Hybrid magnetic array current sensor and construction method

Abstract

The invention relates to the technical field of electromagnetic measurement, and provides a hybrid magnetic array current sensor and a construction method. The hybrid magnetic array current sensor comprises a TMR array unit used for converting sensed current magnetic field change into an electric signal to obtain first current data; the quantum current sensing unit is used for converting the sensed quantum state signal change into an electric signal to obtain second current data; the data acquisition unit is used for acquiring the temperature of the TMR array and the output voltage of the corresponding temperature under the reference magnetic field; the data fusion unit is used for obtaining a sensitivity drift coefficient based on the temperature of the TMR array and the output voltage of the corresponding temperature under the reference magnetic field; compensating the first current data according to the sensitivity drift coefficient to obtain compensated first current data; and fusing the compensated first current data and the compensated second current data to obtain fused current data.

Description

Technical Field

[0001] The present invention relates to the technical field of electromagnetic measurement, and particularly to a hybrid magnetic array current sensor and a construction method thereof. Background Art

[0002] The statements in this part merely provide background technical information related to the present invention and do not necessarily constitute prior art.

[0003] With the rapid construction and advancement of the new power system, the limitations of current sensors have become increasingly prominent. On the one hand, large-scale new energy sources such as solar and wind power generation, as well as large-capacity power electronic equipment, are continuously connected to the power grid. Solar power generation is affected by light intensity and time, and wind power generation is affected by wind force and stability. The grid connection of these distributed power sources makes the grid current exhibit complex characteristics such as large dynamic range and wide frequency band. A large amount of harmonics and high-frequency components are generated during the operation of large-capacity power electronic equipment, further exacerbating the complexity of the grid current, which undoubtedly poses more stringent requirements on the measurement performance of grid current measurement devices. On the other hand, in emerging fields such as carbon trading and electricity trade settlement, the accuracy of current measurement is directly related to the economic interests of all parties, and its importance is self-evident.

[0004] Traditional electromagnetic current transformers have been widely used in power systems in the past. They use the principle of electromagnetic induction to measure current. However, when facing the new challenges of modern power systems, their disadvantages have gradually emerged. When measuring large currents, due to the limitations of its working principle, it requires a large iron core and windings, resulting in a large volume and heavy weight. This not only increases the construction cost and space occupancy of power facilities such as substations, but also when dealing with complex fault currents, the iron core is prone to saturation, making the current transformer unable to accurately transmit current information, seriously affecting the timeliness and accuracy of the protection and control actions of the power system. In the fault detection of some high-voltage transmission lines, the saturation phenomenon of electromagnetic current transformers may lead to deviations in the measurement of short-circuit current peaks, thereby affecting the correct operation of relay protection devices and increasing the risk of power system fault outages.

[0005] The emergence of current sensors based on the Hall effect has, to a certain extent, improved some of the disadvantages of electromagnetic transformers. It uses the Hall effect of Hall elements in a magnetic field to measure current, with a relatively small volume and a relatively fast response speed. However, there are still deficiencies in terms of accuracy and stability, especially in wide-range measurements, it is difficult to simultaneously meet the requirements of high precision and low error. In some application scenarios with extremely high requirements for current measurement accuracy, such as high-precision power metering and power system dynamic stability analysis, the performance of Hall current sensors is difficult to meet the needs.

[0006] In addition, with the large-scale integration of new energy power generation into the power system, the current in the power grid has become more complex and variable. Besides containing various harmonic components and rapid current fluctuations, there are also weak current signals and other situations. At the same time, the electromagnetic environment in which the power system is located has become increasingly complex. High-voltage equipment, communication lines in the substation, and surrounding industrial equipment, etc., may all become electromagnetic interference sources, which poses a higher challenge to the anti-interference ability of current sensors.

[0007] At present, with the booming development of new energy, new energy power generation such as wind power and photovoltaic power generation has been largely integrated into the power system, completely changing the traditional form of grid current. The previously relatively stable and regular current has now become extremely complex due to the intermittency and volatility of new energy power generation. The current not only contains rich harmonic components of various orders, which will have a serious impact on the normal operation of power equipment, possibly leading to overheating, increased losses, and even damage to the equipment; but also the current fluctuation speed is extremely fast, bringing great difficulties to the real-time monitoring and control of the power system. At the same time, the emergence of weak current signals has posed an unprecedented challenge to the accuracy and sensitivity of current measurement. These weak current signals often contain key power system operation state information. Once the measurement is inaccurate, it may lead to misjudgment of the system state.

[0008] Meanwhile, the electromagnetic environment of the power system has become increasingly harsh. Inside the substation, high-voltage equipment will generate strong electromagnetic radiation during operation, and its complex electromagnetic field distribution may interfere with the normal operation of current sensors; when communication lines transmit signals, they will also interact with the surrounding electromagnetic environment to generate electromagnetic interference, thereby affecting the accuracy of current measurement; surrounding industrial equipment, such as large motors, welders, etc., will emit various frequency electromagnetic interferences into the surrounding space during operation. These interference sources are intertwined to form a complex electromagnetic interference field, seriously threatening the reliable operation of current sensors.

[0009] In such a severe situation, traditional current sensors are no longer able to meet the requirements of modern power systems. When facing complex currents and strong electromagnetic interference, their measurement accuracy drops sharply, the measurement range cannot cover a wide range of current changes, and their anti-interference ability is weak. They are prone to measurement errors and even failure in a complex electromagnetic environment. Therefore, it is extremely urgent to develop new current sensing devices. Summary of the Invention

[0010] To solve the technical problems existing in the above-mentioned background technology, the present invention provides a hybrid magnetic array current sensor and a construction method. The present invention combines a TMR array with a quantum current sensing unit, and the advantages of both are complementary. The TMR array is responsible for the preliminary detection and coarse adjustment of a wide range of currents, while the quantum current sensing unit focuses on high-precision measurement to ensure accurate acquisition of current information even in complex current and strong electromagnetic interference environments. At the same time, by utilizing the high magnetic measurement stability of diamond color centers, the error drift of the TMR, which is susceptible to changes in sensitivity due to environmental temperature, is monitored and self-corrected for error drift, further improving the measurement accuracy and stability.

[0011] To achieve the above object, the present invention adopts the following technical solutions: The first aspect of the present invention provides a hybrid magnetic array current sensor.

