Inspection jig and inspection device

Abstract

The present invention provides an inspection jig comprising: a plate-shaped insulating member having a recessed portion; a first substrate having a first electrode; and a conductive wire electrically connected to the contact terminal, in which the insulating member is provided with a through-hole penetrating the bottom of the recess, one end of the conductive wire is disposed in the through-hole, and the other end of the conductive wire is connected to the first electrode.

Description

[0001] This application is a divisional application of the application with application date of March 27, 2020, application number 202080027112.X, and invention name “Inspection fixture and inspection device”. Technical Field

[0002] The invention relates to an inspection fixture used for inspecting an inspection object. Background Art

[0003] An example of a conventional probe card device is disclosed in Patent Document 1.

[0004] The probe card device of Patent Document 1 functions as an interface between a tester for controlling a test of a DUT and the electronic device. The probe card device includes main subassemblies and a probe head.

[0005] The main subassemblies include a wiring structure and a probe head interface. The wiring structure is typically a printed circuit board (PCB). The probe head interface includes electrical terminals on one side, electrical contacts on the other side, and electrical connections from the terminals to the contacts. The wiring structure is connected to the electrical terminals via cables.

[0006] The probe head includes a probe insertion portion. The probe insertion portion includes a connector on one side of the probe head and probes extending from the other side of the probe head. The electrical connector connects the connector to the probes. The number and pattern of the connectors correspond to the number and pattern of the electrical contacts of the probe head interface. Thus, the connectors are electrically connected to the electrical contacts. The number and pattern of the probes correspond to the number and pattern of the terminals of the device under test (DUT).

[0007] Prior art literature

[0008] Patent Literature

[0009] Patent Document 1: Japanese Patent Application No. 2016-524139 Summary of the Invention

[0010] Problems to be solved by the invention

[0011] The probe head of Patent Document 1 electrically connects probes corresponding to the terminal pattern of the DUT and connectors corresponding to the pattern of the electrical contacts of the probe head interface. Therefore, it is considered difficult to start manufacturing if the terminal pattern of the DUT cannot be determined.

[0012] The probe head electrically connects probes arranged at positions corresponding to terminals of the DUT and connectors arranged at positions corresponding to electrical contacts of the probe head interface.

[0013] Therefore, it is presumed that the manufacturing time of the probe card device in Patent Document 1 is prolonged.

[0014] In view of the above circumstances, an object of the present invention is to provide an inspection jig capable of shortening manufacturing time and an inspection apparatus using the inspection jig.

[0015] Means for solving problems

[0016] An exemplary inspection jig of the present invention is attachable to and detachable from an intermediate member electrically connected to a second substrate. The inspection jig comprises: a plate-shaped insulating member; a first substrate having a first electrode and a second electrode electrically connected to the first electrode; a wire electrically connected to a contact terminal; and a plate-shaped receiving member mounted on the first substrate and having a receiving portion extending through the thickness thereof, through which the second electrode is exposed, and capable of receiving the intermediate member within the receiving portion. The insulating member is provided with a through-hole extending through the thickness thereof, one end of the wire being disposed in the through-hole, and the other end of the wire being connected to the first electrode.

[0017] Effects of the Invention

[0018] An exemplary inspection jig of the present invention can shorten manufacturing time. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic longitudinal sectional view of an inspection device according to one embodiment of the present invention.

[0020] Figure 2 It is a schematic partial vertical cross-sectional perspective view of an inspection jig according to one embodiment of the present invention.

[0021] Figure 3 This is an exploded perspective view of an inspection jig according to an embodiment of the present invention, as viewed from above.

[0022] Figure 4 This is an exploded perspective view of an inspection jig according to an embodiment of the present invention, as viewed from below.

[0023] Figure 5 This is a diagram showing a step of inserting a conductive wire through a through-hole of an insulating member.

[0024] Figure 6 This is a diagram showing a step of bending a protruding portion of a lead wire inserted through a through hole.

[0025] Figure 7 This is a diagram showing the step of bonding a wire to the first electrode.

[0026] Figure 8 It is a diagram showing the process of disposing a curable resin in the recessed portion and the through-hole of the insulating member.

[0027] Figure 9This is a diagram showing the process of polishing the cut surface of the conductive wire.

[0028] Figure 10 This is a diagram showing the process of etching the conductive wire.

