A compact synchrotron vacuum system and design method

Abstract

The application provides a compact synchrotron vacuum system and a design method, and relates to the technical field of particle acceleration. The vacuum system comprises a first vacuum unit and a second vacuum unit. The first vacuum unit comprises at least two first beam deflection vacuum tubes, and adjacent first beam deflection vacuum tubes are connected through a first beam control vacuum tube. The second vacuum unit comprises at least two second beam deflection vacuum tubes, and adjacent second beam deflection vacuum tubes are connected through a second beam control vacuum tube. One end of the second beam deflection vacuum tube of the second vacuum unit is connected with the first end of the first beam control vacuum tube of the first vacuum unit, and the other end of the second beam deflection vacuum tube of the second vacuum unit is connected with the second end of the first beam control vacuum tube of the first vacuum unit. The first beam control vacuum tube of the first vacuum unit is provided with a beam diagnosis element, so that the circumference of the vacuum system can be shortened, and the popularization difficulty of a medical accelerator treatment device in small and medium-sized medical institutions can be reduced.

Description

Technical Field

[0001] This invention relates to the field of particle acceleration technology, and more particularly to a compact synchrotron vacuum system and its design method. Background Technology

[0002] In recent years, the number of cancer patients has been increasing annually, making cancer a major threat to life and health. Currently, cancer treatment typically employs radiotherapy, with medical carbon ion therapy being a leading and effective radiotherapy method both domestically and internationally. The implementation of medical carbon ion therapy relies on medical accelerator therapy devices, which mainly consist of an ion source, a linear injector, an injection transmission line, a synchrotron, a high-energy transmission line, and a treatment terminal. The synchrotron is a key component of the medical accelerator therapy device, and its vacuum system provides an ultra-high vacuum environment for the beam's operation, making it an indispensable part. Traditional medical accelerator therapy devices have large synchrotrons, with a circumference of approximately 60 meters, requiring a significant area, making them difficult to implement in small and medium-sized medical institutions. Summary of the Invention

[0003] To address the problems existing in the prior art, this invention provides a compact synchrotron vacuum system and its design method.

[0004] This invention provides a compact synchrotron vacuum system, comprising:

[0005] A first vacuum unit, the first vacuum unit comprising:

[0006] The first beam deflection vacuum tube, wherein at least two first beam deflection vacuum tubes are provided;

[0007] The first beam control vacuum tube is connected to the adjacent first beam deflection vacuum tube through the first beam control vacuum tube.

[0008] The second vacuum unit includes:

[0009] The second beam deflection vacuum tube is provided in at least two.

[0010] The second beam control vacuum tube is connected to the adjacent second beam deflection vacuum tube through the second beam control vacuum tube;

[0011] Wherein, the second beam current control vacuum tube at one end of the second vacuum unit is connected to the first beam current deflection vacuum tube at the first end of the first vacuum unit, and the second beam current deflection vacuum tube at the other end of the second vacuum unit is connected to the first beam current control vacuum tube at the second end of the first vacuum unit; the first beam current control vacuum tube of the first vacuum unit is provided with a beam current control element.

[0012] A compact synchrotron vacuum system according to the present invention further includes at least two racetrack-shaped hydraulic bellows;

[0013] The first beam deflection vacuum tube and the first beam control vacuum tube are connected through the racetrack-shaped hydraulic bellows, and the second beam deflection vacuum tube and the second beam control vacuum tube are connected through the racetrack-shaped hydraulic bellows.

[0014] According to a compact synchrotron vacuum system provided by the present invention, the first beam control vacuum tube at the second end of the first vacuum unit includes:

[0015] A circulating beam thin-walled tube, wherein the input end of the circulating beam thin-walled tube is connected to the first beam deflection vacuum tube, and the output end of the circulating beam thin-walled tube is used to output a beam to the second beam deflection vacuum tube at the other end of the second vacuum unit;

[0016] A thin-walled tube is used to extract the beam. The input end of the thin-walled tube is connected to the first beam deflection vacuum tube, and the output end of the thin-walled tube is connected to the treatment terminal.

[0017] According to a compact synchrotron vacuum system provided by the present invention, the circulating beam thin-walled tube comprises:

[0018] The circulating bundle tube wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm.

[0019] At least two thin-walled reinforcing plates for the circulating bundle are disposed at equal intervals on the outer side of the circulating bundle tube wall;

[0020] The lead-out thin-walled tube includes:

[0021] The lead-out bundle wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm.

[0022] At least two thin-walled reinforcing plates for the lead-out bundles are disposed at equal intervals on the outer side of the lead-out bundle tube wall.

[0023] According to a compact synchrotron vacuum system provided by the present invention, the first beam deflection vacuum tube comprises:

[0024] The first pipe wall is made of stainless steel and has a wall thickness of 0.25-0.35 mm.

[0025] A first titanium alloy liner is supported inside the first pipe wall;

[0026] The second beam deflection vacuum tube includes:

[0027] The second pipe wall is made of stainless steel and has a wall thickness of 0.25-0.35 mm.

[0028] The second titanium alloy liner is supported inside the second tube wall.

[0029] According to a compact synchrotron vacuum system provided by the present invention, the first titanium alloy liner includes at least two first titanium alloy rings, which are equally spaced and supported inside the first tube wall;

[0030] The second titanium alloy liner includes at least two second titanium alloy rings, which are equally spaced and supported inside the second tube wall.

[0031] According to the present invention, a compact synchrotron vacuum system is provided, wherein the first beam deflection vacuum tube includes a first deflection thin-walled vacuum chamber, a second deflection thin-walled vacuum chamber, a third deflection thin-walled vacuum chamber, a fourth deflection thin-walled vacuum chamber, and a fifth deflection thin-walled vacuum chamber.

[0032] The first beam-controlled vacuum tube includes:

[0033] The first sub-beam control vacuum tube includes: a first thin-walled quadrupole vacuum chamber, an injection vacuum chamber, an injection electrostatic deflection plate cavity, and a second thin-walled quadrupole vacuum chamber connected in sequence; the free end of the first thin-walled quadrupole vacuum chamber is connected to the first end of the first deflection thin-walled vacuum chamber, and the free end of the second thin-walled quadrupole vacuum chamber is connected to the first end of the second deflection thin-walled vacuum chamber.

