Imaging system for scanning surface
Through the design of the imaging system, the coordination of the camera array and the light source system is used to realize efficient scanning and defect recognition of the screen surface of the display device, solving the problem of difficult to identify screen surface defects in the prior art, and improving the recognition efficiency and accuracy.
Patent Information
- Application Number
- CN202280102218.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2022-12-12
- Publication Date
- 2025-08-05
AI Technical Summary
Prior art When testing the screen of a display device, it is difficult to efficiently identify defects on the screen surface, such as convex and recesses.
An imaging system is adopted, including M cameras and light source systems. The cameras are arranged in an N row P array, and the translation direction of the layer is not parallel to the row or column. The camera has a discrete field of view on the same best fit plane, performs dark field imaging, and combines the change of the light source color to measure feature height and analyze flatness.
It realizes efficient scanning and defect recognition of the screen surface of the display device, and can continuously scan the entire surface, measure feature height and analyze flatness, improving the accuracy and efficiency of defect recognition.
Smart Images
Figure CN120435643A_ABST
Abstract
Description
[Background Technology]
[0001] Testing a screen of a display device may involve capturing multiple images of the outer surface of the screen and then analyzing the captured images to identify defects (eg, protrusions and depressions) on the outer surface of the screen. [Summary of the invention]
[0002] Disclosed herein is a device comprising an imaging system configured to scan a surface of a layer as the layer translates relative to the imaging system. The imaging system comprises (A) M cameras and (B) a light source system, wherein M is an integer greater than 1. The M cameras are arranged in an array of N rows and P columns, wherein N and P are positive integers greater than 1. The direction of the translation of the layer is neither parallel to the direction of the N rows nor to the direction of the P columns. Each of the M cameras has a field of view (FOV) area located on the same best-fit plane of the surface. The imaging system is configured to perform dark-field imaging on the surface of the layer. All field of view areas of the M cameras on the best-fit plane are discrete from each other.
[0003] In one aspect, the imaging system scans the entire surface of the layer at one time.
[0004] In one aspect, no photons travel directly from the light source system to the objective lens of any of the M cameras.
[0005] In one aspect, each of the M cameras is a microscope.
[0006] In one aspect, the direction of the N rows is not perpendicular to the direction of the P columns.
[0007] On the one hand, the straight line on the best fit plane is perpendicular to the translation direction of the scan, the orthogonal projections of all points of the surface on the straight line form a line segment on the straight line, and the orthogonal projections of the field of view areas of the M cameras on the straight line together cover the entire line segment.
[0008] In one aspect, the light source system is configured to change a color of light from the light source system, thereby changing a focal length of the M cameras.
[0009] In one aspect, when the light from the light source system is green, the focal points of the M cameras are located on the best fit plane of the surface.
[0010] In one aspect, the apparatus is configured to determine a height of the feature on the surface of the layer based on multiple images of the feature taken using different colors of light from the light source system, and to measure the height of the feature in a direction perpendicular to the best fit plane.
[0011] In one aspect, the apparatus further comprises a camera other than the M cameras configured to capture one or more images of the surface of the layer, and the apparatus is configured to analyze the flatness of the surface based on the one or more images.
[0012] In one aspect, the translation of the layer is continuous and each image captured by the imaging system during the scan involves (A) a pulse of light from the light source system or (B) a continuous light beam from the light source system in combination with a mechanical shutter or an electronic shutter in one of the M cameras capturing each image.
[0013] In one aspect, the light source system includes M light sources, and the M light sources are used to illuminate the M field of view areas of the M cameras respectively.
[0014] Also disclosed herein is a method comprising scanning a surface of a layer using an imaging system by translating the layer relative to the imaging system. The imaging system comprises (A) M cameras and (B) a light source system, wherein M is an integer greater than 1. The M cameras are arranged in an array of N rows and P columns, wherein N and P are positive integers greater than 1. The direction of the translation of the layer is neither parallel to the direction of the N rows nor to the direction of the P columns. Each of the M cameras has a field of view (FOV) area located on the same best-fit plane of the surface. The imaging system performs dark-field imaging on the surface of the layer. All field of view areas of the M cameras on the best-fit plane are discrete from each other.
