A clean room airflow simulation modeling method and system fusing process layout optimization

Abstract

The present application relates to a clean room airflow simulation modeling method and system fusing process layout optimization, and belongs to the technical field of simulation modeling, which solves the problem that process layout and airflow cannot be optimized simultaneously in existing simulation modeling. The method comprises the following steps: obtaining a process layout model, constructing a tag database according to a design general layout, an architectural drawing and the process layout model; designing a purification air conditioning system according to the process layout model and the tag database, and determining design parameters; importing the process layout model and the design parameters into CFD preprocessing software to generate an initial model of the clean room, arranging return air chutes, fan filter units, dry coil and raised floors in the initial model according to the tag database and the design parameters to obtain a fusion model; performing mesh division on the fusion model to obtain a clean room airflow simulation model, then importing the model into CFD software for fluid simulation, and optimizing the process layout model of the clean room according to the fluid simulation result. Iterative optimization of process and airflow is realized.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of simulation modeling, in particular to a clean room airflow simulation modeling method and system fusing process layout optimization. BACKGROUND

[0002] The pollution diversity and complexity of clean room process layout and production process put special requirements on the clean environment of the clean room. How to scientifically and accurately optimize the design of the clean environment and the process layout to achieve high-quality, low-cost and low-energy construction and operation has become a key problem affecting its development, and also directly affects the realization of the industry's low-carbon emission reduction and high-quality development goals.

[0003] As the hub connecting product design, manufacturing technology and market demand, through process layout optimization, not only can the clean room space be optimized to reduce the demand for clean room space, but also the material flow path can be optimized to reduce redundant handling, reduce the working distance of the operator in the clean room and the concentration of power facilities, and to improve the production efficiency and reduce the construction and operation cost of the clean room.

[0004] The production environment quality of the clean room is one of the key factors to ensure its yield, and is the main factor causing random defects of products. The analysis of the environmental quality is mainly carried out through airflow simulation in the early stage of clean room construction. Through the field analysis of the controlled parameter physical quantity, the flow field is optimized to achieve the goal of controlled environmental parameters and system energy saving. However, the key input conditions and evaluation indexes in airflow simulation, such as pollution sources and their influence, are closely related to the process layout, and both should be optimized and iterated to form a layout and airflow organization that truly meets the production needs, and then to build a truly competitive production line with high quality, low construction cost and low operation energy consumption.

[0005] Currently, process layout optimization and airflow organization optimization are separated. First, three-dimensional process layout design is carried out to generate process-related conditions and data, which are used as input conditions for building and purification air conditioning. The HVAC professional designs the purification air conditioning system according to the design structure to generate two-dimensional CAD drawings, including return air passageway, floor, purification air conditioning system plan and system diagram and layout diagram. Then, the simulation engineer processes the two-dimensional simulation model based on the CAD drawings, and converts the two-dimensional simulation model into a three-dimensional geometric model. According to the three-dimensional geometric model, airflow simulation is carried out, and pollution analysis is associated in the solution, including pollution sensitivity, pollution sources and intensity, etc. Finally, the flow field analysis result is achieved.

[0006] The existing method has a long process from layout optimization to air flow simulation optimization, involves a three-dimensional process layout model, a two-dimensional CAD drawing, a two-dimensional simulation model and a three-dimensional geometric model, and cannot realize iterative optimization due to the unclosed process. Moreover, in practice, process layout adjustment is a common situation encountered in scheme design, and scheme adjustment must be accompanied by synchronous heating and ventilation scheme. The process from design to layout involves complicated iterative calculation, making the clean room air flow simulation modeling inefficient, unable to realize rapid simulation response after scheme adjustment, and having poor modeling effect. SUMMARY

[0007] In view of the above analysis, the embodiments of the present application aim to provide a clean room air flow simulation modeling method integrating process layout optimization, so as to solve the problem of the existing simulation method that the process layout and the heating and ventilation design are mutually separated, cannot interact with each other, and cannot provide a clean room with a fast and accurate simulation method for double optimization of process and air flow.

[0008] In one aspect, the embodiments of the present application provide a clean room air flow simulation modeling method integrating process layout optimization, comprising the following steps:

[0009] Obtaining a process layout model of a clean room, constructing a tag database according to equipment information in a design general map, an architectural drawing and the process layout model;

[0010] Designing a clean air conditioning system according to the process layout model and the tag database, and determining design parameters;

[0011] Importing the process layout model of the clean room and the design parameters into a CFD preprocessing software to generate an initial model of the clean room, arranging return air ducts, fan filter units, dry coil and raised floors in the initial model of the clean room according to the tag database and the design parameters to obtain a fusion model, and performing mesh division on the fusion model to obtain a clean room air flow simulation model;

[0012] Importing the clean room air flow simulation model into a CFD software to perform fluid simulation, and optimizing the process layout model of the clean room according to the fluid simulation result.

