Multi-lens detection auxiliary device based on three-jaw adsorption structure

Abstract

The invention relates to a multi-lens detection auxiliary device based on a three-jaw adsorption structure, and the principle of the multi-lens detection auxiliary device is that a designed three-jaw adsorption module can control an adsorption cylinder module to adsorb three detected lenses at the same time and can realize the rotation of each detected lens; and after first-step measurement is carried out on the measured mirror (at the moment, all surface shapes still cannot be reconstructed due to shielding of the steel wire), the adsorption cylinder module can suck the measured measured mirror and then rotate, the part, which is previously shielded by the steel wire, of the measured mirror is measured again, and the process is repeated for three times, so that one-time grabbing can be carried out, and the measurement efficiency is improved. The surface full-field detection of the three detected pieces can be quickly realized; the crank rocker module can drive the lifting module to drive the whole three-jaw rotation control module to move horizontally, and the storage box module can store and unfold three tested mirrors at the same time. The magnetic attraction control module can achieve rapid fixing and dismounting of the storage box module by actively controlling magnetic pole conversion.

Description

Technical Field

[0001] The present invention relates to a multi-lens detection auxiliary device based on a three-claw adsorption structure. This device can simultaneously absorb three test mirrors through a three-claw adsorption plate, and each test mirror can achieve surface rotation when being absorbed, thereby avoiding the occlusion problem during inverted interferometry measurement, and can also achieve rapid and non-destructive movement and replacement of multiple test mirrors. The designed storage bin module can fold and store three test mirrors at the same time, which can significantly save storage space for the test parts. At the same time, the storage bin module also has the function of rapid assembly and disassembly. The designed device can quickly measure multiple test mirrors and save storage space, which can improve the detection efficiency of the test mirrors. Background Art

[0002] Optical components are crucial parts in optical systems, and high-precision machining and surface inspection are crucial for ensuring optical system performance. During this process, due to the extremely high requirements for parameters such as surface roughness and flatness, high-precision measurement of the surface shape (i.e., the height distribution of the surface topography) of high-end optical components after machining is crucial. This directly impacts whether the machining quality of high-end optical components meets the requirements. Among the many measurement technologies, phase-shifting interferometry, with its advantages of non-destructive measurement and high-precision three-dimensional surface reconstruction, has become one of the most accurate detection methods currently available.

[0003] An interferometer is a precision instrument that uses interference phenomena to accurately detect physical quantities such as the length, displacement, and surface undulation of the object being measured. It is also the main hardware device for realizing surface morphology interference measurement. The essence of phase-shifting interferometry measurement technology is to obtain the surface morphology information of the object being measured by actively changing the phase of the light wave, and then to achieve high-precision surface reconstruction of the measured object. The general implementation method of the phase-shifting interferometry measurement method is as follows: the interferometer emits a laser beam, which passes through the reference mirror and the measured mirror in turn after beam expansion and collimation. The laser forms an interference phenomenon in the interference cavity. At this time, the image acquisition system in the interferometer is used to collect multiple frames of interference intensity maps. The initial phase of each surface of the measured mirror is hidden in the interference intensity map. After demodulating the initial phase, the surface reconstruction of each surface of the measured mirror can be achieved.

[0004] Currently, the main types of interferometers include Fizeau interferometer, Rayleigh interferometer, point diffraction interferometer, etc. Among them, Fizeau interferometer is a common-path interferometer with a relatively simple structure. It also has relatively excellent anti-interference performance and clearly distinguishable interference fringes, so it is widely used. At present, Fizeau interferometers mainly have horizontal, vertical, inverted and other main structural forms. Among them, when using a horizontal Fizeau interferometer for phase-shifting interferometry, it is necessary to use a fixture to clamp the edge of the measured object to achieve the fixation of the measured object. However, when measuring a thin measured mirror, since the thin measured mirror itself is relatively thin, when a fixture is used to clamp its edge, the thin measured mirror will produce obvious surface deformation (if the measurement is performed at this time, its true surface features cannot be obtained because the surface deformation is much greater than the surface morphology height of the measured object), and even damage the measured object. Therefore, a vertical or inverted Fizeau interferometer is often used to measure thin measured mirrors.

[0005] Currently, when measuring thin mirrors under test, the mainstream inverted Fizeau interferometer requires setting multiple steel wires above the reference mirror fixture. The thin mirror under test is then naturally placed on these steel wires to support the test piece before measurement is carried out. This avoids the deformation problem caused by the fixture clamping the edge of the thin mirror under test in traditional measurement methods. However, the defects of this test piece clamping method are also very obvious: because the steel wires are set at the bottom of the test piece to support the test piece, the steel wires will block the bottom-up light beam emitted by the light source in the interferometer. At this time, the collected interference image cannot include the surface information of the test piece blocked by the steel wires, and thus the full-field (all test aperture) morphological information of the test piece surface cannot be obtained. For this measurement method, if the entire surface topography of the test piece is to be measured, the test piece must be rotated again and the surface shape of the previously obscured portion of the test mirror must be inspected. This process currently relies primarily on manual movement or rotation of the test piece to reacquire the previously obscured surface shape information. Obviously, this direct contact of the mirror surface by human hands may contaminate the surface of the test piece or even damage it. Furthermore, when removing the test piece from the material storage and placing it on the interferometer, the traditional method often involves manual gripping and placement. This method is inefficient and prone to damage the test piece. Furthermore, removing and inspecting the test piece one by one cannot meet the needs of multiple test mirrors for rapid measurement. Furthermore, in traditional measurement methods, the storage bin that holds the test mirrors cannot interact with the inspection system, making the storage and transportation of the test pieces more complicated, resulting in low measurement efficiency.

[0006] Based on the above analysis, we can see that the traditional thin-type measured mirror interferometry system usually has the following problems:

[0007] (1) When performing optical interferometry on thin test mirrors, the traditional approach is to place the thin test mirror on multiple steel wires and then perform the measurement. However, the steel wires used in this measurement method block the test beam, making it impossible to detect the mirror surface in direct contact with the steel wires, making full-field detection impossible.

[0008] (2) In interferometry, the traditional method of moving the measured object is to directly grasp the edge of the thin measured mirror by hand, rotate it, and then place it back on the wire for measurement. During this process, direct contact with the human hand may damage the mirror surface of the measured mirror and cause external interference to the measurement system, thereby affecting the measurement accuracy. Therefore, it is necessary to avoid direct human contact to protect the high-precision optical lens and prevent it from being damaged during the measurement process.

[0009] (3) When performing interferometric measurement on thin test mirrors, traditional methods cannot achieve rapid and automatic replacement of the test mirror. Therefore, it is necessary to improve the automation level of the system and minimize the introduction of additional measurement errors and disturbances.

[0010] (4) The traditional inverted interferometer does not have a special storage device to match the automatic detection system.

[0011] Among the existing technologies and devices, the inventors of this patent, Chang Lin and others, have invented the method of measuring and selecting algorithms for multi-surface test pieces at arbitrary measurement positions in the patents "A method for measuring and selecting algorithms for multi-surface test pieces at arbitrary measurement positions - ZL202010502586" and "A multi-surface measurement method based on high-precision fitting of phase shift characteristic polynomials - ZL202010595133" and the papers "Lin Chang, Jiehua Gao, Fangxiang Zhuang, et al. Superimposed Multi-harmonic Interference Frequency and Phase Measurements based on Non-synchronous Sampling Quantization and All-phase Spectrum Correction[J]. Measurement, 2024, 115114" (SCI retrieval), "Lin Chang, Qichao Shen, Jiehua Gao, Yiqing Cao, Junyi Min, Yingjie Yu. Multi-parameter Reconstruction of Interference Harmonics by Effective Tuning Combination Selection and Sampling Boundary Fitting[J]. OPTICS AND LASER" and " TECHNOLOGY, 2024, 181: 111835. (SCI retrieval) The innovative device and algorithm designed, presented in the patent, achieve the goals of efficient and precise optical detection algorithm design, accurate reconstruction of measured distances in an interference system, and accurate estimation of interference harmonic frequencies. They feature good cavity length adaptability and high measurement accuracy. However, the innovative structures and algorithms described in the aforementioned patent and paper cannot solve the following problems: first, the inability to directly measure the obscured portion of a thin test mirror; second, the problem of contamination of the thin test mirror surface by direct human contact; third, the inability to automatically replace and quickly measure multiple test mirrors; and fourth, the difficulty in matching the storage device with the automatic detection system.

