A high-precision reflective film thickness measurement method and system

Abstract

The present invention relates to a high-precision reflective film thickness measurement method and system, which relates to the field of thin film measurement technology. The method comprises: controlling a preset light source module to emit a measuring light beam to a thin film material whose film thickness needs to be measured; collecting reflected light detection information after the measuring light beam is irradiated on the thin film material and reflected; generating position adjustment information in real time based on the reflected light detection information, and outputting the position adjustment information to a preset position adjustment module to control a preset reflected light detection module or a preset light source module to adjust the position, and re-collecting the reflected light detection information and defining it as reflected light update information; selecting based on the reflected light update information to generate reflected light selection information; performing elliptical polarization analysis based on the reflected light selection information to form a film thickness result value, and outputting the film thickness result value. The present invention facilitates high-precision measurement of film thickness.

Description

Technical Field

[0001] The present invention relates to the field of thin film measurement technology, and in particular to a high-precision reflective film thickness measurement method and system. Background Art

[0002] Thin film materials are widely used in various products and research in modern industry and scientific research. For example, in the semiconductor chip manufacturing process, multiple layers of thin films of varying thicknesses are deposited on the surface of the silicon wafer to achieve the chip's specific functions. Optical lens coatings can improve the lens's optical performance, and precise control of coating thickness plays a decisive role in lens performance. In the biomedical field, synthetic thin films are used in tissue engineering and drug delivery, and the accuracy of film thickness affects their biocompatibility and functional effects. Therefore, high-precision measurement of thin film thickness is of vital importance.

[0003] At present, when measuring film thickness, a contact measurement method is generally used. The probe of a probe-type film thickness measuring instrument contacts the surface of the film, and the displacement of the probe is used to measure the film thickness.

[0004] When using a probe-type film thickness gauge to measure film thickness, it is easy to cause damage to the film surface, especially for soft, fragile or ultra-thin films. Damage may cause changes in film properties and fail to meet high-precision measurement requirements. Summary of the Invention

[0005] In order to facilitate high-precision measurement of film thickness, the present invention provides a high-precision reflective film thickness measurement method and system.

[0006] In a first aspect, the present invention provides a high-precision reflective film thickness measurement method, which adopts the following technical solutions:

[0007] A high-precision reflective film thickness measurement method, comprising:

[0008] S1: Control the preset light source module to emit a measuring beam to the thin film material whose film thickness needs to be measured;

[0009] S2: Collecting the reflected light detection information after the measuring light beam is irradiated to the thin film material;

[0010] S3: generating position adjustment information in real time based on the reflected light detection information, and outputting the position adjustment information to a preset position adjustment module to control a preset reflected light detection module or a preset light source module to adjust the position, and recollecting the reflected light detection information and defining it as reflected light update information;

[0011] S4: performing selection based on the reflected light update information to generate reflected light selection information;

[0012] S5: performing ellipsometry analysis based on the reflected light selection information to form a film thickness result value, and outputting the film thickness result value.

[0013] Optionally, the method for generating the position adjustment information includes:

[0014] S31: Collecting emission information;

[0015] S32: Retrieving the emission light intensity value and emission position point based on the emission condition information;

[0016] S33: Retrieving a detection position point and a reflected light intensity value based on the reflected light detection information;

[0017] S34: Determine an intensity variation interval and a reflection angle value based on the emission position point and the detection position point;

[0018] S35: determining a light intensity deviation value based on the emitted light intensity value, the reflected light intensity value, and the intensity variation interval;

[0019] S36: generating light intensity deviation adjustment information based on the light intensity deviation value;

[0020] S37: Generate angle adjustment information based on the reflection angle value;

[0021] S38: Combining the light intensity deviation adjustment information with the angle adjustment information to form the position adjustment information.

[0022] Optionally, the method for generating the light intensity deviation adjustment information includes:

[0023] S361: Collecting measurement time points and measurement locations;

[0024] S362: Determine an appropriate time period based on the measurement location point;

[0025] S363: Determine a time deviation value based on the measurement time point and the appropriate time period;

[0026] S364: Determine a light intensity time reference deviation value based on the time deviation value;

[0027] S365: Determine whether the light intensity deviation value is greater than the light intensity time reference deviation value;

[0028] S366: If yes, generating light intensity adjustment movement information based on the light intensity deviation value and the time deviation value, and using the light intensity adjustment movement information as the light intensity deviation adjustment information;

[0029] S367: If no, the difference between the light intensity deviation value and the light intensity time reference deviation value is used as the light intensity abnormality deviation value;

[0030] S368: Determine light intensity abnormality movement information based on the light intensity abnormality deviation value, and use the light intensity abnormality movement information as the light intensity deviation adjustment information.

[0031] Optionally, the method for generating the light intensity adjustment movement information includes:

[0032] S3661: Determine an initial light intensity output value based on the light intensity deviation value;

[0033] S3662: Determine a light intensity time deviation adjustment value based on the time deviation value;

[0034] S3663: Calculate the sum of the initial light intensity output value and the light intensity time deviation adjustment value and use it as the light intensity adjustment output value;

[0035] S3664: Controlling a preset light source auxiliary test module based on the light intensity adjustment output value to output an auxiliary light beam and using the re-collected reflected light detection information as reflected light auxiliary detection information;

[0036] S3665: Retrieve a reflected light auxiliary intensity value based on the reflected light auxiliary detection information;

[0037] S3666: Generate reflected light auxiliary movement information based on the reflected light auxiliary intensity value, and use the reflected light auxiliary movement information as the light intensity adjustment movement information.

[0038] Optionally, the method for generating the reflected light-assisted movement information includes:

[0039] S36661: Determine a reference interval of auxiliary intensity of reflected light based on the light intensity adjustment output value;

[0040] S36662: Determine whether the reflected light auxiliary intensity value is within the reflected light auxiliary intensity reference range;

[0041] S36663: If yes, determining light intensity deviation movement information based on the light intensity deviation value, and using the light intensity deviation movement information as the reflected light auxiliary movement information;

[0042] S36664: If no, calculate the difference between the reflected light auxiliary intensity value and the reflected light auxiliary intensity reference interval and use it as the reflected light auxiliary intensity deviation value;

[0043] S36665: Determine auxiliary deviation movement information based on the auxiliary intensity deviation value of the reflected light, and use the auxiliary deviation movement information as the auxiliary movement information of the reflected light.

[0044] Optionally, the method for generating the angle adjustment information includes:

[0045] S371: Determine whether the reflection angle value falls within a preset angle reference range;

[0046] S372: If yes, determine an angle reference intermediate value based on the angle reference interval;

[0047] S373: Generate benchmark adjustment information based on the reflection angle value and the angle benchmark intermediate value, and use the benchmark adjustment information as the angle adjustment information;

[0048] S374: If not, calculating the difference between the reflection angle value and the preset angle reference interval and using it as the reflection angle deviation value;

[0049] S375: Determine an angle deviation distance adjustment value based on the reflection angle deviation value;

[0050] S376: Determine reception adjustment information based on the angle deviation distance adjustment value, and use the reception adjustment information as the angle adjustment information.

