Flexible plasma electrode

Abstract

This invention relates to the field of medical device technology, and more particularly to a flexible plasma electrode, comprising: a first electrode layer including multiple electrode assemblies, each electrode assembly including two parallel ground electrodes with a gap between them; a second electrode layer, which is parallel to and stacked with the first electrode layer, and includes multiple parallel high-voltage electrodes facing the gap; and a first intermediate layer located between the first and second electrode layers. The design structure, employing two ground electrodes surrounding the entire high-voltage electrode, achieves a directional, constrained closed electric field distribution between the high-voltage electrode and adjacent ground electrodes through geometric coordination, effectively suppressing the field coupling effect between adjacent discharge units, realizing closed electric field constraint and discharge consistency control, and solving the problem of discharge consistency and uniformity between different electrode groups.

Description

Technical Field

[0001] This invention relates to the field of medical device technology, and more particularly to a flexible plasma electrode. Background Technology

[0002] Currently, plasma has achieved remarkable research results in sterilization, material surface modification, dental treatment, cosmetic procedures, hemostasis and anti-inflammation, wound healing, skin disease treatment, and tumor treatment, with no signs of side effects or complications. Therefore, combining plasma with the field of clinical medicine can serve as an adjunct to surgery or assist drugs in treating diseases or managing wounds.

[0003] Dielectric barrier discharge (DBD), a common plasma discharge method, can generate stable plasma at room temperature and pressure. Due to its simple structure and high energy efficiency, it has become one of the most commonly used plasma production methods. Its principle involves placing one or more layers of insulating dielectric material within the discharge space. This dielectric material can be suspended in the discharge space or cover the electrodes. Because the dielectric material prevents the passage of direct current, DBD is typically driven by AC or pulsed power supplies. When the intensity of the alternating electric field applied across the positive and negative electrodes reaches the gas breakdown strength, the gas between the electrodes breaks down, simultaneously creating a discharge channel. Dielectric barrier discharge (DBD) is currently widely used in applications and research in ozone synthesis, material surface modification, and environmental pollutant treatment. Surface dielectric barrier discharge (SDBD) is a simple, flexible, portable, and scalable low-temperature plasma generation method that can uniformly and effectively treat wounded surfaces, making it ideal for treating biological surfaces.

[0004] Flexible SDBD electrodes, designed based on flexible substrate materials, integrate high-voltage / low-voltage metal electrodes through a printing and lamination process. Their unique bendability allows them to adapt to the multi-curvature epidermal treatment needs of the human body. However, in the process of continuous promotion and application, current flexible SDBD electrodes have encountered application problems such as uneven discharge (especially under bending conditions), severe electrode heating, frequent breakdowns during normal operation, and poor electrical safety when treating human skin. Summary of the Invention

[0005] This invention provides a flexible plasma electrode to address one of the shortcomings of the prior art. It effectively suppresses the field coupling effect between adjacent discharge units, ensuring that the electric field forms a complete closed curve between the high-voltage electrode and the nearest ground electrode. This prevents the electric field from superimposing on the discharge intervals of adjacent groups and affecting the discharge state of other groups. It achieves closed electric field constraint and discharge consistency control, solving the problem of discharge consistency and uniformity between different electrode groups.

[0006] This invention provides a flexible plasma electrode, comprising: The first electrode layer includes: The plurality of electrode assemblies, each of the electrode assemblies comprising: Two ground electrodes are arranged parallel to each other, with a gap between the two ground electrodes; A second electrode layer, which is parallel to and stacked with the first electrode layer, includes: Multiple high-voltage electrodes are arranged in parallel to each other, with the high-voltage electrodes facing the gap; A first intermediate layer is located between the first electrode layer and the second electrode layer.

[0007] According to a flexible plasma electrode provided by the present invention, each of the ground electrodes comprises: Multilayer sub-ground electrodes, wherein the multiple sub-ground electrodes are stacked and arranged facing each other; The second intermediate layer is located between two adjacent sub-ground electrodes.

[0008] According to the present invention, a flexible plasma electrode is provided in which the width of the gap is less than or equal to 5 mm.

[0009] A flexible plasma electrode according to the present invention further includes: The third electrode layer, wherein the second electrode layer is laid between the third electrode layer and the first electrode layer; A third intermediate layer is located between the third electrode layer and the second electrode layer.

[0010] According to a flexible plasma electrode provided by the present invention, the third electrode layer covers the entire area where the electrode assembly and the gap are located.

