A vertical interference detection device for optical elements

Abstract

This invention discloses a vertical interferometric testing device for optical components, relating to the field of optical component testing technology. It includes a support connected between vibration isolation modules, with a top plate and a bottom plate. A driving unit is mounted on the support, with an upper stage and a lower stage correspondingly connected to the driving unit. Both the upper and lower stages are equipped with trays and moving units. An upper optical system is mounted on the upper surface of the top plate, and an upper two-dimensional adjustment frame is mounted on the lower surface of the top plate. A lower optical system is mounted on the lower surface of the bottom plate, and a lower two-dimensional adjustment frame is mounted on the upper surface of the bottom plate. Both the upper and lower two-dimensional adjustment frames are used to hold a standard mirror. This vertical interferometric testing device for optical components solves the technical problem that existing vertical interferometric testing devices cannot simultaneously perform vertical upward and vertical downward testing.

Description

Technical Field

[0001] This invention relates to the field of optical element testing technology, and in particular to a vertical interferometric testing device for optical elements. Background Technology

[0002] In the field of optical precision inspection, large-aperture high-precision surface shape inspection technology is one of the key bottlenecks restricting the manufacturing and application of large-aperture optical components in my country. As the precision requirements of modern optical instruments continue to increase, traditional inspection methods are no longer able to meet the growing technical demands.

[0003] Currently, interferometers are the primary technology for inspecting the surface shape of optical components. Their measurement principle involves processing the interference fringes formed by the reflected light from a standard reference surface and the surface being measured to obtain the surface shape data. Most commercially available vertical inspection devices have an upward-facing structure, suitable for inspecting small-diameter optical components. They typically use a lead screw motor to adjust the height, with the interferometer fixed to the lower platform, and the light path inspected from bottom to top. This structure is ill-suited for the high-precision inspection requirements of large-diameter optical components of 300mm and above. While large-diameter downward-facing inspection stations developed by ZYGO can inspect 300mm diameter components, they do not support upward-facing inspection modes, limiting their application.

[0004] Therefore, how to provide a vertical interferometric detection device for optical components to achieve vertical upward detection and vertical downward detection is a technical problem that needs to be solved by those skilled in the art. Summary of the Invention

[0005] The purpose of this invention is to provide a vertical interferometric testing device for optical components, which solves the technical problem that existing vertical interferometric testing devices cannot achieve vertical upward and vertical downward testing.

[0006] To achieve the above objectives, the present invention provides a vertical interferometric detection device for optical elements, comprising:

[0007] Vibration isolation modules are spaced relatively apart;

[0008] A bracket is connected between the two vibration isolation modules, and a first top plate and a first bottom plate are respectively provided at the upper and lower ends of the bracket;

[0009] The drive unit is mounted on the bracket;

[0010] An upper stage and a lower stage are provided, both of which are connected to the driving unit. The driving unit can move the upper stage and the lower stage in the Z direction and adjust the Rx and Ry tilt angles accordingly. Each of the upper stage and the lower stage is provided with a tray for placing optical components.

[0011] The upper loading platform and the lower loading platform are both equipped with a moving unit, which enables the tray to translate in the X and Y directions and rotate in the Z axis.

[0012] An upper optical system and an upper two-dimensional adjustment frame are provided, wherein the upper optical system is disposed on the upper surface of the first top plate and the upper two-dimensional adjustment frame is disposed on the lower surface of the first top plate;

[0013] The lower optical system and the lower two-dimensional adjustment frame are provided. The lower optical system is disposed on the lower surface of the first base plate, and the lower two-dimensional adjustment frame is disposed on the upper surface of the first base plate. Both the lower two-dimensional adjustment frame and the lower two-dimensional adjustment frame are used to place the standard mirror.