[0012] A hybrid magnetic array current sensor includes: a TMR array unit, a quantum current sensing unit, a data acquisition unit, a transmission unit, and a host computer. The host computer is connected to a data fusion unit through the transmission unit; The TMR array unit is used to convert the sensed change in the current magnetic field into an electrical signal to obtain first current data; The quantum current sensing unit is used to convert the sensed change in the quantum state signal into an electrical signal to obtain second current data; The data acquisition unit is used to collect the temperature of the TMR array and the output voltage at the corresponding temperature under the reference magnetic field; The data fusion unit is used to obtain a sensitivity drift coefficient based on the temperature of the TMR array and the output voltage at the corresponding temperature under the reference magnetic field; compensate the first current data according to the sensitivity drift coefficient to obtain compensated first current data; fuse the compensated first current data and the second current data to obtain fused current data; The host computer is used to receive the fused current data uploaded by the data fusion unit to obtain a current measurement result.

[0013] Further, the sensitivity drift coefficient is represented by the following formula:

[0014] Wherein, represents the sensitivity drift coefficient, represents the output value of the TMR array under the reference magnetic field, B NV represents the reference magnetic field strength calibrated by diamond color centers, T 0 is the reference temperature, T is the temperature of the collected TMR array; The compensated first current data is represented by the following formula:

[0015] where represents the first current data, represents the compensated first current data.

[0016] Further, the MR array unit includes: a circular array, a rectangular array, a linear array, and other special arrays.

[0017] Further, the MR array unit includes a number of magnetic field sensing units, and an on-line calibration method is adopted. Based on the magnetic field results measured by all magnetic field sensing units, combined with the solution calculation of the magnetic field-current inversion model, the position of the current-carrying conductor to be measured is located, the correlation coefficients of each magnetic field sensing unit are calculated, and calibration is performed according to the correlation coefficients of each magnetic field sensing unit.

[0018] Further, the quantum current sensing unit includes an optical fiber, an optical fiber adapter, a diamond probe, a multi-axis displacement stage, a microwave coil, a microwave switch, and a microwave signal amplifier; The output end of the optical fiber is connected to the base of the diamond probe, and the multi-axis displacement stage is used to control the coaxiality of the end face center of the optical fiber output end and the NV center of the diamond probe; The laser emitted by the laser source is introduced into the optical fiber through the optical fiber adapter, and then the optical fiber transmits the laser to the diamond probe to excite the NV center to generate a fluorescence signal; A microwave coil is wound around the diamond probe, and the microwave signal generated by the microwave source acts on the microwave coil after passing through the microwave switch and the microwave signal amplifier to regulate the spin state of the diamond NV center; The connection line between the microwave coil and the microwave source is laid in parallel with the optical fiber.

[0019] Further, the transmission unit includes an optical fiber transmission unit for transmitting current measurement data using an optical signal to achieve electrical isolation between the measurement end and the receiving end.

[0020] Further, the transmission unit also includes a microwave regulation unit. The microwave transmission line of the microwave signal of the microwave regulation unit is arranged in coordination with the optical signal transmission line; the microwave signal is generated by a microwave source and transmitted to the microwave coil or resonator near the diamond NV center through the microwave transmission line.

[0021] Further, the host computer is also connected to the signal processing unit through the transmission unit, and is used for amplifying, filtering, and linearizing the first current data and the second current data.

[0022] Further, the step of fusing the compensated first current data and second current data includes fusing the processed first current data and second current data by using a weighted average method or a Kalman filtering algorithm.

[0023] Further, the hybrid magnetic array current sensor further includes: a central control unit configured to control the sampling frequencies, start, and stop of the TMR array unit and the quantum current sensing unit.

[0024] Further, the central control unit is configured to perform data interaction with the signal processing unit and the data fusion unit to set relevant parameters.

[0025] Further, the central control unit is configured to analyze, store, and communicate with external devices the transmitted data.

[0026] Further, the hybrid magnetic array current sensor further includes: a power supply and management unit configured to supply power to the TMR array unit, the quantum sensor unit, the data acquisition unit, the signal processing unit, the data fusion unit, the central control unit, and the transmission unit.

[0027] Further, the hybrid magnetic array current sensor further includes: a database configured to store data.

[0028] The second aspect of the present invention provides a construction method for a hybrid magnetic array current sensor.

[0029] A construction method for a hybrid magnetic array current sensor for constructing the hybrid magnetic array current sensor described in the first aspect, includes: Selecting TMR elements, and in combination with the magnetic field distribution characteristics of the measurement target and the spatial limitations of the system, performing simulation analysis using electromagnetic simulation software to determine the precise positions and spacings of each element, and designing the TMR array unit; Encapsulating a diamond NV color center probe, equipping it with a matching laser source and microwave source, constructing an optical signal collection and conversion system to connect to the signal processing unit, and sealing the diamond NV color center probe, equipping it with a laser source, and adjusting the frequency and power of the microwave source according to the magnetic resonance characteristics of the diamond NV color center; using a photodetector to convert the optical signal into an electrical signal, and connecting the converted electrical signal to the signal processing unit; Selecting an optical fiber according to the requirements of signal transmission distance, rate, and bandwidth; designing an adapter interface to ensure the physical connection and electrical matching between the interface, the signal source, and the optical fiber, and converting the electrical signal into an optical signal to access the optical fiber; Selecting an amplifier to amplify and filter the resistance change signal of the TMR array unit, selecting a filter and an analog-to-digital converter, amplifying the filtered data, and transmitting it to the data fusion unit via the analog-to-digital converter to obtain a current measurement result through fusion.

[0030] Furthermore, the hybrid magnetic array current sensor is encapsulated with a sealed housing and sealant.

[0031] In terms of insulation design, a metal shielding layer (such as an aluminum foil shielding layer) is provided between the high-voltage side and the low-voltage side and is well grounded, effectively limiting the electric field range, blocking the interference of the high-voltage side electric field on the low-voltage side, and preventing measurement errors or device failures caused by electric field interference. The optical fiber transmission unit in the transmission unit uses optical signals to transmit current measurement data, achieving electrical isolation between the measurement end and the receiving end. In a strong electromagnetic interference environment such as a power system, it can greatly avoid the influence of electromagnetic interference on the transmitted signal and ensure the accuracy and stability of data transmission. The device can operate stably in a complex electromagnetic environment, such as substations, factories, and other places with a large number of electrical equipment and electromagnetic noise.

[0032] The TMR array unit has a rich variety of structures, including circular arrays, rectangular arrays, linear arrays, and other special arrays, etc., which can be flexibly selected or combined according to different current measurement requirements and scenarios. The algorithm of the data fusion unit can dynamically adjust the fusion weight of the TMR array unit data and the quantum sensing data according to the current magnitude. When measuring small currents, it gives full play to the high-precision advantage of the quantum current sensing unit, and when measuring large currents, it relies on the wide range and stability characteristics of the TMR array unit, thus achieving high-precision measurement of the device within a wide range. It can not only meet the precise measurement of tiny currents, such as current monitoring in microelectronic circuits, but also cope with the measurement requirements of large currents, such as current detection in power transmission systems.

