A three-dimensional displacement measuring device and method, program product, measuring apparatus

Abstract

The application provides a three-dimensional displacement measurement device and method, a program product and a measurement device. The device comprises a magnetic field measurement end, a plurality of Hall sensors and a high-permeability material. The plurality of Hall sensors are located on a first plane of the high-permeability material. The device further comprises a magnetic field generation end, which comprises four permanent magnets. The four permanent magnets are arranged in a cross shape on four sides of the magnetic field measurement end where no Hall sensor is arranged. The magnetic poles of two oppositely arranged permanent magnets are opposite. A first direction where the two oppositely arranged permanent magnets are located and a second direction where the other two permanent magnets are located form a second plane. The second plane is parallel to the first plane. The measurement device is electrically connected to the Hall sensors. When the magnetic field measurement end and the magnetic field generation end move relative to each other in a three-dimensional plane formed by the second plane and a third direction, the measurement device receives output voltage values of the Hall sensors and performs three-dimensional displacement measurement according to the output voltage values. The third direction is perpendicular to the first plane.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision device processing, in particular to a three-dimensional displacement measurement device and method, program product and measurement equipment. BACKGROUND

[0002] In the fields of medical treatment and industry, the core goal of monitoring the overall three-dimensional displacement of a precision mechanical structure or device is to ensure sub-millimeter positioning accuracy of instrument movement or part assembly, and to avoid processing problems caused by accidental deviation or vibration of the device. The key to this technology is to achieve sub-millimeter precision control through multi-sensor fusion and real-time feedback. Currently, optical navigation systems and joint encoders are mainly used to monitor the displacement of precision mechanical structures. However, both optical navigation systems and joint encoders result in low accuracy of three-dimensional displacement monitoring. SUMMARY

[0003] The purpose of the embodiments of the present application is to provide a three-dimensional displacement measurement device and method, program product and measurement equipment to solve the technical problem of low accuracy of three-dimensional displacement monitoring in the prior art.

[0004] In a first aspect, the embodiments of the present application provide a three-dimensional displacement measurement device, comprising: a magnetic field measurement end comprising a high-permeability material and a plurality of Hall sensors, the plurality of Hall sensors being located on a first plane of the high-permeability material, the Hall sensors being configured to sense a magnetic field perpendicular to the surface of the Hall sensors; a magnetic field generation end comprising four permanent magnets, the four permanent magnets being arranged in a cross shape on four sides of the magnetic field measurement end where the Hall sensors are not arranged, and the magnetic poles of two oppositely arranged permanent magnets being opposite, a first direction in which the two oppositely arranged permanent magnets are located and a second direction in which the other two permanent magnets are located forming a second plane, the second plane being parallel to the first plane; and a measurement device electrically connected to the Hall sensors, configured to receive output voltage values of the Hall sensors when the magnetic field measurement end and the magnetic field generation end move relative to each other in a three-dimensional plane formed by the second plane and a third direction perpendicular to the first plane, and perform three-dimensional displacement measurement according to the output voltage values.

[0005] In the above scheme, the magnetic field measurement end and the magnetic field generation end are provided to detect the three-dimensional displacement of a precision instrument or device through the Hall sensors, and the high-permeability material is used to concentrate the magnetic field to improve the sensitivity of the Hall sensors, so that the three-dimensional displacement can be accurately measured, and the accuracy of three-dimensional displacement monitoring can be improved.

[0006] In an optional embodiment, the number of Hall sensors is four, arranged in a cross shape on the highly permeable magnetic material. In this scheme, the cross-shaped arrangement allows the four Hall sensors to correspond to magnetic field gradient changes in two directions, thereby enhancing the symmetry detection of magnetic field changes and achieving high anti-interference performance without the need for complex algorithms.

[0007] In an optional implementation, the two opposing permanent magnets generate magnetic field strengths of equal intensity, with the magnetic field strength generated by the permanent magnet with its N pole facing the high-permeability material being greater than that generated by the permanent magnet with its S pole facing the high-permeability material. In this scheme, by ensuring that the magnetic field strengths generated by the two opposing permanent magnets are equal, and that the magnetic field strength generated by the permanent magnet with its N pole facing the high-permeability material is greater than that generated by the permanent magnet with its S pole facing the high-permeability material, the accuracy of three-dimensional displacement measurement is improved.

[0008] Secondly, embodiments of this application provide a three-dimensional displacement measurement method, applied to the measuring device in the three-dimensional displacement measuring apparatus as described in any one of the first aspects. The three-dimensional displacement measurement method includes: receiving the output voltage values ​​of the four Hall sensors when the magnetic field measuring end and the magnetic field generating end move relative to each other in the three-dimensional plane; determining a first displacement parameter, a second displacement parameter, and a third displacement parameter corresponding to the Hall sensors based on the output voltage values, wherein the first displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along the third direction, the second displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along the first direction and the third direction, and the third displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along the second direction and the third direction; and determining the displacement amount of the magnetic field measuring end in the first direction, the second direction, and the third direction based on the first displacement parameter, the second displacement parameter, and the third displacement parameter.

