Air tightness detection system

Abstract

The air tightness detection system mainly comprises an airtight cavity, an imaging probe and a processor, the end face of one side of a detected object covers an opening of the airtight cavity, the airtight cavity is filled with light absorption gas, and the light absorption gas is used for absorbing light waves of a target spectral band; the imaging probe is used for collecting the detection light waves reflected by the end face of the other opposite side of the detected object and capturing images of the light waves of the target spectral band in the detection light waves to obtain target images corresponding to the light waves of the target spectral band; the processor is used for detecting the gas leakage state of the detected object based on the characteristic parameters of the target image. The spectral band of the imaging probe responding to image taking is matched with the target spectral band absorbed by the light absorption gas, and the imaging probe takes an image of light waves of the target spectral band in the detection light waves to obtain a target image, namely an image corresponding to the light absorption gas leaked from the detected object. The gas leakage state of the detected object can be accurately detected through the characteristic parameters of the target image.

Description

Technical Field

[0001] The embodiments of the present application relate to the technical field of airtightness detection, and in particular, to an airtightness detection system. Background Art

[0002] In the prior art, after components are processed, etc., quality inspection of the components is still required, and airtightness detection of the components is often needed to detect whether the gas leakage state of the components meets the requirements, so as to check whether the quality of the components is qualified; among them, the components can be products such as circuit boards, display screens, and glass plates.

[0003] The existing solutions for airtightness detection of components are the pressure detection method and the immersion detection method. The pressure detection method is: the component is arranged in a vacuum chamber, and the gas leakage state of the component is detected by using the pressure change characteristics in the vacuum chamber; the immersion detection method is: the component is immersed in a liquid, and the gas leakage state of the component is detected by detecting whether there are bubbles generated on the component.

[0004] However, in the pressure detection method, the pressure change in the vacuum chamber may also be caused by insufficient sealing of the vacuum chamber, resulting in the inflow of external gas into the vacuum chamber. It is difficult to accurately detect the gas leakage state of the component by using the pressure change characteristics in the vacuum chamber. In the immersion detection method, no bubbles will be generated in the tiny gaps of the component, and it is difficult to accurately detect the gas leakage state of the component by detecting whether there are bubbles generated on the component. That is, the existing airtightness detection solutions are difficult to accurately detect the gas leakage state of the component. Summary of the Invention

[0005] The embodiments of the present application provide an airtightness detection system, which can accurately detect the gas leakage state of the object to be measured.

[0006] The embodiments of the present application provide an airtightness detection system, including: an airtight cavity, an imaging probe, and a processor;

[0007] One end face of the object to be measured covers the opening of the airtight cavity, and the airtight cavity is filled with a light-absorbing gas, and the light-absorbing gas is used to absorb light waves in a target spectral band;

[0008] The imaging probe is used to collect the detection light waves reflected by the opposite end face of the object to be measured, and take an image of the light waves in the target spectral band in the detection light waves to obtain a target image corresponding to the light waves in the target spectral band; the spectral band of the imaging probe for image acquisition matches the target spectral band;

[0009] The processor is connected to the imaging probe, and is used to receive the target image sent by the imaging probe, and detect the gas leakage state of the object to be measured based on the characteristic parameters of the target image.

[0010] Further, the processor is specifically configured to: if the characteristic parameters of the area to be measured on the target image exceed the preset characteristic threshold, determine that there is a gas leak on the object under test, and determine the position corresponding to the area to be measured on the object under test as the gas leak position.

[0011] Further, the characteristic parameters of the target image include gray-scale distribution parameters and regional shape parameters, then the processor is further configured to determine the gas leakage amount at the position corresponding to the area to be measured on the object under test based on the gray-scale distribution parameters of the area to be measured and / or the regional shape parameters of the area to be measured; wherein, the gray-scale distribution parameters include one or more of gray-scale value, gray-scale maximum value, gray-scale average value, and gray-scale variance, and the regional shape parameters include one or more of regional shape and regional area.

[0012] Further, the determining the gas leakage amount at the position corresponding to the area to be measured on the object under test based on the gray-scale distribution parameters of the area to be measured and / or the regional shape parameters of the area to be measured includes: using the target gray-scale distribution parameters and target regional shape parameters corresponding to the object under test at different gas leakage amounts as standard characteristic values, calibrating the corresponding gas leakage amounts for multiple standard characteristic values; comparing the gray-scale distribution parameters of the area to be measured with the target gray-scale distribution parameters, and / or comparing the regional shape parameters of the area to be measured with the target regional shape parameters to determine the standard characteristic value corresponding to the area to be measured; and determining the gas leakage amount at the position corresponding to the area to be measured based on the gas leakage amount calibrated by the standard characteristic value corresponding to the area to be measured.

