Motor control system and motor control method of ion implanter

Abstract

The application provides a motor control system and a motor control method of an ion implanter, and relates to the technical field of control.In the application, the motor control system of the ion implanter can comprise a processor, a resource configuration module, a motor driver and a motor.The processor can adopt a DMA mode data sending method to send first serial port data to the motor driver, wherein the first serial port data comprises at least one control instruction for the motor in an ion implantation process;after determining that the processor sends the first serial port data to the motor driver, the resource configuration module can release resources previously configured for the processor and the motor driver to perform serial port communication; and the motor driver can receive the first serial port data sent by the processor and control the motor according to the first serial port data.Therefore, the stability and efficiency of motor control are improved.

Description

Technical Field

[0001] This application relates to the field of control technology, and in particular to a motor control system and motor control method for an ion implanter. Background Technology

[0002] In semiconductor manufacturing, the ion implanter is a critical piece of equipment. The real-time performance and precision of the motor control within the ion implanter significantly impact the quality and yield of semiconductor products (such as wafers).

[0003] In related technologies, since the processor in an ion implanter typically communicates with the motor of the ion implanter via a serial interface (SI), the central processing unit (CPU) in the processor sequentially executes the serial communication service and the ion implantation service, thereby controlling the motor. The serial communication service is the data transmission service between multiple modules included in the ion implanter (such as the processor, motor, and sensors).

[0004] However, the above-mentioned motor control method increases the time cycle for motor status acquisition and command issuance due to serial communication, which affects the stability and efficiency of motor control, resulting in lower stability and efficiency of motor control. Summary of the Invention

[0005] This application provides a motor control system and motor control method for an ion implanter to improve the stability and efficiency of motor control.

[0006] In a first aspect, embodiments of this application provide a motor control system for an ion implanter, the motor control system of the ion implanter including: a processor, a resource configuration module, a motor driver, and a motor;

[0007] The processor is configured to send first serial port data to the motor driver using a direct memory access (DMA) data transmission method; the first serial port data includes at least one control command for the motor during ion implantation.

[0008] The resource configuration module is used to release the resources pre-configured for serial communication between the processor and the motor driver after determining that the processor sends the first serial port data to the motor driver;

[0009] The motor driver is used to receive the first serial port data sent by the processor and control the motor according to the first serial port data.

[0010] In an optional embodiment, the first serial port data further includes: a request to obtain status information of the motor driver;

[0011] The processor is further configured to send the first serial port data to the motor driver within a set time range according to a first state acquisition frequency when the processor determines that the motor driver and / or the motor is used for ion implantation;

[0012] In addition, a DMA-based data receiving method is used to receive second serial port data sent by the motor driver; the second serial port data is used to indicate the motion state of the motor driver.

[0013] In an optional embodiment, the resource configuration module is further configured to trigger a DMA interrupt when it is determined that the processor has received the second serial port data;

[0014] The DMA interrupt is used to instruct the processor to stop data processing for ion implantation services and to start data processing for the second serial port data.

[0015] In an optional embodiment, the processor is further configured to send the first serial port data to the motor driver at a second state acquisition frequency within the set time range when it is determined that the motor driver and / or the motor is not used for ion implantation; wherein the second state acquisition frequency is less than the first state acquisition frequency;

[0016] Furthermore, the data receiving method employing the DMA approach receives third serial port data sent by the motor driver; the third serial port data is used to indicate the motion state of the motor driver.

[0017] The frequency of acquiring the second state is less than the frequency of acquiring the first state.

[0018] In one optional embodiment, the motor control system of the ion implanter further includes a task scheduling module;

[0019] The task scheduling module is used to determine the start time for obtaining the motor's state based on the semaphores and mutexes corresponding to the threads in the resource configuration module.

[0020] In addition, a first message carrying the state acquisition start time is sent to the motor driver so that the motor driver starts collecting the operating state of the motor at the state acquisition start time.

[0021] In an optional embodiment, the task scheduling module is further configured to determine the task priority and / or the resource allocation strategy of the multiple tasks to be processed according to the task processing requirements of the multiple tasks to be processed.

[0022] Secondly, embodiments of this application also provide a motor control method for an ion implanter, applied to a processor in the motor control system of the ion implanter as described in the first aspect, the method comprising:

[0023] In response to a motor control request for the motor, the DMA-based data transmission method is invoked;

[0024] The data transmission method using the DMA approach sends first serial port data to the motor driver; the first serial port data includes at least one control command for the motor during ion implantation.

