High-accuracy chip appearance detection device

Abstract

The invention relates to the technical field of chip appearance detection, in particular to a high-accuracy chip appearance detection device which comprises an observation frame, a storage frame is fixedly connected to the top end of the observation frame, a detection frame is fixedly connected to the bottom end of the observation frame, and a detection assembly is arranged at the top end of the storage frame. A material control assembly is arranged in the detection frame, the detection assembly comprises an air control seat, the air control seat is arranged in the center of the surface of the storage frame, a hydraulic rod is arranged at the top end of the air control seat, and a downward pressing seat is fixedly connected to the bottom end of the hydraulic rod. Through the arranged detection assembly, full scanning detection operation on the surface of a detected chip material in all directions can be achieved, and in the actual use process, four sets of air control pumps at the four corners of the side face of an air control base are adaptively controlled and started through a control panel; and the universal joint seat at the bottom end of the material placing cover is subjected to universal adjustment operation at the universal rolling ball of the buffer cover, and the interior of the buffer cover passes through an annular spring piece at one end.

Description

Technical Field

[0001] The present invention relates to the technical field of chip appearance detection, and in particular to a high-accuracy chip appearance detection device. Background Art

[0002] The most advanced integrated circuits are the heart of microprocessors or multi-core processors that control everything from computers to cell phones to digital microwave ovens. Although the cost of designing and developing a complex integrated circuit is very high, when distributed across products, often numbering in the millions, the cost per integrated circuit is minimized. The performance of integrated circuits is high because their small size results in short paths, allowing low-power logic circuits to be used at fast switching speeds. Over the years, integrated circuits have continued to evolve towards smaller form factors, allowing more circuits to be packed into each chip. This increases the capacity per unit area, reducing costs and increasing functionality. See Moore's Law, which states that the number of transistors in an integrated circuit doubles every 1.5 years. In short, as form factors shrink, nearly all metrics improve: unit cost and switching power consumption decrease, while speed increases. However, ICs integrating nanometer-scale devices also have problems, primarily leakage current. As a result, the increased speed and power consumption are very noticeable to the end user, and manufacturers face the acute challenge of improving chip structure. Chips require surface inspection for defects during manufacturing.

[0003] For example, patent publication CN 220419187 U discloses a chip appearance inspection device that uses an image acquisition mechanism to inspect the appearance of the chip under inspection, thereby avoiding fluctuations in test results caused by manual inspection and improving test accuracy. Furthermore, a turntable mechanism rotates to switch the orientation of the image acquisition mechanism to the clamping mechanism, allowing for continuous inspection of the chip under inspection, improving inspection efficiency.

[0004] However, when this structure is used for actual chip appearance inspection, due to its own structural limitations, it can only perform simple chip top plane scanning inspection operations. The inspection range is limited to the vertical direction of the chip surface, and the chip cannot be freely adjusted in all directions. It is also impossible to ensure that the chip appearance inspection obtains more accurate data, and technical problems such as missed inspections are prone to occur. At the same time, the equipment is unable to efficiently load and unload the inspected chips, as well as perform stable locking and positioning inspection operations after loading and unloading, and cannot meet daily usage needs. Therefore, it is urgent to design a high-accuracy chip appearance inspection device to solve the above problems. Summary of the Invention

[0005] The purpose of the present invention is to provide a highly accurate chip appearance detection device to solve the problem that the existing structure proposed in the above background technology can only perform simple chip top plane scanning detection operations due to its own structural limitations when used for actual chip appearance detection. The detection range is limited to the vertical direction of the chip surface, and the chip cannot be freely adjusted in all directions, so it is impossible to ensure that the chip appearance obtains more accurate detection data, and technical problems such as missed detection are prone to occur. At the same time, the equipment is unable to efficiently load and unload the chips to be tested, as well as stable locking and positioning detection operations after loading and unloading, and cannot meet daily usage needs.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a highly accurate chip appearance inspection device, comprising an observation frame, a storage frame fixedly connected to the top of the observation frame, a detection frame fixedly connected to the bottom of the observation frame, a detection component provided at the top of the storage frame, and a material control component provided inside the detection frame; The detection component includes an air control seat, which is provided at the center of the surface of the storage rack. A hydraulic rod is provided at the top of the air control seat, and a lower pressure seat is fixedly connected to the bottom end of the hydraulic rod; The material control assembly includes a first draw frame, one end of which is fixedly connected to a center seat, one end of which is fixedly connected to a second draw frame, and the internal structures of the first draw frame and the second draw frame are the same.

