Monocrystal clamping equipment for zone melting furnace

Abstract

The invention relates to the field of zone melting furnaces, in particular to zone melting furnace single crystal clamping equipment which comprises a base, the middle of the base is arranged in a penetrating mode, a plurality of sliding grooves are formed in the circumferential array of the upper surface of the base, each sliding groove penetrates to the middle penetrating position of the base in the radial direction of the base, and a sliding plate is arranged in each sliding groove. The end, close to the middle of the base, of each sliding plate is fixedly connected with an arc-shaped clamping plate. A guide rod is arranged on the upper surface of each sliding plate; a rotating disc is arranged above the base, the middle of the rotating disc is arranged in a penetrating mode, a plurality of arc-shaped extrusion holes are formed in the rotating disc in a circumferential array mode, and the extrusion holes are arranged on the outer rings of the guide rods in a sleeving mode; according to the crystal growth device, the designed rotating disc synchronously extrudes the multiple guide rods, the multiple guide rods synchronously drive the clamping plates to clamp the crystal and provide support for the whole crystal, and swing generated in the crystal growth process can be reduced in the crystal growth process, so that the crystal growth stability is improved, and smooth crystal growth is guaranteed.

Description

Technical Field

[0001] The invention relates to the field of zone melting furnaces, in particular to a single crystal clamping device for a zone melting furnace. Background Art

[0002] The zone melting method for growing silicon single crystals is a method of heating polycrystalline silicon material with a high-frequency heating coil in an argon atmosphere or vacuum, causing it to melt and come into contact with the seed crystal below, and then grow into a high-purity silicon single crystal according to the crystal structure of the seed crystal.

[0003] The typical process for growing silicon single crystals in a zone furnace is: seeding, thinning, shouldering, uniform diameter, and breaking. During the first three stages of single crystal growth, the crystal diameter gradually increases as the growth progresses, forming a conical structure. Once the crystal diameter reaches a certain characteristic value, the crystal enters the uniform diameter stage, where the crystal diameter grows at a constant value.

[0004] Due to the vibrations caused by external environmental factors and the vibrations caused by the operation of the zone melting single crystal furnace, especially the shaking of large-sized single crystals is particularly obvious, which seriously affects the growth stability of the single crystal; therefore, in the process of preparing single crystals, how to improve the stability of the crystal has become a problem that technical personnel in this field need to solve.

[0005] Therefore, in order to solve the above problems, a zone furnace single crystal clamping device is proposed. Summary of the Invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve the technical problem is as follows: a zone furnace single crystal clamping device according to the present invention comprises a base, a through-hole is provided in the middle of the base, a plurality of chute arrays are provided on the circumferential surface of the base, each chute radially extends through the base to a through-hole position in the middle of the base, a slide is provided in each chute, and an arc-shaped clamping plate is fixedly connected to the end of each slide close to the middle of the base; a guide rod is provided on the upper surface of each slide; A turntable is provided above the base, the middle of the turntable is through-set, and a plurality of arc-shaped extrusion holes are provided in a circumferential array on the turntable, and the extrusion holes are sleeved on the outer ring of the guide rod; A driving assembly capable of driving the turntable to deflect is provided between the turntable and the base plate; a plurality of notches are provided in a circumferential array on the outer ring of the turntable; the driving assembly includes an arc-shaped rack arranged in the notch, the rack is engaged with a gear, and the gear is fixed to a motor arranged on the outer ring of the base plate.

[0008] Preferably, the base includes a bottom plate and a top plate, the top plate is fixed to the bottom plate by bolts, a sliding layer is reserved between the top plate and the bottom plate, a ring-shaped tension spring is provided in the sliding layer, and the tension spring is squeezed on the outer ring of the guide rod.

[0009] Preferably, a limiting ring is provided on the lower surface of the turntable, and the limiting ring is arranged close to the middle position of the turntable; an annular groove adapted to the limiting ring is provided on the bottom plate, and the limiting ring is rotatably connected in the annular groove.

