Liquid sand blasting process for Diffuser sand blasting stripping

Abstract

The invention discloses a liquid-state sand blasting process for Disuser sand blasting stripping. The liquid-state sand blasting process comprises the following steps: S1, shaping a Disuser; s2, the shaped Diffuser is clamped and positioned, and the Gas out face of the Diffuser is right opposite to the liquid sand blasting equipment; s3, setting sand blasting parameters of the liquid sand blasting equipment according to the size and the material of the Diffuser; s4, liquid sand blasting equipment is used for preparing sand blasting liquid, then system debugging is carried out, sand blasting is carried out on the Gas out surface of the Diffuser, and after sand blasting is completed, quality detection is carried out; s5, the Diffuser is turned over, so that the Gas in surface of the Diffuser is right opposite to the liquid sand blasting equipment; and S6, sand blasting parameters are set for the liquid sand blasting equipment, then sand blasting is conducted on the Gas in surface of the Diffuser, and after sand blasting is completed, quality detection is conducted. The liquid sand blasting process for Diffuser sand blasting stripping aims at overcoming the defects of a dry sand blasting process in the prior art, has the advantages of controlling dust pollution, optimizing the roughness uniformity of a workpiece and inhibiting the aperture expansion risk, and meets the sand blasting treatment requirement of Diffuser.

Description

Technical Field

[0001] The invention belongs to the technical field of sandblasting, and in particular relates to a liquid sandblasting process for diffuser sandblasting stripping. Background Art

[0002] In the field of chemical vapor deposition (CVD), gas diffusers play a crucial role. Their surface quality directly determines the uniformity of gas diffusion, which in turn is closely related to the quality of thin film deposition. High-quality diffusers ensure uniform gas distribution during the deposition process, resulting in high-quality, stable films.

[0003] Currently, sandblasting is a relatively effective method for treating residual film on the diffuser surface, while traditional dry sandblasting is widely used. Traditional dry sandblasting uses compressed air as a power source to spray dry abrasives such as white corundum and glass beads onto the workpiece surface at high speed, removing contaminants such as oxide scale and carbon deposits through mechanical impact. In CVD equipment regeneration, it is often used to remove residual aluminum oxide film on the diffuser and to treat surface roughness. However, this process has significant limitations: 1. Severe dust pollution: During the dry sandblasting process, a large amount of respirable dust is generated. This dust will diffuse into the working environment and pose a serious health hazard to operators. Long-term exposure to such an environment can easily lead to respiratory diseases such as pneumoconiosis.

[0004] 2. Uneven Roughness: Dust generated by dry sandblasting can partially fall back onto the workpiece surface, forming secondary contamination points. These contamination points alter the abrasive impact effect in certain areas, causing abnormal fluctuations in surface roughness (Ra value). Furthermore, as the abrasive moves through the air, differences in air resistance can lead to significant variations in micro-cutting depth across different areas.

[0005] 3. High risk of aperture expansion: Dry sandblasting uses compressed air to directly accelerate the abrasive into the workpiece surface at high speed, lacking the kinetic energy buffering effect of the water film used in liquid sandblasting. This unmediated impact results in higher peak kinetic energy per abrasive particle, resulting in more concentrated localized impact stress on the hole wall. Furthermore, the heat generated by friction between the abrasive and the hole wall cannot be quickly dissipated by the water medium, leading to localized temperature rise on the hole wall. This thermal expansion effect exacerbates aperture deformation, increasing the risk of aperture expansion.

[0006] In summary, the traditional dry sandblasting process has many problems in treating residual film on the diffuser surface. A more advanced and effective sandblasting process is needed to address these problems and meet the strict requirements of the CVD field for diffuser surface quality. The liquid sandblasting process for diffuser sandblasting stripping proposed in this paper is proposed in this context. Summary of the Invention

[0007] Purpose of the invention: In order to overcome the above shortcomings, the purpose of the present invention is to provide a liquid sandblasting process for diffuser sandblasting stripping. The design is reasonable and aims to solve the shortcomings of the dry sandblasting process in the existing technology. It has the advantages of controlling dust pollution, optimizing the uniformity of workpiece roughness, and suppressing the risk of aperture expansion. It meets the sandblasting processing needs of diffusers and has broad application prospects.

