Large-length-width-ratio metal fine-line-shaped micro-convex structure forming device and method

Abstract

The invention discloses a forming device and method for a large-length-width-ratio metal fine-line-shaped micro-convex structure, and relates to the technical field of laser precision machining. The device comprises a forming box, a multi-axis motion machining platform, an inert gas source, a laser machining assembly, a range finder and a computer controller. The laser processing assembly comprises a laser emitter, a light beam shaping assembly, a beam splitter, a plurality of galvanometers, a plurality of light shielding plates and a focusing field lens, and the light shielding plates are installed between the galvanometers and the focusing field lens in a sliding mode so as to open or close light beam channels of the galvanometers and the focusing field lens. According to the forming device, forming of the thin-line-shaped micro-convex structures in complex and changeable shapes can be achieved, the inert gas source is used for filling inert protective gas into the forming box, the heat affected zone can be remarkably reduced, and the surface quality is improved; and meanwhile, in the machining process, the forming condition of the fine-line-shaped micro-convex structures is monitored in real time through the range finder, the distance between the micro-convex structures can be adjusted in real time, the machining precision is improved, and the high-precision manufacturing requirement is met.

Description

Technical Field

[0001] The present invention relates to the technical field of laser precision machining, and in particular to a device and method for forming a metal fine-line micro-convex structure with a large aspect ratio. Background Art

[0002] With the rapid development of modern manufacturing technology towards miniaturization and integration, laser processing technology has become one of the core technologies in industrial manufacturing, medical equipment, aerospace, and electronic products due to its advantages of high precision, high efficiency, non-contact processing, and wide material adaptability. Especially in the field of microelectronics, such as high-density integrated circuits (ICs), microelectromechanical systems (MEMS), and flexible electronic devices, micron-scale raised alloy wires serve as conductive interconnect structures, sensor sensitive units, or optical functional elements. Their performance directly determines the response speed, signal accuracy, and reliability of the device. However, with the continuous reduction in device size and the improvement of functional requirements, the requirements for such structures are also gradually increasing, which places extremely high demands on the resolution and dynamic control accuracy of the processing technology.

[0003] In the use of internal wires in chips, the aspect ratio of the wires must meet certain standards to ensure the quality and reliability of signal transmission. The aspect ratio refers to the ratio of the length of an object to its lateral dimension (such as width or height). For example, if a thin wire with a length of 1 mm is only 1 micron in width or height, the aspect ratio is 1000:1. The aspect ratio of the wires inside the chip must reach 1000-5000 to meet the needs of miniaturization. In vertically stacked circuits, the aspect ratio of thin wires may exceed 10. 4 (For example, 1 cm in length and 1 μm in diameter.) Cantilever beam structures in microsensors and actuators (such as accelerometers) typically have an aspect ratio of 2000-10000. In stretchable circuits, this ratio must be greater than 5000 to ensure it does not break when bent.

[0004] From the perspective of material mechanics, aspect ratios can theoretically approach infinity. However, conventional laser forming is susceptible to limitations in the heat-affected zone, spot uniformity, and dynamic control accuracy when forming high-aspect-ratio microstructures, resulting in large errors in fine line spacing and unstable surface quality. Therefore, a device and method for forming high-aspect-ratio metal fine-line micro-convex structures with high precision, high consistency, and strong adaptability are urgently needed. Summary of the Invention

[0005] In view of this, the present invention aims to provide a large aspect ratio metal fine line micro-convex structure forming device to at least to some extent solve the problem that laser forming in large aspect ratio microstructure forming is susceptible to heat affected zone, spot uniformity and dynamic control accuracy limitations, resulting in large fine line spacing errors and unstable surface quality.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] A device for forming a metal fine-line micro-convex structure with a large aspect ratio, comprising:

[0008] A forming box, wherein the top of the forming box is provided with a mounting hole and the side wall is provided with an air inlet hole;

[0009] A multi-axis motion processing platform, the multi-axis motion processing platform is installed on the bottom wall of the forming box, and the workpiece to be processed can be loaded on the top of the multi-axis motion processing platform;

[0010] an inert gas source, wherein an output end of the inert gas source is connected to the gas inlet;

