Machining equipment for machining cavity of epitaxial equipment and machining method of machining equipment

Abstract

The invention discloses machining equipment for a machining cavity of epitaxial equipment and a machining method of the machining equipment, and belongs to the technical field of workpiece cutting machining equipment.The key point of the technical scheme is that the machining equipment comprises a machining equipment body, and the machining equipment body comprises a workbench provided with a clamp device used for clamping the machining cavity; the axis of the clamp device is the same as that of the workbench; the processing machine head is used for milling, drilling and grinding; the detection device comprises a rotating seat, a movable adjusting assembly, a detection head and laser detection modules, the multiple laser detection modules are installed on the detection head, the movable adjusting assembly is connected between the detection head and the rotating seat, the axis of the rotating seat is the same as that of the workbench, and the rotating seat is installed on the workbench; and the driving mechanism is connected between the rotating seat and the workbench, and the driving mechanism is used for driving the rotating seat to rotate. Detection can be carried out in the machining process of the epitaxial equipment machining cavity, and the machining efficiency is improved.

Description

Technical Field

[0001] The present application belongs to the technical field of workpiece cutting equipment, and in particular relates to a processing equipment and a processing method thereof for machining a cavity of an epitaxial device. Background Art

[0002] Epitaxial equipment is one of the key equipment in semiconductor manufacturing. Its machined cavity, as the core component in the epitaxial growth process, has an important impact on the growth quality and efficiency of semiconductor materials.

[0003] The machined cavity is processed and formed by the precision processing steps of milling, drilling and grinding of processing equipment. After processing and forming, the processing size needs to be inspected, which is usually done manually. Since there are many sizes to be inspected, the inspection time is long. Therefore, in order to improve the processing efficiency of the machined cavity during the processing, the processing equipment is improved. Summary of the Invention

[0004] The purpose of this application is to address the above-mentioned technical problems and provide a processing device and a processing method for machining a cavity of an epitaxial device, which can perform detection during the machining process of the cavity of the epitaxial device and improve the processing efficiency.

[0005] The present application provides a processing device for machining a cavity of an epitaxial device, including a processing device body, wherein the processing device body includes: a workbench having a clamping device for clamping the machined cavity, wherein the axis of the clamping device is the same as the axis of the workbench; Processing head, used for milling, drilling and grinding; A detection device, comprising a rotating base, a movable adjustment component, a detection head, and a laser detection module. The laser detection module is provided with a plurality of components mounted on the detection head. The movable adjustment component is connected between the detection head and the rotating base. The rotating base is aligned with the axis of the workbench and is mounted on the workbench. The driving mechanism is connected between the rotating seat and the workbench, and is used to drive the rotating seat to rotate.

[0006] The processing equipment body can adopt a five-axis machining center or a turntable processing equipment. The machining cavity of the epitaxial equipment is clamped by a fixture on the workbench, and then the machining cavity of the epitaxial equipment is milled, drilled, and ground by the processing head. It is mainly realized by different milling cutters, drilling cutters, and grinding cutters. The machining cavity of the epitaxial equipment is cylindrical as a whole. The inner wall surface, outer wall surface, hole groove and other structures that have been processed are detected by the detection device. The rotation of the rotating seat can control the movement of the mobile adjustment component, the detection head, and the laser detection module to rotate around the circumference of the workpiece. The mobile adjustment component can control the movement of the detection head on the vertical plane. After the data detected by the laser detection module is analyzed and calculated , which can achieve faster and higher-precision detection. When inspecting the inner wall surface of the cavity machined by the epitaxial equipment, the axis of the detection head is moved to the same axis as the cavity machined by the epitaxial equipment, and then the detection head is controlled to move in the vertical direction. The size of the inner wall surface of the workpiece is realized through the laser detection module. When inspecting the outer wall surface of the cavity machined by the epitaxial equipment, the laser detection module on the detection head is aligned with the outer wall surface, and several groups of positions at different heights are selected. Then, the rotation of the rotating seat is controlled to detect the outer wall surfaces at different heights in turn. The size of the outer wall surface is obtained by analyzing and calculating the data detected by the laser detection module. The rotation of the rotating seat is mainly driven by a driving mechanism.

