Quartz glass crystal bar multi-wire cutting device and method

Abstract

The invention discloses a quartz glass crystal bar multi-wire cutting device and method, and the device comprises a cabinet body, a multi-wire mechanism arranged at the lower part of the interior of the cabinet body, at least two loading structures which are arranged on the cabinet body and are used for loading crystal bars to be cut respectively, and a lifting mechanism which is used for driving the loading structures to lift, the lifting mechanism drives the to-be-cut crystal bars on the loading structure to be not in contact with the multi-wire mechanism at the same time; the multiple loading structures on the lifting mechanism are located at different heights, or the cutting lines located between the first cutting line roller and the second cutting line roller are arranged in an inclined mode. The multiple loading structures can load multiple crystal bars to be cut at the same time, cutting of the multiple crystal bars can be achieved through one-time descending of the lifting mechanism, and the working efficiency is improved. At the beginning of cutting, the cutting line does not make contact with the multiple to-be-cut crystal bars at the same time for cutting, and the situation that the cutting line conducts initial cutting on the multiple to-be-cut crystal bars at a time at the same time, and consequently the cutting stability is reduced is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of multi-wire cutting, and in particular to a quartz glass crystal rod multi-wire cutting device and method. Background Art

[0002] Quartz glass wafers are widely used in optical instruments, semiconductor communication devices, and other fields. They need to be cut to the appropriate thickness for different applications. These wafers can be cut using a variety of methods, including laser cutting and multi-wire cutting. Multi-wire cutting essentially involves bonding a single glass ingot to a multi-wire cutting machine with a curing adhesive, then cutting it. After cutting, the adhesive is removed to obtain a wafer of the desired thickness. However, cutting a single glass ingot is inefficient, and the long curing time of the adhesive also affects the overall cutting time of a single glass ingot. Therefore, further research and development is needed to improve the efficiency of multi-wire cutting to meet the high-efficiency cutting requirements of mass production. Summary of the Invention

[0003] The object of the present invention is to provide a quartz glass ingot multi-wire cutting device and method that are suitable for batch production and improve cutting efficiency.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] A multi-wire cutting device for quartz glass ingots comprises a cabinet, a multi-wire mechanism disposed at the lower interior of the cabinet, at least two loading structures above the interior of the cabinet for loading the ingots to be cut, and a lifting mechanism located at the upper portion of the cabinet for driving the loading structures to move up and down within the cabinet. The lifting mechanism drives the ingots to be cut on the loading structures to avoid contact with the multi-wire mechanism at the same time.

[0006] The cabinet is provided with a cutting support below the lifting mechanism. The multi-wire mechanism includes a winding and paying-off roller, a first cutting wire roller, a second cutting wire roller, a first wire roller, a second wire roller, and a third wire roller provided on the cutting support, and a cutting wire that is paid out by the winding and paying-off roller, passes through the first wire roller, the first cutting wire roller, the second cutting wire roller, the second wire roller, and the third wire roller, and is wound up by the winding and paying-off roller; the cutting wire between the first cutting wire roller and the second cutting wire roller is used to cut the crystal ingot to be cut;

[0007] The multiple loading structures on the lifting mechanism are at different heights, or the cutting line between the first cutting line roller and the second cutting line roller is arranged obliquely.

[0008] As a further embodiment, a horizontally arranged lifting carrier plate is provided below the lifting mechanism, the upper surface of the lifting carrier plate is fixedly connected to the lifting mechanism, and a plurality of loading structures are arranged at intervals on the lower surface of the lifting carrier plate.

[0009] The loading structure includes an assembly seat, a positioning plate, a material plate, and a guide bar.

[0010] The upper end of the assembly seat is fixedly connected to the lower surface of the lifting plate.

[0011] The positioning plate is assembled at the lower end of the assembly seat, a positioning groove is provided on the lower end surface of the assembly seat, and a positioning block is inserted into the positioning groove on the upper end surface of the positioning plate.

[0012] The material plate is adjustably mounted below the positioning plate, and the length of the material plate is greater than the length of the crystal rod to be cut;

[0013] The guide bar is bonded to the lower surface of the material plate, forming a bonding surface for the crystal rod to be cut on the lower surface of the guide bar. The guide bar has a cutting guide groove for the cutting line to enter after the cutting line cuts through the crystal rod to be cut.

[0014] The lower surface of the positioning plate is provided with a dovetail groove running through both ends, and a dovetail block is fixedly provided in the center of the upper surface of the material plate along its length direction. The dovetail block is passed through the dovetail groove from one end.

[0015] A fixed stopper is connected to one end of the positioning plate, and the lower end of the fixed stopper contacts and blocks one end of the material plate;

[0016] The other end of the positioning plate is connected to a movable block, which has a stop block adapted to the dovetail groove. The length of the stop block exceeds the length of the movable block.

[0017] At least one side of the movable stopper is bent upward at a right angle to form a right-angled bend portion, and the inner side surface of the right-angled bend portion is fitted with the outer side surface of the positioning plate.

[0018] The right-angled bend portion is fixedly connected to the outer side surface of the positioning plate via a fixed connecting piece so as to form an adjustable position.

[0019] As a further embodiment, a positioning structure is provided at least between the lower end of the fixed stopper and the end of the sheet, the positioning structure comprising a positioning screw and a locking nut.

[0020] The lower end of the fixed stopper is provided with a threaded hole penetrating the inner and outer surfaces of the fixed stopper, and the end of the material plate is provided with a positioning blind hole coaxial with the threaded hole.

[0021] The front end of the positioning screw extends from the outside of the fixed block through the threaded hole into the positioning blind hole. The front end of the positioning screw is a tapered section and the end is a threaded section. The positioning blind hole has a tapered shape that matches the structure of the tapered section of the positioning screw. The maximum aperture of the positioning blind hole is smaller than the maximum outer diameter of the tapered section of the positioning screw.

[0022] The locking nut is sleeved on the threaded section of the positioning screw located outside the fixed stop;

[0023] The length of the tapered section of the positioning screw is greater than the depth of the positioning blind hole.

[0024] As a further embodiment, the first cutting wire roller and the second cutting wire roller respectively include a cutting roller body, a plurality of wire rings, and a plurality of spacer rings, one less than the number of wire rings;

[0025] The cutting roller body includes a central shaft, an assembly roller fixed on the central shaft, a plurality of wire rings sleeved on the outer circumference of the assembly roller, and a spacer ring arranged between adjacent wire rings.