[0034] The second sub-beam control vacuum tube includes: a third thin-walled quadrupole vacuum chamber, a first beam cavity, and a second ceramic vacuum chamber connected in sequence; the free end of the third thin-walled quadrupole vacuum chamber is connected to the second end of the second deflection thin-walled vacuum chamber, and the free end of the second ceramic vacuum chamber is connected to the first end of the third deflection thin-walled vacuum chamber.

[0035] The third sub-beam control vacuum tube includes: a fourth thin-walled quadrupole vacuum chamber, a high-frequency cavity, and a fifth thin-walled quadrupole vacuum chamber connected in sequence; the free end of the fourth thin-walled quadrupole vacuum chamber is connected to the second end of the third deflection thin-walled vacuum chamber, and the fifth thin-walled quadrupole vacuum chamber is connected to the first end of the fourth deflection thin-walled vacuum chamber.

[0036] The fourth sub-beam control vacuum tube includes: a first thin-walled hexagonal vacuum chamber and an electrostatic deflection plate cavity connected in sequence. The free end of the first thin-walled hexagonal vacuum chamber is connected to the second end of the fourth deflection thin-walled vacuum chamber, and the electrostatic deflection plate cavity is connected to the first end of the fifth deflection thin-walled vacuum chamber.

[0037] The first extractor beam control vacuum tube comprises a sixth thin-walled quadrupole vacuum chamber, an extractor vacuum chamber, and a first bellows connected in sequence. The free end of the sixth thin-walled quadrupole vacuum chamber is connected to the second end of the fifth deflection thin-walled vacuum chamber.

[0038] The second beam deflection vacuum tube includes a sixth deflection thin-walled vacuum chamber, a seventh deflection thin-walled vacuum chamber, and an eighth deflection thin-walled vacuum chamber; the first end of the sixth deflection thin-walled vacuum chamber is connected to the free end of the first bellows.

[0039] The second beam-controlled vacuum tube includes:

[0040] The fifth sub-beam control vacuum tube includes: an eighth thin-walled quadrupole vacuum chamber, a third beam diagnostic chamber, and a first vacuum pump chamber connected in sequence; the free end of the eighth thin-walled quadrupole vacuum chamber is connected to the second end of the sixth deflection thin-walled vacuum chamber, and the free end of the first vacuum pump chamber is connected to the first end of the seventh deflection thin-walled vacuum chamber.

[0041] The sixth sub-beam control vacuum tube comprises: a ninth thin-walled quadrupole vacuum chamber, a DC beam transformer, a second bellows, a fourth beam diagnostic chamber, a second vacuum pump chamber, and a tenth thin-walled quadrupole vacuum chamber connected in sequence; the free end of the ninth thin-walled quadrupole vacuum chamber is connected to the second end of the seventh deflection thin-walled vacuum chamber, and the free end of the tenth thin-walled quadrupole vacuum chamber is connected to the first end of the eighth deflection thin-walled vacuum chamber;

[0042] The second lead-out sub-beam current control vacuum tube includes a second thin-walled hexapole vacuum chamber, a fifth beam diagnostic chamber, and a sixth beam diagnostic chamber connected in sequence. The free end of the second thin-walled hexapole vacuum chamber is connected to the second end of the eighth deflection thin-walled vacuum chamber, and the free end of the sixth beam diagnostic chamber is connected to the second end of the first deflection thin-walled vacuum chamber.

[0043] According to the present invention, a compact synchrotron vacuum system further includes at least two getter modules, wherein the at least two getter modules are respectively disposed inside the injection electrostatic deflection plate cavity and the extraction electrostatic deflection plate cavity.

[0044] A compact synchrotron vacuum system according to the present invention further includes:

[0045] At least three vacuum measuring devices are respectively installed in the injection electrostatic deflection plate cavity, the lead-out electrostatic deflection plate cavity, and the second vacuum pump chamber;

[0046] At least three molecular pump units are respectively located at the injection electrostatic deflection plate cavity, the lead-out electrostatic deflection plate cavity, and the second vacuum pump chamber;

[0047] At least six composite ion pumps are respectively located at the injection vacuum chamber, the injection electrostatic deflection plate cavity, the first beam diagnostic cavity, the fourth thin-walled quadrupole vacuum chamber, the extraction electrostatic deflection plate cavity, the extraction vacuum chamber, the first vacuum pump chamber, the second vacuum pump chamber, and the fifth beam diagnostic cavity.

[0048] This invention also provides a design method for a compact synchrotron vacuum system, comprising:

[0049] The original three-dimensional structural model of the original vacuum element of the compact synchrotron vacuum system was obtained;

[0050] Strength analysis is performed on the original three-dimensional structural model to obtain strength analysis results, and the structural parameters of the original three-dimensional structural model are optimized based on the strength analysis results to obtain a three-dimensional structural model.

[0051] Based on the optimized structural parameters of the three-dimensional structural model, the thermal exhaust volume of the vacuum components of the compact synchrotron vacuum system is determined, and pressure simulation is performed on the three-dimensional structural model based on the thermal exhaust volume to determine the ultimate pressure of the three-dimensional structural model.

[0052] The compact synchrotron vacuum system is obtained based on the ultimate pressure, the optimized structural parameters, and the arrangement of vacuum components in the three-dimensional structural model.

[0053] The compact synchrotron vacuum system and design method provided by the present invention, by placing the beam guide element in the first beam current control vacuum tube of the first vacuum unit, eliminates the need for a separate vacuum cavity for the beam guide element, thereby shortening the perimeter of the vacuum system and reducing the difficulty of popularizing medical accelerator treatment devices using vacuum systems in small and medium-sized medical institutions. Attached Figure Description

[0054] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0055] Figure 1 This is one of the structural schematic diagrams of the compact synchrotron vacuum system provided by the present invention.

