Laser optical processing system with adjustable imaging depth and working method

Abstract

The application relates to the technical field of optical processing, and discloses a laser optical processing system with adjustable imaging depth, which comprises a laser emission unit, an optical transmission unit, a spectral domain optical coherence tomography unit, a laser galvanometer scanning unit, an indicating light imaging unit, an image processing and display unit and a control unit. The wavelength scanning mode of the spectral domain optical coherence tomography system is driven by a scanning telescopic rotating module, time scanning of high output wavelength is realized, image processing technology is combined to provide position information or image information of a sample from a surface to an interior in real time, the position of the sample is scanned in real time by a three-dimensional galvanometer scanning unit, the position and directional information of a scanning point are recorded, the real-time image information of the sample is simultaneously scanned, different depths, widths and axial positions are realized, the focusing depth and wavelength of an imaging laser beam, the focusing position and energy of a scanning laser beam are adjusted and fed back, and the sample is positioned for processing.

Description

Technical Field

[0001] This invention relates to the field of optical processing technology, and in particular to a laser optical processing system and its working method with adjustable imaging depth. Background Technology

[0002] In modern optical engineering, to improve the optical performance of laser optical processing systems, there is a continuous effort to adopt aspherical and freeform surface structures that offer greater design flexibility and freedom. These samples with complex structures require laser optical processing systems to detect and accurately measure the surface shape errors of the optical surfaces under test, achieving precision machining that infinitely approximates the ideal surface shape. Furthermore, the laser beam is needed to locate internal defects, damage, and cracks for precision machining to achieve an internally homogeneous structure. However, samples with complex structures pose significant challenges to the system's optical path structure. Only by continuously adjusting the system's imaging depth and achieving real-time positioning can accurate and rapid scanning of the sample's surface shape and internal structure be achieved, enabling real-time operation in optical engineering.

[0003] Since aspherical and freeform surface structures require a Z-depth range of 0mm-2mm to minimize their impact on the field of view, precise processing with scanning and imaging lasers within this range is necessary. Therefore, there is an urgent need to develop a laser optical processing system with adjustable imaging depth. The depths of the imaging and scanning laser beams can be adjusted in real-time according to the sample's condition, reducing their impact on the field of view. The imaging and scanning laser beams can be adjusted and positioned to the sample for processing in real time. Summary of the Invention

[0004] Based on this, it is necessary to address the technical problem of poor performance of existing laser optical processing systems by proposing a laser optical processing system with adjustable imaging depth.

[0005] In a first aspect, a laser optical processing system with adjustable imaging depth is provided. The system includes a laser emitting unit (1), an optical transmission unit (2), a spectral domain optical coherence tomography unit (3), a laser galvanometer scanning unit (4), an indicator light imaging unit (5), an image processing and display unit (6), and a control unit (7). The optical transmission unit (2) includes a beam shaper (21), a laser flash switch (22), a first grating (23), a second grating (24), a dichroic mirror (25), and a focusing lens (26). The spectral domain optical coherence tomography unit (3) includes a broadband light source (31), an interferometer (32), a spectrometer (33), an image beam module (34), a reference beam module (35), and a scanning, scaling, and rotating module (36). The image beam module (34) includes a second grating (24), a focusing lens (26), and an imaging probe (343).

[0006] The first scanning laser beam emitted by the laser emitting unit (1) passes sequentially through the beam shaper (21), laser flash switch (22), first grating (23), laser galvanometer scanning unit (4), optical coupler of scanning telescopic rotation module (36), dichroic mirror (25), second grating (24), and focusing lens (26) before being focused on the sample. The laser galvanometer scanning unit (4) scans the sample structure in real time and records the position of the first scanning point and the first orientation information of the sample.

[0007] The reflected light from the sample passes sequentially through a focusing lens (26), a second grating (24), and a dichroic mirror (25) into a high-speed camera (52) in the indicator light imaging unit (5), wherein the high-speed camera (52) captures a first sample photograph of the first scan point of the sample;

[0008] The first imaging laser beam generated by the broadband light source (31) is divided into a first image beam and a first reference beam by the interferometer (32); after the first reference beam enters the reference beam module (35), the reference beam module (35) returns the second reference beam to the interferometer (32); after the first image beam passes through the optical coupler, dichroic mirror (25), second grating (24) and focusing lens (26) of the scanning telescoping and rotating module (36) in sequence, it is focused on the sample, and the second image beam reflected by the sample returns to the interferometer (32). The second reference beam and the second image beam enter the interferometer to generate interference light, and the interference light enters the spectrometer (33) to form the first spectral component signal;

[0009] The position of the first scanning point, the first orientation information, the first sample photograph, and the first spectral component signal are input to the image processing and display unit (6). The image processing and display unit (6) generates the first sample image information based on the first spectral component signal, and performs data analysis based on the position of the first scanning point, the first orientation information, the first sample photograph, and the first sample image information to obtain the data analysis results.

[0010] The data analysis results, the position of the first scanning point, the first orientation information, and the first sample photograph are input into the control unit (7) as adjustment data. The control unit (7) adjusts the focusing depth and wavelength of the first imaging laser beam for real-time imaging, the shooting range of the indicator light imaging unit (5) for real-time shooting, and adjusts the focusing position and energy of the first scanning laser beam emitted by the laser emitting unit (1) to focus on the sample for processing, forming a first processing area.

