Transfer tool and transfer method for preparing electrostatic chuck

Abstract

The transfer tool is used for transferring a non-magnetic metal net into a mounting groove in the upper end of a hot pressing mold, the transfer tool comprises a transfer table, a cavity is formed in the transfer table, and the relative lower end of the transfer table is used for being movably inserted into the mounting groove; at least two edge supporting blocks are evenly distributed at the bottom end of the transfer table in the circumferential direction at intervals, each edge supporting block comprises a first connecting part and a second connecting part, the first connecting parts are arranged at the bottom end of the transfer table and are parallel to the vertical direction, and the second connecting parts are hinged to the bottom ends of the first connecting parts; the edge supporting block has a first state in which the first connecting part and the second connecting part are arranged in a linear shape and a second state in which the first connecting part and the second connecting part are arranged in an L shape; when the edge supporting block is in the second state, the second connecting part abuts against the bottom end face of the non-magnetic metal net. The non-magnetic metal net can fall on the bottom surface of the mounting groove with high flatness.

Description

Technical Field

[0001] The present invention relates to the technical field of electrostatic chuck preparation, and in particular to a transfer tool and a transfer method for preparing an electrostatic chuck. Background Art

[0002] Chemical vapor deposition equipment (CVD equipment for short) is a key device for semiconductor chip production. Among them, the electrostatic chuck is a structure in the CVD equipment. The temperature uniformity during heating and the magnitude of the electrostatic adsorption force will directly affect the uniformity and repeatability of chip growth.

[0003] Electrostatic chucks are typically made of a ceramic layer sandwiched between an electrode layer. When current is passed through the electrode layer, it generates adsorption and heat. To ensure uniform temperature and adsorption, the metal mesh (or arc-shaped metal wire) in the electrode layer needs to maintain flatness. During the preparation of an electrostatic chuck, a hot press mold is typically used to form the ceramic layer of the electrostatic chuck. The metal mesh needs to be transferred to the mounting slot at the top of the hot press mold and maintained flatness. Traditional transfer equipment uses an electromagnet to adsorb the metal mesh and then place it into the mounting slot at the top of the hot press mold. However, with the continuous advancement of technology, the current mainstream method is to use molybdenum metal to form the molybdenum mesh. However, the molybdenum mesh is non-magnetic and unsuitable for adsorption transfer using an electromagnet. Therefore, there is an urgent need for a transfer device that can maintain the flatness of the non-magnetic metal mesh of the electrostatic chuck's electrode layer. Summary of the Invention

[0004] In view of this, the present invention provides a transfer tool and a transfer method for preparing an electrostatic chuck to solve the problem of lack of a transfer device that can maintain the flatness of the non-magnetic metal mesh of the electrode layer of the electrostatic chuck.

[0005] In a first aspect, the present invention provides a transfer tool for preparing an electrostatic chuck, which is used to transfer a non-magnetic metal mesh to a mounting groove at the upper end of a hot pressing mold, and the transfer tool comprises:

[0006] A transfer platform is provided with a cavity, wherein the lower end of the transfer platform is used to be movably inserted into the installation slot;

[0007] At least two edge support blocks are evenly spaced along the circumferential direction at the bottom end of the transfer platform, the edge support block including a first connecting portion and a second connecting portion, the first connecting portion being arranged at the bottom end of the transfer platform and parallel to the vertical direction, and the second connecting portion being hinged to the bottom end of the first connecting portion; the edge support block has a first state in which the first connecting portion and the second connecting portion are arranged in an "I" shape, and a second state in which the first connecting portion and the second connecting portion are arranged in an L shape;

[0008] When the edge support block is in the second state, the second connecting portion abuts against the bottom end surface of the non-magnetic metal mesh;

[0009] The pusher is slidably arranged in the cavity along the vertical direction. When the pusher descends along the vertical direction, it drives the edge support block to switch from the second state to the first state.

[0010] A transfer tool for preparing an electrostatic chuck according to the present invention has at least the following beneficial effects:

[0011] By evenly distributing a plurality of edge support blocks along the circumferential direction at the bottom end of the transfer table, each edge support block has a first state in which the first connecting portion and the second connecting portion are arranged in an "I" shape, and a second state in which the first connecting portion and the second connecting portion are arranged in an L shape; when the non-magnetic metal mesh needs to be transferred to the installation groove, the pusher is first driven down to switch the edge support block from the second state to the first state, releasing the space below the transfer table, and then the non-magnetic metal mesh is abutted against the bottom end surface of the transfer table, and the non-magnetic metal mesh is located in the space surrounded by the plurality of first connecting portions, and then the edge support block is switched from the first state to the first state. Switch to the second state, so that the second connection parts of the multiple edge support blocks respectively abut against different positions along the circumference of the bottom end surface of the non-magnetic metal mesh, so that the non-magnetic metal mesh is carried on the lower end of the transfer table, and then the transfer table is transferred to the top of the installation slot, and the non-magnetic metal mesh is inserted into the installation slot together with the relative lower end of the transfer table to the set depth and then stopped. At this time, the pusher is driven to descend to switch the edge support block from the second state to the first state, and the supporting force applied to the bottom end of the non-magnetic metal mesh is removed, so that the non-magnetic metal mesh falls on the bottom surface of the installation slot with high flatness under the action of its own weight.