[0051] Optionally, the method for generating the benchmark adjustment information includes:

[0052] S3731: Calculate the difference between the reflection angle value and the angle reference intermediate value and use it as the angle intermediate deviation value;

[0053] S3732: Determine an intermediate deviation distance value based on the intermediate angle deviation value;

[0054] S3733: Calculate the distance between the transmitting position point and the detecting position point and use it as the position distance value;

[0055] S3734: Determine an intermediate deviation distance reference value based on the position distance value;

[0056] S3735: Determine whether the intermediate deviation distance value is less than the intermediate deviation distance reference value;

[0057] S3736: If yes, determine transmission adjustment information based on the intermediate deviation distance value, and use the transmission adjustment information as the reference adjustment information;

[0058] S3737: If not, calculate the difference between the intermediate deviation distance value and the intermediate deviation distance reference value and use it as the intermediate deviation abnormal distance value;

[0059] S3738: Determine reception abnormality adjustment information based on the intermediate deviation abnormality distance value, and combine the reception abnormality adjustment information with the preset reflection initial adjustment information to form the reference adjustment information.

[0060] Optionally, the method for generating the reflected light selection information includes:

[0061] S41: Retrieving an updated intensity value and an updated adjustment distance value based on the reflected light update information;

[0062] S42: sorting the update strength values ​​from large to small, and forming an update strength ranking value according to the sorting result;

[0063] S43: Calculate the difference between the updated adjustment distance values ​​of adjacent adjustments and use it as the adjacent adjustment distance deviation value;

[0064] S44: generating an updated change distance ranking value based on the adjacent adjustment distance deviation value;

[0065] S45: Calculate the sum of the update strength ranking value and the update change distance ranking value and use it as the comprehensive ranking value;

[0066] S46: Sorting is performed from large to small based on the comprehensive ranking values, and the reflected light update information corresponding to the first-ranked comprehensive ranking value is used as the reflected light selection information.

[0067] Optionally, the method for generating the updated change distance ranking value includes:

[0068] S441: Retrieving adjustment type information based on the adjacent adjustment distance deviation value;

[0069] S442: Determine an adjustment type distance impact value based on the adjustment type information;

[0070] S443: Calculate the product of the adjustment type distance impact value and the adjacent adjustment distance deviation value and use it as the adjacent adjustment single type distance value;

[0071] S444: Retrieve a value of the number of categories based on the adjustment category information;

[0072] S445: Determine an adjacent adjusted comprehensive distance value based on the number of categories and the adjacent adjusted single category distance value;

[0073] S446: Sort the adjacent adjusted comprehensive distance values ​​from small to large, and form the updated change distance sort value according to the sorting result.

[0074] In a second aspect, the present invention provides a high-precision reflective film thickness measurement system, which adopts the following technical solutions:

[0075] A high-precision reflective film thickness measurement system, comprising:

[0076] An acquisition module is used to collect reflected light detection information, emission information, measurement time points, and measurement locations;

[0077] A memory storing a program for implementing a high-precision reflective film thickness measurement method as described in any one of the first aspects;

[0078] The processor loads and executes the program stored in the memory.

[0079] In summary, the present invention includes at least one of the following beneficial technical effects:

[0080] 1. By controlling the measurement beam to irradiate the thin film material and collecting reflected light detection information to generate position adjustment information in real time, the reflected light detection module or light source module is controlled to adjust its position based on the position adjustment information and re-collect reflected light update information, which is then selected to generate reflected light selection information. Ellipsometry analysis is performed on the reflected light selection information to form and output the film thickness result value. This eliminates the need to contact the thin film material, reduces damage to the film surface, and facilitates high-precision measurement of the film thickness.

[0081] 2. By collecting emission information and retrieving the emission light intensity value and emission position point, retrieving the detection position point and reflected light intensity value through reflected light detection information, and then determining the intensity variation range and reflection angle value through the emission position point and the detection position point to determine the light intensity deviation value, generating light intensity deviation adjustment information through the light intensity deviation value, and generating angle adjustment information through the reflection angle value, and then combining the light intensity deviation adjustment information with the angle adjustment information to form position adjustment information, the accuracy of the obtained position adjustment information is improved;

[0082] 3. Retrieve the updated intensity value and updated adjustment distance value through the reflected light update information, and analyze them separately to obtain the updated intensity ranking value and the updated change distance ranking value. Then calculate the comprehensive ranking value and sort them from large to small. The reflected light update information corresponding to the first-ranked comprehensive ranking value is used as the reflected light selection information to improve the accuracy of the obtained reflected light selection information. BRIEF DESCRIPTION OF THE DRAWINGS

[0083] Figure 1 This is a flow chart of a method for high-precision reflective film thickness measurement according to an embodiment of the present invention;

[0084] Figure 2 is a flow chart of a method for generating position adjustment information according to an embodiment of the present invention;

[0085] Figure 3This is a flow chart of a method for generating reflected light selection information according to an embodiment of the present invention. DETAILED DESCRIPTION

[0086] The present invention is further described in detail below with reference to the accompanying drawings and embodiments.

[0087] A high-precision reflective film thickness measurement method collects reflected light detection information, emission information, measurement time points and measurement position points, and obtains position adjustment information through analysis to control the position adjustment of the reflected light detection module or the light source module and re-collect reflected light update information, and then selects to generate reflected light selection information. Elliptical polarization analysis is performed on the reflected light selection information to form and output the film thickness result value, thereby eliminating the need for contact with the film material, reducing damage to the film surface, and facilitating high-precision measurement of the film thickness.

[0088] Reference Figure 1 , an embodiment of the present invention discloses a high-precision reflective film thickness measurement method, which includes:

[0089] S1: Control the preset light source module to emit a measuring beam to the thin film material whose film thickness needs to be measured.

[0090] The measuring beam refers to a laser beam used to measure the thickness of a thin film material, and the light source module refers to a module used to emit a measuring beam. The light source module may be a laser emitter.

[0091] After placing the film material that needs to be measured for film thickness at a preset detection station, the light source module is controlled to emit a measurement light beam to the film material, thereby starting to detect the film thickness of the film material.

[0092] The inspection station is used to measure the film thickness of thin film materials. It is pre-installed with a light source module, a position adjustment module, and a reflected light detection module. The reflected light detection module detects the measurement beam reflected by the thin film material, while the position adjustment module controls the movement of the light source module and the reflected light detection module. Both modules are mounted on the position adjustment module. The reflected light detection module can be a photodetector, and the position adjustment module can be a linear guide with three axes (x, y, and z).