[0029] Figure 11 It is a diagram showing the process of plating the end surface of the wire. DETAILED DESCRIPTION

[0030] Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings. In addition, the insulating component 22 described later has a plate shape. In the accompanying drawings, the thickness direction of the insulating component 22 is set to the X direction, one side of the X direction is represented as X1, and the other side of the X direction is represented as X2. In addition, the direction perpendicular to the X direction is set to the Y direction, one side of the Y direction is represented as Y1, and the other side of the Y direction is represented as Y2. In addition, the direction perpendicular to the X direction and the Y direction is set to the Z direction, one side of the Z direction is represented as Z1, and the other side of the Z direction is represented as Z2. In addition, the center axis J ( Figure 1 、 Figure 2 ) direction is referred to as the “circumferential direction.” In addition, the radial direction relative to the center axis J is referred to as the “radial direction.”

[0031] <1. Overall structure of the inspection device>

[0032] Here, refer to Figures 1 to 4 The overall structure of an inspection device according to one embodiment of the present invention will be described. Figure 1 As shown, an inspection device 5 according to one embodiment of the present invention performs electrical inspection on an inspection object 10. Figure 1 In the figure, the X1 side is the bottom side, and the X2 side is the top side. Furthermore, the Y1 side is the left side of the paper, and the Y2 side is the right side of the paper. Furthermore, the Z1 side is the front side of the paper, and the Z2 side is the back side of the paper.

[0033] Inspection object 10 is, for example, a semiconductor wafer having multiple circuits formed on a semiconductor substrate such as silicon. The semiconductor wafer is sliced into semiconductor chips each having the aforementioned circuits by dicing. Besides semiconductor wafers, inspection object 10 may also be an electronic component such as a semiconductor chip, a CSP (Chip Size Package), or a semiconductor element.

[0034] Alternatively, the inspection object 10 may be a substrate. In this case, the inspection object 10 may be, for example, a printed wiring substrate, a glass epoxy substrate, a flexible substrate, a ceramic multilayer wiring substrate, a package substrate for semiconductor packaging, an intermediate component substrate, a film carrier, or an electrode plate for a display such as a liquid crystal display, an EL (Electro-Luminescence) display, or a touch panel display, or an electrode plate for a touch panel.

[0035] Alternatively, products based on a packaging technology called EMIB (Embedded Multi-die Interconnect Bridge) can be used as inspection targets 10. In EMIB, a small silicon substrate called a silicon bridge is embedded in a packaging resin substrate, and fine, high-density wiring is formed on the surface of the silicon bridge, allowing adjacent silicon dies to be mounted close to each other on the packaging resin substrate.

[0036] The inspection apparatus 5 includes an inspection jig 2 and an inspection processing unit (scanner) 3. In this embodiment, as an example, the number of inspection processing units 3 is six. However, the number of inspection processing units 3 may be more than six or may be a single unit.

[0037] The inspection jig 2 includes a probe head 1. The probe head 1 includes a plurality of contact terminals 11 and a support member 12. That is, the inspection jig 2 includes the contact terminals 11.

[0038] The contact terminal 11 is formed into a rod-like shape extending in the vertical direction. In this embodiment, as an example, the contact terminal 11 includes a cylindrical body 111, a first conductor (plunger) 112, and a second conductor (plunger) 113. The cylindrical body 111 is formed into a cylindrical shape using a nickel or nickel alloy tube having an outer diameter of approximately 25 to 300 μm and an inner diameter of approximately 10 to 250 μm. In addition, a conductive layer such as gold plating is preferably formed on the inner circumference of the cylindrical body 111. Furthermore, the outer circumference of the cylindrical body 111 may also be insulated and coated as needed.

[0039] The first conductor 112 and the second conductor 113 are formed from a conductive material such as a palladium alloy. The first conductor 112 is inserted into the cylindrical body 111 from the X1 side, and the end of the inserted portion on the X1 side is fixed to the cylindrical body 111 by press-fitting or the like. When the first conductor 112 is fixed to the cylindrical body 111, a portion of the first conductor 112 forms a protrusion that protrudes from the cylindrical body 111 toward the X1 side. One end of this protrusion forms one end 11A of the contact terminal 11. One end 11A can contact the inspection point 10A of the inspection object 10.

[0040] The second conductor 113 is inserted into the cylindrical body 111 from the other X2 side, and the end of the inserted portion on the other X2 side is fixed to the cylindrical body 111 by press-fitting or the like. When the second conductor 113 is fixed to the cylindrical body 111, a portion of the second conductor 113 forms a protrusion that protrudes from the cylindrical body 111 toward the other X2 side. The other end of this protrusion serves as the other end 11B of the contact terminal 11.

[0041] The cylindrical body 111 has a spring portion midway in the vertical direction. This allows the cylindrical body 111 to expand and contract in the vertical direction. Furthermore, a conductive path is formed through the first conductor 112, the cylindrical body 111, and the second conductor 113.

