Glass substrate detection device under high-speed rhythm

Abstract

The invention belongs to the technical field of glass substrate quality inspection, and particularly relates to a glass substrate detection device under high-speed takt, which comprises a glass transmission platform, a multi-axis driving positioning assembly and a detection assembly, the glass conveying platform is used for conveying a glass substrate; the multi-axis driving positioning assembly is used for realizing positioning and operation in a three-dimensional space; the detection assembly is arranged on the execution end of the multi-axis driving positioning assembly, and the multi-axis driving positioning assembly drives the detection assembly and the glass substrate to move in the same direction for detection. The moving speed of the detection assembly is controlled, so that the detection assembly and the glass substrate are kept stable and relatively low in relative speed, more comprehensive detection on internal and external defects of the glass substrate under a high-speed rhythm is realized, the number of missed defects is reduced, the probability that unqualified products flow into subsequent production procedures is reduced, the product percent of pass is improved, and the production cost is reduced.

Description

Technical Field

[0001] The present application belongs to the technical field of glass substrate quality inspection, and specifically relates to a glass substrate inspection device at high speed. Background Art

[0002] In the TFT-LCD substrate industry, re-inspection detection equipment is suitable for use in Class 100 clean rooms and is mainly used to screen defects on the surface and inside of glass substrates.

[0003] Currently, re-inspection at high speed is a difficult problem for the glass substrate industry. The existing inspection method uses additional re-inspection stations and mobile inspection of inspection components when the glass is stationary. The transmission equipment needs to be started and stopped repeatedly, which not only increases the equipment failure rate but also reduces the production speed. Summary of the Invention

[0004] The technical problem to be solved by the present application is to provide a glass substrate inspection device at a high-speed beat, which realizes a more comprehensive inspection of internal and external defects of the glass substrate at a high-speed beat while ensuring that the number of missed defects is reduced, thereby improving production efficiency and helping to reduce the failure rate of transmission equipment.

[0005] The present application provides a high-speed glass substrate detection device, comprising: Glass transfer platform, used for transferring glass substrates; Multi-axis drive positioning assembly, used to achieve positioning and operation in three-dimensional space; The detection component is arranged on the execution end of the multi-axis drive positioning component, and the multi-axis drive positioning component drives the detection component to move in the same direction as the glass substrate for detection.

[0006] Optionally, the multi-axis drive positioning assembly includes a support structure and a multi-joint manipulator arranged on the support structure, and the execution end of the multi-joint manipulator is connected to the detection assembly.

[0007] Optionally, the multi-axis drive positioning assembly includes a truss manipulator, and the execution end of the truss manipulator is connected to the detection assembly.

[0008] Optionally, the support structure includes a basic frame and a mounting frame arranged on the top of the basic frame, the multi-joint manipulator is arranged on the basic frame, and the power supply and communication cables of the detection component are arranged on the mounting frame.

[0009] Optionally, the truss manipulator includes a gantry truss manipulator or a cantilever truss manipulator.

[0010] Optionally, the basic frame includes a gantry frame or a cantilever frame.

[0011] Optionally, the glass transmission platform includes a platform frame, an air flotation mechanism arranged on the platform frame, and a glass driving mechanism arranged on the platform frame. The glass driving mechanism includes two linear transmission components respectively located on both sides of the air flotation mechanism. The two linear transmission components synchronously drive the two side edges of the glass substrate. The air flotation mechanism is used to form a stable air film to suspend the glass substrate.

[0012] Optionally, the linear transmission assembly includes a linear mounting plate, multiple motors arranged along the linear mounting plate, multiple driving wheels, multiple pressure wheels, multiple guide wheels and multiple support wheels, the output shaft of the motor is drivingly connected to a corresponding driving wheel, a gap is provided between the driving wheel and the pressure wheel for passing the glass substrate, the guide wheel is in rolling engagement with the side edge of the glass substrate to limit the transmission direction of the glass substrate, and the support wheel is in rolling engagement with the bottom of the edge of the glass substrate.

