Slotting type annular roller reel-to-reel water electroplating treatment equipment

Abstract

The invention relates to the technical field of electroplating processing, in particular to slotting type annular roller reel-to-reel water electroplating treatment equipment which comprises a base plate, an electroplating treatment cabin is integrated on the top of the base plate, one side of the lower portion of the electroplating treatment cabin communicates with a liquid conveying pipe, a pump body is installed outside the input end of the liquid conveying pipe, and a positioning roller is rotationally arranged in the middle of the lower portion in the electroplating treatment cabin; and the lower part in the electroplating treatment cabin is close to two sides above the positioning rollers, and two sides of the upper part in the electroplating treatment cabin are communicated with spraying pipes. According to the invention, through the electroplating treatment cabin, cavity diversion and bottom eddy current are utilized to accelerate electrolyte circulation, an anode plate and an inner cavity of the electroplating treatment cabin are overlapped to enlarge the anode action area, and through cooperation with conductive roller spacing and annular groove chamfering polishing, the plating thickness standard deviation is reduced, the yield is improved, and the comprehensive energy consumption is reduced; the limiting rollers are used for restraining deviation of an electroplating film conveying path, and high-speed electroplating of ultra-thin materials is adapted; the double-electrode effect can be eliminated during electroplating through the electroplating bath, and the process stability is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of electroplating processing, and in particular to a slotted annular roller roll-to-roll water electroplating processing equipment. Background Art

[0002] The electroplating process is a surface treatment technology that deposits metal coatings in a direction on the surface of a conductive substrate based on the principle of electrolysis. By using the material to be plated as the cathode, the metal ions are reduced and precipitated in the electrolyte to form a uniform coating with functions such as wear resistance, conductivity, and corrosion resistance. It is widely used in electronics, energy storage, aerospace and other fields.

[0003] Traditional electroplating equipment usually adopts a single tank structure, and the defects in anode layout and conductive system design can easily lead to uneven current density distribution, resulting in wrinkles or local thinning of the coating. Conventional conductive roller structures are prone to wrinkles due to film deviation during film transmission, causing holes or burning when power is applied. At the same time, residual electrolyte causes metal deposition on the surface of the conductive roller (such as the "coppering" phenomenon), further aggravating current density fluctuations and reducing coating consistency. The double-electrode effect generated by the water film between the roller and the membrane will cause abnormal current to act between the roller and the membrane, causing problems such as copper on the roller and scratches on the membrane surface, limiting the improvement of electroplating efficiency.

[0004] Existing improvement solutions, such as patent CN202410260557.2, extend the effective electroplating time and reduce friction through a double-sided conductive structure, a multi-anode layout, and an autonomous transmission mechanism. However, they still have the following shortcomings:

[0005] 1. The conductive roller cannot suppress film deviation and electrolyte residue, which limits the uniformity of the coating and the yield rate.

[0006] 2. The double-electrode effect is not effectively eliminated during high-speed electroplating, and the process stability is insufficient.

[0007] Therefore, a slotted annular roller roll-to-roll water electroplating processing equipment is specially designed to solve the above technical problems. Summary of the Invention

[0008] In order to overcome the shortcomings of the above-mentioned prior art, the purpose of the present invention is to provide a slotted annular roller roll-to-roll water electroplating processing equipment.

[0009] Technical solution: A slotted annular roller roll-to-roll water electroplating processing equipment, including a substrate and an electroplating processing chamber, an electroplating processing chamber integrated on the top of the substrate, a liquid infusion pipe connected to one side of the lower part of the electroplating processing chamber, a pump body is installed on the outside of the input end of the liquid infusion pipe, a positioning roller is rotated in the middle of the lower part of the electroplating processing chamber, and spray pipes are connected on both sides of the upper part of the electroplating processing chamber near the positioning roller, and on both sides of the upper part of the electroplating processing chamber. The rear ends of the two spray pipes are connected and pass through the electroplating processing chamber and are connected to the pump body. Two supports are symmetrically arranged on both sides of the top of the electroplating processing chamber, and a transmission roller is rotated between each two supports. A conductive roller 1 and a conductive roller 2 are symmetrically arranged at the same height in a horizontal direction. The spray pipe on the upper part of the electroplating treatment chamber is arranged on the upper inner side of the conductive roller 1 and the conductive roller 2. A conductive roller 3 and a conductive roller 4 are symmetrically arranged at the upper part of the electroplating treatment chamber. The outer surfaces of the conductive roller 1, the conductive roller 2, the conductive roller 3 and the conductive roller 4 are all provided with electroplating tanks of different shapes. The electroplating tanks can eliminate the double electrode effect during electroplating and improve the process stability. Two stacked stable anode plates are provided in the middle of the electroplating treatment chamber, and matching anode plates are provided on the two inclined side walls inside the electroplating treatment chamber, and a correction component is provided between the upper parts of the two supporting frames on one side.

