Sectional type laser light path straightness adjusting method and laser optical system

Abstract

The invention relates to a sectional type laser light path straightness adjusting method and a laser optical system, and the method comprises the steps: adjusting a reflector according to a light spot formed on a light path cross device after a light beam outputted by a laser is reflected by the reflector, so as to enable the center of the light spot on the light path cross device to completely coincide with the cross center of the light path cross device; the beam expander is adjusted according to the light spot position of the light beam expanded by the beam expander on the first detection cross device, so that the center of the light spot on the first detection cross device coincides with the cross center of the first detection cross device; and adjusting the shaping lens according to the position of a light spot formed on the second detection cross device after the shaping lens performs light beam shape adjustment, so that the center of the light spot of the second detection cross device coincides with the cross center of the second detection cross device. The reflecting mirror, the beam expanding mirror and the shaping mirror are sequentially adjusted in the light beam transmission direction, staged calibration of the straightness of the light path is achieved, and the efficiency and accuracy of light path adjustment are improved.

Description

Technical Field

[0001] The present application relates to the technical field of optical detection equipment, and in particular to a segmented laser light path straightness adjustment method and a laser optical system. Background Art

[0002] In laser optical systems, the straightness and stability of the optical path are crucial factors in ensuring system performance. Traditional optical path straightness adjustment methods typically involve installing each optical component sequentially and then performing comprehensive adjustments by observing the overall beam position. During this adjustment process, the effects of the various optical components are coupled, making it difficult to accurately locate the optical path deviation of a single component. This necessitates repeated adjustments, resulting in cumbersome operations and low optical path adjustment efficiency. Summary of the Invention

[0003] Based on this, it is necessary to provide a segmented laser light path straightness adjustment method and a laser optical system that can improve the efficiency of light path adjustment to address the above problems.

[0004] In a first aspect, the present application provides a segmented laser optical path straightness adjustment method, wherein a laser optical system includes a laser, a reflector, an optical path cross, a beam expander, a first detection cross, a shaping mirror, a second detection cross, and a laser scanning system, which are sequentially arranged along a beam transmission direction, wherein the central axes of the optical path cross, the first detection cross, and the second detection cross all coincide with a preset optical path axis; the method includes: According to the light spot formed on the optical path cross device after the light beam output by the laser is reflected by the reflector, the reflector is adjusted so that the center of the light spot on the optical path cross device completely coincides with the center of the cross of the optical path cross device; Adjusting the beam expander according to the spot position of the light beam after the beam expansion by the beam expander on the first detection cross so that the center of the light spot on the first detection cross coincides with the center of the cross of the first detection cross; According to the position of the light spot formed on the second detection cross after the beam shape is adjusted by the shaping mirror, the shaping mirror is adjusted so that the center of the light spot of the second detection cross coincides with the center of the cross of the second detection cross.

[0005] In one embodiment, adjusting the reflector includes: fine-tuning the lateral position and tilt angle of the reflector through a fine-tuning mechanism according to detection data returned by a photoelectric detection unit in the optical path cross-device.

[0006] In one embodiment, adjusting the beam expander includes: fine-tuning the lateral position and tilt angle of the beam expander through a fine-tuning mechanism according to detection data returned by the photoelectric detection unit in the first detection cross.

[0007] In one embodiment, adjusting the shaping mirror includes: fine-tuning the lateral position and tilt angle of the shaping mirror through a fine-tuning mechanism according to detection data returned by a photoelectric detection unit in the second detection cross.

[0008] In one embodiment, the detection data includes an offset between a center of the light spot and a center of the cross.

[0009] The second aspect of the present application provides a laser optical system, comprising a laser, a reflector, an optical path cross, a beam expander, a first detection cross, a shaping mirror, a second detection cross and a laser scanning system arranged in sequence along the direction of light beam transmission, wherein the center axes of the optical path cross, the first detection cross and the second detection cross coincide with the preset optical path axis; the laser optical system also includes a control device and a fine-tuning mechanism, wherein the control device is connected to the optical path cross, the first detection cross, the second detection cross and the fine-tuning mechanism, and the fine-tuning mechanism is connected to the reflector, the beam expander and the shaping mirror, and the control device performs segmented laser light path straightness adjustment according to the above method.

