Asymmetric chip pick-and-place operation trajectory segmentation speed planning method, device and storage medium

Abstract

The application discloses a kind of asymmetric chip pick-and-place operation trajectory segmentation speed planning methods, comprising the following steps: according to spatial position coordinates, asymmetric chip pick-and-place operation door type trajectory is constructed using Lame curve;Asymmetric chip pick-and-place operation door type trajectory is divided into motion section;Velocity planning is carried out using quintic polynomial curve, and uniform velocity planning is used for horizontal motion section, to meet the velocity and acceleration continuity between each section;According to the maximum acceleration parameter of pick-and-place mechanism and the motion distance of motion section, the motion time corresponding to the acceleration limit is obtained by quintic polynomial curve;The horizontal motion time of horizontal motion section uniform motion is obtained, and then the total running time of asymmetric chip pick-and-place operation is obtained.The asymmetric chip pick-and-place operation trajectory segmentation speed planning method, equipment and storage medium disclosed by the application can comprehensively consider the asymmetric characteristics of pick-and-place operation trajectory, the uniform speed section of speed curve and the motor performance limitation.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of operation trajectory planning, in particular to a non-symmetrical chip pick-and-place operation trajectory segmented speed planning method, device and storage medium. BACKGROUND

[0002] With the rapid development of microelectronic manufacturing technology, chip pick-and-place operation has become one of the important links to realize automated production and efficient operation. The efficiency and accuracy of pick-and-place operation directly affect the production rhythm and product yield, and the core is to ensure that the actuator can efficiently and accurately complete the picking and placing of chips through reasonable trajectory and speed planning. In actual production, due to the limitations of chip size, equipment layout and process requirements, the picking point and placing point are usually asymmetric. At the same time, the actuator (such as a servo motor, a linear motor) is also limited by the motor performance (such as the maximum acceleration). This multi-dimensional asymmetry and constraint makes efficient trajectory planning face many challenges.

[0003] The current overall trajectory planning method does not make full use of the performance of X, Y and Z axis motors. If the overall maximum acceleration is set too low, the motor performance cannot be fully utilized; while setting too high, it may exceed the motor performance constraint, resulting in motor overload and even burning. In contrast, the segmented trajectory planning method can more effectively utilize the motor performance on the basis of meeting the performance constraints of X, Y and Z axis motors. However, different speed planning methods still have the following problems. Polynomial speed planning: due to the lack of uniform speed segment, the acceleration and deceleration load is large, resulting in insufficient utilization of maximum speed and increasing equipment wear and energy consumption. S-shaped speed planning: although the transition is smooth, the transition time is prolonged, reducing efficiency, and the initial and final accelerations are 0.

[0004] Therefore, it is urgent to design a segmented speed planning method for non-symmetrical pick-and-place operation. This method needs to meet the motor performance constraints while fully utilizing the performance of X, Y and Z axis motors, and introduces a uniform speed segment to improve the efficiency, accuracy and stability of pick-and-place operation, while reducing equipment wear and extending service life. SUMMARY

[0005] The present application overcomes the shortcomings of the prior art and provides a non-symmetrical chip pick-and-place operation trajectory segmented speed planning method, device and storage medium, which can comprehensively consider the asymmetric characteristics of pick-and-place operation trajectory, the uniform speed segment of speed curve and the motor performance constraints.

[0006] To achieve the above purpose, the technical scheme adopted by the present application is as follows: a non-symmetrical chip pick-and-place operation trajectory segmented speed planning method, comprising the following steps:

[0007] Step 1: according to the spatial position coordinates of the chip pickup point, the chip placement point and the obstacle, an asymmetric chip pick-and-place operation door-shaped trajectory is constructed by using a Lame curve;

[0008] Step 2: the generated asymmetric chip pick-and-place operation door-shaped trajectory is divided into a vertical upward movement segment L1, a Lame curve segment L2, a horizontal movement segment L3, a Lame curve segment L4 and a vertical downward movement segment L5;

[0009] Step 3: the vertical upward movement segment L1, the Lame curve segment L2, the Lame curve segment L4 and the vertical downward movement segment L5 are all subjected to velocity planning by using a quintic polynomial curve, and the horizontal movement segment L3 is subjected to uniform velocity planning;

[0010] Step 4: according to the maximum acceleration parameters of the X-axis driving mechanism, the Y-axis driving mechanism and the Z-axis driving mechanism of the pick-and-place mechanism and the movement distances of the vertical upward movement segment L1, the Lame curve segment L2, the Lame curve segment L4 and the vertical downward movement segment L5, the corresponding vertical upward movement time t1, Lame curve movement time t2, Lame curve movement time t4 and vertical downward movement time t5 that satisfy the acceleration limit are obtained by using a quintic polynomial curve;

[0011] Step 5: according to the obtained vertical upward movement time t1, Lame curve movement time t2, Lame curve movement time t4 and vertical downward movement time t5, the horizontal movement time t3 of the horizontal movement segment L3 is obtained, and the total running time t of the asymmetric chip pick-and-place operation is obtained all .

[0012] In one preferred embodiment of the application, in step 1, the asymmetric chip pick-and-place operation door-shaped trajectory is constructed by using a Lame curve, comprising the following steps:

[0013] By replacing the right angle in the door-shaped trajectory established by the spatial position coordinates of the chip pickup point, the chip placement point and the obstacle with a Lame curve, a Lame curve transition asymmetric door-shaped trajectory is obtained, and the Lame curve transition asymmetric door-shaped trajectory is taken as the asymmetric chip pick-and-place operation door-shaped trajectory.

