Single crystal silicon differential pressure sensor function verification test equipment

Abstract

The present invention relates to the field of sensor testing technology, and specifically to functional verification test equipment for a single-crystal silicon differential pressure sensor, comprising a connection switching mechanism, a low-pressure pipe, and a high-pressure pipe. By connecting the low-pressure pipe and the high-pressure pipe to different pressure sources respectively, the high and low pressure inputs can be accurately controlled to meet the full-range test requirements of the differential pressure sensor. The connection switching mechanism can also simulate common pressure combinations such as high-pressure and low-pressure, low-pressure and high-pressure, double-high-pressure, and double-low-pressure in industrial sites, ensuring performance verification of the sensor in a real environment, and solving the problem that existing test devices cannot simulate real test environments and simulate multi-working condition test scenarios.

Description

Technical Field

[0001] The present invention relates to the technical field of sensor testing, in particular to single crystal silicon differential pressure sensor function verification testing equipment. Background Art

[0002] Single-crystal silicon differential pressure sensors are key pressure measurement components in industrial automation, environmental monitoring, aerospace, and other fields. Accurate and efficient performance verification and functional testing are crucial. In the current market environment, existing single-crystal silicon differential pressure sensor pressure testing platforms have significant limitations in their pressure application methods, severely restricting test efficiency and reliability.

[0003] Traditional testing platforms generally use a separate pressure source configuration, using a vacuum pump or vacuum tank to create a negative pressure environment and an air pump or compressor to generate positive pressure. This split design significantly increases system complexity and cost. During actual testing, when switching between positive and negative pressure, operators are forced to manually replace connected equipment. This process is not only time-consuming and labor-intensive, but also prone to measurement errors due to improper operation, negatively impacting the accuracy of test results.

[0004] More significantly, frequent equipment replacements and complex operational procedures significantly increase the risk of equipment failure. Frequent problems such as loose interfaces and leaking seals not only directly undermine the reliability of test results but can also cause irreversible damage to precision equipment like differential pressure transmitters. Furthermore, the long-term reliance on multiple independent devices working together has led to escalating maintenance costs and significantly increased downtime for maintenance, severely hindering productivity improvements and controlling operating costs.

[0005] Patent document announcement number CN118999898B discloses a pressure testing platform, including: a base and a pressure cylinder, the pressure cylinder is arranged on the right side of the top of the base, and air holes connected to its inner cavity are opened on the left and right sides of the top of the pressure cylinder, and pressure relief cylinders connected to its inner cavity are arranged on the left and right ends of the front side of the pressure cylinder, and a plurality of pressure relief holes connected to its inner cavity are opened along the circumferential direction on the left side of the outer wall of the pressure relief cylinder; one end of the air pipe is arranged on the outer wall of the air hole; and the mounting seat is arranged at the other end of the air pipe.

[0006] This test platform relies solely on piston-compressed air to generate pressure. However, actual industrial testing (such as differential pressure sensor calibration) typically requires precise high-pressure, low-pressure, and differential pressure inputs, and even requires switching between positive and negative pressures. Single-crystal silicon differential pressure sensors must be calibrated under various pressure combinations (such as high-pressure-low pressure, low-pressure-high pressure, dual-pressure, and dual-low pressure). However, this platform only provides unidirectional pressurization and lacks the flexibility to switch between high and low pressure sources, resulting in incomplete test coverage. Furthermore, sensor testing requires simulating dynamic conditions such as step pressures, cyclic pressures, and sudden pressure changes. The test platform utilizes piston compression, which limits the speed of pressure change: Relying on mechanical piston movement, the response is slow, making rapid pressure increase and decrease difficult. Pressure stability is poor: compressed air is susceptible to fluctuations due to temperature, leakage, and piston friction, making it impossible to provide constant high or low pressure. Bidirectional differential pressure testing, such as the need to alternately apply high and low pressures to the sensor's two ports (forward / reverse differential pressure testing), is also impossible. Summary of the Invention

