A dual space fatigue electron microscope test system

Abstract

The application provides a double-space fatigue electron microscope test system, which is applied to the technical field of material analysis and comprises an electron microscope module, a fatigue loading module and a vacuum insulation damping module. The vacuum insulation damping module controls the connection or independence of the two spaces of the electron microscope module and the fatigue loading module. The fatigue loading module comprises a hydraulic loading actuator, an electromechanical loading actuator, a loading rod and a fixing clamp. The fixing clamp is used for clamping a test sample, and the loading rod is used for realizing the stretching or extrusion of the test sample. The fatigue loading module is driven by a moving mechanism to move reciprocally along the X axis to adjust the position of the test sample or rotate along the X axis to realize the switching of different stations. The double-space fatigue electron microscope test system realizes the joint use or separate use of the electron microscope module and the fatigue loading module, improves the vibration, pulse and other adverse factors generated by the fatigue loading module during electron microscope observation, realizes in-situ compensation by the coordinated cooperation of the loading force and displacement of the fatigue loading module, and improves the electron microscope observation effect.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of material analysis, and particularly relates to a double-space fatigue electron microscope test system. BACKGROUND

[0002] Electron microscope testing is a test method for observing and recording the dynamic response of a test sample to different external excitation signals in real time. Material fatigue testing is a test method for evaluating the resistance of a material to damage under repeated loading conditions. The main purpose is to predict the fatigue strength and life of the material or component in long-term use. Common fatigue test methods include single-point fatigue test method, step-up and step-down method, high-frequency vibration test method, etc. Through these tests, potential failure points can be identified to ensure the safety and reliability of the product.

[0003] At present, a Chinese invention patent with the publication number CN115078082A discloses an in-situ fatigue test system used with a scanning electron microscope, which specifically discloses a fatigue chamber, a scanning electron microscope, and a sample transfer mechanism. The fatigue chamber is provided with a fatigue test bench. The cavity of the scanning electron microscope is connected with the fatigue chamber through a conveying pipeline, and a blockage device is arranged on the conveying pipeline to separate or connect the cavity of the scanning electron microscope and the fatigue chamber. The cavity of the scanning electron microscope is connected with the fatigue chamber, and the fatigue test bench is transmitted into the cavity of the scanning electron microscope through the conveying pipeline by the sample transfer mechanism to observe the test. After the observation is completed, the sample transfer mechanism transmits the fatigue test bench back to the fatigue chamber, and the cavity of the scanning electron microscope is separated from the fatigue chamber by the blockage device. Since the sample test space and the observation space can be completely separated, the fatigue test system can be continuously operated for a long time without being limited by the use of the scanning electron microscope, and various extreme coupling conditions can be applied to the sample.

[0004] In the technical solution disclosed in the above-mentioned invention patent, the structure design adopts a single blockage device. Although the electron microscope system and the fatigue loading system can be used jointly, they cannot be used independently. Only the fatigue loading system can be used independently, and the electron microscope system cannot be used independently. On the other hand, the sample transfer is realized by a linear robot, which has a single function and does not solve the in-situ compensation problem of electron microscope observation. SUMMARY

[0005] In view of the above problems in the prior art, the present application aims to provide a double-space fatigue electron microscope test system, which realizes the joint use or independent use of the electron microscope module and the fatigue loading module, and improves the adverse factors such as vibration and pulse generated by the fatigue loading module during electron microscope observation when used jointly. In addition, the loading force and displacement of the fatigue loading module are cooperated to realize in-situ compensation and improve the effect of electron microscope observation.

