Portable and rapid laser-induced current testing device capable of adjusting multiple laser wavelengths

Abstract

The invention relates to the technical field of testing instruments, and particularly discloses an adjustable multi-laser wavelength portable rapid laser-induced current testing device which comprises a light path assembly and a current processing assembly. The light path assembly comprises an adjustable beam combining laser, a hexagonal prism, a galvanometer, a field lens assembly, a first driving device and a second driving device; the current processing assembly comprises a current testing module, a data processing module and a terminal; the adjustable beam combining laser, the hexagonal prism, the galvanometer and the field lens assembly are located on the same light path. The first driving device is used for driving the hexagonal prism to rotate at a constant speed, so that the incident angle of the laser beam is changed along with time, and the transverse displacement of the laser beam is realized; the second driving device is used for driving the galvanometer to swing up and down so as to realize longitudinal displacement of the laser beam; the portable rapid laser-induced current testing device capable of adjusting multiple laser wavelengths can realize rapid scanning of a two-dimensional plane, and is high in testing speed.

Description

Technical Field

[0001] The present invention relates to the technical field of testing instruments, and in particular to a portable fast laser-induced current testing device with adjustable multi-laser wavelengths. Background Art

[0002] The beam-induced current imaging (BIM) detection system is a high-resolution, non-contact image analysis method. Its core principle is to utilize the differences in absorption depth of lasers of different wavelengths in semiconductor materials (e.g., short-wavelength lasers are primarily absorbed by the surface layer, while long-wavelength lasers can penetrate deep into the material), combined with the micro-region photoelectric conversion effect, to characterize characteristic parameters such as micro-region short-circuit current distribution, surface defects, parallel resistance, and reflectivity of optoelectronic devices and solar cells. By mapping the beam across the sample surface in two dimensions, the system generates an image reflecting the uniformity of the parameter plane. This is particularly suitable for analyzing the distribution of microstructures such as grain boundaries and dislocations, providing data support for device structure optimization and process improvement.

[0003] However, existing beam-induced current imaging detection systems generally suffer from slow scanning speeds, making them difficult to meet the demands of rapid detection. Therefore, optimizing scanning efficiency has important practical application value. Summary of the Invention

[0004] The purpose of the present invention is to provide a portable fast laser induced current testing device with adjustable multi-laser wavelengths, which can realize fast scanning of a two-dimensional plane and has a high testing speed.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A portable fast laser-induced current testing device with adjustable multiple laser wavelengths comprises an optical path assembly and a current processing assembly.

[0007] The optical path assembly includes an adjustable beam combining laser, a hexagonal prism, a galvanometer, a field lens component, a first driving device and a second driving device.

[0008] The current processing assembly includes a current testing module, a data processing module and a terminal.

[0009] The adjustable beam combining laser, hexagonal prism, galvanometer and field lens assembly are located on the same optical path, and the hexagonal prism, galvanometer and field lens assembly are arranged in sequence along the transmission direction of the optical path.

[0010] The adjustable beam combining laser, the first driving device, the second driving device, the current testing module, and the data processing module are all electrically connected to the terminal.

[0011] The first driving device is used to drive the hexagonal prism to rotate at a constant speed, so that the incident angle of the laser beam changes with time, thereby achieving lateral displacement of the beam.

[0012] The second driving device is used to drive the galvanometer to swing up and down to achieve longitudinal displacement of the laser beam.

[0013] The portable rapid laser-induced current testing device with adjustable multi-laser wavelengths provided by at least one embodiment of the present disclosure further includes a shell.

[0014] The adjustable beam combining laser, hexagonal prism, galvanometer, field mirror assembly, current testing module and data processing module are all arranged in the housing.

[0015] The terminal is fixedly arranged outside the housing.

[0016] The first driving device and the second driving device are both fixedly connected to the housing.

[0017] The shell has a carrier and a movable opening. The carrier is slidably connected to the shell, and the carrier is inserted into the shell through the movable opening.

[0018] The carrier is used for placing the test sample.

[0019] In the portable fast laser-induced current testing device with adjustable multi-laser wavelengths provided by at least one embodiment of the present disclosure, the current testing module includes a conductive probe and a digital source meter.

[0020] The conductive probe is electrically connected to the digital source meter.

[0021] The conductive probe is fixedly arranged on the carrier.

[0022] In the portable rapid laser-induced current testing device with adjustable multi-laser wavelengths provided in at least one embodiment of the present disclosure, the adjustable beam-combining laser includes a wavelength-adjustable laser and a spectroscope.

[0023] The wavelength of the laser emitted by the tunable wavelength laser is 405 nm, 635 nm or 905 nm.