[0012] In an optional embodiment, a first elastic member is provided between the first connecting portion and the second connecting portion, and the first elastic member is used to apply a biasing force to the second connecting portion to switch the edge supporting block from the first state to the second state.

[0013] In an optional embodiment, the first elastic member is configured as a first spring.

[0014] In an optional embodiment, a first avoidance groove is provided one by one along the vertical direction at the bottom end of the transfer platform corresponding to the position of the second connecting part, and a first pushing part is provided at the position of the pusher corresponding to the first avoidance groove, and the bottom end of the first pushing part is used to pass through the first avoidance groove and extend to the outside of the transfer platform; when the edge support block is in the second state, the top end of the second connecting part abuts against the bottom end of the first pushing part.

[0015] In an optional embodiment, the non-magnetic metal mesh is provided with a plurality of pin holes at positions relative to its center, and the plurality of pin holes are evenly spaced along the circumferential direction, and a first support block is provided at a position corresponding to the pin holes on the bottom end surface of the transfer platform, the first support block includes a third connection part and a fourth connection part, the third connection part is provided at the bottom end of the transfer platform and is provided parallel to the vertical direction, and the fourth connection part is hinged to the bottom end of the third connection part; the first support block has a third state in which the third connection part and the fourth connection part are arranged in an "I" shape, and a fourth state in which the third connection part and the fourth connection part are arranged in an L shape; the pin holes are used for the first support block in the third state to pass through; when the first support block is in the fourth state, the fourth connection part abuts against the bottom end surface of the non-magnetic metal mesh; when the pusher descends in the vertical direction, it drives the first support block to switch from the fourth state to the third state.

[0016] In an optional embodiment, a second avoidance groove is provided at the bottom end of the transfer platform in a vertical direction, and a second pushing portion is provided at a position of the pusher corresponding to the second avoidance groove, and the second avoidance groove is used for the second pushing portion to pass through; when the pusher descends in the vertical direction, the second pushing portion drives the first supporting block to switch from the fourth state to the third state;

[0017] And / or, a second elastic member is provided between the third connection portion and the fourth connection portion, and the second elastic member is used to apply a biasing force to the fourth connection portion to switch the first support block from the third state to the fourth state.

[0018] In an optional embodiment, the relative upper end of the cavity is provided with a through-hole, and a push rod is provided at the top end of the pusher, and the push rod is located in the cavity.

[0019] In an optional embodiment, a connecting disk is provided in the cavity, and the connecting disk is located above the pusher. The connecting disk is provided with a through hole along the vertical direction, and the push rod is slidably provided in the through hole, and the upper end of the push rod extends outside the connecting disk.

[0020] In an optional embodiment, a limit block is provided on the outer wall of the transfer platform, a positioning portion is provided at the bottom end of the limit block, a positioning hole is provided at the top end of the hot pressing mold corresponding to the position of the positioning portion, and the positioning portion matches the positioning hole.

[0021] In a second aspect, the present invention further provides a transfer method, which is applied to the transfer tool provided in the first aspect, and the transfer method comprises the following steps:

[0022] S1, driving the pusher downward to switch the edge support block from the second state to the first state, and then placing the non-magnetic metal mesh at the bottom end of the transfer table and in the space surrounded by the multiple first connecting parts;

[0023] S2, driving the pusher to rise, and then switching the edge support block from the first state to the second state, so that the plurality of second connection parts support the non-magnetic metal mesh;

[0024] S3, moving the transfer table to the position directly above the installation slot, and then movably inserting the lower end of the transfer table into the installation slot to a set depth and then stopping;

[0025] S4, driving the pusher to descend and switch the edge support block from the second state to the first state, so that the non-magnetic metal mesh falls to the bottom surface of the installation groove under the action of its own weight.

[0026] A transfer method according to the present invention has at least the following beneficial effects:

[0027] By evenly distributing a plurality of edge support blocks along the circumferential direction at the bottom end of the transfer table, each edge support block has a first state in which the first connecting portion and the second connecting portion are arranged in an "I" shape, and a second state in which the first connecting portion and the second connecting portion are arranged in an L shape; when the non-magnetic metal mesh needs to be transferred to the installation groove, the pusher is first driven down to switch the edge support block from the second state to the first state, releasing the space below the transfer table, and then the non-magnetic metal mesh is abutted against the bottom end surface of the transfer table, and the non-magnetic metal mesh is located in the space surrounded by the plurality of first connecting portions, and then the edge support block is switched from the first state to the first state. Switch to the second state, so that the second connection parts of the multiple edge support blocks respectively abut against different positions along the circumference of the bottom end surface of the non-magnetic metal mesh, so that the non-magnetic metal mesh is carried on the lower end of the transfer table, and then the transfer table is transferred to the top of the installation slot, and the non-magnetic metal mesh is inserted into the installation slot together with the relative lower end of the transfer table to the set depth and then stopped. At this time, the pusher is driven to descend to switch the edge support block from the second state to the first state, and the supporting force applied to the bottom end of the non-magnetic metal mesh is removed, so that the non-magnetic metal mesh falls on the bottom surface of the installation slot with high flatness under the action of its own weight. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1This is a schematic structural diagram of the assembly of a transfer tool and a hot pressing mold in this embodiment;

[0030] Figure 2 for Figure 1 A partial enlarged schematic diagram;

[0031] Figure 3 for Figure 1 an enlarged schematic diagram of another part;

[0032] Figure 4 Schematic diagram of the top view of the hot pressing mold in this embodiment;

[0033] Figure 5 This is a schematic structural diagram of a transfer tool according to this embodiment after completing step S2;

[0034] Figure 6 This is a schematic structural diagram of a transfer tool according to this embodiment after completing step S4;

[0035] Figure 7 for Figure 6 Enlarged schematic diagram of point A in the middle.

[0036] Description of reference numerals:

[0037] 100-non-magnetic metal mesh, 110-pin hole;

[0038] 200-hot pressing mold, 210-mounting slot, 220-positioning hole;

[0039] 300-transfer platform, 310-cavity, 320-first avoidance groove, 330-second avoidance groove, 340-connection plate, 350-limiting block, 351-positioning part;

[0040] 400-edge support block, 410-first connecting portion, 420-second connecting portion, 430-first elastic member;

[0041] 510- pusher, 511- first push part, 520- push rod;

[0042] 600 - first supporting block, 610 - third connecting portion, 620 - fourth connecting portion, 630 - second elastic member. DETAILED DESCRIPTION

[0043] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts shall fall within the scope of protection of the present invention.

[0044] In the description of this embodiment, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this embodiment and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this embodiment. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0045] In the description of this embodiment, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this embodiment based on specific circumstances.

[0046] The following combination Figures 1 to 7 , describing embodiments of the present invention.

[0047] According to a first aspect of an embodiment of the present invention, a transfer tool for preparing an electrostatic chuck is provided, which is used to transfer a non-magnetic metal mesh 100 to a mounting groove 210 at the upper end of a hot pressing mold 200. The transfer tool includes a transfer table 300, and the transfer table 300 is provided with a cavity 310. The lower end of the transfer table 300 is used to be movably inserted into the mounting groove 210; at least two edge support blocks 400 are evenly spaced along the circumferential direction at the bottom end of the transfer table 300, and the edge support blocks 400 include a first connecting portion 410 and a second connecting portion 420. The first connecting portion 410 is arranged at the bottom end of the transfer table 300 and is arranged parallel to the vertical direction. The second connection part 420 is hinged to the bottom end of the first connection part 410; the edge support block 400 has a first state in which the first connection part 410 and the second connection part 420 are arranged in an "I" shape, and a second state in which the first connection part 410 and the second connection part 420 are arranged in an L shape; when the edge support block 400 is in the second state, the second connection part 420 abuts against the bottom end surface of the non-magnetic metal mesh 100; a pusher 510 is slidably provided in the vertical direction in the cavity 310, and when the pusher 510 descends in the vertical direction, it drives the edge support block 400 to switch from the second state to the first state.

[0048] The transfer tooling of this embodiment is provided with a plurality of edge support blocks 400 uniformly distributed along the circumference at the bottom end of the transfer table 300, and each edge support block 400 has a first state in which the first connecting portion 410 and the second connecting portion 420 are arranged in an "I" shape, and a second state in which the first connecting portion 410 and the second connecting portion 420 are arranged in an L shape; when it is necessary to transfer the non-magnetic metal mesh 100 to the installation groove 210, the pusher 510 is first driven down to switch the edge support block 400 from the second state to the first state, thereby releasing the space below the transfer table 300, and then the non-magnetic metal mesh 100 is abutted against the bottom end surface of the transfer table 300, and the non-magnetic metal mesh 100 is located in the space surrounded by the plurality of first connecting portions 410, and then the edge support block 400 is 400 switches from the first state to the second state, so that the second connection parts 420 of the multiple edge support blocks 400 respectively abut against different positions along the circumference of the bottom end surface of the non-magnetic metal mesh 100, so that the non-magnetic metal mesh 100 is carried on the lower end of the transfer table 300, and then the transfer table 300 is transferred to the top of the installation groove 210, and the non-magnetic metal mesh 100 is inserted into the installation groove 210 together with the relative lower end of the transfer table 300 to the set depth and then stopped. At this time, the driving pusher 510 is driven to descend to switch the edge support block 400 from the second state to the first state, and the supporting force applied to the bottom end of the non-magnetic metal mesh 100 is removed, so that the non-magnetic metal mesh 100 falls on the bottom surface of the installation groove 210 with high flatness under the action of its own weight.

