Heating disc temperature measuring device and method

Abstract

The invention discloses a temperature measuring device and method for a heating plate, and aims to overcome the defects that an existing semiconductor heating plate is not provided with a special temperature measuring device, the temperature measuring operation of the semiconductor heating plate is inconvenient, and the measuring accuracy is greatly influenced by the environment. The device comprises a temperature measuring cylinder, a cylinder cover is installed on the temperature measuring cylinder to form a temperature measuring cavity in the temperature measuring cylinder, a supporting column is installed in the temperature measuring cavity, the supporting column supports a heating disc, a plurality of temperature detectors are arranged in the temperature measuring cavity, and the temperature detectors are connected to a plurality of positions of the heating disc respectively to detect the temperature of the heating disc. The heating disc temperature measuring device can realize multi-point temperature measurement of the semiconductor heating disc so as to complete temperature uniformity evaluation, and is convenient to operate and accurate and reliable in temperature measurement.

Description

Technical Field

[0001] The present invention relates to semiconductor processing equipment, and more particularly to a heating plate temperature measuring device and method. Background Art

[0002] Currently, semiconductor heating plate heating technologies are categorized by heating material, with five common types: stainless steel tube sheath heating, quartz tube heating, ceramic heating, electric heating film heating, and nano-thick film heating. Stainless steel tube sheath heating technology offers advantages over other heating technologies, including corrosion resistance, high temperature resistance, and oxidation resistance; high power output and long service life; stable power output and low cost. Clearly, semiconductor heating plates with stainless steel tube sheath heating are most suitable for high-temperature heating plates with heating temperatures between 400°C and 800°C. However, current semiconductor heating plates lack dedicated temperature measurement devices, making temperature measurement inconvenient and susceptible to environmental influences. For example, Chinese patent application No. 2024115819118 discloses a semiconductor electric heating plate with uniform temperature control. This system monitors temperature to shut off the heating plate itself and automatically reconnects power when the temperature drops to a safe range. This ensures safe operation of the heating plate itself while also enabling automatic disconnection and reconnection, achieving both safety and convenience. The heating plate can control the temperature, but cannot detect the temperature uniformity performance of the heating plate. Summary of the Invention

[0003] In order to overcome the above-mentioned shortcomings, the present invention provides a heating plate temperature measurement device and method, which can realize multi-point temperature measurement of the semiconductor heating plate and then complete the evaluation of temperature uniformity. It is easy to operate and the temperature measurement is accurate and reliable.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions: a heating plate temperature measuring device, comprising a temperature measuring tube, a tube cover is installed on the temperature measuring tube to form a temperature measuring cavity inside the temperature measuring tube, a support column is installed in the temperature measuring cavity, the support column supports the heating plate, and a plurality of temperature detectors are arranged in the temperature measuring cavity, and the plurality of temperature detectors are respectively connected to multiple positions of the heating plate to detect the temperature of the heating plate.

[0005] To test the temperature uniformity of a heating plate, support the plate on support columns within the temperature measurement chamber. Multiple temperature detectors are then connected to different locations on the plate. The temperature detectors are then threaded through the temperature measurement tube, and the tube cover is then installed before the plate is heated. During the heating process, temperature changes are monitored in real time. When the plate temperature reaches the preset value, the values ​​from the multiple temperature detectors are tallied. The output values ​​are analyzed, and multiple temperature values ​​are collected from the temperature detectors at each location, with the average value calculated. The average values ​​calculated from the data collected by the temperature detectors at different locations are compared to determine the difference, which is then used to analyze the temperature uniformity of the heating plate.

[0006] The heating plate is supported by support columns with a small support area, so the heat of the heating plate is not easily transferred and the heat loss is small. The heating plate is loaded in a temperature measuring cavity, which is a closed cavity and provides a heat-insulating and sealed temperature measurement environment for the heating plate, which is conducive to ensuring the accuracy of temperature measurement. In addition, multiple temperature detectors are respectively connected to multiple positions of the heating plate to achieve accurate multi-point temperature measurement and evaluate the temperature uniformity. The heating plate temperature measuring device of this patent application can achieve multi-point temperature measurement of the semiconductor heating plate, and then complete the evaluation of temperature uniformity. It is easy to operate and the temperature measurement is accurate and reliable.

[0007] Preferably, the temperature measuring cylinder includes a cylinder body and an outer shell, the outer shell is wrapped around the outside of the cylinder, and the cylinder body is a ceramic fiber special-shaped part.

[0008] The shell is wrapped around the cylinder, which provides good protection for the cylinder. The cylinder is a special-shaped ceramic fiber part with good strength, high temperature resistance and long service life.