[0014] Based on the above embodiments, the driving unit includes a first driving mechanism and a second driving mechanism, wherein the first driving mechanism includes:

[0015] The first lead screw guide rail is rotatably mounted on the left side of the bracket. The first lead screw guide rail is provided with a first nut seat. The left side of the upper platform is connected to the first nut seat.

[0016] The second lead screw guide and the third lead screw guide are rotatably mounted on the right side of the bracket. The second lead screw guide is provided with a second nut seat, and the third lead screw guide is provided with a third nut seat. The right side of the upper platform is connected to the second nut seat and the third nut seat.

[0017] Based on the above embodiments, the second driving mechanism includes:

[0018] The fourth lead screw guide rail is rotatably mounted on the left side of the bracket, and the fourth lead screw guide rail is provided with a fourth nut seat. The right side of the download stage is connected to the fourth nut seat.

[0019] The fifth lead screw guide rail and the sixth lead screw guide rail are rotatably mounted on the left side of the bracket. The fifth lead screw guide rail is provided with a fifth nut seat, and the sixth lead screw guide rail is provided with a sixth nut seat. The left side of the download platform is connected to the fifth nut seat and the sixth nut seat.

[0020] Based on the above embodiments, the driving unit further includes a driving motor, which realizes the rotation of the first lead screw guide rail, the second lead screw guide rail, the third lead screw guide rail, the fourth lead screw guide rail and the fifth lead screw guide rail.

[0021] Based on the above embodiments, the stroke of each lead screw guide is not less than 1800mm, the stepping resolution of the drive motor is ≤20nm, and the feedback resolution is ≤1nm.

[0022] Based on the above embodiments, each lead screw guide rail is provided with a grating ruler, and each nut seat is provided with a grating reading head.

[0023] Based on the above embodiments, the moving unit includes a translation mechanism, which includes an X-axis lead screw and an X-axis motor to realize the X-axis movement of the pallet; the translation mechanism also includes a Y-axis lead screw and a Y-axis motor to realize the Y-axis movement of the pallet.

[0024] Based on the above embodiments, the moving unit further includes a worm gear mechanism, thereby realizing the rotation of the tray.

[0025] Based on the above embodiments, the tray is provided with a hollow hole with a diameter of 420mm, and the upper and lower surfaces of the upper loading platform and the lower loading platform are mirror images.

[0026] Based on the above embodiments, a six-channel precision measurement unit is also included. The six-channel precision measurement unit is disposed on the first top plate and can measure the displacement value and tilt angle change value of the upper stage and the lower stage.

[0027] Compared with the above-mentioned background technology, the vertical interferometric detection device for optical elements provided by the present invention has the following beneficial effects:

[0028] 1. The detection and adjustment device of the present invention realizes multi-axis collaborative control. Both the upper and lower stages have multi-axis adjustment capabilities. The multi-axis collaborative control mode makes the adjustment of the stage in various directions more flexible and can better adapt to the detection needs of optical components with different shapes and characteristics.

[0029] 2. This invention has both vertical upward and vertical downward detection functions, enabling the detection of 300mm large-diameter optical components. The vertical detection method ensures that the detection state is consistent with the final usage state of the optical component, avoiding errors introduced by the difference between the detection method and the usage method, thereby improving the accuracy and reliability of the detection data.

[0030] 3. Both the upper and lower stages of this invention adopt a mirrored design, so optical elements can be installed on either the upper or lower surface of the stage, making it versatile and able to meet the installation requirements of different types of optical elements.

[0031] 4. The present invention adopts a dual-stage design. Compared with the conventional single-stage solution, in addition to performing conventional optical surface shape detection, it can also carry out a variety of detection tasks such as radius of curvature measurement, multi-surface measurement, splicing detection, and calibration. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0033] Figure 1 This is a front view of a vertical interferometric detection device for optical elements provided in an embodiment of the present invention;

[0034] Figure 2 This is a top view of the upper stage structure provided in an embodiment of the present invention;

[0035] Figure 3 This is a top view of the download stage structure provided in an embodiment of the present invention;

[0036] Figure 4 This is a schematic diagram of the mobile unit structure provided in an embodiment of the present invention;

[0037] Figure 5 This is an isometric schematic diagram of the moving unit provided in an embodiment of the present invention;

[0038] Figure 6 for Figure 5 A partial sectional view.