[0012] In view of this, the present invention innovatively proposes a multi-lens inspection auxiliary device based on a three-claw adsorption structure. This device uses negative pressure adsorption technology to simultaneously and non-destructively move and replace three thin test mirrors, achieving non-destructive and rapid full-field measurement of thin test mirrors. Summary of the Invention

[0013] The purpose of the present invention is to overcome the shortcomings of the existing technology and propose a multi-lens detection auxiliary device based on a three-claw adsorption structure, which aims to solve the defects in the existing measurement method.

[0014] The present invention designs a multi-lens detection auxiliary device based on a three-claw adsorption structure, whose main modules include: an interferometer fixed platform module, a crank rocker module, a lifting module, a three-claw rotation control module, an adsorption cylinder module, a storage box module, and a magnetic control module.

[0015] The principle of the present invention is that in a vertical interferometry measurement system for a thin mirror to be measured, the interferometer is vertically fixed in the interferometer fixing platform module, the measuring optical path is perpendicular to the horizontal plane, the light beam emitted from the interferometer light source is emitted from the bottom to the top and is reflected by the surface of the measured object and the reference mirror surface in the interferometer, and then the reflected light beams from the surface of the measured object and the surface of the reference mirror interfere with each other to produce an interference pattern. These images can be collected by a camera and the surface shape of the measured mirror can be reconstructed based on them. This is the basic process and principle of interferometry measurement. When using the device designed by this patent to perform interference measurement, the designed three-claw adsorption module can control the adsorption cylinder module to simultaneously adsorb three measured mirrors and can realize the rotation of each measured mirror. After the first step of measurement of the measured mirror (at this time, due to the obstruction of the steel wire, all surface shapes cannot be reconstructed), the adsorption cylinder module can absorb the measured mirror after the measurement is completed and rotate it, and re-measure the part of the measured mirror previously obscured by the steel wire. Repeating the above process three times can quickly realize full-field surface detection of the three measured parts through one grabbing; the crank rocker module can drive the lifting module to drive the entire three-claw rotation control module to move horizontally, and the storage box module can simultaneously store and unfold the three measured mirrors; the magnetic control module can realize rapid fixation and disassembly of the storage box module by actively controlling the magnetic pole transformation.

[0016] Preferably, the interferometer fixed platform module specifically includes: a fixed platform body, a prism, an interferometer, a measured mirror tray, a tray through hole, a prism tenon, a tenon block, a tenon block through hole, a tenon pin, a tray threaded rod, an interferometer threaded hole, a tray threaded rod shoulder, a crank rocker base fixing hole, a storage platform limit rod, a servo fixing rod through hole, a magnetic control module mounting slot, a knob through hole, and an interferometer tenon groove; the connection method and specific characteristics of the various parts of the interferometer fixed platform module are as follows: the fixed platform body is placed on the air-floating anti-vibration platform through the four prisms arranged at the bottom, the outer surface of the interferometer and the inner side of the four prisms are respectively provided with a prism tenon groove and an interferometer tenon groove, a tenon block through hole is provided at the center of the tenon block, and the tenon pin can pass through the two tenon block through holes on the two tenons respectively and make the prism and the fixed platform interferometer ... The two tenons on the platform body are fastened together. After the prism is fastened together with the two tenons on the fixed platform body, the two ends of the prism and the two tenons on the fixed platform body are fastened to the prism tenon groove on the inner side of the prism and the interferometer tenon groove on the outer surface of the interferometer by interference fit, so that the interferometer is fixed in the central cavity of the four prisms. A tray through hole is provided on the measured mirror tray, and a tray threaded rod shoulder is provided in the middle of the tray threaded rod. The top of the tray threaded rod is connected to the tray through hole by interference fit, and the tray threaded rod is fixed to the interferometer threaded hole provided on the top of the interferometer by threaded connection. The upper surface of the fixed platform body is provided with a crank rocker base fixing hole, a storage platform limit rod, a servo fixing rod through hole, and a magnetic control module mounting slot, and a knob through hole is provided on the side of the fixed platform body.

[0017] Preferably, the crank rocker module specifically includes: a crank rocker base, a crank support platform, a rocker support platform, a crank end cover, a crank end cover baffle, a crank motor, a crank motor fixing bolt, a driving crank, a crank motor fixing threaded hole, a transmission connecting rod, a connecting rod groove, a connecting rod groove end cover, a crank cylinder, a connecting rod through hole, a connecting rod groove end cover threaded hole, a connecting rod groove end cover bolt, a connecting rod hinge, a crank rocker base fixing bolt, a rocker support platform through hole, and a crank end cover groove; the connection method and specific characteristics of each part of the crank rocker module are as follows: the crank rocker base is fastened to the crank rocker base fixing hole in the interferometer fixing platform module through a threaded connection, a crank support platform and a rocker support platform are respectively provided above the crank rocker base, and the top of the rocker support platform A rocker support platform through hole is provided, and a crank motor threaded hole is provided on the top of the crank support platform. The crank motor fixing bolt and the crank motor threaded hole are threadedly connected to fix the crank end cover to the crank support platform. The crank motor is placed in the crank end cover and drives the driving crank to rotate. The crank end cover baffle is inserted into the crank end cover groove to limit the position of the crank motor. A crank cylinder is provided on the edge of the driving crank, and a connecting rod through hole and a connecting rod groove are respectively provided at both ends of the transmission connecting rod. The connecting rod hinge is matched with the connecting rod through hole through clearance fit. The crank cylinder is placed in the connecting rod groove to drive the transmission connecting rod to rotate. The connecting rod groove end cover bolt and the connecting rod groove end cover threaded hole set on the connecting rod groove are threadedly connected to fix the connecting rod groove end cover to the connecting rod groove, thereby limiting the sliding of the crank cylinder in the connecting rod groove.

[0018] Preferably, the lifting module specifically includes: a V-shaped rocker, a V-shaped rocker short side through hole, a V-shaped rocker long side through hole, a V-shaped rocker hinge, a V-shaped rocker long side cavity, a lifting motor, a lifting screw, a limit rod, a limit rod fixing threaded hole, a lifting protective cover, and a limit rod through hole; the connection method and specific characteristics of each part of the lifting module are: a V-shaped rocker short side through hole, a V-shaped rocker long side through hole and a limit rod fixing threaded hole are respectively provided in the V-shaped rocker, the V-shaped rocker short side through hole is fixedly connected to the connecting rod hinge in the crank rocker module by a clearance fit, thereby making the crank rocker module The block drives the lifting module to swing, and the V-shaped rocker hinge fixes the long side through-hole of the V-shaped rocker and the rocker support platform through-hole in the crank rocker module through clearance fit. The lifting motor is placed in the long side cavity of the V-shaped rocker, and the output end of the lifting motor is directly connected to the driving lifting screw and can drive the lifting screw to rotate. The limit rod is connected and fixed with the limit rod fixing threaded hole through the external thread provided at the bottom of the limit rod. The lifting protective cover is provided with a limit rod through-hole, and the top of the limit rod is connected and fixed with the limit rod through-hole by interference fit.