[0025] In an optional embodiment, the first serial port data further includes: a request to obtain status information of the motor driver, and the method further includes:

[0026] The data receiving method using the DMA approach receives second serial port data sent by the motor driver. The second serial port data is serial port data returned by the motor driver at a first state acquisition frequency within a set time range when the processor determines that the motor driver and / or the motor are used for ion implantation. The second serial port data is used to indicate the motion state of the motor driver.

[0027] In an optional embodiment, after receiving the second serial port data sent by the motor driver, the data receiving method using the DMA method further includes:

[0028] In response to a DMA interrupt triggered by the resource configuration module when it determines that the processor has received the second serial port data, data processing for the ion implantation service is stopped, and data processing for the second serial port data is started.

[0029] In an optional embodiment, the method further includes:

[0030] The data receiving method using the DMA approach receives third serial port data sent by the motor driver. The third serial port data is serial port data returned by the motor driver within a set time range at a second state acquisition frequency when the processor determines that the motor driver and / or the motor is not used for ion implantation. The third serial port data is used to indicate the motion state of the motor driver. The second state acquisition frequency is less than the first state acquisition frequency.

[0031] The beneficial effects of this application are as follows:

[0032] In the motor control system of the ion implanter provided in this application embodiment, the processor can use a DMA-based data transmission method to send first serial port data to the motor driver, achieving high-speed data transmission between the processor and the motor driver. Furthermore, the resource configuration module can release pre-configured resources for serial communication between the processor and the motor driver after determining that the processor has sent the first serial port data, thereby reducing the system resource consumption for data transmission. In addition, after receiving the first serial port data sent by the processor, the motor driver can efficiently control the motor according to at least one control instruction included in the first serial port data. Therefore, the aforementioned motor control system avoids the problem in related technologies where serial communication increases the time cycle for motor status acquisition and command issuance, leading to lower stability and efficiency of motor control, thus improving the stability and efficiency of motor control.

[0033] Furthermore, other features and advantages of this application will be set forth in the following description and will be apparent in part from the description, or may be learned by practicing the application. The objectives and other advantages of this application may be realized and obtained by means of the structures particularly pointed out in the written description, claims, and drawings. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described herein are used to provide a further understanding of this application, constitute a part of this application, and do not constitute an improper limitation of this application. In the accompanying drawings:

[0035] Figure 1 A logic diagram of serial port motor control for a related ion implanter provided in an embodiment of this application;

[0036] Figure 2 A schematic diagram of the system architecture of a motor control system for an ion implanter provided in this application embodiment;

[0037] Figure 3 A schematic diagram of the system architecture of a motor control system for an ion implanter provided in an embodiment of this application;

[0038] Figure 4 A schematic diagram of the system architecture of a motor control system for an ion implanter provided in an embodiment of this application;

[0039] Figure 5 A schematic diagram illustrating the implementation flow of a motor control method executed by a processor in a motor control system, as provided in an embodiment of this application;

[0040] Figure 6 This is a schematic diagram of the motor control logic of an ion implanter provided in an embodiment of this application. Detailed Implementation

[0041] Embodiments of this application will now be described in more detail with reference to the accompanying drawings. While some embodiments of this application are shown in the drawings, it should be understood that this application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this application. It should be understood that the drawings and embodiments of this application are for illustrative purposes only and are not intended to limit the scope of protection of this application.

[0042] It should be understood that the steps described in the method embodiments of this application may be performed in different orders and / or in parallel. Furthermore, the method embodiments may include additional steps and / or omit the steps shown. The scope of this application is not limited in this respect.

[0043] The term "comprising" and its variations as used herein are open-ended, meaning "including but not limited to". The term "based on" means "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". Definitions of other terms will be given in the following description. It should be noted that the concepts of "first", "second", etc., mentioned in this application are used only to distinguish different devices, modules, or units, and are not intended to limit the order of functions performed by these devices, modules, or units or their interdependencies.

[0044] It should be noted that the terms "a" and "a plurality of" used in this application are illustrative rather than restrictive, and those skilled in the art should understand that, unless otherwise expressly indicated in the context, they should be understood as "one or more".

[0045] The names of the messages or information exchanged between multiple devices in the embodiments of this application are for illustrative purposes only and are not intended to limit the scope of these messages or information.

[0046] The following explanations of some terms used in the embodiments of this application are provided to facilitate understanding by those skilled in the art.