[0011] Secondly, a working method for a laser optical processing system with adjustable imaging depth is provided.

[0012] The laser optical processing system with adjustable imaging depth proposed in this invention includes: a laser emitting unit (1), an optical transmission unit (2), a spectral domain optical coherence tomography unit (3), a laser galvanometer scanning unit (4), an indicator light imaging unit (5), an image processing and display unit (6), and a control unit (7). The optical transmission unit (2) includes a beam shaper (21), a laser flash switch (22), a first grating (23), a second grating (24), a dichroic mirror (25), and a focusing lens (26). The spectral domain optical coherence tomography unit (3) includes a broadband light source (31), an interferometer (32), a spectrometer (33), and an image beam module (34). The laser beam module (34) includes a reference beam module (35), a scanning telescopic rotation module (36), and an image beam module (34), which includes a second grating (24), a focusing lens (26), and an imaging probe (343). The first scanning laser beam emitted by the laser emitting unit (1) passes sequentially through a beam shaper (21), a laser flash switch (22), a first grating (23), a laser galvanometer scanning unit (4), the optical coupler of the scanning telescopic rotation module (36), a dichroic mirror (25), a second grating (24), and a focusing lens (26) before being focused on the sample. The laser galvanometer scanning unit (4) scans the sample structure in real time and records the position of the first scanning point and the first orientation information of the sample. The reflected light from the sample passes sequentially through a focusing lens (26), a second grating (24), and a dichroic mirror (25) before entering a high-speed camera (52) in the indicator light imaging unit (5). The high-speed camera (52) captures a first sample photograph at the first scanning point of the sample. A first imaging laser beam generated by a broadband light source (31) is divided into a first image beam and a first reference beam by an interferometer (32). After the first reference beam enters the reference beam module (35), the reference beam module (35) returns the second reference beam to the interferometer (32). The first image beam passes sequentially through the optical coupler of the scanning telescopic rotation module (36), the dichroic mirror (25), and the second grating (26). 4) After the focusing lens (26) focuses on the sample, the second image beam reflected by the sample returns to the interferometer (32). The second reference beam and the second image beam enter the interferometer to generate interference light. The interference light enters the spectrometer (33) to form the first spectral component signal. The position of the first scanning point, the first orientation information, the first sample photograph, and the first spectral component signal are input to the image processing and display unit (6). The image processing and display unit (6) generates the first sample image information according to the first spectral component signal, and performs data analysis according to the position of the first scanning point, the first orientation information, the first sample photograph, and the first sample image information to obtain the data analysis results.The data analysis results, the position of the first scanning point, the first orientation information, and the first sample photograph are input into the control unit (7) as adjustment data. The control unit (7) adjusts the focusing depth and wavelength of the first imaging laser beam for real-time imaging, the shooting range of the indicator light imaging unit (5) for real-time shooting, and adjusts the focusing position and energy of the first scanning laser beam emitted by the laser emitting unit (1) to focus on the sample for processing, forming a first processing area. This invention utilizes a scanning, telescopic, and rotating module to drive the wavelength scanning mode of the spectral domain optical coherence tomography (OCT) system, adjusting the imaging depth of the OCT unit in real time to achieve high-output wavelength time-scanning. Combined with image processing technology, it provides real-time positional or image information of the sample from its surface to its interior. A three-dimensional galvanometer scanning unit scans the sample at different depths, widths, and axial positions from its surface to its interior in real time, simultaneously recording the position and orientation information of the scanning points. This achieves simultaneous scanning of real-time image information and different depths, widths, and axial positions of the sample from its surface to its interior. Feedback is used to adjust the focusing depth and wavelength of the first imaging laser beam, and the focusing position and energy of the first scanning laser beam, positioning the system to the sample for processing, significantly improving the working efficiency of the laser optical processing system. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] in:

[0015] Figure 1 This is a schematic diagram of a laser optical processing system with adjustable imaging depth in one embodiment. Detailed Implementation

[0016] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application, are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, not to describe a particular order.

[0017] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Please see Figure 1 As shown, Figure 1 This is a schematic diagram of the structure of a laser optical processing system with adjustable imaging depth provided in an embodiment of the present invention.

[0020] The laser optical processing system with adjustable imaging depth includes: a laser emitting unit (1), an optical transmission unit (2), a spectral domain optical coherence tomography unit (3), a laser galvanometer scanning unit (4), an indicator light imaging unit (5), an image processing and display unit (6), and a control unit (7). The optical transmission unit (2) includes a beam shaper (21), a laser flash switch (22), a first grating (23), a second grating (24), a dichroic mirror (25), and a focusing lens (26). The spectral domain optical coherence tomography unit (3) includes a broadband light source (31), an interferometer (32), a spectrometer (33), an image beam module (34), a reference beam module (35), and a scanning, scaling, and rotating module (36). The image beam module (34) includes a second grating (24), a focusing lens (26), and an imaging probe (343).

[0021] The laser emitting unit (1) is connected to the optical transmission unit (2) through the optical fiber transmission unit (8) and to the control unit (7) through the electrical transmission unit (9), and is used to emit a first scanning laser beam.

[0022] An optical transmission unit (2) is connected to the light outlet of the laser emitting unit (1) through the optical fiber transmission unit (8) to conduct and focus the first scanning laser beam emitted by the laser emitting unit (1) and the first imaging laser beam emitted by the spectral domain optical coherence tomography unit (3) onto the sample.

