Probe detection method and device and storage medium

Abstract

The invention belongs to the field of semiconductor testing, and provides a probe detection method and device and a storage medium. Coordinate measurement elements are obtained through software, an initial coordinate system is established, a needle head sub-coordinate system and a needle point sub-coordinate system are further established, a first probe test program is generated, translation copying is carried out based on the step pitch between probes to obtain a multi-probe test program, the multi-probe test program is summarized to form an overall test program, and the overall test program is automatically operated. And combining data analysis to complete screening of probes which do not accord with standards. According to the method, the problems that traditional manual measurement is high in subjectivity, low in efficiency and prone to damaging the probe are solved, rapid and accurate automatic detection and probe screening are achieved, the production efficiency is remarkably improved, and the labor cost and risk are reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing, and particularly to a probe detection method, device, and storage medium. Background Art

[0002] Probe detection technology is widely used in the field of semiconductor testing to verify whether the probe size, shape, and performance meet the design specifications, thus ensuring the reliability of subsequent chip testing. Traditional probe detection mainly relies on operators to manually measure and screen single probes under a microscope or projector according to drawings or technical specifications. This method has the following deficiencies: (1) Manual measurement highly depends on the experience and proficiency of operators. Measurement results by different personnel or the same person at different times are prone to deviation, resulting in inconsistent probe parameters and making it difficult to ensure the consistency of detection accuracy; (2) The manual operation process is cumbersome, and each probe needs to be positioned and measured one by one, consuming a large amount of time and labor costs, seriously affecting production efficiency; (3) The manual measurement process is prone to scratching or deforming the probe due to improper micro-operations, increasing the risk of damage, affecting the service life of the probe, and increasing the scrap rate; (4) In the scenario of multi-probe array or batch detection, the manual solution is difficult to efficiently and stably complete the acquisition and analysis of a large amount of data, and cannot meet the requirements of high-throughput and high-precision detection in the modern semiconductor industry.

[0003] Although some existing automated detection solutions attempt to use vision systems or coordinate measuring devices (such as InSpec, etc.), they often require manual repeated writing or debugging of test programs, and individual calibration and parameter input for each probe or each group of probes. Especially when dealing with multiple probes arranged in the same pitch on a customized fixture, it is necessary to manually establish a coordinate system for each one and generate the corresponding detection process, and the efficiency is still insufficient.

[0004] In view of the above deficiencies of the existing technology, it is necessary to develop a probe testing method that can greatly improve the detection efficiency, reduce the risk of manual intervention and probe damage, and meet the requirements of high-precision and high-throughput probe detection in semiconductor manufacturing and testing. Summary of the Invention

[0005] This application provides a probe detection method, device, and storage medium to solve the problems of strong subjectivity, low efficiency, and easy damage to probes in manual measurement of probes in the existing technology.

[0006] In a first aspect, this application provides a probe detection method. A plurality of grids are provided on a customized fixture, and the probes are evenly placed in each grid. The probe includes a needle tip and a needle point. The method includes the following steps: According to the coordinate measurement elements on the software and the specifications of the customized fixture, establish an initial coordinate system and determine the position coordinates of the first probe on the customized fixture; Establish a needle sub - coordinate system and a tip sub - coordinate system respectively according to the needle position and the tip position of the first probe; Generate a test program for the first probe according to the needle sub - coordinate system and the tip sub - coordinate system; Determine the translation amounts between the first probe and other probes according to the step distances between the first probe and other probes, and perform translational replication on the test program of the first probe based on the translation amounts to obtain the test programs of each other probe; Generate an overall test program for all probes according to the test programs of each probe; Run the test according to the overall test program and screen out the probes that do not meet the standards.

[0007] Optionally, the coordinate measurement elements include a starting point and an axis correction element. Establishing an initial coordinate system according to the coordinate measurement elements on the software and the customized fixture specifications, and determining the position coordinates of the first probe on the customized fixture includes: Select any one of the four vertices of the customized fixture as the first starting point, and the vertex corresponding to it horizontally or vertically as the second starting point; Determine the initial direction axis according to the first starting point and the second starting point; Perform axis correction based on the initial direction axis to establish an initial coordinate system; Determine the position coordinates of the first probe according to the position of the first probe in the initial coordinate system.

[0008] Optionally, the needle includes a needle end point and a needle starting end point, and the tip includes a tip end point and a tip starting end point. Establishing a needle sub - coordinate system and a tip sub - coordinate system respectively according to the needle position and the tip position of the first probe includes: Determine the needle end point position and the tip end point position of the first probe according to the position coordinates of the first probe; Establish a needle sub - coordinate system with the needle end point position as the origin; Establish a tip sub - coordinate system with the tip end point position as the origin.

[0009] Optionally, generating the test program for the first probe according to the needle sub - coordinate system and the tip sub - coordinate system includes: Obtain probe coordinate information according to the needle sub - coordinate system and the tip sub - coordinate system; Calculate probe parameter information according to the probe coordinate information; Generate the test program for the first probe according to the probe parameter information and the needle sub - coordinate system and the tip sub - coordinate system.

[0010] Optionally, the probe coordinate information includes the coordinates of the tip end point, the coordinates of the tip starting point, the coordinates of the needle end point, and the coordinates of the needle starting point. Obtaining the probe coordinate information according to the needle sub-coordinate system and the tip sub-coordinate system includes: Determining the coordinates of the tip end point and the coordinates of the tip starting point according to the positions of the tip end point and the tip starting point in the tip sub-coordinate system; Determining the coordinates of the needle end point and the coordinates of the needle starting point according to the positions of the needle end point and the needle starting point in the needle sub-coordinate system.

