Optical system calibration method and system

Abstract

The invention provides an optical system calibration method and system, and the method comprises the steps: carrying out the focal plane calibration through detecting the position of a focusing beam segment focus of a focus adjustment assembly on an optical axis under different combined focal lengths under the condition that the incident light of the focus adjustment assembly is parallel light; and under the condition that the focal plane calibration is completed, the light spot size is calibrated through the light spot adjusting assembly. According to the invention, by providing a mode of combining the light spot adjusting assembly with the focus adjusting assembly to adjust the light spot size and the focus, equal-proportion adjustment of the light spots in a certain size range of the focal plane is realized, and the precision of the light spots is improved while the consistency of the focal plane under different combined focal lengths of the focus adjusting assembly is realized; and the optical system can meet the high-precision requirement occasion. Besides, a sectional calibration mode is adopted, so that the problems of incapability of finding a focal plane position by a light spot adjusting assembly and difficulty in correction caused by superposition of a plurality of variables in integrated correction of the whole set of light path system can be avoided, and the calibration difficulty is reduced.

Description

Technical Field

[0001] The present application relates to the field of lasers, and in particular to an optical system calibration method and system. Background Art

[0002] Broadband fiber laser cladding, laser hardening, laser edge sealing, and surface heat treatment typically require a laser processing head with a typical output spot, such as a flat-top spot. This requires a variety of beam shaping lenses, including high-order aspheric lenses, microlens arrays, DOEs, spatial light modulators, and metasurface micro-nano optical lenses. These optical shaping lenses are typically positioned before the focusing lens, using parallel light as the reference. The desired beam spot is achieved at the focal plane.

[0003] Due to the diversity of client usage conditions, the aforementioned beam shaping laser processing head usually needs to adjust the size of the final output light spot. For example, the circular flat-top light spot needs to be continuously adjustable within a certain diameter range, and the rectangular flat-top light spot needs to be magnified and reduced in proportion. At this time, it is often necessary to introduce a zoom optical system.

[0004] However, due to the influence of the processing accuracy of the optical lenses inside the laser processing head, such as collimation, beam shaping mirrors, focusing, etc., the processing accuracy of structural parts and various assembly accuracies, the actual spot size obtained will eventually be inconsistent with the theoretical one. Especially for the demand for large spot shaping, the dimensional error often reaches 5%-10%. For some customers' applications with high-precision spot size requirements, it is difficult to meet the needs. Summary of the Invention

[0005] In view of this, the purpose of the embodiments of the present application is to provide an optical system calibration method and system that can reduce the difficulty of optical system calibration while meeting high-precision processing requirements.

[0006] In a first aspect, an embodiment of the present application provides an optical system calibration method, which is applied to an optical system, wherein the optical system includes: a spot adjustment component and a focus adjustment component; the spot adjustment component and the focus adjustment component are arranged in sequence along the direction of light source transmission; and the spot adjustment component and the focus adjustment component are coaxially arranged along the central axis of the light source; the method includes: when the incident light of the focus adjustment component is parallel light, by detecting the position of the focus of the focused light beam segment of the focus adjustment component on the optical axis at different combined focal lengths, performing focal plane calibration; when the focal plane calibration is completed, calibrating the spot size through the spot adjustment component.

[0007] In the above implementation process, by proposing a method of combining spot size adjustment with a focus adjustment component to adjust the focus, it is possible to achieve proportional adjustment of the spot within a certain size range of the focal plane. While achieving consistency in the focal plane under different focal length combinations of the focus adjustment components, the accuracy of the target spot is improved, allowing the optical system to meet high-precision processing requirements. In addition, when calibrating the optical system, a segmented calibration method is adopted. This avoids the difficulty of calibration caused by the inability of the spot adjustment component to find the focal plane position and the superposition and mixing of many independent and dependent variables, which are problems that exist in the integrated calibration of the entire optical path system. This greatly reduces the difficulty of optical system calibration.

[0008] In one embodiment, the focus adjustment component includes: a compensation lens group; when the incident light of the focus adjustment component is parallel light, focal plane calibration is performed by detecting the position of the focus of the focused light beam segment of the focus adjustment component on the optical axis at different combined focal lengths, including: when the incident light of the focus adjustment component is parallel light, calculating the corresponding lower limit actual focus position and upper limit actual focus position when the focus adjustment component has a lower limit focus and an upper limit focus respectively; when the position difference between the lower limit actual focus position and the upper limit actual focus position exceeds a preset position difference range, determining the target movement amount of the compensation lens group according to the theoretical distance of the compensation lens group and the compensation amount of the compensation lens group; moving the compensation lens group according to the target movement amount; after moving the compensation lens group, recalculating the corresponding lower limit actual focus position and upper limit actual focus position when the focus adjustment component has a lower limit focus and an upper limit focus respectively, until the position difference between the lower limit actual focus position and the upper limit actual focus position is within the preset position difference range.

[0009] In the above implementation, during focus calibration, the target movement amount of the compensating lens assembly is calculated in real time based on the positional relationship between the lower limit actual focus position and the upper limit actual focus position. The compensating lens assembly is then gradually moved according to the target movement amount until the focus calibration passes. Because the pass / failure of the focus calibration is determined based on the actual focus position, the accuracy of the focus calibration is improved.

[0010] In one embodiment, the focus adjustment component further includes: a zoom lens group and a fixed lens group; wherein, calculating the corresponding lower limit actual focus position when the focus adjustment component is at the lower limit focus includes: when the focus adjustment component is at the lower limit focus, determining a first spacing, a second spacing and a third spacing according to the focal length of the compensation lens group, the focal length of the zoom lens group, the focal length of the fixed lens group and the combined focal length; wherein, the first spacing is the spacing between the rear principal surface of the compensation lens group and the front principal surface of the zoom lens group, the second spacing is the spacing between the rear principal surface of the zoom lens group and the front principal surface of the fixed lens group, and the third spacing is the spacing between the rear principal surface of the fixed lens group and the focal plane; determining a first compensation lens group position of the compensation lens group and a first zoom lens group position of the zoom lens group according to the first spacing, the second spacing and the third spacing; and obtaining the lower limit actual focus position after adjusting the compensation lens group to reach the first compensation lens group position and the zoom lens group reaches the first zoom group position.

[0011] In one embodiment, the focus adjustment component further includes: a zoom lens group and a fixed lens group; wherein, calculating the corresponding upper limit actual focus position when the focus adjustment component is at the upper limit focus includes: when the focus adjustment component is at the upper limit focus, determining a first spacing, a second spacing, and a third spacing according to the focal length of the compensation lens group, the focal length of the zoom lens group, the focal length of the fixed lens group, and the combined focal length; wherein the first spacing is the spacing between the rear principal surface of the compensation lens group and the front principal surface of the zoom lens group, the second spacing is the spacing between the rear principal surface of the zoom lens group and the front principal surface of the fixed lens group, and the third spacing is the spacing between the rear principal surface of the fixed lens group and the focal plane; determining a second compensation lens group position of the compensation lens group and a second zoom lens group position of the zoom lens group according to the first spacing, the second spacing, and the third spacing; and obtaining the upper limit actual focus position after adjusting the compensation lens group to reach the second compensation lens group position and the zoom lens group to reach the second zoom group position.