[0008] The purpose of the present invention is achieved through the following technical solutions: A liquid sandblasting process for diffuser sandblasting stripping includes the following steps: S1: Reshape the Diffuser; S2: Clamp and position the shaped diffuser so that the gas out side of the diffuser faces the liquid sandblasting equipment; S3: Set the blasting parameters of the liquid sandblasting equipment according to the size and material of the diffuser; S4: Liquid sandblasting equipment first prepares the sandblasting liquid, then performs system debugging, and then sandblasts the gas out surface of the diffuser. After the sandblasting is completed, the gas out surface of the diffuser is quality tested; S5: Turn over the diffuser so that the gas in side of the diffuser faces the liquid sandblasting equipment; S6: Set the sandblasting parameters for the liquid sandblasting equipment, and then sandblast the gas in surface of the diffuser. After the sandblasting is completed, perform a quality inspection on the gas in surface of the diffuser.

[0009] This invention provides a complete and standardized liquid sandblasting process, ensuring a systematic and repeatable sandblasting process for diffuser stripping. Sandblasting and quality inspection on both sides of the diffuser ensures that all dirt and film residue are effectively removed, guaranteeing the diffuser's surface quality.

[0010] Furthermore, in the above-mentioned liquid sandblasting process for Diffuser sandblasting stripping, in S1, the shaping includes but is not limited to knocking shaping and hydraulic shaping.

[0011] Choose the appropriate shaping method based on any possible deformation of the diffuser. For example, tapping can correct small, localized deformation, while hydraulic shaping is suitable for larger or more severe deformations. It can effectively restore the diffuser's shape and provide a good foundation for subsequent sandblasting.

[0012] Furthermore, in the above-mentioned liquid sandblasting process for diffuser sandblasting stripping, the liquid sandblasting equipment includes an actuator, and the actuator includes: Abrasive jar, used to store abrasive; water tanks, used to store water; Mixing tank, used to homogenize and mix abrasive and water to form sandblasting liquid; The quantitative feeder is used to quantitatively deliver the abrasive in the abrasive tank and the water in the water tank to the mixing tank according to the preset ratio; Spray gun, used to spray blasting fluid onto the Diffuser surface; A multi-axis robotic arm, wherein the spray gun is arranged on the multi-axis robotic arm and is used to adjust the position of the spray gun; Sandblasting fluid pump, used to stably deliver sandblasting fluid from the mixing tank to the spray gun; The separation and recovery device is used to separate and recover the sandblasting liquid after spraying.

[0013] The actuator mechanism of the liquid sandblasting equipment described in this invention works in concert with each other. The abrasive tank stores abrasive, the water tank stores water, the mixing tank homogenizes and mixes the two to form the sandblasting liquid, the metered feeder ensures the abrasive and water are delivered in a preset ratio, the spray gun sprays the sandblasting liquid onto the diffuser surface, the multi-axis robotic arm adjusts the spray gun position, the sandblasting liquid pump steadily delivers the sandblasting liquid, and the separation and recovery device separates and recovers the sprayed sandblasting liquid. This design ensures efficient and stable liquid sandblasting.

[0014] Furthermore, in the above-mentioned liquid sandblasting process for Diffuser sandblasting, the volume of the abrasive tank is 0.3~1.5m³; the abrasive tank is equipped with a vibrating screen with an aperture of 0.4~0.8mm for filtering large particles of impurities; the water tank is used to store pure water with an electrical conductivity of <10μS / cm; the water tank is equipped with a pH value monitoring module, and the pH value is 0. The pH value monitoring range of the value monitoring module is 6.5~7.5; the mixing tank is provided with an agitator for forcibly homogenizing the abrasive and water to form a sandblasting liquid, so that the density of the sandblasting liquid is controlled at 1.2~1.8g / cm³; the quantitative feeder is a screw quantitative feeder with an accuracy of ±0.5%; the spray gun is a Venturi spray gun made of boron carbide with a service life of ≥800h, which is used to accelerate the sandblasting liquid to 60~120m / s under the action of compressed air to form a uniform abrasive cloud; the sandblasting liquid pump adopts a corrosion-resistant centrifugal pump with a power of 4~11kW and a pressure range of 0.3-0.8Mpa.

[0015] This invention defines specific parameters for each actuator component. Parameters such as the abrasive tank capacity, the vibrating screen aperture, the conductivity and pH monitoring range of the pure water stored in the water tank, the function of the agitator in the mixing tank, the precision of the dosing feeder, the material and performance of the spray gun, and the power and pressure range of the sandblasting fluid pump are all designed to ensure optimal results in the liquid sandblasting process. In particular, the spray gun, made of boron carbide and boasting a lifespan of ≥800 hours, reduces the frequency of gun replacement and improves production efficiency. The agitator in the mixing tank maintains the density of the sandblasting fluid at 1.2-1.8 g / cm³, ensuring uniformity and stability.

