Precise adjusting device for optical detection platform

Abstract

The invention relates to a precision adjusting device for an optical detection platform, the precision adjusting device comprises a detection platform, a mounting rack, a coarse adjusting structure and a fine adjusting structure, the fine adjusting structure comprises an eccentric wheel, a fine adjusting frame and a motor, the shaft ends of the left side and the right side of the eccentric wheel are rotatably connected to the mounting rack, and the coarse adjusting structure comprises a lead screw, a lead screw nut and a driving part; the top of the lead screw is rotationally connected to the mounting frame; the lead screw nut is fixed on the detection table; high-precision displacement of the fine adjustment frame in the longitudinal stroke is achieved by combining the fine adjustment structure and the coarse adjustment structure, during coarse adjustment, the motor rotates forwards to drive the eccentric wheel to rotate, the driving piece is connected with the fine adjustment structure at the moment to drive the lead screw to rotate, and due to the fact that the lead screw nut is fixed to the mounting frame, the precision of the fine adjustment frame is improved. The lead screw drives the whole mounting frame to generate axial displacement, the motor rotates reversely when the mounting frame moves to a certain degree on the fine adjustment frame, at the moment, the driving piece is separated from the fine adjustment structure, and the fine adjustment frame enables the mounting face to have tiny displacement along with rotation of the eccentric shaft.

Description

Technical Field

[0001] The present application relates to the technical field of optical detection, and in particular to a precision adjustment device for an optical detection platform. Background Art

[0002] The optical inspection platform is a critical foundational support device for mounting the optical inspection host and test specimens. Its primary function is to achieve center of gravity stability and posture balance during the inspection process. In optical systems, the alignment accuracy of optical components directly affects system performance. Therefore, the optical inspection platform requires millimeter or even nanometer-level adjustment of its height travel to ensure precise alignment of the individual optical components, reduce optical path deviations, and thus improve system stability and measurement accuracy. For example, laser interferometers using interferometry in optical inspection instruments are extremely sensitive to optical path differences. Slight changes in height can cause changes in the optical path, which in turn affects the position and shape of interference fringes. Insufficient adjustment accuracy can lead to measurement errors. Existing technologies often use optical adjustment mounts or five-dimensional adjustment mounts to adjust the height of optical inspection platforms, but both require manual adjustment. Existing technologies can also achieve high-precision adjustment by varying the degree of screw tightening and relying on small deformations of the openings of rigid objects. However, these two methods only achieve micrometer-level adjustment accuracy, which is not high enough, and the adjustable travel is extremely short, making operation very inconvenient.

[0003] Chinese patent application number 202321092276.8, filed May 9, 2023, discloses a position-adjustable optical inspection platform. By providing a lifting drive assembly, a motor drives the rotating shaft, which in turn drives the disc holder. The positioning block also rotates, while sliding in the center of the positioning slot, driving the limit slide bar to rise, which then slides in the center of the slide holder, raising the placement platform. This patent only allows for wide-range height adjustment, and cannot adjust travel within millimeters, micrometers, or even nanometers.

[0004] Regarding the above-mentioned related technologies, the inventors believe that there is a defect in that the adjustment accuracy of the existing technologies is low and cannot reach the nanometer level. Summary of the Invention

[0005] In order to solve the above technical problems, the present application provides a precision adjustment device for an optical detection platform.

[0006] This application provides a precision adjustment device for an optical detection platform, which adopts the following technical solution: A precision adjustment device for an optical inspection platform comprises an inspection platform, a mounting frame is provided above the inspection platform, a coarse adjustment structure is provided between the inspection platform and the mounting frame, a fine adjustment structure is provided on the mounting frame, the fine adjustment structure comprises an eccentric wheel, a fine adjustment frame sleeved on the outer wall of the eccentric wheel and a motor for driving the eccentric wheel to rotate, the motor is fixed to the mounting frame, the shaft ends on the left and right sides of the eccentric wheel are respectively rotatably connected to the mounting frame, the coarse adjustment structure comprises a lead screw, a lead screw nut screwed on the outer wall of the lead screw and a driving member for driving the lead screw to rotate, the top of the lead screw is rotatably connected to the mounting frame, and the bottom extends to the gap in the middle of the inspection platform, and the lead screw nut is fixed on the inspection platform, and the driving member is connected to the fine adjustment structure on a first rotation trajectory.

[0007] By adopting the above technical solution, which includes two parts, coarse adjustment and fine adjustment, it mainly uses the elastic deformation of the material to achieve nanometer-level high-precision adjustment. The fine adjustment part is a periodic movement. The motor drives the eccentric shaft to rotate one circle. The fine adjustment frame will cause a slight displacement of the mounting surface as the eccentric shaft rotates. The motor and reducer first drive the coarse adjustment and fine adjustment parts to move together. When the adjustment reaches a certain degree, the motor rotates in the opposite direction, and the coarse adjustment part remains stationary, relying on structural deformation to achieve the final fine adjustment.

[0008] Preferably, the fine-tuning structure also includes a first gear, a double bevel gear and a transmission shaft connected to the first gear, the output shaft of the motor is connected to the reducer, the output shaft of the reducer is connected to the transmission shaft through a coupling, the first gear is engaged with the straight tooth part of the double bevel gear, and the double bevel gear is connected to the shaft end of the eccentric wheel.

[0009] By adopting the above technical solution, the influence of motor vibration on the fine adjustment link can be reduced by using the motor to indirectly drive the eccentric wheel through the first gear and the double bevel gear.

[0010] Preferably, the coarse adjustment structure also includes a second gear sleeved outside the screw and a coarse adjustment plate connected between the detection platform and the mounting frame. The second gear is arranged above the screw nut and is connected to the screw through a pin, and the second gear is correspondingly connected to the driving member.

