An ultra-thin glass substrate inclined conveying roller way

Abstract

This application relates to an inclined conveyor roller for ultra-thin glass substrates, belonging to the technical field of glass transportation. The inclined conveyor roller includes a base, a frame, air floats, an air supply component, and an inclined conveying component. The frame is mounted on the base at an adjustable tilt angle of 75°-85°. The air floats are evenly distributed on the surface of the frame, and their first micropores form an adjustable air cushion. The inclined conveying component rolls and supports the glass under the frame and drives the glass movement. The upper side of the air floats has an inclined chamfered surface, and its second micropore array works in conjunction with the first micropores to generate a centripetal vortex flow. A first air curtain is located on the side of the frame away from the guide wheel, and its third micropores generate air that collides with the escaping airflow at the upper edge of the glass to form an air curtain wall, preventing airflow from escaping. This application achieves non-contact conveying by adjusting the tilt angle of the frame to adapt to the upstream equipment, and the air floats forming an air cushion; the vortex flow counteracts the component of gravity, and the air curtain wall suppresses airflow escaping, ensuring the stability of the air floats while maintaining the spatial advantage of a large tilt angle.

Description

Technical Field

[0001] This application relates to the technical field of glass transportation, and in particular to an inclined conveyor roller conveyor for ultrathin glass substrates. Background Technology

[0002] Ultra-thin float glass (typically ≤0.5mm thick) is widely used in high-end electronic fields such as liquid crystal display substrates due to its high light transmittance, excellent surface smoothness, and chemical stability. However, its extremely fragile physical properties make it prone to scratches or electrostatic adsorption during handling, leading to a decrease in yield. Traditional conveying equipment faces two core problems:

[0003] 1. Risk of contact damage: During mechanical roller conveying, direct friction between the glass substrate and the rollers can easily cause micro-scratches (especially under large inclination angles, the gravitational component intensifies the contact pressure).

[0004] 2. Instability of Air Float at Large Inclination Angles: To adapt to upstream equipment (such as an online inspection machine tilted at 80°), inclined conveying is required. However, existing air float technology suffers from severe air cushion leakage and boundary turbulence leading to glass vibration or displacement at high inclination angles (greater than 75°). For example, the unidirectional upward jet flow of the air float strip cannot counteract the downward force of gravity on the glass when tilted, and the airflow leakage at the glass edge disrupts the uniformity of the air cushion, resulting in localized loss of float and collision.

[0005] Currently, some inclined glass conveyor rollers achieve tilt angle adjustment through articulated lifting mechanisms, but this still relies on physical roller contact transmission, which cannot meet the requirements for non-destructive conveying of ultra-thin glass. Meanwhile, conventional horizontal air-floating platforms cannot adapt to high-angle production line layouts. Therefore, there is an urgent need to design a conveying system that combines non-contact conveying with large-angle air cushion stabilization control to solve the problems of air flotation maintenance and anti-escape in the conveying of ultra-thin glass on steep slopes. Summary of the Invention

[0006] In order to maintain the spatial advantage of a large tilt angle while ensuring the stability of air flotation conveying, this application provides an ultra-thin glass substrate tilting conveyor roller.

[0007] This application provides an inclined conveyor roller conveyor for ultra-thin glass substrates, employing the following technical solution:

[0008] An inclined conveyor roller for ultra-thin glass substrates includes a base, a frame, air floats, an air supply assembly, and an inclined conveying assembly. The frame is mounted on the base at an adjustable inclination angle of 75°-85°. Multiple sets of air floats are equidistantly arranged on the upper surface of the frame. Multiple sets of first micropores are arrayed on the upper surface of the air floats, forming adjustable air cushions of 20-120µm between them and the glass substrate. The air supply assembly is mounted on the frame and supplies air to the multiple sets of air floats, controlling the air supply amount. The inclined conveying assembly... The component is set on the lower side of the frame and provides rolling support to the lower side of the glass substrate, thereby driving the glass substrate to move. An inclined chamfered surface is provided between the upper sidewall and the upper surface of the air float. Multiple sets of second micro-holes perpendicular to the inclined chamfered surface are arrayed on the inclined chamfered surface. A first air curtain strip is provided on the side of the frame away from the guide wheel. Multiple sets of third micro-holes are arrayed on the first air curtain strip. The gas ejected from the multiple sets of third micro-holes collides with the gas escaping from the upper edge of the glass substrate and forms an air curtain wall that prevents the gas on the upper side of the glass substrate from escaping.

[0009] By adopting the above technical solution, the frame is adjusted to an angle that matches the upstream equipment before use. Then, the first microholes on multiple sets of air flotation strips form an adjustable air cushion of 20-120um. The tilting conveying component drives the glass substrate to move. At the same time, the second microholes on the tilted chamfered surface cooperate with the first microholes to eject gas to form a centripetal vortex flow. The third microholes on the upper edge of the first air curtain strip and the escaping airflow form an air curtain wall and prevent the airflow from escaping. In the end, the spatial advantage of the large tilt angle is maintained while ensuring the stability of the air flotation conveying.