[0012] In one embodiment, the first spacing and the second spacing are obtained by the following formula: in, is the first intermediate quantity, is the second intermediate quantity, To compensate for the focal length of the lens group, is the focal length of the zoom lens group, For fixed lens group focal length, is the first spacing, is the second spacing, is the third spacing, is the combined focal length.

[0013] In one embodiment, before determining the target movement amount of the compensation lens group based on the theoretical distance of the compensation lens group and the compensation amount of the compensation lens group, the method further includes: determining a reference number based on the lower limit actual focus position before and after the movement of the compensation lens group at the current moment and the movement distance of the compensation lens group; determining the compensation amount of the compensation lens group based on the lower limit actual focus position, the upper limit actual focus position, the lower limit focus, the upper limit focus and the reference number; wherein the compensation amount is configured as the additional movement amount of the compensation lens group based on the theoretical distance.

[0014] In one embodiment, the calculation formula of the compensation amount is: ; in, is the lower limit actual focus position, is the upper limit actual focus position, is the lower focus, is the upper focus, There is a benchmark number.

[0015] In the above implementation process, by determining the compensation amount of the compensation lens group according to actual positions such as the upper limit actual focus position and the lower limit actual focus position, the accuracy of the compensation amount can be improved, thereby improving the focus calibration accuracy.

[0016] In one embodiment, the focus adjustment assembly includes: a compensation lens group, a zoom lens group, and a fixed lens group; when the focal plane calibration is completed, calibrating the spot size by the light spot adjustment assembly includes: compensating the combined focal length of the focus adjustment assembly by a light spot compensation coefficient; calculating a first spacing and a second spacing according to the compensated combined focal length; wherein the first spacing is the spacing between the rear principal surface of the compensation lens group and the front principal surface of the zoom lens group, and the second spacing is the spacing between the rear principal surface of the zoom lens group and the front principal surface of the fixed lens group; compensating the first spacing by a compensation amount; and calculating the first spacing based on the compensation amount. According to the compensated first spacing and the second spacing, the compensation lens group and the zoom lens group are driven to corresponding positions; when the compensation lens group and the zoom lens group reach the corresponding positions, the actual circumscribed circle diameter of the light spot is obtained; when the light spot size does not meet the required accuracy, the light spot compensation coefficient is updated according to the actual circumscribed circle diameter of the light spot and the theoretical circumscribed circle diameter of the light spot; the combined focal length of the focus adjustment component is compensated according to the updated light spot compensation coefficient, and the first spacing and the second spacing are continuously calculated according to the compensated combined focal length until the spot size of the light spot meets the required accuracy.

[0017] In the above implementation process, the combined focal length of the focus adjustment component is adjusted in real time according to the actual circumscribed circle diameter of the light spot, and the positions of the compensation lens group and the zoom lens group of the focus adjustment component are adjusted based on the adjusted combined focal length, thereby achieving real-time adjustment of the spot size of the light spot, so that the spot size meets the required accuracy and the accuracy of the spot size adjustment is improved.

[0018] In one embodiment, before compensating the combined focal length of the focus adjustment component by using the spot compensation coefficient, the method further includes: obtaining an initial circumscribed circle diameter of the spot of the spot adjustment lens group of the spot adjustment component under the focusing focal length; determining the combined focal length of the focus adjustment component according to the initial circumscribed circle diameter of the spot and the theoretical circumscribed circle diameter of the spot; and determining the spot compensation coefficient according to the actual circumscribed circle diameter of the spot and the theoretical circumscribed circle diameter of the spot.

[0019] In the above implementation process, the accuracy of the spot compensation coefficient can be improved by determining the spot compensation coefficient in real time according to the actual circumscribed circle diameter of the light spot and the theoretical circumscribed circle diameter of the light spot.

[0020] In one embodiment, the optical system further includes a collimator assembly; wherein the collimator assembly, the light spot adjustment assembly, and the focus adjustment assembly are sequentially arranged along a transmission direction of the light source; and the collimator assembly, the light spot adjustment assembly, and the focus adjustment assembly are coaxially arranged along a central axis of the light source; and when the incident light to the focus adjustment assembly is parallel light, before performing focal plane calibration by detecting the position of the focus of the focused light beam segment of the focus adjustment assembly on the optical axis at different combined focal lengths, the method further includes: respectively detecting the light spot size at a first distance, a second distance, and a third distance; wherein the first distance, the second distance, and the third distance are distances from a light outlet of the collimator assembly; if the size difference between the light spot sizes at the first distance, the second distance, and the third distance exceeds a preset size range, adjusting the distance between the collimator lens group and the light source emitter in the collimator assembly; and after the distance between the collimator lens group and the light source emitter is adjusted, continuing to detect the light spot size at the first distance, the second distance, and the third distance until the size difference between the light spot sizes at the first distance, the second distance, and the third distance is within the preset size range.

[0021] In the above implementation process, by setting a collimation component and calibrating the light source based on the collimation component, the light source of the input focus adjustment component is parallel light, and there is no need to separately set up a light source device that needs to emit parallel light, thereby increasing the application scenarios of the optical system.

[0022] In a second aspect, an embodiment of the present application further provides an optical system calibration system, comprising: a light spot adjustment component, a focus adjustment component and an electronic device; the light spot adjustment component and the focus adjustment component are arranged in sequence along the direction of light source transmission; and the light spot adjustment component and the focus adjustment component are coaxial along the central axis of the light source; the electronic device connects the light spot adjustment component and the focus adjustment component; wherein, the electronic device is configured to execute the optical system calibration method in the above-mentioned first aspect, or any one of the embodiments of the above-mentioned first aspect.

[0023] In one embodiment, the electronic device is used to control the movement of the focus adjustment component to perform focal plane calibration by detecting the position of the focus of the focused light beam segment of the focus adjustment component at different combined focal lengths when the incident light of the focus adjustment component is parallel light; the electronic device is also used to control the spot adjustment component to calibrate the spot size when the focal plane calibration is completed.

[0024] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the following embodiments are given in conjunction with the accompanying drawings for detailed description as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 A schematic plan view of an optical system calibration system provided in an embodiment of the present application; Figure 2 A three-dimensional schematic diagram of an optical system calibration system provided in an embodiment of the present application; Figure 3 A three-dimensional schematic diagram of an optical calibration system provided in an embodiment of the present application, wherein the compensation lens group, the zoom lens group, and the collimating lens group are provided with adjustment structures; Figure 4 A block diagram of an electronic device provided in an embodiment of the present application; Figure 5 A flowchart of the optical system calibration method provided in an embodiment of the present application; Figure 6 A flowchart of focal plane calibration provided in an embodiment of the present application; Figure 7 A flow chart of spot size calibration provided in an embodiment of the present application; Figure 8A flowchart of alignment calibration provided in an embodiment of the present application.