[0011] By adopting the above technical solution, a coarse adjustment plate is provided between the detection platform and the mounting frame to limit the moving distance of the mounting frame, and its upward movement is converted into elastic deformation, so that the moving distance can reach the micrometer or nanometer level.

[0012] Preferably, the driving member includes a third gear meshing with the bevel tooth portion of the double bevel gear and perpendicular to it, a fine-tuning wheel connected to the third gear through a connecting shaft, a coarse-tuning wheel arranged below the fine-tuning wheel, and a fourth gear connected to the coarse-tuning wheel through a shaft, the fourth gear meshing with the second gear, a gap is provided between the fine-tuning wheel and the coarse-tuning wheel, and a gear tooth is provided on the opposite surfaces of the fine-tuning wheel and the coarse-tuning wheel, the height of the gear tooth is greater than half of the height of the gap, and the connecting shaft and the shaft are both rotatably connected to the mounting frame through bearings.

[0013] By adopting the above technical solution, the separation of coarse adjustment and fine adjustment can be achieved by using two fine adjustment wheels and coarse adjustment wheels with a gap. When the motor rotates forward, the fine adjustment wheel is driven to rotate by the double bevel gear and the third gear. During the rotation, the teeth on its bottom end face contact with the teeth on the coarse adjustment wheel, thereby driving the coarse adjustment wheel to rotate and achieve coarse adjustment. When the motor is reversed, it drives the fine adjustment wheel to rotate half a circle or more. The two teeth will not contact, so that the lead screw will not rotate, and only the eccentric wheel will rotate, thereby achieving fine adjustment.

[0014] Preferably, a microwave displacement sensor is provided on the mounting frame, the sensor head end of the microwave displacement sensor corresponds to the side wall of the fine-tuning frame, and is used to detect the displacement of the fine-tuning frame. An optical torque meter is provided on the transmission shaft to measure the torque change of the transmission shaft, and the microwave displacement sensor, optical torque meter and motor are all electrically connected to an external controller.

[0015] By adopting the above technical solution, a microwave displacement sensor and an optical torque measuring instrument are set to calculate the displacement of the fine adjustment frame respectively, so as to determine the switching timing between coarse adjustment and fine adjustment.

[0016] Preferably, one side shaft section of the eccentric wheel is rotatably connected to a rotating shaft, the rotating shaft is connected to the inner wall of the double bevel gear, a ratchet is sleeved on the outer wall of the rotating shaft close to the eccentric wheel, a turntable is sleeved on the outer wall of the eccentric wheel close to the rotating shaft, a connecting shaft is provided on the side of the turntable opposite to the ratchet, a pawl is rotatably connected to the connecting shaft, the pawl cooperates with the ratchet, and the rotation direction of the ratchet is consistent with the forward rotation direction of the motor.

[0017] By adopting the above technical solution, the rotation timing of the eccentric wheel can be controlled by using the ratchet and the pawl. The rotation direction of the ratchet is consistent with the forward rotation direction of the motor. Therefore, during coarse adjustment, the ratchet rotates with the double bevel gear and the eccentric wheel does not rotate. During fine adjustment, the pawl clamps the ratchet, and the ratchet and the pawl are fixed. At this time, the reverse rotation of the double bevel gear can drive the eccentric wheel to rotate, thereby achieving fine adjustment of the fine adjustment frame.

[0018] Preferably, a limit structure is provided between the mounting frame and the fine-adjusting frame, and the limit structure includes a main spring sheet and a secondary spring sheet arranged parallel to and spaced apart from each other, a preload adjustment assembly connected to one end of the main spring sheet, a boss provided on the lower side of the secondary spring sheet, a trigger lever provided on the lower side of the boss, and a limit switch provided on the lower side of the trigger lever. One end of the main spring sheet facing away from the preload adjustment assembly is connected to the bottom end surface of the fine-adjusting frame, one end of the secondary spring sheet close to the boss is a free end, and the other end is fixed end, and is mounted on the mounting frame through a base, the free end of the secondary spring sheet is provided below the position where the main spring sheet is bent and deformed by the upward pulling force, the left end of the top surface of the boss is opposite to the free end of the secondary spring sheet, and the left end of the bottom surface is opposite to the right end of a lever arm of the trigger lever, and the other lever arm contacts the limit switch when it moves downward, and the limit switch is connected to the motor, and the boss and the trigger lever are both fixed to the mounting frame.

[0019] By adopting the above technical solution and the design of the main spring sheet, auxiliary spring sheet, cam and limit switch, the displacement of the fine-tuning frame can be prevented from exceeding the threshold value. When the fine-tuning frame moves upward, the main spring sheet bends and deforms, pressing the auxiliary spring sheet downward, and then the force of the lever arm of the trigger lever moving upward is realized through the boss, and the other lever arm moves downward to trigger the limit switch, and the motor stops rotating.

[0020] Preferably, the pre-tightening adjustment assembly includes a base fixed to the mounting frame, a bracket provided on the base, a guide sleeve provided on the vertical section of the bracket, a plurality of disc springs provided in the guide sleeve, a pre-tightening bolt threaded on each of the disc springs, and an adjusting nut screwed on the bottom of the pre-tightening bolt, the main spring is fixed on the bottom end face of the transverse section of the bracket, the top of the pre-tightening bolt contacts the bottom end face of the main spring, the adjusting nut is provided outside the guide sleeve, and the raised elastic surface of the disc spring faces the side of the adjusting nut.