[0019] Preferably, the three-claw rotation control module specifically includes: a cross bar, a cross bar threaded ring, a lower connecting ring, an upper connecting ring, a lower connecting ring threaded hole, an upper connecting ring threaded hole, a three-claw rotating motor, a three-claw rotating motor fixing platform, a bevel gear, a coupling, a cross bar head fixing cover, a three-claw rotating shaft, a three-claw rotating screw, a three-claw rotating screw base, a three-claw height adjustment motor, a three-claw disk, an adsorption cylinder through hole, an adsorption cylinder fixing rod through hole, a retaining rod, a retaining rod lower through hole, a retaining rod head, a retaining rod upper through hole, a three-claw fine-tuning motor fixing platform, a bevel gear protection cover, a connecting rod The axle up and down groove at two ends embeds respectively in two guide rails up and down of being made up of the groove on the attachment piece, and the tooth on the attachment piece is meshed with tooth on upper sprocket wheel, the lower sprocket. The lower sprocket is meshed with tooth on upper sprocket. The disk is provided with a three-claw disk nut hole, an adsorption tube through hole and an adsorption tube fixing rod through hole. The three-claw disk nut hole and the three-claw rotating screw are dynamically connected through a clearance-fitting threaded pair. The three-claw height adjustment motor can drive the three-claw rotating screw to rotate. The bottom of the three-claw rotating screw is provided with a three-claw rotating screw base, and the three-claw rotating screw base is provided with a retaining rod lower through hole, and the bottom of the retaining rod is provided with a retaining rod head. The cylindrical mating surfaces at the bottom and top of the retaining rod are respectively connected and fixed with the axially distributed retaining rod lower through hole and the retaining rod upper through hole by interference fit.

[0020] Preferably, the adsorption cylinder module specifically includes: an adsorption cylinder fixing rod, an adsorption cylinder fixing rod head, a suction cup rotating motor, a suction cup rotating motor protective cover, a protective cover support block, a support block through hole, a negative pressure motor, a negative pressure motor protective cover, a negative pressure motor base, a base threaded hole, a base limiting bolt, a negative pressure motor protective cover through hole, a measured mirror suction cup, a suction cup through hole, a negative pressure motor base through hole, a suction cup rotating motor fixing bolt, and a suction cup rotating motor threaded hole; the connection method and specific characteristics of each part of the adsorption cylinder module are as follows: an adsorption cylinder fixing rod head is provided on the top of the adsorption cylinder fixing rod, a support block through hole is provided on the protective cover support block, the adsorption cylinder fixing rod passes through the support block through hole and the adsorption cylinder fixing rod through hole in the three-claw rotating control module to fix the protective cover support block on the three-claw disc in the three-claw rotating control module by interference fit, a suction cup rotating motor threaded hole is provided on the top of the suction cup rotating motor, a suction cup rotating motor fixing bolt The suction cup rotating motor and the suction cup rotating motor protective cover are fixed together by means of a threaded connection with the suction cup rotating motor threaded hole, the suction cup rotating motor protective cover is welded to the protective cover support block, and the shaft extension of the suction cup rotating motor passes through the support block through hole in the three-claw rotation control module to drive the negative pressure motor protective cover to rotate; a negative pressure motor protective cover through hole is provided on the negative pressure motor protective cover, a negative pressure motor and a negative pressure motor base are provided in the cavity opened in the middle of the negative pressure motor protective cover, and the negative pressure motor is placed on the negative pressure motor base, the negative pressure motor base is provided with a base threaded hole and a negative pressure motor base through hole, the base limiting bolt passes through the negative pressure motor protective cover through hole and the base threaded hole, and the negative pressure motor base and the negative pressure motor protective cover are fixed by means of a threaded connection, a suction cup through hole is provided on the measured mirror suction cup, the measured mirror suction cup is fixed to the negative pressure motor base by an adhesive, and the suction cup through hole is coaxially aligned with the negative pressure motor base through hole.

[0021] Preferably, the storage box module specifically includes: a first-layer storage platform, a second-layer storage platform, a third-layer storage platform, a storage platform protection cover, a servo, a servo fixing rod, and a storage box layered rotating shaft; the connection method and specific characteristics of each part of the storage box module are as follows: the first-layer storage platform is placed on the magnetic module protection cover in the magnetic control module, the second-layer storage platform is placed on the first-layer storage platform, the third-layer storage platform is placed on the second-layer storage platform, the outer edge protrusion of the storage platform protection cover is stuck on the outer cylindrical surface of the three-layer storage platform by interference fit, the servo fixing rod is connected to the servo fixing rod in the interferometer fixing platform module The through hole fixes the servo on the fixed platform body in the interferometer fixed platform module by interference fit, and the servo fixing rod can limit the position of each layer of the storage platform. The storage box layered rotation axis is provided with two layers of circular protrusions, and the two layers of circular protrusions are respectively arranged above and below the storage box layered rotation axis. The first layer of circular protrusion is arranged 120 degrees around the storage box layered rotation axis, and the second layer of circular protrusion is arranged 240 degrees around the storage box layered rotation axis. The first layer of circular protrusion is arranged at a position horizontal with the second layer of storage platform, and the second layer of circular protrusion is arranged at a position horizontal with the third layer of storage platform.

[0022] Preferably, the magnetic control module specifically includes: a magnetic control knob rod, a magnetic changing bevel gear set, a storage box magnetic control threaded rod, a storage box magnetic control nut, a magnetic control rod, a magnetic control rod rotating shaft, a magnet fixed limit groove, a magnet sliding limit block, a slide rail platform, a horizontal slide rail, a longitudinal slide rail, a horizontal slider, a longitudinal slider, a magnetic control rod limit hole, a fastening magnet, a magnetic control rod fixing pin, a fixing pin through hole, a magnetic module protective cover, a protective cover limit shaft, and a protective cover fixing hole; the connection method and specific characteristics of each part of the magnetic control module are as follows: the magnetic control knob rod is connected to the knob through hole in the interferometer fixed platform module by a clearance fit, and the magnetic changing bevel gear set includes two bevel gears meshing with each other, the middle hole of one bevel gear is welded to the bottom of the storage box magnetic control threaded rod, and the middle hole of the other bevel gear is provided with a keyway and is installed at the bottom of the magnetic control knob rod through interference fit. The magnetic control threaded rod of the storage box is threadedly connected with the magnetic control nut of the storage box, and the magnetic control nut of the storage box is provided with a fixing pin through hole, and the magnetic control rod fixing pin passes through the fixing pin through hole to fix the magnetic control rod and the magnetic control nut of the storage box by interference fit. The bottom of the magnetic control rod is provided with a magnetic control rod rotating shaft, and the magnet fixing limit groove is provided with a magnetic control rod limiting hole, and the magnetic control rod rotating shaft and the magnetic control rod limiting hole are connected together by clearance fit, and the two ends of the fastening magnet are respectively inserted into the magnet fixing limit groove and the magnet sliding limit block, and the edge of the magnet sliding limit block is provided with a horizontal slider and a longitudinal slider, and the slide table is provided with a horizontal slide rail and a longitudinal slide rail, and a protective cover limiting shaft is provided under the magnetic module protective cover, and the protective cover limiting shaft and the protective cover fixing hole are fixed to the fixed table body in the interferometer fixed table module by interference fit. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of an inverted interferometer;

[0024] Figure 2 This is a schematic diagram of the interferometer fixed stage module assembly;

[0025] Figure 3 This is a schematic diagram of the interferometer fixed stage module parts;

[0026] Figure 4 This is a schematic diagram of the crank rocker module;

[0027] Figure 5 This is a schematic diagram of the crank rocker module parts;

[0028] Figure 6 It is a schematic diagram of the lifting module assembly;

[0029] Figure 7It is a schematic diagram of the lifting module parts;

[0030] Figure 8 This is a schematic diagram of the assembly of the three-claw rotation control module;

[0031] Figure 9 This is a schematic diagram of the parts of the three-claw rotation control module;

[0032] Figure 10 This is a schematic diagram of the adsorption cylinder module assembly;

[0033] Figure 11 This is a schematic diagram of the adsorption cylinder module parts;

[0034] Figure 12 This is a schematic diagram of the storage box module assembly;

[0035] Figure 13 This is a schematic diagram of the storage box module parts;

[0036] Figure 14 This is a schematic diagram of the parts of the magnetic control module;

[0037] Figure 15 This is a schematic diagram of the parts of the magnetic control module;

[0038] Figure 16 It is a schematic diagram of the overall assembly of the present invention;

[0039] Figure 17 This is a schematic diagram of the distribution of parts of each module of the present invention;

[0040] Figure 18 It is a schematic diagram of the function implementation of the present invention;

[0041] Figure 19 It is an assembly rendering of the present invention.