[0056] Figure 2 This is the second schematic diagram of the compact synchrotron vacuum system provided by the present invention.

[0057] Figure 3 This is the third schematic diagram of the compact synchrotron vacuum system provided by the present invention.

[0058] Figure 4 This is a flowchart illustrating the design method of the compact synchrotron vacuum system provided by the present invention.

[0059] Reference numerals: 1: First insert valve; 2: First ceramic vacuum chamber; 3: First deflection thin-walled vacuum chamber; 4: First thin-walled quadrupole vacuum chamber; 5: Injection vacuum chamber; 6: Injection electrostatic deflection plate cavity; 7: Second thin-walled quadrupole vacuum chamber; 8: Second deflection thin-walled vacuum chamber; 9: Third thin-walled quadrupole vacuum chamber; 10: First beam diagnostic cavity; 11: Second ceramic vacuum chamber; 12: Third deflection thin-walled vacuum chamber; 13: Fourth thin-walled quadrupole vacuum chamber; 14: High-frequency cavity; 15: Fifth thin-walled quadrupole vacuum chamber; 16: Fourth deflection thin-walled vacuum chamber; 17: First thin-walled hexapolar vacuum chamber; 1701: First titanium alloy ring; 1702: First tube wall; 1703: Beam diagnostic element; 18: Lead-out electrostatic deflection plate cavity; 19: Fifth deflection thin-walled vacuum chamber; 20: Sixth thin-walled... Four-pole vacuum chamber; 2001: Thin-walled tube for beam extraction; 2002: Thin-walled tube for circulating beam; 2003: Ultra-high vacuum flange; 21: Vacuum chamber for beam extraction; 22: First bellows; 23: Second slide valve; 24: Second beam diagnostic chamber; 25: Seventh thin-walled four-pole vacuum chamber; 26: Sixth deflection thin-walled vacuum chamber; 27: Eighth thin-walled four-pole vacuum chamber; 28: Third beam diagnostic chamber; 29: First vacuum pump chamber; 30: Seventh deflection thin-walled vacuum chamber; 31: Ninth thin-walled four-pole vacuum chamber; 32: DC beam transformer; 33: Second bellows; 34: Fourth beam diagnostic chamber; 35: Second vacuum pump chamber; 36: Tenth thin-walled four-pole vacuum chamber; 37: Eighth deflection thin-walled vacuum chamber; 38: Second thin-walled six-pole vacuum chamber; 39: Fifth beam diagnostic chamber; 40: Sixth beam diagnostic chamber. Detailed Implementation

[0060] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0061] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0062] In the embodiments of this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0063] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the embodiments of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0064] The following is combined Figures 1-4 The present invention describes a compact synchrotron vacuum system and its design method.

[0065] Figure 1 This is one of the structural schematic diagrams of the compact synchrotron vacuum system provided by the present invention, such as... Figure 1 As shown, the vacuum system includes:

[0066] A first vacuum unit, the first vacuum unit comprising:

[0067] The first beam deflection vacuum tube, wherein at least two first beam deflection vacuum tubes are provided;

[0068] The first beam control vacuum tube is connected to the adjacent first beam deflection vacuum tube through the first beam control vacuum tube.

[0069] The second vacuum unit includes:

[0070] The second beam deflection vacuum tube is provided in at least two.

[0071] The second beam control vacuum tube is connected to the adjacent second beam deflection vacuum tube through the second beam control vacuum tube;

[0072] Wherein, the second beam current control vacuum tube at one end of the second vacuum unit is connected to the first beam current deflection vacuum tube at the first end of the first vacuum unit, and the second beam current deflection vacuum tube at the other end of the second vacuum unit is connected to the first beam current control vacuum tube at the second end of the first vacuum unit; the first beam current control vacuum tube of the first vacuum unit is provided with a beam current control element 1703.

[0073] Specifically, the vacuum unit is the core functional unit in a compact synchrotron vacuum system that provides an ultra-high vacuum environment for ion beam transmission.

[0074] A beam deflection vacuum tube is a vacuum element in a vacuum unit that guides the ion beam to deflect along a circular track. A beam control vacuum tube is a vacuum element in a vacuum unit that realizes the injection, extraction, focusing, and acceleration of the ion beam.

[0075] Adjacent beam deflection vacuum tubes are connected through beam control vacuum tubes to form a ring-shaped vacuum system, which can ensure the continuity of the ultra-high vacuum environment and increase the continuity and stability of the ion beam during deflection and control.

[0076] In one embodiment, the second beam current control vacuum tube at one end of the second vacuum unit and the first beam current deflection vacuum tube at the first end of the first vacuum unit can be connected through the first insert valve 1. The second beam current deflection vacuum tube at the other end of the second vacuum unit and the first beam current control vacuum tube at the second end of the first vacuum unit can be connected through the second insert valve 23. In this way, the first vacuum unit and the second vacuum unit can be vacuum isolated in an ultra-high vacuum environment through the first insert valve 1 and the second insert valve 23, so as to perform local maintenance and inspection of the vacuum system and reduce the operation and maintenance cost of the vacuum system.

[0077] In one embodiment, the ion beam can be injected from the first end of the first vacuum unit. The first insert valve 1 and the first beam deflection vacuum tube can be connected through the first ceramic vacuum chamber 2 to reduce the amount of heat escaping at the connection between the first insert valve 1 and the first beam deflection vacuum tube. The second insert valve 23 and the second beam deflection vacuum tube can be connected through the second beam cavity 24 and the seventh thin-walled quadrupole vacuum chamber 25. By monitoring the beam state, the eddy current effect caused by rapidly changing magnetic fields is suppressed by the thin-walled structure on the basis of stable ion beam, thereby improving the beam stability of the ion beam delivered to the second beam deflection vacuum tube.

[0078] The beam detection element 1703 is a vacuum element integrated into the first beam control vacuum tube for real-time detection of ion beam current.