[0010] As an improvement to the above scheme, a number of trapezoidal annular grooves are provided on the outer circumferential surface of the conductive roller at equal intervals along the axial direction, the cross-section of each trapezoidal annular groove is trapezoidal, the top width of the trapezoidal annular groove is greater than the bottom width, forming a trapezoidal guide structure, and the trapezoidal cross-section accelerates the radial flow of the electrolyte; a number of V-shaped annular grooves are provided on the outer circumferential surface of the conductive roller at equal intervals along the axial direction, the cross-section of each V-shaped annular groove is V-shaped, the angle of the inner wall of the V-shaped annular groove is 60° to 90°, and the sharp edge of the V-shaped groove is used to puncture the water film between the roller surface and the membrane.

[0011] As an improvement to the above scheme, a number of U-shaped ring grooves are provided at equal distances in the axial direction on the outer circumferential surface of the conductive roller three; a number of square ring grooves are provided at equal distances in the axial direction on the outer circumferential surface of the conductive roller four, the axis of each square ring groove is parallel to the axis of the conductive roller, and the cross-section of each square ring groove is rectangular, forming an equidistant array, covering the effective working area of the conductive roller four.

[0012] As an improvement to the above solution, the electroplating processing chamber is generally wide at the top and narrow at the bottom.

[0013] As an improvement to the above scheme, it also includes a pulley group and a motor 1. A pulley group is mounted between the outsides of the two ends of the central axis of the two transmission rollers. Motor 1 is installed on the outside of one of the support frames. The output shaft of motor 1 is connected to the central axis of one pulley of the pulley group. The pulleys in the front pulley group are distributed at one end of the two transmission rollers and the positioning roller.

[0014] As an improvement to the above solution, it also includes surge nozzles. Surge nozzles are installed on both sides of the lower part of the electroplating processing chamber. The two surge nozzles are arranged opposite to each other, and surge through holes are opened on the surge nozzles.

[0015] As an improvement to the above scheme, it also includes a support plate and a limiting roller. A support plate is arranged between the upper parts of the two supporting frames on one side. Two symmetrical limiting rollers are rotatably arranged on the inner side of the support plate. The electroplated film passes through the gap between the two limiting rollers and bypasses the surface of the transmission roller on the corresponding side.

[0016] As an improvement to the above scheme, the correction component includes a guide carrier plate, motor 2, a bidirectional screw and a positioning alarm. A guide carrier plate is arranged between the upper parts of the two supports on the other side. Motor 2 is installed on one side of the outside of the guide carrier plate. A bidirectional screw is arranged on the output shaft of motor 2. Two positioning alarms are slidingly arranged on the upper part of the guide carrier plate. The two positioning alarms are separated by the edge of the electroplated film, and the partition at the bottom of the positioning alarm is in contact with the electroplated film. The partitions at the bottom of the two positioning alarms are threadedly connected to the bidirectional screw.

[0017] Beneficial effects:

[0018] 1. The present invention accelerates the circulation of electrolyte by utilizing cavity diversion and bottom eddy current in the electroplating process chamber, and the design of overlapping anode plates and the inner cavity of the electroplating process chamber expands the anode active area. The spacing between conductive rollers and the chamfering and polishing of annular grooves are combined to achieve a reduction in the standard deviation of the coating thickness, an increase in the yield rate, and a reduction in overall energy consumption. The limiting rollers constrain the deviation of the electroplating film transmission path to adapt to high-speed electroplating of ultra-thin materials. The electroplating tank can eliminate the double-electrode effect during electroplating, thereby improving process stability.

[0019] 2. The equally spaced groove design of the present invention makes the flow of electrolyte on the surface of the conductive roller more uniform, reduces local concentration polarization, improves the uniformity and adhesion of the coating, is simpler to process and manufacture, and reduces production costs; each groove design also has its own advantages: Trapezoidal ring groove: The trapezoidal cross-section accelerates the radial flow of the electrolyte and improves the electroplating efficiency; V-shaped ring groove: The sharp edge of the V-shaped groove punctures the water film between the roller surface and the electroplating film, effectively suppresses the double electrode effect, and reduces current anomalies; U-shaped ring groove: Storing trace amounts of electrolyte to balance lateral tension and reduce the generation of coating wrinkles; Square ring groove: Discrete conductive surface, making the current density distribution more uniform and improving the coating quality. When the trapezoidal ring groove and the U-shaped ring groove are used together, the trapezoidal ring groove accelerates the radial flow of the electrolyte, while the U-shaped ring groove balances the lateral tension. The combination of the two makes the flow of the electrolyte on the surface of the conductive roller both fast and stable, thereby improving the electroplating efficiency and the coating quality. When the V-shaped ring groove and the square ring groove are used together, the V-shaped ring groove pierces the water film to suppress the double electrode effect, while the square ring groove discretizes the conductive surface to make the current density evenly distributed. The combination of the two effectively reduces the problems of current abnormality and uneven coating, thereby further improving the coating quality and electroplating stability.