[0011] A laser processing assembly, comprising a laser emitter, a beam shaping assembly, a beam splitter, a plurality of galvanometer mirrors, a plurality of light shielding plates, and a focusing field lens, wherein the focusing field lens is fixed to the mounting hole; the laser beam emitted by the laser emitter passes through the beam shaping assembly, the beam splitter, the plurality of galvanometer mirrors, and the focusing field lens in sequence, and is incident on the workpiece to be processed in the forming box; the plurality of light shielding plates correspond one-to-one to the plurality of galvanometer mirrors, and each light shielding plate is slidably mounted between the galvanometer mirror and the focusing field lens in a direction perpendicular to the line connecting the galvanometer mirror and the focusing field lens, so as to open or close the beam path between the galvanometer mirror and the focusing field lens;

[0012] A distance meter, the distance meter being fixed on the top of the forming box, and the measuring end of the distance meter being arranged corresponding to the multi-axis motion processing platform to measure the distance between adjacent metal fine linear micro-convex structures with large aspect ratios formed on the surface of the workpiece to be processed;

[0013] A computer controller is electrically connected to the inert gas source, the laser emitter, the galvanometer, and the rangefinder.

[0014] Through the above technical solution, the present invention can achieve the following beneficial effects: the laser beam emitted by the laser processing component is shaped to form a plurality of uniform light spots, and the complex and variable shapes of fine-line micro-convex structures can be formed by cooperating with a plurality of independent galvanometers and light shielding plates. The inert protective gas is filled into the forming box by using an inert gas source, which can significantly reduce the heat-affected zone and improve the surface quality. At the same time, during the processing, the rangefinder is used to monitor the forming status of the fine-line micro-convex structure in real time, which can realize real-time adjustment of the spacing between the micro-convex structures, improve the processing accuracy, and meet the high-precision manufacturing requirements.

[0015] Preferably, the inert gas source includes an inert gas storage tank, an air pump and a delivery pipe, the gas outlet of the inert gas storage tank is connected to the air pump, and the air pump is connected to the air inlet through the delivery pipe and is electrically connected to the computer controller.

[0016] The above technical solution can achieve the following beneficial effects: filling the molding box with inert protective gas to ensure the stability of the processing environment, prevent the workpiece from oxidizing, and reduce the heat-affected zone and thermal stress during processing, thereby improving the flatness and precision of the edge of the micro-convex structure.

[0017] Preferably, an oxygen content sensor is further provided, which is installed in the molding box and electrically connected to the computer controller.

[0018] The above technical solution can achieve the following beneficial effects: real-time monitoring of the oxygen content in the molding box and dynamic adjustment of the inert gas charging amount.

[0019] Preferably, the beam shaping assembly includes a beam expander and a diffraction shaping element which are sequentially installed between the laser emitter and the beam splitter along the light output direction.

[0020] The above technical solution can achieve the following beneficial effects: ensuring the uniformity of the light spot and improving the processing quality.

[0021] Preferably, the laser processing assembly also includes a light shielding plate sliding assembly, which includes a support frame, a drive motor, a lead screw and a slide rail, wherein the drive motor is fixed on one side of the support frame and electrically connected to the computer controller; the lead screw is arranged along a direction perpendicular to the connecting line between the galvanometer and the focusing field lens and is rotatably mounted on the support frame; the slide rail is arranged parallel to the lead screw and fixed on the support frame; a slider is fixed to one side end of the light shielding plate, which is slidably connected to the slide rail, and a threaded hole is provided at the other side end which is arranged opposite to the lead screw and is threadedly connected to the lead screw.

[0022] The above technical solution can achieve the following beneficial effects: according to process requirements, the position of the light shielding plate is dynamically adjusted to adjust the number and spacing of light spots injected into the molding box, thereby realizing the molding of fine-line micro-convex structures with complex and variable shapes.

[0023] Preferably, a laser recovery device is further provided, which includes a reflector and a laser-specific photovoltaic cell. The reflector is fixed on the surface of the shading plate to reflect the light beam reflected by the galvanometer to the laser-specific photovoltaic cell for recovery.

[0024] The above technical solution can achieve the following beneficial effects: the energy of the laser beam that has not entered the forming box can be recycled and reused, thereby reducing energy waste.

