Compact synchrotron vacuum system and design method

Abstract

The invention provides a compact synchrotron vacuum system and a design method, and relates to the technical field of particle acceleration. The vacuum system comprises a first vacuum unit and a second vacuum unit, the first vacuum unit comprises at least two first beam deflection vacuum tubes, and the adjacent first beam deflection vacuum tubes are connected through a first beam regulation and control vacuum tube; the second vacuum unit comprises at least two second beam deflection vacuum tubes, and the adjacent second beam deflection vacuum tubes are connected through a second beam regulation and control vacuum tube; a second beam deflection vacuum tube at one end of the second vacuum unit is connected with a first beam regulation vacuum tube at the first end of the first vacuum unit, and a second beam deflection vacuum tube at the other end of the second vacuum unit is connected with a first beam regulation vacuum tube at the second end of the first vacuum unit; and a beam diagnosis element is arranged in the first beam regulation and control vacuum tube of the first vacuum unit, so that the perimeter of the vacuum system can be shortened, and the popularization difficulty of the medical accelerator treatment device in small and medium-sized medical institutions is reduced.

Description

Technical Field

[0001] The present invention relates to the field of particle acceleration technology, and in particular to a compact synchrotron vacuum system and a design method. Background Art

[0002] In recent years, the number of cancer patients has been increasing each year, and cancer has become a major threat to life and health. Currently, cancer treatment usually uses cancer radiotherapy. Medical carbon ion therapy is an advanced and effective cancer radiotherapy method at home and abroad. The implementation of medical carbon ion therapy relies on medical accelerator treatment devices, which are mainly composed of ion sources, linear injectors, injection transmission lines, synchrotrons, high-energy transmission lines, and treatment terminals. The synchrotron is the main component of the medical accelerator treatment device, and the vacuum system of the synchrotron is an indispensable component that provides an ultra-high vacuum environment for the operation of the beam in the synchrotron. The synchrotron of traditional medical accelerator treatment devices is large in size, with a circumference of about 60m and a large footprint, making it difficult to popularize in small and medium-sized medical institutions. Summary of the Invention

[0003] In view of the problems existing in the prior art, the present invention provides a compact synchrotron vacuum system and a design method.

[0004] The present invention provides a compact synchrotron vacuum system, comprising: A first vacuum unit, the first vacuum unit comprising: a first beam deflection vacuum tube, wherein at least two first beam deflection vacuum tubes are provided; a first beam control vacuum tube, wherein adjacent first beam deflection vacuum tubes are connected via the first beam control vacuum tube; A second vacuum unit, the second vacuum unit comprising: a second beam deflection vacuum tube, wherein at least two second beam deflection vacuum tubes are provided; a second beam control vacuum tube, wherein adjacent second beam deflection vacuum tubes are connected via the second beam control vacuum tube; Among them, the second beam control vacuum tube at one end of the second vacuum unit is connected to the first beam deflection vacuum tube at the first end of the first vacuum unit, and the second beam deflection vacuum tube at the other end of the second vacuum unit is connected to the first beam control vacuum tube at the second end of the first vacuum unit; a beam diagnosis element is provided in the first beam control vacuum tube of the first vacuum unit.

[0005] A compact synchrotron vacuum system according to the present invention further includes at least two racetrack-shaped hydraulic bellows; The first beam deflection vacuum tube is connected to the first beam control vacuum tube via the racetrack-shaped hydraulic bellows, and the second beam deflection vacuum tube is connected to the second beam control vacuum tube via the racetrack-shaped hydraulic bellows.

[0006] According to a compact synchrotron vacuum system provided by the present invention, the first beam control vacuum tube at the second end of the first vacuum unit includes: a circulating beam thin-walled tube, wherein an input end of the circulating beam thin-walled tube is connected to the first beam deflection vacuum tube, and an output end of the circulating beam thin-walled tube is used to output a beam to the second beam deflection vacuum tube at the other end of the second vacuum unit; An extraction beam thin-walled tube, wherein the input end of the extraction beam thin-walled tube is connected to the first beam deflection vacuum tube, and the output end of the extraction beam thin-walled tube is connected to the treatment terminal.

[0007] According to a compact synchrotron vacuum system provided by the present invention, the circulating beam thin-walled tube comprises: The circulating bundle tube wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm; At least two circulating bundle thin-wall reinforcement plates, the at least two circulating bundle thin-wall reinforcement plates being arranged at equal intervals on the outside of the circulating bundle tube wall; The extraction bundle thin-walled tube comprises: The outgoing bundle tube wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm; At least two thin-wall reinforcement plates for the extraction bundle are arranged at equal intervals on the outer side of the extraction bundle tube wall.

[0008] According to a compact synchrotron vacuum system provided by the present invention, the first beam deflection vacuum tube comprises: a first tube wall, wherein the material of the first tube wall is stainless steel, and the wall thickness of the first tube wall is 0.25-0.35 mm; a first titanium alloy liner supported inside the first tube wall; The second beam deflection vacuum tube comprises: The second tube wall is made of stainless steel and has a wall thickness of 0.25-0.35 mm; A second titanium alloy liner is supported inside the second tube wall.

[0009] According to a compact synchrotron vacuum system provided by the present invention, the first titanium alloy liner includes at least two first titanium alloy rings, and the at least two first titanium alloy rings are supported at equal intervals inside the first tube wall; The second titanium alloy liner includes at least two second titanium alloy rings, and the at least two second titanium alloy rings are supported inside the second tube wall at equal intervals.