[0023] The spectral domain optical coherence tomography unit (3) is connected to the laser galvanometer scanning unit (4) through the optical fiber transmission unit (8) and to the control unit (7) through the electrical transmission unit (9). It shares the same optical path with the laser emission unit (1) and is used to emit a first imaging laser beam focused on the sample to generate sample image information in real time.

[0024] The laser galvanometer scanning unit (4) is connected to the optical path of the optical transmission unit (2) through the optical fiber transmission unit (7) and to the image processing and display unit (6) through the electrical transmission unit (9). It is used to adjust the position of the first scanning laser beam emitted by the laser emitting unit (1) and the first imaging laser beam of the spectral domain optical coherence tomography unit (3), and to scan the structure of the sample from the surface to the interior in real time while recording the position of the first scanning point and the first orientation information and transmitting it to the image processing and display unit (6).

[0025] The indicator light imaging unit (5) is connected to the optical transmission unit (2) through the optical fiber transmission unit (8) and to the image processing and display unit (6) through the electrical transmission unit (9). It captures a first sample image of the first scanning point and transmits it to the image processing and display unit (6).

[0026] The image processing and display unit (6) is connected to the laser galvanometer scanning unit (4), the indicator light imaging unit (5), and the control unit (7) through the electrical transmission unit (8). The image processing and display unit (6) analyzes the first sample photograph captured by the indicator light imaging unit (5) at the first scanning point, analyzes the first sample image information generated in real time by the spectral domain optical coherence tomography unit (3) and the position and first orientation information of the first scanning point, displays the determined real-time image, and transmits the analysis data to the control unit (7).

[0027] The control unit (7) is connected to the image processing and display unit (6), the laser emission unit (1) and the spectral domain optical coherence tomography unit (3) through the electrical transmission unit (9). Based on the analysis data of the image processing and display unit (6), the first sample photograph of the first scanning point captured by the indicator light imaging unit (5), the position of the first scanning point, and the first orientation information, the control unit (7) adjusts the focusing depth and wavelength of the first imaging laser beam for real-time imaging, the indicator light imaging unit (5) captures images in real-time, and adjusts the focusing position and energy of the first scanning laser beam emitted by the laser emission unit (1) to focus on the sample for processing, forming a first processing area.

[0028] Specifically, the first scanning laser beam emitted by the laser emitting unit (1) passes sequentially through the beam shaper (21), the laser flash switch (22), the first grating (23), the laser galvanometer scanning unit (4), the optical coupler of the scanning telescopic rotation module (36), the dichroic mirror (25), the second grating (24), and the focusing lens (26) before being focused on the sample. The laser galvanometer scanning unit (4) scans the sample structure in real time and records the position of the first scanning point and the first orientation information of the sample.

[0029] The reflected light from the sample passes sequentially through a focusing lens (26), a second grating (24), and a dichroic mirror (25) into a high-speed camera (52) in the indicator light imaging unit (5), wherein the high-speed camera (52) captures a first sample photograph of the first scan point of the sample;

[0030] The first imaging laser beam generated by the broadband light source (31) is divided into a first image beam and a first reference beam by the interferometer (32); after the first reference beam enters the reference beam module (35), the reference beam module (35) returns the second reference beam to the interferometer (32); after the first image beam passes through the optical coupler, dichroic mirror (25), second grating (24) and focusing lens (26) of the scanning telescoping and rotating module (36) in sequence, it is focused on the sample, and the second image beam reflected by the sample returns to the interferometer (32). The second reference beam and the second image beam enter the interferometer to generate interference light, and the interference light enters the spectrometer (33) to form the first spectral component signal;

[0031] The position of the first scanning point, the first orientation information, the first sample photograph, and the first spectral component signal are input to the image processing and display unit (6). The image processing and display unit (6) generates the first sample image information based on the first spectral component signal, and performs data analysis based on the position of the first scanning point, the first orientation information, the first sample photograph, and the first sample image information to obtain the data analysis results.

[0032] The data analysis results, the position of the first scanning point, the first orientation information, and the first sample photograph are input into the control unit (7) as adjustment data. The control unit (7) adjusts the focusing depth and wavelength of the first imaging laser beam for real-time imaging, the shooting range of the indicator light imaging unit (5) for real-time shooting, and adjusts the focusing position and energy of the first scanning laser beam emitted by the laser emitting unit (1) to focus on the sample for processing, forming a first processing area.

[0033] As an improvement, the optical transmission unit (2) also guides the second scanning laser beam emitted by the laser emission unit (1) and the second imaging laser beam of the spectral domain optical coherence tomography unit (3) to the second processing area;

[0034] The second scanning laser beam emitted by the laser emitting unit (1) and the second imaging laser beam of the spectral domain optical coherence tomography unit (3) are positioned by the three-dimensional galvanometer scanning unit (4). The second processing area is scanned and the position and orientation information of the second scanning point are recorded and transmitted to the image processing and display unit (6). The spectral domain optical coherence tomography unit (3) scans the position and orientation information of the second scanning point to generate real-time second sample image information and transmits it to the image processing and display unit (6). The indicator light imaging unit (5) takes a second sample photo of the second scanning point and transmits it to the image processing and display unit (6).

