Waste gas treatment device of high-temperature purification equipment

Abstract

The invention provides a waste gas treatment device of high-temperature purification equipment, which comprises a water vapor treatment tower, a dust collector, a mechanical pump and an acid gas treatment tower which are connected in sequence, and is used for treating waste gas discharged by the high-temperature purification equipment in sequence; the water vapor treatment tower is filled with a drying agent for preferentially adsorbing water vapor in the waste gas; multiple filtering and adsorbing structures are arranged in the dust collector in the conveying direction and used for filtering solid dust, and the solid dust is prevented from entering follow-up equipment; the mechanical pump is used for adjusting the air pressure in the purification equipment so as to reach an air pressure environment suitable for purification reaction and providing power for the flowing of the waste gas among the treatment units; the acid gas treatment tower is filled with an alkaline solution and is used for absorbing acid gas. The invention designs an efficient device for cooperatively treating mixed waste gas generated in a carbon product purification process, so as to solve the problems of mechanical pump corrosion, carbon powder blockage and environmental pollution caused by unreasonable treatment sequence, single equipment function and filtering defects in the prior art.

Description

Technical Field

[0001] The present invention relates to the technical field of waste gas treatment devices, and in particular to a waste gas treatment device for high-temperature purification equipment. Background Art

[0002] With the development of 5G communications, new energy vehicles, and the optoelectronics industry, demand for third-generation semiconductor silicon carbide materials has surged. The purity of silicon carbide powder depends on the purity of carbon products (such as thermal fields and tooling). Currently, conventional industrial carbon products are purified mainly through halogen gas purification methods. For example, the temperature is raised to above 2400°C, gases such as CHClF2 are introduced, and the temperature is maintained for a period of time before the furnace is cooled and opened. This process produces three by-products: 1. Water vapor: mainly comes from the water in the carbon product itself, which vaporizes and is discharged with the carrier gas after heating; 2. Acidic gas: CHClF2 decomposes at high temperature to produce HCl and HF, which dissolve in water to form strong acid, corroding the metal pump body of the mechanical pump and reducing its service life; 3. Carbon powder: The decomposition product of CHClF2 is easy to accumulate in the exhaust pipe and pump body, hindering the flow of gas, reducing the exhaust efficiency, and hindering the flow of gas, which is not conducive to the purification process.

[0003] Existing technologies often use single-function equipment (e.g., treating only acid gas or dust) to treat waste gas. These devices lack a coordinated treatment system for "water vapor, acid gas, and carbon dust." Furthermore, the logical order of water and dust removal, as well as the protection of the pump body, is unclear. Consequently, the combined effects of acidic wet gas and carbon dust shorten the lifespan of mechanical pumps, increasing maintenance costs, and directly pollute the environment through acid gas emissions. Furthermore, existing filters were not specifically designed to address the characteristics of fine carbon dust particles (e.g., easy penetration and accumulation), making them ineffective in intercepting and collecting them. This, in turn, can affect subsequent equipment, leading to clogging and wear.

[0004] Therefore, there is an urgent need for an exhaust gas treatment device that can efficiently treat complex pollutants, protect equipment, and meet environmental standards. Summary of the Invention

[0005] The purpose of the present invention is to provide an exhaust gas treatment device for high-temperature purification equipment, which solves the above-mentioned technical problems.

[0006] In order to solve the above technical problems, the technical solutions of the present invention are as follows: The present invention provides a waste gas treatment device for high-temperature purification equipment, comprising a water vapor treatment tower, a dust collector, a mechanical pump and an acid gas treatment tower connected in sequence, for sequentially treating the waste gas discharged from the high-temperature purification equipment, wherein the waste gas includes water vapor, acid gas and solid dust; the water vapor treatment tower is filled with a desiccant for preferentially adsorbing water vapor in the waste gas; the dust collector is provided with multiple filtering and adsorption structures along the conveying direction for filtering out solid dust to prevent it from entering subsequent equipment; the mechanical pump is used to adjust the air pressure inside the purification equipment to achieve an air pressure environment suitable for the purification reaction, and at the same time provides power for the flow of waste gas between various treatment units to ensure that the waste gas treatment process can operate coherently and stably; the acid gas treatment tower is filled with an alkaline solution for absorbing acid gas.