[0009] In the above scheme, based on the first displacement parameter that is sensitive only to the third direction, the second displacement parameter that is sensitive to both the first and third directions, and the third displacement parameter that is sensitive to both the second and third directions, the three-dimensional displacement can be accurately separated, thereby quickly and accurately determining the displacement in the three directions and improving the accuracy of displacement monitoring.

[0010] In an optional implementation, determining the displacement of the magnetic field measuring end in the first direction, the second direction, and the third direction based on the first displacement parameter, the second displacement parameter, and the third displacement parameter includes: determining a first displacement based on the first displacement parameter and a first relationship, wherein the first displacement represents the displacement of the magnetic field measuring end along the third direction; determining a fourth displacement parameter based on the first displacement and a second relationship, and determining a fifth displacement parameter based on the first displacement and a third relationship, wherein the fourth displacement parameter represents the displacement amplitude of the magnetic field measuring end along the third direction in the second displacement parameter, and the fifth displacement parameter represents the displacement amplitude of the magnetic field measuring end along the third direction in the third displacement parameter; determining a second displacement based on the second displacement parameter, the fourth displacement parameter, and a fourth relationship, and determining a third displacement based on the third displacement parameter, the fifth displacement parameter, and a fifth relationship, wherein the second displacement represents the displacement of the magnetic field measuring end along the first direction, and the third displacement represents the displacement of the magnetic field measuring end along the second direction; and determining the displacement in the first direction, the second direction, and the third direction based on the first displacement, the second displacement, and the third displacement. In the above scheme, by decoupling in stages, coupling errors in three-dimensional displacement can be avoided and the dependence on sensor linearity can be reduced, thereby improving the accuracy of three-dimensional displacement.

[0011] In an optional implementation, the output voltage value includes a first voltage value, a second voltage value, a third voltage value, and a fourth voltage value. Hall sensors corresponding to the first and third voltage values ​​are positioned along the first direction. Determining the first, second, and third displacement parameters corresponding to the Hall sensors based on the output voltage values ​​includes: determining the sum of the absolute values ​​of the differences between the first and third voltage values ​​and the absolute values ​​of the differences between the second and fourth voltage values ​​as the first displacement parameter; determining the absolute value of the difference between the first and third voltage values ​​as the second displacement parameter; and determining the absolute value of the difference between the second and fourth voltage values ​​as the third displacement parameter. In the above scheme, through two differential operations, the displacement in the first direction and the interference from the second direction on the third-direction detection are effectively canceled out, thereby improving the accuracy of the third-direction displacement measurement.

[0012] In an optional implementation, the output voltage value includes a first voltage value, a second voltage value, a third voltage value, and a fourth voltage value, wherein the Hall sensors corresponding to the first voltage value and the third voltage value are disposed along the first direction; determining the first displacement parameter, the second displacement parameter, and the third displacement parameter corresponding to the Hall sensor based on the output voltage value includes: determining the difference between the absolute value of the sum of the first voltage value and the third voltage value, and the absolute value of the sum of the first voltage value and the second voltage value, as the first displacement parameter; determining the difference between the absolute value of the first voltage value and the third voltage value as the second displacement parameter; and determining the difference between the absolute value of the second voltage value and the fourth voltage value as the third displacement parameter.

[0013] Thirdly, embodiments of this application provide a computer program product, including computer program instructions, which are read and executed by a processor to perform the three-dimensional displacement measurement method as described in the second aspect.

[0014] Fourthly, embodiments of this application provide a measuring device, including: a processor, a memory, and a bus; the processor and the memory communicate with each other via the bus; the memory stores computer program instructions that can be executed by the processor, and the processor can execute the three-dimensional displacement measurement method as described in the second aspect by calling the computer program instructions.

[0015] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, embodiments of this application are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of a three-dimensional displacement measuring device provided in an embodiment of this application;

[0018] Figure 2 A top view of a three-dimensional displacement measuring device provided in an embodiment of this application;

[0019] Figure 3 A side view of a three-dimensional displacement measuring device provided in an embodiment of this application;

[0020] Figure 4 A flowchart of a three-dimensional displacement measurement method provided in this application embodiment;

[0021] Figure 5 This is a structural block diagram of a measuring device provided in an embodiment of this application.

[0022] Icons: 10-Three-dimensional displacement measuring device; 110-Magnetic field measuring end; 111-High permeability material; 112-Hall sensor; 120-Magnetic field generating end; 121-Permanent magnet. Detailed Implementation

[0023] Three-dimensional displacement monitoring technology can effectively avoid machining problems in precision mechanical structures or devices. Currently, the main technologies used for three-dimensional displacement monitoring include optical navigation systems and joint encoder technology. Optical navigation systems primarily use infrared reflective markers installed on precision mechanical structures, capturing their three-dimensional coordinates with a high-frame-rate infrared camera to track displacement in real time. However, infrared cameras and marker systems are costly and their field of view is easily limited. Joint encoder technology measures angles at the joints of the mechanical structure and calculates the end effector position using a kinematic model. This requires precise calibration of the mechanical structure's geometric parameters, and cumulative errors can occur over long-term use. Therefore, the accuracy of existing three-dimensional displacement monitoring technologies is relatively low.

