Electronic special gas cylinder valve for semiconductor

Abstract

The invention relates to the technical field of valves, in particular to an electronic special gas cylinder valve for a semiconductor, which comprises a valve body, a first adjusting piece and a second adjusting piece. Specifically, the valve body is provided with an output channel and an input channel; the first adjusting part and the second adjusting part are rotationally arranged relative to the valve body, and the flow and on-off of the output channel and the flow of the input channel can be controlled by rotating the first adjusting part and the second adjusting part respectively; the fool-proof assembly comprises a positioning screw rod, a first hand wheel, a gear and a gear ring; the positioning screw rod is arranged on the valve body, and the first hand wheel is in threaded connection with the positioning screw rod; the gear is arranged on the first adjusting piece; the gear ring is arranged on the first hand wheel and meshed with the gear, and the first adjusting piece can be driven to rotate by rotating the first hand wheel; an operation hole is formed in the gear ring, and the second adjusting piece can be operated to rotate from the outer side of the gear ring through the operation hole. The special gas cylinder valve has the effects that the safety and convenience are improved when the special gas cylinder valve is used, and the probability of safety accidents caused by misoperation is reduced.

Description

Technical Field

[0001] The present application relates to the field of valve technology, and in particular to an electronic special gas cylinder valve for semiconductors. Background Art

[0002] The purity of specialty gases used in semiconductor manufacturing directly determines the quality of finished integrated circuits. To meet extremely stringent purity requirements (requiring the removal of existing gas from the cylinder) and improve cylinder filling efficiency and convenience, a cylinder valve with independent dual-channel design, namely, a gas inlet and outlet, is typically used. The inlet is specifically used for displacing and filling the cylinder with high-pressure gas before filling, while the outlet serves as the gas supply terminal connected to the gas-consuming equipment pipeline. Two handwheels are used to control the flow rate and opening and closing of the inlet and outlet, respectively.

[0003] However, this design poses certain safety hazards when used. On the one hand, when using gas, users need to distinguish which of the two handwheels controls the gas outlet. Although the industry usually designs the two handwheels in different directions, or designs them into different sizes, shapes, and paints different marks to facilitate distinguishing the two handwheels, it is still difficult to avoid accidental opening of the inflation port during manual operation, resulting in toxic gas leakage and safety accidents. Summary of the Invention

[0004] In order to improve the safety and convenience of special gas cylinder valves when used and reduce the probability of safety accidents caused by misoperation, the present application provides an electronic special gas cylinder valve for semiconductors.

[0005] The electronic special gas cylinder valve for semiconductors provided in this application adopts the following technical solution: A semiconductor electronic special gas cylinder valve, comprising: a valve body, wherein an output channel and an input channel are formed on the valve body; a first regulating member, rotatably arranged relative to the valve body, wherein rotating the first regulating member can control the flow rate and on-off of the output channel; a second regulating member, rotatably arranged relative to the valve body, wherein the second regulating member is rotated to control the flow rate and on-off of the input channel; An anti-foolproof component, which includes a positioning screw, a first handwheel, a gear and a gear ring; the positioning screw is arranged on the valve body, and the first handwheel is threadedly connected to the positioning screw; the gear is arranged on the first adjusting member; the gear ring is arranged on the side of the first handwheel close to the valve body and engages with the gear, and rotating the first handwheel can drive the first adjusting member to rotate; the second adjusting member is located within the circumference of the inner wall of the gear ring; an operating hole is opened on the gear ring, and the second adjusting member can be operated to rotate from the outside of the gear ring through the operating hole.

[0006] By adopting the above technical solution, the safety and convenience of using the special gas cylinder valve are improved, and the probability of safety accidents caused by misoperation is reduced. Specifically, when the user needs to control the output channel flow rate and on-off, the second adjustment member is located within the circumference of the gear ring and is relatively hidden, eliminating the operator's identification and selection space. The operator can only directly rotate the first handwheel to drive the first adjustment member to adjust the output channel flow rate and on-off control.

[0007] Optionally, when the first hand wheel is rotated gradually closer to or away from the valve body, the output channel flow rate gradually decreases or increases accordingly; when the first hand wheel is close to the valve body to a height at which the output channel is closed, the second adjusting member can be operated to rotate from the outside of the gear ring through the operating hole.

[0008] By adopting the above technical solution, the probability of safety accidents caused by misoperation is further reduced. Specifically, when the factory needs to control the flow rate and passage of the input channel, because the second regulating member is located within the circumference of the inner wall of the gear ring and can only be operated through the operating hole when the first handwheel is close to the valve body to the height at which the output channel is closed, the second regulating member can be rotated. This prevents the output channel from being closed while the input channel is being filled with gas, thereby reducing the probability of safety accidents caused by toxic gas leakage due to misoperation.