[0049] It should be noted that the projection of the edge support block 400 in the vertical direction falls within the range of the transfer table 300. Therefore, after the non-magnetic metal mesh 100 is supported directly below the transfer table 300 using the edge support block 400 in the second state, and when the lower end of the transfer table 300 is inserted into the mounting groove 210, no interference will occur.

[0050] It should be noted that when the relative lower end of the transfer table 300 is movably inserted into the set depth in the installation groove 210, the vertical distance between the bottom end surface of the transfer table 300 and the bottom surface of the installation groove 210 is set at 1 mm to 5 mm, ensuring that the non-magnetic metal mesh 100 falls on the bottom surface of the installation groove 210 with high flatness under the action of its own weight.

[0051] It should be noted that in the process of inserting the non-magnetic metal mesh 100 into the installation groove 210 together with the relative lower end of the transfer table 300, it is first preliminarily positioned by contacting the outer wall of the transfer table 300 with the surrounding wall of the installation groove 210, and when the bottom end surface of the transfer table 300 is about 1 mm away from the bottom surface of the installation groove 210, the pusher 510 is driven to descend and switch the edge support block 400 from the second state to the first state, releasing the supporting force on the bottom end of the non-magnetic metal mesh 100, so that the non-magnetic metal mesh 100 falls on the bottom surface of the installation groove 210 under its own gravity. During the falling process of the non-magnetic metal mesh 100, because the falling height is small, the non-magnetic metal mesh 100 basically does not produce radial displacement in the installation groove 210, thereby ensuring the accuracy of the relative position of the non-magnetic metal mesh 100 in the installation groove 210 of the hot pressing mold 200.

[0052] It should be noted that after the non-magnetic metal mesh 100 is transferred to the bottom surface of the installation groove 210 while maintaining high flatness, the transfer platform 300 can be easily pulled out from the installation groove 210 to carry out the next transfer operation.

[0053] It can be understood that when the edge support block 400 is in the first state, the first connection portion 410 and the second connection portion 420 are both arranged parallel to the vertical direction.

[0054] In this embodiment, the non-magnetic metal mesh 100 is made of molybdenum metal.

[0055] like Figure 2As shown, in some embodiments, a first elastic member 430 is disposed between the first connecting portion 410 and the second connecting portion 420. The first elastic member 430 is configured to apply a biasing force to the second connecting portion 420 to cause the edge support block 400 to switch from the first state to the second state. By adding the first elastic member 430, after the pusher 510 is raised in the vertical direction, the edge support block 400 automatically switches from the first state to the second state under the biasing force of the first elastic member 430, further simplifying the manual operation process and reducing the difficulty of operation.

[0056] Specifically, the first elastic member 430 is configured as a first spring, one end of the first spring is connected to the first connecting portion 410, and the other end of the first spring is connected to the second connecting portion 420, so that the first spring is compressed during the process of switching the edge support block 400 from the second state to the first state, and when the edge support block 400 switches to the first state, the energy stored in the first spring reaches a maximum, so that after the pusher 510 is raised in the vertical direction, the energy stored in the first spring is released to ensure that the edge support block 400 automatically and accurately switches to the second state.

[0057] In a specific application, the second connecting part 420 is rotatably connected to the first connecting part 410 through the first connecting shaft. The first elastic member 430 can also be set as a torsion spring, which is sleeved on the first connecting shaft. The torsion arm at one end of the torsion spring is connected to the first connecting part 410, and the torsion hook end of the torsion spring is connected to the first connecting shaft.

[0058] like Figure 2 As shown, in some embodiments, the bottom end of the transfer platform 300 is provided with first avoidance grooves 320 corresponding to the position of the second connecting portion 420 along the vertical direction, and the pusher 510 is provided with a first pushing portion 511 corresponding to the position of the first avoidance groove 320, and the bottom end of the first pushing portion 511 is used to pass through the first avoidance groove 320 and extend to the outside of the transfer platform 300; when the edge support block 400 is in the second state, the top end of the second connecting portion 420 abuts against the bottom end of the first pushing portion 511. Through such a configuration, when the first pushing part 511 is driven to descend together with the pusher 510, a downward pressure can be applied to the second connecting part 420, thereby pushing the second connecting part 420 to rotate relative to the first connecting part 410, so that the edge support block 400 is accurately switched from the second state to the first state; at the same time, when the edge support block 400 switches to the first state, the outer wall of the first pushing part 511 at least partially abuts against the inner wall of the second connecting part 420, effectively preventing the second connecting part 420 from rotating relative to the first connecting part 410 under the action of the first elastic member 430 and interfering with the falling action of the non-magnetic metal mesh 100.