[0013] Optionally, the number of the driving wheels and the pressure wheels is the same, and the axis connecting the axes of the driving wheels and the pressure wheels is perpendicular to the glass substrate.

[0014] Optionally, a plurality of mounting seats are provided on the linear mounting plate, and a corresponding pressure wheel is provided on each of the mounting seats, and the pressure wheel is located above the driving wheel.

[0015] Optionally, the air flotation mechanism includes a first air flotation assembly and a second air flotation assembly sequentially arranged along the platform frame, the first air flotation assembly and the second air flotation assembly being respectively connected to an external air supply device, the first air flotation assembly including two first transverse air flotation bars and a plurality of first flow direction air flotation bars disposed between the two first transverse air flotation bars, the second air flotation assembly including two second transverse air flotation bars and a plurality of second flow direction air flotation bars disposed between the two second transverse air flotation bars, the first transverse air flotation bars and the second transverse air flotation bars being staggered in the conveying direction of the glass substrate.

[0016] Optionally, the number of the multi-axis drive positioning assemblies is four, the number of the detection assemblies is four, the four multi-axis drive positioning assemblies are arranged along the platform frame, the four detection assemblies are respectively located above the first air flotation assembly and the second air flotation assembly, and the four detection assemblies are respectively aligned with different areas of the glass substrate and avoid the first flow direction air flotation bar and the second flow direction air flotation bar for detection.

[0017] Optionally, the second air flotation assembly further includes two edge support air flotation strips, respectively located on both sides of the plurality of first flow direction air flotation strips.

[0018] Optionally, the air flotation mechanism further includes a third air flotation component adjacent to the second air flotation component.

[0019] Optionally, the detection component includes at least one of a defect detector and a surface roughness meter.

[0020] Optionally, the method for using the glass substrate detection device comprises the following steps: The glass substrate is transported to the bottom of the detection component on the glass transport platform, and the detection component senses the glass substrate; The multi-axis drive positioning component drives the detection component to move according to the transmission speed of the glass transmission platform, reduces the relative speed between the detection component and the glass substrate, and then detects the entire area of ​​the glass substrate.

[0021] The beneficial effects of this application are: This inspection device uses a glass transmission platform to transport a glass substrate in one direction. Simultaneously, the inspection component, driven by a multi-axis drive positioning component, can move not only in the transmission direction of the glass substrate, but also in the direction perpendicular to the transmission direction of the glass substrate. Furthermore, it can move in a direction perpendicular to the surface of the glass substrate to adjust the focus and inspection range. By controlling the movement speed of the inspection component, the inspection component and the glass substrate maintain a stable and low relative speed, enabling more comprehensive inspection of internal and external defects of the glass substrate at high speeds. This reduces the number of missed defects and the probability of unqualified products flowing into subsequent production processes, thereby improving the qualified rate of liquid crystal products and reducing production costs. Furthermore, during inspection, the glass transmission platform continuously transports the glass substrate, which helps reduce the failure rate of the glass transmission platform and solves the high failure rate of the prior art transmission equipment caused by frequent pauses and starts. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic structural diagram of the glass substrate detection device provided in this application; Figure 2 A schematic diagram of a portion of the structure of the glass transmission platform provided in this application; Figure 3 A schematic diagram of the structure of the air flotation mechanism provided in this application; Figure 4 A schematic diagram of the structure of the linear transmission assembly provided in this application; Figure 5 A schematic diagram of the structure of the multi-axis drive positioning assembly provided in this application; Figure 6 Schematic diagram of the working status of multi-zone detection of the detection component provided in this application.

