Solid electrolyte micro energy storage module and preparation process thereof

By using a doped-modified garnet solid electrolyte layer and an optimized micro-nanostructure, the safety and packaging problems of traditional micro energy storage modules are solved, and a high-energy-density and high-safety micro energy storage module is realized, which is suitable for micro electronic devices and Internet of Things sensors.

CN120657231APending Publication Date: 2025-09-16广西电网有限责任公司来宾供电局
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202510679042.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-26
Publication Date
2025-09-16

AI Technical Summary

Technical Problem

Traditional micro energy storage modules use liquid electrolytes, which have problems such as leakage, flammability, and poor safety. In addition, packaging is difficult during the miniaturization process, making it difficult to meet the growing market demand.

Method used

A doped and modified garnet-type solid electrolyte layer is used in combination with nanoscale metal oxide particles to optimize the micro-nano structure of the positive and negative electrode current collector layers. A micro energy storage module is prepared by tape casting or spin coating, and the encapsulation layer uses polyethylene terephthalate or polyimide material.

Benefits of technology

It improves the energy density, charge and discharge performance and safety of micro energy storage modules, reduces preparation costs, and is compatible with existing semiconductor processes, making it suitable for micro electronic devices and Internet of Things sensors.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN120657231A_ABST
    Figure CN120657231A_ABST
Patent Text Reader

Abstract

The invention discloses a solid electrolyte micro energy storage module and a preparation process thereof. The module comprises a positive electrode current collector layer, a positive electrode active material layer, a solid electrolyte layer, a negative electrode active material layer and a negative electrode current collector layer which are stacked in sequence, and a packaging layer can be arranged on the outer side. Wherein the solid electrolyte layer is garnet type solid electrolyte doped with nanoscale metal oxide particles, and the ionic conductivity and the mechanical property are improved through component optimization; the positive / negative electrode active material layer adopts a multi-element active material combination, and a conductive agent and a binder are added to enhance the electrochemical performance; the contact area of the surface of the current collector is increased through the micro-nano structure design, and the electron transmission efficiency is improved. The preparation technology comprises the steps of current collector micro-nano structure processing, active slurry preparation, solid electrolyte layer calcination forming and module assembling and packaging, technological parameters of all the steps are controllable, and the preparation technology is suitable for large-scale production.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention relates to the field of micro energy storage technology, and in particular to a solid electrolyte micro energy storage module and a preparation process thereof. Background Art

[0002] As electronic devices move toward miniaturization and integration, the performance requirements for micro-energy storage modules are becoming increasingly stringent. Traditional micro-energy storage modules often use liquid electrolytes, which present issues such as leakage, flammability, and poor safety. Furthermore, the packaging of liquid electrolytes during miniaturization is difficult, limiting their further development. The emergence of solid-state electrolytes offers a new approach to addressing these issues. However, current micro-energy storage modules based on solid-state electrolytes still lack energy density, charge-discharge performance, and compatibility with the manufacturing process, making it difficult to meet the growing market demand.

[0003] To this end, a solid electrolyte micro energy storage module and its preparation process are proposed. Summary of the Invention

[0004] The present invention aims to solve the problems raised in the background technology and provides a solid electrolyte micro energy storage module and its preparation process. By optimizing the structural design of the micro energy storage module and the preparation process, the energy density, charge and discharge performance and safety of the micro energy storage module are improved, while the preparation cost is reduced and the compatibility of the preparation process with existing semiconductor processes is improved.

[0005] The specific technical solutions are as follows:

[0006] A solid electrolyte micro energy storage module comprises: a positive electrode current collector layer, a positive electrode active material layer, a solid electrolyte layer, a negative electrode active material layer and a negative electrode current collector layer stacked in sequence, wherein:

[0007] The solid electrolyte layer is a doped and modified garnet-type solid electrolyte layer, which is doped with nanoscale metal oxide particles, and the mass fraction of the nanoscale metal oxide particles in the solid electrolyte layer is 1-5%; the thickness of the positive electrode active material layer and the negative electrode active material layer are both 5-20 μm, and the thickness of the solid electrolyte layer is 10-50 μm; the surfaces of the positive electrode current collector layer and the negative electrode current collector layer are both provided with micro-nano structures, the height of the micro-nano structures is 0.5-2 μm, and the spacing between the micro-nano structures is 1-5 μm.