[0007] Furthermore, the desiccant is a calcium chloride desiccant, the main components of which are calcium chloride and starch. The calcium chloride particles can react with water vapor to form a gel to achieve a good water absorption and drying effect.

[0008] Furthermore, carbon felt is arranged inside the dust collector along the conveying direction and fine iron wire is stacked; wherein the carbon felt is used to first filter out large-particle dust and evenly distribute the airflow, and the fine iron wire is used to finely filter the remaining small-particle dust.

[0009] Furthermore, carbon felt of a certain thickness is laid at both ends of the dust collector along the conveying direction, and fine iron wires are densely stacked in the middle to form a three-stage filtering structure of "adsorption-interception-adsorption", which is used to reduce blockage and pressure drop, and further adsorb the scattered dust through the carbon felt at the output end to ensure that the dust collector can fully filter out solid dust.

[0010] Furthermore, the dust is carbon powder, and carbon felt with a thickness of 45mm-55mm is laid at both ends of the collector, and thin iron wires with a diameter of 0.4mm-0.6mm are densely stacked in the middle.

[0011] Furthermore, the alkaline solution adopts a saturated aqueous solution of Ca(OH)2, and the acid gas treatment tower adopts a multi-stage spray structure for efficiently spraying, dissolving and absorbing the acid gas to ensure that the exhaust gas emissions meet environmental protection requirements.

[0012] Compared with the prior art, the present invention has at least the following beneficial effects: (1) The present invention adopts a four-stage series structure to form a coordinated treatment system for "water vapor + acid gas + carbon powder", realizing the "water removal → dust removal → air extraction → purification" process, clarifying the logical order of water removal first and then dust removal, and protecting the mechanical pump, avoiding the cross-influence of pollutants (such as water vapor aggravating acid corrosion and carbon powder clogging the pump body).

[0013] (2) The dust collector of the present invention is provided with multiple filtering and adsorption structures along the conveying direction, which are used to fully filter out solid dust, especially small-sized carbon powder particles, to prevent them from entering and wearing out subsequent equipment. Specifically, a certain thickness of carbon felt is laid at each end of the dust collector along the conveying direction, and fine iron wires are densely stacked in the middle, forming a three-stage filtering structure of "adsorption-interception-adsorption" to avoid excessive blockage and pressure drop caused by a single structure. The carbon felt at the input end first filters out large-sized carbon powder and evenly distributes the airflow, creating favorable conditions for fine iron wire filtration. The fine iron wire in the middle finely filters the remaining small-sized carbon powder, and the carbon felt at the output end further adsorbs the scattered carbon powder, which can almost completely remove the carbon powder in the exhaust gas and prevent the carbon powder from entering subsequent mechanical pumps and other equipment, thereby reducing equipment wear and failure and extending the service life of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0015] Figure 1 A schematic diagram of the overall structure of the exhaust gas treatment device provided in this embodiment; Figure 2 This is a schematic diagram of the working process of the exhaust gas treatment device provided in this embodiment.

[0016] icon: 1-Water vapor treatment tower; 2-Dust collector; 3-Mechanical pump; 4-Acid gas treatment tower. DETAILED DESCRIPTION

[0017] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0018] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0019] The following embodiments of the present invention are described in detail with reference to the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.

[0020] This embodiment provides an exhaust gas treatment device for high temperature purification equipment. Figure 1-2 As shown, it includes a water vapor treatment tower 1, a dust collector 2, a mechanical pump 3 and an acid gas treatment tower 4 connected in sequence, which are used to sequentially treat the waste gas discharged from the high-temperature purification equipment, wherein the waste gas includes water vapor, acid gas and solid dust; the water vapor treatment tower 1 is filled with a desiccant for preferentially adsorbing water vapor in the waste gas; the dust collector 2 is provided with multiple filtering and adsorption structures along the conveying direction for filtering out solid dust to prevent it from entering subsequent equipment; the mechanical pump 3 is used to adjust the air pressure inside the purification equipment to achieve an air pressure environment suitable for the purification reaction, and at the same time provide power for the flow of waste gas between various treatment units to ensure that the waste gas treatment process can operate coherently and stably; the acid gas treatment tower 4 is filled with an alkaline solution for absorbing acid gas.