[0006] The utility model provides a double space fatigue electron microscope test system, including electron microscope module, fatigue loading module and vacuum insulation damping module, electron microscope module, fatigue loading module are connected with the both ends of vacuum insulation damping module respectively, the two spaces of electron microscope module, fatigue loading module are controlled by vacuum insulation damping module and are communicated or independent, make electron microscope module, fatigue loading module joint use or single use, the end of fatigue loading module is provided with environment simulation module, and environment simulation module includes high temperature component and low temperature component for simulating test environment temperature, the fatigue loading module includes hydraulic loading actuator, electromechanical loading actuator, loading rod and fixed clamp, one end of hydraulic loading actuator is connected with loading rod, and the other end is connected with electromechanical loading actuator, and the fixed clamp is used to clamp the test sample, and the loading rod is used to realize the stretching or extrusion of the test sample, the fatigue loading module is driven by the moving mechanism, the moving mechanism includes the X -axis moving assembly of moving along X -axis and the rotation assembly of rotating around X -axis, the X -axis moving assembly is used to drive fatigue loading module and reciprocatingly moves along X -axis, adjusts the position of test sample, and the rotation assembly is used to drive fatigue loading module and rotates along X -axis, and different workstations are switched.

[0007] Preferably, the vacuum insulation damping module includes a vacuum bellows and two oppositely arranged vacuum gate valves, the two ends of the vacuum bellows are respectively connected with the electron microscope module and the fatigue loading module, and the two vacuum gate valves are respectively arranged at the two ends of the vacuum bellows.

[0008] Preferably, the electron microscope module includes a scanning electron microscope and an electron microscope box, the scanning end of the scanning electron microscope is embeddedly installed in the interior of the electron microscope box, and is used for realizing electron microscope observation.

[0009] Preferably, the fatigue loading module is arranged in the interior of the vacuum box, the two ends of the vacuum bellows are respectively connected with the electron microscope box and the vacuum box, and the fatigue loading module is driven by the X-axis moving assembly to reciprocatingly move between the electron microscope box and the vacuum box.

[0010] Preferably, the hydraulic loading actuator and the electromechanical loading actuator are both arranged in the insulation cylinder, one end of the insulation cylinder is connected with the protection cylinder, and the other end is connected with the guide cylinder; the loading rod is located in the interior of the protection cylinder, the end of the protection cylinder away from the insulation cylinder is connected with a bearing frame, and a space for accommodating the test sample is arranged on the bearing frame; the fixed clamp includes a left clamp and a right clamp, the left clamp is installed on the bearing frame, and the right clamp is installed on the loading rod, the two ends of the test sample are respectively clamped and fixed by the left clamp and the right clamp, and the right clamp moves with the loading rod to realize the stretching or extrusion action on the test sample.

[0011] Preferably, the fatigue loading module is provided with a force sensor, a displacement sensor and a rotary encoder, wherein the force sensor is used for high-precision dynamic monitoring of the loading force; the displacement sensor is used for measuring the axial displacement to realize dynamic cooperation of the displacement of the fatigue loading module and the loading force; and the rotary encoder is used for measuring the rotation angle of the fatigue loading module to facilitate quick switching of different stations.

[0012] Preferably, before the test starts, the X-axis moving assembly is used to drive the fatigue loading module to move so that the center of the sample to be tested is located directly below the scanning electron microscope, thereby realizing in-situ positioning.

[0013] During the test, the X-axis moving assembly is used to drive the fatigue loading module to move according to the direction and size of the loading force of the loading rod on the sample to be tested, so that the center of the sample to be tested is located directly below the scanning electron microscope, thereby realizing in-situ compensation.

[0014] Preferably, the rotating assembly includes an inner ring for clamping the fatigue loading module and an outer ring for connecting the X-axis moving assembly, and the inner ring and the outer ring are rotatably connected, and the inner ring of the rotating assembly is driven to rotate by the driving assembly.

[0015] Preferably, the driving assembly includes a rotary driving motor, a pulley one, a pulley two, a synchronous belt one, a pulley three, a tension pulley, a synchronous belt two and a rotating wheel, wherein the rotary driving motor, the pulley one, the pulley two, the pulley three and the tension pulley are all mounted on the X-axis moving assembly, the driving end of the rotary driving motor is connected with the pulley one, the pulley one and the pulley two are connected through the synchronous belt one for transmission, the pulley two is connected with the pulley three, the rotating wheel is connected with the inner ring of the rotating assembly, and the rotating wheel and the pulley three are connected through the synchronous belt two for transmission, and the tension pulley is provided with a plurality of tension pulleys located between the rotating wheel and the pulley three for adjusting the tension of the synchronous belt two.