[0042] The meanings of the diagram codes are as follows:

[0043] 1. Interferometer fixing platform module; 2. Crank rocker module; 3. Lifting module; 4. Three-claw rotation control module; 5. Adsorption cylinder module; 6. Storage box module; 7. Magnetic control module; 101. Fixing platform body; 102. Prism; 103. Interferometer; 104. Measured mirror tray; 105. Tray through-hole; 106. Prism tenon; 107. Tenon; 108. Tenon through-hole; 109. Tenon pin; 110. Tray threaded rod; 111. Interferometer threaded hole; 112. Tray threaded rod shoulder; 113. Crank rocker base fixing hole; 114. Storage platform limit rod; 115. Servo fixing rod through-hole; 116. Magnetic control module mounting slot; 117. Knob through-hole; 118. Interferometer tenon; 201. Crank rocker 202. Crank support platform; 203. Rocker support platform; 204. Crank end cover; 205. Crank end cover baffle; 206. Crank motor; 207. Crank motor fixing bolt; 208. Drive crank; 209. Crank motor threaded hole; 210. Transmission connecting rod; 211. Connecting rod slot; 212. Connecting rod slot end cover; 213. Crank cylinder; 214. Connecting rod through hole; 215. Connecting rod slot end cover threaded hole; 216. Connecting rod slot end cover bolt; 217. Connecting rod hinge; 218. Crank rocker base fixing bolt; 219. Rocker support platform through hole; 220. Crank end cover slot; 301. V-shaped rocker; 302. V-shaped rocker short side through hole; 303. V-shaped rocker long side through hole; 304. V-shaped rocker hinge; 3 05. V-shaped rocker long side cavity; 306. Lifting motor; 307. Lifting screw; 308. Limit rod; 309. Limit rod fixing threaded hole; 310. Lifting protective cover; 311. Limit rod through hole; 401. Crossbar; 402. Crossbar threaded ring; 403. Lower connecting ring; 404. Upper connecting ring; 405. Lower connecting ring threaded hole; 406. Upper connecting ring threaded hole; 407. Three-claw rotary motor; 408. Three-claw rotary motor fixing platform; 409. Bevel gear; 410. Coupling; 411. Crossbar head fixing cover; 412. Three-claw rotary shaft; 413. Three-claw rotary screw; 414. Three-claw rotary screw base; 415. Three-claw height adjustment motor; 416. Three-claw plate; 417. Adsorption cylinder through hole; 4 18. Through hole for suction cylinder fixing rod; 419. Retaining rod; 420. Through hole below retaining rod; 421. Retaining rod head; 422. Through hole above retaining rod; 423. Three-jaw fine-tuning motor fixing platform; 424. Bevel gear protective cover; 425. Connecting ring connecting bolt; 426. Three-jaw disc nut hole; 501. Suction cylinder fixing rod; 502. Suction cylinder fixing rod head; 503. Suction cup rotating motor; 504. Suction cup rotating motor protective cover; 505. Protective cover support block; 506. Through hole for support block; 507. Negative pressure motor; 508. Negative pressure motor protective cover; 509. Negative pressure motor base; 510. Threaded hole in base; 511. Base limit bolt; 512. Through hole for negative pressure motor protective cover; 513. Suction cup for the measured mirror; 514.Suction cup through hole; 515. Negative pressure motor base through hole; 516. Suction cup rotation motor fixing bolt; 517. Suction cup rotation motor threaded hole; 601. First-tier storage platform; 602. Second-tier storage platform; 603. Third-tier storage platform; 604. Storage platform protective cover; 605. Servo; 606. Servo fixing rod; 607. Storage box layer rotation axis; 701. Magnetic control knob; 702. Magnetic direction-changing bevel gear set; 703. Storage box magnetic control threaded rod; 704. Storage box magnetic control nut 705. Magnetic control rod; 706. Magnetic control rod rotation axis; 707. Magnet fixing limit slot; 708. Magnet sliding limit block; 709. Slide rail platform; 710. Horizontal slide rail; 711. Vertical slide rail; 712. Horizontal slider; 713. Vertical slider; 714. Magnetic control rod limit hole; 715. Fastening magnet; 716. Magnetic control rod fixing pin; 717. Fixing pin through hole; 718. Magnetic module protective cover; 719. Protective cover limit axis; 720. Protective cover fixing hole. DETAILED DESCRIPTION

[0044] The present invention will be further described below in conjunction with the accompanying drawings and preferred embodiments. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention and are not intended to limit the scope of protection of the present invention. This section will further illustrate the technical solutions in the above invention content with reference to specific embodiments. The preferred embodiments of the present invention are described in detail as follows:

[0045] Example 1

[0046] In this embodiment, see Figures 1 to 19 A multi-lens detection auxiliary device based on a three-claw adsorption structure, embodiment 1 of the present invention can achieve full-field accurate measurement of multiple measured mirrors, its main modules include: interferometer fixed platform module 1, crank rocker module 2, lifting module 3, three-claw rotation control module 4, adsorption cylinder module 5, storage box module 6, magnetic control module 7;

[0047] In the attached figure Figure 1 The process of measuring a thin plate workpiece using an inverted interferometer in the traditional way is demonstrated. At this time, the measured mirror is supported on several steel wires set outside the reference mirror above the interferometer, and then the interferometer is used to detect the surface shape.

[0048] Through the attached figure Figure 2 、 Figure 3 It can be seen that the connection mode and specific features of the various parts of the interferometer fixed platform module 1 are as follows: Figure 3 The fixed platform body 101 shown in (a) is placed on the air-floating anti-vibration platform through the four prisms 102 set at the bottom. Figure 3The outer surface of the interferometer 103 and the inner sides of the four prisms 102 shown in (c) are respectively provided with prism grooves 106 and interferometer grooves 118. Figure 3 The center of the tenon block 107 shown in (e) is provided with a tenon block through hole 108, Figure 2 The tenon 109 can pass through the two tenon through holes 108 on the two tenon blocks 107 respectively and fasten the prism 102 to the two tenon blocks 107 on the fixing platform body 101 through interference fit. Figure 3 After the prism 102 shown in (a) is fastened to the two tenons 107 on the fixing platform body 101, the ends of the prism 102 and the two tenons 107 on the fixing platform body 101 are fastened to the prism tenon groove 106 on the inner side of the prism 102 and the interferometer tenon groove 118 on the outer surface of the interferometer 103 by interference fit, thereby fixing the interferometer 103 in the central cavity of the four prisms 102. Figure 3 The mirror tray 104 shown in (f) is provided with a tray through hole 105. Figure 3 A pallet threaded rod shoulder 112 is provided in the middle of the pallet threaded rod 110 shown in (d), the top of the pallet threaded rod 110 is connected to the pallet through hole 105 by an interference fit, and the pallet threaded rod 110 is fixed to the interferometer threaded hole 111 provided on the top of the interferometer 103 by a threaded connection, the upper surface of the fixed platform body 101 is provided with a crank rocker base fixing hole 113, a storage platform limit rod 114, a servo fixing rod through hole 115, and a magnetic control module mounting groove 116, and the side of the fixed platform body 101 is provided with a knob through hole 117.