[0021] Specifically, this waste gas treatment device utilizes a systematic design, combining a water vapor treatment tower 1, a dust collector 2, a mechanical pump 3, and an acid gas treatment tower 4 in the order of "water removal - dust removal - power regulation - acid removal," achieving a step-by-step treatment of multi-component waste gases (water vapor, dust, and acid gases). Mechanical pump 3 simultaneously regulates the air pressure of the purification equipment and provides power for the flow of the waste gas. A pre-drying agent and multiple filtration structures prevent clogging and corrosion of subsequent equipment, effectively linking process requirements with environmentally friendly treatment. This not only addresses the challenge of coordinated treatment of complex waste gases but also improves system reliability and treatment effectiveness. Furthermore, mechanical pump 3 in this device can utilize a more cost-effective oil pump. Its function is to pump air and control pressure, regulating the air pressure within the purification equipment. The metal pump body is easily corroded and damaged by acid gases, and carbon dust easily accumulates in the pump chamber, making the pump oil viscous and losing its lubricating effect, shortening the service life of mechanical pump 3. The dry acidic gas passing through the water vapor treatment tower 1 will not be corrosive, and the gas passing through the dust collector 2 will no longer contain solid particle carbon powder, thereby solving the problem of the oil pump being easily damaged by corrosion and accumulated carbon powder, which reduces its service life.

[0022] In this embodiment, the desiccant is calcium chloride desiccant, the main components of which are calcium chloride and starch. The calcium chloride particles can react with water vapor to form a gel to achieve a good water absorption and drying effect.

[0023] Specifically, the purpose of the water vapor treatment tower 1 is to remove water vapor from the by-products. The tower is densely packed with calcium chloride desiccant, whose main components are calcium chloride and starch. The calcium chloride particles can react with water vapor to form a gel to achieve an adsorption effect. The water absorption capacity can reach 300% of its own weight, and the water absorption rate is 10 times that of ordinary desiccant.

[0024] In this embodiment, carbon felt is arranged inside the dust collector 2 along the conveying direction and fine iron wire is stacked; wherein, the carbon felt is used to first filter out large-particle dust and evenly distribute the airflow, and the fine iron wire is used to finely filter the remaining fine-particle dust.

[0025] Specifically, the purpose of the dust collector 2 is to filter out the tiny particles of carbon powder in the by-products. Carbon felt with a thickness of 45-55mm (preferably 50mm) is laid on the left and right ends of the filter, and thin iron wire with a diameter of 0.4mm-0.60mm (preferably 0.5mm) is densely stacked in the middle. After multiple dust filtration, the gas flowing out of the dust collector 2 basically does not contain solid dust.

[0026] In this embodiment, the dust collector 2 is lined with a certain thickness of carbon felt at each end along the conveying direction, with fine iron wire densely stacked in the middle, forming a three-stage "adsorption-interception-adsorption" filtration structure to reduce clogging and pressure drop. The carbon felt at the output end further absorbs the fugitive dust, ensuring that the dust collector 2 fully filters out solid dust. The dust is carbon powder, and the collector is lined with a thickness of 45mm-55mm of carbon felt at each end, with fine iron wire densely stacked in the middle with a diameter of 0.4mm-0.6mm.

[0027] Specifically, the dust collector 2 of the present invention is specially designed for the characteristics of small-particle carbon powder that previous filters have not addressed (such as easy penetration, easy accumulation, etc.); wherein, the 50mm thick carbon felt laid at both ends of the filter has a porous structure, which can perform preliminary filtration on the carbon powder entering the filter; when the carbon powder enters the left end of the filter from the input pipe, the carbon powder with larger particle size will be intercepted and adsorbed by the pores of the carbon felt; at the same time, the carbon felt at the input end can also play a certain role in airflow buffering and uniform distribution, so that the exhaust gas enters the fine iron wire filtration area in the middle more evenly, avoiding the concentrated airflow from causing too much impact on a certain filter structure, thereby improving the overall filtration efficiency; at the same time, the diameter of the densely stacked particles in the middle is 0.5mm The fine iron wires form a complex maze-like structure. When tiny particles of carbon powder pass through the gaps between the fine iron wires with the airflow, they will constantly collide with, be intercepted, and inertially settle with the fine iron wires. Due to the dense arrangement of the fine iron wires, the contact opportunities between the carbon powder and the filter medium are increased, greatly improving the ability to capture tiny particles of carbon powder. Among them, the carbon felt at the output end further absorbs scattered carbon powder such as ultrafine carbon powder particles to ensure that the dust collector 2 fully filters out solid dust. This avoids the inability of existing filters to effectively intercept and collect such carbon powder, causing subsequent equipment to be affected by dust, resulting in problems such as clogging and wear. At the same time, it also avoids the traditional dust filters that often use a single filter material or structure, which easily causes excessive clogging and pressure drop, resulting in a reduced service life.

