Method for detecting content and distribution of silane on surface of copper foil through AFM-IR

Abstract

The invention provides a method for detecting the content and distribution of silane on the surface of a copper foil through AFM-IR. The method comprises the following steps: 1) acquiring a 770-1800cm <-1 > nanometer infrared spectrum at any point on the surface of a copper foil coated with a silane coupling agent by adopting AFM-IR, determining that the characteristic peaks of Si-O on the surface of the copper foil coated with the silane coupling agent are 1020cm <-1 > and 1100cm <-1 >, randomly selecting a test area on the surface of the copper foil coated with the silane coupling agent, fixing the wavelength of a laser as the absorption peak of Si-O, and determining the wavelength of the laser as the absorption peak of Si-O; performing point-by-point scanning in the test area, and simultaneously obtaining a morphology graph and an infrared absorption graph of the surface of the copper foil coated with the silane coupling agent through double-frequency detection; 2) drawing the infrared intensity of each point in the test area in the step 1) through software to obtain the spatial distribution condition of the wavelength in the test area; and averaging the infrared intensities of all positions in the test plane graph to obtain the average infrared intensity of a specific wavelength in the test area, and adding the average infrared intensities of 1020 cm <-1 > and 1100 cm <-1 > to obtain the relative content of the silane coupling agent on the surface of the copper foil coated with the silane coupling agent.

Description

Technical Field

[0001] The invention relates to a method for detecting the content and distribution of silane coupling agents on the surface of a metal foil using atomic force microscope infrared spectroscopy (AFM-IR), and in particular to a method for detecting the content and distribution of silane coupling agents on the surface of a copper foil using AFM-IR. Background Art

[0002] Silane is coated on the surface of copper foil. The silane coupling agent is hydrolyzed to form silanol groups, which undergo condensation reactions with the hydroxyl groups in the copper foil's surface oxide layer. At the same time, the organic end of the silane will bond to the resin substrate through chemical bonds or intermolecular forces, achieving molecular-level bridging of the inorganic-organic interface. The thickness of the silane coupling agent can significantly affect the copper foil's peel strength, oxidation resistance, high temperature resistance, and corrosion resistance. In the past, in-situ infrared ATR, fluorescent X-ray, XPS, and electrochemical methods were used to characterize silane coupling agents on the surface of metal foils (aluminum foil, copper foil, silver foil, gold foil, etc.). These methods characterize the composition of specific areas or quantify certain elements, but cannot analyze their content on the copper foil surface or directly observe their distribution in 3D topography.

[0003] Although the prior art CN 114199806 B reports a method for detecting the distribution of organic matter on the surface of micro-nano rough copper foil using AFM-IR, and the relative intensity of the carbonyl characteristic peak of silane represents its relative thickness, the carbonyl group may be a contamination peak on the copper foil surface and cannot accurately represent the relative thickness of silane. Summary of the Invention

[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a method for detecting the content and distribution of silane on the surface of copper foil by AFM-IR, by identifying the Si-O bond of silane at 1020 cm -1 and 1100cm -1 The peak intensity is used to characterize the relative content and distribution of the silane coupling agent.

[0005] In order to more accurately detect the distribution and content of silane coupling agents on the surface of copper foil, the present invention provides a method for detecting the content and distribution of silane on the surface of copper foil using AFM-IR, the method comprising the following steps:

[0006] 1) Place the copper foil coated with silane coupling agent on a glass slide and fix it on the sample stage. Use AFM-IR to collect 770-1800 cm -1 Nano-infrared spectroscopy confirmed that the characteristic peak of Si-O on the surface of copper foil coated with silane coupling agent is 1020 cm -1 and 1100cm -1, randomly select a test area on the surface of the copper foil coated with silane coupling agent, fix the laser wavelength to the absorption peak of Si-O, scan the test area point by point, and obtain the topography and infrared absorption map of the copper foil surface coated with silane coupling agent simultaneously through dual-frequency detection;

[0007] 2) Use software to plot the infrared intensity of each point in the test area described in step 1) to obtain the infrared intensity at 1020 cm -1 and 1100cm -1 The spatial distribution of the wavelength in the test area; the average value of the infrared intensity at all positions in the test area is obtained to obtain the infrared intensity at 1020cm in the test area. -1 and 1100cm -1 The average infrared intensity of the wavelength is 1020cm -1 and 1100cm -1 The relative content of the silane coupling agent on the surface of the copper foil coated with the silane coupling agent was obtained by adding the average infrared intensities.