[0010] In one embodiment, the number of the reflectors is more than two, and the light beam output by the laser is reflected by each of the reflectors in turn to form a light spot on the optical path cross device; the control device adjusts the reflector of the last reflected light beam according to the detection data returned by the photoelectric detection unit in the optical path cross device, so that the center of the light spot on the optical path cross device completely coincides with the cross center of the optical path cross device.

[0011] In one embodiment, the optical path crosshair, the first detection crosshair, and the second detection crosshair all include a crosshair plate and a photoelectric detection unit, the crosshair plate is engraved with mutually perpendicular crosshairs, and the photoelectric detection unit is used to detect the offset between the center of the light spot and the center of the crosshair, and feed the offset back to the control device.

[0012] In one embodiment, the optical path cross, the first detection cross and the second detection cross are all retractable crosses. After completing the optical path adjustment of the corresponding section, the optical path cross, the first detection cross and the second detection cross are retracted and placed to avoid blocking the propagation of the light beam.

[0013] In one embodiment, the laser scanning system consists of two parts: a galvanometer and a field lens.

[0014] The above-mentioned segmented laser optical path straightness adjustment method and laser optical system, combined with the optical path cross, the first detection cross and the second detection cross, adjust the reflector, the beam expander and the shaping mirror in sequence along the direction of light beam transmission, thereby realizing staged high-precision calibration of the optical path straightness and improving the efficiency and accuracy of the optical path adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 Flowchart of a segmented laser light path straightness adjustment method according to one embodiment; Figure 2 Schematic diagram of the structure of a laser optical system in one embodiment; Figure 3 is a schematic structural diagram of a cross-reticle plate in one embodiment; Figure 4 Schematic diagram of a light spot on an optical path cross in one embodiment. DETAILED DESCRIPTION

[0016] In order to make the purpose, technical solutions and advantages of this application more clear, the following further describes this application in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0017] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application pertains. The terms used herein in the specification of this application are for the purpose of describing specific embodiments only and are not intended to limit this application.

[0018] It is understood that the terms "first," "second," and the like used herein may be used to describe various components, but these components are not limited by these terms. These terms are used solely to distinguish a first component from another component. It is understood that the term "connection" in the following embodiments should be understood as "electrical connection," "communication connection," and the like, if the connected circuits, modules, units, and the like can transmit electrical signals or data to each other.

[0019] As used herein, the singular forms "a," "an," and "the" may also include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include," "comprising," "having," and the like specify the presence of stated features, integers, steps, operations, components, parts, or combinations thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof. Furthermore, the term "and / or" as used in this specification includes any and all combinations of the relevant listed items.

[0020] In one embodiment, Figure 1 As shown, a segmented laser light path straightness adjustment method is provided, the method comprising: Step S110: According to the light spot formed on the optical path cross device after the light beam output by the laser is reflected by the reflector, the reflector is adjusted so that the center of the light spot on the optical path cross device completely coincides with the center of the cross of the optical path cross device.

[0021] like Figure 2 As shown, the laser optical system includes a laser 110, a reflector 120, an optical path cross 130, a beam expander 140, a first detection cross 150, a shaping mirror 160, a second detection cross 170 and a laser scanning system 180, which are arranged in sequence along the direction of light beam transmission. The center axes of the optical path cross 130, the first detection cross 150 and the second detection cross 170 coincide with the preset light path axis. In addition, the laser optical system may also include an optical platform for fixing each of the above optical components. Before using the laser optical system, first install the optical path cross 130, the first detection cross 150 and the second detection cross 170 so that their center axes coincide with the preset light path axis, and then place other optical components, and perform segmented laser light path straightness adjustment on other optical components according to the direction of light beam transmission.

[0022] When adjusting the optical path of each segment, an operator can manually adjust the corresponding optical device by visually observing the position of the light spot, or a control device can fine-tune the optical device based on the position of the light spot detected by a photoelectric detection unit. The control device can be an MCU, CPU, FPGA, etc. The optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 are all retractable crosshairs. After completing the optical path adjustment for the corresponding segment, the optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 are retracted and placed to avoid blocking the propagation of the light beam.