[0042] The support member 12 supports a plurality of contact terminals 11. More specifically, for example, a through-hole extending vertically through the support member 12 is formed, and the contact terminals 11 are accommodated in the through-hole. In this case, the dimensional relationship between the contact terminals 11 and the through-hole prevents the contact terminals 11 from falling out toward the one side X1 when inserted into the through-hole.

[0043] The inspection jig 2 includes, in addition to the probe head 1 , a first accommodating member 21 , an insulating member 22 , a first substrate 23 , a plurality of wires 24 , a fixing portion 25 , a second accommodating member 26 , an intermediate member 27 , a third accommodating member 28 , and a second substrate 29 .

[0044] like Figure 3 As shown, the first container 21 is a plate having a quadrilateral outer shape when viewed from above and below, and is formed of a metal such as aluminum. The first container 21 has a first container portion 21A that is recessed toward the other X2 side. The insulating member 22 is housed in the first container portion 21A.

[0045] The insulating member 22 is a plate-shaped member having a recessed portion 22A recessed toward one direction X1 and is formed of an insulating material. The insulating member 22 is formed of, for example, ceramics or resin as an insulating material. As an example of such a resin, SUMIKASUPER (registered trademark) can be used.

[0046] That is, the inspection jig 2 includes a plate-shaped insulating member 22 having a recessed portion 22A.

[0047] The insulating member 22 is provided with a through hole 221A that passes through the bottom 221 of the recess 22A. A plurality of through holes 221A are provided, and as an example, the through holes 221A are formed corresponding to the positions of the contact terminals 11 .

[0048] One end 24A of a wire 24 is inserted into through-hole 221A. Wire 24 is formed, for example, from an enameled wire. Enameled wire is formed by covering a copper wire with an insulating coating. In other words, wire 24 has an insulating coating. This prevents short circuits between wires 24, even when the spacing between through-holes 221A is narrow and wires 24 are prone to contact.

[0049] A fifth electrode E5 is formed on the end surface including one end portion 24A of the conductive wire 24. The fifth electrode E5 is formed on one side surface 221S1 of the bottom 221. The other side end portion of the second conductor 113, that is, the other side end portion 11B of the contact terminal 11, is brought into contact with the fifth electrode E5, and the support member 12 is fixed to one side surface 221S1 of the bottom 221. In this state, the probe head 1 is placed on one side X1 of the insulating member 22. As a result, the spring portion of the cylindrical body 111 is compressed in the vertical direction, and the other side end portion 11B abuts against the fifth electrode E5 due to the elastic force of the spring portion. As a result, the conductive state between the contact terminal 11 and the fifth electrode E5 is stabilized. That is, the inspection fixture 2 includes a conductive wire 24 electrically connected to the contact terminal 11.

[0050] Thus, one end portion 24A of one wire 24 is inserted into one through-hole 221A, and one contact terminal 11 is electrically connected to the wire 24. That is, the number of through-holes 221A is the same as the number of wires 24 and the number of contact terminals 11.

[0051] The first substrate 23 is disposed on the other side surface 21S of the first receiving member 21. The first substrate 23 is disposed on the other X2 side of the insulating member 22. Figure 3 As shown, as an example, the first substrate 23 has a quadrilateral shape as an outer shape when viewed in the vertical direction. Figure 2 As shown in FIG, the first substrate 23 has a substrate through-hole 23A extending vertically through the first substrate 23 at its center. That is, the first substrate 23 has the substrate through-hole 23A extending in the thickness direction of the insulating member 22.

[0052] like Figure 2 As shown, on the other side surface 23S of the first substrate 23, a plurality of first electrode regions 231R each having a plurality of first electrodes 231 are arranged circumferentially around the substrate through hole 23A. Figure 3 , a first electrode 231 in the first electrode region 231R is representatively shown, and the same applies to the second electrode 232 and the fourth electrode 292. That is, the inspection jig 2 includes a first substrate 23 having a first electrode 231. The first electrode region 231R is formed into a shape obtained by removing a sector from a triangle. The group of first electrodes 231 arranged in each first electrode region 231R is connected to the inspection processing unit 3 (see FIG. 1 ) provided with a plurality of electrodes. Figure 1) are electrically connected to each of them. In this embodiment, the number of the inspection and processing units 3 is six, and therefore the number of the first electrode regions 231R is also six.