[0007] In response to the problems existing in the existing technology, a single crystal silicon differential pressure sensor function verification test equipment is provided. By connecting the low-pressure pipe and the high-pressure pipe to different pressure sources respectively, the high and low pressure inputs can be accurately controlled to meet the full-range test requirements of the differential pressure sensor. Through the connection switching mechanism, it can simulate the common pressure combinations such as high-pressure and low-pressure, low-pressure and high-pressure, double high-pressure, and double low-pressure in industrial sites, ensuring the performance verification of the sensor in a real environment, solving the problem that the existing test equipment cannot simulate the real test environment and simulate multiple working condition test scenarios.

[0008] To solve the problems of the prior art, the present invention provides a functional verification test device for a single crystal silicon differential pressure sensor, comprising a connection switching mechanism, a low-pressure pipe and a high-pressure pipe; the connection switching mechanism is provided with a low-pressure input port, a high-pressure input port, a first output port and a second output port; the low-pressure pipe is connected to the low-pressure input port; the high-pressure pipe is connected to the high-pressure input port; wherein the first output port and the second output port are respectively used to connect the two ports of the single crystal silicon differential pressure sensor; a rotatable switching core is provided inside the connection switching mechanism, and the switching core is provided with a first channel group, a second channel group and a third channel group; the switching core has: a first working angle, so that the first channel group connects the low-pressure input port and the first output port, and connects the high-pressure input port and the second output port at the same time; a second working angle, so that the second channel group connects the low-pressure input port with the first output port and the second output port at the same time; a third working angle, so that the second channel group connects the high-pressure input port with the first output port and the second output port at the same time; a fourth working angle, so that the third channel group connects the low-pressure input port and the second output port, and connects the high-pressure input port with the first output port.

[0009] Preferably, it also includes a first pressure sensor and a second pressure sensor, the first pressure sensor is installed on the first output port, and is used to monitor in real time the pressure value output to one port of the single crystal silicon differential pressure sensor; the second pressure sensor is installed on the second output port, and is used to monitor in real time the pressure value output to the other port of the single crystal silicon differential pressure sensor.

[0010] Preferably, the first channel group of the switching core includes a first conductive channel and a second conductive channel that are independent of each other; the first conductive channel extends along the axial direction of the switching core, and its two ports are respectively connected to the low-voltage input port and the first output port; the second conductive channel is centrally symmetrically distributed with the first conductive channel, and its two ports are respectively connected to the high-voltage input port and the second output port.

[0011] Preferably, the second channel group includes a main communication channel and a branch blind hole, the main communication channel passes through the switching core along the axial direction of the switching core; the branch blind hole extends radially from the middle of the main communication channel to the outer end of the switching core; when the switching core is at the second working angle, the two ends of the main communication channel are respectively connected to the low-pressure input port and the first output port; the open end of the branch blind hole is connected to the second output port; when the switching core is at the third working angle, the two ends of the main communication channel are respectively connected to the high-pressure input port and the second output port; the open end of the branch blind hole is connected to the first output port.

[0012] Preferably, the third channel group includes two independent third conduction channels and a fourth conduction channel. When the switching core is at the fourth working angle, the two ends of the third conduction channel are respectively connected to the low-voltage input port and the second output port, and the two ends of the fourth conduction channel are respectively connected to the high-voltage input port and the first output port.

[0013] Preferably, the third conducting channel includes a first blind hole, a second blind hole and an arc-shaped connecting channel; the first blind hole, whose open end is connected to the low-pressure input port; the second blind hole, whose open end is connected to the second output port; the arc-shaped connecting channel is coaxially arranged along the circumferential surface of the switching core, and its two ends are respectively connected to the inner ends of the first blind hole and the second blind hole.

[0014] Preferably, the fourth conducting channel and the third conducting channel are centrally symmetrically distributed with the axis of the switching core as the axis of symmetry.