[0010] Furthermore, the width of the inclined chamfered surface is 15%-20% of the width of the air float strip, the aperture of the second micropore is 60%-80% of the aperture of the first micropore, the inclination angle of the inclined chamfered surface is 15°-30°, and the airflow ejected from the second micropore and the airflow ejected from the first micropore form a vortex air cushion on the surface of the glass substrate.

[0011] By adopting the above technical solution, the width of the inclined chamfered surface, the diameter of the second micropore, and the inclination angle of the second micropore are determined, which makes it easier to clarify the relationship between the second micropore and the first micropore, and facilitates the formation of a stable vortex air cushion by the airflow of the second micropore and the first micropore, thereby improving the stability of the air cushion.

[0012] Furthermore, the inclined chamfered surface of the air-float strip is provided with a spiral flow guide cavity, and multiple sets of second micropores are distributed along the tangential direction of the flow guide cavity. The airflow of the first micropore and the second micropore converges on the surface of the glass substrate to form a centripetal vortex flow. The air curtain wall formed between the first air curtain strip and the upper edge of the glass substrate and the vortex flow form an airlock effect on the glass surface to prevent the airflow from escaping.

[0013] By adopting the above technical solution, the spiral guide cavity causes the airflow in the inclined chamfered surface to rotate, and then it is discharged through the second micro-holes distributed in the tangential direction. This facilitates the synthesis of a centripetal vortex flow with the airflow discharged from the first micro-hole, thereby resisting the downward trend of the glass and improving the uniformity of the air cushion. Finally, the vortex flow and the air curtain wall couple and lock the airflow, reducing the demand for air supply.

[0014] Furthermore, the first air curtain strip is provided with an independent air supply component, and the air supply pipe between the independent air supply component and the first air curtain strip is provided with a proportional valve for controlling the air flow and a second flow sensor. The length of the first air curtain strip is equal to the length of the air float strip and the two ends are flush with each other.

[0015] By adopting the above technical solution, the proportional valve responds to changes in glass size and position, maintains constant air curtain strength, and monitors anomalies in real time through a flow sensor, ensuring system reliability. At the same time, the length of the first air curtain strip is equal to the length of the air float strip and is flush with it, so that the first air curtain strip can always form an air curtain wall with the upper side of the glass substrate during the movement of the glass substrate, ensuring stability.

[0016] Furthermore, a corrugated cover plate is added between adjacent air floats. The surface of the cover plate has alternating vent holes and sealing areas. The vent holes are located at the protruding positions on the side of the cover plate near the glass substrate. The sealing area is used to suppress turbulence, and the vent holes are used to discharge excess gas between the air float and the glass substrate.

[0017] By adopting the above technical solution, the vent holes and sealing areas of the corrugated cover plate are alternately distributed. The vent holes are used to discharge excess gas, and the sealing ring suppresses turbulence, thereby reducing the amount of glass deformation.

[0018] Furthermore, the frame is equipped with a detection component for detecting the distance between the glass substrate and the frame, the detection component comprising:

[0019] The distance detector is provided in four sets and is perpendicular to the upper surface of the frame. The four sets of distance detectors are respectively located at the distance values ​​between the midpoint of the four sides of the glass substrate and the upper surface of the frame.

[0020] The controller is mounted on the frame and electrically connected to four sets of distance detectors. The controller calculates the distance and deviation angle between the glass substrate and the frame based on the detection values ​​of the four sets of distance detectors. The controller transmits the distance and deviation angle between the glass substrate and the upper surface of the frame to the robot, which can then dynamically adjust the pick-up angle.

[0021] By adopting the above technical solution, four sets of distance detectors monitor the endpoints of the four sides of the glass substrate, and the controller calculates the posture deviation and transmits it to the robot, which facilitates dynamic compensation for the tilt of the glass substrate.

[0022] Furthermore, the frame is provided with two sets of second air curtain strips, each with multiple sets of fourth micro-holes. The second air curtain strips are perpendicular to the multiple sets of air float strips. The gas ejected from the fourth micro-holes on the second air curtain strips collides with the airflow escaping from the side of the glass substrate and forms an air curtain wall. The two sets of second air curtain strips respectively form air curtain walls with the airflow escaping from the opposite sides of the glass substrate and block the escape of the airflow from the side of the glass substrate. The spacing between adjacent fourth micro-holes on the second air curtain strips gradually decreases as they approach the first air curtain strip.