[0013] Based on the further improvement of the above method, the tag database includes data tags of five levels of the clean room, process blocks, processes, BAY lines and equipment; the designing of the clean air conditioning system according to the tag database comprises: classifying each process block to divide a plurality of systems; calculating the heat load, the humidity load and the air volume of each process block, and calculating the water flow of each system according to the heat load and the humidity load of each process block; performing hydraulic balance calculation based on the water flow of each system to determine the pipe diameter size of each process block in each system; and determining the type and quantity of the heating and ventilation equipment according to the air treatment scheme.

[0014] Further improvement based on the above method, the return air aisle is arranged in the initial model of the clean room, including:

[0015] According to the size of the clean room in the label database, the shape of the clean room is determined; if the shape of the clean room is rectangular, according to the size of the clean room, the return air aisle is arranged on one side of the long side of the clean room, and the size of the return air aisle is determined according to the size, number, arrangement position, heat transfer area and resistance of the dry coil; if the shape of the clean room is L-shaped or U-shaped, the return air aisle is arranged along the closed loop of the periphery of the clean room.

[0016] According to the area contour coordinates of the process block in the label database and whether the return air is independent, the size and shape of the process block with independent return air are obtained, and then the return air aisle of the process block with independent return air is arranged separately.

[0017] Further improvement based on the above method, the size of the return air aisle is determined according to the size, number, arrangement position, heat transfer area and resistance of the dry coil, including:

[0018] When the dry coil is arranged at the upper mezzanine inlet or the lower mezzanine inlet of the clean room, the height of the part of the return air aisle communicating with the upper mezzanine or the lower mezzanine is multiplied by the length of the return air aisle to obtain an area not less than the heat transfer area of the dry coil.

[0019] When the dry coil is arranged in the middle of the return air aisle, the length and width of the vertical and horizontal projection are calculated according to the size, number and horizontal angle of the dry coil, which are not more than the length and width of the return air aisle.

[0020] Further improvement based on the above method, the face velocity of a single dry coil is not more than 2m / s, and the resistance is not more than 40pa.

[0021] Further improvement based on the above method, the fan filter unit is arranged in the upper mezzanine of the clean room, including:

[0022] According to the size of the fan filter unit, a corresponding cuboid is constructed, if each device in the process block has no heat and dust data, the fan filter unit is uniformly arranged in each BAY line area of the process block; otherwise, the fan filter unit is arranged in parallel according to the number of each device.

[0023] Further improvement based on the above method, the raised floor is arranged at the communication between the middle layer and the lower layer of the clean room, including:

[0024] The space of the clean room is divided into a plurality of air circulation loops, each air circulation loop contains a plurality of FFUs and a plurality of types of raised floors;

[0025] The number of different types of raised floors is adjusted according to the layout area of the raised floor in each air circulation loop, the resistance of each air circulation loop formed by each adjustment is calculated by changing the air volume, air speed and local resistance coefficient, and when the resistance of each air circulation loop reaches equilibrium, the layout number of different types of raised floors in each air circulation loop is obtained.

[0026] Based on the further improvement of the above method, the resistance of each air circulation loop is obtained by calculating the resistance excluding the raised floor and the resistance passing through the raised floor in the loop respectively and summing them up, and the formula is as follows:

[0027] ,

[0028] wherein, represents the resistance of the air circulation loop, represents the resistance excluding the raised floor in the loop, represents the resistance passing through the raised floor; represents the frictional resistance per unit length, represents the local resistance per unit length, represents the duct length; represents the air density, is the flow velocity in the duct, represents the equivalent diameter of the duct, represents the friction coefficient; represents the air flow velocity at the place where local loss occurs, represents the local resistance coefficient; represents the air viscosity coefficient, represents the thickness of the orifice plate in the vertical air flow direction, represents the air speed when passing through the raised floor panel, represents the permeability, represents the inertial resistance coefficient.

[0029] Based on the further improvement of the above method, the layout area of the raised floor in each air circulation loop is obtained by summing up the number and area of each type of raised floor; the types of raised floor include: raised floor with 17%, 25%, 33%, 50% open area, adjustable valve raised floor and blind plate.

[0030] In another aspect, the embodiment of the present application provides a clean room air flow simulation modeling system integrating process layout optimization, comprising:

[0031] A database construction module is configured to obtain a process layout model of a clean room, and construct a tag database according to equipment information in a design general layout, a building drawing and the process layout model.

[0032] A parameter design module is configured to design a clean air conditioning system according to a process layout model and a label database, and determine design parameters;

[0033] A simulation model generation module is configured to import the process layout model of the clean room and the design parameters into CFD preprocessing software to generate an initial model, arrange a return air aisle, a fan filter unit, a dry coil and a raised floor in the initial model according to the label database and the design parameters, and obtain a fusion model; and perform mesh division on the fusion model to obtain a clean room airflow simulation model.

[0034] A fluid simulation module is configured to import the clean room airflow simulation model into CFD software to perform fluid simulation, and optimize the process layout model of the clean room according to the fluid simulation result.

[0035] Compared with the prior art, the present application can at least achieve one of the following beneficial effects:

[0036] 1. The process and heating and ventilation design are integrated, the label database is constructed, the heating and ventilation design calculation parameters are exported synchronously with the process layout three-dimensional model, the three-dimensional model is quickly constructed for simulation calculation, many links in the conventional airflow simulation are reduced, the process layout is optimized according to the simulation result, the iterative optimization of the process and the airflow is realized, the simulation period is greatly reduced, the fast and accurate simulation response is realized, and the engineering actual demand is efficiently served.