[0049] Through the attached figure Figure 4 、 Figure 5 It can be seen that the connection mode and specific features of the various parts of the crank rocker module 2 are as follows: Figure 5 The crank rocker base 201 shown in (a) is fastened to the crank rocker base fixing hole 113 in the interferometer fixed platform module 1 through a screw connection via a crank rocker base fixing bolt 218. A crank support platform 202 and a rocker support platform 203 are respectively provided above the crank rocker base 201. Figure 5 The top of the rocker support platform 203 shown in (a) is provided with a rocker support platform through hole 219. Figure 5 The top of the crank support 202 shown in (a) is provided with a crank motor threaded hole 209. Figure 5 The crank motor fixing bolt 207 shown in (c) is threadedly connected to the crank motor threaded hole 209 to fix the crank end cover 204 on the crank support platform 202. Figure 4 The crank motor 206 shown in (b) is placed in the crank end cover 204 and drives the drive crank 208 to rotate. Figure 5(f) shows the crank end cover baffle 205 inserted into the crank end cover slot 220 to limit the position of the crank motor 206. Figure 5 The edge of the driving crank 208 shown in (g) is provided with a crank cylinder 213, Figure 5 The transmission connecting rod 210 shown in (h) is provided with a connecting rod through hole 214 and a connecting rod groove 211 at both ends. Figure 5 The connecting rod hinge 217 shown in (d) is matched with the connecting rod through hole 214 by means of clearance fit. Figure 5 (g) The crank cylinder 213 shown in FIG. 2 is placed in the connecting rod groove 211 to drive the transmission connecting rod 210 to rotate. The connecting rod groove end cover bolt 216 and the connecting rod groove end cover threaded hole 215 set on the connecting rod groove 211 are connected by threads to fix the connecting rod groove end cover 212 and the connecting rod groove 211, thereby limiting the rotation of the connecting rod 210. Figure 5 (h) shows the sliding of the crank cylinder 213 in the connecting rod groove 211.

[0050] Through the attached figure Figure 6 、 Figure 7 It can be seen that the connection mode and specific features of the various parts of the lifting module 3 are as follows: Figure 6 The V-shaped rocker 301 is shown as a whole. Figure 6 and Figure 7 It can be seen that the V-shaped rocker 301 is provided with a V-shaped rocker short side through hole 302, a V-shaped rocker long side through hole 303 and a limit rod fixing threaded hole 309. Figure 6 The V-shaped rocker short side through hole 302 is fixedly connected to the connecting rod hinge 217 in the crank rocker module 2 by a clearance fit, so that the crank rocker module 2 drives the lifting module 3 to swing. Figure 6 The V-shaped rocker hinge 304 in the crank rocker module 2 is fixedly connected to the long side through hole 303 of the V-shaped rocker and the rocker support platform through hole 219 in the crank rocker module 2 by means of clearance fit. Figure 7 The lifting motor 306 shown in (d) is placed in the long side cavity 305 of the V-shaped rocker. The output end of the lifting motor 306 is directly connected to the driving lifting screw 307 and can drive the lifting screw 307 to rotate. Figure 7 The limiting rod 308 shown in (e) is connected and fixed by a threaded connection with the limiting rod fixing threaded hole 309 through the external thread provided at the bottom of the limiting rod 308. Figure 7 The lifting protection cover 310 shown in (c) is provided with a limit rod through hole 311, and the top of the limit rod 308 is connected and fixed to the limit rod through hole 311 by interference fit.

[0051] Through the attached figure Figure 8 、 Figure 9 It can be seen that the connection mode and specific features of the various parts of the three-claw rotation control module 4 are as follows: Figure 9 The crossbar threaded ring 402 provided in the crossbar 401 shown in (a) is provided with an internal thread and is fixedly connected to the lifting screw 307 of the lifting module 3 by a threaded connection. Figure 9 The upper connecting ring 404 shown in (c) is provided with two upper connecting ring threaded holes 406, a three-claw rotary motor fixing platform 408 and a crossbar head fixing cover 411. Figure 8 The lower connecting ring 403 is provided with two lower connecting ring threaded holes 405. The two connecting ring connecting bolts 425 pass through the upper connecting ring threaded holes 406 and the lower connecting ring threaded holes 405 respectively, and then the upper connecting ring 404 and the lower connecting ring 403 are fixed to the cross bar 401 by threaded connection. Figure 9 The bevel gear 409 shown in (b) is placed above the crossbar head fixing cover 411. Figure 9 The three-claw rotary motor 407 shown in (j) is placed on a three-claw rotary motor fixing platform 408 and the three-claw rotary motor 407 can directly drive the bevel gear 409 to rotate through the coupling 410. Figure 9 The bevel gear 409 shown in (b) rotates, driving the three-claw rotating shaft 412 to rotate, and then driving the three-claw fine-tuning motor fixing platform 423 to rotate. Figure 9 The bevel gear protection cover 424 shown in (d) is welded on the three-claw rotary motor fixed platform 408 to protect the bevel gear 409. Figure 9 (e) The three-claw fine-tuning motor fixing platform 423 shown in FIG. 4 is provided with a through hole 422 on the retaining rod and the three-claw height adjustment motor 415 is fixed to the bottom of the three-claw fine-tuning motor fixing platform 423 by a metal adhesive. Figure 9 The three-claw disc 416 shown in (k) is provided with a three-claw disc nut hole 426, an adsorption tube through hole 417 and an adsorption tube fixing rod through hole 418. Figure 9 (k) The three-claw disc nut hole 426 and the three-claw rotating screw 413 are dynamically connected through a clearance fit thread pair. Figure 9 The three-claw height adjustment motor 415 shown in (h) can drive the three-claw rotating screw 413 to rotate. Figure 9 The bottom of the three-claw rotating screw 413 shown in (g) is provided with a three-claw rotating screw base 414, Figure 8 The three-claw rotating screw base 414 is provided with a retaining rod lower through hole 420. Figure 9 The bottom of the retaining rod 419 shown in (m) is provided with a retaining rod head 421, and the cylindrical mating surfaces at the bottom and top of the retaining rod 419 are respectively connected and fixed with the axially distributed retaining rod lower through hole 420 and the retaining rod upper through hole 422 by interference fit.

[0052] Through the attached figure Figure 10 、 Figure 11It can be seen that the connection mode and specific features of the various parts of the adsorption cylinder module 5 are as follows: Figure 11 The top of the adsorption tube fixing rod 501 shown in (b) is provided with an adsorption tube fixing rod head 502. Figure 11 The protective cover support block 505 shown in (a) is provided with a support block through-hole 506. The adsorption tube fixing rod 501 passes through the support block through-hole 506 and the adsorption tube fixing rod through-hole 418 in the three-claw rotation control module 4 to fix the protective cover support block 505 on the three-claw disc 416 in the three-claw rotation control module 4 through interference fit. Figure 11 The top of the suction cup rotating motor 503 shown in (d) is provided with a suction cup rotating motor threaded hole 517, Figure 11 The suction cup rotating motor fixing bolt 516 and the suction cup rotating motor threaded hole 517 shown in (c) are threadedly connected to fix the suction cup rotating motor 503 and the suction cup rotating motor protective cover 504 together. The suction cup rotating motor protective cover 504 is welded to the protective cover support block 505. Figure 11 The shaft of the suction cup rotating motor 503 shown in (d) passes through the support block through hole 506 in the three-claw rotating control module 4 and can drive the negative pressure motor protective cover 508 to rotate. Figure 11 The negative pressure motor protective cover 508 shown in (f) is provided with a negative pressure motor protective cover through hole 512, and the negative pressure motor 507 and the negative pressure motor base 509 are provided in the cavity opened in the middle of the negative pressure motor protective cover 508, and the negative pressure motor 507 is placed on the negative pressure motor base 509. Figure 11 The negative pressure motor base 509 shown in (h) is provided with a base threaded hole 510 and a negative pressure motor base through hole 515. Figure 11 The base limiting bolt 511 shown in (i) passes through the through hole 512 of the negative pressure motor protective cover and the base threaded hole 510 and then fixes the negative pressure motor base 509 and the negative pressure motor protective cover 508 by threaded connection. Figure 11 The measured mirror suction cup 513 shown in (j) is provided with a suction cup through hole 514. The measured mirror suction cup 513 is fixed to the negative pressure motor base 509 by adhesive, and the suction cup through hole 514 is coaxially aligned with the negative pressure motor base through hole 515.