[0016] Preferably, the vacuum box is arranged on the damping frame, and the damping frame includes a damping pad, a base, a Z-axis moving assembly and a Y-axis moving assembly, wherein the Z-axis moving assembly and the Y-axis moving assembly are mounted on the top of the base, and the bottom of the base is connected with the damping pad, the Z-axis moving assembly is used to drive the vacuum box to move along the Z-axis, and the Y-axis moving assembly is used to drive the vacuum box to move along the Y-axis, thereby adjusting the position of the sample to be tested.

[0017] The beneficial effects of the present application are:

[0018] The vacuum insulation damping module of the double-space fatigue electron microscope test system adopts the structural design of two vacuum plug valves, so that when the two plug valves are opened, the fatigue loading module can be combined with the electron microscope module for use, and when the two plug valves are closed, the electron microscope module and the fatigue loading module are independent of each other and can be used independently; and the vacuum bellows between the two plug valves can isolate the vibration generated during the fatigue loading process, so that the two work independently without interfering with each other.

[0019] The fatigue loading module adopts a hydraulic loading actuator, an electromechanical loading actuator and a loading rod, so that the hydraulic loading actuator provides sufficient frequency of vibration loading for the loading rod during fatigue testing, and the electromechanical loading actuator realizes the holding of the loading rod during electron microscope observation, thereby avoiding the influence on the imaging clarity caused by hydraulic pulsation when the hydraulic loading actuator is used.

[0020] The mobile mechanism drives the fatigue loading module to move the sample to be tested, on the one hand, before the test starts, the fatigue loading module is driven to move so that the center of the sample to be tested is located directly below the scanning electron microscope, realizing in-situ positioning; on the other hand, during the test, the fatigue loading module is moved according to the direction and size of the loading force of the loading rod on the sample to be tested, so that the center of the sample to be tested is located directly below the scanning electron microscope, realizing in-situ compensation by the cooperation between the loading force and the displacement, and improving the effect of electron microscope observation. Further, the rotation assembly of the mobile mechanism drives the fatigue loading module to rotate, which can realize the rapid switching of different stations of the sample to be tested, and has wider applicability.

[0021] The double-space fatigue electron microscope test system realizes the coupling of high / low temperature and mechanical loading test through the structure design and mutual cooperation of the electron microscope module, the fatigue loading module, the vacuum insulation damping module and the environment simulation module, and can realize electron microscope observation at the same time, has high integration and meets most test requirements. BRIEF DESCRIPTION OF DRAWINGS

[0022] The accompanying drawings are included to provide a further understanding of the application and constitute a part of the specification, together with the embodiments of the application, to explain the application and do not constitute a limitation on the application. In the drawings:

[0023] Figure 1 is a structural schematic diagram of the application;

[0024] Figure 2 is an internal structure diagram of the application;

[0025] Figure 3 is a structural schematic diagram of the fatigue loading module of the application;

[0026] Figure 4 is a structural schematic diagram of the mobile mechanism of the application;

[0027] Figure 5 is a structural schematic diagram of the driving assembly of the application;

[0028] Figure 6 is a structural schematic diagram of the rotating wheel of the application;

[0029] Figure 7 is a structural schematic diagram of the damping frame of the application;

[0030] Figure 8 This is a schematic diagram of the structure of the present invention. Figure 2 Enlarged view of point A in the middle.

[0031] The components in the diagram are labeled as follows: 1. Electron microscope module; 2. Vibration isolation base; 3. Vacuum isolation and vibration damping module; 4. Vacuum chamber; 5. Molecular pump; 6. Vibration damping frame; 7. Electron microscope chamber; 8. Environmental simulation module; 9. Vacuum slide valve; 10. Fatigue loading module; 11. Hydraulic loading actuator; 12. Vacuum bellows; 13. Scanning electron microscope; 14. Loading rod; 15. Isolation cylinder; 16. Guide cylinder; 17. Electromechanical loading actuator; 19. Reserved window; 20. Rotating assembly; 21. X-axis moving assembly; 22. Vibration damping pad; 23. Base; 24. Z-axis moving assembly; 25. Y-axis moving assembly; 26. Rotary drive motor; 27. Pulley 1; 28. Pulley 2; 29. ​​Synchronous belt 1; 30. Pulley 3; 31. Tensioner; 32. Synchronous belt 2; 33. Rotating wheel; 34. Bearing frame; 35. Fixing clamp; 36. Protective cylinder. Detailed Implementation

