Method and System for Measuring the Output Accuracy of the Centroid Position of a Spot in an Area Array Detector Camera

Abstract

This invention provides a method and system for measuring the output accuracy of the centroid position of a beam pattern in an area array detector camera. The method includes placing a fiber laser at the focal plane of a collimator. The laser emitted by the fiber laser enters the collimator and generates parallel light. This parallel beam is reflected by a piezoelectric ceramic fast reflector and then enters the area array detector camera under test, generating an imaging beam. The embedded software of the area array detector camera calculates the gray-scale centroid of this beam. Simultaneously, an autocollimator is placed perpendicular to the piezoelectric ceramic fast reflector to record the gray-scale centroid and measurement angle of the beam. This invention can intuitively and accurately read the deflection angle of the parallel light entering the area array detector camera. For area array detector cameras with different detection wavelengths, only the corresponding beacon laser needs to be replaced without adjusting the optical path. Furthermore, this invention has advantages such as high accuracy in measuring the output centroid position of the beam pattern, simple equipment, clear steps, and rapid reusability.

Description

Technical Field

[0001] This invention relates to the field of space laser communication, specifically to the precision measurement technology of area array detector cameras in the field of space laser communication, and more specifically, to a method and system for measuring the output precision of the centroid position of the light spot of an area array detector camera using an autocollimator and a high-precision piezoelectric oscillating mechanism. Background Technology

[0002] In the key components of a space laser communication system, the area array detector camera plays a crucial role, serving as a core component for achieving high-precision acquisition, tracking, and aiming capabilities. Its working mechanism involves converting optical signals into electrical signals using a two-dimensional photosensitive array, thereby capturing the laser spot in real time and accurately calculating its centroid position. Subsequently, it works in conjunction with a high-bandwidth deflection mechanism to construct an optical closed-loop system, which is decisive for ensuring the successful establishment of the communication link and its long-term stable operation.

[0003] Space laser communication places extremely stringent requirements on pointing accuracy, typically at the μrad (microradian) level. Area array detectors, through techniques such as thresholding and weight allocation, can achieve high-precision centroid localization of laser spot images. Taking the sub-pixel algorithm as an example, this algorithm can theoretically improve the centroid localization accuracy to the 1 / 32 pixel level. Therefore, achieving high-precision measurement of the centroid position output accuracy of area array detectors is of great significance for optimizing the centroid localization algorithm for area array detector images and significantly improving the pointing accuracy of space laser communication systems.

[0004] In existing technologies, to obtain the deflection angle of the parallel beam entering the detector of the area array under test, a deflection turntable is commonly used to deflect the camera, or a piezoelectric fast reflector is used to deflect the beam. However, these methods are not only difficult to accurately and intuitively read the deflection angle, but also have complicated operation processes and poor reusability.

[0005] A patent search revealed an invention patent with publication number CN117119325A, which discloses an area array sensor camera and a method for adjusting its mounting position. The method includes: measuring the spatial coordinates of at least three points on the area array sensor to obtain a coordinate position set S1; measuring the spatial coordinates of at least three points on the front cover of the camera to obtain a coordinate position set S; fitting an equation to the plane containing either S1 or any set in S; calculating the distance of each coordinate in the other set from the equation of the fitted plane to obtain a distance set D1; calculating the difference between the maximum and minimum values ​​in the distance set D1; and adjusting the mounting position of the area array sensor based on the difference if the difference is greater than a parallelism threshold. This patent focuses on adjusting the mounting position of the area array sensor camera, does not mention high-precision measurement methods, and has a narrow application scope.

[0006] In summary, given the problems of the existing technologies, researching a method and system for measuring the output accuracy of the centroid position of a beam pattern detector using an autocollimator and a high-precision piezoelectric oscillating mechanism has become a critical task that urgently needs to be addressed. Summary of the Invention

[0007] To address the shortcomings of existing technologies, the purpose of this invention is to provide a method and system for measuring the accuracy of the output centroid position of a spot in an area array detector camera.

[0008] A method for measuring the output accuracy of the centroid position of a spot in an area array detector camera according to the present invention includes the following steps:

[0009] Step S1: Place the fiber end face of the fiber laser at the focal plane of the collimator so that the laser emitted by the fiber laser enters the collimator to generate parallel light.