[0024] The tunable wavelength laser and the spectroscope are both fixedly connected to the housing.

[0025] In the portable rapid laser-induced current testing device with adjustable multi-laser wavelengths provided in at least one embodiment of the present disclosure, a cover and an inspection port are provided on the top of the shell.

[0026] The cover is used to cover the inspection port.

[0027] In the portable rapid laser-induced current testing device with adjustable multi-laser wavelengths provided by at least one embodiment of the present disclosure, the field mirror assembly includes a variable focus lens and a distance measurement drive module.

[0028] The distance measurement driving module is electrically connected to the terminal, and the distance measurement driving module is used to adjust the focal length of the variable focus lens according to the height of the laser feedback sample.

[0029] In the portable rapid laser-induced current testing device with adjustable multi-laser wavelengths provided in at least one embodiment of the present disclosure, handles are provided on both the carrier and the cover.

[0030] In the portable rapid laser-induced current testing device with adjustable multi-laser wavelengths provided by at least one embodiment of the present disclosure, the variable focus lens is a liquid lens.

[0031] In the portable rapid laser-induced current testing device with adjustable multi-laser wavelengths provided in at least one embodiment of the present disclosure, the focal length of the variable focus lens has an adjustment range of 40-150 mm.

[0032] The beneficial effects of the present invention are as follows: a hexagonal prism and a galvanometer are combined to control the movement of the light beam during its propagation process; the light beam hits the hexagonal prism, and since the hexagonal prism rotates at a constant speed, the incident angle of the light beam changes with time, thereby realizing the lateral displacement of the light beam; the galvanometer swings up and down, thereby realizing the longitudinal displacement of the light beam; the continuous rotation of the hexagonal prism and the swinging of the galvanometer can realize rapid scanning of a two-dimensional plane, and the test speed is fast. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0034] Figure 1 This is a stereoscopic diagram of a portable fast laser-induced current testing device with adjustable multiple laser wavelengths according to the present invention.

[0035] Figure 2 This is a schematic diagram of the component distribution of a portable fast laser-induced current testing device with adjustable multiple laser wavelengths according to the present invention.

[0036] Figure 3 This is a cross-sectional view of a portable fast laser-induced current testing device with adjustable multiple laser wavelengths according to the present invention.

[0037] In the picture:

[0038] 11. Adjustable beam combining laser; 12. Hexagonal prism; 13. Galvanometer; 14. Field lens assembly; 15. First driving device; 16. Second driving device; 111. Adjustable wavelength laser; 112. Beam splitter;

[0039] 21. Current test module; 22. Data processing module; 23. Terminal; 211. Conductive probe; 212. Digital source meter;

[0040] 30. Shell; 31. Carrier; 32. Cover; 33. Inspection port; 34. Handle. DETAILED DESCRIPTION

[0041] The technical solutions in the embodiments will be described clearly and completely below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments, rather than all the embodiments.

[0042] Example

[0043] like Figures 1 to 3 As shown, this embodiment provides a portable rapid laser-induced current test device with adjustable multiple laser wavelengths, including an optical path assembly, a current processing assembly, and a housing 30. The entire device is small and easy to carry, and can test samples that are inconvenient to move. At the same time, the test sample size is wide, which can solve the problem of testing photocurrent data of large-area optoelectronic devices.

[0044] Specifically, the optical path assembly includes an adjustable beam combining laser 11 , a hexagonal prism 12 , a galvanometer 13 , a field lens assembly 14 , a first driving device 15 and a second driving device 16 .

[0045] Specifically, the current processing assembly includes a current testing module 21 , a data processing module 22 and a terminal 23 .

[0046] Specifically, the adjustable beam combining laser, hexagonal prism 12, galvanometer mirror 13, and field lens assembly 14 are located on the same optical path, and the hexagonal prism 12, galvanometer mirror 13, and field lens assembly 14 are arranged sequentially along the optical transmission direction. The adjustable beam combining laser 11, first drive device 15, second drive device 16, current test module, and data processing module 22 are all electrically connected to terminal 23.

[0047] Specifically, the first driving device 15 is used to drive the hexagonal prism 12 to rotate at a constant speed, so that the incident angle of the laser beam changes with time to achieve lateral displacement of the beam. The second driving device 16 is used to drive the galvanometer 13 to swing up and down to achieve longitudinal displacement of the laser beam.

[0048] Exemplarily, the data processing module 22 adopts an analog-to-digital converter.