[0026] The outer periphery of the wire ring has an inwardly concave wire groove, and the spacer ring is a ring with an opening, the distance of the opening is greater than the outer diameter of the assembly roller, and after the spacer ring is assembled between the wire rings, the side of the spacer ring abuts against the side of the wire ring;

[0027] The outer end of the central shaft is detachably equipped with an outer tightening structure, and the inner end is equipped with an inner tightening structure. The outer and inner tightening structures are used to tighten and arrange a plurality of wire loops on the assembly roller in an overlapping manner.

[0028] As a further embodiment, the external tightening structure includes an external locking member and an external resisting disk. The external resisting disk is sleeved on the outer end of the central shaft and is located on the outer side of the assembly roller. The locking member is threadedly connected to the outer end of the central shaft and is located on the outer side of the external resisting disk. A plurality of external resisting blocks are arranged on the inner side of the external resisting disk in an annular manner along the inner periphery of the external resisting disk. The inner end faces of the external resisting blocks form abutment with the outer wall of the outermost wire loop on the assembly roller. The position of the external resisting blocks on the external resisting disk is between the outer periphery of the assembly roller and the outer periphery of the spacer ring.

[0029] The inner tightening structure includes an inner reference ring and an inner resisting disk. A gear step is provided at the inner end of the central shaft. The inner reference ring is sleeved on the inner end of the central shaft. One end face of the inner reference ring is in contact with the gear step, and the other end of the inner reference ring is in contact with the outer side of the inner resisting disk. A plurality of inner resisting blocks are arranged in a ring along the inner periphery of the inner resisting disk on the inner side. The inner end face of the inner resisting block is in contact with the outer wall of the innermost wire ring on the assembly roller. The position of the inner resisting block on the inner resisting disk is between the outer periphery of the assembly roller and the outer periphery of the spacer ring.

[0030] As a further embodiment, a positioning hole group is opened on one end surface of the wire loop, and a positioning column group is fixedly provided on the other end surface of the wire loop, and the positioning column group on the wire loop is inserted into the positioning hole group on the adjacent wire loop end surface;

[0031] The positioning column group includes a plurality of positioning columns protruding from the end surface of the wire ring. The plurality of positioning columns enclose and form an arc-shaped channel for inserting the spacer ring. Adjacent spacer rings are arranged with their openings in opposite directions.

[0032] As a further implementation scheme, a pull block is fixedly arranged in the middle position of the outer peripheral wall of the spacer ring. The thickness of the block is smaller than the thickness of the spacer ring, and marking grooves are provided on the end faces of the wire ring adjacent to the pull block; the size of the end of the pull block away from the spacer ring is larger than the size of the connection end between the pull block and the spacer ring.

[0033] As a further implementation scheme, the end face of the wire loop in the arc-shaped channel is provided with a receiving groove adapted to the spacer ring, the depth of the receiving groove is less than half the thickness of the spacer ring, and after the spacer ring is placed in the receiving groove, the outer peripheral end face of the pull block is aligned with the marking groove.

[0034] A multi-wire cutting method for a quartz glass ingot comprises the following steps: assembling the ingot to be cut on a loading structure below a lifting mechanism; arranging the distance between guide bars and the lower surface of a material plate according to the diameter of the ingot to be cut; adhering the guide bars to the lower surface of the material plate; and adhering the ingot to be cut to the lower surface of the guide bars, so that the ingot to be cut, the guide bars, and the material plate form a whole to be loaded.

[0035] Align the positioning block on the material plate with the positioning slot on the positioning plate and push it in. Use the fixed stopper and the movable stopper to limit the material plate under the positioning plate to complete the assembly of the whole material to be loaded;

[0036] According to the thickness of the crystal ingot to be cut, the spacer rings of different thicknesses are changed to adjust the distance between adjacent wire rings so that the spacing between adjacent cutting lines is adapted to the thickness of the wafer after cutting;

[0037] The lifting mechanism moves downward, driving the crystal ingot to be cut to contact the cutting line between the first cutting line roller and the second cutting line roller at different times, and cuts through the crystal ingot;

[0038] Remove the cut material to be loaded as a whole and rinse the mortar;

[0039] Then, during the heating and debonding process, a baffle is inserted between adjacent wafers to prevent the wafers from tipping over after debonding.

[0040] Immersing the wafer in a cleaning solution to clean the surface;

[0041] The wafers were placed in a hot air drying oven and dried at 130°C for 50 minutes to obtain wafers with clean surfaces.

[0042] Compared with the prior art, the present invention has the following beneficial effects:

[0043] 1. In this solution, multiple loading structures on the lifting mechanism in the multi-wire cutting device can simultaneously load multiple crystal rods to be cut. One downward movement of the lifting mechanism can achieve the cutting of multiple crystal rods, thereby improving work efficiency.

[0044] 2. In this solution, by designing multiple loading structures at different heights, or arranging the cutting line between the first cutting line roller and the second cutting line roller at an angle, at the start of cutting, the cutting line does not contact and cut multiple crystal rods to be cut at the same time, avoiding the cutting line starting to cut multiple crystal rods to be cut at the same time, which reduces the cutting stability.

[0045] 3. In this solution, by setting fixed blocks and movable blocks, the material plate can be adjusted and assembled under the positioning plate. According to the different lengths of the crystal rods to be cut, material plates of different lengths are selected to be assembled under the positioning plate. Through the adjustability of the material plate, the material plate can be accurately assembled on the positioning plate, thereby also making the position of the crystal rod to be cut below accurately assembled.

[0046] 4. In this solution, a spacer ring is arranged between adjacent wire rings. The spacer ring can be replaced between adjacent wire rings. According to different cutting requirements, spacer rings of different thicknesses are replaced to obtain the spacing between adjacent wire rings, thereby obtaining the cutting distance between adjacent cutting lines to adapt to the cutting requirements of chips of different thicknesses. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] The accompanying drawings are used to provide further understanding of the present invention and constitute a part of the specification. They are used to explain the present invention together with the embodiments of the present invention and do not constitute a limitation of the present invention.

[0048] Figure 1 Schematic diagram of the internal structure of the present invention;

[0049] Figure 2 Schematic diagram of the top view of the multi-line mechanism in the present invention;

[0050] Figure 3 for Figure 2 A magnified schematic diagram of part A in FIG;

[0051] Figure 4 It is a side structural diagram of the lifting mechanism in the present invention;

[0052] Figure 5 for Figure 4 A magnified schematic diagram of part B in FIG.