[0007] Furthermore, the movement and adjustment component includes: A first swing arm is hinged on the rotating base, and the first swing arm is driven by a motor to rotate around the hinge axis between the first swing arm and the rotating base; The second swing arm is hinged to the first swing arm, and the second swing arm is driven by a motor to rotate around the hinge axis between the second swing arm and the first swing arm; The detection head is hinged to the second swing arm, and the detection head is driven by a motor to rotate around the hinge axis between the detection head and the second swing arm.

[0008] Furthermore, the driving mechanism includes: a first motor mounted on the lower side of the workbench, wherein a driving shaft of the first motor is provided with a first gear; The ring gear is mounted on the rotating seat and meshes with the first gear.

[0009] Furthermore, the rotating seat includes: The ring body has a T-shaped cross section; A plurality of limiting members are provided and connected to the first ring body via fasteners; Wherein, the limiting member is provided with a plug-in groove corresponding to the ring body, and the workbench is provided with a slide groove corresponding to the rotating seat.

[0010] Furthermore, the rotating seat further includes: a first retaining frame mounted on the ring body and corresponding to the slide groove, wherein the first retaining frame is provided with a first ball; The second retaining frame is installed on both sides of the limiting member and corresponds to the sliding groove. The second retaining frame is provided with a second ball.

[0011] Furthermore, the detection head includes: A rotating shell is movably mounted on the detection head, and the rotating shell and the detection head are driven to rotate by a motor; The detection rod body is provided with a movable seat, and the movable seat is movably connected to the rotating shell; a second motor, mounted in the rotating housing, wherein an output shaft of the second motor is provided with a second gear; The rack is installed on the movable base and meshes with the second gear.

[0012] Furthermore, the detection head further includes: The ball head is installed on the detection rod body and connected to the moving seat by a ball joint; There are three iron cores connected to the ball heads by ball joints; The coil is provided with a mounting seat, wherein the mounting seat is ball-jointed to the movable seat; Wherein, the iron core is inserted into the coil.

[0013] The present application also provides a method for processing a processing device for machining a cavity of an epitaxial device, the specific steps comprising: S1, place the workpiece on the workbench and clamp it, then control the machining head to perform milling or drilling on the areas that need to be processed; S2, rotating the detection device through the rotating seat to an angle where it does not interfere with the processing head; S3, after the machining head completes the milling process of the inner cavity of the machining cavity, the machining head is controlled to perform drilling, and at this time, the detection device is controlled to detect the inner cavity of the machining cavity; S4, there are drill holes in multiple directions on the machining cavity. The detection device is used to detect the drill holes that have been processed by the processing head without affecting the drilling, and the drilling accuracy is detected, so that detection is achieved while processing. After processing and detection are completed, the workpiece is removed and replaced with the workpiece to be processed.

[0014] The beneficial effects of this application are: 1. The detection device can be used to detect the completed processed parts during the processing of the processing head while ensuring that the detection device and the processing head do not interfere with each other, thereby further improving the processing accuracy and efficiency of the machining cavity of the epitaxial equipment.

[0015] 2. The detection head is controlled to move and adjust in the vertical direction through the rotating seat, the first swing arm, the second swing arm, the detection head and other structures.

[0016] 3. Stable and smooth rotation between the cage and the workbench is achieved through the ring body, the limiter, the first cage, the second cage, the first ball, the second ball, the first motor, the first gear, and the gear ring.