[0021] By adopting the above technical solution, the displacement of the main spring leaf can be adjusted by using the pre-tightening bolt. The pre-tightening bolt can be rotated in the disc spring to tighten the main spring leaf and apply pre-tightening force to it. The pre-tightening force can be further fine-tuned by rotating the adjusting nut.

[0022] Preferably, an inclined surface is provided at the bottom of the boss, and the inclined surface is inclined upward from left to right, and a roller rolling along the inclined surface is provided at the end of the lever arm of the trigger lever that contacts the inclined surface.

[0023] By adopting the above technical solution, an inclined surface is provided at the bottom of the boss, and a roller is provided at the end of the trigger lever, which forms rolling friction with the inclined surface and can play a guiding role.

[0024] Preferably, the upper end surface of the boss is provided with a force relief groove, the bottom end surface of the force relief groove is inclined downward from left to right, and the free end of the auxiliary spring sheet is provided with a spring ball head that slides in cooperation with the force relief groove.

[0025] By adopting the above technical solution, when the displacement of the fine-tuning frame exceeds the threshold, the free end of the auxiliary spring slides into the force relief groove through the spring ball head. At this time, the stiffness of the spring leaf is reduced, avoiding structural damage caused by excessive force.

[0026] In summary, this application includes at least one of the following beneficial technical effects: 1. A combination of fine-tuning structure and coarse-tuning structure is used to achieve high-precision displacement of the fine-tuning frame in the longitudinal stroke. During coarse adjustment, the motor rotates forward, driving the eccentric wheel to rotate. At this time, the driver is connected to the fine-tuning structure, driving the screw to rotate. Since the screw nut is fixed on the mounting frame, the screw drives the mounting frame as a whole to produce axial displacement, which is transmitted to the mounting surface at the top of the fine-tuning frame after layers of deformation. When it moves to a certain extent on the fine-tuning frame, the motor reverses. At this time, the driver is separated from the fine-tuning structure, and the fine-tuning frame will cause a slight displacement of the mounting surface as the eccentric shaft rotates.

[0027] 2. The mounting frame, fine-adjustment frame and coarse-adjustment plate are all made of elastic materials. Therefore, during the coarse and fine-adjustment processes, elastic deformation is used to achieve high-precision adjustment of the device. The elastic deformation can be regarded as linear, and the adjustable stroke of the device can reach tens of millimeters. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of a precision adjustment device for an optical detection platform of the present invention.

[0029] Figure 2 This is a front view of a precision adjustment device for an optical detection platform according to the present invention.

[0030] Figure 3 yes Figure 2 Cross-sectional view of AA in the figure.

[0031] Figure 4 yes Figure 2 Cross-sectional view of the BB.

[0032] Figure 5 It is a structural diagram of the fine-tuning framework in the present invention.

[0033] Figure 6 It is a cross-sectional view of the eccentric wheel in the present invention.

[0034] Figure 7 It is a schematic structural diagram of the ratchet in the present invention.

[0035] Figure 8It is a structural schematic diagram of the limiting structure in the present invention.

[0036] Figure 9 It is a side view of the main spring leaf in the present invention.

[0037] Explanation of the accompanying symbols: 1. Motor; 2. Reducer; 3. Mounting frame; 4. Fine-tuning frame; 5. Transmission shaft; 6. First bearing; 7. First pressure cover; 8. First gear; 9. First retaining spring; 10. Double bevel gear; 11. Eccentric wheel; 12. Fifth bearing; 13. Fifth retaining spring; 14. First screw; 15. Coupling; 16. Third gear; 17. Second screw; 18. Second retaining spring; 19. Second pressure cover; 20. Second bearing; 21. Fine-tuning wheel; 22. Coarse-tuning wheel; 23. Third bearing; 24. Third pressure cover; 25. Third screw; 26. Fourth gear; 27. Pin; 28. Screw; 29. Screw nut; 30. Screw nut pressure cover ;31. Testing table;32. Second gear;33. Coarse adjustment plate;34. Fourth bearing;35. Fourth pressure cover;36. Fourth screw;37. Microwave displacement sensor;38. Locking nut;39. Rotating shaft;40. Ratchet;41. Turntable;42. Connecting shaft;43. Pawl;44. Limiting structure;441. Main spring sheet;442. Secondary spring sheet;443. Boss;444. Trigger lever;445. Limit switch;446. Base;447. Bracket;448. Guide sleeve;449. Disc spring;450. Pre-tightening bolt;451. Adjusting nut;452. Inclined surface;453. Roller;454. Force relief groove;455. Spring ball head. DETAILED DESCRIPTION

[0038] The following is combined with Figure 1-9 This application is described in further detail.

[0039] The embodiment of the present application discloses a precision adjustment device for an optical detection platform. Figure 1-9 , including a testing platform 31, a mounting frame 3 is provided above the testing platform 31, a coarse adjustment structure is provided between the testing platform 31 and the mounting frame 3, and a fine adjustment structure is provided on the mounting frame 3, the fine adjustment structure includes an eccentric wheel 11, a fine adjustment frame 4 sleeved on the outer wall of the eccentric wheel 11 and a motor 1 for driving the eccentric wheel 11 to rotate, the fine adjustment frame 4 is fixed to the mounting frame 3 by a first screw 14, the motor 1 is fixed to the mounting frame 3, and the shaft ends on the left and right sides of the eccentric wheel 11 are respectively rotatably connected to the mounting frame 3, the coarse adjustment structure includes a lead screw 28, a lead screw 28 nut screwed on the outer wall of the lead screw 28 and a driving member for driving the lead screw 28 to rotate, the top of the lead screw 28 is rotatably connected to the mounting frame 3, and the bottom extends to the gap in the middle of the testing platform 31, and the lead screw 28 nut is fixed on the testing platform 31, and the driving member and the fine adjustment structure are connected on the first rotation trajectory.