[0093] In this embodiment, the position adjustment module comprises a nanometer-scale displacement system based on air bearings and linear ultrasonic motors, as well as a high-precision angle adjustment mechanism driven by piezoelectric ceramics. The air bearings utilize porous throttling technology, achieving a linear motion error of less than 0.1 μm / m and pitch and yaw angle errors of less than 0.1″ when the air film thickness is 20 μm. The linear ultrasonic motor utilizes a traveling wave drive principle, characterized by its absence of electromagnetic interference, fast response speed, and high positioning accuracy. Its positioning accuracy can reach ±0.5 nm, and its repeatability can reach ±0.2 nm. The displacement system features Z-axis translation with a displacement distance of up to 50 mm, enabling precise adjustment of the position of the film being measured, allowing the measurement beam to accurately illuminate different parts of the film.

[0094] The angle adjustment mechanism utilizes a piezoelectric ceramic drive with a resolution of 0.001°, enabling rapid and precise adjustment of both the incident and reflected light reception angles. Precise control of both the incident and reception angles optimizes the acquisition of reflected light signals, improving measurement accuracy. This is particularly useful for measuring thin films with high surface roughness or complex reflective properties. The position adjustment module is also equipped with a high-precision grating scale (resolution 0.1nm) and an angle encoder (resolution 0.001°), enabling closed-loop control of displacement and angle adjustment.

[0095] S2: Collecting the reflected light detection information after the measuring light beam is irradiated onto the thin film material and reflected.

[0096] The reflected light detection information refers to detection information obtained by detecting a measuring light beam reflected by a thin film material.

[0097] When the measuring light beam is irradiated onto the thin film material and reflected, the reflected light detection information is collected through the reflected light detection module for subsequent use.

[0098] S3: Generate position adjustment information in real time based on the reflected light detection information, and output the position adjustment information to a preset position adjustment module to control a preset reflected light detection module or a preset light source module to adjust the position, and re-collect the reflected light detection information and define it as reflected light update information.

[0099] The position adjustment information refers to adjustment information corresponding to controlling the position adjustment of the reflected light detection module or the light source module.

[0100] By performing real-time analysis on the reflected light detection information and generating position adjustment information, the position adjustment information is output to a preset position adjustment module to control the preset reflected light detection module or the preset light source module to adjust the position, thereby facilitating the reflected light detection module to re-collect the reflected light detection information, and defining the re-collected reflected light detection information as reflected light update information for subsequent use.

[0101] For the specific steps of generating the position adjustment information, refer to S31 to S38.

[0102] S4: performing selection based on the reflected light update information to generate reflected light selection information.

[0103] The reflected light selection information refers to the information corresponding to the selection of the collected reflected light update information.

[0104] By selecting the reflected light update information, reflected light selection information is generated for easy subsequent use. The specific steps for generating the reflected light selection information refer to S41 to S46.

[0105] S5: performing ellipsometry analysis based on the reflected light selection information to form a film thickness result value, and outputting the film thickness result value.

[0106] Among them, the film thickness result value refers to the result value obtained after measuring the thickness of the thin film material. By selecting information of the reflected light to obtain the amplitude ratio and phase difference, combined with the Fresnel formula and the multilayer film matrix method, the relationship between the amplitude ratio and phase difference and the film thickness and refractive index is established. The least squares method is used to fit the measured data to obtain the film thickness result value, and the film thickness result value is output, so there is no need to contact the thin film material, reducing damage to the film surface, and facilitating high-precision measurement of the film thickness.

[0107] The specific steps of extracting information from reflected light to perform ellipsometry analysis are common knowledge and will not be described in detail.

[0108] In step S3, in order to further ensure the rationality of the position adjustment information, it is necessary to perform further separate analysis and calculation on the position adjustment information, which is specifically described in detail through the following steps.

[0109] Reference Figure 2 , the method for generating position adjustment information includes the following steps:

[0110] S31: Collecting emission information.

[0111] The emission condition information refers to parameter condition information such as light intensity and position corresponding to the emission of the measurement light beam, and the emission condition information is obtained by querying the light source module.

[0112] S32: Retrieve the emission light intensity value and emission position point based on the emission situation information.

[0113] The emitted light intensity value refers to the intensity value corresponding to the illumination when the measurement beam is emitted. The emission position point refers to the location of the light source module when the measurement beam is emitted. The emission status information includes the emitted light intensity value and the emission position point.

[0114] The emission light intensity value and emission position point can be retrieved through the emission situation information to facilitate subsequent use.

[0115] S33: Retrieve the detection position point and the reflected light intensity value based on the reflected light detection information.

[0116] The detection position point refers to the position point corresponding to the reflected measurement light beam, and the reflected light intensity value refers to the intensity value corresponding to the illumination of the reflected measurement light beam. The reflected light detection information includes the detection position point and the reflected light intensity value.

[0117] The detection position point and reflected light intensity value are retrieved through the reflected light detection information to facilitate subsequent use.

[0118] S34: Determine the intensity variation range and the reflection angle value based on the emission position point and the detection position point.

[0119] The intensity variation range refers to the allowable reference variation range when the intensity of the light changes, and the reflection angle value refers to the angle value corresponding to the reflection of the measuring light beam.

[0120] By calculating the height of the emission position point, the detection position point and the preset reference plane, the angle formed between the emission position point and the detection position point is calculated and used as the reflection angle value.

[0121] The distance that the light needs to travel is calculated between the emission point and the detection point and defined as the propagation distance. The propagation distance is then input into the preset intensity change database to match the intensity change range for subsequent use.

[0122] The intensity change database pre-stores a comparison table of different propagation distances and corresponding intensity change intervals, and the intensity change database is obtained after pre-input.

[0123] S35: Determine a light intensity deviation value based on the emitted light intensity value, the reflected light intensity value, and the intensity variation interval.

[0124] The light intensity deviation value refers to the deviation value corresponding to the light intensity deviation.

[0125] By calculating the emitted light intensity value and the intensity variation range, the intensity estimation range is obtained. Then, the difference between the reflected light intensity value and the two end values ​​of the intensity estimation range is calculated, and the maximum difference between the two differences is used as the light intensity deviation value for subsequent use.

[0126] S36: Generate light intensity deviation adjustment information based on the light intensity deviation value.

[0127] The light intensity deviation adjustment information refers to adjustment information corresponding to position adjustment according to the light intensity deviation.

[0128] By analyzing the light intensity deviation value, light intensity deviation adjustment information is generated for subsequent use. The specific steps for generating the light intensity deviation adjustment information refer to S361 to S368.

[0129] S37: Generate angle adjustment information based on the reflection angle value.

[0130] The angle adjustment information refers to adjustment information corresponding to position adjustment according to the reflection angle.

[0131] By analyzing the reflection angle value, angle adjustment information is generated to facilitate subsequent use. The specific steps of generating the angle adjustment information refer to S371 to S376.

[0132] S38: Combining the light intensity deviation adjustment information with the angle adjustment information to form position adjustment information.

[0133] Among them, by combining the light intensity deviation adjustment information with the angle adjustment information, adjustment information for comprehensive adjustment of the position is formed as the position adjustment information, thereby improving the accuracy of the acquired position adjustment information.