[0023] In the figure: 10, glass transmission platform; 110, platform frame; 120, air flotation mechanism; 121, first air flotation component; 1211, first horizontal air flotation bar; 1212, first flow air flotation bar; 122, second air flotation component; 1221, second horizontal air flotation bar; 1222, second flow air flotation bar; 1223, edge support air flotation bar; 123, third air flotation component; 130, glass drive mechanism; 131, linear mounting plate; 132, motor; 133, driving wheel; 134, pressure wheel; 135, guide wheel; 136, support wheel; 137, mounting seat; 20, multi-axis drive positioning component; 210, support structure; 211, base frame; 212, mounting frame; 220, multi-joint manipulator; 30, detection component; 310, first area; 320, second area; 330, third area; 340, fourth area. DETAILED DESCRIPTION

[0024] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application more clearly understood, this application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0025] First, as Figure 1-6 As shown, the present application provides a high-speed glass substrate detection device, comprising: a glass transmission platform 10, a multi-axis drive positioning assembly 20, and a detection assembly 30; wherein the glass transmission platform 10 is used to transmit the glass substrate; the multi-axis drive positioning assembly 20 is used to realize positioning and operation in three-dimensional space; the detection assembly 30 is arranged on the execution end of the multi-axis drive positioning assembly 20, and the multi-axis drive positioning assembly 20 drives the detection assembly 30 to move in the same direction as the glass substrate for detection.

[0026] Compared with the prior art, the glass substrate inspection device provided by the present application transmits the glass substrate in one direction via a glass transmission platform 10. At the same time, the inspection component 30 is driven by a multi-axis drive positioning component 20 to move not only in the transmission direction of the glass substrate, but also in the transmission direction perpendicular to the glass substrate, and can also move in the direction perpendicular to the glass substrate surface to adjust the focus and inspection range. By controlling the movement speed and movement direction of the inspection component 30, the inspection component 30 and the glass substrate maintain a stable and low relative speed, or even relatively static. This allows clear inspection even under high-speed transmission of the glass substrate, achieving more comprehensive inspection of internal and external defects of the glass substrate at high speeds, reducing the number of defects that are missed, and reducing the probability of unqualified products flowing into subsequent production processes, which is beneficial to improving the qualified rate of liquid crystal products and reducing production costs. In addition, during inspection, the glass transmission platform 10 continuously transmits the glass substrate, which helps to reduce the failure rate of the glass transmission platform 10 and solves the problem of frequent pause / start and high failure rate of the transmission equipment in the prior art.

[0027] In one possible implementation, the multi-axis driven positioning assembly 20 includes a support structure 210 and a multi-jointed manipulator 220 mounted on the support structure 210. The actuator end of the multi-jointed manipulator 220 is connected to the detection assembly 30. Specifically, the support structure 210 is fixed to the ground or other base to ensure the stability of the multi-jointed manipulator 220. The multi-jointed manipulator 220 is fixed to the support structure 210 via a base and multiple bolts. The end effector of the multi-jointed manipulator 220 is connected to the detection assembly 30. The multi-jointed manipulator 220 drives the detection assembly 30 to move in the space above the glass substrate (glass transport platform 10). The multi-jointed manipulator 220 has a faster response speed, greater flexibility, stability, and accuracy. It not only maintains a stable and low relative speed between the detection assembly 30 and the glass substrate, enabling more comprehensive detection of internal and external defects on the glass substrate at high speeds, but also further reduces the number of defects that are missed on the glass substrate. The multi-jointed manipulator 220 can also assist in grasping and installing the detection assembly 30, thereby improving assembly efficiency.

[0028] In one possible implementation, the support structure 210 includes a base frame 211, a mounting frame 212 disposed on top of the base frame 211, a multi-joint manipulator 220 disposed on the base frame 211, and power and communication cables for the detection assembly 30 disposed on the mounting frame 212. Specifically, the base frame 211 provides a stable foundation for the multi-joint manipulator 220, ensuring that the multi-joint manipulator 220 does not vibrate significantly during operation. The mounting frame 212 supports the power and communication cables, effectively avoiding the operating range of the multi-joint manipulator 220 and the detection assembly 30. The base frame 211 can be a gantry frame, with its two uprights disposed on either side of the glass conveying platform 10, and the multi-joint manipulator 220 disposed on the crossbeam of the gantry frame, which has a strong load-bearing capacity and high stability. The base frame 211 can also be a cantilever frame, with the cantilever frame disposed on the side of the glass conveying platform 10, and the multi-joint manipulator 220 disposed on the cantilever of the cantilever frame, which has high flexibility and requires less installation space.