[0053] Figure 6 This is a schematic diagram of the end structure of the loading structure of the present invention;

[0054] Figure 7 Schematic diagram of the structure of the movable stopper in the present invention;

[0055] Figure 8 Schematic diagram of the structure of the cutting wire roller in the present invention;

[0056] Figure 9 Schematic diagram of the end structure of the cutting wire roller in the present invention;

[0057] Figure 10 Schematic diagram of the side structure of a wire loop in the present invention;

[0058] Figure 11 Schematic diagram of the side structure of another wire loop in the present invention;

[0059] In the attached figure:

[0060] 10. Cabinet, 11. Multi-line mechanism, 12. Loading structure, 13. Lifting mechanism, 14. Lifting cylinder, 15. Lifting plate, 16. Lifting column, 17. Lifting guide sleeve, 18. Cutting bracket, 19. Winding and paying-off roller;

[0061] 20. First cutting line roller, 21. Second cutting line roller, 22. First wire roller, 23. Second wire roller, 24. Third wire roller, 25. Cutting line, 26. Adjusting frame, 27. Positioning ridge, 28. Slot, 29. Bolt;

[0062] 30. Lifting plate, 31. Assembly seat, 32. Positioning plate, 33. Material plate, 34. Guide bar, 35. Positioning groove, 36. Positioning block, 37. Dovetail groove, 38. Dovetail block, 39. Fixed stop;

[0063] 40. Movable stopper, 41. Stop block, 42. Right-angle bend, 43. Fixed connector, 44. Positioning screw, 45. Lock nut, 46. Threaded hole, 47. Positioning blind hole, 48. Cutting roller, 49. Wire loop;

[0064] 50. Spacer ring, 51. Center shaft, 52. Assembly roller, 53. Wire groove, 54. External tightening structure, 55. Internal tightening structure, 56. External locking member, 57. External resisting plate, 58. External abutment block, 59. Inner reference ring;

[0065] 60. Inner resistance plate, 61. Shift step, 62. Inner resistance block, 63. Positioning column, 64. Arc-shaped channel, 65. Pull block, 66. Marking groove, 67. Assembly through hole, 68. Mounting plate, 69. Mounting block. DETAILED DESCRIPTION

[0066] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0067] See Figure 1-11 The multi-wire cutting device for quartz glass crystal rods includes a cabinet 10, a multi-wire mechanism 11 arranged at the lower part of the cabinet 10, four loading structures 12 at the upper part of the cabinet 10 for loading the crystal rods 100 to be cut respectively, and the number of loading structures 12 can be set as needed, but in actual operation, not all of them need to be loaded with crystal rods to be cut in order to work; and a lifting mechanism 13 located at the upper part of the cabinet 10 for driving the loading structure 12 to form an up and down lifting in the cabinet 10, and the lifting mechanism 13 drives the crystal rods to be cut on the loading structure 12 to contact the multi-wire mechanism 11 at different times; the cabinet 10 can be equipped with a cabinet door to form a relatively closed cutting environment in the cabinet 10, and the cabinet door can adopt the door structure on the cabinet 10 in the prior art; there is also a grouting system towards the cutting line in the cabinet 10, which does not involve the specific improvement of the present application and can adopt the prior art. The lifting mechanism 13 can adopt a motor-driven lifting structure or a cylinder-driven lifting structure. As shown in the drawings of this application, the cylinder-driven lifting mechanism 13 includes a lifting cylinder 14, a lifting plate 15, a lifting column 16, and a lifting guide sleeve 17. The four lifting guide sleeves 17 are fixedly arranged on the top plate of the cabinet 10. The four lifting columns 16 pass through the four lifting guide sleeves one by one. The upper end of the lifting column 16 is connected to the lifting plate 15. The telescopic end of the lifting cylinder 14 and the lower end of the lifting column 16 are jointly connected to the lifting carrier plate below. The extension and retraction of the lifting cylinder 14 drives the lifting plate 15 to move up and down, thereby driving the lifting carrier plate below to move up and down in the vertical direction.

[0068] The cabinet 10 is provided with a cutting bracket 18 located below the lifting mechanism 13, and the multi-line mechanism 11 includes a winding and paying-off roller 19, a first cutting wire roller 20, a second cutting wire roller 21, a first wire roller 22, a second wire roller 23, and a third wire roller 24 arranged on the cutting bracket 18, and a cutting wire 25 released by the winding and paying-off roller 19, passing through the first wire roller 22, the first cutting wire roller 20, the second cutting wire roller 21, the second wire roller 23, and the third wire roller 24, and wound by the winding and paying-off roller 19; The cutting wire between the cutting wire rollers 21 is used to cut the crystal rod to be cut; the winding and unwinding roller 19 is driven by a servo motor, wherein the first cutting wire roller 20, the second cutting wire roller 21, and the second wire roller 23 are located on the inner side of the cutting wire, and the first wire roller 22 and the third wire roller 24 are located on the outer side of the cutting wire. The cutting wire can be tightened by the first wire roller 22, the second wire roller, and the third wire roller 24 to ensure that the cutting wire is smoothly wound around the first cutting wire roller 20 and the second cutting wire roller 21, thereby improving the stability of the cutting wire during the cutting process.

[0069] The first cutting line roller 20, the second cutting line roller 21, the first wire roller 22, the second wire roller 23, and the third wire roller 24 are mounted on the cutting bracket 18 by an adjusting frame 26. The adjusting frame 26 can adjust the position on the cutting bracket 18. Specifically, the cutting bracket 18 is a door-shaped structure. Both sides of the outer end of the cutting bracket 18 are provided with a positioning convex ridge 27 protruding from the side of the cutting bracket 18. The adjusting frame 26 is in a small H-shape. The upper end of the adjusting frame 26 is a position for mounting the roller. The interior of the adjusting frame 26 has a card for the positioning convex ridge 27 to be engaged. The bottom of the slot 28 contacts the end face of the positioning rib 27, and the side of the slot 28 contacts the side of the positioning rib 27, thereby limiting the adjustment frame 26 on the cutting bracket 18, and then passing the bolt 29 through the bottom of the adjustment frame 26 and the cutting bracket 18, so as to fix the adjustment frame 26 to the cutting bracket 18, and open a plurality of assembly holes at different positions on the cutting bracket 18 for the bolt 29 to pass through, so that the position of the adjustment frame 26 on the cutting bracket 18 can be adjusted to adjust the tension of the cutting line.