[0010] Step S2: Place the area array detector under test in front of the collimator and adjust the relative position of the area array detector under test and the collimator so that the parallel light generated by the collimator cannot directly enter the area array detector under test.

[0011] Step S3: Place the piezoelectric ceramic fast reflector in front of the collimator and adjust the relative positions of the piezoelectric ceramic fast reflector, the collimator, and the detector under test. This ensures that the parallel light generated by the collimator is reflected by the piezoelectric ceramic fast reflector and then enters the detector under test. Record the centroid of the grayscale of the light spot output by the detector under test. ,in Including coordinates X and Y;

[0012] Step S4: Install the autocollimator perpendicular to the surface of the piezoelectric ceramic fast reflector. Adjust the azimuth and elevation angle of the autocollimator so that the reflected light from the autocollimator, after being reflected by the piezoelectric ceramic fast reflector, is imaged at the center of the crosshairs. Record the reading of the autocollimator. ,in Including angles θx and θy;

[0013] Step S5: The piezoelectric ceramic fast reflector is driven by a piezoelectric ceramic actuator at a preset step size to deflect the piezoelectric ceramic fast reflector. The parallel light enters the detector of the area array under test after deflection and forms a light spot on the detector of the area array under test. The gray centroid of the light spot is relative to the initial position. Offset by y pixels, while the autocollimator reading relative to the initial position Angle change θ;

[0014] Step S6: Repeat step S5, continuously change the deflection angle of the piezoelectric ceramic fast reflector, record multiple sets of data, each set of data including y and θ, until the number of repetitions reaches the preset number;

[0015] Step S7: Use the least squares method to adjust the piezoelectric ceramic fast reflector relative to its initial position. The yaw angle θ and the gray centroid of the light spot relative to the initial position The change y is fitted with a straight line, and the output accuracy of the gray-scale centroid position of the measured area array detector camera is calculated based on the fitting result.

[0016] Preferably, the collimator is an off-axis reflective collimator with a focal length F of 3m and an aperture D of 300mm. A beam splitter, a camera, and a fiber optic flange are located at the focal plane.

[0017] Preferably, in step S1, the fiber laser is matched with the detection wavelength of the area array detector under test, and the fiber laser has a wavelength of 1550nm, an adjustable output power, and an FC / PC interface for the pigtail.

[0018] Preferably, in step S2, the operating wavelength of the area array detector under test is 1550nm, the lens consists of 3 lenses, the focal length is 250mm, and the area array detector under test includes a lens and a detector.

[0019] Preferably, in step S2, the optical axis of the area array detector under test forms an angle of approximately 90° with the optical axis of the collimator.

[0020] Preferably, in step S3, the piezoelectric ceramic fast reflector has an aperture of 30mm, a silver film coated on the reflective surface, a double-sided parallelism better than 2 seconds, a piezoelectric mechanism with a yaw angle range of ±2.5mrad, and external dimensions of Ф25mm×60mm.

[0021] Preferably, in step S4, the autocollimator has a measurement accuracy of ±0.1″, a resolution of 0.01″, and a measurement field of view of 0.5 degrees.

[0022] Preferably, in step S5, the piezoelectric ceramic actuator drives the piezoelectric ceramic fast reflector to deflect the angle with a preset step size of 0.01 mrad, and the piezoelectric ceramic actuator supports closed-loop control.

[0023] Preferably, in step S7, the slope of the fitted straight line is the angle corresponding to the change in the centroid of the single pixel grayscale of the tested area array detector camera, and the regression standard error σ of the least squares fitting is the output accuracy of the grayscale centroid position of the light spot of the tested area array detector camera.

[0024] The present invention also provides a system for measuring the output accuracy of the centroid position of a spot in an area array detector camera, comprising:

[0025] Module M1 places the fiber end face of the fiber laser at the focal plane of the collimator, so that the laser emitted by the fiber laser enters the collimator to produce parallel light.

[0026] Module M2 places the area array detector under test in front of the collimator and adjusts the relative position of the area array detector under test and the collimator so that the parallel light generated by the collimator cannot directly enter the area array detector under test.