[0037] 2. The airflow organization is considered in the process layout optimization, the analysis and judgment of the airflow organization are based on the process layout and the environmental requirements, the layout and the airflow organization analysis are performed by fusing the two, and synchronous display is performed, the advantages and disadvantages of the scheme are comprehensively analyzed and evaluated from the multi-professional angle, the influence of the pollution diffusion and transmission on the production caused by the layout without comprehensive consideration of the airflow is avoided, the loss caused by the after-compensation is greatly reduced, and the construction and operation and maintenance cost of the clean room is reduced.

[0038] In the present application, the above technical solutions can be combined with each other to realize more preferred combination schemes. Other features and advantages of the present application will be described in the subsequent specification, and some advantages will become apparent from the specification, or will be understood by implementing the present application. The purposes and other advantages of the present application can be realized and obtained from the contents specifically pointed out in the specification and the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0039] The accompanying drawings are included to provide a further understanding of the present application, and are incorporated herein and constitute a part of the detailed description. The drawings illustrate embodiments of the present application and, together with the description, serve to explain the principles of the present application. In the drawings:

[0040] Figure 1 It is a flow chart of a clean room airflow simulation modeling method for fusing process layout optimization according to an embodiment of the present application;

[0041] Figure 2 A flow simulation modeling method block diagram for a fusion process layout optimization clean room in embodiment 1 of the present application;

[0042] Figure 3 A schematic diagram for dividing the space of a clean room into multiple air flow circulation loops in embodiment 1 of the present application;

[0043] Figure 4 A structure schematic diagram of a flow simulation modeling system for a fusion process layout optimization clean room in embodiment 2 of the present application. DETAILED DESCRIPTION

[0044] The preferred embodiments of the present application will be described in detail below with reference to the drawings, wherein the drawings constitute a part of this application and serve to explain the principles of the embodiments of the present application, but are not used to limit the scope of the present application.

[0045] One specific embodiment of the present application discloses a flow simulation modeling method for a fusion process layout optimization clean room, as shown in Figure 1 and Figure 2 , comprising the following steps:

[0046] S1, obtaining a process layout model of a clean room, and constructing a tag database according to the equipment information in the design general drawing, the architectural drawing and the process layout model.

[0047] It should be noted that the process layout model is a three-dimensional model formed by the process layout of each device according to the equipment size structure and processing logic, combined with the process characteristics, from-to relationship, use equipment characteristics, and space layout factor relationship. Exemplarily, the Plant Simulation software is used to complete the three-dimensional process layout.

[0048] At the same time, a matching tag database is constructed in the process layout model according to the equipment information in the design general drawing, the architectural drawing and the process layout model of the clean room, and the tag database includes data tags of five levels of the clean room, the process block, the process, the BAY line (a process layout method) and the equipment.

[0049] Specifically, the data tags of the clean room level include the location size, the customer demand index, and the outdoor typical day heating and ventilation of the heating and ventilation design related parameters, etc.; wherein the customer demand index includes product class index, equipment class index and production class index, the product class index includes product output, cycle time of output, etc.; the equipment class index includes equipment utilization rate, equipment Batch quantity, etc.; and the production class index includes cargo volume, the number of work currently in progress, etc.

[0050] The data label of the process block level includes: area name, area contour coordinates, processing procedure, equipment in the area, area size, layer height, area enclosure heat transfer coefficient, area cleanliness level, temperature and humidity and pressure difference parameters, area chemical pollutant control index, area unit cold (heat) load, area unit area exhaust volume, area unit area heat generation, area unit area dust generation, chemical pollutant release, area illumination requirement, lighting lamp type, number, installation power, simultaneous use coefficient, installation coefficient, rectifier power consumption coefficient, use time and whether independent return air.

[0051] The data label of the process block level includes: area name, area contour coordinates, processing procedure, equipment in the area, area size, layer height, area enclosure heat transfer coefficient, area cleanliness level, temperature and humidity and pressure difference parameters, area chemical pollutant control index, area unit cold (heat) load, area unit area exhaust volume, area unit area heat generation, area unit area dust generation, chemical pollutant release, area illumination requirement, lighting lamp type, number, installation power, simultaneous use coefficient, installation coefficient, rectifier power consumption coefficient, use time and whether independent return air.

[0052] The data label of the process block level includes: area name, area contour coordinates, processing procedure, equipment in the area, area size, layer height, area enclosure heat transfer coefficient, area cleanliness level, temperature and humidity and pressure difference parameters, area chemical pollutant control index, area unit cold (heat) load, area unit area exhaust volume, area unit area heat generation, area unit area dust generation, chemical pollutant release, area illumination requirement, lighting lamp type, number, installation power, simultaneous use coefficient, installation coefficient, rectifier power consumption coefficient, use time and whether independent return air.

