is connected to the power supply voltage VDD / 2; the output terminal of the amplifier A12 is connected to the fourth capacitor R42; One end of the fourth capacitor R42 is connected to the sixth resistor R62 and the ninth resistor R92; One end of the sixth resistor R62 is connected to the ninth resistor R92; the other end of the sixth resistor R62 is connected to the negative terminal of the amplifier A22, the negative terminal of the diode Q12 and the seventh resistor R72; One end of the seventh resistor R72 is connected to the diode Q12 and the amplifier A22; the other end of the seventh resistor R72 is connected to the eighth resistor R82 and the positive terminal of the diode Q22; The negative terminal of the diode Q12 is connected to the negative terminal of the amplifier A22; the positive terminal of the diode Q12 is connected to the negative terminal of the diode Q22 and the output terminal of the amplifier A22; The positive terminal of the amplifier A22 is connected to the power supply voltage VDD / 2; the output terminal of the amplifier A22 is connected to the negative terminal of the diode Q22; The positive terminal of the diode is connected to the eighth resistor R82; One end of the eighth resistor R82 is connected to the negative terminal of the amplifier A32, the ninth resistor R92, the third resistor R32, the fifth capacitor C52, the fifth resistor R52 and the fourth resistor R42; One end of the ninth resistor R92 is connected to the negative terminal of the amplifier A32, the third resistor R32, the fifth capacitor C52, the fifth resistor R52 and the fourth resistor R42; One end of the fourth resistor R42 is connected to the ground GND; the other end of the fourth resistor R42 is connected to the negative terminal of the amplifier A32, the third resistor R32, the fifth capacitor C52 and the fifth resistor R52; One end of the fifth resistor R52 is connected to the power supply voltage VDD; the other end of the fifth resistor R52 is connected to the negative terminal of the amplifier A32, the third resistor R32, and the fifth capacitor C52; One end of the fifth capacitor C52 is connected to the negative terminal of the amplifier A32 and the third resistor R32; One end of the third resistor R32 is connected to the negative terminal of the amplifier A32; the other end of the third resistor R32 is connected to the control signal V ctrl connected; The positive terminal of the amplifier A32 is connected to the power supply voltage VDD / 2; the output terminal of the amplifier A32 is connected to the control signal V ctrl is connected.

5. The driving circuit of the resonant pressure sensor based on AGC closed-loop control according to claim 1, wherein The signal reading circuit specifically includes: amplifiers A13, A23, A33, first resistor R13, second resistor R23, third resistor R33, fourth resistor R43, fifth resistor R53, sixth resistor R63, seventh resistor R73, eighth resistor R83, ninth resistor R93, tenth resistor R103, first capacitor C13, second capacitor C23, third capacitor C33, fourth capacitor C43, fifth capacitor C53, sixth capacitor C63, seventh capacitor C73, and eighth capacitor C83; One end of the fifth capacitor C53 is connected to the output signal V out1 ; The other end of the fifth capacitor R53 is connected to the sixth resistor R63; One end of the sixth resistor R63 is connected to the negative terminal of the amplifier A33, the seventh resistor R73, and the sixth capacitor C63; One end of the sixth capacitor C63 is connected to the seventh resistor R73 and the negative terminal of the amplifier A33; the other end of the sixth capacitor C63 is connected to the amplifier A33 and the seventh capacitor C73; One end of the seventh resistor R73 is connected to the amplifier A33 and the seventh capacitor C73; The positive terminal of the amplifier A33 is connected to the output voltage V ref ; the output terminal of the amplifier A33 is connected to the seventh capacitor C73; One end of the seventh capacitor C73 is connected to the second capacitor C23, the third resistor R33, the first capacitor C13, and the negative terminal of the amplifier A13; One end of the eighth resistor R83 is connected to the power supply voltage VDD; the other end of the eighth resistor R83 is connected to the eighth capacitor C83; One end of the eighth capacitor C83 is connected to the output signal V in ; One end of the second resistor R23 is connected to the power supply voltage VDD; the other end of the second resistor R23 is connected to the first resistor R13 and the first capacitor C13; One end of the first resistor R13 is connected to the first capacitor C13; the other end of the first resistor R13 is grounded; One end of the first capacitor C13 is connected to the second capacitor C23, the third resistor R33, and the negative terminal of the amplifier A13; One end of the second capacitor C23 is connected to the negative terminal of the third resistor R33 and the amplifier A13; the other end of the second capacitor C23 is connected to the output signal V out1 , the third capacitor C33 and the amplifier A13; One end of the third resistor R33 is connected to the negative terminal of the amplifier A13; the other end of the third resistor R33 is connected to the output signal V out1 , the output terminal of the amplifier A13 and the third capacitor C33 are connected; The positive terminal of the amplifier A13 is connected to the output voltage V ref ; the output terminal of the amplifier A13 is connected to the third capacitor C33; One end of the third capacitor C33 is connected to the fourth resistor R43; One end of the fourth resistor R43 is connected to the fourth capacitor C43, the fifth resistor R53, and the negative terminal of the amplifier A23; One end of the fourth capacitor C43 is connected to the fifth resistor R53 and the negative terminal of the amplifier A23; the other end of the fourth capacitor C43 is connected to the output signal V out2 and the output terminal of the amplifier A23; One end of the fifth resistor R53 is connected to the negative terminal of the amplifier A23; the other end of the fifth resistor R53 is connected to the output terminal of the amplifier A23 and the output signal V out2 is connected; The positive terminal of the amplifier A23 is connected to the output voltage V ref ; the other end of the amplifier A23 is connected to the output signal V out2 ; One end of the ninth resistor R93 is connected to the power supply voltage VDD; the other end of the ninth resistor R93 is connected to the tenth resistor R103 and the output voltage V ref connected; One end of the tenth resistor R103 is connected to the output voltage V ref ; the other end of the tenth resistor R103 is grounded.