[0047] (1) Wafer: refers to the silicon wafer used to manufacture silicon semiconductor circuits. Its raw material is silicon. High-purity polycrystalline silicon is dissolved and doped with silicon crystal seed, and then slowly pulled out to form a cylindrical single-crystal silicon. After grinding, polishing and slicing, the silicon crystal rod is formed into a silicon wafer, which is a wafer. Domestic wafer production lines are mainly 8-inch and 12-inch.

[0048] (2) DMA: is a high-speed data transfer mechanism that allows data to be exchanged directly between peripherals and memory, or between memory modules, without the intervention of the central processing unit (CPU).

[0049] (3) SI: Also known as serial port, it is an extended interface that uses serial communication, meaning that data is transmitted bit by bit sequentially. Since the communication line of SI is simple, only one pair of transmission lines is needed to realize bidirectional communication (telephone lines can be used directly as transmission lines), which greatly reduces the cost and is especially suitable for long-distance communication, but the transmission speed is relatively slow.

[0050] (4) Universal synchronous / asynchronous serial receiver / transmitter (USART): It is a commonly used serial communication interface, which usually has functions such as data transmission, data reception and synchronous and asynchronous communication.

[0051] (5) Advanced Reduced Instruction Set Computer (ARM): is a microprocessor architecture and chip technology based on the principles of reduced instruction set computer (RISC).

[0052] (6) Free real-time operating system (Free RTOS): It is an open-source, lightweight real-time operating system with functions such as task management, memory management, interrupt management and time management.

[0053] (7) Semaphore: Used to control access to shared resources, limiting the number of processes or threads that can access shared resources simultaneously. For example, semaphores are usually represented by integer values, or optionally by a binary number, where 1 bit represents the number of available resources and 0 bits represent that the resource is full. When a process or thread requests a resource, the value of the semaphore is decremented by 1, and when the resource is released, the value of the semaphore is incremented by 1.

[0054] (8) Mutex: Used to protect shared resources and ensure that only one process or thread can access the resource at a time. Mutexes are usually implemented through locks. When one process or thread acquires the lock, other processes or threads will not be able to acquire the lock.

[0055] Based on the above explanations of terms and related terminology, the design concept of the embodiments of this application will be briefly introduced below:

[0056] In semiconductor manufacturing, ion implanters are a critical piece of equipment. The real-time performance and precision of motor control directly impact wafer quality and yield. However, because ion implanters typically operate in harsh environments, such as high pressure and strong radiation, related technologies often separate serial communication functions (e.g., serial communication functions) from ion implantation processes by communicating with the motor (e.g., a servo motor) via a serial port.

[0057] For example, see Figure 1 As shown, while waiting for serial port data (i.e., waiting for USART to receive), the processing of ion implantation services is stalled, wasting system resources (e.g., CPU resources). Furthermore, separate blank time needs to be reserved to process ion implantation services, increasing the motor status reading time cycle.

[0058] Therefore, it can be seen that the above-mentioned motor control method will increase the time cycle of motor status acquisition and command issuance due to serial communication, thereby affecting the stability and efficiency of motor control. In other words, the existing motor control method has the problem of low stability and efficiency of motor control, and the cycle time cannot be reduced by increasing the serial port baud rate.

[0059] In view of this, in order to solve or improve the above-mentioned problems and enhance the stability and efficiency of motor control, this application provides a schematic diagram of the system architecture of a motor control system for an ion implanter. (See also...) Figure 2 As shown, the motor control system (e.g., an ARM-based motor control system) may include: a processor 11, a resource configuration module 12, a motor driver 13, and a motor 14. The resource configuration module 12 can interact with both the processor 11 and the motor driver 13. The motor driver 13 can interact with both the resource configuration module 12 and the motor 14.

[0060] In this embodiment, the processor 11 can be used to send first serial port data to the motor driver 13 using a DMA-based data transmission method. The first serial port data may include at least one control command for the motor 14 during the ion implantation process. Optionally, during the process of sending the first serial port data to the motor driver 13, the processor 11 may send one control command at a time, and wait for a response from the motor driver 13 before sending the next control command.

[0061] The resource configuration module 12 can be used to release resources (such as CPU resources, memory resources, etc.) pre-configured for serial communication between the processor 11 and the motor driver 13 after determining that the processor 11 has sent the first serial port data to the motor driver 13. The motor driver 13 can be used to receive the first serial port data sent by the processor 11 and control the motor 14 according to the first serial port data. It should be noted that the resource configuration module 12 can also be called a resource scheduling module, and of course, it can have other names. This application embodiment does not specifically limit this.