[0029] In one possible implementation, the multi-axis driven positioning assembly 20 includes a truss manipulator, the actuator end of which is connected to the detection assembly 30. Specifically, the truss manipulator enables the detection assembly 30 to move in three or two dimensions, thereby maintaining a stable and low relative speed between the detection assembly 30 and the glass substrate, among other functions.

[0030] In one possible implementation, the truss manipulator includes a gantry truss manipulator or a cantilever truss manipulator.

[0031] It should be noted that the glass substrate is usually large in size, and multiple detection components 30 need to be set up to detect different parts. Multiple detection components 30 can be set on the truss manipulator and the multi-joint manipulator 220 respectively, that is, a solution of combining the truss manipulator and the multi-joint manipulator 220 is adopted.

[0032] In one possible implementation, the glass transport platform 10 includes a platform frame 110, an air flotation mechanism 120 mounted on the platform frame 110, and a glass drive mechanism 130 mounted on the platform frame 110. The glass drive mechanism 130 includes two linear transmission assemblies located on either side of the air flotation mechanism 120. The two linear transmission assemblies synchronously drive the two side edges of the glass substrate. The air flotation mechanism 120 is used to form a stable air film to suspend the glass substrate. Specifically, the platform frame 110 is a three-dimensional frame structure fixed to the ground, with the air flotation mechanism 120 mounted relatively flat on its top to ensure that the glass substrate can move in a nearly horizontal direction. The air flotation mechanism 120 blows air through relatively evenly distributed air holes to float the glass substrate, preventing damage to the glass substrate during the transport process. The two linear transmission assemblies work together to move the glass substrate.

[0033] In one possible implementation, Figure 4 As shown, the linear transmission assembly includes a linear mounting plate 131, multiple motors 132 arranged along the linear mounting plate 131, multiple driving wheels 133, multiple pressure wheels 134, multiple guide wheels 135 and multiple support wheels 136. The output shaft of the motor 132 is drivingly connected to a corresponding driving wheel 133. There is a gap between the driving wheel 133 and the pressure wheel 134 for the glass substrate to pass through. The guide wheel 135 is in rolling cooperation with the side edge of the glass substrate to determine the transmission direction of the glass substrate. The support wheel 136 is in rolling cooperation with the bottom of the edge of the glass substrate. Specifically, the driving wheel 133 is driven by the motor 132 and is located below the edge of the glass substrate, with a contact of 3-5 mm with the substrate, providing transmission power to the glass substrate; the pressure wheel 134 is located above the edge of the glass substrate and also above the driving wheel 133, ensuring that the glass substrate does not shake during the transmission process; the guide wheel 135 is fixed on the upper side of the transmission mechanism and contacts the edge of the glass substrate to ensure that the glass substrate does not deviate during the transmission process; the support wheel 136 is fixed on the transmission device and mainly plays a supporting role. It cooperates with the driving wheel 133 and rotates freely in the transmission direction of the glass substrate during the transmission of the glass substrate. Its main function is to provide support for the glass substrate transmission and ensure transmission stability.

[0034] It should be noted that the pressure wheel 134 and the support wheel 136 are wheels of the same type. The parts of the driving wheel 133, the pressure wheel 134, the guide wheel 135 and the support wheel 136 that contact the glass substrate can be made of polyurethane or silicone to ensure high wear resistance and reduce damage to the glass substrate.