[0016] Furthermore, in the above-mentioned liquid sandblasting process for Diffuser sandblasting stripping, in S2, the Diffuser is vertically mounted to the sandblasting hanging fixture through the hanger screws, ensuring that the Gas out side of the Diffuser is aligned with the spray gun of the liquid sandblasting equipment and maintained in a horizontal and vertical state.

[0017] Install the Diffuser vertically to the sandblasting hanging fixture using the hanger screws, and ensure that the Gas out side is aligned with the spray gun and remains horizontal and vertical. This ensures that the relative position of the spray gun and the Diffuser surface is accurate during the sandblasting process, resulting in a uniform sandblasting effect.

[0018] Furthermore, in the above-mentioned liquid sandblasting process for diffuser sandblasting and stripping, in S3, before sandblasting, the position of the spray gun is adjusted by a multi-axis robotic arm according to the size and material of the diffuser: the angle of the spray gun is 45-70°, the distance is 100-400mm, the rise amount of the spray gun is 3-7mm, and the movement speed of the spray gun is 200-600mm / s.

[0019] Adjusting the angle, distance, rise and movement speed of the spray gun according to the size and material of the diffuser can ensure that the sandblasting liquid is sprayed onto the diffuser surface in the best state, thereby improving the uniformity of roughness and reducing the risk of pore expansion.

[0020] Furthermore, in the above-mentioned liquid sandblasting process for diffuser sandblasting stripping, in S4, white corundum or glass beads are pretreated in a drying oven to a moisture content of ≤0.5%, then placed in an abrasive tank as abrasive, and impurities are removed by a vibrating screen; a quantitative feeder quantitatively delivers the abrasive in the abrasive tank and the water in the water tank to a mixing tank in a water:abrasive ratio of 40-85% (mass fraction); the agitator in the mixing tank is started and stirred at a speed of 30-60 rpm; the spray gun is run at no load for 2-3 minutes to confirm that the pressure is stable at 0.3-0.8 MPa; a test spray is performed on a sample block for 30 seconds, and the surface roughness Ra value of the sample block is detected. The water:abrasive ratio or the spray gun pressure is continuously adjusted until the surface roughness Ra value of the sample block fluctuates by ≤±1 μm; the gas out surface of the diffuser is sandblasted; after the sandblasting is completed, the surface and the inside of the hole of the gas out surface of the diffuser are observed using an endoscope and / or CCD to check for any residual film. If no residual film is found, the process proceeds to the next step.

[0021] Abrasive pretreatment to remove impurities and control moisture content ensures abrasive quality. Test spray samples and adjustment of the water-to-abrasive ratio or spray gun pressure ensure that the surface roughness Ra fluctuation of the sample is ≤±1μm, ensuring uniformity of the diffuser's surface roughness. Impurities in the abrasive may cause scratches or uneven roughness on the diffuser surface. Adjustment through test spray samples can avoid blasting quality issues caused by inappropriate parameters. After blasting, the diffuser's surface and pores are observed using an endoscope and / or CCD to promptly detect any residual film and ensure blasting quality.

[0022] Furthermore, in the above-mentioned liquid sandblasting process for sandblasting and stripping of the diffuser, in said S5, the diffuser is turned over to ensure that the Gas in surface of the diffuser is aligned with the spray gun of the liquid sandblasting equipment and maintained in a horizontal and vertical state; in said S6, the sandblasting parameters of the liquid sandblasting equipment are set, the angle of the spray gun is set to 90°, and the other parameters are the same as S3; then the Gas in surface of the diffuser is sandblasted. After the sandblasting is completed, the surface and the state inside the hole of the Gas out surface of the diffuser are observed using an endoscope and / or CCD to check whether there is any residual film. If there is no residual film, the sandblasting is completed.

[0023] The gas in surface of the diffuser is sandblasted, and the appropriate spray gun angle and other parameters are set to ensure that both sides of the diffuser are effectively treated, thus ensuring the overall surface quality of the diffuser.