[0009] Optionally, the second adjusting member can gradually approach or move away from the valve body after rotation, and the output channel flow gradually decreases or increases accordingly when the second adjusting member gradually approaches or moves away from the valve body; a locking assembly is provided on the valve body, and when the second adjusting member is rotated away from the valve body to open the output channel, the locking assembly locks the gear and the ring gear.

[0010] By adopting the above technical solution, when the special gas cylinder valve leaves the factory, the first regulating member is in a state of closing the output channel, and the second regulating member is in a state of closing the input channel. When the user needs to turn the first hand wheel to control the flow rate and on-off of the output channel, the second regulating member needs to be in a state of closing the input channel. This allows the operator to understand the channel status of the input channel when turning the first hand wheel, so that remedial operations can be performed in time when the output channel is not closed. When the factory needs to turn the second regulating member to control the flow rate and on-off of the input channel, the first regulating member needs to be in a state of closing the output channel. This avoids the accidental operation of the first hand wheel to open the output channel during the filling process, which may lead to the leakage of toxic gas and cause a safety accident.

[0011] Optionally, the output channel includes a first connecting section, a first valve chamber and a second connecting section connected in sequence; the end of the first connecting section facing away from the first valve chamber is connected to an external use pipeline, and the end of the second connecting section facing away from the first valve chamber is connected to an inner cavity of the gas cylinder; one end of the first valve chamber is open and a first valve cap is threadedly connected to the opening, and the first adjusting member is arranged on the first valve cap; the input channel includes a third connecting section, a second valve chamber and a fourth connecting section connected in sequence, the end of the third connecting section facing away from the second valve chamber is connected to an external charging pipeline, and the end of the fourth connecting section facing away from the second valve chamber is connected to the inner cavity of the gas cylinder; one end of the second valve chamber is open and a second valve cap is threadedly connected to the opening, and the second adjusting member is arranged on the second valve cap.

[0012] By adopting the above technical solution, the first connecting section of the output channel is connected to the external use pipeline, and the second connecting section is connected to the inner cavity of the gas cylinder; the third connecting section of the input channel is connected to the external filling pipeline, and the fourth connecting section is connected to the inner cavity of the gas cylinder, so that the special gas cylinder valve realizes the independent design of the input and output dual channels of the special gas cylinder valve. When the gas cylinder is filled, gas is filled through the input channel, and the remaining gas in the bottle is discharged through the output channel. This improves the convenience of the discharge and replacement operation of the remaining gas in the gas cylinder and ensures the purity of the charged gas. In addition, when the first adjusting member or the second adjusting member is worn out after long-term use, it can be easily replaced by disassembling the first valve cap or the second valve cap threaded on the valve body.

[0013] Optionally, a first detection hole connected to the first valve chamber and a second detection hole connected to the second valve chamber are opened on the outer wall of the valve body, and detection hole bolts for sealing the first detection hole and the second detection hole are provided in the first detection hole and the second detection hole.

[0014] By adopting the above technical solution, after removing the detection hole bolts in the first detection hole and the second detection hole, the sealing of the output channel and the input channel can be detected by monitoring the air pressure changes in the first valve chamber and the second valve chamber.

[0015] Optionally, the first adjusting member includes a first valve stem, a first piston and a first valve core; the first valve stem is threadedly connected to the first valve bonnet; the first piston is rotatably arranged at one end of the first valve stem close to the first valve chamber, and the first piston is in sealing sliding contact with the inner wall of the first valve bonnet; the first valve core is connected to the end of the first piston facing away from the first valve stem; the gear is fixed to the first valve stem and rotates together with the first valve stem. Rotating the first valve stem can drive the first valve core close to or away from the opening of the second connecting section located in the first valve chamber to control the flow and on-off of the output channel.

[0016] By adopting this technical solution, the first regulating member has a more rational structure, enabling more stable and reliable control of the flow rate and on-off state of the output channel, thereby improving the overall operational stability of the special gas cylinder valve and its ability to precisely control gas output. Furthermore, the sealed sliding contact between the first piston and the inner wall of the first valve cap prevents gas leakage from the threaded connection between the first valve cap and the first valve stem, thus enhancing the sealing and safety of the special gas cylinder valve.

[0017] Optionally, the second adjusting member includes a second valve stem, a second piston and a second valve core; the second valve stem is threadedly connected to the second valve bonnet; the second piston is rotatably arranged at one end of the second valve stem close to the second valve chamber, and the second piston is sealingly and slidingly abutted against the inner wall of the second valve bonnet, and the second valve core is connected to the end of the second piston away from the second valve stem. Rotating the second valve stem can drive the second valve core close to or away from the opening of the fourth connecting section located in the second valve chamber to control the flow and on-off of the input channel.