[0053] In addition, if Figure 2 As shown, the first accommodating part 21 has a through hole 21C that passes through in the up-down direction at the central position. The substrate through hole 23A is connected to the other X2 side of the through hole 21C. The wire 24 is led out from the other side surface 221S2 of the bottom 221 to the other X2 side, passes through the through hole 21C and the substrate through hole 23A and is connected to the first electrode 231. That is, the other end 24B of the wire 24 is connected to the first electrode 231. Thus, the contact terminal 11 is electrically connected to the first electrode 231 via the wire 24. In other words, the wire 24 is arranged in the substrate through hole 23A. In a planar view observed from the one side X1, the wire 24 extends radially inward from the first electrode 231 to the substrate through hole 23A. Thus, the spacing between the contact terminals 11 electrically connected to the wire 24 can be narrowed to cope with the narrowing of the spacing of the inspection points 10A of the inspection object 10.

[0054] Here, if Figure 1 as well as Figure 2 As shown, the first substrate 23 has a portion that is located on the side of the recess 22A of the insulating member 22 and overlaps with the insulating member 22 when viewed in the thickness direction of the insulating member 22. With this structure, when viewed in plan from the X direction (the aforementioned thickness direction), the distance between the position of the through hole 221A and the position of the first electrode 231 is shorter than when the first substrate 23 and the insulating member 22 do not overlap. Consequently, the length of the conductive wire 24 can be shortened, reducing the resistance of the conductive path.

[0055] Here, the number of first electrodes 231 on the first substrate 23 is greater than the number of wires 24. That is, some first electrodes 231 are not connected to the other end portions 24B. This allows the first substrate 23 to be standardized even when the type of inspection object 10 or even the type of probe head 1 changes, thus shortening the manufacturing time of the inspection jig 2.

[0056] The other end 24B of the wire 24 is not limited to being connected to a portion of the first electrodes 231 in the first substrate 23 as described above, but may be connected to all of the first electrodes 231 in the first substrate 23. That is, the other end 24B of the wire 24 is connected to the first electrode 231.

[0057] Part of fixing portion 25 is placed on the other side surface 221S2 of bottom portion 221 and accommodated in recess 22A. As described later, fixing portion 25 is a molded portion formed of a curable resin and has a function of fixing part of lead wire 24 to insulating member 22.

[0058] Note that a method for manufacturing the structure of the insulating member 22 , the first substrate 23 , the wire 24 , the fixing portion 25 , and the fifth electrode E5 will be described later.

[0059] like Figure 3 As shown, on the other side surface 23S of the first substrate 23, three second electrode regions 232R are arranged along the Z direction on the Y1 side and the Y2 side of the first electrode region 231R. The second electrodes 232 arranged in each second electrode region 232R are connected to the plurality of inspection processing units 3 (see FIG. Figure 1 ) for each electrical connection. Figure 3 In the embodiment, the number of the inspection and processing units 3 is six, and therefore the number of the second electrode regions 232R is also six. The second electrode 232 is arranged on the substrate portion 230 (see Figure 7 ) The internal wiring (not shown) is electrically connected to the first electrode 231.

[0060] That is, the first substrate 23 includes the second electrode 232 electrically connected to the first electrode 231 and arranged on the other side surface 23S of the first substrate 23. This facilitates electrical connection between the inspection and processing unit 3 arranged on the other X2 side of the first substrate 23 and the first substrate 23.

[0061] like Figure 3 As shown, the second receiving member 26 is a plate-shaped, quadrilateral shape when viewed from above, and is formed from a metal such as aluminum. The second receiving member 26 has a hole 26A extending through the thickness of the second receiving member 26 at its center. When viewed from above, the first electrode region 231R is exposed through the hole 26A. This allows the lead 24 to be positioned within the hole 26A.

[0062] The second receiving member 26 has three second receiving portions 26B arranged along the Z direction, one on the Y1 side and the other on the Y2 side. The second receiving portions 26B are holes extending through the thickness direction (X direction). When viewed from above, the second electrode region 232R is exposed through the second receiving portions 26B.

[0063] like Figure 4 As shown, a portion of the intermediate member 27 protrudes from the third housing member 28 toward one side X1 and has, as an example, a substantially quadrilateral outer diameter when viewed in the vertical direction.

[0064] like Figure 1 and Figure 2As shown, the intermediate member 27 includes a connecting member 271. The connecting member 271 includes, for example, a spring member 2711 that is expandable and contractible in the vertical direction, a first plunger 2712, and a second plunger 2713. The first plunger 2712 is fixed to one end 2711A of the spring member 2711. The second plunger 2713 is fixed to the other end 2711B of the spring member 2711. The spring member 2711, the first plunger 2712, and the second plunger 2713 are formed of a conductive material.

[0065] Two third storage components 28 are arranged side by side in the Y direction. Each third storage component 28 has a recess 28A that is recessed toward the X1 side and is formed of a metal such as aluminum. Three recesses 28A are arranged side by side in the Z direction. Each second substrate 29 is accommodated in a respective recess 28A. In other words, six second substrates 29 are provided. The third storage component 28 has a through hole 28B connected to the X1 side of the recess 28A.