[0011] Optionally, the probe parameter information includes the tip length, the middle length of the needle, the total length of the needle, the length of the needle head, the angle of the needle head, and the offset. Calculating the probe parameter information according to the probe coordinate information includes: Calculating the tip length according to the coordinates of the tip end point and the coordinates of the tip starting point; Calculating the middle length of the needle according to the coordinates of the tip starting point and the coordinates of the needle end point; Calculating the total length of the needle according to the coordinates of the tip end point and the coordinates of the needle starting point; Calculating the length and the angle of the needle head according to the coordinates of the needle starting point and the coordinates of the needle end point; Calculating the offset according to the coordinates of the needle end point and the coordinates of the tip end point.

[0012] Optionally, screening out the probes that do not meet the standards according to the operation of the overall test procedure includes: Running the test according to the overall test procedure, outputting the standard values and tolerances of each probe, and marking each probe label; Comparing the standard values and tolerances corresponding to each probe label with the preset values. If the difference between the standard value or the tolerance and the preset value exceeds the preset threshold, it is determined that the probe does not meet the standards.

[0013] In a second aspect, the present application provides a probe detection device, including a hardware module and a software module; The hardware module is a customized fixture. Multiple grids are provided on the customized fixture, and each probe is evenly distributed in the grids at equal step distances. The probe includes a needle head and a tip; The software module includes: An initial coordinate system establishment module, configured to establish an initial coordinate system according to the coordinate measurement elements on the software and the specifications of the customized fixture, and determine the position coordinates of the first probe on the customized fixture; A sub - coordinate system establishment module, configured to establish a needle tip sub - coordinate system and a needle point sub - coordinate system respectively according to the needle tip position and the needle point position of the first probe; A first program generation module, configured to generate a test program for the first probe according to the needle tip sub - coordinate system and the needle point sub - coordinate system; A translation and replication module, configured to determine the translation amount between the first probe and each other probe according to the step distance between the first probe and other probes, and perform translation and replication on the test program of the first probe based on the translation amount to obtain the test programs of each other probe; An integration module, configured to generate an overall test program for all probes according to the test programs of each probe; A screening module, configured to run tests according to the overall test program and screen out probes that do not meet the standards.

[0014] In a third aspect, an embodiment of the present application provides a terminal device, including: a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, the above - described method is implemented.

[0015] In a fourth aspect, an embodiment of the present application provides a computer - readable storage medium. The computer - readable storage medium stores a computer program, and when the computer program is executed by a processor, the above - described method is implemented.

[0016] The above - described technical solutions provided by the embodiments of the present application have the following advantages compared with the prior art: By obtaining coordinate measurement elements through software and establishing an initial coordinate system, and then establishing sub - coordinate systems based on the needle tip end point and the needle point end point, key feature points are accurately positioned, eliminating unstable factors of manual positioning; Automatic generation of test programs ensures the consistency of measurement paths and parameters, thereby significantly improving measurement accuracy and avoiding the influence of human errors on the results; After generating a test program for the first probe, translation and replication are performed using the step - distance information between the probes to batch - generate test programs for other probes, avoiding the cumbersome process of separately writing or debugging programs for each probe; The overall test program runs all probe measurements at one time, and combines table tools to automatically process and analyze the results, completing multi - probe detection and screening at one time, saving a large amount of time compared with manual measurement of each probe one by one, improving the detection throughput, and meeting the requirements of mass production; Automated measurement reduces manual operation links and avoids mechanical damage to the probes during manual positioning and operation. Description of the Drawings The drawings here are incorporated into the specification and form a part of this specification, showing embodiments consistent with the present invention and used together with the specification to explain the principles of the present invention.

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] One or more embodiments are exemplarily illustrated by the pictures in the corresponding accompanying drawings. These exemplary illustrations do not limit the embodiments. Elements with the same reference numerals in the drawings represent similar elements. Unless otherwise stated, the drawings in the figures do not constitute a proportional limitation.

[0019] Figure 1 It is a schematic structural diagram of a customized fixture provided by an embodiment of the present application; Figure 2 It is a schematic flow diagram of a probe detection method provided by an embodiment of the present application; Figure 3 It is a schematic structural diagram of a probe sub-coordinate system provided by an embodiment of the present application; Figure 4 It is a schematic structural diagram of a probe provided by an embodiment of the present application; Figure 5 It is a schematic structural diagram of a probe detection device provided by an embodiment of the present application; Figure 6 It is a schematic structural diagram of a computer-readable storage medium provided by an embodiment of the present application. Specific embodiments

[0020] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts belong to the scope of protection of the present application.

[0021] The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention. In addition, the present invention may repeat reference numerals and / or letters in different examples. This repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed.

[0022] A probe detection method provided by an embodiment of the present application is applied to detect the probes placed on a customized fixture, as Figure 1 shownFigure 1 This is a schematic structural diagram of a customized fixture provided by an embodiment of the present application. A customized fixture is a test fixture / platform / base that mounts probes on a fixed structure and is a customized device used to precisely contact products such as circuit boards, connectors, chips, and modules during the testing phase and transmit signals, current, or voltage.