[0018] By adopting this technical solution, the second regulating member has a more rational structure, enabling more stable and reliable control of the flow rate and on-off state of the output channel, thereby improving the overall operational stability of the special gas cylinder valve and its ability to precisely control gas output. Furthermore, the sealed sliding contact between the second piston and the inner wall of the second valve cap prevents gas leakage from the threaded connection between the second valve cap and the second valve stem, thus enhancing the sealing and safety of the special gas cylinder valve.

[0019] Optionally, the locking assembly includes a locking rod and an elastic member, the locking rod is slidably arranged on the valve body along its own length direction, and one end of the locking rod abuts the outer wall of the second valve stem, and the other end faces the tooth surface of the gear, and the elastic member is used to make the locking rod have a tendency to move away from the gear; the second valve stem includes a locking section and a free section, and the rod diameter of the locking section is larger than the rod diameter of the free section; the locking section is threadedly connected to the second valve cap, and the free section is connected to the end of the locking section away from the valve body; when the output channel is closed, one end of the locking rod abuts the outer wall of the second valve stem located in the free section, and the other end does not contact the gear; after the output channel is opened, one end of the locking rod abuts the outer wall of the second valve stem located in the locking section, and the other end is inserted into the tooth groove of the gear to limit the rotation of the gear.

[0020] By adopting the above technical solution, when the end of the locking rod away from the gear abuts against the outer wall of the second valve stem located in the free section, the end of the locking rod close to the gear does not contact the gear. At this time, the first hand wheel can rotate normally and can drive the first valve stem to rotate through the gear, thereby realizing the control of the output channel opening and closing and the flow rate. When the second valve stem rotates away from the valve body, the end of the locking rod away from the gear slides from the inner and outer walls of the second valve stem located in the free section to the outer wall of the second valve stem located in the locking section, thereby forcing the locking rod to move in the direction close to the gear. The end of the locking rod close to the gear is inserted into the tooth groove of the gear to limit the rotation of the gear. When one of the input channel and the output channel is opened, it is necessary to ensure that the other is in a closed state, thereby reducing the probability of safety accidents caused by improper operation of the special gas cylinder valve on both the user side and the factory side, and improving the safety and convenience of the use of the special gas cylinder valve.

[0021] Optionally, the end of the locking rod facing away from the second valve rod matches the tooth groove shape of the gear.

[0022] By adopting the above technical solution, the locking rod and the tooth groove of the gear can better fit together, thereby enhancing the locking effect, more reliably limiting the rotation of the gear, and further improving the safety of the special gas cylinder valve when in use.

[0023] Optionally, a second hand wheel is coaxially fixedly connected to the second adjusting member, and the second hand wheel can be rotated from the outside of the gear ring through the operating hole.

[0024] By adopting the above technical solution, not only the lever arm for rotating the second adjusting member is extended, making the operation more labor-saving, but also the rotation angle of the second adjusting member can be more accurately controlled to facilitate precise adjustment of the flow rate of the input channel.

[0025] In summary, this application has the following beneficial technical effects: 1. It improves the safety and convenience of using the special gas cylinder valve and reduces the probability of safety accidents caused by misoperation. Specifically, when the user needs to control the output channel flow and on-off, the second adjustment member is located within the circumference of the inner wall of the gear ring and is relatively hidden, eliminating space for the operator to identify and select. The operator can only directly rotate the first handwheel to drive the first adjustment member to rotate, thereby achieving adjustment of the output channel flow and on-off control; 2. Further reduces the probability of safety accidents caused by misoperation. Specifically, when the factory needs to control the flow rate and channel of the input channel, because the second regulating member is located within the circumference of the inner wall of the gear ring, and can only be operated through the operating hole when the first handwheel approaches the valve body to the height at which the output channel is closed, it is avoided that the output channel is not closed while the input channel is being filled with gas at the same time, thereby reducing the probability of safety accidents caused by toxic gas leakage due to misoperation; 3. When the end of the locking rod away from the gear abuts against the outer wall of the second valve stem in the free section, the end of the locking rod close to the gear does not contact the gear. At this time, the first handwheel can rotate normally and can drive the first valve stem to rotate through the gear, thereby realizing the control of the output channel on and off and the flow rate. When the second valve stem rotates away from the valve body, the end of the locking rod away from the gear slides from the inner and outer walls of the second valve stem in the free section to the outer wall of the second valve stem in the locking section, thereby forcing the locking rod to move toward the gear. The end of the locking rod close to the gear is then inserted into the tooth groove of the gear to limit the rotation of the gear. When one of the input channel and the output channel is opened, it is necessary to ensure that the other is in a closed state, thereby reducing the probability of safety accidents caused by improper operation of the special gas cylinder valve on both the user side and the factory side, and improving the safety and convenience of the special gas cylinder valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a front cross-sectional view of an embodiment of the present application.

[0027] Figure 2 It is a top sectional view of an embodiment of the present application.

[0028] Figure 3 yes Figure 1 A partial enlarged view of part A.