[0134] In step S36 , in order to further ensure the rationality of the light intensity deviation adjustment information, it is necessary to perform further separate analysis and calculation on the light intensity deviation adjustment information, which is specifically described in detail through the following steps.

[0135] The method for generating light intensity deviation adjustment information includes the following steps:

[0136] S361: Collect measurement time points and measurement location points.

[0137] The measurement time point refers to the time point corresponding to the thickness measurement, which is obtained by querying a real-time database that stores real-time time. The measurement position point refers to the position point at which the thickness measurement is performed, which is obtained by querying a preset position sensor.

[0138] S362: Determine an appropriate time period based on the measurement location point.

[0139] The suitable time period refers to the time period corresponding to when measurement is suitable for the measurement location.

[0140] Different measurement locations correspond to different suitable time periods. By inputting the measurement location into a preset suitable time database to match the suitable time period, it is convenient for subsequent use.

[0141] The appropriate time database pre-stores a comparison table of different measurement locations and corresponding appropriate time periods, and the appropriate time database is obtained through pre-input.

[0142] S363: Determine a time deviation value based on the measurement time point and the appropriate time period.

[0143] The time deviation value refers to the deviation value corresponding to when there is a time deviation.

[0144] By calculating the middle time point corresponding to the appropriate time period, the time value between the measured time point and the middle time point is calculated and used as the time deviation value for subsequent use.

[0145] S364: Determine the light intensity time reference deviation value based on the time deviation value.

[0146] The light intensity time reference deviation value refers to the reference deviation value corresponding to the light intensity deviation caused by the time deviation. Different time deviation values ​​correspond to different light intensity time reference deviation values.

[0147] By inputting the time deviation value into a preset light intensity time reference deviation database to match and obtain the light intensity time reference deviation value, it is convenient for subsequent use.

[0148] The light intensity time reference deviation database pre-stores a comparison table of different time deviation values ​​and corresponding light intensity time reference deviation values, and the light intensity time reference deviation database is obtained after pre-input.

[0149] S365: Determine whether the light intensity deviation value is greater than the light intensity time reference deviation value. If yes, execute S366; if not, execute S367.

[0150] Wherein, by judging whether the light intensity deviation value is greater than the light intensity time reference deviation value, it is judged whether the reflected light detection module should be adjusted directly according to the light intensity deviation.

[0151] S366: Generate light intensity adjustment movement information based on the light intensity deviation value and the time deviation value, and use the light intensity adjustment movement information as light intensity deviation adjustment information.

[0152] The light intensity adjustment movement information refers to adjustment information for movement after adjusting the illumination.

[0153] When the light intensity deviation value is greater than the light intensity time reference deviation value, it means that the reflected light detection module is not adjusted directly based on the light intensity deviation at this time. Therefore, the light intensity deviation value and the time deviation value are analyzed to generate light intensity adjustment movement information, and the light intensity adjustment movement information is used as the light intensity deviation adjustment information, thereby improving the accuracy of the obtained light intensity deviation adjustment information.

[0154] S367: The difference between the light intensity deviation value and the light intensity time reference deviation value is used as the light intensity abnormality deviation value.

[0155] The abnormal light intensity deviation value refers to the deviation value corresponding to the abnormal light intensity deviation.

[0156] When the light intensity deviation value is greater than the light intensity time reference deviation value, it means that the reflected light detection module is adjusted directly according to the light intensity deviation. Therefore, the difference between the light intensity deviation value and the light intensity time reference deviation value is calculated and used as the light intensity abnormality deviation value, which is convenient for subsequent use.

[0157] S368: Determine the light intensity abnormality movement information based on the light intensity abnormality deviation value, and use the light intensity abnormality movement information as the light intensity deviation adjustment information.

[0158] The abnormal light intensity movement information is the adjustment information corresponding to the movement of the reflected light detection module according to the abnormal light intensity deviation value. Different abnormal light intensity deviation values ​​correspond to different abnormal light intensity movement information.

[0159] The light intensity abnormality deviation value is input into a preset light intensity abnormality movement database to match and obtain light intensity abnormality movement information, and the light intensity abnormality movement information is used as light intensity deviation adjustment information, thereby improving the accuracy of the obtained light intensity deviation adjustment information.

[0160] The abnormal light intensity movement database pre-stores a comparison table of different abnormal light intensity deviation values ​​and corresponding abnormal light intensity movement information, and the abnormal light intensity movement database is obtained through pre-input.

[0161] In step S366 , in order to further ensure the rationality of the light intensity adjustment movement information, it is necessary to perform further separate analysis and calculation on the light intensity adjustment movement information, which is specifically described in detail through the following steps.

[0162] The method for generating light intensity adjustment movement information includes the following steps:

[0163] S3661: Determine an initial light intensity output value based on the light intensity deviation value.

[0164] The initial light intensity output value refers to the initial output value corresponding to the auxiliary light beam output by the light source auxiliary test module, which is preset based on the light intensity deviation value. The auxiliary light beam refers to the light beam used for auxiliary measurement, and the light source auxiliary test module refers to the module used to output the auxiliary light beam. The light source auxiliary test module is pre-installed on the position adjustment module. Different light intensity deviation values ​​correspond to different initial light intensity output values.

[0165] By inputting the light intensity deviation value into a preset light intensity initial output database to match and obtain the light intensity initial output value, subsequent use is facilitated.

[0166] The light intensity initial output database pre-stores a comparison table of different light intensity deviation values ​​and corresponding light intensity initial output values, and the light intensity initial output database is obtained after pre-input.

[0167] S3662: Determine the light intensity time deviation adjustment value based on the time deviation value.

[0168] The light intensity time deviation adjustment value refers to the adjustment value corresponding to the time deviation value when the auxiliary light beam output by the light source auxiliary test module is adjusted. Different time deviation values ​​correspond to different light intensity time deviation adjustment values.

[0169] By inputting the time deviation value into a preset light intensity time deviation adjustment database to match and obtain the light intensity time deviation adjustment value, it is convenient for subsequent use.

[0170] The light intensity time deviation adjustment database pre-stores a comparison table of different time deviation values ​​and corresponding light intensity time deviation adjustment values, and the light intensity time deviation adjustment database is obtained after pre-input.

[0171] S3663: Calculate the sum of the initial light intensity output value and the light intensity time deviation adjustment value and use it as the light intensity adjustment output value.

[0172] The light intensity adjustment output value refers to the output value corresponding to the adjustment when the light source auxiliary test module is controlled to output the auxiliary light beam.

[0173] The sum of the initial light intensity output value and the light intensity time deviation adjustment value is used as the light intensity adjustment output value, which is convenient for subsequent use.

[0174] S3664: Control the preset light source auxiliary test module based on the light intensity adjustment output value to output an auxiliary light beam and use the re-collected reflected light detection information as reflected light auxiliary detection information.