[0008] The above-mentioned solid electrolyte micro energy storage module, wherein the chemical formula of the doped modified garnet type solid electrolyte layer is Li7La3Zr2O 12-x M x , wherein M is at least one element selected from Al, Y, and Ta, and the value range of x is 0.01-0.1.

[0009] The above-mentioned solid electrolyte micro energy storage module, wherein the active material of the positive electrode active material layer is at least one of lithium cobalt oxide, lithium nickel cobalt manganese oxide, and lithium manganese oxide, and the positive electrode active material layer is further added with a conductive agent with a mass fraction of 5-15% and a binder with a mass fraction of 1-5%.

[0010] The above-mentioned solid electrolyte micro energy storage module, wherein the active material of the negative electrode active material layer is at least one of graphite, silicon-carbon composite material, and tin-based alloy, and the negative electrode active material layer is further added with a conductive agent with a mass fraction of 5-15% and a binder with a mass fraction of 1-5%.

[0011] In the above-mentioned solid electrolyte micro energy storage module, the material of the positive electrode current collector layer and the negative electrode current collector layer are both at least one of copper, aluminum, and stainless steel, and the micro-nano structure is formed by chemical etching or photolithography.

[0012] The above-mentioned solid electrolyte micro energy storage module further includes an encapsulation layer arranged outside the positive electrode current collector layer and the negative electrode current collector layer, the material of the encapsulation layer is at least one of polyethylene terephthalate and polyimide, and the thickness of the encapsulation layer is 10-50 μm.

[0013] The present invention also provides a preparation process of a solid electrolyte micro energy storage module, comprising the following steps:

[0014] S1: Preparation of positive electrode current collector layer and negative electrode current collector layer: Copper foil, aluminum foil or stainless steel foil is selected as raw material, and micro-nano structures are formed on its surface by chemical etching or photolithography process to obtain positive electrode current collector layer and negative electrode current collector layer;

[0015] S2: Preparing positive electrode active material slurry and negative electrode active material slurry: mixing the positive electrode active material, conductive agent and binder in a certain proportion, adding an organic solvent, and stirring evenly to obtain a positive electrode active material slurry; mixing the negative electrode active material, conductive agent and binder in a certain proportion, adding an organic solvent, and stirring evenly to obtain a negative electrode active material slurry;

[0016] S3: preparing a solid electrolyte layer: mixing a lithium source, a lanthanum source, a zirconium source, and a doping element source in a stoichiometric ratio, calcining at a high temperature to obtain a doped and modified garnet-type solid electrolyte powder, uniformly mixing the nano-sized metal oxide particles with the solid electrolyte powder, and then preparing the solid electrolyte layer by a tape casting method or a spin coating method;

[0017] S4: Assembling the micro energy storage module: coating the positive electrode active material slurry on the positive electrode current collector layer and drying to obtain the positive electrode active material layer; placing the solid electrolyte layer on the positive electrode active material layer; coating the negative electrode active material slurry on the negative electrode current collector layer and drying to obtain the negative electrode active material layer; placing the negative electrode active material layer on the solid electrolyte layer to obtain the main structure of the micro energy storage module;

[0018] S5: Encapsulation: Coating an encapsulation material on the outside of the main structure of the micro energy storage module, which forms an encapsulation layer after curing to obtain a solid electrolyte micro energy storage module.

[0019] In the above-mentioned preparation process of the solid electrolyte micro energy storage module, in step S2, the organic solvent is at least one of N-methylpyrrolidone, ethanol, and acetone, the stirring speed is 500-2000 rpm, and the stirring time is 2-6 hours.

[0020] In the above-mentioned preparation process of the solid electrolyte micro energy storage module, in step S3, the high-temperature calcination temperature is 800-1200° C. and the calcination time is 2-8 hours.

[0021] In the above-mentioned preparation process of the solid electrolyte micro energy storage module, in step S5, the curing temperature of the packaging material is 80-150° C., and the curing time is 1-5 hours.