[0032] Example 1

[0033] like Figure 1 , Figure 2 As shown, a dual-space fatigue electron microscopy testing system includes an electron microscope module 1, a fatigue loading module 10, and a vacuum isolation and damping module 3. The electron microscope module 1 and the fatigue loading module 10 are respectively connected to both ends of the vacuum isolation and damping module 3, and the vacuum isolation and damping module 3 controls whether the two spaces of the electron microscope module 1 and the fatigue loading module 10 are connected or independent.

[0034] like Figure 2 As shown, the vacuum isolation and vibration reduction module 3 includes a vacuum bellows 12 and two oppositely arranged vacuum valves 9. The two ends of the vacuum bellows 12 are connected to the electron microscope module 1 and the fatigue loading module 10, respectively. The two vacuum valves 9 are respectively arranged at the two ends of the vacuum bellows 12. By controlling the opening or closing of the two vacuum valves 9, the two spaces of the electron microscope module 1 and the fatigue loading module 10 can be connected or independent.

[0035] When both vacuum gate valves 9 are opened simultaneously, the fatigue loading module 10 and the electron microscope module 1 are spatially connected, and the fatigue loading module 10 and the electron microscope module 1 can be used together. When both vacuum gate valves 9 are closed simultaneously, the electron microscope module 1 and the fatigue loading module 10 are spatially independent, and the electron microscope module 1 and the fatigue loading module 10 can be used independently. In addition, the vacuum bellows 12 between the two vacuum gate valves 9 can isolate the vibration generated during the use of the fatigue loading module 10, so that the fatigue loading module 10 and the electron microscope module 1 do not interfere with each other when working independently.

[0036] As shown in Figure 1 , Figure 2 , the electron microscope module 1 comprises a scanning electron microscope 13 and an electron microscope box 7, and the scanning end of the scanning electron microscope 13 is embeddedly installed inside the electron microscope box 7. The electron microscope test is a test method for observing and recording the dynamic response of the test sample to different external excitation signals in real time, and the specific test process is not described here.

[0037] The material fatigue test is a test method for evaluating the resistance of the material to destruction under repeated loading conditions. Its main purpose is to predict the fatigue strength and life of the material or component in long-term use. Common fatigue test methods include single-point fatigue test method, lifting method, high-frequency vibration test method, etc. Through these tests, potential failure points can be identified to ensure the safety and reliability of the product.

[0038] As shown in Figure 1 , Figure 2 , the fatigue loading module 10 is configured inside the vacuum box 4, and a molecular pump 5 is installed on the vacuum box 4 for vacuumizing the inside of the vacuum box 4. The fatigue loading module 10 is driven by a moving mechanism to realize transverse reciprocating movement or rotary motion. The transverse movement enables the fatigue loading module 10 to pass through the vacuum bellows 12 and enter the inside of the electron microscope box 7, and the rotary motion enables the fatigue loading module 10 to quickly switch the test sample to different stations in the electron microscope box 7.

[0039] As shown in Figure 2 , Figure 3 , the fatigue loading module 10 comprises a hydraulic loading actuator 11, an electromechanical loading actuator 17, a loading rod 14, an isolation cylinder 15, a guide cylinder 16, a protection cylinder 36, a bearing frame 34, and a fixed clamp 35.

[0040] The hydraulic loading actuator 11 and the electromechanical loading actuator 17 are both configured in the isolation cylinder 15. The front end of the hydraulic loading actuator 11 is connected to the loading rod 14 for realizing fatigue loading, and the rear end of the hydraulic loading actuator 11 is connected to the electromechanical loading actuator 17. Among them, the hydraulic loading actuator 11 and the loading rod 14 are connected by a shaft, and the hydraulic loading actuator 11 and the electromechanical loading actuator 17 are also connected by a shaft.