[0035] In one possible implementation, the number of driving wheels 133 and pressure wheels 134 is the same, and the axis connecting the axes of the driving wheels 133 and pressure wheels 134 is perpendicular to the glass substrate. This can reduce the torsional force on the glass substrate and reduce deformation of the glass substrate. The spacing between two adjacent driving wheels 133 does not exceed half the length of the glass substrate. For example, the spacing between two adjacent driving wheels 133 can be any typical but non-limiting value such as 30 cm, 50 cm, 60 cm, 80 cm, 100 cm, 120 cm, or an interval between any two values. In this case, the stability of glass substrate transmission is improved.

[0036] In one possible implementation, the linear mounting plate 131 is provided with a plurality of mounting seats 137, each of which is provided with a corresponding pressure roller 134, and the pressure roller 134 is located above the driving roller 133. Specifically, the mounting seats 137 are fixed to the linear mounting plate 131 by a plurality of bolts, which improves the convenience of installing and removing the pressure roller 134.

[0037] In one possible implementation, Figure 3 As shown, the air flotation mechanism 120 includes a first air flotation assembly 121 and a second air flotation assembly 122 sequentially arranged along the platform frame 110. The first air flotation assembly 121 and the second air flotation assembly 122 are respectively connected to an external air supply device. The first air flotation assembly 121 includes two first transverse air flotation bars 1211 and a plurality of first flow direction air flotation bars 1212 disposed between the two first transverse air flotation bars 1211. The second air flotation assembly 122 includes two second transverse air flotation bars 1221 and a plurality of second flow direction air flotation bars 1222 disposed between the two second transverse air flotation bars 1221. The first transverse air flotation bars 1211 and the second transverse air flotation bars 1221 are staggered in the conveying direction of the glass substrate. Specifically, the first transverse air flotation bars 1211 and the first directional air flotation bars 1212, as well as the second transverse air flotation bars 1221 and the second directional air flotation bars 1222, are arranged perpendicular to each other. This helps improve force uniformity on the glass substrate, reduces localized pressure concentration, and prevents glass breakage or warping caused by uneven pressure. Furthermore, the multiple first directional air flotation bars 1212 and the multiple second directional air flotation bars 1222 can be spaced farther apart to reduce interference with the detection assembly 30. The two first transverse air flotation bars 1211 and the second transverse air flotation bars 1221 are staggered in the direction of glass substrate transport, enabling the multiple detection assemblies 30 to jointly detect the entire position of the glass substrate.

[0038] In one possible implementation, Figure 1 As shown, there are four multi-axis driven positioning assemblies 20 and four detection assemblies 30. The four multi-axis driven positioning assemblies 20 are arranged along the platform frame 110. The four detection assemblies 30 are respectively located above the first air floatation assembly 121 and the second air floatation assembly 122. The four detection assemblies 30 are respectively aligned with different areas of the glass substrate and avoid the first flow direction air floatation bar 1212 and the second flow direction air floatation bar 1222 for detection. Specifically, as Figure 6 As shown, when the glass substrate is being transported, the four inspection assemblies 30 are driven by the multi-axis driving and positioning assembly 20 to move the inspection assemblies 30 and inspect the divided areas according to the trajectory, ensuring that the four inspection assemblies 30 inspect the glass substrate while operating according to the trajectory. The trajectory area is divided into a first area 310, a second area 320, a third area 330, and a fourth area 340. The first flow direction air floating bars 1212 in the first area 310 and the second area 320 are staggered with the second flow direction air floating bars 1222 in the third area 330 and the fourth area 340. The first area 310 and the third area 330 inspect the portion of the glass substrate that is not provided with the first flow direction air floating bar 1212, with the glass substrate as the center. The second area 320 and the fourth area 340 inspect the portion of the glass substrate that is not provided with the second flow direction air floating bar 1222, with the glass substrate as the center. During the inspection process, the multi-axis driving and positioning assembly 20 drives the inspection assembly 30 to move in the X, Y, and Z axis directions for inspection.