[0035] The image processing and display unit (6) analyzes the deviation between the second sample image information and the second sample image of the second scanning point captured by the indicator light imaging unit (5), the second sample image information generated by the spectral domain optical coherence tomography unit (3), and the position and second orientation information of the second scanning point, and displays the determined deviation. It also analyzes and determines the deviation between the second sample image information generated by the spectral domain optical coherence tomography unit (3) and the position and second orientation information of the second scanning point, and displays the determined deviation. Finally, it analyzes and determines the deviation between the position and orientation information of the first scanning point and the second scanning point, and transmits the analysis data to the control unit (7).

[0036] The control unit (7) adjusts the focusing depth and wavelength of the second imaging laser beam of the spectral domain optical coherence tomography unit (3) for real-time imaging based on the analysis data feedback from the image processing and display unit (6), and performs real-time imaging of the shooting range of the indicator light imaging unit (5). It also adjusts the focusing position and energy of the second scanning laser beam emitted by the laser emission unit (1) to focus on the sample for processing, forming a second processing area.

[0037] Specifically, after forming the first processing area, the process further includes:

[0038] The second scanning laser beam emitted by the laser emitting unit (1) passes sequentially through the beam shaper (21), laser flash switch (22), first grating (23), laser galvanometer scanning unit (4), optical coupler of scanning telescopic rotation module (36), dichroic mirror (25), second grating (24), and focusing lens (26) before being focused on the sample. The laser galvanometer scanning unit (4) scans the sample structure in real time and records the position of the second scanning point and the second orientation information of the sample.

[0039] The reflected light from the sample passes sequentially through the focusing lens (26), the second grating (24), and the dichroic mirror (25) into the high-speed camera (52) in the indicator light imaging unit (5), wherein the high-speed camera (52) captures a second sample photograph of the second scanning point of the sample;

[0040] The second imaging laser beam generated by the broadband light source (31) is divided into a third image beam and a third reference beam by the interferometer (32); after the third reference beam enters the reference beam module (35), the reference beam module (35) returns the fourth reference beam to the interferometer (32); after the third image beam passes through the optical coupler, dichroic mirror (25), second grating (24) and focusing lens (26) of the scanning telescoping and rotating module (36) in sequence, it is focused on the sample, and the fourth image beam reflected by the sample returns to the interferometer (32). The fourth reference beam and the fourth image beam enter the interferometer to generate interference light, and the interference light enters the spectrometer (33) to form the second spectral component signal;

[0041] The position of the second scanning point, the second orientation information, the second sample photograph, and the second spectral component signal are input to the image processing and display unit (6). The image processing and display unit (6) generates second sample image information based on the second spectral component signal, and analyzes the first deviation between the second sample image information and the second sample photograph based on the second sample photograph, the second sample image information, and the position and second orientation information of the second scanning point. It also analyzes the second deviation between the second sample image information and the position and second orientation information of the second scanning point, analyzes and determines the third deviation between the position and orientation information of the first scanning point and the second scanning point, and uses the first deviation, the second deviation, and the third deviation as target data.

[0042] The target data is input to the control unit (7), wherein the control unit (7) adjusts the focusing depth and wavelength of the second imaging laser beam of the spectral domain optical coherence tomography unit (3) for real-time imaging, the shooting range of the indicator light imaging unit (5) for real-time shooting, and adjusts the focusing position and energy of the second scanning laser beam emitted by the laser emission unit (1) to focus on the sample for processing, forming a second processing area.

[0043] In one embodiment of the present invention, the optical transmission unit (2) includes a beam shaper (21), a laser flash switch (22), a first grating (23), a dichroic mirror (25), a second grating (24), and a focusing lens (26) connected sequentially through the optical fiber transmission unit (8). The beam shaper (21) is a field stop, used to acquire a circular spot in the scanning laser beam emitted by the laser emitting unit (1), so that the spot is radially uniformly distributed after the scanning laser beam is focused. The laser flash switch (22) is connected to the control unit (7) and used to control the on / off state of the scanning laser beam during operation. The first grating (23) is a Bragg grating, used for... Increase the energy of the scanning laser beam; the dichroic mirror (25) combines the light path of the indicator light imaging unit (5) into the main light path, transmits the imaging laser beam returned from the sample to the spectral domain optical coherence tomography unit (3), transmits the reflected light of the sample into the indicator light imaging unit (5), and guides the scanning laser beam emitted by the laser emitting unit (1) to the sample; the focusing lens (26) is a scanning lens, which is set in the output light path of the laser emitting unit (1) and the spectral domain optical coherence tomography unit (3) to focus the imaging laser beam and the scanning laser beam after the position is adjusted by the laser galvanometer scanning unit (4) onto the sample.

[0044] It is understood that the beam shaper (21) can filter out the non-circular parts of the imaging laser beam and the scanning laser beam, thereby obtaining a circular spot, so that the circular spot can be evenly distributed in the radial direction after focusing, thus improving the quality of the focused spot.

