Optical measurement device, optical measurement system, and optical measurement method

Abstract

The invention provides an optical measurement device, an optical measurement system and an optical measurement method. The optical measurement device comprises a first optical path regulation and control module, a second optical path regulation and control module, an optical path transmission module, an optical measurement module and an optical imaging module, firstly, an optical imaging module reaches a measurement point through a second light path regulation and control module, and an imaging light signal reflected by the measurement point passes through the second light path regulation and control module and a first light path regulation and control module and then reaches an imaging unit through a light path transmission module so as to observe the condition of the measurement point on the surface of an object to be measured; and secondly, the optical measurement module reaches the measurement point through the first optical path regulation and control module, the to-be-measured optical signal reflected by the measurement point passes through the first optical path regulation and control module and then passes through the optical path transmission module to reach the measurement unit, and the to-be-measured optical signal is measured and analyzed. Therefore, the optical measurement module does not need to be additionally provided with any redundant light splitting device, so that the integration level of the optical system is improved, and the measurement accuracy is ensured.

Description

Technical Field

[0001] The present invention relates to the field of optical measurement, and in particular to an optical measurement device, an optical measurement system and an optical measurement method. Background Art

[0002] With the development of semiconductor integrated circuits, optical measurement devices are urgently needed to ensure manufacturing process stability and product quality. Existing semiconductor optical measurement equipment suffers from limitations such as a narrow wavelength band and frequent switching of optical components during measurement. For highly integrated semiconductor optical measurement equipment, problems include low energy consumption and the gradual decay of ultraviolet energy over time. These issues not only reduce measurement efficiency but also significantly impact measurement accuracy. Furthermore, some equipment cannot monitor the measurement process in real time.

[0003] In the field of semiconductor measurement, especially semiconductor film thickness measurement, the system's wavelength range and energy level are particularly important. The width of the wavelength limits the range of semiconductor film thickness that the equipment can accurately measure. Measuring film thickness from sub-nanometer to micron levels requires the use of light in the ultraviolet to near-infrared range, and this measurement also requires certain energy levels within the required wavelengths. Therefore, ensuring high overall energy levels without rapid attenuation is paramount.

[0004] There is an urgent need for a system that can simultaneously perform real-time monitoring and optical measurement to measure wafer film thickness and other optical parameters. Currently, this technology is largely controlled by a small number of foreign equipment manufacturers. Research on this semiconductor measurement system will help break the foreign monopoly and is of great significance to the development of my country's semiconductor industry.

[0005] Therefore, how to design an optical measurement device, optical measurement system and optical measurement method with high measurement accuracy, high efficiency and strong stability has become one of the technical problems that technical personnel in this field need to solve urgently.

[0006] It should be noted that the above technical background is merely provided to provide a clear and complete description of the technical solutions of the present invention and to facilitate understanding by those skilled in the art. Simply because these solutions are described in the technical background section of the present invention, it should not be assumed that the above technical solutions are well known to those skilled in the art. Summary of the Invention

[0007] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide an optical measuring device, an optical measuring system and an optical measuring method, which are used to solve the problems of low measurement accuracy and poor stability of the film thickness measurement system in the prior art.

[0008] To achieve the above-mentioned objectives and other related objectives, the present invention provides an optical measuring device, which at least includes: a first optical path control module, a second optical path control module, an optical path transmission module, an optical measuring module and an optical imaging module; the optical measuring module includes a first light source and a measuring unit; a first light signal emitted by the first light source is transmitted by the first optical path control module and vertically incident on a measuring point in a measured area on the surface of an object to be measured to generate a light signal to be measured; the light signal to be measured is transmitted by the first optical path control module and enters the optical path transmission module for splitting to obtain a first sub-beam, and the first sub-beam enters the measuring unit; the optical imaging module includes a second light source, a collimator and an imaging unit; a second light signal emitted by the second light source is collimated by the collimator and transmitted by the second optical path control module and vertically incident on the measuring point to generate an imaging light signal; the imaging light signal is transmitted by the second optical path control module and then sequentially transmitted to the first optical path control module and the optical path transmission module to obtain a second sub-beam, and the second sub-beam enters the imaging unit.

[0009] Optionally, the first optical path control module includes a first beam splitter and a first objective lens; the first light signal is reflected by the first beam splitter and focused to the measurement point by the first objective lens; the light signal to be measured is transmitted by the first objective lens and then transmitted through the first beam splitter into the optical path transmission module; the imaging light signal is transmitted by the second optical path control module and then reflected by the first beam splitter into the optical path transmission module.

[0010] Optionally, the second optical path control module includes a second beam splitter and a second objective lens; the second light signal is transmitted through the second beam splitter and focused to the measurement point through the second objective lens; the imaging light signal is transmitted through the second objective lens and then reflected by the second beam splitter, and then transmitted through the first optical path control module to the optical path transmission module and the imaging unit.