[0059] It can be understood that after the edge support block 400 is switched from the second state to the first state, in the process of the non-magnetic metal mesh 100 falling out of the space surrounded by multiple edge support blocks 400 under the action of its own weight, multiple first pushing parts 511 evenly spaced along the circumference can limit the horizontal freedom of the non-magnetic metal mesh 100, which is conducive to ensuring that the non-magnetic metal mesh 100 falls on the bottom surface of the mounting groove 210 with high flatness.

[0060] like Figure 3As shown, in some embodiments, the non-magnetic metal mesh 100 is provided with a plurality of pin holes 110 relative to the center thereof, and the plurality of pin holes 110 are evenly spaced along the circumferential direction. A first support block 600 is provided at a position corresponding to the pin holes 110 on the bottom end surface of the transfer platform 300. The first support block 600 includes a third connecting portion 610 and a fourth connecting portion 620. The third connecting portion 610 is provided at the bottom end of the transfer platform 300 and is provided parallel to the vertical direction. The fourth connecting portion 620 is hinged to the bottom end of the third connecting portion 610. The support block 600 has a third state in which the third connection part 610 and the fourth connection part 620 are arranged in an "I" shape, and a fourth state in which the third connection part 610 and the fourth connection part 620 are arranged in an L shape; the pin hole 110 is used for allowing the first support block 600 in the third state to pass through; when the first support block 600 is in the fourth state, the fourth connection part 620 abuts against the bottom end surface of the non-magnetic metal mesh 100; when the pusher 510 descends in the vertical direction, it drives the first support block 600 to switch from the fourth state to the third state. Considering that only the edge area of ​​the non-magnetic metal mesh 100 can be supported by the second connecting portion 420, the middle part of the non-magnetic metal mesh 100 is easily sagged and deformed due to its own weight, affecting the overall flatness of the non-magnetic metal mesh 100; in this embodiment, a first support block 600 is provided at a position corresponding to the pin hole 110 on the bottom surface of the transfer table 300, and the first support block 600 has a third state and a fourth state. When the non-magnetic metal mesh 100 is assembled with the transfer table 300, the pusher 510 is driven to descend and switch the edge support block 400 from the second state to the first state, and at the same time, the first support block 600 is switched from the fourth state to the third state, so that the non-magnetic metal mesh 100 is placed in a plurality of first connecting portions. When the first support block 600 is in the space enclosed by the edge support block 410 and abuts against the bottom end surface of the transfer table 300, the first support block 600 can pass through the pin hole 110 without interference; then, when the edge support block 400 is switched from the first state to the second state, the first support block 600 is switched from the third state to the fourth state, so that the second connection part 420 supports the edge area of ​​the non-magnetic non-metallic mesh while the fourth connection part 620 supports the middle part of the non-magnetic metal mesh 100, thereby ensuring that the non-magnetic metal mesh 100 is effectively prevented from being deformed during the process of transferring the non-magnetic metal mesh 100 to the installation groove 210, thereby ensuring that the non-magnetic metal mesh 100 remains flat and falls on the bottom surface of the installation groove 210.

[0061] like Figure 3Specifically, a second elastic member 630 is disposed between the third connection portion 610 and the fourth connection portion 620. The second elastic member 630 is configured to apply a biasing force to the fourth connection portion 620, causing the first support block 600 to switch from the third state to the fourth state. By adding the second elastic member 630, after the pusher 510 is vertically raised, the first support block 600 automatically switches from the third state to the fourth state under the biasing force of the second elastic member 630, further simplifying the manual operation process and reducing operational difficulty.

[0062] Specifically, the second elastic member 630 is configured as a second spring, one end of the second spring is connected to the third connecting portion 610, and the other end of the third spring is connected to the fourth connecting portion 620, so that the second spring is compressed during the process of the first support block 600 switching from the fourth state to the third state, and when the first support block 600 switches to the third state, the energy stored in the second spring reaches a maximum, so that after the pusher 510 is raised in the vertical direction, the energy stored in the second spring is released to ensure that the first support block 600 automatically and accurately switches to the fourth state.

[0063] In a specific application, the fourth connecting part 620 is rotatably connected to the third connecting part 610 through the second connecting shaft. The second elastic member 630 can also be set as a torsion spring, which is sleeved on the second connecting shaft. The torsion spring has a torque arm at one end connected to the third connecting part 610, and the torsion hook end of the torsion spring is connected to the second connecting shaft.