[0020] 3. The present invention strengthens the ion exchange in the eddy current zone through the bottom surge nozzle, and the spray pipe sprays the electrolyte synchronously on the upper and lower surfaces of the membrane surface, eliminating local concentration polarization, reducing the porosity of the coating, and enhancing the adhesion.

[0021] 4. The present invention monitors the edge position of the membrane material in real time through a positioning alarm. When the limit is exceeded, the second motor is triggered to drive a bidirectional screw rod to adjust the contact position of the partition. The deviation correction response time is shortened, and the transmission roller and the positioning roller are coordinated and controlled to improve the deviation correction accuracy and reduce the scrap rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the assembly structure of the present invention.

[0023] Figure 2 This is a schematic planar cross-sectional view of the electroplating chamber of the present invention, showing components such as a conductive roller and a stable anode plate after being cut open.

[0024] Figure 3 It is a schematic cross-sectional view of the electroplating chamber, support frame, transmission roller and other components of the present invention.

[0025] Figure 4 This is a schematic diagram of the structure of the electroplating processing chamber, pulley assembly and motor components of the present invention.

[0026] Figure 5 It is a schematic diagram of the three-dimensional structure of the guide carrier plate, motor 2, bidirectional lead screw and other components of the present invention.

[0027] Figure 6 It is a side view structural diagram of the electroplating processing chamber, pulley assembly and other components of the present invention.

[0028] Figure 7 It is a rear structural schematic diagram of the electroplating processing chamber, infusion tube, pump body and other components of the present invention.

[0029] Figure 8 It is a plan view of the conductive roller 1 and the trapezoidal annular groove of the present invention.

[0030] Figure 9 It is a plan view of the conductive roller 2 and the V-shaped ring groove of the present invention.

[0031] Figure 10 It is a plan view of the conductive roller and the U-shaped ring groove of the present invention.

[0032] Figure 11 It is a plan view of the conductive roller and the square ring groove of the present invention.

[0033] Figure 12a It is a plan view of the conductive roller of the present invention installed in a horizontal electroplating cabin.

[0034] Figure 12bIt is a plan view of the conductive roller of the present invention installed in a trapezoidal electroplating cabin.

[0035] Figure 12c It is a plan view of the conductive roller of the present invention installed in a V-shaped electroplating cabin.

[0036] Figure 12d It is a plan view of the conductive roller of the present invention installed in a square electroplating cabin.

[0037] The numbers in the figure are: 1. Base plate, 2. Electroplating treatment chamber, 200. Electroplating film, 21. Infusion tube, 22. Pump body, 23. Spray pipe, 3. Support frame, 4. Transmission roller, 41. Pulley group, 42. Motor one, 5. Positioning roller, 6. Conductive roller one, 61. Conductive roller two, 62. Conductive roller three, 63. Conductive roller four, 60. Trapezoidal ring groove, 610. V-shaped ring groove, 620. U-shaped ring groove, 630. Square ring groove, 7. Stabilizing anode plate, 71. Matching anode plate, 8. Surge nozzle, 10. Support plate, 11. Limiting roller, 12. Guide carrier plate, 13. Motor two, 14. Bidirectional screw, 15. Positioning alarm. DETAILED DESCRIPTION