[0014] In one preferred embodiment of the application, in step 2, the obtained asymmetric chip pick-and-place operation door-shaped trajectory is segmented and processed to obtain a vertical upward movement segment L1, a Lame curve segment L2 that moves upward to horizontal movement, a horizontal movement segment L3, a Lame curve segment L4 that moves horizontally to downward movement and a vertical downward movement segment L5;

[0015] The chip pickup point is A, the connection point of the vertical upward movement segment L1 and the Lemniscate segment L2 is B, the connection point of the Lemniscate segment L2 and the horizontal movement segment L3 is C, the connection point of the horizontal movement segment L3 and the horizontal to downward movement Lemniscate segment L4 is D, the connection point of the horizontal to downward movement Lemniscate segment L4 and the vertical downward movement segment L5 is E, and the chip placement point is F.

[0016] The vertical upward movement segment L1 = |AB| and the vertical downward movement segment L5 = |EF|, the horizontal movement segment L3 = |CD|, the length of the Lemniscate segment L2 and the Lemniscate segment L4 is the arc length of the Lemniscate, and the expression of the Lemniscate is as follows: ; wherein u and v represent the horizontal axis and the vertical axis of the UOV plane coordinate system respectively, d > 0 is the length of the major axis, e > 0 is the length of the minor axis, and m is a Lemniscate coefficient.

[0017] In a preferred embodiment of the present application, the coordinates of the A point are , the coordinates of the B point are , the coordinates of the C point are , the coordinates of the D point are , the coordinates of the E point are , the coordinates of the F point are ; the vertical upward movement segment and the vertical downward movement segment , and the horizontal movement segment .

[0018] The minor axis of the Lemniscate segment L2 is , the major axis is ; the minor axis of the Lemniscate segment L4 is , and the major axis is .

[0019] The length of the Lemniscate segment L2 and the Lemniscate segment L4 is obtained according to the Lemniscate arc length formula l by taking the major axis and the minor axis parameters of the Lemniscate segment L2 and the Lemniscate segment L4 into the Lemniscate arc length formula l. , .

[0020] In a preferred embodiment of the present application, when m = 3, the length of the Lemniscate segment L2 and the Lemniscate segment L4 is obtained according to the Lemniscate arc length formula.

[0021] The Lemniscate arc length formula is as follows: ; wherein θ represents an angle, and ; d is the length of the major axis, and e is the length of the minor axis.

[0022] The total movement distance of the asymmetric chip pickup and placement operation trajectory is L = L1 + L2 + L3 + L4 + L5.

[0023] In one preferred embodiment of the present application, the quintic polynomial curve is: ;

[0024] The initial and final conditions of position, velocity and acceleration of the quintic polynomial curve are set; the expressions of velocity V(t) and acceleration A(t) are:

[0025] ; ;

[0026] The boundary conditions are: ;

[0027] wherein q0 is the initial position, q1 is the final position; v0 is the initial velocity, v1 is the final velocity; a0 is the initial acceleration, a1 is the final acceleration;

[0028] According to the boundary conditions, the coefficients c0, c1, c2, c3, c4 and c5 are solved;

[0029] ;

[0030] ;

[0031] ;

[0032] ;

[0033] wherein h=q1-q0 represents the motion length, a0 represents the initial acceleration, a1 represents the final acceleration, v0 represents the initial velocity, and v1 represents the final velocity;

[0034] According to the acceleration formula: ;

[0035] After substituting the expressions of c2, c3, c4 and c5 into the acceleration formula, the acceleration is a function of time variable t and total motion time T, and the minimum time T satisfying the maximum acceleration limit needs to be found; ;

[0036] The derivative of the acceleration formula is taken: ;

[0037] The expression of t is obtained, and the expression of t is substituted into the acceleration formula A(t), so that the shortest time T corresponding to the maximum acceleration A max is solved. min .

[0038] In one preferred embodiment of the present application, when the chip pick-and-place operation is moving in the vertical upward motion segment L1: ;

[0039] wherein, is the displacement of the starting point of segment L1, is the displacement of the end point of segment L1; is the starting speed of L1 segment, is the terminal velocity of L1 segment; is the acceleration at the starting point of segment L1, is the acceleration at the end of the L1 segment; it is continuously adjusted according to the acceleration limit Settings;

[0040] According to the boundary conditions of the vertical upward motion segment L1, find the coefficients of the fifth-order polynomial of the vertical upward motion segment L1 ;

[0041] ;

[0042] ;

[0043] ;

[0044] ;

[0045] in, is the running time of the vertical upward motion segment L1;

[0046] The fifth-order polynomial coefficient of the vertical upward motion segment L1 Substituting into the acceleration formula, the acceleration is t and function, find the minimum and running time that meet the maximum acceleration limit of the vertical upward motion segment L1 ; ;

[0047] Derivative of the acceleration formula: ;

[0048] Solve the expression for t: ;

[0049] Substitute the expression for t into the acceleration formula , find the maximum acceleration of the vertical upward motion segment L1 The minimum running time corresponding to the restriction ;

[0050] And / or, when the chip pick and place operation moves upward to the horizontal Lame curve segment L2:

[0051] ;

[0052] ;

[0053] in, is the displacement of the starting point of segment L2, is the displacement of the end point of segment L2; is the starting speed of L2 segment, is the terminal velocity of L2 segment; is the acceleration at the starting point of segment L2, is the acceleration at the end of segment L2;

[0054] According to the boundary conditions of the Lame curve segment L2, the coefficients of the fifth-order polynomial of the Lame curve segment L2 can be obtained: ;

[0055] ;

[0056] ;

[0057] ;

[0058] ;

[0059] in, is the running time of the L2 segment;

[0060] When the chip pick and place operation moves in the horizontal section L3, the X and Y axes move at the maximum combined speed. In the L3 segment, the uniform motion is achieved, and the displacement from the horizontal segment , we can get the running time of L3 segment ;