[0064] Specifically, a second avoidance groove 330 is vertically provided at the bottom end of the transfer platform 300. The pusher 510 is provided with a second push portion at a position corresponding to the second avoidance groove 330, and the second push portion is configured to pass through the second avoidance groove 330. When the pusher 510 descends vertically, the second push portion drives the first support block 600 to switch from the fourth state to the third state. With this arrangement, when the first push portion 511 and the second push portion are driven to descend together with the pusher 510, the second push portion can apply downward pressure to the fourth connection portion 620, thereby forcing the fourth connection portion 620 to rotate relative to the third connection portion 610, allowing the first support block 600 to accurately switch from the fourth state to the third state. Furthermore, when the first support block 600 switches to the third state, the outer wall of the second push portion at least partially abuts the inner wall of the fourth connection portion 620, effectively preventing the fourth connection portion 620 from interfering with the falling movement of the non-magnetic metal mesh 100 due to the rotation of the second elastic member 630 relative to the third connection portion 610.

[0065] like Figure 1 、 Figure 5 and Figure 6As shown, in some embodiments, the upper end of the cavity 310 is provided with a through-hole, and a push rod 520 is provided at the top end of the pusher 510, and the push rod 520 is located in the cavity 310. By providing a through-hole at the upper end of the cavity 310, a space for the operator to apply force is provided, so that the operator can manually apply external force to the push rod 520 to drive the pusher 510 to move up and down. The entire process does not require an external power supply or an external air source, and the structure is simple and the production cost is low. It is particularly suitable for use in environments where external power supply and external air source are not available.

[0066] In a specific application, the transfer platform 300 is configured in a tubular shape so that an operator can hold it to perform transfer operations.

[0067] Specifically, a connection disk 340 is disposed within the cavity 310 and is located above the pusher 510. A through hole is vertically provided through the connection disk 340, and the push rod 520 is slidably disposed within the through hole. The upper end of the push rod 520 extends outside the connection disk 340. The through hole guides the push rod 520, ensuring smooth lifting and lowering of the push rod 520, thereby ensuring accurate switching of the edge support block 400 between the first state and the second state.

[0068] like Figure 1 、 Figure 5 and Figure 6 As shown, in some embodiments, a limit block 350 is provided on the outer wall of the transfer table 300, and a positioning portion 351 is provided at the bottom end of the limit block 350, and a positioning hole 220 is provided at the top end of the hot pressing mold 200 corresponding to the position of the positioning portion 351, and the positioning portion 351 matches the positioning hole 220; when the limit block 350 drops to abut the top surface of the hot pressing mold 200, the positioning portion 351 is inserted into the positioning hole 220, so that while accurately ensuring that the lower end of the transfer table 300 is inserted into the installation groove 210 to a set depth, the transfer table 300 is prevented from rotating in the installation groove 210, that is, the transfer table 300 is stopped smoothly in the installation groove 210, thereby facilitating the downward pressing of the push rod 520 to switch the edge support block 400 from the second state to the first state, and thereby allowing the non-magnetic metal mesh 100 to fall on the bottom surface of the installation groove 210 with high flatness under the action of its own weight.

[0069] Specifically, three limiting blocks 350 are provided, and the three limiting blocks 350 are evenly distributed on the outer wall of the transfer platform 300 at intervals along the circumferential direction.

[0070] This embodiment can also be used to transfer the arc-shaped molybdenum wire to the mounting groove 210 at the upper end of the hot pressing mold 200. A second support block is provided at the bottom end of the transfer platform 300 corresponding to the position of the molybdenum wire. The second support block includes a fifth connecting portion and a sixth connecting portion. The fifth connecting portion is provided at the bottom end of the transfer platform 300 and is provided parallel to the vertical direction. The sixth connecting portion is hinged to the bottom end of the fifth connecting portion. The second support block has a fifth state in which the fifth connecting portion and the sixth connecting portion are provided in an "I" shape, and a sixth state in which the fifth connecting portion and the sixth connecting portion are provided in an L shape. The transfer platform 300 The bottom end of the pusher 510 is provided with an arc-shaped avoidance groove in the vertical direction corresponding to the position of the sixth connection part, and the arc-shaped avoidance groove is used for the molybdenum wire to be embedded; when the second support block is in the sixth state, the sixth connection part abuts against the bottom end surface of the molybdenum wire; the pusher 510 is provided with a third pushing part in the position of the arc-shaped avoidance groove, and when the pusher 510 descends in the vertical direction, the third pushing part drives the second support block to switch from the sixth state to the fifth state; a third spring is provided between the fifth connection part and the sixth connection part, and the third spring is used to apply a biasing force to the sixth connection part to switch the second support block from the fifth state to the sixth state. When the arc-shaped molybdenum wire needs to be transferred to the installation groove 210, the pusher 510 is first driven to descend to switch the second support block from the sixth state to the fifth state, and then the molybdenum wire is abutted against the bottom end surface of the third pushing part. As the third pushing part rises, the molybdenum wire gradually embeds into the arc-shaped avoidance groove, and at the same time, the second support block gradually switches from the fifth state to the sixth state under the action of the third spring, so that the sixth connecting part abuts against the bottom end of the molybdenum wire, so that the molybdenum wire is carried on the lower end of the transfer table 300, and then the transfer table 300 is transferred to the top of the installation groove 210, and the molybdenum wire is inserted into the installation groove 210 together with the relative lower end of the transfer table 300 to the set depth and then stopped. At this time, the pusher 510 is driven to descend to switch the second support block from the sixth state to the fifth state, and the supporting force applied to the bottom end of the molybdenum wire is removed, so that the molybdenum wire falls on the bottom surface of the installation groove 210 with high flatness under the action of its own weight.