[0027] Description of the drawings: 100 - electronic device, 111 - memory, 113 - processor, 200 - focus adjustment component, 210 - compensation lens group, 220 - zoom lens group, 230 - fixed lens group, 300 - spot adjustment component, 310 - shaping lens, 320 - first adjustment structure, 400 - collimation component, 410 - collimation lens group, 420 - second adjustment structure. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be described below in conjunction with the accompanying drawings in the embodiments of the present application.

[0029] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and should not be understood as indicating or implying relative importance.

[0030] In the field of laser precision machining, especially in scenarios involving micro- and nanoscale manufacturing, the spot size accuracy of the shaping laser processing head directly determines the processing resolution and quality. However, under the existing technology system, the spot size is easily affected by multiple factors and produces significant errors. On the one hand, factors such as lens focal length deviation in the optical system and component position offset caused by mechanical support clamping can disrupt the preset optical path parameters. On the other hand, dynamic interference factors such as fluctuations in the laser's own beam quality and thermal lensing caused by temperature drift further exacerbate the instability of the spot size.

[0031] In response to the large spot size error problem of existing beam shaping laser processing heads, there is currently no effective feedback compensation method for spot size compensation, resulting in the inability to effectively meet the needs of applications requiring high-precision spot size.

[0032] In view of this, the present application proposes a method for calibrating an optical system. By proposing a method of combining a spot adjustment component for spot size adjustment with a focus adjustment component for focus adjustment, it is possible to achieve proportional adjustment of the spot within a certain size range of the focal plane. While achieving consistency of the focal plane under different focal length combinations of the focus adjustment component, the accuracy of the target spot is improved, allowing the optical system to meet high-precision processing requirements. In addition, when calibrating the optical system, a segmented calibration method is adopted to avoid the problem of the spot adjustment component being unable to find the focal plane position and the difficulty in calibration caused by the superposition and mixing of many independent and dependent variables, which exists in the integrated calibration of the entire optical path system. This greatly reduces the difficulty of optical system calibration.

[0033] To facilitate understanding of this embodiment, an optical system calibration system for executing an optical system calibration method disclosed in an embodiment of the present application is first introduced in detail.

[0034] like Figure 1 、 Figure 2 , which is a schematic diagram of an optical system calibration system provided in an embodiment of the present application, including: a light spot adjustment component 300 , a focus adjustment component 200 and an electronic device 100 .

[0035] The light spot adjustment component 300 and the focus adjustment component 200 are sequentially arranged along the transmission direction of the light source, and the light spot adjustment component 300 and the focus adjustment component 200 are coaxial along the central axis of the light source.

[0036] The electronic device 100 is connected to the light spot adjustment component 300 and the focus adjustment component 200 via a network for data communication or interaction. The electronic device 100 is configured to execute the optical system calibration method in the following embodiment.

[0037] Optionally, the electronic device 100 may be a network server, a database server, a personal computer (PC), a tablet computer, a smart phone, a personal digital assistant (PDA), etc. The type of the electronic device 100 may be selected according to actual conditions.

[0038] In one embodiment, the electronic device 100 is used to control the movement of the focus adjustment component 200 to perform focal plane calibration by detecting the position of the focus of the focused light beam segment of the focus adjustment component 200 at different combined focal lengths on the optical axis when the incident light of the focus adjustment component 200 is parallel light.

[0039] The focus adjustment assembly 200 may include a compensation lens group 210 , a zoom lens group 220 and a fixed lens group 230 .

[0040] Optionally, the compensating lens group 210 may adopt a positive focus aspheric lens, a doublet lens, an extra-low dispersion lens, a UD lens, etc. The lens type of the compensating lens group 210 may be selected according to actual conditions.

[0041] The zoom lens group 220 may be a negative aspheric lens, an apochromatic lens, an extra-low dispersion lens, ED glass, etc. The lens type of the zoom lens group 220 may be selected according to actual conditions.

[0042] The fixed lens group 230 can be a positive focus aspheric lens, an ultra-low dispersion lens, an achromatic lens, a high refractive index lens, a spherical lens, etc. The lens type of the fixed lens group 230 can be selected according to actual conditions.

[0043] The compensating lens group 210 and the zoom lens group 220 may be provided with a first adjustment structure 320. The first adjustment structure 320 is used to drive the compensating lens group 210 and the zoom lens group 220 to move along the central optical axis.

[0044] Optionally, the first adjustment structure 320 may be an electric adjustment structure or a manual adjustment structure. The type of the first adjustment structure 320 may be selected according to actual conditions.

[0045] in, Figure 3 As shown, the compensating lens group 210 and the zoom lens group 220 can each be provided with a first adjustment structure 320, or the compensating lens group 210 and the zoom lens group 220 can share a first adjustment structure 320. The arrangement of the first adjustment structure 320 in the compensating lens group 210 and the zoom lens group 220 can be selected according to actual conditions.

[0046] In one embodiment, under the incidence of parallel light, the compensation lens group 210 and the zoom lens group 220 of the focus adjustment assembly 200 cooperate with each other to move and follow the parallel light passing through the compensation lens group 210, the zoom lens group 220 and the fixed lens group 230, and the focal plane position of the light output section of the fixed lens group 230 remains unchanged.

[0047] The electronic device 100 is further configured to control the light spot adjustment component 300 to calibrate the light spot size when the focal plane calibration is completed.

[0048] The light spot adjustment assembly 300 may include a light spot adjustment lens group and corresponding structural components. The light spot adjustment lens group may include one or more shaping lenses 310 .

[0049] In one embodiment, the distance between two adjacent shaping lenses 310 in the plurality of shaping lenses 310 is a fixed distance.

[0050] Optionally, the reshaping lens 310 may be a high-power aspheric lens, a microlens array, a DOE, a spatial light modulator, a metasurface micro-nano optical lens, etc. The lens type of the reshaping lens 310 may be selected according to actual conditions.

[0051] To facilitate understanding of this embodiment, the electronic device 100 that executes the optical system calibration method disclosed in the embodiment of the present application is described in detail below.

[0052] like Figure 4 , which is a block diagram of an electronic device. The electronic device 100 may include a memory 111 and a processor 113. A person skilled in the art will understand that Figure 4 The structure shown is only for illustration and does not limit the structure of the electronic device 100. For example, the electronic device 100 may further include Figure 4 More or fewer components than shown, or with Figure 4 Different configurations shown.

[0053] The memory 111 and processor 113 are electrically connected to each other, directly or indirectly, to enable data transmission or interaction. For example, these components may be electrically connected to each other via one or more communication buses or signal lines. The processor 113 is used to execute the executable modules stored in the memory.

[0054] The memory 111 may be, but is not limited to, a random access memory (RAM), a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), etc. The memory 111 is used to store programs, and the processor 113 executes the programs after receiving an execution instruction. The method executed by the electronic device 100 defined by the process disclosed in any embodiment of the present application may be applied to the processor 113 or implemented by the processor 113.