[0066] The third electrode 291 is formed on one side surface 29S1 of the second substrate 29. The second plunger 2713 is brought into contact with the third electrode 291 within the through-hole 28B, and the intermediate member 27 is fixed to the third receiving member 28. This vertically compresses the spring member 2711, and the elastic force of the spring member 2711 causes the second plunger 2713 to abut against the third electrode 291. Consequently, the conductive state between the second plunger 2713 and the third electrode 291 is stabilized.

[0067] Then, each intermediate member 27 is inserted into each second housing portion 26B, the first plunger 2712 is brought into contact with the second electrode 232, and the third housing member 28 is fixed to the second housing member 26. This vertically compresses the spring member 2711, and the elastic force of the spring member 2711 causes the first plunger 2712 to abut against the second electrode 232. Consequently, the conductive state between the first plunger 2712 and the second electrode 232 is stabilized.

[0068] In addition, if Figure 3 As shown, a fourth electrode region 292R having a plurality of fourth electrodes 292 arranged thereon is disposed on the other side surface 29S2 of each second substrate 29. In each substrate 29 on the one side Y1 in the Y direction, the fourth electrode region 292R is disposed on the one side Y1 in the Y direction. In each substrate 29 on the other side Y2 in the Y direction, the fourth electrode region 292R is disposed on the other side Y2 in the Y direction.

[0069] The fourth electrode 292 group disposed in each of the fourth electrode regions 292R and the plurality of inspection processing units 3 (see Figure 1 ) for each electrical connection. Figure 3In FIG, the number of the inspection and processing units 3 is six, and therefore the number of the fourth electrode regions 292R is also six. The fourth electrode 292 and the terminal 3A of the inspection and processing unit 3 (see FIG. Figure 1 )touch.

[0070] The third electrodes 291 and the fourth electrodes 292 are electrically connected by wiring inside the substrate portion of the second substrate 29. The pitch between the fourth electrodes 292 is determined by the pitch between the terminals 3A of the inspection and processing unit 3 and is wider than the pitch between the third electrodes 291.

[0071] Specifically, the inspection jig 2 includes a connecting member 271 extending in the thickness direction of the insulating member 22 and a second substrate 29. A third electrode 291 is disposed on one side surface 29S1 of the second substrate 29. A fourth electrode 292 is disposed on the other side surface 29S2 of the second substrate 29. The third and fourth electrodes 291 and 292 are electrically connected. The spacing between the fourth electrodes 292 is wider than the spacing between the third electrodes 291. One end 271A of the connecting member 271 contacts the second electrode 232. The other end 271B of the connecting member 271 contacts the third electrode 291.

[0072] This allows the spacing between the second electrodes 232 to be converted to the spacing between the fourth electrodes 292 for connection to the inspection and processing unit 3. Furthermore, the connecting member 271 includes a spring portion 2711 that is compressible in the thickness direction. This stabilizes the conductive state between the second electrodes 232 and the third electrodes 291.

[0073] With the above-described structure, the contact terminal 11 is electrically connected to the inspection and processing unit 3 via the fifth electrode E5 , the wire 24 , the first electrode 231 , the second electrode 232 , the connecting member 271 , the third electrode 291 , and the fourth electrode 292 .

[0074] When inspecting the inspection object 10, if Figure 1 As shown, one end 11A of contact terminal 11 is brought into contact with inspection point 10A of inspection object 10. At this point, the spring portion of cylindrical body 111 is vertically compressed, so the elastic force of the spring portion causes one end 11A to abut against inspection point 10A. This stabilizes the conductive state between one end 11A and inspection point 10A.

[0075] During inspection of the inspection object 10, the inspection points 10A and the inspection processing unit 3 are electrically connected. The inspection processing unit 3 sequentially outputs inspection signals to the inspection points 10A via the contact terminals 11, and in response, receives inspection signals from the inspection points 10A. Based on these inspection signals, the inspection processing unit 3 detects the presence of continuity between the inspection points 10A and inspects the inspection object 10 for disconnections, short circuits, and other conditions.

[0076] Furthermore, in a configuration where the contact terminals 11 are directly electrically connected to the electrodes of the second substrate 29 via the wires 24, the second substrate 29 would need to be replaced every time the specifications of the inspection object 10 are changed. In contrast, in this embodiment, even when the specifications of the inspection object 10 are changed, only the portion comprising the probe head 1, the first housing member 21, the insulating member 22, the first substrate 23, the wires 24, the fixing member 25, and the second housing member 26 need to be replaced. The portion comprising the intermediate member 27, the third housing member 28, and the second substrate 29 does not need to be replaced. Consequently, the six large second substrates 29 can be made common, and only the smaller first substrate 23 can be replaced, thereby reducing operating costs. In particular, the pitch between the third electrodes 291 is narrower than the pitch between the fourth electrodes 292. This allows the pitch between the connecting members 271 and the pitch between the second electrodes 232 to be narrowed, allowing the first substrate 23 to be smaller than the six second substrates 28, thus reducing operating costs.