[0023] By adopting the above technical solution, the two sets of second air curtain strips can easily form air curtain walls on the opposite sides of the glass substrate. Finally, the double-sided air curtain walls and the upper air curtain wall form a three-sided sealed state, ultimately forming a fully enclosed airflow blockade. At the same time, due to the large tilt angle of the frame, the airflow inside the glass substrate moves upward with the tilted frame. The gradual hole spacing is used to match the airflow attenuation curve, reducing the amount of side airflow leakage.

[0024] Furthermore, the frame is equipped with a control assembly for controlling the opening and closing of the two sets of second air curtain strips, the control assembly including:

[0025] A position detector, which is mounted on the frame and used to detect the position of the glass substrate;

[0026] An on / off valve is installed on the frame and is used to control the opening or closing of the airflow in the second air curtain strip. The on / off valve is electrically connected to a position detector. After the position detector detects that the glass substrate has reached a designated position, it opens the air curtain strip through the on / off valve and forms an air curtain wall with the overflow airflow on the side of the glass substrate.

[0027] By adopting the above technical solution, the position detector is linked to the opening and closing valve, which triggers the side air curtain wall after the glass substrate is in place. Ultimately, the air curtain is opened only during the substrate picking stage, which improves the stability of the robot picking the substrate and reduces the required air supply. At the same time, the second air curtain bar is closed during transportation to avoid affecting the transportation of the glass substrate.

[0028] Furthermore, the base is provided with an adjustment mechanism for adjusting the position of the frame, the adjustment mechanism comprising:

[0029] A sliding plate, which is slidably disposed on a base in a direction close to or away from the upstream flow line;

[0030] An electric telescopic rod, which is mounted on a base and used to drive a sliding plate to slide;

[0031] A support frame is provided, which is mounted on a sliding plate. The frame is rotatably mounted on the support frame via a rotating shaft. An arc-shaped sliding groove is provided on the sliding plate, and the bottom of the frame is rotatably slidably mounted on the arc-shaped sliding groove.

[0032] A worm gear, which is mounted on a rotating shaft;

[0033] A worm gear, which is rotatably mounted on a support frame and meshes with a worm wheel, and the worm gear can drive the worm wheel to rotate and achieve self-locking;

[0034] A locking element is provided on the bottom of the frame and locks the bottom of the frame onto the sliding plate.

[0035] By adopting the above technical solution, the electric telescopic rod adjusts the front and rear positions of the frame, and then the worm gear and arc-shaped slide adjust the tilt angle and lock the adjusted frame in place. This enables rapid adjustment and docking with upstream equipment, and achieves micro-precision self-locking, reducing the probability of vibration deviation.

[0036] Furthermore, a conductive UPE layer is provided on the inclined conveying component, and the inclined conveying component is grounded to discharge residual charge on the conductive UPE layer.

[0037] By adopting the above technical solution, the PUE layer is grounded and conducts away the charge, reducing the amount of electrostatic charge on the glass substrate, thereby ensuring the stability of the air cushion supporting the glass substrate.

[0038] In summary, this application includes at least one of the following beneficial technical effects:

[0039] 1. By combining the vortex air cushion, the three-sided air curtain wall, and the cover plate to suppress turbulence, the triple technology solves the problem of air cushion dispersion in the 75°-80° working condition. At the same time, the non-contact air flotation transport between the air cushion and the frame enables the lossless transport of ultra-thin glass, maintaining the spatial advantage of large inclination angles while ensuring the stability of air flotation transport.

[0040] 2. By using multiple sets of distance detectors to detect the distance between the center of the four sides of the glass substrate and the substrate, the robot can accurately pick up the substrate, enabling dynamic adjustment of the robot to achieve the picking and ensuring the loading accuracy of the robot. Attached Figure Description

[0041] Figure 1 This is a schematic diagram of the inclined conveyor roller structure of Embodiment 1 of this application;

[0042] Figure 2 yes Figure 1 A cross-sectional schematic diagram of AA in the middle;

[0043] Figure 3 yes Figure 2 Enlarged diagram of section B in the middle;

[0044] Figure 4 yes Figure 2 Enlarged diagram of section C;

[0045] Figure 5This is a schematic diagram of the inclined conveyor roller structure of Embodiment 2 of this application;

[0046] Figure 6 yes Figure 5 Enlarged schematic diagram of section D in the middle;

[0047] Figure 7 This is a schematic diagram of the inclined conveyor roller structure of Embodiment 3 of this application, wherein the glass substrate is not shown;

[0048] Figure 8 yes Figure 7 Enlarged schematic diagram of section E in the middle.