[0008] By adopting the above technical solution, the beneficial effects of the present invention are:

[0009] The present invention uses AFM-IR to identify the 1020cm -1 and 1100cm -1 The sum of the average peak intensities is used to characterize the relative content of the silane coupling agent. The test is performed at 1020 cm -1 and 1100cm -1 Infrared imaging at the corresponding infrared absorption wavelength can obtain the distribution of the silane coupling agent on the surface, which can effectively avoid the influence of copper foil contaminants on the silane coupling agent content on the copper foil surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 AFM-IR was used to detect Example 9 at a wavelength of 1020 cm -1 and 1100cm -1 3D infrared spectrum of

[0011] Figure 2 For comparative examples 1 to 9, different silane concentrations and 1720 cm -1 The relationship between the peak intensity and the mean value;

[0012] Figure 3 The graphs are relationship curves between different silane concentrations and the sum of the average Si-O bond peak intensities for Examples 1 to 9. DETAILED DESCRIPTION

[0013] Hereinafter, an embodiment of the method for detecting the silane content and distribution on the surface of copper foil using AFM-IR provided by the present invention will be described in detail.

[0014] The "ranges" disclosed herein are defined in terms of lower and upper limits, where a given range is defined by selecting a lower limit and an upper limit, and the selected lower and upper limits define the boundaries of the particular range. Ranges defined in this manner can be inclusive or exclusive of the end values ​​and can be combined arbitrarily, i.e., any lower limit can be combined with any upper limit to form a range. For example, if ranges of 60 to 120 and 80 to 110 are listed for a particular parameter, it is understood that ranges of 60 to 110 and 80 to 120 are also contemplated. Furthermore, if minimum range values ​​of 1 and 2 are listed, and if maximum range values ​​of 3, 4, and 5 are listed, the following ranges are all contemplated: 1 to 3, 1 to 4, 1 to 5, 2 to 3, 2 to 4, and 2 to 5. In this application, unless otherwise indicated, the numerical range "a to b" is a shorthand representation of any combination of real numbers between a and b, where a and b are both real numbers. For example, a numerical range of "0-5" indicates that all real numbers between "0-5" are listed herein, and "0-5" is simply an abbreviation for these numerical combinations. Furthermore, when a parameter is expressed as an integer ≥ 2, this is equivalent to disclosing that the parameter is, for example, an integer of 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, etc.

[0015] In order to more accurately detect the distribution and content of silane coupling agent on the surface of copper foil, the present invention identifies the Si-O bond of silane at 1020 cm -1 and 1100cm -1 The sum of the average peak intensities is used to characterize the relative content of the silane coupling agent on the copper foil surface. On this basis, the present invention is completed.

[0016] The present invention provides a method for detecting the silane content and distribution on the surface of copper foil using AFM-IR, the method comprising the following steps:

[0017] 1) Place the copper foil coated with silane coupling agent on a glass slide and fix it on the sample stage. Use AFM-IR to collect 770-1800 cm -1 Nano-infrared spectroscopy confirmed that the characteristic peak of Si-O on the surface of copper foil coated with silane coupling agent is 1020 cm -1 and 1100cm -1 , randomly select a test area on the surface of the copper foil coated with silane coupling agent, fix the laser wavelength to the absorption peak of Si-O, scan the test area point by point, and obtain the topography and infrared absorption map of the copper foil surface coated with silane coupling agent simultaneously through dual-frequency detection;

[0018] 2) Use software to plot the infrared intensity of each point in the test area described in step 1) to obtain the infrared intensity at 1020 cm -1 and 1100cm -1The spatial distribution of wavelengths in the test area; the average infrared intensity of all positions in the test area is calculated to obtain the average infrared intensity of a specific wavelength in the test area, and the average infrared intensity of 1020cm -1 and 1100cm -1 The average infrared intensity of the three samples was added to obtain the relative content of the silane coupling agent on the surface of the copper foil coated with the silane coupling agent.