[0077] Alternatively, the contact terminal 11 may be a flexible, linear inspection contact. The contact terminal 11 is supported on the support member 12 in a vertically inclined position. Then, by bringing the inspection point 10A into contact with one end 11A of the contact terminal 11, the contact terminal 11 is bent. By supporting the contact terminal 11 at an angle, the direction of the bend can be determined. Using such a linear inspection contact enables the inspection of a more highly integrated inspection object 10.

[0078] <2. Method for Manufacturing the Electrical Connection Structure Between the Contact Terminal and the First Substrate>

[0079] Next, refer to Figures 5 to 11 A description will be given of a manufacturing process for the structure that electrically connects the contact terminals 11 and the first substrate 23 in the inspection jig 2 .

[0080] in addition, Figures 5 to 11 The process is performed with the insulating member 22 and the first substrate 23 housed in the first housing member 21. Specifically, the inspection jig 2 includes the housing member 21 having a first housing portion 21A that is recessed and houses the insulating member 22. This facilitates positioning of the insulating member 22 for connecting the lead wire 24 to the first electrode 231, as will be described later.

[0081] First, the type of probe head 1 is switched, and the configuration position of the contact terminal 11 changes according to the type. When the type of probe head 1 is determined, a through hole 221A is formed in the bottom 221 of the insulating component 22 at a position corresponding to the configuration of the contact terminal 11. In addition, the through holes 221A can also be formed in a matrix shape, and the through holes 221A at positions corresponding to the positions of the contact terminals 11 are used. That is, the number of through holes 221A is greater than the number of contact terminals 11. Thus, the insulating component 22 having the matrix-shaped through holes 221A can be prepared in advance, and the insulating component 22 does not need to be manufactured after the type of probe head 1 is determined. In addition, the thickness of the bottom 221 is thin, so it is easy to form the through holes 221A. Here, as Figure 5 As shown, the through hole 221A has an opening 221A1 on one side surface 221S1 of the bottom 221 and an opening 221A2 on the other side surface 221S2 of the bottom 221. Figure 5 As shown, the lead wire 24 is inserted into the through hole 221A from the opening 221A2 side.

[0082] Then, if Figure 6 As shown in FIG. 2 , the protruding portion 24T of the lead wire 24 that protrudes from the opening 221A1 is tightened. This can prevent the lead wire 24 from falling out of the through hole 221A.

[0083] Then, if Figure 7 As shown, a process is performed to bond the bonding portion 24S located midway along the portion of the wire 24 extending from the opening 221A2 to the first electrode 231 of the first substrate 23. Here, bonding is performed using wire bonding technology. For example, while pressing the bonding portion 24S against the first electrode 231, ultrasonic vibrations are imparted to the bonding portion 24S. This generates friction between the contact surfaces of the bonding portion 24S and the first electrode 231, and the bonding portion 24S and the first electrode 231 are bonded together by frictional heat. At this point, the bonding portion 24S and the first electrode 231 are electrically connected.

[0084] also, Figure 7 The illustrated first electrode 231 is a film-shaped pad protruding from the substrate portion 230 of the first substrate 23 , but the present invention is not limited thereto and may be a pad disposed inside the substrate portion 230 .

[0085] Then, the side of the wire 24 that is not on the through-hole 221A side of the bonding portion with the first electrode 231 is cut away from the bonding portion.

[0086] Then, a fixing component flows into the area around the opening 221A2 in the recess 22A. A thermosetting resin or a light-curing resin is used for the fixing component. The fixing component is in liquid form before solidification. The fixing component flowing into the recess 22A flows into the gap between the through hole 221A and the wire 24 and reaches one side surface 221S1 of the bottom 221. By supplying heat or light, the fixing component in the recess 22A solidifies and becomes the first fixing component 25A (see Figure 8 By supplying heat or light, the fixing member in the gap between the through hole 221A and the lead wire 24 is cured to become the second fixing member 25B (see Figure 8 ). By supplying heat or light, the fixing member on one side surface 221S1 is cured to become the third fixing member 25C (see Figure 8 ).