[0061] And / or, when the chip pick and place operation is in the horizontal to downward pull curve segment L4: ; ;

[0062] in, is the displacement of the starting point of the Lamé curve segment L4, is the displacement of the end point of Lamé curve segment L4; is the starting speed of Lamé curve segment L4, is the terminal speed of the Lamé curve segment L4; is the acceleration at the starting point of the Lamé curve segment L4, is the acceleration at the end of the Lamé curve segment L4, It is set to continuously adjust according to the acceleration limit;

[0063] According to the boundary conditions of the Lame curve segment L4, the coefficients of the fifth-order polynomial of the Lame curve segment L4 can be obtained: ;

[0064] ;

[0065] ;

[0066] ;

[0067] ;

[0068] wherein is the running time of the L4 segment of the Lame curve;

[0069] and / or, when the chip pick-and-place operation is moving in the vertical downward movement segment L5:

[0070] ;

[0071] ;

[0072] wherein, is the initial displacement of the vertical downward movement segment L5, is the final displacement of L5; is the initial velocity of L5, is the final velocity of L5; is the initial acceleration of the vertical downward movement segment L5, is the final acceleration of the vertical downward movement segment L5;

[0073] According to the boundary conditions of the vertical downward movement segment L5, the quintic polynomial coefficients of the vertical downward movement segment L5 can be solved ;

[0074] ;

[0075] ;

[0076] ;

[0077] ;

[0078] wherein, is the running time of the vertical downward movement segment L5.

[0079] In a preferred embodiment of the present application, in step 4, the horizontal movement segment L3 moves at the maximum speed at a constant speed, the Z-axis height is constant, so the Z-axis speed is 0, and the X-axis and Y-axis move at a combined speed at a constant speed, obtaining ;

[0080] The total running time t all is , obtaining the asymmetric chip pick-and-place operation trajectory based on the segmented speed planning.

[0081] In one preferred embodiment of the present application, a non-symmetrical chip pick-and-place operation trajectory segment speed planning device comprises:

[0082] a memory;

[0083] a processor;

[0084] and

[0085] a computer program;

[0086] wherein the computer program is stored in the memory and is configured to be executed by the processor to implement a non-symmetrical chip pick-and-place operation trajectory segment speed planning method.

[0087] In one preferred embodiment of the present application, a storage medium has a computer program stored thereon, which, when executed by a processor, implements a non-symmetrical chip pick-and-place operation trajectory segment speed planning method.

[0088] The present application solves the defects in the technical background, and has the beneficial technical effects of:

[0089] The non-symmetrical chip pick-and-place operation trajectory segment speed planning method, device, and storage medium of the present application solve the problems of trajectory asymmetry, lack of uniform speed segment, and motor performance limitation through reasonable segment speed planning, significantly improve the efficiency of pick-and-place operation, reduce the vibration and impact of the mechanism, fully utilize the maximum speed, and reduce equipment wear. The method provides strong technical support for efficient automated production in the microelectronic manufacturing field. BRIEF DESCRIPTION OF DRAWINGS

[0090] The present application will be further described below in conjunction with the drawings and examples.

[0091] Figure 1 is a non-symmetrical chip pick-and-place operation door-type trajectory diagram of the preferred embodiment of the present application;

[0092] Figure 2 is a non-symmetrical chip pick-and-place operation door-type trajectory path segment diagram of the preferred embodiment of the present application;

[0093] Figure 3 is a non-symmetrical chip pick-and-place operation trajectory diagram based on segment speed planning of the preferred embodiment of the present application;

[0094] Figure 4 is a non-symmetrical chip pick-and-place operation end effector motion parameter curve diagram of the preferred embodiment of the present application;

[0095] Figure 5 is a non-symmetrical chip pick-and-place operation XYZ axis speed curve diagram of the preferred embodiment of the present application;

[0096] Figure 6 is a schematic diagram of XYZ axis acceleration curve of asymmetric chip pick-and-place operation, which is a preferred example of the present application;

[0097] Figure 7 is a schematic diagram of flow, which is a preferred example of the present application. DETAILED DESCRIPTION

[0098] The present application will now be described in further detail with reference to the drawings and embodiments, which are shown by way of illustration in the accompanying drawings, and thus are schematic and not drawn to scale. In the drawings, the

[0099] It should be noted that if the embodiments of the present application involve directional indications (such as up, down, bottom, top, etc.), the directional indications are only used to explain the relative positional relationship, movement condition, etc. between components in a certain posture, and if the certain posture changes, the directional indications also change accordingly. The terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features with "first", "second" can explicitly or implicitly include one or more of the features. Unless otherwise specified and limited, the terms "set", "connected", "connected" should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the communication between two elements inside. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0100] Embodiment one, as shown in Figure 1 , Figure 2 A method for segmenting speed planning of asymmetric chip pick-and-place operation trajectory, comprising the following steps:

[0101] Step 1: According to the spatial position coordinates of the chip pick-up point, the chip placement point and the obstacle, a Lame curve is used to construct a non-symmetrical chip pick-and-place operation door-shaped trajectory.

[0102] Specifically, the Lame curve is used to construct the non-symmetrical chip pick-and-place operation door-shaped trajectory, comprising the following steps: the right angle in the door-shaped trajectory established by the spatial position coordinates of the chip pick-up point, the chip placement point and the obstacle is replaced by a Lame curve to obtain a Lame curve transition non-symmetrical door-shaped trajectory, and the Lame curve transition non-symmetrical door-shaped trajectory is used as the non-symmetrical chip pick-and-place operation door-shaped trajectory. Further, as shown in Figure 1As shown, according to the information such as the pickup point of the chip, the placement point position of the chip and the obstacle height in the actual chip manufacturing, the door type pick-and-place operation trajectory is constructed. Since the right angle of the door type trajectory in the prior art will cause sharp speed and direction changes, increase mechanical vibration, precision decline, equipment wear and speed limitation, and affect the stability and efficiency of the pick-and-place operation. Using the Lamé curve instead of the right angle can improve the pick-and-place operation efficiency and trajectory smoothness, and reduce the impact and residual vibration generated in the high-speed motion process.