[0062] It should be understood that the embodiments of this application do not impose any limitation on the number of devices or components involved in the above-described system architecture. For example, the above-described system architecture may include more motor drivers, or fewer motor drivers, or may also include other network devices or modules (e.g., sensors). See, for example, [link to relevant documentation]. Figure 3 As shown, the motor control system may include: a processor (e.g., an ARM chip), a resource configuration module (e.g., Free RTOS), multiple motor drivers, multiple motors, and multiple sensors. One motor driver may correspond to one motor, and one motor may correspond to one or more sensors; this embodiment does not specifically limit this.

[0063] Optionally, the multiple devices or components included in the motor control system of the ion implanter described above can be deployed separately or integrated. This application embodiment does not specifically limit this. For example, the processor 11 and the resource configuration module 12 can be deployed separately, or the resource configuration module can be integrated into the processor 11.

[0064] Based on the above method, the processor 11 can use a DMA-based data transmission method to send the first serial port data to the motor driver 13, achieving high-speed data transmission between the processor 11 and the motor driver 13. Furthermore, after determining that the processor 11 has sent the first serial port data to the motor driver 13, the resource configuration module 12 can release the resources pre-configured for serial communication between the processor 11 and the motor driver 13, thereby reducing the system resource consumption caused by data transmission. In addition, after receiving the first serial port data sent by the processor 11, the motor driver 13 can efficiently control the motor 14 according to at least one control instruction included in the first serial port data. Therefore, the motor control system of the ion implanter described above can avoid the problem in related technologies where serial communication increases the time cycle for motor status acquisition and command issuance, leading to lower stability and efficiency of motor control, thus improving the stability and efficiency of motor control.

[0065] Furthermore, by configuring the processor 11 in the motor control system provided in this application embodiment with a DMA-based data transmission method, the problem in related technologies that the processor 11 cannot perform real-time and efficient control of the motor 14 due to the generally harsh working environment of the ion implanter is overcome, thus significantly improving the response speed of motor control.

[0066] To efficiently monitor the operating status of motor 14 and achieve efficient control of motor 14, processor 11 can also use a DMA-based data transmission method to send a status information acquisition request for motor 14 to motor driver 13. Therefore, in an optional implementation, the aforementioned first serial port data may further include a status information acquisition request for motor driver 13. In this case, processor 11 can also be used to send first serial port data to motor driver 13 within a set time range (e.g., 5 minutes) at a first status acquisition frequency (e.g., 5 seconds / time) when it is determined that motor driver 13 and / or motor 14 are being used for ion implantation; and to receive second serial port data sent by motor driver 13 using a DMA-based data reception method. The aforementioned second serial port data can be used to indicate the motion status of motor driver 13.

[0067] The aforementioned second serial port data can also be referred to as the status information of the motor driver 13 or the operating status information of the motor driver 13. Of course, it can also have other names, and this application embodiment does not specifically limit it.

[0068] In an alternative implementation, the resource configuration module 12 can also be used to trigger a DMA interrupt when it is determined that the processor 11 has received the second serial port data. The DMA interrupt can be used to instruct the processor 11 to stop data processing for the ion implantation service and to begin data processing for the second serial port data.

[0069] Therefore, utilizing DMA data transmission, DMA data reception, and DMA interrupts not only reduces the system resource consumption of serial communication but also ensures real-time response to received second serial port data. In other words, using DMA for high-speed data transmission between processor 11 and motor driver 13 allows for rapid data transmission without requiring operation of resource configuration module 12, saving its resources for other operations. Furthermore, after processor 11 completes the transmission of the first serial port data, resource configuration module 13 can immediately suspend the ion implantation task, releasing its resources for ion implantation. Additionally, when the second serial port data is transmitted back, processor 11 can use DMA to receive it. After processor 11 finishes receiving the second serial port data, resource configuration module 13 can trigger a DMA interrupt to enable processor 11 to process the received second serial port data. It should be understood that after the DMA interrupt instructs processor 11 to stop data processing for the ion implantation task, processor 11 can release the resources required for ion implantation processing, making those resources available for processing the second serial port data.