[0039] in:

[0040] 1-Vibration isolation module, 2-Bracket, 3-First top plate, 4-First bottom plate, 5-Upper loading stage, 6-Lower loading stage, 7-Upper optical system, 8-Upper two-dimensional adjustment frame, 9-Lower optical system, 10-Lower two-dimensional adjustment frame, 11-First lead screw guide rail, 12-Second lead screw guide rail, 13-Third lead screw guide rail, 14-Fourth lead screw guide rail, 15-Fifth lead screw guide rail, 16-Sixth lead screw guide rail, 17-X-axis lead screw, 18-X-axis motor, 19-Y-axis lead screw, 20-Y-axis motor, 21-Six-channel precision measurement unit, 22-Second bottom plate, 23-Intermediate plate, 24-Second top plate, 25-Rotary motor, 26-Worm gear. Detailed Implementation

[0041] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0042] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0043] See Figure 1 This application provides a vertical interferometric detection device for optical components, comprising: a vibration isolation module 1, four vibration isolation modules 1 arranged at intervals relative to each other; a support 2 connected between the four vibration isolation modules 1, with a first top plate 3 and a first bottom plate 4 correspondingly arranged at the upper and lower ends of the support 2; a drive unit disposed on the support 2; an upper loading stage 5 and a lower loading stage 6, both of which are correspondingly connected to the drive unit, and the drive unit can correspondingly realize the Z-axis movement of the upper loading stage 5 and the lower loading stage 6 and the Rx and Ry tilt angle adjustment; and a tray provided on both the upper loading stage 5 and the lower loading stage 6. The tray is used to place optical components; the moving unit, the upper stage 5 and the lower stage 6 are both equipped with moving units, the moving units realize the X-axis and Y-axis translation of the tray and the Z-axis rotation; the upper optical system 7 and the upper two-dimensional adjustment frame 8, the upper optical system 7 is set on the upper surface of the first top plate 3 and the upper two-dimensional adjustment frame 8 is set on the lower surface of the first top plate 3; the lower optical system 9 and the lower two-dimensional adjustment frame 10, the lower optical system 9 is set on the lower surface of the first bottom plate 4 and the lower two-dimensional adjustment frame 10 is set on the upper surface of the first bottom plate 4, the upper two-dimensional adjustment frame 8 and the lower two-dimensional adjustment frame 10 are both used to place standard mirrors.

[0044] In other words, the four vibration isolation modules 1 are set at intervals relative to each other to effectively isolate external vibration interference and ensure the accuracy and stability of the testing process. The vibration isolation module 1 in this application is a direct use of the prior art, and the specific structure of the vibration isolation module 1 will not be described in detail here.

[0045] The bracket 2 is connected between the four vibration isolation modules 1, and plays the role of connecting and supporting the upper structure. The upper and lower ends of the bracket 2 are respectively provided with the first top plate 3 and the first bottom plate 4.

[0046] The drive unit is mounted on the bracket 2. The upper stage 5 and the lower stage 6 are both connected to the drive unit. The drive unit can move the upper stage 5 and the lower stage 6 in the Z direction (vertical direction) and adjust their tilt angles around Rx (X-axis rotation direction) and Ry (Y-axis rotation direction) to meet different detection requirements.

[0047] Both the upper stage 5 and the lower stage 6 are equipped with trays. The surfaces of the trays are specially treated to ensure good flatness and stability, and they are used to place the optical components to be inspected. At the same time, both the upper stage 5 and the lower stage 6 are equipped with moving units, which enable the trays to translate in the X-axis (horizontal transverse direction), the Y-axis (horizontal longitudinal direction), and rotate in the Z-axis, further increasing the flexibility of adjusting the position of the optical components.

