Supercritical fluid drying device

Abstract

The invention provides a supercritical fluid drying device, comprising: a cavity comprising an upper cavity and a lower cavity, the lower cavity being arranged below the upper cavity and configured to be suitable for moving relative to the upper cavity in the vertical direction, so that the upper cavity and the lower cavity are closed to form a closed chamber; the connecting assembly is used for connecting the upper cavity and the lower cavity, and the locking mechanism is used for locking or loosening the connecting assembly; and the isolation assembly is used for preventing pollutants generated by the connecting assembly and the locking mechanism from entering the closed cavity when the upper cavity and the lower cavity are closed, and / or preventing the pollutants from entering an open space, corresponding to the closed cavity, between the upper cavity and the lower cavity when the upper cavity and the lower cavity are not closed. The isolation assembly is arranged between the connecting assembly and the cavity, so that pollution of the closed cavity is effectively reduced or even avoided, the cleanliness of the closed cavity is improved, the process result is improved, and the process yield is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a supercritical fluid drying device. Background Art

[0002] During the integrated circuit manufacturing process, wet processing of substrates such as wafers can be used for cleaning, etching, and other steps in integrated circuit manufacturing. After the wet etching or cleaning process is completed, the substrate needs to be dried.

[0003] It is known that a supercritical fluid with zero surface tension can be used to dry substrates. For example, a substrate covered with isopropyl alcohol (IPA) is transferred from a cleaning chamber to a drying chamber, which is then closed to form a sealed chamber. A supercritical fluid is then supplied to the sealed chamber, dissolving the IPA on the substrate surface into the supercritical fluid to remove the IPA from the substrate, drying the substrate. The supercritical fluid in the sealed chamber is then vaporized and discharged from the sealed chamber. After the pressure in the sealed chamber returns to atmospheric pressure, the sealed chamber is opened, and the dried substrate is removed.

[0004] Particle size is a significant factor influencing the equipment's process results. The aforementioned substrate drying process involves, on the one hand, opening, closing, and locking the drying chamber, as well as inserting and removing substrates. During this process, the movement of these components, affected by factors such as friction between the moving parts, can easily generate particulate matter. If these particles enter the drying chamber, they can contaminate the substrates and affect the equipment's process results. Furthermore, because the drying chamber needs to be opened to insert or remove substrates, various environmental contaminants can enter the chamber during this process, further contaminating the substrates and affecting the equipment's process results.

[0005] Therefore, it is necessary to improve the supercritical fluid drying device in order to reduce or even eliminate particle contamination of the substrate. Summary of the Invention

[0006] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a supercritical fluid drying device for solving the problem of the chamber of the supercritical fluid drying device being contaminated by pollutants such as particulate matter in the prior art.

[0007] To achieve the above-mentioned purpose and other related purposes, according to one embodiment of the present invention, a supercritical fluid drying device is proposed, comprising a cavity, wherein the cavity comprises an upper cavity and a lower cavity, the lower cavity is arranged below the upper cavity, and is configured to be suitable for relative movement with the upper cavity in a vertical direction, so that the upper cavity and the lower cavity are closed to form a closed chamber; a connecting component and a locking mechanism, the connecting component is used to connect the upper cavity and the lower cavity, and the locking mechanism is used to lock or release the connecting component; an isolation component is used to prevent contaminants generated by the connecting component and the locking mechanism from entering the closed chamber when the upper cavity and the lower cavity are closed, and / or to prevent contaminants from entering the open space between the upper cavity and the lower cavity corresponding to the closed chamber when the upper cavity and the lower cavity are not closed.

[0008] Optionally, the connecting assembly includes a connecting piece, the upper cavity is provided with an upper connecting hole, the lower cavity is provided with a lower connecting hole corresponding to the upper connecting hole, the connecting piece is passed through the upper connecting hole and the lower connecting hole, and is used to connect the upper cavity and the lower cavity; the locking mechanism is provided in the upper cavity, the locking mechanism includes a driving mechanism and locking blocks located on both sides of the connecting piece, the locking blocks are used to move toward or away from each other in the horizontal direction on the upper cavity under the drive of the driving mechanism to lock or release the connecting piece; the isolation assembly includes a first retractable isolation piece, which is located between the upper cavity and the lower cavity, and is sleeved on the connecting piece.

[0009] Optionally, the isolation assembly further includes an upper cover, which is disposed above the upper cavity and is used to cover the locking mechanism and an upper portion of the connector located above the upper cavity.

[0010] Optionally, the connecting assembly further comprises a fixing member located below the lower cavity and connected to the lower portion of the connecting member located below the lower cavity, for fixing the connecting member to the lower cavity; the isolation assembly further comprises a lower cover body disposed below the lower cavity, for covering the lower portion of the connecting member and the fixing member.

[0011] Optionally, an outer cover is further included, which is arranged at the periphery of the cavity and forms an isolation space with the cavity, and is used to prevent pollutants outside the isolation space from entering the isolation space.

[0012] According to another embodiment of the present invention, a supercritical fluid drying device is proposed, including a cavity, wherein the cavity includes an upper cavity and a lower cavity, the lower cavity is arranged below the upper cavity, and is configured to be suitable for relative movement with the upper cavity in a vertical direction, so that the upper cavity and the lower cavity are closed to form a closed chamber; an outer cover forms an isolation space with the cavity, which is used to prevent contaminants outside the isolation space from entering the isolation space.

[0013] Optionally, the outer cover includes an outer cover bottom plate and an outer cover side plate, wherein the outer cover bottom plate is arranged below the lower cavity, and the outer cover side plate extends upward from the four sides of the outer cover bottom plate to the lower surface of the top of the upper cavity.

[0014] Optionally, the outer cover is further provided with an air inlet and an outer cover exhaust port; the air inlet is used to blow gas into the outer cover, and the outer cover exhaust port is provided on the transfer mechanism isolation cover for exhausting air from the outer cover to the outside.

[0015] As described above, the supercritical fluid drying device provided by the present invention has at least the following beneficial effects:

[0016] 1) By setting a first retractable isolation member between the connecting component and the open space of the cavity, it is used to prevent pollutants generated by the connecting component and the locking mechanism from entering the closed chamber, effectively reducing or even avoiding the contamination of the closed chamber of the cavity by particulate matter generated by the connecting component and the locking mechanism, thereby improving the cleanliness of the closed chamber, improving the process results, and increasing the process yield.

[0017] 2) By providing the upper cover and the lower cover, the connection components and the locking mechanism are further isolated, which further reduces the possibility of the closed chamber of the cavity being contaminated by the connection components and the locking mechanism, thereby improving the cleanliness of the closed chamber.

[0018] 3) By setting up an outer cover, an isolation space is formed on the periphery of the cavity, thereby effectively preventing pollutants outside the cavity from entering the closed chamber, thereby improving the cleanliness of the closed chamber; and the outer cover includes an air inlet and an outer cover exhaust port. By blowing clean gas into the outer cover from the air inlet and discharging the gas in the outer cover from the outer cover exhaust port, an air flow circulation is formed in the outer cover to discharge pollutants from the outer cover and improve the cleanliness of the outer cover.