[0023] The number of reflectors 120 can be one or more, depending on the actual area of ​​the optical platform and the optical path design requirements. For example, if there are two or more reflectors 120, the light beam output by the laser 110, after being reflected by multiple reflectors 120, forms a light spot on the optical path crosshair 130. The control device can adjust the reflector 120 that reflects the last light beam based on the detection data returned by the photoelectric detection unit in the optical path crosshair 130, so that the center of the light spot on the optical path crosshair 130 completely coincides with the center of the cross of the optical path crosshair 130.

[0024] In this embodiment, the reflector 120 includes a first reflector 122 and a second reflector 124 for reflecting the laser beam, and the laser 110 is used to emit a 532nm green light calibration beam, or a 355nm purple light or a 1064nm red light, which is specifically set according to the process requirements. The light beam is reflected by the first reflector 122 and the second reflector 124 in turn and then transmitted to the optical path cross 130. The optical path cross 130 is fixedly mounted on the rear side of the light output side of the second reflector 124, and its central axis coincides with the preset optical path axis. The beam expander 140 is mounted on the rear side of the optical path cross 130 for expanding the beam, and the first detection cross 150 is mounted on the rear side of the light output side of the beam expander 140, and its central axis coincides with the preset optical path axis. The shaping mirror 160 is mounted on the rear side of the first detection cross 150 for shaping the beam, and the second detection cross 170 is mounted on the rear side of the shaping mirror 160 for shaping the beam, and the central axis coincides with the preset optical path axis. Shaping mirror 160 can adjust the beam shape to circular, square, or rectangular, etc., and the type of shaping mirror 160 is selected based on actual needs. A fine-tuning mechanism can utilize a precision angle adjustment frame and a translation stage. The fine-tuning mechanism is connected to the second reflector 124, beam expander 140, and shaping mirror 160, respectively, to precisely adjust the position and angle of each optical element.

[0025] In one embodiment, adjusting the reflector in step S110 includes fine-tuning the lateral position and tilt angle of the reflector using a fine-tuning mechanism based on detection data returned by a photoelectric detection unit in a first detection cross. In this embodiment, the detection data includes an offset between the center of the light spot and the center of the cross.

[0026] Specifically, the optical path cross device 130, the first detection cross device 150 and the second detection cross device 170 each include a cross-shaped graticule and a photoelectric detection unit, such as Figure 3 As shown, the cross-reticle is engraved with mutually perpendicular cross marks, and the photoelectric detection unit is used to detect the offset between the center of the light spot and the center of the cross, and feed the offset back to the control device.

[0027] When adjusting the straightness of the segmented laser light path, first perform a preliminary determination of the second-reflection light path (establish a benchmark): install a second reflector 124 (second reflection) in the laser optical system, and fix a telescopic light path cross 130 behind the light-emitting side of the second reflector 124. The central axis of the light path cross 130 coincides with the preset light path axis. Using the light spot formed on the light path cross 130 after the light beam emitted by the laser 110 is reflected by the second reflector 124 as a benchmark, adjust the inclination angle and lateral position of the second reflector 124 so that the center of the light spot completely coincides with the cross center of the light path cross 130, thus completing the preliminary calibration of the second-reflection light path. Figure 4As shown in the figure, when the light spot is divided into four equal parts by the cross marks on the cross-reticle plate, it can be considered that the center of the light spot completely coincides with the center of the cross.

[0028] Step S120: Adjusting the beam expander based on the spot position of the light beam after the beam expander on the first detection crosshair so that the center of the light spot on the first detection crosshair coincides with the center of the crosshair of the first detection crosshair. Adjusting the beam expander includes: fine-tuning the lateral position and tilt angle of the beam expander using a fine-tuning mechanism based on detection data returned by the photoelectric detection unit in the first detection crosshair.

[0029] Specifically, the steps for confirming the straightness of the optical path after the beam expander are as follows: a beam expander 140 is installed behind the second reflector 124 and the optical path crosshair 130, so that the light beam is expanded by the beam expander 140. A first detection crosshair 150 is set behind the light-emitting side of the beam expander 140, and the position of the light spot of the expanded light beam on the first detection crosshair 150 is observed. By fine-tuning the lateral position and tilt angle of the beam expander 140, the center of the light spot is made to coincide with the center of the cross of the first detection crosshair 150, ensuring that the straightness of the optical path after expansion and the optical path calibrated by the second reflector 124 is maintained.