[0049] Reference numerals: 1. Base; 2. Frame; 3. Adjustment mechanism; 31. Sliding plate; 311. Arc-shaped slide groove; 32. Electric telescopic rod; 33. Support frame; 34. Worm gear; 35. Worm; 36. Rotating shaft; 37. Locking element; 371. Abutment plate; 372. Tightening bolt; 4. Air float bar; 41. First micro-hole; 42. Inclined chamfered surface; 421. Second micro-hole; 422. Guide cavity; 5. Inclined conveying assembly; 51. Guide wheel; 52. Driven magnetic wheel; 53. Active magnetic wheel; 54. Main shaft; 6. First air curtain bar; 61. Third micro-hole; 7. Cover plate; 71. Vent hole; 72. Sealing area; 8. Second air curtain bar; 81. Fourth micro-hole. Detailed Implementation

[0050] The following is in conjunction with the appendix Figure 1-8 This application will be described in further detail.

[0051] This application discloses an inclined conveyor roller for ultrathin glass substrates.

[0052] Example 1

[0053] Reference Figure 1 and Figure 2 An ultra-thin glass substrate inclined conveyor roller includes a base 1, a frame 2, air floats 4, an air supply component, and an inclined conveying component 5. The frame 2 is set on the base 1 with an adjustable inclination angle of 75°-85°. Multiple sets of air floats 4 are equidistantly arranged on the upper surface of the frame 2. Multiple sets of first microholes 41 are arrayed on the upper surface of the air floats 4 to form an adjustable air cushion of 20-120um between them and the glass substrate. The air supply component is set on the frame 2 and is used to supply air to the multiple sets of air floats 4 and can control the air supply amount. The inclined conveying component 5 is set on the lower side of the frame 2 and provides rolling support for the lower side of the glass substrate and drives the glass substrate to move. An inclined chamfered surface 42 is provided between the upper sidewall and the upper surface of the air floats 4. Multiple sets of second microholes 421 perpendicular to the inclined chamfered surface 42 are arrayed on the inclined chamfered surface 42.

[0054] Reference Figure 1 , Figure 2 and Figure 3 The base 1 is equipped with an adjustment mechanism 3 for adjusting the position of the frame 2. The adjustment mechanism 3 includes a sliding plate 31, an electric telescopic rod 32, a support frame 33, a worm gear 34, and a worm 35. The sliding plate 31 is slidably mounted on the base 1 in the direction of approaching or moving away from the upstream production line. The fixed end of the electric telescopic rod 32 is fixedly mounted on the base 1, and the movable end of the electric telescopic rod 32 is connected to the sliding plate 31. The electric telescopic rod 32 is used to drive the sliding plate 31 to slide, thereby adjusting the distance between the sliding plate 31 and the upstream production line to facilitate docking with the upstream production line. The support frame 33 is fixedly mounted on the sliding plate 31. A rotating shaft 36 is rotatably mounted, and the frame 2 is rotatably mounted on the support frame 33 via the rotating shaft 36. An arc-shaped sliding groove 311 is provided on the sliding plate 31, and the bottom of the frame 2 is rotatably slidably mounted on the arc-shaped sliding groove 311. A worm gear 34 is fixedly mounted on the rotating shaft 36 and rotatably connected to the support frame 33. When the worm gear 34 rotates, it drives the rotating shaft 36 to rotate, thereby driving the frame 2 to rotate at a certain angle. A worm 35 is rotatably mounted on the support frame 33. The worm 35 and the worm gear 34 mesh with each other. The worm 35 can drive the worm gear 34 to rotate. The worm 35 and the worm gear 34 have a self-locking function, so that the worm gear 34 can only be driven to rotate by the worm 35.

[0055] Reference Figure 3 and Figure 4 The adjustment mechanism 3 also includes a locking element 37, which is installed on the bottom of the frame 2 and locks the bottom of the frame 2 onto the sliding plate 31. When the worm 35 rotates, it drives the worm wheel 34 to rotate, thereby driving the frame 2 to rotate. At the same time, the bottom of the frame 2 rotates and slides within the arc-shaped sliding groove 311. After the angle of the frame 2 is adjusted, it is locked by the locking element 37, thereby improving the stability of the angle of the frame 2. The locking element 37 includes an abutment plate 371 and a clamping bolt 372. The abutment plate 371 is slidably installed on the bottom of the frame 2 along the direction close to or away from the axis of the rotating shaft 36. The clamping bolt 372 is threaded on the frame 2 and rotatably connected to the abutment plate 371. When the abutment is tightened... When bolt 372 rotates in the forward direction, it pushes the abutment plate 371 against the bottom of the arc-shaped slide 311 and locks the frame 2 in place. When bolt 372 rotates in the reverse direction, it moves the abutment plate 371 away from the bottom of the arc-shaped slide 311, thereby releasing the locking of the abutment plate 371 against the frame 2, making it easier to adjust the angle of the frame 2 by rotating the worm gear 35. In this embodiment, limit blocks are fixedly installed on both sides of the arc-shaped slide 311 to limit the maximum rotation angle of the frame 2. A protrusion is provided in the middle of the arc-shaped slide 311, and the protrusion slides and contacts the bottom of the frame 2. The adjustment angle range of the frame 2 is between 75° and 85°, and the specific angle is adjusted according to the upstream production line.

