65results about "Error compensation/elimination" patented technology

The invention relates to the technical field of mechanical state monitoring, and discloses a guide rail curvature online detection method and system, and the method comprises the steps: obtaining the multi-mode synchronous measurement data of a guide rail; carrying out preprocessing and space-time registration on the multi-modal synchronous measurement data; performing temperature compensation on the high-precision registration data; the curvature distribution of the guide rail fused with the displacement data is calculated, and mutation points are recognized through a curvature change rate threshold method for segmented modeling; calculating a multi-dimensional curvature parameter, and carrying out abnormal mode recognition by adopting a convolutional neural network; short-term early warning is carried out at the edge end, long-term evolution prediction is carried out at the cloud end, and predictive maintenance suggestions are obtained; according to the invention, transient bending deformation in a high-speed operation state can be captured, edge end data processing and early warning response delay are shortened, and real-time monitoring is truly realized.

Systems and methods for performing contactless wellhead displacement measurements in a desert environment include adjusting an alignment of optical components in an optical system based on a temperature of the optical system. A pattern of infrared light is projected from the optical system onto a portion of a wellhead, the infrared light having a wavelength away from water absorption wavelengths and solar maxima wavelengths. Reflections of the pattern of infrared light from the portion of the wellhead are captured using an imaging sensor of the optical system. A displacement of the wellhead is measured based on the projected pattern of infrared light and the reflections.

A non-Cartesian coordinate positioning machine is provided, including a first platform and a second platform, and a plurality of extendable leg assemblies arranged between the first platform and the second platform for positioning the first platform and the second platform relative to each other. Each extendable leg assembly includes: (i) a first member and a second member that move relative to each other when the extendable leg assembly changes length, and (ii) a measuring member fixed to the first member for measuring the length associated with the extendable leg assembly; wherein the first member is at least partially formed of a composite material.

The invention relates to an assembly for position measurement. The assembly comprises a support (10), a scale (12) arranged on the support (10) and a plurality of fixing elements (16) for fixing the scale (12) at the support (10). The scale (12) extends in a longitudinal direction (X). The scale (12) has a measurement scale (14) for position measurement at least in the longitudinal direction (X). The support (10) has a plurality of individual sections (10.1-10.7). The fixing elements (16) are arranged on the individual sections (10.1-10.7) of the support (10).

This invention discloses an error-compensated inductive sensor calibration method and system, comprising: controlling a macro-micro composite drive platform to drive a moving component on which an inductive sensor to be calibrated is mounted, causing it to continuously move relative to a fixed standard target surface; measuring the actual displacement of the moving component to obtain a standard displacement sequence; synchronously acquiring the actual output voltage of the inductive sensor to be calibrated during the movement process to form an actual measurement value sequence; calculating the measurement deviation, generating a measurement deviation sequence, and dividing the sequence into at least three compensation intervals according to the displacement range; establishing a compensation value lookup table in each compensation interval to generate calibration parameters for correcting zero-point offset, gain drift, and nonlinear characteristics. This invention combines displacement measurement with synchronous acquisition of sensor output, enabling targeted correction of zero-point offset, gain drift, and nonlinear errors, thus improving the precision and adaptability of the compensation.

A portable coordinate measurement machine (CMM) includes an articulated arm including arm segments and rotary joints. At least one of the rotary joints includes a shaft configured to rotate about an axis of rotation of at least one of the rotary joints. The shaft includes a middle portion and first and second end portions fixedly attached to ends of the middle portion. At least one of the rotary joints includes first and second housing ends, the first housing end having an inner diameter that engages an outer diameter of the first bearing and the second housing end having an inner diameter that engages an outer diameter of the second bearing. The first and second bearings are preloaded to remove play.

The invention relates to the technical field of displacement measurement, and provides an F-P displacement sensor and a method for detecting displacement of an underground pipe gallery and a seam, and the F-P displacement sensor comprises two sections of single-mode optical fibers, a capillary tube, a sealing layer, a packaging film and an adhesive tape. The two sections of single-mode optical fibers are coaxially arranged, and the axes of the single-mode optical fibers coincide with the axis of the F-P displacement sensor; the axis of the capillary tube coincides with the axis of the F-P displacement sensor, the capillary tube surrounds the two sections of single-mode optical fibers in the circumferential direction of the F-P displacement sensor, and the two sections of single-mode optical fibers are longer than the capillary tube and extend outwards from the two ends of the capillary tube; the inner wall of the capillary tube is spaced from the outer wall of the single-mode fiber by a certain distance; the sealing layers are arranged at two ends of the capillary; the packaging film surrounds the capillary tube in the circumferential direction of the F-P displacement sensor. The packaging film is surrounded by the adhesive tape; and the single-mode optical fiber extends outwards from the two ends of the adhesive tape. According to the scheme, the micrometric displacement monitoring sensitivity and precision are improved, the long-term durability of the pipe gallery in a severe environment is improved, the production cost is reduced, and the yield is improved.