[0013] Further, an inflation hole is provided on the cavity wall of the airtight cavity, and the inflation hole is used to inject the light-absorbing gas into the airtight cavity. The light-absorbing gas has an absorption peak under the light wave of the target spectral band and can be distinguished from the absorption peaks of other gases.

[0014] Further, it further includes: a pressing column and a sealing gasket; the sealing gasket is disposed between one end face of the object under test and the opening of the airtight cavity; the pressing column is disposed on the opposite end face of the object under test for pressing the object under test towards the opening of the airtight cavity.

[0015] Further, the airtightness detection system further includes a light source; wherein, the light source is used to emit a detection light wave including the target spectral band towards the opposite end face of the object under test.

[0016] Further, the light source includes: a surface light source or a line light source; the detection light wave emitted by the light source is symmetric with the detection light wave collected by the imaging probe based on the surface normal of the object under test.

[0017] Further, the imaging probe includes: an imaging lens and a detector; wherein, the imaging lens is configured to collect the detection light wave reflected by the opposite end face of the object to be measured; the detector, connected to the imaging lens, is configured to receive the detection light wave sent by the imaging lens, and respond to the light wave in the target spectral band in the detection light wave to obtain a target image corresponding to the light wave in the target spectral band.

[0018] Further, a narrow-band filter is installed on the imaging lens, and the filter is configured to filter out the light waves in other spectral bands except the target spectral band.

[0019] Further, it further includes: a sealed chamber; the airtight chamber, the imaging probe and the processor are accommodated in the sealed chamber, and the sealed chamber is in a vacuum state or a negative pressure state.

[0020] As can be seen from the above technical solutions, the embodiments of the present application have the following advantages:

[0021] An airtightness detection system includes: an airtight chamber, an imaging probe and a processor; one end face of the object to be measured covers the opening of the airtight chamber, and an absorbent gas is filled in the airtight chamber, and the absorbent gas is configured to absorb the light wave in the target spectral band; the imaging probe is configured to collect the detection light wave reflected by the opposite end face of the object to be measured, and image the light wave in the target spectral band in the detection light wave to obtain a target image corresponding to the light wave in the target spectral band; the spectral band of the imaging probe for image response matches the target spectral band; the processor is connected to the imaging probe, and is configured to receive the target image sent by the imaging probe, and detect the gas leakage state of the object to be measured based on the characteristic parameters of the target image.

[0022] In the embodiments of the present application, the spectral band of the imaging probe for image response matches the target spectral band absorbed by the absorbent gas. The target image obtained by the imaging probe imaging the light wave in the target spectral band in the detection light wave is the image corresponding to the absorbent gas leaked from the object to be measured. The gas leakage state of the object to be measured can be accurately detected through the characteristic parameters of the target image. Description of the Drawings

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments recorded in the present application. For those of ordinary skill in the art, other drawings can also be obtained according to these drawings.

[0024] Figure 1 It is a schematic structural diagram of an airtightness detection system disclosed in the embodiments of the present application;

[0025] Figure 2 A flowchart of an airtightness detection disclosed in an embodiment of the present application;

[0026] Figure 3 A schematic structural diagram of another airtightness detection system disclosed in an embodiment of the present application;

[0027] Figure 4 A schematic diagram of the absorption wavelength of an absorptive gas disclosed in an embodiment of the present application;

[0028] Figure 5 A schematic diagram of an electronic device disclosed in an embodiment of the present application. Detailed implementation manners

[0029] In order to enable those skilled in the art to better understand the solution of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0030] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the embodiments of the present application.