[0011] Optionally, the optical path transmission module includes a third spectroscope and a first tube lens; the light signal to be measured is transmitted through the first tube lens and transmitted through the third spectroscope to obtain the first split light beam, and the imaging light signal is transmitted through the first tube lens and reflected through the third spectroscope to obtain the second split light beam; or, the light signal to be measured is transmitted through the first tube lens and reflected through the third spectroscope to obtain the first split light beam, and the imaging light signal is transmitted through the first tube lens and transmitted through the third spectroscope to obtain the second split light beam.

[0012] More optionally, when the first split light beam is obtained by transmission through the third beam splitter, the transmittance of the third beam splitter is 60%-80%; when the first split light beam is obtained by reflection through the third beam splitter, the reflectance of the third beam splitter is 60%-80%.

[0013] Optionally, the optical measurement module further includes a first parabolic mirror, a second parabolic mirror and a third parabolic mirror; the first optical signal is reflected by the first parabolic mirror, the second parabolic mirror and the third parabolic mirror in sequence and enters the first optical path control module.

[0014] Optionally, the optical measuring device also includes an autofocus module and a second spectroscopic module; the autofocus module includes a first reflector, a second reflector and a focusing unit, and the second spectroscopic module includes a fourth spectroscopic mirror; the first light signal is transmitted to the second light path control module via the first light path control module, and then transmitted via the second light path control module and vertically incident on the measurement point to generate a focusing light signal; the focusing light signal is transmitted via the second light path control module, passes through the fourth spectroscopic mirror, and then reflected by the first reflector and the second reflector before entering the focusing unit.

[0015] Optionally, the first optical signal is transmitted to the measurement point via the first optical path control module, and the second optical signal is transmitted to the measurement point via the second optical path control module, and the optical paths of the first optical signal and the second optical signal are independent of each other.

[0016] To achieve the above-mentioned and other related purposes, the present invention also provides an optical measurement system, which comprises at least: a device for carrying an object to be measured and the optical measurement device; the device for carrying an object to be measured is used to move the object to be measured so that the optical measurement device can measure the object to be measured.

[0017] To achieve the above-mentioned purpose and other related purposes, the present invention also provides an optical measurement method, which is implemented based on the optical measurement device, and the steps of the optical measurement method include at least: S1: turning on the second light source, and the second light signal is transmitted through the second optical path control module and then vertically incident on the measurement point in the measured area on the surface of the object to be measured to obtain an imaging light signal; the imaging light signal is transmitted through the second optical path control module and the first optical path control module in sequence, and then passes through the optical path transmission module to reach the imaging unit, and the imaging unit is used to display the image data of the measurement point; S2: turning on the first light source, moving the object to be measured, and the first light signal is transmitted through the first optical path control module and then vertically incident on the measurement point to obtain the light signal to be measured; the light signal to be measured is transmitted through the first optical path control module, and then passes through the optical path transmission module to reach the measurement unit, and the measurement unit is used to measure and analyze the physical properties of the measurement point.

[0018] Optionally, before step S2, step S2' is also included: the first optical signal is transmitted through the first optical path control module and the second optical path control module in sequence and then vertically incident on the measurement point to obtain a focused optical signal, and the focused optical signal is collected and analyzed so that the first optical signal and the second optical signal are respectively focused on the measurement point.

[0019] As described above, the optical measurement device, optical measurement system, and optical measurement method of the present invention have the following beneficial effects:

[0020] 1. The present invention uses a first optical path control module to allow the first optical signal of the optical measurement module to reach the measurement point, and uses a second optical path control module to allow the second optical signal of the optical imaging module to reach the measurement point, so that the optical path of the first optical signal and the optical path of the second optical signal do not overlap at all; uses the first optical path control module and the optical path transmission module to allow the optical signal to be measured to reach the measurement unit, and uses the first spectrometer of the first optical path control module and the optical path transmission module to allow the imaging optical signal to reach the imaging unit, so that the optical signal to be measured and the imaging optical signal overlap only between the optical path transmission module of the first optical path control module; therefore, no unnecessary spectroscopic components are added to the optical measurement module of the present invention, thereby improving the optical path energy in the optical measurement module, and improving the system integration of the optical measurement device, while realizing the measurement function and imaging function of the optical measurement device.

[0021] 3. The autofocus module of the present invention generates a focusing light signal by means of a first light source, a first spectrometer of a first optical path control module, and a second optical path control module. The focusing light signal enters the focusing unit with the help of the second optical path control module and the second spectrometer module. Therefore, the addition of the autofocus module does not increase the spectrometer components in the optical measurement module. Instead, the autofocus function is achieved by spectrometry through the optical imaging module that is not sensitive to light energy. At the same time, the system integration of the optical measurement device is further improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Shown is a schematic structural diagram of the optical measuring device of the present invention.