[0033] By storing, analyzing, and processing the measurement data through the database and the upper computer, it provides a basis for optimizing the performance of the device, successfully expands the wide-load characteristics, enables it to maintain good measurement performance under different load conditions, and effectively solves the problem that it is difficult to balance the range coverage and measurement accuracy of traditional current sensors.

[0034] Compared with the prior art, the beneficial effects of the present invention are as follows: Due to its high sensitivity, TMR technology can accurately capture extremely weak magnetic field changes, which gives it a natural advantage in detecting weak current signals; at the same time, its low-power consumption feature enables it to maintain stable performance during long-term operation and reduce energy consumption. Quantum sensors are at the technological peak of precision and stability. Their ultra-high precision can achieve extremely accurate measurement of current, and the stability ensures the reliability of measurement results under different environmental conditions. The present invention combines the TMR array with the quantum current sensing unit, and the two complement each other's advantages. The TMR array is responsible for the preliminary detection and rough adjustment of wide-range currents, while the quantum current sensing unit focuses on high-precision measurement, ensuring that current information can be accurately obtained even in complex current and strong electromagnetic interference environments.

[0035] Once successfully applied, the hybrid magnetic array current sensor proposed by the present invention will have a profound impact on the safe, stable, and efficient operation of the power system. In terms of power dispatching, accurate current measurement data can help dispatchers better grasp the real-time operation status of the power system, achieve more reasonable power distribution, avoid local overload or underload problems caused by uneven power distribution, and improve the overall operation efficiency of the power system. In the field of power equipment protection, it can detect current abnormalities in a timely and accurate manner, provide reliable data support for relay protection devices, quickly cut off the faulty line, prevent the expansion of faults, and ensure the safe operation of power equipment. In the long run, the application of the hybrid magnetic array current sensor will also promote the development of smart grids, lay a solid foundation for realizing the intelligent and automated control of the power system, and help the energy industry transform towards the direction of green, low-carbon, and high-efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The accompanying drawings forming a part of this invention are used to provide a further understanding of the invention. The schematic embodiments and descriptions thereof of the invention are used to explain the invention and do not unduly limit the invention.

[0037] Figure 1 is a framework diagram of the hybrid magnetic array current sensor shown in an embodiment of the present invention; Figure 2 is a structural diagram of the hybrid magnetic array current sensor shown in an embodiment of the present invention; Figure 3 is a schematic diagram of a TMR circuit board shown in an embodiment of the present invention; Figure 4 is a circuit diagram of a TMR differential operational amplifier unit shown in an embodiment of the present invention; Wherein, 1, opening and closing mechanism; 2, shielding structure; 3, TMR chip; 4, current-carrying conductor; 5, microwave antenna; 6, diamond NV color center; 7, photodetector; 8, inner diameter. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0038] The present invention will be further described below in conjunction with the drawings and embodiments.

[0039] It should be noted that the following detailed descriptions are all illustrative and are intended to provide a further description of the present invention. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which the present invention belongs.

[0040] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they specify the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0041] As Figure 1 shown, the present invention provides a hybrid magnetic array current sensor, including: a TMR array unit, a quantum current sensing unit, a data acquisition unit, a transmission unit, and a host computer. The host computer is connected to a data fusion unit through the transmission unit; The TMR array unit is configured to convert the sensed change in the magnetic field of the current into an electrical signal to obtain first current data; The quantum current sensing unit is configured to convert the sensed change in the quantum state signal into an electrical signal to obtain second current data; The data acquisition unit is configured to acquire the temperature of the TMR array and the output voltage at the corresponding temperature under the reference magnetic field; The data fusion unit is configured to obtain a sensitivity drift coefficient based on the temperature of the TMR array and the output voltage at the corresponding temperature under the reference magnetic field; compensate the first current data according to the sensitivity drift coefficient to obtain compensated first current data; fuse the compensated first current data and the second current data to obtain fused current data; The host computer is configured to receive the fused current data uploaded by the data fusion unit to obtain a current measurement result.

[0042] In some embodiments, the sensitivity drift coefficient is expressed by the following formula:

[0043] where represents the sensitivity drift coefficient, represents the output value of the TMR array under the reference magnetic field, B NV represents the reference magnetic field intensity calibrated by the diamond color center, T 0 is the reference temperature, T is the temperature of the collected TMR array; The formula for obtaining the compensated first current data is as follows:

[0044] where represents the first current data, represents the compensated first current data.

[0045] In some embodiments, the MR array unit includes: a circular array, a rectangular array, a linear array, and other special arrays.

[0046] In some embodiments, the MR array unit includes a number of magnetic field sensing units, and an on-line calibration method is adopted. Based on the magnetic field results measured by all the magnetic field sensing units, combined with the solution calculation of the magnetic field-current inversion model, the position of the current-carrying conductor to be measured is located, the correlation coefficients of each magnetic field sensing unit are calculated, and calibration is performed according to the correlation coefficients of each magnetic field sensing unit.

[0047] In some embodiments, the quantum current sensing unit includes an optical fiber, an optical fiber adapter, a diamond probe, a multi-axis displacement stage, a microwave coil, a microwave switch, and a microwave signal amplifier; The output end of the optical fiber is connected to the base of the diamond probe, and the multi-axis displacement stage is used to control the coaxiality of the end face center of the output end of the optical fiber and the NV center of the diamond probe; The laser emitted by the laser source is introduced into the optical fiber through the optical fiber adapter, and then the optical fiber transmits the laser to the diamond probe to excite the NV center to generate a fluorescence signal; A microwave coil is wound around the diamond probe, and the microwave signal generated by the microwave source acts on the microwave coil through the microwave switch and the microwave signal amplifier to regulate the spin state of the diamond NV center; The connection line between the microwave coil and the microwave source is laid in parallel with the optical fiber.

[0048] In some embodiments, the transmission unit includes an optical fiber transmission unit for transmitting current measurement data using an optical signal to achieve electrical isolation between the measurement end and the receiving end.

[0049] In some embodiments, the transmission unit further includes a microwave regulation unit. The microwave transmission line of the microwave signal of the microwave regulation unit is arranged in coordination with the optical signal transmission line; the microwave signal is generated by a microwave source and transmitted to the microwave coil or resonator near the diamond NV center through the microwave transmission line.

[0050] In some embodiments, the host computer is also connected to the signal processing unit through the transmission unit, and is used for amplifying, filtering, and linearizing the first current data and the second current data.