[0071] like Figures 1 to 7 As shown, according to the second aspect of the embodiment of the present invention, a transfer method is further provided, which is applied to the transfer tool provided in the first aspect of the embodiment of the present invention. The transfer method includes the following steps:

[0072] S1, driving the pusher 510 downward to switch the edge support block 400 from the second state to the first state, and then placing the non-magnetic metal mesh 100 at the bottom end of the transfer table 300 and in the space surrounded by the multiple first connecting parts 410;

[0073] S2, driving the pusher 510 to rise, and then switching the edge support block 400 from the first state to the second state, so that the plurality of second connection parts 420 support the non-magnetic metal mesh 100;

[0074] S3, transferring the transfer platform 300 to the position directly above the installation groove 210, and then inserting the lower end of the transfer platform 300 into the installation groove 210 to a set depth and then stopping;

[0075] S4 , driving the pusher 510 downward to switch the edge support block 400 from the second state to the first state, so that the non-magnetic metal mesh 100 falls to the bottom surface of the installation groove 210 under the action of its own weight.

[0076] The transfer method of this embodiment is to uniformly distribute a plurality of edge support blocks 400 along the circumferential direction at the bottom end of the transfer table 300, and each edge support block 400 has a first state in which the first connecting portion 410 and the second connecting portion 420 are arranged in an "I" shape, and a second state in which the first connecting portion 410 and the second connecting portion 420 are arranged in an L shape; when it is necessary to transfer the non-magnetic metal mesh 100 to the installation groove 210, first drive the pusher 510 downward to switch the edge support block 400 from the second state to the first state, release the space below the transfer table 300, and then abut the non-magnetic metal mesh 100 against the bottom end surface of the transfer table 300, and the non-magnetic metal mesh 100 is located in the space surrounded by the plurality of first connecting portions 410, and then the edge support block 400 switches from the first state to the second state, so that the second connection parts 420 of the multiple edge support blocks 400 respectively abut against different positions along the circumference of the bottom end surface of the non-magnetic metal mesh 100, so that the non-magnetic metal mesh 100 is carried on the lower end of the transfer table 300, and then the transfer table 300 is transferred to the top of the installation groove 210, and the non-magnetic metal mesh 100 is inserted into the installation groove 210 together with the relative lower end of the transfer table 300 to the set depth and then stopped. At this time, the driving pusher 510 is driven to descend to switch the edge support block 400 from the second state to the first state, and the supporting force applied to the bottom end of the non-magnetic metal mesh 100 is removed, so that the non-magnetic metal mesh 100 falls on the bottom surface of the installation groove 210 with high flatness under the action of its own weight.

[0077] Specifically, after completing step S4, the following steps are further included:

[0078] S5 , maintaining the edge supporting block 400 in the first state, and pulling the transfer table 300 out of the installation groove 210 .

[0079] In this embodiment, after the non-magnetic metal mesh 100 is transferred to the bottom surface of the installation groove 210 with high flatness, the transfer platform 300 can be easily pulled out from the installation groove 210, and the edge support block 400 is in the first state for the next transfer operation.

[0080] Although the embodiments of the present invention have been described with reference to the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations shall all fall within the scope defined by the present invention.

Claims

1. A transfer tool for preparing an electrostatic chuck, characterized in that: The transfer tool is used to transfer a non-magnetic metal mesh (100) into a mounting groove (210) at the upper end of a hot pressing mold (200), and the transfer tool comprises: A transfer platform (300) is provided with a cavity (310), and the lower end of the transfer platform (300) is used for being movably inserted into the installation groove (210); At least two edge support blocks (400) are evenly distributed at the bottom end of the transfer platform (300) along a circumferential direction, and the edge support block (400) includes a first connecting portion (410) and a second connecting portion (420), wherein the first connecting portion (410) is arranged at the bottom end of the transfer platform (300) and is arranged parallel to the vertical direction, and the second connecting portion (420) is hinged to the bottom end of the first connecting portion (410); the edge support block (400) has a first state in which the first connecting portion (410) and the second connecting portion (420) are arranged in an "I" shape, and a second state in which the first connecting portion (410) and the second connecting portion (420) are arranged in an L shape; When the edge support block (400) is in the second state, the second connection portion (420) abuts against the bottom end surface of the non-magnetic metal mesh (100); The pusher (510) is slidably arranged in the cavity (310) along the vertical direction. When the pusher (510) descends along the vertical direction, it drives the edge support block (400) to switch from the second state to the first state.