[0010] According to a compact synchrotron vacuum system provided by the present invention, the first beam deflection vacuum tube includes a first deflection thin-walled vacuum chamber, a second deflection thin-walled vacuum chamber, a third deflection thin-walled vacuum chamber, a fourth deflection thin-walled vacuum chamber and a fifth deflection thin-walled vacuum chamber; The first beam control vacuum tube includes: a first sub-beam current control vacuum tube, the first sub-beam current control vacuum tube comprising: a first thin-walled quadrupole vacuum chamber, an injection vacuum chamber, an injection electrostatic deflection plate cavity, and a second thin-walled quadrupole vacuum chamber connected in sequence; a free end of the first thin-walled quadrupole vacuum chamber being connected to a first end of the first deflection thin-walled vacuum chamber, and a free end of the second thin-walled quadrupole vacuum chamber being connected to a first end of the second deflection thin-walled vacuum chamber; a second sub-beam current regulating vacuum tube, the second sub-beam current regulating vacuum tube comprising: a third thin-walled quadrupole vacuum chamber, a first beam diagnosis cavity, and a second ceramic vacuum chamber connected in sequence; a free end of the third thin-walled quadrupole vacuum chamber is connected to the second end of the second deflection thin-walled vacuum chamber, and a free end of the second ceramic vacuum chamber is connected to the first end of the third deflection thin-walled vacuum chamber; a third sub-beam current control vacuum tube, the third sub-beam current control vacuum tube comprising: a fourth thin-walled quadrupole vacuum chamber, a high-frequency cavity, and a fifth thin-walled quadrupole vacuum chamber connected in sequence; a free end of the fourth thin-walled quadrupole vacuum chamber connected to the second end of the third deflection thin-walled vacuum chamber, and the fifth thin-walled quadrupole vacuum chamber connected to the first end of the fourth deflection thin-walled vacuum chamber; a fourth sub-beam current control vacuum tube, the fourth sub-beam current control vacuum tube comprising: a first thin-walled hexapole vacuum chamber and an extraction electrostatic deflection plate cavity connected in sequence, wherein a free end of the first thin-walled hexapole vacuum chamber is connected to a second end of the fourth deflection thin-walled vacuum chamber, and the extraction electrostatic deflection plate cavity is connected to a first end of the fifth deflection thin-walled vacuum chamber; a first extraction sub-beam control vacuum tube, the first extraction sub-beam control vacuum tube comprising a sixth thin-walled quadrupole vacuum chamber, an extraction vacuum chamber, and a first bellows connected in sequence, wherein a free end of the sixth thin-walled quadrupole vacuum chamber is connected to the second end of the fifth deflection thin-walled vacuum chamber; The second beam deflection vacuum tube includes a sixth deflection thin-walled vacuum chamber, a seventh deflection thin-walled vacuum chamber, and an eighth deflection thin-walled vacuum chamber; a first end of the sixth deflection thin-walled vacuum chamber is connected to a free end of the first bellows; The second beam control vacuum tube includes: a fifth sub-beam current control vacuum tube, the fifth sub-beam current control vacuum tube comprising: an eighth thin-walled quadrupole vacuum chamber, a third beam diagnosis cavity, and a first vacuum pump chamber connected in sequence; a free end of the eighth thin-walled quadrupole vacuum chamber connected to the second end of the sixth deflection thin-walled vacuum chamber, and a free end of the first vacuum pump chamber connected to the first end of the seventh deflection thin-walled vacuum chamber; a sixth sub-beam current control vacuum tube, the sixth sub-beam current control vacuum tube comprising: a ninth thin-walled quadrupole vacuum chamber, a DC beam transformer, a second bellows, a fourth beam diagnosis cavity, a second vacuum pump chamber, and a tenth thin-walled quadrupole vacuum chamber connected in sequence; a free end of the ninth thin-walled quadrupole vacuum chamber connected to the second end of the seventh deflection thin-walled vacuum chamber, and a free end of the tenth thin-walled quadrupole vacuum chamber connected to the first end of the eighth deflection thin-walled vacuum chamber; The second extraction sub-beam control vacuum tube includes a second thin-walled hexapole vacuum chamber, a fifth beam diagnosis cavity and a sixth beam diagnosis cavity connected in sequence, the free end of the second thin-walled hexapole vacuum chamber is connected to the second end of the eighth deflection thin-walled vacuum chamber, and the free end of the sixth beam diagnosis cavity is connected to the second end of the first deflection thin-walled vacuum chamber.

[0011] According to the present invention, a compact synchrotron vacuum system further comprises at least two getter modules, which are respectively arranged inside the injection electrostatic deflection plate cavity and the extraction electrostatic deflection plate cavity.

[0012] A compact synchrotron vacuum system provided by the present invention further includes: At least three vacuum measuring devices, the at least three vacuum measuring devices being respectively arranged at the injection electrostatic deflection plate cavity, the extraction electrostatic deflection plate cavity and the second vacuum pump chamber; At least three molecular pump units, the at least three molecular pump units being respectively arranged at the injection electrostatic deflection plate cavity, the extraction electrostatic deflection plate cavity and the second vacuum pump chamber; At least six compound ion pumps are respectively arranged at the injection vacuum chamber, the injection electrostatic deflection plate cavity, the first beam diagnosis cavity, the fourth thin-walled quadrupole vacuum chamber, the extraction electrostatic deflection plate cavity, the extraction vacuum chamber, the first vacuum pump chamber, the second vacuum pump chamber and the fifth beam diagnosis cavity.

[0013] The present invention also provides a design method for a compact synchrotron vacuum system, comprising: Obtain the corresponding original three-dimensional structure model based on the original vacuum components of the compact synchrotron vacuum system; Performing a strength analysis on the original three-dimensional structural model to obtain a strength analysis result, and optimizing structural parameters of the original three-dimensional structural model based on the strength analysis result to obtain a three-dimensional structural model; determining a heat outflow rate of a vacuum component of the compact synchrotron vacuum system according to the optimized structural parameters of the three-dimensional structural model, and performing a pressure simulation on the three-dimensional structural model based on the heat outflow rate to determine an ultimate pressure of the three-dimensional structural model; The compact synchrotron vacuum system is obtained based on the ultimate pressure, the optimized structural parameters and the arrangement of the vacuum components of the three-dimensional structural model.

[0014] The compact synchrotron vacuum system and design method provided by the present invention, by arranging the beam diagnostic element in the first beam flow control vacuum tube of the first vacuum unit, eliminates the need to provide an independent vacuum cavity for the beam diagnostic element, thereby shortening the circumference of the vacuum system and reducing the difficulty of popularizing medical accelerator treatment devices using the vacuum system in small and medium-sized medical institutions. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction is given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1 This is one of the structural schematic diagrams of the compact synchrotron vacuum system provided by the present invention.