[0031] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0032] The existing solutions for airtightness detection of components are the pressure detection method and the immersion detection method. However, in the pressure detection method, the pressure change in the vacuum chamber may also be caused by insufficient sealing of the vacuum chamber, resulting in the inflow of external gas into the vacuum chamber. It is difficult to accurately detect the gas leakage state of the component by using the pressure change characteristics in the vacuum chamber. In the immersion detection method, no bubbles will be generated in the tiny gaps of the component, and it is difficult to accurately detect the gas leakage state of the component by detecting whether there are bubbles on the component. That is, the existing airtightness detection solutions are difficult to accurately detect the gas leakage state of the component. Therefore, the embodiments of the present application provide an airtightness detection system that can accurately detect the gas leakage state of the object to be measured, as Figure 1 shown as follows:

[0033] The airtightness detection system of the embodiments of the present application includes: an airtight cavity 101, an imaging probe 102, and a processor; wherein, one end face of the object to be measured covers the opening of the airtight cavity 101; the object to be measured is a wafer, a thin film, glass, etc., and specific limitations are not made here; the shape of the airtight cavity can be a cube or a cylinder, and specific limitations are not made here; there is an opening on one side surface of the airtight cavity, and the remaining side surfaces of the airtight cavity are in a closed state. The area of one end face of the object to be measured is greater than or equal to the area of the opening of the airtight cavity, and one end face of the object to be measured completely covers the opening of the airtight cavity. An absorbent gas is filled in the airtight cavity, and the absorbent gas is the medium in the airtight cavity and is used to absorb light waves in the target spectral band.

[0034] Specifically, the absorbent gas can be carbon dioxide (CO2), carbon monoxide (CO), nitric oxide (NO), nitrogen dioxide (NO2), methane (CH4), ozone (O3), ammonia (NH3), etc., and specific limitations are not made here; it can be understood that the wavelengths of the absorption spectral bands corresponding to different absorbent gases are different. The absorbent gas has an absorption peak under the light waves in the target spectral band and can be distinguished from the absorption peaks of other gases; as Figure 4 shown, where Intensity represents intensity and Wavelength represents wavelength. It can be obtained that the absorption spectral band of carbon dioxide (CO2) is the absorption peak near the wavelength of 4.26 μm, the absorption spectral band of carbon monoxide (CO) is the absorption peak near the wavelength of 4.42 μm, the absorption spectral band of nitric oxide (NO) is the absorption peak near the wavelength of 5.4 μm, the absorption spectral band of nitrogen dioxide (NO2) is the absorption peak near the wavelength of 6.2 μm, the absorption spectral band of methane (CH4) is the absorption peak near the wavelength of 7.7 μm, the absorption spectral band of ozone (O3) is the absorption peak near the wavelength of 9.6 μm, and the absorption spectral band of ammonia (NH3) is the absorption peak near the wavelength of 10.6 μm.

[0035] The imaging probe 102 is used to collect the detection light waves reflected by the opposite end face of the object to be measured. Here, the opposite end face of the object to be measured is the end face on the other side away from the airtight cavity; the detection light waves include light waves in the target spectral band, and the detection light waves can be ambient light or lamp light, and no specific limitation is made here. The imaging probe 102 is used to detect the image of the opposite end face of the object to be measured by collecting the detection light waves reflected by the opposite end face of the object to be measured. The spectral band of the imaging probe's response for image acquisition matches the target spectral band absorbed by the light-absorbing gas. When the imaging probe 102 forms an image, it acquires images of the light waves in the target spectral band in the detection light waves, and detects the target image corresponding to the light waves in the target spectral band, that is, visualizes the leaked light-absorbing gas through the target image.

[0036] It can be understood that the spectral band of the imaging probe's response for image acquisition matches the target spectral band absorbed by the light-absorbing gas; if there is a leakage of the light-absorbing gas in the object to be measured, the leaked light-absorbing gas will absorb the light waves in the target spectral band, and the light waves in the target spectral band reflected on the object to be measured will be reduced. When the imaging probe forms an image, the absorbed light waves will be missing, so as to image the leaked light-absorbing gas and realize the visualization of the leaked light-absorbing gas. For example, when the light-absorbing gas is carbon dioxide, the imaging probe can be an infrared probe (such as a photoconductive probe, a photovoltaic probe or a photomagnetoelectric probe, etc.), and the spectral band of the imaging probe's response for image acquisition matches the target spectral band absorbed by carbon dioxide, that is, the spectral band of the imaging probe's response for image acquisition is the absorption peak near the wavelength of 4.26 μm. Based on the principle that carbon dioxide absorbs light waves near the wavelength of 4.26 μm, gas imaging of the leaked carbon dioxide on the object to be measured is performed to obtain the target image.