[0024] Furthermore, the liquid sandblasting process for the diffuser sandblasting stripping mentioned above, the liquid sandblasting equipment also includes a control system, the control system includes a sensor module, a control center: The sensor module includes a pressure sensor, a flow sensor, a density sensor, and a liquid level sensor. The pressure sensor is installed at the outlet of the sandblasting liquid pump and the spray gun respectively. The flow sensor is installed on the pipe between the mixing tank and the sandblasting liquid pump and the pipe between the sandblasting liquid pump and the spray gun respectively. The density sensor is installed in the mixing tank. The liquid level sensor is installed in the water tank and the mixing tank respectively. It is used to monitor the pressure, flow, density of the sandblasting liquid and the liquid level of the water tank and the mixing tank in real time. The control center includes a PLC controller and a human-machine interface. The PLC controller serves as the control core, receiving data from the sensor module, analyzing and processing it, and issuing control instructions to the actuator based on preset parameters and algorithms. The human-machine interface uses a touch screen for operators to set parameters, view operating status and historical data, and also has fault diagnosis and alarm functions.

[0025] The sensor module monitors the blasting fluid's pressure, flow, density, and level in real time. The control center issues control commands to the actuators based on preset parameters and algorithms, enabling automated control of the liquid sandblasting process. The human-machine interface (HMI) allows operators to easily set parameters, view operating status, and view historical data. It also features fault diagnosis and alarm functions, improving the equipment's operability and reliability. For example, if the pressure sensor detects abnormal gun pressure, the control center can promptly adjust the gun and blasting fluid pump speeds to maintain pressure stability. If a fault occurs, the HMI will promptly sound an alarm, alerting the operator to address the issue. Real-time monitoring and dynamic adjustments ensure the stability of various parameters during the sandblasting process, thereby ensuring consistent blasting quality.

[0026] Furthermore, in the above-mentioned liquid sandblasting process for diffuser sandblasting stripping, in S4 and S6, during the sandblasting process, the pressure sensor is used to feed back to the PLC controller to dynamically adjust the speed of the spray gun and the sandblasting liquid pump to ensure that the pressure fluctuation is ≤±0.1MPa. If the spray gun is blocked, the machine is immediately stopped for cleaning and the nozzle is replaced; the density of the sandblasting liquid in the mixing tank is detected in real time by the density sensor. If the deviation is greater than 5%, the abrasive or water is automatically replenished, and the jet uniformity is visually observed. If abrasive splashing or water separation occurs, the machine needs to be stopped to adjust the agitator speed or replace the abrasive.

[0027] During the sandblasting process, pressure sensor feedback dynamically adjusts the speed of the spray gun and blasting fluid pump to ensure pressure fluctuations of ≤±0.1MPa, ensuring stability and consistency during the sandblasting process. Excessive pressure fluctuations can result in uneven sandblasting and affect the surface quality of the diffuser. If the spray gun becomes clogged, the system immediately stops for cleaning and nozzle replacement. Abrasive or water is automatically replenished based on density sensor detection results. If abrasive splashing or water separation occurs, the system stops to adjust the agitator speed or replace the abrasive. These measures ensure timely resolution of sandblasting issues, ensuring production continuity and product quality.

[0028] Compared with the prior art, the present invention has the following beneficial effects: (1) The liquid sandblasting process for diffuser sandblasting disclosed in the present invention has environmental advantages. Compared with the traditional dry sandblasting process, the liquid sandblasting process adopted in the present invention suppresses dust diffusion through a closed water circulation system and the physical wrapping effect of the water medium on the abrasive, eliminates PM2.5 level pollutants from the source, effectively improves the working environment, and protects the health of operators. (2) The liquid sandblasting process for sandblasting and stripping of diffusers disclosed in the present invention improves the sandblasting quality. In terms of roughness uniformity, the water film reduces the peak impact stress of a single abrasive to 1 / 5 of that of the dry sandblasting process, eliminating local impact overload, and compressing the Ra value fluctuation range to ±1μm, making the surface roughness of the diffuser more uniform. In terms of pore expansion risk suppression, the water medium produces 15-20% kinetic energy viscosity loss when impacting the pore wall, so that the pore expansion is controlled within ±0.005mm (dry sandblasting process is usually ±0.01μm). At the same time, the cooling effect of water makes the pore wall temperature rise <3℃ (dry sandblasting process is usually 8-15℃), effectively avoiding pore expansion caused by thermal expansion, and improving the quality and performance of the diffuser. (3) The liquid sandblasting process for sandblasting and stripping of diffusers disclosed in the present invention has good process stability; the present invention provides a complete, standardized and detailed liquid sandblasting process flow and equipment system, including shaping, clamping and positioning, parameter setting, sandblasting liquid preparation, debugging, sandblasting and quality inspection, as well as corresponding control systems and fault handling mechanisms, which ensure the stability and repeatability of the process and can meet the sandblasting processing requirements of different batches of diffusers. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 Schematic diagram of the liquid sandblasting process for Diffuser sandblasting stripping according to the present invention; Figure 2 Schematic diagram of traditional dry sandblasting process; In the figure: abrasive tank 1, water tank 2, mixing tank 3, quantitative feeder 4, spray gun 5, multi-axis robotic arm 6, sandblasting liquid pump 7, separation and recovery device 8. DETAILED DESCRIPTION