[0027] Module M3 places the piezoelectric ceramic fast reflector in front of the collimator and adjusts the relative positions of the piezoelectric ceramic fast reflector, the collimator, and the tested area array detector camera. This ensures that the parallel light generated by the collimator is reflected by the piezoelectric ceramic fast reflector and enters the tested area array detector camera. The grayscale centroid of the light spot output by the tested area array detector camera is recorded. ,in Including coordinates X and Y;

[0028] Module M4 involves mounting the autocollimator perpendicular to the surface of the piezoelectric ceramic fast reflector. By adjusting the azimuth and elevation angles of the autocollimator, the reflected light from the autocollimator is imaged at the center of the crosshairs after reflection by the piezoelectric ceramic fast reflector. The readings of the autocollimator are then recorded. ,in Including angles θx and θy;

[0029] Module M5 drives the piezoelectric ceramic fast reflector to deflect at a preset step size via a piezoelectric ceramic actuator. Parallel light enters the measured area array detector camera after deflection and forms a light spot on the detector of the measured area array detector camera. The gray centroid of the light spot is relative to the initial position. Offset by y pixels, while the autocollimator reading relative to the initial position Angle change θ;

[0030] Module M6 repeats module M5, continuously changing the deflection angle of the piezoelectric ceramic fast reflector and recording multiple sets of data, each set including y and θ, until the number of repetitions reaches the preset number;

[0031] Module M7 uses the least squares method to measure the piezoelectric ceramic fast reflector relative to its initial position. The yaw angle θ and the gray centroid of the light spot relative to the initial position The change y is fitted with a straight line, and the output accuracy of the gray-scale centroid position of the measured area array detector camera is calculated based on the fitting result.

[0032] Compared with the prior art, the present invention has the following beneficial effects:

[0033] 1. The equipment, instruments, and tools used in this invention are all common, conventional laboratory configurations or readily available types, requiring no additional procurement or development. Furthermore, no complex equipment operation methods are required during operation, and process data can be directly read and saved.

[0034] 2. The testing process of this invention is simple and efficient, directly promoting mass production. Furthermore, if the tested array detector camera needs to be replaced, no changes to the optical path are required. This invention fully meets the current needs of the free-space optical communication field, especially in the aerospace field, for mass production testing. Attached Figure Description

[0035] Other features, objects, and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0036] Figure 1 This is a flowchart of a method for measuring the output accuracy of the centroid position of a beam of light from an area array detector according to an embodiment of the present invention;

[0037] Figure 2 This is a schematic diagram of the optical path according to an embodiment of the present invention.

[0038] Figure reference numerals: collimator, fiber laser, piezoelectric ceramic fast reflector, piezoelectric ceramic actuator, autocollimator, and the area array detector under test. Detailed Implementation

[0039] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0040] To address the problem that existing technologies struggle to accurately obtain the deflection angle of the parallel beam entering the tested area array detector when measuring the output accuracy of the centroid position of the spot in an area array detector, this invention proposes a method and system for measuring the output accuracy of the centroid position of an area array detector. This method is not only unified but also specifically applicable to the field of laser communication, offering speed, convenience, ease of reuse, and higher accuracy.

[0041] The core of this invention lies in the method of directly monitoring angle changes using an autocollimator, enabling intuitive and high-precision reading of these changes, and comparing and calibrating the results with the centroid output accuracy of the camera. Other similar devices are included within the scope of this invention. This invention, through an autocollimator, can intuitively and accurately read the deflection angle of the parallel beam entering the measured area array detector camera. For area array detector cameras with different detection wavelengths, only the corresponding beacon laser needs to be replaced without adjusting the optical path, demonstrating its reusability. The measurement method of this invention has advantages such as high accuracy in measuring the centroid position of the light spot, simple equipment, clear steps, and rapid reusability.

[0042] This measurement method enables accurate and intuitive reading of the deflection angle of the parallel beam entering the tested area array detector camera, thereby allowing for precise calculation of the centroid position output accuracy of the detector camera's beam. The hardware and software used in this invention are all conventional or readily available tools and equipment in the field of free-space optical communication laboratories.