[0037] In the airtightness detection system, the processor can be an image processor GPU or a central processing unit CPU, and no specific limitation is made here. The processor is connected to the imaging probe, and this connection can be a wired or wireless connection, and no specific limitation is made here; the processor is used to receive the target image sent by the imaging probe and detect the gas leakage state of the object to be measured based on the characteristic parameters of the target image. It can be understood that the gas leakage state is the state where the light-absorbing gas leaks from the airtight cavity through the object to be measured to the outside, that is, corresponding to the airtightness of the object to be measured. The gas leakage state can be whether there is gas leakage and the gas leakage amount; if the gas leakage amount is larger, it is determined that the airtightness of the object to be measured is worse, and if the gas leakage amount is smaller, it is determined that the airtightness of the object to be measured is better.

[0038] If a light-absorbing gas leaks on the object being measured, the leaked light-absorbing gas will absorb light waves in the target spectral band, causing characteristic parameters of the target image corresponding to the light waves in the target spectral band to change. The characteristic parameters of the target image can be grayscale distribution parameters or regional morphological parameters. The grayscale distribution parameters include one or more of grayscale value, grayscale maximum, grayscale mean, and grayscale variance, and the regional morphological parameters include one or more of regional shape and regional area. The location and amount of gas leakage on the object being measured can be detected by detecting the characteristic parameters of the target image. For example, if the leaked light-absorbing gas absorbs light waves in the target spectral band, it will cause the grayscale value on the target image to change. Therefore, it is possible to detect whether there is a test area on the target image with an excessively large grayscale value, thereby determining whether there is a gas leak in the object being measured. It can be understood that if the amount of gas leakage on the object to be measured is greater, the large amount of light-absorbing gas will absorb more light waves in the target spectral band, which will result in a larger grayscale value of the area to be measured (that is, the darker the area to be measured). At this time, the amount of gas leakage on the object to be measured can be detected by the grayscale value of the area to be measured, that is, the larger the grayscale value of the area to be measured, the greater the gas leakage on the object to be measured.

[0039] It can be seen that in the embodiment of the present application, the airtight cavity is filled with a light-absorbing gas, the spectral band of the imaging probe's response to imaging matches the target spectral band absorbed by the light-absorbing gas, and the target image obtained by the imaging probe by imaging the light wave of the target spectral band in the detection light wave is the image corresponding to the light-absorbing gas leaked from the object to be measured. The gas leakage status of the object to be measured can be accurately detected through the characteristic parameters of the target image.

[0040] It can be understood that, in the existing method, when pressure detection is used for air tightness detection, it takes a long time to detect the pressure change trend, which affects the efficiency of air tightness detection; while in the embodiment of the present application, the gas leakage status of the object to be tested is detected directly through the target image detected by the imaging probe, which can quickly perform air tightness detection and improve the efficiency of air tightness detection.

[0041] Furthermore, the process of the processor performing airtightness detection based on the target image is as follows: Figure 2 The specific steps are as follows:

[0042] 201. If a feature parameter of a region to be measured on the target image exceeds a preset feature threshold, it is determined that there is a gas leak on the object to be measured, and a position corresponding to the region to be measured on the object to be measured is determined as a gas leak position.

[0043] It can be understood that in an airtightness detection system, ambient light or a light source irradiates the opposite end face of the object under test. When there is a leakage of light-absorbing gas at a certain position of the object under test, the leaked light-absorbing gas will absorb the light waves in the target spectral band at this position. The light waves in the target spectral band reflected by the object under test at this position detected by the imaging probe will correspondingly decrease. When imaging, the characteristic parameters of the target image obtained at the corresponding gas leakage position will change; that is, the leaked light-absorbing gas blocks the light waves in the target spectral band from reaching the imaging probe, and based on the target image detected by the imaging probe, the position of the leaked gas is visualized. For example, if the light-absorbing gas is carbon dioxide, it can block the light waves near a wavelength of 4.26 μm from reaching the imaging probe.

[0044] At this time, when the processor performs airtightness detection, if it detects that the characteristic parameters of the target area on the target image are greater than the preset characteristic threshold, it is determined that there is a gas leakage on the object under test, and the position corresponding to the target area on the object under test is determined as the gas leakage position. Among them, the characteristic parameters of the target image include: gray-scale distribution parameters and regional shape parameters. The gray-scale distribution parameters include one or more of gray-scale values, gray-scale maximum and minimum values, gray-scale mean values, and gray-scale variances. Through the gray-scale distribution parameters, the uniformity, transparency, and brightness of the target area on the target image can be determined. For example, the gray-scale value on the target image can reflect the transparency and brightness of the image. The smaller the gray-scale value, the greater the transparency and the brighter the brightness. The larger the gray-scale value, the smaller the transparency and the darker the brightness. Among them, if the gray-scale distribution parameters of the target area are greater than the preset gray-scale threshold, it can be determined that there is a gas leakage on the object under test, and the gas leakage position on the object under test is obtained; the preset gray-scale threshold can be the average gray-scale value or the median gray-scale value of all pixel points on the target image, and specific details are not limited here.