[0023] Figure 2 Shown is a schematic diagram of a transmission route of the first optical signal of the present invention.

[0024] Figure 3 Shown is a schematic diagram of a transmission route of the optical signal to be measured according to the present invention.

[0025] Figure 4 Shown is a schematic diagram of a transmission route of the second optical signal of the present invention.

[0026] Figure 5 Shown is a schematic diagram of a transmission route of the imaging light signal of the present invention.

[0027] Figure 6 Shown is a schematic diagram of a transmission route of the focusing light signal of the present invention.

[0028] Figure 7 Shown is a schematic structural diagram of the optical measurement system of the present invention.

[0029] Figure 8 It is a schematic flow chart of the optical measurement method of the present invention.

[0030] Component number description

[0031] 1 Optical measurement module

[0032] 1a First light source

[0033] 1b Measurement unit

[0034] 1c First parabolic mirror

[0035] 1d Second parabolic mirror

[0036] 1e Third parabolic mirror

[0037] 2 Optical Imaging Module

[0038] 2a Second light source

[0039] 2b Collimating lens

[0040] 2c Imaging Unit

[0041] 3. First optical path control module

[0042] 3a First beam splitter

[0043] 3b First objective lens

[0044] 4 Second optical path control module

[0045] 4a Second beam splitter

[0046] 4b Second objective lens

[0047] 5. Optical transmission module

[0048] 5a Third beam splitter

[0049] 5b First tube mirror

[0050] 6 Autofocus module

[0051] 6a Focus unit

[0052] 6b First reflector

[0053] 6c Second reflector

[0054] 7 Second optical splitter module

[0055] 7a Fourth beam splitter DETAILED DESCRIPTION

[0056] The following describes the embodiments of the present invention through specific examples. Those skilled in the art will readily understand the other advantages and benefits of the present invention from the disclosure herein. The present invention may also be implemented or applied through various other specific embodiments, and the details in this specification may be modified or altered based on different viewpoints and applications without departing from the spirit of the present invention.

[0057] See also Figures 1-8 It should be noted that the diagrams provided in this embodiment are merely schematic illustrations of the basic concept of the present invention. Therefore, the diagrams only show components relevant to the present invention and are not drawn according to the number, shape, and size of components in actual implementation. In actual implementation, the type, quantity, and proportion of each component may be changed arbitrarily, and the component layout may also be more complex.

[0058] In most film thickness measurement systems, the following problems are common: First, the measurement band is mostly limited to the visible light band. If you want to cover the three bands of ultraviolet, visible light and infrared commonly used in industrial production at the same time, you need to use light sources of different bands and lenses to switch, which greatly reduces the measurement efficiency; Second, systems with a high degree of integration usually use more spectroscopic elements, so the energy of the measurement light path will decrease, especially for some ultraviolet bands with relatively low energy, which are seriously affected, greatly affecting the measurement accuracy; Third, most film thickness measurement systems require the use of two objective lenses with different magnifications to observe the object to be measured, and the lens needs to be switched during the process of finding the position to be measured, which reduces the measurement efficiency; Fourth, when most film thickness measurement systems connect the light source and the light path through an optical fiber, there will be a problem of ultraviolet band energy decaying over time, which seriously affects the measurement stability. Therefore, in order to solve the above problems, the present invention provides an optical measurement device and an optical measurement method, and the specific technical solutions are as follows:

[0059] Example 1

[0060] like Figure 1 As shown, this embodiment provides an optical measurement device, including: a first light path control module 3 , a second light path control module 4 , a light path transmission module 5 , an optical measurement module 1 and an optical imaging module 2 .

[0061] like Figure 1As shown, the optical measurement module 1 includes a first light source 1a and a measuring unit 1b; the first light signal emitted by the first light source 1a is transmitted by the first optical path control module 3 and vertically incident on the measuring point in the measured area on the surface of the object to be measured to generate a light signal to be measured; the light signal to be measured is transmitted by the first optical path control module 3 and enters the optical path transmission module 5 for splitting to obtain a first split light beam, and the first split light beam enters the measuring unit 1b.