[0019] 4) The outer cover is combined with an isolation component to further improve the cleanliness of the closed chamber, improve process results, and increase process yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Shown is a schematic structural diagram of an exemplary supercritical fluid drying device;

[0021] Figure 2 Shown is a three-dimensional schematic diagram of a supercritical fluid drying device in Example 1 of the present invention;

[0022] Figure 3a 、 Figure 3b and Figure 4 Shown is a schematic structural diagram of a supercritical fluid drying device in Example 1 of the present invention;

[0023] Figure 5 Shown is a three-dimensional schematic diagram of the lower cavity of the first embodiment of the present invention;

[0024] Figure 6 Shown is a three-dimensional schematic diagram of the upper cavity of the first embodiment of the present invention;

[0025] Figure 7 Shown is a schematic structural diagram of a heating assembly according to a first embodiment of the present invention;

[0026] Figure 8 Shown is a schematic structural diagram of a supercritical fluid drying device installed on a device frame in accordance with a first embodiment of the present invention;

[0027] Figure 9 Shown is a partial explosion schematic diagram of a supercritical fluid drying device according to the first embodiment of the present invention;

[0028] Figure 10 Shown is a cross-sectional schematic diagram of a supercritical fluid drying device according to a first embodiment of the present invention;

[0029] Figure 11 Shown is a three-dimensional schematic diagram of a supercritical fluid drying device according to a second embodiment of the present invention;

[0030] Figure 12 Shown is a schematic structural diagram of a supercritical fluid drying device according to a second embodiment of the present invention;

[0031] Figure 13 Shown is a three-dimensional schematic diagram of the outer cover of the second embodiment of the present invention;

[0032] Figure 14 Shown is a three-dimensional schematic diagram of a supercritical fluid drying device according to a second embodiment of the present invention installed on a device frame;

[0033] Figure 15 A partial exploded view of the outer cover of the second embodiment of the present invention is shown; and

[0034] Figure 16 Shown is a cross-sectional schematic diagram of a supercritical fluid drying device according to a second embodiment of the present invention. DETAILED DESCRIPTION

[0035] The following describes the embodiments of the present invention through specific examples. Those skilled in the art will readily understand the other advantages and benefits of the present invention from the disclosure herein. The present invention may also be implemented or applied through various other specific embodiments, and the details of this disclosure may be modified or altered based on different perspectives and applications without departing from the spirit of the present invention.

[0036] It should be noted that the drawings of the present disclosure only illustrate the basic concept of the present invention in a schematic manner, so the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the form, quantity and proportion of each component may be changed at will, and the component layout may also be more complicated.

[0037] In the following description, when referring to the accompanying drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Instead, they are merely examples of devices consistent with some aspects of the present invention as detailed in the appended claims.

[0038] The terms used in this disclosure are for the purpose of describing specific embodiments only and are not intended to limit the disclosure. As used in this disclosure and the appended claims, the singular forms "a," "an," "the," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.

[0039] In the description of the present disclosure, unless otherwise specified and limited, it should be noted that the terms "install", "connect" and "connect" should be understood in a broad sense. For example, it can be a mechanical connection or an electrical connection, or it can be the internal connection between two components. It can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0040] It should be understood that although the terms first, second, third, etc. may be used in the present disclosure to describe various information, such information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other.

[0041] Example 1

[0042] Figure 1The schematic diagram of the structure of an exemplary supercritical fluid drying device is shown, which includes a chamber 10, a connecting assembly 20, a locking mechanism 30, and a lifting mechanism 40. The chamber 10 includes an upper chamber 101 and a lower chamber 102, and the lower chamber 102 is arranged below the upper chamber 101. The lifting mechanism 40 is arranged below the lower chamber 102 and is used to drive the lower chamber 102 to move vertically (i.e., Figure 1 The connecting assembly 20 includes a connecting piece 201 and a fixing piece 202. The upper cavity 101 and the lower cavity 102 are respectively provided with through connecting holes. The connecting piece 201 passes through the upper cavity 101 and the lower cavity 102 through the connecting holes, and the first end of the connecting piece 201 is fixed to the lower cavity 102 through the fixing piece 202. The locking mechanism 30 is provided above the upper cavity 101. The locking mechanism 30 includes a driving part 302 and a locking block 301 located on both sides of the connecting piece 201. The driving part 302 is used to drive the locking block 301 so that the locking blocks 301 on both sides of the connecting piece 201 move relative to each other or move back to back in the horizontal direction on the upper cavity 101 to lock or release the connecting piece 201. In the process of the locking block 301 moving in the horizontal direction, the lower surface of the locking block 301 is in contact with the upper surface of the upper cavity 101 ( Figure 1 Friction is inevitable in the area (shown in the dashed box A), which can easily generate particles due to friction. These particles can enter the interior of the cavity 10 (i.e., the chamber) through the gap between the connecting hole and the connector 201. They can also enter the interior of the cavity 10 through the opening between the upper cavity 101 and the lower cavity 102 when the cavity 10 is open. If these particles enter the chamber, they will contaminate the substrate to be dried in the chamber, affecting the process results.

[0043] Therefore, to at least solve the above problems, this embodiment 1 provides a supercritical fluid drying device.

[0044] See Figures 2 to 4 , Figure 2 FIG. 1 shows a three-dimensional schematic diagram of a supercritical fluid drying device according to the first embodiment of the present invention. Figure 3a 、 Figure 3b and Figure 4 FIG. 1 shows a schematic structural diagram of a supercritical fluid drying device according to the first embodiment of the present invention, wherein: Figure 3a , cavity 1 is in the open state; Figure 3b In the example, cavity 1 is in a closed state. Figure 4 In the embodiment, the cavity 1 is in an open state and the connecting assembly 2 and the first retractable partition 51 are omitted. Figure 3a and Figure 3bAs shown, the supercritical fluid drying device in the first embodiment includes: a chamber 1, a connecting assembly 2, a locking mechanism 3, and an isolation assembly 5. The chamber 1 includes an upper chamber 11 and a lower chamber 12. The lower chamber 12 is arranged below the upper chamber 11 and is configured to be suitable for relative movement with the upper chamber 11 in the vertical direction (i.e., along the H direction) so that the upper chamber 11 and the lower chamber 12 can be closed to form a closed chamber. For example, in this embodiment, the lower chamber 12 also includes a lifting assembly 4. Under the lifting of the lifting assembly 4, the lower chamber 12 moves upward in the vertical direction until it is closed with the upper chamber 11 to form a closed chamber. The closed chamber is a process chamber in the supercritical fluid drying process, that is, the substrate to be dried is placed in the closed chamber to perform a drying process on the substrate. After the drying process is completed, the lower chamber 12 moves downward in the vertical direction under the support of the lifting assembly 4 to open the closed chamber and take out the substrate. The connecting assembly 2 is used to connect the upper cavity 11 and the lower cavity 12, and the locking mechanism 3 is used to lock or release the connecting assembly 2. The isolation assembly 5 is used to prevent contaminants generated by the connecting assembly 2 and the locking mechanism 3 from entering the sealed chamber when the upper cavity 11 and the lower cavity 12 are closed, and / or to prevent contaminants from entering the open space corresponding to the sealed chamber between the upper cavity 11 and the lower cavity 12 when the upper cavity 11 and the lower cavity 12 are not closed, thereby preventing the chamber of the chamber 1 from being contaminated by the connecting assembly 2 and the locking mechanism 3.

[0045] It should be noted that the "open space" in the present invention refers to the space between the upper cavity 11 and the lower cavity 12 that corresponds to the closed chamber. After the upper cavity 11 and the lower cavity 12 are closed, this open space corresponds to the closed chamber of the cavity 1. After contaminants enter this open space, they will usually be retained in the closed chamber of the cavity 1 after the cavity 1 is closed, thereby contaminating the closed chamber. Therefore, the entry of contaminants into this open space can also be understood as entering the closed chamber.