[0079] The compact synchrotron vacuum system provided by the present invention, by placing the beam diagnostic element 1703 in the first beam current control vacuum tube of the first vacuum unit, eliminates the need for a separate vacuum cavity for the beam diagnostic element 1703, thereby shortening the perimeter of the vacuum system and reducing the difficulty of popularizing medical accelerator treatment devices using vacuum systems in small and medium-sized medical institutions.

[0080] Based on the above embodiments, the vacuum system further includes at least two racetrack-shaped hydraulic bellows;

[0081] The first beam deflection vacuum tube and the first beam control vacuum tube are connected through the racetrack-shaped hydraulic bellows, and the second beam deflection vacuum tube and the second beam control vacuum tube are connected through the racetrack-shaped hydraulic bellows.

[0082] The first beam deflection vacuum tube can be equipped with racetrack-shaped hydraulic bellows at both ends to connect the first beam deflection vacuum tube to the first beam control vacuum tubes at both ends. The second beam deflection vacuum tube can be equipped with racetrack-shaped hydraulic bellows at both ends to connect the second beam deflection vacuum tube to the second beam control vacuum tubes at both ends.

[0083] The first beam deflection vacuum tube and the racetrack-shaped hydraulic bellows can be connected via a knife-edge flange to achieve a metal seal.

[0084] Temperature changes or mechanical vibrations in the vacuum system may cause minute displacements and thermal expansions in the beam deflection vacuum tube. In this embodiment, the beam deflection vacuum tube is connected to the vacuum equipment at both ends via a racetrack-shaped hydraulic bellows. The racetrack-shaped hydraulic bellows can flexibly buffer the minute deformations of the beam deflection vacuum tube, reduce the risk of leakage at the connection of the beam deflection vacuum tube, and increase the reliability of the vacuum system.

[0085] In one embodiment, the racetrack-shaped hydraulic bellows can be made of thin-walled metal material. The specific wall thickness of the racetrack-shaped hydraulic bellows can be adaptively adjusted according to the wall thickness of the connected beam deflection vacuum tube to help reduce eddy current heating caused by rapidly changing magnetic fields and improve the stability of the delivered ion beam.

[0086] Based on any of the above embodiments, the first beam current control vacuum tube at the second end of the first vacuum unit includes:

[0087] A circulating beam thin-walled tube 2002, the input end of which is connected to the first beam deflection vacuum tube, and the output end of which is used to output a beam to the second beam deflection vacuum tube at the other end of the second vacuum unit;

[0088] A thin-walled tube 2001 is provided for the beam extraction. The input end of the thin-walled tube 2001 is connected to the first beam deflection vacuum tube, and the output end of the thin-walled tube 2001 is connected to the treatment terminal.

[0089] The first beam control vacuum tube can be the sixth thin-walled quadrupole vacuum chamber 20. Many treatment terminals can be connected to the output end of the beam extraction thin-walled tube 2001, such as beam scanning systems, integrated treatment platforms, etc., and this invention does not limit this to any particular type.

[0090] In this embodiment, the input end of the circulating beam thin-walled tube 2002 and the output beam thin-walled tube 2001 are respectively connected to the first beam deflection vacuum tube to form a bifurcated thin-walled structure. In this way, the circulation and output of the ion beam are provided through the integrated bifurcated thin-walled structure, which can flexibly control the ion beam and reduce the number of vacuum components and sealing flanges, thereby reducing the leakage rate of the vacuum system, improving the ultimate vacuum degree of the vacuum system, and reducing the complexity of the installation of the vacuum system.

[0091] In one embodiment, the input end of the circulating beam thin-walled tube 2002 and the output beam thin-walled tube 2001 can be connected to the sixth thin-walled quadrupole vacuum chamber, respectively. The sixth thin-walled quadrupole vacuum chamber is connected to the first beam deflection vacuum tube to form a bifurcated thin-walled structure. The tube is connected to the output vacuum chamber 21 through the ultra-high vacuum flange 2003, which can further increase the compactness of the vacuum system.

[0092] Based on any of the above embodiments, the lead-out thin-walled tube 2001 includes:

[0093] The lead-out bundle wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm.

[0094] At least two thin-walled reinforcing plates for the lead-out bundles are disposed at equal intervals on the outer side of the lead-out bundle tube wall.

[0095] Specifically, the material of the lead-out bundle tube wall can be titanium alloy TC4, and the material of the lead-out bundle thin-walled reinforcing plate can be stainless steel 316L and / or titanium alloy TC4, etc.

[0096] The spacing between at least two thin-walled reinforcing plates for the lead-out beams can be adjusted according to the actual situation of the vacuum system, and this embodiment does not limit this. At least two thin-walled reinforcing plates for the lead-out beams can be arranged parallel to each other at equal intervals on the outer side of the lead-out beam tube wall, or they can be arranged alternately at equal intervals on the outer side of the lead-out beam tube wall. This can be adjusted according to the actual situation of the vacuum system, and this embodiment does not limit this.

[0097] In one embodiment, the wall thickness of the lead-out bundle is 0.15 mm. In another embodiment, the wall thickness of the lead-out bundle is 0.2 mm. In yet another embodiment, the wall thickness of the lead-out bundle is 0.25 mm.

[0098] Compared to traditional 1mm magnetic element vacuum tubes, in this embodiment, a thin-walled reinforcing plate is provided on the outside of the tube wall to ensure the supporting strength of the tube wall. By significantly reducing the wall thickness of the tube wall to 0.15-0.25 mm, the eddy current effect generated by the rapidly changing magnetic field on the tube wall can be greatly reduced, thereby ensuring the stability of the beam.

[0099] Based on any of the above embodiments, the circulating bundle thin-walled tube 2002 includes:

[0100] The circulating bundle tube wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm.

[0101] At least two thin-walled reinforcing plates for the circulating bundle are disposed at equal intervals on the outer side of the circulating bundle tube wall.

[0102] The working principle and technical effect of the circulating bundle thin-walled tube 2002 structure in this embodiment are basically the same as those of the lead-out bundle thin-walled tube 2001 structure, and will not be repeated here.