[0024] To address the technical problems existing in the prior art, this application provides a three-dimensional displacement measuring device and a three-dimensional displacement measuring method. By installing the aforementioned three-dimensional measuring device in a precision mechanical structure or device, the displacement generated in three directions during the processing of the precision mechanical structure or device can be measured, ultimately enabling the monitoring of three-dimensional displacement changes in any mechanical structure or device requiring precise three-dimensional detection. Compared with existing optical navigation systems and joint encoder technology, the three-dimensional displacement measuring device and method provided in this application can improve the accuracy of three-dimensional displacement monitoring.

[0025] It should be noted that if the scenario only requires measuring displacement in two directions within a plane, a two-dimensional displacement measuring device and method can be used, such as a mobile phone camera or action camera. If the scenario requires measuring displacement in three directions within three-dimensional space, a three-dimensional displacement measuring device and method provided in this application embodiment can be used, such as a laparoscopic surgical robotic arm or a dental implant robot. This solution only introduces the three-dimensional displacement detection device and the three-dimensional displacement measurement method; the technical solutions in this application embodiment will be described below with reference to the accompanying drawings.

[0026] First, a three-dimensional displacement measuring device provided in an embodiment of this application is introduced. Please refer to...Figure 1 , Figure 1 This is a schematic diagram of the structure of a three-dimensional displacement measuring device provided in an embodiment of this application. The three-dimensional displacement measuring device 10 specifically includes: a magnetic field measuring end 110, a magnetic field generating end 120, and measuring equipment. Figure 1 The measuring equipment mentioned above is not shown in the diagram.

[0027] Specifically, the magnetic field measuring end 110 is used to detect the displacement of the magnetic field measuring end 110 by detecting the change in magnetic field strength when there is a relative displacement with respect to the magnetic field generating end 120. As one embodiment, the magnetic field measuring end 110 may include a highly permeable magnetic material 111 and multiple Hall sensors 112.

[0028] The high-permeability magnetic material 111 (such as soft iron, permalloy, etc.) is used to converge and deflect the magnetic field generated at the magnetic field generating end 120, thereby increasing the magnetic field strength in the area where the Hall sensor 112 is located, and thus improving the sensitivity of the Hall sensor 112 to sense the magnetic field. It should be noted that the shape and size of the high-permeability magnetic material 111 are not specifically limited in this embodiment. Those skilled in the art can make appropriate adjustments according to the actual situation. For example, the high-permeability magnetic material 111 may be a cuboid with dimensions of 400μm × 400μm × 300μm. As one implementation method, a magnet can be used.

[0029] The Hall sensor 112, based on the Hall effect, converts the magnetic field strength perpendicular to the sensing surface into a voltage signal. When the highly permeable material 111 moves with displacement, the Hall sensor 112 detects changes in magnetic field strength (e.g., an increase in the N-pole magnetic field and a decrease in the S-pole magnetic field), and the output voltage changes linearly accordingly. It should be noted that this application does not specifically limit the size and number of the multiple Hall sensors 112; those skilled in the art can make appropriate adjustments based on actual conditions. For example, the Hall sensor 112 may have dimensions of 40μm × 80μm × 6μm, and the number may be four. Since the highly permeable material 111 also has the ability to change the direction of the magnetic field, the Hall sensor 112 is used to sense magnetic fields perpendicular to the surface of the Hall sensor 112.

[0030] In this embodiment, multiple Hall sensors 112 are located on a first plane of a highly permeable magnetic material 111. For example... Figure 1As shown, when the high-permeability material 111 is a cuboid, multiple Hall sensors 112 can be located on one of the six surfaces (i.e., the first plane) of the high-permeability material 111. In one embodiment, the bottom or top of the Hall sensor 112 can be attached to the high-permeability material 111; in another embodiment, the unencapsulated Hall element can be integrally encapsulated with the high-permeability material 111; in yet another embodiment, the bottom or top of the Hall sensor 112 can be placed above the surface of the high-permeability material 111 with a certain gap.

[0031] For example, multiple Hall sensors 112 can be located on the upper surface of a highly permeable magnetic material 111 (e.g., Figure 1 At this time, the bottom of the Hall sensor 112 is in contact with the surface of the high magnetic permeability material 111; multiple Hall sensors 112 can also be located on the lower surface of the high magnetic permeability material 111, in which case the top of the Hall sensor 112 is in contact with the surface of the high magnetic permeability material 111.

[0032] It is understandable that the aforementioned magnetic field measuring end 110 can be installed at the end of a mechanical structure or device that requires precise three-dimensional detection.

