MEMS (Micro Electro Mechanical System) gyroscope structure with in-phase modal suppression
By adopting a coupling mechanism of a double-lever assembly and a coupled-decoupling beam in the MEMS gyroscope, the in-phase stiffness is much greater than the anti-phase stiffness, which solves the problem of the in-phase frequency being lower than the anti-phase frequency and improves the frequency separation and anti-interference capability.
Patent Information
- Application Number
- CN202511004205.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2025-07-17
- Filing Date
- 2025-07-21
- Publication Date
- 2025-09-19
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
The in-phase frequency of existing MEMS gyroscopes is lower than the anti-phase frequency, and they are easily interfered by low-frequency vibrations in the environment and other low-frequency couplings, making it difficult to achieve high frequency separation.
A coupling mechanism of a double lever assembly and a coupled-decoupling beam is adopted. The lever-connected beam generates a shear motion parallel to the beam axis when rotating in phase, and generates a bending motion perpendicular to the beam axis when rotating in anti-phase, thereby achieving that the in-phase stiffness is greater than the anti-phase stiffness.
The separation between the in-phase frequency and the anti-phase frequency is significantly improved, the device performance of the gyro structure is improved, and the ability to resist environmental interference is enhanced.
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Figure CN120668097A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of micro-electromechanical technology, and in particular to a MEMS gyroscope structure with in-phase mode suppression. Background Art
[0002] MEMS gyroscopes have evolved into dual-mass or multi-mass configurations in terms of sensitive structural design. These multiple masses perform opposite, equal-amplitude motions, generating differential signals that offset common-mode interference such as acceleration. Due to manufacturing errors, the frequencies and stiffnesses of the different masses cannot be completely consistent. Therefore, coupling mechanisms are required to align the frequencies of the different masses and ensure equal, opposite motions, thus overcoming manufacturing defects.
[0003] While existing coupling mechanisms can separate the in-phase and anti-phase frequencies of a multi-mass system, the in-phase frequency is often lower than the anti-phase frequency. As the frequency separation increases, the in-phase frequency becomes even lower, making it more susceptible to interference from low-frequency environmental vibrations and other low-frequency coupling. Summary of the Invention
[0004] In order to solve the existing technical problems, the present application provides a MEMS gyroscope structure with in-phase mode suppression and higher separation between in-phase stiffness and anti-phase stiffness.
[0005] The present application provides a MEMS gyroscope structure with in-phase mode suppression, comprising a first mass block, a second mass block, and a coupling mechanism provided between the first mass block and the second mass block; the coupling mechanism comprises:
[0006] A double lever assembly, comprising a first lever and a second lever arranged in parallel, and a lever connecting beam connected between the first lever and the second lever;
[0007] coupling and decoupling beams to connect one end of the double lever assembly away from the lever connecting beam to the corresponding mass block;
[0008] a fulcrum portion connected to an end of the double lever assembly away from the coupling and decoupling beam;
[0009] Among them, the lever connecting beam generates a shear motion parallel to the axial direction of the beam when the double lever assembly rotates in phase, and generates a bending motion perpendicular to the axial direction of the beam when the double lever assembly rotates in anti-phase, so that the in-phase stiffness of the coupling mechanism is greater than the anti-phase stiffness.
[0010] The MEMS gyroscope structure with in-phase modal suppression provided in the above-mentioned embodiments includes a coupling mechanism disposed between a first mass and a second mass, comprising a dual-lever assembly. The first and second masses are connected by a lever connecting beam, the lever connecting beam and the coupling-decoupling beam being connected to opposite sides of the levers, respectively, and the fulcrum and the coupling-decoupling beam being connected to opposite ends of the levers. Thus, when the first and second masses displace in the same direction, the lever connecting beam generates shear motion parallel to the beam axis when the dual-lever assembly rotates in phase. After rotation, the height of the corner point where the lever connecting beam connects to the two levers is inconsistent along the beam axis, significantly increasing the stiffness. When the first and second masses displace in opposite directions, the lever connecting beam generates bending motion perpendicular to the beam axis when the dual-lever assembly rotates in opposite phases. After rotation, the lateral distance between the lever connecting beam and the corner point where the lever connecting beam connects to the two levers is increased, while the height remains consistent along the beam axis. In this case, the stiffness is very low, thereby achieving a significantly higher in-phase stiffness than the out-of-phase stiffness. This provides a higher separation between the in-phase and out-of-phase frequencies of the coupling mechanism, which is beneficial for improving the device performance of the gyroscope structure. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 This is a schematic structural diagram of the MEMS gyroscope structure with in-phase mode suppression provided by the first embodiment.
[0012] Figure 2 for Figure 1 Deformation diagram of the in-phase stiffness of the MEMS gyro structure with in-phase mode suppression is shown.
[0013] Figure 3 for Figure 1 Deformation diagram of the anti-phase stiffness of the MEMS gyro structure with in-phase mode suppression shown.
[0014] Figure 4 Schematic diagram of the principle of in-phase rotation of the double lever assembly.
[0015] Figure 5 Schematic diagram of the principle of anti-phase rotation of a double lever assembly.
[0016] Figure 6 Another schematic diagram of the principle of the in-phase rotation of the double lever assembly.
[0017] Figure 7 Another schematic diagram of the principle of anti-phase rotation of a double lever assembly.