[0053] The data label of the process block level includes: area name, area contour coordinates, processing procedure, equipment in the area, area size, layer height, area enclosure heat transfer coefficient, area cleanliness level, temperature and humidity and pressure difference parameters, area chemical pollutant control index, area unit cold (heat) load, area unit area exhaust volume, area unit area heat generation, area unit area dust generation, chemical pollutant release, area illumination requirement, lighting lamp type, number, installation power, simultaneous use coefficient, installation coefficient, rectifier power consumption coefficient, use time and whether independent return air.

[0054] S2, according to the process layout model and the label database, a clean air conditioning system is designed, and the model and the number of the fan filter unit and the dry coil are determined.

[0055] It should be noted that the plurality of design parameters are determined by the following steps:

[0056] ①Classify each process block to divide multiple systems.

[0057] Based on the label database, the area of each process block, the area cleanliness level and the temperature and humidity, and the area unit area heat and the area unit area dust emission of each process block are obtained, the process blocks with the area cleanliness level and the temperature and humidity within the set difference range are classified into one system, the process blocks with the area unit area heat and the area unit area dust emission greater than the set maximum threshold are classified into one system, and the remaining process blocks are classified as one system respectively. That is, the process blocks with the same or similar cleanliness, temperature and humidity control precision are classified into one system, and the dust emission and heat emission of these process blocks are not particularly large; the process blocks with large dust emission and heat emission are classified into one system; and the remaining process blocks are classified as one system respectively.

[0058] ②The heat load, humidity load and air volume of each process block are calculated, and the water flow of each system is calculated according to the heat load of each process block.

[0059] It should be noted that the heat load involves determining the cooling or heating capacity required by the clean room under different conditions, and the heat load is usually divided into sensible heat load and total heat load. The sensible heat load mainly refers to the heat load caused by temperature change, while the total heat load includes the sensible heat load and the latent heat load. The latent heat load is the heat load caused by humidity change. The humidity load involves evaluating and calculating the influence of moisture evaporation in the clean room caused by personnel activities and equipment operation on indoor humidity.

[0060] Specifically, the heat load of each process block is calculated from the envelope structure, personnel, lighting and equipment heat respectively.

[0061] Among them, the envelope structure is determined by using the steady-state heat transfer calculation method; the personnel heat load is the heat load generated by the activities of indoor personnel, including body heat dissipation, breathing, etc., which is calculated according to the number of personnel, activity intensity and residence time; the lighting heat load is the heat load generated by lighting equipment, which is calculated according to the type, number, installation power, simultaneous use coefficient, installation coefficient, rectifier power consumption coefficient and use time of lighting equipment; and the equipment heat is the heat generated by the operation of equipment (process equipment and clean air conditioning equipment). If there is no equipment heat and dust emission data in the equipment level data label in the label database, the average value is generally calculated, and the equipment heat is calculated according to the equipment power, efficiency, installation coefficient, load coefficient, simultaneous use coefficient and ventilation insulation coefficient. Among them, the heat generated by the FFU in the clean air conditioning equipment is calculated according to the number, frequency, power and efficiency of the FFU.

[0062] The humidity load of each process block is calculated from the personnel humidity production and indoor equipment humidity production respectively.

[0063] The personnel moisture production is mainly from the human body breathing and sweat evaporation, and is calculated according to the number of people in the room, the breathing frequency of each person per hour, the water vapor content in the exhaled air and the water vapor content in the inhaled air. The indoor equipment moisture production refers to the moisture produced by the operation of the equipment, and is obtained by summarizing the equipment moisture production. The equipment moisture production is provided by the manufacturer of the equipment, or can be estimated according to the working principle and operating parameters of the equipment.

[0064] Further, the air volume of each process block is calculated. The air volume includes: the supply air volume and the fresh air volume. The supply air volume is obtained by taking the maximum value of three supply air volumes calculated according to the heat load, the moisture load and the cleanliness, respectively. The fresh air volume is obtained by comparing the maximum value of the fresh air volume required for ensuring the fresh air of personnel with the fresh air volume required for the positive pressure control of the clean room and the supplementary exhaust air volume.

[0065] It should be noted that when calculating the supply air volume according to the cleanliness, the cross-sectional average air speed method is used to calculate the unidirectional flow clean room according to different cleanliness grades, and the air change frequency method is used to calculate the non-unidirectional flow clean room.

[0066] It should be noted that if multiple BAY lines are included in the process block, the heat load, moisture load and air volume of the BAY line are calculated and then accumulated to obtain the load and air volume of the process block.

[0067] Then, the cooling water flow is calculated according to the heat load and moisture load of each process block, and the cooling water volume of each block included in each system is added to obtain the water flow of each system according to the simultaneous use coefficient of each block.

[0068] ③Hydraulic balance calculation is performed based on the water flow of each system to determine the pipe diameter size of each pipe section in each system.