[0029] Explanation of the accompanying drawings: 1. Valve body; 11. Output channel; 111. First connecting section; 112. First valve chamber; 113. Second connecting section; 12. Input channel; 121. Third connecting section; 122. Second valve chamber; 123. Fourth connecting section; 13. First valve bonnet; 14. Second valve bonnet; 15. First detection hole; 16. Second detection hole; 2. First adjusting member; 21. First valve stem; 22. First piston; 23. First valve core; 3. Second adjusting member; 31. Second valve stem; 311. Locking section; 312. Free section; 32. Second piston; 33. Second valve core; 4. Anti-foolproofing assembly; 41. Positioning screw; 42. First hand wheel; 43. Gear; 44. Gear ring; 441. Operating hole; 5. Locking assembly; 51. Locking rod; 52. Elastic member; 6. Detection hole bolt; 7. Second hand wheel DETAILED DESCRIPTION

[0030] The following combination Figure 1-Figure 3 This application is described in further detail.

[0031] The embodiment of the present application discloses an electronic special gas cylinder valve for semiconductors.

[0032] Reference Figure 1 and Figure 2In this embodiment, the special gas cylinder valve includes a valve body 1, a first adjusting component, a second adjusting component, an anti-foolproof component 4 and a locking component 5. Specifically, the valve body 1 can be made of high-strength, corrosion-resistant metal materials, such as stainless steel, to ensure that it will not be corroded by gas during long-term use, thereby affecting its performance. The shape of the valve body 1 can be designed according to actual needs, and common shapes include cylindrical and square. An output channel 11 and an input channel 12 are provided on the valve body 1. The output channel 11 and the input channel 12 respectively undertake the tasks of gas output and input, ensuring that the gas can flow along a predetermined path.

[0033] The output channel 11 includes a first connecting section 111, a first valve chamber 112, and a second connecting section 113, which are connected in sequence. The end of the first connecting section 111 facing away from the first valve chamber 112 is connected to an external service pipeline, while the end of the second connecting section 113 facing away from the first valve chamber 112 is connected to the interior of the gas cylinder. One end of the first valve chamber 112 is open, and the first valve cap 13 is threadedly connected to the open end of the first valve chamber 112.

[0034] The input channel 12 includes a third connecting section 121, a second valve chamber 122, and a fourth connecting section 123, which are connected in sequence. The end of the third connecting section 121 facing away from the second valve chamber 122 is connected to the external charging pipe, while the end of the fourth connecting section 123 facing away from the second valve chamber 122 is connected to the inner cavity of the gas cylinder. The second valve chamber 122 is open at one end, and the second valve cap 14 is threadedly connected to the open end of the second valve chamber 122.

[0035] The first regulating member 2 is rotatably mounted on the first valve cap 13 relative to the valve body 1. Rotating the first regulating member 2 can control the flow rate and on-off of the output channel 11. The second regulating member 3 is rotatably mounted on the second valve cap 14 relative to the valve body 1. Rotating the second regulating member 3 can control the flow rate and on-off of the input channel 12.

[0036] The foolproof component 4 includes a positioning screw 41, a first handwheel 42, a gear 43 and a gear ring 44. The positioning screw 41 is fixed to the valve body 1 to provide guidance and support for the rotation of the first handwheel 42. The positioning screw 41 can be made of high-strength metal material to ensure that it can withstand the weight of the first handwheel 42 and the force during rotation. The first handwheel 42 is threadedly connected to the positioning screw 41 and is located on the first adjustment component and / or the side away from the valve body 1; when the first handwheel 42 is rotated, due to the action of the thread, the first handwheel 42 will move up and down along the positioning screw 41. The rotation axis of the first handwheel 42 is parallel to the rotation axis of the first adjustment member 2 and the second adjustment member 3. The surface of the first handwheel 42 can be designed with anti-slip texture to facilitate user operation.

[0037] The gear 43 is fixed on the first adjusting member 2, and the rotation center axis of the gear 43 is coaxial with the rotation axis of the first adjusting member 2. The gear ring 44 is fixed on the side of the first hand wheel 42 close to the valve body 1 and meshes with the gear 43. The center axis of the gear ring 44 is coaxial with the rotation axis of the first hand wheel 42. The second adjusting member 3 is located within the circumference of the inner wall of the gear ring 44. Rotating the first hand wheel 42 can drive the gear 43 to rotate, and then drive the first adjusting member 2 to rotate, so as to achieve control of the flow and on-off of the output channel 11. An operating hole 441 is provided on the gear ring 44, which passes through the inner and outer sides of the gear ring 44. The second adjusting member 3 can be operated to rotate from the outside of the gear ring 44 through the operating hole 441 to achieve control of the flow and on-off of the input channel 12. The material of the gear 43 and the gear ring 44 can be selected from wear-resistant metal materials to ensure that they will not wear out during long-term use and affect their transmission performance.