[0103] Step 2: The generated asymmetric chip pick-and-place operation door type trajectory is divided into a vertical upward motion segment L1, a Lamé curve segment L2, a horizontal motion segment L3, a Lamé curve segment L4 and a vertical downward motion segment L5. As shown in Figure 2 The obtained Lamé curve transition asymmetric door type trajectory is segmented.

[0104] In step 2, the obtained asymmetric chip pick-and-place operation door type trajectory is segmented to obtain a vertical upward motion segment L1, a Lamé curve segment L2 from upward to horizontal motion, a horizontal motion segment L3, a Lamé curve segment L4 from horizontal to downward motion and a vertical downward motion segment L5.

[0105] Let the chip pickup point be A, the connection point of the vertical upward motion segment L1 and the Lamé curve segment L2 be B, the connection point of the Lamé curve segment L2 and the horizontal motion segment L3 be C, the connection point of the horizontal motion segment L3 and the Lamé curve segment L4 from horizontal to downward motion be D, the connection point of the Lamé curve segment L4 from horizontal to downward motion and the vertical downward motion segment L5 be E, and the chip placement point be F. The vertical upward motion segment L1 = |AB| and the vertical downward motion segment L5 = |EF|, the horizontal motion segment L3 = |CD|, and the lengths of the Lamé curve segment L2 and the Lamé curve segment L4 are the arc lengths of the Lamé curve. The expression of the Lamé curve is as follows: ;

[0106] Wherein, d>0 is the length of the major axis, e>0 is the length of the minor axis, and m∈{1, 2, 3...} is the coefficient of the Lamé curve.

[0107] When m=3, the lengths of the Lamé curve segment L2 and the Lamé curve segment L4 are obtained according to the Lamé curve arc length formula; the Lamé curve arc length formula is as follows:

[0108] Wherein, θ represents the angle, and d is the length of the major axis, and e is the length of the minor axis;

[0109] The total motion distance of the asymmetric chip pick-and-place operation trajectory is L=L1+L2+L3+L4+L5.

[0110] Step 3: vertical upward movement segment L1, Lamé curve segment L2, Lamé curve segment L4, vertical downward movement segment L5 are all velocity planned by using quintic polynomial curves, and the horizontal movement segment L3 is uniformly velocity planned, so as to meet the continuity of velocity and acceleration between segments.

[0111] Specifically, in step 3, the quintic polynomial curve is: ;

[0112] The first and last conditions of position, velocity and acceleration of the quintic polynomial curve are set;

[0113] The expression of the velocity V(t) and the acceleration A(t) is: ; ;

[0114] The boundary conditions are: ;

[0115] Wherein, q0 is the starting position, q1 is the ending position; v0 is the starting velocity, v1 is the ending velocity; a0 is the starting acceleration, a1 is the ending acceleration;

[0116] According to the boundary conditions, the coefficients c0, c1, c2, c3, c4 and c5 are solved;

[0117] ;

[0118] ;

[0119] ;

[0120] ;

[0121] Wherein, h=q1-q0;

[0122] According to the acceleration formula: ;

[0123] Substitute the expressions of c2, c3, c4 and c5 into the acceleration formula, and the acceleration is a function of t and T, and the minimum time T satisfying the maximum acceleration limit needs to be found; ;

[0124] Derive the acceleration formula: ;

[0125] The expression of t is obtained, and the expression of t is brought into the acceleration formula A(t), so as to solve the shortest time T corresponding to the maximum acceleration A max . min .

[0126] Step 4: According to the maximum acceleration parameters of the X-axis driving mechanism, the Y-axis driving mechanism and the Z-axis driving mechanism of the pick-and-place mechanism and the motion distances of the vertical upward motion segment L1, the Lame curve segment L2, the Lame curve segment L4 and the vertical downward motion segment L5, the vertical upward motion time t1, the Lame curve motion time t2, the Lame curve motion time t4 and the vertical downward motion time t5 corresponding to the acceleration limit are obtained through a quintic polynomial curve.

[0127] Step 5: According to the obtained vertical upward motion time t1, the Lame curve motion time t2, the Lame curve motion time t4 and the vertical downward motion time t5, the horizontal motion time of the horizontal motion segment L3 is obtained , and the total running time of the asymmetric chip pick-and-place operation is obtained .

[0128] In an embodiment, as shown in Figures 1-6 , a trajectory segmentation speed planning method for an asymmetric chip pick-and-place operation includes the following steps:

[0129] Step 1: According to the spatial position coordinates of the chip pick-up point, the chip placement point and the obstacle, a Lame curve is used to construct a door-shaped trajectory for the asymmetric chip pick-and-place operation.

[0130] Specifically, in step 1, the Lame curve is used to construct the door-shaped trajectory for the asymmetric chip pick-and-place operation, including the following steps: the right angles in the door-shaped trajectory established by the spatial position coordinates of the chip pick-up point, the chip placement point and the obstacle are replaced by a Lame curve to obtain a Lame curve transition asymmetric door-shaped trajectory, and the Lame curve transition asymmetric door-shaped trajectory is taken as the door-shaped trajectory for the asymmetric chip pick-and-place operation.

[0131] Step 2: The generated door-shaped trajectory for the asymmetric chip pick-and-place operation is divided into a vertical upward motion segment L1, a Lame curve segment L2, a horizontal motion segment L3, a Lame curve segment L4 and a vertical downward motion segment L5.