[0040] In this embodiment, a combination of fine-tuning structure and coarse-tuning structure is adopted to achieve high-precision displacement of the fine-tuning frame 4 in the longitudinal stroke. During coarse adjustment, the motor 1 rotates forward, driving the eccentric wheel 11 to rotate. At this time, the driving member is connected to the fine-tuning structure, driving the screw 28 to rotate. Since the screw 28 nut is fixed on the mounting frame 3, the screw 28 drives the mounting frame 3 as a whole to produce axial displacement, which is transmitted to the mounting surface at the top of the fine-tuning frame 4 after layer-by-layer deformation. When it moves to a certain extent on the fine-tuning frame 4, the motor 1 reverses. At this time, the driving member is separated from the fine-tuning structure, and the fine-tuning frame 4 will cause a slight displacement of the mounting surface as the eccentric shaft rotates; in addition, the use of motor 1 to achieve electric adjustment is more convenient and quick.

[0041] Specifically, the mounting frame 3, the fine-tuning frame 4 and the coarse-tuning plate 33 are all made of elastic materials. Therefore, during the coarse-tuning and fine-tuning processes, elastic deformation is used to achieve high-precision adjustment of the device. The elastic deformation can be regarded as linear. The adjustable stroke of the device can reach tens of millimeters. According to design requirements, the overall lifting range of the present invention can be within 1 mm or even 50 μm, and the fine-tuning lifting range can be within 20 nm. At the same time, since the elastic deformation of the material is used to achieve ultra-high-precision adjustment, the gaps between the various mounting parts can be ignored during this adjustment process.

[0042] In some embodiments, the fine-tuning structure also includes a first gear 8, a double bevel gear 10, and a transmission shaft 5 connected to the first gear 8. The output shaft of the motor 1 is connected to the reducer 2, and the output shaft of the reducer 2 is connected to the transmission shaft 5 through a coupling 15. The first gear 8 is engaged with the straight tooth portion of the double bevel gear 10, and the double bevel gear 10 is connected to the shaft end of the eccentric wheel 11.

[0043] In this embodiment, the first gear 8 is driven by the motor 1, and the first gear 8 drives the eccentric wheel 11 through the double bevel gear 10. This indirect driving method of the eccentric wheel 11 can reduce the influence of the vibration of the motor 1 on the fine adjustment link; since fine adjustment requires extremely high precision, any vibration from the motor 1 may affect the final effect. Therefore, the transmission of vibration can be reduced by the reducer 2 and the transmission shaft 5, thereby improving stability.

[0044] Specifically, the speed and torque can also be adjusted through the reducer 2, so that the movement of the eccentric wheel 11 is smoother and more controllable, which is very important for the fine-tuning of the small displacement adjustment. Therefore, it is necessary to accurately control the rotation angle of the eccentric wheel 11 to control the rise and fall of the mounting surface; in addition, the motor 1 will generate heat during operation. If the eccentric wheel 11 is directly connected to the motor 1, the heat can be conducted to the precision components, causing thermal expansion to affect the accuracy. Therefore, by isolating the drive shaft 5 from the reducer 2, the heat transfer can be reduced and the system temperature can be kept stable.

[0045] Specifically, the motor 1 and the reducer 2 may be ordinary stepping motors 1 and conventional reducers 2, which are cheaper, easier to install, and will not affect the accuracy of adjustment.

[0046] Specifically, during installation, the transmission shaft 5 passes through the mounting frame 3 and is connected to the first gear 8. The transmission shaft 5 and the mounting frame 3 are rotationally connected through the first bearing 6. A first pressure cover 7 is provided on one side of the first bearing 6, and the first pressure cover 7 is connected to the mounting frame 3 by screws; and the transmission shaft 5 and the first gear 8 are connected by a key to prevent rotation, and a first retaining spring 9 is provided at the left end of the first gear 8. The left and right sides of the eccentric wheel 11 are connected to the mounting frame 3 through a fifth bearing 12 with a flange, and a fifth retaining spring 13 is installed at the flange end of the fifth bearing 12.

[0047] In some embodiments, the coarse adjustment structure also includes a second gear 32 mounted outside the lead screw 28 and a coarse adjustment plate 33 connected between the detection platform 31 and the mounting frame 3. The second gear 32 is arranged above the nut of the lead screw 28 and is connected to the lead screw 28 through a pin 27, and the second gear 32 is correspondingly connected to the driving member.

[0048] In this embodiment, a second gear 32 is provided on the outer wall of the lead screw 28, and the lead screw 28 is driven to rotate by driving the second gear 32. Since the lead screw 28 is threadedly connected to the lead screw 28 nut, the lead screw 28 nut can move along the lead screw 28, and since the lead screw 28 nut is fixedly connected to the lifting platform, the lead screw 28 can be raised and lowered in the lead screw 28 nut. Since the lead screw 28 is rotatably connected to the mounting bracket 3, the upward movement of the lead screw 28 can drive the mounting bracket 3 to move upward; a coarse adjustment plate 33 is connected between the detection platform 31 and the mounting bracket 3 to limit the moving distance of the mounting bracket 3, and its upward movement is converted into elastic deformation, so that the moving distance can reach the micrometer or nanometer level.

[0049] Specifically, the coarse adjustment plate connects the inspection table and the mounting frame so that it is always in a stretched state. The thinner part of the inspection table will deform, thereby driving the coarse adjustment plate to stretch and deform. In this way, the installation gap between each component can be ignored. Therefore, in order to eliminate this gap, the coarse adjustment plate 33 can maintain a tensile prestrain of 0.1%.