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0039] Example: A slotted annular roll-to-roll water electroplating treatment equipment, such as Figure 1-Figure 4 and Figures 6-11As shown, it includes a substrate 1, which serves as the basic supporting structure of the equipment and integrates all core components to ensure overall rigidity and stability. The top of the substrate 1 is integrated with an electroplating processing chamber 2, which is bolted to the substrate 1. The electroplating processing chamber 2 is generally wide at the top and narrow at the bottom. The width of the top opening is 1.5-2 times the width of the bottom closed area, and the side wall inclination angle is 15°-30°. The structure of the electroplating processing chamber 2 that is wide at the top and narrow at the bottom forms a natural diversion channel. The wide-opening design at the top facilitates the smooth entry of the electroplating film into the electroplating processing chamber 2, reducing the risk of scratches caused by friction between the film surface of the electroplating film 200 and the slot. The inclined sidewalls are 15°-30° to guide the electrolyte to converge naturally downward. A liquid delivery pipe 21 is connected to the rear side of the lower part of the electroplating process chamber 2 through a flange or thread. A pump body 22 is installed on the external input end of the liquid delivery pipe 21 through a pipeline. The liquid delivery pipe 21 delivers electrolyte to the electroplating process chamber 2. The pump body 22 provides power to regulate the liquid level. Spray pipes 23 are connected to both sides above the positioning roller 5 in the lower part of the electroplating process chamber 2 and both sides of the upper part of the electroplating process chamber 2. The rear ends of the two spray pipes 23 are connected and pass through the electroplating process chamber 2 and are connected to the pump body 22. The spray pipe 23 is 1.0-1.The electrolyte is sprayed onto the upper and lower surfaces of the electroplating film 200 at a pressure of 5MPa to eliminate local concentration polarization and improve the adhesion of the coating. During the electroplating process, the concentration of the electroplating solution on the surface of the electroplating film may produce local concentration polarization due to the uneven distribution of the electrochemical reaction, resulting in a decrease in the quality of the coating. The spray pipe 23 can effectively eliminate this local concentration polarization by synchronously spraying the electrolyte from top to bottom, ensuring the uniform distribution of the electrolyte on the surface of the electroplating film. Two supports 3 are symmetrically welded on both sides of the top of the electroplating processing chamber 2. A transmission roller 4 is provided between each of the two supports 3 through a bearing seat. The output shaft of the motor 42 is connected to the central axis of one of the pulleys of the pulley group 41, and the belt located on the front side The synchronous belt of the pulley group 41 is designed in an inverted triangle shape. The pulleys in the front pulley group 41 are distributed at one end of the two transmission rollers 4 and the positioning roller 5. A motor 42 is installed on the outside of one of the support frames 3 by bolts. The output shaft of the motor 42 is connected to the central axis of one of the pulleys of the pulley group 41. The transmission roller 4 pulls the electroplated film 200 to form a closed-loop transmission path; the pulley group 41 is driven by the motor 42 to achieve stepless speed regulation. When the motor 42 is started, the output shaft drives the pulley connected to it to rotate, and then drives all the pulleys in the entire pulley group 41 to rotate synchronously through the synchronous belt. Since the pulleys in the pulley group 41 are respectively installed at the ends of the transmission roller 4 and the positioning roller 5, The parts, so their rotation will drive the transmission roller 4 and the positioning roller 5 to rotate synchronously, and the pulley group 41 drives the transmission roller 4 and the positioning roller 5 to rotate synchronously, thereby pulling the electroplating film 200 to form a closed-loop transmission path in the electroplating processing chamber 2. This closed-loop transmission path helps to ensure the stability and continuity of the electroplating film 200 during the electroplating process, and ensures that the tension and speed of the electroplating film 200 during the transmission process remain constant, thereby improving the transmission efficiency and reducing electroplating defects caused by transmission problems. The top of the electroplating processing chamber 2 is provided with a horizontally symmetrical conductive roller 1 6 and a conductive roller 2 61. The spray pipe 23 on the upper part of the electroplating processing chamber 2 is arranged on the inward side of the conductive roller 1 6 and the conductive roller 2 61. Above, the electroplating chamber 2 has a horizontally symmetrical conductive roller 3 62 and conductive roller 4 63 rotating in the upper part. The upper conductive roller 1 6 and conductive roller 2 61 and the lower conductive roller 3 62 and conductive roller 4 63 are staggered in axial projection. The outer surfaces of the conductive rollers 1 6, 2 61, 3 62 and 4 63 are all provided with electroplating tanks of different shapes. The nozzle of the upper spray pipe 23 is aligned with the electroplating tank. The electroplating tanks of different shapes are flushed through the spray pipe 23 to prevent the electroplating solution and impurities from remaining in the electroplating tank for a long time. A number of trapezoidal annular grooves 60 are equidistantly provided along the axial direction on the outer circumference of the conductive roller 1 6. The cross section of each trapezoidal annular groove 60 is trapezoidal (see for details). Figure 8 ), the top width of the trapezoidal annular groove 60 is greater than the bottom width, forming a trapezoidal flow guide structure, and the trapezoidal cross section accelerates the radial flow of the electrolyte; a plurality of V-shaped annular grooves 610 are provided on the outer circumferential surface of the conductive roller 2 61 at equal intervals along the axial direction, and the cross section of each V-shaped annular groove 610 is V-shaped (for details, please refer to Figure 9 ), the inner wall angle of the V-shaped ring groove 610 is 60° to 90°, and the sharp edge of the V-shaped ring groove 610 can puncture the water film between the roller surface and the membrane; a plurality of U-shaped ring grooves 620 are provided on the outer circumferential surface of the conductive roller 3 62 at equal intervals along the axial direction, and each U-shaped ring groove 620 has a U-shaped cross section (see Figure 10 ) In the outer circumferential surface of the conductive roller 63 four equidistantly along the axial direction to open a number of square annular grooves 630, each square annular groove 630 is a rectangular cross-section (for details, please refer to Figure 11 ), forming an equidistant array, covering the effective working area of the conductive roller 4 63; the groove width of the trapezoidal ring groove 60, the V-shaped ring groove 610, the U-shaped ring groove 620 and the square ring groove 630 is 0.1mm-3mm, and the groove depth is 0.1mm-30mm. The groove width range of the present invention is narrower, which means that the grooves on the surface of the conductive roller are smaller and more precise, which helps to more finely control the flow path and speed of the electrolyte, reduce the retention and waste of the electrolyte in the groove, and improve the electroplating efficiency; the deeper groove depth (up to 30mm) allows for the storage of more electrolyte, which is beneficial for balancing the lateral tension, reducing the current density fluctuation and improving the uniformity of the coating. The smaller groove width and moderate groove depth help to achieve a more uniform current distribution and reduce the current caused by Plating defects caused by uneven density; the conductive roller 2 61 uses the sharp edge of the V-shaped ring groove 610 to pierce the water film between the electroplating roller and the electroplating film 200 to suppress the double electrode effect (current anomaly rate ≤ 2%), the conductive roller 3 62 stores a trace amount of electrolyte through the U-shaped ring groove 620 to balance the lateral tension (wrinkle rate < 0.3%), and the conductive roller 4 63 cuts off the continuous conductive surface through the discrete square ring groove 630, so that the standard deviation of the current density distribution is ≤ 8%. Two stacked stable anode plates 7 are provided in the middle of the electroplating treatment chamber 2 by bolts, and matching anode plates 71 are provided on the two inclined side walls inside the electroplating treatment chamber 2 by bolts. The stacked stable anode plates 7 expand the effective working area of the anode, and the inclined side walls cooperate with the anode plate 71 to form a wedge-shaped diffusion cavity, which can enhance the ion exchange efficiency and improve the deposition rate.