[0015] In one aspect, the imaging system scans the entire surface of the layer at one time.
[0016] In one aspect, no photons travel directly from the light source system to the objective lens of any of the M cameras.
[0017] In one aspect, the layer is a screen of a display device.
[0018] In one aspect, each of the M cameras is a microscope.
[0019] In one aspect, the direction of the N rows is not perpendicular to the direction of the P columns.
[0020] On the one hand, the straight line on the best fit plane is perpendicular to the translation direction of the scan, the orthogonal projections of all points of the surface on the straight line form a line segment on the straight line, and the orthogonal projections of the field of view areas of the M cameras on the straight line together cover the entire line segment.
[0021] In one aspect, the scanning includes changing the color of light from the light source system, thereby changing the focus of the M cameras.
[0022] In one aspect, when the light from the light source system is green, the focal points of the M cameras are located on the best fit plane of the surface.
[0023] In one aspect, the method further comprises determining a height of the feature on the surface of the layer based on a plurality of images of the feature taken using different colors of light from the light source system, wherein the height of the feature is measured perpendicular to the best fit plane.
[0024] In one aspect, the method further includes capturing one or more images of the surface of the layer using a camera other than the M cameras, and analyzing the flatness of the surface based on the one or more images.
[0025] In one aspect, the translation of the layer is continuous, and each image captured by the imaging system during the scan involves (A) a light pulse from the light source system or (B) a continuous light beam from the light source system in combination with a mechanical shutter or an electronic shutter in one of the M cameras capturing each image.
[0026] In one aspect, the light source system includes M light sources, and the M light sources are used to illuminate the M field of view areas of the M cameras respectively.
Brief Description of the Drawings
[0027] Figure 1 Schematically shows a top view of an imaging system according to an embodiment.
[0028] Figure 2 A perspective view of an imaging system according to an embodiment is schematically shown.
[0029] Figure 3 A flow chart outlining the operation of an imaging system according to an embodiment is shown. [Specific implementation method]
[0030] Imaging system
[0031] Figure 1A top view of an imaging system 100 according to an embodiment is schematically shown. In one embodiment, the imaging system 100 may include (A) six cameras 120a1, 120a2, 120a3, 120b1, 120b2, and 120b3, and (B) a light source system 127Lss. In one embodiment, the light source system 127Lss may include six light sources 127a1, 127a2, 127a3, 127b1, 127b2, and 127b3 corresponding to the six cameras 120a1, 120a2, 120a3, 120b1, 120b2, and 120b3, respectively. Figure 2 Schematically shows a Figure 1 For simplicity, the imaging system 100 is shown in FIG. Figure 2 Only the camera 120a3 and the light source 127a3 among the six cameras 120 and the six light sources 127 are shown.
[0032] Surface Scan
[0033] In one embodiment, reference Figure 1 and Figure 2 , imaging system 100 can scan surface 195 of layer 190. Specifically, in one embodiment, imaging system 100 can scan surface 195 by capturing images of surface 195 while layer 190 is translated relative to imaging system 100 along direction 193. Note that for the purpose of scanning surface 195, translating layer 190 relative to imaging system 100 is the same as translating imaging system 100 relative to layer 190.
[0034] In one embodiment, reference Figure 1 and Figure 2 , the imaging system 100 can scan the entire surface 195 of the layer 190 at one time. In other words, when the layer 190 is Figure 1 As the illustrated position is translated to the left along direction 193 , imaging system 100 captures multiple images of surface 195 such that every point of surface 195 is within at least one of the multiple images captured.
[0035] Camera array
[0036] In one embodiment, reference Figure 1 and Figure 2 , 6 cameras 120 can be as follows Figure 1As shown, the cameras are arranged in an array of 2 rows and 3 columns. Specifically, the first row may include cameras 120a1, 120a2, and 120a3; the second row may include cameras 120b1, 120b2, and 120b3. The first column may include cameras 120a1 and 120b1; the second column may include cameras 120a2 and 120b2; and the third column may include cameras 120a3 and 120b3.
[0037] In one embodiment, the direction 193 ( Figure 1 ) may be neither parallel to the row direction 129r nor parallel to the column direction 129c. In one embodiment, the row direction 129r may not be perpendicular to the column direction 129c.