2. A transfer tool for preparing an electrostatic chuck according to claim 1, characterized in that: A first elastic member (430) is provided between the first connecting portion (410) and the second connecting portion (420), and the first elastic member (430) is used to apply a biasing force to the second connecting portion (420) so as to switch the edge support block (400) from the first state to the second state.

3. A transfer tool for preparing an electrostatic chuck according to claim 2, characterized in that: The first elastic member (430) is configured as a first spring.

4. A transfer tool for preparing an electrostatic chuck according to any one of claims 1 to 3, characterized in that: The bottom end of the transfer platform (300) is provided with first avoidance grooves (320) in a vertical direction corresponding to the position of the second connecting portion (420), and the pusher (510) is provided with a first pushing portion (511) at a position corresponding to the first avoidance groove (320), and the bottom end of the first pushing portion (511) is used to pass through the first avoidance groove (320) and extend to the outside of the transfer platform (300); when the edge support block (400) is in the second state, the top end of the second connecting portion (420) abuts against the bottom end of the first pushing portion (511).

5. A transfer tool for preparing an electrostatic chuck according to any one of claims 1 to 3, characterized in that: The non-magnetic metal mesh (100) is provided with a plurality of pin holes (110) at positions relative to the center thereof, and the plurality of pin holes (110) are evenly spaced along the circumferential direction. A first support block (600) is provided at a position corresponding to the pin holes (110) on the bottom end surface of the transfer platform (300), and the first support block (600) includes a third connecting portion (610) and a fourth connecting portion (620). The third connecting portion (610) is provided at the bottom end of the transfer platform (300) and is provided parallel to the vertical direction, and the fourth connecting portion (620) is hinged to the bottom end of the third connecting portion (610); the first support block (600) 00) has a third state in which the third connecting portion (610) and the fourth connecting portion (620) are arranged in an "I" shape, and a fourth state in which the third connecting portion (610) and the fourth connecting portion (620) are arranged in an L shape; the pin hole (110) is used for allowing the first support block (600) in the third state to pass through; when the first support block (600) is in the fourth state, the fourth connecting portion (620) abuts against the bottom end surface of the non-magnetic metal mesh (100); when the pusher (510) descends in the vertical direction, it drives the first support block (600) to switch from the fourth state to the third state.

6. The transfer tool for preparing an electrostatic chuck according to claim 5, characterized in that: A second avoidance groove (330) is provided at the bottom end of the transfer platform (300) in a vertical direction, and a second pushing portion is provided at a position of the pusher (510) corresponding to the second avoidance groove (330), and the second avoidance groove (330) is used for allowing the second pushing portion to pass through; when the pusher (510) descends in the vertical direction, the second pushing portion drives the first supporting block (600) to switch from the fourth state to the third state; And / or, a second elastic member (630) is provided between the third connecting portion (610) and the fourth connecting portion (620), and the second elastic member (630) is used to apply a biasing force to the fourth connecting portion (620) so that the first support block (600) switches from the third state to the fourth state.

7. The transfer tool for preparing an electrostatic chuck according to claim 1, characterized in that: The relative upper end of the cavity (310) is penetrated, and a push rod (520) is provided at the top end of the pusher (510), and the push rod (520) is located in the cavity (310).

8. The transfer tool for preparing an electrostatic chuck according to claim 7, characterized in that: A connecting disk (340) is provided in the cavity (310), and the connecting disk (340) is located above the pusher (510). A through hole is provided through the connecting disk (340) in a vertical direction, and the push rod (520) is slidably provided in the through hole, and the upper end of the push rod (520) extends to the outside of the connecting disk (340).

9. The transfer tool for preparing an electrostatic chuck according to claim 1, characterized in that: A limiting block (350) is provided on the outer side wall of the transfer platform (300), a positioning portion (351) is provided at the bottom end of the limiting block (350), a positioning hole (220) is provided at the top end of the hot pressing mold (200) corresponding to the position of the positioning portion (351), and the positioning portion (351) matches the positioning hole (220).

10. A transfer method, characterized in that: The transfer tool according to any one of claims 1 to 9, wherein the transfer method comprises the following steps: S1, driving the pusher (510) downward to switch the edge support block (400) from the second state to the first state, and then placing the non-magnetic metal mesh (100) at the bottom end of the transfer table (300) and in the space surrounded by the plurality of first connecting parts (410); S2, driving the pusher (510) to rise, and then switching the edge support block (400) from the first state to the second state, so that the plurality of second connection parts (420) carry the non-magnetic metal mesh (100); S3, transferring the transfer platform (300) to the position directly above the installation groove (210), and then movably inserting the relatively lower end of the transfer platform (300) into the installation groove (210) to a set depth and then stopping; S4, driving the pusher (510) downward to switch the edge support block (400) from the second state to the first state, so that the non-magnetic metal mesh (100) falls to the bottom surface of the installation groove (210) under the action of its own weight.

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