[0070] Therefore, since ion implantation can be processed simultaneously with the transmission and reception of serial port data (i.e., the transmission of the first serial port data and the reception of the second serial port data), the idle state of the resource configuration module 12 waiting for the motor driver 13 to return data is avoided, thus maximizing the utilization of system resources and improving the overall task execution efficiency and real-time performance of the system.

[0071] Existing motor control systems lack effective synchronization mechanisms and coordinated control logic, resulting in insufficient coordination between multi-axis motors. This leads to inefficiency and susceptibility to delays or errors in complex operating environments. Furthermore, during ion implantation operations, even when specific axes are not required, the motor control system still needs to continuously monitor the operating status of each motor at high frequency, resulting in excessive waste of system resources.

[0072] Optionally, the processor 11 can also be used to send first serial port data to the motor driver 13 at a second state acquisition frequency (e.g., 15 seconds / time) within a set time range (e.g., 5 minutes) when it is determined that the motor driver 13 and / or the motor 14 are not being used for ion implantation; and to receive third serial port data sent by the motor driver 13 using a DMA-based data receiving method. The aforementioned second state acquisition frequency is less than the aforementioned first state acquisition frequency, and the aforementioned third serial port data can be used to indicate the motion state of the motor driver 13.

[0073] by Figure 3Taking motor 1 and motor 2 as examples, assuming that motor 1 is used for ion implantation and motor 2 is not used for ion implantation, the processor can acquire information about the operating status of motor driver A at a first state acquisition frequency (e.g., 8 seconds / time) within a set time range (e.g., 10 minutes) to obtain the second serial port data returned by motor driver A to indicate the operating status of motor driver A; and the processor can acquire information about the operating status of motor driver B at a second state acquisition frequency (e.g., 30 seconds / time) within the aforementioned set time range (i.e., 10 minutes) to obtain the third serial port data returned by motor driver B to indicate the operating status of motor driver B.

[0074] Based on the above approach, in the operational flow of an ion implanter, if the motor control system uses multi-axis control, and if there are unused motors among the multiple motors in the operational flow, continuing to acquire the operating status of those unused motors at high frequency will waste system resources and increase the time cycle for acquiring motor status. Therefore, temporarily reducing the frequency of acquiring the status of those motors can better meet the real-time requirements of the motors currently in use.

[0075] Furthermore, existing motor control systems typically rely on a fixed task execution sequence, making it difficult to dynamically schedule tasks based on actual working conditions. This results in low task processing efficiency, meaning that task scheduling in existing motor control systems is inflexible. To achieve flexible scheduling of multiple tasks involved in ion implantation operations, refer to... Figure 4 As shown in the embodiment of this application, the motor control system of the ion implanter may further include a task scheduling module 15. The task scheduling module 15 can be used to determine the task priorities and / or resource allocation strategies for the multiple tasks to be processed based on their processing requirements (e.g., data acquisition, logical operations, network communication, etc.). This approach ensures the orderly execution or progress of multiple tasks during motor control.

[0076] It is understandable that the task priorities corresponding to the multiple pending tasks can be used to determine the execution order of the multiple pending tasks, and the resource allocation strategy for the multiple pending tasks is determined based on the resource requirements of each of the multiple pending tasks.

[0077] In an optional implementation, the task scheduling module 15 can also be used to determine the start time for acquiring the status of the motor 14 based on the semaphores and mutexes corresponding to the threads in the resource configuration module 12; and to send a first message carrying the start time for acquiring the status to the motor driver 13, so that the motor driver 13 begins to acquire the operating status of the motor 14 at the start time for acquiring the status. This not only optimizes task scheduling but also ensures data consistency and synchronization between control commands, thereby improving the overall efficiency of the motor control system.

[0078] Taking processor 11 as an example using Free RTOS, the start time (i.e., the start time of status acquisition) for data acquisition tasks related to motor status acquisition can be determined by utilizing the semaphores and mutexes of Free RTOS. Then, the acquisition of motor operating status information can begin based on this start time. This approach, through task scheduling optimization using Free RTOS, dynamically adjusts task priorities and resource allocation, enabling the motor control system to more flexibly handle multi-task processing needs, ensuring real-time response to critical control tasks, and improving overall task processing efficiency.

[0079] Furthermore, by combining DMA and interrupt mechanisms, Free RTOS, and multi-axis synchronous control technology, efficient control and monitoring of motor 14 are achieved. The motor control system can automatically optimize task scheduling and data transmission in a multi-tasking environment without relying on traditional high-load processing modes, significantly improving the response speed and stability of the motor control system. Automatic data transmission management via DMA effectively reduces system resource consumption, while the interrupt mechanism ensures real-time response to task processing, and the synchronization of multi-axis control further enhances the overall performance of the motor control system.