[0030] The following examples 1 and 2 provide a clear and complete description of the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention. The following embodiment 1 provides a liquid sandblasting device for Diffuser sandblasting stripping.

[0031] Example 1 The liquid sandblasting equipment for diffuser sandblasting and stripping of embodiment 1 includes an actuator and a control system.

[0032] The actuator includes an abrasive tank 1, a water tank 2, a mixing tank 3, a quantitative feeder 4, a spray gun 5, a multi-axis robotic arm 6, a sandblasting liquid pump 7, and a separation and recovery device 8.

[0033] like Figure 1 As shown, the installation and debugging process of the actuator of the liquid sandblasting equipment for Diffuser sandblasting stripping according to the present invention is as follows: 1. Equipment layout Choose a suitable work site, make sure the ground is flat, well-ventilated and has enough space to place the equipment. Figure 1 As shown, an abrasive tank 1, a water tank 2, a mixing tank 3, a quantitative feeder 4, a sandblasting liquid pump 7, a spray gun 5, a multi-axis robotic arm 6 and a separation and recovery device 8 are placed in sequence.

[0034] 2. Connect pipes and circuits Use pipes to connect the abrasive tank 1, water tank 2, and dosing feeder 4, ensuring a secure and well-sealed connection to prevent leakage of abrasive and water. Then, connect dosing feeder 4 to mixing tank 3 to ensure accurate delivery of the abrasive and water to mixing tank 3. Use pipes to connect mixing tank 3 to the blasting fluid pump 7, and then to the spray gun 5, forming a delivery channel for the blasting fluid. The spray gun 5 is mounted on a multi-axis robotic arm 6, which is used to adjust its position. Also, connect the equipment's electrical system to ensure that all components are functioning properly.

[0035] 3. Equipment debugging First, debug the quantitative feeder 3 and deliver the abrasive in the abrasive tank 1 and the water in the water tank 2 to the mixing tank 3 according to the preset ratio, such as the volume ratio of abrasive to water is 1:3. Check whether the delivery amount is accurate and whether the error is within ±0.5%.

[0036] Then, start the agitator in the mixing tank 3 and set the agitator speed to 30-60 rpm. Observe whether the abrasive and water can be fully mixed to form a uniform sandblasting liquid and whether the density of the sandblasting liquid is controlled at 1.2-1.8 g / cm³.

[0037] Next, start the sandblasting liquid pump 7 and check whether the pressure and flow rate of the sandblasting liquid pump 7 are stable and whether the pressure range is between 0.3-0.8 MPa. At the same time, observe whether the spray gun 5 can spray the sandblasting liquid evenly and whether the spray speed is between 60-120 m / s.

[0038] The separation and recovery device 8 is used to collect the blasting liquid dropped during the blasting process and separate it into water and abrasive. Finally, the separation and recovery device 8 is debugged to observe whether the separated abrasive and water can be recovered and utilized respectively.

[0039] Abrasive tank 1 has a capacity of 0.3-1.5 m³ and is equipped with a vibrating screen with an aperture of 0.4-0.8 mm to filter out large impurities in the abrasive. Water tank 2 stores pure water with an electrical conductivity of <10 μS / cm and is equipped with a pH monitoring module with a pH range of 6.5-7.5. Mixing tank 3 contains an agitator to homogenize the abrasive and water to form the blasting fluid, maintaining a density of 1.2-1.8 g / cm³. Dosing feeder 4 is a screw dosing feeder with an accuracy of ±0.5%. Spray gun 5 is a Venturi spray gun made of boron carbide with a service life of ≥800 hours. It is used to accelerate the blasting fluid to a speed of 60-120 m / s using compressed air to form a uniform abrasive cloud. The sandblasting liquid pump 7 adopts a corrosion-resistant centrifugal pump with a power of 4-11kW and a pressure range of 0.3-0.8Mpa.

[0040] The control system of the liquid sandblasting equipment for diffuser sandblasting stripping of the present invention includes a sensor module and a control center.