[0056] Reference Figure 1 and Figure 3Multiple sets of air-bearing strips 4 are equidistantly arranged on the upper surface of the frame 2. Multiple sets of first micro-holes 41 are arrayed on the upper surface of the air-bearing strips 4. The gas ejected from the multiple sets of first micro-holes 41 forms an adjustable air cushion of 20-120um between the upper surface of the air-bearing strips 4 and the lower surface of the glass substrate. An inclined chamfered surface 42 is provided between the upper sidewall and the upper surface of the air-bearing strips 4. Multiple sets of second micro-holes 421 perpendicular to the inclined chamfered surface 42 are arrayed on the inclined chamfered surface 42. The width of the inclined chamfered surface 42 is 15%-20% of the total width of the air-bearing strips 4. The aperture of the second micro-holes 421 is 60%-80% of the aperture of the first micro-holes 41. The inclination angle of the inclined chamfered surface 42 relative to the upper surface of the air-bearing strips 4 is 15°-30°. The airflow that comes into contact with the second micro-holes 421 and the airflow ejected from the first micro-holes 41 form a vortex air cushion on the lower surface of the glass substrate.

[0057] Reference Figure 3 The air float 4 has two independent chambers inside. One set of chambers is connected to multiple sets of first micropores 41 to supply air to the multiple sets of first micropores 41. The other set of chambers is located inside the inclined chamfered surface 42. Its interior is a spiral-structured flow guide cavity 422. Multiple sets of second micropores 421 are distributed along the tangent of the flow guide cavity 422. The airflow ejected from the first micropores 41 and the second micropores 421 converges on the surface of the glass substrate to form a centripetal vortex flow. The vortex flow counteracts the downward force of gravity, thereby improving the stability of the air cushion supporting the glass substrate.

[0058] Reference Figure 3 The air supply assembly is mounted on the frame 2. The air supply assembly supplies air to multiple sets of air floats 4 and controls the air supply volume. The air supply assembly includes a first air supply component, an air delivery pipe, a control valve, and a first flow sensor. The first air supply component provides high-pressure gas. The air delivery pipe evenly discharges the high-pressure gas in the first air supply component into the internal chambers of the multiple sets of air floats 4. The control valve is mounted on the air delivery pipe and controls the gas flow rate in the air delivery pipe. The flow sensor is fixedly mounted on the air delivery pipe and monitors the flow rate in the air delivery pipe in real time. Ultimately, the air supply volume inside the air floats 4 is controlled, thereby controlling the thickness of the air cushion. In this embodiment, the two independent chambers inside the air floats 4 are individually supplied with air through two sets of first air supply components and air delivery pipes.

[0059] Reference Figure 4The tilting conveyor assembly 5 is located on the lower side of the frame 2 and provides rolling support to the lower sidewall of the glass substrate. The tilting conveyor assembly 5 is used to move the glass substrate. The tilting conveyor assembly 5 includes guide wheels 51, driven magnetic wheels 52, driving magnetic wheels 53, a main shaft 54, and a rotary motor. Multiple sets of guide wheels 51 are arranged in a straight line at equal intervals on the lower side of the frame 2. The axis of the guide wheels 51 is perpendicular to the upper surface of the frame 2, and part of the structure of the guide wheels 51 is located inside the frame 2. The driven magnetic wheels 52 are fixedly installed on the guide wheels 51 located on the frame 2. On one side inside the frame, the active magnetic wheel 53 is rotatably mounted on the frame 2, and the driven magnetic wheel 52 and the active magnetic wheel 53 are orthogonally arranged. The main shaft 54 ​​is rotatably mounted inside the frame 2 and is fixedly connected to multiple sets of active magnetic wheels 53. When the main shaft 54 ​​rotates, it simultaneously drives multiple sets of active magnetic wheels 53 to rotate synchronously. The rotary motor is fixedly mounted on the frame 2 and is used to drive the main shaft 54 ​​to rotate. The rotary motor drives the main shaft 54 ​​to rotate, which in turn drives multiple sets of active magnetic wheels 53 to rotate, and finally drives multiple sets of guide wheels 51 to rotate.

[0060] Reference Figure 4 When there is a large amount of static electricity on the glass substrate, the static electricity will cause the glass substrate to move closer to the frame 2, which will eventually affect the support effect of the air cushion on the glass substrate. In order to reduce the impact of static electricity on the transportation of the glass substrate, a conductive UPE layer is provided on the guide wheel 51, and then a conductive sheet is provided on the frame 2 to slide in contact with the UPE layer on the guide wheel 51. Finally, the static charge on the glass substrate is guided to the UPE layer, and then the charge is guided to the ground through the conductive sheet, thereby reducing the amount of static charge on the glass substrate.