[0080] In summary, the motor control system for the ion implanter provided in this application can automatically manage data transmission through DMA and interrupt mechanisms, reducing the load on the resource configuration module and meeting the real-time control requirements of ion implantation operations. Furthermore, it achieves multi-axis synchronous control, maintaining synchronization and coordination of multiple motors even in complex operating environments, ensuring the real-time data transmission and control accuracy of the motor control system. Therefore, compared to related technologies, the motor control system of this application can achieve more timely and precise motor control, further improving wafer quality and yield.

[0081] Furthermore, based on the same technical concept, this application also provides a motor control method for an ion implanter to improve the problem of low stability and efficiency of motor control in existing motor control systems.

[0082] For example, see Figure 5The diagram shown is a schematic representation of the implementation flow of a motor control method executed by a processor in a motor control system according to an embodiment of this application. The specific implementation flow of this method is as follows:

[0083] S501: In response to a motor control request for the motor, the DMA-based data transmission method is invoked.

[0084] For example, when executing step S501, after receiving a motor control request for the motor, the processor can call the DMA data transmission method to complete the subsequent transmission of serial port data.

[0085] S502: The data transmission method using DMA sends the first serial port data to the motor driver.

[0086] The aforementioned first serial port data includes at least one control command for the motor during ion implantation. For example, the aforementioned at least one control command may include: a control command to adjust the motor speed, a control command to adjust the duration of the motor speed, and a control command to adjust the motor rotation mode, etc.

[0087] Optionally, during the process of the processor sending the first serial port data to the motor driver, it can send one control command at a time, and wait for the motor driver to reply before sending the next control command.

[0088] Optionally, the aforementioned first serial port data may further include a request to acquire status information of the motor driver. Then, after the processor sends the status information acquisition request to the motor driver using a DMA-based data transmission method, the motor driver can return second serial port data to the processor indicating its operating status. This second serial port data can also be referred to as the motor driver's operating status information, and this embodiment does not limit its usage. Correspondingly, the processor may also use a DMA-based data reception method to receive the second serial port data sent by the motor driver.

[0089] In other words, the second serial port data mentioned above can be the serial port data returned by the motor driver according to the first state within a set time range when the processor determines that the motor driver and / or the motor is used for ion implantation.

[0090] To further improve the stability and efficiency of motor control, after receiving the second serial port data sent by the motor driver using a DMA-based data reception method, the processor can also respond to a DMA interrupt triggered by the resource configuration module when it determines that the processor has received the second serial port data. This allows it to stop data processing for ion implantation services and begin processing the second serial port data. This not only enables real-time processing of the second serial port data but also achieves flexible scheduling of task execution.

[0091] Furthermore, if among the multiple motors included in the motor control system, there are motors that are not used for ion implantation, the status acquisition frequency of the motor driver can be temporarily reduced to meet the real-time requirements of the motors used for ion implantation. Therefore, when the processor determines that the motor driver is not in use and / or the motor is not used for ion implantation, it can acquire information about the motor's operating status within the aforementioned set time range at the second status acquisition frequency, obtaining third serial port data indicating the operating status of the motor driver. The aforementioned second status acquisition frequency is less than the aforementioned first status acquisition frequency.

[0092] For example, the preset time range can be 10 minutes, the first state acquisition frequency can be 5 seconds / time, and the second state acquisition frequency can be 20 seconds / time. Optionally, the processor can also use a DMA-based data receiving method to receive third serial port data sent by the motor driver.

[0093] In other words, the aforementioned third serial port data can be the serial port data returned by the motor driver at the second state acquisition frequency within a set time range when the processor determines that the motor driver and / or the motor is not being used for ion implantation.

[0094] In one alternative implementation, see [link to relevant documentation]. Figure 6 The diagram illustrates the logic of motor control for an ion implanter according to an embodiment of this application. Upon receiving a motor control request for the motor, the processor invokes and employs a DMA-based data transmission method to send first serial port data to the motor controller; and receives second serial port data sent by the motor controller using a DMA-based data reception method. Furthermore, upon receiving the second serial port data from the motor controller, the processor triggers a DMA interrupt to process the data. This approach improves the response speed and stability of the motor control system. Moreover, the processor can continue ion implantation operations while receiving and sending serial port data, further enhancing the overall efficiency of the motor control system.