[0009] Preferably, the cylinder cover is a ceramic fiber special-shaped part, and the cylinder cover is externally connected to the protective cover.

[0010] The protective cover plays a protective role on the cylinder cover. The cylinder cover is a ceramic fiber special-shaped part with good strength, high temperature resistance and long service life.

[0011] Preferably, the protective cover includes two semicircular cover bodies, and connecting pieces are provided at the ends of the two cover bodies, and the connecting pieces on the two cover bodies are tightly connected.

[0012] The protective cover is formed by connecting two semicircular cover bodies together, which is convenient for connection with the cylinder cover. The connecting pieces on the two cover bodies are tightly connected, and the assembly connection is convenient.

[0013] Preferably, the support column is a ceramic fiber special-shaped part, a mounting hole is provided at the bottom of the temperature measuring cavity, and the lower end of the support column is fastened and installed in the mounting hole.

[0014] The lower end of the support column is inserted into the mounting hole to achieve connection and positioning, which is convenient and reliable. The support column is a special-shaped ceramic fiber part with good strength, high temperature resistance and long service life.

[0015] Preferably, a plurality of height-adjustable support legs are connected to the bottom of the temperature measuring cylinder, and the support legs support the temperature measuring cylinder.

[0016] The support legs support the entire device, and the support legs can adjust the height, thereby achieving adjustment of the height of the entire device, while facilitating adjustment of the entire device to a balanced position.

[0017] Preferably, a wire-passing notch is provided on the edge of the cylinder cover, and the wiring harness of the temperature detector passes through the wire-passing notch.

[0018] The setting of the wire notch facilitates the installation of the wiring harness.

[0019] Preferably, a turntable and a mounting seat are installed in the temperature measuring chamber, a number of auxiliary pillars are provided on the turntable, a radially arranged slide groove is provided on the mounting seat, the slide groove is slidably connected to the slide seat, a positioning spring is connected between the slide seat and the mounting seat, a pushing inclined surface is provided on the mounting seat, the support column is vertically mounted on the slide seat, the support column is supported on the pushing inclined surface, and a push surface circumferentially deviated from the center is provided on the turntable, and the push surface is pressed against the slide seat.

[0020] The heating disk is loaded onto the support column. At this time, the auxiliary column and the support column both support the heating disk. There are many support points, and the support is stable and reliable, which facilitates the loading operation. The turntable then rotates, and the push surface set on the edge of the turntable pushes against the slide, thereby pushing the slide to move radially outward. In the process of the slide driving the support column to move radially outward, the lower end of the support column slides over the push inclined surface, and the support column is pushed upward by the push inclined surface, thereby pushing the entire heating disk upward. The auxiliary column is separated from the heating disk, reducing the support area, thereby reducing the transfer and loss of heat, which is conducive to improving the detection accuracy. Since the support column can move radially, the support range can be adjusted to adapt to the heating operation of heating disks of different sizes.

[0021] Preferably, a positioning protrusion is provided on the upper end of the support column so that the upper part of the support column has an L-shaped structure.

[0022] After the heating plate is loaded, the upper end of the positioning protrusion supports the plate. The turntable rotates, causing the support columns to move outward first. After the positioning protrusions on the upper ends of all the support columns have slipped off the lower surface of the heating plate, the edge of the heating plate is supported on the lower surface of the upper end of the L-shaped support column. The positioning protrusions now limit the edge of the heating plate. Reverse rotation of the turntable causes the support columns to move radially inward. The sidewalls of the positioning protrusions abut the edge of the heating plate, pushing the plate to correct its deviation and center it. This structural arrangement not only allows for the loading of heating plates of varying sizes, but also ensures reliable clamping and positioning of the heating plates.

[0023] A method for measuring the temperature of a heating plate adopts a heating plate temperature measuring device for temperature measurement, comprising the following steps: S1, supporting the heating plate on a support column in a temperature measuring chamber; S2, connecting multiple temperature detectors to multiple positions of the heating plate; S3, heating the heating plate after covering the cylinder cover; S4, after the temperature of the heating plate reaches a preset value, counting the values ​​of the multiple temperature detectors and analyzing the temperature uniformity characteristics of the heating plate.

[0024] The heating plate is supported by support columns with a small support area, which reduces heat transfer and heat loss. The heating plate is mounted in a closed temperature measurement chamber, providing a thermally insulated and sealed environment for accurate measurement. Furthermore, multiple temperature sensors are connected to various locations on the heating plate, enabling precise multi-point temperature measurement and evaluation of temperature uniformity.