[0023] Among them, there are multiple grids on the customized fixture. The number and size of the grids can adaptively change according to the size of the customized fixture specifications. The probes are placed in each grid, and the pitch between the probes is equal. Among them, the probe includes three structural parts, namely the needle tip, the needle point, and the middle long part between the needle tip and the needle point.

[0024] It should be noted that in the present application, only the test program of the first probe can be written. That is, the test program of the first probe is the sample test program. After generating the test program for the first probe, using the pitch information between the other probes and the first probe, the test program (sample test program) of the first probe is translated and copied to batch generate the test programs of the other probes, avoiding the cumbersome process of individually writing or debugging programs for each probe.

[0025] In the present application, by detecting the data parameters of each part of the probe, the probes that do not meet the standards are automatically screened out, which is beneficial to improving the measurement accuracy, avoiding the influence of human errors on the results, and is applicable to the mass production requirements. A large number of probes are detected simultaneously to improve the detection efficiency.

[0026] Figure 2 This is a schematic flow diagram of a probe detection method provided by an embodiment of the present application. The method includes the following steps: S100, based on the coordinate measurement elements on the software and the customized fixture specifications, establish an initial coordinate system and determine the position coordinates of the first probe on the customized fixture.

[0027] In the embodiment of the present application, the detection probe establishes the coordinate system of the customized fixture through the coordinate measurement elements in the preset library in the software to determine the positions of each probe on the customized fixture. That is, through the coordinate measurement elements in the preset library in the software, click or drag the icon of the coordinate measurement element to draw the corresponding coordinate system.

[0028] Specifically, the coordinate measurement elements include a starting point and an axis correction element. The step of establishing an initial coordinate system based on the coordinate measurement elements on the software and the customized fixture specifications and determining the position coordinates of the first probe on the customized fixture includes: S101, select any one of the four vertices of the customized fixture as the first starting point, and the vertex corresponding to this point horizontally or vertically as the second starting point; S102. Determine an initial direction axis based on the first starting point and the second starting point. S103. Perform coordinate axis correction based on the initial direction axis to establish an initial coordinate system. S104. Determine the position coordinates of the first probe according to the position of the first probe in the initial coordinate system.

[0029] As Figure 1 shown, Figure 1 the planar rectangle in represents a customized fixture. Multiple grids of the same size are provided on the customized fixture, and probes are respectively placed in the grids, and the step distances between the probes are equal. In the embodiment of the present application, since the customized fixture is a regular quadrilateral, mostly rectangular, taking any one of the vertices of the four corners of the customized fixture as the first starting point, that is, the coordinate origin O. If the vertex corresponding horizontally to this point is used as the second starting point, the initial direction axis determined between the first starting point and the second starting point is the X axis. If the vertex corresponding vertically to this point is used as the second starting point, the initial direction axis determined between the first starting point and the second starting point is the Y axis. According to the determined X axis or Y axis, perform coordinate axis correction according to the coordinate axis correction elements to establish an initial coordinate system. After establishing the initial coordinate system, determine the position coordinates of the first probe through the position of the grid where the first probe is located in the initial coordinate system ( ).

[0030] It should be noted that the range of the coordinates can be flexibly adjusted according to the actual situation and is not specifically limited here. Therefore, under different customized fixtures or different specifications of probes, the coordinate ranges of their initial coordinate systems may be different, and the actual application shall prevail.

[0031] S200. Respectively establish a needle tip sub-coordinate system and a needle point sub-coordinate system according to the needle tip position and the needle point position of the first probe.

[0032] In the embodiment of the present application, after establishing the initial coordinate system, the position of the first probe can be determined. The first probe can be the probe corresponding to the grid at any one of the four vertices of the customized fixture. Generally, the probe corresponding to the grid at the origin of the established initial coordinate system is used as the first probe. From this step S200 to step S300 are all processes of generating the test program of the first probe, that is, the process of generating the sample test program. For other probes, as long as the step distance from the first probe is measured and the sample test program is translated and copied, the test programs of other probes can be obtained, without manually writing the test programs for each probe, which improves the test efficiency and eliminates the unstable factors of manual positioning.

[0033] When writing the test program for the first probe, the computer terminal display will magnify the probes in the grid, making it impossible to display all parts of the entire probe, including the needle tip, the needle point, and the middle section length. Therefore, in the embodiments of the present application, it is necessary to establish sub-coordinate systems for the needle tip and the needle point of the probe respectively, so as to measure the data parameters of each part of the probe.

[0034] Specifically, the needle tip includes a needle tip end point and a needle tip starting end point, and the needle point includes a needle point end point and a needle point starting end point. Establishing the needle tip sub-coordinate system and the needle point sub-coordinate system respectively according to the positions of the needle tip and the needle point of the first probe includes: S201, determining the positions of the needle tip end point and the needle point end point of the first probe according to the position coordinates of the first probe; S202, establishing a needle tip sub-coordinate system with the position of the needle tip end point as the origin; S203, establishing a needle point sub-coordinate system with the position of the needle point end point as the origin.

[0035] In the embodiments of the present application, according to the position coordinates of the first probe obtained in S100, the needle tip end point and the needle point end point of the first probe can be determined. As Figure 3 shown, Figure 3 is a schematic structural diagram of a probe sub-coordinate system provided by an embodiment of the present application. The probe includes a needle tip and a needle point. The needle tip includes a needle tip starting end point A and a needle tip end point A', and the needle point includes a needle point starting end point B and a needle point end point B'. A needle tip sub-coordinate system is established with the needle tip end point A' as the origin, and a needle point sub-coordinate system is established with the needle point end point B' as the origin. The process of establishing the sub-coordinate system can refer to the process of establishing the initial coordinate system. By using the coordinate measurement elements in the software, first determine the first starting point and the second starting point, and perform coordinate axis correction according to the coordinate axes formed by the first starting point and the second starting point.