[0017] 4. By rotating the shell and the ball joint between the detection rod, rotating and telescoping, the laser detection module can detect holes and slots with different depths and axis deflection structures. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the structure of the processing equipment body of this application; Figure 2 A schematic diagram of the structure of the workbench of this application; Figure 3 For this application Figure 2 A magnified view of point A; Figure 4 This is a schematic diagram of the structure of the detection head of this application; Figure 5 For this application Figure 4 An enlarged view of point B; Reference numerals in the figure are: 100, processing equipment body; 110, processing head; 200, workbench; 210, clamping device; 220, slide; 300, detection device; 310, rotating seat; 311, ring body; 312, limiter; 313, first retaining frame; 314, first ball; 315, second retaining frame; 316, second ball; 317, plug-in slot; 320, movable adjustment component; 321, first A swing arm; 322, a second swing arm; 330, a detection head; 331, a rotating shell; 332, a detection rod; 333, a second motor; 334, a second gear; 335, a rack; 336, a ball head; 337, an iron core; 338, a coil; 339, a mounting base; 340, a laser detection module; 350, a moving base; 400, a driving mechanism; 410, a first motor; 411, a first gear; 420, a ring gear. DETAILED DESCRIPTION

[0019] The following will be combined with the accompanying drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field are within the scope of protection of this application.

[0020] The terms "first," "second," and the like in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than that illustrated or described herein, and that the objects distinguished by "first," "second," and the like are generally of the same type, and do not limit the number of objects; for example, the first object can be one or more. In addition, the term "and / or" in the specification and claims refers to at least one of the connected objects, and the character " / " generally indicates that the objects connected are in an "or" relationship.

[0021] The following provides a detailed description of the embodiments of the present application through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0022] Example 1: like Figures 1-4 As shown, an embodiment of the present application provides a processing device for machining a cavity of an epitaxial device, comprising a processing device body (100), wherein the processing device body (100) comprises: A workbench (200) having a clamping device (210) for clamping a machined cavity, wherein the axis of the clamping device (210) is the same as the axis of the workbench (200); A processing head (110) for performing milling, drilling and grinding processes; A detection device (300), the detection device (300) comprising a rotating seat (310), a movable adjustment component (320), a detection head (330), and a laser detection module (340), wherein the laser detection module (340) is provided with a plurality of components mounted on the detection head (330), the movable adjustment component (320) is connected between the detection head (330) and the rotating seat (310), and the rotating seat (310) and the workbench (200) have the same axis and are mounted on the workbench (200); The driving mechanism (400) is connected between the rotating seat (310) and the workbench (200), and the driving mechanism (400) is used to drive the rotating seat (310) to rotate.

[0023] The processing equipment body (100) can adopt a five-axis machining center or a turntable processing equipment. The epitaxial equipment machining cavity is clamped by a clamping device (210) on a workbench (200), and then the epitaxial equipment machining cavity is milled, drilled, and ground by a processing head (110). Different milling cutters, drilling cutters, and grinding cutters are mainly used to achieve this. The epitaxial equipment machining cavity is cylindrical in shape as a whole. The inner wall surface, outer wall surface, hole groove and other structures that have been processed are detected by a detection device (300). The rotation of the rotating seat (310) can control the mobile adjustment component (320), the detection head (330), and the laser detection module (340) to rotate around the circumference of the workpiece. The mobile adjustment component (320) can control the detection head (330) to move on the vertical plane. The data detected by the laser detection module (340) After analysis and calculation, faster and more accurate detection can be achieved. When detecting the inner wall surface of the cavity machined by the epitaxial equipment, the axis of the detection head (330) is moved to the same axis as the cavity machined by the epitaxial equipment, and then the detection head (330) is controlled to move in the vertical direction, and the size of the inner wall surface of the workpiece is achieved through the laser detection module (340). When detecting the outer wall surface of the cavity machined by the epitaxial equipment, the laser detection module (340) on the detection head (330) is placed in correspondence with the outer wall surface, several groups of positions at different heights are selected, and then the rotating seat (310) is controlled to rotate, and the outer wall surfaces at different heights are detected in turn. The size of the outer wall surface is obtained by analyzing and calculating the data detected by the laser detection module (340). The rotation of the rotating seat (310) is mainly driven by the driving mechanism (400).

[0024] Example 2: like Figure 1-Figure 3 As shown, the embodiment of the present application provides a processing device for machining a cavity of an epitaxial device. In addition to the above technical features, the movable adjustment component (320) further includes: A first swing arm (321) is hinged to the rotating base (310), and the first swing arm (321) is driven by a motor to rotate around a hinge axis between the first swing arm and the rotating base (310); The second swing arm (322) is hinged to the first swing arm (321), and the second swing arm (322) is driven by a motor to rotate around the hinge axis between the second swing arm and the first swing arm (321); The detection head (330) is hinged to the second swing arm (322), and the detection head (330) is driven by a motor to rotate around a hinge axis between the detection head (330) and the second swing arm (322).