[0038] In this way, the special gas cylinder valve can improve the safety and convenience during use and reduce the probability of safety accidents caused by misoperation. Specifically, when the user needs to control the flow and on-off of the output channel 11, since the second adjusting member 3 is located within the circumference of the inner wall of the gear ring 44, the position is relatively hidden, avoiding space for the operator to identify and select. The operator can only directly rotate the first hand wheel 42 to drive the first adjusting member 2 to rotate, thereby achieving the adjustment and on-off control of the flow of the output channel 11. In addition, when the first adjusting member 2 or the second adjusting member 3 is worn out after long-term use, it can be easily replaced by disassembling the first valve cap 13 or the second valve cap 14 threadedly connected to the valve body 1.

[0039] Preferably, when the first hand wheel 42 is rotated to gradually approach the valve body 1, the flow rate of the output channel 11 gradually decreases; when the first hand wheel 42 is rotated to gradually move away from the valve body 1, the flow rate of the output channel 11 gradually increases. A second hand wheel 7 is coaxially fixed to the second adjusting member 3, and the second hand wheel 7 is located within the circumference of the gear ring 44. When the output channel 11 is in a fully closed state, the second hand wheel 7 is located within the height range of the operating hole 441. At this time, the second hand wheel 7 can be operated to rotate from the outside of the gear ring 44 through the operating hole 441 to drive the second adjusting member 3 to rotate. When the output channel 11 is opened, the first hand wheel 42 drives the gear ring 44 away from the valve body 1, causing the second hand wheel 7 to be misaligned with the operating hole 441. At this time, the second hand wheel 7 cannot be operated to rotate from the outside of the gear ring 44 through the operating hole 441.

[0040] In this way, when the factory side needs to control the flow and on-off of the input channel 12, the probability of safety accidents caused by misoperation can be further reduced, and the situation of gas leakage caused by opening the input channel 12 and filling gas at the same time when the output channel 11 is not closed can be avoided. At the same time, the design of the second hand wheel 7 extends the force arm for rotating the second valve stem 31, making the operation more labor-saving, and can also more accurately control the rotation angle of the second adjustment member 3, so as to accurately adjust the flow of the input channel 12. It should be pointed out here that the premise for achieving this effect is to assume that the customer side does not deliberately operate the second hand wheel 7 to rotate and open the input channel 12 during use.

[0041] Preferably, the second adjusting member 3 is threadedly connected to the second valve cap 14. When the second adjusting member 3 is rotated to gradually approach or move away from the valve body 1, the flow rate of the output channel 11 gradually decreases or increases accordingly. The locking assembly 5 is provided on the valve body 1. When the second adjusting member 3 is rotated to open the output channel 11, the locking assembly 5 locks the gear 43 and the ring gear, preventing the gear 43 and the ring gear from rotating. In this way, when the special gas cylinder valve leaves the factory, the first adjusting member 2 is in a state of closing the output channel 11, and the second adjusting member 3 is in a state of closing the input channel 12. When the user needs to turn the first hand wheel 42 to control the flow rate and on-off of the output channel 11, the second adjusting member 3 needs to be in a state of closing the input channel 12, so that the operator can understand the channel status of the input channel 12 when turning the first hand wheel 42. When the factory needs to turn the second adjusting member 3 to control the flow rate and on-off of the input channel 12, the first adjusting member 2 needs to be in a state of closing the output channel 11, thereby avoiding accidental operation of the first hand wheel 42 to open the output channel 11 during the filling process.

[0042] Reference Figure 1 and Figure 3 In this embodiment, the first regulating member 2 includes a first valve stem 21, a first piston 22, and a first valve core 23. The first valve stem 21 extends through the first valve bonnet 13 and is threadedly connected thereto. One end of the first valve stem 21 extends into the first valve chamber 112, and the other end extends outside the valve body 1. The first piston 22 is rotatably connected to the end of the first valve stem 21 proximal to the first valve chamber 112, with the outer wall of the first piston 22 in sealing and sliding contact with the inner wall of the first valve bonnet 13. The first valve core 23 is secured to the end of the first piston 22 facing away from the first valve stem 21 via a threaded pair. The end of the first valve core 23 facing away from the first piston 22 faces the opening of the second connecting section 113 within the first valve chamber 112. The outer diameter of the first valve core 23 is larger than the diameter of the opening of the second connecting section 113 within the first valve chamber 112, but smaller than the inner diameter of the first valve chamber 112. Rotating the first valve stem 21 of the first regulating member 2 can drive the first valve core 23 to move closer to or away from the opening of the second communicating section 113 in the first valve chamber 112 , so as to control the flow rate and on-off of the output channel 11 .