[0055] The processor 113 may be an integrated circuit chip with signal processing capabilities. The processor 113 may be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it may also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components. The methods, steps, and logic block diagrams disclosed in the embodiments of the present application may be implemented or executed. The general-purpose processor may be a microprocessor or any conventional processor.

[0056] In one embodiment, the optical system calibration system may further include a collimator assembly 400. The collimator assembly 400, the light spot adjustment assembly 300, and the focus adjustment assembly 200 are sequentially arranged along the direction of light source transmission, and the collimator assembly 400, the light spot adjustment assembly 300, and the focus adjustment assembly 200 are coaxial along the central axis of the light source.

[0057] The collimating assembly 400 may include a fiber interface mother component, a collimating lens assembly 410 , etc. The structure of the collimating assembly 400 may be selected according to actual conditions.

[0058] The collimating lens group 410 here can adopt a structure such as a positive focus aspheric lens, a multi-spherical combined positive focus lens group, etc. The specific structure of the collimating lens group 410 can be adjusted according to actual conditions.

[0059] It should be understood that the collimating lens assembly 410 has the function of collimating the point divergent light output by the fiber-coupled output laser into a parallel light beam.

[0060] In one embodiment, the fiber interface female component of the collimating lens assembly 410 is adapted to the fiber interface of a fiber-coupled output laser.

[0061] The collimating lens assembly 410 may be provided with a second adjustment structure 420 , which can drive the collimating lens assembly 410 to move along the central axis thereof.

[0062] Optionally, the second adjustment structure 420 may be a manual adjustment structure or an electric adjustment structure. The structural type of the second adjustment structure 420 may be selected according to actual conditions.

[0063] It can be understood that the working principle of the optical system calibration system in the embodiment of the present application can be as follows: the point divergent light output by the laser is collimated by the collimating lens group 410 to form a collimated light beam, the collimated light beam passes through the spot adjustment component 300 to form a spot light beam, the spot light beam is convergently reduced by the compensation lens group 210 and then divergently expanded by the zoom lens group 220 and finally focused by the fixed lens group 230, finally forming the required light spot on the focal plane.

[0064] Optionally, the light spot shape may be circular, rectangular, regular polygonal, etc. The light spot shape may be selected according to actual conditions.

[0065] The optical system calibration system in this embodiment can be used to execute each step in each method provided in the embodiments of the present application. The implementation process of the optical system calibration method is described in detail below through several embodiments.

[0066] See also Figure 5 , is a flow chart of the optical system calibration method provided in the embodiment of the present application. Figure 5The specific process shown is explained in detail.

[0067] Step S201 , when the incident light of the focus adjustment component is parallel light, focal plane calibration is performed by detecting the position of the focus of the focused light beam segment of the focus adjustment component at different combined focal lengths on the optical axis.

[0068] Optionally, the focus position detection method may include a direct measurement method (such as a beam profile analysis instrument that scans and fits cross sections at different positions), an indirect measurement method (such as an optical analysis instrument based on Rayleigh scattering and beam lateral profile imaging), etc. The focus position detection method can be selected according to actual conditions.

[0069] It can be understood that when the focus adjustment component is at different combined focal lengths, the position on the optical axis of the focus of the focused light beam passing through the focus adjustment component is different. By adjusting the different combined focal lengths, the focus position can be adjusted, and the focal plane can be calibrated.

[0070] The focal length can be adjusted by adjusting the distance between the compensating lens group, the zoom lens group and the fixed lens group.

[0071] The parallel light here can be output after adjustment through a collimating component, or can be directly emitted through a parallel light emitting light source. The method for obtaining the parallel light can be selected according to actual conditions.

[0072] Step S202 : When the focal plane calibration is completed, the spot size is calibrated by a spot adjustment component.

[0073] Here, the spot adjustment component performs spot size calibration only after the focus adjustment component calibration is completed.

[0074] It can be understood that after obtaining the spot light beam emitted by the focus adjustment component, the specification parameters of the components in the spot adjustment component can be determined based on the target spot size, the combined focal length of the focus adjustment component, etc., and then the various components in the spot adjustment component can be adjusted according to the specification parameters of the various components in the spot adjustment component, thereby realizing the calibration of the spot size.

[0075] In the above implementation process, by proposing a method of combining spot size adjustment with a focus adjustment component to adjust the focus, it is possible to achieve proportional adjustment of the spot within a certain size range of the focal plane. While achieving consistency in the focal plane under different focal length combinations of the focus adjustment components, the accuracy of the target spot is improved, allowing the optical system to meet high-precision processing requirements. In addition, when calibrating the optical system, a segmented calibration method is adopted. This avoids the difficulty of calibration caused by the inability of the spot adjustment component to find the focal plane position and the superposition and mixing of many independent and dependent variables, which are problems that exist in the integrated calibration of the entire optical path system. This greatly reduces the difficulty of optical system calibration.

[0076] In one possible implementation, Figure 6 As shown, step S201 includes: when the incident light of the focus adjustment component is parallel light, calculating the corresponding lower limit actual focus position and upper limit actual focus position when the focus adjustment component is respectively in the lower limit focus and the upper limit focus; when the position difference between the lower limit actual focus position and the upper limit actual focus position exceeds the preset position difference range, determining the target movement amount of the compensation lens group according to the theoretical distance of the compensation lens group and the compensation amount of the compensation lens group; moving the compensation lens group according to the target movement amount; after moving the compensation lens group, recalculating the corresponding lower limit actual focus position and upper limit actual focus position when the focus adjustment component is respectively in the lower limit focus and the upper limit focus, until the position difference between the lower limit actual focus position and the upper limit actual focus position is within the preset position difference range.

[0077] The lower and upper limits of the focus adjustment component can be set according to the focal length range of the combined focal length of the focus adjustment component. For example, the focal length range of the combined focal length is: , then the value of the lower limit focus can be close to , that is, the lower limit focus The upper limit focus value can be close to , that is, the upper focus .

[0078] It is understandable that when the focus adjustment component is at the lower limit focus, the lower limit actual focus position of the focus adjustment component when it is at the lower limit focus can be calculated based on the set algorithm. When the focus adjustment component is at the upper limit focus, the upper limit actual focus position of the focus adjustment component when it is at the upper limit focus can be calculated based on the set algorithm.

[0079] After calculating the lower and upper actual focus positions, the relationship between the lower and upper actual focus positions can be further compared to determine whether the focus calibration is qualified. If the position difference between the lower and upper actual focus positions is within a preset position difference range, the focus calibration is determined to be qualified. If the position difference between the lower and upper actual focus positions is outside the preset position difference range, the focus calibration is determined to be unqualified and further focus calibration is required.

[0080] If further focus calibration is required, the target movement amount of the compensation lens group can be determined according to the theoretical distance of the compensation lens group and the compensation amount of the compensation lens group, and then the compensation lens group can be moved according to the target movement amount to further calibrate the focus.