[0103] Based on any of the above embodiments, the first beam deflection vacuum tube includes:

[0104] The first pipe wall 1702 is made of stainless steel and has a wall thickness of 0.25-0.35 mm.

[0105] A first titanium alloy liner is supported inside the first tube wall 1702.

[0106] The first beam deflection vacuum tube can be a first thin-walled hexapole vacuum chamber 17. The material of the first tube wall 1702 can be stainless steel 316L, and the material of the first titanium alloy liner can be titanium alloy TC4.

[0107] The first titanium alloy liner can have many shapes, such as multiple titanium alloy rings, a mesh titanium alloy support liner, etc., and the present invention does not limit it.

[0108] In one embodiment, the wall thickness of the first pipe wall 1702 is 0.25 mm. In another embodiment, the wall thickness of the first pipe wall 1702 is 0.3 mm. In yet another embodiment, the wall thickness of the first pipe wall 1702 is 0.35 mm.

[0109] Compared to traditional 1mm magnetic element vacuum tubes, in this embodiment, a first titanium alloy liner is provided inside the first tube wall 1702 to ensure the supporting strength of the first tube wall 1702. By significantly reducing the wall thickness of the first tube wall 1702 to 0.25-0.35 mm, the eddy current effect generated by the rapidly changing magnetic field on the tube wall of the extraction beam can be greatly reduced, thereby improving the beam stability of the ion beam.

[0110] Furthermore, titanium alloys have a low gas evolution rate. In this embodiment, by providing a first titanium alloy liner inside the first tube wall 1702, the amount of hot gas escaping inside the first beam deflection vacuum tube can be reduced, which can further improve the beam stability of the ion beam.

[0111] In one embodiment, a beam diagnostic element may be disposed at the output end of the first beam deflection vacuum tube to monitor and diagnose the beam stability of the ion beam output from the first beam deflection vacuum tube in real time, so as to facilitate timely maintenance of the vacuum system.

[0112] Based on any of the above embodiments, the second beam deflection vacuum tube includes:

[0113] The second pipe wall is made of stainless steel and has a wall thickness of 0.25-0.35 mm.

[0114] The second titanium alloy liner is supported inside the second tube wall.

[0115] In this embodiment, the working principle and technical effect of the second beam deflection vacuum tube structure are basically the same as those of the first beam deflection vacuum tube structure, and will not be repeated here.

[0116] The compact synchrotron vacuum system provided by this invention, by setting the wall thickness of the beam deflection vacuum tube, which is subjected to bending stress, to 0.25-0.35 mm, can significantly reduce the eddy current effect generated by the rapidly changing magnetic field on the beam tube wall while providing the required structural rigidity. By setting the wall thickness of the tube to 0.15-0.25 mm in at least part of the beam adjustment vacuum tube, the eddy current effect generated by the rapidly changing magnetic field on the beam tube wall is further reduced. While reducing the eddy current effect, adaptive fine-tuning can be performed at different vacuum tube sections to ensure the geometric accuracy of the beam channel and improve the stability of ion beam transmission.

[0117] Based on any of the above embodiments, the first titanium alloy liner includes at least two first titanium alloy rings 1701, which are equally spaced and supported inside the first tube wall 1702.

[0118] The second titanium alloy liner includes at least two second titanium alloy rings, which are equally spaced and supported inside the second tube wall.

[0119] The spacing between at least two second titanium alloy rings can be adjusted according to the actual situation of the vacuum system; this embodiment does not limit this. After determining the spacing between at least two second titanium alloy rings, the number of second titanium alloy rings can be determined specifically based on the length of the portion of the first tube wall 1702 to be supported; this embodiment also does not limit this.

[0120] In this embodiment, the gap between adjacent first titanium alloy rings 1701 can reduce the probability of eddy currents forming large loops, thereby further weakening the eddy current effect generated by the rapidly changing magnetic field on the tube wall and improving the beam stability of the ion beam.

[0121] Based on any of the above embodiments, the first beam deflection vacuum tube includes a first deflection thin-walled vacuum chamber 3, a second deflection thin-walled vacuum chamber 8, a third deflection thin-walled vacuum chamber 12, a fourth deflection thin-walled vacuum chamber 16, and a fifth deflection thin-walled vacuum chamber 19.

[0122] The first beam-controlled vacuum tube includes:

[0123] The first sub-beam control vacuum tube includes: a first thin-walled quadrupole vacuum chamber 4, an injection vacuum chamber 5, an injection electrostatic deflection plate cavity 6, and a second thin-walled quadrupole vacuum chamber 7 connected in sequence; the free end of the first thin-walled quadrupole vacuum chamber 4 is connected to the first end of the first deflection thin-walled vacuum chamber 3, and the free end of the second thin-walled quadrupole vacuum chamber 7 is connected to the first end of the second deflection thin-walled vacuum chamber 8.

[0124] The second sub-beam control vacuum tube includes: a third thin-walled quadrupole vacuum chamber 9, a first beam cavity 10, and a second ceramic vacuum chamber 11 connected in sequence; the free end of the third thin-walled quadrupole vacuum chamber 9 is connected to the second end of the second deflection thin-walled vacuum chamber 8, and the free end of the second ceramic vacuum chamber 11 is connected to the first end of the third deflection thin-walled vacuum chamber 12.

[0125] The third sub-beam control vacuum tube includes: a fourth thin-walled quadrupole vacuum chamber 13, a high-frequency cavity 14, and a fifth thin-walled quadrupole vacuum chamber 15 connected in sequence; the free end of the fourth thin-walled quadrupole vacuum chamber 13 is connected to the second end of the third deflection thin-walled vacuum chamber 12, and the fifth thin-walled quadrupole vacuum chamber 15 is connected to the first end of the fourth deflection thin-walled vacuum chamber 16.

[0126] The fourth sub-beam control vacuum tube includes: a first thin-walled hexapole vacuum chamber 17 and an electrostatic deflection plate cavity 18 connected in sequence. The free end of the first thin-walled hexapole vacuum chamber 17 is connected to the second end of the fourth deflection thin-walled vacuum chamber 16, and the electrostatic deflection plate cavity 18 is connected to the first end of the fifth deflection thin-walled vacuum chamber 19.