[0025] Compared with the prior art, the beneficial effects of the present invention are as follows: (1) The heating plate temperature measuring device of the present patent application can realize multi-point temperature measurement of the semiconductor heating plate, and then complete the evaluation of temperature uniformity, with convenient operation and accurate and reliable temperature measurement; (2) The heating plate is supported by a support column with a small support area, the heat of the heating plate is not easily transferred, and the heat loss is small, which is conducive to improving the detection accuracy; (3) The cylinder, support column and cylinder cover are all ceramic fiber special-shaped parts with good strength, high temperature resistance and long service life; (4) The support column can be set to move radially and axially, and the support column can be moved radially to adjust the support range to adapt to the heating operation of heating plates of different sizes; the support column rises upward to lift the entire heating plate upward, and the auxiliary support is separated from the heating plate, which reduces the support area and thus reduces the transfer and loss of heat, which is conducive to improving the detection accuracy; (5) The upper end of the support column is in an L-shaped structure, which not only realizes the loading of heating plates of different sizes, but also can realize the reliable clamping and positioning of the heating plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural schematic diagram of the present invention.

[0027] Figure 2 It is a cross-sectional view of Example 1 of the present invention.

[0028] Figure 3 It is an exploded view of Example 1 of the present invention.

[0029] Figure 4 It is a cylinder structure diagram of Example 1 of the present invention.

[0030] Figure 5 It is a cross-sectional view of Example 2 of the present invention.

[0031] Figure 6 This is a turntable connection diagram of Example 2 of the present invention.

[0032] Figure 7 This is a cross-sectional view of Example 3 of the present invention.

[0033] In the figure: 1. Temperature measuring cylinder, 2. Temperature measuring cavity, 3. Cylinder cover, 4. Support column, 5. Heating plate, 6. Mounting hole, 7. Mounting section, 8. Temperature detector, 9. Jack, 10. Cylinder body, 11. Housing, 12. Support foot, 13. Fastening nut, 14. Screw, 15. Protective cover, 16. Cover body, 17. Connecting piece, 18. Line notch, 19. Boss, 20. Positioning platform, 21. Positioning part, 22. Turntable, 23. Mounting seat, 24. Connecting column, 25. Turbine, 26. Worm, 27. Auxiliary support, 28. Slide groove, 29. Slide seat, 30. Positioning spring, 31. Pushing slope, 32. Pushing surface, 33. Positioning protrusion, 34. Guide rail, 35. Slider. DETAILED DESCRIPTION

[0034] The technical solution of the present invention is further described in detail below through specific embodiments and in conjunction with the accompanying drawings: Example 1: A heating plate temperature measuring device (see Figures 1 to 4 ), including a temperature measuring cylinder 1, a cylinder cover 3 is installed on the temperature measuring cylinder 1 to form a temperature measuring cavity 2 inside the temperature measuring cylinder 1, the temperature measuring cavity 2 is a closed cavity, and a support column 4 is installed in the temperature measuring cavity 2, and the support column 4 supports the heating plate 5. The support column 4 is a ceramic fiber special-shaped part, and a mounting hole 6 is provided at the bottom of the temperature measuring cavity 2. The lower end of the support column 4 is fastened and installed in the mounting hole 6. A downwardly extending mounting section 7 is provided at the lower end of the support column 4. The outer diameter of the mounting section 7 is smaller than the outer diameter of the support column 4, and the mounting section 7 is adapted to be inserted into the mounting hole 6. A through hole is provided at the bottom of the temperature measuring cavity 2, and the through hole facilitates the passage of the wiring harness. The upper end surfaces of all support columns 4 are flush.

[0035] Several temperature detectors 8 are disposed within the temperature measurement chamber 2. These multiple temperature detectors 8 are connected to multiple locations on the heating plate 5 to detect the temperature of the heating plate 5. In this embodiment, three temperature detectors 8 are evenly distributed around the circumference. A socket 9 is provided on the heating plate 5, and the temperature measuring heads of the temperature detectors 8 are inserted into the socket 9. The temperature detectors 8 employ thermocouples.

[0036] The temperature measuring tube 1 includes a cylinder 10 and an outer shell 11. The outer shell 11 is wrapped around the outside of the cylinder 10. The cylinder 10 is a ceramic fiber special-shaped part, and the outer shell 11 is an aluminum alloy sheet metal part. The outer shell 11 is wrapped around the outside of the cylinder 10, providing good protection for the cylinder 10. The cylinder 10 is a ceramic fiber special-shaped part with good strength, high temperature resistance and long service life. The support column 4 is installed at the bottom of the cylinder 10. The support columns 4 are arranged in two circles at radial intervals, with six columns evenly distributed circumferentially in each circle, and another support column 4 is arranged in the center. Several height-adjustable support legs 12 are connected to the bottom of the temperature measuring tube 1, and the support legs 12 support the temperature measuring tube 1. A fastening nut 13 corresponding to the support leg 12 is welded to the bottom of the outer shell 11, and a screw 14 is provided on the support leg 12. The screw 14 is threadedly connected to the fastening nut 13. The support height of the support leg 12 can be adjusted by rotating the screw 14, thereby adjusting the height of the temperature measuring tube 1, making it easy to adjust the temperature measuring tube 1 to a balanced position.