[0017] Figure 2 This is the second structural schematic diagram of the compact synchrotron vacuum system provided by the present invention.

[0018] Figure 3 This is the third structural schematic diagram of the compact synchrotron vacuum system provided by the present invention.

[0019] Figure 4 It is a flow chart of the design method of the compact synchrotron vacuum system provided by the present invention.

[0020] Figure numerals: 1: first gate valve; 2: first ceramic vacuum chamber; 3: first deflection thin-walled vacuum chamber; 4: first thin-walled quadrupole vacuum chamber; 5: injection vacuum chamber; 6: injection electrostatic deflection plate cavity; 7: second thin-walled quadrupole vacuum chamber; 8: second deflection thin-walled vacuum chamber; 9: third thin-walled quadrupole vacuum chamber; 10: first beam diagnosis cavity; 11: second ceramic vacuum chamber; 12: third deflection thin-walled vacuum chamber; 13: fourth thin-walled quadrupole vacuum chamber; 14: high-frequency cavity; 15: fifth thin-walled quadrupole vacuum chamber; 16: fourth deflection thin-walled vacuum chamber; 17: first thin-walled hexapole vacuum chamber; 1701: first titanium alloy ring; 1702: first tube wall; 1703: beam diagnosis element; 18: lead-out electrostatic deflection plate cavity; 19: fifth deflection thin-walled vacuum chamber; 20: sixth thin-walled Quadrupole vacuum chamber; 2001: extraction beam thin-walled tube; 2002: circulation beam thin-walled tube; 2003: ultra-high vacuum flange; 21: extraction vacuum chamber; 22: first bellows; 23: second gate valve; 24: second beam diagnosis cavity; 25: seventh thin-walled quadrupole vacuum chamber; 26: sixth deflection thin-walled vacuum chamber; 27: eighth thin-walled quadrupole vacuum chamber; 28: third beam diagnosis cavity; 29: first vacuum pump chamber; 30: seventh deflection thin-walled vacuum chamber; 31: ninth thin-walled quadrupole vacuum chamber; 32: DC beam transformer; 33: second bellows; 34: fourth beam diagnosis cavity; 35: second vacuum pump chamber; 36: tenth thin-walled quadrupole vacuum chamber; 37: eighth deflection thin-walled vacuum chamber; 38: second thin-walled hexapole vacuum chamber; 39: fifth beam diagnosis cavity; 40: sixth beam diagnosis cavity. DETAILED DESCRIPTION

[0021] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0022] In the description of the embodiments of this application, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of this application based on the specific circumstances.

[0023] In the embodiments of the present application, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, a first feature being "above," "above," and "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0024] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiments of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples, unless they are contradictory.

[0025] The following combination Figure 1-Figure 4 The compact synchrotron vacuum system and design method of the present invention are described.

[0026] Figure 1 This is one of the structural diagrams of the compact synchrotron vacuum system provided by the present invention, such as Figure 1 As shown, the vacuum system includes: A first vacuum unit, the first vacuum unit comprising: a first beam deflection vacuum tube, wherein at least two first beam deflection vacuum tubes are provided; a first beam control vacuum tube, wherein adjacent first beam deflection vacuum tubes are connected via the first beam control vacuum tube; A second vacuum unit, the second vacuum unit comprising: a second beam deflection vacuum tube, wherein at least two second beam deflection vacuum tubes are provided; a second beam control vacuum tube, wherein adjacent second beam deflection vacuum tubes are connected via the second beam control vacuum tube; In which, the second beam control vacuum tube at one end of the second vacuum unit is connected to the first beam deflection vacuum tube at the first end of the first vacuum unit, and the second beam deflection vacuum tube at the other end of the second vacuum unit is connected to the first beam control vacuum tube at the second end of the first vacuum unit; a beam diagnostic element 1703 is provided in the first beam control vacuum tube of the first vacuum unit.

[0027] Specifically, the vacuum unit is the core functional unit in the compact synchrotron vacuum system that provides an ultra-high vacuum environment for ion beam transmission.

[0028] The beam deflection vacuum tube is a vacuum element in the vacuum cell that guides the ion beam along a circular orbit. The beam control vacuum tube is a vacuum element in the vacuum cell that realizes the injection, extraction, focusing and acceleration of the ion beam.

[0029] Adjacent beam deflection vacuum tubes are connected through beam control vacuum tubes to form a ring-shaped vacuum system, which can ensure the continuity of the ultra-high vacuum environment to increase the continuity and stability of the ion beam during the deflection and control process.

[0030] In one embodiment, the second beam control vacuum tube at one end of the second vacuum unit and the first beam deflection vacuum tube at the first end of the first vacuum unit can be connected through a first gate valve 1, and the second beam deflection vacuum tube at the other end of the second vacuum unit and the first beam control vacuum tube at the second end of the first vacuum unit can be connected through a second gate valve 23. In this way, the first vacuum unit and the second vacuum unit can be vacuum isolated in an ultra-high vacuum environment through the first gate valve 1 and the second gate valve 23, so as to perform local maintenance and inspection on the vacuum system and reduce the operation and maintenance costs of the vacuum system.

[0031] In one embodiment, the ion beam can be injected from the first end of the first vacuum unit. The first gate valve 1 and the first beam deflection vacuum tube can be connected via a first ceramic vacuum chamber 2 to reduce the amount of heat outgassing at the connection between the first gate valve 1 and the first beam deflection vacuum tube. The second gate valve 23 and the second beam deflection vacuum tube can be connected via a second beam diagnosis cavity 24 and a seventh thin-walled quadrupole vacuum chamber 25. By monitoring the beam state, the thin-walled structure can suppress the eddy current effect caused by the rapidly changing magnetic field while maintaining ion beam stability, thereby improving the beam stability of the ion beam delivered to the second beam deflection vacuum tube.

[0032] The beam diagnostic element 1703 is a vacuum element integrated in the first beam current control vacuum tube to detect the ion beam current in real time.