[0050] Specifically, during installation, the screw 28 is connected to the mounting frame 3 through the fourth bearing 34, the fourth pressure cover 35 presses the outer ring of the fourth bearing 34 through the fourth screw 36, and a locking nut 38 is installed on the top of the screw 28 to lock the inner ring of the fourth bearing 34. The screw 28 nut is installed on the detection table 31, and the screw 28 nut is locked on the detection table 31 through the screw 28 nut pressure cover to limit the rotation and lifting of the screw 28 nut.

[0051] In some embodiments, the driving member includes a third gear 16 that is engaged with the bevel tooth portion of the double bevel gear 10 and perpendicular to it, a fine-tuning wheel 21 connected to the third gear 16 through a connecting shaft, a coarse-tuning wheel 22 located below the fine-tuning wheel 21, and a fourth gear 26 connected to the coarse-tuning wheel 22 through a shaft, the fourth gear 26 is engaged with the second gear 32, a gap is provided between the fine-tuning wheel 21 and the coarse-tuning wheel 22, and a gear tooth is provided on the opposite surfaces of the fine-tuning wheel 21 and the coarse-tuning wheel 22, the height of the gear tooth is greater than half the height of the gap, and the connecting shaft and the shaft are both rotatably connected to the mounting frame 3 through bearings.

[0052] In this embodiment, the fine adjustment wheel 21 and the coarse adjustment wheel 22 with a gap are used to achieve the separation of coarse adjustment and fine adjustment. During coarse adjustment, the motor 1 rotates forward, and the forward rotation of the motor 1 drives the first gear 8 to rotate through the transmission shaft 5. Since the first gear 8 is engaged with the straight tooth part of the double bevel gear 10, and the bevel tooth part is engaged with the third gear 16, the rotation of the first gear 8 can drive the third gear 16 to drive, thereby driving the fine adjustment wheel 21 to rotate. At this time, the gear teeth of the fine adjustment wheel 21 are in contact with the gear teeth of the coarse adjustment wheel 22, which can drive the coarse adjustment wheel 22 to rotate synchronously, and then drive the fourth gear 26 to rotate. Since the fourth gear 26 is meshed with the second gear 32, the lead screw 28 can be driven to rotate by the second gear 32, thereby driving the mounting frame 3 to produce axial deformation; when the coarse adjustment is reached to a certain extent, the motor 1 is reversed, driving the eccentric wheel 11 to rotate half a circle, and the fine adjustment frame 4 will cause a slight displacement of the mounting surface as the eccentric shaft rotates. At this time, the teeth of the fine adjustment wheel 21 and the coarse adjustment wheel 22 are separated and will not contact, so the fine adjustment is separated from the coarse adjustment. If the coarse adjustment is judged wrong, it will be corrected again, and the fine adjustment wheel will drive the coarse adjustment wheel to rotate, and coarse adjustment will be performed again. Fine adjustment will be performed at the right time until it is appropriate.

[0053] Specifically, if the mounting frame 3 needs to be moved up by 50 μm as a whole, the motor 1 rotates to drive the mounting frame 3 to move up by 49980 nm, and then fine-tuning begins. The eccentric wheel 11 rotates to drive the fine-tuning frame 4 to move up by 20 nm, thereby achieving high-precision adjustment of the entire frame.

[0054] Specifically, during installation, the third gear 16 is fixed to the connecting shaft by a pin 27, and the connecting shaft and the fine-tuning wheel 21 are integrally formed, the fine-tuning wheel 21 is rotatably connected to the mounting frame 3 through the second bearing 20, the second pressure cover 19 presses the outer ring of the second bearing 20 through the second screw 17, and a second retaining spring 18 is sleeved on the position opposite to the second pressure cover 19 on the connecting shaft, the coarse-tuning wheel 22 is integrally formed with the shaft, and the fourth gear 26 is fixed to the shaft by a pin 27, the coarse-tuning wheel 22 is connected to the mounting frame 3 through the third bearing 23, and the third pressure cover 24 presses the outer ring of the third bearing 23 through the third screw 25.

[0055] In some embodiments, a microwave displacement sensor 37 is provided on the mounting frame 3, and the sensor head end of the microwave displacement sensor 37 corresponds to the side wall of the fine-tuning frame 4, and is used to detect the displacement of the fine-tuning frame 4. An optical torque meter is provided on the transmission shaft 5, which is used to measure the torque change of the transmission shaft 5, and the microwave displacement sensor 37, the optical torque meter and the motor 1 are all electrically connected to the external controller.

[0056] In this embodiment, the microwave displacement sensor 37 and the optical torque measuring instrument are used to detect the displacement of the fine adjustment frame 4 and the torque change of the transmission shaft 5 respectively, and the switching timing of the forward and reverse rotation is determined according to these two parameters.

[0057] Specifically, the microwave displacement sensor 37 can also be installed at the end of the eccentric wheel 11 near the double bevel gear 10, and the displacement of the fine-tuning frame 4 can be calculated by detecting the vibration of the transmission shaft 5. It uses phase interference enhancement technology to detect sub-nanometer displacement with a resolution of 0.1nm; when the optical torque meter is installed on the transmission shaft 5, a groove is set on its surface and the meter is embedded in the groove. In addition, the meter can also be installed on the shaft, and the phase difference is detected by using the cooperation of fiber optic Bragg grating torsion sensing technology and polarization diversity detection technology, and then the displacement of the fine-tuning frame 4 is detected. The accuracy of the calculation can be guaranteed by double detection.