[0015] Preferably, one end of the switching core is provided with a switching shaft which passes through the housing of the switching mechanism and is rotatably connected thereto, and the testing device further comprises a driving assembly for driving the switching shaft to rotate.

[0016] Preferably, the drive assembly includes a worm gear, a worm and a servo motor, the worm gear is coaxially arranged on the switching shaft; the worm gear is rotatably arranged on the housing connected to the switching mechanism and meshes with the worm gear; the servo motor is transmission-connected to the worm gear.

[0017] Preferably, there are at least two communication switching mechanisms.

[0018] Compared with the prior art, the present invention has the following advantages:

[0019] This application can achieve precise control of high and low pressure inputs by connecting the low-pressure pipe and the high-pressure pipe to independent pressure sources respectively, thereby meeting the functional verification requirements of the single-crystal silicon differential pressure sensor within the full range. Multiple sets of channels are configured inside the connection switching mechanism, and can be freely switched between multiple working angles by rotating the switching core, realizing rapid switching of various typical working conditions including high pressure to low pressure, low pressure to high pressure, double high pressure, double low pressure, etc., with convenient operation and efficient switching. It is not only highly close to the complex application scenarios of industrial sites, but also effectively overcomes the problem that traditional test equipment cannot simulate actual working conditions. The equipment can complete a full-scale evaluation of key performance of the sensor such as stability, sensitivity and zero drift in forward, reverse and isobaric states without the need for frequent disassembly and connection, which greatly improves the integrity and accuracy of the test. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a stereoscopic diagram of the single crystal silicon differential pressure sensor function verification test equipment of the present invention under a first viewing angle.

[0021] Figure 2 It is a stereoscopic diagram of the single crystal silicon differential pressure sensor function verification test equipment of the present invention under a second viewing angle.

[0022] Figure 3 It is a three-dimensional diagram of the driving mechanism in the single crystal silicon differential pressure sensor function verification test equipment of the present invention.

[0023] Figure 4 It is a stereoscopic diagram of the connection switching mechanism in the single crystal silicon differential pressure sensor function verification test equipment of the present invention under a first viewing angle.

[0024] Figure 5 It is a stereoscopic diagram of the connection switching mechanism in the single crystal silicon differential pressure sensor function verification test equipment of the present invention under a second viewing angle.

[0025] Figure 6 It is a three-dimensional exploded view of the connection switching mechanism in the single crystal silicon differential pressure sensor function verification test equipment of the present invention.

[0026] Figure 7 It is a three-dimensional diagram of the switching core in the single crystal silicon differential pressure sensor function verification test equipment of the present invention.

[0027] Figure 8 It is a schematic diagram of the first channel group in the single crystal silicon differential pressure sensor function verification test equipment of the present invention.

[0028] Figure 9 It is a schematic diagram of the second channel group in the single crystal silicon differential pressure sensor function verification test equipment of the present invention.

[0029] Figure 10 It is a three-dimensional diagram of a fixture in the single crystal silicon differential pressure sensor function verification test equipment of the present invention.

[0030] The numbers in the figure are: 1. connection switching mechanism; 11. low-pressure input port; 12. high-pressure input port; 13. first output port; 14. second output port; 15. switching core; 151. first conduction channel; 152. second conduction channel; 153. main conduction channel; 154. branch blind hole; 1551. first blind hole; 1552. second blind hole; 1553. arc-shaped connecting channel; 156. fourth conduction channel; 157. switching shaft; 2. low-pressure pipe; 3. high-pressure pipe; 4. bottom plate; 41. fixture; 42. support plate; 421. push plate; 43. connecting rod; 44. bidirectional screw; 5. first pressure sensor; 6. second pressure sensor; 7. drive assembly; 71. worm gear; 72. worm; 73. servo motor; 8. single crystal silicon differential pressure sensor. DETAILED DESCRIPTION