[0045] In one embodiment of the present invention, the spectral domain optical coherence tomography unit (3) includes a broadband light source (31), an interferometer (32), an image beam module (34), a reference beam module (35), a scanning, scaling, and rotating module (36), and a spectrometer (33) connected through the optical fiber transmission unit (7). The broadband light source (31) is connected to the interferometer (32) through the optical fiber transmission unit (8) and to the control unit (7) through the electrical transmission unit (9) to generate an imaging laser beam. The interferometer (32) is a Michelson interferometer, which is connected to the broadband light source (31), the image beam unit (34), and the reference beam module (35) through the optical fiber transmission unit (8). The image processing and display unit (6) is connected to the broadband light source (31) and the spectrometer (33). The imaging laser beam emitted by the broadband light source (31) is divided into a first image beam and a first reference beam. The returned second image beam and the returned second reference beam are interfered to generate interference light, and then the interference light is transmitted to the spectrometer (33). The image beam module (34) is connected to the output optical path of the broadband light source (31) through the fiber optic transmission unit (8). The first image beam is transmitted to the sample and the second image beam reflected by the sample is returned to the interferometer (32). The reference beam module (35) is connected to the output optical path of the broadband light source (31) through the fiber optic transmission unit (8) and transmitted to the image processing and display unit (6).

[0046] Furthermore, the reference beam module (35) is connected in sequence to a frequency shifter (353), a collimating beam expander (352), and a reference mirror (351) via the optical fiber transmission unit (7). The frequency shifter (353) is an acousto-optic frequency shifter, located between the collimating beam expander (353) and the interferometer (32), and is used to adjust the frequency offset of the first reference beam output by the collimating beam expander (352). The collimating beam expander (352) is used to expand the diameter of the first reference beam and collimate the first reference beam. The reference mirror (351) is a multi-faceted mirror, which guides the first reference beam to the reference mirror (351) and returns a second reference beam with a wavelength orthogonal to the wavelength of the reference mirror (351) to the interferometer (32). Specifically, the frequency shifter (353) is used to shift the frequency of the first reference beam output by the collimating beam expander (352); the collimating beam expander (352) is used to expand the diameter of the first reference beam and collimate the first reference beam; the reference mirror (351) is a multi-faceted mirror that guides the first reference beam to the reference mirror (351) and returns a second reference beam with a wavelength orthogonal to the reference mirror (351) to the interferometer (32).

[0047] Understandably, the reference mirror (351) rotates its angle under the control of the scanning rotation and telescopic module (36), lengthening or shortening the distance between the reference mirror (351) and the main optical path, adjusting the distance between the reference mirror (351) and the main optical path, guiding the first reference beam to the reference mirror (351) and returning the second reference beam, which has a wavelength orthogonal to the wavelength of the reference mirror (351), to the interferometer (32), thereby achieving long-distance wavelength scanning.

[0048] Furthermore, the image beam module (34) includes a second grating (24), a focusing lens (26), and an imaging probe (343) connected in sequence through the optical fiber transmission unit (8). The second grating (24) is a diffraction grating used to reduce the influence of sample scattering on imaging accuracy. The focusing lens (26) is a scanning lens, which is set in the output optical path of the imaging laser beam and the scanning laser beam, and is used to focus the imaging laser beam and the scanning laser beam, which have been positioned by the laser galvanometer scanning unit (4), onto the sample. The imaging probe (343) is set in the output optical path of the image beam module (34) and is used to collect the reflected light from the sample.

[0049] In one embodiment, the focusing lens (26) is fixed above the vertical plane of the sample to focus the first imaging laser beam and the first scanning laser beam onto the sample, and at the same time serves as the imaging lens of the first imaging laser beam, the focusing lens of the first scanning laser beam, and the imaging lens of the indicator light imaging unit (5).

[0050] Furthermore, the scanning telescopic rotation module (36) includes an optical coupler (361), a rotation telescopic drive device (362), and a rotation telescopic device (363) connected in sequence. The optical coupler (361) is connected to the output optical path of the laser emitting unit (1) and the broadband light source (31) through the optical fiber transmission unit (8), coupling the imaging laser beam and the scanning laser beam to the scanning telescopic rotation module (36). The rotation telescopic drive device (362) is connected to the optical coupler (361) through the optical fiber transmission unit (7) and to the control unit (7) through the electrical transmission unit (9), for driving the rotation telescopic device (363). The rotation telescopic device (363) is connected to the scanning rotation telescopic drive device (362), and the rotation telescopic drive device (362) controls the rotation angle and telescopic length of the radial scanning of the rotation telescopic device (363), adjusting the distance between the reference beam module (33) and the main optical path. Specifically, in one embodiment, the optical coupler (361) is used to couple the first imaging laser beam and the first scanning laser beam to the scanning telescopic rotation module (36); the rotation telescopic drive device (362) is used to drive the rotation telescopic device (363); the rotation telescopic drive device (362) controls the rotation angle and telescopic length of the radial scanning of the rotation telescopic device (363), thereby adjusting the distance between the reference beam module (35) and the main optical path, wherein the rotation telescopic device (363) is connected to the reference mirror (351) of the reference beam module (35).

[0051] In one embodiment, the optical paths of the laser galvanometer scanning unit (4), the reference beam module (35), the image beam module (34), and the indicator light imaging unit (5) are coaxial, and the sample is simultaneously within the scanning range of the laser galvanometer scanning unit (4), the optical path of the reference beam module (35), the imaging range of the image beam module (34), and the imaging range of the indicator light imaging unit (5).

[0052] In one embodiment, the indicator light imaging unit (5) includes an indicator light source (51) and a high-speed camera (52). The indicator light source (51) is positioned directly above the sample and directly below the imaging probe to generate indicator light.

[0053] It is understood that by extending or shortening the distance between the reference mirror (351) and the main optical path through the scanning telescopic rotation module (36), and by combining the wavelength scanning mode of the reference mirror (351) and the second grating (26), the imaging accuracy of the spectral domain optical coherence tomography unit (3) can be improved and the imaging depth of the spectral domain optical coherence tomography unit (3) can be adjusted in real time, thereby achieving time scanning of high output wavelength.