[0037] The cylinder cover 3 is a shaped ceramic fiber part, and is externally connected to a protective cover 15. The protective cover 15 provides protection for the cylinder cover 3. The cylinder cover 3 is a shaped ceramic fiber part, which is strong, heat-resistant, and has a long service life. The protective cover 15 includes two semicircular cover bodies 16, each with a connecting piece 17 at the end. The connecting pieces 17 on the two cover bodies 16 are tightly connected. The protective cover 15, consisting of two semicircular cover bodies 16 connected together, is convenient for connection to the cylinder cover 3. The connecting pieces 17 on the two cover bodies 16 are tightly connected, making assembly and connection easy.

[0038] A wire notch 18 is provided on the edge of the barrel cover 3, through which the wiring harness of the temperature detector 8 passes. A downwardly extending boss 19 is provided on the lower end surface of the barrel cover 3, and a downwardly extending positioning platform 20 is provided on the boss 19. The positioning platform 20 fits within the upper opening of the barrel 10, and the boss 19 is supported on the upper end surface of the barrel 10. The lower portion of the protective cover 15 is recessed to form a positioning portion 21 with a U-shaped cross section, which is supported on the upper end surface of the barrel 10.

[0039] A method for measuring the temperature of a heating plate is provided, which uses a heating plate temperature measuring device to measure the temperature, comprising the following steps: S1, supporting the heating plate 5 on the support column 4 in the temperature measuring chamber 2; adjusting the heating plate 5 to the center position, and the wiring harness of the heating plate 5 is passed outward from the through hole at the bottom of the temperature measuring chamber 2.

[0040] S2, connect multiple temperature detectors 8 to multiple positions of the heating plate 5 respectively; the temperature measuring head on the temperature detector 8 is inserted into the jack 9 on the heating plate 5, and the wiring harness of the temperature detector 8 passes through the wire notch 18 on the edge of the cylinder cover 3.

[0041] S3, after covering the drum cover 3, heating the heating plate 5; in the present application, the heating plate 5 is heated by electric heating.

[0042] S4 , after the temperature of the heating plate 5 reaches a preset value, the values ​​of the multiple temperature detectors 8 are counted to analyze the temperature uniformity characteristics of the heating plate 5 .

[0043] When testing the temperature uniformity of the heating disk 5, the heating disk 5 is supported on the support column 4 in the temperature measuring chamber 2, and then multiple temperature detectors 8 are connected to multiple different positions of the heating disk 5. The linear speed of the temperature detector 8 passes through the outside of the temperature measuring tube 1, and then the tube cover 3 is covered and the heating disk 5 is heated. During the heating process of the heating disk 5, the temperature changes are monitored in real time. When the temperature of the heating disk 5 reaches the preset value, the values ​​of the multiple temperature detectors 8 are counted. The output values ​​are analyzed, and multiple temperature values ​​are collected from the temperature detector 8 at each position, and the average value is calculated. The average values ​​calculated from the data collected by the temperature detectors 8 at different positions are compared to obtain the difference, and then the temperature uniformity characteristics of the heating disk 5 are analyzed.

[0044] The heating plate 5 is supported by support columns 4, which have a small support area. This reduces heat transfer and minimizes heat loss. The heating plate 5 is housed in a closed temperature measurement chamber 2, providing a thermally insulated and sealed environment for accurate temperature measurement. Furthermore, multiple temperature sensors 8 are connected to various locations on the heating plate 5, enabling precise multi-point temperature measurement and assessing temperature uniformity.

[0045] Example 2: A heating plate temperature measuring device (see Figure 5 、 Figure 6The device comprises a temperature measuring tube 1, a cap 3 mounted on the tube 1 to form a closed temperature measuring chamber 2 within the tube 1. Support columns 4 are mounted within the chamber 2 to support a heating plate 5. These columns 4 are shaped ceramic fiber parts, with all upper end surfaces flush. A through-hole is provided at the bottom of the chamber 2 to facilitate the passage of wiring harnesses.

[0046] Several temperature detectors 8 are disposed within the temperature measurement chamber 2. These multiple temperature detectors 8 are connected to multiple locations on the heating plate 5 to detect the temperature of the heating plate 5. In this embodiment, three temperature detectors 8 are evenly distributed around the circumference. A socket 9 is provided on the heating plate 5, and the temperature measuring heads of the temperature detectors 8 are inserted into the socket 9. The temperature detectors 8 employ thermocouples.