[0043] Example 1:

[0044] This embodiment provides a method for measuring the output accuracy of the centroid position of a beam pattern in an area array detector camera. The required tools include: a collimator, a piezoelectric ceramic fast reflector, a piezoelectric ceramic driver, an autocollimator, the area array detector camera under test, and a fiber laser corresponding to the camera. The collimator has a port for emitting laser light. The piezoelectric ceramic driver drives the piezoelectric ceramic fast reflector to perform two-dimensional swaying, thereby causing the parallel light reflected by the fast reflector to angularly sway. The autocollimator is used to measure the sway angle of the fast reflector. The hardware and software of the area array detector camera under test are used to output the gray-scale centroid of the imaging beam pattern generated at the detector by the parallel light entering the camera.

[0045] The method includes: placing a fiber laser with a wavelength corresponding to that of the area array detector under test at the focal plane of a collimator; the laser emitted by the fiber laser enters the collimator and generates a parallel beam; this parallel beam is reflected by a piezoelectric ceramic fast reflector and then enters the area array detector under test, generating an imaging spot; the embedded software of the area array detector under test calculates the gray-scale centroid of this spot; simultaneously, an autocollimator is placed perpendicular to the piezoelectric ceramic fast reflector, and the current gray-scale centroid of the spot output by the area array detector under test and the measurement angle of the autocollimator are recorded as initial values. When the piezoelectric ceramic driver drives the piezoelectric ceramic fast reflector to produce a certain angle of y-pixel change in the gray-scale centroid of the imaging spot of the area array detector under test relative to the initial position, the autocollimator can accurately measure the current y-pixel y-angle of the piezoelectric ceramic fast reflector relative to the initial position. Continue to change the piezoelectric tilt angle and record multiple sets of such (y,θ) data. Then, use the least squares method to fit the straight line between the tilt angle θ of the piezoelectric ceramic fast reflector relative to the initial position and the change y of the gray centroid of the spot. The slope of this straight line is the angle corresponding to the change of the gray centroid of a single pixel of the tested area array camera. The regression standard error of this least squares fitting is the output accuracy of the spot centroid position of the tested area array camera.

[0046] Figure 1 This is a flowchart illustrating a method for measuring the output accuracy of the centroid position of a beam pattern from an area array detector camera according to an embodiment of the present invention. Figure 2 This is a schematic diagram of the optical path according to an embodiment of the present invention.

[0047] like Figure 1 , 2 As shown, the method for measuring the output accuracy of the centroid position of the area array detector camera spot includes the following steps:

[0048] Step S1: Place the fiber end face of the fiber laser at the focal plane of the collimator so that the laser emitted by the fiber laser enters the collimator to generate parallel light.

[0049] Specifically, the collimator is an off-axis reflective collimator with a focal length F of 3m and an aperture D of 300mm. A beam splitter, a camera, and a fiber optic flange are located at the focal plane.

[0050] Furthermore, the fiber laser is matched with the detection wavelength of the area array detector under test, and the fiber laser has a wavelength of 1550nm, an adjustable output power with an adjustable range of 0~14mW, and an FC / PC interface for the pigtail.

[0051] In this embodiment, the fiber laser is manufactured by Shenzhen Ruili Co., Ltd., and its specification model is TSL-M-1-C-40-20K-S-FA.

[0052] Step S2: Place the area array detector under test in front of the collimator and adjust the relative position of the area array detector under test and the collimator. Preferably, the optical axis of the area array detector under test and the optical axis of the collimator form an angle of about 90°. Other optical axis angles are also within the protection of the scheme, so that the parallel light generated by the collimator cannot directly enter the area array detector under test.

[0053] Specifically, the operating wavelength of the area array detector under test is 1550nm, the lens consists of 3 lenses, the focal length is 250mm, and the area array detector under test includes the lens, detector, and related mechanical components.

[0054] Step S3: Place the piezoelectric ceramic fast reflector in front of the collimator and adjust the relative positions of the piezoelectric ceramic fast reflector, the collimator, and the detector under test. This ensures that the parallel light generated by the collimator is reflected by the piezoelectric ceramic fast reflector and then enters the detector under test. Record the centroid of the grayscale of the light spot output by the detector under test. ,in Includes coordinates X and Y.