[0054] In one embodiment of the present invention, the image processing and display unit (6) analyzes the deviation between the sample photos of the first scanning point and the second scanning point captured by the indicator light imaging unit (5), the first sample image information and the second sample image information generated by the spectral domain optical coherence tomography unit (3), and the position and orientation information of the first scanning point and the second scanning point, displays the determined deviation, and transmits it to the control unit (7). The control unit (7) adjusts the focusing depth and wavelength of the imaging laser beam for real-time imaging, the shooting range of the indicator light imaging unit (5) for real-time shooting, and adjusts the focusing position and energy of the scanning laser beam emitted by the laser emitting unit (1) to focus on the sample for further processing.

[0055] In one embodiment, the operating method of a laser optical processing system with adjustable imaging depth is characterized by comprising the following steps:

[0056] The first scanning laser beam emitted by the laser emitting unit (1) passes sequentially through the beam shaper (21), laser flash switch (22), first grating (23), laser galvanometer scanning unit (4), optical coupler of scanning telescopic rotation module (36), dichroic mirror (25), second grating (24), and focusing lens (26) before being focused on the sample. The laser galvanometer scanning unit (4) scans the sample structure in real time and records the position of the first scanning point and the first orientation information of the sample.

[0057] The reflected light from the sample passes sequentially through a focusing lens (26), a second grating (24), and a dichroic mirror (25) into a high-speed camera (52) in the indicator light imaging unit (5), wherein the high-speed camera (52) captures a first sample photograph of the first scan point of the sample;

[0058] The first imaging laser beam generated by the broadband light source (31) is divided into a first image beam and a first reference beam by the interferometer (32); after the first reference beam enters the reference beam module (35), the reference beam module (35) returns the second reference beam to the interferometer (32); after the first image beam passes through the optical coupler, dichroic mirror (25), second grating (24) and focusing lens (26) of the scanning telescoping and rotating module (36) in sequence, it is focused on the sample, and the second image beam reflected by the sample returns to the interferometer (32). The second reference beam and the second image beam enter the interferometer to generate interference light, and the interference light enters the spectrometer (33) to form the first spectral component signal;

[0059] The location of the first scanning point, the first orientation information, the first sample photograph, and the first spectral component signal are input to the image processing and display unit (6) for data analysis to obtain the data analysis results;

[0060] The data analysis results, the position of the first scanning point, the first orientation information, and the first sample photograph are input into the control unit (7) as adjustment data.

[0061] The control unit (7) adjusts the focusing depth and wavelength of the first imaging laser beam for real-time imaging according to the adjustment data, and performs real-time imaging of the shooting range of the indicator light imaging unit (5). It also adjusts the focusing position and energy of the first scanning laser beam emitted by the laser emitting unit (1) to focus on the sample for processing, forming a first processing area.

[0062] After the formation of the first processing area, the following is also included:

[0063] The second scanning laser beam emitted by the laser emitting unit (1) passes sequentially through the beam shaper (21), laser flash switch (22), first grating (23), laser galvanometer scanning unit (4), optical coupler of scanning telescopic rotation module (36), dichroic mirror (25), second grating (24), and focusing lens (26) before being focused on the sample. The laser galvanometer scanning unit (4) scans the sample structure in real time and records the position of the second scanning point and the second orientation information of the sample.

[0064] The reflected light from the sample passes sequentially through the focusing lens (26), the second grating (24), and the dichroic mirror (25) into the high-speed camera (52) in the indicator light imaging unit (5), wherein the high-speed camera (52) captures a second sample photograph of the second scanning point of the sample;

[0065] The second imaging laser beam generated by the broadband light source (31) is divided into a third image beam and a third reference beam by the interferometer (32); after the third reference beam enters the reference beam module (35), the reference beam module (35) returns the fourth reference beam to the interferometer (32); after the third image beam passes through the optical coupler, dichroic mirror (25), second grating (24) and focusing lens (26) of the scanning telescoping and rotating module (36) in sequence, it is focused on the sample, and the fourth image beam reflected by the sample returns to the interferometer (32). The fourth reference beam and the fourth image beam enter the interferometer to generate interference light, and the interference light enters the spectrometer (33) to form the second spectral component signal;

[0066] The position of the second scanning point, the second orientation information, the second sample photograph, and the second spectral component signal are input to the image processing and display unit (6). The image processing and display unit (6) generates second sample image information based on the second spectral component signal, and analyzes the first deviation between the second sample image information and the second sample photograph based on the second sample photograph, the second sample image information, and the position and second orientation information of the second scanning point. It also analyzes the second deviation between the second sample image information and the position and second orientation information of the second scanning point, analyzes and determines the third deviation between the position and orientation information of the first scanning point and the second scanning point, and uses the first deviation, the second deviation, and the third deviation as target data.

[0067] The target data is input to the control unit (7), wherein the control unit (7) adjusts the focusing depth and wavelength of the second imaging laser beam of the spectral domain optical coherence tomography unit (3) for real-time imaging, the shooting range of the indicator light imaging unit (5) for real-time shooting, and adjusts the focusing position and energy of the second scanning laser beam emitted by the laser emission unit (1) to focus on the sample for processing, forming a second processing area.