[0051] In some embodiments, the fusion of the compensated first current data and the second current data includes fusing the processed first current data and the second current data by using a weighted average method or a Kalman filtering algorithm.

[0052] In some embodiments, the hybrid magnetic array current sensor further includes: a central control unit for controlling the sampling frequencies, starting, and stopping of the TMR array unit and the quantum current sensing unit.

[0053] In some embodiments, the central control unit is used for data interaction with the signal processing unit and the data fusion unit and setting relevant parameters.

[0054] In some embodiments, the central control unit is used for analyzing, storing, and communicating with external devices the transmitted data.

[0055] In some embodiments, the hybrid magnetic array current sensor further includes: a power supply and management unit for supplying power to the TMR array unit, the quantum sensor unit, the data acquisition unit, the signal processing unit, the data fusion unit, the central control unit, and the transmission unit.

[0056] In some embodiments, the hybrid magnetic array current sensor further includes: a database for storing data.

[0057] The present invention aims to overcome the many limitations of traditional current sensors in the application of modern power systems. In the face of the complex characteristics of grid currents such as large dynamic range and wide frequency band brought about by the large-scale access of new energy and the widespread application of high-capacity power electronic equipment in a new power system, whether it is the easy saturation, large volume, and heavy weight of electromagnetic transformers or the deficiencies of Hall effect sensors in terms of accuracy, stability, and anti-interference ability, traditional current sensors are difficult to meet the growing demand for high-precision current measurement. By combining multiple TMR array units with a quantum current sensing unit and constructing a signal processing and transmission unit adapted thereto, the present invention utilizes the high-sensitivity detection ability of the TMR array unit to magnetic field changes to achieve wide-range current measurement, improves the overall measurement accuracy with the ultra-high-precision characteristics of the quantum current sensing unit, and at the same time uses an optical fiber transmission unit to ensure the reliable transmission of signals in a strong electromagnetic interference environment, realizes electrical isolation between the measurement end and the receiving end, effectively avoids the influence of electromagnetic interference on current measurement data, and thus provides accurate and reliable current measurement data support for many key links such as the stable operation of the power system, electric energy trade settlement, and electricity-carbon trading, greatly promoting the development of the power system towards the direction of intelligence and high efficiency.

[0058] The following is a detailed description of this embodiment: The present invention discloses a hybrid magnetic array current sensor, which includes a TMR array unit, a quantum current sensing unit, a data acquisition unit, a transmission unit, a signal processing unit, a data fusion unit, a central control unit, a power supply, a management unit, and a host computer. The signal processing unit, the data fusion unit, and the central control unit are connected to the host computer through the transmission unit, and the host computer is connected to a database.

[0059] In one or more embodiments, the TMR array unit, as Figure 3 shown, based on the tunneling magnetoresistance effect, can sensitively sense the magnetic field changes generated by the current. When an electric current passes through a wire, the magnetic field strength around it is proportional to the magnitude of the current. The resistance of the TMR element will change significantly with the change of the magnetic field. By measuring this resistance change, the current value can be detected with high precision, and even small current changes can be accurately captured. It is applicable to scenarios with high requirements for current accuracy, such as current monitoring of precision instrument equipment and current control of low-power circuits. The structure of the TMR array unit includes a circular array, a rectangular array, a linear array, and other special arrays, etc. This sensor adopts an online calibration method, based on the magnetic field results measured by all magnetic field sensing units, and combines the solution calculation of the magnetic field-current inversion model to accurately locate the position of the current-carrying conductor to be measured, and thus calculates the correlation coefficient between the current to be measured and the magnetic fields measured by each magnetic field sensing unit.

[0060] Specifically, the online calibration implementation process of the TMR array unit structure includes the following steps: (1) Layout of magnetic field sensing units and data acquisition Suppose there are N sensing units in the TMR array unit structure, and the spatial coordinates of the i-th unit are (x i , y i , z i ). When the current-carrying conductor to be measured passes through, each magnetic field sensing unit synchronously acquires the magnetic field strength B i , forming an original data set {B1, B2,..., B N}; (2) Magnetic field-current inversion modeling Establish a physical model of the position (x c , y c , z c ) of the current-carrying conductor and the magnetic field distribution. According to the Biot-Savart law, the magnetic field generated by a single infinitely long straight wire is:

[0061] Among them, , represents the vacuum magnetic permeability, represents the current to be measured, represents the perpendicular distance from the magnetic field sensing unit to the conductor.

[0062] (3)Position parameter solution Construct a non - linear equation system:

[0063] Use the Levenberg - Marquardt algorithm for iterative solution, and the objective function is:

[0064] This optimization process can simultaneously obtain the conductor position ( , ) and the estimated current value .

[0065] (4)Correlation coefficient calculation Calculate the correlation coefficient of each magnetic field sensing unit according to the positioning result :

[0066] This coefficient characterizes the conversion relationship between the measured value of the sensing unit and the true current. In the ideal state . In the actual system, the measurement consistency is evaluated by statistically analyzing the variance of each unit .‌

[0067] (5)Dynamic calibration update Establish a sliding time window mechanism and periodically execute the above - mentioned solution process during continuous measurement. When interference factors cause changes in the array characteristics, self - calibration is achieved by updating the correlation coefficient matrix .‌

[0068] In one or more embodiments, as Figure 2 shown, the hybrid magnetic array current sensor includes an opening - closing structure 1, a shielding structure 2, a TMR chip 3, a current - carrying conductor 4, a microwave antenna 5, a diamond NV - center 6, a photodetector 7, and an inner diameter 8, wherein, the opening - closing structure 1 is used to dynamically adjust the aperture of the TMR array unit to adapt to different - sized measured objects.

[0069] In this embodiment, the opening - closing structure 1 adopts a hinge - type mechanical structure, which is driven by a built - in stepper motor, and the opening - closing accuracy reaches ±0.1 mm. When closed, it forms a closed magnetic circuit to reduce magnetic leakage; when opened, it allows a current - carrying conductor with a maximum diameter of 20 mm to pass through. Moreover, the outer layer of the opening - closing structure 1 is made of 316L stainless steel (anti - magnetic interference), and the inner lining is a silica gel buffer layer (to prevent mechanical wear).

[0070] The shielding structure 2 is used to suppress external magnetic field interference and improve the signal - to - noise ratio.

[0071] In this embodiment, the outer layer of the shielding structure 2 can be made of permalloy (μ = 100000), the middle layer can be made of soft ferrite, and the inner layer can be made of high-permeability nanocrystalline ribbon. The shielding structure 2 integrates a three-dimensional Helmholtz coil to cancel the residual magnetic field in real time (compensation accuracy ±5 nT).