[0046] Continue reading Figure 3a and Figure 3b The connection assembly 2 includes a connection piece 21 and a fixing piece 22. The upper cavity 11 and the lower cavity 12 are respectively provided with connection holes. The connection piece 21 connects the upper cavity 11 and the lower cavity 12 through the connection holes. The fixing piece 22 is used to fix the connection piece 21 to the cavity 1. Figure 4 As shown, for example, in this embodiment 1, the upper cavity 11 is provided with an upper connecting hole 110 extending vertically therethrough, the lower cavity 12 is provided with a lower connecting hole 120 extending vertically therethrough, and the connecting member 21 is provided through the upper connecting hole 110 and the lower connecting hole 120, passing through the upper cavity 11 and the lower cavity 12. The connecting member 21 and the upper connecting hole 110 are clearance-fitted, while the connecting member 21 and the lower connecting hole 120 are tight-fitting.

[0047] During the drying process of the substrate, the interior of the sealed chamber is in a high temperature and high pressure environment to maintain the supercritical atmosphere. Therefore, in order to reduce the risk of deformation of the connector 21 in the high temperature and high pressure environment, the connector 21 needs to be fixedly connected to the chamber 1 through the fixing member 22. Figure 3a and Figure 3b As shown, the fixing member 22 is located below the lower cavity 12 and is used to fix the connecting member 21 to the lower cavity 12. Figure 5 , which shows a three-dimensional schematic diagram of the lower cavity 12 of the supercritical fluid drying device of the first embodiment of the present invention, Figure 5 The arrow H indicates the vertical direction. In this embodiment, the fixing member 22 is located below the lower cavity 12 and is connected to the lower portion of the connector 21 located below the lower cavity 12, thereby securing the connector 21 to the lower cavity 12. The connector has a slot at its lower portion, and the fixing member 22 includes a U-shaped clip that engages with the slot at its lower portion and is secured to the bottom of the lower cavity 12.

[0048] Continue reading Figure 3a and Figure 3b The locking mechanism 3 is disposed in and above the upper cavity 11. The locking mechanism 3 includes locking blocks 31 located on both sides of the connecting member 21. The locking blocks 31 include a first locking block 311 and a second locking block 312, respectively located on both sides of the connecting member 21, and are configured to move toward or away from each other horizontally on the upper cavity 11 to lock or release the connecting member 21. The first locking block 311 and the second locking block 312 are respectively connected to a locking driver 32, such as a cylinder, a linear motor, etc., configured to drive the first locking block 311 and the second locking block 312 to move toward or away from each other horizontally.

[0049] Combine Figure 2 and Figure 3a 、 Figure 3bThe isolation assembly 5 includes a first retractable isolation member 51, which is located between the upper cavity 11 and the lower cavity 12 and is sleeved on the connector 21. The first retractable isolation member 51 includes a hollow cylindrical component, such as a bellows. After being sleeved on the connector 21, the first retractable isolation member 51 can physically isolate the portion of the connector 21 located between the upper cavity 11 and the lower cavity 12 from the open space or the closed chamber of the cavity 1. There is a gap between the first retractable isolating member 51 and the connecting member 21. Therefore, even if the lower surfaces of the first locking block 311 and the second locking block 312 rub against the upper surface of the upper cavity 11 to generate particles, and the particles fall into the gap between the connecting member 21 and the upper connecting hole 110, the particles may fall into the interior of the first retractable isolating member 51, that is, the gap between the first retractable isolating member 51 and the connecting member 21, and will not fall into the open space or the closed chamber between the upper cavity 11 and the lower cavity 12, thereby preventing the particles from contaminating the closed chamber of the cavity 1. Figure 3a and Figure 3b As shown, the upper and lower ends of the bellows are respectively provided with mounting portions 511 , such as flanges, for fixed connection with the upper cavity 11 and the lower cavity 12 .

[0050] During the supercritical drying process, the upper cavity 11 and the lower cavity 12 need to be closed to form a closed chamber. In order to prevent the first retractable isolation member 51 located inside the cavity 1 from affecting the closure of the upper cavity 11 and the lower cavity 12, the upper cavity 11 and the lower cavity 12 are closed. Figure 3a 、 Figure 3b and Figure 4 In the first embodiment, the housing 1101 is further provided. The housing 1101 is provided at the lower portion of the upper cavity 11 or the upper portion of the lower cavity 12, and is used to accommodate the first retractable isolation member 51 when the upper cavity 11 and the lower cavity 12 are closed to form a sealed chamber. Specifically, the housing 1101 is provided at the lower portion of the upper cavity 11. Figure 3b As shown, when the upper cavity 11 and the lower cavity 12 are closed to form a sealed chamber, the first retractable isolation member 51 is accommodated in the accommodation hole 1101 located at the lower part of the upper cavity 11 .

[0051] See Figure 6 , Figure 6 The diagram shows a three-dimensional schematic diagram of the upper cavity of the supercritical fluid drying device of the first embodiment. Preferably, in this embodiment, the receiving hole 1101 is provided on the upper connecting hole 110 (please refer to Figure 4 The first retractable isolating member 51 is sleeved on the connecting member 21, and its radial dimension is larger than that of the connecting member 21. The aperture of the receiving hole 1101 is larger than that of the connecting hole. Figure 4 and Figure 6As shown, the diameter of the receiving hole 1101 is larger than that of the connecting hole 110, so the upper cavity 11 forms a step portion 1104 at the junction of the two holes. The mounting hole 1103 is provided on the step portion 1104 for mounting the flange at the top of the first telescopic isolator 51. The sidewall of the receiving hole 1101 is provided with a mounting groove 1102, which is used to avoid the flange of the first telescopic isolator 51 when the flange at the top of the first telescopic isolator 51 is mounted and fixed to the step portion 1104, and also serves as an installation guide.

[0052] Continue reading Figure 3a and 3b In this embodiment, the isolation assembly 5 further includes an upper cover 52, disposed above the upper chamber 11 and fixedly connected to the top of the upper chamber 11. It is used to cover the locking mechanism 3 and the upper portion of the connector 21 located above the upper chamber 11. Although the first retractable isolation member 51 can prevent particles from entering the sealed chamber through the upper connection hole 110, the chamber 1 is not always closed during the entire process. The chamber 1 needs to be opened to place substrates to be dried or to remove dried substrates from the open space between the upper and lower chambers 11, 12. When the chamber 1 is not closed, particles may enter the open space between the upper and lower chambers 11, 12, and then contaminate the sealed chamber after the chamber 1 is closed. In this embodiment, the upper cover 52 is disposed above the upper chamber 11, forming an isolation space within the upper cover 52 to physically isolate the locking mechanism 3 and the upper portion of the connector 21 located above the upper chamber 11. Therefore, the particles generated by the friction between the locking block 31 and the upper surface of the upper cavity 11 will be isolated inside the upper cover 52, thereby preventing the particles from entering the open space between the upper cavity 11 and the lower cavity 12 from the opening between the upper cavity 11 and the lower cavity 12.