[0087] After the first fixing member 25A, the second fixing member 25B, and the third fixing member 25C are formed, the bent protrusion 24T (see FIG. 24A ) of the wire 24 is cut. Figure 8 ) is removed. Then, the cut surface of the wire 24 and the third fixing member 25C are ground. Figure 9 As shown, the end face 241 of the polished wire 24 is flush with one side face 221S1 of the bottom 221. Figure 9 In the illustrated state, the fixing member 25 is formed by the first fixing member 25A and the second fixing member 25B.

[0088] In addition, in the above description, the third fixing member 25C is removed by grinding, but the first fixing member 25A may be removed without removing the third fixing member 25C, or both the first fixing member 25A and the third fixing member 25C may be removed. Figure 9 Although both the first fixing member 25A and the second fixing member 25B are provided, either one of the first fixing member 25A and the second fixing member 25B may be removed.

[0089] Then, if Figure 10 As shown, the end surface 24TS of the lead 24 is etched so that it is located closer to the inside of the through-hole 221A than the opening 221A1. This end surface 24TS is then nickel-plated to form a first metal layer. The tip of the first metal layer is positioned so that it protrudes beyond the opening 221A1. The tip of the first metal layer is then polished to be flush with one side surface 221S1.

[0090] Next, the first metal layer is plated with gold to form the second metal layer. Figure 11As shown, one end 24A of the conductive wire 24 is positioned within the through-hole 221A. On one side X1 of the end surface 24TS of the one end 24A, a first metal layer M1 and a second metal layer portion M2 are stacked in this order. The end surface 24TS, the first metal layer M1, and the second metal layer M2 form the fifth electrode E5. The other end 11B of the contact terminal 11 contacts the second metal layer M2. In other words, the contact terminal 11 is electrically connected to the end surface 24TS via the second metal layer M2 and the first metal layer M1. In other words, the contact terminal 11 is electrically connected to the conductive wire 24.

[0091] Alternatively, the fifth electrode E5 may be formed by the end surface 24TS and the first metal layer M1 without forming the second metal layer M2. Alternatively, the fifth electrode E5 may be formed by the end surface 24TS and the second metal layer M2 without forming the first metal layer M1. Alternatively, the fifth electrode E5 may be formed by the end surface 24TS without forming the first metal layer M1 and the second metal layer M2.

[0092] Alternatively, instead of performing the etching process, at least one of the first metal layer M1 and the second metal layer M2 may be formed on the end surface 241 (see Figure 9 Alternatively, the etching process may not be performed, and the first metal layer M1 and the second metal layer M2 may not be formed on the end surface 241. Alternatively, Figure 8 The protrusion 24T is cut off in the state, and the cut surface is set as the fifth electrode E5 without grinding.

[0093] Thus, according to this embodiment, once the position of the contact terminal 11 is determined, through-holes 221A are formed in the insulating member 22 based on the position of the contact terminal 11. One end of the wire 24 is positioned in the through-hole 221A, and the other end of the wire 24 is connected to the first substrate 23. The first substrate 23 and the insulating member 22 can be prepared in advance. Furthermore, the processing of the insulating member 22 is completed by forming the through-holes 221A. Furthermore, the provision of the recessed portion 22A reduces the thickness of the bottom 221 of the insulating member 2, making it easier to form the through-holes 221A. Therefore, the manufacturing time of the inspection jig 2 can be shortened after the position of the inspection point 10A of the inspection object 10, and therefore the position of the contact terminal 11, is determined. Furthermore, if the insulating member 22 with the through-holes 221A formed in a matrix pattern can be prepared in advance, the manufacturing time can be further shortened.

[0094] In particular, the use of wire bonding technology to connect the wires 24 to the first electrode 231 facilitates automation of the connection. The number of wires 24 can sometimes reach thousands, and manual soldering is very time-consuming in such cases. Automating the connection significantly improves manufacturing efficiency.

[0095] As described above, the inspection apparatus 5 of this embodiment includes the inspection jig 2 and the inspection processing unit 3 electrically connected to the first electrode 231. This improves the manufacturing efficiency of the inspection jig for electrically connecting the inspection object 10 and the inspection processing unit 3.

[0096] The inspection jig 2 also includes a fixing member 25 disposed in at least one of the recess 22A and the through-hole 221A to fix a portion of the lead wire 24 to the insulating member 22. This prevents the lead wire 24 from falling off the insulating member 22.

[0097] Furthermore, fixing member 25 includes a thermosetting resin or a photocurable resin. Thermosetting resin and photocurable resin are liquid before curing and therefore easily flow into the gap between through-hole 221A and lead 24. Furthermore, when fixing member 25 is disposed in recess 22A, leakage of the liquid thermosetting resin or photocurable resin to the outside of insulating member 22 can be suppressed.