[0043] The second regulating member 3 includes a second valve stem 31, a second piston 32, and a second valve core 33. The second valve stem 31 extends through the second valve bonnet 14 and is threadedly connected thereto. One end of the second valve stem 31 extends into the second valve chamber 122, and the other end extends outside the valve body 1. The second handwheel 7 is fixedly connected to the end of the second valve stem 31 extending outside the valve body 1. The second piston 32 is rotatably connected to the end of the second valve stem 31 proximal to the second valve chamber 122, with the outer wall of the second piston 32 in sealing and sliding contact with the inner wall of the second valve bonnet 14. The second valve core 33 is fixed to the end of the second piston 32 facing away from the second valve stem 31 via a threaded pair. The end of the second valve core 33 facing away from the second piston 32 faces the opening of the fourth connecting section 123 within the second valve chamber 122. The outer diameter of the second valve core 33 is larger than the diameter of the opening of the fourth connecting section 123 within the second valve chamber 122, but smaller than the inner diameter of the second valve chamber 122. Rotating the second valve stem 31 of the second regulating member 3 can drive the second valve core 33 to move closer to or away from the opening of the fourth communication section 123 in the second valve chamber 122 to control the flow rate and on-off of the input channel 12 .

[0044] In this way, rotating the first valve stem 21 can precisely control the flow rate and on / off of the output channel 11. When the first valve core 23 approaches the opening of the second communicating section 113 in the first valve chamber 112, the gap between the first valve core 23 and the second communicating section 113 narrows, reducing the flow rate of gas entering the first valve chamber 112 from the second communicating section 113. When the first valve core 23 moves away from the opening of the second communicating section 113 in the first valve chamber 112, the gap between the first valve core 23 and the second communicating section 113 widens, increasing the flow rate of gas entering the first valve chamber 112 from the second communicating section 113. Rotating the second valve stem 31 can precisely control the flow rate and on / off of the input channel 12. When the second valve core 33 approaches the opening of the fourth communicating section 123 in the second valve chamber 122, the gap between the first valve core 23 and the second communicating section 123 narrows, reducing the flow rate of gas entering the fourth communicating section 123 from the second valve chamber 122. When the first valve core 23 moves away from the opening of the fourth communicating section 123 in the second valve chamber 122, the gap between the first valve core 23 and the second communicating section 123 widens, increasing the flow rate of gas entering the fourth communicating section 123 from the second valve chamber 122.

[0045] Furthermore, the first piston 22 slides in sealing contact with the inner wall of the first valve cap 13, preventing gas from leaking from the threaded connection between the first valve cap 13 and the first valve stem 21. The second piston 32 slides in sealing contact with the inner wall of the second valve cap 14, preventing gas from leaking from the threaded connection between the second valve cap 14 and the second valve stem 31. This improves the sealing performance and safety of the special gas cylinder valve.

[0046] Preferably, a steel ball is provided between the abutting surface of the first piston 22 rod and the first valve stem 21, and the steel ball can reduce the frictional resistance when the first piston 22 rod and the first valve stem 21 rotate. A steel ball is also provided between the abutting surface of the second piston 32 rod and the second valve stem 31, and the steel ball can reduce the frictional resistance when the second piston 32 rod and the second valve stem 31 rotate.

[0047] Preferably, the outer wall of the valve body 1 is provided with a first detection hole 15 communicating with the first valve chamber 112 and a second detection hole 16 communicating with the second valve chamber 122. Each of the first detection hole 15 and the second detection hole 16 is provided with a detection hole bolt 6 for sealing the first detection hole 15 and the second detection hole 16. Thus, after removing the detection hole bolts 6 from the first detection hole 15 and the second detection hole 16, the sealing of the output channel 11 and the input channel 12 can be tested by monitoring the changes in the air pressure in the first valve chamber 112 and the second valve chamber 122.

[0048] Reference Figure 1 and Figure 3 In this embodiment, the locking assembly 5 includes a locking rod 51 and an elastic member 52. The locking rod 51 is a long rod with a rectangular cross-section. It slides along its length on the valve body 1 and is located between the first valve stem 21 and the second valve stem 31. The central axis of the locking rod 51 is perpendicular to and intersects the rotation axes of the first valve stem 21 and the second valve stem 31. One end of the locking rod 51 slides against the outer wall of the second valve stem 31, while the other end faces the tooth surface of the gear 43. The elastic member 52 is a spring installed between the locking rod 51 and the valve body 1 to cause the locking rod 51 to move away from the gear 43.

[0049] The second valve stem 31 is specifically a cylindrical rod of variable diameter. It includes a locking section 311 and a free section 312. The locking section 311 has a larger diameter than the free section 312. The locking section 311 is threadedly connected to the second valve bonnet 14, and the free section 312 is connected to the end of the locking section 311 away from the valve body 1. When the output channel 11 is closed, one end of the locking rod 51 abuts the outer wall of the second valve stem 31 within the free section 312, while the other end does not contact the gear 43. When the output channel 11 is open, one end of the locking rod 51 abuts the outer wall of the second valve stem 31 within the locking section 311, while the other end is inserted into the tooth groove of the gear 43 to restrict the gear 43 from rotating.