[0175] Among them, the auxiliary light beam is output by controlling the preset light source auxiliary test module with the parameters corresponding to the light intensity adjustment output value, and the re-collected reflected light detection information is defined as reflected light auxiliary detection information for convenience of subsequent use.

[0176] S3665: Retrieve the reflected light auxiliary intensity value based on the reflected light auxiliary detection information.

[0177] The reflected light auxiliary intensity value refers to the intensity value corresponding to the illumination collected after the auxiliary illumination, and the reflected light auxiliary detection information includes the reflected light auxiliary intensity value.

[0178] The reflected light auxiliary intensity value is retrieved through the reflected light auxiliary detection information to facilitate subsequent use.

[0179] S3666: Generate reflected light auxiliary movement information based on the reflected light auxiliary intensity value, and use the reflected light auxiliary movement information as light intensity adjustment movement information.

[0180] The reflected light auxiliary movement information is adjustment information corresponding to when the reflected light detection module is controlled to move according to the reflected light auxiliary intensity value.

[0181] By analyzing the auxiliary intensity value of the reflected light, the auxiliary movement information of the reflected light is generated, and the auxiliary movement information of the reflected light is used as the light intensity adjustment movement information, thereby improving the accuracy of the obtained light intensity adjustment movement information.

[0182] In step S3666, in order to further ensure the rationality of the reflected light assisted movement information, it is necessary to perform further separate analysis and calculation on the reflected light assisted movement information, which is specifically described in detail through the following steps.

[0183] The method for generating reflected light assisted movement information comprises the following steps:

[0184] S36661: Determine the reference interval of the auxiliary intensity of the reflected light based on the light intensity adjustment output value.

[0185] The reflected light auxiliary intensity reference interval refers to the reference interval that the received light intensity needs to be within based on the light intensity adjustment output value. Different light intensity adjustment output values ​​correspond to different reflected light auxiliary intensity reference intervals.

[0186] By inputting the light intensity adjustment output value into a preset reflected light auxiliary intensity reference database to match and obtain the reflected light auxiliary intensity reference interval, subsequent use is facilitated.

[0187] The reflected light auxiliary intensity reference database pre-stores a comparison table of different light intensity adjustment output values ​​and corresponding reflected light auxiliary intensity reference intervals. The reflected light auxiliary intensity reference database is obtained after pre-input.

[0188] S36662: Determine whether the reflected light auxiliary intensity value is within the reflected light auxiliary intensity reference range. If so, execute S36663; if not, execute S36664.

[0189] Here, it is determined whether the auxiliary intensity value of the reflected light is within the reference interval of the auxiliary intensity of the reflected light, thereby determining whether to make an adjustment directly according to the light intensity deviation value.

[0190] S36663: Determine light intensity deviation movement information based on the light intensity deviation value, and use the light intensity deviation movement information as reflected light auxiliary movement information.

[0191] The light intensity deviation movement information refers to the adjustment information corresponding to the movement according to the light intensity deviation value. Different light intensity deviation values ​​correspond to different light intensity deviation movement information.

[0192] When the reflected light auxiliary intensity value is within the reflected light auxiliary intensity reference range, it means that the adjustment is made directly based on the light intensity deviation value. Therefore, the light intensity deviation value is input into the preset light intensity deviation movement database to match the light intensity deviation movement information, and the light intensity deviation movement information is used as the reflected light auxiliary movement information, thereby improving the accuracy of the obtained reflected light auxiliary movement information.

[0193] The light intensity deviation movement database pre-stores a comparison table of different light intensity deviation values ​​and corresponding light intensity deviation movement information, and the light intensity deviation movement database is obtained after pre-input.

[0194] S36664: Calculate the difference between the reflected light auxiliary intensity value and the reflected light auxiliary intensity reference interval and use it as the reflected light auxiliary intensity deviation value.

[0195] The reflected light auxiliary intensity deviation value refers to a deviation value corresponding to when the reflected light auxiliary intensity value has a deviation.

[0196] When the reflected light auxiliary intensity value is not within the reflected light auxiliary intensity reference range, it means that the adjustment is not directly based on the light intensity deviation value at this time. Therefore, the difference between the reflected light auxiliary intensity value and the reflected light auxiliary intensity reference range is calculated and used as the reflected light auxiliary intensity deviation value for convenience of subsequent use.

[0197] S36665: Determine auxiliary deviation movement information based on the auxiliary intensity deviation value of the reflected light, and use the auxiliary deviation movement information as the auxiliary movement information of the reflected light.

[0198] The auxiliary deviation movement information refers to the adjustment information corresponding to the movement according to the auxiliary intensity deviation value of the reflected light. Different auxiliary intensity deviation values ​​of the reflected light correspond to different auxiliary deviation movement information.

[0199] The auxiliary deviation movement information is obtained by inputting the reflected light auxiliary intensity deviation value into a preset auxiliary deviation movement database to match, and the auxiliary deviation movement information is used as the reflected light auxiliary movement information, thereby improving the accuracy of the obtained reflected light auxiliary movement information.

[0200] The auxiliary deviation movement database pre-stores a comparison table of different reflected light auxiliary intensity deviation values ​​and corresponding auxiliary deviation movement information, and the auxiliary deviation movement database is obtained through pre-input.

[0201] In step S37, in order to further ensure the rationality of the angle adjustment information, it is necessary to perform further separate analysis and calculation on the angle adjustment information, which is specifically described in detail through the following steps.

[0202] The method for generating angle adjustment information includes the following steps:

[0203] S371: Determine whether the reflection angle value falls within a preset angle reference range. If yes, execute S372; if not, execute S374.

[0204] The angle reference interval refers to the reference interval that the angle needs to be in during normal measurement, and the angle reference interval is obtained through pre-input.

[0205] By determining whether the reflection angle value falls within a preset angle reference interval, it is determined whether to make an adjustment directly based on the deviation generated by the reflection angle value.

[0206] S372: Determine an angle reference intermediate value based on the angle reference interval.

[0207] The angle reference middle value refers to the middle value between the two end values ​​of the angle reference interval.

[0208] When the reflection angle value falls within the preset angle reference range, it means that the adjustment is not made directly based on the deviation caused by the reflection angle value. Therefore, the average value between the two end values ​​of the angle reference range is calculated, and the calculated average value is used as the angle reference middle value for subsequent use.

[0209] S373: Generate reference adjustment information based on the reflection angle value and the angle reference intermediate value, and use the reference adjustment information as the angle adjustment information.

[0210] The benchmark adjustment information refers to the adjustment information corresponding to the benchmark adjustment.

[0211] By analyzing the reflection angle value and the intermediate value of the angle reference, reference adjustment information is generated, and the reference adjustment information is used as the angle adjustment information, thereby improving the accuracy of the acquired angle adjustment information.

[0212] For the specific steps of generating the reference adjustment information, refer to S3731 to S3738.

[0213] S374: Calculate the difference between the reflection angle value and the preset angle reference interval and use it as the reflection angle deviation value.