[0072] The TMR chip 3 uses a MgO tunnel junction (thickness 1.2 nm) + CoFeB free layer (10 nm) + IrMn pinned layer.

[0073] The current-carrying conductor 4 serves as the measured current path or the reference magnetic field source. It uses a U-shaped copper conductor and passes a standard current (such as 1A RMS) to correct the TMR sensitivity drift in real time.

[0074] The microwave antenna 5 is used to manipulate the quantum.

[0075] The diamond NV color center 6 uses CVD synthetic diamond.

[0076] The photodetector 7 includes an avalanche photodiode (APD) and a lock-in amplifier circuit. The lock-in amplifier circuit is used to synchronously detect the fluorescence signal (the time constant is adjustable from 1 ms to 10 s), and the dynamic range is 120 dB. The photodetector 7 adopts a double-layer shielding (electromagnetic + optical shielding) design to eliminate ambient light and RF crosstalk.

[0077] Among them, the microwave antenna 5, the diamond NV color center 6, and the photodetector 7 are attached to the PCB board and output signals to the single-chip microcomputer together with the TMR chip 3.

[0078] In one or more embodiments, for the quantum sensor unit, special treatment is performed at the output end of the optical fiber. The cladding and core of the optical fiber output end are integrally processed into a frustum shape, then photosensitive glue is coated on its end face, and then the optical fiber output end is connected to the base of the diamond probe. Through precise adjustment with a multi-axis displacement stage, the center of the end face of the optical fiber output end is coaxially aligned with the NV color center of the diamond probe. Finally, the photosensitive glue is irradiated with a specific wavelength of excitation light to cure it, thus realizing a firm connection between the optical fiber and the diamond probe. A fiber optic adapter is used to introduce the laser emitted by the laser source into the optical fiber through the fiber optic adapter, and then the optical fiber transmits the laser to the diamond probe to excite the NV color center to generate a fluorescence signal. A microwave coil is wound around the diamond probe, and the microwave signal generated by the microwave source acts on the microwave coil after passing through the microwave switch and the microwave signal amplifier, thereby regulating the spin state of the diamond NV color center. The connection line between the microwave coil and the microwave source can be laid in parallel with the optical fiber and integrated into a system together.

[0079] In one or more embodiments, the data acquisition unit includes a temperature sensor and a voltage sensor.

[0080] Among them, the temperature sensor, voltage sensor and TMR array unit are reasonably and adaptively installed. The temperature sensor should ensure that it can accurately sense the temperature change of the TMR array unit while avoiding the influence of other external heat sources or interference sources. Once the temperature sensor is installed in place, the temperature of the TMR array unit starts to be measured in real time to obtain accurate temperature data.

[0081] In one or more embodiments, the transmission unit includes an optical fiber transmission unit and a microwave regulation unit.

[0082] Specifically, the optical fiber transmission unit uses optical signals to transmit current measurement data, achieving electrical isolation between the measurement end and the receiving end. In a strong electromagnetic interference environment such as a power system, it effectively avoids the influence of electromagnetic interference on the transmitted signal, ensuring that the current signal can be accurately transmitted from the sensor end to the data processing center or monitoring device. In a specific application, an electro-optical conversion unit needs to be connected after the signal processing unit, data fusion unit, and central control unit to convert the electrical signal into an optical signal, so that the optical signal is uploaded to the host computer through the optical fiber transmission unit.

[0083] Specifically, for the microwave regulation unit, the transmission line of its microwave signal is arranged in coordination with the optical signal transmission line. The microwave signal is generated by a microwave source and transmitted through a microwave transmission line (such as a coaxial cable, microstrip line, etc.) to a microwave coil or resonator structure close to the diamond NV color center to precisely control the quantum state. It ensures that the current data collected by the TMR array unit and the quantum sensor unit is transmitted to the control room without interference, improving the reliability and accuracy of the entire measurement system.

[0084] In one or more embodiments, the signal processing unit is used to amplify, filter, linearize, etc. the original signals collected by the TMR array unit and the quantum sensor unit, converting the weak signals that may be affected by noise interference or non-linearity into a standard signal form suitable for subsequent circuit processing and analysis, improving the quality and stability of the signals, so as to obtain current information more accurately.

[0085] In one or more embodiments, the data fusion unit is responsible for calculating the sensitivity drift coefficient according to the voltage output value of the TMR array under the reference magnetic field at the reference temperature, the voltage output value of the TMR array under the reference magnetic field at the actual temperature, and the reference magnetic field strength calibrated by the diamond color center:

[0086] Wherein, represents the sensitivity drift coefficient, represents the output value of the TMR array under the reference magnetic field, B NV represents the reference magnetic field strength calibrated by the diamond color center,T 0 is the reference temperature, T is the temperature of the collected TMR array; According to the sensitivity drift coefficient, the current data of the TMR array unit is compensated, that is, the following formula:

[0087] where, represents the current data of the TMR array unit, represents the current data of the TMR array unit after compensation; The current data of the TMR array unit after compensation and the current data of the quantum current sensing unit are fused to obtain the fused current data; The signals of the TMR array unit and the quantum sensor unit after signal conditioning are fused. Since each of these two sensor units has its own advantages and limitations, the data fusion unit can integrate the data of both based on specific algorithms (such as the weighted average method, the Kalman filtering algorithm, etc.), taking the advantages and making up for the deficiencies, to obtain a more reliable and accurate current measurement result, and give full play to the high-precision characteristics of the hybrid sensor system.

[0088] Specifically, taking the weighted average method as an example, the data of the TMR array unit and the quantum sensor unit are fused, and the specific process is as follows: (1) Assume that the measurement value of the TMR array unit is , and its measurement variance is (reflecting the noise level); the measurement value of the quantum sensor unit is , and its measurement variance is .

[0089] The variances of both need to be obtained through sensor calibration or historical data statistics. The smaller the variance, the higher the sensor accuracy.

[0090] (2) Allocate weights according to the sensor accuracy (variance), and the weights are inversely proportional to the variances:

[0091]

[0092]

[0093] where, represents the weight of the TMR array unit, represents the weight of the quantum sensor unit.

[0094] (3) Weighted average calculation

[0095] where x represents the fusion result.

[0096] (4)Dynamic weight adjustment If the variance of the TMR array unit and the variance of the quantum sensor unit vary with the working conditions, the variance can be estimated in real time through a sliding window:

[0097] wherein, represents the mean value of the TMR data within the window, and M is the window length. A similar method is used to update .