[0041] The sensor module includes a pressure sensor, a flow sensor, a density sensor, and a liquid level sensor. The pressure sensor is installed at the outlet of the sandblasting fluid pump 7 and at the spray gun 5. The flow sensor is installed in the pipes between the mixing tank 3 and the sandblasting fluid pump 7, and the pipes between the sandblasting fluid pump 7 and the spray gun 6. The density sensor is installed in the mixing tank 3, and the liquid level sensors are installed in the water tank 2 and the mixing tank 3. They are used to monitor the pressure, flow rate, density of the sandblasting fluid and the liquid levels of the water tank 2 and the mixing tank 3 in real time. The control center includes a PLC controller and a human-machine interface. The PLC controller serves as the control core, receiving data from the sensor module, analyzing and processing it, and issuing control instructions to the actuator based on preset parameters and algorithms. The human-machine interface uses a touch screen for operators to set parameters, view operating status and historical data, and also has fault diagnosis and alarm functions.

[0042] Based on the structural foundation of Example 1, the following Example 2 provides a liquid sandblasting process for Diffuser sandblasting stripping.

[0043] Example 2 The liquid sandblasting process for diffuser sandblasting stripping of Example 2 comprises the following steps: S1: Shape the diffuser. The shaping includes but is not limited to percussion shaping and hydraulic shaping. The selection is based on the actual situation. S2: Install the diffuser vertically to the sandblasting hanging fixture using the hanger screws, ensuring that the gas outlet of the diffuser faces the spray gun 5 of the liquid sandblasting equipment and maintains a horizontal and vertical position. S3: Before sandblasting, the position of the spray gun 5 is adjusted by the multi-axis robot 6 according to the size and material of the diffuser: the angle of the spray gun 5 is 45-70°, the distance is 100-400 mm, the rise amount of the spray gun 5 is 3-7 mm, and the moving speed of the spray gun 5 is 200-600 mm / s; S4: Pre-treat white corundum or glass beads in a drying oven to a moisture content of ≤0.5%, then place them into abrasive tank 1 as abrasive and remove impurities through a vibrating screen; quantitative feeder 4 delivers abrasives from abrasive tank 1 and water from water tank 2 to mixing tank 3 in a water:abrasive ratio of 40-85% (mass fraction); start the agitator in mixing tank 3 and stir at a speed of 30-60 rpm; run spray gun 5 at no load for 2-3 minutes to confirm that the pressure is stable at 0.3-0.8 MPa; test spray the sample for 30 seconds and test the surface roughness Ra value of the sample; continuously adjust the water:abrasive ratio or the pressure of spray gun 5 until the surface roughness Ra value of the sample fluctuates ≤±1μm; The out surface is sandblasted; during the sandblasting process, the pressure sensor is used to feed back to the PLC controller, and the speed of the spray gun and the sandblasting liquid pump is dynamically adjusted to ensure that the pressure fluctuation is ≤±0.1MPa. If the spray gun is blocked, the machine is immediately stopped for cleaning and the nozzle is replaced. The density of the sandblasting liquid in the mixing tank is detected in real time by the density sensor. If the deviation is greater than 5%, abrasive or water is automatically added, and the jet uniformity is visually observed. If abrasive splashing or water separation occurs, the machine needs to be stopped to adjust the agitator speed or replace the abrasive. After the sandblasting is completed, the surface and hole conditions of the diffuser's gas out surface are observed using an endoscope and / or CCD to check for any residual film. If there is no residual film, proceed to the next step; S5: Turn over the Diffuser and ensure that the Gas in side of the Diffuser is facing the spray gun (5) of the liquid sandblasting equipment and keeps it in a horizontal and vertical state; S6: Set the sandblasting parameters for the liquid sandblasting equipment. Use the multi-axis robotic arm 6 to adjust the position of the spray gun 5: the angle of the spray gun 5 is 90°, the distance is 100-400mm, the lift of the spray gun 5 is 3-7mm, and the movement speed of the spray gun 5 is 200-600mm / s. Then, sandblast the gas in surface of the diffuser. During the sandblasting process, the pressure sensor is used to feedback to the PLC controller, and the speed of the spray gun and sandblasting liquid pump is dynamically adjusted to ensure that the pressure fluctuation is ≤±0.1MPa. If the spray gun is blocked, the machine is immediately stopped for cleaning and the nozzle is replaced. The density of the sandblasting liquid in the mixing tank is detected in real time by the density sensor. If the deviation is greater than 5%, abrasive or water is automatically added. The jet uniformity is visually observed. If abrasive splashing or water separation occurs, the machine needs to be stopped to adjust the agitator speed or replace the abrasive. After the sandblasting is completed, the surface and the inside of the gas out surface of the diffuser are observed using an endoscope and / or CCD to check for any residual film. If there is no residual film, the sandblasting is completed.