[0018] Figure 8 A schematic structural diagram of a MEMS gyroscope structure with in-phase mode suppression provided by the second embodiment.
[0019] Figure 9 This is a schematic structural diagram of a MEMS gyroscope structure with in-phase mode suppression provided by the third embodiment.
[0020] Figure 10 This is a schematic structural diagram of a MEMS gyroscope structure with in-phase mode suppression provided by the fourth embodiment.
[0021] Figure 11 This is a schematic structural diagram of a MEMS gyroscope structure with in-phase mode suppression provided by the fifth embodiment.
[0022] Figure 12 This is a schematic structural diagram of a MEMS gyroscope structure with in-phase mode suppression provided by the sixth embodiment.
[0023] Figure 13 This is a schematic structural diagram of a MEMS gyroscope structure with in-phase mode suppression provided by the seventh embodiment. DETAILED DESCRIPTION
[0024] The technical solution of the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.
[0025] In order to make the purpose, technical solutions and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings. The described embodiments should not be regarded as limiting this application. All other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.
[0026] In the following description, the expression "some embodiments" is involved, which describes a subset of all possible embodiments. It should be noted that "some embodiments" may be the same subset or different subsets of all possible embodiments, and may be combined with each other without conflict.
[0027] In the following description, the terms "first, second, and third" are merely used to distinguish similar objects and do not represent a specific ordering of the objects. It is understandable that "first, second, and third" can be interchanged with a specific order or sequence where permitted, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.
[0028] In the design of a MEMS gyroscope structure with in-phase mode suppression, the inventors of this application conducted the following research on the defects of gyroscopes in the prior art:
[0029] MEMS gyroscopes have evolved into dual-mass or multi-mass configurations in terms of sensitive structural design. These multiple masses perform opposite, equal-amplitude motions. The differential signals generated by the differential motion of the different masses offset common-mode external interference, such as acceleration. Due to manufacturing errors, the frequencies and stiffnesses of the different masses cannot be completely consistent. Therefore, coupling mechanisms are necessary to align the frequencies of the different masses and ensure equal, opposite motions, thus overcoming manufacturing defects. While existing coupling mechanisms can separate the in-phase and anti-phase frequencies of the multiple masses, the in-phase frequency is often lower than the anti-phase frequency. While increasing frequency separation, the lower in-phase frequency makes it susceptible to interference from low-frequency environmental vibrations and other low-frequency coupling. Existing coupling structures in which the in-phase frequency is higher than the anti-phase frequency typically utilize the first- and second-order modes of a straight beam as the anti- and in-phase stiffnesses. This cannot achieve high frequency separation and is bulky, hindering integration with existing multi-mass MEMS gyroscopes. Furthermore, while achieving high frequency separation, stress at the beam root cannot be guaranteed to prevent fracture under normal displacement. In view of this, the inventors of the present application proposed a design of a coupling mechanism, in which a lever connecting beam is used as a coupling structure between the double levers, a coupling decoupling beam is used as a driving structure, and the fulcrum portion provides a rotation fulcrum for the double lever assembly. For each lever, the coupling decoupling beam and the lever connecting beam are arranged on opposite sides, and the coupling decoupling beam and the fulcrum portion are arranged at opposite ends. When multiple mass blocks are displaced in the same direction, the lever connecting beam can suppress the in-phase rotation of the double levers when the double levers rotate in phase, thereby achieving very high in-phase stiffness; when multiple mass blocks are displaced in opposite directions, the lever connecting beam can easily achieve anti-phase rotation of the double levers, thereby achieving very low anti-phase stiffness. The design of this coupling mechanism, through the lever connecting beam, achieves the stiffness difference of the double lever in the in-phase and anti-phase movement directions, thereby providing the effect that the in-phase stiffness of the entire coupling mechanism is far greater than the anti-phase stiffness, thereby improving the frequency separation and being beneficial to improving the device performance of the gyro structure.
[0030] See also Figure 1 An embodiment of the present application provides a MEMS gyroscope structure with in-phase mode suppression, comprising: a first mass block 11, a second mass block 12, and a coupling mechanism 30 arranged between the first mass block 11 and the second mass block 12; the coupling mechanism 30 comprises: a double lever assembly, comprising a first lever 31 and a second lever 32 arranged in parallel, and a lever connecting beam 20 connected between the first lever 31 and the second lever 32; a coupling-decoupling beam 40, connecting an end of the double lever assembly away from the lever connecting beam 20 to the corresponding mass block; a fulcrum portion 50, connected to an end of the double lever assembly away from the coupling-decoupling beam 40; wherein the lever connecting beam 20 generates a shear motion parallel to the beam axis when the double lever assembly rotates in phase, and generates a bending motion perpendicular to the beam axis when the double lever assembly rotates in anti-phase, so that the in-phase stiffness of the coupling mechanism 30 is greater than the anti-phase stiffness.
[0031] The first lever 31 and the second lever 32 are respectively rigid rods. The lever connecting beam 20 is connected between the first lever 31 and the second lever 32. One end of the first lever 31 and the second lever 32 are respectively connected to the first mass block 11 and the second mass block 12 through the coupling-decoupling beam 40, and the end away from the coupling-decoupling beam 40 is connected to the fulcrum portion 50. The first lever 31 and the second lever 32 are arranged in a mirror-symmetrical manner. It should be noted that the two ends of the double lever assembly are a relative concept, and do not specifically refer to the end positions of the double lever assembly. For example, with the horizontal center line of the double lever assembly as a reference, the positions where the coupling-decoupling beam 40 and the fulcrum portion 50 are connected to the double lever assembly are respectively located on opposite sides of the horizontal center line. It can be regarded as that the coupling-decoupling beam 40 and the fulcrum portion 50 are respectively connected to the two ends of the double lever assembly.