[0019] In the method for detecting the silane content and distribution on the surface of copper foil by AFM-IR provided by the present invention, step 1) is to place the copper foil coated with silane coupling agent on a glass slide and then fix it on a sample stage, and use AFM-IR to collect 770-1800 cm at any point on the surface of the copper foil coated with silane coupling agent. -1 Nano-infrared spectroscopy confirmed that the characteristic peak of Si-O on the surface of copper foil coated with silane coupling agent is 1020 cm -1 and 1100cm -1 , randomly select a test area on the surface of the copper foil coated with silane coupling agent, fix the laser wavelength to the absorption peak of Si-O, scan the test area point by point, and obtain the topography and infrared absorption map of the copper foil surface coated with silane coupling agent simultaneously through dual-frequency detection. Specifically:

[0020] In step 1) of the present invention, the method for preparing the copper foil coated with a silane coupling agent comprises: coating the silane coupling agent on the surface of the copper foil, and drying to obtain the copper foil coated with a silane coupling agent.

[0021] In some embodiments, the surface roughness Rz of the copper foil is 0.1 μm to 5 μm. Alternatively, the surface roughness Rz of the copper foil can be, for example, 0.1 μm to 3 μm, 3 μm to 5 μm, 0.1 μm to 1 μm, 1 μm to 3 μm, 3 μm to 5 μm, etc.

[0022] In some embodiments, different concentrations of silane coupling agent are coated on different copper foils to obtain silane coupling agent-coated copper foils. In specific embodiments, the concentrations of the silane coupling agent are 0.1 g / L, 0.2 g / L, 0.4 g / L, 0.6 g / L, 0.8 g / L, 1 g / L, 1.5 g / L, and 2 g / L, respectively.

[0023] In some embodiments, the silane coupling agent is selected from one or more of 3-(methacryloyloxy)propyltrimethoxysilane coupling agent, aminopropyltriethoxysilane coupling agent, acrylic silane coupling agent, vinyl silane coupling agent and mercapto silane coupling agent.

[0024] In some embodiments, the drying temperature is 110-130° C., optionally, the drying temperature may be, for example, 110-120° C., 120-130° C., etc. The drying time is 1-3 minutes, optionally, the drying time may be, for example, 1-2 minutes or 2-3 minutes.

[0025] In some embodiments, the side length of the copper foil is 1.5-2.5 cm, for example, 1.5-2 cm or 2-2.5 cm, etc. Preferably, the copper foil is cut into small squares with a side length of 2 cm.

[0026] In some embodiments, a copper foil coated with a silane coupling agent is adhered to a glass slide.

[0027] In step 1) of the present invention, the size of the test area is (1-25) μm×(1-25) μm, which can be (1-5) μm×(1-5) μm, (5-25) μm×(5-25) μm, (5-10) μm×(5-10) μm, (10-15) μm×(10-15) μm, (15-20) μm×(15-20) μm, or (20-25) μm×(20-25) μm, etc. Preferably, a test area of ​​5 μm×5 μm is randomly selected on the copper foil coated with the silane coupling agent.

[0028] In the method for detecting the silane content and distribution on the surface of copper foil by AFM-IR provided by the present invention, step 2) is to plot the infrared intensity of each point in the test area described in step 1) by software to obtain the infrared intensity at 1020 cm -1 and 1100cm -1 The spatial distribution of the wavelength in the test area; the average infrared intensity of all positions in the test area is calculated to obtain the average infrared intensity of a specific wavelength in the test area, and the average infrared intensity of 1020cm -1 and 1100cm -1 The average infrared intensity of the three samples was added to obtain the relative content of the silane coupling agent on the surface of the copper foil coated with the silane coupling agent.

[0029] In the AFM-IR method for detecting the silane content and distribution on the copper foil surface provided by the present invention, when the concentration of the coated silane coupling agent is below 0.8 g / L, the sum of the mean values ​​of the Si-O peak intensities is proportional to the silane content on the copper foil surface.