[0055] Specifically, the piezoelectric ceramic fast reflector has a diameter of 30mm, a silver film coated on the reflective surface, a double-sided parallelism better than 2 seconds, a piezoelectric mechanism with a yaw angle range of ±2.5mrad, and external dimensions of Ф25mm×60mm (length).

[0056] Step S4: Install the autocollimator perpendicular to the surface of the piezoelectric ceramic fast reflector. Adjust the azimuth and elevation angle of the autocollimator so that the reflected light from the autocollimator, after being reflected by the piezoelectric ceramic fast reflector, is imaged at the center of the crosshairs. Record the reading of the autocollimator. ,in This includes angles θx and θy.

[0057] Specifically, the autocollimator has a measurement accuracy of ±0.1″, a resolution of 0.01″, and a measurement field of view of 0.5 degrees.

[0058] In this embodiment, the autocollimator is model elcomat3000.

[0059] In step S5, the piezoelectric ceramic fast reflector is driven to deflect at a preset step size of 0.01 mrad by a piezoelectric ceramic actuator. At this time, the parallel light enters the detector of the area array under test after deflection and forms a light spot on the detector of the area array under test. The gray centroid of the light spot is relative to the initial position. Offset by y pixels, while the autocollimator reading relative to the initial position The angle change θ.

[0060] According to the principles of geometric optics, when the mirror is biased, causing the normal to change by the X angle, the direction of the reflected ray will change by 2X angle if the direction of the incident ray remains unchanged.

[0061] Specifically, the piezoelectric ceramic actuator supports closed-loop control.

[0062] In this embodiment, the piezoelectric ceramic actuator is manufactured by Harbin Xinmingtian Company, with product model number E00.D6.

[0063] Step S6: Repeat step S5, continuously change the deflection angle of the piezoelectric ceramic fast reflector, record multiple sets of data, each set of data including y and θ, until the number of repetitions reaches the preset number.

[0064] In this embodiment, the preset number of times is set to 100.

[0065] Step S7: Use the least squares method to adjust the piezoelectric ceramic fast reflector relative to its initial position. The yaw angle θ and the gray centroid of the light spot relative to the initial position The change y is fitted with a straight line, and the output accuracy of the gray-scale centroid position of the measured area array detector camera is calculated based on the fitting result.

[0066] Specifically, the slope of the fitted straight line is the angle corresponding to the change in the centroid of the single pixel grayscale of the tested area array detector camera, and the regression standard error σ of the least squares fitting is the output accuracy of the grayscale centroid position of the light spot of the tested area array detector camera.

[0067] Specifically, the angle corresponding to the change in the centroid of a single pixel grayscale is the change in the angle of external light when the centroid of the light spot changes by one pixel as seen in the camera.

[0068] Example 2:

[0069] The present invention also provides a system for measuring the output accuracy of the centroid position of a spot in an area array detector camera. The system for measuring the output accuracy of the centroid position of a spot in an area array detector camera can be implemented by executing the process steps of the method for measuring the output accuracy of the centroid position of a spot in an area array detector camera. That is, those skilled in the art can understand the method for measuring the output accuracy of the centroid position of a spot in an area array detector camera as a preferred embodiment of the system for measuring the output accuracy of the centroid position of a spot in an area array detector camera.

[0070] Specifically, the system for measuring the accuracy of the centroid position output of the area array detection camera spot includes:

[0071] Module M1 places the fiber end face of the fiber laser at the focal plane of the collimator, so that the laser emitted by the fiber laser enters the collimator to produce parallel light.

[0072] Module M2 places the area array detector under test in front of the collimator and adjusts the relative position of the area array detector under test and the collimator so that the parallel light generated by the collimator cannot directly enter the area array detector under test.