[0053] Through the attached figure Figure 12 、 Figure 13 It can be seen that the connection mode and specific features of the various parts of the storage box module 6 are as follows: Figure 13 The storage platform 601 shown in (b) is placed on the magnetic module protection cover 718 in the magnetic control module 7. Figure 13 The second-tier storage table 602 shown in (c) is placed on the first-tier storage table 601. Figure 13The three-layer storage platform 603 shown in (d) is placed on the two-layer storage platform 602, and the outer edge protrusion of the storage platform protection cover 604 is stuck on the outer cylindrical surface of the three-layer storage platform 603 by interference fit. Figure 13 The servo fixing rod 606 shown in (f) and the servo fixing rod through hole 115 in the interferometer fixing platform module 1 fix the servo 605 on the fixing platform body 101 in the interferometer fixing platform module 1 by interference fit, and the servo fixing rod 606 can limit the position of each layer of the storage platform. Figure 13 The storage box layered rotation axis 607 shown in (g) is provided with two layers of annular protrusions. Figure 12 The two layers of circular protrusions shown in (b) are respectively arranged above and below the storage box layer rotation axis 607. The first layer of circular protrusions is arranged one hundred and twenty degrees around the storage box layer rotation axis 607, and the second layer of circular protrusions is arranged two hundred and forty degrees around the storage box layer rotation axis 607. The first layer of circular protrusions is arranged at a position horizontal with the second layer storage platform 602, and the second layer of circular protrusions is arranged at a position horizontal with the third layer storage platform 603.

[0054] Through the attached figure Figure 14 、 Figure 15 It can be seen that the connection mode and specific features of the various parts of the magnetic control module 7 are as follows: Figure 15 The magnetic control knob rod 701 shown in (m) is connected to the knob through hole 117 in the interferometer fixed stage module 1 by a clearance fit, as shown in FIG. Figure 15 The magnetic direction-changing bevel gear set 702 shown in (k) includes two bevel gears 409 meshing with each other. The middle hole of one bevel gear 409 is welded to the bottom of the magnetic control threaded rod 703 of the storage box. The middle hole of the other bevel gear 409 is provided with a keyway and is installed at the bottom of the magnetic control knob rod 701 through an interference fit. Figure 15 The storage box magnetic attraction control threaded rod 703 shown in (l) is threadedly connected to the storage box magnetic attraction control nut 704, Figure 15 The magnetic control nut 704 and the magnetic control rod 705 of the storage box shown in (j) are both provided with a fixing pin through hole 717. Figure 15 The magnetic control rod fixing pin 716 shown in (h) passes through the fixing pin through hole 717 to fix the magnetic control rod 705 to the storage box magnetic control nut 704 by interference fit. Figure 15 The bottom of the magnetic control rod 705 shown in (g) is provided with a magnetic control rod rotating shaft 706, Figure 15 The magnet fixing limiting groove 707 shown in (i) is provided with a magnetic control rod limiting hole 714, Figure 15 (g) shows that the magnetic control rod rotating shaft 706 and the magnetic control rod limiting hole 714 are connected together by a clearance fit. Figure 15The two ends of the fastening magnet 715 shown in (f) are respectively inserted into the magnet fixed limit groove 707 and the magnet sliding limit block 708, Figure 15 The edge of the magnet sliding limit block 708 shown in (d) is provided with a horizontal slider 712 and a vertical slider 713. Figure 14 The slide rail platform 709 shown in (a) is provided with a transverse slide rail 710 and a longitudinal slide rail 711. Figure 14 A protective cover limiting shaft 719 is provided below the magnetic module protective cover 718 shown in (a). Figure 15 The protective cover limiting shaft 719 and the protective cover fixing hole 720 shown in (a) fix the magnetic module protective cover 718 on the fixed platform body 101 in the interferometer fixed platform module 1 through interference fit.

[0055] Through the attached figure Figures 1 to 19 It can be seen that the first embodiment can realize the full-field accurate measurement of multiple measured mirrors of the present invention. Figures 16 to 18 It can be seen that when the present invention is used to perform full-field precise measurement of multiple measured mirrors, the magnetic control module 7 is placed as a whole in the magnetic control module mounting slot 116 in the interferometer fixed platform module 1, and the three layers inside the storage box module 6 can each hold a measured mirror. The storage box module 6 is placed as a whole on the magnetic module protection cover 718 in the magnetic control module 7. Before performing full-field measurement on multiple measured mirrors, the magnetic control module 7 is rotated. Figure 15 The magnetic control knob rod 701 shown in (m) changes the direction of the magnet from vertical to horizontal. The adsorption effect of the magnet makes the storage box module 6 tightly fixed on the magnetic module protection cover 718. When measuring, the crank motor 206 in the crank rocker module 2 rotates to drive the lifting module 3 to swing. At the same time, the lifting module 3 can realize the up and down movement of the three-claw rotation control module 4 through the cross bar 401. Three adsorption cylinder modules 5 are installed on the three-claw rotation control module 4. When the three-claw rotation control module 4 moves to the top of the storage box module 6, Figure 13 The steering gear 605 shown in (e) rotates to drive the three-layer storage platform 603 and the second-layer storage platform 602 to rotate and open, so that the storage platforms on each layer are placed at a 120-degree angle relative to each other. The three adsorption cylinder modules 5 simultaneously lower the suction cups to suck up the three measured mirrors through the negative pressure motor 507. Then the three-claw rotation control module 4 moves the measured mirrors to the top of the interferometer 103. The three-claw rotation control module 4 uses the three-claw height adjustment motor 415 to drive the three-claw plate 416 to move up and down and then place the measured mirror on the wire. After the measurement is completed, Figure 11The negative pressure motor 507 shown in (g) picks up the measured mirror again, drives the measured mirror to rotate by the suction cup rotating motor 503 in the adsorption cylinder module 5, and then places it back on the steel wire to continue measuring. After the measurement of the first measured mirror is completed, the adsorption cylinder module 5 absorbs the measured mirror after the measurement, and then the three-claw rotation control module 4 drives the adsorption cylinder module 5 to rotate through the three-claw rotation motor 407 to move the unmeasured measured mirror to the top of the interferometer 103. Repeating the above steps can realize the rapid measurement of three measured mirrors.

[0056] Example 2

[0057] This embodiment can realize the present invention to put away multiple mirrors after the full-field accurate measurement of multiple mirrors, through the accompanying drawings Figures 1 to 19 It can be seen that after the full-field precise measurement of multiple mirrors is completed using the present invention, the three adsorption cylinder modules 5 installed on the three-claw rotation control module 4 absorb three mirrors to be measured. Figure 4 The crank motor 206 shown in (b) drives the crank rocker module 2 to swing, thereby driving the three-claw rotation control module 4 to move to the top of the storage box module 6. Then, the three-claw height adjustment motor 415 in the three-claw rotation control module 4 simultaneously lowers the three measured mirrors into the storage box module 6. Figure 11 After the negative pressure motor 507 shown in (g) is powered off, the measured mirror is placed in the storage box module 6, the three-claw rotation control module 4 is reset, and the servo in the storage box module 6 drives the storage box layer rotation axis 607 to fold the third-layer storage platform 603 and the second-layer storage platform 602. Figure 13 (a) shows the storage table protective cover 604 clamped on the three-layer storage table 603, rotating Figure 15 The magnetic attraction control knob rod 701 shown in (m) changes the direction of the magnet from horizontal to vertical, and the storage box module 6 is folded away after the adsorption effect of the magnet disappears.

[0058] The above describes the embodiments of the present invention in conjunction with the accompanying drawings, but the present invention is not limited to the above examples. Various changes can be made according to the purpose of the invention. Any changes, modifications, substitutions, combinations or simplifications made according to the spirit and principles of the technical solution of the present invention should be equivalent replacement methods. As long as they comply with the purpose of the invention and do not deviate from the technical principles and inventive concepts of the present invention, they belong to the scope of protection of the present invention.