[0045] The regional shape parameters include one or more of the regional shape and the regional area. The regional shape can determine the regional center of the target area, and the regional area can determine the regional size of the target area. Among them, if the regional area of the target area is greater than the preset area threshold, it can be determined that there is a gas leakage on the object under test, and the gas leakage position on the object under test is obtained. The preset area threshold can be one-fifth or one-sixth of the surface area of the object under test, and specific details are not limited here.

[0046] One or more of the gray-scale distribution parameters of the target area and the regional shape parameters of the target area can be used to detect the gas leakage position on the object under test. Through the gray-scale distribution parameters and the regional shape parameters, the gas leakage position on the object under test is analyzed from multiple dimensions, improving the accuracy of the obtained gas leakage position.

[0047] It can be understood that after the light-absorbing gas leaks out, it will diffuse around. Preferably, the position corresponding to the center of the target image area on the object to be measured can be used as the gas leakage position. At the same time, the more the light-absorbing gas diffuses after leaking out, the lower the corresponding gas density, that is, the smaller the gray value corresponding to the target image. Preferably, the position corresponding to the pixel point with the largest gray value in the target image area on the object to be measured can also be used as the gas leakage position to accurately obtain the gas leakage position on the object to be measured.

[0048] 202. Determine the gas leakage amount at the position corresponding to the area to be measured on the object to be measured based on the gray distribution parameter of the area to be measured and / or the area morphology parameter of the area to be measured.

[0049] After it is determined that there is a gas leakage on the object to be measured, the gas leakage amount on the object to be measured can be further determined. Among them, the gas leakage amount at the position corresponding to the area to be measured on the object to be measured can be determined based on the gray distribution parameter of the area to be measured and / or the area morphology parameter of the area to be measured.

[0050] It can be understood that when performing airtightness detection in an air environment, there may be the same light-absorbing gas in the air environment as in the airtight cavity. These light-absorbing gases will also absorb the light waves in the target spectral band, which is likely to have a certain impact on the target image obtained by the imaging probe. That is, the target image is obtained by imaging both the light-absorbing gas leaked from the object to be measured and the light-absorbing gas in the air environment. It is difficult to accurately determine the gas leakage amount on the object to be measured only through the characteristic parameters of the area to be measured in the target image.

[0051] Exemplarily, there is a certain content of target light-absorbing gas that absorbs the target spectral band on the end face of the object to be measured detected by the imaging probe. When the light-absorbing gas leaked from the object to be measured in the target light-absorbing gas only accounts for a small part (one-sixth or one-eighth) of the target light-absorbing gas, at this time, most of the characteristic parameters of the target image detected by the imaging probe are the characteristic parameters corresponding to the light-absorbing gas in the air environment; or, when there is no light-absorbing gas leaked from the object to be measured in the target light-absorbing gas, at this time, the characteristic parameters of the target image detected by the imaging probe are only the characteristic parameters corresponding to the light-absorbing gas in the air environment.

[0052] Therefore, in the embodiments of the present application, by using the target gray distribution parameter and the target area morphology parameter corresponding to the object to be measured at different gas leakage amounts as standard characteristic values, calibrate the gas leakage amount corresponding to multiple standard characteristic values; the accuracy of the gas leakage amount obtained in the air environment depends on the accuracy of the calibration. By calibrating the gas leakage amount corresponding to multiple standard characteristic values, after determining the standard characteristic value corresponding to the area to be measured, the gas leakage amount at the position corresponding to the area to be measured can be accurately determined based on the gas leakage amount calibrated by the standard characteristic value corresponding to the area to be measured.