[0069] Specifically, stainless steel or PVC pipe is selected according to the cleanliness grade of the clean room, and the roughness of the pipe affects the friction resistance; the pipe diameter of each pipe section in the most unfavorable loop is selected within the allowable flow velocity range according to the water flow of each system; the friction resistance and local resistance of each pipe section are calculated according to the water flow and the selected pipe diameter, and the total pressure drop of the most unfavorable loop is determined. By setting balance valves in each branch return pipe and adjusting the pipe diameter until the water force reaches balance, the pipe diameter size of each pipe section in each system is determined. The most unfavorable loop refers to the loop with the largest pressure drop, such as the loop with the largest pressure drop caused by the longest distance or the most resistance components.

[0070] ④The type and number of heating and ventilation equipment are determined according to the air treatment scheme.

[0071] In this embodiment, the air treatment solution of the clean room purification air conditioning system is a fan filter unit (FFU) + dry cooling coil (DCC) + fresh air unit (MAU).

[0072] Among them, FFU is used for terminal air supply, and FFU selection is carried out according to the air volume and cleanliness level requirements of each process block; then, based on the selection results, the number of FFUs is calculated in combination with the air supply volume and the load borne by the FFU.

[0073] DCC controls sensible heat loads. The supply and return water temperatures for the dry coils are determined based on the heat load of each process zone. The wet load of each process zone determines whether the dry coils have dehumidification capabilities, and thus the type of dry coils. The heat load of each process zone is divided by the heat exchange capacity of a single dry coil to determine the number of dry coils required for each zone. A certain percentage of redundancy is also added to ensure the reliability and future scalability of the air conditioning system.

[0074] MAU is used to process external fresh air and generally consists of multiple different functions (heating, humidification, dehumidification and cooling, etc.); the functional segment parameters of a single unit are configured according to the calculated wet load and the number of MAUs is calculated.

[0075] Through step S1, a process layout model with a label database is obtained, and through step S2, the integrated HVAC design parameters, the models and quantities of various HVAC equipment are obtained. Based on the results of these two steps, it is convenient to arrange the purification and air conditioning system in step S3 and quickly construct a three-dimensional geometric model.

[0076] S3. Import the cleanroom process layout model and design parameters into CFD (Computational Fluid Dynamics) pre-processing software to generate an initial model. Arrange the return air duct, fan filter unit, dry coil, and raised floor in the initial model according to the label database and the design parameters to obtain a fusion model. Mesh the fusion model to obtain a cleanroom airflow simulation model.

[0077] S31. Arrange return air ducts and dry coils.

[0078] It should be noted that the design of the return air duct is based on the airflow organization, taking into account the size and shape of the process area, and whether there is independent return air. Single, double, or multiple return air ducts can be arranged. Independent return air refers to the cleanroom having an independent duct or return air system specifically for return air. The return air process does not mix with or interfere with other air flows, and can independently return part of the indoor air to the fresh air unit for treatment before being returned to the cleanroom.

[0079] Specifically, the return air aisle is arranged in the initial model, including:

[0080] According to the size of the clean room in the label database, the shape of the clean room is determined; if the shape of the clean room is a rectangle, according to the size of the clean room, a return air aisle is arranged on one side of the long side of the clean room, and the size of the return air aisle is determined according to the size, number, arrangement position, heat transfer area and resistance of the dry coil; if the shape of the clean room is L-shaped or U-shaped, the return air aisle is arranged along the closed loop of the periphery of the clean room.

[0081] According to the area contour coordinates of the process block in the label database and whether the return air is independent, the size and shape of the process block with independent return air are obtained, and then the return air aisle is arranged for the process block with independent return air.

[0082] It should be noted that the return air aisle is arranged for the process block with independent return air according to the way of arranging the return air aisle in the clean room.

[0083] It can be understood that the return air aisle can be added according to the simulation results.

[0084] It should be noted that the face velocity of a single dry coil does not exceed 2m / s, and the resistance does not exceed 40pa, wherein the face velocity is obtained by dividing the air flow through a single dry coil by the effective ventilation area of a single dry coil; the effective ventilation area of a single dry coil is obtained by subtracting the perimeter frame area from the outer shape area of a single dry coil; which is expressed by the following formula:

[0085] ,

[0086] wherein, the air flow through a single dry coil is affected by the size of the return air aisle, the effective ventilation area of a single dry coil; the resistance coefficient, m represents the resistance index.

[0087] Further, the clean room of the embodiment is a three-layer structure factory building: an upper interlayer, an intermediate layer and a lower interlayer, and the intermediate layer is a core production area for placing equipment. The arrangement position of the dry coil includes: the upper interlayer inlet, or the lower interlayer inlet, or the middle part of the return air aisle.

[0088] When the dry coil is arranged at the upper interlayer inlet or the lower interlayer inlet, the height of the part of the return air aisle communicating with the upper interlayer or the lower interlayer is multiplied by the length of the return air aisle to obtain an area not less than the heat transfer area of the dry coil, which is expressed by the following formula:

[0089] ,

[0090] wherein L represents the length of the return air aisle, and respectively represent the height of the return air aisle and the upper and lower aisle, A represents the heat transfer area of the dry coil, represents the heat load required to be transferred by the return air aisle, U represents the heat transfer coefficient, represents the logarithmic mean temperature difference.