[0030] The principle of atomic force microscopy-infrared spectroscopy (AFM-IR): AFM-IR combines atomic force microscopy with infrared spectroscopy, utilizing photothermally induced resonance technology for microbend analysis. An infrared beam is irradiated onto the sample, causing rapid thermal expansion. The ultra-sensitive AFM microscope probe resonates with the sample, and the amplitude signal of the resonant oscillation is extracted using Fourier transform. By establishing a relationship between the amplitude and the wavelength of the light source, a local infrared absorption spectrum can be obtained. A fixed-wavelength pulsed infrared irradiation is used to irradiate the sample, and a probe is used to collect infrared absorption information at that wavelength. Infrared absorption imaging is performed to obtain information on the distribution of chemical groups represented by that wavelength on the sample surface.

[0031] The beneficial effects of the present invention are further illustrated below with reference to the examples.

[0032] In order to make the invention objectives, technical solutions and beneficial technical effects of the present invention clearer, the present invention is further described in detail below with reference to the examples. However, it should be understood that the examples of the present invention are only for the purpose of explaining the present invention and are not intended to limit the present invention, and the examples of the present invention are not limited to the examples given in the specification. In the examples, where no specific experimental conditions or operating conditions are specified, the products were prepared under conventional conditions or under the conditions recommended by the material supplier.

[0033] Furthermore, it should be understood that the one or more method steps mentioned in the present invention do not exclude the presence of other method steps before or after the combination step, or the insertion of other method steps between these explicitly mentioned steps, unless otherwise specified. It should also be understood that the combination connection relationship between one or more devices / apparatuses mentioned in the present invention does not exclude the presence of other devices / apparatuses before or after the combination device / apparatus, or the insertion of other devices / apparatuses between two explicitly mentioned devices / apparatuses, unless otherwise specified. Furthermore, unless otherwise specified, the numbering of each method step is merely a convenient tool for identifying each method step, and is not intended to limit the order of arrangement of each method step or to define the scope of the present invention. Changes or adjustments to their relative relationships, without substantially changing the technical content, should also be considered within the scope of the present invention.

[0034] In the following examples, unless otherwise specified, various raw materials of the present invention can be purchased commercially or prepared according to conventional methods in the art.

[0035] The embodiments of the present invention were performed on an IconIR instrument, and infrared spectra and infrared imaging were collected by tapping infrared mode (Tapping AFM-IR mode).

[0036] The silane coupling agent is 3-(methacryloyloxy)propyltrimethoxysilane coupling agent, and the manufacturer is McLean.

[0037] Example 1

[0038] A copper foil with a surface roughness Rz of 0.1 μm-5 μm was selected. 3-(Methacryloyloxy)propyltrimethoxysilane coupling agent was not applied to the surface. The copper foil was then dried at 120°C for 2 minutes and cut into squares with a side length of 2 cm. The contaminated copper foil was tested. A 5 μm × 5 μm test area was randomly selected on the sample surface. The laser wavelength was fixed at 1020 cm. -1 and 1100cm -1 The test area is scanned point by point, and the surface topography and infrared absorption intensity of the copper foil are simultaneously obtained through dual-frequency detection.

[0039] Example 2

[0040] The method is basically the same as Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 0.1 g / L is coated on the surface.

[0041] Example 3

[0042] The method is basically the same as Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 0.2 g / L is coated on the surface.

[0043] Example 4

[0044] The method is basically the same as Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 0.4 g / L is coated on the surface.

[0045] Example 5

[0046] The method is basically the same as Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 0.6 g / L is coated on the surface.

[0047] Example 6

[0048] The method is basically the same as Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 0.8 g / L is coated on the surface.

[0049] Example 7

[0050] The method is basically the same as Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 1.0 g / L is coated on the surface.

[0051] Example 8

[0052] The method is basically the same as Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 1.5 g / L is coated on the surface.

[0053] Example 9

[0054] The method is basically the same as Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 2.0 g / L is coated on the surface.

[0055] Comparative Example 1

[0056] A copper foil with a surface roughness Rz of 0.1 μm-5 μm was selected. 3-(Methacryloyloxy)propyltrimethoxysilane coupling agent was not applied to the surface. The copper foil was then dried at 120°C for 2 minutes and cut into squares with a side length of 2 cm. The contaminated copper foil was tested. A 5 μm × 5 μm test area was randomly selected on the sample surface. The laser wavelength was fixed at 1720 cm -1 The test area is scanned point by point, and the surface topography and infrared absorption intensity of the copper foil are simultaneously obtained through dual-frequency detection.