[0048] Upper optical system and upper two-dimensional adjustment frame: The upper optical system 7 is located on the upper surface of the first top plate 3 and is the optical component for interferometry detection, responsible for beam refraction and expansion. The upper two-dimensional adjustment frame 8 is located on the lower surface of the first top plate 3, and the lower optical system 9 is located on the lower surface of the first bottom plate 4. Together with the upper optical system 7, they form the optical path for interferometry detection. The lower two-dimensional adjustment frame 10 is located on the upper surface of the first bottom plate 4 and is also used to place the standard mirror. The position and angle of the standard mirror can be adjusted to ensure the accuracy of interferometry detection.

[0049] Based on the above embodiments, see Figure 2 The drive unit includes a first drive mechanism and a second drive mechanism. The first drive mechanism includes: a first lead screw guide rail 11, which is rotatably disposed on the left side of the bracket 2, and a first nut seat is provided on the first lead screw guide rail 11. The left side of the upper platform 5 is connected to the first nut seat; a second lead screw guide rail 12 and a third lead screw guide rail 13, which are rotatably disposed on the right side of the bracket 2, respectively. A second nut seat is provided on the second lead screw guide rail 12, and a third nut seat is provided on the third lead screw guide rail 13. The right side of the upper platform 5 is connected to the second nut seat and the third nut seat. Specifically, the connection can be made through a flexible structure. The flexible structure in this application is a direct use of the prior art, and will not be described in detail here.

[0050] In other words, the first lead screw guide rail 11 is rotatably mounted on the left side of the bracket 2, and a first nut seat is provided on the first lead screw guide rail 11. The left side of the upper platform 5 is connected to the first nut seat. The second lead screw guide rail 12 and the third lead screw guide rail 13 are rotatably mounted on the right side of the bracket 2. A second nut seat is provided on the second lead screw guide rail 12, and a third nut seat is provided on the third lead screw guide rail 13. The right side of the upper platform 5 is connected to the second nut seat and the third nut seat. All three lead screw guide rails are driven by corresponding motors, and the motors achieve precise displacement and speed through a control system.

[0051] Motion control principle:

[0052] Z-axis movement: The control system controls the first lead screw guide rail 11, the second lead screw guide rail 12 and the third lead screw guide rail 13 to move synchronously. That is, the motors of the three lead screw guide rails rotate at the same speed and direction, driving the first nut seat, the second nut seat and the third nut seat to rise or fall synchronously along the corresponding guide rails, thereby realizing the synchronous up and down movement of the upper loading platform 5.

[0053] Tilting around the Y-axis (Ry tilt angle adjustment): When the second lead screw guide rail 12 and the third lead screw guide rail 13 stop moving, the motor controlling the first lead screw guide rail 11 rotates, causing the first nut seat to move upward. Since the positions of the second and third nut seats are fixed, the left side of the upper platform 5 is pushed upward by the first nut seat, thereby realizing the tilting of the upper platform 5 around the Y-axis, that is, realizing the Ry tilt angle adjustment.

[0054] Tilting around the X-axis (Rx tilt angle adjustment): When the first lead screw guide 11 stops moving, the motor controlling the second lead screw guide 12 drives the second nut seat to move upward, and at the same time controls the motor controlling the third lead screw guide 13 to drive the third nut seat to move downward. Since the left side of the upper platform 5 is fixed, one end of the right side of the upper platform 5 is pushed upward by the second nut seat, and the other end is pulled downward by the third nut seat, thereby realizing the tilting of the upper platform 5 around the X-axis, that is, realizing the Rx tilt angle adjustment.