[0031] In order to further understand the features, technical means, specific objectives and functions achieved by the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] like Figure 1 、 Figure 2 、 Figure 4 、 Figure 5 and Figure 6 As shown, the functional verification test equipment of the single crystal silicon differential pressure sensor 8 includes a connection switching mechanism 1, a low-pressure pipe 2 and a high-pressure pipe 3; the connection switching mechanism 1 is provided with a low-pressure input port 11, a high-pressure input port 12, a first output port 13 and a second output port 14; the low-pressure pipe 2 is connected to the low-pressure input port 11; the high-pressure pipe 3 is connected to the high-pressure input port 12; wherein, the first output port 13 and the second output port 14 are respectively used to connect the two ports of the single crystal silicon differential pressure sensor 8; the interior of the connection switching mechanism 1 is provided with a rotatable switching core 15, and the switching core 15 is provided with a first channel group, a second channel group and a second channel group. channel group and the third channel group; the switching core 15 has: a first working angle, which makes the first channel group connect the low-pressure input port 11 with the first output port 13, and at the same time connect the high-pressure input port 12 with the second output port 14; a second working angle, which makes the second channel group connect the low-pressure input port 11 with the first output port 13 and the second output port 14 at the same time; a third working angle, which makes the second channel group connect the high-pressure input port 12 with the first output port 13 and the second output port 14 at the same time; a fourth working angle, which makes the third channel group connect the low-pressure input port 11 with the second output port 14, and at the same time connect the high-pressure input port 12 with the first output port 13.

[0033] like Figure 1 and Figure 10 As shown, the test equipment also includes a base plate 4, the connection switching mechanism 1, the low-pressure pipe 2 and the high-pressure pipe 3 are all arranged on the top of the base plate 4, and two clamps 41 that can move toward each other are provided on the base plate 4, and a support plate 42 is provided between the two clamps 41. The single crystal silicon pressure differential sensor 8 is placed on the support plate 42, and the support plate 42 is provided with a push plate 421 that can abut against the back side of the single crystal silicon pressure differential sensor 8. A connecting rod 43 is provided between the support plate 42 and the clamp 41. When the two clamps 41 move toward each other, the support plate 42 supports the single crystal silicon pressure differential sensor 8 and pushes it to dock with the connection switching mechanism 1.

[0034] A bidirectional screw rod 44 is further provided on the bottom plate 4 , and the bidirectional screw rod 44 passes through the two clamps 41 and is threadedly connected thereto. The bidirectional screw rod 44 is rotatable, and the two clamps 41 can move toward each other.

[0035] The low-pressure pipe 2 can be connected to a low-pressure gas source, and the high-pressure pipe 3 can be connected to a high-pressure gas source.

[0036] The connection switching mechanism 1 is used to achieve flexible connection between different air pressure input paths and the two ports of the sensor, including the following: low-pressure input port 11: for connecting to a low-pressure air source; high-pressure input port 12: for connecting to a high-pressure air source; first output port 13 and second output port 14: respectively connected to the two test ports of the sensor; switching core 15: located inside the mechanism, with a rotation function, and can form multiple channel connection states at different angles; switching core 15 is provided with three groups of channels, which realize the following functions in conjunction with different working angles:

[0037] First working angle: the first channel group is connected: the low-pressure input port 11 and the first output port 13; at the same time, the high-pressure input port 12 is connected to the second output port 14; corresponding to the sensor forward pressure difference test.

[0038] Second working angle: The second channel group is connected: the low-pressure input port 11 is connected to the first output port 13 and the second output port 14 at the same time; zero point calibration under isobaric state or leakage test under low pressure is achieved.

[0039] The third working angle: the second channel group is connected: the high-voltage input port 12 is connected to the first output port 13 and the second output port 14 at the same time; stability or destructive testing under high pressure and equal pressure is achieved.