[0053] In the first embodiment, four connecting members 21 are provided, which are respectively distributed near the four corners of the cavity 1. A first locking block 311 and a second locking block 312 are provided on both sides of each connecting member 21, and the first locking block 311 and the second locking block 311 are respectively connected to a locking driving member 32. It should be understood that, if Figure 2 As shown by the arrow B in the middle, the supercritical fluid supplied to the closed chamber enters the chamber from the middle area above the upper chamber 11, so a pipeline for supplying supercritical fluid to the chamber needs to be installed in the middle area above the upper chamber 11. Figure 2In this embodiment, two upper covers 52 with downward openings are included to form two isolated spaces. Each upper cover 52 covers the area where two connectors 21 and the corresponding locking mechanism 3 are located. In other possible embodiments, an upper cover 52 is provided above the area where each connector 21 and the corresponding locking mechanism 3 are located. Optionally, the pipeline for supplying supercritical fluid to the chamber is not provided above the upper cavity 11. Therefore, the upper cover 52 can also be a cover that covers the upper cavity 11 to form a larger isolated space.

[0054] In addition, if Figure 2 As shown, in this embodiment, the upper cover 52 is further provided with an upper cover transparent window 522 to facilitate observation of the working conditions of components such as the connector 21 and the locking mechanism 3 covered inside the upper cover 52 .

[0055] Optionally, in other possible embodiments, the upper cover body 52 is further provided with an upper cover body exhaust port, which can be connected to an exhaust component (for example, an exhaust fan) for exhausting air from the inside of the upper cover body 52 to the outside, thereby removing the particulate matter isolated in the upper cover body 52 and improving the cleanliness inside the upper cover body 52.

[0056] See Figure 2 and Figure 3a 、 Figure 3b In this embodiment, the isolation assembly 5 also includes a lower cover 53, which is arranged below the lower cavity 12 and fixedly connected to the bottom of the lower cavity 12, and is used to cover the lower part of the connector (i.e., the part of the connector 21 located below the lower cavity 12) and the fixing member 22. As mentioned above, the fixing member 22 is located below the lower cavity 12 and is used to fix the connector 21 to the lower cavity 12. Where the fixing member 22 contacts the connector 21, particles may be generated due to friction. When the upper cavity 11 and the lower cavity 12 are in a non-closed state, the particles may enter the open space between the upper cavity 11 and the lower cavity 12 from the opening between the upper cavity 11 and the lower cavity 12, thereby contaminating the closed cavity. Therefore, by providing the lower cover 53, an isolation space is formed in the area where the lower part of the connector 21 and the fixing member 22 are located, so that the particles generated here are contained in the isolation space and cannot enter the open space between the upper cavity 11 and the lower cavity 12.

[0057] Combine Figures 2 to 6 In this embodiment, a plurality of heating components 6 are further included, which are fixed on the outer wall of the cavity 1 and used to heat the cavity 1. Figure 7, which shows a schematic structural diagram of the heating component of the first embodiment of the present invention. The heating component 6 includes a heating plate 61, a thermal insulation member 62 and a heating component isolation cover 63. The heating plate 61 can be an aluminum plate with a heating wire, and the heating plate 61 is fixed to the outer wall of the cavity 1. The surface of the heating plate 61 that is attached to the cavity 1 is the inner side surface, and the surface opposite to the inner side surface is the outer side surface. The outer side surface of the heating plate 61 covers the thermal insulation member 62 to reduce heat loss and play a role in heat preservation. The heating component isolation cover 63 is provided on the outer wall of the cavity 1 through a connecting component 64, such as a bolt, to accommodate the heating plate 61 and the thermal insulation member 62 in its internal space. As a result, the pollutants that may be generated by the heating plate 61 and the thermal insulation member 62 will also be isolated inside the heating component isolation cover 63, and thus cannot enter the open space or the closed chamber between the upper cavity 11 and the lower cavity 12.

[0058] See Figure 8 , Figure 8 The diagram shows the structure of the supercritical fluid drying device of the first embodiment installed on the device frame. This embodiment adopts a solution in which the upper cavity 11 is fixed and the lower cavity 12 moves upward in the vertical direction. Therefore, the upper cavity 11 needs to be fixedly mounted on the device frame. In other embodiments, a solution in which the lower cavity 12 is fixed and the upper cavity 11 moves downward in the vertical direction can also be adopted. Accordingly, the lower cavity 12 needs to be fixedly mounted on the device frame. The device frame includes a base 81 and a side frame 82, and the upper cavity 11 is fixedly mounted on the upper part of the side frame 82.

[0059] Figure 9 Shown is a partial explosion diagram of the supercritical fluid drying device of this embodiment 1. Figure 6 、 Figure 8 and Figure 9 In this embodiment, the upper cavity 11 includes an upper cavity body 111 and a top cover 112. The top cover 112 is located above the upper cavity body 111 and extends horizontally outward from the top of the upper cavity body 111. The top cover 112 shown in the figure has a roughly rectangular outline and is specifically a rectangular frame that surrounds the outer periphery of the top of the rectangular upper cavity body 111.

[0060] It should be understood that, generally, under the premise of ensuring that the closed chamber is sufficient to accommodate the substrate for drying the substrate, the smaller the closed chamber space, the more it can improve the efficiency of the drying process and save the amount of supercritical fluid used, and can reduce the volume of the supercritical fluid drying device. In this embodiment, on the one hand, the upper cavity 11 needs to be provided with mounting components to be installed on the side frame 82; on the other hand, components such as a locking block 31 and a locking drive 32 are also provided above the upper cavity 11. Therefore, without increasing the closed chamber space, a top cover 112 with a covering area larger than the upper cavity body 111 is provided above the upper cavity body 111. The top cover 112 extends horizontally from the top of the upper cavity body 111 toward the periphery, and can form cavity mounting portions 1120 on both sides to facilitate the installation of the upper cavity 11 on the device frame.

[0061] Furthermore, in this embodiment, the top cover 112 includes a top cover base 1121 and a top cover extension 1122. The top cover extension 1122 is arranged around the top cover base 1121 and extends outward from the top cover base 1121 in the horizontal direction. The bottom of the upper cover body 52 is installed on the top cover extension 1122. Among them, the upper cavity body 111 and the top cover base 1121 can be an integrally formed whole, and the top cover extension 1122 is detachable relative to the top cover base 1121. On the one hand, when installing the upper cavity body 111, the upper cavity body 111 and the top cover base 1121 of the top cover 112 can be installed as a whole on the device frame, and then the top cover extension 1122 can be installed. This makes it easier to install the upper cavity body 111 in a limited device frame space. On the other hand, the top cover extension 1122 can increase the coverage area of ​​the top cover 112, increase the installation space, and facilitate the installation of the upper cover body 52. ​​Optionally, as Figure 9 As shown, in this embodiment, the locking drive member 32 on one side of the connecting member 21 can also be installed on the top cover extension 1122. In addition, in this embodiment, the integrally formed upper cavity body 111 and the top cover base 1121 can be made of high temperature and high pressure resistant materials to meet the process requirements of the supercritical drying process, and the detachable top cover extension 1122 extends around the top cover base 1121 and is less affected by the high pressure and high temperature environment in the closed chamber. Therefore, the requirements for the high temperature and high pressure resistance of the material are not high, and it can be made of relatively low-cost ordinary materials, thereby reducing the processing cost of the supercritical fluid drying device. When there is sufficient space in the device frame and the reduction of processing costs is not considered, a solution in which the upper cavity body 111, the top cover base 1121 and the top cover extension 1122 are integrally formed can also be adopted.

[0062] Continue reading Figure 8In this embodiment, the lifting assembly 4 is mounted on the device frame base 81. The lifting assembly 4 includes a lifting moving member 41 and a lifting driving member 42. The lifting moving member 41 is arranged below the lower cavity 12, and a lifting platform 411 is provided on the upper end of the lifting moving member 41 for lifting the lower cavity 12. The lifting moving member 41 moves in the vertical direction under the drive of the lifting driving member 42, thereby driving the lower cavity 12 to rise and fall in the vertical direction.