[0033] The compact synchrotron vacuum system provided by the present invention, by arranging the beam diagnostic element 1703 in the first beam flow control vacuum tube of the first vacuum unit, does not require a separate vacuum cavity to be provided for the beam diagnostic element 1703, thereby shortening the circumference of the vacuum system and reducing the difficulty of popularizing medical accelerator treatment devices using the vacuum system in small and medium-sized medical institutions.

[0034] Based on the above embodiment, the vacuum system further includes at least two racetrack-shaped hydraulic bellows; The first beam deflection vacuum tube is connected to the first beam control vacuum tube via the racetrack-shaped hydraulic bellows, and the second beam deflection vacuum tube is connected to the second beam control vacuum tube via the racetrack-shaped hydraulic bellows.

[0035] Racetrack-shaped hydraulic bellows can be installed at both ends of the first beam deflection vacuum tube to facilitate connection between the first beam deflection vacuum tube and the first beam control vacuum tubes at both ends. Racetrack-shaped hydraulic bellows can be installed at both ends of the second beam deflection vacuum tube to facilitate connection between the second beam deflection vacuum tube and the second beam control vacuum tubes at both ends.

[0036] The first beam deflection vacuum tube and the racetrack-type hydraulic bellows can be connected through a knife-edge flange to achieve metal sealing.

[0037] Temperature changes or mechanical vibrations in the vacuum system may cause the beam deflection vacuum tube to undergo minute displacements and slight deformations such as thermal expansion. In this embodiment, the beam deflection vacuum tube is connected to the vacuum equipment at both ends via a runway-type hydraulic bellows. The runway-type hydraulic bellows can flexibly buffer the slight deformation of the beam deflection vacuum tube, reduce the risk of leakage at the connection of the beam deflection vacuum tube, and increase the reliability of the vacuum system.

[0038] In one embodiment, the racetrack-type hydraulic bellows may be made of thin-walled metal material, and the specific wall thickness of the racetrack-type hydraulic bellows may be adaptively adjusted according to the wall thickness of the connected beam deflection vacuum tube to help reduce eddy current heating caused by rapidly changing magnetic fields and improve the stability of the transported ion beam.

[0039] Based on any of the above embodiments, the first beam control vacuum tube at the second end of the first vacuum unit includes: a circulating beam thin-walled tube 2002, wherein the input end of the circulating beam thin-walled tube 2002 is connected to the first beam deflection vacuum tube, and the output end of the circulating beam thin-walled tube 2002 is used to output the beam to the second beam deflection vacuum tube at the other end of the second vacuum unit; The extracted beam thin-walled tube 2001 has an input end connected to the first beam deflection vacuum tube, and an output end connected to the treatment terminal.

[0040] The first beam control vacuum tube can be the sixth thin-walled quadrupole vacuum chamber 20. There are many treatment terminals connected to the output end of the extracted beam thin-walled tube 2001, such as a beam scanning system, a comprehensive treatment platform, etc., which is not limited in the present invention.

[0041] In this embodiment, the input end of the circulating beam thin-walled tube 2002 and the extraction beam thin-walled tube 2001 are respectively connected to the first beam deflection vacuum tube to form a forked thin-walled structure. In this way, the circulation and extraction of the ion beam are provided through the integrated forked thin-walled structure, which can flexibly control the ion beam flow and reduce the number of vacuum components and sealing flanges, thereby reducing the leakage rate of the vacuum system, improving the ultimate vacuum degree of the vacuum system, and reducing the complexity of the installation of the vacuum system.

[0042] In one embodiment, the input end of the circulating beam thin-walled tube 2002 and the extraction beam thin-walled tube 2001 can be respectively connected to the sixth thin-walled quadrupole vacuum chamber, connected to the first beam deflection vacuum tube through the sixth thin-walled quadrupole vacuum chamber to form a forked thin-walled structure, and connected to the extraction vacuum chamber 21 through the ultra-high vacuum flange 2003, which can further increase the compactness of the vacuum system.

[0043] Based on any of the above embodiments, the extraction bundle thin-walled tube 2001 includes: The outgoing bundle tube wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm; At least two thin-wall reinforcement plates for the extraction bundle are arranged at equal intervals on the outer side of the extraction bundle tube wall.

[0044] Specifically, the material of the extraction bundle tube wall may be titanium alloy TC4, and the material of the extraction bundle thin-wall reinforcement plate may be stainless steel 316L and / or titanium alloy TC4.

[0045] The spacing between the at least two thin-walled reinforcement plates for the extraction bundle can be adjusted based on the actual conditions of the vacuum system and is not limited in this embodiment. The at least two thin-walled reinforcement plates for the extraction bundle can be arranged parallel to the outer side of the extraction bundle tube wall at equal intervals or staggered at equal intervals on the outer side of the extraction bundle tube wall. This can be adjusted based on the actual conditions of the vacuum system and is not limited in this embodiment.

[0046] In one embodiment, the wall thickness of the piggyback tube is 0.15 mm. In another embodiment, the wall thickness of the piggyback tube is 0.2 mm. In yet another embodiment, the wall thickness of the piggyback tube is 0.25 mm.

[0047] Compared to traditional 1mm magnetic component vacuum pipes, in this embodiment, a thin-walled reinforcement plate is provided on the outer side of the extraction beam tube wall to ensure the supporting strength of the extraction beam tube wall. By significantly reducing the wall thickness of the extraction beam tube to 0.15-0.25 mm, the eddy current effect generated by the rapidly changing magnetic field on the extraction beam tube wall can be greatly reduced, thereby ensuring the stability of the beam.

[0048] Based on any of the above embodiments, the circulating bundle thin-walled tube 2002 includes: The circulating bundle tube wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm; At least two circulating bundle thin-wall reinforcement plates are arranged at equal intervals on the outside of the circulating bundle tube wall.

[0049] The working principle and technical effect of the circulation bundle thin-walled tube 2002 structure in this embodiment are basically the same as those of the extraction bundle thin-walled tube 2001 structure, and will not be repeated here.

[0050] Based on any of the above embodiments, the first beam deflection vacuum tube includes: A first tube wall 1702 , wherein the first tube wall 1702 is made of stainless steel and has a thickness of 0.25-0.35 mm; A first titanium alloy liner is supported inside the first tube wall 1702 .