[0055] Based on the above embodiments, see Figure 3 The second drive mechanism includes a fourth lead screw guide rail 14, which is rotatably mounted on the left side of the bracket 2. The fourth lead screw guide rail 14 is provided with a fourth nut seat, and the right side of the download platform 6 is connected to the fourth nut seat. The fifth lead screw guide rail 15 and the sixth lead screw guide rail 16 are rotatably mounted on the left side of the bracket 2, respectively. The fifth lead screw guide rail 15 is provided with a fifth nut seat, and the sixth lead screw guide rail 16 is provided with a sixth nut seat. The left side of the download platform 6 is connected to the fifth nut seat and the sixth nut seat. Similarly, the working principle of the second drive mechanism can be referred to the first drive mechanism. Here, the working principle of the second drive mechanism will not be elaborated.

[0056] Based on the above embodiments, the drive unit also includes a drive motor, which respectively realizes the rotation of the first lead screw guide rail 11, the second lead screw guide rail 12, the third lead screw guide rail 13, the fourth lead screw guide rail 14 and the fifth lead screw guide rail 15.

[0057] In other words, the drive unit uses a high-precision servo motor as the drive power source, which is installed on the first lead screw guide rail 11, the second lead screw guide rail 12, the third lead screw guide rail 13, the fourth lead screw guide rail 14 and the fifth lead screw guide rail 15 respectively. The drive end of each lead screw guide rail is tightly connected to the drive motor through a coupling to ensure that the rotational motion output by the motor can be transmitted to the lead screw guide rail efficiently and stably.

[0058] A closed-loop control system is used to precisely control the drive motor. The encoder provides real-time feedback on the motor's rotation angle and speed. Based on the deviation between the feedback signal and the set value, the control system adjusts the motor's drive current and voltage in a timely manner, thereby achieving precise control of the motor's speed and direction.

[0059] Based on the above embodiments, each lead screw guide is equipped with a grating ruler, each nut seat is equipped with a grating reading head, the stroke of each lead screw guide is not less than 1800mm, the stepping resolution of the drive motor is ≤20nm, and the feedback resolution is ≤1nm.

[0060] In other words, the grating rulers installed on each lead screw guide rail have extremely high grating line density, reaching up to 50,000 lines per millimeter. High line density means improved resolution and accuracy of position measurement over the same length.

[0061] Given that the stroke of each lead screw guide is not less than 1800mm, a special process is used during manufacturing to ensure the uniformity and consistency of the engraving lines on the grating ruler throughout its entire length range, thus avoiding position measurement deviations caused by engraving errors.

[0062] The grating reading head mounted on the nut seat works in conjunction with the grating ruler to accurately read the engraving information on the ruler. The reading head converts the optical signal from the grating ruler into an electrical signal, thus achieving high-precision position measurement. The grating reading head can feed back the measured position information to the control unit in real time, with a feedback resolution ≤20nm, ensuring that the control unit can promptly understand the precise position of the lead screw guide and the nut seat, achieving closed-loop control.

[0063] Based on the above embodiments, see Figure 4 , Figure 5 and Figure 6 The moving unit includes a translation mechanism, which includes an X-axis lead screw 17 and an X-axis motor 18 to realize the X-axis movement of the pallet; the translation mechanism also includes a Y-axis lead screw 19 and a Y-axis motor 20 to realize the Y-axis movement of the pallet; the moving unit also includes a worm gear mechanism to realize the rotation of the pallet about the Z-axis.

[0064] Specifically, the X-axis translation assembly includes an X-axis lead screw 17 and an X-axis motor 18, which enables the tray to move in the X direction. The stage has a multi-layered structure, including a second base plate 22, a middle plate 23, and a second top plate 24, with the tray mounted on the second top plate 24. The middle plate 23 can slide along the X direction on the second base plate 22. The X-axis lead screw 17 and the X-axis motor 18 are fixedly mounted on the second base plate 22. The X-axis lead screw 17 is equipped with an X-axis nut sleeve, which slides within the X-axis lead screw 17. The X-axis nut sleeve and the middle plate 23 are detachably connected, for example, by bolts. When the X-axis motor 18 starts, it drives the X-axis lead screw 17 to rotate. Since the X-axis nut sleeve is connected to the middle plate 23, the middle plate 23 moves along the X direction under the transmission action of the lead screw, thereby moving the tray mounted on the second top plate 24 in the X direction.