[0062] Specifically, in this embodiment, the function of the optical measurement module 1 is to vertically inject a first light signal into the area to be measured on the surface of the object to be measured. The first light signal is reflected by the measurement point in the area to be measured to obtain a light signal to be measured. After the light signal to be measured enters the measurement unit 1b, the measurement unit 1b can collect and analyze the light signal to be measured and calculate the physical characteristic parameters of the object to be measured, such as film thickness parameters, key dimension parameters, and layer alignment parameters, according to the system algorithm. Furthermore, the first light path control module 3 can control the light path of the light signal to change the direction of the light path or maintain the direction of the light path, such as Figure 1 As shown, the first optical path control module 3 includes a first beam splitter 3a and a first objective lens 3b. As an example of optical signal transmission, Figure 2 As shown, the first light signal is reflected by the first beam splitter 3a and focused by the first objective lens 3b to the measurement point in the area to be measured, as shown in FIG. Figure 3 As shown, the optical signal to be measured is transmitted through the first objective lens 3b and then transmitted through the first beam splitter 3a into the optical path transmission module 5, as shown in FIG. Figure 5 As shown, after the imaging light signal is transmitted through the second optical path control module, it is reflected by the first spectroscope and enters the optical path transmission module, and finally reaches the imaging unit. In practical applications, the transmission route of the light signal in the optical measurement device is set as needed, which is not limited to this embodiment. As an example, the measurement unit 1b can use a spectrometer, the first spectroscope 3a uses a spectroscope that realizes 1:1 splitting, and the first light source 1a can use a wide-band light source, such as a xenon lamp, LDLS and LSP light source. The spectral range of the first light source 1a is 230nm to 900nm, and the spectral range of the first objective lens 3b is also 230nm to 900nm, so as to avoid switching between multiple light sources to adapt to different spectra, thereby improving measurement efficiency. In practical applications, the specific type of optical device in the optical measurement module 1 can be selected as needed, which is not limited to this embodiment.

[0063] Specifically, in this embodiment, Figure 1As shown, the optical measurement module 1 also includes a first parabolic mirror 1c, a second parabolic mirror 1d, and a third parabolic mirror 1e. The first light signal is reflected sequentially by the first parabolic mirror 1c, the second parabolic mirror 1d, and the third parabolic mirror 1e and enters the first optical path control module 3. The purpose of providing the first parabolic mirror 1c, the second parabolic mirror 1d, and the third parabolic mirror 1e is to collimate the first light signal and reduce the spot size of the first light signal. As an example, the first parabolic mirror 1c and the second parabolic mirror 1d are broadband parabolic mirrors. By selecting different combinations of the focal lengths of the first parabolic mirror 1c and the second parabolic mirror 1d, the spot size of the first light signal when focused at the measurement point can be adjusted to meet the measurement requirements of different measurement areas. Furthermore, the first light source 1a and the first parabolic mirror 1c are connected by a high-temperature and ultraviolet radiation-resistant optical fiber, which can reduce the attenuation of the light signal in the ultraviolet band and improve the stability of the measurement results. A window is installed at the optical fiber interface of the first light source 1a to prevent contamination of the optical fiber interface. In practical applications, the optical components in the optical measurement module 1 are arranged as needed, and are not limited to this embodiment.

[0064] like Figure 1 As shown, the optical imaging module 2 includes a second light source 2a, a collimating lens 2b and an imaging unit 2c; the second light signal emitted by the second light source 2a is collimated by the collimating lens 2b and transmitted by the second optical path control module 4, and then vertically incident on the measuring point in the measured area to generate an imaging light signal; the imaging light signal is transmitted by the second optical path control module 4 and then transmitted in sequence to the first optical path control module 3 and the optical path transmission module 5 to obtain a second split light beam, and the second split light beam enters the imaging unit 2c.

[0065] Specifically, in this embodiment, the optical imaging module 2 collects and analyzes the second split light beam to achieve observation of the measurement point on the surface of the object to be measured. It should be understood that the optical signals of the optical imaging module 2 and the optical measurement module 1 are both transmitted to the same measurement point within the measurement area on the surface of the object to be measured, so as to achieve measurement and observation of the same measurement point on the surface of the object to be measured in the measurement task. Furthermore, the second optical path control module 4 controls the optical path of the optical signal to change the direction of the optical path or maintain the direction of the optical path, such as Figure 1 As shown, the second optical path control module 4 includes a second beam splitter 4a and a second objective lens 4b. As an example of optical signal transmission, Figure 4 As shown, the second light signal is transmitted through the second beam splitter 4a and focused to the measurement point in the area to be measured by the second objective lens 4b, as shown in FIG. Figure 5As shown, the imaging light signal is transmitted through the second objective lens 4b, reflected by the second spectrometer 4a, and transmitted to the optical path transmission module 5 through the first optical path control module 3, and finally reaches the imaging unit; wherein, the second objective lens 4b is a high-magnification, large-field-of-view objective lens. For example, the second objective lens 4b can be an objective lens with a magnification of 20 times and a field of view of 1.2mm, which can support a variety of observation needs. Compared with the traditional method of combining low- and high-magnification dual objective lenses to observe the measurement point, the second objective lens 4b avoids the switching of objective lenses of different magnifications during the imaging process, that is, there is no need to switch the objective lens during the imaging process of the current measurement point, thereby improving the measurement efficiency. In practical applications, the transmission route of the light signal in the optical measurement device is set as needed, which is not limited to this embodiment. As an example of a specific optical device, the second light source 2a transmits the second light signal to the collimator 2b through an optical fiber. The numerical aperture of the collimator 2b needs to be larger than the numerical aperture of the optical fiber to ensure the transmission of the second light signal. When the spectral range of the first light source 1a is 230nm to 900nm, the spectral range of the second light source 2a can be selected from 450nm to 850nm to meet the requirements of optical imaging. The second spectrometer 4a adopts a spectrometer that realizes 1:1 splitting, and the imaging unit 2c uses a camera. In actual applications, the specific optical device type in the optical imaging module 2 is selected according to needs, and is not limited to this embodiment.