[0063] Illustratively, in this embodiment, the lifting driving member 42 includes a motor, the lifting moving member 41 includes a lead screw, and the lifting assembly 4 further includes a linear guide rail, a synchronous belt, and a synchronous pulley. Figure 10 FIG. 8 is a cross-sectional view of the lifting assembly 4 of the first embodiment. Figure 10 The lifting assembly 4 includes a lifting base plate 40 fixed to the base 81 of the device frame, and a guide rail mounting plate 401 extending upward from the lifting base plate 40 is provided on the lifting base plate 40, and the linear guide rail 43 is provided on the guide rail mounting plate 401. For example, the motor (please refer to Figure 8 The output end of the lifting drive member 42 is connected to the synchronous pulley, and is connected to the synchronous pulley at the lower end of the screw through a synchronous belt. The motor drives the screw to move linearly in the vertical direction (H direction in the figure) through the synchronous pulley and the synchronous belt, and uses the linear guide rail 43 as a guide to realize the lifting and lowering of the lower cavity 12.

[0064] Since the closed chamber of cavity 1 is in a high temperature and high pressure environment during the supercritical fluid drying process, cavity 1 may be deformed. In order to prevent the deformation of cavity 1 from damaging the lifting assembly 4, in this embodiment, the lifting platform 411 and the lower cavity 12 are separated, that is, after the lower cavity 12 is lifted to a predetermined position so that the upper cavity 11 and the lower cavity 12 are closed, the lifting platform 411 will separate from the lower cavity 12 and descend. When the cavity 1 needs to be opened, it will rise again to lift the lower cavity 12. In other possible embodiments, the lifting platform 411 and the lower cavity 12 may also be fixed. In addition, if Figure 8 and Figure 10 As shown, the upper end of the lead screw extends horizontally in all directions to form a lifting flange 410 to facilitate the installation of a lifting platform 411 on the lead screw.

[0065] Continue reading Figure 8 and Figure 10In order to improve the smoothness of the lower cavity 12 during lifting and lowering, as well as the stability of the cavity 1 during the process, the lifting assembly 4 also includes a guide member 44. The upper end of the guide member 44 is fixedly connected to the lower cavity 12. The upper end of the guide member 44 extends horizontally in all directions to form a guide flange 440. The guide member 44 is connected to the lower cavity 12 via the guide flange 440. A guide frame 441 is provided on the lifting base plate 40. The guide frame 441 includes guide side plates extending upward from the lifting base plate 40 and a guide cross plate connected to the upper end of the guide side plates. A guide hole is formed on the guide cross plate, and a guide sleeve 442 is provided on the guide hole. The lower portion of the guide member 44 passes through the guide sleeve 442 to form a stable guide mechanism. On the one hand, during the process of the lifting and moving part 41 driving the lower cavity 12 to rise and fall, the guide part 44 cooperates with the guide sleeve 442 to play a guiding role, making the lifting process smoother; on the other hand, during the drying process of the cavity 1, the guide part 44 cooperates with the guide sleeve 442 to play a limiting role, which is beneficial to reduce the shaking of the cavity 1.

[0066] It should be understood that the lifting assembly 4 in this embodiment is only exemplary. In other possible embodiments, the lifting assembly 4 may also be implemented in other forms, such as driving the lifting moving part 41 to move through a gear transmission mechanism to achieve lifting, or achieving lifting through a hydraulic transmission mechanism.

[0067] This first embodiment provides a supercritical fluid drying device. By disposing a first retractable isolation member 51 between the connecting assembly 2 and the sealed chamber of the chamber 1, the sealed chamber of the chamber 1 is isolated from the connecting assembly 2 and the locking mechanism 3. This effectively reduces or even prevents particulate matter generated by the connecting assembly 2 and the locking mechanism 3 from contaminating the sealed chamber of the chamber 1, thereby improving the cleanliness of the sealed chamber, improving process results, and increasing process yield. In addition, this first embodiment also includes an upper cover 52 and a lower cover 53 to further isolate the connecting assembly 2 and the locking mechanism 3, further reducing the possibility of contamination of the sealed chamber of the chamber 1 by the connecting assembly 2 and the locking mechanism 3, and further improving the cleanliness of the sealed chamber.

[0068] Example 2

[0069] This embodiment 2 provides a supercritical fluid drying device, see Figure 11 , Figure 11 FIG2 shows a perspective schematic diagram of a supercritical fluid drying device according to the second embodiment. The main difference between the second embodiment and the first embodiment is that the second embodiment further includes an outer cover 7 . Figure 12 FIG2 shows a schematic structural diagram of a supercritical fluid drying device according to the second embodiment of the present invention. Figure 11 and Figure 12 The outer cover 7 is arranged on the periphery of the cavity 1 to form an isolation space with the cavity 1, and is used to prevent pollutants outside the isolation space from entering the isolation space.

[0070] Figure 13 FIG2 shows a perspective schematic diagram of the outer cover of the second embodiment. Figure 13 The outer cover 7 is an upward opening cover, comprising an outer cover bottom plate 72, an outer cover side plate 71 and a support member 73. Figure 12 (For clarity, the support member 73 is omitted), the outer cover bottom plate 72 is disposed below the lower cavity 12, and the outer cover side plate 71 extends upward from the edge of the outer cover bottom plate 72 to the lower surface of the top of the upper cavity 11, that is, the top of the outer cover side plate 71 abuts against the lower surface of the top of the upper cavity 11. Support member 73 (please refer to Figure 13 The support member 73 is provided below the outer cover bottom plate 72 to support the outer cover 7. Thus, the outer cover 7 and the top of the upper cavity 11 form an isolation space, so that pollutants (such as particulate matter) outside the isolation space cannot enter the open space or the closed chamber between the upper cavity 11 and the lower cavity 12, thereby preventing the closed chamber from being contaminated by pollutants in the external environment.

[0071] Continue reading Figure 13 The outer cover side plate 71 includes a first outer cover side plate 711 and a second outer cover side plate 712 , and the first outer cover side plate 711 and the second outer cover side plate 712 are adjacent to each other. Figure 14 The figure shows a three-dimensional schematic diagram of the supercritical fluid drying device of the second embodiment installed on the device frame. Figure 13 and Figure 14 The outer cover side panels 71 on both sides corresponding to the side frame 82 are defined as first outer cover side panels 711. The side frame 82 includes a vertical side frame 821 extending in the vertical direction and a horizontal side frame 822 extending in the horizontal direction. The vertical side frame 821 and the horizontal side frame 822 are connected to each other to form a stable device frame structure.

[0072] Similar to the first embodiment, in the second embodiment, the upper cavity 11 (please refer to Figure 6 ) includes an upper cavity body 111 and a top cover 112. The top cover 112 is located above the upper cavity body 111 and extends horizontally from the top of the upper cavity body 111 to the periphery, forming cavity mounting portions 1120 on both sides corresponding to the side frames 81 of the device frame. The top cover 112 includes a top cover base 1121 and a top cover extension 1122. The top cover extension 1122 is arranged around the top cover base 1121 and extends horizontally outward from the top cover base 1121. In this embodiment 2, since the top cover base 1121 (please refer to Figure 6The top cover base 1121 (in the figure) and the sides corresponding to the side frame 82 extend relative to the upper cavity body 111 to form a cavity mounting portion 1120, providing ample installation space. Therefore, the upper end of the first outer cover side panel 711 extends to the lower surface of the top cover base 1121. The remaining area of ​​the top cover base 1121 is relatively small relative to the extension of the upper cavity body 111, resulting in limited installation space. Therefore, the upper end of the second outer cover side panel 712 extends to the lower surface of the top cover extension 1122.