[0132] Specifically, in step 2, the obtained door-shaped trajectory for the asymmetric chip pick-and-place operation is segmented to obtain a vertical upward motion segment L1, a Lame curve segment L2 for upward to horizontal motion, a horizontal motion segment L3, a Lame curve segment L4 for horizontal to downward motion and a vertical downward motion segment L5; the chip pick-up point is denoted as A, the connecting point of the vertical upward motion segment L1 and the Lame curve segment L2 is denoted as B, the connecting point of the Lame curve segment L2 and the horizontal motion segment L3 is denoted as C, the connecting point of the horizontal motion segment L3 and the Lame curve segment L4 for horizontal to downward motion is denoted as D, the connecting point of the Lame curve segment L4 for horizontal to downward motion and the vertical downward motion segment L5 is denoted as E, and the chip placement point is denoted as F. The coordinates of the A point are , the coordinates of the B point are , the coordinates of the C point are , and the coordinates of the D point are , the coordinates of point E are , the coordinates of point F are ; vertical upward movement segment and vertical downward movement segment , horizontal movement segment ; Lame curve segment L2 and Lame curve segment L4 are Lame curve arc lengths, and the Lame curve expression is as follows: ; wherein d>0 is the length of the major axis, e>0 is the length of the minor axis, and m is a Lame curve coefficient.

[0133] When m=3, the lengths of the Lame curve segment L2 and the Lame curve segment L4 are obtained according to the Lame curve arc length formula; the Lame curve arc length formula is as follows:

[0134] ; wherein θ represents an angle, and , d is the length of the major axis, and e is the length of the minor axis;

[0135] the minor axis of the Lame curve segment L2 , the major axis ; the minor axis of the Lame curve segment L4 , the major axis ; the major and minor axis parameters of the Lame curve segment L2 and the Lame curve segment L4 are brought into the Lame curve arc length formula l, and then the Lame curve segment length , . The total movement distance of the asymmetric chip pick-and-place operation trajectory is L=L1+L2+L3+L4+L5.

[0136] Step 3: the vertical upward movement segment L1, the Lame curve segment L2, the Lame curve segment L4, and the vertical downward movement segment L5 all use quintic polynomial curves for velocity planning, and the horizontal movement segment L3 uses uniform velocity planning, so as to satisfy the continuity of the velocity and acceleration between the segments.

[0137] Specifically, in step 3, the vertical upward movement segment L1, the vertical downward movement segment L5, and the Lame curve segment L2 and the Lame curve segment L4 use quintic polynomial curves for velocity planning, and the quintic polynomial curve is as follows: ;

[0138] The first and last conditions of the position, velocity, and acceleration of the quintic polynomial curve are set;

[0139] The expression of the velocity V(t) and the acceleration A(t) is as follows: ; ;

[0140] The boundary conditions are as follows: ; ;

[0141] wherein q0 is a start position, q1 is an end position; v0 is a start speed, v1 is an end speed; a0 is a start acceleration, a1 is an end acceleration;

[0142] According to the boundary conditions, the coefficients c0, c1, c2, c3, c4 and c5 are solved;

[0143] ;

[0144] ;

[0145] ;

[0146] ;

[0147] wherein h = q1 - q0;

[0148] According to the acceleration formula: ;

[0149] Substitute the expressions of c2, c3, c4 and c5 into the acceleration formula, which is a function of t and T, and the minimum time T satisfying the maximum acceleration limit needs to be found; ;

[0150] Derive the acceleration formula: ;

[0151] Obtain the expression of t, and substitute the expression of t into the acceleration formula A(t), so as to solve the shortest time T corresponding to the maximum acceleration A max . min .

[0152] Step 4: According to the maximum acceleration parameters of the X-axis driving mechanism, the Y-axis driving mechanism and the Z-axis driving mechanism of the pick-and-place mechanism and the motion distances of the vertical upward motion segment L1, the Lame curve segment L2, the Lame curve segment L4 and the vertical downward motion segment L5, the vertical upward motion time t1, the Lame curve motion time t2, the Lame curve motion time t4 and the vertical downward motion time t5 corresponding to the acceleration limit are obtained through a quintic polynomial curve.

[0153] Specifically, in step 4, the horizontal motion segment L3 moves at a maximum speed uniformly, the Z-axis height is constant, so the Z-axis speed is 0, and the X-axis and the Y-axis move at a combined speed uniformly, obtain ; the total running time t all is , and the asymmetric chip pick-and-place operation trajectory based on the segmented speed planning is obtained.

[0154] Further, when the chip pick-and-place operation is moving in the vertical upward motion segment L1: ; ;

[0155] wherein, is the L1 segment start displacement, is the L1 segment end displacement; is the L1 segment start velocity, is the L1 segment end velocity; is the L1 segment start acceleration, is the L1 segment end acceleration; according to the acceleration limit constantly adjust the settings of ;

[0156] According to the boundary conditions of the vertical upward motion segment L1, the quintic polynomial coefficients of the vertical upward motion segment L1 are solved ;

[0157] ;

[0158] ;

[0159] ;

[0160] ;

[0161] wherein, is the running time of the vertical upward motion segment L1;

[0162] Substitute the quintic polynomial coefficients of the vertical upward motion segment L1 into the acceleration formula, the acceleration is a function of t and find the minimum and running time that meet the maximum acceleration limit of the vertical upward motion segment L1; ;

[0163] Take the derivative of the acceleration formula: ;

[0164] Solve the expression of t: ;

[0165] Bring the expression of t into the acceleration formula , find the shortest running time that meets the maximum acceleration limit of the vertical upward motion segment L1;

[0166] Further, when the chip pick-and-place operation is moving in the upward-to-horizontal Lame curve segment L2: ; ;