[0066] Specifically, in this embodiment, the optical path transmission module 5 includes a third spectroscope 5a and a first tube lens 5b. The optical path transmission module 5 transmits the optical signal to be measured to the measuring unit 1b, and transmits the imaging optical signal to the imaging unit 2c. Figure 1As shown, after the light signal to be measured is transmitted by the first optical path control module 3, it is transmitted through the first tube lens 5b and transmitted through the third beam splitter 5a to obtain a first split light beam, and the imaging light signal is sequentially transmitted by the second optical path control module 4 and the first optical path control module 3, and then transmitted through the first tube lens 5b and reflected by the third beam splitter 5a to obtain a second split light beam; or, after the light signal to be measured is transmitted by the first optical path control module 3, it is transmitted through the first tube lens 5b and reflected by the third beam splitter 5a to obtain the first split light beam, and the imaging light signal is sequentially transmitted by the second optical path control module 4 and the first optical path control module 3, and then transmitted through the first tube lens 5b and transmitted through the third beam splitter 5a to obtain a second split light beam; wherein, the third beam splitter 5a is arranged in front of the focus of the first tube lens 5b, which can avoid the installation and adjustment problems of adding a relay lens and the space limitation problem. Furthermore, when the first split light beam reaching the measuring unit is obtained by transmission through the third beam splitter 5a, the transmittance of the third beam splitter 5a is 60%-80%, including but not limited to 65%, 70%, and 75% transmittance, so as to improve the measuring unit for higher energy utilization; when the first split light beam reaching the measuring unit is obtained by reflection through the third beam splitter, the reflectance of the third beam splitter 5a is 60%-80%, including but not limited to 65%, 70%, and 75% reflectance, and the purpose is also to improve the measuring unit for higher energy utilization.

[0067] Furthermore, the first tube lens 5b needs to be a low-magnification lens to meet the needs of the optical imaging module 2; the first split light beam is transmitted to the measuring unit 1b via an optical fiber, and the first split light beam is obtained after the light signal to be measured passes through the first optical path control module 3 and passes through only one spectroscope, that is, the light signal to be measured transmitted by the first optical path control module 3 can reach the measuring unit 1b only after being transmitted or reflected by the third spectroscope 5a, and the attenuation of the first split light beam is reduced, thereby improving the stability of the measurement result. As an example, when the spectral range of the first light source 1a is 230nm to 900nm, the spectral range of the first tube lens 5b is also 230nm to 900nm to meet the needs of multi-spectrum. In actual applications, the optical device provided in the optical path transmission module 5 is selected as needed, and is not limited to this embodiment.

[0068] like Figure 1As shown, the optical measuring device also includes an autofocus module 6 and a second spectrometer module 7, the autofocus module 6 includes a first reflector 6b, a second reflector 6c and a focusing unit 6a, and the second spectrometer module includes a fourth spectrometer 7a; the first light signal is transmitted from the first light path control module 3 to the second light path control module 4, and then transmitted by the second light path control module 4 and vertically incident on the measuring point in the area to be measured to generate a focusing light signal; the focusing light signal is transmitted by the second light path control module 4, passes through the fourth spectrometer 7a, and then is reflected by the first reflector 6b and the second reflector 6c and enters the focusing unit 6a; wherein, the focusing light signal can be collected and analyzed using the focusing unit 6a. As an example, the focusing unit 6a can adopt a multi-quadrant detector.