[0091] When the dry coil is arranged in the middle of the return air aisle, the dry coil is supported on the aisle wall at an angle, and the length and width after vertical and horizontal projection are calculated according to the size, number and horizontal angle of the dry coil, and are not more than the length and width of the return air aisle, which is expressed as follows:

[0092] ,

[0093] wherein W represents the width of the return air aisle, represents the width of a single dry coil, represents the length of a single dry coil, represents the distance between two adjacent dry coils, represents the horizontal angle of the dry coil, and n represents the number of dry coils.

[0094] S32, arranging a fan filter unit FFU.

[0095] The embodiment arranges the FFU according to the heat generation, dust emission and chemical pollutant emission characteristics of the equipment in the area. Compared with the prior art in which the FFU can only be uniformly arranged in the area, the present scheme arranges the FFU according to the load and pollutant emission in the tag data, and realizes uniform air flow and coverage by on-demand directional arrangement of the FFU, thereby avoiding dead angles.

[0096] Specifically, the fan filter unit is arranged in the upper aisle of the clean room, comprising: constructing a corresponding cuboid according to the size of the FFU, if each device in the process block does not have heat generation and dust emission data, then uniformly arranging the FFU in each BAY line area of the process block; otherwise, arranging the FFU in parallel according to the number of each device heat generation position as the center.

[0097] S33, arranging a raised floor at the communication between the intermediate layer and the lower aisle.

[0098] As shown in Figure 3 , the space of the clean room is divided into a plurality of air circulation loops, each air circulation loop containing a plurality of FFUs and a plurality of types of raised floors. The sum of the air supply of the FFUs contained in each air circulation loop is taken as the air supply of each air circulation loop.

[0099] Taking the layout area of ​​the elevated floor in each air circulation loop as a constraint, the number of different types of elevated floors is adjusted. By changing the air volume, wind speed and local resistance coefficient, the wind speed and air volume distribution of each air circulation loop are controlled. The resistance of each air circulation loop formed by each adjustment is calculated. When the resistance of each air circulation loop reaches a balance, the purification effect is achieved, and the layout number of different types of elevated floors in each air circulation loop is determined.

[0100] Specifically, the layout area of ​​the raised floor in each air circulation loop is obtained by adding the areas of the raised floors with different opening ratios, the areas of the raised floors with adjustable valves, and the areas of the blind panels, which can be expressed by the following formula:

[0101] ,

[0102] in, represents the layout area of ​​the raised floor in the i-th air circulation loop, 、 、 、 Respectively represents the sum of the areas of raised floors with opening ratios of 17%, 25%, 33%, and 50% calculated based on their respective quantities; Indicates the area and number of raised floors with adjustable valves. Indicates the sum of the areas calculated based on the number of blind panels.

[0103] It should be noted that different opening ratios and different types of elevated floors affect the wind speed and air volume distribution of each air circulation loop, thereby affecting the resistance of each air circulation loop.

[0104] Furthermore, the resistance of each air circulation loop is the resistance of the air sent by the FFU through the clean room, through the clean room equipment, raised floor, return air duct, dry coil, clean room upper mezzanine and back to the FFU entrance. In order to improve the accuracy of the calculation in this embodiment, the resistance of the air circulation loop is calculated in sections. , including: eliminating resistance from raised floors , and resistance through the raised floor The resistance excluding the elevated floor also includes the longitudinal resistance and local resistance. The formula is as follows:

[0105] ,

[0106] in, Indicates the resistance of the air circulation loop. represents the resistance along the unit length, represents the local resistance per unit length, Indicates the length of the air duct; represents the air density, is the air velocity in the duct, is the equivalent diameter of the duct, is the friction factor; is the air velocity at the location where the local loss occurs, is the local resistance coefficient; is the air viscosity coefficient, is the thickness of the orifice plate in the direction perpendicular to the air flow, is the air velocity through the raised floor panel, is the permeability, is the inertial resistance coefficient.

[0107] It should be noted that in the formula and are obtained by measuring the resistance of the raised floor at different air velocities through experiments and fitting by the least square method. The friction factor in the formula is calculated by the following formula:

[0108] ,

[0109] wherein, is the absolute roughness of the pipe wall, is the Reynolds number.

[0110] After the return air channel, the FFU, the dry coil and the raised floor are arranged in the initial model, a fusion model is obtained, and the clean room air flow simulation model is obtained by meshing the fusion model.

[0111] S4, importing the clean room air flow simulation model into the CFD software to perform fluid simulation, and optimizing the process layout model of the clean room according to the fluid simulation result.

[0112] It should be noted that after the clean room air flow simulation model is imported into the CFD software and the relevant parameters are set, multi-physical field simulation analysis is performed. Among them, setting relevant parameters includes: setting device heat generation data, dust emission data and pollutant emission amount, device auxiliary EFU parameters; setting the heat condition of maintenance structure, lighting and personnel; setting the dust emission data of personnel; setting the parameters and boundary conditions of the clean air conditioning system.