[0044] In summary, the present invention provides a liquid sandblasting process for diffuser sandblasting and stripping, which solves the shortcomings of the dry sandblasting process in the prior art, has the advantages of controlling dust pollution, optimizing the roughness uniformity of the workpiece, and suppressing the risk of aperture expansion, thus meeting the sandblasting processing requirements of the diffuser.

[0045] The present invention has many specific application paths, and the above is only a preferred embodiment of the present invention. It should be noted that the above embodiments are only used to illustrate the present invention and are not intended to limit the scope of protection of the present invention. For those skilled in the art, several improvements can be made without departing from the principles of the present invention, and these improvements should also be considered as the scope of protection of the present invention.

Claims

1. A liquid sandblasting process for diffuser sandblasting, characterized in that: The steps include: S1: Reshape the Diffuser; S2: Clamp and position the shaped diffuser so that the gas out side of the diffuser faces the liquid sandblasting equipment; S3: Set the sandblasting parameters of the liquid sandblasting equipment according to the size and material of the diffuser. S4: Prepare the sandblasting liquid for the liquid sandblasting equipment, then debug the system, and then sandblast the gas outlet surface of the diffuser. After sandblasting, perform a quality inspection on the gas outlet surface of the diffuser. S5: Turn over the diffuser so that the gas in side of the diffuser faces the liquid sandblasting equipment; S6: Set the sandblasting parameters for the liquid sandblasting equipment, and then sandblast the gas in surface of the diffuser. After the sandblasting is completed, perform a quality inspection on the gas in surface of the diffuser.

2. The liquid sandblasting process for Diffuser sandblasting stripping according to claim 1, characterized in that: In said S1, the shaping includes percussion shaping and hydraulic shaping.

3. The liquid sandblasting process for diffuser sandblasting stripping according to claim 1, characterized in that: The liquid sandblasting equipment includes an actuator, which includes: an abrasive jar (1), for storing abrasive; a water tank (2) for storing water; A mixing tank (3) for homogenizing and mixing abrasive and water to form a blasting liquid; A quantitative feeder (4) is used to quantitatively deliver the abrasive in the abrasive tank (1) and the water in the water tank (2) to the mixing tank (3) in a predetermined ratio; A spray gun (5) for spraying sandblasting liquid onto the surface of the diffuser; A multi-axis robotic arm (6), wherein the spray gun (5) is arranged on the multi-axis robotic arm (6) and is used to adjust the position of the spray gun (5); A sandblasting liquid pump (7) for stably delivering the sandblasting liquid from the mixing tank (3) to the spray gun (5); The separation and recovery device (8) is used to separate and recover the sandblasting liquid after spraying.

4. The liquid sandblasting process for Diffuser sandblasting stripping according to claim 3, characterized in that: The volume of the abrasive tank (1) is 0.3~1.5m³; the abrasive tank (1) is equipped with a vibrating screen, and the aperture of the vibrating screen is 0.4~0.8mm, which is used to filter large particles of impurities; the water tank (2) is used to store pure water, and the conductivity of the pure water is <10μS / cm; the water tank (2) is equipped with a pH value monitoring module, and the pH The pH value monitoring range of the value monitoring module is 6.5~7.5; the mixing tank (3) is provided with an agitator for forcibly homogenizing the abrasive and water to form a sandblasting liquid, so that the density of the sandblasting liquid is controlled at 1.2~1.8g / cm³; the quantitative feeder (4) is a screw quantitative feeder with an accuracy of ±0.5%; the spray gun (5) is a Venturi spray gun, the spray gun (5) is made of boron carbide material, has a service life of ≥800h, and is used to accelerate the sandblasting liquid to 60~120m / s under the action of compressed air to form a uniform abrasive cloud; the sandblasting liquid pump (7) is a corrosion-resistant centrifugal pump with a power of 4~11kW and a pressure range of 0.3-0.8Mpa.

5. The liquid sandblasting process for diffuser sandblasting according to any one of claims 3 or 4, characterized in that: In the above-mentioned S2, the diffuser is vertically mounted on the sandblasting hanging fixture through the hanger screws, ensuring that the gas outlet of the diffuser is aligned with the spray gun (5) of the liquid sandblasting equipment and maintained in a horizontal and vertical state.