[0061] The working principle of Embodiment 1 of this application is as follows:

[0062] The position and tilt angle of the frame 2 are adjusted by the worm gear 35 and the electric telescopic rod 32 to facilitate the reception of glass substrates discharged from the upstream production line. Then, the air supply assembly supplies air to the dual chambers of the air float 4. The main air path forms an air cushion through the first micro-hole 41, and the vortex air path is tangentially ejected from the second micro-hole 421 through the spiral guide cavity 422, forming a centripetal vortex flow on the lower surface of the glass substrate. Finally, the glass substrate is moved to the designated position on the frame 2 by multiple sets of guide wheels 51, which facilitates the subsequent robot picking up the substrate. This maintains the spatial advantage of the large tilt angle while ensuring the stability of the air float conveying.

[0063] Example 2

[0064] Reference Figure 5 and Figure 6The difference between this embodiment and embodiment 1 is that a first air curtain strip 6 is provided on the side of the frame 2 away from the guide wheel 51. Multiple sets of third micro holes 61 are arrayed on the first air curtain strip 6. The gas ejected from the multiple sets of third micro holes 61 collides with the gas escaping from the upper edge of the glass substrate and forms an air curtain wall that prevents the gas on the upper side of the glass substrate from escaping. The length of the first air curtain strip 6 is equal to the length of the air float strip 4 and the two ends are flush with each other, so that the first air curtain strip 6 can always form an air curtain wall with the upper side of the glass substrate when the glass substrate moves.

[0065] Reference Figure 6 An independent air supply component is provided on the first air curtain strip 6. A proportional valve and a second flow sensor for controlling the air flow are fixedly installed on the air supply pipe between the independent air supply component and the first air curtain strip 6. The proportional valve is used to control the exhaust volume of the first air curtain strip 6, and the second flow sensor is used to detect the exhaust volume of the first air curtain strip 6. At the same time, the air curtain wall and vortex flow formed between the first air curtain strip 6 and the upper edge of the glass substrate form an airlock effect on the glass surface to prevent the airflow from escaping, thereby improving the stability of the air cushion on the upper edge of the glass substrate. In this embodiment, the first air curtain strip 6 is inclined, and the third micro-hole 61 is perpendicular to the upper surface of the first air curtain strip 6, so that the inclination angle between the gas ejected from the third micro-hole 61 and the glass substrate is 15°-30° and tilted downward.

[0066] Reference Figure 6 A corrugated cover plate 7 is added between adjacent air floats 4. The surface of the cover plate 7 has alternating vent holes 71 and sealing areas 72. The vent holes 71 are located at the protruding position on the side of the cover plate 7 close to the glass substrate, and the sealing area 72 is located at the recessed position on the side away from the glass substrate. The sealing area is used to suppress turbulence, and the vent holes 71 are used to discharge excess gas between the air floats 4 and the glass substrate.

[0067] Reference Figure 5 The frame 2 is equipped with a detection component for detecting the distance between the glass substrate and the frame 2. The detection component includes a distance detector and a controller. There are four sets of distance detectors, and the detection direction of the four sets of distance detectors is perpendicular to the upper surface of the frame 2. The four sets of distance detectors are respectively located at the distance between the midpoint of the four sides of the glass substrate and the upper surface of the frame 2. The controller is fixedly installed on the frame 2 and is electrically connected to the four sets of distance detectors to transmit the distance values ​​detected by the four sets of distance detectors to the controller. The controller calculates the distance and deviation angle between the glass substrate and the frame 2 based on the detection values ​​of the four sets of distance detectors. The controller is electrically connected to the robot and transmits the distance and deviation angle between the glass substrate and the upper surface of the frame 2 to the robot to facilitate the robot's dynamic pick-up angle. In this embodiment, the controller is a PLC controller and the distance detector is a laser rangefinder sensor.

[0068] The working principle of Embodiment 2 of this application is as follows:

[0069] An air curtain is formed by the airflow ejected from the first air curtain strip 6 through the third micro-hole 61 and the airflow escaping from the upper edge of the glass substrate. The air curtain and the vortex flow are coupled to form an airlock effect. The cover plate 7 suppresses turbulence and promptly discharges excess gas, ultimately improving the uniformity and stability of the air cushion.