[0025] The rotating seat (310), the first swing arm (321), the second swing arm (322), and the detection head (330) are hinged in sequence and controlled by a motor to realize the control of the detection head (330) to move and adjust in the vertical direction. The axis of the hole groove on the side wall of the machining cavity of the epitaxial equipment intersects with the axis of the workpiece cylinder. When the detection head (330) detects, the axis of the detection head (330) is made to be the same as the axis of the hole groove by adjusting the first swing arm (321), the second swing arm (322), and the detection head (330). Then, the first swing arm (321), the second swing arm (322), and the detection head (330) are controlled to move in coordination so that the detection head (330) moves along the axis of the hole groove to detect the size of the hole groove.

[0026] Furthermore, the driving mechanism (400) comprises: A first motor (410) is installed on the lower side of the workbench (200), and a driving shaft of the first motor (410) is provided with a first gear (411); The ring gear (420) is mounted on the rotating base (310) and meshes with the first gear (411).

[0027] The first gear (411) is mounted on the lower side of the workbench (200) via fasteners such as bolts. The first gear (411) is mounted on the output shaft of the first motor (410). The first gear (411) is meshed with the ring gear (420). The ring gear (420) is connected to the lower side of the rotating seat (310) via fasteners such as bolts. The rotating seat (310) is driven and controlled by the first motor (410) to rotate.

[0028] Furthermore, the rotating seat (310) includes: The ring body (311) has a T-shaped cross section; A plurality of limiting members (312) are provided and connected to the first ring body (311) via fasteners; The limiting member (312) is provided with a plug-in slot (317) corresponding to the ring body (311), and the workbench (200) is provided with a slide slot (220) corresponding to the rotating seat (310).

[0029] The rotating seat (310) is movably installed in the slide groove (220) of the workbench (200), and the ring body (311) and the limiting member (312) are fixedly connected by fasteners such as bolts. The slide groove (220) is formed into an I-shape by the connection between the ring body (311) and the limiting member (312). The lower side of the workbench (200) is welded with a connecting portion connecting the two sides of the slide groove (220), so that the workbench (200) has a stable overall structure. The limiting member (312) is installed through the gap between adjacent connecting portions. After installation, the ring body (311) and the limiting member (312) limit the upper and lower sides of the workbench (200), further improving the structural stability between the rotating seat (310) and the workbench (200). The ring body (311) is inserted into the insertion groove (317), further improving the structural stability after the ring body (311) and the limiting member (312) are fixedly connected.

[0030] Furthermore, the rotating seat (310) further includes: A first retaining frame (313) is mounted on the ring body (311) and corresponds to the slide groove (220), and the first retaining frame (313) is provided with a first ball (314); The second retaining frame (315) is installed on both sides of the limiting member (312) and corresponds to the sliding groove (220). The second retaining frame (315) is provided with a second ball (316).

[0031] The first retaining frame (313) is mounted on the top lower side of the ring body (311) by means of fasteners such as bolts, and the second retaining frame (315) is mounted on the bottom upper side by means of fasteners such as bolts. The first ball (314) is mounted on the first retaining frame (313), and the second ball (316) is mounted on the second retaining frame (315), so that the first ball (314) and the second ball (316) are offset against the slide groove (220), thereby improving the stability and smoothness of the rotation of the rotating seat (310).

[0032] Example 3: like Figure 1 、 Figure 4 、 Figure 5 As shown, the embodiment of the present application provides a processing device for machining a cavity of an epitaxial device. In addition to the above technical features, the detection head (330) further includes: A rotating shell (331) is movably mounted on the detection head (330), wherein the rotating shell (331) and the detection head (330) are driven to rotate by a motor; The detection rod body (332) is provided with a movable seat (350), and the movable seat (350) is movably connected to the rotating shell (331); A second motor (333) is installed in the rotating housing (331), and an output shaft of the second motor (333) is provided with a second gear (334); The rack (335) is mounted on the movable base (350) and meshes with the second gear (334).