[0069] Specifically, in this embodiment, the function of the autofocus module 6 is to focus on the measurement point on the current surface of the object to be measured. The autofocus module 6 and the optical measurement module 1 share the first light source 1a. This is because the energy of the first light source 1a is higher than that of the second light source 2a, which can meet the focusing requirements. Furthermore, when the first optical path control module 3 includes a first beam splitter 3a and a first objective lens 3b, and the second optical path control module 4 includes a second beam splitter 4a and a second objective lens 4b, the focusing unit 6a can adjust the distance of the object to be measured relative to the first objective lens 3b and the second objective lens 4b by analyzing the focusing light signal, so that the measurement point can be at the focal plane position of the first objective lens 3a, and the focal plane position of the first objective lens 3a is the same as the focal plane position of the second objective lens 4b, so as to achieve fast focusing; since the first objective lens 3b and the second objective lens 4b have a common focal plane, the object to be measured can be carried and moved by the object-to-be-measured carrying device in a direction perpendicular to the focal planes of the two objective lenses, so that the first light signal can be focused on the surface of the object to be measured through the first objective lens, and the second light signal can also be focused on the surface of the object to be measured through the second objective lens. Furthermore, the purpose of using the first reflector 6b and the second reflector 6c is to make the focusing light signal converge into a light spot on the focusing unit after passing through the first reflector 6b and the second reflector 6c; as an example, the second reflector 6c can be a cylindrical reflector. Furthermore, the second light splitting module 7 includes a fourth light splitter 7a: Figure 1 As shown, the second light signal is transmitted through the fourth beam splitter 7a, and then transmitted through the second optical path control module 4 to generate a focusing light signal. After the focusing light signal is transmitted by the second optical path control module 4, it is reflected by the fourth beam splitter 7a and enters the focusing unit 6a; or, the second light signal is reflected by the fourth beam splitter 7a, and then transmitted through the second optical path control module 4 to generate a focusing light signal. After the focusing light signal is transmitted by the second optical path control module 4, it is transmitted through the fourth beam splitter 7a and enters the focusing unit 6a.

[0070] It should be noted that, through the optical system design of the present invention, on the one hand, the first optical signal of the optical measurement module 1 is transmitted by the first optical path control module 3 and then reaches the measurement point, and the second optical signal of the optical imaging module 2 is transmitted by the second optical path control module 4 and then reaches the measurement point, that is, the optical paths of the first optical signal and the second optical signal incident on the object to be measured are independent of each other, do not overlap with each other, and do not interfere with each other, and there are no shared optical components; on the other hand, the optical signal to be measured enters the measuring unit with the help of the first optical path control module and the optical path transmission module, and the imaging optical signal enters the imaging unit with the help of the first spectrometer of the first optical path control module 3 and the optical path transmission module 4. Therefore, the optical measuring device not only utilizes the first optical signal and the second optical signal that do not overlap at all, reducing the use of spectrometers, but also improves the integration of the optical system by allowing the optical signal to be measured and the imaging optical signal to share the first spectrometer, the first tube mirror and the third reflector, while ensuring the realization of the measurement function and imaging function of the optical measuring device. Furthermore, when the first optical path control module 3 includes a first beam splitter 3a and a first objective lens 3b, and the second optical path control module 4 includes a second beam splitter 4a and a second objective lens 4b, the first objective lens 3b only needs to meet the requirements of the optical measurement module 1, and the second objective lens 4b only needs to meet the requirements of the optical imaging module 2. In particular, the first objective lens 3a does not need to reduce the measurement quality (such as the measurement requirement for the numerical aperture) in order to take into account the imaging requirements (such as the imaging requirement for the field of view). Furthermore, the autofocus module 6 generates a focusing light signal with the help of the first light source 1a, the first beam splitter of the first optical path control module 3, and the second optical path control module. On the other hand, the autofocus module and the optical imaging module share the second optical path control module 4 and the second beam splitter module 7. Therefore, the addition of the autofocus module 6 does not increase the beam splitter components in the optical measurement device, but instead uses the optical imaging module that is not sensitive to the energy of the light signal to achieve the autofocus function, while further improving the system integration of the optical measurement device.

[0071] Example 2

[0072] like Figure 7 As shown, this embodiment provides an optical measurement system, including: a test object carrying device and an optical measurement device. The test object carrying device can move the test object, so that the optical measurement device can measure the test object.

[0073] Specifically, in this embodiment, the object carrier is used to move the object to be tested in a direction parallel to the focal plane of the objective lens, so that when the first light signal of the optical measurement module 1 and the second light signal of the optical imaging module 2 are incident on the same measurement point on the surface of the object to be tested, it should be understood that when the optical measurement module 1 and the optical imaging module 2 are measuring and imaging the measurement point on the surface of the object to be tested, the object carrier does not move in a direction perpendicular to the focal plane of the objective lens, thereby ensuring improved measurement stability. Furthermore, the object carrier can also adjust the height of the object to be tested in a direction perpendicular to the focal plane of the first / second objective lens, that is, according to the results obtained after analyzing the focus signal collected by the focusing unit, adjust the relative distance between the object to be tested and the two objective lenses so that the object to be tested can be focused when it is on the focal plane of both objective lenses. In actual applications, the specific type of the object carrier is selected as needed, and no specific restrictions are made here.

[0074] Example 3

[0075] like Figure 8 As shown, this embodiment provides an optical measurement method, the steps comprising:

[0076] like Figure 8 As shown, in step S1, the second light source 2a is turned on, so that the second light signal is transmitted by the second light path control module 4 and then transmitted to the measurement point in the measured area on the surface of the object to be measured to obtain an imaging light signal; the imaging light signal is sequentially transmitted by the second light path control module 4 and the first light path control module 3, and then passes through the light path transmission module 5 and reaches the imaging unit 2c, and the imaging unit 2c is used to display the image data of the measurement point.

