Laser scribing deviation correction method and system

Abstract

The invention relates to the technical field of silicon wafer production in the photovoltaic industry, and discloses a laser scribing deviation rectifying method and system, and the method comprises the steps: obtaining coordinates of two end points of laser scribing and an included angle related to two driving mechanisms; calculating the coordinates of the center point of the target edge according to the coordinates of each vertex angle of the film source; calculating coordinates of an intersection point of the laser scribing line and the target vertical line; calculating a compensation value of the central point in the XY direction according to the coordinates of the central point, the intersection point and the laser scribing endpoint; if the included angle is not 90 degrees, performing included angle compensation on the X compensation value based on the included angle; the difference value of the two included angle compensation values in the X direction serves as the walking distance compensation value of the first driving mechanism, and the difference value of the two Y compensation values serves as the walking distance compensation value of the second driving mechanism. According to the invention, systematic angle deviation can be effectively eliminated, the silicon wafer positioning precision is improved, and the silicon wafer production loss is reduced. According to the invention, the angle deviation is calibrated in a full-automatic manner, real-time dynamic angle error compensation of multiple devices can be realized, and the debugging time is greatly reduced.

Description

Technical Field

[0001] The present application relates to the technical field of silicon wafer production in the photovoltaic industry, and in particular to a laser scribing correction method and system. Background Art

[0002] Existing laser scribing equipment uses a linear motor (X-axis) and a servo motor (Y-axis) to coordinately control the positioning of the silicon wafer. The default installation angle between the two axes is 90°. However, in actual production, due to machining tolerances and assembly errors, the measured range of the installation angle between the two axes is 85°-95°. Deviations in the actual installation angle θ between the two axes can cause systematic angular errors during coordinate system conversion. Traditional solutions rely on manual regular calibration of the motor installation angle. This solution cannot compensate for errors in real time, resulting in accumulated deviations during continuous production, leading to offset of the scribing track and increased silicon wafer crack rates. Summary of the Invention

[0003] The main purpose of this application is to provide a laser scribing correction method and system, aiming to solve the technical problem in the prior art of system deviation in silicon wafer production caused by motor angle deviation.

[0004] A first aspect of the present application provides a laser scribing deviation correction method, the laser scribing deviation correction method comprising:

[0005] Obtaining the position coordinates of the two endpoints of the laser scribe line, and obtaining the angle between the trajectory of the film source driven by the first drive mechanism to move in the X direction and the trajectory of the laser driven by the second drive mechanism to move in the Y direction, wherein the X direction and the Y direction are perpendicular, and the laser scribe line is obtained by the laser scribe on the test sample when the first drive mechanism drives the test sample to move in the X direction past the laser;

[0006] Calculate the position coordinates of the center point of the target edge of the film source based on the position coordinates of each vertex of the film source, wherein the target edge includes the first edge and the second edge of the film source in the X direction, and the center point of the target edge includes the first center point of the first edge and the second center point of the second edge;

[0007] Calculate the position coordinates of the intersection of the laser marking line and the target perpendicular line, where the target perpendicular line is a perpendicular line drawn from the center point of the target edge to the laser marking line;

[0008] Calculating a compensation value for the center point of the target edge in the X and Y directions based on the position coordinates of the center point of the target edge, the position coordinates of the intersection point, and the position coordinates of one of the endpoints of the laser scribe line, wherein the compensation value includes: a first X compensation value of the first center point in the X direction, a first Y compensation value in the Y direction, and a second X compensation value of the second center point in the X direction, and a second Y compensation value in the Y direction;

[0009] If the angle is not 90°, performing angle compensation on the compensation value based on the angle to obtain a first angle compensation value of the first X compensation value after angle compensation and a second angle compensation value of the second X compensation value after angle compensation;

[0010] The difference between the first angle compensation value and the second angle compensation value is used as the travel distance compensation value of the first drive mechanism in the X direction, and the difference between the first Y compensation value and the second Y compensation value is used as the travel distance compensation value of the second drive mechanism in the Y direction.

[0011] As a further example, it also includes:

[0012] If the angle is 90°, the difference between the first X compensation value and the second X compensation value is used as the travel distance compensation value of the first drive mechanism in the X direction, and the difference between the first Y compensation value and the second Y compensation value is used as the travel distance compensation value of the second drive mechanism in the Y direction.

[0013] As a further example, obtaining the angle between the trajectory of the film source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction includes:

[0014] Obtaining a Y-direction scribe line intersecting the laser scribe line, wherein the Y-direction scribe line is obtained by the laser scribe line on the test sample when the second drive mechanism drives the laser to move;

[0015] The angle between the laser scribing line and the Y-direction scribing line is calculated as the angle between the trajectory of the sheet source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction.

[0016] As a further example, performing angle compensation on the compensation value based on the angle to obtain a first angle compensation value of the first X compensation value after angle compensation and a second angle compensation value of the second X compensation value after angle compensation includes:

[0017] Calculate a first compensation value based on the first Y compensation value and the included angle, and use the difference between the first X compensation value and the first compensation value as the first included angle compensation value;

[0018] A second compensation value is calculated based on the second Y compensation value and the included angle, and a difference between the second X compensation value and the second compensation value is used as a second included angle compensation value.

[0019] As a further example, the calculation formulas for the first angle compensation value and the second angle compensation value are respectively shown in the following formulas 1 to 4:

[0020] MJ=ME / (tan(DAngle*π÷180)) Formula 1

[0021] KN=FN / (tan(DAngle*π÷180)) Formula 2

[0022] Delta_X1'=GM-MJ Formula 3

[0023] Delta_X2' = GN-KN Formula 4

[0024] Wherein, MJ is the first compensation value, ME is the first Y compensation value; DAngle is the angle; KN is the second compensation value, FN is the second Y compensation value; Delta_X1' is the first angle compensation value; GM is the first X compensation value; Delta_X2' is the second angle compensation value; GN is the second X compensation value.

[0025] As a further example, obtaining the position coordinates of two endpoints of the laser scribing line includes: fitting the position coordinates of the two endpoints of the laser scribing line by a least squares method; and

[0026] Obtaining the angle between the trajectory of the sheet source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction, including: fitting the position coordinates of the two end points of the Y-direction line by the least square method;

[0027] The angle is calculated based on the position coordinates of the two end points of the laser marking line and the position coordinates of the two end points of the Y-direction marking line.