[0081] It should be understood that after each movement of the compensating lens assembly, the corresponding lower and upper actual focus positions, when the focus adjustment assembly is at the lower and upper focus limits, can be recalculated, and the focus calibration can be determined based on the lower and upper actual focus positions. If the focus calibration still fails after the compensating lens assembly is moved, the target movement amount of the compensating lens assembly is determined based on the theoretical distance of the compensating lens assembly and the compensation amount of the compensating lens assembly, and the compensating lens assembly is moved according to the target movement amount to further calibrate the focus until the position difference between the lower and upper actual focus positions is within a preset position difference range (i.e., the focus calibration passes).

[0082] The compensation amount here is the additional movement of the compensation lens group based on the theoretical distance.

[0083] In one embodiment, determining the target movement amount of the compensating lens group according to the theoretical distance of the compensating lens group and the compensation amount of the compensating lens group can be achieved in the following manner: If the lower limit actual focus position and the upper limit actual focus position gradually increase, then an additional compensation amount is added based on the theoretical distance of the compensation lens group as the target movement amount of the compensation lens group.

[0084] If the lower limit actual focus position and the upper limit actual focus position gradually become smaller, then the compensation amount is additionally subtracted from the theoretical distance of the compensation lens group to serve as the target movement amount of the compensation lens group.

[0085] The theoretical distance of the compensation lens group remains unchanged.

[0086] The above-mentioned preset position difference range can be set in advance according to actual needs. For example, the preset position difference range can be within ±n%, where the value range of n can be [0.1, 3], such as n is 1.

[0087] The preset position difference range here actually affects the focal plane position deviation under each spot magnification (i.e., different spot sizes) after the final calibration. The smaller the value, the smaller the position deviation, but the higher the calibration difficulty. Therefore, typical values ​​such as n=0.5 and n=1 can meet actual application requirements.

[0088] In the above implementation, during focus calibration, the target movement amount of the compensating lens assembly is calculated in real time based on the positional relationship between the lower limit actual focus position and the upper limit actual focus position. The compensating lens assembly is then gradually moved according to the target movement amount until the focus calibration passes. Because the pass / failure of the focus calibration is determined based on the actual focus position, the accuracy of the focus calibration is improved.

[0089] In one possible implementation, calculating the corresponding lower limit actual focus position when the focus adjustment component is at the lower limit focus includes: determining a first spacing, a second spacing, and a third spacing according to the focal length of the compensation lens group, the focal length of the zoom lens group, the focal length of the fixed lens group, and the combined focal length when the focus adjustment component is at the lower limit focus; determining a first compensation lens group position of the compensation lens group and a first zoom lens group position of the zoom lens group according to the first spacing, the second spacing, and the third spacing; and obtaining the lower limit actual focus position after adjusting the compensation lens group to reach the first compensation lens group position and the zoom lens group to reach the first zoom lens group position.

[0090] In one possible implementation, calculating the corresponding upper limit actual focus position when the focus adjustment component is at the upper limit focus includes: determining a first spacing, a second spacing, and a third spacing according to the focal length of the compensation lens group, the focal length of the zoom lens group, the focal length of the fixed lens group, and the combined focal length when the focus adjustment component is at the upper limit focus; determining a second compensation lens group position of the compensation lens group and a second zoom lens group position of the zoom lens group according to the first spacing, the second spacing, and the third spacing; and obtaining the upper limit actual focus position after adjusting the compensation lens group to the second compensation lens group position and the zoom lens group to the second zoom lens group position.

[0091] Among them, the first distance is the distance between the rear principal surface of the compensation lens group and the front principal surface of the zoom lens group, the second distance is the distance between the rear principal surface of the zoom lens group and the front principal surface of the fixed lens group, and the third distance is the distance between the rear principal surface of the fixed lens group and the focal plane.

[0092] The third distance here is a fixed distance, that is, when the focus is calibrated by the focus adjustment assembly, the positions of the compensation lens group and the zoom lens group are adjusted, thereby adjusting the first distance and the second distance to achieve focus adjustment.

[0093] It is understandable that, since the fixed lens group is fixed, when the focus adjustment assembly is at the lower focus limit, after calculating the second distance, the first zoom lens group position of the zoom lens group can be determined based on the fixed lens group position and the second distance. Furthermore, the first compensating lens group position of the compensating lens group can be determined based on the first zoom lens group position and the first distance. The zoom lens group can then be adjusted based on the first zoom lens group position, and the compensating lens group can be adjusted based on the first compensating lens group position.

[0094] After adjusting the zoom lens group according to the first zoom lens group position and adjusting the compensation lens group according to the first compensation lens group position, the focus of the light beam passing through the focus adjustment component also changes, thereby achieving adjustment of the focus adjustment component under the lower limit focus.

[0095] When the focus adjustment assembly is at the upper limit focus, after calculating the second distance, the second zoom lens group position of the zoom lens group can be determined based on the position of the fixed lens group and the second distance. Furthermore, the second compensating lens group position of the compensating lens group can be determined based on the second zoom lens group position and the first distance. The zoom lens group can then be adjusted based on the second zoom lens group position, and the compensating lens group can then be adjusted based on the second compensating lens group position.

[0096] After adjusting the zoom lens group according to the second zoom lens group position and adjusting the compensation lens group according to the second compensation lens group position, the focus of the light beam passing through the focus adjustment component also changes, thereby achieving adjustment of the focus adjustment component under the upper limit focus.

[0097] It should be understood that the focus adjustment component can include two situations: upper and lower focus. Therefore, the lower actual focus position of the focus adjustment component when it is at the lower focus limit and the upper actual focus position when it is at the upper focus limit can be determined respectively.

[0098] In a possible implementation, the first spacing and the second spacing are obtained by the following formula:

[0099]

[0100]

[0101]

[0102] in, is the first intermediate quantity, is the second intermediate quantity, To compensate for the focal length of the lens group, is the focal length of the zoom lens group, For fixed lens group focal length, is the first spacing, is the second spacing, is the third spacing, is the combined focal length.

[0103] The distance between the first spacing and the second spacing can be accurately determined by the above formula.

[0104] In one possible implementation, before determining the target movement amount of the compensation lens group based on the theoretical distance of the compensation lens group and the compensation amount of the compensation lens group, the method further includes: determining a reference number based on the lower limit actual focus position before and after moving the compensation lens group at the current moment and the movement distance of the compensation lens group; and determining the compensation amount of the compensation lens group based on the lower limit actual focus position, the upper limit actual focus position, the lower limit focus, the upper limit focus and the reference number.

[0105] The compensation amount is configured as an additional movement amount of the compensation lens group based on the theoretical distance.

[0106] The base number here can be calculated using the following formula: ; in, There is a benchmark number, To compensate for the moving distance of the mirror group, is the actual focus position at the lower limit before moving the compensation lens group at the current moment, It is the lower limit actual focus position after moving the compensation lens group at the current moment.