[0022] The present invention has the following beneficial effects:

[0023] 1. The solid-state electrolyte micro-energy storage module of the present invention uses a doped and modified garnet-type solid electrolyte layer. By doping with nanoscale metal oxide particles, the ionic conductivity and mechanical properties of the solid electrolyte are effectively improved, thereby enhancing the charge and discharge performance and safety of the micro-energy storage module.

[0024] The micro-nano structure on the surface of the positive electrode current collector layer and the negative electrode current collector layer increases the contact area with the active material layer, reduces the interface resistance, and is conducive to improving the energy density and charge and discharge efficiency of the micro energy storage module.

[0025] 2. The preparation process of the present invention adopts common casting method, spin coating method, etc., which has good compatibility with existing semiconductor processes and can achieve large-scale production. At the same time, by optimizing the parameters of each preparation step, the stability and consistency of product quality are guaranteed, and the preparation cost is reduced.

[0026] Through material design and structural optimization, the present invention solves the problems of low energy density and poor charging and discharging performance of traditional micro energy storage modules. It has the characteristics of high safety, high stability and strong process compatibility, and is suitable for micro electronic equipment, Internet of Things sensors and other fields. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 A schematic structural diagram of a solid electrolyte micro energy storage module provided in an embodiment of the present invention;

[0028] Figure 2 A schematic cross-sectional view of a solid electrolyte micro energy storage module according to an embodiment of the present invention;

[0029] Figure 3 for Figure 2 Schematic diagram of the enlarged structure at point A in the middle.

[0030] In the attached figure:

[0031] 1. Positive electrode current collector layer; 2. Positive electrode active material layer; 3. Solid electrolyte layer; 4. Negative electrode active material layer; 5. Negative electrode current collector layer; 6. Encapsulation layer. DETAILED DESCRIPTION

[0032] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0033] Among them, the drawings are only used for illustrative purposes and represent only schematic diagrams rather than actual pictures, and should not be understood as limiting this patent; in order to better illustrate the embodiments of the present invention, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the drawings may be omitted.

[0034] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", "inside", "outside" and the like indicate an orientation or position relationship based on the orientation or position relationship shown in the drawings, it is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0035] In the description of the present invention, unless otherwise expressly specified or limited, when the term "connection" or the like appears to indicate a connection relationship between components, such term should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be internal communication between two components or an interaction between two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood in specific circumstances.

[0036] The solid electrolyte micro energy storage module provided in this embodiment is as follows: Figure 1-Figure 3 As shown, it comprises: a positive electrode current collector layer 1, a positive electrode active material layer 2, a solid electrolyte layer 3, a negative electrode active material layer 4 and a negative electrode current collector layer 5 stacked in sequence, wherein:

[0037] The solid electrolyte layer 3 is a doped modified garnet-type solid electrolyte layer 3, in which nanoscale metal oxide particles are doped, and the mass fraction of the nanoscale metal oxide particles in the solid electrolyte layer 3 is 1-5%; the thickness of the positive electrode active material layer 2 and the negative electrode active material layer 4 are both 5-20 μm, and the thickness of the solid electrolyte layer 3 is 10-50 μm; the surfaces of the positive electrode current collector layer 1 and the negative electrode current collector layer 5 are both provided with micro-nano structures, the height of the micro-nano structures is 0.5-2 μm, and the spacing between the micro-nano structures is 1-5 μm.

[0038] The solid-state electrolyte micro-energy storage module using the above technical solution constructs a complete micro-energy storage module structure by stacking various functional layers in sequence. Nanoscale metal oxide particles are added to the doped and modified garnet-type solid electrolyte layer 3 to improve the ionic conductivity and mechanical properties of the solid electrolyte; the thickness of each active material layer and the solid electrolyte layer 3 is limited to optimize the material transfer and reaction space inside the module; micro-nano structures are set on the surface of the positive electrode current collector layer 1 and the negative electrode current collector layer 5 to increase the contact area with the active material layer and improve the electron transfer efficiency.

[0039] The chemical formula of the doped modified garnet solid electrolyte layer 3 is Li7La3Zr2O 12-x M x , wherein M is at least one element selected from Al, Y, and Ta, and the value range of x is 0.01-0.1.