[0098] In one or more embodiments, the central control unit is configured to coordinate and control the operations of each unit. It controls the sampling frequency, start, and stop of the TMR array unit and the quantum sensor unit; performs data interaction with the signal processing unit and the data fusion unit, and sets relevant parameters; further analyzes, stores, and communicates with external devices for the transmitted data, realizing the intelligent current monitoring and management functions.

[0099] In one or more embodiments, the power supply and management unit provides stable and appropriate power supplies for the TMR array unit, the quantum sensor unit, the signal processing unit, the data fusion unit, the central control unit, and the optical fiber transmission unit, etc. It needs to have efficient power conversion and distribution capabilities, adapt to the power requirements of different units, and may need to consider the power supply and management strategies under different working conditions (such as low-power standby mode and high-load measurement mode) to extend the service life of the entire sensing device and ensure its stable operation.

[0100] In one or more embodiments, the TMR array unit is connected to the TMR differential operational amplifier unit, and the circuit structure of the TMR differential operational amplifier unit is as Figure 4As shown in the figure, the unit includes U10 chip and U11 chip. The third port of U10 chip is grounded. One end of the fourth port of U10 chip is connected to one end of the first resistor S31-. The other end of the first resistor S31- is respectively connected to one end of capacitor C25, one end of capacitor C26 and the fourth port of U11 chip. The other end of C25 is connected to +2.5V. The other end of capacitor C26 is respectively connected to one end of capacitor C27, one end of the second resistor and the first port of U11 chip. The other end of capacitor C27 is connected to +2.5V. The other end of the second resistor is connected to the fifth port of U10 chip. The sixth port of U10 chip is respectively connected to +5V, one end of capacitor C23 and one end of capacitor C24. The other ends of capacitor C23 and capacitor C24 are both grounded. The second port of U11 chip is connected to one end of the third resistor R23 and one end of the fourth resistor R24. The third port of U11 chip is connected to the other end of the third resistor R23 and the other end of the fourth resistor R24. The fifth port of U11 chip is grounded. The sixth port of U11 chip is connected to +2.5V and one end of capacitor C28. The other end of capacitor C28 is grounded. The seventh port of U11 chip is the output signal of the TMR module and is connected to the ADC acquisition unit (signal processing unit). The eighth port of U11 chip is respectively connected to one end of capacitor C29, +12V and one end of capacitor C77. The other ends of capacitor C29 and capacitor C77 are grounded.

[0101] In this embodiment, U10 can adopt a TMR chip and U11 can adopt a differential operational amplifier chip.

[0102] In one or more embodiments, by constructing and setting up the database and the host computer, the present invention can completely store all the data generated during the measurement, analysis and processing of the high-precision hybrid magnetic array current sensing device, so that it can be queried and called at any time later. By operating in this way, it effectively solves the problems of accurate determination of data such as measurement range definition, measurement accuracy control, and stability evaluation related to the measurement of the TMR array unit in the device, and provides an accurate and reliable basis for the formulation of technical guidelines and performance control related to TMR measurement in the high-precision hybrid magnetic array current sensing device.

[0103] In the present invention, the TMR array unit senses the change in the magnetic field of the current and converts it into an electrical signal. The quantum sensor unit, through an optical fiber, cooperates with the diamond probe, laser source, and microwave source to generate a change in the quantum state signal. The signal processing unit receives the original signals from these two units, and after amplification, filtering, and linearization, processes them into standard signals. The data fusion unit fuses the processed TMR and quantum sensor signals according to a specific algorithm to obtain an accurate current measurement result. The central control unit sets the sampling parameters of the TMR array unit and the quantum sensor unit, controls their startup and shutdown, exchanges data with the signal conditioning and data fusion units, deeply analyzes, stores, and communicates with external devices the fused data to achieve intelligent monitoring and management. The power supply and management unit provides a stable and adaptable power supply according to the different operating conditions of each unit. In the transmission unit, the optical fiber transmission unit transmits the current data as optical signals to achieve electrical isolation. The microwave regulation unit ensures the microwave regulation function of the quantum sensor, enabling accurate and reliable data transmission to the control unit. The control unit can also communicate in the reverse direction to adjust and control each unit.

[0104] Embodiment 2 This embodiment provides a construction method for a hybrid magnetic array current sensor, including the following steps: Step 1: Select suitable TMR elements, considering their sensitivity, noise, and stability. Design the array structure and determine the elements. After selecting the elements, design the TMR array structure. Combining the magnetic field distribution characteristics of the measurement target and the space limitations of the system, use electromagnetic simulation software for simulation analysis to determine the precise positions and spacings of each element. The reasonable setting of the positions and spacings can optimize the magnetic field detection effect and reduce the mutual interference between elements. Finally, when laying the signal lead-out lines, select wires with low resistance and high insulation, and connect them according to reasonable wiring rules to ensure efficient and stable signal transmission to the signal processing unit.

[0105] Step 2: Package the diamond NV color center probe to reduce external interference. Equip it with a matching laser source and microwave source, and construct an optical signal collection and conversion system to connect to the signal processing unit. When packaging, first remove the impurities and contaminants on the surface of the probe. Then, use a packaging material with electromagnetic shielding and moisture-proof functions to seal the probe, minimizing the influence of external electromagnetic interference and humidity changes on the probe. The wavelength, power, and stability of the equipped laser source should be precisely matched with the excitation characteristics of the diamond NV color center. The frequency and power of the microwave source should also be accurately adjusted according to the magnetic resonance characteristics of the NV color center to ensure precise control of the NV color center. Construct an optical signal collection and conversion system, use a photodetector to convert the optical signal into an electrical signal, and connect the converted electrical signal to the signal processing unit to provide reliable data for subsequent processing.

[0106] Step 3: Select low-loss optical fibers according to the requirements of signal transmission distance, rate, and bandwidth. Design an adapter interface to ensure good physical connection and electrical matching between the interface, signal source, and optical fiber, and convert the signal into an optical signal for access to the optical fiber. Plan and protect the optical fiber path, fully consider various factors in the installation environment, install an electromagnetic shielding device to reduce electromagnetic interference. Accurately connect the optical fiber to the signal processing unit to complete the reliable transmission of the signal.

[0107] Step 4: Select an amplifier with low noise and high gain characteristics to amplify and filter the resistance change signal of the TMR array unit. According to the frequency range and interference characteristics of the signal, select the appropriate filter type to filter various noise and interference components in the amplified signal. For quantum sensing analog electrical signals, amplifiers and filters specifically designed for quantum signals should be used. After processing, use a high-precision analog-to-digital converter to convert the analog electrical signal into a digital signal and transmit the digital signal to the data fusion unit.