[0032] With such a design, the coupling mechanism 30 converts the anti-phase motion of the first mass block 11 and the second mass block 12 in the driving direction X-axis into anti-phase motion along the X-axis and in-phase motion along the Y-axis at one end of the first lever 31 and the second lever 32 away from the coupling decoupling beam 40. At this time, the corner points at which the lever connecting beam 20 is connected to the first lever 31 and the second lever 32 respectively also move in anti-phase along the X-axis and in-phase along the Y-axis, triggering bending motion of the lever connecting beam 20 perpendicular to the axial direction of the beam, and the stiffness is very low; the coupling mechanism 30 converts the in-phase motion of the first mass block 11 and the second mass block 12 in the driving direction X-axis into in-phase motion along the X-axis and anti-phase motion along the Y-axis at one end of the first lever 31 and the second lever 32 away from the coupling decoupling beam 40. At this time, the corner points at which the lever connecting beam 20 is connected to the first lever 31 and the second lever 32 respectively also move in-phase along the X-axis and in-phase along the Y-axis, triggering the lever connecting beam 20 to generate shear motion parallel to the axial direction of the beam, and the stiffness is significantly increased.
[0033] During the operation of the MEMS gyro structure with in-phase mode suppression, when the first lever 31 and the second lever 32 are subjected to the in-phase displacement in the driving direction of the first mass block 11 and the second mass block 12, that is, the X-axis direction, the first lever 31 and the second lever 32 rotate, so that an additional anti-phase motion in the Y-axis direction is added on the basis of the in-phase motion in the X-axis direction; and when the first lever 11 and the second mass block 12 are subjected to the anti-phase displacement in the driving direction, that is, the X-axis direction, the first lever 31 and the second lever 32 rotate, so that an additional in-phase motion in the Y-axis direction is added on the basis of the anti-phase motion in the X-axis direction. By adding the lever connecting beam 20, it is just possible to achieve high stiffness in the anti-phase motion in the Y-axis direction and no stiffness in the in-phase motion in the Y-axis direction. Figure 2 As shown in the figure, it is a schematic diagram of the deformation of the double lever assembly when it rotates in phase. Figure 3 The figure shows the deformation of the double lever assembly when it rotates in opposite phases. Figure 2 and Figure 3As can be seen, the lever-connecting beam 20 generates shear motion parallel to the beam's axis when the dual-lever assembly rotates in phase, and generates bending motion perpendicular to the beam's axis when the dual-lever assembly rotates in opposite phases. Thus, in the coupling mechanism 30, the first lever 31 and the second lever 32, combined with the design of the lever-connecting beam 20, achieve a significantly greater in-phase stiffness than the anti-phase stiffness of the coupling mechanism 30 by utilizing the stiffness differential between the in-phase and anti-phase directions of motion. Based on this structure, through dimensional adjustments, the in-phase stiffness to anti-phase stiffness ratio of the coupling mechanism 30 can be achieved to exceed 25:1.
[0034] In the above embodiment, the MEMS gyroscope structure with in-phase modal suppression includes a coupling mechanism 30 provided between the first mass 11 and the second mass 12. The coupling mechanism 30 adopts a double-lever design, wherein the first lever 31 and the second lever 32 are connected by a lever connecting beam 20. The lever connecting beam 20 and the coupling-decoupling beam 40 are respectively connected to opposite sides of the same lever, and the fulcrum portion 50 and the lever connecting beam 20 are respectively connected to opposite ends of the same lever. In this way, when the first mass 11 and the second mass 12 are displaced in phase, the lever connecting beam 20 generates a shear parallel to the beam axis when the double-lever assembly rotates in phase. Movement, after rotation, the lever connecting beam 20 and the height of the corner point where the two levers are connected are inconsistent in the axial direction of the beam, and the stiffness is significantly increased at this time; when the first mass block 11 and the second mass block 12 are displaced in anti-phase, the lever connecting beam 20 generates a bending movement perpendicular to the axial direction of the beam when the double-lever assembly rotates in anti-phase. After rotation, the lateral distance between the lever connecting beam 20 and the height of the corner point where the two levers are connected is enlarged, but the height is always kept consistent in the axial direction of the beam. At this time, the stiffness is very low, so that the in-phase stiffness can be significantly higher than the anti-phase stiffness, and the separation degree of the in-phase and anti-phase frequencies of the coupling mechanism 30 is higher, which is beneficial to improving the device performance of the gyro structure.