[0053] Specifically, in the embodiment of the present application, in an air environment, the target gray-scale distribution parameters and target region shape parameters corresponding to different gas leakage amounts of the object to be measured can be obtained, where the different gas leakage amounts are the gas leakage amounts of the light-absorbing gas leaked out through the object to be measured. The target images corresponding to the light waves in the target spectral band detected by the imaging probe can be obtained when the object to be measured has different gas leakage amounts, and the corresponding target gray-scale distribution parameters and target region shape parameters are extracted from the target images; where the target gray-scale distribution parameters also include one or more of: gray value, gray-scale maximum value, gray-scale average value, and gray-scale variance; the target region shape parameters also include one or more of: region shape and region area.

[0054] It can be understood that the target gray-scale distribution parameters and target region shape parameters extracted at different gas leakage amounts are different. The target gray-scale distribution parameters and target region shape parameters corresponding to different gas leakage amounts of the object to be measured can be used as standard characteristic values, and the corresponding gas leakage amounts are calibrated for multiple standard characteristic values. Then, the characteristic parameters of the region to be measured can be compared with the standard characteristic values, that is, the gray-scale distribution parameters of the region to be measured are compared with the target gray-scale distribution parameters (such as comparing the gray-scale average value in the gray-scale distribution parameters of the region to be measured with the gray-scale average value in the target gray-scale distribution parameters), and / or the region shape parameters of the region to be measured are compared with the target region shape parameters (such as comparing the region area in the region shape parameters of the region to be measured with the region area in the target region shape parameters), and the standard characteristic value corresponding to the region to be measured is determined based on the comparison result.

[0055] It can be understood that when the gray-scale distribution parameters of the region to be measured are the same as the target gray-scale distribution parameters of a certain standard characteristic value, and / or the region shape parameters of the region to be measured are the same as the target region shape parameters of the standard characteristic value, it is determined that the standard characteristic value corresponding to the region to be measured is the standard characteristic value; when the gray-scale distribution parameters of the region to be measured are between two target gray-scale distribution parameters, and / or the region shape parameters of the region to be measured are between two target region distribution parameters, the standard characteristic value corresponding to the region to be measured is two standard characteristic values. Then, based on the gas leakage amount calibrated by the standard characteristic value corresponding to the region to be measured, the gas leakage amount at the position corresponding to the region to be measured is determined. That is, when the region to be measured corresponds to one standard characteristic value, the gas leakage amount calibrated by the standard characteristic value is used as the gas leakage amount at the position corresponding to the region to be measured; when the region to be measured corresponds to two standard characteristic values, weights can be assigned to the gas leakage amounts calibrated by the two standard characteristic values and then added to obtain the gas leakage amount at the position corresponding to the region to be measured.

[0056] Next, in combination with Figure 3 , the airtightness detection system will be further described:

[0057] Further, an inflation hole 1011 is provided on the cavity wall of the airtight cavity 101 of the airtightness detection system. The inflation hole 1011 is used to inject an absorptive gas into the airtight cavity 101. The absorptive gas has an absorption peak under the light wave in the target spectral band and can be distinguished from the absorption peaks of other gases. This absorptive gas is similar to the above-mentioned absorptive gas, and details are not described here again. Preferably, the airtight cavity 101 can be filled with the absorptive gas to form a pressure difference on both end faces of the object under test (i.e., the end face close to the airtight cavity 101 and the end face far from the airtight cavity 101). When the airtightness of the object under test is poor, the high-pressure absorptive gas filled in will leak from the object under test. It can be understood that in the embodiment of the present application, the airtight cavity 101 can be evacuated through the inflation hole 1011 first, and then the absorptive gas can be injected into the airtight cavity 101 through the inflation hole 1011 to avoid other gases except the absorptive gas in the airtight cavity 101, which may affect the accuracy of the airtightness detection.

[0058] Further, the airtightness detection system of the embodiment of the present application further includes: a pressing column 103 and a sealing gasket 104; wherein, the sealing gasket 104 is arranged between one end face of the object under test and the opening of the airtight cavity 101, that is, the sealing gasket 104 is arranged at the opening of the airtight cavity 101, and the object under test is installed on the sealing gasket 104; the sealing gasket 104 is used to seal the gap and can be a silica gel gasket or a rubber gasket, and details are not limited here. The pressing column 103 is arranged on the opposite end face of the object under test and is used to press the object under test towards the opening of the airtight cavity 101, that is, to press the gap between the object under test, the sealing gasket 104 and the opening of the airtight cavity 101; through the sealing gasket 104 and the pressing column 103, the airtightness between the object under test and the airtight cavity 101 can be improved, and the absorptive gas can be prevented from leaking from the gap between the object under test and the airtight cavity 101, further ensuring the accuracy of the airtightness detection.