[0057] Comparative Example 2

[0058] The method is basically the same as Comparative Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 0.1 g / L is coated on the surface.

[0059] Comparative Example 3

[0060] The method is basically the same as Comparative Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 0.2 g / L is coated on the surface.

[0061] Comparative Example 4

[0062] The method is basically the same as Comparative Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 0.4 g / L is coated on the surface.

[0063] Comparative Example 5

[0064] The method is basically the same as Comparative Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 0.6 g / L is coated on the surface.

[0065] Comparative Example 6

[0066] The method is basically the same as Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 0.8 g / L is coated on the surface.

[0067] Comparative Example 7

[0068] The method is basically the same as Comparative Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 1.0 g / L is coated on the surface.

[0069] Comparative Example 8

[0070] The method is basically the same as Comparative Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 1.5 g / L is coated on the surface.

[0071] Comparative Example 9

[0072] The method is basically the same as Comparative Example 1, except that a 3-(methacryloyloxy)propyltrimethoxysilane coupling agent having a concentration of 2.0 g / L is coated on the surface.

[0073] Table 1

[0074]

[0075] Table 2

[0076]

[0077] In combination with Examples 1 to 9, the infrared intensity of each point in the measured area on the copper foil surface was plotted using Analysis Studio software to obtain a 3D infrared distribution map of the wavelength in the copper foil test area. In the 3D infrared distribution map, yellow-red-black represents the absorption of the wave number from strong to weak. The darker the color, the smaller the relative intensity, indicating that the silane coupling agent corresponding to the wavelength on the copper foil surface is less accumulated, and the yellower the color, the thicker the silane coupling agent accumulation at the corresponding position on the copper foil surface.

[0078] Table 1 shows the peak intensity (1020 cm) of Si-O bond of different silane coupling agent concentrations in Examples 1 to 9. -1 and 1100cm -1 ) corresponding to the mean and sum of means.

[0079] As shown in Table 2, the 1720 cm-1 coatings of Examples 1 to 9 with different silane coupling agent concentrations were used. -1 Mean peak intensity.

[0080] like Figure 1 The absorption wavelength of Example 9 is 1020cm -1 and 1100cm -1 The infrared spectrum of the silane coupling agent characterizes the spatial distribution state.

[0081] like Figure 2 The results of the comparative examples 1 to 9 are as follows: -1The relationship graph of peak intensity and mean value shows a poor linear relationship, which indicates that the pollutants have a great influence on the test results. Therefore, when there are pollutants on the copper foil surface, the relative content and distribution of silane on the copper foil surface cannot be accurately represented when testing the infrared wavelength of carbonyl.

[0082] like Figure 3 The peak intensity (1020 cm) of different silane concentrations and Si-O bonds in Examples 1 to 9 -1 and 1100cm -1 ) shows a relationship curve between the sum of the mean Si-O peak intensities and the total Si-O peak intensity. Without silane coating, the total Si-O peak intensity is almost zero. When the silane coating concentration is between 0 and 0.8 g / L, the concentration of the silane coupling agent applied is linearly correlated with the mean peak intensity. The mean peak intensity corresponds to the silane coupling agent content on the copper foil surface, indicating that the concentration of the silane coupling agent applied is directly proportional to the silane coupling agent content on the copper foil surface. This may be because when the coating concentration is below 0.8 g / L, the silane coupling agent coating on the copper foil reaches a saturated state, fully forming a silane coupling agent-copper bonding layer. When the coating concentration is between 0.8 and 2 g / L, the total peak intensity shows a slow increase. This may be because the silane concentration is too high, preventing the complete formation of the silane coupling agent-copper bonding layer. By comparing the peak intensity of the Si-O bond with the intensity of the carbonyl group, it was found that the peak intensity of the Si-O bond can more accurately characterize the spatial distribution and thickness of the silane coupling agent. The mean sum of the peak intensities is proportional to the content of silane on the copper foil surface. By fixing all test conditions, the relative content can be accurately obtained based on the Si-O peak intensity.