[0035] In some embodiments, the lever connecting beam 20 includes a first main beam 21 and a second main beam 22, each having a closed end 23 and an open end 24. The open end 24 of the first main beam 21 is connected to the first lever 31, and the open end 24 of the second main beam 22 is connected to the second lever 32. The first main beam 21 and the second main beam 22 are parallel to each other. The connection between the first main beam 21 and the first lever 31 and the connection between the second main beam 22 and the second lever 32 form deformation corners. In this embodiment, the lever connecting beam 20 is in the shape of an "X", with the first main beam 21 and the second main beam 22 being arranged parallel to and spaced apart from each other between the first lever 31 and the second lever 32. The closed ends 23 of the first main beam 21 and the second main beam 22 are located in the central area between the first lever 31 and the second lever 32, while the open ends 24 are flush with the ends of the first lever 31 and the second lever 32 away from the coupling-decoupling beam 40. The open end 24 of the first main beam 21 extends vertically outward and connects to the inner side of the first lever 31, forming a first deformation angle point 211 on the inner side of the first lever 31. The open end 24 of the second main beam 22 extends vertically outward and connects to the inner side of the second lever 32, forming a second deformation angle point 212 on the inner side of the second lever 32.
[0036] It will be appreciated that the lever connecting beam 20 is in the shape of an "X" and its open ends are respectively arranged with the first lever 31 and the second lever 32, in order to achieve greater in-phase stiffness than anti-phase stiffness during the rotational motion of the dual-lever assembly. Thus, the shape of the lever connecting beam 20 is not limited to the embodiment shown in the accompanying drawings. For example, in the lever connecting beam 20, the first main beam 21 and the second main beam 22 may be arranged non-parallel, or the first main beam 21 and the second main beam 22 may be non-linear beams.
[0037] The influence of the lever connecting beam 20 on the in-phase stiffness and the anti-phase stiffness of the coupling mechanism 30 includes the effect of the superposition of two working principles.
[0038] For an explanation of the first working principle, please refer to Figure 4 and Figure 5 , assuming that the widths of the first lever 31 and the second lever 32 are ignored, when the first lever 31 and the second lever 32 rotate in phase, as shown in FIG. Figure 4, assuming that the rotation fulcrum of the lever remains unchanged, the first lever 31 and the second lever 32 will form an oblique parallelogram. At this time, when viewed in the positive y-axis direction, the heights of the corner points of the lever connecting beam 20 connecting the first deformation corner point 211 on the inner side of the first lever 31 and the second deformation corner point 212 on the inner side of the second lever 32 are not different. However, at this time, since the axis of the lever connecting beam 20 will also rotate a certain angle with the first lever 31 and the second lever 32, the symmetry axis of the lever connecting beam 20 is not on the positive y-axis. Therefore, when viewed along the symmetry axis of the lever connecting beam 20 at this time, the heights of the corner points of the first deformation corner point 211 and the second deformation corner point 212 have a certain height difference. For the lever connecting beam 20, the height difference between the first deformation corner point 211 and the second deformation corner point 212 corresponds to the expansion and contraction in the axial direction of the beam, so the stiffness of the lever connecting beam 20 is very large. Therefore, the design of the lever connecting beam 20 will make the in-phase stiffness of the coupling mechanism 30 particularly high. When the first lever 31 and the second lever 32 rotate in opposite phases, as shown Figure 5 As shown, assuming the lever's pivot point remains unchanged, the first lever 31 and the second lever 32 form an isosceles triangle. In this case, the axis of symmetry of the lever connecting beam 20 remains on the positive y-axis, and the corners of the lever connecting beam 20 connecting the first deformation corner 211 on the inner side of the first lever 31 and the second deformation corner 212 on the inner side of the second lever 32 are at the same height. Therefore, the lever connecting beam 20 maintains the same height difference between the first deformation corner 211 and the second deformation corner 212; only the lateral distance (in the x-direction) between the corners is increased, resulting in a very low stiffness of the lever connecting beam 20. Consequently, the design of the lever connecting beam 20 results in a particularly low anti-phase stiffness of the coupling mechanism 30.
[0039] For an explanation of the second working principle, please refer to Figure 6 and Figure 7 In actual applications, the first lever 31 and the second lever 32 both have a certain width. Considering the width of the first lever 31 and the second lever 32, for the same lever, the coupling-decoupling beam 40 and the lever connecting beam 20 are respectively connected to the opposite ends of the lever and the opposite sides of the lever. When the first lever 31 and the second lever 32 rotate in phase, as shown in FIG. Figure 6As shown, assuming the lever's rotational fulcrum remains unchanged, since the first and second levers 31, 32 maintain a consistent outer radius during rotation, the outer edges of the first and second levers 31, 32 will have the same height along the Y-axis after rotation. Since the first and second levers 31, 32 have a certain width and their rotational directions are not mirror-symmetrical, the inner corners of the first and second levers 31, 32—that is, the first deformation corner 211 of the lever connecting beam 20 connecting the inner side of the first lever 31 and the second deformation corner 212 of the lever connecting beam 20 connecting the inner side of the second lever 32—will have an additional height difference Δh due to the lever width. For ease of understanding, assuming the lever width is w and the lever rotation angle is θ, a simplified geometric calculation is used to represent that the height of the first deformation corner 211 of the lever connecting beam 20 connecting the inner side of the first lever 31 is lowered by Δh1 compared to its outer corner, as calculated by the following formula 1:
[0040]
[0041] This means that the height of the inner corner of the second lever 32 is increased by Δh2 compared to the outer corner, as calculated by the following formula 2:
[0042]
[0043] Thus, the inner corners of the first lever 31 and the second lever 32 will have an additional height difference Δh due to the width of the first lever 31 and the second lever 32, as shown in the following formula 3:
[0044]
[0045] For the lever connecting beam 20, the height difference between the first deformation corner point 211 and the second deformation corner point 212 corresponds to the expansion and contraction in the axial direction of the beam, so the stiffness of the lever connecting beam 20 is significantly increased. By adding the lever connecting beam 20, the in-phase stiffness of the coupling mechanism 30 will be particularly high. There is a specific geometric calculation relationship between the increased stiffness and the width of the lever, which is very beneficial for subsequent size optimization.