[0073] It should be understood that, similar to the first embodiment, those skilled in the art can, under the guidance of this disclosure, set the structure of the upper cavity 11 in combination with actual installation requirements. For example, in other possible embodiments, the space around the top cover base 1121 extending relative to the upper cavity body 111 is relatively large, with sufficient installation space, and there is no need to set the top cover extension 1122. Therefore, the upper ends of the first outer cover body side panel 711 and the second outer cover body side panel 712 both extend to the lower surface of the top cover base 1121; or the space around the top cover base 1121 extending relative to the upper cavity body 111 is relatively small, without sufficient installation space, and therefore, the upper ends of the first outer cover body side panel 711 and the second outer cover body side panel 712 both extend to the lower surface of the top cover extension 1122.

[0074] Continue reading Figure 11 In this embodiment, the second outer cover side plate 712 further includes an opening 713. In the vertical direction, the opening 713 is located between the upper cavity 11 and the lower cavity 12. The opening 713 is used to allow the substrate to enter and exit the open space between the upper cavity 11 and the lower cavity 12. For example, a substrate transfer robot can be used to send the substrate to be dried from the opening 713 into the open space between the upper cavity 11 and the lower cavity 12, or the substrate that has completed the drying process can be taken out from the open space between the upper cavity 11 and the lower cavity 12 through the opening 713. In order to prevent the opening 713 from affecting the isolation effect of the outer cover 7, the opening 713 is usually provided with a door. When the substrate needs to enter and exit the cavity 1 through the opening 713, the door is opened; otherwise, the door is closed to seal the opening 713.

[0075] Continue reading Figure 12In this embodiment, it also includes a substrate carrying portion 19 and a transfer mechanism 9. The substrate carrying portion 19, for example, can be a tray, which is arranged on the upper surface of the lower cavity 12 and is used to carry the substrate; the transfer mechanism 9 is arranged outside the cavity 1 and is used to transfer the substrate between the substrate carrying portion 19 and the open space. As mentioned above, the open space refers to the space corresponding to the closed chamber between the upper cavity 11 and the lower cavity 12. After the upper cavity 11 and the lower cavity 12 are closed, the open space corresponds to the closed chamber of the cavity 1. The transfer mechanism 9 includes a transfer support portion 91 that can be extended into the open space and a transfer drive portion 92 installed on the outside of the cavity 1. The transfer support portion 91 is driven by the transfer drive portion 92 to extend into the open space or be withdrawn from the open space.

[0076] Specifically, the substrate transfer robot outside the chamber 1 passes through the opening 713 (see Figure 11 The substrate is transferred to the open space between the upper cavity 11 and the lower cavity 12 through the opening 713 in the cavity. The transfer support part 91 is driven by the transfer drive part 92 to extend into the open space between the upper cavity 11 and the lower cavity 12, receives the substrate from the substrate transfer robot, and then places the substrate on the substrate supporting part 19. The substrate transfer robot withdraws from the open space. After the substrate is placed, the transfer support part 91 is pulled out of the open space under the drive of the transfer drive part 92. After the drying process is completed, the transfer support part 91 is driven by the transfer drive part 92 to extend into the open space, and takes out the dried substrate placed on the substrate supporting part 19. The substrate transfer robot enters the open space through the opening 713, takes the substrate from the transfer support part 91, and the substrate transfer robot takes the dried substrate out of the open space through the opening 713.

[0077] Since the transfer support portion 91 of the transfer mechanism 9 needs to enter and exit the open space between the upper cavity 11 and the lower cavity 12, in order to ensure the isolation effect of the outer cover 7, the transfer mechanism 9 should also be accommodated in the isolation space of the outer cover 7. However, when the installation space of the device frame is limited, the space that can be accommodated by the outer cover 7 is also limited. Figure 12 As shown, in this embodiment, the transfer mechanism 9 further includes a transfer mechanism mounting portion 93, and the transfer mechanism 9 is mounted on the first outer cover body side plate 711 of the outer cover body 7 through the transfer mechanism mounting portion 93. There are two transfer mechanisms 9, which are symmetrically arranged on the first outer cover body side plates 711 on both sides. Figure 13 and Figure 14 The outer cover 7 also includes a transfer mechanism isolation cover 74, which is provided on the first outer cover side plate 711 and is used to cover the transfer mechanism 9 (see Figure 12 The transfer mechanism 9 in the figure is provided with a transfer mechanism isolation cover 74 for each transfer mechanism 9.

[0078] In addition, in this embodiment, the outer cover 7 further includes an outer cover transparent window 714, illustratively, as shown in FIG. Figure 13 As shown, the outer cover transparent window 714 is provided on the second outer cover side plate 712 so as to facilitate observation of the working conditions of the cavity 1, transfer mechanism 9 and other components inside the outer cover 7 from outside the outer cover 7 .

[0079] Continue reading Figure 12 , similar to the first embodiment, in the second embodiment, a lifting assembly 4 is provided below the lower cavity 12, which is used to drive the lower cavity 12 to move in the vertical direction to close or open the sealed chamber. The lifting assembly 4 is a motion assembly, including moving parts such as a lifting moving part 41 and a lifting driving part 42. It is easy to generate pollutants during the movement process, such as particulate matter from the moving parts themselves due to friction between the moving parts, or from lubricating grease that may be used on the moving parts. Therefore, in order to prevent the pollutants that may be generated by the lifting assembly 4 from contaminating the sealed chamber of the cavity 1, the lifting assembly 4 needs to be isolated outside the outer cover 7. In this embodiment, the outer cover bottom plate 72 of the outer cover 7 is located above the lifting assembly 4.

[0080] Further, combined with Figure 16 , Figure 16 Shown the cross-sectional schematic diagram of supercritical fluid drying device in the present embodiment two.Because lower cavity 12 need to move along vertical direction (H direction among the figure) in the isolation space of outer cover 7 under the lifting of lifting movable member 41, so outer cover base plate 72 need be provided with first base plate opening 721, pass first base plate opening 721 and enter in the isolation space of outer cover 7 for lifting movable member 41.Therefore, in the present embodiment, also comprise second telescopic isolator 751, for example be bellows, be used for forming between first base plate opening 721 and outer cover 7 inside and isolate.Exemplarily, second telescopic isolator 751 can be the bellows that is arranged between outer cover base plate 72 and the lifting movable member 41.The top of lifting movable member 41 is positioned in the isolation space of outer cover 7, and bellows is sleeved on the lifting movable member 41, and the upper end of bellows is fixedly mounted on the lower surface of lifting flange 410, and the lower end of bellows is fixedly mounted on the upper surface of outer cover base plate 72. The bellows accommodates the first bottom plate opening 721 in the inner space of the bellows. Even if pollutants generated by the lifting assembly 4 pass through the first bottom plate opening 721, they will be isolated in the inner space of the bellows and cannot enter the interior of the outer cover 7.