[0030] Step S130: After the beam shaping lens has been adjusted, the shaping lens is adjusted based on the position of the light spot formed on the second detection cross, so that the center of the light spot on the second detection cross coincides with the center of the cross on the second detection cross. Adjusting the shaping lens includes fine-tuning the lateral position and tilt angle of the shaping lens using a fine-tuning mechanism based on detection data returned by the photoelectric detection unit in the second detection cross.

[0031] Specifically, the steps for confirming the straightness of the optical path after the shaping mirror are as follows: A shaping mirror 160 is installed behind the beam expander 140 and the first detection cross 150, and the beam shape of the expanded light beam is adjusted by the shaping mirror 160. A second detection cross 170 is set behind the light-exiting side of the shaping mirror 160. The position of the light spot of the shaped light beam on the second detection cross 170 is observed. By fine-tuning the lateral position and tilt angle of the shaping mirror 160, the center of the light spot coincides with the center of the cross of the second detection cross 170, completing the segmented calibration of the straightness of the entire optical path.

[0032] After adjusting the straightness of each optical path segment, the optical path crosspiece 130, the first detection crosspiece 150, and the second detection crosspiece 170 are retracted and positioned to avoid obstructing the beam propagation. The beam output by the laser 110 is reflected by the first and second reflectors 122 and 124 before being transmitted to the beam expander 140 for expansion. The expanded beam is then shaped by the shaping mirror 160 and output to the desired beam shape, which is then sent to the laser scanning system 180, consisting of a field lens and a galvanometer.

[0033] Galvanometer: Contains two high-speed vibrating reflective mirrors (X-axis and Y-axis mirrors). It receives instructions from the control system and guides the laser beam to perform high-speed scanning motion (drawing graphics, tracks, etc.) on the work plane by quickly and accurately changing the mirror angles.

[0034] The field lens, also known as an F-theta lens or flat-field focusing lens, is located after the galvanometer. It has two core functions: 1. Focusing: It focuses the parallel laser beam deflected by the galvanometer onto the work plane. 2. Flat-field correction: This ensures that no matter where the laser beam is deflected by the galvanometer to the work plane (center or edge), its focus remains precisely on the same flat focal plane, resulting in a uniform focused spot size and processing quality across the entire scanning area.

[0035] In addition, after the laser optical system has been used for a period of time, deviations may occur due to environmental factors (temperature, humidity, etc.), which may affect the accuracy. The optical path cross 130, the first detection cross 150, and the second detection cross 170 can be adjusted to extend again to perform segmented laser optical path straightness adjustment to ensure the straightness and stability of the laser optical system.

[0036] When adjusting the straightness of each section of the laser light path, the control device receives the detection data returned by the photoelectric detection unit, and the control device controls the fine-tuning mechanism to fine-tune the lateral position and tilt angle of the corresponding optical component. The alignment of the laser light path can be indirectly determined by measuring or observing the distribution of energy density (or power density). The core principle is as follows: The collimation (parallelism) of the laser beam is closely related to the spot size and energy distribution after focusing. When the laser light path is well collimated (high beam parallelism): 1. Small beam divergence angle: The beam spreads slowly during propagation.

[0037] 2. The focused spot is small and regular: When using a lens with a fixed focal length (such as a field lens) for focusing, a well-collimated light beam will converge into a spot that is as small as possible, symmetrical (usually circular or nearly circular), and has uniform energy distribution (close to an ideal Gaussian distribution).

[0038] 3. High and concentrated energy density: Due to the small spot size, the laser energy is highly concentrated in a very small area, so the peak energy density in this area is very high.

[0039] Observe the uniformity of energy distribution: Method: Use a beam profiler to directly capture the spot energy distribution (cross-sectional intensity distribution) at the focus (or near the focus).