[0040] Fourth working angle: the third channel group is connected: the high-pressure input port 12 is connected to the first output port 13; the low-pressure input port 11 is connected to the second output port; corresponding to the sensor reverse pressure difference test.

[0041] like Figure 1 and Figure 5As shown, it also includes a first pressure sensor 5 and a second pressure sensor 6. The first pressure sensor 5 is installed on the first output port 13 and is used to monitor the pressure value output to one port of the single crystal silicon differential pressure sensor 8 in real time; the second pressure sensor 6 is installed on the second output port 14 and is used to monitor the pressure value output to the other port of the single crystal silicon differential pressure sensor 8 in real time.

[0042] The test equipment also includes a first pressure sensor 5 and a second pressure sensor 6, which monitor the pressure status at the gas circuit output in real time, enhancing the accuracy and safety of the test process. The first pressure sensor 5, mounted on the first output port 13, collects and provides real-time feedback on the actual pressure applied to one side of the single-crystal silicon differential pressure sensor 8. The second pressure sensor 6, mounted on the second output port 14, monitors the pressure signal received at the other sensor port, ensuring simultaneous collection and comparison of pressure data at both ends.

[0043] like Figure 7 and Figure 8 The first channel group of the switching core 15 shown includes a first conductive channel 151 and a second conductive channel 152 that are independent of each other; the first conductive channel 151 extends along the axial direction of the switching core 15, and its two ports are respectively connected to the low-pressure input port 11 and the first output port 13; the second conductive channel 152 is centrally symmetrically distributed with the first conductive channel 151, and its two ports are respectively connected to the high-pressure input port 12 and the second output port 14.

[0044] When the switching core 15 rotates to the first working position, the first conducting channel 151 and the second conducting channel 152 synchronously form a bidirectional independent air path.

[0045] The first channel group of the switching core 15 consists of a first conductive channel 151 and a second conductive channel 152, which are independent of each other. They are used to establish two mutually non-interfering air paths in the first operating position, enabling precise application of different pressure conditions at both ends of the sensor. The first conductive channel 151 is arranged axially along the switching core 15, with its ends precisely connected to the low-pressure input port 11 and the first output port 13, respectively, forming a pathway from the low-pressure source to one end of the sensor. The second conductive channel 152 is arranged centrally and symmetrically within the switching core 15, forming a mirror image of the first conductive channel 151. Its ends connect to the high-pressure input port 12 and the second output port 14, respectively, forming another independent high-pressure air path.

[0046] When the switching core 15 rotates to the first working angle, the first conductive channel 151 and the second conductive channel 152 are connected to the low-pressure and high-pressure input sources respectively, and are synchronously connected to the two test ports of the single-crystal silicon pressure differential sensor 8, thereby establishing a pair of stable bidirectional independent pressure differential input channels without gas crosstalk or interference.

[0047] like Figure 9 As shown, the second channel group includes a main communication channel 153 and a branch blind hole 154. The main communication channel 153 penetrates the switching core 15 along the axial direction of the switching core 15; the branch blind hole 154 radially extends from the middle of the main communication channel 153 to the outer end of the switching core 15; when the switching core 15 is at the second working angle, the two ends of the main communication channel 153 are respectively connected to the low-pressure input port 11 and the first output port 13; the open end of the branch blind hole 154 is connected to the second output port 14; when the switching core 15 is at the third working angle, the two ends of the main communication channel 153 are respectively connected to the high-pressure input port 12 and the second output port 14; the open end of the branch blind hole 154 is connected to the first output port 13.

[0048] The second channel group, consisting of a main channel 153 and branch blind holes 154, is used to switch pressure paths under various typical operating conditions, expanding the functional boundaries of the test equipment. The main channel 153 runs axially along the switching core 15, connecting the high-pressure or low-pressure input port 11 to the corresponding output port at different operating angles. The branch blind holes 154 extend radially from the center of the main channel 153 and terminate in a closed structure, with only an opening near the outer wall of the switching core 15 to facilitate connection with external channels at specific angles.