[0081] Continue reading Figure 16When the guide member 44 is provided, a second bottom plate opening 722 is also provided on the outer cover bottom plate 72, allowing the lower portion of the guide member 44 to pass through the second bottom plate opening 722 and be introduced into the guide sleeve 442, thereby achieving engagement between the guide member 44 and the guide sleeve 442 below. Therefore, this embodiment further includes a third retractable isolation member 752, which is disposed between the second bottom plate opening 722 and the outer cover 7 and is used to isolate the second bottom plate opening 722 from the interior of the outer cover 7. The upper portion of the guide member 44 is located within the isolation space of the outer cover 7. The third retractable isolation member 752, such as a bellows, is sleeved onto the guide member 44. The upper end of the bellows is fixedly mounted to the lower surface of the guide flange 440, and the lower end of the bellows is fixedly mounted to the upper surface of the outer cover bottom plate 72. The bellows accommodates the second bottom plate opening 722 in the inner space of the bellows. Even if pollutants generated by the lifting assembly 4 pass through the second bottom plate opening 722, they will be isolated in the inner space of the bellows and cannot enter the interior of the outer cover 7.

[0082] Optionally, in this embodiment, the outer cover body 7 further includes an air inlet and an outer cover body exhaust port. The air inlet can be connected to an air inlet assembly, through which clean gas, such as nitrogen or inert gas, is blown into the interior of the outer cover body 7. The outer cover body exhaust port can be connected to an exhaust assembly, through which air is exhausted from the inside of the outer cover body 7 to the outside. In this way, air circulation can be achieved in the isolated space of the outer cover body 7, and possible pollution such as particulate matter can be discharged from the outer cover body 7, thereby further improving the cleanliness of the isolated space of the outer cover body 7. For example, as Figures 11 to 15 As shown, the outer cover exhaust port (not shown) is arranged at the bottom of the transfer mechanism isolation cover 74, and the outer cover exhaust port is externally connected to the exhaust pipe 76 for connecting to the exhaust assembly. In other possible implementations, the outer cover exhaust port can also be arranged at other positions on the outer cover 7.

[0083] See Figure 15, which shows a partial exploded view of the outer cover body 7 in this embodiment. Optionally, in order to improve the uniformity of the airflow circulation in the outer cover body 7 and avoid the occurrence of airflow circulation dead corners, in this embodiment, the first outer cover body side plate 711 includes a porous plate 7111 and an outer plate 7112. By providing the porous plate 7111, the uniformity of the airflow circulation can be improved during exhaust. The outer plate 7112 is arranged on the outside of the porous plate 7111 and is used to seal the porous plate 7111. There is a certain distance between the porous plate 7111 and the outer plate 7112 to ensure that the airflow in the outer cover body 7 can pass through the porous plate 7111 and be discharged outward through the outer cover body exhaust port. The transfer mechanism 9 is installed on the outside of the porous plate 7111, and the outer plate 7112 is provided with a avoidance opening for avoiding the transfer mechanism 9. The transfer mechanism isolation cover 74 is provided on the outside of the avoidance opening, and the transfer mechanism 9 and the avoidance opening are accommodated in the isolation space of the transfer mechanism isolation cover 74. The pollutants inside the outer cover 7 can flow into the exhaust pipe 76 along with the air flow through the porous plate 7111 and the avoidance port, and finally be discharged from the outer cover 7, thereby maintaining a high cleanliness level in the isolation space of the outer cover 7.

[0084] This second embodiment provides a supercritical fluid drying device. By disposing an outer cover 7 on the periphery of the cavity 1, an isolated space is formed on the periphery of the cavity 1, thereby effectively preventing pollutants outside the cavity 1 from entering the closed chamber, thereby improving the cleanliness of the closed chamber. In addition, the outer cover 7 includes an air inlet and an outer cover exhaust port. By blowing clean gas into the outer cover 7 from the air inlet and exhausting the gas in the outer cover 7 from the outer cover exhaust port, an air flow circulation is formed in the outer cover 7 to discharge pollutants from the outer cover 7 and improve the cleanliness of the outer cover 7. The outer cover 7 is combined with the isolation component 5 to further improve the cleanliness of the closed chamber, improve the process results, and increase the process yield.

[0085] In other embodiments of the present invention, a supercritical fluid drying device is provided, which, compared with the second embodiment, does not include the isolation assembly 5 of the first embodiment. It should be understood that relying solely on the outer cover 7 can also prevent the enclosed chamber of the cavity 1 from being contaminated by external contaminants in the cavity 1 to a certain extent. Those skilled in the art can make a reasonable choice based on actual needs.

[0086] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Anyone skilled in the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by one of ordinary skill in the art without departing from the spirit and technical principles disclosed herein are intended to be covered by the claims of the present invention.

Claims

1. A supercritical fluid drying device, characterized in that: include: a cavity, the cavity comprising an upper cavity and a lower cavity, the lower cavity being disposed below the upper cavity and configured to move relative to the upper cavity in a vertical direction so that the upper cavity and the lower cavity are closed to form a sealed chamber; a connecting assembly and a locking mechanism, wherein the connecting assembly is used to connect the upper cavity and the lower cavity, and the locking mechanism is used to lock or release the connecting assembly; An isolation assembly is used to prevent contaminants generated by the connecting assembly and the locking mechanism from entering the closed chamber when the upper cavity and the lower cavity are closed, and / or to prevent contaminants from entering the open space between the upper cavity and the lower cavity corresponding to the closed chamber when the upper cavity and the lower cavity are not closed.

2. The supercritical fluid drying device according to claim 1, characterized in that: The connecting assembly includes a connecting piece, the upper cavity is provided with an upper connecting hole, the lower cavity is provided with a lower connecting hole corresponding to the upper connecting hole, and the connecting piece is passed through the upper connecting hole and the lower connecting hole to connect the upper cavity and the lower cavity; The locking mechanism is provided on the upper cavity, and includes a driving mechanism and locking blocks located on both sides of the connecting member. The locking blocks are used to move toward or away from each other in the horizontal direction on the upper cavity under the drive of the driving mechanism to lock or release the connecting member; The isolation assembly includes a first retractable isolation member, which is located between the upper cavity and the lower cavity and is sleeved on the connecting member.

3. The supercritical fluid drying device according to claim 2, characterized in that: Also includes a receiving hole, The accommodating hole is provided at the lower portion of the upper cavity or the upper portion of the lower cavity, and is used to accommodate the first retractable isolation member when the upper cavity and the lower cavity are closed to form a sealed chamber.

4. The supercritical fluid drying device according to claim 2, characterized in that: The isolation assembly further includes an upper cover, which is arranged above the upper cavity and is used to cover the locking mechanism and the upper portion of the connector located above the upper cavity.

5. The supercritical fluid drying device according to claim 4, characterized in that: The upper cavity comprises an upper cavity body and a top cover, The top cover is located above the upper cavity body and extends outward from the top of the upper cavity body in a horizontal direction. The upper cover is installed on the top cover.

6. The supercritical fluid drying device according to claim 5, characterized in that: The top cover comprises a top cover base and a top cover extension, The top cover extension portion is arranged around the top cover base portion and extends outward from the top cover base portion in a horizontal direction. The upper cover body is installed on the top cover extension portion.

7. The supercritical fluid drying device according to claim 4, characterized in that: The upper cover body also includes an upper cover body exhaust port for exhausting air from the upper cover body to the outside.

8. The supercritical fluid drying device according to claim 2, characterized in that: The connecting assembly further includes a fixing member located below the lower cavity and connected to a lower portion of the connecting member located below the lower cavity, for fixing the connecting member to the lower cavity; The isolation assembly further includes a lower cover body, which is arranged below the lower cavity and is used to cover the lower portion of the connecting member and the fixing member.

9. The supercritical fluid drying device according to claim 1, characterized in that: It also includes a heating component, which includes a heating plate and a heating component isolation cover. The heating plate is fixed to the outer wall of the cavity, and the heating component isolation cover is arranged on the outer side of the heating plate to cover the heating plate.