[0036] S300, generating a test program for the first probe according to the needle tip sub-coordinate system and the needle point sub-coordinate system.

[0037] In the embodiments of the present application, after establishing the needle tip sub-coordinate system and the needle point sub-coordinate system, it is to determine the length parameters, angles, and offsets of each part of the probe. These information need to be calculated through the coordinates in the probe. Specifically, generating a test program for the first probe according to the needle tip sub-coordinate system and the needle point sub-coordinate system includes: S301, obtaining probe coordinate information according to the needle tip sub-coordinate system and the needle point sub-coordinate system.

[0038] Specifically, the probe coordinate information includes the coordinates of the tip end point, the coordinates of the tip starting end point, the coordinates of the needle end point, and the coordinates of the needle starting end point. Obtaining the probe coordinate information according to the needle sub-coordinate system and the tip sub-coordinate system includes: S3011. Determine the coordinates of the tip end point and the coordinates of the tip starting end point according to the positions of the tip end point and the tip starting end point in the tip sub-coordinate system; S3012. Determine the coordinates of the needle end point and the coordinates of the needle starting end point according to the positions of the needle end point and the needle starting end point in the needle sub-coordinate system.

[0039] In the embodiment of the present application, as Figure 3 shown, the probe coordinate information includes the coordinates of the tip end point B' of the probe, the coordinates of the tip starting end point B of the probe, the coordinates of the needle end point A' of the probe, and the coordinates of the needle starting end point A of the probe. Then the corresponding coordinate information is respectively the coordinates of the tip end point , the coordinates of the tip starting end point , the coordinates of the needle end point and the coordinates of the needle starting end point .

[0040] S302. Calculate the probe parameter information according to the probe coordinate information.

[0041] As Figure 4 shown, Figure 4 is a schematic structural diagram of a probe provided by an embodiment of the present application. The probe parameter information includes the tip length, the middle section length of the needle, the total length of the needle, the needle length, the needle angle, and the offset. Calculating the probe parameter information according to the probe coordinate information includes: S3021. Calculate the tip length according to the coordinates of the tip end point and the coordinates of the tip starting end point; S3022. Calculate the middle section length of the needle according to the coordinates of the tip starting end point and the coordinates of the needle end point; S3023. Calculate the total length of the needle according to the coordinates of the tip end point and the coordinates of the needle starting end point; S3024. Calculate the needle length and the needle angle according to the coordinates of the needle starting end point and the coordinates of the needle end point; S3025. Calculate the offset according to the coordinates of the needle end point and the coordinates of the tip end point.

[0042] In the embodiments of the present application, the following probe parameters are defined. The tip length L_tip: It is defined as the distance from the starting point of the tip to the end point of the tip in the tip sub - coordinate system. The middle length of the needle L_mid: It is defined as the distance between the starting point of the tip and the end point of the needle head. The total length of the needle L_total: It is usually equal to the distance from the starting point of the tip to the starting point of the needle head or the combination of the above - mentioned segments. The head length L_head: The length between the starting point of the head and the end point of the head. The head angle : The inclination or included angle of the head relative to the axis of the middle part of the needle; The offset Offset: The relative offset between the end point of the tip and the end point of the head in the sub - coordinate system, which is used to measure path correction.

[0043] To convert the coordinates of the sub - coordinate system to the global coordinate system of the device (under the initial coordinate system), in order to make the measurement instructions executable by the InSpec device, it is necessary to convert the local coordinates of each key point in the sub - coordinate system to the initial coordinate system. The software module knows the transformation matrix or transformation parameters of the head sub - coordinate system and the tip sub - coordinate system in the initial coordinate system. For the coordinates of the end point of the tip of each measurement key point , the coordinates of the starting end point of the tip , the coordinates of the end point of the head and the coordinates of the starting end point of the head , in a possible implementation, through matrix transformation or coordinate transformation function, calculate the coordinates of the end point of the tip and the starting end point of the tip in the initial coordinate system, as well as the coordinates of the end point of the head and the starting end point of the head in the initial coordinate system. According to the coordinates of the end point of the tip, the starting end point of the tip, the end point of the head and the starting end point of the head converted to the initial coordinate system, calculate the tip length, the middle length of the needle, the total length of the needle, the head length, the head angle and the offset.

[0044] For example, for the measurement of the tip length, the movement from the coordinates of the starting end point of the tip in the tip sub - coordinate system to the end point of the tip can be made, and the displacement amount can be recorded through the contact detection instruction of InSpec. For the verification of the head length and angle, the reference position in the head sub - coordinate system can be located first, and then moved along a specific trajectory, and the position when the detection is triggered can be recorded, so as to calculate the length and angle. For simultaneous multi - point measurement or scanning measurement, if it is necessary to scan the side or curved surface shape of the head, contact or non - contact measurement actions can be sequentially performed according to a pre - calculated sequence of multiple measurement points in the global coordinate system, multiple data points can be collected, and multiple probe parameter information can be measured simultaneously.