[0007] Preferably, a buffer cover is movably connected to the interior of the first drawing frame, and a material storage cover is movably connected to the interior of the buffer cover.

[0008] Preferably, a material placement mold groove is provided inside the material placement cover, buffer side plates are fixedly connected to the four sides of the material placement cover, and a universal joint seat is provided at the bottom center of the material placement cover.

[0009] Preferably, an annular spring is provided on the inner wall of one end of the buffer cover, side strip springs are provided on the four sides of the inner wall of the buffer cover, a universal rolling ball is provided at the center of the inner bottom wall of the buffer cover, and the inner walls of the first and second drawing frames are provided with mounting inner liner, and the ends of the first and second drawing frames away from each other are fixedly connected with positioning arc blocks.

[0010] Preferably, a detection probe is provided at the inner center of the lower pressure seat, a fill light ring light is provided at the inner wall edge of the lower pressure seat, a docking ring seat is provided at the bottom center of the lower pressure seat, adjustment airbags are provided at the four corners of the side of the docking ring seat, and a reset rubber cover is provided at the four sides of the side of the docking ring seat.

[0011] Preferably, air control pipes are provided at the four corners of the surface of the lower pressure seat, a gas transmission telescopic pipe is provided at one end of the air control pipe, air control valve seats are provided at the four corners of the side of the air control seat, and a telescopic cover is provided at the bottom end of the air control valve seat.

[0012] Preferably, the bottom end of the detection frame is fixedly connected to a lifting pump, a lifting air bag is provided at the inner center of the lifting pump, and the top end of the lifting air bag is fixedly connected to a lifting support.

[0013] Preferably, the front and rear ends of the detection frame are provided with pulling grooves, and the inner walls of the pulling grooves are provided with fitting strips. The upper and lower ends of the detection frame are fixedly connected with docking grooves, and the detection frame is adapted to the first pulling frame and the second pulling frame.

[0014] Preferably, a lifting slot is provided at the top of the storage rack, a fitting inner pad is provided on the inner wall of the storage rack, an equipment slot is provided on one side of the storage rack, and an observation mirror is provided on the side of the observation rack.

[0015] Preferably, air control pumps are provided at the four corners of the side of the air control seat, and a control panel is provided on one side of the storage rack.

[0016] Compared with the prior art, the present invention has the following beneficial effects: The high-accuracy chip appearance inspection device can realize a full-scale surface scanning and inspection operation of the inspected chip material through the detection components. In actual use, the four groups of air control pumps at the four corners of the air control seat are started through the control of the control panel, so that the universal joint seat at the bottom end of the material storage cover can be universally adjusted at the universal ball of the buffer cover, and the inside of the buffer cover can be adapted to perform a top-connected limit operation with the buffer side plates at the four corners of the material storage cover through the annular spring at one end and the side strip springs at the four corners of the inner wall, and an adapted buffer docking can be performed, thereby ensuring that the chip is subjected to a full-scale stable angle adjustment operation inside the material storage mold groove of the material storage cover, and is more adapted to the full-scale scanning and inspection operation of the detection probe, thereby achieving high accuracy in the overall detection of the equipment and reflecting the practicality of the equipment design.

[0017] This highly accurate chip appearance inspection device can realize the rapid positioning and loading and unloading operations of two groups of inspected chip materials inside the device through the material control component. In daily use, the first draw-out frame and the second draw-out frame are switched back and forth inside the inspection frame through the center seat in the center. The material storage cover can be rotated and switched for daily use according to the actual size of the chip, and the buffer cover can also be moved up and down inside the mounting inner tanks of the first draw-out frame and the second draw-out frame, thereby ensuring that the material storage cover inside the buffer cover is more stable and can be adapted to the lower pressure seat for docking operations, thereby improving the overall inspection stability of the equipment, improving the overall detection efficiency of the equipment, and reflecting the comprehensiveness of the equipment design. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional schematic diagram of the structure of the present invention; Figure 2 It is an overall schematic diagram of the observation rack and storage rack structure of the present invention; Figure 3 This is an overall schematic diagram of the air control seat and hydraulic rod structure of the present invention; Figure 4 This is an overall schematic diagram of the bottom of the lower press seat structure of the present invention; Figure 5 It is an overall schematic diagram of the first and second twitching frames of the present invention; Figure 6 It is an overall schematic diagram of the material placement cover structure of the present invention; Figure 7 It is an overall schematic diagram of the detection frame structure of the present invention; Figure 8 It is an overall schematic diagram of the jacking pump structure of the present invention; Figure 9 For the present invention Figure 1 A magnified schematic diagram of the structure at center A; Figure 10 For the present invention Figure 1 A magnified schematic diagram of the structure at B in the middle.