[0051] The first beam deflection vacuum tube may be a first thin-walled hexapole vacuum chamber 17. The material of the first tube wall 1702 may be stainless steel 316L, and the material of the first titanium alloy lining may be titanium alloy TC4.

[0052] The first titanium alloy liner may have many shapes, for example, a plurality of titanium alloy rings, a mesh titanium alloy support liner, etc., and the present invention does not limit this.

[0053] In one embodiment, the wall thickness of the first tube wall 1702 is 0.25 mm. In another embodiment, the wall thickness of the first tube wall 1702 is 0.3 mm. In yet another embodiment, the wall thickness of the first tube wall 1702 is 0.35 mm.

[0054] Compared with the traditional 1mm magnetic element vacuum pipe, in this embodiment, a first titanium alloy lining is provided in the first tube wall 1702 to ensure the supporting strength of the first tube wall 1702. By greatly reducing the wall thickness of the first tube wall 1702 to 0.25-0.35 mm, the eddy current effect generated by the rapidly changing magnetic field in the extraction beam tube wall can be greatly reduced, thereby improving the beam stability of the ion beam.

[0055] Furthermore, titanium alloy has a low gas evolution rate. In this embodiment, by providing a first titanium alloy lining in the first tube wall 1702 , the amount of hot outgassing inside the first beam deflection vacuum tube can be reduced, and the beam stability of the ion beam can be further improved.

[0056] In one embodiment, the beam diagnostic element may be provided at the output end of the first beam deflection vacuum tube to monitor and diagnose the beam stability of the ion beam outputted by the first beam deflection vacuum tube in real time, so as to facilitate timely maintenance of the vacuum system.

[0057] Based on any of the above embodiments, the second beam deflection vacuum tube includes: The second tube wall is made of stainless steel and has a wall thickness of 0.25-0.35 mm; A second titanium alloy liner is supported inside the second tube wall.

[0058] In this embodiment, the working principle and technical effects of the second beam deflection vacuum tube structure are substantially the same as those of the first beam deflection vacuum tube structure, and are not described in detail herein.

[0059] The compact synchrotron vacuum system provided by the present invention can significantly reduce the eddy current effect generated by the rapidly changing magnetic field on the extraction beam tube wall while providing the required structural rigidity by setting the tube wall thickness of 0.25-0.35 mm at the beam deflection vacuum tube that is subjected to bending stress. The eddy current effect generated by the rapidly changing magnetic field on the extraction beam tube wall is further reduced by setting the tube wall thickness of 0.15-0.25 at at least part of the beam adjustment vacuum tube. While reducing the eddy current effect, adaptive fine-tuning is performed at different vacuum tube sections to ensure the geometric accuracy of the beam channel and improve the stability of ion beam transmission.

[0060] Based on any of the above embodiments, the first titanium alloy liner includes at least two first titanium alloy rings 1701 , and the at least two first titanium alloy rings 1701 are supported at equal intervals inside the first tube wall 1702 ; The second titanium alloy liner includes at least two second titanium alloy rings, and the at least two second titanium alloy rings are supported inside the second tube wall at equal intervals.

[0061] The spacing between the at least two second titanium alloy rings can be adjusted based on the actual conditions of the vacuum system and is not limited in this embodiment. After determining the spacing between the at least two second titanium alloy rings, the number of second titanium alloy rings can be determined based on the length of the portion to be supported by the first tube wall 1702 and is not limited in this embodiment.

[0062] In this embodiment, the gaps between adjacent first titanium alloy rings 1701 can reduce the probability of eddy currents forming larger loops, thereby further weakening the eddy current effect generated by the rapidly changing magnetic field on the extraction beam tube wall and improving the beam stability of the ion beam.

[0063] Based on any of the above embodiments, the first beam deflection vacuum tube includes a first deflection thin-walled vacuum chamber 3, a second deflection thin-walled vacuum chamber 8, a third deflection thin-walled vacuum chamber 12, a fourth deflection thin-walled vacuum chamber 16 and a fifth deflection thin-walled vacuum chamber 19; The first beam control vacuum tube includes: a first sub-beam current regulating vacuum tube, comprising: a first thin-walled quadrupole vacuum chamber 4, an injection vacuum chamber 5, an injection electrostatic deflection plate cavity 6, and a second thin-walled quadrupole vacuum chamber 7 connected in sequence; a free end of the first thin-walled quadrupole vacuum chamber 4 is connected to a first end of the first deflection thin-walled vacuum chamber 3, and a free end of the second thin-walled quadrupole vacuum chamber 7 is connected to a first end of the second deflection thin-walled vacuum chamber 8; a second sub-beam current regulating vacuum tube, comprising: a third thin-walled quadrupole vacuum chamber 9, a first beam diagnosis cavity 10, and a second ceramic vacuum chamber 11 connected in sequence; a free end of the third thin-walled quadrupole vacuum chamber 9 is connected to the second end of the second deflection thin-walled vacuum chamber 8, and a free end of the second ceramic vacuum chamber 11 is connected to the first end of the third deflection thin-walled vacuum chamber 12; a third sub-beam current control vacuum tube, comprising: a fourth thin-walled quadrupole vacuum chamber 13, a high-frequency cavity 14, and a fifth thin-walled quadrupole vacuum chamber 15 connected in sequence; a free end of the fourth thin-walled quadrupole vacuum chamber 13 connected to the second end of the third deflection thin-walled vacuum chamber 12, and the fifth thin-walled quadrupole vacuum chamber 15 connected to the first end of the fourth deflection thin-walled vacuum chamber 16; a fourth sub-beam current control vacuum tube, comprising: a first thin-walled hexapole vacuum chamber 17 and an electrostatic deflection plate cavity 18 connected in sequence, wherein the free end of the first thin-walled hexapole vacuum chamber 17 is connected to the second end of the fourth deflection thin-walled vacuum chamber 16, and the electrostatic deflection plate cavity 18 is connected to the first end of the fifth deflection thin-walled vacuum chamber 19; a first extraction sub-beam control vacuum tube, which comprises a sixth thin-walled quadrupole vacuum chamber 20, an extraction vacuum chamber 21, and a first bellows 22 connected in sequence, wherein the free end of the sixth thin-walled quadrupole vacuum chamber 20 is connected to the second end of the fifth deflection thin-walled vacuum chamber 19; The second beam deflection vacuum tube includes a sixth deflection thin-walled vacuum chamber 26, a seventh deflection thin-walled vacuum chamber 30, and an eighth deflection thin-walled vacuum chamber 37; a first end of the sixth deflection thin-walled vacuum chamber 26 is connected to a free end of the first bellows 22; The second beam control vacuum tube includes: a fifth sub-beam current control vacuum tube, comprising: an eighth thin-walled quadrupole vacuum chamber 27, a third beam diagnosis cavity 28, and a first vacuum pump chamber 29 connected in sequence; a free end of the eighth thin-walled quadrupole vacuum chamber 27 connected to the second end of the sixth deflection thin-walled vacuum chamber 26, and a free end of the first vacuum pump chamber 29 connected to the first end of the seventh deflection thin-walled vacuum chamber 30; a sixth sub-beam current control vacuum tube, comprising: a ninth thin-walled quadrupole vacuum chamber 31, a DC beam transformer 32, a second bellows 33, a fourth beam diagnosis cavity 34, a second vacuum pump chamber 35, and a tenth thin-walled quadrupole vacuum chamber 36, connected in sequence; the free end of the ninth thin-walled quadrupole vacuum chamber 31 being connected to the second end of the seventh deflection thin-walled vacuum chamber 30, and the free end of the tenth thin-walled quadrupole vacuum chamber 36 being connected to the first end of the eighth deflection thin-walled vacuum chamber 37; The second extraction sub-beam control vacuum tube includes a second thin-walled hexapole vacuum chamber 38, a fifth beam diagnosis cavity 39 and a sixth beam diagnosis cavity 40 connected in sequence, the free end of the second thin-walled hexapole vacuum chamber 38 is connected to the second end of the eighth deflection thin-walled vacuum chamber 37, and the free end of the sixth beam diagnosis cavity 40 is connected to the second end of the first deflection thin-walled vacuum chamber 3.