[0045] In a possible implementation manner, the present application also sets a safe or pre-positioned motion trajectory. Before moving to the measurement point, it should first move to a safe height or a safe position to avoid hitting the tooling or other probes. It approaches the measurement end point from the measurement starting point along the predefined direction, or performs probe geometric dimension or feature measurement according to the measurement methods required by the InSpec device, such as Z-direction pressure drop detection, force feedback detection, etc.

[0046] Appropriate speeds, accelerations, and detection trigger conditions are set for each motion action to balance measurement accuracy and efficiency. For example, a low speed is used when approaching the measurement point to ensure accuracy, and a higher speed is used during rapid positioning to save time. And path sequence optimization is performed. According to the probe parameters and tooling layout, the execution order of the measurement points can be optimized to reduce the moving distance and improve the overall operation speed. The software can dynamically generate the optimal or sub-optimal measurement path sequence according to the probe shape and device interface capabilities.

[0047] S303. Generate a test program for the first probe according to the probe parameter information, the needle head sub-coordinate system, and the needle tip sub-coordinate system.

[0048] In the embodiment of the present application, a test program for the first probe is generated according to the probe parameter information calculated in S302 and the sub-coordinate systems of the needle head and the needle tip established in S301. In this embodiment, it is assumed that the probe parameter information of the first probe has been obtained in the previous steps, including the needle tip length, the middle section length of the needle, the total length of the needle, the needle head length, the needle head angle, and the offset; and the sub-coordinate systems of the needle head and the needle tip have been established respectively, and their origins correspond to the needle head end point and the needle tip end point of the probe on the customized fixture. The following describes how the software module uses this information to generate a test program that can be executed by the InSpec device or a similar coordinate measuring instrument.

[0049] First, read and verify the parameter information. The software module reads the probe parameter information of the first probe from a data structure (such as a database or a memory object), including the needle tip length, the middle section length of the needle, the total length of the needle, the needle head length, the needle head angle, and the offset Offset. Reasonableness checks are performed on the read parameters. For example, ensure that L_tip, L_mid, L_head, etc. are all positive values, and the angle is within the allowable range, and the offset conforms to the design tolerance, etc. If an abnormality is detected, a warning can be triggered or manual confirmation is required, but in this embodiment, it is assumed that the parameters are all valid.

[0050] The software module can adopt the script template method. In the pre-prepared test program template, key positions and parameters are defined in the form of placeholders. The software module will fill in the calculated coordinate values, speed, acceleration, and trigger conditions into the template through text replacement or template rendering to generate the complete script content. The final output is a program file recognizable by the device (such as an ".isp" script, a G-code segment, or a manufacturer-specific command sequence), which is saved in the specified path or directly sent to the InSpec device through the interface.

[0051] S400, determine the translation amount between the first probe and each other probe according to the pitch between the first probe and other probes, and perform translational replication on the test program of the first probe based on the translation amount to obtain the test programs of each other probe.

[0052] In the embodiment of the present application, after the generation of the test program for the first probe is completed, the software module continues to execute the following steps to batch generate the test programs for other probes.

[0053] First, read the pitch information of the probe array from the customized fixture specifications or the grid parameters input by the user. The pitch includes the horizontal pitch Px and the vertical pitch Py, which respectively represent the spacing between the centers of adjacent two probes in the X and Y axis directions. For example, if the fixture is arranged in a rectangular matrix, then Px = 5 mm and Py = 4 mm.

[0054] Subsequently, calculate the translational offset amounts ΔXk and ΔYk of the k-th probe (k starts counting from 1) in the i-th row and j-th column of the array relative to the "first probe" (usually regarded as the probe where the coordinate system origin is located) according to the following formula: ΔXk = (column index j - 1) × Px ΔYk = (row index i - 1) × Py Among them, the row index and column index are determined by the position index of the probe in the fixture grid. If the probe array is M rows and N columns, other probes can be enumerated in row-major or column-major order. Then, the software module performs translational replication on all instructions involving coordinates in the test program of the first probe: add the ΔXk of the corresponding probe to the X coordinate of each instruction in the original test program, add the ΔYk of the corresponding probe to the Y coordinate, and keep the Z coordinate unchanged or make corresponding adjustments according to the height offsets of different probes.

[0055] The software automatically loops the above copying process according to the array size, writes the translated instruction sequence into the test program files corresponding to each probe, which is convenient for the device to call. Necessary identifiers (such as probe numbers, test serial numbers, etc.) are embedded in the test program to ensure that the result data can correspond to specific probes one by one, which is convenient for subsequent screening of qualified products and traceability. Through this translation and copying mechanism, only the test logic of the first probe needs to be maintained and verified, and the test programs for the entire set of probes can be quickly generated, significantly simplifying the programming workload and ensuring the consistency of the measurement paths and parameters of all probes.

[0056] S500, generate the overall test program for all probes according to the test programs of each probe.

[0057] In the embodiment of the present application, the overall test program for all probes is synthesized by generating the test program of the first probe and the test programs corresponding to other probes. When generating the test program, the software can pre-insert data recording instructions, for example, automatically output the results in a predefined format to a log or database after each measurement is completed, which is convenient for subsequent reading by Excel or other analysis tools. At the same time, error handling or exception detection instructions are added to the program, such as recording an exception and skipping subsequent steps if no contact is detected during the measurement process, or triggering an alarm process when the measured value exceeds the design range. For possible device communication exceptions or measurement failures, retry or alternative paths can be inserted into the script to improve the test stability.