[0019] In the figure: 1. Observation frame; 2. Storage frame; 3. Detection frame; 4. Air control seat; 5. Hydraulic rod; 6. Pressing seat; 7. First pulling frame; 8. Center seat; 9. Second pulling frame; 10. Buffer cover; 11. Material placement cover; 12. Material placement mold groove; 13. Buffer side plate; 14. Universal joint seat; 15. Ring spring; 16. Side strip spring; 17. Universal ball; 18. Install liner; 19. Positioning arc block; 20. Detection probe; 21. Fill-in ring light; 22. Docking ring seat; 23. Adjustment airbag; 24. Reset rubber cover; 25. Air control pipe; 26. Gas transmission telescopic pipe; 27. Air control valve seat; 28. Telescopic cover; 29. ​​Lifting pump; 30. Lifting airbag; 31. Lifting support; 32. Pumping groove; 33. Laminating rubber strip; 34. Docking groove; 35. Lifting groove; 36. Laminating inner pad; 37. Equipment groove; 38. Observation mirror; 39. Air control pump; 40. Control panel. DETAILED DESCRIPTION

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0021] See also Figures 1-10 , an embodiment provided by the present invention: A high-accuracy chip appearance detection device includes an observation frame 1, the top of the observation frame 1 is fixedly connected to a storage frame 2, the bottom of the observation frame 1 is fixedly connected to a detection frame 3, the top of the storage frame 2 is provided with a detection component, the interior of the detection frame 3 is provided with a material control component, the detection component includes an air control seat 4, the surface center of the storage frame 2 is provided with an air control seat 4, the top of the air control seat 4 is provided with a hydraulic rod 5, the bottom end of the hydraulic rod 5 is fixedly connected to a lower pressure seat 6, the inner center of the lower pressure seat 6 is provided with a detection probe 20, the inner wall edge of the lower pressure seat 6 is provided with a fill light ring light 21, the bottom center of the lower pressure seat 6 is provided with a fill light ring light 21, and the bottom center of the lower pressure seat 6 is provided with a fill light ring light 21. The center is provided with a docking ring seat 22, and the four corners of the side of the docking ring seat 22 are provided with an adjusting air bag 23. The four sides of the docking ring seat 22 are provided with a reset rubber cover 24. The four corners of the surface of the lower pressure seat 6 are provided with an air control pipe 25, and one end of the air control pipe 25 is provided with a gas transmission telescopic pipe 26. The four corners of the side of the air control seat 4 are provided with an air control valve seat 27, and the bottom end of the air control valve seat 27 is provided with a telescopic cover 28. The bottom end of the detection frame 3 is fixedly connected to a jacking pump 29, and the inner center of the jacking pump 29 is provided with a jacking air bag 30. The top of the jacking air bag 30 is fixedly connected to a jacking support 31. The front of the detection frame 3 The rear ends are provided with a pumping groove 32, and the inner walls of the pumping groove 32 are provided with a fitting tape 33 on both sides. The upper and lower ends of the detection frame 3 are fixedly connected with a docking groove 34. The detection frame 3 is adapted to the first pumping frame 7 and the second pumping frame 9. The top of the storage rack 2 is provided with a lifting groove 35, and the inner wall of the storage rack 2 is provided with a fitting inner pad 36. A device groove 37 is provided on one side of the storage rack 2. An observation mirror 38 is provided on the side of the observation rack 1. An air control pump 39 is provided on the four corners of the side of the air control seat 4. A control panel 40 is provided on one side of the storage rack 2, and the control start adapted by the control panel 40 The four groups of air control pumps 39 at the four corners of the side of the air control seat 4 perform adaptive air control operations at the air control pipes 25 at the four corners of the surface of the lower pressure seat 6 through the air control valve seats 27, telescopic covers 28 and lifting pumps 29 at the four corners of the side of the air control seat 4, which also enables the four groups of adjustment air bags 23 at the four corners inside the lower pressure seat 6 to drive the central docking ring seat 22 to perform translational adjustment operations, and the docking ring seat 22 then drives the material placement cover 11 to perform synchronous adjustment inside the buffer cover 10. At this time, the universal joint seat 14 at the bottom end of the material placement cover 11 performs universal adjustment operations at the universal ball 17 of the buffer cover 10.