[0077] Specifically, in this embodiment, the second light signal is transmitted through the second light path control module 4 to the measuring point within the measured area on the surface of the object to be measured, and the measuring point reflects the second light signal to generate an imaging light signal; the imaging light signal is transmitted in sequence through the second light path control module 4 and the first light path control module 3, and then passes through the light path transmission module 5 and reaches the imaging unit 2c. The imaging unit 2c completes the imaging of the imaging light signal, and the operator can then observe the measurement point.

[0078] like Figure 8 As shown, in step S2, the first light source 1a is turned on, and the object to be measured is moved, so that the first light signal is transmitted by the first optical path control module 3 and then transmitted to the measurement point to obtain a light signal to be measured. After being transmitted by the first optical path control module 3, the light signal to be measured passes through the optical path transmission module 5 and reaches the measurement unit 1b, which is used to measure and analyze the physical properties of the measurement point. Based on the above embodiment, the energy ratio of the light signal to be measured that passes through the first beam splitter 5a in the optical path transmission module 5 and reaches the measurement unit 1b is higher than the energy ratio of the imaging light signal entering the imaging unit 2c.

[0079] Specifically, in this embodiment, after the object to be measured moves in a direction parallel to the focal plane of the objective lens, a first light signal is transmitted through the first optical path control module 3 to a measurement point within the surface of the object to be measured, where it is reflected to generate a light signal to be measured. The light signal to be measured is transmitted through the first optical path control module 3 and then through the optical path transmission module 5 to the measurement unit 1b, which is used to measure and analyze the physical properties of the object to be measured. Furthermore, by moving the object to be measured in a direction parallel to the focal plane of the objective lens, the first light signal in step S2 is transmitted through the first optical path control module 3 and the second light signal in step S1 is transmitted through the second optical path control module 4 to the same measurement point on the surface of the object to be measured. This ensures that the light signal to be measured and the imaging light signal collect information from the same point on the surface of the object to be measured, thereby ensuring measurement accuracy.

[0080] Specifically, in this embodiment, before step S2, step S2' is also included, in which the first signal light is transmitted to the second light path control module 4 through the first light path control module 3, and then transmitted to the measurement point to obtain a focus light signal, collect and analyze the focus light signal, and adjust the relative position between the object to be measured and the objective lens in a direction perpendicular to the focal plane of the objective lens so that the object to be measured is in the focal plane of the objective lens to complete the focus, so that both the imaging module and the measurement module can complete the task under the condition that the objective lens used is in focus to ensure the accuracy of the measurement result. It is understandable that when the first light path control module 3 includes a first beam splitter 3a and a first objective lens 3b, and the second light path control module 4 includes a second beam splitter 4a and a second objective lens 4b, the object to be measured can be moved by the object to be measured carrying device so that the object to be measured can be in the confocal plane of the first objective lens 3b and the second objective lens 4b, thereby ensuring the accuracy of the measurement result.

[0081] It should be noted that the optical measurement method of this embodiment can be implemented based on the optical measurement device of embodiment 1 or the optical measurement system of embodiment 2, or based on other optical measurement devices or other optical measurement systems, and is not specifically limited here.

[0082] In summary, the optical measurement device, optical measurement system, and optical measurement method of the present invention include: a first optical path control module, a second optical path control module, an optical path transmission module, an optical measurement module, and an optical imaging module. First, the optical imaging module transmits light through the optical path of the second optical path control module to the measurement point. The imaging light signal reflected by the measurement point is transmitted sequentially through the second optical path control module and the first optical path control module, and then through the optical path transmission module to the imaging unit to observe the measurement point on the surface of the object to be measured. Second, the optical measurement module transmits light through the first optical path control module to the measurement point. The light signal to be measured reflected by the measurement point is transmitted by the first optical path control module, and then through the optical path transmission module to the measurement unit, where the light signal to be measured is measured and analyzed. Therefore, the second light signal does not need to be transmitted by optical splitting of the first light signal, and the optical paths of the light signal to be measured and the imaging light signal only overlap between the first optical path control module and the optical path transmission module. The optical measurement module does not need to add any redundant spectrometers. Therefore, the present invention not only improves the integration of the optical system, but also reduces the number of spectrometers used in the optical measurement device, ensuring measurement accuracy. Therefore, the present invention effectively overcomes various shortcomings of the prior art and has high industrial utilization value.

[0083] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Anyone skilled in the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by one of ordinary skill in the art without departing from the spirit and technical principles disclosed herein are intended to be covered by the claims of the present invention.