[0108] Step 5: The magnitude, direction, change frequency, and harmonic components of the current, etc., will all affect the accuracy of the measurement results. Develop a data fusion algorithm to establish a quantitative relationship between the current characteristics and data weights. Select a processing platform for data fusion and consider requirements such as data volume, processing speed, and computational complexity. To ensure the accuracy of data transmission and processing, a verification and error correction mechanism needs to be set up. Methods such as parity check and cyclic redundancy check (CRC) are used to verify the transmitted data, and errors in the data transmission process are detected and corrected in a timely manner.

[0109] Step 6: Comprehensively consider factors such as the performance requirements, power consumption, and cost of the system to select a processor with appropriate computing power and processing speed. When constructing the hardware platform, reasonably design the layout and wiring of the circuit board to ensure stable electrical connection and reliable signal transmission between each component. The software should have functions such as data acquisition, analysis and processing, status judgment, and instruction generation. By deeply analyzing the collected data and combining the preset current status judgment rules, accurately judge the status of the current, such as normal, overload, short circuit, etc., and generate corresponding control instructions according to the judgment results. According to different scenarios, select appropriate communication methods and interfaces, such as Ethernet, serial port, bus, etc., to achieve data sharing and collaborative control.

[0110] Step 7: Analyze the power supply requirements of each unit. Select a suitable power supply chip and topology, design a monitoring circuit to prevent abnormalities, and consider heat dissipation.

[0111] For the measured current phasor of a single frequency (such as 50 Hz or 60 Hz) and the magnetic field phasors of the corresponding frequency measured by all magnetic field sensing units, the following relationship is satisfied, that is

[0112] where is the magnetic field measured by the k th magnetic field sensing unit; N is the number of magnetic field sensing units contained in the circular array; is the measured current phasor; γ k is the proportionality coefficient between and

[0113] The magnetic array current sensor is installed on the current line to be measured. After calibrating the coefficient γ k and substituting the magnetic fields measured by all magnetic field sensing units into the above formula, the current to be measured can be calculated.

[0114] The hybrid magnetic array current sensor of the present invention is composed of TMR elements based on the tunneling magnetoresistance effect to form various arrays (circular, rectangular, linear, etc.), which are selected according to different current measurement scenarios. It is equipped with a calibration system of hardware containing magnetic field sensing units and magnetic field-current inversion model algorithm software to accurately locate the current conductor and calculate the correlation coefficient to ensure accurate measurement. The fiber optic output end is processed and connected with a diamond probe. The laser transmission system (laser source, adapter, optical fiber) provides energy for exciting the fluorescence of the NV color center. The microwave regulation system (microwave source, switch, amplifier, coil) regulates the spin state, and the circuit is integrated. The amplification and acquisition module includes a differential amplification and ADC acquisition module to process the TMR signal.

[0115] The signal processing unit includes an amplification and acquisition module and an ADC acquisition module.

[0116] The algorithm unit uses high-performance devices to fuse the data of the TMR array unit and the quantum sensor according to a specific algorithm. The wireless transmission unit uses technologies such as the Internet of Things and 4G to transmit data to the host computer. The database is used to store data. The graphical interface display unit intuitively displays information. The interactive control unit conducts two-way communication and interacts with the outside to assist in intelligent management and collaborative work.

[0117] To support the technical development and large-scale engineering application of electronic current sensors, and to solve the problem that the accuracy and stability of current sensors are easily affected by environmental factors, a research on current sensing methods based on a new current sensing principle has been carried out. The hybrid magnetic array current sensing technology uses multiple magnetic sensors to form an array, measures the magnetic fields at multiple measurement points in the space around the measured current, and then inversely calculates the current with high precision based on the magnetic field information. By leveraging the advantages of high sensitivity, wide bandwidth, and good linearity of current TMR array units, quantum sensors are used to calibrate, evaluate, and analyze variables of TMR magnetic sensors, and are used as a "reference" to participate in various algorithms to achieve the excellent characteristics of NV color center quantum sensors at low cost. The hybrid magnetic array current sensor can easily achieve wide-band and large-dynamic measurement of current, perfectly matching the new requirements for current measurement in new power systems.

[0118] Embodiment 3 This embodiment designs an insulation design method for a hybrid magnetic array current sensor, including the following steps: (a) Select materials with high insulation strength and low dielectric constant such as high-performance epoxy resin. In this embodiment, it is used for the 10 kV side. The epoxy resin is poured outside the shielding box to form an insulation structure for electrical isolation to withstand high electric field strength, block current conduction, and achieve electrical isolation.

[0119] (b) Adjust the internal structure of the hybrid magnetic array to increase the interval between the high-voltage and low-voltage parts, reduce the electric field strength, and reduce the risk of insulation breakdown. Design concave and convex textures on the insulation surface to extend the creepage distance, disperse the electric field energy, and ensure the stability of the insulation system.

[0120] Specifically, a concentric circle layout structure is established with the primary wire, TMR magnetic sensor chip, and quantum sensitive area as the core. The high-voltage area (10 kV) is concentrated within a range of 15 mm from the center of the PCB, and the low-voltage area is divided into a digital processing area, a communication interface area, and a power management area according to functional modules and is distributed outside the high-voltage area.

[0121] (c) Install an aluminum foil shielding layer between the high-voltage and low-voltage areas to limit the electric field range, reduce interference, and reliably ground the shielding layer to avoid charge accumulation from damaging the insulation.

[0122] Among them, the area close to the TMR chip and quantum region of the primary wire is the high-voltage area, and its periphery is the low-voltage area covered by a shielding box.

[0123] (d) When pouring the insulating material (such as epoxy resin), use vacuum pouring technology to remove air bubbles and ensure the material is dense. Fine process the surface of the insulating component to make it flat and smooth to reduce electric field distortion.

[0124] Specifically, there is a shielding box outside the TMR circuit board, and the outside of the shielding box is poured with epoxy resin, so that the whole device forms a product. (e) The hybrid magnetic array in the hybrid magnetic array current sensor constructed by the quantum sensor and the TMR sensor is equipped with a sealed housing and sealant to prevent moisture and dust from invading, maintain the stability of the insulation environment, and extend the life of the insulation material.

[0125] Among them, in the hybrid magnetic array current sensor of the present invention, the TMR array unit senses the change of the current magnetic field based on the tunneling magnetoresistance effect, and has a variety of array structures, and uses on-line calibration to locate the position of the current conductor; for the quantum sensor unit, the fiber optic output end is specially processed and connected to the diamond probe, introducing laser excitation of the NV color center, and microwave regulating the spin state; for the transmission unit, the fiber optic transmission unit is electrically isolated, and the microwave regulating unit is co-located to ensure data transmission. The signal processing unit amplifies, filters, and linearizes the collected signals to improve the stability of the signal quality. The data fusion unit fuses the signals of the two units according to a specific algorithm to obtain a more accurate current measurement result. The central control unit coordinates and controls the work of each unit, and performs data interaction, analysis, storage, and communication. The power supply and management unit supplies power to each unit, adapts to the power supply requirements, and considers different working conditions strategies.