[0040] Judgment: After focusing, a well-collimated beam should have a circular energy distribution with the highest intensity at the center and a smooth, symmetrical outward decay (close to a Gaussian distribution). A poorly collimated beam may have a low energy density at the focal point and a sharp drop in energy density away from the focal point. By comparing the energy density values ​​and their rate of change at different locations, the success of the straightness adjustment of each section of the laser light path can be determined.

[0041] In one embodiment, Figure 2 As shown, a laser optical system is also provided, comprising a laser 110, a reflector 120, an optical path cross 130, a beam expander 140, a first detection cross 150, a shaping mirror 160, a second detection cross 170, and a laser scanning system 180, which are arranged in sequence along the direction of light beam transmission. The center axes of the optical path cross 130, the first detection cross 150, and the second detection cross 170 coincide with the preset optical path axis. The laser optical system also includes a control device and a fine-tuning mechanism. The control device is connected to the optical path cross 130, the first detection cross 150, the second detection cross 170, and the fine-tuning mechanism. The fine-tuning mechanism is connected to the reflector 120, the beam expander 140, and the shaping mirror 160. The control device performs segmented laser light path straightness adjustment according to the above-mentioned method. The control device can be a device such as an MCU, a CPU, or an FPGA. The fine-tuning mechanism can adopt structures such as a precision angle adjustment frame and a translation stage to accurately adjust the position and angle of each optical element.

[0042] The number of the reflectors 120 can be one or more, and is selected based on the actual area of ​​the optical platform and the requirements of the optical path design. For example, the number of the reflectors 120 is more than two, and the light beam output by the laser 110 is reflected by multiple reflectors 120 to form a light spot on the optical path crosslider 130. The control device adjusts the reflector 120 of the last reflected light beam according to the detection data returned by the photoelectric detection unit in the optical path crosslider 130, so that the center of the light spot on the optical path crosslider 130 completely coincides with the cross center of the optical path crosslider 130. In this embodiment, the reflector 120 includes a first reflector 122 and a second reflector 124 for reflecting the laser beam, and the laser 110 is used to emit a calibration light beam, and the light beam is reflected by the first reflector 122 and the second reflector 124 in sequence and then transmitted to the optical path crosslider 130.

[0043] Furthermore, the laser scanning system 180 consists of two parts: a galvanometer and a field lens. The field lens changes the characteristics of the laser beam through the focusing action of the lens, controlling its shape, size, and focus to ensure that the laser is accurately focused on the target. The galvanometer changes the direction of the laser beam by electrically controlling the angle of the mirror surface. This is responsible for the movement trajectory of the laser beam and can quickly adjust the laser's irradiation position in one or two dimensions.

[0044] In one embodiment, the optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 all include a crosshair plate and a photoelectric detection unit. The crosshair plate is engraved with mutually perpendicular cross marks. The photoelectric detection unit is used to detect the offset between the center of the light spot and the center of the crosshair, and feed the offset back to the control device.

[0045] In one embodiment, the optical path cross 130, the first detection cross 150, and the second detection cross 170 are all crosses with retractable structures. After completing the optical path adjustment of the corresponding section, the optical path cross 130, the first detection cross 150, and the second detection cross 170 are retracted and placed to avoid blocking the propagation of the light beam. The light beam output by the laser 110 is reflected by the first reflector 122 and the second reflector 124 and then transmitted to the beam expander 140 for beam expansion. The beam after expansion is adjusted in shape by the shaping mirror 160, and a beam of the desired shape is output to the laser scanning system 180. In addition, after the laser optical system has been used for a period of time, the optical path cross 130, the first detection cross 150, and the second detection cross 170 can be extended again to perform segmented laser light path straightness adjustment to ensure the straightness and stability of the laser optical system.

[0046] Specifically, the segmented optical path adjustment method of the laser optical system includes the following steps: 1. Preliminary determination of the optical path reference of the second reflector 124: The second reflector 124 is fixedly mounted on the optical platform, and the initial position of the second reflector 124 is adjusted so that the light beam emitted by the laser 110 is substantially incident on the reflective surface of the second reflector 124 .