[0028] As a further example, calculating the position coordinates of the intersection of the laser marking line and the target perpendicular line includes:

[0029] The straight line equation of the laser marking is obtained according to the position coordinates of the two end points of the laser marking;

[0030] Based on the vertical relationship between the target vertical line and the laser marking line, the position coordinates of the center point of the target edge, and the position coordinates of the two end points of the laser marking line, the position coordinates of the intersection of the laser marking line and the target vertical line are calculated.

[0031] As a further example, before calculating the position coordinates of the center point of the target edge of the source according to the position coordinates of each vertex of the source, the method further includes:

[0032] Establishing a conversion relationship between the physical coordinate system and the pixel coordinate system, converting the pixel coordinates of the two endpoints of the laser marking into physical coordinates as the position coordinates of the two endpoints of the laser marking;

[0033] Obtain an edge image of each edge of the source image, perform fitting on the edge image, and obtain pixel coordinates of each vertex of the source image; or obtain a vertex region image of the region where each vertex of the source image is located, perform fitting on the vertex region image, and obtain pixel coordinates of each vertex of the source image;

[0034] Based on the conversion relationship between the physical coordinate system and the pixel coordinate system, the pixel coordinates of the vertex are converted into physical coordinates and used as the position coordinates of the vertex.

[0035] As a further example, if the position coordinates of the vertex and the position coordinates of the two end points of the laser marking are both pixel coordinates, then the compensation value is a compensation value in the pixel coordinate system;

[0036] The method includes: using the difference between the first angle compensation value and the second angle compensation value as the travel distance compensation value of the first drive mechanism in the X direction, and using the difference between the first Y compensation value and the second Y compensation value as the travel distance compensation value of the second drive mechanism in the Y direction.

[0037] Establish the conversion relationship between the physical coordinate system and the pixel coordinate system;

[0038] Convert the compensation value in the pixel coordinate system to the compensation value in the physical coordinate system, or convert the first angle compensation value, the second angle compensation value, the first Y compensation value and the second Y compensation value in the pixel coordinate system to the first angle compensation value, the second angle compensation value, the first Y compensation value and the second Y compensation value in the physical coordinate system,

[0039] The difference between the first angle compensation value and the second angle compensation value in the physical coordinate system is used as the travel distance compensation value of the first drive mechanism in the X direction, and the difference between the first Y compensation value and the second Y compensation value in the physical coordinate system is used as the travel distance compensation value of the second drive mechanism in the Y direction;

[0040] or,

[0041] The walking distance compensation value of the first driving mechanism in the X direction and the walking distance compensation value of the second driving mechanism in the X direction in the pixel coordinate system are converted into the walking distance compensation value of the first driving mechanism in the X direction and the walking distance compensation value of the second driving mechanism in the Y direction in the physical coordinate system.

[0042] The present application also provides a laser scribing and correcting system, which includes: a control module, a first driving mechanism, a second driving mechanism, a laser, and an image sampling device;

[0043] The first driving mechanism is used to drive the detection sample to move in the X direction and pass through the laser so that the laser marks the detection sample to obtain a laser mark;

[0044] The second driving mechanism is used to drive the laser to move so that the laser marks a line on the test sample in the Y direction;

[0045] An image sampling device is used to capture a laser pattern on a detection sample by photographing and transmitting the laser pattern to a control module, wherein the laser pattern includes a laser scribing line, or the laser pattern includes a laser scribing line and a Y-direction scribing line;

[0046] A control module is used to execute any one of the above laser scribing correction methods.

[0047] The third aspect of the present application provides a computer device, comprising: a memory and at least one processor, wherein instructions are stored in the memory; and at least one processor calls the instructions in the memory so that the computer device executes the above-mentioned laser scribing correction method.

[0048] A fourth aspect of the present application provides a computer-readable storage medium, in which instructions are stored. When the computer-readable storage medium is run on a computer, the computer executes the above-mentioned laser scribing correction method.

[0049] This application embeds the angle into the production coordinate transformation matrix through a dynamic compensation algorithm, and corrects the X / Y travel distance in real time, which can effectively eliminate systematic angular deviations and improve the positioning accuracy of silicon wafers. It provides a more efficient and high-precision solution for the commissioning of laser scribing machines, and can effectively reduce the production losses of silicon wafers caused by systematic angular deviations and improve production efficiency. In addition, this application fully automatically calibrates and calibrates angular deviations without manual intervention, and can achieve real-time, dynamic angular error compensation for multiple devices, saving manpower and material resources and significantly reducing commissioning time. Again, this application is applicable to the production of silicon wafers of various sizes, is compatible with equipment with any angle, and has a wide range of applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] Figure 1 This is a flow chart of a first embodiment of the laser scribing correction method in the embodiments of the present application;

[0051] Figure 2 This is a diagram showing the effects of laser scribing and Y-axis scribing in an embodiment of the present application;

[0052] Figure 3 Schematic diagram of the geometric relationship between the laser scribing line and the vertical line in the embodiment of the present application;

[0053] Figure 4 This is a schematic diagram of setting the detection area when fitting a straight line in an embodiment of the present application;

[0054] Figure 5 Schematic diagram of the edge image of the film source in the embodiment of the present application. DETAILED DESCRIPTION

[0055] The terms "first," "second," "third," "fourth," and the like (if any) in the specification and claims of this application and in the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a particular order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate so that the embodiments described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "including" or "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product, or apparatus comprising a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0056] In photovoltaic laser scribing equipment, feed positioning is the core function of the non-destructive scribing machine's vision system. Its accuracy directly affects the accuracy of the scribing start / end points and the quality of the cell cutting. Traditional equipment uses linear motors and servo motors to coordinate positioning control. However, due to machining tolerances and assembly errors, the actual installation angle between the two is not strictly 90°, resulting in systematic angular deviations during coordinate system conversion. This systematic angular deviation will form cumulative errors in continuous production, causing problems such as scribing track deviation and expansion of the heat-affected zone, ultimately leading to an increase in the rate of hidden cracks at the edges of the cell (the measured offset can reach more than ±50μm, and the hidden crack rate increases by 15%-20%).

[0057] Existing technology relies on regular manual calibration of the motor mounting angle, making it impossible to compensate for angle errors in real time. Especially when dealing with the trend toward larger silicon wafers (e.g., 210mm) and thinner wafers (<150μm), mechanical deformation further amplifies angular deviations, rendering traditional positioning systems unable to meet industry precision requirements. Furthermore, the motor mounting angles θ vary between batches of equipment (measured variations range from 0.2° to 1.5°), requiring manual calibration of each device individually (taking ≥2 hours per device). This results in low debugging efficiency, significantly increasing debugging time, and requiring regular calibration.