[0010] Preferably, each of the guide rods includes a bottom block, which is fixed to the slide plate, and an anti-slip groove is provided on the outer ring of the bottom block at a position opposite to the tension spring, and the tension spring is embedded in the anti-slip groove; A groove is provided on the upper end surface of the bottom block, a vertical rod is provided in the groove, the lower end of the vertical rod is elastically connected to the groove through a spring, and an anti-slip plate is fixed to the upper end of the vertical rod, which is squeezed on the upper surface of the turntable.

[0011] Preferably, a bearing is sleeved on the outer ring of the vertical rod, and the bearing is attached to the inner surface of the extrusion hole and rotates; A plurality of ball grooves are provided on the lower surface of the anti-slip plate, and a ball is rotatably connected in each ball groove.

[0012] Preferably, each of the clamping plates is provided with an arc-shaped auxiliary plate, a card block is symmetrically provided on the back of the auxiliary plate, and a card slot adapted to the card block is provided on each extrusion plate.

[0013] Preferably, a row of rolling grooves is provided on both sides of each of the slide plates, and balls are rotatably connected in each row of rolling grooves.

[0014] Preferably, the driving assembly includes an electric push rod, the output end of the electric push rod is connected to a connecting ear, the connecting ear is rotatably connected to an extension body provided on the outer ring of the turntable, and the rear end of the cylinder of the electric push rod is rotatably connected to a support rod, which is fixed to the base.

[0015] Preferably, a motor is provided between the output end of the electric push rod and the connecting ear, the end shell of the motor is fixedly connected to the connecting ear, the output shaft of the motor points to the output end of the electric push rod, and the output shaft of the motor is fixedly connected to a cylindrical shell, the end face of the shell is rotatably connected to the output end face of the electric push rod, and a limiting plate is radially fixed on the outer ring of the shell; a plurality of groups of limiting grooves are arranged in a circumferential array on the outer ring of the base.

[0016] Preferably, the motor is a dual-shaft motor, one of the output shafts of the motor is fixed to the housing, and the other output shaft of the motor is supported on the connecting ear.

[0017] The present invention is beneficial in that: 1. In the present invention, the designed turntable synchronously squeezes multiple guide rods, and the multiple guide rods synchronously drive the clamping plates to clamp the crystal and provide support for the entire crystal. During the crystal growth process, the swing generated during the crystal growth process can be reduced, thereby improving the stability of crystal growth and ensuring smooth crystal growth.

[0018] 2. In the present invention, by setting a ring-shaped tension spring, the tension spring will continuously squeeze all the guide rods. When the crystal is clamped, all the clamping plates can tend to move synchronously and squeeze on the crystal surface at the same time, avoiding the lagging movement of one or more clamping plates, causing the crystal clamping to tilt sideways, affecting the normal crystal pulling growth. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A perspective view of the single crystal clamping device of the middle zone melting furnace of the present invention; Figure 2 A top view of the single crystal clamping device for the middle zone melting furnace of the present invention; Figure 3 A three-dimensional diagram of the base in the present invention; Figure 4 This is a three-dimensional diagram of the cooperation between the bottom plate and the skateboard of the present invention; Figure 5 is a top view of the bottom plate of the present invention; Figure 6 is a three-dimensional diagram of the bottom plate of the present invention; Figure 7 This is a first-perspective stereoscopic view of the turntable of the present invention; Figure 8 A second perspective perspective view of the turntable of the present invention; Figure 9 is a three-dimensional diagram of the top plate of the present invention; Figure 10 A perspective view of the guide rod of the present invention; Figure 11 This is a three-dimensional diagram of the coordination between the vertical rod and the spring in the present invention; Figure 12 A three-dimensional diagram of the cooperation between the guide rod and the slide plate in the present invention; Figure 13 A three-dimensional diagram of the auxiliary plate of the present invention; Figure 14 This is a three-dimensional diagram of the cooperation between the electric push rod and the turntable in the present invention; Figure 15 This is a three-dimensional diagram of the cooperation between the electric push rod and the support rod in the present invention; Figure 16 Schematic diagram of the cooperation between the electric push rod and the housing in the present invention.