[0025] Preferably, a method for forming a metal fine line micro-convex structure with a large aspect ratio adopts a metal fine line micro-convex structure forming device with a large aspect ratio according to any one of claims 1 to 6, comprising the following steps:

[0026] S1. Thoroughly clean the surface of the metal substrate, cut the weakly magnetic metal foil to the required length, and laminate it onto the metal substrate to obtain a composite metal workpiece; place the composite metal workpiece on a multi-axis motion processing platform in a forming box and clamp it in place, adjusting the position of the multi-axis motion processing platform to be directly below the mounting hole;

[0027] S2. Inputting the required fine-line micro-convex structure forming style into the computer controller, and setting the fine-line micro-convex structure forming parameters according to the processing material and the expected surface quality requirements;

[0028] S3. Inert protective gas is introduced into the forming box, and a laser processing assembly is used to form a fine-line micro-convex structure on the composite metal workpiece treated in S1. During the processing, a distance meter is used to monitor in real time the distance between the latest formed fine line and the previous formed fine line, thereby adjusting the displacement of the processing platform to adjust in real time the distance between the next fine line and the latest formed fine line;

[0029] S4, removing the composite metal workpiece after the fine linear micro-convex structure is processed in S3 from the fixture, peeling off the metal foil waste on the surface, and then subjecting the workpiece to annealing, demagnetization, chemical deflashing, etc., and then rinsing with distilled water to completely remove chemical residues, and drying at low temperature;

[0030] S5. The formed metal workpiece that has undergone post-processing in S4 is inspected for the morphology and dimensional accuracy of the fine-line micro-convex structure using an optical microscope and a scanning electron microscope, and processing parameters such as laser power and spot spacing and chemical treatment parameters are dynamically optimized based on the measurement data.

[0031] Through the above technical solution, the present invention can achieve the following beneficial effects:

[0032] Preferably, the thickness of the metal foil in step S1 is 0.01 mm-0.1 mm.

[0033] The above technical solution can achieve the following beneficial effects: a metal foil of appropriate thickness is selected according to the processing requirements of a large aspect ratio process.

[0034] Preferably, the annealing temperature in step S4 is 900-1100° C. and the annealing time is 30-60 minutes to eliminate thermal stress.

[0035] The above technical solution can achieve the following beneficial effects: eliminating the influence of thermal stress and improving the surface quality of the molded structure.

[0036] Preferably, in step S4, the demagnetization method adopts a high-temperature solid solution method or an electrode demagnetization method, and the chemical demagnetization method adopts an acid solution corrosion demagnetization method or an electrolytic demagnetization method.

[0037] The above technical solution can achieve the following beneficial effects: removing magnetism by demagnetization to avoid interference with the use of electronic devices in subsequent use; removing edge slag, burrs and oxide layers by deburring to achieve the expected surface quality requirements.

[0038] It can be seen from the above technical solutions that, compared with the prior art, the present invention provides a device and method for forming a metal fine-line micro-convex structure with a large aspect ratio, which has the following beneficial effects:

[0039] 1. The rangefinder can monitor and control the displacement of the processing platform and the laser parameters of the laser processing components, and can achieve fine line forming of 1:10-1:1000 and larger ratios, achieve nanometer-level spacing accuracy, and improve processing accuracy.

[0040] 2. Through multiple independent galvanometers and multiple shading plates, the laser beam incident on the forming box can be selected, thereby realizing the forming of thin lines with complex and variable shapes. At the same time, with the laser recovery device, the laser that has not been incident on the forming box can be recovered, reducing energy waste and saving energy.

[0041] 3. Using metal foil as the forming material, inert gas as the shielding gas, and beam shaping components to shape the beam, significantly reducing the heat-affected zone, improving surface quality, and meeting high-precision manufacturing requirements.

[0042] 4. Demagnetization is used to avoid interference with the functions of electronic devices, and chemical edge removal is used to accurately remove the oxide layer and slag to reduce edge defects. It is suitable for the molding and manufacturing of fine-line micro-convex structures of various metal foil materials. The process is highly flexible and can meet the needs of complex microstructure processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0044] Figure 1 This is a schematic diagram of the three-dimensional structure of a large aspect ratio metal fine wire micro-convex structure forming device provided by the present invention.

[0045] Figure 2 This is a schematic diagram of the main structure of a large aspect ratio metal fine wire micro-convex structure forming device provided by the present invention.

[0046] Figure 3 This is a schematic structural diagram of the laser processing assembly provided by the present invention.