[0049] When the switch core 15 rotates to the second working angle, the two ends of the main passage 153 are connected to the low-pressure input port 11 and the first output port 13 in sequence, forming a one-way low-pressure passage; at this time, the open end of the branch blind hole 154 is simultaneously connected to the second output port 14, so that the two output ports are respectively in a low-pressure and open normal pressure state, which can be used to simulate the working condition of low pressure at both ends. When the switch core 15 is at the third working angle, the two ends of the main passage 153 are switched to connect to the high-pressure input port 12 and the second output port 14, forming a high-pressure gas circuit. At the same time, the open end of the branch blind hole 154 is switched to the first output port 13, so that both output ends can be driven by a high-pressure source, adapting to the testing requirements under dual high-pressure conditions. Through the flexible combination of this group of structures, the test equipment can complete a comprehensive simulation of the single-crystal silicon differential pressure sensor 8 under low-pressure and high-pressure environments at both ends without replacing the pipeline or making complex adjustments, greatly improving the test efficiency and working condition coverage capabilities.

[0050] like Figure 6 As shown, the third channel group includes two independent third conduction channels and a fourth conduction channel 156. When the switching core 15 is at the fourth working angle, the two ends of the third conduction channel are respectively connected to the low-voltage input port 11 and the second output port 14, and the two ends of the fourth conduction channel 156 are respectively connected to the high-voltage input port 12 and the first output port 13.

[0051] The third channel group is composed of two conductive channels with independent structures and complementary functions, namely the third conductive channel and the fourth conductive channel 156, which are intended to achieve cross-output of low-pressure and high-pressure gas circuits, further expand the differential pressure loading method, and meet the needs of staggered pressure differential input in specific test scenarios.

[0052] Structurally, the third and fourth conduction channels 156 are spatially separated within the switching core 15, extending along different paths to ensure they do not interfere with each other's functions. When the switching core 15 is rotated to the fourth operating angle, the ends of the third conduction channel precisely connect the low-pressure input port 11 with the second output port 14, establishing an independent gas path from the low-pressure source to the second port of the single-crystal silicon differential pressure sensor 8. Simultaneously, the ends of the fourth conduction channel 156 connect to the high-pressure input port 12 and the first output port 13, respectively, forming another independent path from the high-pressure source to the first port of the sensor. The third and fourth conduction channels achieve "cross-docking" between the gas source and the output port, that is, the low-pressure input is directed to the second port, and the high-pressure input is directed to the first port.

[0053] The introduction of this staggered connection method not only enriches the differential pressure test mode, but also enables the test system to simulate the performance response of the sensor under reverse loading of positive and negative pressure differentials. It is particularly suitable for high-precision detection tasks such as dynamic calibration, zero offset evaluation, or forward and reverse hysteresis characteristic analysis. By setting up the third channel group, the test equipment has achieved high integration, multi-channel free switching, and reverse pressure differential application functions in structure, significantly improving the system's adaptability and test plan flexibility.

[0054] like Figure 6 and Figure 7 As shown, the third conducting channel includes a first blind hole 1551, a second blind hole 1552 and an arc-shaped connecting channel 1553; the first blind hole 1551, whose open end is connected to the low-pressure input port 11; the second blind hole 1552, whose open end is connected to the second output port 14; the arc-shaped connecting channel 1553 is coaxially arranged along the circumferential surface of the switching core 15, and its two ends are respectively connected to the inner ends of the first blind hole and the second blind hole.

[0055] The third conducting channel is composed of a first blind hole 1551, a second blind hole 1552 and an arc-shaped connecting channel 1553. Its structural design combines axial input and radial diversion, aiming to achieve a closed gas passage from a low-pressure source to the second output port 14 when the switching core 15 rotates to a specific angle, thereby meeting the test requirements under reverse pressure differential loading and asymmetric working conditions.