[0068] It should be noted that the laser optical processing system with adjustable imaging depth provided in the above embodiments of this application can be used for processing industrial samples from the surface to the internal structure, and can also be applied to imaging, detection and scanning of human or animal tissues, with a wide range of applications.

[0069] This invention provides a laser optical processing system and method with adjustable imaging depth. It utilizes a scanning, telescopic, and rotating module to drive the wavelength scanning mode of the spectral domain optical coherence tomography (OCT) system, adjusting the imaging depth of the OCT unit in real time to achieve high-output wavelength time-scanning. Combined with image processing technology, it provides real-time positional or image information of the sample from its surface to its interior. A three-dimensional galvanometer scanning unit scans the sample at different depths, widths, and axial positions from its surface to its interior in real time, simultaneously recording the position and orientation information of the scanning points. This achieves simultaneous scanning of real-time image information and different depths, widths, and axial positions of the sample from its surface to its interior. Feedback is used to adjust the focusing depth and wavelength of the imaging laser beam, as well as the focusing position and energy of the scanning laser beam, positioning the sample for processing.

[0070] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the above-described division of functional units and modules is used as an example. In practical applications, the above functions can be assigned to different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above.

[0071] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all be included within the protection scope of the present invention.

Claims

1. A laser optical processing system with adjustable imaging depth, characterized in that, The laser optical processing system with adjustable imaging depth includes: a laser emitting unit (1), an optical transmission unit (2), a spectral domain optical coherence tomography unit (3), a laser galvanometer scanning unit (4), an indicator light imaging unit (5), an image processing and display unit (6), and a control unit (7). The optical transmission unit (2) includes a beam shaper (21), a laser flash switch (22), a first grating (23), a second grating (24), a dichroic mirror (25), and a focusing lens (26). The spectral domain optical coherence tomography unit (3) includes a broadband light source (31), an interferometer (32), a spectrometer (33), an image beam module (34), a reference beam module (35), and a scanning, scaling, and rotating module (36). The image beam module (34) includes a second grating (24), a focusing lens (26), and an imaging probe (343). The first scanning laser beam emitted by the laser emitting unit (1) passes sequentially through the beam shaper (21), laser flash switch (22), first grating (23), laser galvanometer scanning unit (4), optical coupler of scanning telescopic rotation module (36), dichroic mirror (25), second grating (24), and focusing lens (26) before being focused on the sample. The laser galvanometer scanning unit (4) scans the sample structure in real time and records the position of the first scanning point and the first orientation information of the sample. The reflected light from the sample passes sequentially through a focusing lens (26), a second grating (24), and a dichroic mirror (25) into a high-speed camera (52) in the indicator light imaging unit (5), wherein the high-speed camera (52) captures a first sample photograph of the first scan point of the sample; The first imaging laser beam generated by the broadband light source (31) is divided into a first image beam and a first reference beam by the interferometer (32); after the first reference beam enters the reference beam module (35), the reference beam module (35) returns the second reference beam to the interferometer (32); after the first image beam passes through the optical coupler, dichroic mirror (25), second grating (24) and focusing lens (26) of the scanning telescoping and rotating module (36) in sequence, it is focused on the sample, and the second image beam reflected by the sample returns to the interferometer (32). The second reference beam and the second image beam enter the interferometer to generate interference light, and the interference light enters the spectrometer (33) to form the first spectral component signal; The position of the first scanning point, the first orientation information, the first sample photograph, and the first spectral component signal are input to the image processing and display unit (6). The image processing and display unit (6) generates the first sample image information based on the first spectral component signal, and performs data analysis based on the position of the first scanning point, the first orientation information, the first sample photograph, and the first sample image information to obtain the data analysis results. The data analysis results, the position of the first scanning point, the first orientation information, and the first sample photograph are input into the control unit (7) as adjustment data. The control unit (7) adjusts the focusing depth and wavelength of the first imaging laser beam for real-time imaging, the shooting range of the indicator light imaging unit (5) for real-time shooting, and adjusts the focusing position and energy of the first scanning laser beam emitted by the laser emitting unit (1) to focus on the sample for processing, forming a first processing area. The reference beam module (35) includes a reference mirror (351), a collimating beam expander (352), and a frequency shifter (353); The frequency shifter (353) is used to shift the frequency of the first reference beam; the collimator (352) is used to expand the diameter of the first reference beam and collimate the first reference beam; the reference mirror (351) is a multi-faceted mirror that guides the first reference beam to the reference mirror (351) and returns a second reference beam with a wavelength orthogonal to the reference mirror (351) to the interferometer (32). The scanning telescopic rotation module (36) includes an optical coupler (361), a rotation telescopic drive device (362), and a rotation telescopic device (363) connected in sequence. The optical coupler (361) is used to couple the first imaging laser beam and the first scanning laser beam to the scanning telescopic rotation module (36); the rotation telescopic drive device (362) is used to drive the rotation telescopic device (363); the rotation telescopic drive device (362) controls the rotation angle and telescopic length of the radial scanning of the rotation telescopic device (363), thereby adjusting the distance between the reference beam module (35) and the main optical path, wherein the rotation telescopic device (363) is connected to the reference mirror (351) of the reference beam module (35).