[0033] The magnetic field generating end 120 is used to construct a magnetic field. In one embodiment, the magnetic field generating end 120 may include four permanent magnets 121. In this embodiment, the four permanent magnets 121 are arranged in a cross shape on the four sides of the magnetic field measuring end 110 where the Hall sensor 112 is not located. The magnetic poles of two oppositely arranged permanent magnets 121 are opposite. The first direction in which the two oppositely arranged permanent magnets 121 are located and the second direction in which the other two permanent magnets 121 are located form a second plane, which is parallel to the first plane.

[0034] Please refer to Figure 2 , Figure 2 This is a top view of a three-dimensional displacement measuring device provided in an embodiment of this application. A Hall sensor 112 is disposed on the upper surface of a high-permeability material 111, and four permanent magnets 121 are disposed on the four sides of the high-permeability material 111. The S pole of the permanent magnets 121 located above and to the right of the top view faces the magnetic field measuring end 110, and the N pole of the permanent magnets 121 located to the left and below the top view faces the magnetic field measuring end 110. The first direction (i.e., the X-axis direction) where the permanent magnets 121 located to the left and right of the top view are located, and the second direction (i.e., the Y-axis direction) where the permanent magnets 121 located above and below the top view are located, constitute a second plane.

[0035] Please refer to Figure 3 , Figure 3This is a side view of a three-dimensional displacement measuring device provided in an embodiment of this application. The plane containing multiple Hall sensors 112 is the first plane, and the plane containing four permanent magnets 121 is the second plane. The distance between the upper surface of the permanent magnet 121 and the lower surface of the high-permeability material 111 can be maintained on the order of micrometers or centimeters.

[0036] The measuring device, electrically connected to the Hall sensor 112, is used to execute the three-dimensional displacement measurement method provided in the embodiments of this application. The specific implementation of the three-dimensional displacement measurement method will be described in detail in subsequent embodiments; here, only a brief description is provided: When the magnetic field measuring end 110 and the magnetic field generating end 120 undergo relative motion within the three-dimensional plane formed by the second plane and the third direction, the measuring device receives the output voltage value of the Hall sensor 112 and performs three-dimensional displacement measurement based on the output voltage value.

[0037] like Figure 3 As shown, the third direction (i.e., the Z-axis direction) is perpendicular to the first plane. When the magnetic field measuring end 110 moves in the three-dimensional plane formed by the X-axis, Y-axis and Z-axis directions, the above motion process can be decomposed into three directional components in the X-axis, Y-axis and Z-axis directions for analysis, so as to obtain the overall displacement of the magnetic field generating end 120 in the above three-dimensional plane.

[0038] It should be noted that the relative motion between the magnetic field measuring end 110 and the magnetic field generating end 120 can refer to the magnetic field measuring end 110 being fixed while the magnetic field generating end 120 is moving, or it can refer to the magnetic field generating end 120 being fixed while the magnetic field measuring end 110 is moving. This application embodiment does not make specific limitations on this, and both can be converted into the displacement of the magnetic field measuring end 110 relative to the magnetic field generating end 120.

[0039] In the above scheme, by setting up a magnetic field measuring end 110 and a magnetic field generating end 120, the Hall sensor 112 is used to detect the three-dimensional displacement of a precision instrument or device. The high magnetic permeability material 111 is used to concentrate the magnetic field and improve the sensitivity of the Hall sensor 112, thereby accurately measuring the three-dimensional displacement and improving the accuracy of three-dimensional displacement monitoring.

[0040] Furthermore, based on the above embodiments, the number of Hall sensors 112 can be four, and these four Hall sensors 112 are arranged in a cross shape on the high-permeability magnetic material 111, such as... Figure 2 As shown.

[0041] In the above scheme, the cross-shaped arrangement makes the four Hall sensors 112 correspond to the magnetic field gradient changes in two directions respectively, thereby enhancing the symmetry detection of magnetic field changes and achieving high anti-interference performance without complex algorithms.

[0042] Furthermore, based on the above embodiment, the magnetic field strength generated by the two permanent magnets 121 arranged opposite each other is equal, and the magnetic field strength generated by the permanent magnet 121 with its N pole facing the high permeability material 111 is greater than the magnetic field strength generated by the permanent magnet 121 with its S pole facing the high permeability material 111.

[0043] In the above scheme, the magnetic field strength generated by the two permanent magnets 121 arranged opposite to each other is equal. The magnetic field strength generated by the permanent magnet 121 with the N pole facing the high magnetic permeability material 111 is greater than that generated by the permanent magnet 121 with the S pole facing the high magnetic permeability material 111, thereby improving the accuracy of three-dimensional displacement measurement.

[0044] Secondly, this application introduces a three-dimensional displacement measurement method provided in its embodiments, which can be applied to the measurement equipment described in the above embodiments. Please refer to... Figure 4 , Figure 4 A flowchart of a three-dimensional displacement measurement method provided in this application embodiment, the three-dimensional displacement measurement method specifically may include the following steps:

[0045] S201: When the magnetic field measuring end and the magnetic field generating end move relative to each other in a three-dimensional plane, the output voltage values ​​of four Hall sensors are received.

[0046] S202: Determine the first displacement parameter, second displacement parameter, and third displacement parameter corresponding to the Hall sensor based on the output voltage value.