[0020] In the figure: 1. base; 2. slide; 3. slide plate; 4. clamping plate; 5. guide rod; 6. turntable; 7. extrusion hole; 8. rack; 9. gear; 10. motor; 11. bottom plate; 12. top plate; 13. sliding layer; 14. tension spring; 15. limiting ring; 16. groove; 17. bottom block; 18. anti-slip groove; 19. vertical rod; 20. spring; 21. anti-slip plate; 22. bearing; 23. ball; 24. auxiliary plate; 25. block; 26. slot; 27. ball; 28. electric push rod; 29. connecting ear; 30. extension body; 31. support rod; 32. motor; 33. housing; 34. limiting plate; 35. limiting groove. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods. Example 1

[0022] Reference Figure 1 - Figure 13 A zone furnace single crystal clamping device includes a base 1, the base 1 is provided with a through-hole in the middle, a plurality of chute grooves 2 are provided in a circumferential array on the upper surface of the base 1, each chute 2 radially extends through the base 1 to the through-hole position in the middle of the base 1, a slide 3 is provided in each chute 2, and an arc-shaped clamping plate 4 is fixedly connected to the end of each slide 3 near the middle of the base 1; a guide rod 5 is provided on the upper surface of each slide 3; A turntable 6 is provided above the base 1. The turntable 6 is provided with a through-hole in the middle. A plurality of arc-shaped extrusion holes 7 are provided in a circumferential array on the turntable 6. The extrusion holes 7 are sleeved on the outer ring of the guide rod 5. A drive assembly capable of driving the turntable 6 to deflect is provided between the turntable 6 and the base plate 11; a plurality of notches are provided in a circumferential array on the outer ring of the turntable 6; the drive assembly includes an arc-shaped rack 8 disposed in the notches, the rack 8 meshing with a gear 9, and the gear 9 is fixedly connected to a motor 10 provided on the outer ring of the base plate 11; The base 1 provided in the first embodiment is fixed to the top of the outer shaft of the lower shaft in the zone furnace. The seed crystal is fixed to the top of the inner shaft of the lower shaft of the zone furnace by a seed crystal holder, and passes through the center of the base 1 and the turntable 6 and rises to the starting height of crystal pulling. After the crystal pulling starts, the inner shaft and the outer shaft of the lower shaft of the zone furnace rotate synchronously, and the inner shaft slowly descends as the crystal grows, while the height of the outer shaft remains unchanged. At the beginning of the crystal pulling, the growing crystal is supported by the seed crystal. When the crystal diameter grows to a certain value, the outer shaft and the inner shaft of the lower shaft begin to descend synchronously, and the single crystal clamping device is operated at this time, as follows: The motor 10 is driven, and the motor 10 drives the gear 9 to rotate. The gear 9 is meshed with the rack 8 and rubs the turntable 6 to rotate. The extrusion hole 7 on the turntable 6 squeezes the guide rod 5. The guide rod 5 drives the slide 3 to move along the slide groove 2, and the slide 3 pushes the clamping plate 4 close to the crystal and clamps it on the surface of the crystal. The clamping plate 4 clamps the crystal and can support the crystal. The linear motion of the slide 3 and the clamping plate 4 is achieved through the rotation of the turntable 6. After the rotation of the turntable 6 is paused, the clamping plate 4 can continue to and stably clamp the crystal. The crystal is clamped by a single crystal clamping device, which provides support for the entire crystal. This can reduce the swing generated during the crystal growth process, thereby improving the stability of crystal growth and ensuring smooth crystal growth. Considering that the operating environment temperature of the motor 10 is relatively high, some high-temperature resistant motors 10 can be used. At the same time, some cooling structures can be made on the high-temperature resistant motors 10, such as setting a water cooling channel in the outer shell wall of the motor 10, and continuously injecting coolant into the water cooling channel through a liquid pump to ensure the stability of the motor 10.