[0058] Based on this, the present application provides a laser scribing correction method and system.

[0059] refer to Figure 1 In one embodiment of the present application, a laser scribing correction method is provided, and the laser scribing correction method includes:

[0060] S100: Obtain the position coordinates of the two endpoints of the laser marking, and obtain the angle between the trajectory of the first driving mechanism driving the film source to move in the X direction and the trajectory of the second driving mechanism driving the laser to move in the Y direction, wherein the X direction and the Y direction are perpendicular, and the laser marking is obtained by the laser marking on the detection sample when the first driving mechanism drives the detection sample to move in the X direction past the laser.

[0061] Specifically, the first driving mechanism is used to drive the film source to move in the X direction, and the second driving mechanism is used to drive the laser to move in the Y direction.

[0062] Taking the example of a linear motor as the first drive mechanism and a servo motor as the second drive mechanism, the laser scribing equipment controls the positioning of the silicon wafer through the linear motor (X-axis) and the servo motor (Y-axis). Under normal circumstances, the default installation angle between the linear motor and the servo motor is 90°.

[0063] The test sample, for example, is photographic paper. A first drive mechanism (e.g., a linear motor) drives the paper in the X-direction. As the paper passes the laser, laser light emitted by the laser creates a laser mark on the paper. This laser mark is also known as X-direction marking. The image sampling device then photographs the paper, capturing the laser mark on the paper for the computer.

[0064] In one embodiment, the laser scribing is, for example, Figure 2 The laser line GH shown can be used to indicate the motion trajectory of the first driving mechanism.

[0065] During the laser scribing process, the angle between the trajectory of the sheet source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction may be 90° or may not be 90°.

[0066] Among them, the chip source is silicon wafer or battery cell.

[0067] S200: Calculate the position coordinates of the center point of the target edge of the film source based on the position coordinates of each vertex of the film source, where the target edge includes the first edge and the second edge of the film source in the X direction, and the center point of the target edge includes the first center point of the first edge and the second center point of the second edge.

[0068] Specifically, the film source contains 4 edges, and the position coordinates of the four vertex corners of the film source are obtained. For example, the four vertex corners are A(xa,ya), B(xb,yb), C(xc,yc), and D(xd,yd). The target edge includes the first edge AD and the second edge BC of the film source in the X direction, and the center points are the first center point E of the first edge AD and the second center point F of the second edge BC.

[0069] The position coordinates of the first center point E are (x2, y2), and the position coordinates of the second center point F are (x3, y3), where x2=xa or x2=xd; y2=(ya+yd) / 2; x3=xb or x3=xc; y3=(yb+yc) / 2.

[0070] S300: Calculate the position coordinates of the intersection of the laser marking line and the target perpendicular line, wherein the target perpendicular line is a perpendicular line drawn from the center point of the target edge to the laser marking line.

[0071] Specifically, Figure 3 Schematic diagram of the geometric relationship between the laser marking line and the perpendicular line in the embodiment of the present application; the four vertex angles of the source are A, B, C and D, the two center points are the first center point E and the second center point F, a first perpendicular line EM is made from the first center point E to the laser marking line GH, and M is the intersection of the laser marking line GH and the first perpendicular line EM; a second perpendicular line FN is made from the second center point F to the laser marking line GH, and N is the intersection of the laser marking line GH and the second perpendicular line FN.

[0072] The position coordinates of the first intersection point M can be calculated based on the position coordinates of the two end points G and H of the laser scribe line GH and the position coordinates of the first center point E.

[0073] The position coordinates of the second intersection point N can be calculated based on the position coordinates of the two end points G and H of the laser scribe line GH and the position coordinates of the second center point F.

[0074] S400: Calculating a compensation value for the center point of the target edge in the X and Y directions based on the position coordinates of the center point of the target edge, the position coordinates of the intersection point, and the position coordinates of one of the endpoints of the laser marking line, wherein the compensation value includes: a first X compensation value of the first center point in the X direction, a first Y compensation value in the Y direction, and a second X compensation value of the second center point in the X direction, and a second Y compensation value in the Y direction.

[0075] Specifically, the position coordinates of a first intersection point M between the laser scribe line GH and a first perpendicular line EM are calculated, where the first perpendicular line EM is a line perpendicular to the laser scribe line GH through the first center point E, and the first center point E is the center point of a first side AD in the film source that is perpendicular to the conveying direction. Based on the position coordinates of the first center point E, the position coordinates of the first intersection point M, and the position coordinates of the first endpoint G of the laser scribe line GH, a first X compensation value GM in the X direction and a first Y compensation value ME in the Y direction of the first center point E are calculated;

[0076] as well as,

[0077] The position coordinates of a second intersection point N of the laser scribed line GH and a second perpendicular line FN are calculated, where the second perpendicular line FN is a perpendicular line drawn through the second center point F to the laser scribed line GH, and the second center point F is the center point of the second side BC in the film source. Based on the position coordinates of the second center point F, the position coordinates of the second intersection point N, and the position coordinates of the first endpoint G of the laser scribed line GH, a second X compensation value GN in the X direction and a second Y compensation value FN in the Y direction of the second center point F are calculated.

[0078] In a specific embodiment,

[0079] The first X compensation value and the first Y compensation value of the first center point E in the XY direction are Delta_X1 and Delta_Y1 respectively:

[0080]

[0081] Among them, (x1, y1) are the coordinates of the first endpoint G, (x2, y2) are the coordinates of the first center point E, and (x4, y4) are the coordinates of the first intersection point M.

[0082] The second X compensation value and the second Y compensation value of the second center point F in the XY direction are Delta_X2 and Delta_Y2 respectively:

[0083]

[0084] Among them, (x1, y1) are the coordinates of the first endpoint G, (x3, y3) are the coordinates of the second center point F, and (x5, y5) are the coordinates of the second intersection point N.

[0085] S500: If the angle is not 90°, perform angle compensation on the compensation value based on the angle to obtain a first angle compensation value of the first X compensation value after angle compensation and a second angle compensation value of the second X compensation value after angle compensation.

[0086] Specifically, if the angle between the trajectory of the film source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction is greater than 90° or less than 90°, the first X compensation value and the second X compensation value can be compensated for the angle based on the angle to achieve further compensation.