[0049] During the propagation of the light beam, the movement of the light beam is controlled by combining the hexagonal prism 12 and the galvanometer 13. The light beam hits the hexagonal prism 12. Since the hexagonal prism 12 rotates at a constant speed, the incident angle of the light beam will change with time, realizing the lateral displacement of the light beam. The galvanometer 13 swings up and down to realize the longitudinal displacement of the light beam. The combination of the two can realize the rapid scanning of the light beam in the entire two-dimensional plane in the horizontal and vertical directions, thereby improving the testing speed of the sample.

[0050] In this embodiment, the hexagonal prism is made of aluminum alloy, and the surface is coated with a sapphire protective gold layer.

[0051] The galvanometer is made of silicon, with an incident angle range of 45 ± 12.5°, a length of 30 mm, a width of 28 mm, and a thickness of 4 mm. It reflects the laser light from the hexagonal prism back to the field lens. The galvanometer oscillates up and down under program control, achieving vertical displacement of the laser light on the sample.

[0052] In this embodiment, the adjustable beam combining laser 11 , the hexagonal prism 12 , the galvanometer 13 , the field lens assembly 14 , the current testing module and the data processing module 22 are all disposed in the housing 30 . The terminal 23 is fixedly disposed outside the housing 30 .

[0053] Specifically, in order to facilitate the operation of the staff, the terminal 23 is equipped with a touch screen display.

[0054] In addition, the terminal is used to control the adjustable beam combining laser 11 to output lasers of different wavelengths, control the rotation speed of the hexagonal prism and the up and down swing speed of the galvanometer, and realize the adjustment of the test laser and the adjustment of the scanning speed and range.

[0055] At the same time, the terminal is also used to store mapping images under different wavelengths of laser irradiation, which makes it convenient for staff to compare and then identify defects on the top and bottom cells of the stacked batteries.

[0056] After the test is completed, researchers can visually observe the photoelectric performance of the sample and determine the location of defects; they can simultaneously observe mapping images under multiple sets of different parameter conditions and compare the impact of changing parameter conditions on the size of the photocurrent.

[0057] Specifically, the first driving device 15 and the second driving device 16 are both fixedly connected to the housing 30 .

[0058] In this embodiment, the housing 30 has a carrier 31 and a movable opening (not shown), the carrier 31 is slidably connected to the housing 30, and the carrier 31 is inserted into the housing 30 through the movable opening. The carrier 31 is used to place the test sample.

[0059] Exemplarily, the carrier 31 adopts a drawer-type structure, and a linear guide rail is provided between the carrier 31 and the housing 30 , and the carrier 31 and the housing 30 are slidably connected through the linear guide rail.

[0060] Furthermore, a cover 32 and an inspection port 33 are provided at the top of the housing 30; the cover 32 is used to cover the inspection port 33 and is movably connected to the housing 30. The inspection port 33 facilitates the staff to adjust, repair and maintain the components inside the equipment.

[0061] For example, a linear guide rail is also provided between the cover 32 and the housing 30, and the cover 32 and the housing 30 are slidably connected via the linear guide rail. The housing 30 is made of a SUS316 extremely weak magnetic stainless steel breadboard.

[0062] Furthermore, both the carrier 31 and the cover 32 are provided with handles 34 .

[0063] In this embodiment, the current testing module 21 includes a conductive probe 211 and a digital source meter 212 . The conductive probe 211 is electrically connected to the digital source meter 212 . The conductive probe 211 is fixedly disposed on the carrier 31 .

[0064] In this embodiment, the adjustable beam-combining laser 11 includes a tunable wavelength laser 111 and a beam splitter 112. The beam splitter adjusts the incident laser beams of different wavelengths to achieve rapid laser switching. The beam-combining laser can switch between different wavelengths. For a tandem cell with a top cell and a bottom cell, the photocurrent performance of the top cell and the bottom cell can be observed separately by changing the incident laser beam wavelength. Furthermore, the effect of different wavelengths of laser beam on the photocurrent of the same sample can be observed.

[0065] Specifically, the tunable wavelength laser 111 and the beam splitter 112 are both fixedly connected to the housing 30 .

[0066] When in use, the laser light is reflected by the beam splitter 112 to the hexagonal prism 12 , and then reflected by the hexagonal prism 12 to the galvanometer 13 .

[0067] The beam-combining laser combines three lasers of different wavelengths into a single output port. Each wavelength can be individually controlled by software, and each wavelength can be modulated both analogly and digitally. The three wavelengths of the tunable laser are 405nm, 635nm, and 905nm, with an output power range of 0-200mW. Programmable control enables the output of different wavelengths and long-term high-power stability.

[0068] In this embodiment, the field lens assembly 14 can dynamically adjust the laser focal position to accommodate sample surfaces of varying heights or curvatures. The variable focus lens receives laser light reflected from the galvanometer and focuses the collimated laser beam onto a smaller focal area, increasing the energy density of the laser beam and improving the laser processing capability and efficiency.