[0041] The loading rod 14 is located inside the protection cylinder 36, one end of the protection cylinder 36 is connected with the isolation cylinder 15, and the other end is connected with the bearing frame 34, the bearing frame 34 is provided with a space for accommodating the sample to be tested, and the sample to be tested is clamped and fixed by the fixing clamp 35. Among them, the fixing clamp 35 includes a left clamp and a right clamp, the left clamp is installed on the bearing frame 34, the right clamp is installed on the loading rod 14, and the two ends of the sample to be tested are clamped and fixed by the left clamp and the right clamp respectively. The right clamp moves with the loading rod 14 to realize the stretching or extrusion action of the sample to be tested. Specifically, the loading rod 14 can apply a stress ratio R=-1 fatigue loading capacity to the sample to be tested, and the fatigue frequency can reach 300Hz.

[0042] The hydraulic loading actuator 11 is used to realize high-frequency axial loading on the sample to be tested to realize fatigue loading test. When the hydraulic loading actuator 11 completes the fatigue loading function and needs to be tested by electron microscope scanning, the hydraulic loading actuator 11 is completely stopped, and the electromechanical loading actuator 17 is switched to keep, which can eliminate the influence of hydraulic pulsation on the imaging clarity of the scanning electron microscope 13.

[0043] It should be noted that the fatigue loading module 10 is provided with a force sensor, a displacement sensor and a rotary encoder. The force sensor is used for high-precision dynamic monitoring of the loading force; the displacement sensor is used for measuring the axial displacement to realize the dynamic cooperation of the displacement and the loading force of the fatigue loading module 10; and the rotary encoder is used for measuring the rotation angle of the fatigue loading module 10, so as to realize the rapid switching of different stations.

[0044] Further, as shown in Figure 2 , Figure 8 The end of the fatigue loading module 10 is also provided with an environment simulation module 8 located beside the fixing clamp 35, which is used for simulating the test environment for the sample to be tested. The environment simulation module 8 includes a high-temperature component and a low-temperature component. In this embodiment, the high-temperature simulation is realized by heating the heating wire, and the low-temperature simulation is realized by filling liquid nitrogen. Specifically, temperature monitoring is carried out in combination with a temperature sensor. The high-temperature temperature can be controlled by adjusting the heating time or the load current of the heating wire, the low-temperature temperature can be controlled by adjusting the flow of liquid nitrogen, and the environment simulation is realized by precise temperature control, which is convenient for capturing and multi-dimensional analysis of the micro-damage evolution of the material under extreme temperature. The ultra-high temperature environment temperature is not less than 1200℃.

[0045] In addition, the tail of the isolation cylinder 15 is connected with a guide cylinder 16, which is used for guiding the connecting parts such as control cables and oil pipes of the hydraulic loading actuator 11 and the electromechanical loading actuator 17, which can effectively isolate the hydraulic oil and the vacuum system to ensure the cleanliness of the vacuum system. At the same time, the guide cylinder 16 is additionally arranged to realize the function of guiding and lengthening, which can move the center of gravity backward, and can effectively prevent the fatigue loading module 10 from being inserted into the electron microscope box 7 to cause the front end to be too heavy and cause overturning.

[0046] The moving mechanism is arranged inside the vacuum box 4, as shown in Figure 4 The moving mechanism includes an X-axis moving assembly 21 moving along the X-axis and a rotating assembly 20 rotating around the X-axis direction.

[0047] The X-axis moving assembly 21 is used to drive the fatigue loading module 10 to move towards or away from the scanning electron microscope 13, so as to adjust the X-axis position of the test sample. At the same time, the X-axis moving assembly 21 can provide in-situ compensation during the fatigue loading test, that is, when the loading rod 14 performs the stretching or compression action on the test sample, the X-axis moving assembly 21 drives the entire fatigue loading module 10 to move in the opposite direction along the X-axis by the same displacement, so that the position of the test sample observed remains unchanged, thereby realizing the in-situ observation of the scanning electron microscope 13.