[0038] Field of view
[0039] In one embodiment, reference Figure 1 and Figure 2 , each camera 120 may have a field of view (FOV) area 125 located on the same best-fit plane 195bf of the surface 195. The FOV area 125 of a camera 120 is the area on the best-fit plane 195bf that is within the field of view of the camera 120. Specifically, in one embodiment, the six cameras 120a1, 120a2, 120a3, 120b1, 120b2, and 120b3 may have six FOV areas 125a1, 125a2, 125a3, 125b1, 125b2, and 125b3, respectively, located on the best-fit plane 195bf.
[0040] In one embodiment, the best fit plane 195bf may be the best fit plane (eg, least squares) of all points of the surface 195 .
[0041] In one embodiment, all six field of view regions 125 (i.e., 125a1, 125a2, 125a3, 125b1, 125b2, and 125b3) of the six cameras 120 on the best fit plane 195bf may be discrete from one another, as shown in FIG. Figure 1 This may be because the six cameras 120 have a larger coverage area than their respective field of view areas 125, as shown in FIG. Figure 1 Shown schematically.
[0042] In one embodiment, for imaging purposes, six light sources 127a1, 127a2, 127a3, 127b1, 127b2, and 127b3 can illuminate six field of view regions 125a1, 125a2, 125a3, 125b1, 125b2, and 125b3, respectively. Light source system 127Lss can have other arrangements to illuminate the six field of view regions. For example, light source system 127Lss can have a single light source, or the six light sources 127a1, 127a2, 127a3, 127b1, 127b2, and 127b3 can be located within the six cameras 120.
[0043] Darkfield microscopy
[0044] In one embodiment, reference Figure 1 and Figure 2 , imaging system 100 can perform dark field imaging of surface 195 while scanning surface 195. In other words, if the six field of view areas 125a1, 125a2, 125a3, 125b1, 125b2, and 125b3 are six plane mirrors facing imaging system 100, each camera 120 will not see any light source 127 in its respective plane mirror. If there is a concave or convex portion in the field of view area of a camera, the concave or convex portion can scatter some light from the light source corresponding to that camera into that camera.
[0045] Flowchart outlining the operation of the imaging system
[0046] Figure 3 shows an overview according to an embodiment Figure 1 and Figure 2 Flowchart 300 of the operation of the imaging system 100. Specifically, in step 310, the operation may include scanning the surface of the layer using the imaging system by translating the layer relative to the imaging system. For example, in the above embodiment, reference is made to Figure 1 and Figure 2 , imaging system 100 scans surface 195 of layer 190 by translating layer 190 relative to imaging system 100 .
[0047] In addition, in step 310, the imaging system includes (A) M cameras and (B) a light source system, where M is an integer greater than 1. For example, in the above embodiment, referring to Figure 1 and Figure 2 , the imaging system 100 includes (A) six cameras 120a1, 120a2, 120a3, 120b1, 120b2 and 120b3 and (B) a light source system 127Lss (here, M=6).
[0048] In addition, in step 310, M cameras are arranged into an array of N rows and P columns, wherein N and P are positive integers greater than 1; the direction of the translation of the layer is neither parallel to the direction of N rows nor parallel to the direction of P columns. For example, in the above embodiment, referring to Figure 1 and Figure 2 , the six cameras 120 are arranged in an array of 2 rows and 3 columns (here, N=2, P=3); and the translation direction 193 of the layer 190 is neither parallel to the direction 129r of the 2 rows nor parallel to the direction 129c of the 3 columns.
[0049] In addition, in step 310, each of the M cameras has a field of view (FOV) region located on the same best-fit plane of the surface; the imaging system performs dark field imaging on the surface of the layer; and all the FOV regions of the M cameras on the best-fit plane are discrete from each other. For example, in the above embodiment, referring to Figure 1 and Figure 2 , each camera 120 has a field of view (FOV) area 125 located on the same best fit plane 195bf of surface 195. Imaging system 100 performs dark field imaging of surface 195 of layer 190. All six FOV areas 125 of the six cameras 120 on best fit plane 195bf are discrete from one another.