[0047] S203: Determine the displacement of the magnetic field measuring end in the first direction, the second direction, and the third direction based on the first displacement parameter, the second displacement parameter, and the third displacement parameter.

[0048] Specifically, in the above S201, with Figure 3 For example, when the magnetic field measuring end moves in a three-dimensional plane formed by the X-axis, Y-axis and Z-axis, the above motion process can be decomposed into two directional components in the X-axis, Y-axis and Z-axis directions for analysis; at this time, the four Hall sensors in the magnetic field measuring end will output corresponding output voltage values ​​respectively, and the measuring device can receive the above four output voltage values.

[0049] In the above S202, based on the Hall effect, when the relative position of the Hall sensor and the permanent magnet changes, the magnetic field strength perpendicular to the Hall sensing surface will change accordingly, and the output voltage value of the Hall sensor will respond linearly. Therefore, the first displacement parameter, the second displacement parameter and the third displacement parameter corresponding to the Hall sensor can be obtained by processing the above four output voltage values.

[0050] Among them, the first displacement parameter, the second displacement parameter, and the third displacement parameter are intermediate characteristic parameters that are functionally related to the displacement of the Hall sensor. Specifically, the first displacement parameter can characterize the displacement amplitude of the magnetic field measuring end along the third direction (i.e., the Z-axis direction), the second displacement parameter can characterize the displacement amplitude of the magnetic field measuring end along the first direction (i.e., the X-axis direction) and the second direction (i.e., the Y-axis direction), and the third displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along the second direction (i.e., the Y-axis direction) and the second direction (i.e., the Z-axis direction).

[0051] In the above S203, the displacement of the magnetic field measuring end in the first direction, the displacement in the second direction, and the displacement in the third direction can be further determined based on the first displacement parameter, the second displacement parameter, and the third displacement parameter. Thus, the three independent displacements of the magnetic field measuring end in the three-dimensional plane (i.e., the displacement in the first direction, the displacement in the second direction, and the displacement in the third direction) can be determined.

[0052] It is understandable that after obtaining the above three displacement quantities, the total displacement of the magnetic field measuring end in the three-dimensional plane can be obtained.

[0053] In the above scheme, based on the first displacement parameter that is sensitive only to the third direction, the second displacement parameter that is sensitive to both the first and third directions, and the third displacement parameter that is sensitive to both the second and third directions, the three-dimensional displacement can be accurately separated, thereby quickly and accurately determining the displacement in the three directions and improving the accuracy of displacement monitoring.

[0054] Furthermore, based on the above embodiments, the specific implementation method for determining the displacement in three directions is described below, that is, S203 above may specifically include the following steps:

[0055] S301: Determine the first displacement amount based on the first displacement parameter and the first relationship.

[0056] S302: Determine the fourth displacement parameter based on the first displacement and the second relationship, and determine the fifth displacement parameter based on the first displacement and the third relationship.

[0057] S303: Determine the second displacement amount based on the second displacement parameter, the fourth displacement parameter, and the fourth relationship; and determine the third displacement amount based on the third displacement parameter, the fifth displacement parameter, and the fifth relationship.

[0058] S304: Determine the displacements in the first direction, the second direction, and the third direction based on the first displacement, the second displacement, and the third displacement.

[0059] Specifically, in S301 above, the first displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along a third direction, the first displacement amount characterizes the displacement amount of the magnetic field measuring end along a third direction, and the first relationship characterizes the response relationship between the displacement amplitude and the displacement amount of the magnetic field measuring end along a third direction. Therefore, by substituting the first displacement parameter into the first relationship, the first displacement amount can be obtained. For example, the first displacement parameter can be... Substitute the first relation In the middle, the first displacement is obtained. .

[0060] In S302 above, the fourth displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along the third direction in the second displacement parameter, and the second relationship characterizes the response relationship between the displacement amplitude of the magnetic field measuring end along the third direction and the displacement amount of the magnetic field measuring end along the third direction in the second displacement parameter. Therefore, by substituting the first displacement amount into the second relationship, the fourth displacement parameter can be obtained. For example, the first displacement amount can be... Substitute the second relation In the middle, the third displacement parameter is obtained. .

[0061] The fifth displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along the third direction in the third displacement parameter, and the third relationship characterizes the response relationship between the displacement amplitude of the magnetic field measuring end along the third direction and the displacement amount of the magnetic field measuring end along the third direction in the third displacement parameter. Therefore, substituting the first displacement amount into the third relationship yields the fifth displacement parameter. For example, the first displacement amount can be... Substitute into a third relationship In the middle, the fifth displacement parameter is obtained. .