[0047] Figure 4This is a schematic structural diagram of the sunshade sliding assembly provided by the present invention.

[0048] Figure 5 This is a schematic diagram of the molding structure of the micro-convex metal fine line micro-convex structure with a large aspect ratio provided by the present invention.

[0049] Figure 6 This is a flow chart of a method for forming a metal fine-line micro-convex structure with a large aspect ratio provided by the present invention.

[0050] In the picture:

[0051] 1. Molding box, 2. Multi-axis motion processing platform, 3. Inert gas source, 31. Inert gas storage tank, 32. Air pump, 33. Delivery pipe, 4. Laser processing components, 41. Laser emitter, 42. Beam splitter, 43. Multiple galvanometers, 44. Multiple shading plates, 45. Focusing field lens, 46. Beam expander, 47. Diffraction shaping element, 48. Shading plate sliding assembly, 49. Protective cover, 481. Support frame, 482. Drive motor, 483. Screw, 484. Slide rail, 5. Rangefinder, 6. Computer controller, 7. Laser recovery device, 71. Reflector, 72. Laser-specific photovoltaic cell, 8. Oxygen content sensor, 9. Metal substrate, 10. Metal foil, 411. Rectangular laser beam, 11. Already formed fine-line micro-convex structure, 111. Last formed fine-line micro-convex structure, 112. Latest formed fine-line micro-convex structure, 12. Fine-line micro-convex structure being formed, 13. Fine-line micro-convex structure to be formed. DETAILED DESCRIPTION

[0052] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0053] In the description of the present invention, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0054] In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," "fixed," etc. should be understood broadly. For example, they may refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0055] Example 1:

[0056] See also Figure 1-Figure 5 The embodiment of the present invention discloses a device for forming a metal fine-line micro-convex structure with a large aspect ratio, comprising: a sealed forming box 1, a multi-axis motion processing platform 2, an inert gas source 3, a laser processing component 4, a rangefinder 5 and a computer controller 6;

[0057] The top of the molding box 1 is provided with a mounting hole, and the side wall is provided with an air inlet hole.

[0058] The multi-axis motion processing platform 2 is installed on the bottom wall of the forming box 1. The multi-axis motion processing platform 2 is a three-axis motion platform that can move along the X-axis, Y-axis, and Z-axis. A workpiece fixture is installed on the platform, and the workpiece to be processed can be clamped on the platform surface through the workpiece fixture and move with the platform.

[0059] The output end of the inert gas source 3 is connected to the air inlet hole for filling the molding box 1 with inert protective gas to reduce the heat affected zone.

[0060] like Figure 3As shown, the laser processing assembly 4 includes a protective cover 49, a laser emitter 41, and a beam shaping assembly mounted within the protective cover, a beam splitter 42, multiple galvanometer mirrors 43, multiple light shields 44, and a focusing field lens 45. The protective cover 49 is open at the bottom and covers the top of the forming box 1 at the mounting hole. The focusing field lens 45 is fixed to the mounting hole. The laser emitter 41 is mounted within or outside the protective cover 49. When the laser emitter 41 is mounted outside the protective cover 49, a window is provided on the protective cover 49 for laser light to enter. The laser emitter 41 can be a continuous fiber laser, which emits a continuous fiber laser beam with a power of 40W to 1000W. After the continuous fiber laser is shaped into a rectangular laser beam by the beam shaping assembly, the beam splitter 42 further divides the rectangular laser beam into multiple rectangular laser beams. Multiple galvanometer mirrors 43 reflect the multiple rectangular laser beams respectively to the focusing field lens 45. The multiple rectangular laser beams are focused by the focusing field lens 45 to change the spacing between the beams before being incident on the workpiece to be processed in the forming box 1. The galvanometer mirrors 43 scan along the Y-axis of the multi-axis movable processing platform 2. Multiple light shielding plates 44 correspond one to each of the multiple galvanometer mirrors 43, and each light shielding plate 44 is slidably installed in the protective cover 49 between the galvanometer mirror 43 and the focusing field lens 45 along the direction perpendicular to the line connecting the galvanometer mirror 43 and the focusing field lens 45 to open or close the beam path between the galvanometer mirror 43 and the focusing field lens 45.