[0083] In summary, the present invention effectively overcomes various shortcomings of the prior art and has high industrial utilization value.

[0084] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form or substance. It should be pointed out that ordinary technicians in this technical field can make several improvements and supplements without departing from the method of the present invention. These improvements and supplements should also be regarded as the scope of protection of the present invention. Any equivalent changes, modifications and evolutions made by technicians familiar with this profession without departing from the spirit and scope of the present invention by using the technical content disclosed above are all equivalent embodiments of the present invention; at the same time, any equivalent changes, modifications and evolutions made to the above embodiments based on the essential technology of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A method for detecting silane content and distribution on the surface of copper foil using AFM-IR, characterized in that: The method comprises the following steps: 1) Place the copper foil coated with silane coupling agent on a glass slide and fix it on the sample stage. Use AFM-IR to collect 770-1800 cm -1 Nano-infrared spectroscopy confirmed that the characteristic peak of Si-O on the surface of copper foil coated with silane coupling agent is 1020 cm -1 and 1100cm -1 , randomly select a test area on the surface of the copper foil coated with silane coupling agent, fix the laser wavelength to the absorption peak of Si-O, scan the test area point by point, and obtain the topography and infrared absorption map of the copper foil surface coated with silane coupling agent simultaneously through dual-frequency detection; 2) Use software to plot the infrared intensity of each point in the test area described in step 1) to obtain the infrared intensity at 1020 cm -1 and 1100cm -1 The spatial distribution of the wavelength in the test area; the average value of the infrared intensity at all positions in the test area is obtained to obtain the infrared intensity at 1020cm in the test area. -1 and 1100cm -1 The average infrared intensity of the wavelength is 1020cm -1 and 1100cm -1 The relative content of the silane coupling agent on the surface of the copper foil coated with the silane coupling agent was obtained by adding the average infrared intensities.

2. The method for detecting silane content and distribution on the surface of copper foil by AFM-IR according to claim 1, characterized in that: In step 1), the method for preparing the copper foil coated with a silane coupling agent comprises: coating the silane coupling agent on the surface of the copper foil, and drying to obtain the copper foil coated with the silane coupling agent.

3. The method for detecting silane content and distribution on the surface of copper foil by AFM-IR according to claim 2, characterized in that: The surface roughness Rz of the copper foil is 0.1 μm to 5 μm.

4. The method for detecting silane content and distribution on the surface of copper foil by AFM-IR according to claim 2, characterized in that: Silane coupling agents of different concentrations were coated on different copper foils to obtain copper foils coated with silane coupling agents.

5. The method for detecting silane content and distribution on the surface of copper foil by AFM-IR according to claim 2, characterized in that: The concentrations of the silane coupling agent are 0.1 g / L, 0.2 g / L, 0.4 g / L, 0.6 g / L, 0.8 g / L, 1.0 g / L, 1.5 g / L and 2.0 g / L, respectively.

6. The method for detecting silane content and distribution on the surface of copper foil by AFM-IR according to claim 2, characterized in that: When the concentration of the coated silane coupling agent is below 0.8 g / L, the sum of the mean values ​​of the Si-O peak intensities is proportional to the content of silane on the copper foil surface.

7. The method for detecting silane content and distribution on the surface of copper foil by AFM-IR according to claim 2, characterized in that: The silane coupling agent is selected from one or more of 3-(methacryloyloxy)propyltrimethoxysilane coupling agent, aminopropyltriethoxysilane coupling agent, acrylic silane coupling agent, vinyl silane coupling agent and mercapto silane coupling agent.

8. The method for detecting silane content and distribution on the surface of copper foil by AFM-IR according to claim 2, characterized in that: The drying temperature is 110-130°C and the drying time is 1-3 minutes.

9. The method for detecting silane content and distribution on the surface of copper foil by AFM-IR according to claim 1, characterized in that: In step 1), the side length of the copper foil is 1.5-2.5 cm.

10. The method for detecting silane content and distribution on the surface of copper foil by AFM-IR according to claim 1, characterized in that: In step 1), the size of the test area is (1-25) μm×(1-25) μm.

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