[0070] The multiple loading structures 12 on the lifting mechanism 13 are at different heights, or the cutting line between the first cutting line roller 20 and the second cutting line roller 21 is arranged at an angle. Multiple loading structures 12 are used to load multiple crystal rods to be cut, and a single downward movement of the lifting mechanism 13 can achieve cutting of multiple crystal rods, thereby improving work efficiency. By having loading structures 12 at different heights or an inclined arrangement of the cutting line, at the start of cutting, the cutting line does not simultaneously contact and cut multiple crystal rods to be cut. When the lowest crystal rod to be cut is cut to a depth of about 0.5 cm, the second lower crystal rod to be cut is contacted and cut by the cutting line, thereby avoiding the cutting line starting to cut multiple crystal rods to be cut at the same time, which would reduce the cutting stability.

[0071] In one embodiment, a horizontally arranged lifting plate 30 is provided below the lifting mechanism 13. The upper surface of the lifting plate 30 is fixedly connected to the telescopic end of the lifting cylinder 14 and the lower end of the lifting column 16 in the lifting mechanism 13. The lifting mechanism 13 can drive the lifting of the lifting plate 30. Multiple loading structures 12 are arranged at intervals on the lower surface of the lifting plate 30. The center distance between adjacent loading structures 12 is greater than the distance between the centers of adjacent crystal rods to be cut assembled below, so as to ensure the stability of the assembly of adjacent crystal rods to be cut.

[0072] Among them, each loading structure 12 includes an assembly seat 31, a positioning plate 32, a material plate 33, and a guide bar 34. The upper end of the assembly seat 31 can be fixedly connected to the lower surface of the lifting loading plate 30 by bolts, and the lower end of the assembly seat 31 extends downward, and the positioning plate 32 is assembled on the lower end of the assembly seat 31. A square positioning groove 35 is opened on the lower end surface of the assembly seat 31, and the upper end surface of the positioning plate 32 has a square positioning block 36 inserted into the positioning groove 35. The positioning block 36 is inserted into the positioning groove 35 so that the positioning plate 32 is docked to the bottom of the assembly seat 31, and then the positioning block 36 and the assembly seat 31 are locked by bolts; after the positioning plate 32 is installed to the assembly seat 31, since the upper surface of the positioning plate 32 and the lower surface of the assembly seat 31 are both horizontal planes, the upper surface of the positioning plate 32 is fitted with the lower surface of the assembly seat 31, ensuring the assembly stability between the positioning plate 32 and the assembly seat 31.

[0073] The height of the assembly seat 31 and / or the height of the positioning plate 32 and / or the material plate 33 and / or the guide bar 34 in each loading structure 12 can be set differently to obtain multiple loading structures 12 at different heights below the lifting mechanism 13; and the first cutting line roller 20 and the second cutting line roller 21 are arranged at an angle, which can be achieved by changing the adjustment frame 26 of different heights.

[0074] Among them, the material plate 33 can be adjusted and assembled under the positioning plate 32, and the length of the material plate 33 is greater than the length of the crystal rod to be cut; according to the different lengths of the crystal rod to be cut, material plates 33 of different lengths are selected to be assembled under the positioning plate 32. Through the adjustability of the material plate 33, the material plate 33 can be accurately assembled on the positioning plate 32, so that the position of the crystal rod to be cut below is also accurately assembled.

[0075] Guide bars 34 are bonded to the lower surface of sheet 33, forming a bonding surface for the ingot to be cut. Guide bars 34 also have cutting guide grooves for the cutting wire to enter after it penetrates the ingot. In practice, guide bars 34 are spaced apart and bonded to the lower surface of sheet 33. The lower surfaces of these two guide bars 34 form an arc-shaped bonding surface to enhance the adhesion between the guide bars 34 and the ingot to be cut. The depth of the cutting guide grooves extends at least 1 cm beyond the depth of the ingot after the cutting wire penetrates it, ensuring that the cutting wire penetrates the ingot and avoids the cutting wire.

[0076] In one embodiment, the lower surface of the positioning plate 32 is provided with a dovetail groove 37 extending through both ends. A dovetail block 38 is fixedly mounted in the center of the upper surface of the material plate 33 along its length. The dovetail block 38 is inserted into the dovetail groove 37 from one end. A fixed stopper 39 is connected to one end of the positioning plate 32, and the lower end of the fixed stopper 39 contacts and resists one end of the material plate 33. A movable stopper 40 is connected to the other end of the positioning plate 32. The movable stopper 40 has a stopper 41 adapted to fit within the dovetail groove 37. The stopper 41 is longer than the movable stopper 40 and extends to one side of the movable stopper 40.

[0077] Both sides of the movable stopper 40 are bent upward at right angles to form a right-angled portion 42. The inner side of the right-angled portion 42 is in contact with the outer side of the positioning plate 32. The right-angled portion 42 is fixedly connected to the outer side of the positioning plate 32 via a fixed connector 43. When the sheet 33 is assembled to the positioning plate 32, the fixed stopper 39 is first fixedly connected to one end of the positioning plate 32. The dovetail block on the sheet 33 is aligned with the dovetail groove 37 and inserted until one end of the sheet 33 hits the fixed stopper 39, which limits the position. Then, according to the length of the sheet 33, the stopper 41 on the movable stopper 40 is aligned with the dovetail groove 37 on the positioning plate 32 and inserted until the stopper 41 hits the other end of the sheet 33. In this way, the sheet 33 is fixedly assembled under the positioning plate 32, and the right-angled portion 42 is fixedly connected to the positioning plate 32 via the fixed connector 43. That is, connection holes are provided at multiple positions on the outer side surface of the positioning plate 32 for inserting fixed connection parts to achieve fixed connection at multiple adjustment positions.

[0078] In a further embodiment, an assembly through hole 67 is opened in the middle position of the movable stop block 40 in the horizontal direction, which passes through the upper and lower surfaces of the movable stop block 40. A mounting plate 68 is fixedly connected below by bolts. The lower end of the stop block 41 has a mounting block 69 adapted to the assembly through hole 67. The mounting block 69 extends into the assembly through hole and cannot move left and right or forward or backward. The mounting block 69 and the mounting plate 68 are fixedly connected by bolts. The size of the mounting plate 68 is larger than the assembly through hole 67. In this way, when the stop block 41 needs to be replaced, the bolts between the mounting plate 68 and the mounting block 69 can be removed to replace the stop block 41.

[0079] In one embodiment, a positioning structure is provided at least between the lower end of fixed stop 39 and the end of sheet 33. The upper end of fixed stop 39 is fixedly connected to the end surface of positioning plate 32 by bolts, and the lower end of fixed stop 39 extends downwardly to one side of sheet 33. The positioning structure is arranged at the lower end of fixed stop 39. The positioning structure further enhances the stability of sheet 33 on positioning plate 32 and allows for fine-tuning of the horizontal position of sheet 33 below positioning plate 32, thereby enabling slight adjustments to the position of the ingot to be cut below, thereby adapting to the position adjustment requirements of the ingot to be cut.