[0047] The temperature measuring tube 1 includes a cylinder body 10 and an outer shell 11. The outer shell 11 is coated on the outside of the cylinder body 10. The cylinder body 10 is a ceramic fiber special-shaped part, and the outer shell 11 is an aluminum alloy sheet metal part. The outer shell 11 is coated on the outside of the cylinder body 10, which provides good protection for the cylinder body 10. The cylinder body 10 is a ceramic fiber special-shaped part with good strength, high temperature resistance and long service life. A number of height-adjustable support legs 12 are connected to the bottom of the temperature measuring tube 1, and the support legs 12 support the temperature measuring tube 1. A fastening nut 13 corresponding to the support leg 12 is welded to the bottom of the outer shell 11, and a screw 14 is provided on the support leg 12. The screw 14 is threadedly connected to the fastening nut 13. By rotating the screw 14, the support height of the support leg 12 can be adjusted, thereby adjusting the height of the temperature measuring tube 1, which is convenient for adjusting the temperature measuring tube 1 to a balanced position.

[0048] The cylinder cover 3 is a shaped ceramic fiber part, and is externally connected to a protective cover 15. The protective cover 15 provides protection for the cylinder cover 3. The cylinder cover 3 is a shaped ceramic fiber part, which is strong, heat-resistant, and has a long service life. The protective cover 15 includes two semicircular cover bodies 16, each with a connecting piece 17 at the end. The connecting pieces 17 on the two cover bodies 16 are tightly connected. The protective cover 15, consisting of two semicircular cover bodies 16 connected together, is convenient for connection to the cylinder cover 3. The connecting pieces 17 on the two cover bodies 16 are tightly connected, making assembly and connection easy.

[0049] A wire notch 18 is provided on the edge of the barrel cover 3, through which the wiring harness of the temperature detector 8 passes. A downwardly extending boss 19 is provided on the lower end surface of the barrel cover 3, and a downwardly extending positioning platform 20 is provided on the boss 19. The positioning platform 20 fits within the upper opening of the barrel 10, and the boss 19 is supported on the upper end surface of the barrel 10. The lower portion of the protective cover 15 is recessed to form a positioning portion 21 with a U-shaped cross section, which is supported on the upper end surface of the barrel 10.

[0050] A turntable 22 and mounting base 23 are mounted within the temperature measurement chamber 2. A T-shaped connecting post 24 is mounted on the turntable 22. This connecting post 24 extends downward from the bottom of the temperature measurement barrel 1. Its lower end is connected to a turbine 25. A drive motor is mounted at the bottom of the temperature measurement barrel 1. The output shaft of the drive motor is connected to a worm 26, which meshes with the turbine 25 for transmission. Several auxiliary struts 27 are mounted on the turntable 22. In this embodiment, three auxiliary struts are evenly spaced around the circumference, as are three support struts 4.

[0051] The mounting seat 23 and the support column 4 are arranged in a one-to-one correspondence. The mounting seat 23 is provided with a radially arranged slide groove 28, which is slidably connected to a slide 29. A positioning spring 30 is connected between the slide 29 and the mounting seat 23. The mounting seat 23 is provided with a push inclined surface 31, which is inclined upward toward the direction of the original turntable 22 and is located at the bottom of the slide groove 28. The support column 4 is vertically mounted on the slide 29 and supported on the push inclined surface 31. The turntable 22 is provided with a push surface 32 that is circumferentially offset from the center and pushes against the slide 29. A positioning protrusion 33 is provided on the upper end of the support column 4, giving the upper portion of the support column 4 an L-shaped structure.

[0052] Two parallel guide rails 34 are provided on the sidewalls of the chute 28, and a slider 35 is provided on the slide 29. The slider 35 is adapted to be mounted between the two guide rails 34 to vertically limit the slide 29. Two arc-shaped push surfaces 32 are provided on the turntable 22 and on each support column 4. The two push surfaces 32 are connected together to form a C-shaped cam structure.