[0061] The rangefinder 5 is fixed on the top of the molding box 1 adjacent to the protective cover 49. The rangefinder 5 is an infrared rangefinder 5. Its measuring end extends into the molding box 1 and is arranged corresponding to the multi-axis motion processing platform 2. It is used to collect the distance a between the latest formed fine-line micro-convex structure 112 on the workpiece surface and the previously formed fine-line micro-convex structure 111 during the processing; and then the computer controller 6 is used to control and adjust the displacement of the multi-axis processing platform 2 along the X-axis, thereby adjusting the distance b between the latest formed fine-line micro-convex structure 112 and the next fine-line micro-convex structure 13 to be formed. The distance b can be greater than, less than or equal to a, and its value mainly depends on the process requirements. For example, if the process requires that the spacing between multiple fine-line micro-convex structures to be processed is the same as a', then the displacement of the processing platform is usually adjusted to a' each time to meet the requirement that the spacing between adjacent fine lines is a'. However, the molding process is affected by various factors, resulting in an error between the fine line spacing after molding and the platform displacement. In this case, the displacement of the processing platform when processing the next fine-line structure can be adjusted according to the monitoring situation of the rangefinder 5 to reduce the error, thereby reducing error accumulation and improving the machining accuracy of multiple fine-line micro-convex structures on the workpiece surface. ( Figure 5 A schematic diagram showing a rectangular laser beam 411 during processing is shown.

[0062] The computer controller 6 is electrically connected to the inert gas source 3 , the laser emitter 41 , the galvanometer 43 and the rangefinder 5 .

[0063] An oxygen content sensor 8 is installed in the molding box 1 to monitor the oxygen content in the box so as to adjust the input amount of the inert gas.

[0064] The inert gas source 3 includes an inert gas storage tank 31, an air pump 32 and a delivery pipe 33. The inert gas storage tank 31 is filled with inert protective gas, and its gas outlet is connected to the air pump 32. The air pump 32 is connected to the air inlet through the delivery pipe 33; the computer controller 6 is electrically connected to the air pump 32.

[0065] The beam shaping assembly includes a beam expander 46 and a diffraction shaping element 47, which are installed in sequence between the laser emitter 41 and the beam splitter 42 along the light output direction. The laser beam emitted by the laser emitter 41 is first expanded by the beam expander 46, then shaped into a rectangular beam by the diffraction shaping element 47, and then formed into N beams by the beam splitter 42. The N beams are redirected by corresponding galvanometer mirrors 43, and then the beams are selected to enter the forming area within the forming box 1 according to the process requirements. If the beam does not need to enter the forming area, the light path is blocked by the light shielding plate 44. If the beam needs to enter the forming area, the light path is opened by moving the light shielding plate 44, and then the focusing field lens 45 focuses the beam and then it is incident on the workpiece to be processed.

[0066] See also Figure 4 The laser processing assembly 4 also includes a light shield sliding assembly 48, which includes a support frame 481, a drive motor 482, a lead screw 483, and a slide rail 484. The support frame 481 is a rectangular frame structure that allows the laser beam to pass through it. The drive motor 482 is fixed to one side of the support frame 481 and is electrically connected to the computer controller 6. The lead screw 483 is arranged along the line connecting the vertical galvanometer mirror 43 and the focusing field lens 45 and is rotatably mounted on the support frame 481. The slide rail 484 is arranged parallel to the lead screw 483 and is fixed to the support frame 481. A slider is fixed to one side of the light shield 44, which is slidably connected to the slide rail 484, and a threaded hole is formed on the other side, which is threadedly connected to the lead screw 483. According to process requirements, the drive motor 482 drives the lead screw 483 to rotate, driving the light shield 44 to slide along the slide rail 484, thereby blocking or opening the optical path between the corresponding galvanometer mirror 43 and the focusing field lens 45, allowing the beam that meets the process requirements to enter the workpiece for processing.

[0067] A laser recovery device 7 is also provided, comprising a reflector 71 and a laser-specific photovoltaic cell 72. The reflector 71 is fixed to the surface of the light shield 44 to reflect the light beam transmitted by the galvanometer 43 onto the laser-specific photovoltaic cell 72 for recovery. The laser beam, without entering the forming area, is reflected by the reflector 71 on the light shield 44 and then enters the laser-specific photovoltaic cell 72, converting the light energy into electrical energy for recycling, thus avoiding laser energy waste and improving energy utilization. The reflector 71 is coated with a high-temperature, anti-oxidation coating, which prolongs its service life and adapts to high-power continuous laser environments.