[0107] In one embodiment, the moving distance of the compensating lens group may be in the range of [0.1 mm, 5 mm]. For example, the moving distance of the compensating lens group is 1 mm. The moving distance of the compensating lens group may be adjusted according to actual conditions.

[0108] It should be understood that, since after each determination of the lower and upper actual focus limits, if the position difference between the lower and upper actual focus limits exceeds the preset position difference range, the position of the compensating lens assembly needs to be further adjusted. Based on the current moment, the most recently determined lower actual focus position before the current moment is the lower actual focus position before the compensating lens assembly is moved, and the most recently determined lower actual focus position after the current moment is the lower actual focus position after the current moment is the lower actual focus position after the compensating lens assembly is moved.

[0109] In a possible implementation, the calculation formula of the compensation amount is: ; in, is the lower limit actual focus position, is the upper limit actual focus position, is the lower focus, is the upper focus, There is a benchmark number.

[0110] The calculation formula of the compensation amount can be used to quantify the adjustment amount index of the compensation lens group, thereby improving the efficiency of meeting the calibration range requirements.

[0111] In the above implementation process, by determining the compensation amount of the compensation lens group according to actual positions such as the upper limit actual focus position and the lower limit actual focus position, the accuracy of the compensation amount can be improved, thereby improving the focus calibration accuracy.

[0112] In one possible implementation, Figure 7 As shown, step S202 includes: compensating the combined focal length of the focus adjustment component by using the spot compensation coefficient; calculating the first spacing and the second spacing according to the compensated combined focal length; compensating the first spacing by the compensation amount; driving the compensation lens group and the zoom lens group to move to corresponding positions according to the compensated first spacing and the second spacing; when the compensation lens group and the zoom lens group reach the corresponding positions, obtaining the actual circumscribed circle diameter of the light spot; when the light spot size does not meet the required accuracy, updating the spot compensation coefficient by using the actual circumscribed circle diameter of the light spot and the theoretical circumscribed circle diameter of the light spot; compensating the combined focal length of the focus adjustment component by using the updated spot compensation coefficient, and continuing to calculate the first spacing and the second spacing according to the compensated combined focal length until the spot size of the light spot meets the required accuracy.

[0113] Compensating the combined focal length of the focus adjustment components by using the spot compensation coefficient can be achieved by the following formula: ; in, is the combined focal length after compensation, is the combined focal length before spot calibration, is the spot compensation coefficient.

[0114] Through the above formula, the spot size is actually proportional to the combined focal length, which is a processing method that gradually approaches the target value and can improve the accuracy of the spot calibration.

[0115] The first spacing and the second spacing here can be calculated using the above-mentioned calculation formulas for the first spacing and the second spacing.

[0116] It is understandable that the combined focal length of the focus adjustment assembly changes after compensation. Therefore, in the process of spot size calibration, the calculation formula of the first spacing and the second spacing is Need to be replaced with Perform calculations.

[0117] After determining the first and second distances, the first distance can be compensated by the compensation amount, while the second distance remains unchanged. The compensated first and second distances are then determined, and based on the compensated first and second distances, the compensating lens group and the zoom lens group are driven to move to corresponding positions.

[0118] After the compensation lens group and zoom lens group are driven to their respective positions, the light spot passing through the spot adjustment assembly and focus adjustment assembly changes. At this point, the actual circumscribed diameter of the light spot can be obtained. Based on this actual circumscribed diameter, it is determined whether the light spot size meets the required accuracy. If the spot size meets the required accuracy, the light spot size adjustment is complete.

[0119] If the spot size does not meet the required accuracy, the spot compensation coefficient is updated according to the actual circumscribed circle diameter of the spot and the theoretical circumscribed circle diameter of the spot; the combined focal length of the focus adjustment component is continuously compensated according to the updated spot compensation coefficient, and the first spacing and the second spacing are recalculated according to the compensated combined focal length until the spot size meets the required accuracy.

[0120] Optionally, the spot size of the light spot meeting the required accuracy may mean that the spot size reaches the required size, the spot size of the light spot meeting the required accuracy may mean that the spot size and shape reach the required size and shape, etc. The required accuracy can be adjusted according to actual conditions.

[0121] In one embodiment, before step S202, when the focal plane calibration is completed, the compensation amount is used as a reference. is the actual focal plane distance, which serves as the spot sampling surface.

[0122] In the above implementation process, the combined focal length of the focus adjustment component is adjusted in real time according to the actual circumscribed circle diameter of the light spot, and the positions of the compensation lens group and the zoom lens group of the focus adjustment component are adjusted based on the adjusted combined focal length, thereby achieving real-time adjustment of the spot size of the light spot, so that the spot size meets the required accuracy and the accuracy of the spot size adjustment is improved.

[0123] In one possible implementation, before compensating the combined focal length of the focus adjustment component using the spot compensation coefficient, the method further includes: obtaining an initial circumscribed circle diameter of the spot of the spot adjustment lens group of the spot adjustment component when matched with the focusing focal length; determining the combined focal length of the focus adjustment component based on the initial circumscribed circle diameter of the spot and the theoretical circumscribed circle diameter of the spot; and determining the spot compensation coefficient based on the actual circumscribed circle diameter of the spot and the theoretical circumscribed circle diameter of the spot.

[0124] The initial circumscribed circle diameter of the spot of the spot adjustment lens assembly of the spot adjustment component under the focusing focal length is the initial circumscribed circle diameter of the spot when the spot adjustment component performs spot size calibration.

[0125] In one embodiment, the focus distance may satisfy the following conditions: ; in, is the minimum value of the combined focal length, is the maximum value of the combined focal length, For the focus distance, is the coefficient of the minimum value of the combined focal length, The coefficient for the maximum value of the combined focal length.

[0126] Here The value range of can be [1.05, 1.15]. For example, 1.1. The value range of can be [0.85, 0.95]. For example, 0.9. and The value can be adjusted according to actual situation.

[0127] It should be understood that the focal length range of the focus adjustment component may deviate from the theoretical range due to the influence of optical lens processing accuracy, structural processing and assembly accuracy. , ] category, by introducing 、 The purpose of the coefficient is to appropriately reduce the focus distance , ensuring that the actual focus adjustment component can be adjusted within the combined focal length range. =1.1, =0.9 can meet the actual application needs.

[0128] According to the initial circumscribed circle diameter of the light spot and the theoretical circumscribed circle diameter of the light spot, the combined focal length of the focus adjustment component can be determined by the following formula: ; in, is the combined focal length, is the theoretical circumscribed diameter of the light spot, is the initial circumscribed circle diameter of the light spot, is the focus focal length.

[0129] It should be understood that, since the combined focal length in the combined focal length formula is proportional to the diameter of the theoretical circumscribed circle of the light spot, the light spot precision can be calibrated progressively, thereby improving the accuracy of the light spot precision calibration.