[0053] In the initial state, the upper end surface of the positioning protrusion 33 on the upper part of the support column 4 is flush with the upper end surface of the auxiliary support 27. The heating disk 5 is loaded onto the support column 4. At this time, the auxiliary support 27 and the positioning protrusion 33 on the support column 4 both support the heating disk 5. There are multiple support points, the support is stable and reliable, and the loading operation is convenient. Then the turntable 22 rotates, and the push surface 32 set on the edge of the turntable 22 pushes against the slide 29, thereby pushing the slide 29 to move radially outward. In the process of the slide 29 driving the support column 4 to move radially outward, the lower end of the support column 4 slides over the push inclined surface 31. The support column 4 is pushed upward by the push inclined surface 31, thereby pushing the entire heating disk 5 upward. The auxiliary support 27 is separated from the heating disk 5, reducing the support area, thereby reducing the transfer and loss of heat, which is conducive to improving the detection accuracy. Because the support column 4 can move radially, the support range can be adjusted to accommodate the heating operation of heating disks 5 of different sizes. After the positioning protrusions 33 on the upper ends of all support columns 4 have slid clear of the lower surface of the heating plate 5, the edges of the heating plates 5 are supported on the lower surface of the upper ends of the L-shaped support columns 4. At this point, the positioning protrusions 33 limit the edge of the heating plates 5. Reverse rotation of the turntable 22 causes the support columns 4 to move radially inward. The sidewalls of the positioning protrusions 33 abut the edges of the heating plates 5 and push the heating plates 5 to correct their deviation, aligning them with the center. This structural arrangement not only allows for the loading of heating plates 5 of varying sizes, but also ensures reliable clamping and positioning of the heating plates 5.

[0054] A method for measuring the temperature of a heating plate adopts a heating plate temperature measuring device for temperature measurement, comprising the following steps: S1, supporting the heating plate 5 on the support column 4 in the temperature measuring chamber 2; and passing the wiring harness of the heating plate 5 outward from the through hole at the bottom of the temperature measuring chamber 2. The auxiliary pillars 27 and the positioning protrusions 33 on the support pillars 4 both support the heating plate 5. The turntable 22 rotates, and the pushing surface 32 set on the edge of the turntable 22 pushes on the slide 29, thereby pushing the slide 29 to move radially outward. In the process of the slide 29 driving the support pillars 4 to move radially outward, the lower end of the support pillars 4 slides over the pushing inclined surface 31, and the support pillars 4 are pushed upward by the pushed inclined surface 31, thereby pushing the entire heating plate 5 upward. The auxiliary pillars 27 are separated from the heating plate 5. After the positioning protrusions 33 at the upper ends of all the support pillars 4 slide away from the lower surface of the heating plate 5, the edge of the heating plate 5 is supported on the lower plane of the upper end of the L-shaped support pillars 4. The turntable 22 is rotated in the opposite direction to make the support pillars 4 move radially inward. The side walls of the positioning protrusions 33 abut against the edge of the heating plate 5 and push the heating plate 5 to move and correct the deviation, so that the heating plate 5 is in the center position.

[0055] S2, connect multiple temperature detectors 8 to multiple positions of the heating plate 5 respectively; the temperature measuring head on the temperature detector 8 is inserted into the jack 9 on the heating plate 5, and the wiring harness of the temperature detector 8 passes through the wire notch 18 on the edge of the cylinder cover 3.

[0056] S3, after covering the drum cover 3, heating the heating plate 5; in the present application, the heating plate 5 is heated by electric heating.

[0057] S4 , after the temperature of the heating plate 5 reaches a preset value, the values ​​of the multiple temperature detectors 8 are counted to analyze the temperature uniformity characteristics of the heating plate 5 .

[0058] When testing the temperature uniformity of the heating disk 5, the heating disk 5 is supported on the support column 4 in the temperature measuring chamber 2, and then multiple temperature detectors 8 are connected to multiple different positions of the heating disk 5. The linear speed of the temperature detector 8 passes through the outside of the temperature measuring tube 1, and then the tube cover 3 is covered and the heating disk 5 is heated. During the heating process of the heating disk 5, the temperature changes are monitored in real time. When the temperature of the heating disk 5 reaches the preset value, the values ​​of the multiple temperature detectors 8 are counted. The output values ​​are analyzed, and multiple temperature values ​​are collected from the temperature detector 8 at each position, and the average value is calculated. The average values ​​calculated from the data collected by the temperature detectors 8 at different positions are compared to obtain the difference, and then the temperature uniformity characteristics of the heating disk 5 are analyzed.

[0059] The heating plate 5 is supported by support columns 4, which have a small support area. This reduces heat transfer and minimizes heat loss. The heating plate 5 is housed in a closed temperature measurement chamber 2, providing a thermally insulated and sealed environment for accurate temperature measurement. Furthermore, multiple temperature sensors 8 are connected to various locations on the heating plate 5, enabling precise multi-point temperature measurement and assessing temperature uniformity.