[0022] The material control assembly includes a first twitching frame 7, one end of the first twitching frame 7 is fixedly connected to a center seat 8, one end of the center seat 8 is fixedly connected to a second twitching frame 9, the internal structure of the first twitching frame 7 and the second twitching frame 9 is the same, the interior of the first twitching frame 7 is movably connected to a buffer cover 10, the interior of the buffer cover 10 is movably connected to a material placement cover 11, a material placement mold groove 12 is provided inside the material placement cover 11, the four sides of the side of the material placement cover 11 are fixedly connected to a buffer side plate 13, a universal joint seat 14 is provided at the bottom center of the material placement cover 11, an annular spring 15 is provided on the inner wall of one end of the buffer cover 10, side strip springs 16 are provided on the four sides of the inner wall of the buffer cover 10, and a universal ball 17 is provided at the center of the inner bottom wall of the buffer cover 10 , the inner walls of the first twitching frame 7 and the second twitching frame 9 are provided with an installation liner 18, and the ends of the first twitching frame 7 and the second twitching frame 9 that are away from each other are fixedly connected with a positioning arc block 19, and the first twitching frame 7 and the second twitching frame 9 are switched back and forth inside the detection frame 3 through the center seat 8 in the center, and the twitching grooves 32 at the front and rear ends of the detection frame 3 can be used through the fitting strips 33 on both sides of the inner wall to perform damping and limiting operations on both sides of the first twitching frame 7, the center seat 8 and the second twitching frame 9. Finally, in conjunction with the positioning arc blocks 19 at both ends of the first twitching frame 7 and the second twitching frame 9, the positioning and docking operations at the front and rear ends of the detection frame 3 are performed to quickly complete the switching and loading and unloading operations of the two sets of detection chips.

[0023] Working principle: When in use, the user first puts the chip material into the feeding mold groove 12 of the feeding cover 11, and then the chip and the feeding cover 11 enter the inner center of the detection frame 3 along with the first pulling frame 7. At this time, the hydraulic rod 5 inside the air control seat 4 can be started first to drive the lower pressure seat 6 at the bottom to extend and press down as a whole, from the inside of the storage rack 2 through the observation frame 1 to enter the inside of the detection frame 3, and perform the upper and lower docking operation adapted to the feeding cover 11, and adapt the docking ring seat 22 of the lower pressure seat 6 to be sleeved on the feeding cover 11. At this time, the detection and processing operation of the chip surface can be realized through the detection probe 20 and the fill light ring light 21 inside the lower pressure seat 6. At the same time, the four side surfaces of the air control seat 4 can be started and controlled by the control panel 40 on a daily basis. The four groups of air control pumps 39 at the corners perform adaptive air control operations at the air control pipes 25 at the four corners of the surface of the lower pressure seat 6 through the air control valve seats 27, telescopic covers 28 and jacking pumps 29 at the four corners of the side of the air control seat 4, which makes the four groups of adjustment air bags 23 at the four corners of the lower pressure seat 6 drive the central docking ring seat 22 to perform translational adjustment operations, and the docking ring seat 22 drives the material placement cover 11 to be synchronously adjusted inside the buffer cover 10. At this time, the universal joint seat 14 at the bottom end of the material placement cover 11 performs a universal adjustment operation at the universal ball 17 of the buffer cover 10, and the inside of the buffer cover 10 can perform an adaptive top connection limit operation with the buffer side plates 13 at the four corners of the side of the material placement cover 11 through the annular spring 15 at one end and the side strip springs 16 at the four corners of the inner wall. The chip is adapted to be docked with a buffer to ensure that the chip is subjected to a full range of stable angle adjustment operation inside the feeding mold groove 12 of the feeding cover 11, and is more adapted to be subjected to a full range of scanning and detection operation by the detection probe 20, so as to achieve high accuracy of the overall detection of the equipment. In the daily use process, the staff can switch the first twitching frame 7 and the second twitching frame 9 back and forth through the center seat 8 in the center inside the detection frame 3, and the twitching grooves 32 at the front and rear ends of the detection frame 3 can be used through the fitting strips 33 on both sides of the inner wall to perform damping and limiting operations on both sides of the first twitching frame 7, the center seat 8 and the second twitching frame 9. Finally, in conjunction with the positioning arc blocks 19 at both ends of the first twitching frame 7 and the second twitching frame 9, the detection frame 3 is moved back and forth at the front and rear ends. The positioning and docking operation can quickly complete the switching and loading and unloading operations of the two groups of detection chips, and the material placement cover 11 can be movably installed inside the buffer cover 10. The material placement cover 11 can be rotated and switched for daily use according to the actual size of the chip, and the buffer cover 10 can also be movably lifted and lowered inside the installation inner tank 18 of the first drawing frame 7 and the second drawing frame 9. At the same time, the lifting air bag 30 inside the lifting pump 29 is started daily, and the lifting support 31 at its top is adapted to be connected to the bottom end of the buffer cover 10, so that the buffer cover 10 can be telescoped upward as a whole, which ensures that the material placement cover 11 inside the buffer cover 10 is more stable and adapted to be docked with the lower pressure seat 6, thereby improving the overall inspection stability of the equipment and improving the overall inspection efficiency of the equipment.The above is the entire working principle of the present invention.