[0214] The reflection angle deviation value refers to a deviation value corresponding to when a reflection angle value has a deviation.

[0215] When the reflection angle value does not fall within the preset angle reference interval, it means that the adjustment is made directly based on the deviation generated by the reflection angle value. Therefore, the difference between the reflection angle value and the preset angle reference interval is calculated and used as the reflection angle deviation value for subsequent use.

[0216] S375: Determine an angle deviation distance adjustment value based on the reflection angle deviation value.

[0217] The angle deviation distance adjustment value refers to the movement value corresponding to the distance movement of the reflected light detection module according to the reflection angle deviation value. Different reflection angle deviation values ​​correspond to different angle deviation distance adjustment values.

[0218] By inputting the reflection angle deviation value into a preset angle deviation distance adjustment database to match and obtain the angle deviation distance adjustment value, subsequent use is facilitated.

[0219] The angle deviation distance adjustment database pre-stores a comparison table of different reflection angle deviation values ​​and corresponding angle deviation distance adjustment values, and the angle deviation distance adjustment database is obtained after pre-input.

[0220] S376: Determine reception adjustment information based on the angle deviation distance adjustment value, and use the reception adjustment information as angle adjustment information.

[0221] The received adjustment information refers to the adjustment information corresponding to controlling the distance movement of the reflected light detection module, and different angle deviation distance adjustment values ​​correspond to different received adjustment information.

[0222] The angle deviation distance adjustment value is input into a preset reception adjustment database to match and obtain reception adjustment information, and the reception adjustment information is used as the angle adjustment information, thereby improving the accuracy of the obtained angle adjustment information.

[0223] The receiving adjustment database pre-stores a comparison table of different angle deviation distance adjustment values ​​and corresponding receiving adjustment information, and the receiving adjustment database is obtained after pre-input.

[0224] In step S373 , in order to further ensure the rationality of the benchmark adjustment information, it is necessary to perform further separate analysis and calculation on the benchmark adjustment information, which is specifically described in detail through the following steps.

[0225] The method for generating benchmark adjustment information includes the following steps:

[0226] S3731: Calculate the difference between the reflection angle value and the angle reference middle value and use it as the angle middle deviation value.

[0227] The angle mid-deviation value refers to the difference between the reflection angle value and the angle reference mid-value.

[0228] The difference between the reflection angle value and the angle reference middle value is calculated and used as the angle middle deviation value for convenience in subsequent use.

[0229] S3732: Determine the intermediate deviation distance value based on the intermediate angle deviation value.

[0230] The intermediate deviation distance value refers to the distance value corresponding to the distance movement of the reflected light detection module when the intermediate deviation value of the angle is controlled. Different intermediate deviation values ​​of the angle correspond to different intermediate deviation distance values.

[0231] By inputting the angle intermediate deviation value into the preset intermediate deviation distance database to match the intermediate deviation distance value, it is convenient for subsequent use.

[0232] The intermediate deviation distance database pre-stores a comparison table of different angular intermediate deviation values ​​and corresponding intermediate deviation distance values, and the intermediate deviation distance database is obtained through pre-input.

[0233] S3733: Calculate the distance between the transmitting position point and the detecting position point and use it as the position distance value.

[0234] The position distance value refers to the distance value between the transmitting position point and the detecting position point.

[0235] By calculating the distance between the transmitting position point and the detecting position point and using it as the position distance value, it is convenient for subsequent use.

[0236] S3734: Determine an intermediate deviation distance reference value based on the position distance value.

[0237] The intermediate deviation distance reference value refers to the reference distance value corresponding to the distance movement of the reflected light detection module. Different position distance values ​​correspond to different intermediate deviation distance reference values.

[0238] By inputting the position distance value into the preset intermediate deviation distance reference database to match the intermediate deviation distance reference value, it is convenient for subsequent use.

[0239] The intermediate deviation distance reference database pre-stores a comparison table of different position distance values ​​and corresponding intermediate deviation distance reference values, and the intermediate deviation distance reference database is obtained through pre-input.

[0240] S3735: Determine whether the intermediate deviation distance value is less than the intermediate deviation distance reference value. If so, execute S3736; if not, execute S3737.

[0241] Wherein, whether only the light source module is controlled to move and adjust is determined by judging whether the intermediate deviation distance value is smaller than the intermediate deviation distance reference value.

[0242] S3736: Determine transmission adjustment information based on the intermediate deviation distance value, and use the transmission adjustment information as reference adjustment information.

[0243] The emission adjustment information refers to the adjustment information corresponding to the movement adjustment of the light source module. Different intermediate deviation distance values ​​correspond to different emission adjustment information.

[0244] When the intermediate deviation distance value is less than the intermediate deviation distance reference value, it means that only the light source module is controlled to move and adjust at this time. Therefore, the intermediate deviation distance value is input into the preset reflection adjustment database to match the emission adjustment information, and the emission adjustment information is used as the reference adjustment information, thereby improving the accuracy of the obtained reference adjustment information.

[0245] The reflection adjustment database pre-stores a comparison table of different intermediate deviation distance values ​​and corresponding transmission adjustment information, and the reflection adjustment database is obtained after pre-input.

[0246] S3737: Calculate the difference between the intermediate deviation distance value and the intermediate deviation distance reference value and use it as the intermediate deviation abnormal distance value.

[0247] The middle deviation abnormal distance value refers to the deviation value corresponding to when the middle deviation distance value has an abnormal deviation.

[0248] When the intermediate deviation distance value is not less than the intermediate deviation distance reference value, it means that the light source module and the reflected light detection module need to be controlled to move and adjust. Therefore, the difference between the intermediate deviation distance value and the intermediate deviation distance reference value is calculated and used as the intermediate deviation abnormal distance value for subsequent use.

[0249] S3738: Determine reception abnormality adjustment information based on the intermediate deviation abnormality distance value, and combine the reception abnormality adjustment information with the preset reflection initial adjustment information to form reference adjustment information.

[0250] The reception anomaly adjustment information refers to the adjustment information corresponding to the movement adjustment of the light source module based on the intermediate deviation anomaly distance value. Different intermediate deviation anomaly distance values ​​correspond to different reception anomaly adjustment information. The reflection initial adjustment information refers to the adjustment information corresponding to the initial adjustment of the reflected light detection module. This reflection initial adjustment information is obtained through pre-input.

[0251] The intermediate deviation abnormality distance value is input into a preset reception abnormality adjustment database to match the reception abnormality adjustment information, and the reception abnormality adjustment information is combined with the preset reflection initial adjustment information to form the benchmark adjustment information, thereby improving the accuracy of the obtained benchmark adjustment information.

[0252] The reception abnormality adjustment database pre-stores a comparison table of different intermediate deviation abnormality distance values ​​and corresponding reception abnormality adjustment information, and the reception abnormality adjustment database is obtained after pre-input.