[0065] The Y-axis translation assembly includes a Y-axis lead screw 19 and a Y-axis motor 20, used to realize the Y-axis movement of the pallet. The second top plate 24 can slide along the Y-axis on the intermediate plate 23. The Y-axis lead screw 19 and the Y-axis motor 20 are mounted on the intermediate plate 23. The Y-axis lead screw 19 is provided with a Y-axis nut sleeve, which slides with the Y-axis lead screw 19. The Y-axis nut sleeve is detachably connected to the second top plate 24, which can also be connected by bolts. When the Y-axis motor 20 is started, it drives the Y-axis lead screw 19 to rotate. Under the action of the lead screw, the Y-axis nut sleeve drives the second top plate 24 to move along the Y-axis, thereby realizing the Y-axis movement of the pallet.

[0066] The worm gear mechanism is used to achieve the rotation of the pallet about the Z-axis. The second top plate 24 is equipped with bearings for the pallet's rotation, providing support and guidance to ensure smooth rotation around the Z-axis. The worm gear structure mainly consists of a rotary motor 25 and a worm 26. The rotary motor 25 is fixedly mounted on the second top plate 24, and the worm 26 is connected to the drive shaft of the rotary motor 25. When the rotary motor 25 starts, the drive shaft drives the worm 26 to rotate. The worm 26 meshes with the worm wheel on the outer circumference of the pallet, thereby causing the pallet to rotate about the Z-axis.

[0067] Based on the above embodiment, the tray is provided with a hollow hole with a diameter of 420mm. The upper and lower surfaces of the upper stage 5 and the lower stage 6 are mirror images, so that the optical element can be installed on the upper surface of the stage or on the lower surface of the stage.

[0068] Based on the above embodiments, a six-channel precision measurement unit 21 is also included. The six-channel precision measurement unit 21 is disposed on the first top plate 3 and can measure the displacement and tilt angle changes of the upper stage 5 and the lower stage 6. The beam splitting module splits the single-channel laser into 6 beams, and the beams are folded downward by the deflection module so that the 6 beams hit the corner reflectors on the upper and lower stages respectively. The beams are returned along the original path by the reflectors, and the displacement of the stage points is accurately measured by the interferometric detection method. The Z-axis displacement and tilt angle of the platform can be accurately obtained by the calculation algorithm. The six-channel precision measurement unit 21 in this application is a direct use of existing mature technology, and the specific structure will not be described in detail here.

[0069] Operating principle of a vertical interferometric detection device for optical components:

[0070] Vertical upward inspection steps:

[0071] The light beam propagates upward through the lens group of the lower optical system 9. The light path changes direction through the folding mirror and the beam diameter is expanded to 300mm by the beam expander to ensure that the light beam is perpendicularly incident on the plane of the lower two-dimensional adjustment frame 10.

[0072] A 300mm diameter standard mirror is installed on the lower two-dimensional adjustment frame 10. By adjusting the X / Y translation and pitch of the two-dimensional adjustment frame, the reflected light spot returned by the standard mirror is precisely located at the center of the detector's field of view.

[0073] The microscope under test is placed on the upper or lower stage. The upper stage 5 is translated in the Z direction by the drive unit so that the light spot returned by the microscope under test is approximately close to the light spot returned by the standard microscope. Then, the real-time feedback of the interferometer is used to make the light spot returned by the microscope under test and the light spot returned by the standard microscope precisely coincide.