[0127] The first extractor beam control vacuum tube comprises a sixth thin-walled quadrupole vacuum chamber 20, an extractor vacuum chamber 21 and a first bellows 22 connected in sequence. The free end of the sixth thin-walled quadrupole vacuum chamber 20 is connected to the second end of the fifth deflection thin-walled vacuum chamber 19.

[0128] The second beam deflection vacuum tube includes a sixth deflection thin-walled vacuum chamber 26, a seventh deflection thin-walled vacuum chamber 30, and an eighth deflection thin-walled vacuum chamber 37; the first end of the sixth deflection thin-walled vacuum chamber 26 is connected to the free end of the first bellows 22;

[0129] The second beam-controlled vacuum tube includes:

[0130] The fifth sub-beam control vacuum tube includes: an eighth thin-walled quadrupole vacuum chamber 27, a third beam diagnostic chamber 28, and a first vacuum pump chamber 29 connected in sequence; the free end of the eighth thin-walled quadrupole vacuum chamber 27 is connected to the second end of the sixth deflection thin-walled vacuum chamber 26, and the free end of the first vacuum pump chamber 29 is connected to the first end of the seventh deflection thin-walled vacuum chamber 30.

[0131] The sixth sub-beam control vacuum tube comprises: a ninth thin-walled quadrupole vacuum chamber 31, a DC beam transformer 32, a second bellows tube 33, a fourth beam cavity 34, a second vacuum pump chamber 35, and a tenth thin-walled quadrupole vacuum chamber 36 connected in sequence; the free end of the ninth thin-walled quadrupole vacuum chamber 31 is connected to the second end of the seventh deflection thin-walled vacuum chamber 30, and the free end of the tenth thin-walled quadrupole vacuum chamber 36 is connected to the first end of the eighth deflection thin-walled vacuum chamber 37;

[0132] The second lead-out sub-beam current control vacuum tube includes a second thin-walled hexapole vacuum chamber 38, a fifth beam diagnostic chamber 39, and a sixth beam diagnostic chamber 40 connected in sequence. The free end of the second thin-walled hexapole vacuum chamber 38 is connected to the second end of the eighth deflection thin-walled vacuum chamber 37, and the free end of the sixth beam diagnostic chamber 40 is connected to the second end of the first deflection thin-walled vacuum chamber 39.

[0133] Each vacuum element has a knife-edge flange at both ends to achieve a metal seal between the vacuum elements.

[0134] Based on any of the above embodiments, the vacuum system further includes at least two getter modules, which are respectively disposed inside the injection electrostatic deflection plate cavity 6 and the lead-out electrostatic deflection plate cavity 18.

[0135] Specifically, four getter modules can be respectively set inside the injection electrostatic deflection plate cavity 6 and the lead-out electrostatic deflection plate cavity 18, which have relatively high gas load and relatively compact space, to efficiently remove hot exhaust gases and reduce the gas density inside the electrostatic deflection plate cavity and the lead-out electrostatic deflection plate cavity 18, thereby improving the vacuum degree within a small space with a large gas load.

[0136] Based on any of the above embodiments, the vacuum system further includes:

[0137] At least three vacuum measuring devices are respectively installed in the injection electrostatic deflection plate cavity 6, the lead-out electrostatic deflection plate cavity 18 and the second vacuum pump chamber 35;

[0138] At least three molecular pump units are respectively located at the injection electrostatic deflection plate cavity 6, the lead-out electrostatic deflection plate cavity 18 and the second vacuum pump chamber 35;

[0139] At least six composite ion pumps are respectively located at the injection vacuum chamber 5, the injection electrostatic deflection plate cavity 6, the first beam diagnostic cavity 10, the fourth thin-walled quadrupole vacuum chamber 13, the extraction electrostatic deflection plate cavity 18, the extraction vacuum chamber 21, the first vacuum pump chamber 29, the second vacuum pump chamber 35, and the fifth beam diagnostic cavity 39.

[0140] Vacuum measuring equipment refers to equipment used to monitor and determine the internal pressure of a vacuum system.

[0141] The composite ion pump includes a sputtering ion pump and a NEG getter pump. In the injection vacuum chamber 5, the first beam diagnostic chamber 10, the fourth thin-walled quadrupole vacuum chamber 13, the extraction vacuum chamber 21, the first vacuum pump chamber 29, and the fifth beam diagnostic chamber 39, where the composite ion pump is set separately, the NEG getter pump can effectively remove active gases such as water vapor, oxygen, and nitrogen from the hot exhaust gas through chemical adsorption. On this basis, the sputtering ion pump can effectively remove inert gases and light gases by ionizing gas molecules. The two work together to remove gases from the vacuum system and improve the vacuum level of the vacuum system.

[0142] By simultaneously setting up the injection electrostatic deflection plate cavity 6, the lead-out electrostatic deflection plate cavity 18, and the second vacuum pump chamber 35 for the molecular pump unit and the composite ion pump, the composite ion pump can be used as the main pump to further reduce the pressure to the target vacuum level of the ultra-high vacuum to vacuum system, and maintain this target vacuum level, based on the pre-vacuum provided by the molecular pump unit.

[0143] In one embodiment, the pumping speed of the composite ion pump can be set to 1200 L / s.

[0144] In this embodiment, the aforementioned connection method, along with the arrangement of the molecular pump unit, the compound ion pump, and the vacuum measuring equipment, enables the vacuum level within the entire toroidal vacuum system to become more uniform and to work collaboratively, maintaining a vacuum level of 10°C under non-baking conditions. -10 Ultra-high vacuum environment at the mbar level.

[0145] The design method of the compact synchrotron vacuum system provided by the present invention will be described below.

[0146] Figure 4 This is a flowchart illustrating the design method of the compact synchrotron vacuum system provided by the present invention, as shown below. Figure 4 As shown, the method includes:

[0147] S401. Obtain the original three-dimensional structural model of the original vacuum element based on the compact synchrotron vacuum system.