[0033] The rotating shell (331) is movably mounted on the detection head (330) through a bearing. The rotating shell (331) is connected to the motor through a gear structure. The rotating shell (331) rotates under the driving action of the motor. The laser detection module (340) is mounted on the detection rod (332). The axes of the detection rod (332) and the rotating module are the same. When the rotating shell (331) rotates, the laser detection module (340) can rotate around the axis of the rotating shell (331) to detect the hole slot. The second motor ( The detection rod (332) is driven by the second motor (333) to move telescopically in the rotating shell (331), and the laser detection module (340) is moved along the axis of the rotating shell (331). The detection rod (332) can detect the size of a deeper hole groove or the angle between the axis of the hole groove and the axis of the workpiece as a whole. At least two groups of laser detection modules (340) are set on the detection rod (332).

[0034] Furthermore, the detection head (330) further includes: The ball head (336) is mounted on the detection rod (332) and is connected to the movable seat (350) via a ball joint; The iron core (337) is provided with three and is connected to the ball head (336) via a ball joint; The coil (338) is provided with a mounting seat (339), wherein the mounting seat (339) is connected to the movable seat (350) via a ball joint; The iron core (337) is inserted into the coil (338).

[0035] When the axis of the hole groove on the workpiece does not intersect with the overall axis of the workpiece, the ball head (336) is rotated and adjusted on the movable seat (350) to cause deflection between the axis of the detection rod body (332) and the axis of the rotating shell (331), thereby adjusting the axis of the detection rod body (332) to correspond to the axis of the hole groove to be detected, and then realizing the detection of such hole grooves. There are three groups of iron cores (337) and coils (338) evenly distributed on the ball head (336).

[0036] Example 4: The present application also provides a method for processing a processing device for machining a cavity of an epitaxial device, the specific steps comprising: S1, placing a workpiece on a workbench (200) and clamping it, and controlling a processing head (110) to perform milling or drilling on the area to be processed; S2, rotating the detection device (300) through the rotating seat (310) to an angle where the detection device and the processing head (110) do not interfere with each other; S3, after the machining head (110) completes the milling process of the inner cavity of the machining cavity, the machining head (110) is controlled to perform drilling, and at this time, the detection device (300) is controlled to detect the inner cavity of the machining cavity; S4, the machining cavity has multiple orientations of drill holes, and the drill holes that have been processed by the machining head (110) are inspected by the inspection device (300) without affecting the drilling, and the drilling accuracy is inspected, so that inspection is carried out while machining. After the machining and inspection are completed, the workpiece is removed and replaced with the workpiece to be processed.

[0037] The detection device (300) can be used to detect the processed parts of the processing head (110) during the processing process, while ensuring that the detection device (300) and the processing head (110) do not interfere with each other. If inconsistent dimensions are found, the processing can be reprocessed or stopped in time. Through this real-time detection, the processing accuracy and processing efficiency of the machining cavity of the epitaxial equipment are further improved.

[0038] It should be noted that, in this article, the terms "comprise", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the statement "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device comprising the element. In addition, it should be noted that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in the opposite order according to the functions involved. For example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.

[0039] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of this application, ordinary technicians in this field can also make many forms without departing from the purpose of this application and the scope of protection of the claims, all of which are within the protection of this application.

Claims

1. A processing device for machining a cavity of an epitaxial device, comprising a processing device body (100), characterized in that: The processing equipment body (100) comprises: A workbench (200) having a clamping device (210) for clamping a machined cavity, wherein the axis of the clamping device (210) is the same as the axis of the workbench (200); A processing head (110) for performing milling, drilling, and grinding processes; A detection device (300), the detection device (300) comprising a rotating seat (310), a movable adjustment component (320), a detection head (330), and a laser detection module (340), wherein the laser detection module (340) is provided with a plurality of components mounted on the detection head (330), the movable adjustment component (320) is connected between the detection head (330) and the rotating seat (310), and the rotating seat (310) and the workbench (200) have the same axis and are mounted on the workbench (200); The driving mechanism (400) is connected between the rotating seat (310) and the workbench (200), and the driving mechanism (400) is used to drive the rotating seat (310) to rotate.