[0126] The present invention can be installed in various devices or systems that require current monitoring and management. The hybrid magnetic array current sensor can comprehensively cover each node of the power distribution network, accurately monitor the current direction and magnitude, and timely discover potential power distribution unevenness or overload hidden dangers. With its high-sensitivity current monitoring characteristics, it can ensure the stability and reliability of the power supply of the base station under different service loads, and effectively improve the power supply service quality.

[0127] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A hybrid magnetic array current sensor, characterized in that, Including: A TMR array unit, a quantum current sensing unit, a data acquisition unit, a transmission unit, and a host computer. The host computer is connected to a data fusion unit through the transmission unit. The TMR array unit is used to convert the change in the magnetic field of the sensed current into an electrical signal to obtain first current data. The quantum current sensing unit is used to convert the change in the sensed quantum state signal into an electrical signal to obtain second current data. The data acquisition unit is used to collect the temperature of the TMR array and the output voltage at the corresponding temperature under a reference magnetic field. The data fusion unit is used to obtain a sensitivity drift coefficient based on the temperature of the TMR array and the output voltage at the corresponding temperature under the reference magnetic field. According to the sensitivity drift coefficient, compensate the first current data to obtain compensated first current data. Fuse the compensated first current data and the second current data to obtain fused current data. The host computer is used to receive the fused current data uploaded by the data fusion unit to obtain a current measurement result.

2. The hybrid magnetic array current sensor according to claim 1, characterized in that, The sensitivity drift coefficient is expressed by the following formula: Among them, represents the sensitivity drift coefficient, represents the output value of the TMR array under the reference magnetic field, B NV represents the reference magnetic field strength calibrated by the diamond color center, T 0 is the reference temperature, T is the temperature of the collected TMR array; The compensated first current data is obtained by the following formula: Among them, represents the first current data, represents the compensated first current data.

3. The hybrid magnetic array current sensor according to claim 1, wherein The MR array unit includes: a circular array, a rectangular array, a linear array, and other special arrays. Or, The MR array unit includes several magnetic field sensing units, and adopts an on-line calibration method. Based on the magnetic field results measured by all magnetic field sensing units, combined with the solution calculation of the magnetic field-current inversion model, the position of the measured current conductor is located, the correlation coefficients of each magnetic field sensing unit are calculated, and calibration is carried out according to the correlation coefficients of each magnetic field sensing unit.

4. The hybrid magnetic array current sensor according to claim 1, wherein The quantum current sensing unit includes an optical fiber, an optical fiber adapter, a diamond probe, a multi-axis displacement stage, a microwave coil, a microwave switch, and a microwave signal amplifier. The output end of the optical fiber is connected to the base of the diamond probe, and the multi-axis displacement stage is used to control the center of the end face of the output end of the optical fiber to be coaxial with the NV color center of the diamond probe. The laser emitted by the laser source is introduced into the optical fiber through the optical fiber adapter, and then the optical fiber transmits the laser to the diamond probe to excite the NV color center to generate a fluorescence signal. A microwave coil is wound around the diamond probe, and the microwave signal generated by the microwave source acts on the microwave coil through the microwave switch and the microwave signal amplifier to regulate the spin state of the diamond NV color center. The connection line between the microwave coil and the microwave source is laid in parallel with the optical fiber.

5. The hybrid magnetic array current sensor according to claim 1, wherein The transmission unit includes an optical fiber transmission unit, which is used to transmit current measurement data using optical signals to achieve electrical isolation between the measurement end and the receiving end. Or, The transmission unit further includes a microwave regulation unit, and the microwave transmission line of the microwave signal of the microwave regulation unit is arranged in coordination with the optical signal transmission line. The microwave signal is generated by a microwave source and transmitted to the microwave coil or resonator near the diamond NV color center through the microwave transmission line. Or, The host computer is also connected to a signal processing unit through the transmission unit, which is used to amplify, filter, and linearize the first current data and the second current data.

6. The hybrid magnetic array current sensor according to claim 1, characterized in that, The fusion of the compensated first current data and the second current data includes fusing the processed first current data and the second current data by using a weighted average method or a Kalman filtering algorithm.

7. The hybrid magnetic array current sensor according to claim 1, wherein The hybrid magnetic array current sensor further includes: a central control unit for controlling the sampling frequency, start, and stop of the TMR array unit and the quantum current sensing unit; Or, The central control unit for performing data interaction with the signal processing unit and the data fusion unit and setting relevant parameters; Or, The central control unit for analyzing, storing, and communicating with external devices the transmitted data.

8. The hybrid magnetic array current sensor according to claim 1, wherein The hybrid magnetic array current sensor further includes: a power supply and management unit for supplying power to the TMR array unit, the quantum sensor unit, the data acquisition unit, the signal processing unit, the data fusion unit, the central control unit, and the transmission unit; Or, The hybrid magnetic array current sensor further includes: a database for storing data.

9. A construction method of a hybrid magnetic array current sensor, characterized in that, For constructing the hybrid magnetic array current sensor according to any one of claims 1-8, including: Selecting TMR elements, combining the magnetic field distribution characteristics of the measurement target and the space limitations of the system, and using electromagnetic simulation software for simulation analysis to determine the precise positions and spacings of each element and designing the TMR array unit; Encapsulating a diamond NV color center probe, equipped with a matching laser source and microwave source, constructing an optical signal collection and conversion system to connect to the signal processing unit, and sealing the diamond NV color center probe, equipped with a laser source, and adjusting the frequency and power of the microwave source according to the magnetic resonance characteristics of the diamond NV color center; converting the optical signal into an electrical signal by using a photodetector and connecting the converted electrical signal to the signal processing unit; Selecting an optical fiber according to the requirements of signal transmission distance, rate, and bandwidth; designing a matching interface to ensure the physical connection and electrical matching between the interface, the signal source, and the optical fiber, and converting the electrical signal into an optical signal and accessing the optical fiber; Selecting an amplifier to amplify and filter the resistance change signal of the TMR array unit, selecting a filter and an analog-to-digital converter, amplifying the filtered data, and transmitting it to the data fusion unit through the analog-to-digital converter to fuse and obtain the current measurement result.

10. The construction method of the hybrid magnetic array current sensor according to claim 9, characterized in that, The hybrid magnetic array current sensor is encapsulated by using a sealed housing and sealant.

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