[0060] Example 3: A heating plate temperature measuring device (see Figure 7 ), including a temperature measuring cylinder 1, a cylinder cover 3 is installed on the temperature measuring cylinder 1 to form a temperature measuring cavity 2 inside the temperature measuring cylinder 1, the temperature measuring cavity 2 is a closed cavity, and a support column 4 is installed in the temperature measuring cavity 2, and the support column 4 supports the heating plate 5. The support column 4 is a ceramic fiber special-shaped part, and a mounting hole 6 is provided at the bottom of the temperature measuring cavity 2. The lower end of the support column 4 is fastened and installed in the mounting hole 6. A downwardly extending mounting section 7 is provided at the lower end of the support column 4. The outer diameter of the mounting section 7 is smaller than the outer diameter of the support column 4, and the mounting section 7 is adapted to be inserted into the mounting hole 6. A through hole is provided at the bottom of the temperature measuring cavity 2, and the through hole facilitates the passage of the wiring harness. The upper end surfaces of all support columns 4 are flush.

[0061] Several temperature detectors 8 are disposed within the temperature measurement chamber 2. These multiple temperature detectors 8 are connected to multiple locations on the heating plate 5 to detect the temperature of the heating plate 5. In this embodiment, three temperature detectors 8 are evenly distributed around the circumference. A socket 9 is provided on the heating plate 5, and the temperature measuring heads of the temperature detectors 8 are inserted into the socket 9. The temperature detectors 8 employ thermocouples.

[0062] The temperature measuring cylinder 1 includes a cylinder body 10 and an outer shell 11. The outer shell 11 is wrapped around the cylinder body 10. The cylinder body 10 is a ceramic fiber shaped part, and the outer shell 11 is an aluminum alloy sheet metal part. The outer shell 11 is wrapped around the cylinder body 10, which provides good protection for the cylinder body 10. The cylinder body 10 is a ceramic fiber shaped part with good strength, high temperature resistance and long service life. The support column 4 is installed at the bottom of the cylinder body 10. The support columns 4 are arranged in several circles radially outward, with each circle evenly spaced around the circumference. The height of the support columns 4 increases radially outward, and the support columns 4 in the same circle have the same height. In this embodiment, the support columns 4 are arranged in four circles radially outward, with three support columns evenly spaced around the circumference in each circle. Choosing support columns 4 of an appropriate height based on the size of the heating plate 5 reduces the support area and improves versatility.

[0063] The bottom of the temperature measuring tube 1 is connected to several height-adjustable support legs 12, which support the temperature measuring tube 1. Fastening nuts 13 corresponding to the support legs 12 are welded to the bottom of the housing 11. Screws 14 are provided on the support legs 12 and are threadedly connected to the fastening nuts 13. By turning the screws 14, the support height of the support legs 12 can be adjusted, thereby adjusting the height of the temperature measuring tube 1, making it easier to adjust the temperature measuring tube 1 to a balanced position.

[0064] The cylinder cover 3 is a shaped ceramic fiber part, and is externally connected to a protective cover 15. The protective cover 15 provides protection for the cylinder cover 3. The cylinder cover 3 is a shaped ceramic fiber part, which is strong, heat-resistant, and has a long service life. The protective cover 15 includes two semicircular cover bodies 16, each with a connecting piece 17 at the end. The connecting pieces 17 on the two cover bodies 16 are tightly connected. The protective cover 15, consisting of two semicircular cover bodies 16 connected together, is convenient for connection to the cylinder cover 3. The connecting pieces 17 on the two cover bodies 16 are tightly connected, making assembly and connection easy.

[0065] A wire notch 18 is provided on the edge of the barrel cover 3, through which the wiring harness of the temperature detector 8 passes. A downwardly extending boss 19 is provided on the lower end surface of the barrel cover 3, and a downwardly extending positioning platform 20 is provided on the boss 19. The positioning platform 20 fits within the upper opening of the barrel 10, and the boss 19 is supported on the upper end surface of the barrel 10. The lower portion of the protective cover 15 is recessed to form a positioning portion 21 with a U-shaped cross section, which is supported on the upper end surface of the barrel 10.

[0066] A method for measuring the temperature of a heating plate is provided, which uses a heating plate temperature measuring device to measure the temperature, comprising the following steps: S1, supporting the heating plate 5 on the support column 4 in the temperature measuring chamber 2; adjusting the heating plate 5 to the center position, and the wiring harness of the heating plate 5 is passed outward from the through hole at the bottom of the temperature measuring chamber 2.

[0067] S2, connect multiple temperature detectors 8 to multiple positions of the heating plate 5 respectively; the temperature measuring head on the temperature detector 8 is inserted into the jack 9 on the heating plate 5, and the wiring harness of the temperature detector 8 passes through the wire notch 18 on the edge of the cylinder cover 3.

[0068] S3, after covering the drum cover 3, heating the heating plate 5; in the present application, the heating plate 5 is heated by electric heating.