[0040] The above technical solution is used to clarify the chemical formula, doping elements and range of the doped modified garnet solid electrolyte layer 3, accurately control the crystal structure and electrochemical properties of the solid electrolyte, further improve its ion conductivity and stability, and ensure the consistency and reliability of the module performance.

[0041] The active material of the positive electrode active material layer 2 is at least one of lithium cobalt oxide, lithium nickel cobalt manganese oxide, and lithium manganese oxide. The positive electrode active material layer 2 also contains a conductive agent with a mass fraction of 5-15% and a binder with a mass fraction of 1-5%.

[0042] By adopting the above technical solution, the type of active material of the positive electrode active material layer 2 is determined and a conductive agent and a binder are added. Different positive electrode active materials provide different specific capacities and operating voltages. The conductive agent enhances electronic conductivity, and the binder ensures the binding force between the active material and the current collector, thereby jointly improving the electrochemical performance and cycle stability of the positive electrode.

[0043] The active material of the negative electrode active material layer 4 is at least one of graphite, silicon-carbon composite material, and tin-based alloy. The negative electrode active material layer 4 further contains a conductive agent with a mass fraction of 5-15% and a binder with a mass fraction of 1-5%.

[0044] By adopting the above technical solution, the type of active material of the negative electrode active material layer 4 is given and a conductive agent and a binder are added. The appropriate negative electrode active material provides a high specific capacity, and the conductive agent and the binder work synergistically to ensure good conductivity and structural stability of the negative electrode, thereby improving the overall charge and discharge performance and cycle life of the module.

[0045] The positive electrode current collector layer 1 and the negative electrode current collector layer 5 are both made of at least one of copper, aluminum, and stainless steel, and the micro-nano structure is formed by chemical etching or photolithography.

[0046] By adopting the above technical solution, the materials of the positive electrode current collector layer 1 and the negative electrode current collector layer 5 are limited to ensure the conductivity and mechanical strength of the current collector; the formation process of the micro-nano structure is explained to make the preparation of the micro-nano structure operable and controllable, and further enhance the interface bonding and electron transmission between the current collector and the active material layer.

[0047] The solid electrolyte micro energy storage module further includes an encapsulation layer 6 arranged outside the positive electrode current collector layer 1 and the negative electrode current collector layer 5. The material of the encapsulation layer 6 is at least one of polyethylene terephthalate and polyimide, and the thickness of the encapsulation layer 6 is 10-50 μm.

[0048] By adopting the above technical solution, adding the encapsulation layer 6 and limiting its material and thickness, the micro energy storage module is protected, preventing external environmental factors from affecting the internal structure and performance of the module, and improving the safety and service life of the module.

[0049] This embodiment also provides a preparation process of a solid electrolyte micro energy storage module, comprising the following steps:

[0050] S1: Preparation of positive electrode current collector layer 1 and negative electrode current collector layer 5: Copper foil, aluminum foil or stainless steel foil is selected as raw material, and micro-nano structures are formed on the surface thereof by chemical etching or photolithography process to obtain positive electrode current collector layer 1 and negative electrode current collector layer 5;

[0051] S2: Preparing positive electrode active material slurry and negative electrode active material slurry: mixing the positive electrode active material, conductive agent and binder in a certain proportion, adding an organic solvent, and stirring evenly to obtain a positive electrode active material slurry; mixing the negative electrode active material, conductive agent and binder in a certain proportion, adding an organic solvent, and stirring evenly to obtain a negative electrode active material slurry;

[0052] S3: Preparing solid electrolyte layer 3: A lithium source, a lanthanum source, a zirconium source, and a doping element source are mixed in a stoichiometric ratio and calcined at a high temperature to obtain a doped and modified garnet-type solid electrolyte powder. Nano-sized metal oxide particles are mixed with the solid electrolyte powder and then prepared by tape casting or spin coating to obtain solid electrolyte layer 3;

[0053] S4: Assembling the micro energy storage module: coating the positive electrode active material slurry on the positive electrode current collector layer 1, and drying to obtain the positive electrode active material layer 2; placing the solid electrolyte layer 3 on the positive electrode active material layer 2; coating the negative electrode active material slurry on the negative electrode current collector layer 5, and drying to obtain the negative electrode active material layer 4; placing the negative electrode active material layer 4 on the solid electrolyte layer 3 to obtain the main structure of the micro energy storage module;

[0054] S5: Encapsulation: Coating an encapsulation material on the outside of the main structure of the micro energy storage module, and forming an encapsulation layer 6 after curing to obtain a solid electrolyte micro energy storage module.