[0058] Specifically, an intelligent switching algorithm is established in the controller, including a switching timing prediction model and reinforcement learning optimization. The prediction model is established using an LSTM neural network. The input includes a historical position sequence (1000Hz sampling), environmental parameters (temperature, air pressure), and drive current spectrum characteristics, and outputs a predicted value for the probability of successful switching. Reinforcement learning optimization requires defining a reward function and obtaining the optimal switching strategy through Q-learning iteration.

[0059] In some embodiments, a shaft section on one side of the eccentric wheel 11 is rotatably connected to a rotating shaft 39, and the rotating shaft 39 is connected to the inner wall of the double bevel gear 10. A ratchet 40 is sleeved on the outer wall of the rotating shaft 39 on the side close to the eccentric wheel 11, and a turntable 41 is sleeved on the outer wall of the eccentric wheel 11 on the side close to the rotating shaft 39. A connecting shaft 42 is provided on the side of the turntable 41 opposite to the ratchet 40, and a pawl 43 is rotatably connected to the connecting shaft 42, and the pawl 43 cooperates with the ratchet 40, and the rotation direction of the ratchet 40 is consistent with the forward rotation direction of the motor 1.

[0060] In this embodiment, the rotation timing of the eccentric wheel 11 is controlled by the ratchet 40 and the pawl 43. When the motor 1 rotates forward, the ratchet 40 rotates following the double bevel gear 10. At this time, since the pawl 43 is rotationally connected to the connecting shaft 42, the ratchet 40 can drive the pawl 43 to rotate while rotating. Also, since the rotating shaft 39 is rotationally connected to the eccentric wheel 11, preferably a bearing, the rotation of the double bevel gear 10 will not drive the eccentric wheel 11 to rotate, so that the fine-tuning frame 4 will only move with the mounting frame 3 in the coarse adjustment stage, thereby avoiding affecting the detection results and displacement calculation results of the fine-tuning frame 4; when the motor 1 is reversed, the pawl 43 limits the direction of rotation of the ratchet 40. At this time, the direction of rotation of the double bevel gear 10 will drive the eccentric wheel 11 to rotate, thereby achieving high-precision adjustment of the fine-tuning frame 4.

[0061] In some embodiments, a limiting structure 44 is provided between the mounting frame 3 and the fine-tuning frame 4. The limiting structure 44 includes a main spring piece 441 and a secondary spring piece 442 that are parallel to each other and spaced apart, a preload adjustment component connected to one end of the main spring piece 441, a boss 443 provided on the lower side of the secondary spring piece 442, a trigger lever 444 provided on the lower side of the boss 443, and a limit switch 445 provided on the lower side of the trigger lever 444. The end of the main spring piece 441 that is away from the preload adjustment component is connected to the bottom end surface of the fine-tuning frame 4, and the secondary spring piece 442 is close to the preload adjustment component. One end of the protrusion 443 is a free end, and the other end is a fixed end. It is installed on the mounting frame 3 through the base 446. The free end of the auxiliary spring piece 442 is arranged below the position where the main spring piece 441 is bent and deformed by the upward pull. The left end of the top surface of the protrusion 443 is opposite to the free end of the auxiliary spring piece 442, and the left end of the bottom surface is opposite to the right end of one lever arm of the trigger lever 444. When the other lever arm moves downward, it contacts the limit switch 445. The limit switch 445 is connected to the motor 1, and the protrusion 443 and the trigger lever 444 are both fixed on the mounting frame 3.

[0062] In this embodiment, a main spring piece 441, a secondary spring piece 442, a cam and a limit switch 445 are used to form a limit structure 44 to prevent the fine-tuning frame 4 from moving upward beyond a threshold value. When in use, the preload force, that is, the maximum displacement of the fine-tuning frame 4, can be adjusted by the preload adjustment component. The upward movement of the fine-tuning frame 4 drives the main spring piece 441 to bend and deform on the side away from the preload adjustment component, thereby driving the free end of the secondary spring piece 442 to move downward, thereby applying a downward force to the boss 443, causing it to push one lever arm of the trigger lever 444 to move upward, thereby the other lever arm moves downward to contact the limit switch 445, and the limit switch 445 can control the motor 1 to stop rotating.

[0063] Specifically, the preload force of the main spring piece 441 is in the range of 5-10N, the preload force of the secondary spring piece 442 is in the range of 15-20N, the gap between the two spring pieces is preferably 0.05mm, and the contact surface pressure of the main spring piece 441 bending and contacting the secondary spring piece 442 is greater than 20N, and the lever arm on the left side of the trigger lever is greater than the lever arm on the right side, with a ratio of 1:5.

[0064] Specifically, the auxiliary spring piece and the boss can be connected by a hinge, and the boss and the mounting seat can be connected by a hinge. At this time, the axial movement of the auxiliary spring piece can be transmitted to the trigger lever through the boss, so that the lever arm close to the boss moves upward.

[0065] In some embodiments, the preload adjustment assembly includes a base 446 fixed to the mounting frame 3, a bracket 447 provided on the base 446, a guide sleeve 448 provided on the vertical section of the bracket 447, a plurality of disc springs 449 provided in the guide sleeve 448, a preload bolt 450 threaded on each disc spring 449, and an adjustment nut 451 screwed on the bottom of the preload bolt 450. The main spring is fixed on the bottom end face of the transverse section of the bracket 447, the top of the preload bolt 450 contacts the bottom end face of the main spring, the adjustment nut 451 is provided outside the guide sleeve 448, and the raised elastic surface of the disc spring 449 faces the side of the adjustment nut 451.