[0046] When the first lever 31 and the second lever 32 rotate in opposite phases, Figure 7As shown, assuming that the rotation fulcrum of the lever remains unchanged, since the rotation directions of the first lever 31 and the second lever 32 are mirror-symmetrical, not only the heights of the outer corner points of the first lever 31 and the second lever 32 are the same, but also the heights of the inner corner points are the same after the first lever 31 and the second lever 32 with a certain width are inclined. At this time, the height difference Δh between the first deformation corner point 211 on the inner side of the first lever 31 and the second deformation corner point 212 on the inner side of the second lever 32 connected by the lever connecting beam 20 is 0. Therefore, the lever connecting beam 20 still maintains no height difference at the corner points, but only the lateral distance (x direction) of the corner points is enlarged, and this results in very low stiffness for the lever connecting beam 20. Therefore, the addition of the lever connecting beam 20 will make the anti-phase stiffness of the coupling mechanism 30 extremely low, and the increase in the widths of the first lever 31 and the second lever 32 will not significantly increase the anti-phase stiffness of the coupling mechanism 30, which is also very beneficial for subsequent size optimization.
[0047] The two working principles of the foregoing lever connecting beam 20 are relatively independent and are jointly superimposed on the separation degree of the in-phase stiffness and the anti-phase stiffness of the coupling mechanism 30, and both have a positive impact, that is, the influence on the in-phase stiffness is much higher than that on the anti-phase stiffness. Therefore, the structural design of the lever connecting beam 20 provided in the embodiment of the present application can make the separation degree of the in-phase frequency and the anti-phase frequency of the coupling mechanism 30 higher, effectively improving the performance of the gyroscopic device.
[0048] In the foregoing description of the working principle, the discussion is based on the premise that the rotation fulcrum of the lever remains unchanged. In actual applications, the connection positions of the coupling and decoupling beam 40, the fulcrum part 50 and the double-lever assembly can be changed, and the connection positions of the lever connecting beam 20 in the double-lever assembly with the first lever 31 and the second lever 32 can also be changed. Based on the specific geometric calculation relationship existing between the in-phase stiffness and the width of the lever, the frequency separation degree of the in-phase stiffness and the anti-phase stiffness can be first increased, and then the connection position of the fulcrum part 50 and the double-lever assembly can be adjusted to regulate the stress. Therefore, these connection positions are not limited to the forms provided in the embodiment of the present application, and simple variant embodiments obtained by those skilled in the art under the technical teaching of the present application should all fall within the protection scope of the present application.
[0049] It should be noted that the lever connecting beam 20 is not limited to that shown in the foregoing embodiment. As long as it can make the first lever 31 and the second lever 32 rotate in the opposite phase more easily when the first lever 31 and the second lever 32 rotate in the opposite phase, achieving very low anti-phase stiffness, and can suppress the in-phase rotation of the double levers and achieve a very high in-phase stiffness when the first lever 31 and the second lever 32 rotate in the same phase, other beam forms can be used. For example, the lever connecting beam 20 includes two groups in a shape like a "Ji" character, which are disposed between the first lever 31 and the second lever 32 in a back-to-back manner. For the sake of easy description, please refer to Figure 8The two groups of lever connecting beams 20 are respectively called the first lever connecting beam 201 and the second lever connecting beam 202.
[0050] In some embodiments, the closed ends 23 of the first lever connecting beam 201 and the second lever connecting beam 202 are close to each other and spaced apart from each other, the open ends 24 of the first main beam 21 and the second main beam 22 in the first lever connecting beam 201 are connected to one end of the first lever 31 and the second lever 32, and the open ends 24 of the first main beam 21 and the second main beam 22 in the second lever connecting beam 202 are connected to the other end of the first lever 31 and the second lever 32.
[0051] In other embodiments, see Figure 9 The closed ends 23 of the first lever connecting beam 201 and the second lever connecting beam 202 are connected to each other, the open ends 24 of the first main beam 21 and the second main beam 22 in the first lever connecting beam 201 are connected to one end of the first lever 31 and the second lever 32, and the open ends 24 of the first main beam 21 and the second main beam 22 in the second lever connecting beam 202 are connected to the other end of the first lever 31 and the second lever 32.
[0052] In the structural design of the lever connecting beam 20, the first main beam 21 and the second main beam 22 are each slender, with their length exceeding their width by a predetermined multiple. In one specific example, for a dual-lever assembly comprising only one set of lever connecting beams 20, the lengths of the first and second main beams 21, 22 are half the lengths of the first and second levers 31, 32. For a dual-lever assembly comprising two sets of lever connecting beams 20, the lengths of the first and second main beams 21, 22 in each set of lever connecting beams 20 are approximately half the lengths of the first and second levers 31, 32, resulting in the combined length of both sets of lever connecting beams 20 being approximately equal to the lengths of the first and second levers 31, 32.