[0095] In summary, based on the motor control method of the ion implanter described in steps S501 to S502 above, the processor can use a DMA-based data transmission method (i.e., a DMA-based data sending method and a DMA-based data receiving method) to interact with the motor driver in the motor control system. This avoids the problem of low stability and efficiency of motor control caused by increased communication time due to serial communication in related technologies, and improves the stability and efficiency of motor control.

[0096] Furthermore, it should be understood that the above-disclosed embodiments are merely preferred embodiments of this application and should not be construed as limiting the scope of the invention. Therefore, any equivalent variations made in accordance with the claims of this invention are still within the scope of this application.

Claims

1. A motor control system for an ion implanter, characterized in that, include: Processor, resource configuration module, motor driver and motor; The processor is configured to, when determining that the motor driver and / or the motor is being used for ion implantation, send first serial port data to the motor driver using a direct memory access (DMA) data transmission method within a set time range at a first state acquisition frequency, and receive second serial port data sent by the motor driver using a DMA data reception method; the first serial port data includes at least one control command for the motor during ion implantation and a status information acquisition request for the motor driver, and the second serial port data is used to indicate the motion state of the motor driver; Alternatively, the processor is configured to, when determining that the motor driver and / or the motor is not being used for ion implantation, within the set time range, acquire the first serial port data according to a second state acquisition frequency and using the DMA-based data transmission method, send the first serial port data to the motor driver; wherein the second state acquisition frequency is less than the first state acquisition frequency; The resource configuration module is used to release the resources pre-configured for serial communication between the processor and the motor driver after determining that the processor sends the first serial port data to the motor driver, and to trigger a DMA interrupt when determining that the processor receives the second serial port data; the DMA interrupt is used to instruct the processor to stop data processing for ion implantation services and to start data processing for the second serial port data. The motor driver is used to receive the first serial port data sent by the processor and control the motor according to the first serial port data.

2. The motor control system as described in claim 1, characterized in that, The processor is further configured to receive third serial port data sent by the motor driver using the DMA data receiving method; the third serial port data is used to indicate the motion state of the motor driver.

3. The motor control system as described in claim 1 or 2, characterized in that, The system also includes: a task scheduling module; The task scheduling module is used to determine the start time for obtaining the motor's state based on the semaphores and mutexes corresponding to the threads in the resource configuration module. In addition, a first message carrying the state acquisition start time is sent to the motor driver so that the motor driver starts collecting the operating state of the motor at the state acquisition start time.

4. The motor control system as described in claim 3, characterized in that, The task scheduling module is also used to determine the task priority and / or resource allocation strategy of the multiple tasks to be processed according to their task processing requirements.

5. A motor control method for an ion implanter, characterized in that, The processor used in the motor control system of the ion implanter according to any one of claims 1-4 includes: In response to a motor control request for the motor, the data transmission method using Direct Memory Access (DMA) is invoked; When it is determined that the motor driver and / or the motor is used for ion implantation, within a set time range, according to the first state acquisition frequency, the first serial port data is sent to the motor driver using the DMA data transmission method, and the second serial port data sent by the motor driver is received using the DMA data reception method; the first serial port data includes at least one control command for the motor during ion implantation and a status information acquisition request for the motor driver, and the second serial port data is used to indicate the motion state of the motor driver; Alternatively, when it is determined that the motor driver and / or the motor is not used for ion implantation, the first serial port data is sent to the motor driver within the set time range according to the second state acquisition frequency and using the DMA data transmission method; wherein the second state acquisition frequency is less than the first state acquisition frequency; In response to a DMA interrupt triggered by the resource configuration module when it determines that the processor has received the second serial port data, data processing for the ion implantation service is stopped, and data processing for the second serial port data is started.

6. The method as described in claim 5, characterized in that, The second serial port data is the serial port data returned by the motor driver at the frequency obtained in the first state within the set time range when the processor determines that the motor driver and / or the motor is used for ion implantation.

7. The method as described in claim 5 or 6, characterized in that, The method further includes: The data receiving method using the DMA approach receives third serial port data sent by the motor driver; the third serial port data is serial port data returned by the motor driver at the second state acquisition frequency within the set time range when the processor determines that the motor driver and / or the motor is not used for ion implantation; the third serial port data is used to indicate the motion state of the motor driver.

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