[0130] The range of the theoretical circumscribed circle diameter of the light spot here can be: ; in, is the minimum value of the combined focal length, is the maximum value of the combined focal length, For the focus distance, is the coefficient of the minimum value of the combined focal length, is the coefficient of the maximum value of the combined focal length, is the theoretical circumscribed diameter of the light spot, is the initial circumscribed circle diameter of the light spot.

[0131] The above-mentioned spot compensation coefficient can be determined by the following formula: ; in, is the spot compensation coefficient, is the actual circumscribed circle diameter of the light spot, is the theoretical circumscribed circle diameter of the light spot.

[0132] It should be understood that since the actual circumscribed circle diameter of the light spot in the light spot compensation coefficient is proportional to the light spot compensation coefficient, the ratio of the actual circumscribed circle diameter of the light spot to the theoretical circumscribed circle diameter of the light spot corresponds to the ratio of the actual adjustment amount achieved in the combined focal length to the theoretical amount.

[0133] In the above implementation process, the accuracy of the spot compensation coefficient can be improved by determining the spot compensation coefficient in real time according to the actual circumscribed circle diameter of the light spot and the theoretical circumscribed circle diameter of the light spot.

[0134] In one possible implementation, Figure 8 As shown, before step S201, the method further includes: respectively detecting the spot sizes at the first distance, the second distance, and the third distance; when the size difference of the spot sizes at the first distance, the second distance, and the third distance exceeds a preset size range, adjusting the distance between the collimating lens group and the light source emitter in the collimating assembly; after the distance between the collimating lens group and the light source emitter is adjusted, continuing to detect the spot sizes at the first distance, the second distance, and the third distance until the size difference of the spot sizes at the first distance, the second distance, and the third distance is within the preset size range.

[0135] The first distance, the second distance and the third distance are the distances from the light outlet of the collimating component.

[0136] In one embodiment, the first distance is smaller than the second distance, and the second distance is smaller than the third distance.

[0137] For example, the first distance is ≤ 0.2m, 1m < second distance < 3m, and the third distance is > 5m. That is, the first distance is near the light outlet of the collimator assembly, the second distance is a few meters smaller than the light outlet of the collimator assembly, and the third distance is several meters away from the light outlet of the collimator assembly.

[0138] It can be understood that when the size difference of the light spot at the first distance, the second distance and the third distance is within the preset size range (that is, the light spot sizes at the first distance, the second distance and the third distance are basically the same), the light beam output by the collimation component can be considered to be parallel light, that is, the collimation calibration of the collimation component is qualified.

[0139] When the size difference between the light spot sizes at the first distance, the second distance, and the third distance exceeds the preset size range, the distance between the collimating lens group and the light source emitter is adjusted, and the light spot sizes at the first distance, the second distance, and the third distance are readjusted until the size difference between the light spot sizes at the first distance, the second distance, and the third distance is within the preset size range.

[0140] The preset size range here can be set in advance according to actual needs. For example, the preset size range is ±T%, where T is in the range of [0.1, 5]. For example, T is 1.

[0141] It should be understood that different occasions have different requirements for spot size. For certain high-demand applications, a slightly larger spot may burn components in the non-irradiated area, while a smaller spot may cause deficiencies or defects at the edge of the irradiated area. When T is fixed, because the larger the spot, the greater the spot size deviation, for high-demand application scenarios, the spot size difference is often used as a benchmark. For large spots, such as those above 50mm, a spot size difference of less than 0.5mm generally meets the requirements. For medium spots, such as those between 20mm-50mm, a spot size difference of 0.2-0.5 generally meets the requirements. For small spots, such as those between 5mm-20mm, a spot size difference of less than 0.2mm generally meets the requirements. And for extremely small spots, such as those within 5mm, a spot size difference of less than 0.1mm generally meets the requirements.

[0142] Optionally, the distance between the collimating lens group and the light source emitter can be adjusted electrically or manually. The adjustment method of the distance between the collimating lens group and the light source emitter can be selected according to actual conditions.

[0143] In the above implementation process, by setting a collimation component and calibrating the light source based on the collimation component, the light source of the input focus adjustment component is parallel light, and there is no need to separately set up a light source device that needs to emit parallel light, thereby increasing the application scenarios of the optical system.

[0144] In the several embodiments provided in this application, it should be understood that the disclosed devices and methods can also be implemented in other ways. The device embodiments described above are merely illustrative. For example, the flowcharts and block diagrams in the accompanying drawings show the possible architectures, functions and operations of the devices, methods and computer program products according to the multiple embodiments of the present application. In this regard, each box in the flowchart or block diagram can represent a module, a program segment or a part of the code, and the module, program segment or a part of the code contains one or more executable instructions for implementing the specified logical functions. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in an order different from that marked in the accompanying drawings. For example, two consecutive boxes can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flowchart, and the combination of boxes in the block diagram and / or flowchart, can be implemented using a dedicated hardware-based system that performs the specified function or action, or can be implemented using a combination of dedicated hardware and computer instructions.

[0145] In addition, the functional modules in each embodiment of the present application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0146] If the functions are implemented in the form of software modules and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, or the portion that contributes to the prior art, or the portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions for causing a computer device (which can be a personal computer, server, or network device, etc.) to perform all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage media include various media that can store program code, such as USB flash drives, mobile hard drives, read-only memories (ROMs), random access memories (RAMs), magnetic disks, or optical disks. It should be noted that, in this document, relational terms such as first and second, etc., are used solely to distinguish one entity or operation from another, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising..." does not preclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element. The foregoing description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included within the scope of protection of the present application. It should be noted that similar reference numerals and letters represent similar items in the following figures. Therefore, once an item is defined in one figure, it does not need to be further defined or explained in subsequent figures.

[0147] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A method for calibrating an optical system, characterized in that: Applied to an optical system, the optical system comprises: a light spot adjustment component and a focus adjustment component; the light spot adjustment component and the focus adjustment component are sequentially arranged along the direction of light source transmission; and the light spot adjustment component and the focus adjustment component are coaxially arranged along the central axis of the light source; The method comprises: When the incident light of the focus adjustment component is parallel light, the focal plane calibration is performed by detecting the position of the focus of the focused light beam segment of the focus adjustment component on the optical axis at different combined focal lengths; When the focal plane calibration is completed, the spot size is calibrated by the spot adjustment component.

2. The method according to claim 1, characterized in that in, The focus adjustment assembly includes: a compensation lens group; When the incident light of the focus adjustment component is parallel light, the focal plane calibration is performed by detecting the position of the focus of the focused light beam segment of the focus adjustment component at different combined focal lengths on the optical axis, including: When the incident light of the focus adjustment component is parallel light, calculating the corresponding lower limit actual focus position and upper limit actual focus position when the focus adjustment component has a lower limit focus and an upper limit focus respectively; When the position difference between the lower limit actual focus position and the upper limit actual focus position exceeds a preset position difference range, determining a target movement amount of the compensation lens group according to a theoretical distance of the compensation lens group and a compensation amount of the compensation lens group; moving the compensation lens group according to the target movement amount; After moving the compensation lens group, the corresponding lower limit actual focus position and upper limit actual focus position are recalculated when the focus adjustment component is at the lower limit focus and the upper limit focus respectively, until the position difference between the lower limit actual focus position and the upper limit actual focus position is within the preset position difference range.