[0069] S4 , after the temperature of the heating plate 5 reaches a preset value, the values ​​of the multiple temperature detectors 8 are counted to analyze the temperature uniformity characteristics of the heating plate 5 .

[0070] When testing the temperature uniformity of the heating disk 5, the heating disk 5 is supported on the support column 4 in the temperature measuring chamber 2, and then multiple temperature detectors 8 are connected to multiple different positions of the heating disk 5. The linear speed of the temperature detector 8 passes through the outside of the temperature measuring tube 1, and then the tube cover 3 is covered and the heating disk 5 is heated. During the heating process of the heating disk 5, the temperature changes are monitored in real time. When the temperature of the heating disk 5 reaches the preset value, the values ​​of the multiple temperature detectors 8 are counted. The output values ​​are analyzed, and multiple temperature values ​​are collected from the temperature detector 8 at each position, and the average value is calculated. The average values ​​calculated from the data collected by the temperature detectors 8 at different positions are compared to obtain the difference, and then the temperature uniformity characteristics of the heating disk 5 are analyzed.

[0071] The heating plate 5 is supported by support columns 4, which have a small support area. This reduces heat transfer and minimizes heat loss. The heating plate 5 is housed in a closed temperature measurement chamber 2, providing a thermally insulated and sealed environment for accurate temperature measurement. Furthermore, multiple temperature sensors 8 are connected to various locations on the heating plate 5, enabling precise multi-point temperature measurement and assessing temperature uniformity.

[0072] The above-described embodiments are only preferred solutions of the present invention and are not intended to limit the present invention in any form. Other variations and modifications are possible without exceeding the technical solutions described in the claims.

Claims

1. A heating plate temperature measuring device, characterized in that: It includes a temperature measuring tube, a tube cover is installed on the temperature measuring tube to form a temperature measuring cavity inside the temperature measuring tube, a support column is installed in the temperature measuring cavity, the support column supports the heating plate, and several temperature detectors are arranged in the temperature measuring cavity. The multiple temperature detectors are respectively connected to multiple positions of the heating plate to detect the temperature of the heating plate.

2. A heating plate temperature measuring device according to claim 1, characterized in that: The temperature measuring cylinder includes a cylinder body and an outer shell. The outer shell is wrapped around the outside of the cylinder. The cylinder body is a ceramic fiber special-shaped part.

3. A heating plate temperature measuring device according to claim 1, characterized in that: The cylinder cover is a special-shaped ceramic fiber part, and the outside of the cylinder cover is connected to a protective cover.

4. A heating plate temperature measuring device according to claim 3, characterized in that: The protective cover comprises two semicircular cover bodies. The ends of the two cover bodies are both provided with connecting pieces, and the connecting pieces on the two cover bodies are fastened and connected.

5. The heating plate temperature measuring device according to claim 1, characterized in that: The support column is a special-shaped ceramic fiber part. A mounting hole is provided at the bottom of the temperature measuring cavity, and the lower end of the support column is fastened and installed in the mounting hole.

6. A heating plate temperature measuring device according to claim 1, characterized in that: A plurality of height-adjustable support legs are connected to the bottom of the temperature measuring cylinder, and the support legs support the temperature measuring cylinder.

7. The heating plate temperature measuring device according to claim 1, characterized in that: A wire passing notch is provided on the edge of the cylinder cover, and the temperature detector wiring harness passes through the wire passing notch.

8. A heating plate temperature measuring device according to any one of claims 1 to 7, characterized in that: A turntable and a mounting seat are installed in the temperature measuring cavity. Several auxiliary pillars are provided on the turntable. A radially arranged slide groove is provided on the mounting seat. The slide groove is slidably connected to the slide seat. A positioning spring is connected between the slide seat and the mounting seat. A pushing inclined surface is provided on the mounting seat. The support column is vertically sleeved on the slide seat. The support column is supported on the pushing inclined surface. A pushing surface circumferentially deviated from the center is provided on the turntable, and the pushing surface presses against the slide seat.

9. A heating plate temperature measuring device according to claim 8, characterized in that: A positioning protrusion is provided at the upper end of the support column so that the upper part of the support column is in an L-shaped structure.

10. A method for measuring the temperature of a heating plate, characterized in that: Temperature measurement is performed using the heating plate temperature measuring device according to any one of claims 1 to 9, comprising the following steps: S1, supporting the heating plate on a support column in a temperature measuring chamber; S2, connecting a plurality of temperature detectors to a plurality of positions of the heating plate; S3, heating the heating plate after covering the cylinder cover; S4, after the temperature of the heating plate reaches a preset value, counting the values ​​of the plurality of temperature detectors and analyzing the temperature uniformity characteristics of the heating plate.

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