6. The liquid sandblasting process for diffuser sandblasting according to any one of claims 3 or 4, characterized in that: In the S3, before sandblasting, the position of the spray gun (5) is adjusted by the multi-axis robot arm (6) according to the size and material of the diffuser: the angle of the spray gun (5) is 45-70°, the distance is 100-400 mm, the rise amount of the spray gun (5) is 3-7 mm, and the moving speed of the spray gun (5) is 200-600 mm / s.

7. The liquid sandblasting process for diffuser sandblasting according to any one of claims 3 or 4, characterized in that: In the S4, white corundum or glass beads are pretreated in a drying oven to a moisture content of ≤0.5%, and then put into the abrasive tank (1) as abrasive, and impurities are removed by a vibrating screen; the quantitative feeder (4) quantitatively transports the abrasive in the abrasive tank (1) and the water in the water tank (2) to the mixing tank (3) in a water:abrasive ratio of 40-85% (mass fraction); the agitator of the mixing tank (3) is started and stirred at a speed of 30-60 rpm; the spray gun (5) is run at no load for 2-3 minutes to confirm that the pressure is stable at 0.3-0.8 MPa; the sample block is sprayed for 30 seconds, and the surface roughness Ra value of the sample block is detected, and the water:abrasive ratio or the pressure of the spray gun (5) is continuously adjusted until the surface roughness Ra value of the sample block fluctuates ≤±1μm; the gas out surface of the diffuser is sandblasted; after the sandblasting is completed, the gas out surface of the diffuser is observed using an endoscope and / or CCD. Check the surface and hole conditions of the out side to see if there is any residual film. If there is no residual film, proceed to the next step.

8. The liquid sandblasting process for diffuser sandblasting according to any one of claims 3 or 4, characterized in that: In said S5, the Diffuser is turned over to ensure that the Gas in surface of the Diffuser is aligned with the spray gun (5) of the liquid sandblasting equipment and maintained in a horizontal vertical state; in said S6, the sandblasting parameters of the liquid sandblasting equipment are set, and the angle of the spray gun (5) is set to 90 degrees, and the other parameters are the same as those in S3; then the Gas in surface of the Diffuser is sandblasted. After the sandblasting is completed, the surface and the state inside the hole of the Gas out surface of the Diffuser are observed using an endoscope and / or CCD to check whether there is any residual film. If there is no residual film, the sandblasting is completed.

9. The liquid sandblasting process for diffuser sandblasting according to any one of claims 3 or 4, characterized in that: The liquid sandblasting equipment further includes a control system, which includes a sensor module and a control center: The sensor module includes a pressure sensor, a flow sensor, a density sensor, and a liquid level sensor. The pressure sensor is installed at the outlet of the sandblasting liquid pump (7) and the spray gun (5), respectively. The flow sensor is installed on the pipeline between the mixing tank (3) and the sandblasting liquid pump (7), and the pipeline between the sandblasting liquid pump (7) and the spray gun (5), respectively. The density sensor is installed in the mixing tank (3), and the liquid level sensor is installed in the water tank (2) and the mixing tank (3), respectively, for real-time monitoring of the pressure, flow, density of the sandblasting liquid and the liquid level of the water tank (2) and the mixing tank (3). The control center includes a PLC controller and a human-machine interface. The PLC controller serves as the control core, receiving data from the sensor module, analyzing and processing it, and issuing control instructions to the actuator based on preset parameters and algorithms. The human-machine interface uses a touch screen for operators to set parameters, view operating status and historical data, and also has fault diagnosis and alarm functions.

10. The liquid sandblasting process for diffuser sandblasting stripping according to claim 9, characterized in that: In the above-mentioned S4 and S6, during the sandblasting process, the pressure sensor is used to feed back to the PLC controller, and the rotation speed of the spray gun (5) and the sandblasting liquid pump (7) is dynamically adjusted to ensure that the pressure fluctuation is ≤±0.1MPa. If the spray gun (5) is blocked, the machine is immediately stopped for cleaning and the nozzle is replaced. The density of the sandblasting liquid in the mixing tank (3) is detected in real time by the density sensor. If the deviation is greater than 5%, the abrasive or water is automatically replenished, and the jet uniformity is visually observed. If abrasive splashing or water separation occurs, the machine needs to be stopped to adjust the stirrer speed or replace the abrasive.

Images