[0069] Specifically, the field lens assembly 14 includes a variable focus lens and a rangefinder drive module. The variable focus lens utilizes a liquid lens with dynamic focus adjustment. Its diameter is 16 mm, and its focal length adjustment range is 40-150 mm. The spot radius of the light projected onto the sample surface through the variable focus lens is less than 50 μm. The rangefinder drive module converts laser feedback indicating sample height into a voltage signal, which drives the variable focus lens to change its focal length. The lens barrel is constructed of aluminum alloy, and the optical window is fused quartz.

[0070] The working principles of the optical path assembly and the current processing assembly in the embodiments will be disclosed below.

[0071] The working principle of the optical path assembly is as follows: the light beam is emitted by the laser module, irradiated on the hexagonal prism, reflected to the galvanometer, and then reflected by the galvanometer to the field lens. After passing through the field lens, the light beam irradiates the sample surface;

[0072] The working principle of the current processing assembly is as follows: the conductive probe is placed on the positive and negative poles of the sample to be tested, and the other end is connected to the digital source meter to form a circuit. The current value measured by the digital source meter is converted into a digital signal through the analog-to-digital converter. The terminal can store position information and current size information, and draw a mapping image based on this information, which is displayed on the touch screen display.

[0073] Although the embodiments of the present application have been shown and described above, the scope of protection of the present invention is not limited thereto, and any changes or substitutions that are not conceivable through creative work should be included in the scope of protection of the present invention; unless expressly stated, any elements, actions or instructions used in this document should not be interpreted as critical or necessary.

Claims

1. A portable fast laser induced current test device with adjustable multi-laser wavelength, characterized in that: include: Optical path assembly and current processing assembly; The optical path assembly includes an adjustable beam combining laser, a hexagonal prism, a galvanometer, a field lens assembly, a first driving device and a second driving device; The current processing assembly includes a current testing module, a data processing module and a terminal; The adjustable beam combining laser, hexagonal prism, galvanometer and field lens assembly are located on the same optical path, and the hexagonal prism, galvanometer and field lens assembly are arranged in sequence along the transmission direction of the optical path; The adjustable beam combining laser, the first driving device, the second driving device, the current testing module, and the data processing module are all electrically connected to the terminal; The first driving device is used to drive the hexagonal prism to rotate at a constant speed, so that the incident angle of the laser beam changes with time, thereby achieving lateral displacement of the beam; The second driving device is used to drive the galvanometer to swing up and down to achieve longitudinal displacement of the laser beam.

2. The portable fast laser-induced current test device with adjustable multi-laser wavelength according to claim 1, characterized in that: Also includes a housing; The adjustable beam combining laser, hexagonal prism, galvanometer, field mirror assembly, current testing module and data processing module are all arranged in the housing; The terminal is fixedly arranged outside the housing; The first drive device and the second drive device are both fixedly connected to the housing; The shell has a carrier and a movable opening, the carrier is slidably connected to the shell, and the carrier is inserted into the shell through the movable opening; The carrier is used for placing the test sample.

3. The portable fast laser-induced current test device with adjustable multi-laser wavelength according to claim 2, characterized in that: The current test module includes a conductive probe and a digital source meter; The conductive probe is electrically connected to the digital source meter; The conductive probe is fixedly arranged on the carrier.

4. The portable fast laser-induced current test device with adjustable multi-laser wavelength according to claim 2, characterized in that: The adjustable beam combining laser includes an adjustable wavelength laser and a beam splitter; The wavelength of the laser emitted by the tunable wavelength laser is 405nm, 635nm or 905nm; The tunable wavelength laser and the spectroscope are both fixedly connected to the housing.

5. The portable fast laser-induced current test device with adjustable multi-laser wavelength according to claim 2, characterized in that: The top of the shell is provided with a cover and an inspection port; The cover is used to cover the inspection port.

6. The portable fast laser-induced current test device with adjustable multi-laser wavelength according to claim 1, characterized in that: The field lens assembly includes a variable focus lens and a distance measurement drive module; The distance measurement driving module is electrically connected to the terminal, and the distance measurement driving module is used to adjust the focal length of the variable focus lens according to the height of the laser feedback sample.

7. The portable fast laser-induced current test device with adjustable multi-laser wavelength according to claim 5, characterized in that: The carrier and the cover are both provided with handles.

8. The portable fast laser-induced current test device with adjustable multi-laser wavelength according to claim 6, characterized in that: The variable focus lens is a liquid lens.

9. The portable fast laser-induced current test device with adjustable multi-laser wavelength according to claim 6, characterized in that: The focal length adjustment range of the variable focus lens is 40-150 mm.

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