[0055] Using the above technical solution, the preparation process of the micro energy storage module is elaborated in detail. From the preparation of the current collector, slurry, solid electrolyte layer 3 to module assembly and packaging, each step is connected in an orderly manner, providing a feasible solution for the large-scale production of the module and ensuring the repeatability and consistency of module preparation.

[0056] Wherein, in step S2, the organic solvent is at least one of N-methylpyrrolidone, ethanol, and acetone, the stirring speed is 500-2000 rpm, and the stirring time is 2-6 hours.

[0057] By adopting the above technical solution, the selection of organic solvent and stirring conditions when preparing the slurry are clarified. The appropriate organic solvent ensures the uniform dispersion of each component, and the specific stirring speed and time ensure that the slurry has good uniformity and stability, which is beneficial to the subsequent coating process and the quality of the active material layer.

[0058] Wherein, in step S3, the high temperature calcination temperature is 800-1200° C., and the calcination time is 2-8 hours.

[0059] The above technical solution is used to determine the temperature and time of high-temperature calcination during the preparation of the solid electrolyte layer 3. Reasonable calcination conditions enable the solid electrolyte to form a stable crystal structure, improve its ionic conductivity and mechanical properties, and thus enhance the overall performance of the module.

[0060] Wherein, in step S5, the curing temperature of the packaging material is 80-150° C., and the curing time is 1-5 hours.

[0061] By adopting the above technical solution and specifying the curing temperature and time of the encapsulation material, it is ensured that the encapsulation layer 6 can tightly wrap the main structure of the module, forming a good sealing effect, and enhancing the environmental adaptability and safety of the module.

[0062] In summary, this embodiment provides the following two specific implementation methods: Specific implementation 1:

[0064] 1. Preparation of positive electrode current collector layer 1 and negative electrode current collector layer 5: Aluminum foil was selected as the raw material, and micro-nano structures with a height of 1 μm and a spacing of 3 μm were formed on its surface through a photolithography process to obtain positive electrode current collector layer 1 and negative electrode current collector layer 5.

[0065] 2. Prepare positive electrode active material slurry and negative electrode active material slurry: lithium cobalt oxide, conductive agent acetylene black and binder polyvinylidene fluoride are mixed in a mass ratio of 80:10:10, N-methylpyrrolidone is added as an organic solvent, and the mixture is stirred at a stirring speed of 1000 rpm for 4 hours to obtain positive electrode active material slurry; graphite, conductive agent acetylene black and binder sodium carboxymethyl cellulose are mixed in a mass ratio of 80:10:10, ethanol is added as an organic solvent, and the mixture is stirred at a stirring speed of 1000 rpm for 4 hours to obtain negative electrode active material slurry.

[0066] 3. Preparation of solid electrolyte layer 3: Lithium carbonate, lanthanum oxide, zirconium oxide and aluminum oxide are mixed in a stoichiometric ratio and calcined at 1000°C for 4 hours to obtain a doped garnet-type solid electrolyte powder, wherein the content of the doping element Al is such that \(x\) = 0.05; 3% by mass of nano-scale aluminum oxide particles are evenly mixed with the solid electrolyte powder, and then a solid electrolyte layer 3 with a thickness of 30 μm is prepared by a casting method.

[0067] 4. Assemble the micro energy storage module: apply the positive electrode active material slurry on the positive electrode current collector layer 1, and dry it at 80°C for 1 hour to obtain a positive electrode active material layer 2 with a thickness of 12 μm; place the solid electrolyte layer 3 on the positive electrode active material layer 2; apply the negative electrode active material slurry on the negative electrode current collector layer 5, and dry it at 80°C for 1 hour to obtain a negative electrode active material layer 4 with a thickness of 12 μm; place the negative electrode active material layer 4 on the solid electrolyte layer 3 to obtain the main structure of the micro energy storage module.