[0087] S600: Using the difference between the first angle compensation value and the second angle compensation value as the travel distance compensation value of the first driving mechanism in the X direction, and using the difference between the first Y compensation value and the second Y compensation value as the travel distance compensation value of the second driving mechanism in the Y direction.

[0088] Specifically, if the angle between the trajectory of the film source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction is greater than 90° or less than 90°, the difference between the first X angle compensation value and the second angle compensation value after angle compensation is used as the travel distance compensation value of the first driving mechanism in the X direction, and the difference between the first Y compensation value and the second Y compensation value is used as the travel distance compensation value of the second driving mechanism in the Y direction.

[0089] This embodiment embeds the angle into the production coordinate transformation matrix through a dynamic compensation algorithm, and corrects the X / Y travel distance in real time, which can effectively eliminate systematic angular deviations and improve the positioning accuracy of silicon wafers. It provides a more efficient and high-precision solution for the commissioning of laser scribing machines, and can effectively reduce silicon wafer production losses caused by systematic angular deviations and improve production efficiency. In addition, this embodiment fully automatically calibrates and calibrates angle deviations without manual intervention, and can achieve real-time dynamic angle error compensation for multiple devices, saving manpower and material resources and significantly reducing commissioning time. Again, this embodiment is applicable to the production of silicon wafers of various sizes, is compatible with equipment with any angle, and has a wide range of applications.

[0090] In one embodiment, it further includes:

[0091] If the angle is 90°, the difference between the first X compensation value and the second X compensation value is used as the travel distance compensation value of the first drive mechanism in the X direction, and the difference between the first Y compensation value and the second Y compensation value is used as the travel distance compensation value of the second drive mechanism in the Y direction.

[0092] Specifically, if the angle between the trajectory of the film source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction is 90°, the difference between the first X compensation value and the second X compensation value is used as the travel distance compensation value of the first driving mechanism in the X direction, and the difference between the first Y compensation value and the second Y compensation value is used as the travel distance compensation value of the second driving mechanism in the Y direction.

[0093] This embodiment can still accurately compensate for the travel distance of the driving mechanism during laser scribing when there is no angle deviation, so as to eliminate other system errors except the system angle error, improve the positioning accuracy of the silicon wafer, reduce the production loss of the silicon wafer, and improve the production efficiency of the silicon wafer.

[0094] In one embodiment, obtaining the angle between the trajectory of the film source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction includes:

[0095] Obtaining a Y-direction scribe line intersecting the laser scribe line, wherein the Y-direction scribe line is obtained by the laser scribe line on the test sample when the second drive mechanism drives the laser to move;

[0096] The angle between the laser scribing line and the Y-direction scribing line is calculated as the angle between the trajectory of the sheet source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction.

[0097] Specifically, refer to Figure 3 , laser scribing GH and Figure 3 The dashed longitudinal lines (Y-direction lines) in the middle intersect.

[0098] The test sample, for example, is photographic paper. A second drive mechanism (e.g., a servo motor) drives the laser in the Y direction, causing the laser light to scribe a line on the paper. This Y-direction scribe is a laser scribe in the Y direction. The image sampling device can then capture the Y-direction scribe on the paper for the computer.

[0099] In one embodiment, the laser scribing is, for example, Figure 2 The laser line GH shown in FIG. 1 can be used to indicate the motion trajectory of the first drive mechanism. The Y-axis line is Figure 2 The laser marking line OP shown, the Y-direction marking line can be used to indicate the motion trajectory of the second driving mechanism, and the laser marking line GH and the Y-direction marking line OP constitute a laser pattern.

[0100] The laser marking line and the Y-direction marking line represent the motion trajectories of the first drive mechanism and the second drive mechanism respectively. Therefore, the angle θ between the laser marking line and the Y-direction marking line is the actual installation angle between the first drive mechanism and the second drive mechanism. Figure 2 shown.

[0101] This embodiment can accurately and quickly obtain the laser marking and Y-axis marking that can indicate the motion trajectory of the drive mechanism, and quickly and accurately calculate the actual installation angle between the two drive mechanisms based on the geometric relationship.

[0102] In one embodiment, performing angle compensation on the compensation value based on the angle to obtain a first angle compensation value of the first X compensation value after angle compensation and a second angle compensation value of the second X compensation value after angle compensation includes:

[0103] Calculate a first compensation value based on the first Y compensation value and the included angle, and use the difference between the first X compensation value and the first compensation value as the first included angle compensation value;

[0104] A second compensation value is calculated based on the second Y compensation value and the included angle, and a difference between the second X compensation value and the second compensation value is used as a second included angle compensation value.

[0105] Specifically, if Figure 3 As shown, the angle between the laser marking line GH and the Y-direction marking line (dashed line) is ∠EJM=∠FKN=θ=DAngle. In this embodiment, the Y-direction compensation value remains unchanged, and an angle compensation value needs to be introduced in the X-direction.

[0106] A first compensation value is calculated based on a first Y compensation value of the first center point E in the Y direction and an angle θ between a trajectory of the film source driven by the first driving mechanism to move in the X direction and a trajectory of the laser driven by the second driving mechanism to move in the Y direction. An angle compensation is performed on the first X compensation value of the first center point E in the X direction using the first compensation value to obtain a first angle compensation value of the first center point E in the X direction after the angle compensation.

[0107] The first Y compensation value of the first center point E in the Y direction remains unchanged.

[0108] A second compensation value is calculated based on the second Y compensation value of the second center point F in the Y direction and the angle θ between the trajectory of the film source driven by the first drive mechanism in the X direction and the trajectory of the laser driven by the second drive mechanism in the Y direction. The second compensation value is used to perform angle compensation on the second X compensation value of the second center point F in the X direction, thereby obtaining a second angle compensation value of the second center point F in the X direction after angle compensation.

[0109] The second Y compensation value of the second center point F in the Y direction remains unchanged.

[0110] In this embodiment, the angle compensation value in the X direction can be quickly and accurately calculated using the Y compensation value and the included angle, and accurate angle compensation can be performed in the X direction to reduce or eliminate the system angle deviation.