Coordinate measuring machine, with controlled machine axes (X, Y, Z, C) for performing measuring movements for component measurement, with at least one measuring device (4, 6) held by at least one of the machine axes (X, Y, Z, C) and movable by means of at least one of the machine axes (X, Y, Z, C), such as a tactile measuring device (4) or an optical measuring device (6), for acquiring uncompensated coordinate measurement values ​​(x1, y1, z1) on a component to be measured (8), with a device (10) for temperature compensation of the uncompensated coordinate measurement values ​​(x1, y1, z1) by means of a temperature model (12), wherein the temperature model (12) is configured to process one temperature measurement value (T1, T2) or several temperature measurement values ​​(T1, T2) as input variables, wherein the temperature model provides compensation parameters (dx, dy, dz) for the uncompensated has coordinate measurements and / or compensated coordinate measurements as output variables,where the temperature model (12) is adaptive and can be adjusted based on a database.

An advanced method for manufacturing an optoelectronic system array is disclosed in which micro-devices are developed separately and then transferred into a system substrate. Various embodiments are disclosed, including distributed sacrificial reference points, real-time monitoring with various sensing techniques, laser generated alignment marks, non-contact laser triangulation, and marking using polymers to dynamically estimate and correct alignment during each transfer phase. The invention further discloses a method for detecting and correcting errors caused by wear, environmental changes, load variability and mechanical vibrations, which may be AI-based. Generally, the system for pre-transfer calibration, monitoring, error detection, and compensatory adjustment enables precise and reliable integration of micro-devices into optoelectronic systems, thereby significantly enhancing alignment accuracy, stability, and reliability throughout the manufacturing process. The system may further be AI-based calibration verification in a micro device transfer system.

A three-dimensional (3D) scanner is in communication with a display includes one or more optical sensors. The scanner scans, using the one or more optical sensors, an object having a surface. The scanning generates data corresponding to a 3D shape of at least a portion of the surface of the object. The scanner generates a 3D reconstruction of the shape of the surface of the object. The scanner provides a preview of the 3D reconstruction of the at least portion of the shape of the surface of the object. The scanner provides, to the display, for rendering with the preview of the 3D reconstruction of the at least portion of the shape of the surface of the object, an indication of at least one of a quantity or a quality of the data corresponding to the 3D shape of the at least portion of the surface of the object.

This invention relates to temperature compensation for machine tools. The machine tool includes a base for positioning a workpiece thereon, at least one machining device for machining the workpiece, one or more actuators for moving the machining device relative to the base, and a control unit for controlling the actuators. The control unit includes a data storage unit for storing nominal data providing nominal dimensions of the workpiece at a predefined machining temperature, and at least one temperature sensor configured to determine one or more actual temperature values ​​of the workpiece. The at least one temperature sensor is configured to generate temperature data based on the determined actual temperature values ​​and provide the temperature data to the control unit. The control unit is configured to calculate the actual dimensions of the workpiece based on the nominal dimensions and the provided temperature data, and control the actuators to machine the workpiece according to the calculated actual dimensions. The machine tool includes one or more fixing devices for fixing the position and orientation of the workpiece on the base.

A computer device includes at least one processor in communication with at least one memory device. The at least one processor is programmed to: a) receive a plurality of images for a continuous scan phase shift interferometry (PSI), wherein the plurality of images includes a first plurality of pixels of a front surface of a sample and a second plurality of pixels of a back surface of a sample; b) simultaneously perform a first plurality of intensity scans of each pixel in the first plurality of pixels and a second plurality of intensity scans of each pixel in the second plurality of pixels; c) identify zero transitions for each of the first plurality of pixels; d) identify zero transitions for each of the second plurality of pixels; and e) compare the plurality of zero transitions to determine a relative movement and deformation of the sample during the PSI scan.