[0023] Reference Figure 1 - Figure 13 The base 1 includes a bottom plate 11 and a top plate 12. The top plate 12 is fixed to the bottom plate 11 by bolts. A sliding layer 13 is reserved between the top plate 12 and the bottom plate 11. A ring-shaped tension spring 14 is provided in the sliding layer 13. The tension spring 14 is squeezed on the outer ring of the guide rod 5. By setting a ring-shaped tension spring 14, the tension spring 14 will continuously squeeze all the guide rods 5, so that all the guide rods 5 are squeezed on the inner wall of the corresponding extrusion hole 7. At the same time, the slide plate 3 and the clamping plate 4 are in a taut state. When the turntable 6 rotates, the extrusion hole 7 can directly and effectively squeeze the guide rod 5. At the same time, the tension spring 14 shrinks or exaggerates in the sliding layer 13 as the guide rod 5 moves, so that all the guide rods 5 move synchronously; when the clamping action is performed on the crystal, all the clamping plates 4 can tend to move synchronously and squeeze on the crystal surface at the same time, avoiding the movement lag of one or more clamping plates 4, causing the crystal clamping to be skewed, affecting the normal crystal pulling growth of the crystal.

[0024] Reference Figure 1 - Figure 13 , the lower surface of the turntable 6 is provided with a limiting ring 15, and the limiting ring 15 is arranged close to the middle position of the turntable 6; the bottom plate 11 is provided with an annular groove 16 adapted to the limiting ring 15, and the limiting ring 15 is rotatably connected in the annular groove 16; The tension spring 14 squeezes the guide rod 5, which is a synchronous constraint on the movement of the clamping plate 4, and the limiting ring 15 is rotatably connected in the annular groove 16, so that the turntable 6 can rotate stably and is connected to the base plate 11, which constrains the eccentricity of the rotation of the turntable 6, so that the axis of the turntable 6 and the axis of the base 1 always tend to be in the same line, so that the rotation of the turntable 6 can directly promote the linear motion of the clamping plate 4, improve the linear movement stability of the clamping plate 4, and further promote all clamping plates 4 to tend to the state of synchronous movement.

[0025] Reference Figure 1 - Figure 13 Each of the guide rods 5 includes a bottom block 17, which is fixed to the slide plate 3. An anti-slip groove 18 is provided on the outer ring of the bottom block 17 at a position opposite to the tension spring 14, and the tension spring 14 is embedded in the anti-slip groove 18; A groove is formed on the upper end surface of the bottom block 17, in which a vertical rod 19 is provided. The lower end of the vertical rod 19 is elastically connected to the groove by a spring 20, and an anti-slip plate 21 is fixed to the upper end of the vertical rod 19. The anti-slip plate 21 is squeezed on the upper surface of the turntable 6; The anti-slip grooves 18 on all the bottom blocks 17 are evenly located at the same height, and the outer ring of the tension spring 14 is embedded in the anti-slip groove 18. At this time, any part of the tension spring 14 is at the same height, and the tightening force of the tension spring 14 can act evenly on each base 1. Each bottom block 17 is also in the same execution state. At the same time, the tension spring 14 is squeezed on the inner wall of the anti-slip groove 18, increasing the extrusion contact surface between the bottom block 17 and the tension spring 14, effectively protecting the contact position between the tension spring 14 and the bottom block 17, and avoiding extrusion deformation of the tension spring 14; An anti-slip plate 21 is provided at the upper end of the vertical rod 19. The elasticity of the spring 20 can squeeze the anti-slip plate onto the upper surface of the turntable 6. The anti-slip plate 21 restrains the turning of the turntable 6 in the axial direction, so that the turntable 6 can be stably attached to the base 1, thereby improving the integrity of the crystal clamping device and the stability of the execution action.