[0053] In some embodiments, the coupling-decoupling beam 40 includes a first decoupling beam 41 connected between the first lever 31 and the first mass 11, and a second decoupling beam 42 connected between the second lever 32 and the second mass 12. The connection between the first decoupling beam 41 and the first lever 31, and the connection between the second decoupling beam 42 and the second lever 32, form a rotation fulcrum. In one specific example, the connection between the first decoupling beam 41 and the first lever 31 forms a first rotation fulcrum 411, and the connection between the second decoupling beam 42 and the second lever 32 forms a second rotation fulcrum 412. The first decoupling beam 41 and the second decoupling beam 42 are respectively connected between opposite sides of the dual-lever assembly and the corresponding masses. Among them, the setting of the coupling-decoupling beam 40 can transmit the movement displacement of the first mass block 11 and the second mass block 12 along the X-axis direction to the first lever 31 and the second lever 32, and while transmitting the displacement in the movement direction of the mass block to the first lever 31 and the second lever 32, decouple the displacement of the first lever 31 and the second lever 32 in the non-mass block movement direction, so that the rotational movement of the end points of the first lever 31 and the second lever 32 does not affect the movement of the mass block.
[0054] It should be noted that the structure of the coupling-decoupling beam 40 is not limited to that shown in the aforementioned embodiment. As long as the motion displacement of the mass block can be transmitted to the corresponding first lever 31 and second lever 32, and the displacement of the first lever 31 and second lever 32 in the non-mass block motion direction can be decoupled, any beam shape can be used. For example, the first decoupling beam 41 and the second decoupling beam 42 each include at least one main beam section 43 perpendicular to the beam axis. Based on at least one main beam section 43 perpendicular to the beam axis, coupling-decoupling beams 40 of different beam shapes can be formed, such as Figure 10 、 Figure 11 and the aforementioned Figure 8 and Figure 9 shown.
[0055] In an alternative example, see Figure 10 There is one main beam section 43, and a notch 110 corresponding to the main beam section 43 is respectively provided on the first mass block 11 and the second mass block 12. One end of the main beam section 43 of the first decoupling beam 41 extends into the notch 110 of the first mass block 11 and is connected to the first mass block 11, and the other end is connected to the first lever 31; one end of the main beam section 43 of the second decoupling beam 42 extends into the notch 110 of the second mass block 12 and is connected to the second mass block 12, and the other end is connected to the second lever 32.
[0056] In another alternative example, see again Figures 1 to 3, 8 to 9, the main beam section 43 includes a plurality of main beam sections 43 arranged at intervals along the axial direction of the lever, and two adjacent main beam sections 43 are connected by a node beam 44, and the node beam 44 is parallel to the beam axis. Among the two outermost main beam sections 43 of the first decoupling beam 41, one is connected to the first mass block 11, and the other is connected to the first lever 31; among the two outermost main beam sections 43 of the second decoupling beam 42, one is connected to the second mass block 12, and the other is connected to the second lever 32.
[0057] In other embodiments, see Figure 11 The main beam segments 43 are arranged in a plurality of intervals along the axial direction of the lever. Adjacent main beam segments 43 are connected by a node beam 44, which is parallel to the beam axis. The first mass block 11 and the second mass block 12 are each provided with a notch 110 corresponding to the main beam segments 43. Of the two outermost main beam segments 43 of the first decoupling beam 41, one is located within the notch 110 of the first mass block 11 and connected to the first mass block 11, while the other is connected to the first lever 31. Of the two outermost main beam segments 43 of the second decoupling beam 42, one is located within the notch 110 of the second mass block 12 and connected to the second mass block 12, while the other is connected to the second lever 32.
[0058] In some embodiments, the fulcrum portion 50 includes a first anchor point 51 and a second anchor point 52, respectively, disposed on opposite sides of the dual-lever assembly; a first lever fixing beam 53 connected between the first anchor point 51 and the first lever 31; and a second lever fixing beam 54 connected between the second anchor point 52 and the second lever 32. The connection between the first lever fixing beam 53 and the first lever 31, and the connection between the second lever fixing beam 54 and the second lever 32, form a rotational fulcrum. In an optional specific example, the connection between the first lever fixing beam 53 and the first lever 31 forms a third rotational fulcrum 531, and the connection between the second lever fixing beam 54 and the second lever 32 forms a fourth rotational fulcrum 541. The fulcrum portion 50 is configured to provide a rotational fulcrum and a certain degree of torsional stiffness for the first lever 31 and the second lever 32, respectively.
[0059] It should be noted that the structural setting of the fulcrum part 50 is also not limited to that shown in the aforementioned embodiment, as long as it can realize the combination of anchor point plus beam structure that provides a rotation fulcrum and a certain rotational stiffness for the first lever 31 and the second lever 32. For example, the number of the first anchor point 51 and the second anchor point 52 is one or more respectively; the first lever fixed beam 53 and the second lever fixed beam 54 respectively include at least one main beam 55 perpendicular to the beam axis; or the first lever fixed beam 53 and the second lever fixed beam 54 respectively include at least one main beam 55 perpendicular to the beam axis and an auxiliary beam 56 parallel to the beam axis. Among them, based on different numbers of anchor points, including at least one main beam 55 perpendicular to the beam axis and including auxiliary beams 56 parallel to the beam axis, different forms of fulcrum parts 50 can be formed, such as Figure 11 、 12 and Figure 13 shown.