[0047] An optical path crosshair 130 is fixedly mounted behind the light-emitting side of the second reflector 124 (i.e., in the direction of propagation of the light beam after reflection from the second reflector 124). This ensures that the central axis of the optical path crosshair 130 coincides with the preset optical path axis. The optical path crosshair 130 comprises a crosshair reticle with clear crosshairs and a photoelectric detection unit. The photoelectric detection unit detects the offset between the center of the light spot and the center of the crosshairs.

[0048] Laser 110 is turned on. The light beam is reflected by second reflector 124 and projected onto the crosshairs of optical path crosshair 130, forming a light spot. The tilt angle and lateral position of second reflector 124 are slowly adjusted using a fine-tuning mechanism (such as a precision angle adjustment mount and a translation stage). The alignment of the light spot with the crosshairs is simultaneously observed by observing the offset data from the photoelectric detection unit or by visually observing the alignment of the light spot with the crosshairs until the center of the light spot completely coincides with the center of the crosshairs on the crosshairs. At this point, the second reflector optical path has been preliminarily aligned, forming a reference optical path.

[0049] 2. Confirm the straightness of the optical path after the beam expander 140: A beam expander 140 is installed behind the optical path cross-piece 130 so that the light beam calibrated by the second reflector 124 is accurately incident on the central area of ​​the beam expander 140 .

[0050] A first detection cross 150 is installed at an appropriate position behind the light-emitting side of the beam expander 140 . The structure of the first detection cross 150 is the same as that of the optical path cross, and its central axis coincides with the preset optical path axis.

[0051] After being expanded by the beam expander 140, the light beam is projected onto the first detection cross 150. If the position or angle of the beam expander 140 deviates, the center of the light spot will deviate from the cross center of the first detection cross 150. The beam expander 140's lateral position (left and right, up and down) and tilt angle are adjusted using a fine-tuning mechanism, and the light spot position is monitored in real time until the center of the light spot coincides with the cross center of the first detection cross 150. At this point, the expanded light path maintains straightness with the reference light path calibrated by the second reflector 124, completing the optical path adjustment of the beam expander 140.

[0052] 3. Confirmation of the straightness of the optical path after 160 degrees of the reshaping mirror: A shaping mirror 160 is installed behind the first detection cross 150 so that the expanded light beam is incident on the shaping mirror 160 to adjust the beam shape.

[0053] A second detection cross 170 is installed behind the light-emitting side of the shaping mirror 160 to also ensure that its central axis coincides with the preset optical path axis.

[0054] Observe the spot position of the shaped light beam on the second detection cross 170. If there is any deviation, fine-tune the lateral position and tilt angle of the shaping mirror 160 through the fine-tuning mechanism until the center of the light spot completely coincides with the cross center of the second detection cross. At this time, the straightness of the entire optical path has reached high-precision requirements through segmented adjustment, and the optical path calibration is completed.

[0055] The traditional method of adjusting the straightness of the optical path usually adopts a one-time overall adjustment method, that is, after installing each optical component in sequence, the overall spot position is observed for comprehensive debugging. This method has the following shortcomings: 1. During the adjustment process, the influences of various optical components are coupled with each other, making it difficult to accurately locate the optical path deviation of a single component, resulting in cumbersome adjustment steps and low efficiency.

[0056] 2. The cumulative error is large. The optical path deviation of the previous link will be directly transmitted to the subsequent components, affecting the straightness accuracy of the overall optical path.

[0057] 3. The lack of precise phased calibration methods makes it difficult to independently verify and optimize the optical path of each key node.

[0058] The segmented laser optical path straightness adjustment method and laser optical system provided in this application achieve high-precision staged calibration of optical path straightness by clarifying the adjustment sequence and benchmarks of each optical component and combining it with the precise positioning of the optical path crosshair, thereby improving the efficiency and accuracy of optical path adjustment. This solution has the following advantages: 1. Segmented calibration, high precision: By adjusting the optical path of the secondary reflector, beam expander, and shaping mirror in stages, each step is independently calibrated based on the optical path crosshair, avoiding the cumulative error in traditional overall adjustment and significantly improving the accuracy of the optical path straightness.

[0059] 2. High adjustment efficiency: The adjustment targets at each stage are clear. Through the intuitive feedback of the optical path crosshair or the automated control of photoelectric detection, deviations can be quickly located and precise adjustments can be made, which reduces debugging time and improves work efficiency.