[0040] like Figure 2 and Figure 3 As shown, it also includes a surge nozzle 8. The surge nozzles 8 are installed on both sides of the lower part of the electroplating processing chamber 2 through flanges or threads. The two surge nozzles 8 are arranged opposite to each other, and a surge through hole is opened on the surge nozzle 8. The surge through hole strengthens the ion exchange in the eddy current area and eliminates the porosity of the coating.

[0041] like Figure 1-Figure 3 As shown, it also includes a support plate 10 and a limiting roller 11. The support plate 10 is arranged between the upper parts of the two supporting frames 3 on one side. Two symmetrical limiting rollers 11 are rotatably arranged on the inner side of the support plate 10. The electroplated film 200 passes through the gap between the two limiting rollers 11 to bypass the surface of the transmission roller 4 on the corresponding side. The support plate 10 supports the limiting roller 11 to constrain the transmission path deviation threshold of the electroplated film 200.

[0042] like Figure 2 and Figure 5 As shown, it also includes a guide carrier plate 12, a second motor 13, a bidirectional screw 14 and a positioning alarm 15. A guide carrier plate 12 is arranged between the upper parts of the two support frames 3 on the other side. A second motor 13 is installed on one side of the outer side of the guide carrier plate 12. A bidirectional screw 14 is arranged on the output shaft of the second motor 13. Two positioning alarms 15 are slidingly arranged on the guide carrier plate 12. The two positioning alarms 15 are separated by the edge of the electroplating film 200, and the lower partition of the positioning alarm 15 is in contact with the electroplating film 200. The lower partitions of the two positioning alarms 15 are threadedly connected with the bidirectional screw 14. The positioning alarm 15 monitors the edge offset of the electroplating film 200 in real time. When the limit is exceeded, the second motor 13 is triggered to drive the bidirectional screw 14 to adjust the partition position. The correction response is ≤0.5 seconds and the accuracy is ±0.1mm.

[0043] When the equipment is started, the pump body 22 injects electrolyte into the quadrangular pyramid electroplating treatment chamber 2 through the infusion pipe 21 to a liquid level of 80%, and the conductive roller 1 6, the conductive roller 2 61, the conductive roller 3 62, and the conductive roller 4 63 are powered on and preheated to 40-50°C to eliminate contact resistance; the electroplating film 200 is pulled into the electroplating treatment chamber 2 by the transmission roller 4, and successively bypasses the limit roller 11, the conductive roller 1 6, the conductive roller 3 62, the conductive roller 4 63, and the conductive roller 2 61 (forming a closed-loop transmission path. In the dynamic electroplating stage, the spray pipe 23 sprays electrolyte onto the upper and lower surfaces of the electroplating film 200 at a pressure of 1.0-1.5 MPa. The surge nozzle 8 strengthens ion exchange through the bottom vortex acceleration zone. The two stacked stable anode plates 7 and the inclined side walls form a wedge-shaped diffusion cavity, which cooperates with the positioning alarm 15 to realize The deviation of the electroplating film 200 is monitored in real time (threshold ±0.5mm). When the limit is exceeded, the motor 2 13 is triggered to drive the bidirectional screw 14 to adjust the position of the positioning alarm 15, so that the partition at the bottom of the positioning alarm 15 contacts the edge of the electroplating film 200, and the transmission roller 4 and the positioning roller 5 are coordinated to correct the deviation. During the electrolyte circulation stage, the waste liquid flows back to the external filtration system through the infusion pipe 21 through the eddy current zone at the bottom of the tetrahedron of the electroplating treatment chamber 2, and cooperates with and can cooperate with the existing online sensors to adjust the pH value (±0.2) and metal ion concentration (fluctuation ≤±3%) in real time; after shutdown, the reverse current dissolves the roller surface deposits (the "copper" thickness is less than 0.1μm), and the wall of the electroplating treatment chamber 2 is polished regularly to maintain the diversion effect. During high-speed transmission, the motor 1 42 realizes stepless speed regulation through the pulley group 41.