[0064] Wherein, knife-edge flanges are provided at both ends of each vacuum element to achieve metal sealing between the vacuum elements.

[0065] Based on any of the above embodiments, the vacuum system further includes at least two groups of getter modules, which are respectively arranged inside the injection electrostatic deflection plate cavity 6 and the extraction electrostatic deflection plate cavity 18.

[0066] Specifically, four groups of getter modules can be respectively set inside the injection electrostatic deflection plate cavity 6 and the extraction electrostatic deflection plate cavity 18, where the gas load is relatively high and the space is relatively compact, to efficiently remove hot exhaust gas and other gases, reduce the gas density inside the electrostatic deflection plate cavity and the extraction electrostatic deflection plate cavity 18, and improve their vacuum degree within the range of the atmospheric load and small space.

[0067] Based on any of the above embodiments, the vacuum system further includes: At least three vacuum measuring devices, the at least three vacuum measuring devices being respectively arranged at the injection electrostatic deflection plate cavity 6, the extraction electrostatic deflection plate cavity 18 and the second vacuum pump chamber 35; At least three molecular pump units, the at least three molecular pump units are respectively arranged in the injection electrostatic deflection plate cavity 6, the extraction electrostatic deflection plate cavity 18 and the second vacuum pump chamber 35; At least six compound ion pumps are respectively arranged in the injection vacuum chamber 5, the injection electrostatic deflection plate cavity 6, the first beam diagnosis cavity 10, the fourth thin-walled quadrupole vacuum chamber 13, the extraction electrostatic deflection plate cavity 18, the extraction vacuum chamber 21, the first vacuum pump chamber 29, the second vacuum pump chamber 35 and the fifth beam diagnosis cavity 39.

[0068] Among them, vacuum measuring equipment refers to equipment that monitors and determines the internal pressure of a vacuum system.

[0069] The compound ion pump includes a sputtering ion pump and a NEG getter pump. In the injection vacuum chamber 5, the first beam diagnosis cavity 10, the fourth thin-walled quadrupole vacuum chamber 13, the extraction vacuum chamber 21, the first vacuum pump chamber 29 and the fifth beam diagnosis cavity 39 where the compound ion pump is separately set, the NEG getter pump can effectively remove active gases such as water vapor, oxygen, and nitrogen in the hot exhaust gas through chemical adsorption. On this basis, the sputtering ion pump can ionize gas molecules to effectively remove inert gases and light gases, etc. The two work together to remove gases in the vacuum system and improve the vacuum level of the vacuum system.

[0070] At the injection electrostatic deflection plate cavity 6, the outlet electrostatic deflection plate cavity 18 and the second vacuum pump chamber 35 where the molecular pump unit and the compound ion pump are simultaneously arranged, the compound ion pump can be used as the main pump on the basis of the fore-stage vacuum provided by the molecular pump unit to further reduce the pressure to the target vacuum level of the ultra-high vacuum to vacuum system and maintain the target vacuum level.

[0071] In one embodiment, the pumping speed of the compound ion pump can be set to 1200 L / s.

[0072] In this embodiment, the above-mentioned connection method and the arrangement of the molecular pump unit, the compound ion pump and the vacuum measuring device can make the vacuum degree inside the entire annular vacuum system tend to be uniform, and work together to maintain 10 -10 Ultra-high vacuum environment of the mbar order.

[0073] The following describes the design method of the compact synchrotron vacuum system provided by the present invention.

[0074] Figure 4 FIG. 1 is a flow chart of a design method for a compact synchrotron vacuum system provided by the present invention. Figure 4 As shown, the method includes: S401. Acquire a corresponding original three-dimensional structure model based on an original vacuum component of a compact synchrotron vacuum system.

[0075] The original vacuum element refers to a vacuum element that has not been parameter-optimized, and the original three-dimensional structure model is a model obtained based on the annular arrangement sequence of the original vacuum element.