[0080] Among them, the positioning structure includes a positioning screw 44 and a locking nut 45. A threaded hole 46 is provided at the lower end of the fixed stop 39, which passes through the inner and outer surfaces of the fixed stop 39. A positioning blind hole 47 coaxial with the threaded hole is provided on the end face of the material plate 33. The threaded hole 46 and the positioning blind hole 47 are arranged in a horizontal direction. The front end of the positioning screw 44 passes through the threaded hole from the outside of the fixed stop 39 and extends into the positioning blind hole 47 to form positioning; the front end of the positioning screw 44 is a tapered section and the end is a threaded section. The positioning blind hole 47 is a tapered hole adapted to the structure of the tapered section of the positioning screw 44, and the maximum aperture of the positioning blind hole 47 is smaller than the maximum outer diameter of the tapered section of the positioning screw 44; the locking nut 45 is sleeved on the threaded section of the positioning screw 44 on the outside of the fixed stop 39; the length of the tapered section of the positioning screw 44 is greater than the depth of the positioning blind hole 47. When the material plate 33 is inserted under the positioning plate 32, the front end of the positioning screw 44 extends into the positioning blind hole 47, so that it has a positioning function for the material plate 33. When the material plate 33 needs to be fine-tuned, the locking nut 45 can be loosened and the positioning screw 44 can be rotated to a certain length on the fixed block 39. After adjusting it into place, it can be fixed by the locking nut 45 to complete the positioning and adjustment.

[0081] In another embodiment, a positioning rod is fixedly provided at the front end of the stop block 41, and a positioning hole is provided at the other end face of the material plate 33. Generally speaking, the axis of the positioning rod, the axis of the positioning hole, the axis of the positioning blind hole 47, the axis of the positioning screw 44, and the axis of the threaded hole form a colinear arrangement. By inserting the positioning rod into the positioning hole and the positioning screw 44 into the positioning blind hole 47, the accuracy of the assembly of the material plate 33 on the positioning plate 32 can be guaranteed. At the same time, the combination of the dovetail groove on the positioning plate 32 and the dovetail block on the material plate 33 can enhance the assembly accuracy of the material plate 33, thereby ensuring the assembly accuracy of the crystal rod to be cut and providing a stable guarantee for the subsequent cutting accuracy. Among them, the structure of the positioning rod and the positioning hole can adopt the corresponding structure of the positioning screw 44 and the positioning blind hole, or the front end of the positioning rod can be designed as a multi-faceted structure such as a triangular pyramid or a quadrangular pyramid, and the positioning hole is also provided with a corresponding inner hole structure, thereby further improving the structural stability of the positioning.

[0082] In one embodiment, the first cutting wire roller 20 and the second cutting wire roller 21 each include a cutting wire roller body 48, a plurality of wire rings 49, and a plurality of spacer rings 50, one less than the number of wire rings 49. The cutting wire roller body 48 includes a central shaft 51 and an assembly roller 52 fixedly mounted on the central shaft 51. The inner end of the central shaft 51 is rotatably assembled on the adjustment frame 26 via a bearing.

[0083] The outer circumference of the assembly roller 52 forms a circular mounting surface for assembling the wire ring 49. Several wire rings 49 are sleeved on the outer circumference of the assembly roller 52. The inner circumference of the wire ring 49 is slidably mounted on the outer circumference of the assembly roller 52. A spacer ring 50 is arranged between adjacent wire rings 49. The spacer ring 50 can be replaced between adjacent wire rings 49. According to different cutting requirements, spacer rings 50 of different thicknesses are replaced to obtain the spacing between adjacent wire rings 49, thereby obtaining the cutting distance between adjacent cutting lines and controlling the cutting of crystal rods of different thicknesses.

[0084] Among them, the outer periphery of the wire ring 49 has an inwardly concave wire groove 53 for placing the cutting line; when cutting a batch of crystal rod products, spacer rings 50 of the same thickness are arranged between the wire rings 49 to ensure that the spacing between adjacent cutting lines is balanced; of course, when adjacent wire rings 49 are fitted together, the distance between them can meet the cutting thickness of the crystal rod, and the spacer ring 50 can be removed; the thickness of the spacer ring 50 itself is uniform, and the spacer ring 50 is a ring with an opening, and the distance of the opening is greater than the outer diameter of the assembly roller 52, so that the spacer ring 50 can be installed from the outside of the assembly roller 52 toward the outer periphery of the assembly roller 52. After the spacer ring 50 is assembled between the wire rings 49, the side of the spacer ring 50 is against the side of the wire ring 49. The side of the spacer ring 50 fits with the side of the wire ring 49, and the clamping force of the subsequent related structures makes the spacer ring 50 clamped between the wire rings 49.

[0085] An outer abutment structure 54 is detachably mounted on the outer end of the central shaft 51, and an inner abutment structure 55 is mounted on the inner end. The outer abutment structure 54 and the inner abutment structure 55 are used to abut and arrange a plurality of wire loops 49 and the spacer rings 50 therebetween in a stacked manner on the assembly roller 52. Specifically, the wire loops 49 are adjusted sequentially from one end of the inner abutment structure 55 toward the outer abutment structure 54, that is, the spacer rings 50 are sequentially inserted into adjacent wire loops 49 from the inner abutment structure 55 toward the outer abutment structure 54. When the spacing between adjacent wire loops 49 is adjusted, the outer abutment structure 54 is manipulated to generate an extrusion thrust toward the inner abutment structure 55, thereby tightening the spacer rings 50 and the wire loops 49.

[0086] When replacing the spacer ring 50, by adjusting the position of the adjustment frame 26 on the cutting bracket 18, the first wire roller 22 or / and the second wire roller 23 or / and the third wire roller 24 or / and the first cutting wire roller 20 or / and the second cutting wire roller 21 can be adjusted so that the cutting wire on the cutting wire roller is in a relaxed state, but the cutting wire is still in the wire groove 53 of the corresponding wire ring 49; then the outer tightening structure 54 and the inner tightening structure 55 cancel the clamping force on the wire ring 49 and the spacer ring 50, and the adjacent wire ring 49 can be moved axially on the assembly roller 52. Move to change the spacing between the wire rings 49, so that the spacer rings 50 can be removed and replaced in sequence. After the replacement is completed, the outer clamping structure 54 and the inner clamping structure 55 generate a clamping force again, and can be reset and locked by adjusting the adjustment frame 26 that was adjusted before. In the present application, the replacement of the spacer ring 50 is compared with the automatic adjustment of the spacing between the wire rings in the prior art, and the production cost is greatly reduced, and the stability is good. It is more suitable for batch adjustment of the spacer ring 50 according to the thickness requirements of large-scale and different batches of crystal rod cutting.