[0028] In this embodiment, the alkaline solution is a saturated aqueous solution of Ca(OH)2, and the acid gas treatment tower 4 adopts a multi-stage spray structure for efficiently spraying, dissolving and absorbing the acid gas to ensure that the exhaust gas emissions meet environmental protection requirements.

[0029] Specifically, the acid gas treatment tower 4 is used to remove the acidic gases HCl and HF contained in the gas. The tower is filled with a saturated aqueous solution of alkaline Ca(OH)2 and adopts a multi-stage spray structure to efficiently spray, dissolve and absorb HCl and HF to ensure that the exhaust gas emissions meet environmental protection requirements.

[0030] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A waste gas treatment device for high-temperature purification equipment, characterized in that: It comprises a water vapor treatment tower (1), a dust collector (2), a mechanical pump (3) and an acid gas treatment tower (4) connected in sequence, and is used to sequentially treat the waste gas discharged from the high-temperature purification equipment, wherein the waste gas includes water vapor, acid gas and solid dust; The water vapor treatment tower (1) is filled with a desiccant for preferentially adsorbing water vapor in the exhaust gas; Multiple filtering and adsorption structures are arranged in the dust collector (2) along the conveying direction to filter out solid dust and prevent it from entering subsequent equipment; The mechanical pump (3) is used to adjust the air pressure inside the high-temperature purification equipment to achieve an air pressure environment suitable for the purification reaction, and at the same time provides power for the flow of waste gas between various treatment units to ensure that the waste gas treatment process can operate coherently and stably; The acid gas treatment tower (4) is filled with alkaline solution for absorbing acid gas.

2. The waste gas treatment device of the high-temperature purification equipment according to claim 1, characterized in that: The desiccant is calcium chloride desiccant, wherein the calcium chloride desiccant can react with water vapor to generate a gel to achieve a good water absorption and drying effect.

3. The waste gas treatment device of the high-temperature purification equipment according to claim 1 or 2, characterized in that: Carbon felt is arranged inside the dust collector (2) along the conveying direction and thin iron wires are stacked; wherein the carbon felt is used to first filter out large-particle dust and evenly distribute the airflow, and the thin iron wires are used to finely filter the remaining fine-particle dust.

4. The exhaust gas treatment device of the high-temperature purification equipment according to claim 3, characterized in that: Carbon felt of a certain thickness is laid at both ends of the dust collector (2) along the conveying direction, and fine iron wires are densely stacked in the middle, forming a three-stage filtering structure of "adsorption-interception-adsorption" to reduce blockage and pressure drop, and further adsorb the scattered dust through the output end carbon felt to ensure that the dust collector (2) fully filters out solid dust.

5. The exhaust gas treatment device of the high-temperature purification equipment according to claim 3, characterized in that: The solid dust is carbon powder. Carbon felt with a thickness of 45mm-55mm is laid at both ends of the dust collector. At the same time, thin iron wires with a diameter of 0.4mm-0.6mm are densely stacked in the middle.

6. The waste gas treatment device of high temperature purification equipment according to any one of claims 1-2, 4-5, characterized in that: The alkaline solution adopts a saturated aqueous solution of Ca(OH)2, and the acid gas treatment tower (4) adopts a multi-stage spray structure for efficiently spraying, dissolving and absorbing the acid gas to ensure that the exhaust gas discharge meets environmental protection requirements.

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