6. A driving method for a resonant pressure sensor based on AGC closed-loop control, the driving method for a resonant pressure sensor based on AGC closed-loop control is applied to the driving circuit for a resonant pressure sensor based on AGC closed-loop control according to any one of claims 1-5, characterized in that, including: Excite the mechanical vibration of the resonant structure according to the phase control loop, amplify and phase-shift the vibration signal after the mechanical vibration of the resonant structure, and output the phase-shifted sinusoidal voltage signal; the phase control loop includes a resonant structure, a torque generator, and a signal reading circuit; Extract the oscillation amplitude of the resonant structure according to the gain control loop, compare it with the DC reference voltage signal, and output an error signal; the gain control loop includes K4, K5, a full-wave rectifier, a low-pass filter, and a voltage-controlled gain amplifier; Amplify the gain of the phase-shifted sinusoidal voltage signal and the error signal according to the voltage-controlled gain amplifier; Based on K5 and a full-wave rectifier, a zero in the complex left half-plane is introduced into the driving circuit of a resonant pressure sensor according to the AGC loop circuit in AGC closed-loop control.

7. The driving method of the resonant pressure sensor based on AGC closed-loop control according to claim 6, wherein Based on K5 and a full-wave rectifier, a zero in the complex left half-plane is introduced into the driving circuit of a resonant pressure sensor according to the AGC loop circuit in AGC closed-loop control, specifically including: By introducing K5 and a full-wave rectifier for multi-path feed-forward compensation, a zero in the complex left half-plane is introduced at high frequencies in the driving circuit of the resonant pressure sensor in the AGC closed-loop control to cancel the influence of the secondary point in the driving circuit of the resonant pressure sensor, making the driving circuit of the resonant pressure sensor in the AGC closed-loop control approach a single-pole system.

8. A computer device, comprising: A memory, a processor, and a computer program stored on the memory and executable on the processor, wherein the processor executes the computer program to implement the driving method of a resonant pressure sensor based on AGC closed-loop control according to any one of claims 6-7.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the driving method of a resonant pressure sensor based on AGC closed-loop control according to any one of claims 6-7.

10. A computer program product, comprising a computer program, characterized in that, When the computer program is executed by the processor, it implements the driving method of a resonant pressure sensor based on AGC closed-loop control according to any one of claims 6-7.

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