[0024] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A high-accuracy chip appearance inspection device, comprising an observation frame (1), characterized in that: The top end of the observation frame (1) is fixedly connected to a storage frame (2), the bottom end of the observation frame (1) is fixedly connected to a detection frame (3), the top end of the storage frame (2) is provided with a detection component, and the interior of the detection frame (3) is provided with a material control component; The detection component comprises an air control seat (4), the air control seat (4) is provided at the center of the surface of the storage rack (2), a hydraulic rod (5) is provided at the top end of the air control seat (4), and a lower pressure seat (6) is fixedly connected to the bottom end of the hydraulic rod (5); The material control assembly comprises a first draw frame (7), one end of the first draw frame (7) is fixedly connected to a center seat (8), one end of the center seat (8) is fixedly connected to a second draw frame (9), and the first draw frame (7) and the second draw frame (9) have the same internal structure.

2. A high-accuracy chip appearance inspection device according to claim 1, characterized in that: The first drawing frame (7) is internally movably connected to a buffer cover (10), and the buffer cover (10) is internally movably connected to a material placement cover (11).

3. The high-accuracy chip appearance inspection device according to claim 2, characterized in that: A material placement mold groove (12) is provided inside the material placement cover (11), buffer side plates (13) are fixedly connected to the four sides of the material placement cover (11), and a universal joint seat (14) is provided at the bottom center of the material placement cover (11).

4. The high-accuracy chip appearance inspection device according to claim 2, characterized in that: An annular spring member (15) is provided on the inner wall of one end of the buffer cover (10), side strip spring members (16) are provided on the four sides of the inner wall of the buffer cover (10), a universal ball (17) is provided at the center of the inner bottom wall of the buffer cover (10), a mounting liner (18) is provided on the inner walls of the first twitching frame (7) and the second twitching frame (9), and a positioning arc block (19) is fixedly connected to the ends of the first twitching frame (7) and the second twitching frame (9) away from each other.

5. The high-accuracy chip appearance inspection device according to claim 1, characterized in that: A detection probe (20) is provided at the inner center of the lower pressing seat (6), a fill light ring light (21) is provided at the inner wall edge of the lower pressing seat (6), a docking ring seat (22) is provided at the bottom center of the lower pressing seat (6), an adjustment air bag (23) is provided at the four corners of the side of the docking ring seat (22), and a reset rubber cover (24) is provided at the four sides of the side of the docking ring seat (22).

6. The high-accuracy chip appearance inspection device according to claim 1, characterized in that: Air control pipes (25) are provided at the four corners of the surface of the lower pressure seat (6), a gas transmission telescopic pipe (26) is provided at one end of the air control pipe (25), air control valve seats (27) are provided at the four corners of the side of the air control seat (4), and a telescopic cover (28) is provided at the bottom end of the air control valve seat (27).

7. The high-accuracy chip appearance inspection device according to claim 1, characterized in that: The bottom end of the detection frame (3) is fixedly connected to a lifting pump (29), a lifting air bag (30) is provided at the inner center of the lifting pump (29), and the top end of the lifting air bag (30) is fixedly connected to a lifting support (31).

8. The high-accuracy chip appearance inspection device according to claim 1, characterized in that: The front and rear ends of the detection frame (3) are provided with a pulling groove (32), and the inner walls of the pulling groove (32) are provided with a fitting adhesive strip (33). The upper and lower ends of the detection frame (3) are fixedly connected with a docking groove (34), and the detection frame (3) is adapted to fit between the first pulling frame (7) and the second pulling frame (9).

9. The high-accuracy chip appearance inspection device according to claim 1, characterized in that: The top of the storage rack (2) is provided with a lifting slot (35), the inner wall of the storage rack (2) is provided with a fitting inner pad (36), one side of the storage rack (2) is provided with an equipment slot (37), and the side of the observation rack (1) is provided with an observation mirror (38).

10. The high-accuracy chip appearance inspection device according to claim 1, characterized in that: Air control pumps (39) are provided at the four corners of the side of the air control seat (4), and a control panel (40) is provided on one side of the storage rack (2).

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