[0044] Inside the electroplating treatment device, two stable anode plates 7 are installed on the inner wall of the electroplating treatment chamber 2 and are parallel to the running track of the electroplating film 200. Their optimal length is 100mm to 1500mm, and their shapes are both long strips; two matching anode plates 71 arranged in the middle of the electroplating treatment device are installed close together on the inner wall of one end of the electroplating treatment chamber 2, and the optimal width L of the matching anode plates 71 is between 20mm-100mm; the anode plates are set as inclined long strips and lengthened as needed to enhance the effective distance of electroplating.

[0045] Secondly, two surge nozzles 8 are respectively installed at the lower side ends of the middle vertical anode, and their positions are parallel and corresponding to each other; two spray pipes 23 are installed symmetrically at the two corners of the bottom of the electroplating processing chamber 2.

[0046] During the electroplating process, the conductive roller acts as a cathode to conduct electricity for the electroplated film 200, and then transfers the electroplated film 200 to the electroplating processing chamber 2 for electroplating.

[0047] The electroplating tank of the present invention can be equipped with multiple electroplating chambers according to actual production needs.

[0048] The installation specifications of the conductive rollers of the present invention are as follows: conductive roller 1 6, conductive roller 2 61, conductive roller 3 62, and conductive roller 4 63 are respectively installed outside and inside the electroplating process chamber 2 in an up-down staggered combination. The distance between adjacent conductive roller surfaces is controlled to be 10 mm to 300 mm. The distance between the conductive roller located above the electroplating process chamber 2 and the liquid level in the tank is 5 mm to 200 mm. Shortening the distance between the conductive rollers and the liquid level can stabilize the current and voltage, reduce resistance, and reduce film surface oxidation.

[0049] In addition, all conductive rollers use 300 series annular conductive rollers, and annular grooves are evenly opened on the surface of the roller. The design points are as follows: the grooving method uses annular grooves evenly distributed around the roller, with a groove spacing of 0.2mm-100mm, a groove width of 0.1mm-3mm, and a groove depth of 0.1mm-30mm. The chamfering treatment uses a R0.05mm-R0.9mm chamfering cutter head to chamfer the groove edge (chamfer radius R0.01mm-0.9mm), and is polished with a grinding wheel polishing machine or a vibration polishing groove to ensure that the groove edge is smooth and burr-free. The groove type classification is based on functional requirements. The annular groove can be designed as trapezoidal, V-shaped, square, or U-shaped, and the starting and ending points of the grooving are adjusted according to the product width.

[0050] The conductive roller of the present invention can be applied to various types of electroplating chambers, such as horizontal electroplating chambers, V-shaped electroplating chambers, square electroplating chambers, and ladder-shaped electroplating chambers, and the following examples are provided:

[0051] Type 1: Horizontal plating chamber (please refer to Figure 12a), the conductive rollers and the water-blocking rollers are arranged horizontally and symmetrically, with a total of 6 conductive rollers (divided into 3 groups, with a vertical spacing of 15-50mm between each group) and 8 water-blocking rollers (divided into 4 groups, with a vertical spacing of 10-30mm between each group). The conductive roller groups and the water-blocking roller groups are distributed alternately. The conductive roller groups are installed at the entrance, middle and exit areas of the electroplating treatment chamber 2. The water-blocking roller groups are distributed on both sides of the electroplating treatment chamber 2 and at the junction of the liquid surface to suppress splashing of the electrolyte. During transmission, the product film penetrates from the middle of the first group of conductive rollers (entrance group), with a spacing of 20-80mm between the conductive rollers and a distance of 5-50mm between the roller surface and the liquid surface. It is guided to the bottom of the liquid surface by the first group of water-blocking rollers (with a vertical spacing of 10-20mm) and enters In the electroplating area of the electroplating treatment chamber 2, after passing through the second set of water-blocking rollers, the second set of conductive rollers (middle group) stabilizes the current distribution, and the surface of the conductive roller adopts T-shaped annular grooves (groove width 0.5-1.5mm) to guide the electrolyte. After entering the electroplating treatment chamber 2 again, the path is adjusted by the third set of water-blocking rollers, and finally the electroplating is completed by the third group of conductive rollers (exit group). The surface of the conductive roller adopts square annular grooves (groove depth 5-15mm) to discretize the current, and the transmission adopts dual-spindle synchronous drive (power 5-15kW), and the linear speed of the transmission roller 4 is 5-20m / min, which is suitable for continuous electroplating of wide PCB boards (width 1.2-2.5m) or lithium battery current collectors (thickness 8-20μm).