[0062] In S303 above, the second displacement represents the displacement of the magnetic field measuring end along the first direction, and the fourth relationship represents the response relationship between the displacement amplitude of the magnetic field measuring end along the first direction and the displacement amount of the magnetic field measuring end along the first direction. Therefore, the difference between the second displacement parameter and the fourth displacement parameter can be calculated first to obtain the displacement amplitude of the magnetic field measuring end along the first direction; then, the displacement amplitude of the magnetic field measuring end along the first direction can be substituted into the fourth relationship to obtain the second displacement. For example, the second displacement parameter is calculated first. With the third displacement parameter The difference between them yields the displacement amplitude of the magnetic field measuring end along the first direction. Then, the displacement amplitude of the magnetic field measuring end along the first direction. Substitute into the fourth relation The second displacement is obtained. .

[0063] The third displacement parameter characterizes the displacement of the magnetic field measuring end along the second direction, and the fifth relationship characterizes the response relationship between the displacement amplitude and the displacement amount of the magnetic field measuring end along the second direction. Therefore, the difference between the third and fifth displacement parameters can be calculated first to obtain the displacement amplitude of the magnetic field measuring end along the second direction; then, the displacement amplitude of the magnetic field measuring end along the second direction can be substituted into the fifth relationship to obtain the third displacement parameter. For example, the third displacement parameter can be calculated first. With the third = fifth displacement parameters The difference between them yields the displacement amplitude of the magnetic field measuring end along the second direction. Then, the displacement amplitude of the magnetic field measuring end along the second direction. Substitute into the fifth relationship The third displacement is obtained. .

[0064] In the above S304, based on the first displacement... Second displacement and the third displacement The displacement of the magnetic field measuring end in the first direction, the displacement in the second direction, and the displacement in the third direction can be determined.

[0065] Understandably, it can also be based on the first displacement. Second displacement and the third displacement Determine the total displacement .

[0066] It should be noted that the embodiments of this application do not specifically limit the implementation of the first, second, third, fourth, and fifth relationships described above, and those skilled in the art can make appropriate adjustments according to the actual situation. As one implementation method, the first, second, third, fourth, and fifth relationships described above can be obtained through model simulation or experimental testing.

[0067] In the above scheme, by decoupling in stages, coupling errors in three-dimensional displacement can be avoided and the dependence on sensor linearity can be reduced, thereby improving the accuracy of three-dimensional displacement.

[0068] Furthermore, based on the above embodiments, two specific implementation methods for determining the first displacement parameter, the second displacement parameter, and the third displacement parameter are described below. In this embodiment, the output voltage value includes a first voltage value, a second voltage value, a third voltage value, and a fourth voltage value, and the Hall sensors corresponding to the first voltage value and the third voltage value are arranged along a first direction.

[0069] For example, located in Figure 2The output voltage value corresponding to the Hall sensor on the left is the first voltage value. ,lie in Figure 2 The output voltage value corresponding to the Hall sensor below is the second voltage value. ,lie in Figure 2 The output voltage value corresponding to the Hall sensor on the right is the third voltage value. ,lie in Figure 2 The output voltage value corresponding to the Hall sensor above is the fourth voltage value. .

[0070] First, we will introduce the first method for determining the first displacement parameter, the second displacement parameter, and the third displacement parameter. In this case, the above-mentioned S203 may specifically include the following steps:

[0071] The sum of the absolute values ​​of the differences between the first and third voltage values, and the absolute values ​​of the differences between the second and fourth voltage values, is determined as the first displacement parameter; the absolute value of the difference between the first and third voltage values ​​is determined as the second displacement parameter; and the absolute value of the difference between the second and fourth voltage values ​​is determined as the third displacement parameter.

[0072] Specifically, the sum of the absolute values ​​of the differences between the first and third voltage values, and the absolute values ​​of the differences between the second and fourth voltage values, changes only due to the displacement of the magnetic field measuring end along the Z-axis. Therefore, the first displacement parameter can be obtained. It is understood that the first displacement parameter only responds to displacement changes along the corresponding axial direction and not to displacement changes along the other two axes; that is, the influence of displacement along the X and Y axes on the value of the first displacement parameter can be ignored.

[0073] For example, the first displacement parameter can be calculated using the following formula:

[0074] .

[0075] The absolute value of the difference between the first and third voltage values ​​changes due to the displacement of the magnetic field measuring end along the X and Z axes, thus yielding the second displacement parameter. For example, the second displacement parameter can be calculated using the following formula:

[0076] .

[0077] The absolute value of the difference between the second and fourth voltage values ​​changes due to the displacement of the magnetic field measuring end along the Y-axis and Z-axis directions, thus yielding the third displacement parameter. For example, the third displacement parameter can be calculated using the following formula:

[0078] .

[0079] Next, we will introduce a second method for determining the first displacement parameter, the second displacement parameter, and the third displacement parameter. In this case, S203 may specifically include the following steps:

[0080] The difference between the absolute value of the sum of the first voltage value and the third voltage value, and the absolute value of the sum of the first voltage value and the second voltage value, is determined as a first displacement parameter; the difference between the absolute value of the first voltage value and the third voltage value is determined as a second displacement parameter; and the difference between the absolute value of the second voltage value and the fourth voltage value is determined as a third displacement parameter.