[0050] Other embodiments
[0051] The camera is not facing any light source
[0052] In one embodiment, reference Figure 1 and Figure 2 , no photon can travel directly from light source system 127Lss to the objective lens of any camera 120. In other words, no camera 120 is directly facing any light source 127, or there is no line of sight between camera 120 and any light source 127. Note that if a photon from light source system 127Lss is scattered or reflected before traveling to the objective lens of camera 120, the photon is not considered to have traveled directly to the objective lens of camera 120.
[0053] Scan the entire surface in detail
[0054] In one embodiment, reference Figure 1 , there may be a straight line 193p on the best fit plane 195bf that is perpendicular to the translation direction 193 of the layer 190, such that the orthogonal projections of all points of the surface 195 on the straight line 193p form a line segment AB on the straight line 193p, and the orthogonal projections of all the field of view areas 125 of all the cameras 120 on the straight line 193p together cover the entire line segment AB, as shown in FIG. Figure 1 shown.
[0055] Display the device's screen
[0056] In one embodiment, reference Figure 1 and Figure 2 , layer 190 may be a screen of a display device (not shown), such as a screen of a television or a screen of a smartphone.
[0057] The camera is a microscope
[0058] In one embodiment, reference Figure 1 and Figure 2 , each camera 120 can be a microscope.
[0059] Focal length of the camera
[0060] In one embodiment, reference Figure 1 and Figure 2 During scanning of the surface 195 of the layer 190 , the color of the light from the light source system 127Lss may be changed, thereby changing the focal length of the six cameras 120 (not shown).
[0061] In one embodiment, when the light from light source system 127Lss is green, the focal points (not shown) of the six cameras 120 may be located on the best fit plane 195bf of the surface 195 .
[0062] Determine the height of features on a surface
[0063] In one embodiment, reference Figure 1 and Figure 2 , the height of a feature (e.g., a concave or convex portion) on surface 195 of layer 190 can be determined based on multiple images of the feature captured using different colors of light from light source system 127Lss. Here, the height of the feature can be measured in a direction perpendicular to best fit plane 195bf. In one example, when the light is red, a concave portion on surface 195 can be the focus, while when the light is blue, a convex portion on surface 195 can be the focus.
[0064] Analyze surface flatness
[0065] In one embodiment, reference Figure 1 and Figure 2 , a camera (not shown) other than the six cameras 120 can be used to capture one or more images of the entire surface 195 of layer 190; then, the flatness of surface 195 can be analyzed based on the one or more images of surface 195.
[0066] More information on translation of layers and light systems
[0067] In one embodiment, reference Figure 1 and Figure 2 , the above-mentioned translation of layer 190 relative to imaging system 100 can be continuous (i.e., uninterrupted); each image captured by imaging system 100 during the scanning of surface 195 can involve (A) a light pulse from light source system 127Lss or (B) a continuous light beam from light source system 127Lss in combination with a mechanical shutter or electronic shutter (not shown) in camera 120 that captures each image.
[0068] Alternative Embodiments
[0069] In the above embodiment, referring to Figure 1 and Figure 2 , each light source 127 serves a camera 120. For example, light source 127a3 serves camera 120a3. Alternatively, a light source 127 can serve multiple cameras 120. For example, a single light source 127 can serve all six cameras 120. For another example, two light sources 127 can serve six cameras 120 (e.g., the first light source 127 serves three cameras 120a1, 120b1, and 120b2; the second light source 127 serves three cameras 120a2, 120a3, and 120b3). Note that "serving" refers to providing illumination for imaging purposes.
[0070] Although various aspects and embodiments have been disclosed herein, other aspects and embodiments will be apparent to those skilled in the art. The various aspects and embodiments disclosed herein are for purposes of illustration and are not intended to be limiting, with the true scope and spirit being indicated by the following claims.
Claims
1. An apparatus comprising an imaging system configured to scan a surface of a layer as the layer translates relative to the imaging system, in, The imaging system includes (A) M cameras and (B) a light source system, wherein M is an integer greater than 1, The M cameras are arranged in an array of N rows and P columns, where N and P are positive integers greater than 1. wherein the direction of the translation of the layer is neither parallel to the direction of the N rows nor to the direction of the P columns, wherein each of the M cameras has a field of view that is located on the same best-fit plane of the surface, wherein the imaging system is configured to perform dark field imaging of the surface of the layer, and Wherein, all the field of view areas of the M cameras on the best fitting plane are discrete from each other.