10. The supercritical fluid drying device according to claim 1, characterized in that: It also includes an outer cover, which is arranged on the periphery of the cavity and forms an isolation space with the cavity, and is used to prevent pollutants outside the isolation space from entering the isolation space.

11. The supercritical fluid drying device according to claim 10, characterized in that: The outer cover includes an outer cover bottom plate and an outer cover side plate, wherein the outer cover bottom plate is arranged below the lower cavity, and the outer cover side plate extends upward from the four sides of the outer cover bottom plate to the lower surface of the top of the upper cavity.

12. The supercritical fluid drying device according to claim 11, characterized in that: The outer cover side panel includes a first outer cover side panel and a second outer cover side panel, wherein the first outer cover side panel and the second outer cover side panel are adjacent to each other. The second outer cover side plate includes an opening, and the opening is located between the upper cavity and the lower cavity, and is used for allowing the substrate to enter and exit the open space.

13. The supercritical fluid drying device according to claim 11, characterized in that: It also includes a lifting assembly for driving the lower cavity to move in a vertical direction, so that the upper cavity and the lower cavity are closed to form a closed cavity or the closed cavity is opened; The outer cover bottom plate is arranged above the lifting assembly.

14. The supercritical fluid drying device according to claim 13, characterized in that: Also comprising a second retractable partition, The lifting assembly includes a lifting moving member and a lifting driving member, wherein the lifting moving member is used to drive the lower cavity to move in a vertical direction under the drive of the lifting driving member; The outer cover bottom plate includes a first bottom plate opening, so that the lifting moving member can pass through the first bottom plate opening and enter the outer cover; The second retractable isolation member is disposed between the first bottom plate opening and the outer cover, and is used to form isolation between the first bottom plate opening and the interior of the outer cover.

15. The supercritical fluid drying device according to claim 13, characterized in that: Also includes a third retractable spacer, The lifting assembly includes a guide member and a guide sleeve, wherein the upper end of the guide member is fixedly connected to the lower cavity, and the lower end of the guide member is guided into the guide sleeve; The outer cover bottom plate includes a second bottom plate opening for the guide member to pass through the second bottom plate opening and be introduced into the guide sleeve; The third retractable isolation member is disposed between the second bottom plate opening and the outer cover, and is used to form isolation between the second bottom plate opening and the interior of the outer cover.

16. The supercritical fluid drying device according to claim 12, characterized in that: It also includes a substrate supporting part and a transfer mechanism, The substrate carrying portion is provided in the lower cavity and is used for carrying the substrate; The transfer mechanism is provided on the side plate of the first outer cover body and is used to transfer the substrate between the substrate supporting portion and the open space; The outer cover body further includes a transfer mechanism isolation cover, which is arranged on the outer side of the first outer cover body side plate and is used to cover the transfer mechanism.

17. The supercritical fluid drying device according to claim 16, characterized in that: The outer cover also includes an air inlet and an outer cover air outlet; The air inlet is used to blow gas into the outer cover, and the outer cover exhaust port is provided on the transfer mechanism isolation cover and is used to exhaust air outward from the outer cover.

18. The supercritical fluid drying device according to claim 17, characterized in that: The first outer cover side plate includes a porous plate and an outer plate, the porous plate is provided with a plurality of through holes, and the outer plate is provided on the outer side of the porous plate for sealing the porous plate; The transfer mechanism isolation cover is arranged on the outer plate.

19. The supercritical fluid drying device according to claim 11, characterized in that: The outer cover also includes an air inlet and an outer cover air outlet; The air inlet is used to blow air into the outer cover, and the outer cover exhaust port is used to exhaust air from the outer cover.

20. A supercritical fluid drying device, characterized in that: include: a cavity, the cavity comprising an upper cavity and a lower cavity, the lower cavity being disposed below the upper cavity and configured to move relative to the upper cavity in a vertical direction so that the upper cavity and the lower cavity are closed to form a sealed chamber; The outer cover is arranged at the periphery of the cavity and forms an isolation space with the cavity, and is used to prevent pollutants outside the isolation space from entering the isolation space.

21. The supercritical fluid drying device according to claim 20, characterized in that: The outer cover includes an outer cover bottom plate and an outer cover side plate, wherein the outer cover bottom plate is arranged below the lower cavity, and the outer cover side plate extends upward from the four sides of the outer cover bottom plate to the lower surface of the top of the upper cavity.

22. The supercritical fluid drying device according to claim 21, characterized in that: The outer cover side panel includes a first outer cover side panel and a second outer cover side panel, wherein the first outer cover side panel and the second outer cover side panel are adjacent to each other. The second outer cover side plate includes an opening, which is located between the upper cavity and the lower cavity and is used for allowing a substrate to enter and exit the open space between the upper cavity and the lower cavity corresponding to the closed chamber.

23. The supercritical fluid drying device according to claim 21, characterized in that: It also includes a lifting assembly for driving the lower cavity to move in a vertical direction, so that the upper cavity and the lower cavity are closed to form a closed cavity or the closed cavity is opened; The outer cover bottom plate is arranged above the lifting assembly.

24. The supercritical fluid drying device according to claim 23, characterized in that: Also comprising a second retractable partition, The lifting assembly includes a lifting moving member and a lifting driving member, wherein the lifting moving member is used to drive the lower cavity to move in a vertical direction under the drive of the lifting driving member; The outer cover bottom plate includes a first bottom plate opening, so that the lifting moving member can pass through the first bottom plate opening and enter the outer cover; The second retractable isolation member is disposed between the first bottom plate opening and the outer cover, and is used to form isolation between the first bottom plate opening and the interior of the outer cover.

25. The supercritical fluid drying device according to claim 23, characterized in that: Also includes a third retractable spacer, The lifting assembly includes a guide member and a guide sleeve, wherein the upper end of the guide member is fixedly connected to the lower cavity, and the lower end of the guide member is guided into the guide sleeve; The outer cover bottom plate includes a second bottom plate opening for the guide member to pass through the second bottom plate opening and be introduced into the guide sleeve; The third retractable isolation member is disposed between the second bottom plate opening and the outer cover, and is used to form isolation between the second bottom plate opening and the interior of the outer cover.

26. The supercritical fluid drying device according to claim 22, characterized in that: It also includes a substrate supporting part and a transfer mechanism, The substrate carrying portion is provided in the lower cavity and is used for carrying the substrate; The transfer mechanism is provided on the side plate of the first outer cover body and is used to transfer the substrate between the substrate supporting portion and the open space; The first outer cover side plate further includes a transfer mechanism isolation cover, which is arranged on the outer side of the first outer cover side plate and is used to cover the transfer mechanism.

27. The supercritical fluid drying device according to claim 26, characterized in that: The outer cover also includes an air inlet and an outer cover air outlet; The air inlet is used to blow gas into the outer cover, and the outer cover exhaust port is provided on the transfer mechanism isolation cover and is used to exhaust air outward from the outer cover.

28. The supercritical fluid drying device according to claim 27, characterized in that: The first outer cover side plate includes a porous plate and an outer plate, the porous plate is provided with a plurality of through holes, and the outer plate is provided on the outer side of the porous plate for sealing the porous plate; The transfer mechanism isolation cover is arranged on the outer plate.

29. The supercritical fluid drying device according to claim 21, characterized in that The outer cover also includes an air inlet and an outer cover air outlet; The air inlet is used to blow air into the outer cover, and the outer cover exhaust port is used to exhaust air from the outer cover.

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