A computer device includes at least one processor in communication with at least one memory device. The at least one processor is programmed to: a) receive a plurality of images for a continuous scan phase shift interferometry (PSI), wherein the plurality of images includes a first plurality of pixels of a front surface of a sample and a second plurality of pixels of a back surface of a sample; b) simultaneously perform a first plurality of intensity scans of each pixel in the first plurality of pixels and a second plurality of intensity scans of each pixel in the second plurality of pixels; c) identify zero transitions for each of the first plurality of pixels; d) identify zero transitions for each of the second plurality of pixels; and e) compare the plurality of zero transitions to determine a relative movement and deformation of the sample during the PSI scan.

To provide an optical receiving unit for a position measuring system for determining spatial position information, the optical receiving unit certainly preventing faulty measurement even under mechanical and / or thermal stress.SOLUTION: The present invention relates to an optical receiving unit for a position measuring system for determining spatial position information. The receiving unit has a measuring cell. The measuring cell includes a base plate, a transparent cover plate with a scanning grating, one or more spacers between the base plate and the cover plate, and an optoelectronic detector whose light-sensitive surface is oriented in the direction of the cover plate. The detector is arranged on the base plate of the measuring cell via a self-centering compensating element.SELECTED DRAWING: Figure 2

The invention relates to a method for temperature management, in particular for thermal stabilisation, of a 3D measuring system which is designed to optically detect three-dimensional (3D) objects in the surroundings and to determine therefrom a digital three-dimensional image of the objects, wherein the 3D measuring system has one or more temperature sensors for detecting temperature values at one of the plurality of points of the 3D measuring system, characterised in that a temperature model of the 3D measuring system or at least individual system components of the 3D measuring system is provided, wherein the temperature model describes the thermal behaviour of the 3D measuring system or parts thereof, wherein on the basis of the temperature model and taking into consideration the temperature values measured by means of the temperature sensor or temperature sensors, temperature data at different points of the 3D measuring system are spatially and / or temporally predicted.

The invention relates to a method for temperature management, in particular for thermal stabilization, of a 3D measurement system, which is configured to optically detect three-dimensional (3D) objects in the environment and to determine a digital three-dimensional image of the objects from this, wherein the 3D measurement system has one or more temperature sensors for detecting temperature values ​​at one or more locations of the 3D measurement system, characterized in that a temperature model of the 3D measurement system or at least individual system components of the 3D measurement system is provided, wherein the temperature model describes the thermal behavior of the 3D measurement system or parts thereof, wherein, based on the temperature model and taking into account the temperature values ​​measured by means of the temperature sensor or temperature sensors, temperature data at various locations of the 3D measurement system are spatially and / or temporally predicted.

A coordinate measuring machine (CMM) for determining at least one spatial coordinate of a measurement point on an object, the CMM comprising a structure comprising a base and a plurality of frame elements, wherein a probe head is attached to one of the frame elements and movable relative to the base, wherein the CMM comprises a temperature control system configured to control a temperature of a plurality of frame elements of the structure and comprising a control unit, one or more temperature sensors, and one or more heating elements, wherein the control unit is configured to control the heating elements based on the temperature values received from the temperature sensors.

An opto-electronic dual-comb interferometric distance measuring method and device wherein a signal comb is chromatically divided into a target signal comb and a non-target signal comb at a emission position, preferably by an optical interleaver in a measurement probe of the device. Only the target signal comb serves as a free beam emitted to the target. The non-target signal comb serves for generation of additional or compensation internal phase differences. Thus, the distance to the target is based on first, target related phase differences and on the second, internal compensation phase differences.

The invention relates to an apparatus (10) and a method for determining a lacquer coating thickness of a strip (1) in a continuous process, in particular a process for producing or processing a metal strip or electrical sheet, in which, by means of a lacquering or coating device (20), a transparent or pigmented insulating or lacquer coating is applied to the strip (1), having at least one thickness sensor (2) arranged transversely to, preferably crossing, the conveying direction of the strip (1), the thickness sensor being connected in terms of signalling to a control unit (3) in order to determine the thickness of the lacquer coating on the strip (1), wherein at least one temperature sensor (4) for sensing a temperature of the strip (1) in a region T is provided, in the conveying direction of the strip (1), upstream of and / or at, preferably close to a measuring region D of the thickness sensor (2), and wherein the control unit (3) has a module (5) for temperature compensation of the measurement by the thickness sensor (2), to which the temperature sensor (4) is connected directly or indirectly in terms of signalling in order to correct a thickness value on the basis of the temperature measured by the temperature sensor (4).