Claims

1. The main modules of the multi-lens detection auxiliary device based on the three-claw adsorption structure designed by the present invention include: Interferometer fixed platform module (1), crank rocker module (2), lifting module (3), three-claw rotation control module (4), adsorption cylinder module (5), storage box module (6), magnetic control module (7); The interferometer fixed platform module (1) comprises: a fixed platform body (101), a prism (102), an interferometer (103), a measured mirror tray (104), a tray through hole (105), a tenon groove (106), a tenon block (107), a tenon block through hole (108), a tenon pin (109), a tray threaded rod (110), an interferometer threaded hole (111), a tray threaded rod shoulder (112), a crank rocker base fixing hole (113), a storage platform limit rod (114), a steering gear fixing rod through hole (115), a magnetic control module mounting slot (116), and a knob through hole (117); the crank rocker module (2) comprises: a crank rocker base (201), Crank support platform (202), rocker support platform (203), crank end cover (204), crank end cover baffle (205), crank motor (206), crank motor fixing bolt (207), driving crank (208), crank motor threaded hole (209), transmission connecting rod (210), connecting rod groove (211), connecting rod groove end cover (212), crank cylinder (213), connecting rod through hole (214), connecting rod groove end cover threaded hole (215), connecting rod groove end cover bolt (216), connecting rod hinge (217), crank rocker base fixing bolt (218), rocker support platform through hole (219), crank end cover groove (220); lifting module (3) The invention comprises: a V-shaped rocker (301), a V-shaped rocker short side through hole (302), a V-shaped rocker long side through hole (303), a V-shaped rocker hinge (304), a V-shaped rocker long side cavity (305), a lifting motor (306), a lifting screw (307), a limit rod (308), a limit rod fixing threaded hole (309), a lifting protective cover (310), and a limit rod through hole (311); a three-claw rotation control module (4) comprises: a cross bar (401), a cross bar threaded ring (402), a lower connecting ring (403), an upper connecting ring (404), a lower connecting ring threaded hole (405), an upper connecting ring threaded hole (406), a three-claw rotation motor (407), and a three-claw rotation control module (408). Claw rotating motor fixing platform (408), bevel gear (409), coupling (410), crossbar head fixing cover (411), three-claw rotating shaft (412), three-claw rotating screw (413), three-claw rotating screw base (414), three-claw height adjustment motor (415), three-claw disc (416), adsorption tube through hole (417), adsorption tube fixing rod through hole (418), retaining rod (419), retaining rod lower through hole (420), retaining rod head (421), retaining rod upper through hole (422), three-claw fine-tuning motor fixing platform (423), bevel gear protection cover (424), connecting ring connecting bolt (425), three-claw disc nut hole (426);The adsorption tube module (5) comprises: an adsorption tube fixing rod (501), an adsorption tube fixing rod head (502), a suction cup rotating motor (503), a suction cup rotating motor protective cover (504), a protective cover support block (505), a support block through hole (506), a negative pressure motor (507), a negative pressure motor protective cover (508), a negative pressure motor base (509), a base threaded hole (510), a base limiting bolt (511), a negative pressure motor protective cover through hole (512), a measured mirror suction cup (513), a suction cup through hole (514), a negative pressure motor base through hole (515), a suction cup rotating motor fixing bolt (516), and a suction cup rotating motor threaded hole (517); the storage box module (6) comprises: a first-layer storage platform (601), a second-layer storage platform (602), a third-layer storage platform (603), a storage platform protective cover (604), a steering gear (6 05), steering gear fixing rod (606), storage box layered rotating shaft (607); magnetic control module (7) includes: magnetic control knob rod (701), magnetic reversing bevel gear set (702), storage box magnetic control threaded rod (703), storage box magnetic control nut (704), magnetic control rod (705), magnetic control rod rotating shaft (706), magnet fixed limiting groove (707), magnet sliding limiting block (708), slide rail platform (709), transverse slide rail (710), longitudinal slide rail (711), transverse slider (712), longitudinal slider (713), magnetic control rod limiting hole (714), fastening magnet (715), magnetic control rod fixing pin (716), fixing pin through hole (717), magnetic module protection cover (718), protection cover limiting shaft (719), protection cover fixing hole (720).

2. The structural feature of the interferometer fixed platform module (1) in the multi-lens detection auxiliary device based on the three-claw adsorption structure according to claim 1 is that: the fixed platform body (101) is placed on the air-floating anti-vibration platform through the four prisms (102) arranged at the bottom, the outer surface of the interferometer (103) and the inner side of the four prisms (102) are respectively provided with prism tenons (106) and interferometer tenons (118), and a tenon through-hole (108) is provided at the center of the tenon block (107), which can pass through the two tenon through-holes (108) on the two tenons (107) respectively and fasten the prism (102) and the two tenons (107) on the fixed platform body (101) by interference fit. After the prism (102) and the two tenons (107) on the fixed platform body (101) are fastened, the two ends of the prism (102) and the two tenons (107) on the fixed platform body (101) are respectively connected by interference fit. The prism mortise (106) on the inner side of the prism (102) and the interferometer mortise (118) on the outer surface of the interferometer (103) are fastened in a matching manner, thereby fixing the interferometer (103) in the central cavity of the four prisms (102). A tray through hole (105) is provided on the measured mirror tray (104), a tray threaded rod shoulder (112) is provided in the middle of the tray threaded rod (110), and the top of the tray threaded rod (110) is connected to the tray by interference fit. The tray through hole (105) is connected and the tray threaded rod (110) is fixed to the interferometer threaded hole (111) provided on the top of the interferometer (103) through a threaded connection; the upper surface of the fixed platform body (101) is provided with a crank rocker base fixing hole (113), a storage platform limit rod (114), a steering gear fixing rod through hole (115), and a magnetic control module installation slot (116); and the side surface of the fixed platform body (101) is provided with a knob through hole (117).

3. The structural features of the crank rocker module (2) in the multi-lens detection auxiliary device based on the three-claw adsorption structure according to claim 1 are as follows: the crank rocker base (201) is fastened to the crank rocker base fixing hole (113) in the interferometer fixed platform module (1) through a crank rocker base fixing bolt (218) through a threaded connection, a crank support platform (202) and a rocker support platform (203) are respectively provided above the crank rocker base (201), a rocker support platform through hole (219) is provided on the top of the rocker support platform (203), a crank motor threaded hole (209) is provided on the top of the crank support platform (202), the crank motor fixing bolt (207) and the crank motor threaded hole (209) are threadedly connected to fix the crank end cover (204) on the crank support platform (202), and the crank motor (206) is placed on the crank The handle end cover (204) drives the driving crank (208) to rotate, the crank end cover baffle (205) is inserted into the crank end cover groove (220) to limit the position of the crank motor (206), the edge of the driving crank (208) is provided with a crank cylinder (213), the two ends of the transmission connecting rod (210) are respectively provided with a connecting rod through hole (214) and a connecting rod groove (211), and the connecting rod hinge (217) is realized by a clearance fit. The crank cylinder (213) is placed in the connecting rod groove (211) to drive the transmission connecting rod (210) to rotate, and the connecting rod groove end cover bolt (216) and the connecting rod groove end cover threaded hole (215) set on the connecting rod groove (211) are connected by threads to fix the connecting rod groove end cover (212) and the connecting rod groove (211), thereby limiting the sliding of the crank cylinder (213) in the connecting rod groove (211).

4. The structural features of the lifting module (3) in the multi-lens detection auxiliary device based on the three-claw adsorption structure according to claim 1 are as follows: a V-shaped rocker (301) is respectively provided with a V-shaped rocker short side through hole (302), a V-shaped rocker long side through hole (303) and a limit rod fixing threaded hole (309); the V-shaped rocker short side through hole (302) is fixedly connected to the connecting rod hinge (217) in the crank rocker module (2) by a clearance fit so that the crank rocker module (2) drives the lifting module (3) to swing; the V-shaped rocker hinge (304) connects the V-shaped rocker long side through hole (303) to the crank by a clearance fit. The rocker support platform through hole (219) in the rocker module (2) is fixedly connected, the lifting motor (306) is placed in the long side cavity (305) of the V-shaped rocker, the output end of the lifting motor (306) is directly connected to the driving lifting screw (307) and can drive the lifting screw (307) to rotate, the limiting rod (308) is connected and fixed by means of a threaded connection with the limiting rod fixing threaded hole (309) through the external thread provided at the bottom of the limiting rod (308), the lifting protection cover (310) is provided with a limiting rod through hole (311), and the top of the limiting rod (308) is connected and fixed with the limiting rod through hole (311) by means of an interference fit.