[0039] In one possible implementation, the second air flotation assembly 122 further includes two edge support air flotation strips 1223, one located on either side of the plurality of first flow direction air flotation strips 1212. The width of the two edge support air flotation strips 1223 is smaller than the width of the first flow direction air flotation strips 1212 and the second flow direction air flotation strips 1222, and the two edge support air flotation strips 1223 are installed at a lower height than the second flow direction air flotation strips 1222, thereby compensating for the position of the second flow direction air flotation strips 1222 and reducing interference with the detection assembly 30.

[0040] In one possible implementation, the air flotation mechanism 120 further includes a third air flotation assembly 123 adjacent to the second air flotation assembly 122. The third air flotation assembly 123 has the same composition as the first air flotation assembly 121 and is mainly used to transport the glass substrate to subsequent processes.

[0041] In one possible implementation, the inspection component 30 includes at least one of a defect detector and a surface roughness meter. The detector is used to detect defects on or within the glass substrate, such as cracks and bubbles. The detector is also used to measure the surface roughness of the glass substrate to ensure that the surface quality meets requirements.

[0042] In one possible implementation, a method for using a glass substrate detection device includes the following steps: The glass substrate is transferred from the glass transfer platform 10 to the bottom of the detection assembly 30 , and the detection assembly 30 senses the glass substrate; The multi-axis driving and positioning assembly 20 drives the detection assembly 30 to move according to the transmission speed of the glass transmission platform 10, reduces the relative speed between the detection assembly 30 and the glass substrate, and then detects the entire area of ​​the glass substrate.

[0043] This method drives the detection component 30 through the multi-axis drive positioning component 20, so that the relative speed between the detection component 30 and the glass substrate to be tested is maintained at a relatively low value. Therefore, when the detection is performed under the condition of a high transmission speed of the glass substrate, not only the number of defects that are missed is reduced, and the probability of unqualified products flowing into subsequent production processes is reduced, but also it is beneficial to improve the qualification rate of liquid crystal products and reduce production costs.

[0044] In one possible implementation, Figure 6 As shown, four groups of multi-axis driven positioning assemblies 20 and corresponding four groups of detection assemblies 30 are set in different areas above the glass transmission platform 10. Each multi-axis driven positioning assembly 20 drives the detection assembly 30 to move within a specific area to detect different parts of the glass substrate, and also overlapped parts. While ensuring complete detection of the glass substrate, the movement range of a single detection assembly 30 is reduced. The four detection assemblies 30 work in coordination, further improving the detection efficiency and product production efficiency.

[0045] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of protection of the present application is limited to these examples. In line with the present application, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of different aspects of one or more embodiments of the present application as described above, which are not provided in detail for the sake of simplicity.

[0046] The one or more embodiments of this application are intended to encompass all such substitutions, modifications, and variations that fall within the broad scope of this application. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of one or more embodiments of this application should be included in the scope of protection of this application.

Claims

1. A high-speed glass substrate detection device, characterized in that: include: A glass transport platform (10) for transporting a glass substrate; A multi-axis drive positioning assembly (20) for achieving positioning and operation in three-dimensional space; A detection component (30) is arranged on the execution end of the multi-axis drive positioning component (20), and the multi-axis drive positioning component (20) drives the detection component (30) to move in the same direction as the glass substrate for detection; The glass transmission platform (10) comprises a platform frame (110), an air flotation mechanism (120) arranged on the platform frame (110), and a glass driving mechanism (130) arranged on the platform frame (110); the glass driving mechanism (130) comprises two linear transmission components respectively located on both sides of the air flotation mechanism (120); the two linear transmission components synchronously drive two side edges of the glass substrate; the air flotation mechanism (120) is used to form a stable air film to suspend the glass substrate; The air flotation mechanism (120) comprises a first air flotation assembly (121) and a second air flotation assembly (122) sequentially arranged along the platform frame (110); the first air flotation assembly (121) and the second air flotation assembly (122) are respectively connected to an external air supply device; the first air flotation assembly (121) comprises two first transverse air flotation strips (1211) and a plurality of first flow direction air flotation strips (1212) arranged between the two first transverse air flotation strips (1211); The second air flotation assembly (122) comprises two second transverse air flotation strips (1221) and a plurality of second flow direction air flotation strips (1222) arranged between the two second transverse air flotation strips (1221), wherein the first transverse air flotation strips (1211) and the second transverse air flotation strips (1221) are staggered in the transmission direction of the glass substrate; The number of the multi-axis drive positioning components (20) is four, and the number of the detection components (30) is four. The four multi-axis drive positioning components (20) are arranged along the platform frame (110). The four detection components (30) are respectively located above the first air float component (121) and the second air float component (122). The four detection components (30) are respectively aligned with different areas of the glass substrate and avoid the first flow direction air float bar (1212) and the second flow direction air float bar (1222) for detection.