[0026] Reference Figure 1 - Figure 13 , a bearing 22 is sleeved on the outer ring of the vertical rod 19, and the bearing 22 is attached to the inner surface of the extrusion hole 7 and rotates; The lower surface of the anti-slip plate 21 is provided with a plurality of ball grooves, each of which is rotatably connected to a ball 23; A bearing 22 is provided on the vertical rod 19. The outer ring of the bearing 22 is attached to the inner wall of the extrusion hole 7 and rotates, converting the sliding friction between the vertical rod 19 and the extrusion hole 7 into rolling friction between the bearing 22 and the extrusion hole 7, thereby reducing the relative movement resistance between the extrusion hole 7 and the guide rod 5, improving the smoothness and synchronization effect of converting the rotation of the turntable 6 into the linear motion of the slide 3, and further improving the stability and precision of the crystal clamping device. A sphere 23 is provided on the lower surface of the anti-slip plate 21 to convert the sliding friction between the anti-slip plate 21 and the turntable 6 into rolling friction between the sphere 23 bearing 22 and the turntable 6, thereby reducing the rotational resistance of the anti-slip plate 21 and the turntable 6 and further improving the rotation stability and smoothness of the turntable 6.

[0027] Reference Figure 1 - Figure 13 , each of the clamping plates 4 is provided with an arc-shaped auxiliary plate 24, the back of the auxiliary plate 24 is symmetrically provided with a card block 25, and each extrusion plate is provided with a card slot 26 adapted to the card block 25; The crystal diameter has multiple sizes, and the extrusion movement of the extrusion hole 7 on the guide rod 5 is limited, that is, the diameter of the circle enclosed by all the clamping plates 4 moving inward is limited. For the case where the diameter of the crystal to be pulled is smaller than the diameter of the circle enclosed by the clamping plates 4, in the first embodiment, a replaceable auxiliary plate 24 is provided on the clamping plate 4, and the diameter of the circle enclosed by the clamping plate 4 is further reduced by the auxiliary plate 24. The auxiliary plate 24 has a variety of thicknesses. According to the diameter of the crystal to be pulled, an auxiliary plate 24 of matching thickness is selected, the block 25 is embedded in the slot 26, and the back of the auxiliary plate 24 is attached to the surface of the extrusion plate.

[0028] Reference Figure 1 - Figure 13 , each of the two sides of the slide 3 is provided with a row of rolling grooves, and each row of rolling grooves is rotatably connected with a ball 27; Ball bearings 27 are provided on both sides of the slide 3 to convert the sliding friction between the slide 3 and the slide groove 2 into rolling friction between the ball bearings 27 and the slide groove 2, thereby reducing the relative movement resistance between the slide 3 and the slide groove 2 and improving the smoothness of the movement of the slide 3. This is also one of the specific ways to improve the stability and precision of the execution of the crystal clamping device. Example 2

[0029] Reference Figure 14 - Figure 16 , compared with Example 1, as another embodiment of the present invention: the driving assembly includes an electric push rod 28, the output end of the electric push rod 28 is connected to a connecting ear 29, the connecting ear 29 is rotatably connected to an extension body 30 provided on the outer ring of the turntable 6, and the rear end of the cylinder of the electric push rod 28 is rotatably connected to a support rod 31, and the support rod 31 is fixed to the base 1; In the second embodiment, the power for driving the turntable 6 to rotate is directly provided by the electric push rod 28. The electric push rod 28 pushes the turntable 6 to rotate. At the same time, the extrusion hole 7 on the turntable 6 squeezes the guide rod 5. The guide rod 5 drives the slide 3 to move along the slide 2. The slide 3 pushes the clamping plate 4 close to the crystal and clamps it on the surface of the crystal. The clamping plate 4 clamps the crystal. The turntable 6 is driven to rotate by the electric push rod 28. Compared with the turntable 6 driven by the motor 10 in cooperation with the gear 9 engaging the rack 8, the electric push rod 28 can flexibly adjust the power according to actual needs when pushing the turntable 6 to rotate, and the power supply can be stopped after the clamping plate 4 reaches the required position, that is, the power supply can be stopped after the clamping plate 4 clamps the crystal. Therefore, it has a better energy-saving effect and does not require continuous power supply to maintain the output of the electric push rod 28. The motor 10 drive requires continuous power supply or there is transmission loss, and its energy-saving effect is not as good as the electric push rod 28.