[0148] Among them, the original vacuum element refers to the vacuum element without parameter optimization, and the original three-dimensional structural model is a model obtained based on the ring arrangement sequence of the original vacuum element.

[0149] The physical design parameters of the compact synchrotron vacuum system can be obtained through calculation. Based on the physical design parameters, the annular arrangement of vacuum components can be determined. Based on the annular arrangement of vacuum components, the original three-dimensional structural model of the vacuum system can be established, which can also be called the preliminary three-dimensional structural model.

[0150] S402. Perform strength analysis on the original three-dimensional structural model to obtain strength analysis results, and optimize the structural parameters of the original three-dimensional structural model based on the strength analysis results to obtain a three-dimensional structural model.

[0151] There are many ways to obtain strength analysis results by performing strength analysis on the original three-dimensional structural model, such as finite element analysis and formula calculation, and this invention does not limit this method. There are also many ways to optimize the structural parameters of the original three-dimensional structural model based on the strength analysis results, such as iterative optimization and empirical adjustment, and this invention does not limit this method either.

[0152] After optimizing the structural parameters of the original three-dimensional structural model, a three-dimensional structural model can be established based on the optimized vacuum components and their annular arrangement.

[0153] S403. Determine the heat output of the vacuum components of the compact synchrotron vacuum system based on the optimized structural parameters of the three-dimensional structural model, and perform pressure simulation on the three-dimensional structural model based on the heat output to determine the ultimate pressure of the three-dimensional structural model.

[0154] S404. The compact synchrotron vacuum system is obtained based on the ultimate pressure, the optimized structural parameters, and the arrangement of vacuum components in the three-dimensional structural model.

[0155] There are many ways to obtain a compact synchrotron vacuum system by integrating the ultimate pressure, optimized structural parameters, and the arrangement of vacuum components in a three-dimensional structural model; this invention does not limit this approach.

[0156] The design method for a compact synchrotron vacuum system provided in this embodiment of the invention optimizes the structural parameters of the vacuum system through simulation models, and performs pressure simulation on the three-dimensional structural model of the optimized vacuum system to determine its ultimate pressure. By integrating the ultimate pressure, the optimized structural parameters, and the arrangement of vacuum components in the three-dimensional structural model, a compact synchrotron vacuum system is obtained. This method can shorten the perimeter of the vacuum system, significantly reduce the cost of the vacuum system, and shorten the construction cycle of the vacuum system.

[0157] In one embodiment, the perimeter of the vacuum system can be shortened to less than 36m.

[0158] It should be noted that the technical solutions in the various embodiments of the present invention can be combined with each other, but the basis for such combination is that they can be implemented by those skilled in the art. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist, that is, it is not within the scope of protection of the invention.

[0159] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A compact synchrotron vacuum system, characterized in that, include: A first vacuum unit, the first vacuum unit comprising: The first beam deflection vacuum tube, wherein at least two first beam deflection vacuum tubes are provided; The first beam control vacuum tube is connected to the adjacent first beam deflection vacuum tube through the first beam control vacuum tube. The second vacuum unit includes: The second beam deflection vacuum tube is provided in at least two. The second beam control vacuum tube is connected to the adjacent second beam deflection vacuum tube through the second beam control vacuum tube; Wherein, the second beam current control vacuum tube at one end of the second vacuum unit is connected to the first beam current deflection vacuum tube at the first end of the first vacuum unit, and the second beam current deflection vacuum tube at the other end of the second vacuum unit is connected to the first beam current control vacuum tube at the second end of the first vacuum unit; the first beam current control vacuum tube of the first vacuum unit is provided with a beam current control element. The first beam current control vacuum tube at the second end of the first vacuum unit includes: A circulating beam thin-walled tube, wherein the input end of the circulating beam thin-walled tube is connected to the first beam deflection vacuum tube, and the output end of the circulating beam thin-walled tube is used to output a beam to the second beam deflection vacuum tube at the other end of the second vacuum unit; A thin-walled tube for drawing out the beam is provided, the input end of which is connected to the first beam deflection vacuum tube, and the output end of which is connected to the treatment terminal. The input end of the circulating beam thin-walled tube and the input end of the lead-out beam thin-walled tube are respectively connected to the first beam deflection vacuum tube, forming an integrated bifurcated thin-walled structure.

2. The compact synchrotron vacuum system according to claim 1, characterized in that, It also includes at least two runway-shaped hydraulic bellows; The first beam deflection vacuum tube and the first beam control vacuum tube are connected through the racetrack-shaped hydraulic bellows, and the second beam deflection vacuum tube and the second beam control vacuum tube are connected through the racetrack-shaped hydraulic bellows.

3. The compact synchrotron vacuum system according to claim 1, characterized in that, The circulating bundle thin-walled tube includes: The circulating bundle tube wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm. At least two thin-walled reinforcing plates for the circulating bundle are disposed at equal intervals on the outer side of the circulating bundle tube wall; The lead-out thin-walled tube includes: The lead-out bundle wall is made of titanium alloy and has a wall thickness of 0.15-0.25 mm. At least two thin-walled reinforcing plates for the lead-out bundles are disposed at equal intervals on the outer side of the lead-out bundle tube wall.

4. The compact synchrotron vacuum system according to claim 1, characterized in that, The first beam deflection vacuum tube includes: The first pipe wall is made of stainless steel and has a wall thickness of 0.25-0.35 mm. A first titanium alloy liner is supported inside the first pipe wall; The second beam deflection vacuum tube includes: The second pipe wall is made of stainless steel and has a wall thickness of 0.25-0.35 mm. The second titanium alloy liner is supported inside the second tube wall.

5. The compact synchrotron vacuum system according to claim 4, characterized in that, The first titanium alloy liner includes at least two first titanium alloy rings, which are equally spaced and supported inside the first tube wall; The second titanium alloy liner includes at least two second titanium alloy rings, which are equally spaced and supported inside the second tube wall.