[0111] In one embodiment, the calculation formulas for the first angle compensation value and the second angle compensation value are respectively shown in the following formulas 1 to 4:

[0112] MJ=ME / (tan(DAngle*π÷180)) Formula 1

[0113] KN=FN / (tan(DAngle*π÷180)) Formula 2

[0114] Delta_X1' = GM-MJ Formula 3

[0115] Delta_X2' = GN-KN Formula 4

[0116] Wherein, MJ is the first compensation value, ME is the first Y compensation value; DAngle is the angle; KN is the second compensation value, FN is the second Y compensation value; Delta_X1' is the first angle compensation value; GM is the first X compensation value; Delta_X2' is the second angle compensation value; GN is the second X compensation value.

[0117] Specifically, in this embodiment, when the included angle is not 90°, the compensation in the Y direction remains unchanged, and the X direction needs to be compensated again, that is, the included angle compensation is introduced.

[0118] After angle compensation, the final compensation values are:

[0119] Delta_X1'=Delta_X1-JM=GM-JM

[0120] Delta_Y1'=Delta_Y1=ME;

[0121] Delta_X2'=Delta_X2-KN=GN-KN;

[0122] Delta_Y2'=Delta_Y2=FN;

[0123] Delta_X1, ie, GM, is the first X compensation value of the first center point E in the X direction, and Delta_X2, ie, GN, is the second X compensation value of the second center point F in the X direction.

[0124] The first Y compensation value and the second Y compensation value in the Y direction remain unchanged before and after the angle compensation.

[0125] Delta_Y1' is equal to Delta_Y1, which is the first Y compensation value of the first center point E in the Y direction before and after angle compensation.

[0126] Delta_Y2' is equal to Delta_Y2 and is the second Y compensation value of the second center point F in the Y direction before and after angle compensation.

[0127] In this embodiment, the angle compensation value in the X direction can be quickly and accurately calculated using the Y compensation value and the included angle, thereby performing accurate angle compensation in the X direction.

[0128] In one embodiment, obtaining the position coordinates of the two end points of the laser scribing line in step S100 includes: fitting the position coordinates of the two end points of the laser scribing line by the least square method; and

[0129] In step S100, the angle between the trajectory of the sheet source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction is obtained, including: fitting the position coordinates of the two end points of the Y-direction line by the least square method;

[0130] The angle is calculated based on the position coordinates of the two end points of the laser marking line and the position coordinates of the two end points of the Y-direction marking line.

[0131] Specifically, if Figure 2 As shown, the laser creates two intersecting white lines on the photographic paper. The horizontal and vertical detection areas of the laser pattern are fitted separately. The least squares method is used to fit the coordinates of the two endpoints G and H of the laser-marked line GH, thereby obtaining the equation of the laser-marked line. The same method is used to fit the coordinates of the two endpoints O and P of the Y-direction line OP, thereby obtaining the equation of the Y-direction line.

[0132] Among them, the horizontal detection area is as follows Figure 4 The vertical detection area includes the area between the two endpoints O and P.

[0133] The slopes of the two straight line equations obtained are k1 and k2 respectively.

[0134] The equation of the straight line drawn by laser is: y = k1x + b1

[0135] The equation of the straight line drawn in the Y direction is: y=k2x+b2

[0136]

[0137] Therefore, the angle θ between the laser marking and the Y-direction marking is:

[0138]

[0139] The core of the least squares method is to minimize the sum of squared errors By taking partial derivatives of parameters k and b and setting the derivatives to 0, the optimal parameters k and b can be obtained.

[0140] In addition, the least square method of this embodiment may adopt a weighted least square method (Huber loss function).

[0141] The weighted least squares method (Huber loss function) is used to fit the angle θ, which can suppress 15% of abnormal data interference (such as mechanical vibration and reflective noise). Compared with the traditional least squares method (OLS), the fitting standard deviation is reduced from 0.02° to 0.005°, and the stability is improved by 4 times.

[0142] This embodiment uses the least squares method with strong anti-interference ability to fit the coordinates of the two end points of the laser marking line and the Y-direction marking line respectively. According to the geometric relationship of the data, the actual angle between the two drive mechanisms can be quickly and accurately calculated, reducing the error of the angle calculation.

[0143] In addition, this embodiment uses a straight line search algorithm to establish a kinematic model in a non-orthogonal coordinate system, and fits the actual angle through the least squares method. The fitting accuracy of the actual angle θ is ±0.005°. Then, based on the dynamic compensation algorithm, the positioning error caused by mechanical installation deviation in the traditional solution is reduced from ±50μm to ±3μm (actual measured data, full stroke of 210mm silicon wafer), which can eliminate systematic errors in the laser scribing process.

[0144] In one embodiment, calculating the position coordinates of the intersection of the laser marking line and the target perpendicular line in step S300 includes:

[0145] The straight line equation of the laser marking is obtained according to the position coordinates of the two end points of the laser marking;

[0146] Based on the vertical relationship between the target vertical line and the laser marking line, the position coordinates of the center point of the target edge, and the position coordinates of the two end points of the laser marking line, the position coordinates of the intersection of the laser marking line and the target vertical line are calculated.

[0147] Specifically, the straight line equation of the laser scribing line GH is: y = k1 (x-x1) + y1

[0148] That is, the slope k1 of the straight line equation of the laser scribing GH is:

[0149]

[0150] Among them, the coordinates of G are (x1, y1) and the coordinates of H are (x0, y0).

[0151] The coordinates of the center points E and F are calculated and compensated and can be sent to the host computer.

[0152] Draw a perpendicular line EM to GH with the center point E(x2,y2). The slope of the perpendicular line EM is

[0153] The equation of the perpendicular line EM is: y = k3 (x-x2) + y2

[0154] Given the equations of the lines GH and EM, we can find the coordinates of the first intersection point M (x4, y4)

[0155]

[0156] y4=k3(x4-x2)+y2

[0157] Draw a perpendicular line FN to GH with the center point F(x3,y3). The slope of the perpendicular line FN is

[0158] The equation of the perpendicular line FN is: y = k4 (x-x3) + y3

[0159] Knowing the equations of the lines GH and FN, we can find the coordinates of the second intersection point N (x5, y5)

[0160]

[0161] y5=k4(x5-x3)+y3

[0162] This embodiment can quickly and accurately calculate the position coordinates of the intersection point based on the perpendicular relationship between the vertical line and the laser marking line and the known coordinates of the center point and the endpoint coordinates of the laser marking line.