[0068] Example 2:

[0069] See also Figures 1-6 This embodiment provides a method for forming a metal fine-line micro-convex structure with a large aspect ratio, using a metal fine-line micro-convex structure forming device with a large aspect ratio in Example 1, including the following steps:

[0070] S1. Thoroughly clean the surface of the metal substrate 9, cut the weakly magnetic metal foil 10 to the required length, and attach it to the metal substrate 9 to obtain a composite metal workpiece; place the composite metal workpiece on the multi-axis motion processing platform in the forming box 1 and clamp it, and adjust the position of the multi-axis motion processing platform to be directly below the mounting hole;

[0071] S2. Input the required forming style of the fine-line micro-convex structure into the computer controller 6, and set the processing parameters of the fine-line micro-convex structure according to the processing material and the expected surface quality requirements.

[0072] S3. Inert protective gas is introduced into the forming box 1, and the oxygen content is dynamically controlled to be <0.1%. After the oxygen content drops to the set value and stabilizes, the laser processing component 4 is used to perform fine-line micro-convex structure forming processing on the composite metal workpiece treated in S1. The galvanometer 43 scans along the Y axis, so that the metal foil 10 is melted onto the surface of the metal substrate 9 under the scanning of the light beam reflected by the galvanometer 43. During the processing, the distance between the latest formed thin line and the previously formed thin line is monitored in real time by the rangefinder 5, so as to adjust the displacement of the processing platform to adjust the distance between the next thin line and the latest formed thin line in real time.

[0073] S4. Remove the metal workpiece after the fine-line micro-convex structure forming process in S3 from the fixture, peel off the metal foil 9 waste on the surface, and then anneal, demagnetize, chemically deflash the workpiece, rinse with distilled water to completely remove chemical residues, and dry at low temperature.

[0074] S5. The formed metal workpiece after the S4 treatment is inspected by an optical microscope and a scanning electron microscope to see whether the morphology and dimensional accuracy of the fine-line micro-convex structure are qualified. If unqualified, the processing parameters such as laser power, spot spacing and chemical treatment parameters are dynamically optimized according to the measurement data in the inspection during the next workpiece processing.

[0075] In step 1, the multi-axis motion processing platform 2 can move along the three directions of X axis, Y axis and Z axis when it is adjusted to the forming starting position below the mounting hole.

[0076] In step 1, the specific material of the metal foil 10 is determined by the processing material. In this embodiment, the metal substrate 9 is 304 stainless steel, the metal foil 10 is 304 stainless steel, the cutting length is 50mm-100mm, and the thickness is 0.01-0.05mm.

[0077] In step 2, the processing parameters include: laser power of the laser emitter 41, number of beam splitters N, scanning speed of the galvanometer, scanning pitch, scanning length along the Y axis, spot pitch, spot size, and single displacement distance of the processing platform.

[0078] In step 2, the specific process parameters are determined by the processing material and the expected surface quality requirements. In this embodiment, the laser power is 100W-500W, the beam diameter is expanded by 3-5 times, the number of beams split by the beam splitter 42 is 3-6, the scanning speed of the galvanometer 43 is 800mm / s-2000mm / s, the scanning pitch is 10μm-50μm, and the scanning length along the Y axis is 0.1mm-50mm. Combined with the focusing field lens 45, the focus control spot spacing is 1mm-10mm, the spot size is 10μm×10μm-50μm×50μm, and the single displacement distance of the processing platform is 10μm-50μm.

[0079] In step three, pure argon is selected as an inert gas, and the oxygen content is dynamically monitored and controlled by the oxygen content sensor 8 to be less than 0.1%. Processing is not performed until the oxygen content drops to the set value and stabilizes.

[0080] In step three, when performing the fine line micro-convex structure forming process, the galvanometer 43 needs to scan along the Y-axis direction, so the Y-axis and Z-axis coordinates of the multi-axis motion processing platform 2 need to be locked and only displaced along the X-axis coordinate to adjust the spacing between adjacent fine lines.