3. The method according to claim 2, characterized in that in, The focus adjustment assembly further comprises: a zoom lens group and a fixed lens group; Calculating the lower limit actual focus position corresponding to the focus adjustment component being at the lower limit focus includes: When the focus adjustment assembly is at the lower limit focus, a first distance, a second distance, and a third distance are determined according to the focal length of the compensation lens group, the focal length of the zoom lens group, the focal length of the fixed lens group, and the combined focal length; wherein the first distance is the distance between the rear principal surface of the compensation lens group and the front principal surface of the zoom lens group, the second distance is the distance between the rear principal surface of the zoom lens group and the front principal surface of the fixed lens group, and the third distance is the distance between the rear principal surface of the fixed lens group and the focal plane; determining a first compensation lens group position of the compensation lens group and a first zoom lens group position of the zoom lens group according to the first spacing, the second spacing, and the third spacing; After the compensation lens group is adjusted to reach the first compensation lens group position and the zoom lens group reaches the first zoom lens group position, the lower limit actual focus position is acquired.

4. The method according to claim 2, characterized in that in, The focus adjustment assembly further comprises: a zoom lens group and a fixed lens group; Calculating the upper limit actual focus position corresponding to the focus adjustment component being the upper limit focus includes: When the focus adjustment assembly is at an upper limit focus, a first distance, a second distance, and a third distance are determined according to the focal length of the compensating lens group, the focal length of the zoom lens group, the focal length of the fixed lens group, and the combined focal length; wherein the first distance is the distance between the rear principal surface of the compensating lens group and the front principal surface of the zoom lens group, the second distance is the distance between the rear principal surface of the zoom lens group and the front principal surface of the fixed lens group, and the third distance is the distance between the rear principal surface of the fixed lens group and the focal plane; determining a second compensation lens group position of the compensation lens group and a second zoom lens group position of the zoom lens group according to the first distance, the second distance, and the third distance; After the compensation lens group is adjusted to reach the second compensation lens group position and the zoom lens group reaches the second zoom lens group position, the upper limit actual focus position is acquired.

5. The method according to claim 3 or 4, characterized in that in, The first spacing and the second spacing are obtained by the following formula: in, is the first intermediate quantity, is the second intermediate quantity, To compensate for the focal length of the lens group, is the focal length of the zoom lens group, For fixed lens group focal length, is the first spacing, is the second spacing, is the third spacing, is the combined focal length.

6. The method according to claim 2, characterized in that in, Before determining the target movement amount of the compensation lens group according to the theoretical distance of the compensation lens group and the compensation amount of the compensation lens group, the method further includes: A reference number is determined according to the lower limit actual focus position before and after the compensation lens group is moved at the current moment and the movement distance of the compensation lens group; determining a compensation amount of the compensation lens assembly according to the lower limit actual focus position, the upper limit actual focus position, the lower limit focus, the upper limit focus, and the reference number; The compensation amount is configured as an additional movement amount of the compensation lens group based on the theoretical distance.

7. The method according to claim 6, characterized in that in, The calculation formula of the compensation amount is: ； in, is the lower limit actual focus position, is the upper limit actual focus position, is the lower focus, is the upper focus, There is a benchmark number.

8. The method according to claim 1, characterized in that The focus adjustment assembly includes: a compensation lens group, a zoom lens group and a fixed lens group; When the focal plane calibration is completed, calibrating the spot size by the spot adjustment component includes: Compensating the combined focal length of the focus adjustment assembly by means of a spot compensation coefficient; Calculating a first distance and a second distance based on the compensated combined focal length; wherein the first distance is the distance between the rear principal surface of the compensating lens group and the front principal surface of the zoom lens group, and the second distance is the distance between the rear principal surface of the zoom lens group and the front principal surface of the fixed lens group; Compensating the first distance by a compensation amount; driving the compensating lens group and the zoom lens group to move to corresponding positions according to the compensated first distance and the second distance; When the compensation lens group and the zoom lens group reach corresponding positions, obtaining the actual circumscribed circle diameter of the light spot; When the light spot size does not meet the required accuracy, the light spot compensation coefficient is updated according to the actual circumscribed circle diameter of the light spot and the theoretical circumscribed circle diameter of the light spot; The combined focal length of the focus adjustment assembly is compensated by the updated spot compensation coefficient, and the first spacing and the second spacing are continuously calculated according to the compensated combined focal length until the spot size of the light spot meets the required accuracy.

9. The method according to claim 8, characterized in that Before compensating the combined focal length of the focus adjustment assembly by using the spot compensation coefficient, the method further includes: Obtaining the initial circumscribed diameter of the light spot of the light spot adjustment lens group of the light spot adjustment component under the focusing focal length; determining a combined focal length of the focus adjustment assembly according to the initial circumscribed circle diameter of the light spot and the theoretical circumscribed circle diameter of the light spot; The light spot compensation coefficient is determined according to the actual circumscribed circle diameter of the light spot and the theoretical circumscribed circle diameter of the light spot.

10. The method according to claim 1, characterized in that The optical system further includes a collimating assembly; wherein the collimating assembly, the light spot adjustment assembly, and the focus adjustment assembly are sequentially arranged along the direction of light source transmission; and the collimating assembly, the light spot adjustment assembly, and the focus adjustment assembly are coaxially arranged along the central axis of the light source; When the incident light of the focus adjustment component is parallel light, before performing focal plane calibration, the method further includes: Detecting the spot sizes at a first distance, a second distance, and a third distance respectively; wherein the first distance, the second distance, and the third distance are the distances from the light outlet of the collimating assembly; When the difference between the light spot sizes at the first distance, the second distance, and the third distance exceeds a preset size range, adjusting the distance between the collimating lens group and the light source emitter in the collimating assembly; After the distance between the collimating lens group and the light source emitter is adjusted, the spot sizes at the first distance, the second distance and the third distance are continuously detected until the size difference between the spot sizes at the first distance, the second distance and the third distance is within a preset size range.

11. An optical system calibration system, characterized in that: including a light spot adjustment component, a focus adjustment component and electronic equipment; The light spot adjustment component and the focus adjustment component are sequentially arranged along the transmission direction of the light source; and the light spot adjustment component and the focus adjustment component are coaxial along the central axis of the light source; The electronic device is connected to the light spot adjustment component and the focus adjustment component; Wherein, the electronic device is configured to execute the optical system calibration method according to any one of claims 1-10.

12. The system according to claim 11, wherein: The electronic device is used to control the movement of the focus adjustment component to perform focal plane calibration by detecting the position of the focus of the focused light beam segment of the focus adjustment component at different combined focal lengths on the optical axis when the incident light to the focus adjustment component is parallel light; The electronic device is further configured to control the light spot adjustment component to calibrate the light spot size when the focal plane calibration is completed.

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