[0087] The outer tightening structure 54 includes an outer locking member 56 and an outer resisting disk 57. The outer resisting disk 57 is sleeved on the outer end of the central shaft 51 and is on the outside of the assembly roller 52, and can move axially in the central shaft 51; the locking member is threadedly connected to the outer end of the central shaft 51 and is on the outside of the outer resisting disk 57. The outer locking member 56 can generate an inward locking force on the outer surface of the outer resisting disk 57; four outer resisting blocks 58 are arranged in a ring shape along the inner periphery of the outer resisting disk 57 on the inner side of the outer resisting disk 57. The outer resisting blocks 58 are fixedly connected to the inner side of the outer resisting disk 57 by bolts. The inner end face of the outer resisting block 58 is the same distance from the outer side face of the outermost wire ring 49. The inner end face of the outer resisting block 58 contacts the outer wall of the outermost wire ring 49 on the assembly roller 52 to generate a locking force; the outer resisting block 58 is in the outer resisting The position on the disk 57 is located between the outer periphery of the assembly roller 52 and the outer periphery of the spacer ring 50, that is, after axial projection from the cutting line roller, the position of the outer stop block 58 against the outer side surface of the wire ring 49 is in the area between the outer periphery of the assembly roller 52 and the outer periphery of the spacer ring 50. Firstly, the outer stop block 58 can be pushed axially on the outer periphery of the assembly roller 52, that is, when the spacer ring 50 adopts different thicknesses, it affects the composition of all the wire rings 49 on the assembly roller 52, and the overall axial width on the assembly roller 52, so that the position of the outer stop block 58 needs to be adjusted accordingly, so that the outer stop block 58 always has the ability to contact the outer side surface of the outermost wire ring 49; secondly, the clamping force generated by the outer stop block 58 is applied to the position of the spacer ring 50 through the wire ring 49, thereby increasing the clamping ability to the spacer ring 50.

[0088] The inner tightening structure 55 includes an inner reference ring 59 and an inner resisting disk 60, and a gear step 61 is provided at the inner end of the center shaft 51. The inner reference ring 59 is sleeved on the inner end of the center shaft 51, and one end face of the inner reference ring 59 is in contact with the gear step 61, and the other end of the inner reference ring 59 is in contact with the outer side of the inner resisting disk 60. A plurality of inner resisting blocks 62 are arranged in a ring along the inner periphery of the inner resisting disk 60, and the inner end face of the inner resisting block 62 is in contact with the outer wall of the innermost wire ring 49 on the assembly roller 52; the position of the inner resisting block 62 on the inner resisting disk 60 is between the outer periphery of the assembly roller 52 and the outer periphery of the spacer ring 50. The inner resisting plate 60 and the inner resisting block 62 in the inner tightening structure 55 are arranged in the same manner as the outer resisting plate 57 and the outer resisting block 58 in the outer tightening structure 54, and the details are not repeated here; among them, the outer side surface of the inner reference ring 59 and the joint surface of the inner side surface of the gear step 61 serve as the reference surface for assembling the wire loop 49. After extending upward, the reference surface remains flush with the inner side surface of the fixed stop block 39. Before cutting, the left and right positions of the crystal rod are adjusted by adjusting the positioning screw 44 so that the end face of the crystal rod is kept as flush as possible with the cutting line on the innermost wire ring 49 below, so as to facilitate accurate cutting of the crystal rod.

[0089] The outer walls of the outermost and innermost wire loops 49 on the assembly roller 52 may be thickened to withstand the extrusion force generated by direct contact between the outer and inner abutment blocks 58 and 62 .

[0090] In one embodiment, a group of positioning holes is formed on one end face of the wire loop 49, and a group of positioning posts is fixedly mounted on the other end face of the wire loop 49. The group of positioning posts on the wire loop 49 inserts into the group of positioning holes on the end face of the adjacent wire loop 49. When the cutting wire roller does not use a spacer ring 50, the group of positioning posts inserts into the group of positioning holes on the facing wire loop 49 to enhance the bonding strength between adjacent wire loops 49. When a spacer ring 50 is required, the group of positioning posts on the wire loop 49 forms a channel for the spacer ring 50 to be installed.

[0091] Specifically, the positioning post assembly includes a plurality of positioning posts 63 protruding from the end surface of the wire loop 49. The plurality of positioning posts 63 enclose a circular arc-shaped channel 64 for the insertion of the spacer ring 50. Adjacent spacer rings 50 are arranged with their openings facing in opposite directions. For example, one spacer ring 50 is arranged with its opening facing upward, while the adjacent spacer ring 50 is arranged with its opening facing downward. This arrangement is primarily intended to minimize the impact of the arrangement of the spacer rings 50 on the axial strength of the entire cutting wire roller. Of course, the spacer rings 50 can also be arranged with their openings facing the same direction.

[0092] A pull block 65 is fixedly provided in the middle position of the outer peripheral wall of the spacer ring 50. The thickness of the block is smaller than that of the spacer ring 50. After the spacer ring 50 is assembled into the arc-shaped channel 64, the two side surfaces of the pull block do not contact the adjacent side surfaces of the wire ring 49; the end surfaces of the wire ring 49 adjacent to the pull block 65 are provided with marking grooves 66, so that when assembling the spacer ring 50, the position of the spacer ring 50 in the arc-shaped channel 64 can be adjusted, and when replacing the spacer ring 50, the insertion direction of the spacer ring 50 can be marked to remind the staff; the size of the end of the pull block 65 away from the spacer ring 50 is larger than the size of the connection end of the pull block 65 and the spacer ring 50, so that the staff can install and adjust the spacer ring 50 by taking the pull block.

[0093] In one embodiment, a receiving groove adapted to the spacer ring 50 is provided on the end face of the wire loop 49 in the arc-shaped channel 64. The depth of the receiving groove is less than half the thickness of the spacer ring 50, and an axial portion of the spacer ring 50 is located in the receiving groove. After the spacer ring 50 is placed in the receiving groove, the middle position of the outer peripheral end face of the pull block 65 is aligned with the marking groove 66. A corresponding groove can also be provided in the middle position of the outer peripheral end face of the pull block to more clearly show that it is aligned with the marking groove 66.