[0076] The physical design parameters calculated for the compact synchrotron vacuum system can be obtained, and the annular arrangement of the vacuum components can be determined based on the physical design parameters. Based on the annular arrangement of the vacuum components, an original three-dimensional structural model of the vacuum system, also called a preliminary three-dimensional structural model, can be established.

[0077] S402: Performing strength analysis on the original three-dimensional structural model to obtain a strength analysis result, and optimizing structural parameters of the original three-dimensional structural model based on the strength analysis result to obtain a three-dimensional structural model.

[0078] There are many ways to perform strength analysis on the original three-dimensional structural model to obtain strength analysis results, such as through finite element analysis, formula calculation, etc., which are not limited in the present invention. There are many ways to optimize the structural parameters of the original three-dimensional structural model based on the strength analysis results, such as iterative optimization, empirical adjustment, etc., which are not limited in the present invention.

[0079] After optimizing the structural parameters of the original three-dimensional structural model, a three-dimensional structural model can be established based on the vacuum elements and their annular arrangement sequence after the structural parameters are optimized.

[0080] S403, determining the thermal outgassing of the vacuum components of the compact synchrotron vacuum system according to the optimized structural parameters of the three-dimensional structural model, and performing pressure simulation on the three-dimensional structural model based on the thermal outgassing to determine the ultimate pressure of the three-dimensional structural model; S404: Obtain the compact synchrotron vacuum system based on the ultimate pressure, the optimized structural parameters, and the arrangement of vacuum components of the three-dimensional structural model.

[0081] There are many ways to integrate the ultimate pressure, optimized structural parameters, and the arrangement of vacuum components of the three-dimensional structural model to obtain a compact synchrotron vacuum system, and the present invention is not limited thereto.

[0082] The design method for a compact synchrotron vacuum system provided in an embodiment of the present invention optimizes the structural parameters of the vacuum system through a simulation model, and performs pressure simulation on the three-dimensional structural model of the optimized vacuum system to determine its ultimate pressure. The compact synchrotron vacuum system is obtained by integrating the ultimate pressure, the optimized structural parameters, and the arrangement of the vacuum elements of the three-dimensional structural model. This can shorten the circumference of the vacuum system, significantly reduce the cost of the vacuum system, and shorten the construction period of the vacuum system.

[0083] In one embodiment, the circumference of the vacuum system can be shortened to less than 36 m.

[0084] It should be noted that the technical solutions in the various embodiments of the present invention can be combined with each other, but the basis for the mutual combination is that it can be implemented by ordinary technicians in this field; when the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist, that is, it does not fall within the scope of protection of the invention.

[0085] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A compact synchrotron vacuum system, characterized in that: include: A first vacuum unit, the first vacuum unit comprising: a first beam deflection vacuum tube, wherein at least two first beam deflection vacuum tubes are provided; a first beam control vacuum tube, wherein adjacent first beam deflection vacuum tubes are connected via the first beam control vacuum tube; A second vacuum unit, the second vacuum unit comprising: a second beam deflection vacuum tube, wherein at least two second beam deflection vacuum tubes are provided; a second beam control vacuum tube, wherein adjacent second beam deflection vacuum tubes are connected via the second beam control vacuum tube; Among them, the second beam control vacuum tube at one end of the second vacuum unit is connected to the first beam deflection vacuum tube at the first end of the first vacuum unit, and the second beam deflection vacuum tube at the other end of the second vacuum unit is connected to the first beam control vacuum tube at the second end of the first vacuum unit; a beam diagnosis element is provided in the first beam control vacuum tube of the first vacuum unit.

2. The compact synchrotron vacuum system according to claim 1, characterized in that Also included are at least two racetrack-type hydraulic bellows; The first beam deflection vacuum tube is connected to the first beam control vacuum tube via the racetrack-shaped hydraulic bellows, and the second beam deflection vacuum tube is connected to the second beam control vacuum tube via the racetrack-shaped hydraulic bellows.

3. The compact synchrotron vacuum system according to claim 1, wherein: The first beam control vacuum tube at the second end of the first vacuum unit includes: a circulating beam thin-walled tube, wherein an input end of the circulating beam thin-walled tube is connected to the first beam deflection vacuum tube, and an output end of the circulating beam thin-walled tube is used to output a beam to the second beam deflection vacuum tube at the other end of the second vacuum unit; An extraction beam thin-walled tube, wherein the input end of the extraction beam thin-walled tube is connected to the first beam deflection vacuum tube, and the output end of the extraction beam thin-walled tube is connected to the treatment terminal.

4. The compact synchrotron vacuum system according to claim 3, characterized in that The circulating bundle thin-walled tube comprises: The circulating bundle tube wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm; At least two circulating bundle thin-wall reinforcement plates, the at least two circulating bundle thin-wall reinforcement plates being arranged at equal intervals on the outside of the circulating bundle tube wall; The extraction bundle thin-walled tube comprises: The outgoing bundle tube wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm; At least two thin-wall reinforcement plates for the extraction bundle are arranged at equal intervals on the outer side of the extraction bundle tube wall.

5. The compact synchrotron vacuum system according to claim 1, wherein: The first beam deflection vacuum tube comprises: a first tube wall, wherein the material of the first tube wall is stainless steel, and the wall thickness of the first tube wall is 0.25-0.35 mm; a first titanium alloy liner supported inside the first tube wall; The second beam deflection vacuum tube comprises: The second tube wall is made of stainless steel and has a wall thickness of 0.25-0.35 mm; A second titanium alloy liner is supported inside the second tube wall.

6. The compact synchrotron vacuum system according to claim 5, characterized in that The first titanium alloy liner comprises at least two first titanium alloy rings, and the at least two first titanium alloy rings are supported at equal intervals inside the first tube wall; The second titanium alloy liner includes at least two second titanium alloy rings, and the at least two second titanium alloy rings are supported inside the second tube wall at equal intervals.