[0060] 3. Easy operation: The adjustment sequence is clear and the benchmarks for each step are clear. Even the operator can intuitively judge the optical path status by aligning the crosshairs, which reduces the difficulty of operation.

[0061] 4. Wide applicability: It is suitable for various optical systems that require high-precision optical path straightness calibration, especially in fields such as laser processing and laser communication that have high requirements for optical path stability.

[0062] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0063] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art could make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A segmented laser light path straightness adjustment method, characterized in that: The laser optical system includes a laser, a reflector, an optical path cross, a beam expander, a first detection cross, a shaping mirror, a second detection cross, and a laser scanning system, which are sequentially arranged along a beam transmission direction. The central axes of the optical path cross, the first detection cross, and the second detection cross all coincide with a preset optical path axis. The method includes: According to the light spot formed on the optical path cross device after the light beam output by the laser is reflected by the reflector, the reflector is adjusted so that the center of the light spot on the optical path cross device completely coincides with the center of the cross of the optical path cross device; Adjusting the beam expander according to the spot position of the light beam after the beam expansion by the beam expander on the first detection cross so that the center of the light spot on the first detection cross coincides with the center of the cross of the first detection cross; According to the position of the light spot formed on the second detection cross after the beam shape is adjusted by the shaping mirror, the shaping mirror is adjusted so that the center of the light spot of the second detection cross coincides with the center of the cross of the second detection cross.

2. The method according to claim 1, characterized in that The reflector is adjusted, including: fine-tuning the lateral position and tilt angle of the reflector through a fine-tuning mechanism according to the detection data returned by the photoelectric detection unit in the optical path cross device.

3. The method according to claim 1, characterized in that Adjusting the beam expander includes: fine-tuning the lateral position and tilt angle of the beam expander through a fine-tuning mechanism according to detection data returned by the photoelectric detection unit in the first detection cross.

4. The method according to claim 1, wherein Adjusting the shaping mirror includes: fine-tuning the lateral position and tilt angle of the shaping mirror through a fine-tuning mechanism according to the detection data returned by the photoelectric detection unit in the second detection cross.

5. The method according to any one of claims 2 to 4, characterized in that The detection data includes an offset between the center of the light spot and the center of the cross.

6. A laser optical system, characterized in that: The laser optical system comprises a laser, a reflector, an optical path cross, a beam expander, a first detection cross, a shaping mirror, a second detection cross and a laser scanning system, which are arranged in sequence along the direction of light beam transmission, wherein the central axes of the optical path cross, the first detection cross and the second detection cross coincide with the preset optical path axis; the laser optical system further comprises a control device and a fine-tuning mechanism, wherein the control device is connected to the optical path cross, the first detection cross, the second detection cross and the fine-tuning mechanism, and the fine-tuning mechanism is connected to the reflector, the beam expander and the shaping mirror, and the control device performs segmented laser light path straightness adjustment according to the method described in any one of claims 1 to 5.

7. The system according to claim 6, characterized in that There are more than two reflectors, and the light beam output by the laser is reflected by each reflector in turn to form a light spot on the optical path cross device; the control device adjusts the reflector of the last reflected light beam according to the detection data returned by the photoelectric detection unit in the optical path cross device, so that the center of the light spot on the optical path cross device completely coincides with the cross center of the optical path cross device.

8. The system according to claim 6, wherein: The optical path crosshair, the first detection crosshair and the second detection crosshair all include a cross-reticle plate and a photoelectric detection unit. The cross-reticle plate is engraved with cross marks perpendicular to each other. The photoelectric detection unit is used to detect the offset between the center of the light spot and the center of the crosshair, and feed the offset back to the control device.

9. The system according to claim 6, wherein: The optical path cross, the first detection cross and the second detection cross are all crosses with retractable structures. After completing the optical path adjustment of the corresponding section, the optical path cross, the first detection cross and the second detection cross are retracted and placed to avoid blocking the propagation of the light beam.

10. The system according to any one of claims 6 to 9, characterized in that: The laser scanning system consists of two parts: a galvanometer and a field lens.

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