[0068] 5. Packaging: Coat the outer side of the main structure of the micro energy storage module with polyethylene terephthalate packaging material and cure it at 100° C. for 2 h to form a packaging layer 6 with a thickness of 30 μm to obtain a solid electrolyte micro energy storage module. Specific embodiment 2

[0070] 1. Preparation of positive electrode current collector layer 1 and negative electrode current collector layer 5: Copper foil was selected as the raw material, and micro-nano structures with a height of 0.8 μm and a spacing of 2 μm were formed on its surface through a chemical etching process to obtain positive electrode current collector layer 1 and negative electrode current collector layer 5.

[0071] 2. Prepare positive electrode active material slurry and negative electrode active material slurry: mix lithium nickel cobalt manganese oxide, conductive agent carbon nanotubes and binder polyvinylidene fluoride in a mass ratio of 85:8:7, add N-methylpyrrolidone as an organic solvent, and stir at a stirring speed of 1500 rpm for 3 hours to obtain positive electrode active material slurry; mix silicon carbon composite material, conductive agent carbon nanotubes and binder sodium carboxymethyl cellulose in a mass ratio of 85:8:7, add ethanol as an organic solvent, and stir at a stirring speed of 1500 rpm for 3 hours to obtain negative electrode active material slurry.

[0072] 3. Preparation of solid electrolyte layer 3: Lithium carbonate, lanthanum oxide, zirconium oxide and tantalum oxide are mixed in a stoichiometric ratio and calcined at 1100°C for 3 hours to obtain a doped garnet-type solid electrolyte powder, wherein the content of the doping element Ta is such that \(x\) = 0.08; 2% by mass of nano-scale tantalum oxide particles are evenly mixed with the solid electrolyte powder, and then a solid electrolyte layer 3 with a thickness of 25 μm is prepared by spin coating.

[0073] 4. Assemble the micro energy storage module: apply the positive electrode active material slurry on the positive electrode current collector layer 1, and dry it at 90°C for 1.5 hours to obtain a positive electrode active material layer 2 with a thickness of 15 μm; place the solid electrolyte layer 3 on the positive electrode active material layer 2; apply the negative electrode active material slurry on the negative electrode current collector layer 5, and dry it at 90°C for 1.5 hours to obtain a negative electrode active material layer 4 with a thickness of 15 μm; place the negative electrode active material layer 4 on the solid electrolyte layer 3 to obtain the main structure of the micro energy storage module.

[0074] 5. Encapsulation: A polyimide encapsulation material is coated on the outside of the main structure of the micro energy storage module and cured at 120° C. for 3 h to form an encapsulation layer 6 with a thickness of 25 μm to obtain a solid electrolyte micro energy storage module.

[0075] Performance tests were conducted on the solid electrolyte micro energy storage modules prepared in Specific Embodiment 1 and Specific Embodiment 2. The results showed that the micro energy storage modules of the present invention have high energy density, good charge and discharge performance, and excellent safety, meeting the needs of practical applications.

[0076] The above are only preferred embodiments of the present invention and do not limit the implementation mode and protection scope of the present invention. For those skilled in the art, it should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. A solid electrolyte micro energy storage module, characterized in that: include: A positive electrode current collector layer (1), a positive electrode active material layer (2), a solid electrolyte layer (3), a negative electrode active material layer (4) and a negative electrode current collector layer (5) are stacked in sequence, wherein: The solid electrolyte layer (3) is a doped modified garnet solid electrolyte layer (3), the doped modified garnet solid electrolyte layer (3) is doped with nano-scale metal oxide particles, and the mass fraction of the nano-scale metal oxide particles in the solid electrolyte layer (3) is 1-5%; the thickness of the positive electrode active material layer (2) and the negative electrode active material layer (4) are both 5-20 μm, and the thickness of the solid electrolyte layer (3) is 10-50 μm; the surfaces of the positive electrode current collector layer (1) and the negative electrode current collector layer (5) are both provided with micro-nano structures, the height of the micro-nano structures is 0.5-2 μm, and the spacing between the micro-nano structures is 1-5 μm.

