A method for manufacturing a high-temperature-resistant thin film temperature sensor based on laser manufacturing
By combining fiber laser scanning and vacuum heat treatment, the problems of wide patterns, low efficiency, and high cost of polymer precursor ceramic thin film sensors were solved, and a high-temperature resistant thin film temperature sensor with a minimum linewidth of 10 micrometers was fabricated, which has good stability and repeatability.
CN120685214BActive Publication Date: 2026-07-24LINGNAN NORMAL UNIV
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- LINGNAN NORMAL UNIV
- Filing Date
- 2025-06-23
- Publication Date
- 2026-07-24
AI Technical Summary
Technical Problem
Existing polymer precursor ceramic thin film sensors suffer from problems such as wide patterns, low fabrication efficiency, and high cost during the fabrication process.
Method used
By using a fiber laser to scan the polymer precursor film and combining it with vacuum heat treatment, patterning and pyrolysis can be synchronized, thus preparing a PDC sensing film with a minimum linewidth of 10 micrometers.
Benefits of technology
A high-temperature resistant thin-film temperature sensor with fine patterns was successfully fabricated at high efficiency and low cost. It can operate stably at 900℃ and has good repeatability and stability.
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Abstract
The application discloses a high-temperature-resistant film temperature sensor preparation method based on laser manufacturing. First, a precursor film of a polymer precursor ceramic is coated on a substrate. After being heated to 180 DEG C or being naturally placed to solidify, the precursor film is scanned by a fiber laser in a certain mode, and the unnecessary part is removed, and the pattern part is left, so that the polymer precursor ceramic sensing film is simultaneously completed by patterning and pyrolysis. By using the technical scheme, the problems of a wide pattern, low preparation efficiency and high cost of the polymer precursor ceramic film are solved.
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