2. The processing equipment for machining a cavity of an epitaxial equipment according to claim 1, characterized in that: The movement adjustment component (320) includes: A first swing arm (321) is hinged to the rotating seat (310), and a motor drives the first swing arm (321) to rotate around a hinge axis between the first swing arm and the rotating seat (310); The second swing arm (322) is hinged to the first swing arm (321), and the motor drives the second swing arm (322) to rotate around the hinge axis between the second swing arm and the first swing arm (321); The detection head (330) is hinged to the second swing arm (322), and the detection head (330) is driven by a motor to rotate around a hinge axis between the detection head (330) and the second swing arm (322).

3. The processing equipment for machining a cavity of an epitaxial equipment according to claim 1, characterized in that: The driving mechanism (400) comprises: A first motor (410) is mounted on the lower side of the workbench (200), and a driving shaft of the first motor (410) is provided with a first gear (411); The ring gear (420) is mounted on the rotating seat (310) and meshes with the first gear (411).

4. The processing equipment for machining a cavity of an epitaxial equipment according to claim 1, characterized in that: The rotating seat (310) comprises: Ring body (311), having a T-shaped cross section; A plurality of limiting members (312) are provided and connected to the first ring body (311) via fasteners; The limiting member (312) is provided with a plug-in slot (317) corresponding to the ring body (311), and the workbench (200) is provided with a slide slot (220) corresponding to the rotating seat (310).

5. The processing equipment for machining a cavity of an epitaxial equipment according to claim 4, characterized in that: The rotating seat (310) further includes: A first retaining frame (313) is mounted on the ring body (311) and corresponds to the slide groove (220), and the first retaining frame (313) is provided with a first ball (314); The second retaining frame (315) is installed on both sides of the limiting member (312) and corresponds to the sliding groove (220). The second retaining frame (315) is provided with a second ball (316).

6. The processing equipment for machining a cavity of an epitaxial equipment according to claim 1, characterized in that: The detection head (330) comprises: A rotating shell (331) is movably mounted on the detection head (330), wherein the rotating shell (331) and the detection head (330) are driven to rotate by a motor; The detection rod body (332) is provided with a movable seat (350), and the movable seat (350) is movably connected to the rotating shell (331); A second motor (333) is installed in the rotating housing (331), and an output shaft of the second motor (333) is provided with a second gear (334); The rack (335) is mounted on the movable seat (350) and meshes with the second gear (334).

7. The processing equipment for machining a cavity of an epitaxial equipment according to claim 6, characterized in that: The detection head (330) further includes: A ball head (336) is mounted on the detection rod (332) and is connected to the movable seat (350) via a ball joint; Three iron cores (337) are provided and are connected to the ball heads (336) via ball joints; The coil (338) is provided with a mounting seat (339), wherein the mounting seat (339) is connected to the movable seat (350) via a ball joint; The iron core (337) is inserted into the coil (338).

8. A processing method applicable to the processing equipment for machining a cavity of an epitaxial equipment according to claim 1, characterized in that: The specific steps include: S1, placing the workpiece on the workbench (200) and clamping it, and controlling the processing head (110) to perform milling or drilling on the area to be processed; S2, rotating the detection device (300) via the rotating seat (310) to an angle where the detection device and the processing head (110) do not interfere with each other; S3, after the machining head (110) completes the milling process of the inner cavity of the machining cavity, the machining head (110) is controlled to perform drilling, and at this time, the detection device (300) is controlled to detect the inner cavity of the machining cavity; S4, the machining cavity has multiple orientations of drill holes, and the detection device (300) detects the drill holes that have been processed by the machining head (110) without affecting the drilling, and detects the drilling accuracy, so as to realize simultaneous processing and detection. After the processing and detection are completed, the workpiece is removed and replaced with the workpiece to be processed.

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