measuring machine (20) having: - at least one machine axis (30, 31, 32), wherein each machine axis (30, 31, 32) has a positioning body (40, 42, 44) which is movably mounted in a translational or rotational degree of freedom (B1, B2) along an associated guide (41, 43, 45) and can be positioned in the degree of freedom (B1, B2), wherein a first machine axis (30) has a first guide (41) and a first positioning body (40) which is movable and positionable in a translational or rotational first degree of freedom (B1), - a workpiece holder (22) configured to hold a workpiece (23), and a workpiece measuring unit (25) configured to generate at least one measuring signal (M) by touching or non-contacting the workpiece (23), wherein the workpiece holder (22) and the workpiece measuring unit (25) are movable and / or positionable relative to each other by means of the at least one machine axis (30, 31, 32), - a sensor carrier (50), - a bearing arrangement (51) designed as a loose bearing, by means of which the sensor carrier (50) is mounted on the first positioning body (40), and - a first position sensor (60) arranged on the sensor carrier (50), which is configured to detect a movement and / or a position of the sensor carrier (50) in the first degree of freedom (B1).

Systems and methods for performing contactless wellhead displacement measurements in a desert environment include adjusting an alignment of optical components in an optical system based on a temperature of the optical system. A pattern of infrared light is projected from the optical system onto a portion of a wellhead, the infrared light having a wavelength away from water absorption wavelengths and solar maxima wavelengths. Reflections of the pattern of infrared light from the portion of the wellhead are captured using an imaging sensor of the optical system. A displacement of the wellhead is measured based on the projected pattern of infrared light and the reflections.

A reticle thermal expansion calibration method includes exposing a first group of wafers and generating a first sub-recipe, performing data mining and data parsing to generate a plurality of overlay parameters, performing a linear regression on each of the overlay parameters, and generating a first coefficient of determination for each of the overlay parameters.

Coordinate machine with adaptive damping unit. The invention relates to an adjustable damping unit (2, 2a-2d) designed for integration into a kinematic chain of a machine (1) designed for coordinate measuring and / or coordinate handling of a workpiece (O). The adjustable damping unit (2, 2a-2d) is configured for locally adaptive damping of varying oscillations of a measuring and / or handling tool (4) connected to an endpiece (12) of the kinematic chain during operation of the machine (1). The adjustable damping unit (2, 2a-2d) comprises an adjustable electromechanical damping element whose properties are dynamically adjustable in dependence on actual kinematic and / or position sensor data of the kinematic chain. The adjustable properties include at least one of the following: elastic properties, inertial properties and / or energy dissipation properties.

The invention relates to a method for determining the shape of a wafer made of semiconductor material, comprising the following steps: (A) providing a device for measuring a profile of a wafer made of semiconductor material, comprising a plurality of support elements for horizontally supporting a wafer and comprising at least one measuring system, (B) placing a wafer made of semiconductor material onto the plurality of support elements such that the wafer made of semiconductor material is arranged horizontally; (C) measuring a profile of the horizontally arranged wafer made of semiconductor material along at least one section in the radial direction by means of the at least one measuring system; and (D) correcting the measured profile by the deflection caused by gravity using a correction function; characterised in that the correction function depends at least on the following parameters (i) to (iv): (i) crystal orientation of the main surfaces of the wafer made of semiconductor material, (ii) thickness of the wafer made of semiconductor material, (iii) orientation of the wafer made of semiconductor material, and (iv) at least one parameter specific to the device.

A coordinate positioning machine comprises a plurality of drive axes (61), each of which is either a rotary drive axis or a linear drive axis, for positioning a platform (12) within a working volume of the machine, and a linear counterbalance axis (L), separate from any of the drive axes (61), for counterbalancing the platform (12). With such a counterbalance arrangement (50) the separate linear counterbalance axis (L) can be substantially invariant to changes in orientation of the drive axes (61) and can be therefore be counterbalanced e.g. by a simple counterweight (30) providing ideal or near-ideal counterbalancing for the platform (12) throughout the working volume of the machine. Also disclosed is a counterbalance arrangement (50) in which the counterbalance axes (R1, L1, L2) and force generator (30) are mutually arranged such that horizontal movement of the platform (12) causes substantially no net movement of and / or causes substantially no work to be done on the force generator (30). Also disclosed is a counterbalance arrangement (50) in which a series of counterbalance axes (R1, L1, L2) has at least one rotary counterbalance axis (R1), and wherein the force generator (30) is arranged behind or at a predetermined horizontal distance from the first rotary counterbalance axis (R1) in the series. Also disclosed is a counterbalance arrangement (50) having a series of counterbalance axes (R1, L1, L2) with at most one rotary counterbalance axis (R1) between the force generator (30) and ground (14).