[0094] The multi-wire cutting method for a quartz glass ingot based on the cutting device includes the following steps:

[0095] The crystal ingot to be cut is assembled on the loading structure 12 below the lifting mechanism 13. The distance between the guide bars 34 and the lower surface of the material plate 33 is arranged according to the diameter of the crystal ingot to be cut. When the outer diameter of the crystal ingot is small, the distance between the two guide bars 34 can be reduced. When the outer diameter of the crystal ingot is large, the distance between the two guide bars 34 can be increased to suit the outer circumference of the crystal ingot.

[0096] The material plate 33 is inverted and placed on the loading positioning plate 32 (the structure is the same as the positioning plate 32 in the above-mentioned cutting device, but the arrangement direction is opposite), and the guide bar 34 is inverted above the material plate 33, that is, the material plate 33 is above the loading positioning plate 32, and the guide bar 34 is above the material plate 33. After a 1:1 mixture of AB glue, it is evenly applied to the lower surface of the two guide bars 34, and then the guide bars 34 are bonded to the upper surface of the material plate 33. After curing, glue is applied to the upper surface of the guide bar 34, and the crystal rod to be cut is bonded to the upper surface of the guide bar 34, and the crystal rod is above the guide bar 34. After static pressure curing for 150 minutes, the crystal rod to be cut, the guide bar 34, and the material plate 33 form a whole to be loaded, ensuring the stability of the crystal rod bonding.

[0097] Pull the material plate 33 out of the loading positioning plate 32, and turn the whole to be loaded upside down so that the crystal rod is at the bottom and the material plate 33 is at the top; align the positioning block on the material plate 33 with the positioning groove on the positioning plate 32 and push it in, and limit the material plate 33 below the positioning plate 32 by the fixed stop block 39 and the movable stop block 40. In this process, adjust the positioning screw 44 on the fixed stop block 39 to keep the inner surface of the fixed stop block 39 flush with the outer surface of the inner reference ring 59 and the inner surface of the gear step 61 to complete the assembly of the whole to be loaded.

[0098] Depending on the thickness of the crystal ingot to be cut, spacer rings 50 of different thicknesses are selected to adjust the distance between adjacent wire loops 49 so that the spacing between adjacent cutting lines is adapted to the thickness of the wafer after cutting. Among them, the net distance between adjacent wire loops 49 is the distance between the center positions of the wire grooves 53 of adjacent wire loops 49, which is the thickness of the wafer obtained after cutting the crystal ingot.

[0099] After the above work preparations are completed, the multi-wire mechanism 11 is started to make the cutting line running speed reach the set cutting speed, and the lifting mechanism 13 starts to drive the crystal ingot downward at a uniform speed, driving the crystal ingot to be cut to contact the cutting line between the first cutting line roller 20 and the second cutting line roller 21 at different times for cutting, and cut through the crystal ingot, that is, the cutting line enters the cutting guide groove in the guide bar 34 to a corresponding depth.

[0100] Remove the movable block 40, remove the cut material to be loaded as a whole, and use immersion and spray cleaning methods to rinse the mortar multiple times; if immersion cleaning is first used for 1 minute, the whole material to be loaded will swing along the direction of the incision on the crystal rod during this cleaning process; then use the spraying method to spray along the direction of the incision of the crystal rod, and after multiple cycles of cleaning, remove the cutting mortar.

[0101] Then put it into the degumming pot for heating and degumming. Before this heating and degumming process, a baffle is inserted between the adjacent chips of the crystal rod to prevent the chips from tipping over after degumming and avoid damage. After natural degumming, the chips are taken out.

[0102] Soak the wafer in a cleaning solution of 700g laundry detergent and 100kg water to clean the surface. Use a soft sponge to gently wipe the wafer surface to remove surface dirt, and then rinse with clean water until the wafer surface is free of dirt. The cleaning solution should be replaced after each use of the wafer.

[0103] The cleaned wafers were sent to a hot air drying oven for drying at 130°C for 50 minutes to obtain wafers with clean surfaces.

[0104] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or substitute equivalents for some of the technical features. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A multi-wire cutting device for quartz glass ingots, comprising a cabinet and a multi-wire mechanism disposed below the cabinet, characterized in that: At least two loading structures are provided above the interior of the cabinet for loading the ingots to be cut, and a lifting mechanism is provided at the upper portion of the cabinet for driving the loading structures to move up and down within the cabinet. The lifting mechanism drives the ingots to be cut on the loading structures to avoid contact with the multi-wire mechanism at the same time. The cabinet is provided with a cutting support below the lifting mechanism, and the multi-line mechanism includes a winding and paying-off roller, a first cutting line roller, a second cutting line roller, a first wire roller, a second wire roller, and a third wire roller provided on the cutting support, and a cutting line paid out by the winding and paying-off roller, passing through the first wire roller, the first cutting line roller, the second cutting line roller, the second wire roller, and the third wire roller, and then being wound up by the winding and paying-off roller; The cutting wire between the first cutting wire roller and the second cutting wire roller is used to cut the crystal ingot to be cut; The multiple loading structures on the lifting mechanism are at different heights, or the cutting line between the first cutting line roller and the second cutting line roller is arranged obliquely.

2. The quartz glass ingot multi-wire cutting device according to claim 1, wherein: A horizontally arranged lifting carrier plate is provided below the lifting mechanism, the upper surface of the lifting carrier plate is fixedly connected to the lifting mechanism, and a plurality of loading structures are arranged at intervals on the lower surface of the lifting carrier plate; The loading structure includes an assembly seat, a positioning plate, a material plate, and a guide bar. The upper end of the assembly seat is fixedly connected to the lower surface of the lifting plate. The positioning plate is assembled at the lower end of the assembly seat, a positioning groove is provided on the lower end surface of the assembly seat, and a positioning block is inserted into the positioning groove on the upper end surface of the positioning plate. The material plate is adjustably mounted below the positioning plate, and the length of the material plate is greater than the length of the crystal rod to be cut; The guide bar is bonded to the lower surface of the material plate, forming a bonding surface for the crystal rod to be cut on the lower surface of the guide bar. The guide bar has a cutting guide groove for the cutting line to enter after the cutting line cuts through the crystal rod to be cut.