[0048] The rotating assembly 20 includes an inner ring for clamping the isolation cylinder 15 in the fatigue loading module 10 and an outer ring for connecting the sliding seat in the X-axis moving assembly 21, and the inner ring and the outer ring are rotatable. Driving the inner ring to rotate can drive the fatigue loading module 10 to rotate, so that the test sample can be quickly switched between multiple stations in the electron microscope module 1, wherein the electron microscope module 1 at least includes a SEM station and an EBSD station.

[0049] Specifically, the inner ring of the rotating assembly 20 is driven to rotate by a driving assembly. As shown in Figure 5 , Figure 6 The driving assembly includes a rotating drive motor 26, a pulley one 27, a pulley two 28, a synchronous belt one 29, a pulley three 30, a tension pulley 31, a synchronous belt two 32, and a rotating wheel 33.

[0050] The rotating drive motor 26, the pulley one 27, the pulley two 28, the pulley three 30, and the tension pulley 31 are all mounted on the sliding seat of the X-axis moving assembly 21. The driving end of the rotating drive motor 26 is connected with the pulley one 27. The pulley one 27 and the pulley two 28 are connected through the synchronous belt one 29 for transmission. The pulley two 28 is connected with the pulley three 30. The rotating wheel 33 is connected with the inner ring of the rotating assembly 20. The rotating wheel 33 and the pulley three 30 are connected through the synchronous belt two 32 for transmission. The tension pulley 31 is provided with multiple tension pulleys, which are located between the rotating wheel 33 and the pulley three 30, and are used to adjust the tension of the synchronous belt two 32.

[0051] The rotating drive motor 26 drives the pulley one 27 to rotate, and the pulley two 28 is driven to rotate by the synchronous belt one 29, so as to drive the pulley three 30 to rotate, and then the rotating wheel 33 is driven to rotate by the synchronous belt two 32, so as to drive the inner ring of the rotating assembly 20 to rotate, thereby achieving the purpose of adjusting the station of the test sample by the fatigue loading module 10.

[0052] As shown in Figure 7As shown, the vacuum box 4 is configured on the damping frame 6, which includes a damping pad 22, a base 23, a Z-axis moving assembly 24, and a Y-axis moving assembly 25.

[0053] The Z-axis moving assembly 24 and the Y-axis moving assembly 25 are installed on the top of the base 23, and the bottom of the base 23 is connected with the damping pad 22. The damping pad 22 can effectively absorb the vibration to reduce the vibration transmission during the fatigue test, thereby improving the vibration interference problem during the electron microscope observation. The Z-axis moving assembly 24 is used to drive the vacuum box 4 to move along the Z-axis, and the Y-axis moving assembly 25 is used to drive the vacuum box 4 to move along the Y-axis, so as to adjust the position of the sample to be tested in the electron microscope module 1.

[0054] In this embodiment, the X-axis moving assembly 21, the Z-axis moving assembly 24, and the Y-axis moving assembly 25 are linear modules, and their working principles are known in the art, which will not be described here. The purpose is to drive the corresponding target object to move linearly and adjust the position.

[0055] In addition, a reserved window 19 is formed on the top of the vacuum box 4, which is convenient for integrating the corresponding detection module according to the test requirements. The electron microscope module 1 and the fatigue loading module 10 are configured on the shock isolation base 2, which further offsets the vibration effect.

[0056] Working principle: when the double-space fatigue electron microscope test system is used, the two vacuum plug valves 9 are opened, so that the spaces of the electron microscope module 1 and the fatigue loading module 10 are connected.

[0057] The sample to be tested is clamped and fixed on the carrier 34 by the fixing clamp 35, and then the fatigue loading module 10 is driven by the X-axis moving assembly 21 to move to the inside of the electron microscope box 7, so that the sample to be tested is located below the scanning electron microscope 13. Then, the fatigue loading module 10 is moved by the Z-axis moving assembly 24 and the Y-axis moving assembly 25, and the position of the sample to be tested is adjusted, so that the center of the sample to be tested is located directly below the scanning electron microscope 13.