[0167] in, is the displacement of the starting point of segment L2, is the displacement of the end point of segment L2; is the starting speed of L2 segment, is the terminal velocity of L2 segment; is the acceleration at the starting point of segment L2, is the acceleration at the end of segment L2;

[0168] According to the boundary conditions of the Lame curve segment L2, the coefficients of the fifth-order polynomial of the Lame curve segment L2 can be obtained: ;

[0169] ;

[0170] ;

[0171] ;

[0172] ;

[0173] in, is the running time of the L2 segment;

[0174] Furthermore, when the chip pick and place operation moves in the horizontal section L3, the X and Y axes move at the maximum combined speed. In the L3 segment, the uniform motion is achieved, and the displacement from the horizontal segment , we can get the running time of L3 segment ;

[0175] Furthermore, when the chip pick-and-place operation moves horizontally to the downward-drawing curve segment L4:

[0176] ;

[0177] ;

[0178] in, is the displacement of the starting point of the Lamé curve segment L4, is the displacement of the end point of Lamé curve segment L4; is the starting speed of Lamé curve segment L4, is the terminal speed of the Lamé curve segment L4; is the acceleration at the starting point of the Lamé curve segment L4, is the acceleration at the end of the Lamé curve segment L4, It is continuously adjusted according to the acceleration limit; according to the boundary conditions of the Lame curve segment L4, the coefficients of the fifth-order polynomial of the Lame curve segment L4 can be obtained ;

[0179] ;

[0180] ;

[0181] ;

[0182] ;

[0183] wherein is the running time of the Lame curve segment L4.

[0184] Further, when the chip pick-and-place operation is moving in the vertical downward movement segment L5:

[0185] ; ;

[0186] wherein, is the initial displacement of the vertical downward movement segment L5, is the terminal displacement of L5; is the initial velocity of L5, is the terminal velocity of L5; is the initial acceleration of the vertical downward movement segment L5, is the terminal acceleration of the vertical downward movement segment L5; according to the boundary conditions of the vertical downward movement segment L5, the quintic polynomial coefficients of the vertical downward movement segment L5 can be solved ;

[0187] ;

[0188] ;

[0189] ;

[0190] ;

[0191] wherein, is the running time of the vertical downward movement segment L5.

[0192] Step 5: according to the obtained vertical upward movement time t1, Lame curve movement time t2, Lame curve movement time t4, and vertical downward movement time t5, the horizontal movement time of the horizontal movement segment L3 uniform motion is obtained , the total running time of the asymmetric chip pick-and-place operation is obtained . Further, according to the above five segment speed planning, the total running time is , and the total running distance is , an asymmetric chip pick-and-place operation trajectory that satisfies trajectory asymmetry, maximum acceleration constraints, and has a uniform speed segment is obtained under segmented velocity planning.

[0193] Example 3, based on Example 1 or Example 2, this example uses the simulation platform: MATLABR2023b, pick point , place point , interpolation time 1ms, Lamé curve segment 、 and vertical motion segment of , vertical motion segment of Now simulate the segmented velocity planning method for the asymmetric chip pick-and-place operation trajectory and obtain the following Figure 3 The trajectory of the end effector in space is shown in Figure 2. In the segmented velocity planning method for the asymmetric chip pick-and-place operation trajectory, the position, velocity, and acceleration curves of the end effector are shown in Figure 2. Figure 4 As shown; the speed curves of the X-axis, Y-axis and Z-axis in the Cartesian space O-XYZ coordinate system are as follows Figure 5 As shown, the acceleration curve is Figure 6 As shown. Figure 4 It can be seen from the figure that the acceleration of the end effector in the chip pick-and-place operation is smooth and continuous without sudden changes, and the speed near the pick-up and placement points changes slowly and eventually becomes zero; Figure 5 and Figure 6 The X-, Y-, and Z-axis velocity curves are smooth and continuous, with uniform speed segments. The acceleration curves are smooth and free of sudden changes, and the maximum accelerations are all within the motor constraints. Therefore, the segmented velocity planning method for an asymmetric chip pick-and-place operation trajectory provided by this invention comprehensively considers the asymmetric characteristics of the pick-and-place operation trajectory, the uniform speed segments of the velocity curve, and the motor performance constraints, thereby improving the efficiency, accuracy, and stability of the chip pick-and-place operation while extending the service life of the equipment.

[0194] Embodiment 4, a segmented speed planning device for an asymmetric chip pick-and-place operation trajectory, comprising: a memory; a processor; and a computer program; wherein the computer program is stored in the memory and is configured to be executed by the processor to implement a segmented speed planning method for an asymmetric chip pick-and-place operation trajectory.

[0195] Embodiment 5. A storage medium stores a computer program thereon. When the computer program is executed by a processor, a segmented speed planning method for an asymmetric chip pick-and-place operation trajectory is implemented.

[0196] The application is described with reference to flowcharts and / or block diagrams of methods, devices (systems), and computer program products according to embodiments of the application. It should be understood that each flow and / or block in the flowcharts and / or block diagrams, as well as combinations of flows and / or blocks in the flowcharts and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing apparatus to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing apparatus generate an apparatus that implements the functions specified in the flowchart Figure 1 one or more flows and / or blocks. Figure 1 one or more blocks.

[0197] These computer program instructions can also be stored in a computer-readable memory that can direct the computer or other programmable data processing apparatus to work in a specific manner, so that the instructions stored in the computer-readable memory produce a manufactured product including instruction apparatus, which implements the functions specified in the flowchart Figure 1 one or more flows and / or blocks. Figure 1 one or more blocks.