[0058] After the software generates the test program, it can first run in the simulation environment or the simulation function provided by the device to verify whether the motion trajectory is reasonable, whether the measurement actions can be correctly triggered, whether there is a risk of collision, etc. After passing the simulation, it is then sent to the actual InSpec device for execution. During the simulation stage, the simulation log can be automatically compared with the expected measurement path, and if a deviation is found, it is fed back to the parameter or template adjustment module for iterative optimization.

[0059] In addition to the test program itself, the software can also generate a feedback report corresponding to the results, such as an Excel macro or a CSV format description, for automatically importing, parsing the data output by the InSpec device later and comparing it with the preset standard values or tolerances. After the test program is generated, the software module can provide an interface or command-line prompt to display the generated file path and summary information (such as the coordinates of key measurement points, the expected measurement action sequence, etc.) for the user to confirm.

[0060] S600, run the test according to the overall test program and screen out the probes that do not meet the standards.

[0061] In the embodiment of the present application, the results of running the overall test program are imported into an EXCEL table for data analysis and statistics, and the probes that do not meet the standards are screened out. Specifically, it includes: S601 Run the test according to the overall test program, output the standard values and tolerances of each probe, and mark each probe label; S602 Compare the standard values and tolerances corresponding to each probe label with the preset values. If the difference between the standard value or the tolerance and the preset value exceeds the preset threshold, it is determined as not meeting the standard.

[0062] S603 After completing the translation copy and batch distribution of each probe test program, the software module performs the following steps to automatically run the overall test, obtain the results, and screen out the probes that do not meet the standard.

[0063] First, call the InSpec device interface to load and start the overall test program at one time. The device sequentially performs contact measurement or scanning measurement actions on each probe, synchronously outputs the measurement result values and measurement tolerances corresponding to each probe according to the probe label, and saves them as a log file. Subsequently, start the Excel automation processing module on the software side and import the above log file into a predefined Excel template. The template contains column fields: probe label, measurement result, measurement tolerance, preset standard value, preset tolerance, calculated deviation, pass / fail determination, etc.

[0064] Specifically: Fill in the measurement result and measurement tolerance into the corresponding cells respectively; read the preset standard value and preset tolerance from the configuration table; calculate the absolute difference between the measurement result and the preset standard value, and the absolute difference between the measurement tolerance and the preset tolerance with formulas; automatically generate a pass / fail flag according to the preset threshold: if any difference exceeds the threshold, mark "fail" in the pass / fail determination column, otherwise mark "pass"; the software collects all the probe labels with "fail" determination in the Excel table into a defective product list, and generates a corresponding report file and statistical chart to facilitate the production line personnel to quickly locate and eliminate the unqualified probes. Its image is consistent with the customized fixture and the grid on the customized fixture. Each grid represents the probe placed in its grid. When the probe is unqualified, the grid is marked in dark color to distinguish it from the qualified probes. The operator can directly determine the position of the unqualified probes on the customized fixture according to the image table drawn on the Excel.

[0065] Finally, the system can automatically feedback the information of defective probes to the upper-level system according to the screening results, and trigger the subsequent retest or scrapping process to complete the closed-loop management. The whole process from test operation to result screening requires no manual intervention, which not only ensures the detection speed but also ensures the judgment consistency and traceability.

[0066] The beneficial effects of this application compared with the prior art include: (1) improving detection accuracy and reducing human error: By using software to obtain coordinate measurement elements and establish an initial coordinate system, and then establishing a sub-coordinate system with the needle tip end point and the needle point tip end point, the key feature points can be accurately located; automatically generating a test program to ensure that the measurement path and parameters are the same each time, avoiding visual positioning and manual operation errors by humans, thus significantly improving the measurement accuracy.

[0067] (2) significantly shortening the detection time and increasing the detection throughput: After generating the test program for the first probe, use the step distance information between probes for translation and replication, without having to rewrite the program for each probe; the overall test program runs multiple probes for detection at one time; combined with table tools such as Excel to automatically process the results, realizing batch and high-throughput detection, saving a large amount of time compared with manual measurement of each probe one by one and improving the efficiency.

[0068] (3) reducing the risk of probe damage and increasing the yield rate: The automated measurement process reduces manual intervention and avoids probe scratches or deformations caused by improper manual operations; adopting a precise coordinate system and a preset measurement path makes the movement of the probe needle controllable and has good repeatability, reducing accidental collisions; the automatic screening mechanism only retains the probes that meet the standards, reducing defective products caused by damage or measurement deviation, improving the yield rate and reducing the scrap cost.

[0069] (4) enhancing adaptability and maintainability: Parametrize the coordinate measurement elements and the specifications of customized fixtures, which can quickly adapt to probe arrays of different specifications and arrangements; the establishment of the sub-coordinate system and the translation and replication mechanism are universal, and only the measurement elements need to be adjusted to regenerate the test program, simplifying the upgrade and maintenance; the software-based process is easy to integrate version management, supporting rapid iteration and optimization.

[0070] (5) realizing result traceability and data-driven decision-making: Generate labels during the detection process of each probe and record the measurement values and tolerance comparison results, and automatically summarize and visually analyze them through Excel or similar tables, which is convenient for quality traceability, statistical analysis and process improvement; timely adjust the needle-making or test parameters through data feedback to form a closed-loop optimization, improving the overall production quality and stability.