[0066] In this embodiment, a pre-tightening bolt 450 is used to adjust the pre-tightening force of the main spring. Since the top of the adjusting bolt contacts the bottom of the main spring piece 441, and the main spring piece 441 is fixed to the bracket 447, the rotation of the adjusting bolt will apply pressure to the main spring piece 441, thereby adjusting its pre-tightening force. A disc spring 449 is arranged in the sleeve, with its elastic surface facing downward, which can maintain the pressure of the pre-tightening bolt 450 and prevent loosening.

[0067] Specifically, the pre-tightening bolt 450 adopts a differential thread fine-tuning bolt, and its connection position with the disc spring 449 is set to the coarse thread end, and the connection end with the adjusting nut 451 is set to the fine thread end, wherein the thread pitch of the coarse thread end is 0.5mm, which can adjust the pre-pressure over a large range, and the thread pitch of the fine thread end is 0.35mm, which can precisely adjust the pre-pressure. During adjustment, the coarse thread end of the adjusting bolt first moves relative to the inner ring of the disc spring 449, and then the adjusting nut 451 is rotated to drive the pre-tightening bolt 450 to move slightly, thereby achieving fine adjustment; in addition, the disc spring 449 preferably adopts 3 pieces, which can provide a pre-tightening force adjustment range of 5-50N.

[0068] In some embodiments, an inclined surface 452 is provided at the bottom of the boss 443 , and the inclined surface 452 is inclined upward from left to right. The lever arm end of the trigger lever 444 that contacts the inclined surface 452 is provided with a roller 453 that rolls along the inclined surface 452 .

[0069] In this embodiment, an inclined surface 452 is provided at the bottom of the boss 443, and a roller 453 is provided at the end of the trigger lever 444 to form rolling friction with the inclined surface 452. The pressure of the contact line is controlled at 500-800 MPa. During this process, the lever arm on the contact side rotates up and down, so that the other lever arm rotates downward, which can contact the ball of the toggle limit switch 445, thereby triggering it.

[0070] Specifically, a silicone cushion can be provided at the end of the lever, and after the end touches the limit switch 445, the cushion absorbs excess energy.

[0071] In some embodiments, a pressure relief groove 454 is provided on the upper end surface of the boss 443 , and the bottom end surface of the pressure relief groove 454 is inclined downward from left to right. The free end of the auxiliary spring piece 442 is provided with a spring ball head 455 that slides with the pressure relief groove 454 .

[0072] In this embodiment, the force relief groove 454 is provided to change the force transmission path and reduce or eliminate further force transmission. When the displacement of the fine-tuning frame 4 exceeds a threshold value, for example 60 μm, the free end of the auxiliary spring sheet 442 slides into the force relief groove 454 through the spring ball head 455. At this time, the stiffness of the spring sheet is reduced to avoid structural damage caused by excessive force; the force relief groove 454 has an inclination angle of 15°, a maximum depth of 0.3 mm, and a width of 1.2 mm.

[0073] The working principle of a precision adjustment device for an optical detection platform in the present application is: a combination of a fine adjustment structure and a coarse adjustment structure is used to achieve high-precision displacement of the fine adjustment frame 4 in the longitudinal stroke. During coarse adjustment, the motor 1 rotates forward, and the first gear 8 is driven to rotate by the motor 1. Since the first gear 8 is engaged with the straight tooth part of the double bevel gear 10, and the bevel tooth part is engaged with the third gear 16, the first gear 8 drives the eccentric wheel 11 through the double bevel gear 10, and at the same time, the fine adjustment wheel is driven to rotate through the third gear. At this time, the teeth of the fine adjustment wheel 21 are in contact with the teeth of the coarse adjustment wheel 22, which can drive the coarse adjustment wheel 22 to rotate simultaneously. The fourth gear 26 is rotated step by step, thereby driving the fourth gear 26 to rotate. Since the fourth gear 26 is meshed with the second gear 32, the lead screw 28 can be driven to rotate through the second gear 32. Since the lead screw 28 nut is fixed to the mounting frame 3, the lead screw 28 drives the mounting frame 3 as a whole to produce axial displacement, which is transmitted to the mounting surface at the top of the fine-adjusting frame 4 after layer-by-layer deformation. After the fine-adjusting frame 4 moves to a certain extent, the motor 1 is reversed, driving the eccentric wheel 11 to rotate half a circle. The fine-adjusting frame 4 will cause a slight displacement of the mounting surface as the eccentric shaft rotates. At this time, the teeth of the fine-adjusting wheel 21 and the coarse-adjusting wheel 22 are separated and do not contact.

[0074] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A precision adjustment device for an optical detection platform, characterized in that: The invention comprises a detection platform (31), a mounting frame (3) is provided above the detection platform (31), a coarse adjustment structure is provided between the detection platform (31) and the mounting frame (3), a fine adjustment structure is provided on the mounting frame (3), the fine adjustment structure comprises an eccentric wheel (11), a fine adjustment frame (4) sleeved on the outer wall of the eccentric wheel (11), and a motor (1) for driving the eccentric wheel (11) to rotate, the motor (1) is fixed on the mounting frame (3), and the eccentric wheel (11) is provided on both sides. The shaft ends are respectively rotatably connected to the mounting frame (3), the coarse adjustment structure includes a lead screw (28), a lead screw nut (29) screwed to the outer wall of the lead screw (28), and a driving member for driving the lead screw (28) to rotate, the top of the lead screw (28) is rotatably connected to the mounting frame (3), and the bottom extends to the gap in the middle of the detection platform (31), and the lead screw nut (29) is fixed on the detection platform (31), and the driving member is connected to the fine adjustment structure on a first rotation track.