2. The glass substrate detection device according to claim 1, wherein: The multi-axis drive positioning assembly (20) comprises a support structure (210) and a multi-joint manipulator (220) disposed on the support structure (210), wherein an execution end of the multi-joint manipulator (220) is connected to a detection assembly (30); Alternatively, the multi-axis drive positioning assembly (20) includes a truss manipulator, and the execution end of the truss manipulator is connected to the detection assembly (30).

3. The glass substrate detection device according to claim 2, wherein: The support structure (210) includes a base frame (211) and a mounting frame (212) arranged on top of the base frame (211); the multi-joint manipulator (220) is arranged on the base frame (211); and power supply and communication cables of the detection component (30) are arranged on the mounting frame (212); And / or, the truss manipulator includes a gantry truss manipulator or a cantilever truss manipulator.

4. The glass substrate detection device according to claim 3, wherein: The basic frame (211) includes a gantry frame or a cantilever frame.

5. The glass substrate detection device according to claim 1, wherein: The linear transmission assembly comprises a linear mounting plate (131), a plurality of motors (132) arranged along the linear mounting plate (131), a plurality of driving wheels (133), a plurality of pressure wheels (134), a plurality of guide wheels (135), and a plurality of support wheels (136). The output shaft of the motor (132) is drivingly connected to a corresponding driving wheel (133). A gap is provided between the driving wheel (133) and the pressure wheel (134) for passing a glass substrate. The guide wheel (135) is in rolling engagement with a side edge of the glass substrate to define a transmission direction of the glass substrate. The support wheel (136) is in rolling engagement with the bottom of an edge of the glass substrate.

6. The glass substrate detection device according to claim 5, wherein: The number of the driving wheels (133) and the pressing wheels (134) is the same, and the axis connecting the driving wheels (133) and the pressing wheels (134) is perpendicular to the glass substrate; And / or, a plurality of mounting seats (137) are provided on the linear mounting plate (131), a corresponding pressure wheel (134) is provided on each mounting seat (137), and the pressure wheel (134) is located above the driving wheel (133).

7. The glass substrate detection device according to claim 6, wherein: The second air flotation assembly (122) further includes two edge support air flotation strips (1223), which are respectively located on both sides of the plurality of first flow direction air flotation strips (1212); And / or, the air flotation mechanism (120) further includes a third air flotation component (123) adjacent to the second air flotation component (122); And / or, the detection component (30) includes at least one of a defect detector and a surface roughness meter.

8. The glass substrate detection device according to any one of claims 1 to 4, characterized in that: The method for using the glass substrate detection device comprises the following steps: The glass substrate is transported on the glass transport platform (10) to the bottom of the detection component (30), and the detection component (30) senses the glass substrate; The multi-axis driving positioning component (20) drives the detection component (30) to move according to the transmission speed of the glass transmission platform (10), reduces the relative speed between the detection component (30) and the glass substrate, and then detects the entire area of ​​the glass substrate.

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