[0163] In one embodiment, before step S200 of calculating the position coordinates of the center point of the target edge of the image source according to the position coordinates of each vertex of the image source, the method further includes:

[0164] Establishing a conversion relationship between the physical coordinate system and the pixel coordinate system, converting the pixel coordinates of the two endpoints of the laser marking into physical coordinates as the position coordinates of the two endpoints of the laser marking;

[0165] Obtain an edge image of each edge of the source image, perform fitting on the edge image, and obtain pixel coordinates of each vertex of the source image; or obtain a vertex region image of the region where each vertex of the source image is located, perform fitting on the vertex region image, and obtain pixel coordinates of each vertex of the source image;

[0166] Based on the conversion relationship between the physical coordinate system and the pixel coordinate system, the pixel coordinates of the vertex are converted into physical coordinates and used as the position coordinates of the vertex.

[0167] Specifically, searching for matching film sources in the entire field of view will be extremely time-consuming and will not improve the CT requirements of the equipment at all. Lowering the camera resolution will reduce the camera's accuracy and ultimately affect the equipment's slicing accuracy.

[0168] Based on this, this embodiment uses the following method to obtain the position coordinates of each vertex of the image source:

[0169] Get the edge images of the four sides of the silicon wafer or get the images of the areas where the four corners of the silicon wafer are located, and fit and calculate the position coordinates of the four corners of the silicon wafer. Figure 5 The source contains 4 edges, and each red box is the edge image of one edge. The intersection of every two red boxes can select the top corner area image.

[0170] By fitting the edge image or the vertex region image, the pixel coordinates of each vertex can be obtained.

[0171] In addition, the pixel coordinates of the vertex corner may be used as the position coordinates of the vertex corner, or the pixel coordinates of the vertex corner may be converted into physical coordinates and used as the position coordinates of the vertex corner.

[0172] Depend on Figure 5 It can be seen that the preset four-sided capture area (red ROI) combined with the local image processing algorithm can reduce the time required for film source positioning from 0.3 seconds for full-field search to less than 0.1 seconds while maintaining an accuracy of 47μm / pixel.

[0173] This embodiment captures the edge image or the vertex area image of the film source and then uses the least squares method to quickly obtain the coordinates of the vertex of the film source. This achieves the purpose of compressing CT time, reducing time consumption, and improving the CT requirements of the equipment without reducing camera accuracy.

[0174] In one embodiment, if the position coordinates of the vertex and the position coordinates of the two end points of the laser scribe are both pixel coordinates, the compensation value is a compensation value in the pixel coordinate system;

[0175] In step S600, the difference between the first angle compensation value and the second angle compensation value is used as the travel distance compensation value of the first drive mechanism in the X direction, and the difference between the first Y compensation value and the second Y compensation value is used as the travel distance compensation value of the second drive mechanism in the Y direction, including:

[0176] Establish the conversion relationship between the physical coordinate system and the pixel coordinate system;

[0177] Convert the compensation value in the pixel coordinate system to the compensation value in the physical coordinate system, or convert the first angle compensation value, the second angle compensation value, the first Y compensation value and the second Y compensation value in the pixel coordinate system to the first angle compensation value, the second angle compensation value, the first Y compensation value and the second Y compensation value in the physical coordinate system,

[0178] The difference between the first angle compensation value and the second angle compensation value in the physical coordinate system is used as the travel distance compensation value of the first drive mechanism in the X direction, and the difference between the first Y compensation value and the second Y compensation value in the physical coordinate system is used as the travel distance compensation value of the second drive mechanism in the Y direction;

[0179] or,

[0180] The walking distance compensation value of the first driving mechanism in the X direction and the walking distance compensation value of the second driving mechanism in the X direction in the pixel coordinate system are converted into the walking distance compensation value of the first driving mechanism in the X direction and the walking distance compensation value of the second driving mechanism in the Y direction in the physical coordinate system.

[0181] Specifically, if the position coordinates in the above steps are physical coordinates, the walking distance compensation value of the first driving mechanism in the X direction and the walking distance compensation value of the second driving mechanism in the Y direction in step S600 are both walking distance compensation values in the physical coordinate system.

[0182] If the position coordinates in the above steps are pixel coordinates, a conversion from the pixel coordinate system to the physical coordinate system is required.

[0183] In this application, each pixel coordinate can be converted into a physical coordinate based on the conversion relationship between the physical coordinate system and the pixel coordinate system, and then the compensation value is calculated. In this way, the compensation value and the walking distance compensation value obtained are both values under the physical coordinate system.

[0184] Alternatively, a compensation value in the pixel coordinate system may be first calculated using pixel coordinates, and then angle compensation may be performed on the first X compensation value and the second X compensation value in the pixel coordinate system based on the angle to obtain the first angle compensation value and the second angle compensation value in the pixel coordinate system. Based on a conversion relationship between the physical coordinate system and the pixel coordinate system, the first angle compensation value, the second angle compensation value, the first Y compensation value, and the second Y compensation value in the pixel coordinate system may be converted into the first angle compensation value, the second angle compensation value, the first Y compensation value, and the second Y compensation value in the physical coordinate system. The difference between the first angle compensation value and the second angle compensation value in the physical coordinate system may be used as the travel distance compensation value of the first driving mechanism in the X direction in the physical coordinate system, and the difference between the first Y compensation value and the second Y compensation value in the physical coordinate system may be used as the travel distance compensation value of the second driving mechanism in the Y direction in the physical coordinate system.

[0185] Alternatively, a compensation value in the pixel coordinate system may be first calculated using the pixel coordinates. Then, based on the conversion relationship between the physical coordinate system and the pixel coordinate system, the compensation value in the pixel coordinate system may be converted into a compensation value in the physical coordinate system. Then, based on the included angle, angle compensation may be performed on the first X compensation value and the second X compensation value in the physical coordinate system to obtain a first included angle compensation value and a second included angle compensation value in the physical coordinate system. A travel distance compensation value of the first driving mechanism in the X direction in the physical coordinate system may be obtained based on the difference between the first and second included angle compensation values in the physical coordinate system. A travel distance compensation value of the second driving mechanism in the Y direction in the physical coordinate system may be obtained based on the first and second Y compensation values in the physical coordinate system.

[0186] Alternatively, the compensation value in the pixel coordinate system can be calculated using the pixel coordinates first, and the walking distance compensation value in the pixel coordinate system can be calculated based on the compensation value in the pixel coordinate system. Then, based on the conversion relationship between the physical coordinate system and the pixel coordinate system, the walking distance compensation value in the pixel coordinate system can be converted into the walking distance compensation value in the physical coordinate system.