[0074] Switch the interferometer to view mode, where the interference fringes can be clearly observed. Depending on the specific surface shape detection requirements, such as detecting surface shape errors in different regions or surface shape features of different frequency components, the position and orientation of the stage are further adjusted via control software. The interference fringes are then analyzed and processed in detail until the surface shape detection task is completed.

[0075] Vertical downward testing steps:

[0076] The light propagates downward through the upper optical system 7, and forms a 300mm diameter parallel beam through the folding mirror and beam expander, ensuring that the beam is perpendicularly incident on the plane of the upper two-dimensional adjustment frame 8;

[0077] A 300mm diameter standard mirror is installed on the upper two-dimensional adjustment frame 8. By adjusting the X and Y axes of the upper two-dimensional adjustment frame and with the help of the interferometer, the light spot returned by the standard mirror is accurately located at the center of the field of view.

[0078] Place the microscope to be examined on the upper or lower stage and make preliminary adjustments to the stage so that the light spot returned by the microscope to be close to the light spot returned by the standard microscope.

[0079] Switch the interferometer to view mode and observe the interference fringes. Adjust the stage using the control software according to the specific requirements of the surface shape inspection, analyze and process the interference fringes to obtain the surface shape information of the mirror under inspection, until the inspection is complete.

[0080] Optical element transmission wavefront detection steps:

[0081] After passing through the lower optical system, the light beam is folded upward by optical elements and then expanded to a diameter of 300mm by the beam expanding system.

[0082] Place a 300mm diameter standard mirror on the lower two-dimensional adjustment frame, adjust the X and Y axes of the two-dimensional adjustment frame, and use the feedback of the interferometer to make the light spot returned by the standard mirror located at the exact center of the field of view.

[0083] Place the reference mirror on the upper stage and adjust the various axes of the upper stage so that the light spot returned by the reference mirror precisely coincides with the light spot of the mirror under test.

[0084] Place the microscope to be examined on the stage, ensuring its stability to prevent movement during subsequent testing. Adjust the stage using the control software so that the light spot returned from the microscope is slightly off-center from the field of view.

[0085] Switch the interferometer to view mode and observe the interference fringes. Adjust the stage using the control software according to the testing requirements, analyze and process the interference fringes to obtain the transmitted wavefront information of the microscope under test, until the testing is complete.

[0086] In summary, the vertical interferometric detection device for optical components provided in this application has the following advantages compared with the prior art:

[0087] The detection and adjustment device of the present invention realizes 12-axis coordinated control, and both the upper and lower stages have 6-axis adjustment capabilities. The multi-axis coordinated control mode makes the adjustment of the stage in various directions more flexible, which can better adapt to the detection needs of optical components with different shapes and characteristics, and improve detection efficiency.

[0088] This invention features unique vertical upward and vertical downward detection functions, enabling the detection of 300mm large-diameter optical components. The vertical detection method ensures that the detection state is consistent with the final usage state of the optical component, avoiding errors introduced by the difference between the detection method and the usage method, thereby improving the accuracy and reliability of the detection data.

[0089] The upper and lower stages of this invention are both designed with mirrored upper and lower surfaces, so that optical elements can be installed on either the upper or lower surface of the stage, making it more versatile and able to meet the installation requirements of different types of optical elements.

[0090] This invention employs a dual-stage design, which, compared to conventional single-stage solutions, not only enables conventional optical surface shape detection but also allows for various detection tasks such as radius of curvature measurement, multi-surface measurement, splicing detection, and calibration.