[0081] Specifically, the difference between the absolute value of the sum of the first voltage value and the third voltage value, and the absolute value of the sum of the first voltage value and the second voltage value, changes only due to the displacement of the magnetic field measuring end along the Z-axis. Therefore, the first displacement parameter can be obtained. This first displacement parameter only responds to displacement changes in the corresponding axial direction and not to displacement changes in the other two axes; that is, the influence of displacement along the X-axis and Y-axis directions on the value of the first displacement parameter can be ignored.

[0082] For example, the first displacement parameter can be calculated using the following formula:

[0083] .

[0084] The difference between the absolute value of the first voltage value and the third voltage value changes due to the displacement of the magnetic field measuring end along the X and Z axes, but has no significant response to displacement along the Y axis. Therefore, the second displacement parameter can be obtained. For example, the second displacement parameter can be calculated using the following formula:

[0085] .

[0086] The difference between the absolute value of the second voltage and the fourth voltage is altered by the displacement of the magnetic field measuring end along the Y-axis and Z-axis, but shows no significant response to displacement along the X-axis. Therefore, the third displacement parameter can be obtained. For example, the third displacement parameter can be calculated using the following formula:

[0087] .

[0088] Please refer to Figure 5 , Figure 5This application provides a structural block diagram of a measuring device 400, which includes at least one processor 401, at least one communication interface 402, at least one memory 403, and at least one communication bus 404. The communication bus 404 enables direct communication between these components, the communication interface 402 facilitates signaling or data communication with other node devices, and the memory 403 stores machine-readable instructions executable by the processor 401. When the measuring device 400 is running, the processor 401 communicates with the memory 403 via the communication bus 404, and the machine-readable instructions, when invoked by the processor 401, execute the aforementioned three-dimensional displacement measurement method.

[0089] For example, the processor 401 in this embodiment of the application can read a computer program from the memory 403 via the communication bus 404 and execute the computer program to implement the following method: when the magnetic field measuring end and the magnetic field generating end move relative to each other in the three-dimensional plane, the processor receives the output voltage values ​​of the four Hall sensors; the processor determines a first displacement parameter, a second displacement parameter, and a third displacement parameter corresponding to the Hall sensors based on the output voltage values, wherein the first displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along the third direction, the second displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along the first direction and the third direction, and the third displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along the second direction and the third direction; the processor determines the displacement amount of the magnetic field measuring end in the first direction, the second direction, and the third direction based on the first displacement parameter, the second displacement parameter, and the third displacement parameter.

[0090] The processor 401 comprises one or more, and can be an integrated circuit chip with signal processing capabilities. The processor 401 can be a general-purpose processor, including a Central Processing Unit (CPU), a Microcontroller Unit (MCU), a Network Processor (NP), or other conventional processors; it can also be a special-purpose processor, including a Neural-network Processing Unit (NPU), a Graphics Processing Unit (GPU), a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field-Programmable Gate Array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components. Furthermore, when there are multiple processors 401, some can be general-purpose processors, and others can be special-purpose processors.

[0091] The memory 403 includes one or more, which may be, but is not limited to, random access memory (RAM), read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), etc.

[0092] Understandable. Figure 5 The structure shown is for illustrative purposes only; the measuring device 400 may also include a ratio Figure 5 The more or fewer components shown, or having the same Figure 5 The different configurations shown. Figure 5 The components shown can be implemented using hardware, software, or a combination thereof.

[0093] This application also provides a computer program product, including a computer program stored on a computer-readable storage medium. The computer program includes computer program instructions. When the computer program instructions are executed by a computer, the computer can perform the steps of the three-dimensional displacement measurement method described in the above embodiments, such as: S201: When the magnetic field measuring end and the magnetic field generating end move relative to each other in a three-dimensional plane, receive the output voltage values ​​of four Hall sensors. S202: Determine the first displacement parameter, the second displacement parameter, and the third displacement parameter corresponding to the Hall sensors based on the output voltage values. S203: Determine the displacement of the magnetic field measuring end in the first direction, the displacement in the second direction, and the displacement in the third direction based on the first displacement parameter, the second displacement parameter, and the third displacement parameter.

[0094] This application also provides a computer-readable storage medium that stores computer program instructions. When the computer program instructions are executed by a computer, the computer performs the three-dimensional displacement measurement method described in the foregoing method embodiments.

[0095] In the embodiments provided in this application, it should be understood that the disclosed apparatus and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the displayed or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0096] Furthermore, the units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0097] Furthermore, the functional modules in the various embodiments of this application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0098] It should be noted that if the function is implemented as a software functional module and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0099] In this document, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, without necessarily requiring or implying any such actual relationship or order between these entities or operations.