2. The laser optical processing system with adjustable imaging depth according to claim 1, characterized in that, After the formation of the first processing area, the following is also included: The second scanning laser beam emitted by the laser emitting unit (1) passes sequentially through the beam shaper (21), laser flash switch (22), first grating (23), laser galvanometer scanning unit (4), optical coupler of scanning telescopic rotation module (36), dichroic mirror (25), second grating (24), and focusing lens (26) before being focused on the sample. The laser galvanometer scanning unit (4) scans the sample structure in real time and records the position of the second scanning point and the second orientation information of the sample. The reflected light from the sample passes sequentially through the focusing lens (26), the second grating (24), and the dichroic mirror (25) into the high-speed camera (52) in the indicator light imaging unit (5), wherein the high-speed camera (52) captures a second sample photograph of the second scanning point of the sample; The second imaging laser beam generated by the broadband light source (31) is divided into a third image beam and a third reference beam by the interferometer (32); after the third reference beam enters the reference beam module (35), the reference beam module (35) returns the fourth reference beam to the interferometer (32); after the third image beam passes through the optical coupler, dichroic mirror (25), second grating (24) and focusing lens (26) of the scanning telescoping and rotating module (36) in sequence, it is focused on the sample, and the fourth image beam reflected by the sample returns to the interferometer (32). The fourth reference beam and the fourth image beam enter the interferometer to generate interference light, and the interference light enters the spectrometer (33) to form the second spectral component signal; The position of the second scanning point, the second orientation information, the second sample photograph, and the second spectral component signal are input to the image processing and display unit (6). The image processing and display unit (6) generates second sample image information based on the second spectral component signal, and analyzes the first deviation between the second sample image information and the second sample photograph based on the second sample photograph, the second sample image information, and the position and second orientation information of the second scanning point. It also analyzes the second deviation between the second sample image information and the position and second orientation information of the second scanning point, analyzes and determines the third deviation between the position and orientation information of the first scanning point and the second scanning point, and uses the first deviation, the second deviation, and the third deviation as target data. The target data is input to the control unit (7), wherein the control unit (7) adjusts the focusing depth and wavelength of the second imaging laser beam of the spectral domain optical coherence tomography unit (3) for real-time imaging, the shooting range of the indicator light imaging unit (5) for real-time shooting, and adjusts the focusing position and energy of the second scanning laser beam emitted by the laser emission unit (1) to focus on the sample for processing, forming a second processing area.

3. The laser optical processing system with adjustable imaging depth according to claim 1, characterized in that, The indicator light imaging unit (5) includes an indicator light source (51) and a high-speed camera (52). The indicator light source (51) is positioned directly above the sample, and the imaging probe is positioned directly below it to generate indicator light.

4. The laser optical processing system with adjustable imaging depth according to claim 1, characterized in that, The focusing lens (26) is fixed above the vertical plane of the sample and is used to focus the first imaging laser beam and the first scanning laser beam onto the sample. It also serves as the imaging lens of the first imaging laser beam, the focusing lens of the first scanning laser beam, and the imaging lens of the indicator light imaging unit (5).

5. The laser optical processing system with adjustable imaging depth according to claim 4, characterized in that, The optical paths of the laser galvanometer scanning unit (4), the reference beam module (35), the image beam module (34), and the indicator light imaging unit (5) are coaxial, and the sample is simultaneously within the scanning range of the laser galvanometer scanning unit (4), the optical path of the reference beam module (35), the imaging range of the image beam module (34), and the shooting range of the indicator light imaging unit (5).

6. A method of operating a laser optical processing system with adjustable imaging depth as described in any one of claims 1 to 5, characterized in that, Includes the following steps: The first scanning laser beam emitted by the laser emitting unit (1) passes sequentially through the beam shaper (21), laser flash switch (22), first grating (23), laser galvanometer scanning unit (4), optical coupler of scanning telescopic rotation module (36), dichroic mirror (25), second grating (24), and focusing lens (26) before being focused on the sample. The laser galvanometer scanning unit (4) scans the sample structure in real time and records the position of the first scanning point and the first orientation information of the sample. The reflected light from the sample passes sequentially through a focusing lens (26), a second grating (24), and a dichroic mirror (25) into a high-speed camera (52) in the indicator light imaging unit (5), wherein the high-speed camera (52) captures a first sample photograph of the first scan point of the sample; The first imaging laser beam generated by the broadband light source (31) is divided into a first image beam and a first reference beam by the interferometer (32); after the first reference beam enters the reference beam module (35), the reference beam module (35) returns the second reference beam to the interferometer (32); after the first image beam passes through the optical coupler, dichroic mirror (25), second grating (24) and focusing lens (26) of the scanning telescoping and rotating module (36) in sequence, it is focused on the sample, and the second image beam reflected by the sample returns to the interferometer (32). The second reference beam and the second image beam enter the interferometer to generate interference light, and the interference light enters the spectrometer (33) to form the first spectral component signal; The location of the first scanning point, the first orientation information, the first sample photograph, and the first spectral component signal are input to the image processing and display unit (6) for data analysis to obtain the data analysis results; The data analysis results, the position of the first scanning point, the first orientation information, and the first sample photograph are input into the control unit (7) as adjustment data. The control unit (7) adjusts the focusing depth and wavelength of the first imaging laser beam for real-time imaging according to the adjustment data, and performs real-time imaging of the shooting range of the indicator light imaging unit (5). It also adjusts the focusing position and energy of the first scanning laser beam emitted by the laser emitting unit (1) to focus on the sample for processing, forming a first processing area.

Images