[0059] Further, the airtightness detection system further includes a light source 105; wherein, the light source 105 is used to emit a detection light wave including the target spectral band towards the opposite end face of the object under test; wherein, the light source 105 includes a surface light source (such as a flat light source or an led surface light source, etc.), and details are not limited here. When the light source is a surface light source, the irradiation uniformity of the surface of the object under test can be ensured, and the airtightness of the surface of the object under test can be detected more completely. Among them, the detection light wave emitted by the light source 105 is symmetric with the detection light wave collected by the imaging probe based on the surface normal of the object under test to ensure that the reflected detection light wave can be collected by the imaging probe and the imaging can be successfully completed.

[0060] Further, the imaging probe includes: an imaging lens 1021 and a detector 1022; wherein, the imaging lens 1021 is a high-resolution lens, and the imaging lens 1021 is configured to collect the detection light wave reflected by the opposite end face of the object to be measured. The detector 1022 is connected to the imaging lens 1021, and is configured to receive the detection light wave sent by the imaging lens, and respond to the light wave in the target spectral band in the detection light wave to obtain a target image corresponding to the light wave in the target spectral band. The response spectral band of the detector 1022 matches the absorption spectral band of the light-absorbing gas, and the leaked light-absorbing gas can be imaged on the detector 1022.

[0061] Wherein, a narrow-band filter is installed on the imaging lens 1021, and the filter is configured to filter out the light waves in other spectral bands except the target spectral band. It can be understood that the absorption wavelengths corresponding to different light-absorbing gases are different. When only detecting a specific gas, usually a filter needs to be added in front of the imaging lens to filter out all other light waves except the light waves that can be absorbed by the gas to be detected; for example, when the light-absorbing gas is carbon dioxide, the absorption peak of carbon dioxide near the wavelength of 4.26 μm is the most significant and basically does not overlap with the absorption peaks of other gases. At this time, a narrow-band filter with a central wavelength of 4.26 μm can be used as the filter of the carbon dioxide sensor (imaging lens 1021). By installing a narrow-band filter on the imaging lens 1021, the influence of the light waves in other spectral bands except the target spectral band on imaging can be further avoided, and a more accurate target image can be obtained to further improve the accuracy of airtightness detection.

[0062] Further, in the embodiment of the present application, the airtightness detection system may further include: a sealed chamber, which is isolated from the external air environment to form an accommodation space; the airtight chamber, the imaging probe and the processor in the airtightness detection system are accommodated in the sealed chamber, and the sealed chamber is in a vacuum state or a negative pressure state; the airtightness of the object to be measured can be detected in the vacuum state or the negative pressure state to reduce the influence of the gas in the air environment on the airtightness detection and improve the accuracy of the airtightness detection.

[0063] The embodiment of the present application also provides an electronic device 500, such as Figure 5 shown, the electronic device 4 of the embodiment of the present application includes a processor 501 and a memory 502. The processor 501 is the processor in the above-mentioned airtightness detection system, and one or more application programs or data are stored in the memory 502.

[0064] Among them, the memory 502 can be volatile storage or persistent storage. The programs stored in the memory 502 can include one or more modules, and each module can include a series of instruction operations on the electronic device. Further, the processor 501 can be configured to communicate with the memory 502 and execute a series of instruction operations in the memory 502 on the electronic device 500.

[0065] The electronic device 500 may further include one or more power supplies 505, one or more wired or wireless network interfaces 504, one or more input / output interfaces 503, and / or one or more operating systems, such as Windows ServerTM, Mac OS XTM, UnixTM, LinuxTM, FreeBSDTM, etc.

[0066] Those skilled in the art can clearly understand that for the convenience and brevity of description, the specific working processes of the above-described systems, devices, and units can refer to the corresponding processes in the foregoing method embodiments and will not be elaborated herein.

[0067] In several embodiments provided in the present application, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the units is only a logical function division, and there may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed couplings or direct couplings or communication connections to each other can be through some interfaces, and the indirect couplings or communication connections of the devices or units can be in electrical, mechanical, or other forms.

[0068] The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they can be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0069] In addition, the functional units in each embodiment of the present application can be integrated into one processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above-mentioned integrated units can be implemented in the form of hardware or in the form of software functional units.

[0070] When the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of this technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in various embodiments of this application. The aforementioned storage medium includes: various media that can store program codes, such as USB flash drives, mobile hard disks, read-only memories (ROM, read-only memory), random access memories (RAM, random access memory), magnetic disks, or optical discs.