[0070] Example 3

[0071] Reference Figure 7 and Figure 8 The difference between this embodiment and embodiment 2 is that two sets of second air curtain strips 8 are provided on the frame 2. The second air curtain strips 8 are located between the frame 2 and the air float strips 4. The second air curtain strips 8 and the air float strips 4 are perpendicular to each other. Multiple sets of fourth micro holes 81 are opened on the second air curtain strips 8. The second air curtain strips 8 are perpendicular to the multiple sets of air float strips 4. The gas ejected from the fourth micro holes 81 on the second air curtain strips 8 collides with the airflow escaping on the side of the glass substrate and forms an air curtain wall. The two sets of second air curtain strips 8 respectively form air curtain walls with the airflow escaping on both sides opposite to the sliding direction of the glass substrate, thereby blocking the escape of the airflow on the side of the glass substrate. At the same time, the distance between adjacent fourth micro holes 81 on the second air curtain strips 8 gradually decreases as it approaches the first air curtain strip 6.

[0072] Reference Figure 8 The frame 2 is equipped with a control component for controlling the opening and closing of two sets of second air curtain strips 8. The control component includes a position detector and an opening / closing valve. The position detector is fixedly installed on the frame 2 and is used to detect the position of the glass substrate. The frame 2 is equipped with a second air supply component for supplying air to the two sets of second air curtain strips 8. The opening / closing valve is fixedly installed on the second air supply component and is used to control the air supply of the second air supply component to the second air curtain strips 8, thereby controlling the opening and closing of the second air curtain strips 8. In this embodiment, the two sets of air curtain strips correspond to one set of second air supply components, and the second air supply components supply air to the second air curtain strips 8 through pipes.

[0073] Reference Figure 7 and Figure 8 Specifically, when the position detector detects that the glass substrate has reached the pick-up position, the opening and closing valve is opened, causing the two sets of second air curtain bars 8 to open. This creates air curtain walls on the three sides of the glass substrate that are not in contact with the guide wheel 51, thereby preventing the airflow from escaping from the sides of the glass substrate and creating a stable air cushion between the glass substrate and the frame 2. After the glass substrate is picked up, the opening and closing valve is closed to facilitate the subsequent transportation of the glass substrate and prevent the two sets of second air curtain bars 8 from affecting the transportation of the glass substrate. In this embodiment, the air supply of the second air curtain bar 8 and the first air curtain bar 6 is adjustable. Before the conveyor roller is put into use, the air supply of the first air curtain bar 6 and the second air curtain bar 8 is adjusted so that the distance values ​​detected by the four sets of distance detectors are close to the same.

[0074] The working principle of Embodiment 3 of this application is as follows:

[0075] The guide wheel 51 drives the glass substrate to move. When the position detector detects that the glass substrate has reached the designated position, the opening and closing valve opens, causing the two sets of second air curtain strips 8 to open. The fourth micro-holes 81 on the two sets of second air curtain strips 8 gradually spray laminar gas, which finally works with the first air curtain strip 6 and the cover plate 7 to form an airlock for the air cushion, improving the stability of the air cushion pressure balance, thereby facilitating the robot to pick up the glass substrate with greater accuracy.

[0076] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. An inclined conveyor roller conveyor for ultra-thin glass substrates, characterized in that: The assembly includes a base (1), a frame (2), air-bearing strips (4), an air supply assembly, and an inclined conveying assembly (5). The frame (2) is mounted on the base (1) at an adjustable angle of 75°-85°. Multiple sets of air-bearing strips (4) are equidistantly arranged on the upper surface of the frame (2). Multiple sets of first micropores (41) are arrayed on the upper surface of the air-bearing strips (4) to form an adjustable air cushion of 20-120µm between them and the glass substrate. The air supply assembly is mounted on the frame (2) and is used to supply air to the multiple sets of air-bearing strips (4) and can control the air supply volume. The inclined conveying assembly (5) is located below the frame (2). The glass substrate is supported by a rolling mechanism on the lower side and moved by the glass substrate. An inclined chamfered surface (42) is provided between the upper sidewall and the upper surface of the air float (4). Multiple sets of second microholes (421) perpendicular to the inclined chamfered surface (42) are arranged on the inclined chamfered surface (42). A first air curtain strip (6) is provided on the side of the frame (2) away from the guide wheel (51). Multiple sets of third microholes (61) are arranged on the first air curtain strip (6). The gas ejected from the multiple sets of third microholes (61) collides with the gas escaping from the upper edge of the glass substrate and forms an air curtain wall that prevents the gas on the upper side of the glass substrate from escaping.

2. The inclined conveyor roller conveyor for ultra-thin glass substrates according to claim 1, characterized in that: The width of the inclined chamfered surface (42) is 15%-20% of the width of the air float (4), the aperture of the second microhole (421) is 60%-80% of the aperture of the first microhole (41), the inclination angle of the inclined chamfered surface (42) is 15°-30°, and the airflow ejected from the second microhole (421) and the airflow ejected from the first microhole (41) form a vortex air cushion on the surface of the glass substrate.