[0081] In step three, when forming the fine-line micro-convex structure, the number of beams focused by the focusing field lens 45 is less than or equal to N. This means that multiple laser beams can be grouped together and processed simultaneously to improve forming efficiency. The function of the light shield is to adjust the number of light spots used for processing and the spacing between them by shading them according to the needs of the processing technology. The rangefinder only needs to measure the spacing of the fine-line micro-convex structures processed before and after any one of the light spots. Based on this measurement, the position of the processing platform along the X-axis can be adjusted, thereby adjusting the spacing of the fine-line micro-convex structures formed by the two groups of laser beams.

[0082] In step three, the computer controller adjusts the X-axis micro-displacement of the processing platform by ±10μm in real time based on the feedback from the rangefinder to ensure that the error in the fine line spacing is less than 10nm. After the displacement adjustment, the processing and forming of the next fine line micro-convex structure begins.

[0083] In step 4, the annealing temperature is 900-1100°C and the annealing time is 30-60 minutes to eliminate thermal stress; the electrode demagnetization method is used for demagnetization, the AC electromagnetic field frequency is 50Hz, and the intensity is gradually reduced from 0.01T to 0 for 5-10 minutes; the acidic solution uses a citric acid hydrogen peroxide solution with a citric acid mass concentration of 8% and a hydrogen peroxide volume concentration of 5%. The residual acid is neutralized using a 5% sodium carbonate (Na2CO3) solution for immersion for 5 minutes. In some other embodiments, a high-temperature solid solution method can be used for demagnetization. The so-called high-temperature solid solution method is to heat the metal workpiece and then quench it with cold water to eliminate magnetism.

[0084] In step four, chemical deflashing is performed using either acidic or electrolytic methods. Acidic deflashing uses a very low concentration of acidic solution, effectively removing edge slag, burrs, and oxide layers while minimizing corrosion of the formed wire. A very dilute alkaline solution is used to neutralize residual acid. Electrolytic deflashing requires the preparation of specific electrolyte solutions and electrode materials based on the metal workpiece material after the wire forming process. The specific chemical treatment parameters are determined by the material being processed and the desired surface quality requirements.

[0085] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. Reference can be made to the common and similar parts between the various embodiments. For the devices disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple, and the relevant parts can be referred to the method description.

[0086] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A device for forming a metal fine-line micro-convex structure with a large aspect ratio, characterized in that: include: A molding box (1), wherein a mounting hole is provided on the top of the molding box (1) and an air inlet is provided on the side wall; A multi-axis motion processing platform (2), the multi-axis motion processing platform (2) is installed on the inner bottom wall of the molding box (1), and the workpiece to be processed can be loaded on the top of the multi-axis motion processing platform (2); an inert gas source (3), wherein an output end of the inert gas source (3) is connected to the gas inlet; A laser processing assembly (4), the laser processing assembly (4) comprising a laser emitter (41), a beam shaping assembly, a beam splitter (42), a plurality of galvanometer mirrors (43), a plurality of light shielding plates (44) and a focusing field mirror (45), wherein the focusing field mirror (45) is fixed to the mounting hole; the laser beam emitted by the laser emitter (41) passes through the beam shaping assembly, the beam splitter (42), the plurality of galvanometer mirrors (43) and the focusing field mirror (45) in sequence and is incident on the workpiece to be processed in the molding box (1); the plurality of light shielding plates (44) correspond to the plurality of galvanometer mirrors (43) one by one, and each of the light shielding plates (44) is slidably mounted between the galvanometer mirrors (43) and the focusing field mirror (45) along a direction perpendicular to a line connecting the galvanometer mirrors (43) and the focusing field mirror (45) to open or close a beam channel between the galvanometer mirrors (43) and the focusing field mirror (45); A distance meter (5), the distance meter (5) being fixed on the top of the forming box (1), and having a measuring end arranged corresponding to the multi-axis motion processing platform (2) to measure the distance between adjacent two large aspect ratio metal fine linear micro-convex structures formed on the surface of the workpiece to be processed; A computer controller (6) is electrically connected to the inert gas source (3), the laser emitter (41), the galvanometer (43) and the rangefinder (5).

2. The device for forming a metal fine-line micro-convex structure with a large aspect ratio according to claim 1, characterized in that: The inert gas source (3) comprises an inert gas storage tank (31), an air pump (32) and a delivery pipe (33); the gas outlet of the inert gas storage tank (31) is connected to the air pump (32); the air pump (32) is connected to the gas inlet through the delivery pipe (33) and is electrically connected to the computer controller (6).