2. The device according to claim 1, wherein The imaging system scans the entire surface of the layer at one time.
3. The device according to claim 1, wherein No photons travel directly from the light source system to the objective lens of any of the M cameras.
4. The device according to claim 1, wherein Each of the M cameras is a microscope.
5. The device according to claim 1, wherein The direction of the N rows is not perpendicular to the direction of the P columns.
6. The device according to claim 1, in, The straight line on the best fit plane is perpendicular to the translation direction of the scan, wherein the orthogonal projections of all points of the surface on the line form line segments on the line, and The orthogonal projections of the field of view areas of the M cameras on the straight line together cover the entire line segment.
7. The device according to claim 1, wherein The light source system is configured to change a color of light from the light source system, thereby changing a focal length of the M cameras.
8. The device according to claim 7, wherein When the light from the light source system is green, the focal points of the M cameras are located on the best-fit plane of the surface.
9. The device according to claim 1, in, The apparatus is configured to determine a height of a feature on the surface of the layer based on a plurality of images of the feature taken using different colors of light from the light source system, and wherein the height of the feature is measured in a direction perpendicular to the best fit plane.
10. The apparatus of claim 1, further comprising a camera other than the M cameras configured to capture one or more images of the surface of the layer, wherein The apparatus is configured to analyze the flatness of the surface based on the one or more images.
11. The device according to claim 1, in, The translation of the layer is continuous, and wherein each image captured by the imaging system during the scan involves (A) a light pulse from the light source system or (B) a continuous light beam from the light source system in combination with a mechanical shutter or an electronic shutter in one of the M cameras capturing each image.
12. The device according to claim 1, wherein The light source system includes M light sources, and the M light sources are used to illuminate the M field of view areas of the M cameras respectively.
13. A method comprising: scanning a surface of the layer with an imaging system by translating the layer relative to the imaging system, The imaging system includes (A) M cameras and (B) a light source system, where M is an integer greater than 1. The M cameras are arranged in an array of N rows and P columns, where N and P are positive integers greater than 1. wherein the direction of the translation of the layer is neither parallel to the direction of the N rows nor to the direction of the P columns, wherein each of the M cameras has a field of view that is located on the same best-fit plane of the surface, wherein the imaging system performs dark field imaging of the surface of the layer, and Wherein, all the field of view areas of the M cameras on the best fitting plane are discrete from each other.
14. The method according to claim 13, wherein The imaging system scans the entire surface of the layer at one time.
15. The method according to claim 13, wherein No photons travel directly from the light source system to the objective lens of any of the M cameras.
16. The method according to claim 13, wherein: The layer is the screen of the display device.
17. The method according to claim 13, wherein: Each of the M cameras is a microscope.
18. The method according to claim 13, wherein The direction of the N rows is not perpendicular to the direction of the P columns.
19. The method according to claim 13, in, The straight line on the best fit plane is perpendicular to the translation direction of the scan, wherein the orthogonal projections of all points of the surface on the line form line segments on the line, and The orthogonal projections of the field of view areas of the M cameras on the straight line together cover the entire line segment.
20. The method according to claim 13, wherein The scanning includes changing the color of light from the light source system, thereby changing the focus of the M cameras.
21. The method according to claim 20, wherein When the light from the light source system is green, the focal points of the M cameras are located on the best-fit plane of the surface.
22. The method of claim 13, further comprising determining a height of a feature on the surface of the layer based on a plurality of images of the feature taken using different colors of light from the light source system, wherein The height of the feature is measured in a direction perpendicular to the best fit plane.
23. The method of claim 13, further comprising: capturing one or more images of the surface of the layer using a camera other than the M cameras; as well as The flatness of the surface is analyzed based on the one or more images.
24. The method according to claim 13, in, The translation of the layer is continuous, and wherein each image captured by the imaging system during the scan involves (A) a light pulse from the light source system or (B) a continuous light beam from the light source system in combination with a mechanical shutter or an electronic shutter in one of the M cameras capturing each image.
25. The method according to claim 13, wherein The light source system includes M light sources, and the M light sources are used to illuminate the M field of view areas of the M cameras respectively.