3. The inclined conveyor roller conveyor for ultra-thin glass substrates according to claim 2, characterized in that: The inclined chamfered surface (42) of the air float (4) is provided with a spiral flow guide cavity (422). Multiple sets of second micropores (421) are distributed along the tangential direction of the flow guide cavity (422). The airflow of the first micropore (41) and the second micropore (421) converges on the surface of the glass substrate to form a centripetal vortex flow. The air curtain wall formed between the first air curtain strip (6) and the upper edge of the glass substrate and the vortex flow form an airlock effect on the glass surface to prevent the airflow from escaping.

4. The inclined conveyor roller conveyor for ultra-thin glass substrates according to claim 1, characterized in that: An independent air supply component is provided on the first air curtain strip (6). A proportional valve and a second flow sensor for controlling the air flow are provided on the air supply pipe between the independent air supply component and the first air curtain strip (6). The length of the first air curtain strip (6) is equal to the length of the air float strip (4) and the two ends are flush with each other.

5. The inclined conveyor roller conveyor for ultra-thin glass substrates according to claim 4, characterized in that: A corrugated cover plate (7) is added between adjacent air floats (4). The surface of the cover plate (7) has alternating vent holes (71) and sealing areas (72). The vent holes (71) are located at the protruding position of the cover plate (7) near the glass substrate. The sealing area (72) is used to suppress turbulence. The vent holes (71) are used to discharge excess gas between the air floats (4) and the glass substrate.

6. The inclined conveyor roller conveyor for ultra-thin glass substrates according to claim 5, characterized in that: The frame (2) is provided with a detection component for detecting the distance between the glass substrate and the frame (2), the detection component including: Distance detectors, the distance detectors are provided in four groups and are perpendicular to the upper surface of the frame (2), the four groups of distance detectors are respectively located at the distance values ​​between the midpoint of the four sides of the glass substrate and the upper surface of the frame (2); The controller is mounted on the frame (2) and electrically connected to four sets of distance detectors. The controller calculates the distance and deviation angle between the glass substrate and the frame (2) based on the detection values ​​of the four sets of distance detectors. The controller transmits the distance and deviation angle between the glass substrate and the upper surface of the frame (2) to the robot and facilitates the robot to dynamically adjust the pick-up angle.

7. The inclined conveyor roller conveyor for ultra-thin glass substrates according to claim 5, characterized in that: The frame (2) is provided with two sets of second air curtain strips (8). The second air curtain strips (8) have multiple sets of fourth micro holes (81). The second air curtain strips (8) are perpendicular to multiple sets of air float strips (4). The gas ejected from the fourth micro holes (81) on the second air curtain strips (8) collides with the airflow escaping from the side of the glass substrate and forms an air curtain wall. The two sets of second air curtain strips (8) form air curtain walls with the airflow escaping from the opposite sides of the glass substrate and block the airflow from the side of the glass substrate. The spacing between adjacent fourth micro holes (81) on the second air curtain strips (8) gradually decreases as they approach the first air curtain strip (6).

8. The inclined conveyor roller conveyor for ultra-thin glass substrates according to claim 7, characterized in that: The frame (2) is equipped with a control assembly for controlling the opening and closing of two sets of second air curtain strips (8), the control assembly including: A position detector is mounted on the frame (2) and is used to detect the position of the glass substrate; An opening and closing valve is installed on the frame (2) and is used to control the opening or closing of the airflow in the second air curtain strip (8). The opening and closing valve is electrically connected to a position detector. After the position detector detects that the glass substrate has reached the designated position, it opens the air curtain strip through the opening and closing valve and forms an air curtain wall with the overflow airflow on the side of the glass substrate.

9. The inclined conveyor roller conveyor for ultra-thin glass substrates according to claim 1, characterized in that: The base (1) is provided with an adjustment mechanism (3) for adjusting the position of the frame (2), the adjustment mechanism (3) comprising: A sliding plate (31) is slidably disposed on a base (1) in a direction close to or away from the upstream flow line; An electric telescopic rod (32) is mounted on a base (1) and is used to drive the sliding plate (31) to slide. A support frame (33) is mounted on a sliding plate (31). The frame (2) is rotatably mounted on the support frame (33) via a rotating shaft (36). An arc-shaped sliding groove (311) is provided on the sliding plate (31). The bottom of the frame (2) is rotatably mounted on the arc-shaped sliding groove (311). A worm gear (34) is mounted on a rotating shaft (36); The worm (35) is rotatably mounted on the support frame (33) and meshes with the worm wheel (34). The worm (35) can drive the worm wheel (34) to rotate and achieve self-locking. Locking element (37) is provided on the bottom of the frame (2) and locks the bottom of the frame (2) on the sliding plate (31).

10. The inclined conveyor roller conveyor for ultra-thin glass substrates according to claim 1, characterized in that: The inclined conveying component (5) is provided with a conductive UPE layer, and the inclined conveying component (5) is grounded and the residual charge on the conductive UPE layer is discharged.

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