[0113] The simulation results are analyzed, especially the temperature, velocity and pollutant concentration field analysis of the process area which is more sensitive to the environment requirement. For the situation that the air flow is unreasonable due to the device arrangement, or the diffusion of pollutants affects the process production, feedback to the process layout, and use it as a condition to make local optimization adjustment of the process layout, to avoid the situation that the air flow is unreasonable to affect the production and it is difficult to adjust or the adjustment cost is large in the later period. That is, the process layout and the clean air conditioning system quickly form a whole, and the layout and flow field are quickly visualized.

[0114] Exemplarily, simulation results show that the temperature of some positions in the process block exceeds the process environment temperature requirement, and the process layout model is adjusted to meet the process environment temperature requirement.

[0115] It should be noted that the existing method is easy to cause the process layout to be fragmented, the airflow to be unsmooth, and the chemical pollutants (acids) in the process environment to exceed the standard, and the yield to decrease. Special rectification in the later stage will cost a lot.

[0116] Compared with the prior art, the clean room airflow simulation modeling method provided by the embodiment fuses process layout optimization, fuses process and heating and ventilation design, exports heating and ventilation design calculation parameters synchronously with the process layout three-dimensional model by constructing a tag database, quickly constructs a three-dimensional model for simulation calculation, reduces many links in the conventional airflow simulation, and optimizes the process layout according to the simulation results, realizes iterative optimization of the process and the heating and ventilation, greatly reduces the simulation period, realizes fast and accurate simulation response, and then efficiently serves the engineering actual demand. In the process layout optimization, the airflow organization is taken into account, the analysis and evaluation of the airflow organization are based on the process layout and the environmental requirements, the layout and the airflow organization analysis are performed by fusing the two and are synchronously displayed, the advantages and disadvantages of the scheme are comprehensively analyzed and evaluated from multiple professional perspectives, the influence of pollution diffusion and transmission on production caused by not comprehensively considering the airflow in the layout is avoided, the loss caused by after-compensation is greatly reduced, and the construction and operation and maintenance cost of the clean room is reduced.

[0117] Embodiment 2

[0118] Another embodiment of the application discloses a clean room airflow simulation modeling system fusing process layout optimization, so as to realize the clean room airflow simulation modeling method fusing process layout optimization in the embodiment 1. The specific implementation of each module is referred to the corresponding description in the embodiment 1. As shown in the embodiment 1, the system comprises: Figure 4

[0119] The database construction module 101 is configured to acquire a process layout model of a clean room, and construct a tag database according to equipment information in a design general drawing, an architectural drawing and the process layout model;

[0120] The parameter design module 102 is configured to design a clean air conditioning system according to the process layout model and the tag database, and determine design parameters;

[0121] The simulation model generation module 103 is configured to import the process layout model of the clean room and the design parameters into a CFD preprocessing software to generate an initial model, arrange return air ducts, fan filter units, dry coil pipes and raised floors in the initial model according to the tag database and the design parameters, and obtain a fusion model; and perform mesh division on the fusion model to obtain a clean room airflow simulation model.​

[0122] a fluid simulation module 104, configured to import the clean room airflow simulation model into a CFD software to perform fluid simulation, and optimize the process layout model of the clean room according to a fluid simulation result.

[0123] Since the clean room airflow simulation modeling system of the embodiment of the application is related to the clean room airflow simulation modeling method of the embodiment of the application, the two can be used as reference to each other, and thus the description is not repeated here. Since the system embodiment of the application has the same principle as the method embodiment of the application, the system embodiment of the application also has the corresponding technical effects of the method embodiment of the application.

[0124] Those skilled in the art can understand that all or part of the processes of the above-mentioned embodiments can be completed by a computer program instructing relevant hardware, and the program can be stored in a computer readable storage medium. The computer readable storage medium includes a magnetic disk, an optical disk, a read-only memory, a random access memory, etc.

[0125] The above description is only the preferred embodiment of the application, but the protection scope of the application is not limited to this. Any person skilled in the art can easily think of changes or replacements within the technical scope disclosed by the application, which should be covered by the protection scope of the application.

Claims

1. A cleanroom airflow simulation modeling method that fuses process layout optimization, characterized in that, The method comprises the following steps: obtaining a process layout model of a clean room, and constructing a tag database according to design general layout, architectural drawings and equipment information in the process layout model; the tag database comprises data tags of five levels of the clean room, process blocks, processes, BAY lines and equipment; designing a clean air conditioning system according to the process layout model and the tag database, and determining design parameters, including: classifying each process block to divide a plurality of systems; calculating heat load, humidity load and air volume of each process block, and calculating water flow of each system according to the heat load and the humidity load of each process block; performing hydraulic balance calculation based on the water flow of each system to determine the pipe diameter size of each process block in each system; and determining the type and quantity of heating and ventilation equipment according to an air treatment scheme; importing the process layout model of the clean room and the design parameters into CFD preprocessing software to generate an initial model of the clean room, arranging return air passageways, fan filter units, dry coils and raised floors in the initial model of the clean room according to the tag database and the design parameters to obtain a fusion model, and performing mesh division on the fusion model to obtain a clean room airflow simulation model; importing the clean room airflow simulation model into CFD software to perform fluid simulation, and optimizing the process layout model of the clean room according to the fluid simulation result.