[0056] The first blind hole 1551 is arranged axially along the switching core 15 , with its open end extending outward and directly connected to the low-pressure input port 11 ; the inner end of the blind hole is closed and communicated with the interior of the switching core 15 for introducing low-pressure gas.

[0057] The second blind hole 1552 is also an axial structure, and its open end is connected to the second output port 14, corresponding to the second test port of the sensor; similar to the first blind hole 1551, the inner end of the second blind hole 1552 is closed and connected to the air guide structure inside the switching core 15.

[0058] The arc-shaped connecting channel 1553 bridges the gap between the two. It is coaxially embedded along the circumference of the switching core 15 and arranged in an arc shape. One end connects to the inner end of the first blind hole 1551, and the other end connects to the inner end of the second blind hole 1552. This channel not only bypasses the structural space restrictions imposed by the axial passage, but also effectively avoids the interference problem caused by the structural layout of traditional straight-through channels.

[0059] When the switching core 15 rotates to a specified working angle (such as the fourth working angle), the first blind hole 1551 is connected to the low-pressure source through its open end, and the gas flows to the second blind hole 1552 through the arc-shaped connecting channel 1553, and is then guided to the second output port 14 through its open end, thereby forming a closed gas path from the low-pressure input port 11 to the output port.

[0060] like Figure 6 and Figure 7 As shown, the fourth conducting channel 156 and the third conducting channel are centrally symmetrically distributed with the axis of the switching core 15 as the symmetry axis.

[0061] The fourth conducting channel 156 and the third conducting channel are respectively located on opposite sides of the switching core 15 and are equidistantly arranged around its axis, ensuring that when the switching core 15 rotates to any working angle, the two sets of conducting channels can achieve synchronous alignment and non-interference fluid switching operations.

[0062] like Figure 3 As shown, one end of the switching core 15 is provided with a switching shaft 157 that penetrates the housing of the switching mechanism 1 and is rotatably connected thereto. The testing device also includes a driving assembly 7 for driving the switching shaft 157 to rotate.

[0063] The switching shaft 157 is located at one end of the switching core 15, axially extending through the entire switching mechanism housing and rotatably engaged with the housing via bearings or sealed connectors. This structure ensures airtightness while allowing the switching core 15 to rotate at multiple angles around its axis, thereby activating the desired channel. The test equipment is also equipped with a drive assembly 7 for rotating the switching shaft 157, thus establishing a closed-loop, automated gas channel switching system.

[0064] like Figure 3As shown, the drive assembly 7 includes a worm gear 71, a worm 72 and a servo motor 73. The worm gear 71 is coaxially arranged on the switching shaft 157; the worm 72 is rotatably arranged on the housing connected to the switching mechanism 1 and engages with the worm gear 71; the servo motor 73 is transmission-connected to the worm 72.

[0065] The worm gear 71 is coaxially mounted on the switching shaft 157 and meshes with the worm 72. When the servo motor 73 is activated, it rotates the worm 72, which in turn transmits power to the worm gear 71, thereby driving the synchronous rotation of the switching shaft 157. Because the worm gear 71 is fixedly connected to the switching shaft 157, the rotation angle precisely corresponds to the angular change of the switching core 15.

[0066] This worm gear 71 and worm 72 transmission structure has a significant deceleration effect, converting the high-speed, low-torque output of the servo motor 73 into a low-speed, high-torque motion, greatly improving control accuracy and torque output during the switching process. Furthermore, this structure exhibits excellent self-locking properties, ensuring that the system maintains its current position even in a power outage, preventing accidental rotation of the switching core 15 due to external forces or reverse air pressure, thereby enhancing system safety.

[0067] like Figure 1 and Figure 2 As shown, there are at least two connection switching mechanisms 1.

[0068] By providing a plurality of connection switching mechanisms 1 , a plurality of single crystal silicon differential pressure sensors 8 can be tested simultaneously.