[0187] The present application is not limited to when to perform the conversion from the pixel coordinate system to the physical coordinate system, which provides convenience and flexibility for laser scribing correction.

[0188] In one embodiment, the present application further provides a laser scribing and correction system, the laser scribing and correction system comprising: a control module, a first drive mechanism, a second drive mechanism, a laser, and an image sampling device;

[0189] The first driving mechanism is used to drive the detection sample to move in the X direction;

[0190] The second driving mechanism is used to drive the laser to move in the Y direction;

[0191] The laser is used to mark the test sample when the first driving mechanism drives the test sample to move in the X direction to obtain a laser mark line, and the laser mark line is used as the trajectory of the film source driven by the first driving mechanism to move in the X direction;

[0192] The image sampling device is used to capture the laser markings on the test sample and obtain the trajectory of the laser driven by the second driving mechanism to move in the Y direction, and transmit the results to the control module;

[0193] A control module is used to execute any one of the above laser scribing correction methods.

[0194] In a specific embodiment, the laser is further used to scribe the inspection sample when it is driven by the second driving mechanism to move in the Y direction to obtain Y-direction scribe lines.

[0195] The trajectory of the laser driven by the second driving mechanism to move in the Y direction obtained by the image sampling device is the Y-direction scribing line.

[0196] In a specific embodiment, the first driving mechanism is a linear motor, the second driving mechanism is a servo motor, and the test sample is a photographic paper. The servo motor returns to zero and performs scribing calibration. The horizontal and vertical scribing lines are formed on the photographic paper. Figure 2 The servo motor zero return refers to resetting the position of the servo motor to its initial reference point to ensure the accuracy and stability of the system.

[0197] Of course, this application does not limit the first driving mechanism, the second driving mechanism and the detection sample.

[0198] The specific functions of the control module are described in the above-mentioned laser scribing correction method and will not be repeated here.

[0199] In a specific embodiment, the image sampling device is, for example, a feed positioning camera. The feed positioning camera takes a picture of the photo paper to obtain a laser pattern including two intersecting laser lines and a Y-axis line. The laser pattern can be used to indicate the motion trajectory of the motor.

[0200] In one embodiment, the control module is also used to calibrate the feed positioning camera using a calibration plate, generate a calibration plate coordinate system after completing distortion calibration and image position coordinate calibration, and obtain the conversion relationship between the physical coordinate system and the pixel coordinate system.

[0201] During laser scribing, the first drive mechanism moves the source in the X direction, while the second drive mechanism drives the laser in the Y direction to scribing the source. The angle between the trajectory of the source in the X direction driven by the first drive mechanism and the trajectory of the laser in the Y direction driven by the second drive mechanism has a significant impact on the final scribing accuracy.

[0202] This application significantly improves the positioning accuracy and production efficiency of laser scribing equipment through the innovative integration of automatic calibration algorithms, dynamic error compensation, and efficient visual positioning strategies. The specific technical effects are as follows:

[0203] Systematic errors are eliminated, and positioning accuracy is significantly improved:

[0204] Based on the kinematic model of the non-orthogonal coordinate system (angle θ fitting accuracy of ±0.005°) and the dynamic compensation algorithm, the positioning error caused by mechanical installation deviation in the traditional solution is reduced from ±50μm to ±3μm (actual measured data, full stroke of 210mm silicon wafer).

[0205] Debugging time is greatly shortened and production efficiency is optimized:

[0206] The automatic calibration system reduces the equipment debugging time from 2 hours of manual calibration to 5 minutes, and is compatible with devices with any angle of θ=85°-95°, eliminating the need for manual intervention on a device-by-device basis.

[0207] Among them, the automatic calibration system can be implemented using chessboard calibration or nine-point calibration combined with photo paper scratch calibration.

[0208] CT time compression:

[0209] The preset four-sided capture area (red ROI) combined with the local image processing algorithm reduces the time required to locate the film source from 0.3 seconds for full-field search to less than 0.1 seconds while maintaining an accuracy of 47μm / pixel.

[0210] Enhanced anti-interference capabilities and improved robustness of technical solutions:

[0211] Using weighted least squares (such as the Huber loss function) to fit the angle θ can suppress 15% of abnormal data interference (such as mechanical vibration and reflective noise). Compared with the traditional least squares (OLS) method, the fitting standard deviation is reduced from 0.02° to 0.005°, and the stability is improved by 4 times.

[0212] The present application also provides a computer device, which includes a memory and a processor. The memory stores computer-readable instructions. When the computer-readable instructions are executed by the processor, the processor executes the steps of the laser scribing correction method in the above-mentioned embodiments.

[0213] The present application also provides a computer-readable storage medium, which can be a non-volatile computer-readable storage medium or a volatile computer-readable storage medium. The computer-readable storage medium stores instructions, which, when executed on a computer, cause the computer to execute the steps of the laser scribing correction method.

[0214] Those skilled in the art will clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0215] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application is essentially or the part that contributes to the prior art or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including a number of instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0216] As described above, the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A laser scribing correction method, characterized in that: The laser scribing correction method comprises: Obtaining the position coordinates of the two endpoints of the laser scribe line, and obtaining the angle between the trajectory of the film source driven by the first drive mechanism to move in the X direction and the trajectory of the laser driven by the second drive mechanism to move in the Y direction, wherein the X direction and the Y direction are perpendicular, and the laser scribe line is obtained by the laser scribe on the test sample when the first drive mechanism drives the test sample to move in the X direction past the laser; Calculate the position coordinates of the center point of the target edge of the film source according to the position coordinates of each vertex of the film source, wherein the target edge includes the first edge and the second edge of the film source in the X direction, and the center point of the target edge includes the first center point of the first edge and the second center point of the second edge; Calculating the position coordinates of the intersection of the laser marking line and a target perpendicular line, wherein the target perpendicular line is a perpendicular line drawn through the center point of the target edge to the laser marking line; Calculating a compensation value of the center point of the target edge in an XY direction based on the position coordinates of the center point of the target edge, the position coordinates of the intersection point, and the position coordinates of one of the endpoints of the laser scribe line, wherein the compensation value includes: a first X compensation value of the first center point in the X direction, a first Y compensation value in the Y direction, and a second X compensation value of the second center point in the X direction, and a second Y compensation value in the Y direction; If the angle is not 90°, performing angle compensation on the compensation value based on the angle to obtain a first angle compensation value of the first X compensation value after angle compensation and a second angle compensation value of the second X compensation value after angle compensation; The difference between the first angle compensation value and the second angle compensation value is used as the travel distance compensation value of the first drive mechanism in the X direction, and the difference between the first Y compensation value and the second Y compensation value is used as the travel distance compensation value of the second drive mechanism in the Y direction.