[0058] According to the test requirements, precise environmental simulation is performed by the environmental simulation module 8. The sample to be tested is stretched or compressed by the hydraulic loading actuator 11, and the fatigue loading test is performed. During the fatigue loading test, the length of the sample to be tested changes due to the stretching or compression action. At this time, the fatigue loading module 10 is driven by the X-axis moving assembly 21 to move along the X-axis in the opposite direction of the hydraulic loading actuator 11 by the same distance, so that the center of the sample to be tested after the length change is still located directly below the scanning electron microscope 13. When the electron microscope observation is performed, the hydraulic loading actuator 11 is switched to the electromechanical loading actuator 17 for holding, which can eliminate the influence of hydraulic pulsation on the imaging clarity of the scanning electron microscope 13.

[0059] In another aspect, the two vacuum plug valves 9 are closed, so that the space of the electron microscope module 1 and the space of the fatigue loading module 10 are independent of each other, and the electron microscope observation and the fatigue loading test can be carried out respectively, and the two tests do not interfere with each other.

[0060] The above merely describes the preferred embodiments of the present application, and is not intended to limit the present application. Although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art can modify the technical solutions described in the foregoing embodiments, or equivalently replace some technical features, without departing from the spirit and principle of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A dual space fatigue electron microscope test system, characterized by, The fatigue loading module (10) is driven by a moving mechanism, the moving mechanism includes an X-axis moving assembly (21) moving along the X-axis and a rotating assembly (20) rotating around the X-axis, the X-axis moving assembly (21) is used to drive the fatigue loading module (10) to reciprocate along the X-axis, adjust the position of the test sample, and the rotating assembly (20) is used to drive the fatigue loading module (10) to rotate along the X-axis, realize the switching of different stations. Before the test starts, the X-axis moving assembly (21) is used to drive the fatigue loading module (10) to move, so that the center of the test sample is located directly below the scanning electron microscope (13), and in-situ positioning is realized. During the test, the X-axis moving assembly (21) is used to drive the fatigue loading module (10) to move according to the direction and size of the loading force of the loading rod (14) on the test sample, so that the center of the test sample is located directly below the scanning electron microscope (13), and in-situ compensation is realized. The vacuum isolation damping module (3) includes a vacuum bellows (12) and two oppositely arranged vacuum plug valves (9), the two ends of the vacuum bellows (12) are connected with the electron microscope module (1) and the fatigue loading module (10) respectively, and the two vacuum plug valves (9) are arranged at the two ends of the vacuum bellows (12) respectively. The electron microscope module (1) includes a scanning electron microscope (13) and an electron microscope box (7), the scanning end of the scanning electron microscope (13) is embeddedly installed in the inside of the electron microscope box (7), and electron microscope observation is realized. The fatigue loading module (10) is arranged in the inside of the vacuum box (4), the two ends of the vacuum bellows (12) are connected with the electron microscope box (7) and the vacuum box (4) respectively, and the fatigue loading module (10) is driven by the X-axis moving assembly (21) to reciprocate between the electron microscope box (7) and the vacuum box (4).

2. The dual spatial fatigue electron mirror test system of claim 1, wherein, The fatigue loading module (10) is driven by a moving mechanism, the moving mechanism includes an X-axis moving assembly (21) moving along the X-axis and a rotating assembly (20) rotating around the X-axis, the X-axis moving assembly (21) is used to drive the fatigue loading module (10) to reciprocate along the X-axis, adjust the position of the test sample, and the rotating assembly (20) is used to drive the fatigue loading module (10) to rotate along the X-axis, realize the switching of different stations.

3. The dual space fatigue electron microscope test system of claim 2, wherein, Before the test starts, the X-axis moving assembly (21) is used to drive the fatigue loading module (10) to move, so that the center of the test sample is located directly below the scanning electron microscope (13), and in-situ positioning is realized.