The invention relates to a microelectromechanical strain sensor (100) for measuring strains, inclinations, and curvature on a test object, and further relates to a method for testing, manufacturing, and assembling such a sensor, wherein the sensor comprises contact points (201, 202) or contact surfaces (203), a capacitive transducer (400), a capacitive-to-digital converter (600), and a signal processor (700). The invention further relates to a method for self-testing the device with a self-test mechanism (500) by which a strain effect on the sensor is simulated by an electrical test signal.

The invention discloses a part precision detection system and method based on multi-source data analysis, and relates to the technical field of part precision detection, and the method comprises the steps: S10, calculating a detection correction value of a to-be-detected part according to the real-time expansion coefficients of a homologous standard part in different processing environments; s20, constructing a machining precision influence model of the to-be-measured part about the roughness degree; s30, the optimal machining position of the target part to be detected is determined; and S40, determining a precision detection result of the target to-be-detected part. Relative measurement of the to-be-measured part is realized according to the corresponding expansion coefficients of the to-be-measured part and the homologous standard part of the to-be-measured part at the same environment temperature, and a machining precision influence model of the to-be-measured part on the roughness degree at the marked machining position is constructed based on the relative measurement. Whether the marked machining position point is the optimal machining position of the to-be-detected part or not can be judged before the tool machines the to-be-detected part, and the non-secondary machining rate of the to-be-detected part is reduced.

The present application relates to the technical field of battery manufacturing, and provides a detection device and pole piece manufacturing equipment. The detection device includes: a laser ranging sensor; and a cooling module, which includes a first protective enclosure and a cooling plate, where the first protective enclosure encloses the outside of the laser ranging sensor; the first protective enclosure is provided with an avoidance portion for avoiding a laser light path of the laser ranging sensor; the first protective enclosure has a first opening; the cooling plate covers the first opening; an air flow channel is defined inside the cooling plate; surfaces of the cooling plate are provided with air inlet holes and first air outlet holes which are communicated with the air flow channel; and the first air outlet holes are disposed in a manner of facing the laser ranging sensor to blow air to the laser ranging sensor to cool the laser ranging sensor. Through the technical solutions of the present application, the compressed air can be blown from the air outlet holes to the laser ranging sensor after passing through the air flow channel, so as to cool the laser ranging sensor and improve the detection accuracy of the laser ranging sensor.

The invention relates to a coordinate measuring machine, comprising: a controlled machine tool axis (X, Y, Z, C) for carrying out a measuring movement for measuring a component; at least one measuring device (4, 6), such as a contact measuring device or an optical measuring device, held by the at least one machine tool axis and movable by means of the at least one machine tool axis, for detecting uncompensated coordinate measured values (x1, y1, z1) on the component (8) to be measured; the invention relates to a device (10) for temperature compensation of uncompensated coordinate measured values by means of a temperature model (12), which is designed to process one or more temperature measured values (T1, T2) as input variables, the temperature model has compensation parameters (dx, dy, dz) for the uncompensated coordinate measured values and / or compensated coordinate measured values as output variables, is adaptive and can be adapted by means of a database.

A method for determining the shape of a semiconductor disk, comprising the following steps: (A) providing a device for measuring the profile of a semiconductor disk, comprising several support elements for the horizontal support of a disk, and at least one measuring system; (B) placing a semiconductor disk onto the several support elements such that the semiconductor disk is arranged horizontally; (C) measuring the profile of the horizontally arranged semiconductor disk along at least one radial distance using the at least one measuring system; and (D) correcting the measured profile for the deflection caused by gravity using a correction function.characterized in that the correction function depends on at least the following parameters (i) to (iv): (i) crystal orientation of the main surfaces of the semiconductor material disk, (ii) thickness of the semiconductor material disk, (iii) orientation of the semiconductor material disk, and (iv) at least one parameter specific to the device.