2. The laser scribing correction method according to claim 1, characterized in that: Also includes: If the angle is 90°, the difference between the first X compensation value and the second X compensation value is used as the travel distance compensation value of the first drive mechanism in the X direction, and the difference between the first Y compensation value and the second Y compensation value is used as the travel distance compensation value of the second drive mechanism in the Y direction.

3. The laser scribing deviation correction method according to claim 1 or 2, characterized in that: The obtaining of the angle between the trajectory of the sheet source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction includes: Acquire a Y-direction scribe line intersecting the laser scribe line, wherein the Y-direction scribe line is obtained by the laser scribe line on the test sample when the second driving mechanism drives the laser to move; The angle between the laser scribing line and the Y-direction scribing line is calculated as the angle between the trajectory of the sheet source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction.

4. The laser scribing correction method according to claim 1 or 2, characterized in that: Performing angle compensation on the compensation value based on the angle to obtain a first angle compensation value of the first X compensation value after angle compensation and a second angle compensation value of the second X compensation value after angle compensation includes: Calculate a first compensation value based on the first Y compensation value and the included angle, and use the difference between the first X compensation value and the first compensation value as the first included angle compensation value; A second compensation value is calculated based on the second Y compensation value and the included angle, and a difference between the second X compensation value and the second compensation value is used as a second included angle compensation value.

5. The laser scribing deviation correction method according to claim 4, characterized in that: The calculation formulas for the first angle compensation value and the second angle compensation value are shown in the following formulas 1 to 4 respectively: MJ=ME / (tan(DAngle*π÷180)) Formula 1 KN=FN / (tan(DAngle*π÷180)) Formula 2 Delta_X1' = GM-MJ Formula 3 Delta_X2' = GN-KN Formula 4 Wherein, MJ is the first compensation value, ME is the first Y compensation value; DAngle is the angle; KN is the second compensation value, FN is the second Y compensation value; Delta_X1' is the first angle compensation value; GM is the first X compensation value; Delta_X2' is the second angle compensation value; GN is the second X compensation value.

6. The laser scribing deviation correction method according to claim 3, wherein: The obtaining of the position coordinates of the two endpoints of the laser scribing line comprises: fitting the position coordinates of the two endpoints of the laser scribing line by a least square method; and The obtaining of the angle between the trajectory of the sheet source driven by the first driving mechanism to move in the X direction and the trajectory of the laser driven by the second driving mechanism to move in the Y direction comprises: fitting the position coordinates of the two endpoints of the Y-direction scribing line by the least square method; The angle is calculated based on the position coordinates of the two end points of the laser scribing line and the position coordinates of the two end points of the Y-direction scribing line.

7. The laser scribing deviation correction method according to claim 1 or 2, characterized in that: Calculating the position coordinates of the intersection of the laser marking line and the target perpendicular line includes: Obtaining a straight line equation of the laser-scribed line according to the position coordinates of the two end points of the laser-scribed line; The position coordinates of the intersection of the laser scribe line and the target vertical line are calculated based on the perpendicular relationship between the target vertical line and the laser scribe line, the position coordinates of the center point of the target edge, and the position coordinates of the two end points of the laser scribe line.

8. The laser scribing deviation correction method according to claim 1 or 2, characterized in that: Before calculating the position coordinates of the center point of the target edge of the source according to the position coordinates of each vertex of the source, the method further includes: Establishing a conversion relationship between the physical coordinate system and the pixel coordinate system, converting the pixel coordinates of the two endpoints of the laser marking into physical coordinates as the position coordinates of the two endpoints of the laser marking; Obtaining an edge image of each edge of the film source, fitting the edge image, and obtaining pixel coordinates of each vertex corner of the film source; or obtaining a vertex region image of the region where each vertex corner of the film source is located, fitting the vertex region image, and obtaining pixel coordinates of each vertex corner of the film source; Based on the conversion relationship between the physical coordinate system and the pixel coordinate system, the pixel coordinates of the vertex are converted into physical coordinates and used as the position coordinates of the vertex.

9. The laser scribing deviation correction method according to claim 1 or 2, characterized in that: If the position coordinates of the vertex and the position coordinates of the two end points of the laser marking are both pixel coordinates, then the compensation value is a compensation value in the pixel coordinate system; The method of using the difference between the first angle compensation value and the second angle compensation value as the travel distance compensation value of the first driving mechanism in the X direction, and using the difference between the first Y compensation value and the second Y compensation value as the travel distance compensation value of the second driving mechanism in the Y direction, includes: Establish the conversion relationship between the physical coordinate system and the pixel coordinate system; Convert the compensation value in the pixel coordinate system to the compensation value in the physical coordinate system, or convert the first angle compensation value, the second angle compensation value, the first Y compensation value and the second Y compensation value in the pixel coordinate system to the first angle compensation value, the second angle compensation value, the first Y compensation value and the second Y compensation value in the physical coordinate system, The difference between the first angle compensation value and the second angle compensation value in the physical coordinate system is used as the travel distance compensation value of the first drive mechanism in the X direction, and the difference between the first Y compensation value and the second Y compensation value in the physical coordinate system is used as the travel distance compensation value of the second drive mechanism in the Y direction; or, The walking distance compensation value of the first driving mechanism in the X direction and the walking distance compensation value of the second driving mechanism in the X direction in the pixel coordinate system are converted into the walking distance compensation value of the first driving mechanism in the X direction and the walking distance compensation value of the second driving mechanism in the Y direction in the physical coordinate system.

10. A laser scribing correction system, characterized in that: The laser scribing and correction system includes: a control module, a first drive mechanism, a second drive mechanism, a laser, and an image sampling device; The first driving mechanism is used to drive the detection sample to move in the X direction; The second driving mechanism is used to drive the laser to move in the Y direction; The laser is used to mark the test sample to obtain laser markings when the first driving mechanism drives the test sample to move in the X direction; The image sampling device is used to capture the laser markings on the test sample and obtain the trajectory of the laser driven by the second driving mechanism to move in the Y direction, and transmit the results to the control module; The control module is used to execute the laser scribing correction method according to any one of claims 1 to 9.

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