4. The dual space fatigue electron microscope test system of claim 3, wherein, During the test, the X-axis moving assembly (21) is used to drive the fatigue loading module (10) to move according to the direction and size of the loading force of the loading rod (14) on the test sample, so that the center of the test sample is located directly below the scanning electron microscope (13), and in-situ compensation is realized. The vacuum isolation damping module (3) includes a vacuum bellows (12) and two oppositely arranged vacuum plug valves (9), the two ends of the vacuum bellows (12) are connected with the electron microscope module (1) and the fatigue loading module (10) respectively, and the two vacuum plug valves (9) are arranged at the two ends of the vacuum bellows (12) respectively. The electron microscope module (1) includes a scanning electron microscope (13) and an electron microscope box (7), the scanning end of the scanning electron microscope (13) is embeddedly installed in the inside of the electron microscope box (7), and electron microscope observation is realized. The fatigue loading module (10) is arranged in the inside of the vacuum box (4), the two ends of the vacuum bellows (12) are connected with the electron microscope box (7) and the vacuum box (4) respectively, and the fatigue loading module (10) is driven by the X-axis moving assembly (21) to reciprocate between the electron microscope box (7) and the vacuum box (4).

5. The dual spatial fatigue electron mirror test system of claim 1, wherein, The hydraulic loading actuator (11) and the electromechanical loading actuator (17) are arranged in the isolation cylinder (15), one end of the isolation cylinder (15) is connected with the protection cylinder (36), and the other end is connected with the guide cylinder (16); The loading rod (14) is located in the interior of the protection cylinder (36), one end of the protection cylinder (36) away from the isolation cylinder (15) is connected with the bearing frame (34), and the bearing frame (34) is provided with a space for accommodating the sample to be tested; The two ends of the sample to be tested are clamped and fixed by the left clamp and the right clamp of the fixing clamp (35), the right clamp moves with the loading rod (14), and the stretching or extrusion action on the sample to be tested is realized.

6. The dual spatial fatigue electron mirror test system of claim 1, wherein, The fatigue loading module (10) is provided with a force sensor, a displacement sensor and a rotary encoder, wherein the force sensor dynamically monitors the loading force with high precision; the displacement sensor is used for measuring the axial displacement, so as to realize the dynamic cooperation of the displacement and the loading force of the fatigue loading module (10); and the rotary encoder is used for measuring the rotation angle of the fatigue loading module (10), so as to facilitate the quick switching of different stations.

7. The dual spatial fatigue electron mirror test system of claim 1, wherein, The rotary assembly (20) comprises an inner ring for clamping the fatigue loading module (10) and an outer ring for connecting the X-axis moving assembly (21), and the inner ring and the outer ring are rotatably connected; the inner ring of the rotary assembly (20) is driven to rotate by the driving assembly.

8. The dual space fatigue electron mirror test system of claim 7, wherein, The driving assembly comprises a rotary driving motor (26), a pulley one (27), a pulley two (28), a synchronous belt one (29), a pulley three (30), a tension pulley (31), a synchronous belt two (32) and a rotary wheel (33); the rotary driving motor (26), the pulley one (27), the pulley two (28), the pulley three (30) and the tension pulley (31) are all installed on the X-axis moving assembly (21); the driving end of the rotary driving motor (26) is connected with the pulley one (27); the pulley one (27) and the pulley two (28) are connected through the synchronous belt one (29) to realize transmission; the pulley two (28) and the pulley three (30) rotate coaxially; the rotary wheel (33) is connected with the inner ring of the rotary assembly (20); the rotary wheel (33) and the pulley three (30) are connected through the synchronous belt two (32) to realize transmission; wherein, the tension pulley (31) is provided with a plurality of tension pulleys, which are located between the rotary wheel (33) and the pulley three (30) to adjust the tension of the synchronous belt two (32).

9. The dual spatial fatigue electron mirror test system of claim 4, wherein, The vacuum box (4) is arranged on the damping frame (6), and the damping frame (6) comprises a damping pad (22), a base (23), a Z-axis moving assembly (24) and a Y-axis moving assembly (25); the Z-axis moving assembly (24) and the Y-axis moving assembly (25) are installed on the top of the base (23), the bottom of the base (23) is connected with the damping pad (22), the Z-axis moving assembly (24) is used for driving the vacuum box (4) to move along the Z-axis, and the Y-axis moving assembly (25) is used for driving the vacuum box (4) to move along the Y-axis, so as to adjust the position of the sample to be tested.

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