[0253] In step S4, in order to further ensure the rationality of the reflected light selection information, it is necessary to perform further separate analysis and calculation on the reflected light selection information, which is specifically described in detail through the following steps.

[0254] Reference Figure 3 , the method for generating reflected light selection information includes the following steps:

[0255] S41: Retrieve an updated intensity value and an updated adjustment distance value based on the reflected light update information.

[0256] The updated intensity value refers to the intensity value corresponding to the updated illumination, and the updated adjusted distance value refers to the distance value between the reflected light detection module and the light source module after the update. The reflected light update information includes the updated intensity value, the updated position of the reflected light detection module, and the position of the light source module after the update.

[0257] The updated intensity value, the updated position of the reflected light detection module and the position of the light source module are retrieved through the reflected light update information, and then the distance between the updated position of the reflected light detection module and the position of the light source module is calculated as the updated adjustment distance value for subsequent use.

[0258] S42: Sorting from large to small based on the update strength values, and forming an update strength ranking value according to the sorting result.

[0259] The updated intensity ranking value refers to the ranking result value corresponding to the updated light intensity.

[0260] By sorting the update strength values ​​from large to small, and forming an update strength sorting value based on the sorting result, it is convenient for subsequent use.

[0261] S43: Calculate the difference between the updated adjustment distance values ​​of adjacent adjustments and use it as the adjacent adjustment distance deviation value.

[0262] The adjacent adjustment distance deviation value refers to the deviation value corresponding to the deviation of the distances between position adjustments performed at adjacent times.

[0263] By calculating the difference between the updated adjustment distance values ​​of adjacent adjustments and using it as the adjacent adjustment distance deviation value, it is convenient for subsequent use.

[0264] S44: Generate an updated change distance ranking value based on the adjacent adjustment distance deviation value.

[0265] The updated change distance ranking value refers to the ranking result value obtained by ranking the adjacent distance changes after the update.

[0266] By analyzing the adjacent adjusted distance deviation values, an updated distance ranking value is generated to facilitate subsequent use. The specific steps for generating the updated distance ranking value are shown in S441 to S446.

[0267] S45: Calculate the sum of the update strength ranking value and the update change distance ranking value and use it as the comprehensive ranking value.

[0268] The comprehensive ranking value refers to the comprehensive result value corresponding to the updated light intensity and the change distance.

[0269] By calculating the sum of the update strength ranking value and the update change distance ranking value and using it as a comprehensive ranking value, it is convenient for subsequent use.

[0270] S46: Sort the comprehensive ranking values ​​from large to small, and use the reflected light update information corresponding to the first-ranked comprehensive ranking value as the reflected light selection information.

[0271] The accuracy of the acquired reflected light selection information is improved by sorting the comprehensive ranking values ​​from large to small and using the reflected light update information corresponding to the first-ranked comprehensive ranking value as the reflected light selection information.

[0272] In step S44, in order to further ensure the rationality of the updated change distance ranking value, it is necessary to perform further separate analysis and calculation on the updated change distance ranking value, which is specifically described in detail through the following steps.

[0273] The method for generating the updated change distance ranking value includes the following steps:

[0274] S441: Retrieve adjustment type information based on the adjacent adjustment distance deviation value.

[0275] The adjustment type information refers to the type information corresponding to the reflected light detection module or the light source module that needs to be adjusted during the adjustment.

[0276] The module type corresponding to the adjustment is queried based on the adjacent adjustment distance deviation value and used as adjustment type information for convenience in subsequent use.

[0277] S442: Determine an adjustment type distance impact value based on the adjustment type information.

[0278] The adjustment type distance impact value refers to the degree of influence of the adjustment type on the adjacent adjustment distance deviation values. The adjustment type distance impact value is used to adjust the adjacent adjustment distance deviation values. Different adjustment type information corresponds to different adjustment type distance impact values.

[0279] The adjustment type information is input into a preset adjustment type distance impact database to obtain an adjustment type distance impact value for easy subsequent use.

[0280] The adjustment type distance impact database pre-stores a comparison table of different adjustment type information and corresponding adjustment type distance impact values, and the adjustment type distance impact database is obtained through pre-input.

[0281] S443: Calculate the product value between the adjustment category distance impact value and the adjacent adjustment distance deviation value and use it as the adjacent adjustment category distance value.

[0282] Among them, the adjacent adjustment single category distance value refers to the distance value corresponding to the adjustment of a single module. The product value between the adjustment category distance impact value and the adjacent adjustment distance deviation value is calculated and used as the adjacent adjustment single category distance value for convenience of subsequent use.

[0283] S444: Retrieve the category value based on the adjustment category information.

[0284] The type value refers to the value corresponding to the module being adjusted. The type value can be retrieved by adjusting the type information to facilitate subsequent use.

[0285] S445: Determine the adjacent adjusted comprehensive distance value based on the number of categories and the adjacent adjusted single category distance value.

[0286] Among them, the adjacent adjusted comprehensive distance value refers to the distance value corresponding to the adjacent adjusted single category distance value after comprehensive adjustment based on the category number value.

[0287] When the number of categories is only one, the adjacent adjusted single category distance value is directly used as the adjacent adjusted comprehensive distance value for easy subsequent use.

[0288] When the number of categories is not just one, the sum of the distance values ​​of each adjacent adjusted category is calculated and used as the adjacent adjusted comprehensive distance value for easy subsequent use.

[0289] S446: Sort the adjacent adjusted comprehensive distance values ​​from small to large, and form an updated change distance sort value based on the sorting result.

[0290] The accuracy of the obtained updated change distance ranking value is improved by sorting the adjacent adjusted comprehensive distance values ​​from small to large and forming the updated change distance ranking value according to the sorting result.

[0291] Based on the same inventive concept, an embodiment of the present invention provides a high-precision reflective film thickness measurement system, comprising:

[0292] An acquisition module is used to collect reflected light detection information, emission information, measurement time points, and measurement locations;

[0293] A memory storing a program for implementing the above-mentioned high-precision reflective film thickness measurement method;

[0294] The processor loads and executes the program stored in the memory.