2. The precision adjustment device for an optical detection platform according to claim 1, characterized in that: The fine adjustment structure further comprises a first gear (8), a double bevel gear (10) and a transmission shaft (5) connected to the first gear (8); the output shaft of the motor (1) is connected to the reducer (2); the output shaft of the reducer (2) is connected to the transmission shaft (5) via a coupling (15); the first gear (8) is meshed with the spur tooth portion of the double bevel gear (10), and the double bevel gear (10) is connected to the shaft end of the eccentric wheel (11).

3. The precision adjustment device for an optical detection platform according to claim 2, characterized in that: The coarse adjustment structure further includes a second gear (32) sleeved outside the lead screw (28) and a coarse adjustment plate (33) connected between the detection platform (31) and the mounting frame (3); the second gear (32) is arranged above the lead screw nut (29) and is connected to the lead screw (28) via a pin (27); and the second gear (32) is correspondingly connected to the driving member.

4. The precision adjustment device for an optical detection platform according to claim 3, characterized in that: The driving member comprises a third gear (16) meshed with the bevel gear portion of the double bevel gear (10) and perpendicular thereto, a fine adjustment wheel (21) connected to the third gear (16) via a connecting shaft, a coarse adjustment wheel (22) arranged below the fine adjustment wheel (21), and a fourth gear (26) connected to the coarse adjustment wheel (22) via a shaft, the fourth gear (26) meshing with the second gear (32), a gap being provided between the fine adjustment wheel (21) and the coarse adjustment wheel (22), and a gear tooth being provided on opposite surfaces of the fine adjustment wheel (21) and the coarse adjustment wheel (22), the height of the gear tooth being greater than half the height of the gap, and the connecting shaft and the shaft being rotatably connected to the mounting frame (3) via bearings.

5. The precision adjustment device for an optical detection platform according to claim 4, characterized in that: A microwave displacement sensor (37) is provided on the mounting frame (3), and a sensor head end of the microwave displacement sensor (37) corresponds to a side wall of the fine adjustment frame (4) and is used to detect the displacement of the fine adjustment frame (4). An optical torque meter is provided on the transmission shaft (5) and is used to measure the torque change of the transmission shaft (5). The microwave displacement sensor (37), the optical torque meter and the motor (1) are all electrically connected to an external controller.

6. The precision adjustment device for an optical detection platform according to claim 5, characterized in that: A shaft section on one side of the eccentric wheel (11) is rotatably connected to a rotating shaft (39), and the rotating shaft (39) is connected to the inner wall of the double bevel gear (10). A ratchet (40) is sleeved on the outer wall of the rotating shaft (39) on the side close to the eccentric wheel (11). A turntable (41) is sleeved on the outer wall of the side of the eccentric wheel (11) close to the rotating shaft (39). A connecting shaft (42) is provided on the side opposite to the ratchet (40). A ratchet (43) is rotatably connected to the connecting shaft (42). The ratchet (43) cooperates with the ratchet (40), and the rotation direction of the ratchet (40) is consistent with the forward rotation direction of the motor (1).

7. The precision adjustment device for an optical detection platform according to claim 6, characterized in that: A limiting structure (44) is provided between the mounting frame (3) and the fine-tuning frame (4), the limiting structure (44) comprising a main spring piece (441) and a secondary spring piece (442) which are parallel to each other and spaced apart, a preload adjustment assembly connected to one end of the main spring piece (441), a boss (443) provided on the lower side of the secondary spring piece (442), a trigger lever (444) provided on the lower side of the boss (443), and a limit switch (445) provided on the lower side of the trigger lever (444), the end of the main spring piece (441) facing away from the preload adjustment assembly is connected to the bottom end face of the fine-tuning frame (4), the secondary spring piece (442) is close to the boss One end of the platform (443) is a free end, and the other end is a fixed end. The platform (443) is installed on the mounting frame (3) through a base (446). The free end of the auxiliary spring piece (442) is arranged below the position where the main spring piece (441) is bent and deformed by the upward pulling force. The left end of the top surface of the boss (443) is opposite to the free end of the auxiliary spring piece (442) in vertical direction, and the left end of the bottom surface is opposite to the right end of a lever arm of the trigger lever (444) in vertical direction. When the other lever arm moves downward, it contacts the limit switch (445). The limit switch (445) is connected to the motor (1), and the boss (443) and the trigger lever (444) are both fixed on the mounting frame (3).

8. The precision adjustment device for an optical detection platform according to claim 7, characterized in that: The pre-tightening adjustment assembly includes a base (446) fixed to the mounting frame (3), a bracket (447) provided on the base (446), a guide sleeve (448) provided on the vertical section of the bracket (447), a plurality of disc springs (449) provided in the guide sleeve (448), a pre-tightening bolt (450) screwed to each of the disc springs (449), and an adjusting nut (451) screwed to the bottom of the pre-tightening bolt (450), the main spring is fixed to the bottom end surface of the horizontal section of the bracket (447), the top of the pre-tightening bolt (450) contacts the bottom end surface of the main spring, the adjusting nut (451) is provided outside the guide sleeve (448), and the raised elastic surface of the disc spring (449) faces the side of the adjusting nut (451).

9. The precision adjustment device for an optical detection platform according to claim 7, characterized in that: The bottom of the boss (443) is provided with an inclined surface (452), and the inclined surface (452) is inclined upward from left to right. The lever arm end of the trigger lever (444) in contact with the inclined surface (452) is provided with a roller (453) that rolls along the inclined surface (452).

10. The precision adjustment device for an optical detection platform according to claim 7, characterized in that: The upper end surface of the boss (443) is provided with a force relief groove (454), the bottom end surface of the force relief groove (454) is inclined downward from left to right, and the free end of the auxiliary spring piece (442) is provided with a spring ball head (455) that slides in cooperation with the force relief groove (454).

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