[0052] Type 2: Ladder-type electroplating chamber (please refer to Figure 12b ), four pairs of conductive rollers (8 in total) are distributed along a stepped path, with each set of conductive rollers having a vertical spacing of 30-100mm and a horizontal spacing of 50-200mm. The transmission rollers 4 are divided into a high-level line (the first, fourth, and seventh rollers) and a low-level line (the second, third, fifth, and sixth rollers). The vertical drop between the high-level line and the low-level line is 150-300mm. During transmission, the product film enters from the first transmission roller 4 of the high-level line, passes through the first pair of conductive rollers, and then obliquely downwards penetrates into the second transmission roller 4 of the low-level line with an inclination angle of 15-30°. After the third transmission roller 4 is adjusted, the second pair of conductive rollers (V-shaped annular groove, groove width 0.3-1.0mm) pierces the water film on the membrane surface, reduces the current abnormality, and penetrates the high-level line fourth transmission roller 4 upward, and then stabilizes the current through the third pair of conductive rollers. Finally, the electroplating is completed through the low-level line fifth and sixth transmission rollers 4 and the fourth pair of conductive rollers. The transmission method adopts high-precision servo belt drive (speed error ±0.5%), which is suitable for ultra-thin copper foil (thickness ≤ 6μm) or flexible circuit board electroplating, and the current density is 3-10A / dm 2 .

[0053] Type 3: V-type electroplating chamber (please refer to Figure 12c), four pairs of conductive rollers are symmetrically distributed in a V shape, with a left-right offset spacing of 50-150mm. The vertical drop between the bottom transmission rollers 4 (the second and fifth rollers) and the top transmission rollers 4 (the first, third, fourth, and sixth rollers) of the cabin is 200-500mm. The surface of the conductive roller adopts a V-shaped annular groove (groove depth 10-25mm, chamfer radius R0.1-0.5mm) to enhance the film breaking effect. During transmission, the product film enters from the top first transmission roller 4, passes through the first pair of conductive rollers, and then goes down to the bottom second transmission roller 4. The path inclination angle is 25-45°, and then goes up through the second pair of conductive rollers (oblique upper path) to the third transmission roller 4, and then horizontally penetrates the fourth transmission roller 4. The third pair of conductive rollers on the lower right side guides the film material to the bottom fifth transmission roller 4, and finally returns to the top through the fourth pair of conductive rollers to complete the electroplating. The transmission method adopts multi-stage belt linkage, which supports complex folding line paths. It is suitable for special-shaped film materials (such as curved glass coating) or multi-layer composite material electroplating, and the coating thickness uniformity CV≤3%.

[0054] Type 4: Square electroplating chamber (please refer to Figure 12d ), four pairs of conductive rollers are distributed along the square loop close to the transmission roller 4, the horizontal spacing between the upper and lower transmission rollers 4 is 200-500mm, the vertical drop between the bottom transmission rollers 4 (the second, third, sixth, and seventh rollers) and the top transmission rollers 4 (the first, fourth, fifth, and eighth rollers) is 300-800mm, and the surface of the conductive roller adopts a U-shaped annular groove (groove width 2-3mm, liquid storage volume 0.05-0.2mL / m) to balance the lateral tension. During the transmission path, the product film enters from the first transmission roller 4 at the top, passes through the first pair of conductive rollers vertically downward It passes through the second and third transmission rollers 4 at the bottom, and the path turns at a right angle, goes up through the second pair of conductive rollers to the fourth transmission roller 4 at the top, moves horizontally to the fifth transmission roller 4, and then passes down to the sixth and seventh transmission rollers 4 at the bottom again, and finally returns to the top through the fourth pair of conductive rollers to complete the electroplating, forming a closed square loop throughout the process. The transmission method adopts distributed belt drive, which supports electroplating of large-size photovoltaic backsheets (width ≥ 3m) or metallized packaging films, with a transmission speed of 10-15m / min and a coating adhesion ≥ 5N / cm.

[0055] The above description is merely an example of the present invention and is not intended to limit the present invention. Any equivalent substitutions made within the principles of the present invention are intended to be included within the scope of protection of the present invention. Any content not elaborated in detail herein is already known to those skilled in the art.