[0060] In an alternative example, Figure 11 As shown, the first lever fixing beam 53 and the second lever fixing beam 54 each have a single main beam 55. Each of the first and second lever fixing beams 53 and 54 is a linear beam, with its opposite ends connected to corresponding anchor points and levers. The first and second mass blocks 11 and 12 each have a hollow portion 112 corresponding to the main beam 55. This hollow portion 112 provides space for the main beam 55 to extend and increase its length.
[0061] In another alternative example, if Figure 12 As shown, the first lever fixing beam 53 and the second lever fixing beam 54 have multiple main beams 55, and adjacent main beams 55 are connected by vertical beams parallel to the beam axis. The first lever fixing beam 53 and the second lever fixing beam 54 are folding beams. The first anchor point 51 and the second anchor point 52 are each one, and the first and second lever fixing beams 53 and 54 have the same structure. To avoid redundancy, the first lever fixing beam 53 will be used as an example for description. The first lever fixing beam 53 includes a central main beam 55 and edge main beams 55 symmetrically arranged on both sides of the central main beam 55. One end of the central main beam 55 is connected to the end of the first lever 31 near the lever connecting beam 20, forming a rotation fulcrum. The edge main beams 55 are connected to the other end of the central main beam 55 and extend in a serpentine shape. The ends of the edge main beams 55 on both sides are connected to the first anchor point 51.
[0062] In other embodiments, Figure 13As shown, the first lever fixing beam 53 and the second lever fixing beam 54 each include multiple main beams 55 perpendicular to the beam axis and auxiliary beams 56 parallel to the beam axis. In this embodiment, there are two first anchor points 51 and two second anchor points 52, and the structures of the first and second lever fixing beams 53 and 54 are identical. To avoid redundancy, the first lever fixing beam 53 will be used as an example for description. In the first lever fixing beam 53, the multiple main beams 55 form a folded beam. One end of a main beam 55 is connected to the end of the first lever 31 near the lever connecting beam 20, forming a rotation fulcrum. The ends of the two main beams 55 at the edge are respectively connected to the two first anchor points 51. The auxiliary beam 56 is in a "X" shape, with one end connected to one of the first anchor points 51 and the other end connected to the end of the first lever 31 near the lever connecting beam 20, forming a rotation fulcrum. In this way, the main beam 55 and the auxiliary beam 56 are each connected to the first lever 31, forming a rotation fulcrum. Similarly, in the second lever fixed beam 54 , the main beam 55 and the auxiliary beam 56 are respectively connected to the second lever 32 to form a rotation fulcrum.
[0063] Optionally, the auxiliary beam 56 is in a "X" shape. In the first lever fixing beam 53, the auxiliary beam 56 has the same structure as the lever connecting beam 20 and is connected between the first anchor point 51 and the first lever 31. In the second lever fixing beam 54, the auxiliary beam 56 has the same structure as the lever connecting beam 20 and is connected between the second anchor point 52 and the second lever 32. In this embodiment, the auxiliary beam 56 included in the first and second lever fixing beams 53 and 54 and the lever connecting beam 20 located between the first and second levers 31 and 32 can achieve similar operating principles, further strengthening the effect of superposition on the coupling mechanism 30, providing the coupling mechanism 30 with an in-phase stiffness that is significantly greater than an anti-phase stiffness, and improving the separation between the in-phase and anti-phase frequencies of the coupling mechanism 30.
[0064] The MEMS gyroscope structure with in-phase mode suppression provided in the embodiments of the present application has at least the following characteristics:
[0065] First, in the coupling mechanism 30, in the double lever assembly, the in-phase rotation and anti-phase rotation of the double levers 31 and 32 are first generated by coupling the decoupling beam 40, and then the addition of the lever connecting beam 20 can achieve that the in-phase stiffness of the coupling mechanism 30 is much greater than the anti-phase stiffness.
[0066] Second, lever connecting beam 20 is superimposed on coupling mechanism 30 to suppress the in-phase rotation of the dual levers, significantly increasing their in-phase stiffness. The geometric relationship between the lever's rotation angle and width creates the principle that the in-phase frequency is greater than the anti-phase frequency. By adjusting the lever width, the stiffness of the in-phase rotation can be significantly increased, achieving high frequency separation, without significantly changing the stiffness, stress, or deformation of the anti-phase rotation. This achieves a high separation between the in-phase and anti-phase frequencies within a relatively small footprint. Furthermore, through reasonable size optimization, the maximum stress during anti-phase motion is minimized, improving the MEMS gyroscope's reliability under vibration and shock.
[0067] Third, the design of the coupling mechanism 30 is independent of the shape and position of the mass block and can be integrated with a large number of tuning fork MEMS gyroscopes to improve its robustness against process changes.
[0068] The above are only specific embodiments of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.
Claims
1. A MEMS gyroscope structure with in-phase mode suppression, characterized in that: The invention comprises a first mass block, a second mass block, and a coupling mechanism provided between the first mass block and the second mass block; the coupling mechanism comprises: A double lever assembly, comprising a first lever and a second lever arranged in parallel, and a lever connecting beam connected between the first lever and the second lever; coupling and decoupling beams to connect one end of the double lever assembly away from the lever connecting beam to the corresponding mass block; a fulcrum portion connected to an end of the double lever assembly away from the coupling-decoupling beam; Among them, the lever connecting beam generates a shear motion parallel to the axial direction of the beam when the double lever assembly rotates in phase, and generates a bending motion perpendicular to the axial direction of the beam when the double lever assembly rotates in anti-phase, so that the in-phase stiffness of the coupling mechanism is greater than the anti-phase stiffness.