[0073] Module M3 places the piezoelectric ceramic fast reflector in front of the collimator and adjusts the relative positions of the piezoelectric ceramic fast reflector, the collimator, and the tested area array detector camera. This ensures that the parallel light generated by the collimator is reflected by the piezoelectric ceramic fast reflector and enters the tested area array detector camera. The grayscale centroid of the light spot output by the tested area array detector camera is recorded. ,in Including coordinates X and Y;

[0074] Module M4 involves mounting the autocollimator perpendicular to the surface of the piezoelectric ceramic fast reflector. By adjusting the azimuth and elevation angles of the autocollimator, the reflected light from the autocollimator is imaged at the center of the crosshairs after reflection by the piezoelectric ceramic fast reflector. The readings of the autocollimator are then recorded. ,in Including angles θx and θy;

[0075] Module M5 drives a piezoelectric ceramic fast reflector to deflect at a certain angle via a piezoelectric ceramic actuator. At this time, parallel light enters the detector of the area array under test after deflection and forms a light spot on the detector of the area array under test. The gray centroid of the light spot is relative to the initial position. Offset by y pixels, while the autocollimator reading relative to the initial position Angle change θ;

[0076] Module M6 repeats the execution of module M5, continuously changing the deflection angle of the piezoelectric ceramic fast reflector and recording multiple sets of data, each set of data including y and θ;

[0077] Module M7 uses the least squares method to measure the piezoelectric ceramic fast reflector relative to its initial position. The yaw angle θ and the gray centroid of the light spot relative to the initial position The change y is fitted with a straight line, and the output accuracy of the gray-scale centroid position of the measured area array detector camera is calculated based on the fitting result.

[0078] Those skilled in the art will understand that, besides implementing the system and its various devices, modules, and units provided by this invention in the form of purely computer-readable program code, the same functions can be achieved entirely through logical programming of the method steps, making the system and its various devices, modules, and units of this invention function in the form of logic gates, switches, application-specific integrated circuits, programmable logic controllers, and embedded microcontrollers. Therefore, the system and its various devices, modules, and units provided by this invention can be considered as a hardware component, and the devices, modules, and units included therein for implementing various functions can also be considered as structures within the hardware component; alternatively, the devices, modules, and units for implementing various functions can be considered as both software modules implementing the method and structures within the hardware component.

[0079] Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. A method for measuring the output precision of the centroid position of a light spot of an area array detection camera, characterized in that, The method comprises the following steps: Step S1, placing the fiber end face of a fiber laser at the focal plane of a collimator, and making the laser emitted by the fiber laser enter the collimator to generate parallel light; Step S2, placing the measured area array detection camera in front of the collimator, and adjusting the relative position of the measured area array detection camera and the collimator, so that the parallel light generated by the collimator cannot directly enter the measured area array detection camera; Step S3, placing a piezoelectric ceramic fast reflecting mirror in front of the collimator, and adjusting the relative positions between the piezoelectric ceramic fast reflecting mirror, the collimator and the measured area array detection camera, so that the parallel light generated by the collimator enters the measured area array detection camera after being reflected by the piezoelectric ceramic fast reflecting mirror, and recording the current measured area array detection camera output light spot gray centroid wherein comprises coordinates X and Y; Step S4, install the autocollimator perpendicular to the mirror surface of the piezoelectric ceramic fast steering mirror, by adjusting the azimuth and elevation angle of the autocollimator, make the reflected light of the autocollimator after reflecting through the piezoelectric ceramic fast steering mirror image in the center position of the cross line, record the reading of the autocollimator wherein including angles θx and θy; Step S5, the piezoelectric ceramic driver drives the piezoelectric ceramic fast steering mirror to deflect at a preset step size, the parallel light enters the measured surface array detection camera after deflection, and a light spot is formed on the detector of the measured surface array detection camera, and the gray centroid of the light spot changes relative to the initial position by y pixels, while the reading of the autocollimator changes relative to the initial position by an angle θ; Step S6, repeatedly performing step S5, continuously changing the deflection angle of the piezoelectric ceramic fast mirror, and recording multiple groups of data, each group of data comprising y and θ, until the number of repetitions reaches a preset number; Step S7, using the least square method to linearly fit the deflection angle θ of the piezoelectric ceramic fast steering mirror relative to the initial position and the change y of the light spot gray centroid relative to the initial position, and calculating the light spot gray centroid position output precision of the measured area array detector according to the fitting result. Step S7, using the least square method to linearly fit the deflection angle θ of the piezoelectric ceramic fast steering mirror relative to the initial position and the change y of the light spot gray centroid relative to the initial position, and calculating the light spot gray centroid position output precision of the measured area array detector according to the fitting result. Step S7, using the least square method to linearly fit the deflection angle θ of the piezoelectric ceramic fast steering mirror relative to the initial position and the change y of the light spot gray centroid relative to the initial position 2. The method of claim 1, wherein, The collimator is an off-axis reflection type collimator, the focal length F is 3 m, the aperture D is 300 mm, and the focal plane position is provided with a beam splitter, a camera and a fiber flange.