[0069] The above embodiments merely represent one or more embodiments of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of protection of the present invention. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present invention, and such modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the appended claims.

Claims

1. Single crystal silicon differential pressure sensor function verification test equipment, characterized in that: include: A connection switching mechanism is provided with a low-pressure input port, a high-pressure input port, a first output port, and a second output port, wherein the low-pressure input port is connected to a low-pressure pipe, and the high-pressure input port is connected to a high-pressure pipe; Wherein, the first output port and the second output port are respectively used to connect to two ports of a single crystal silicon differential pressure sensor; A rotatable switching core is provided inside the connection switching mechanism, and a first channel group, a second channel group and a third channel group are provided on the switching core; The switching core has: At the first working angle, the first channel group is connected to the low-pressure input port and the first output port, and at the same time connected to the high-pressure input port and the second output port; The second working angle enables the second channel group to connect the low-pressure input port with the first output port and the second output port at the same time; The third working angle enables the second channel group to connect the high-voltage input port with the first output port and the second output port at the same time; The fourth working angle connects the third channel group to the low-pressure input port and the second output port, and connects the high-pressure input port and the first output port at the same time; The first channel group of the switching core includes a first conductive channel and a second conductive channel that are independent of each other; The first conducting channel extends along the axial direction of the switching core, and its two ports are connected to the low-voltage input port and the first output port respectively; The second conducting channel is centrally symmetrically distributed with respect to the first conducting channel, and its two ports are connected to the high voltage input port and the second output port respectively; The second channel group includes: A main communication channel, passing through the switching core along the axial direction of the switching core; a branch blind hole, radially extending from the middle of the main flow channel to the outer end of the switching core; When the switching core is at the second working angle, the two ends of the main passage are connected to the low-pressure input port and the first output port respectively; the open end of the branch blind hole is connected to the second output port; When the switching core is at the third working angle, the two ends of the main passage are connected to the high-voltage input port and the second output port respectively; the open end of the branch blind hole is connected to the first output port; The third channel group includes two independent third conductive channels and a fourth conductive channel. When the switching core is at the fourth working angle, the two ends of the third conductive channel are connected to the low-voltage input port and the second output port, respectively, and the two ends of the fourth conductive channel are connected to the high-voltage input port and the first output port, respectively. The third conduction channel includes: a first blind hole, the opening end of which is connected to the low-pressure input port; a second blind hole, an open end of which is connected to the second output port; The arc-shaped communication channel is coaxially arranged along the circumferential surface of the switching core, and its two ends are respectively connected to the inner ends of the first blind hole and the second blind hole.

2. The single crystal silicon differential pressure sensor function verification test equipment according to claim 1, characterized in that: Also includes: a first pressure sensor, mounted on the first output port, for real-time monitoring of the pressure value output to one port of the single crystal silicon differential pressure sensor; The second pressure sensor is installed on the second output port and is used to monitor the pressure value output to the other port of the single crystal silicon differential pressure sensor in real time.

3. The single crystal silicon differential pressure sensor function verification test equipment according to claim 1, characterized in that: The fourth conducting channel and the third conducting channel are centrally symmetrically distributed with the axis of the switching core as the symmetry axis.

4. The single crystal silicon differential pressure sensor function verification test equipment according to claim 1 or 2, characterized in that: One end of the switching core is provided with a switching shaft which penetrates the housing of the switching mechanism and is rotatably connected thereto. The testing device also includes a driving component for driving the switching shaft to rotate.

5. The single crystal silicon differential pressure sensor function verification test equipment according to claim 4, characterized in that: The drive components include: A worm gear is coaxially arranged on the switching shaft; a worm, rotatably disposed on a housing of the communication switching mechanism and meshing with the worm wheel; Servo motor, connected with worm drive.

6. The single crystal silicon differential pressure sensor function verification test equipment according to claim 1 or 2, characterized in that: There are at least two connection switching mechanisms.

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