[0050] Thus, when the end of the locking rod 51 away from the gear 43 abuts the outer wall of the second valve stem 31 within the free section 312, the end of the locking rod 51 near the gear 43 does not contact the gear 43. At this point, the first handwheel 42 can rotate normally and, through the gear 43, drive the first valve stem 21 to rotate, thereby controlling the on / off state and flow rate of the output channel 11. When the second valve stem 31 rotates away from the valve body 1, the end of the locking rod 51 away from the gear 43 slides from the inner and outer walls of the second valve stem 31 within the free section 312 to the outer wall of the second valve stem 31 within the locking section 311, forcing the locking rod 51 toward the gear 43. The end of the locking rod 51 near the gear 43 then inserts into the tooth groove of the gear 43, restricting the rotation of the gear 43. This ensures that when either the input channel 12 or the output channel 11 is opened, the other must be closed. This reduces the probability of safety accidents caused by improper operation of the special gas cylinder valve by both the user and the factory, thereby improving the safety and convenience of the special gas cylinder valve.

[0051] Preferably, the end of the locking rod 51 away from the second valve stem 31 matches the tooth groove shape of the gear 43. This can make the locking rod 51 and the tooth groove of the gear 43 better fit, enhance the locking effect, and more reliably limit the rotation of the gear 43.

[0052] The implementation principle of a semiconductor electronic special gas cylinder valve according to an embodiment of the present application is as follows: by rationally designing the positions of the first adjusting member 2, the second adjusting member, and the first hand wheel 42, when the user needs to rotate the first adjusting member 2 to control the flow and on / off of the output channel 11, since the second hand wheel 7 is located within the circumference of the inner wall of the gear ring 44 and is relatively hidden, avoiding space for the operator to identify and select, the operator can only directly rotate the first hand wheel 42 to drive the first adjusting member 2 to rotate, thereby achieving the adjustment and on / off control of the flow of the output channel 11. In addition, by adding a locking assembly 5, when the end of the locking rod 51 away from the gear 43 abuts the outer wall of the second valve stem 31 located in the free section 312, the end of the locking rod 51 close to the gear 43 does not contact the gear 43. At this time, the first hand wheel 42 can rotate normally and can drive the first valve stem 21 to rotate through the gear 43, thereby achieving the control of the on / off and flow of the output channel 11. When the second valve stem 31 rotates and moves away from the valve body 1, the end of the locking rod 51 away from the gear 43 slides from the inner and outer walls of the free section 312 of the second valve stem 31 to the outer wall of the second valve stem 31 within the locking section 311, thereby forcing the locking rod 51 to move toward the gear 43. The end of the locking rod 51 near the gear 43 then inserts into the tooth groove of the gear 43 to restrict the rotation of the gear 43. This ensures that when one of the input channel 12 and the output channel 11 is opened, the other must be closed, thereby reducing the probability of safety accidents caused by improper operation of the special gas cylinder valve on both the user side and the factory side, and improving the safety and convenience of the special gas cylinder valve.

[0053] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A semiconductor electronic gas cylinder valve, characterized in that: include: A valve body (1), wherein the valve body (1) is provided with an output channel (11) and an input channel (12); A first regulating member (2) is rotatably arranged relative to the valve body (1), and rotating the first regulating member (2) can control the flow rate and on-off of the output channel (11); A second regulating member (3) is rotatably arranged relative to the valve body (1), and rotating the second regulating member (3) can control the flow rate and on-off of the input channel (12); A foolproof assembly (4), the foolproof assembly (4) comprising a positioning screw (41), a first hand wheel (42), a gear (43) and a gear ring (44); the positioning screw (41) is arranged on the valve body (1), and the first hand wheel (42) is threadedly connected to the positioning screw (41); the gear (43) is arranged on the first adjusting member (2); the gear ring (44) is arranged on a side of the first hand wheel (42) close to the valve body (1) and meshes with the gear (43), and rotating the first hand wheel (42) can drive the first adjusting member (2) to rotate; the second adjusting member (3) is located within the circumference of the inner wall of the gear ring (44); an operating hole (441) is opened on the gear ring (44), and the second adjusting member (3) can be operated to rotate from the outside of the gear ring (44) through the operating hole (441).

2. The semiconductor electronic special gas cylinder valve according to claim 1, characterized in that: When the first hand wheel (42) is rotated to gradually approach or move away from the valve body (1), the flow rate of the output channel (11) correspondingly decreases or increases; only when the first hand wheel (42) is close to the valve body (1) to a height at which the output channel (11) is closed can the second adjusting member (3) be operated to rotate from the outside of the gear ring (44) through the operating hole (441).