[0198] These computer program instructions can also be loaded into a computer or other programmable data processing apparatus, so that a series of operation steps are performed on the computer or other programmable data processing apparatus to produce a computer-implemented process, so that the instructions executed on the computer or other programmable data processing apparatus provide steps for implementing the functions specified in the flowchart Figure 1 one or more flows and / or blocks. Figure 1 one or more blocks.

[0199] Working principle:

[0200] The asymmetric chip pick-and-place operation trajectory segmentation speed planning method, device, and storage medium of the application solve the problems of trajectory asymmetry, lack of uniform speed segment, and motor performance limitation through reasonable segmentation speed planning, significantly improve the efficiency of pick-and-place operation, reduce the vibration and impact of the mechanism, fully utilize the maximum speed, and reduce equipment wear. The method provides strong technical support for efficient automated production in the field of microelectronics manufacturing.

[0201] The application provides an asymmetric chip pick-and-place operation trajectory segmentation speed planning method, which reasonably designs the trajectory and speed segmentation on the basis of satisfying the X, Y, and Z axis motor performance constraints, realizes optimal utilization of motor performance, and improves the overall efficiency of pick-and-place operation.

[0202] Different from the conventional polynomial speed planning method, the application introduces a uniform speed section in trajectory planning, which can reduce acceleration and deceleration load, reduce equipment wear and energy consumption, and prolong the service life of the actuator.

[0203] The segmented speed planning method designed by the application can dynamically adjust the time distribution of acceleration, uniform speed and deceleration stages according to different motor performance parameters, optimize the acceleration curve and reduce mechanism vibration and impact.

[0204] The application can adapt to various process requirements and equipment layouts, has flexibility and high efficiency, and has significant application value and practicality.

[0205] The above specific embodiments are specific supports for the scheme idea of the application, and cannot limit the protection scope of the application. Any equivalent changes or equivalent modifications made on the basis of the technical scheme of the application according to the technical idea of the application still belong to the protection scope of the technical scheme of the application.

Claims

1. A segmented velocity planning method for an asymmetric chip pick-and-place operation trajectory, characterized in that: The method comprises the following steps: Step 1: according to the spatial position coordinates of the chip pickup point, the chip placement point and the obstacle, an asymmetric chip pick-and-place operation door-shaped trajectory is constructed by using a Lame curve; Step 2: the generated asymmetric chip pick-and-place operation door-shaped trajectory is divided into a vertical upward movement segment L1, a Lame curve segment L2, a horizontal movement segment L3, a Lame curve segment L4 and a vertical downward movement segment L5; Step 3: the vertical upward movement segment L1, the Lame curve segment L2, the Lame curve segment L4 and the vertical downward movement segment L5 are all subjected to velocity planning by using a quintic polynomial curve, and the horizontal movement segment L3 is subjected to uniform velocity planning; Step 4: according to the maximum acceleration parameters of the X-axis driving mechanism, the Y-axis driving mechanism and the Z-axis driving mechanism of the pick-and-place mechanism and the movement distances of the vertical upward movement segment L1, the Lame curve segment L2, the Lame curve segment L4 and the vertical downward movement segment L5, the corresponding vertical upward movement time t1, the Lame curve movement time t2, the Lame curve movement time t4 and the vertical downward movement time t5 that satisfy the acceleration limit are obtained by using a quintic polynomial curve; Step 5: According to the obtained vertical upward motion time t1, the Lame curve motion time t2, the Lame curve motion time t4, the vertical downward motion time t5, the horizontal motion time t3 of the horizontal motion segment L3 uniform motion is obtained, and the total running time t of the asymmetric chip pick-and-place operation is obtained all； In step 1, the asymmetric chip pick-and-place operation door-shaped trajectory is constructed by using a Lame curve, which comprises the following steps: By using a Lame curve to replace the right angle in the door-shaped trajectory established by the spatial position coordinates of the chip pickup point, the chip placement point and the obstacle, a Lame curve transition asymmetric door-shaped trajectory is obtained, and the Lame curve transition asymmetric door-shaped trajectory is taken as the asymmetric chip pick-and-place operation door-shaped trajectory; In step 2, the obtained asymmetric chip pick-and-place operation door-shaped trajectory is subjected to segmented processing to obtain the vertical upward movement segment L1, the upward-to-horizontal Lame curve segment L2, the horizontal movement segment L3, the horizontal-to-downward Lame curve segment L4 and the vertical downward movement segment L5; Let the chip pickup point be A, the connecting point of the vertical upward movement segment L1 and the Lame curve segment L2 be B, the connecting point of the Lame curve segment L2 and the horizontal movement segment L3 be C, the connecting point of the horizontal movement segment L3 and the horizontal-to-downward Lame curve segment L4 be D, the connecting point of the horizontal-to-downward Lame curve segment L4 and the vertical downward movement segment L5 be E, and the chip placement point be F; The vertical upward movement segment L1 = |AB| and the vertical downward movement segment L5 = |EF|, the horizontal movement segment L3 = |CD|, the Lame curve segment L2 and the Lame curve segment L4 length are the arc length of the Lame curve, and the Lame curve expression is as follows: ; wherein u and v represent the horizontal axis and the vertical axis of the UOV plane coordinate system respectively, d > 0 is the length of the major axis, e > 0 is the length of the minor axis, and m ∈ {1, 2, 3,...} is the Lame curve coefficient.

2. The asymmetric chip pick-and-place operation trajectory segment velocity planning method of claim 1, wherein: A point coordinates are , B point coordinates are , C point coordinates are , D point coordinates are , E point coordinates are , F point coordinates are ; vertical upward movement segment and vertical downward movement segment , horizontal movement segment ; minor axis of the lemniscate segment L2 major axis minor axis of the lemniscate segment L4 major axis ​ The long axis and short axis parameters of the Lame curve segment L2 and the Lame curve segment L4 are brought into the Lame curve arc length formula l, and then the Lame curve segment length 、 .