3. The method of claim 2, wherein: In the step S1, the detection wavelength of the fiber laser matches the detection wavelength of the measured area array detection camera, the use wavelength of the fiber laser is 1550 nm, the output power has an adjustable function, and the tail fiber adopts an FC / PC interface.

4. The method of claim 3, wherein, In the step S2, the working wavelength of the measured area array detection camera is 1550 nm, the lens is composed of 3 lenses, and the focal length is 250 mm; the measured area array detection camera comprises a lens and a detector.

5. The method of claim 4, wherein, In the step S2, the optical axis of the measured area array detection camera and the optical axis of the collimator form an included angle of about 90°.

6. The method of claim 1, wherein, In the step S3, the aperture of the piezoelectric ceramic fast mirror is 30 mm, the reflecting surface is coated with a silver film, the double-sided parallelism is better than 2 seconds, the deflection angle range of the piezoelectric mechanism is ±2.5 mrad, and the outer shape size is Ф25 mm*60 mm.

7. The method of claim 1, wherein, In the step S4, the measurement accuracy of the autocollimator is ±0.1'', the resolution is 0.01'', and the measurement field of view is 0.5 degrees.

8. The method of claim 1, wherein, In the step S5, the piezoelectric ceramic driver drives the deflection angle of the piezoelectric ceramic fast mirror with a preset step length of 0.01 mrad, and the piezoelectric ceramic driver supports closed-loop control.

9. The method of claim 1, wherein, In the step S7, the slope of the fitted straight line is the angle corresponding to the change of the single-pixel gray centroid of the measured area array detection camera, and the regression standard error σ of the least squares fitting is the output accuracy of the gray centroid position of the spot of the measured area array detection camera.

10. A system for measuring the accuracy of the output centroid position of a spot in a planar detector camera, characterized in that, The method comprises: Module M1, placing the fiber end face of a fiber laser at the focal plane of a collimator, and making the laser emitted by the fiber laser enter the collimator to generate parallel light; Module M2, placing the measured area array detection camera in front of the collimator, and adjusting the relative position of the measured area array detection camera and the collimator, so that the parallel light generated by the collimator cannot directly enter the measured area array detection camera; Module M3, placing a piezoelectric ceramic fast mirror in front of the collimator, and adjusting the relative position between the piezoelectric ceramic fast mirror and the collimator, the measured surface array detection camera, so that the parallel light generated by the collimator enters the measured surface array detection camera after being reflected by the piezoelectric ceramic fast mirror, and recording the current measured surface array detection camera output spot gray centroid , wherein comprises coordinates X and Y; Module M4, the autocollimator is installed perpendicular to the mirror surface of the piezoelectric ceramic fast steering mirror, by adjusting the azimuth and elevation angle of the autocollimator, the reflected light of the autocollimator emitted through the piezoelectric ceramic fast steering mirror is imaged in the center position of the cross line, and the reading of the autocollimator is recorded wherein including angles θx and θy; Module M5, the piezoelectric ceramic driver drives the piezoelectric ceramic fast steering mirror to deflect at a preset step size, the parallel light enters the measured surface array detection camera after deflection, and a light spot is formed on the detector of the measured surface array detection camera, and the gray centroid of the light spot changes relative to the initial position by y pixels, while the reading of the autocollimator changes relative to the initial position by an angle θ; Module M6, repeatedly performing module M5, continuously changing the deflection angle of the piezoelectric ceramic fast mirror, and recording multiple groups of data, each group of data comprising y and θ, until the number of repetitions reaches a preset number; Module M7 uses the least squares method to evaluate the piezoelectric ceramic fast reflector relative to its initial position. The yaw angle θ and the gray centroid of the light spot relative to the initial position The change y is fitted with a straight line, and the output accuracy of the gray-scale centroid position of the measured area array detector camera is calculated based on the fitting result.

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