3. The device for forming a metal fine-line micro-convex structure with a large aspect ratio according to claim 2, characterized in that: An oxygen content sensor (8) is also provided. The oxygen content sensor (8) is installed in the molding box (1) and is electrically connected to the computer controller (6).

4. The device for forming a metal fine-line micro-convex structure with a large aspect ratio according to claim 1, characterized in that: The beam shaping assembly comprises a beam expander (46) and a diffraction shaping element (47) which are sequentially installed between a laser emitter (41) and a beam splitter (42) along a light emitting direction.

5. The device for forming a metal fine-line micro-convex structure with a large aspect ratio according to claim 1, characterized in that: The laser processing assembly (4) also includes a light shielding plate sliding assembly (48), and the light shielding plate sliding assembly (48) includes a support frame (481), a drive motor (482), a lead screw (483) and a slide rail (484), wherein the drive motor (482) is fixed to one side of the support frame (481) and is electrically connected to the computer controller (6); the lead screw (483) is arranged along a direction perpendicular to the connecting line of the galvanometer (43) and the focusing field lens (45) and is rotatably mounted on the support frame (481); the slide rail (484) is arranged parallel to the lead screw (483) and is fixed to the support frame (481); a slider slidably connected to the slide rail (484) is fixed to one side end of the light shielding plate (44), and a threaded hole threadedly connected to the lead screw (483) is provided at the other side end arranged opposite to the light shielding plate (44).

6. A device for forming a metal fine-line micro-convex structure with a large aspect ratio according to any one of claims 1 to 5, characterized in that: A laser recovery device (7) is also provided, comprising a reflector (71) and a laser-specific photovoltaic cell (72). The reflector (71) is fixed on the surface of the light shielding plate (44) to reflect the light beam reflected by the galvanometer (43) to the laser-specific photovoltaic cell (72) for recovery.

7. A method for forming a metal fine line micro-convex structure with a large aspect ratio, using the metal fine line micro-convex structure forming device with a large aspect ratio according to any one of claims 1 to 6, characterized in that: The following steps are involved: S1. Thoroughly clean the surface of the metal substrate (9), cut the weakly magnetic metal foil (10) to the required length, and attach it to the metal substrate (9) to obtain a composite metal workpiece; place the composite metal workpiece on the multi-axis motion processing platform (2) in the forming box (1) and clamp it, and adjust the position of the multi-axis motion processing platform (2) to be directly below the mounting hole; S2. Inputting the required fine-line micro-convex structure forming style into the computer controller (6), and setting the fine-line micro-convex structure forming parameters according to the processing material and the expected surface quality requirements; S3, introducing an inert protective gas into the forming box (1), and performing fine-line micro-convex structure forming processing on the composite metal workpiece processed in S1 using a laser processing assembly (4), and during the processing, monitoring the distance between the latest formed fine line and the previous formed fine line in real time by using a distance meter (5), thereby adjusting the displacement of the processing platform to adjust the distance between the next fine line and the latest formed fine line in real time; S4, removing the composite metal workpiece after the fine-line micro-convex structure is processed in S3 from the fixture, peeling off the metal foil (10) waste on the surface, and then subjecting the workpiece to annealing, demagnetization, chemical deflashing, etc., and then rinsing with distilled water to completely remove chemical residues, and drying at low temperature; S5. The formed metal workpiece that has undergone post-processing in S4 is inspected for the morphology and dimensional accuracy of the fine-line micro-convex structure using an optical microscope and a scanning electron microscope, and processing parameters such as laser power and spot spacing and chemical treatment parameters are dynamically optimized based on the measurement data.

8. The method for forming a metal fine line micro-convex structure with a large aspect ratio according to claim 7, characterized in that: The thickness of the metal foil (10) in step S1 is 0.01 mm to 0.1 mm.

9. The method for forming a metal fine line micro-convex structure with a large aspect ratio according to claim 7, characterized in that: The annealing temperature in step S4 is 900-1100° C. and the annealing time is 30-60 minutes to eliminate thermal stress.

10. The method for forming a metal fine line micro-convex structure with a large aspect ratio according to claim 7, characterized in that: In step S4, the demagnetization method adopts a high-temperature solid solution method or an electrode demagnetization method, and the chemical demagnetization method adopts an acid solution corrosion demagnetization method or an electrolytic demagnetization method.

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