2. The solid electrolyte micro energy storage module according to claim 1, characterized in that: The chemical formula of the doped modified garnet solid electrolyte layer (3) is Li7La3Zr2O 12-x M x , wherein M is at least one element selected from Al, Y, and Ta, and the value range of x is 0.01-0.

1.

3. The solid electrolyte micro energy storage module according to claim 1, characterized in that: The active material of the positive electrode active material layer (2) is at least one of lithium cobalt oxide, lithium nickel cobalt manganese oxide, and lithium manganese oxide. The positive electrode active material layer (2) is further added with a conductive agent with a mass fraction of 5-15% and a binder with a mass fraction of 1-5%.

4. The solid electrolyte micro energy storage module according to claim 1, characterized in that: The active material of the negative electrode active material layer (4) is at least one of graphite, silicon-carbon composite material, and tin-based alloy, and the negative electrode active material layer (4) is further added with a conductive agent with a mass fraction of 5-15% and a binder with a mass fraction of 1-5%.

5. The solid electrolyte micro energy storage module according to claim 1, characterized in that: The positive electrode current collector layer (1) and the negative electrode current collector layer (5) are both made of at least one of copper, aluminum, and stainless steel, and the micro-nano structure is formed by chemical etching or photolithography.

6. The solid electrolyte micro energy storage module according to claim 1, characterized in that: The invention also includes an encapsulation layer (6) arranged outside the positive electrode current collector layer (1) and the negative electrode current collector layer (5), wherein the material of the encapsulation layer (6) is at least one of polyethylene terephthalate and polyimide, and the thickness of the encapsulation layer (6) is 10-50 μm.

7. A process for preparing a solid electrolyte micro energy storage module according to any one of claims 1 to 6, characterized in that: The following steps are involved: S1: preparing a positive electrode current collector layer (1) and a negative electrode current collector layer (5): selecting copper foil, aluminum foil or stainless steel foil as raw materials, forming a micro-nano structure on the surface thereof by chemical etching or photolithography process, thereby obtaining a positive electrode current collector layer (1) and a negative electrode current collector layer (5); S2: Preparing positive electrode active material slurry and negative electrode active material slurry: mixing the positive electrode active material, conductive agent and binder in a certain proportion, adding an organic solvent, and stirring evenly to obtain a positive electrode active material slurry; mixing the negative electrode active material, conductive agent and binder in a certain proportion, adding an organic solvent, and stirring evenly to obtain a negative electrode active material slurry; S3: preparing a solid electrolyte layer (3): mixing a lithium source, a lanthanum source, a zirconium source and a doping element source in a stoichiometric ratio, calcining at a high temperature to obtain a doped and modified garnet-type solid electrolyte powder, uniformly mixing nano-scale metal oxide particles with the solid electrolyte powder, and then preparing the solid electrolyte layer (3) by a tape casting method or a spin coating method; S4: Assembling the micro energy storage module: coating the positive electrode active material slurry on the positive electrode current collector layer (1), and obtaining the positive electrode active material layer (2) after drying; placing the solid electrolyte layer (3) on the positive electrode active material layer (2); coating the negative electrode active material slurry on the negative electrode current collector layer (5), and obtaining the negative electrode active material layer (4) after drying; placing the negative electrode active material layer (4) on the solid electrolyte layer (3) to obtain the main structure of the micro energy storage module; S5: Encapsulation: coating an encapsulation material on the outside of the main structure of the micro energy storage module, and forming an encapsulation layer (6) after curing to obtain a solid electrolyte micro energy storage module.

8. The preparation process of the solid electrolyte micro energy storage module according to claim 7, characterized in that: In step S2, the organic solvent is at least one of N-methylpyrrolidone, ethanol, and acetone, the stirring speed is 500-2000 rpm, and the stirring time is 2-6 hours.

9. The preparation process of the solid electrolyte micro energy storage module according to claim 7, characterized in that: In step S3, the high-temperature calcination temperature is 800-1200° C., and the calcination time is 2-8 hours.

10. The preparation process of the solid electrolyte micro energy storage module according to claim 7, characterized in that: In step S5, the curing temperature of the packaging material is 80-150° C., and the curing time is 1-5 hours.