[0098] The fixing member 25 is not limited to the above, and may include a thermoplastic resin or an adhesive. The fixing member 25 is not essential, and the lead wire 24 may be fixed to the through hole 221A by press-fitting.

[0099] Furthermore, the end surface 24TS of one end portion 24A of the conductive wire 24 is positioned within the through-hole 221A. A first metal layer M1 is provided on the end surface 24TS. The first metal layer M1 is formed, for example, of nickel and has a higher hardness than the copper conductor of the conductive wire 24, which serves as the enameled wire. In other words, the first metal layer M1 is harder than the conductive wire 24. Since the first metal layer M1 is formed by plating within the through-hole 221A, it is easy to increase the thickness of the first metal layer M1. Increasing the thickness of the first metal layer M1, which is harder than the conductive wire 24, can prevent the first metal layer M1 from abrading and exposing the conductive wire 24.

[0100] Furthermore, the second metal layer M2 is connected to the first metal layer M1 , so that the surface of the first metal layer M1 is covered by the second metal layer M2 , thereby suppressing corrosion of the first metal layer M1 .

[0101] <3. Other>

[0102] While the embodiment of the present invention has been described above, the embodiment can be modified in various ways within the scope of the gist of the present invention.

[0103] Availability in production

[0104] The present invention can be used for electrical inspection of various inspection objects.

[0105] Explanation of symbols

[0106] 1 - probe head, 11 - contact terminal, 111 - cylindrical body, 112 - first conductor, 113 - second conductor, 12 - support member, 2 - inspection fixture, 21 - first accommodating member, 22 - insulating member, 221 - bottom, 221A - through hole, 22A - recess, 23 - first substrate, 231 - first electrode, 232

[0107] —Second electrode, 24—Wire, 25—Fixing component, 26—Second accommodating component, 27—Intermediate component, 271—Connecting component, 28—Third accommodating component, 29—Second substrate, 291—Third electrode, 292—Fourth electrode, 3—Inspection processing unit, 5—Inspection device, 10—Inspection object, E5—Fifth electrode, M1—First metal layer, M2—Second metal layer, J—Center axis.

Claims

1. An inspection jig capable of being attached to and detached from an intermediate member electrically connected to a second substrate, characterized in that: have: Plate-shaped insulating components; a first substrate having a first electrode and a second electrode electrically connected to the first electrode; a wire electrically connected to the contact terminal; and a plate-shaped receiving component, which is mounted on the first substrate and has a receiving portion that passes through in the thickness direction; The second electrode is exposed through the accommodation portion, The intermediate component can be accommodated in the accommodation portion, The insulating component is provided with a through hole penetrating in the thickness direction. One end portion of the wire is disposed in the through hole, The other end of the wire is connected to the first electrode.

2. The inspection fixture according to claim 1, characterized in that: It also has a plate-shaped plate member, The first substrate is located between the accommodation portion and the plate member.

3. The inspection fixture according to claim 1, characterized in that: The outer shape of the accommodating component is a quadrilateral.

4. The inspection fixture according to claim 1, characterized in that: The receiving member is configured to cover the first substrate.

5. The inspection fixture according to claim 2, characterized in that: The receiving member is configured to cover the first substrate.

6. The inspection fixture according to claim 1, characterized in that: A fixing member is further provided. The fixing member is disposed in the through hole and fixes a portion of the lead wire to the insulating member.

7. The inspection fixture according to claim 6, characterized in that: The fixing member includes a thermosetting resin or a light-curing resin.

8. The inspection fixture according to claim 1, characterized in that: The end surface of the one end portion of the wire is located inside the through hole, and a first metal layer is provided on the end surface. The hardness of the first metal layer is higher than that of the conductive line.

9. The inspection fixture according to claim 8, characterized in that: The second metal layer is connected to the first metal layer.

10. The inspection fixture according to claim 1, characterized in that: A contact terminal electrically connected to the conductive wire is also provided.

11. The inspection fixture according to claim 1, characterized in that: It also includes a connecting member extending along the thickness direction, The connecting member includes a spring portion that is compressible in the thickness direction.

12. The inspection fixture according to claim 1, characterized in that: Also features: a connecting member extending in the thickness direction; and the second substrate, The third electrode is disposed on one side surface of the second substrate. The fourth electrode is disposed on the other side surface of the second substrate. The third electrode and the fourth electrode are electrically connected, The spacing between the fourth electrodes is wider than the spacing between the third electrodes, One end portion of the connecting member is in contact with the second electrode. The other end portion of the connecting member is in contact with the third electrode.

13. An inspection device, characterized in that: have: The inspection jig according to any one of claims 1 to 12; and The inspection processing unit is electrically connected to the first electrode.

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