3. The semiconductor electronic special gas cylinder valve according to claim 2, characterized in that: The second regulating member (3) can gradually approach or move away from the valve body (1) after being rotated, and the flow rate of the output channel (11) gradually decreases or increases when the second regulating member (3) gradually approaches or moves away from the valve body (1); a locking assembly (5) is provided on the valve body (1), and when the second regulating member (3) is rotated away from the valve body (1) to open the output channel (11), the locking assembly (5) locks the gear (43) and the gear ring.

4. The semiconductor electronic special gas cylinder valve according to claim 3, characterized in that: The output channel (11) comprises a first connecting section (111), a first valve chamber (112), and a second connecting section (113) connected in sequence; an end of the first connecting section (111) facing away from the first valve chamber (112) is connected to an external use pipeline, and an end of the second connecting section (113) facing away from the first valve chamber (112) is connected to the inner cavity of the gas cylinder; one end of the first valve chamber (112) is open and a first valve cap (13) is threadedly connected to the opening, and the first regulating member (2) is arranged on the first valve cap (13); The input channel (12) comprises a third connecting section (121), a second valve chamber (122) and a fourth connecting section (123) which are connected in sequence, wherein the end of the third connecting section (121) facing away from the second valve chamber (122) is connected to an external charging pipe, and the end of the fourth connecting section (123) facing away from the second valve chamber (122) is connected to an inner cavity of the gas cylinder; one end of the second valve chamber (122) is open and a second valve cap (14) is threadedly connected to the inner surface of the opening, and the second regulating member (3) is arranged on the second valve cap (14).

5. The semiconductor electronic special gas cylinder valve according to claim 4, characterized in that: A first detection hole (15) communicating with the first valve chamber (112) and a second detection hole (16) communicating with the second valve chamber (122) are provided on the outer wall of the valve body (1), and detection hole bolts (6) for sealing the first detection hole (15) and the second detection hole (16) are provided in each of the first detection hole (15) and the second detection hole (16).

6. The semiconductor electronic special gas cylinder valve according to claim 4, characterized in that: The first regulating member (2) comprises a first valve stem (21), a first piston (22) and a first valve core (23); the first valve stem (21) is threadedly connected to the first valve bonnet (13); the first piston (22) is rotatably arranged at one end of the first valve stem (21) close to the first valve chamber (112), and the first piston (22) is in sealing sliding contact with the inner wall of the first valve bonnet (13); the first valve core (23) is connected to one end of the first piston (22) facing away from the first valve stem (21); the gear (43) is fixed to the first valve stem (21) and rotates together with the first valve stem (21); rotating the first valve stem (21) can drive the first valve core (23) to approach or move away from the opening of the second connecting section (113) in the first valve chamber (112) to control the flow rate and on-off of the output channel (11).

7. The semiconductor electronic special gas cylinder valve according to claim 4, characterized in that: The second regulating member (3) includes a second valve stem (31), a second piston (32) and a second valve core (33); the second valve stem (31) is threadedly connected to the second valve bonnet (14); the second piston (32) is rotatably arranged at one end of the second valve stem (31) close to the second valve chamber (122), and the second piston (32) is in sealing sliding contact with the inner wall of the second valve bonnet (14); the second valve core (33) is connected to one end of the second piston (32) facing away from the second valve stem (31); rotating the second valve stem (31) can drive the second valve core (33) to approach or move away from the opening of the fourth connecting section (123) in the second valve chamber (122) to control the flow rate and on-off of the input channel (12).

8. The semiconductor electronic special gas cylinder valve according to claim 7, characterized in that: The locking assembly (5) includes a locking rod (51) and an elastic member (52), wherein the locking rod (51) is slidably arranged on the valve body (1) along its own length direction, and one end of the locking rod (51) abuts against the outer wall of the second valve stem (31), and the other end faces the tooth surface of the gear (43), and the elastic member (52) is used to make the locking rod (51) have a tendency to move away from the gear (43); the second valve stem (31) includes a locking section (311) and a free section (312), and the rod diameter of the locking section (311) is larger than the rod diameter of the free section (312); The locking section (311) is threadedly connected to the second valve cap (14), and the free section (312) is connected to the end of the locking section (311) away from the valve body (1); when the output channel (11) is closed, one end of the locking rod (51) abuts against the outer wall of the second valve stem (31) located in the free section (312), and the other end does not contact the gear (43); after the output channel (11) is opened, one end of the locking rod (51) abuts against the outer wall of the second valve stem (31) located in the locking section (311), and the other end is inserted into the tooth groove of the gear (43) to limit the rotation of the gear (43).

9. The semiconductor electronic special gas cylinder valve according to claim 8, characterized in that: One end of the locking rod (51) facing away from the second valve rod (31) matches the tooth groove shape of the gear (43).

10. The semiconductor electronic special gas cylinder valve according to claim 1, characterized in that: A second hand wheel (7) is coaxially fixed to the second adjusting member (3), and the second hand wheel (7) can be rotated from the outside of the gear ring (44) through the operating hole (441).

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