7. The compact synchrotron vacuum system according to claim 1, wherein: The first beam deflection vacuum tube includes a first deflection thin-walled vacuum chamber, a second deflection thin-walled vacuum chamber, a third deflection thin-walled vacuum chamber, a fourth deflection thin-walled vacuum chamber and a fifth deflection thin-walled vacuum chamber; The first beam control vacuum tube includes: a first sub-beam current control vacuum tube, the first sub-beam current control vacuum tube comprising: a first thin-walled quadrupole vacuum chamber, an injection vacuum chamber, an injection electrostatic deflection plate cavity, and a second thin-walled quadrupole vacuum chamber connected in sequence; a free end of the first thin-walled quadrupole vacuum chamber being connected to a first end of the first deflection thin-walled vacuum chamber, and a free end of the second thin-walled quadrupole vacuum chamber being connected to a first end of the second deflection thin-walled vacuum chamber; a second sub-beam current regulating vacuum tube, the second sub-beam current regulating vacuum tube comprising: a third thin-walled quadrupole vacuum chamber, a first beam diagnosis cavity, and a second ceramic vacuum chamber connected in sequence; a free end of the third thin-walled quadrupole vacuum chamber is connected to the second end of the second deflection thin-walled vacuum chamber, and a free end of the second ceramic vacuum chamber is connected to the first end of the third deflection thin-walled vacuum chamber; a third sub-beam current control vacuum tube, the third sub-beam current control vacuum tube comprising: a fourth thin-walled quadrupole vacuum chamber, a high-frequency cavity, and a fifth thin-walled quadrupole vacuum chamber connected in sequence; a free end of the fourth thin-walled quadrupole vacuum chamber connected to the second end of the third deflection thin-walled vacuum chamber, and the fifth thin-walled quadrupole vacuum chamber connected to the first end of the fourth deflection thin-walled vacuum chamber; a fourth sub-beam current control vacuum tube, the fourth sub-beam current control vacuum tube comprising: a first thin-walled hexapole vacuum chamber and an extraction electrostatic deflection plate cavity connected in sequence, wherein a free end of the first thin-walled hexapole vacuum chamber is connected to a second end of the fourth deflection thin-walled vacuum chamber, and the extraction electrostatic deflection plate cavity is connected to a first end of the fifth deflection thin-walled vacuum chamber; a first extraction sub-beam control vacuum tube, the first extraction sub-beam control vacuum tube comprising a sixth thin-walled quadrupole vacuum chamber, an extraction vacuum chamber, and a first bellows connected in sequence, wherein a free end of the sixth thin-walled quadrupole vacuum chamber is connected to the second end of the fifth deflection thin-walled vacuum chamber; The second beam deflection vacuum tube includes a sixth deflection thin-walled vacuum chamber, a seventh deflection thin-walled vacuum chamber, and an eighth deflection thin-walled vacuum chamber; a first end of the sixth deflection thin-walled vacuum chamber is connected to a free end of the first bellows; The second beam control vacuum tube includes: a fifth sub-beam current control vacuum tube, the fifth sub-beam current control vacuum tube comprising: an eighth thin-walled quadrupole vacuum chamber, a third beam diagnosis cavity, and a first vacuum pump chamber connected in sequence; a free end of the eighth thin-walled quadrupole vacuum chamber connected to the second end of the sixth deflection thin-walled vacuum chamber, and a free end of the first vacuum pump chamber connected to the first end of the seventh deflection thin-walled vacuum chamber; a sixth sub-beam current control vacuum tube, the sixth sub-beam current control vacuum tube comprising: a ninth thin-walled quadrupole vacuum chamber, a DC beam transformer, a second bellows, a fourth beam diagnosis cavity, a second vacuum pump chamber, and a tenth thin-walled quadrupole vacuum chamber connected in sequence; a free end of the ninth thin-walled quadrupole vacuum chamber connected to the second end of the seventh deflection thin-walled vacuum chamber, and a free end of the tenth thin-walled quadrupole vacuum chamber connected to the first end of the eighth deflection thin-walled vacuum chamber; The second extraction sub-beam control vacuum tube includes a second thin-walled hexapole vacuum chamber, a fifth beam diagnosis cavity and a sixth beam diagnosis cavity connected in sequence, the free end of the second thin-walled hexapole vacuum chamber is connected to the second end of the eighth deflection thin-walled vacuum chamber, and the free end of the sixth beam diagnosis cavity is connected to the second end of the first deflection thin-walled vacuum chamber.

8. The compact synchrotron vacuum system according to claim 7, characterized in that It also includes at least two groups of getter modules, which are respectively arranged inside the injection electrostatic deflection plate cavity and the extraction electrostatic deflection plate cavity.

9. The compact synchrotron vacuum system according to claim 7, characterized in that Also includes: At least three vacuum measuring devices, the at least three vacuum measuring devices being respectively arranged at the injection electrostatic deflection plate cavity, the extraction electrostatic deflection plate cavity and the second vacuum pump chamber; At least three molecular pump units, the at least three molecular pump units being respectively arranged at the injection electrostatic deflection plate cavity, the extraction electrostatic deflection plate cavity and the second vacuum pump chamber; At least six compound ion pumps are respectively arranged at the injection vacuum chamber, the injection electrostatic deflection plate cavity, the first beam diagnosis cavity, the fourth thin-walled quadrupole vacuum chamber, the extraction electrostatic deflection plate cavity, the extraction vacuum chamber, the first vacuum pump chamber, the second vacuum pump chamber and the fifth beam diagnosis cavity.

10. A design method for a compact synchrotron vacuum system, characterized in that: include: Obtain the corresponding original three-dimensional structure model based on the original vacuum components of the compact synchrotron vacuum system; Performing a strength analysis on the original three-dimensional structural model to obtain a strength analysis result, and optimizing structural parameters of the original three-dimensional structural model based on the strength analysis result to obtain a three-dimensional structural model; determining a heat outflow rate of a vacuum component of the compact synchrotron vacuum system according to the optimized structural parameters of the three-dimensional structural model, and performing a pressure simulation on the three-dimensional structural model based on the heat outflow rate to determine an ultimate pressure of the three-dimensional structural model; The compact synchrotron vacuum system is obtained based on the ultimate pressure, the optimized structural parameters and the arrangement of the vacuum components of the three-dimensional structural model.

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