6. The compact synchrotron vacuum system according to claim 1, characterized in that, The first beam deflection vacuum tube includes a first deflection thin-walled vacuum chamber, a second deflection thin-walled vacuum chamber, a third deflection thin-walled vacuum chamber, a fourth deflection thin-walled vacuum chamber, and a fifth deflection thin-walled vacuum chamber; The first beam-controlled vacuum tube includes: The first sub-beam control vacuum tube includes: a first thin-walled quadrupole vacuum chamber, an injection vacuum chamber, an injection electrostatic deflection plate cavity, and a second thin-walled quadrupole vacuum chamber connected in sequence; the free end of the first thin-walled quadrupole vacuum chamber is connected to the first end of the first deflection thin-walled vacuum chamber, and the free end of the second thin-walled quadrupole vacuum chamber is connected to the first end of the second deflection thin-walled vacuum chamber. The second sub-beam control vacuum tube includes: a third thin-walled quadrupole vacuum chamber, a first beam cavity, and a second ceramic vacuum chamber connected in sequence; the free end of the third thin-walled quadrupole vacuum chamber is connected to the second end of the second deflection thin-walled vacuum chamber, and the free end of the second ceramic vacuum chamber is connected to the first end of the third deflection thin-walled vacuum chamber. The third sub-beam control vacuum tube includes: a fourth thin-walled quadrupole vacuum chamber, a high-frequency cavity, and a fifth thin-walled quadrupole vacuum chamber connected in sequence; the free end of the fourth thin-walled quadrupole vacuum chamber is connected to the second end of the third deflection thin-walled vacuum chamber, and the fifth thin-walled quadrupole vacuum chamber is connected to the first end of the fourth deflection thin-walled vacuum chamber. The fourth sub-beam control vacuum tube includes: a first thin-walled hexagonal vacuum chamber and an electrostatic deflection plate cavity connected in sequence. The free end of the first thin-walled hexagonal vacuum chamber is connected to the second end of the fourth deflection thin-walled vacuum chamber, and the electrostatic deflection plate cavity is connected to the first end of the fifth deflection thin-walled vacuum chamber. The first extractor beam control vacuum tube comprises a sixth thin-walled quadrupole vacuum chamber, an extractor vacuum chamber, and a first bellows connected in sequence. The free end of the sixth thin-walled quadrupole vacuum chamber is connected to the second end of the fifth deflection thin-walled vacuum chamber. The second beam deflection vacuum tube includes a sixth deflection thin-walled vacuum chamber, a seventh deflection thin-walled vacuum chamber, and an eighth deflection thin-walled vacuum chamber; the first end of the sixth deflection thin-walled vacuum chamber is connected to the free end of the first bellows. The second beam-controlled vacuum tube includes: The fifth sub-beam control vacuum tube includes: an eighth thin-walled quadrupole vacuum chamber, a third beam diagnostic chamber, and a first vacuum pump chamber connected in sequence; the free end of the eighth thin-walled quadrupole vacuum chamber is connected to the second end of the sixth deflection thin-walled vacuum chamber, and the free end of the first vacuum pump chamber is connected to the first end of the seventh deflection thin-walled vacuum chamber. The sixth sub-beam control vacuum tube comprises: a ninth thin-walled quadrupole vacuum chamber, a DC beam transformer, a second bellows, a fourth beam diagnostic chamber, a second vacuum pump chamber, and a tenth thin-walled quadrupole vacuum chamber connected in sequence; the free end of the ninth thin-walled quadrupole vacuum chamber is connected to the second end of the seventh deflection thin-walled vacuum chamber, and the free end of the tenth thin-walled quadrupole vacuum chamber is connected to the first end of the eighth deflection thin-walled vacuum chamber; The second lead-out sub-beam current control vacuum tube includes a second thin-walled hexapole vacuum chamber, a fifth beam diagnostic chamber, and a sixth beam diagnostic chamber connected in sequence. The free end of the second thin-walled hexapole vacuum chamber is connected to the second end of the eighth deflection thin-walled vacuum chamber, and the free end of the sixth beam diagnostic chamber is connected to the second end of the first deflection thin-walled vacuum chamber.

7. The compact synchrotron vacuum system according to claim 6, characterized in that, It also includes at least two getter modules, which are respectively disposed inside the injection electrostatic deflection plate cavity and the lead-out electrostatic deflection plate cavity.

8. The compact synchrotron vacuum system according to claim 6, characterized in that, Also includes: At least three vacuum measuring devices are respectively installed in the injection electrostatic deflection plate cavity, the lead-out electrostatic deflection plate cavity, and the second vacuum pump chamber; At least three molecular pump units are respectively located at the injection electrostatic deflection plate cavity, the lead-out electrostatic deflection plate cavity, and the second vacuum pump chamber; At least six composite ion pumps are respectively located at the injection vacuum chamber, the injection electrostatic deflection plate cavity, the first beam diagnostic cavity, the fourth thin-walled quadrupole vacuum chamber, the extraction electrostatic deflection plate cavity, the extraction vacuum chamber, the first vacuum pump chamber, the second vacuum pump chamber, and the fifth beam diagnostic cavity.

9. A design method for a compact synchrotron vacuum system, characterized in that, The compact synchrotron vacuum system according to any one of claims 1-8 comprises: The original three-dimensional structural model of the original vacuum element of the compact synchrotron vacuum system was obtained; Strength analysis is performed on the original three-dimensional structural model to obtain strength analysis results, and the structural parameters of the original three-dimensional structural model are optimized based on the strength analysis results to obtain a three-dimensional structural model. Based on the optimized structural parameters of the three-dimensional structural model, the thermal exhaust volume of the vacuum components of the compact synchrotron vacuum system is determined, and pressure simulation is performed on the three-dimensional structural model based on the thermal exhaust volume to determine the ultimate pressure of the three-dimensional structural model. The compact synchrotron vacuum system is obtained based on the ultimate pressure, the optimized structural parameters, and the arrangement of vacuum components in the three-dimensional structural model.

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