[0295] Those skilled in the art will clearly understand that for the sake of convenience and brevity, the division of the above-mentioned functional modules is only used as an example for illustration. In actual applications, the above-mentioned functions can be assigned to different functional modules as needed, that is, the internal structure of the device can be divided into different functional modules to complete all or part of the functions described above. The specific working processes of the above-mentioned systems, devices, and units can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0296] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiment. All technical solutions based on the concept of the present invention are within the scope of protection of the present invention. It should be noted that for those skilled in the art, various improvements and modifications that do not depart from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A high-precision reflective film thickness measurement method, characterized in that: include: S1: Control the preset light source module to emit a measuring beam to the thin film material whose film thickness needs to be measured; S2: Collecting the reflected light detection information after the measuring light beam is irradiated to the thin film material; S3: generating position adjustment information in real time based on the reflected light detection information, and outputting the position adjustment information to a preset position adjustment module to control a preset reflected light detection module or a preset light source module to adjust the position, and recollecting the reflected light detection information and defining it as reflected light update information; S4: performing selection based on the reflected light update information to generate reflected light selection information; S5: performing ellipsometry analysis based on the reflected light selection information to form a film thickness result value, and outputting the film thickness result value; The method for generating the position adjustment information includes: S31: Collecting emission information; S32: Retrieving the emission light intensity value and emission position point based on the emission condition information; S33: Retrieving a detection position point and a reflected light intensity value based on the reflected light detection information; S34: Determine an intensity variation interval and a reflection angle value based on the emission position point and the detection position point; S35: determining a light intensity deviation value based on the emitted light intensity value, the reflected light intensity value, and the intensity variation interval; S36: generating light intensity deviation adjustment information based on the light intensity deviation value; S37: Generate angle adjustment information based on the reflection angle value; S38: Combining the light intensity deviation adjustment information with the angle adjustment information to form the position adjustment information; The method for generating the light intensity deviation adjustment information includes: S361: Collecting measurement time points and measurement locations; S362: Determine an appropriate time period based on the measurement location point; S363: Determine a time deviation value based on the measurement time point and the appropriate time period; S364: Determine a light intensity time reference deviation value based on the time deviation value; S365: Determine whether the light intensity deviation value is greater than the light intensity time reference deviation value; S366: If yes, generating light intensity adjustment movement information based on the light intensity deviation value and the time deviation value, and using the light intensity adjustment movement information as the light intensity deviation adjustment information; S367: If no, the difference between the light intensity deviation value and the light intensity time reference deviation value is used as the light intensity abnormality deviation value; S368: Determine light intensity abnormality movement information based on the light intensity abnormality deviation value, and use the light intensity abnormality movement information as the light intensity deviation adjustment information; The method for generating the angle adjustment information includes: S371: Determine whether the reflection angle value falls within a preset angle reference range; S372: If yes, determine an angle reference intermediate value based on the angle reference interval; S373: Generate benchmark adjustment information based on the reflection angle value and the angle benchmark intermediate value, and use the benchmark adjustment information as the angle adjustment information; S374: If not, calculating the difference between the reflection angle value and the preset angle reference interval and using it as the reflection angle deviation value; S375: Determine an angle deviation distance adjustment value based on the reflection angle deviation value; S376: Determine reception adjustment information based on the angle deviation distance adjustment value, and use the reception adjustment information as the angle adjustment information.

2. A high-precision reflective film thickness measurement method according to claim 1, characterized in that: The method for generating the light intensity adjustment movement information includes: S3661: Determine an initial light intensity output value based on the light intensity deviation value; S3662: Determine a light intensity time deviation adjustment value based on the time deviation value; S3663: Calculate the sum of the initial light intensity output value and the light intensity time deviation adjustment value and use it as the light intensity adjustment output value; S3664: Controlling a preset light source auxiliary test module based on the light intensity adjustment output value to output an auxiliary light beam and using the re-collected reflected light detection information as reflected light auxiliary detection information; S3665: Retrieve a reflected light auxiliary intensity value based on the reflected light auxiliary detection information; S3666: Generate reflected light auxiliary movement information based on the reflected light auxiliary intensity value, and use the reflected light auxiliary movement information as the light intensity adjustment movement information.

3. A high-precision reflective film thickness measurement method according to claim 2, characterized in that: The method for generating reflected light-assisted movement information includes: S36661: Determine a reference interval of auxiliary intensity of reflected light based on the light intensity adjustment output value; S36662: Determine whether the reflected light auxiliary intensity value is within the reflected light auxiliary intensity reference range; S36663: If yes, determining light intensity deviation movement information based on the light intensity deviation value, and using the light intensity deviation movement information as the reflected light auxiliary movement information; S36664: If no, calculate the difference between the reflected light auxiliary intensity value and the reflected light auxiliary intensity reference interval and use it as the reflected light auxiliary intensity deviation value; S36665: Determine auxiliary deviation movement information based on the auxiliary intensity deviation value of the reflected light, and use the auxiliary deviation movement information as the auxiliary movement information of the reflected light.

4. The high-precision reflective film thickness measurement method according to claim 1, characterized in that: The method for generating the benchmark adjustment information includes: S3731: Calculate the difference between the reflection angle value and the angle reference intermediate value and use it as the angle intermediate deviation value; S3732: Determine an intermediate deviation distance value based on the intermediate angle deviation value; S3733: Calculate the distance between the transmitting position point and the detecting position point and use it as the position distance value; S3734: Determine an intermediate deviation distance reference value based on the position distance value; S3735: Determine whether the intermediate deviation distance value is less than the intermediate deviation distance reference value; S3736: If yes, determine transmission adjustment information based on the intermediate deviation distance value, and use the transmission adjustment information as the reference adjustment information; S3737: If not, calculate the difference between the intermediate deviation distance value and the intermediate deviation distance reference value and use it as the intermediate deviation abnormal distance value; S3738: Determine reception abnormality adjustment information based on the intermediate deviation abnormality distance value, and combine the reception abnormality adjustment information with the preset reflection initial adjustment information to form the reference adjustment information.

5. The high-precision reflective film thickness measurement method according to claim 1, characterized in that: The method for generating the reflected light selection information includes: S41: Retrieving an updated intensity value and an updated adjustment distance value based on the reflected light update information; S42: sorting the update strength values ​​from large to small, and forming an update strength ranking value according to the sorting result; S43: Calculate the difference between the updated adjustment distance values ​​of adjacent adjustments and use it as the adjacent adjustment distance deviation value; S44: generating an updated change distance ranking value based on the adjacent adjustment distance deviation value; S45: Calculate the sum of the update strength ranking value and the update change distance ranking value and use it as the comprehensive ranking value; S46: Sorting is performed from large to small based on the comprehensive ranking values, and the reflected light update information corresponding to the first-ranked comprehensive ranking value is used as the reflected light selection information.

6. A high-precision reflective film thickness measurement method according to claim 5, characterized in that: The method for generating the updated change distance ranking value includes: S441: Retrieving adjustment type information based on the adjacent adjustment distance deviation value; S442: Determine an adjustment type distance impact value based on the adjustment type information; S443: Calculate the product of the adjustment type distance impact value and the adjacent adjustment distance deviation value and use it as the adjacent adjustment single type distance value; S444: Retrieve a value of the number of categories based on the adjustment category information; S445: Determine an adjacent adjusted comprehensive distance value based on the number of categories and the adjacent adjusted single category distance value; S446: Sort the adjacent adjusted comprehensive distance values ​​from small to large, and form the updated change distance sort value according to the sorting result.

7. A high-precision reflective film thickness measurement system, characterized in that: include: An acquisition module is used to collect reflected light detection information, emission information, measurement time points, and measurement locations; A memory storing a program for implementing a high-precision reflective film thickness measurement method according to any one of claims 1 to 6; The processor loads and executes the program stored in the memory.

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