3. The quartz glass ingot multi-wire cutting device according to claim 2, wherein: The lower surface of the positioning plate is provided with a dovetail groove running through both ends, and a dovetail block is fixedly provided in the center of the upper surface of the material plate along its length direction, and the dovetail block is passed through the dovetail groove from one end thereof; A fixed stopper is connected to one end of the positioning plate, and the lower end of the fixed stopper contacts and blocks one end of the material plate; The other end of the positioning plate is connected to a movable block, which has a stop block adapted to the dovetail groove. The length of the stop block exceeds the length of the movable block. At least one side of the movable stopper is bent upward at a right angle to form a right-angled bend portion, and the inner side surface of the right-angled bend portion is fitted with the outer side surface of the positioning plate. The right-angled bend portion is fixedly connected to the outer side surface of the positioning plate via a fixed connecting piece so as to form an adjustable position.

4. The quartz glass ingot multi-wire cutting device according to claim 3, wherein: A positioning structure is provided at least between the lower end of the fixed stopper and the end of the material plate, and the positioning structure includes a positioning screw and a locking nut. The lower end of the fixed stopper is provided with a threaded hole penetrating the inner and outer surfaces of the fixed stopper, and the end of the material plate is provided with a positioning blind hole coaxial with the threaded hole. The front end of the positioning screw extends from the outside of the fixed block through the threaded hole into the positioning blind hole. The front end of the positioning screw is a tapered section and the end is a threaded section. The positioning blind hole has a tapered shape that matches the structure of the tapered section of the positioning screw. The maximum aperture of the positioning blind hole is smaller than the maximum outer diameter of the tapered section of the positioning screw. The locking nut is sleeved on the threaded section of the positioning screw located outside the fixed stop; The length of the tapered section of the positioning screw is greater than the depth of the positioning blind hole.

5. The quartz glass ingot multi-wire cutting device according to claim 1, wherein: The first cutting wire roller and the second cutting wire roller respectively include a cutting roller body, a plurality of wire rings, and a plurality of spacer rings, one less than the number of wire rings; The cutting roller body includes a central shaft, an assembly roller fixed on the central shaft, a plurality of wire rings sleeved on the outer circumference of the assembly roller, and a spacer ring arranged between adjacent wire rings. The outer periphery of the wire ring has an inwardly concave wire groove, and the spacer ring is a ring with an opening, the distance of the opening is greater than the outer diameter of the assembly roller, and after the spacer ring is assembled between the wire rings, the side of the spacer ring abuts against the side of the wire ring; The outer end of the central shaft is detachably equipped with an outer tightening structure, and the inner end is equipped with an inner tightening structure. The outer and inner tightening structures are used to tighten and arrange a plurality of wire loops on the assembly roller in an overlapping manner.

6. The quartz glass ingot multi-wire cutting device according to claim 5, characterized in that: The outer tightening structure includes an outer locking member and an outer resisting disk. The outer resisting disk is sleeved on the outer end of the central shaft and is located on the outside of the assembly roller. The locking member is threadedly connected to the outer end of the central shaft and is located on the outside of the outer resisting disk. A plurality of outer resisting blocks are arranged on the inner side of the outer resisting disk in an annular manner along the inner periphery of the outer resisting disk. The inner end faces of the outer resisting blocks form abutment with the outer wall of the outermost wire loop on the assembly roller. The position of the outer resisting blocks on the outer resisting disk is between the outer periphery of the assembly roller and the outer periphery of the spacer ring. The inner tightening structure includes an inner reference ring and an inner resisting disk. A gear step is provided at the inner end of the central shaft. The inner reference ring is sleeved on the inner end of the central shaft. One end face of the inner reference ring is in contact with the gear step, and the other end of the inner reference ring is in contact with the outer side of the inner resisting disk. A plurality of inner resisting blocks are arranged in a ring along the inner periphery of the inner resisting disk on the inner side. The inner end face of the inner resisting block is in contact with the outer wall of the innermost wire ring on the assembly roller. The position of the inner resisting block on the inner resisting disk is between the outer periphery of the assembly roller and the outer periphery of the spacer ring.

7. The multi-wire cutting device for quartz glass ingot according to claim 5, wherein: A positioning hole group is opened on one end surface of the wire loop, and a positioning column group is fixedly set on the other end surface of the wire loop. The positioning column group on the wire loop is inserted into the positioning hole group on the adjacent wire loop end surface; The positioning column group includes a plurality of positioning columns protruding from the end surface of the wire ring. The plurality of positioning columns enclose and form an arc-shaped channel for inserting the spacer ring. Adjacent spacer rings are arranged with their openings in opposite directions.

8. The quartz glass ingot multi-wire cutting device according to claim 7, wherein: A pull block is fixedly arranged in the middle position of the outer peripheral wall of the spacer ring. The thickness of the block is smaller than that of the spacer ring. Marking grooves are provided on the end faces of the wire loop adjacent to the pull block. The size of the end of the pull block away from the spacer ring is larger than the size of the connection end between the pull block and the spacer ring.

9. The quartz glass ingot multi-wire sawing device according to claim 8, wherein: The end face of the wire loop in the arc-shaped channel is provided with a receiving groove adapted to the spacer ring. The depth of the receiving groove is less than half the thickness of the spacer ring. After the spacer ring is placed in the receiving groove, the outer peripheral end face of the pull block is aligned with the marking groove.

10. A quartz glass ingot multi-wire cutting method based on the above-mentioned quartz glass ingot multi-wire cutting device is characterized in that: The steps include: The ingot to be cut is assembled on the loading structure below the lifting mechanism. The guide bars are arranged at a distance from the lower surface of the material plate according to the diameter of the ingot to be cut. The guide bars are bonded to the lower surface of the material plate, and the ingot to be cut is bonded to the lower surface of the guide bars, so that the ingot to be cut, the guide bars, and the material plate form a whole to be loaded. Align the positioning block on the material plate with the positioning slot on the positioning plate and push it in. Use the fixed stopper and the movable stopper to limit the material plate under the positioning plate to complete the assembly of the whole material to be loaded; According to the thickness of the crystal ingot to be cut, the spacer rings of different thicknesses are changed to adjust the distance between adjacent wire rings so that the spacing between adjacent cutting lines is adapted to the thickness of the wafer after cutting; The lifting mechanism moves downward, driving the crystal ingot to be cut to contact the cutting line between the first cutting line roller and the second cutting line roller at different times, and cuts through the crystal ingot; Remove the cut material to be loaded as a whole and rinse the mortar; Then, during the heating and debonding process, a baffle is inserted between adjacent wafers to prevent the wafers from tipping over after debonding. Immersing the wafer in a cleaning solution to clean the surface; The wafers were placed in a hot air drying oven and dried at 130°C for 50 minutes to obtain wafers with clean surfaces.

Images