[0030] Reference Figure 14 - Figure 16 A motor 32 is provided between the output end of the electric push rod 28 and the connecting ear 29. The end shell of the motor 32 is fixedly connected to the connecting ear 29. The output shaft of the motor 32 points to the output end of the electric push rod 28, and the output shaft of the motor 32 is fixedly connected to a cylindrical shell 33. The end face of the shell 33 is rotatably connected to the output end face of the electric push rod 28. A limit plate 34 is radially fixed to the outer ring of the shell 33. A plurality of limit grooves 35 are arranged in a circumferential array on the outer ring of the base 1. After the electric push rod 28 pushes the turntable 6 to rotate into place, the drive motor 32 rotates, and the motor 32 drives the limit plate 34 to deflect through the housing 33, and the limit plate 34 deflects into the limit groove 35. At this time, the rotation of the turntable 6 and the output end of the electric push rod 28 are constrained, so that the turntable 6 is stable and motionless, ensuring the continuous and stable squeezing of the turntable 6 on the guide rod 5, thereby ensuring the stable clamping of the crystal by the clamping plate 4.

[0031] Reference Figure 14 - Figure 16 The motor 32 is a dual-shaft motor 10, one of the output shafts of the motor 32 is fixed to the housing 33, and the other output shaft of the motor 32 is supported on the connecting ear 29; The output end of the electric push rod 28 squeezes the shell 33, and the shell 33 squeezes one of the output shafts of the motor 32. The output shaft of the other end of the motor 32 is pressed against the connecting ear 29. This design can directly apply the thrust output by the electric push rod 28 to the connecting ear 29, thereby protecting the motor 32 and preventing the thrust output by the electric push rod 28 from acting on the connecting ear 29 through the outer shell of the motor 32, which would cause extrusion damage to the outer shell of the motor 32.

[0032] Working principle: The base 1 is fixed on the top of the outer shaft of the lower shaft in the zone furnace. The seed crystal is fixed to the top of the inner shaft of the lower shaft of the zone furnace through the seed crystal holder, and passes through the base 1 and the center of the turntable 6 to rise to the starting height of crystal pulling; after the crystal pulling starts, the inner and outer shafts of the lower shaft of the zone furnace rotate synchronously, and the inner shaft slowly descends as the crystal grows, while the height of the outer shaft remains unchanged; at the beginning of crystal pulling, the growing crystal is supported by the seed crystal. When the crystal diameter grows to a certain value, the outer and inner shafts of the lower shaft begin to descend synchronously, and the single crystal clamping device starts to operate, as follows: The motor 10 is driven, and the motor 10 drives the gear 9 to rotate. The gear 9 is meshed with the rack 8 and rubs the turntable 6 to rotate. The extrusion hole 7 on the turntable 6 squeezes the guide rod 5. The guide rod 5 drives the slide 3 to move along the slide groove 2, and the slide 3 pushes the clamping plate 4 close to the crystal and clamps it on the surface of the crystal. The clamping plate 4 clamps the crystal and can support the crystal. The linear motion of the slide 3 and the clamping plate 4 is achieved through the rotation of the turntable 6. After the rotation of the turntable 6 is paused, the clamping plate 4 can continue to and stably clamp the crystal. The crystal is clamped by a single crystal clamping device, which provides support for the entire crystal. During the crystal growth process, the swing generated during the crystal growth process can be reduced, thereby improving the stability of crystal growth and ensuring smooth crystal growth.