Claims

1. An airtightness detection system, characterized in that, include: Airtight chamber, imaging probe, and processor; One end face of the object to be measured covers the opening of the airtight cavity, and the airtight cavity is filled with a light-absorbing gas, and the light-absorbing gas is used to absorb light waves in the target spectral band; The imaging probe is used to collect the detection light wave reflected by the other end face of the object to be measured, and to capture the light wave of the target spectral band in the detection light wave to obtain a target image corresponding to the light wave of the target spectral band; the spectral band of the imaging probe in response to the capture is matched with the target spectral band; The processor is connected to the imaging probe and is configured to receive the target image sent by the imaging probe and detect a gas leakage state of the object under test based on characteristic parameters of the target image.

2. The airtightness detection system according to claim 1, wherein The processor is specifically used to: if the characteristic parameters of the area to be tested on the target image exceed the preset characteristic threshold, determine that there is a gas leak on the object to be tested, and determine that the position corresponding to the area to be tested on the object to be tested is the gas leakage position.

3. The airtightness detection system according to claim 2, wherein The characteristic parameters of the target image include grayscale distribution parameters and regional morphology parameters, and the processor is further configured to determine the gas leakage amount at a position corresponding to the area to be measured on the object to be measured based on the grayscale distribution parameters of the area to be measured and / or the regional morphology parameters of the area to be measured; The grayscale distribution parameters include one or more of grayscale value, grayscale maximum, grayscale mean, and grayscale variance, and the region morphology parameters include one or more of region shape and region area.

4. The airtightness detection system according to claim 3, wherein The determining of the gas leakage amount at a position corresponding to the area to be measured on the object to be measured based on the grayscale distribution parameter of the area to be measured and / or the area morphology parameter of the area to be measured includes: Obtaining target grayscale distribution parameters and target area morphology parameters corresponding to different gas leakage amounts of the object under test under working conditions of an air environment; Using the target grayscale distribution parameter and the target area morphology parameter as standard characteristic values, and calibrating corresponding gas leakage amounts for a plurality of the standard characteristic values; Comparing the grayscale distribution parameters of the area to be measured with the target grayscale distribution parameters, and / or comparing the regional morphological parameters of the area to be measured with the target regional morphological parameters to determine a standard characteristic value corresponding to the area to be measured; The gas leakage amount at a position corresponding to the area to be measured is determined based on the gas leakage amount calibrated by the standard characteristic value corresponding to the area to be measured.

5. The airtightness detection system according to claim 1, characterized in that, An air-filling hole is provided on the cavity wall of the airtight cavity, and the air-filling hole is used to inject the light-absorbing gas into the airtight cavity. The light-absorbing gas has an absorption peak under the light wave of the target spectral band, which can be distinguished from the absorption peaks of other gases.

6. The airtightness detection system according to claim 1, characterized in that, Also includes: Compression column and sealing gasket; The sealing gasket is arranged between one end surface of the object to be measured and the opening of the airtight cavity; The pressing column is arranged on the other end surface of the object to be measured, and is used to press the object to be measured toward the opening of the airtight cavity.

7. The airtightness detection system according to claim 1, characterized in that The airtightness detection system further includes a light source; The light source is used to emit a detection light wave including the target spectral band toward the opposite end face of the object to be measured.

8. The airtightness detection system according to claim 7, wherein The light source includes a surface light source; The detection light wave emitted by the light source is symmetric with the detection light wave collected by the imaging probe based on the surface normal of the object to be measured.

9. The airtightness detection system according to claim 1, characterized in that, The imaging probe includes: an imaging lens and a detector; Wherein, the imaging lens is used to collect the detection light wave reflected by the opposite end face of the object to be measured; The detector, connected to the imaging lens, is used to receive the detection light wave sent by the imaging lens, and respond to the light wave in the target spectral band in the detection light wave to obtain a target image corresponding to the light wave in the target spectral band.

10. The airtightness detection system according to claim 7, characterized in that A narrow-band filter is installed on the imaging lens, and the filter is used to filter out the light waves in other spectral bands except the target spectral band.

11. The airtightness detection system according to claim 1, characterized in that It further includes: A sealed chamber; The airtight chamber, the imaging probe and the processor are accommodated in the sealed chamber, and the sealed chamber is in a vacuum state or a negative pressure state.

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