[0071] (6) reducing the dependence on the skills of operators and improving the automation level: The automatic generation of test programs and the automatic screening process greatly reduce the requirements for the professional skills of personnel during the detection process, and only equipment installation and software configuration are required; reducing training costs and human operation differences is conducive to rapid promotion and application among different production lines or teams, improving the overall automation level and consistency.

[0072] (7) Save labor and risk costs and improve economic benefits: Automated measurement replaces large-scale manual measurement, reducing labor input; reduces the risk of probe damage or personnel injury caused by improper operation, and reduces potential compensation and quality accident costs; compared with traditional manual detection solutions, the comprehensive economic benefits are significant.

[0073] A probe detection device provided by an embodiment of the present application includes a hardware module and a software module; The hardware module is a customized fixture, and a plurality of grids are provided on the customized fixture. Each probe is evenly distributed in the grid at an equal pitch (as Figure 1 shown), and the probe includes a needle head and a needle tip. (As Figure 3 shown) As Figure 5 shown, Figure 5 is a schematic structural diagram of a probe detection device provided by an embodiment of the present application. The software module includes: An initial coordinate system establishment module 710, configured to establish an initial coordinate system according to the coordinate measurement elements on the software and the specifications of the customized fixture, and determine the position coordinates of the first probe on the customized fixture; A sub-coordinate system establishment module 720, configured to establish a needle head sub-coordinate system and a needle tip sub-coordinate system respectively according to the needle head position and the needle tip position of the first probe; A first program generation module 730, configured to generate a test program for the first probe according to the needle head sub-coordinate system and the needle tip sub-coordinate system; A translation and replication module 740, configured to determine the translation amount between the first probe and each other probe according to the pitch between the first probe and other probes, and perform translation and replication on the test program of the first probe based on the translation amount to obtain the test programs of each other probe; An integration module 750, configured to generate an overall test program for all probes according to the test programs of each probe; A screening module 760, configured to run tests according to the overall test program and screen out probes that do not meet the standards.

[0074] As Figure 6 shown, Figure 6 is a schematic structural diagram of a computer-readable storage medium provided by an embodiment of the present application. The computer-readable storage medium 800 of this embodiment includes: a server 810 ( Figure 6 only one is shown), a client 820, and a data recovery program 821 stored in the client 820 and operable on the at least one client 820. The client 820 executes the data recovery program 821 to send a request to the server 810, and the server 810 feeds back the result to implement the steps in the above method embodiment.

[0075] Those skilled in the art can clearly understand that, for the convenience and brevity of description, only the above division of each functional unit and module is used as an example. In actual applications, the above functions can be allocated to different functional units and modules as needed, that is, the internal structure of the device is divided into different functional units or modules to complete all or part of the functions described above. Each functional unit and module in the embodiments can be integrated into a processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above integrated unit can be implemented in the form of hardware or in the form of a software functional unit. In addition, the specific names of each functional unit and module are only for the convenience of mutual distinction and do not limit the protection scope of this application. The specific working processes of the units and modules in the above system can refer to the corresponding processes in the foregoing method embodiments and will not be elaborated herein.

[0076] In the above embodiments, the descriptions of each embodiment have their own emphases. For the parts not detailed or recorded in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0077] Those of ordinary skill in the art can realize that the units and algorithm steps of each example described in combination with the embodiments disclosed in this application can be implemented by electronic hardware, or by a combination of computer software and electronic hardware. Whether these functions are executed in the form of hardware or software depends on the specific application and design constraints of the technical solution. Professional technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered to exceed the scope of this application.

[0078] In the embodiments provided in this application, it should be understood that the disclosed device / terminal device and method can be implemented in other ways. For example, the device / terminal device embodiments described above are only illustrative. For example, the division of the module or unit is only a logical function division. In actual implementation, there can be other division methods. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed coupling or direct coupling or communication connection to each other can be through some interfaces. The indirect coupling or communication connection of the device or unit can be in an electrical, mechanical or other form.

[0079] In addition, each functional unit in the various embodiments of this application can be integrated into a processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above integrated unit can be implemented in the form of hardware or in the form of a software functional unit.

[0080] If the integrated module / unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, to implement all or part of the processes in the above-described embodiment methods of this application, it can also be completed by a computer program instructing relevant hardware. The computer program can be stored in a computer-readable storage medium. When the computer program is executed by a processor, the steps of the above-described various method embodiments can be implemented. Among them, the computer program includes computer program code, and the computer program code can be in the form of source code, object code, executable file, or some intermediate form, etc. The computer-readable medium can include: any entity or device capable of carrying the computer program code, recording medium, USB flash drive, mobile hard disk, magnetic disk, optical disc, computer memory, read-only memory (ROM), random access memory (RAM), electrical carrier signal, telecommunication signal, and software distribution medium, etc. It should be noted that the content included in the computer-readable medium can be appropriately increased or decreased according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, the computer-readable medium does not include electrical carrier signals and telecommunication signals.

[0081] To implement all or part of the processes in the above-described embodiment methods of this application, it can also be completed by a computer program product. When the computer program product runs on a terminal device, the terminal device can implement the steps of the above-described various method embodiments when executed.

[0082] The above-described embodiments are only used to illustrate the technical solutions of this application, rather than to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of this application, and should all be included in the protection scope of this application.