Claims

1. An optical measuring device, characterized in that: The optical measurement device at least includes: a first optical path control module, a second optical path control module, an optical path transmission module, an optical measurement module and an optical imaging module; The optical measurement module includes a first light source and a measurement unit; a first light signal emitted by the first light source is transmitted by the first light path control module and vertically incident on a measurement point within a measurement area on the surface of the object to be measured to generate a light signal to be measured; the light signal to be measured is transmitted by the first light path control module and then enters the light path transmission module for splitting to obtain a first split light beam, which then enters the measurement unit; The optical imaging module includes a second light source, a collimating lens and an imaging unit; the second light signal emitted by the second light source is collimated by the collimating lens and transmitted by the second optical path control module, and then vertically incident on the measurement point to generate an imaging light signal; the imaging light signal is transmitted by the second optical path control module and then transmitted in sequence to the first optical path control module and the optical path transmission module to obtain a second split light beam, and the second split light beam enters the imaging unit.

2. The optical measuring device according to claim 1, wherein: The first optical path control module includes a first beam splitter and a first objective lens; The first optical signal is reflected by the first beam splitter and focused to the measurement point by the first objective lens; The optical signal to be measured is transmitted through the first objective lens and then transmitted through the first beam splitter into the optical path transmission module; After being transmitted by the second optical path control module, the imaging light signal is reflected by the first beam splitter and enters the optical path transmission module.

3. The optical measuring device according to claim 1, wherein: The second optical path control module includes a second beam splitter and a second objective lens; The second optical signal is transmitted through the second beam splitter and focused to the measurement point through the second objective lens; The imaging light signal is transmitted through the second objective lens, reflected by the second beam splitter, and then transmitted through the first light path control module to the light path transmission module and the imaging unit.

4. The optical measuring device according to claim 1, wherein: The optical path transmission module includes a third beam splitter and a first tube mirror; The optical signal to be measured is transmitted through the first tube lens and transmitted through the third beam splitter to obtain the first split beam, and the imaging optical signal is transmitted through the first tube lens and reflected through the third beam splitter to obtain the second split beam; Alternatively, the optical signal to be measured is transmitted through the first tube lens and reflected by the third beam splitter to obtain the first split beam, and the imaging optical signal is transmitted through the first tube lens and transmitted by the third beam splitter to obtain the second split beam.

5. The optical measuring device according to claim 4, wherein: When the first split beam is obtained by transmission through the third beam splitter, the transmittance of the third beam splitter is 60%-80%; when the first split beam is obtained by reflection through the third beam splitter, the reflectance of the third beam splitter is 60%-80%.

6. The optical measuring device according to claim 1, wherein: The optical measurement module further includes a first parabolic mirror, a second parabolic mirror, and a third parabolic mirror; the first optical signal is reflected by the first parabolic mirror, the second parabolic mirror, and the third parabolic mirror in sequence and enters the first optical path control module.

7. The optical measuring device according to claim 1, wherein: The optical measuring device further includes an autofocus module and a second spectroscopic module; the autofocus module includes a first reflector, a second reflector and a focusing unit, and the second spectroscopic module includes a fourth spectroscopic mirror; The first optical signal is transmitted to the second optical path control module via the first optical path control module, and then transmitted to the second optical path control module before being vertically incident on the measurement point to generate a focusing optical signal; The focusing light signal is transmitted through the second optical path control module, passes through the fourth beam splitter, and then is reflected by the first reflector and the second reflector before entering the focusing unit.

8. The optical measuring device according to claim 1, wherein The first optical signal is transmitted to the measurement point via the first optical path control module, and the second optical signal is transmitted to the measurement point via the second optical path control module. The optical paths of the first optical signal and the second optical signal are independent of each other.

9. An optical measurement system, characterized in that: The optical measurement system comprises at least: a test object carrying device and the optical measurement device according to any one of claims 1 to 8; the test object carrying device is used to move the test object so that the optical measurement device measures the test object.

10. An optical measurement method, characterized in that: The optical measurement method is implemented based on the optical measurement device according to any one of claims 1 to 8, and the steps of the optical measurement method at least include: S1: Turn on the second light source, and after the second light signal is transmitted by the second light path control module, it is vertically incident on the measurement point within the measurement area on the surface of the object to be measured to obtain an imaging light signal; the imaging light signal is sequentially transmitted by the second light path control module and the first light path control module, and then passes through the light path transmission module to reach the imaging unit, and the imaging unit is used to display the image data of the measurement point; S2: Turn on the first light source, move the object to be measured, and allow the first light signal to be transmitted through the first light path control module and vertically incident on the measurement point to obtain a light signal to be measured; after the light signal to be measured is transmitted through the first light path control module, it passes through the light path transmission module and reaches the measurement unit, which is used to measure and analyze the physical characteristics of the measurement point.

11. The optical measurement method according to claim 10, wherein: Before step S2, step S2' is also included: the first optical signal is transmitted sequentially through the first optical path control module and the second optical path control module and then vertically incident on the measurement point to obtain a focused optical signal, and the focused optical signal is collected and analyzed so that the first optical signal and the second optical signal are respectively focused on the measurement point.

Images