[0091] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0092] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. It should be noted that those skilled in the art can make several improvements and modifications to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims

1. A vertical interferometric detection device for optical elements, characterized in that, include: Vibration isolation modules (1) are arranged at relatively equal intervals; The bracket (2) is connected between the vibration isolation modules (1), and the bracket (2) is provided with a first top plate (3) and a first bottom plate (4) at its upper and lower ends respectively. A drive unit is mounted on the bracket (2); The upper stage (5) and the lower stage (6) are connected to the driving unit. The driving unit realizes the Z-axis movement and Rx and Ry tilt angle adjustment of the upper stage (5) and the lower stage (6). The upper stage (5) and the lower stage (6) are provided with trays for placing optical components. The moving unit is provided on both the upper loading platform (5) and the lower loading platform (6). The moving unit realizes the X-axis and Y-axis translation and Z-axis rotation of the tray. The upper optical system (7) and the upper two-dimensional adjustment frame (8) are provided on the upper surface of the first top plate (3) and the upper two-dimensional adjustment frame (8) are provided on the lower surface of the first top plate (3). The lower optical system (9) and the lower two-dimensional adjustment frame (10) are provided. The lower optical system (9) is located on the lower surface of the first base plate (4), and the lower two-dimensional adjustment frame (10) is located on the upper surface of the first base plate (4). Both the upper two-dimensional adjustment frame (8) and the lower two-dimensional adjustment frame (10) are used to place the standard mirror.

2. The vertical interferometric detection device for optical elements according to claim 1, characterized in that, The drive unit includes a first drive mechanism and a second drive mechanism, wherein the first drive mechanism includes: The first lead screw guide rail (11) is rotatably disposed on the left side of the bracket (2). The first lead screw guide rail (11) is provided with a first nut seat. The left side of the upper platform (5) is connected to the first nut seat. The second lead screw guide rail (12) and the third lead screw guide rail (13) are rotatably mounted on the right side of the bracket (2). The second lead screw guide rail (12) is provided with a second nut seat, and the third lead screw guide rail (13) is provided with a third nut seat. The right side of the upper platform (5) is connected to the second nut seat and the third nut seat.

3. A vertical interferometric detection device for optical elements according to claim 2, characterized in that, The second drive mechanism includes: The fourth lead screw guide (14) is rotatably mounted on the left side of the bracket (2). The fourth lead screw guide (14) is provided with a fourth nut seat. The right side of the download platform (6) is connected to the fourth nut seat. The fifth lead screw guide rail (15) and the sixth lead screw guide rail (16) are rotatably mounted on the left side of the bracket (2). The fifth lead screw guide rail (15) is provided with a fifth nut seat, and the sixth lead screw guide rail (16) is provided with a sixth nut seat. The left side of the download platform (6) is connected to the fifth nut seat and the sixth nut seat.

4. A vertical interferometric detection device for optical elements according to claim 3, characterized in that: The drive unit also includes a drive motor, which enables the rotation of the first lead screw guide (11), the second lead screw guide (12), the third lead screw guide (13), the fourth lead screw guide (14), and the fifth lead screw guide (15).

5. A vertical interferometric detection device for optical elements according to claim 4, characterized in that: The travel of each lead screw guide rail is not less than 1800mm, and the stepping resolution of the drive motor is ≤20nm, and the feedback resolution is ≤1nm.

6. A vertical interferometric detection device for optical elements according to claim 5, characterized in that: Each lead screw guide is equipped with a grating ruler, and each nut seat is equipped with a grating reading head.

7. A vertical interferometric detection device for optical elements according to claim 1, characterized in that: The moving unit includes a translation mechanism, which includes an X-axis lead screw (17) and an X-axis motor (18) to realize the X-axis movement of the pallet; the translation mechanism also includes a Y-axis lead screw (19) and a Y-axis motor (20) to realize the Y-axis movement of the pallet.

8. A vertical interferometric detection device for optical elements according to claim 7, characterized in that: The moving unit also includes a worm gear mechanism, which enables the tray to rotate.

9. A vertical interferometric detection device for optical elements according to claim 1, characterized in that: The tray is provided with a hollow hole with a diameter of 420mm. The upper and lower surfaces of the upper loading platform (5) and the lower loading platform (6) are mirror images.

10. A vertical interferometric detection device for optical elements according to claim 1, characterized in that, It also includes a six-channel precision measurement unit (21), which is located on the first top plate (3).

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