[0033] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the foregoing embodiments. The foregoing embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A zone furnace single crystal clamping device, characterized by: The base comprises a base, a through-hole is provided in the middle of the base, a plurality of slide grooves are provided in a circumferential array on the upper surface of the base, each slide groove extends radially through the base to a through-hole position in the middle of the base, a slide is provided in each slide groove, and an arc-shaped clamping plate is fixedly connected to the end of each slide plate near the middle of the base; a guide rod is provided on the upper surface of each slide plate; A turntable is provided above the base, the middle of the turntable is through-set, and a plurality of arc-shaped extrusion holes are provided in a circumferential array on the turntable, and the extrusion holes are sleeved on the outer ring of the guide rod; A driving assembly capable of driving the turntable to deflect is provided between the turntable and the base plate; a plurality of notches are provided in a circumferential array on the outer ring of the turntable; the driving assembly includes an arc-shaped rack arranged in the notch, the rack is engaged with a gear, and the gear is fixed to a motor arranged on the outer ring of the base plate.

2. The single crystal clamping device for a zone melting furnace according to claim 1, characterized in that: The base includes a bottom plate and a top plate, the top plate is fixed to the bottom plate by bolts, a sliding layer is reserved between the top plate and the bottom plate, a ring-shaped tension spring is arranged in the sliding layer, and the tension spring is squeezed on the outer ring of the guide rod.

3. The single crystal clamping device for a zone melting furnace according to claim 1, characterized in that: A limiting ring is provided on the lower surface of the turntable, and the limiting ring is arranged close to the middle position of the turntable; an annular groove adapted to the limiting ring is provided on the bottom plate, and the limiting ring is rotatably connected in the annular groove.

4. The single crystal clamping device for a zone melting furnace according to claim 2, characterized in that: Each of the guide rods includes a bottom block fixedly connected to the slide plate, an anti-slip groove is provided on the outer ring of the bottom block at a position opposite to the tension spring, and the tension spring is embedded in the anti-slip groove; A groove is provided on the upper end surface of the bottom block, a vertical rod is provided in the groove, the lower end of the vertical rod is elastically connected to the groove through a spring, and an anti-slip plate is fixed to the upper end of the vertical rod, which is squeezed on the upper surface of the turntable.

5. The single crystal clamping device for a zone melting furnace according to claim 4, characterized in that: A bearing is sleeved on the outer ring of the vertical rod, and the bearing is attached to the inner surface of the extrusion hole and rotates; A plurality of ball grooves are provided on the lower surface of the anti-slip plate, and a ball is rotatably connected in each ball groove.

6. The single crystal clamping device for a zone melting furnace according to claim 1, characterized in that: Each of the clamping plates is provided with an arc-shaped auxiliary plate, and a card block is symmetrically provided on the back of the auxiliary plate. A card slot adapted to the card block is provided on each extrusion plate.

7. The single crystal clamping device for a zone melting furnace according to claim 4, characterized in that: A row of rolling grooves is respectively provided on both sides of each of the slide plates, and balls are rotatably connected in each row of rolling grooves.

8. The single crystal clamping device for a zone melting furnace according to claim 1, characterized in that: The driving assembly includes an electric push rod, the output end of the electric push rod is connected to a connecting ear, the connecting ear is rotatably connected to an extension body set on the outer ring of the turntable, the rear end of the cylinder of the electric push rod is rotatably connected to a support rod, and the support rod is fixed to the base.

9. The single crystal clamping device for a zone melting furnace according to claim 8, characterized in that: A motor is provided between the output end of the electric push rod and the connecting ear, the end shell of the motor is fixedly connected to the connecting ear, the output shaft of the motor points to the output end of the electric push rod, and the output shaft of the motor is fixedly connected to a cylindrical shell, the end face of the shell is rotatably connected to the output end face of the electric push rod, and a limit plate is radially fixed to the outer ring of the shell; a plurality of limit grooves are arranged in a circumferential array on the outer ring of the base.

10. The single crystal clamping device for a zone melting furnace according to claim 9, characterized in that: The motor is a dual-shaft motor, one of the output shafts of the motor is fixed to the housing, and the other output shaft of the motor is supported on the connecting ear.

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