2. The MEMS gyroscope structure with in-phase mode suppression according to claim 1, characterized in that: The lever connecting beam comprises a first main beam and a second main beam having a closed end and an open end, the open end of the first main beam being connected to the first lever, the open end of the second main beam being connected to the second lever, and the first main beam and the second main beam being parallel to each other; A connection point between the first main beam and the first lever, and a connection point between the second main beam and the second lever respectively form deformation corner points.
3. The MEMS gyroscope structure with in-phase mode suppression according to claim 2, characterized in that: The length of the first main beam and the second main beam is greater than the width by a preset multiple.
4. The MEMS gyroscope structure with in-phase mode suppression according to claim 2, characterized in that: The lever connecting beam includes a first lever connecting beam and a second lever connecting beam; the closed ends of the first lever connecting beam and the second lever beam are close to each other, the open ends of the first main beam and the second main beam in the first lever beam are connected to one end of the first lever and the second lever, and the open ends of the first main beam and the second main beam in the second lever connecting beam are connected to the other end of the first lever and the second lever.
5. The MEMS gyroscope structure with in-phase mode suppression according to claim 4, characterized in that: The closed ends of the first lever connecting beam and the second lever connecting beam are connected; or, The closed ends of the first lever connecting beam and the second lever beam are spaced apart from each other.
6. The MEMS gyroscope structure with in-phase mode suppression according to claim 1, characterized in that: The coupling-decoupling beam comprises a first decoupling beam connected between the first lever and the first mass block, and a second decoupling beam connected between the second lever and the second mass block; A connection point between the first decoupling beam and the first lever, and a connection point between the second decoupling beam and the second lever form a rotation fulcrum.
7. The MEMS gyroscope structure with in-phase mode suppression according to claim 6, characterized in that: The first decoupling beam and the second decoupling beam respectively include at least one main beam section perpendicular to the beam axis.
8. The MEMS gyroscope structure with in-phase mode suppression according to claim 7, characterized in that: There is one main beam section, and the first mass block and the second mass block are respectively provided with notches corresponding to the main beam section. One end of the main beam section of the first decoupling beam extends into the notch of the first mass block and is connected to the first mass block, and the other end is connected to the first lever; one end of the main beam section of the second decoupling beam extends into the notch of the second mass block and is connected to the second mass block, and the other end is connected to the second lever; or The main beam segments include a plurality of segments spaced apart along the axial direction of the lever, two adjacent main beam segments are connected by a node beam, and the node beam is parallel to the beam axial direction; one of the two outermost main beam segments of the first decoupling beam is connected to the first mass block, and the other is connected to the first lever; one of the two outermost main beam segments of the second decoupling beam is connected to the second mass block, and the other is connected to the second lever; or The main beam section includes a plurality of main beam sections arranged at intervals along the axial direction of the lever, and two adjacent main beam sections are connected by a node beam, and the node beam is parallel to the axial direction of the beam. The first mass block and the second mass block are respectively provided with notches corresponding to the main beam sections. Among the two outermost main beam sections of the first decoupling beam, one is located in the notch of the first mass block and connected to the first mass block, and the other is connected to the first lever; among the two outermost main beam sections of the second decoupling beam, one is located in the notch of the second mass block and connected to the second mass block, and the other is connected to the second lever.
9. The MEMS gyroscope structure with in-phase mode suppression according to claim 1, characterized in that: The fulcrum portion includes a first anchor point and a second anchor point respectively provided on opposite sides of the double lever assembly, a first lever fixing beam connected between the first anchor point and the first lever, and a second lever fixing beam connected between the second anchor point and the second lever; A connection point between the first lever fixing beam and the first lever, and a connection point between the second lever fixing beam and the second lever form a rotation fulcrum.
10. The MEMS gyroscope structure with in-phase mode suppression according to claim 9, characterized in that: The number of the first anchor point and the number of the second anchor point are respectively one or more; The first lever fixed beam and the second lever fixed beam respectively include at least one main beam perpendicular to the beam axis, and the first mass block and the second mass block are respectively provided with hollow parts corresponding to the main beam, and the hollow parts are used to provide space for the main beam to extend to increase the length.
11. The MEMS gyroscope structure with in-phase mode suppression according to claim 9, characterized in that: The first anchor points and the second anchor points each include two; The first lever fixed beam and the second lever fixed beam respectively further include an auxiliary beam parallel to the beam axis, wherein, in the first lever fixed beam, the main beam and the auxiliary beam are respectively connected to the first lever to form a rotation fulcrum; in the second lever fixed beam, the main beam and the auxiliary beam are respectively connected to the second lever to form a rotation fulcrum.
12. The MEMS gyroscope structure with in-phase mode suppression according to claim 11, characterized in that: In the first lever fixed beam, the auxiliary beam has the same structure as the lever connecting beam and is connected between the first anchor point and the first lever; in the second lever fixed beam, the auxiliary beam has the same structure as the lever connecting beam and is connected between the second anchor point and the second lever.