[0100] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A three-dimensional displacement measuring device, characterized in that, include: The magnetic field measurement end includes a highly permeable magnetic material and multiple Hall sensors. The multiple Hall sensors are located on a first plane of the highly permeable magnetic material, and the Hall sensors are used to sense the magnetic field perpendicular to the surface of the Hall sensor. The magnetic field generating end includes four permanent magnets, which are arranged in a cross shape on the four sides of the magnetic field measuring end where the Hall sensor is not located. The magnetic poles of two opposite permanent magnets are opposite, and the first direction in which the two opposite permanent magnets are located and the second direction in which the other two permanent magnets are located form a second plane, which is parallel to the first plane. A measuring device, electrically connected to the Hall sensor, is used to receive the output voltage value of the Hall sensor when the magnetic field measuring end and the magnetic field generating end move relative to each other in a three-dimensional plane formed by the second plane and the third direction, and to perform three-dimensional displacement measurement based on the output voltage value, wherein the third direction is perpendicular to the first plane; The number of Hall sensors is four, and the four Hall sensors are arranged in a cross shape on the high magnetic permeability material.

2. The three-dimensional displacement measuring device according to claim 1, characterized in that, The magnetic field strength generated by the two permanent magnets positioned opposite each other is equal, and the magnetic field strength generated by the permanent magnet with its N pole facing the high permeability material is greater than the magnetic field strength generated by the permanent magnet with its S pole facing the high permeability material.

3. A three-dimensional displacement measurement method, characterized in that, The measuring device used in the three-dimensional displacement measuring apparatus as described in claim 1 or 2, wherein the three-dimensional displacement measuring method comprises: When the magnetic field measuring end and the magnetic field generating end move relative to each other in the three-dimensional plane, the output voltage value of the Hall sensor is received. The first displacement parameter, the second displacement parameter, and the third displacement parameter corresponding to the Hall sensor are determined based on the output voltage value. The first displacement parameter represents the displacement amplitude of the magnetic field measuring end along the third direction, the second displacement parameter represents the displacement amplitude of the magnetic field measuring end along the first direction and the third direction, and the third displacement parameter represents the displacement amplitude of the magnetic field measuring end along the second direction and the third direction. The displacement of the magnetic field measuring end in the first direction, the second direction, and the third direction is determined based on the first displacement parameter, the second displacement parameter, and the third displacement parameter.

4. The three-dimensional displacement measurement method according to claim 3, characterized in that, Determining the displacement of the magnetic field measuring end in the first direction, the second direction, and the third direction based on the first displacement parameter, the second displacement parameter, and the third displacement parameter includes: The first displacement is determined based on the first displacement parameter and the first relationship, wherein the first displacement represents the displacement of the magnetic field measuring end along the third direction; A fourth displacement parameter is determined based on the first displacement and the second relationship, and a fifth displacement parameter is determined based on the first displacement and the third relationship, wherein the fourth displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along the third direction in the second displacement parameter, and the fifth displacement parameter characterizes the displacement amplitude of the magnetic field measuring end along the third direction in the third displacement parameter. The second displacement is determined according to the second displacement parameter, the fourth displacement parameter and the fourth relationship, and the third displacement is determined according to the third displacement parameter, the fifth displacement parameter and the fifth relationship, wherein the second displacement represents the displacement of the magnetic field measuring end along the first direction, and the third displacement represents the displacement of the magnetic field measuring end along the second direction. The displacements in the first direction, the second direction, and the third direction are determined based on the first displacement, the second displacement, and the third displacement.

5. The three-dimensional displacement measurement method according to claim 3 or 4, characterized in that, The output voltage value includes a first voltage value, a second voltage value, a third voltage value, and a fourth voltage value, and the Hall sensors corresponding to the first voltage value and the third voltage value are arranged along the first direction; The step of determining the first displacement parameter, second displacement parameter, and third displacement parameter corresponding to the Hall sensor based on the output voltage value includes: The sum of the absolute values ​​of the differences between the first and third voltage values, and the absolute values ​​of the differences between the second and fourth voltage values, is determined as the first displacement parameter; and... The absolute value of the difference between the first voltage value and the third voltage value is determined as the second displacement parameter; and... The absolute value of the difference between the second voltage value and the fourth voltage value is determined as the third displacement parameter.

6. The three-dimensional displacement measurement method according to claim 3 or 4, characterized in that, The output voltage value includes a first voltage value, a second voltage value, a third voltage value, and a fourth voltage value, and the Hall sensors corresponding to the first voltage value and the third voltage value are arranged along the first direction; The step of determining the first displacement parameter, second displacement parameter, and third displacement parameter corresponding to the Hall sensor based on the output voltage value includes: The difference between the absolute value of the sum of the first voltage value and the third voltage value, and the absolute value of the sum of the first voltage value and the second voltage value, is determined as the first displacement parameter; and... The difference between the absolute value of the first voltage value and the third voltage value is determined as the second displacement parameter; and... The difference between the absolute value of the second voltage value and the fourth voltage value is determined as the third displacement parameter.

7. A computer program product, characterized in that, It includes computer program instructions, which, when read and executed by a processor, perform the three-dimensional displacement measurement method as described in any one of claims 3-6.

8. A measuring device, characterized in that, include: Processor, memory, and bus; The processor and the memory communicate with each other via the bus; The memory stores computer program instructions that can be executed by the processor, and the processor can execute the three-dimensional displacement measurement method as described in any one of claims 3-6 by calling the computer program instructions.

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