Claims

1. A probe detection method, characterized in that, There are multiple grids on the customized fixture, and the probes are evenly placed in each grid. The probe includes a needle tip and a needle point. The method includes the following steps: According to the coordinate measurement elements on the software and the specifications of the customized fixture, establish an initial coordinate system and determine the position coordinates of the first probe on the customized fixture; According to the needle tip position and the needle point position of the first probe, establish a needle tip sub-coordinate system and a needle point sub-coordinate system respectively; Generate a test program for the first probe according to the needle tip sub-coordinate system and the needle point sub-coordinate system; According to the step distance between the first probe and other probes, determine the translation amount between the first probe and each other probe, and perform translation replication on the test program of the first probe based on the translation amount to obtain the test programs of each other probe; Generate an overall test program for all probes according to the test programs of each probe; Run the test according to the overall test program and screen out the probes that do not meet the standards.

2. The probe detection method according to claim 1, wherein The coordinate measurement elements include a starting point and axis correction elements. The step of establishing an initial coordinate system according to the coordinate measurement elements on the software and the specifications of the customized fixture and determining the position coordinates of the first probe on the customized fixture includes: Select any one of the four vertices of the customized fixture as the first starting point, and the vertex corresponding to this point horizontally or vertically as the second starting point; Determine the initial direction axis according to the first starting point and the second starting point; Perform axis correction based on the initial direction axis to establish an initial coordinate system; Determine the position coordinates of the first probe according to the position of the first probe in the initial coordinate system.

3. The probe detection method according to claim 2, wherein The needle tip includes a needle tip end point and a needle tip starting end point, and the needle point includes a needle point end point and a needle point starting end point. The step of establishing a needle tip sub-coordinate system and a needle point sub-coordinate system respectively according to the needle tip position and the needle point position of the first probe includes: Determine the needle tip end point position and the needle point end point position of the first probe according to the position coordinates of the first probe; Establish a needle tip sub-coordinate system with the needle tip end point position as the origin; Establish a needle point sub-coordinate system with the needle point end point position as the origin.

4. The probe detection method according to claim 3, wherein The step of generating a test program for the first probe according to the needle tip sub-coordinate system and the needle point sub-coordinate system includes: Obtain probe coordinate information according to the needle tip sub-coordinate system and the needle point sub-coordinate system; Calculate probe parameter information according to the probe coordinate information; Generate a test program for the first probe according to the probe parameter information and the needle tip sub-coordinate system and the needle point sub-coordinate system.

5. The probe detection method according to claim 4, wherein The probe coordinate information includes the needle point end point coordinates, the needle point starting end point coordinates, the needle tip end point coordinates, and the needle tip starting end point coordinates. The step of obtaining probe coordinate information according to the needle tip sub-coordinate system and the needle point sub-coordinate system includes: Determine the needle point end point coordinates and the needle point starting end point coordinates according to the positions of the needle point end point and the needle point starting end point in the needle point sub-coordinate system; Determine the needle tip end point coordinates and the needle tip starting end point coordinates according to the positions of the needle tip end point and the needle tip starting end point in the needle tip sub-coordinate system.

6. The probe detection method according to claim 5, characterized in that, The probe parameter information includes the tip length, the middle section length of the needle, the total length of the needle, the length of the needle head, the angle of the needle head, and the offset. Calculating the probe parameter information according to the probe coordinate information includes: Calculating the tip length according to the coordinates of the tip end point and the coordinates of the tip starting end point; Calculating the middle section length of the needle according to the coordinates of the tip starting end point and the coordinates of the needle head end point; Calculating the total length of the needle according to the coordinates of the tip end point and the coordinates of the needle head starting end point; Calculating the length and angle of the needle head according to the coordinates of the needle head starting end point and the coordinates of the needle head end point; Calculating the offset according to the coordinates of the needle head end point and the coordinates of the tip end point.

7. The probe detection method according to claim 1, wherein Screening out the probes that do not meet the standards according to the overall test procedure running the test includes: Running the test according to the overall test procedure, outputting the standard values and tolerances of each probe, and marking each probe label; Comparing the standard values and tolerances corresponding to each probe label with the preset values. If the difference between the standard value or the tolerance and the preset value exceeds the preset threshold, it is determined as not meeting the standards.

8. A probe detection device, characterized in that, Including a hardware module and a software module; The hardware module is a customized fixture. There are multiple grids on the customized fixture, and each probe is evenly distributed in the grid at an equal step distance. The probe includes a needle head and a tip; The software module includes: An initial coordinate system establishment module, configured to establish an initial coordinate system according to the coordinate measurement elements on the software and the specifications of the customized fixture, and determine the position coordinates of the first probe on the customized fixture; A sub-coordinate system establishment module, configured to establish a needle head sub-coordinate system and a tip sub-coordinate system respectively according to the needle head position and the tip position of the first probe; A first program generation module, configured to generate a test program for the first probe according to the needle head sub-coordinate system and the tip sub-coordinate system; A translation and replication module, configured to determine the translation amount between the first probe and each other probe according to the step distance between the first probe and other probes, and perform translation and replication on the test program of the first probe based on the translation amount to obtain the test programs of each other probe; An integration module, configured to generate an overall test program for all probes according to the test programs of each probe; A screening module, configured to screen out the probes that do not meet the standards according to the overall test procedure running the test.

9. An intelligent terminal, characterized in that, The intelligent terminal includes a memory, a processor, and a computer program stored on the memory and executable on the processor. When the computer program is executed by the processor, it implements the steps of the probe detection method according to any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that, A computer program is stored on the computer-readable storage medium. When the computer program is executed by the processor, it implements the steps of the probe detection method according to any one of claims 1 to 7.

Images