3. The asymmetric chip pick-and-place operation trajectory segment velocity planning method of claim 2, wherein: When m=3, the lengths of the Lame curve segment L2 and the Lame curve segment L4 are obtained according to a Lame curve arc length formula; The Lame curve arc length formula is: ; wherein θ represents an angle, and ; d is the length of the major axis, and e is the length of the minor axis; The total movement distance of the asymmetric chip pick-and-place operation trajectory is L=L1+L2+L3+L4+L5.

4. The asymmetric chip pick-and-place operation trajectory segment velocity planning method of claim 2, wherein: A quintic polynomial curve is: ; The first and last conditions of the position, velocity and acceleration of the quintic polynomial curve are set; the expressions of the velocity V(t) and the acceleration A(t) are: ； ； Boundary conditions are: ; Wherein, q0 is the starting position, q1 is the terminal position; v0 is the starting velocity, v1 is the terminal velocity; a0 is the starting acceleration, and a1 is the terminal acceleration; According to the boundary conditions, the coefficients c0, c1, c2, c3, c4 and c5 are solved; ； ； ； ； Wherein, h=q1-q0 represents the movement length, a0 represents the starting acceleration, a1 represents the terminal acceleration, v0 represents the starting velocity, and v1 represents the terminal velocity; According to the acceleration formula: ; Substituting the expressions of c2, c3, c4, c5 into the equation, the acceleration is a function of time variable t and total movement time T, and the minimum time T satisfying the maximum acceleration limit needs to be found; ; Differentiate the acceleration equation: ; The expression of t is obtained, and the expression of t is brought into the acceleration formula A(t), so that the maximum acceleration A max The corresponding shortest time T min .

5. The asymmetric chip pick-and-place operation trajectory segment velocity planning method of claim 2, wherein: When the chip pick-and-place operation is moving in the vertical upward movement segment L1: ; wherein, is the start of L1 displacement, is the end of L1 displacement; is the start of L1 velocity, is the end of L1 velocity; is the start of L1 acceleration, is the end of L1 acceleration; according to the acceleration limit to adjust the settings of constantly; According to the boundary conditions of the vertical upward movement segment L1, the quintic polynomial coefficients of the vertical upward movement segment L1 are solved ； ； ； ； ； wherein, is the run time of the vertical upward movement segment L1; The quintic polynomial coefficients of the vertical upward motion segment L1 Substituting the acceleration formula, the acceleration is a function of t and The minimum and the running time that satisfy the maximum acceleration limit of the vertical upward motion segment L1 are found ; ; Differentiate the acceleration equation: ; Solving the expression for t: ; Bringing the expression of t into the acceleration formula In the vertical upward movement section L1, the maximum acceleration satisfying The shortest running time corresponding to the limit ; and / or, when the chip pick-and-place operation is moving in the upward-to-horizontal Lame curve segment L2: ； ； wherein, is the L2 segment start displacement, is the L2 segment end displacement; is the L2 segment start velocity, is the L2 segment end velocity; is the L2 segment start acceleration, is the L2 segment end acceleration; According to the boundary conditions of the Lame curve segment L2, the quintic polynomial coefficients of the Lame curve segment L2 can be solved ； ； ； ； ； wherein, is the run time of the L2 segment; When the chip pick-and-place operation is moving in the horizontal segment L3, the X and Y axes move at the maximum combined speed At the L3 segment, the speed is uniform, and the displacement from the horizontal segment is The running time of the L3 segment is ; and / or, when the chip pick-and-place operation is moving in the horizontal-to-down-pull curve segment L4: ; ; wherein, is the start displacement of the Lamé curve segment L4, is the end displacement of the Lamé curve segment L4; is the start velocity of the Lamé curve segment L4, is the end velocity of the Lamé curve segment L4; is the start acceleration of the Lamé curve segment L4, is the end acceleration of the Lamé curve segment L4, is continuously adjusted according to the acceleration limit set. According to the boundary conditions of the Lame curve segment L4, the quintic polynomial coefficients of the Lame curve segment L4 can be solved ； ； ； ； ； wherein is the running time of the Lame curve segment L4; and / or, when the chip pick-and-place operation is moving in the vertical downward movement segment L5: ； ； wherein, is the vertical downward motion segment L5 start point displacement, is the L5 end point displacement; is the L5 start point velocity, is the L5 end point velocity; is the vertical downward motion segment L5 start point acceleration, is the vertical downward motion segment L5 end point acceleration; According to the boundary conditions of the vertical downward movement segment L5, the quintic polynomial coefficients of the vertical downward movement segment L5 can be solved ； ； ； ； ； wherein, is the run time of the vertical downward movement segment L5.

6. The asymmetric chip pick-and-place operation trajectory segment velocity planning method of claim 2, wherein: In step 4, the horizontal movement segment L3 is at maximum speed At constant speed, the Z-axis height is constant, so the Z-axis speed is 0, and the X-axis and Y-axis move at a combined speed At constant speed, the Z-axis height is constant, so the Z-axis speed is 0, and the X-axis and Y-axis move at a combined speed ; Total run time t all To An asymmetric chip pick-and-place operation trajectory based on the piecewise velocity planning is obtained.

7. A device for segmented speed planning of asymmetric chip pick-and-place operation trajectory, characterized in that: comprising: a memory; a processor; and a computer program; wherein the computer program is stored in the memory and configured to be executed by the processor to implement the asymmetric chip pick-and-place operation trajectory segmented velocity planning method as claimed in any one of claims 1 to 6. a computer program stored thereon, which, when executed by a processor, implements the asymmetric chip pick-and-place operation trajectory segmented velocity planning method as claimed in any one of claims 1 to 6.

8. A storage medium, characterized by ​

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