5. The structural features of the three-claw rotation control module (4) in the multi-lens detection auxiliary device based on the three-claw adsorption structure according to claim 1 are as follows: the crossbar threaded ring (402) provided in the crossbar (401) is provided with an internal thread and is fixedly connected with the lifting screw (307) of the lifting module (3) in a threaded connection manner, the upper connecting ring (404) is provided with two upper connecting ring threaded holes (406), a three-claw rotating motor fixing platform (408) and a crossbar head fixing cover (411), the lower connecting ring (403) is provided with two lower connecting ring threaded holes (405), and the two connecting After the ring connecting bolts (425) pass through the upper connecting ring threaded hole (406) and the lower connecting ring threaded hole (405), the upper connecting ring (404) and the lower connecting ring (403) are fixed to the cross bar (401) by threaded connection. The bevel gear (409) is placed above the cross bar head fixed cover (411). The three-claw rotating motor (407) is placed on the three-claw rotating motor fixed platform (408) and the three-claw rotating motor (407) can directly drive the bevel gear (409) to rotate through the coupling (410). After the bevel gear (409) rotates, it drives the three-claw rotating shaft (412) to rotate. The three-claw fine-tuning motor fixing platform (423) is driven to rotate, and the bevel gear protection cover (424) is welded on the three-claw rotating motor fixing platform (408) to protect the bevel gear (409). The three-claw fine-tuning motor fixing platform (423) is provided with a through hole (422) on the retaining rod and the three-claw height adjustment motor (415) is fixed to the bottom of the three-claw fine-tuning motor fixing platform (423) by a metal adhesive. The three-claw disc (416) is provided with a three-claw disc nut hole (426), an adsorption cylinder through hole (417) and an adsorption cylinder fixing rod through hole (418). The three-claw disc nut hole (426) and the three-claw rotating nut hole (422) are connected to each other. The rod (413) is dynamically connected through a clearance-fitting threaded pair. The three-claw height adjustment motor (415) can drive the three-claw rotating screw (413) to rotate. A three-claw rotating screw base (414) is provided at the bottom of the three-claw rotating screw (413). A retaining rod lower through hole (420) is provided on the three-claw rotating screw base (414). A retaining rod head (421) is provided at the bottom of the retaining rod (419). The cylindrical matching surfaces at the bottom and top of the retaining rod (419) are respectively connected and fixed with the axially distributed retaining rod lower through hole (420) and the retaining rod upper through hole (422) by interference fit.

6. The structural features of the adsorption cylinder module (5) in the multi-lens detection auxiliary device based on the three-claw adsorption structure according to claim 1 are as follows: the top of the adsorption cylinder fixing rod (501) is provided with an adsorption cylinder fixing rod head (502), the protective cover support block (505) is provided with a support block through hole (506), the adsorption cylinder fixing rod (501) passes through the support block through hole (506) and the adsorption cylinder fixing rod through hole (418) in the three-claw rotation control module (4) through interference fit to fix the protective cover support block (5 05) is fixed on the three-claw disc (416) in the three-claw rotation control module (4), a suction cup rotation motor threaded hole (517) is provided on the top of the suction cup rotation motor (503), the suction cup rotation motor fixing bolt (516) and the suction cup rotation motor threaded hole (517) are screwed together to fix the suction cup rotation motor (503) and the suction cup rotation motor protective cover (504) together, the suction cup rotation motor protective cover (504) is welded on the protective cover support block (505), and the suction cup rotation motor (503) is fixed on the three-claw rotation control module (4). The shaft of the negative pressure motor is extended through the support block through hole (506) in the three-claw rotation control module (4) to drive the negative pressure motor protective cover (508) to rotate. The negative pressure motor protective cover (508) is provided with a negative pressure motor protective cover through hole (512). The negative pressure motor (507) and the negative pressure motor base (509) are provided in the cavity opened in the middle of the negative pressure motor protective cover (508). The negative pressure motor (507) is placed on the negative pressure motor base (509). The negative pressure motor base (509) is provided with a base threaded hole (510). The negative pressure motor base (509) and the negative pressure motor protection cover (508) are fixed by threaded connection after the base limiting bolt (511) passes through the negative pressure motor protection cover through hole (512) and the base threaded hole (510). The measured mirror suction cup (513) is provided with a suction cup through hole (514). The measured mirror suction cup (513) is fixed to the negative pressure motor base (509) by an adhesive, and the suction cup through hole (514) and the negative pressure motor base through hole (515) are coaxially aligned.

7. The structural features of the storage box module (6) in the multi-lens detection auxiliary device based on the three-claw adsorption structure according to claim 1 are as follows: the first-layer storage platform (601) is placed on the magnetic module protection cover (718) in the magnetic control module (7), the second-layer storage platform (602) is placed on the first-layer storage platform (601), and the third-layer storage platform (603) is placed on the second-layer storage platform (602). The outer edge protrusion of the storage platform protection cover (604) is stuck on the outer cylindrical surface of the third-layer storage platform (603) by interference fit, and the servo fixing rod (606) and the servo fixing rod through hole (115) in the interferometer fixing platform module (1) are interfered by interference fit. The servo (605) is fixed on the fixed platform body (101) in the interferometer fixed platform module (1) and the servo fixing rod (606) can limit the position of each layer of the storage platform, the storage box layered rotation axis (607) is provided with two layers of annular protrusions, and the two layers of annular protrusions are respectively arranged above and below the storage box layered rotation axis (607), the first layer of annular protrusion is arranged 120 degrees around the storage box layered rotation axis (607), and the second layer of annular protrusion is arranged 240 degrees around the storage box layered rotation axis (607), the first layer of annular protrusion is arranged at a position horizontal to the second layer of the storage platform (602), and the second layer of annular protrusion is arranged at a position horizontal to the third layer of the storage platform (603).

8. The structural features of the magnetic control module (7) in the multi-lens detection auxiliary device based on the three-claw adsorption structure according to claim 1 are as follows: the magnetic control knob rod (701) is connected to the knob through hole (117) in the interferometer fixed platform module (1) by a clearance fit, the magnetic direction-changing bevel gear set (702) includes two mutually meshing bevel gears (409), the middle hole of one of the bevel gears (409) is welded to the bottom of the magnetic control threaded rod (703) of the storage box, A keyway is provided in the middle hole of the other bevel gear (409) and is installed at the bottom of the magnetic control knob rod (701) through interference fit. The storage box magnetic control threaded rod (703) is threadedly connected to the storage box magnetic control nut (704). The storage box magnetic control nut (704) and the magnetic control rod (705) are both provided with a fixing pin through hole (717). The magnetic control rod fixing pin (716) passes through the fixing pin through hole (717) and fixes the magnetic control rod (705) through interference fit. ) is fixed to the storage box magnetic control nut (704), a magnetic control rod rotating shaft (706) is provided at the bottom of the magnetic control rod (705), a magnetic control rod limiting hole (714) is provided on the magnet fixed limiting groove (707), the magnetic control rod rotating shaft (706) and the magnetic control rod limiting hole (714) are connected together by a clearance fit, and the two ends of the fastening magnet (715) are respectively inserted into the magnet fixed limiting groove (707) and the magnet sliding limiting block (708), and the magnet slides. A transverse slider (712) and a longitudinal slider (713) are provided on the edge of the limit block (708); a transverse slide rail (710) and a longitudinal slide rail (711) are provided on the slide rail platform (709); a protective cover limiting shaft (719) is provided below the magnetic module protective cover (718); the protective cover limiting shaft (719) and the protective cover fixing hole (720) are used to fix the magnetic module protective cover (718) on the fixed platform body (101) in the interferometer fixed platform module (1) by means of interference fit.

Images