Claims

1. A slotted annular roll-to-roll water electroplating treatment equipment, comprising a substrate (1) and an electroplating treatment chamber (2), wherein the electroplating treatment chamber (2) is integrated on the top of the substrate (1), and is characterized in that: A liquid infusion pipe (21) is connected to one side of the lower part of the electroplating process chamber (2), and a pump body (22) is installed on the outside of the input end of the liquid infusion pipe (21). A positioning roller (5) is rotatably provided in the middle of the lower part of the electroplating process chamber (2). Both sides above the positioning roller (5) in the lower part of the electroplating process chamber (2) and both sides of the upper part of the electroplating process chamber (2) are connected with spray pipes (23). The rear ends of the two spray pipes (23) are connected and pass through the electroplating process chamber (2) and are connected to the pump body (22). Two supporting frames (3) are symmetrically provided on both sides of the top of the electroplating process chamber (2). A transmission roller (4) is rotatably provided between each two supporting frames (3). A conductive roller symmetrically provided at the top of the electroplating process chamber (2) is rotatably provided. Roller 1 (6) and conductive roller 2 (61), the spray pipe (23) at the upper part of the electroplating treatment chamber (2) is arranged on the upper side of the conductive roller 1 (6) and the conductive roller 2 (61) facing inward, the upper part of the electroplating treatment chamber (2) is provided with a horizontally symmetrical conductive roller 3 (62) and a conductive roller 4 (63), the outer surfaces of the conductive roller 1 (6), the conductive roller 2 (61), the conductive roller 3 (62) and the conductive roller 4 (63) are all provided with electroplating tanks of different shapes, two stacked stable anode plates (7) are provided in the middle of the electroplating treatment chamber (2), matching anode plates (71) are provided on the two inclined side walls inside the electroplating treatment chamber (2), and a correction component is provided between the upper parts of the two support frames (3) on one side.

2. The slotted ring roller roll-to-roll water electroplating treatment equipment according to claim 1, characterized in that: A plurality of trapezoidal annular grooves (60) are provided at equal intervals along the axial direction on the outer circumferential surface of the conductive roller 1 (6), the cross section of each trapezoidal annular groove (60) being trapezoidal, the top width of the trapezoidal annular groove (60) being greater than the bottom width, thereby forming a trapezoidal flow guide structure; a plurality of V-shaped annular grooves (610) are provided at equal intervals along the axial direction on the outer circumferential surface of the conductive roller 2 (61), the cross section of each V-shaped annular groove (610) being V-shaped.

3. The slotted ring roller roll-to-roll water electroplating treatment equipment according to claim 2, characterized in that: A plurality of U-shaped annular grooves (620) are provided at equal intervals along the axial direction on the outer circumferential surface of the conductive roller three (62); a plurality of square annular grooves are provided at equal intervals along the axial direction on the outer circumferential surface of the conductive roller four (63), the axes of the square annular grooves being parallel to the axis of the conductive roller, the cross section of each square annular groove being rectangular, forming an equidistant array covering the effective working area of the conductive roller four (63).

4. The slotted ring roller roll-to-roll water electroplating treatment equipment according to claim 1, characterized in that: The electroplating treatment chamber (2) is generally wide at the top and narrow at the bottom.

5. The slotted ring-shaped roll-to-roll water electroplating treatment equipment according to claim 4, characterized in that: The invention also includes a pulley group (41) and a motor (42). The pulley group (41) is sleeved between the outer ends of the central axes of the two transmission rollers (4). The motor (42) is installed on the outside of one of the support frames (3). The output shaft of the motor (42) is connected to the central axis of one of the pulleys of the pulley group (41). The pulleys in the front pulley group (41) are distributed at one end of the two transmission rollers (4) and the positioning roller (5).

6. The slotted ring roller roll-to-roll water electroplating treatment equipment according to claim 1, characterized in that: It also includes a surge nozzle (8), which is installed on both sides of the lower part of the electroplating processing chamber (2). The two surge nozzles (8) are arranged opposite to each other, and a surge through hole is opened on the surge nozzle (8).

7. The slotted ring-shaped roll-to-roll water electroplating equipment according to claim 5, characterized in that: The invention also includes a support plate (10) and a limiting roller (11). The support plate (10) is arranged between the upper parts of the two support frames (3) on one side. Two symmetrical limiting rollers (11) are rotatably arranged inside the support plate (10). The electroplated film (200) passes through the gap between the two limiting rollers (11) and bypasses the surface of the transmission roller (4) on the corresponding side.

8. The slotted ring-shaped roll-to-roll water electroplating equipment according to claim 7, characterized in that: The deviation correction component comprises a guide carrier plate (12), a second motor (13), a bidirectional screw rod (14) and a positioning alarm (15); a guide carrier plate (12) is arranged between the upper parts of the two support frames (3) on the other side; a second motor (13) is installed on one side of the outer side of the guide carrier plate (12); a bidirectional screw rod (14) is arranged on the output shaft of the second motor (13); two positioning alarms (15) are slidingly arranged on the upper part of the guide carrier plate (12); the two positioning alarms (15) are separated by the edge of the electroplating film (200), and the partitions at the lower parts of the positioning alarms (15) are in contact with the electroplating film (200); and the partitions at the lower parts of the two positioning alarms (15) are threadedly connected to the bidirectional screw rod (14).

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