2. The cleanroom airflow simulation modeling method of fusion process layout optimization according to claim 1, wherein, The return air passageway arranged in the initial model of the clean room comprises: determining the shape of the clean room according to the position and size of the clean room in the tag database; if the shape of the clean room is rectangular, arranging a return air passageway on one side of the long side of the clean room according to the size of the clean room, and determining the size of the return air passageway according to the size, quantity, arrangement position, heat transfer area and resistance of the dry coil; if the shape of the clean room is L-shaped or U-shaped, arranging the return air passageway along the closed loop of the periphery of the clean room; according to the area contour coordinates of the process block and whether the process block has independent return air in the tag database, obtaining the size and shape of the process block with independent return air, and then arranging the return air passageway for the process block with independent return air.

3. The cleanroom airflow simulation modeling method of fusion process layout optimization according to claim 1 or 2, characterized in that, The size of the return air passageway is determined according to the size, quantity, arrangement position, heat transfer area and resistance of the dry coil, and comprises: when the dry coil is arranged at the upper mezzanine inlet or the lower mezzanine inlet of the clean room, the height of the part of the return air passageway communicating with the upper mezzanine or the lower mezzanine is multiplied by the length of the return air passageway to obtain an area, which is not less than the heat transfer area of the dry coil; when the dry coil is arranged in the middle of the return air passageway, the length and width of the vertical and horizontal projections are calculated according to the size, quantity and horizontal angle of the dry coil, and both are not more than the length and width of the return air passageway.

4. The cleanroom airflow simulation modeling method of fusion process layout optimization according to claim 3, wherein, The face velocity of a single dry coil is not more than 2 m / s, and the resistance is not more than 40 pa.

5. The fusion process layout optimized cleanroom airflow simulation modeling method of claim 1, wherein, The fan filter unit is arranged in the upper mezzanine of the clean room, and comprises: constructing a corresponding cuboid according to the size of the fan filter unit, and if each device in the process block has no heat generation and dust emission data, the fan filter units are uniformly arranged in each BAY line area of the process block; otherwise, the fan filter units are arranged in parallel according to the number of each device with heat generation position as the center.

6. The fusion process layout optimized cleanroom airflow simulation modeling method according to claim 1, wherein, The raised floor is arranged at the communication between the middle layer and the lower mezzanine of the clean room, and comprises: The clean room space is divided into multiple air circulation loops, each of which contains multiple FFUs and multiple types of raised floors; The number of different types of raised floors is adjusted with the layout area of the raised floor in each air circulation loop as a constraint, the resistance of each air circulation loop formed by each adjustment is calculated by changing the air volume, air speed and local resistance coefficient, and when the resistance of each air circulation loop reaches equilibrium, the layout number of different types of raised floors in each air circulation loop is obtained.

7. The fusion process layout optimized cleanroom airflow simulation modeling method according to claim 6, wherein, The resistance of each air circulation loop is obtained by calculating the resistance excluding the raised floor and the resistance passing through the raised floor in the loop respectively and summing them up, and the formula is as follows: ， wherein, represents the resistance of the air flow circulation loop, represents the resistance of the loop excluding the raised floor, represents the resistance of the raised floor; represents the Darcy friction factor, represents the local resistance factor, represents the duct length, represents the air density, is the air velocity in the duct, represents the hydraulic diameter of the duct, represents the friction factor, represents the air velocity at which local losses occur, represents the local resistance coefficient, represents the air viscosity coefficient, represents the orifice thickness perpendicular to the air flow direction, represents the air velocity through the raised floor panel, represents the permeability, represents the inertial resistance coefficient.

8. The cleanroom airflow simulation modeling method of fusion process layout optimization according to claim 6, wherein, The layout area of the raised floor in each air circulation loop is obtained by summing up the number and area of each type of raised floor; the types of raised floor include raised floors with opening rates of 17%, 25%, 33% and 50%, adjustable valve raised floors and blind plates.

9. A cleanroom airflow simulation modeling system that integrates process layout optimization, characterized in that, Comprise: The database construction module is used for obtaining a process layout model of the clean room, and constructing a tag database according to equipment information in a design general drawing, an architectural drawing and the process layout model; The tag database comprises data tags of five levels of the clean room, process blocks, processes, BAY lines and equipment; The parameter design module is used for designing a clean air conditioning system according to the process layout model and the tag database, and determining design parameters, including: classifying each process block to divide multiple systems; calculating heat load, humidity load and air volume of each process block, and calculating water flow of each system according to the heat load and the humidity load of each process block; performing hydraulic balance calculation based on the water flow of each system to determine pipe diameter sizes of each process block in each system; and determining types and numbers of heating and ventilation equipment according to an air treatment scheme; The simulation model generation module is used for importing the process layout model of the clean room and the design parameters into CFD preprocessing software to generate an initial model, arranging return air corridors, fan filter units, dry coil and raised floors in the initial model according to the tag database and the design parameters to obtain a fusion model, and performing grid division on the fusion model to obtain a clean room airflow simulation model; The fluid simulation module is used for importing the clean room airflow simulation model into CFD software to perform fluid simulation, and optimizing the process layout model of the clean room according to a fluid simulation result.

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