[0011] According to a flexible plasma electrode provided by the present invention, the first electrode layer further includes: Multiple first end electrodes are provided, and each of the multiple first end electrodes is configured to correspond one-to-one with the sub-ground electrodes of the multiple layers. Each first end electrode is connected to all the sub-ground electrodes of its corresponding layer. The second electrode layer further includes: The second terminal electrode is connected to each of the high-voltage electrodes. The third electrode layer further includes: The third terminal electrode is located between the first terminal electrode and the second terminal electrode, and the third terminal electrode is connected to each of the first terminal electrodes through an impedance loop.

[0012] According to the present invention, a flexible plasma electrode is provided, wherein the third electrode layer is a copper sheet.

[0013] According to a flexible plasma electrode provided by the present invention, an insulating medium is provided on the outer surface of the ground electrode, between adjacent high-voltage electrodes, and on the surfaces opposite to the third electrode layer and the third intermediate layer. The first intermediate layer, the second intermediate layer, and the third intermediate layer are all insulating media.

[0014] According to a flexible plasma electrode provided by the present invention, the spacing between adjacent electrode components is the same, and the width of each gap is the same.

[0015] According to a flexible plasma electrode provided by the present invention, the high-voltage electrode is spaced at the same distance from the two ground electrodes on both sides of the corresponding gap.

[0016] The flexible plasma electrode provided by this invention mainly consists of a first electrode layer, a second electrode layer, and a first intermediate layer. With the electrode cross-section distribution direction from bottom to top, the second electrode layer, the first intermediate layer, and the first electrode layer are stacked sequentially from bottom to top, and the first and second electrode layers extend parallel to each other, ensuring that the thickness of the first intermediate layer remains uniform and providing stable support for the first and second electrode layers. The first electrode layer consists of multiple electrode assemblies, each consisting of two parallel ground electrodes. The electrode assemblies are also parallel to each other, meaning the first electrode layer consists of paired and parallel ground electrodes. A gap of a certain distance is formed between the two ground electrodes in each electrode assembly, thus the first electrode layer is composed of alternating ground electrodes and gaps. The second electrode layer consists of multiple parallel high-voltage electrodes, the number of which is the same as the number of electrode assemblies. Each high-voltage electrode independently corresponds to one electrode assembly, and the high-voltage electrode is positioned directly opposite the gap between its corresponding electrode assembly.

[0017] The ground electrode of the first electrode layer and the high-voltage electrode of the second electrode layer form a sandwich structure. The high-voltage electrode is located between the two ground electrodes. Each high-voltage electrode corresponds to two independent ground electrodes. The high-voltage electrode and the two ground electrodes of the corresponding electrode assembly form a set of discharge units. That is, a gap is formed only between the two ground electrodes that are a single motor assembly. This gap is a discharge gap. Under the drive of the pulse voltage electric field, the air in the gap undergoes air gas breakdown, generating discharge plasma, which adheres to the gap area and contacts the target to be treated, thereby achieving the treatment of the wound surface.

[0018] By analyzing the breakdown mechanism of staggered flexible electrodes during long-term discharge operation, the study found that the bending curvature of the flexible electrodes changes uncontrollably during practical applications. This leads to a positive feedback process in the discharge power, resulting in local hot spots under normal operating conditions. Furthermore, the poor heat dissipation and thermal conductivity of the staggered, thin-strip electrode arrangement cause heat to accumulate at locations with higher curvature during operation, exacerbating the positive feedback breakdown problem caused by local hot spots. Simultaneously, the equivalent parasitic capacitance load characteristics of the electrode sheets need to be considered. After repeated design, processing, and testing, the sandwich structure of the flexible plasma electrode in this application was finally determined. This structural design enables more uniform electrode discharge and requires less power. For different applications, the number of discharge units can be flexibly adjusted to meet the needs without affecting the electrode discharge.

[0019] The flexible plasma electrode of this invention consists of multiple independent discharge units. It adopts a design structure in which two ground electrodes surround the entire high-voltage electrode. Through geometric coordination, a directional and constrained closed electric field distribution is formed between the high-voltage electrode and the adjacent ground electrode, which effectively suppresses the field strength coupling effect between adjacent discharge units. This ensures that the electric field forms a complete closed electric field curve between the high-voltage electrode and the nearest enclosing ground electrode, and does not cause the electric field superposition effect in the discharge interval of adjacent groups, thus affecting the discharge state of other groups. It achieves closed electric field constraint and discharge consistency control, and solves the problem of discharge consistency and uniformity between different electrode groups. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0021] Figure 1 This is a cross-sectional view of the flexible plasma electrode provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the flexible plasma electrode provided in an embodiment of the present invention; Figure 3a This is a discharge electrical waveform diagram of a normal operation test experiment of a flexible plasma electrode in a flat state provided in an embodiment of the present invention; Figure 3b This is an image showing the highest surface temperature of the flexible plasma electrode at around 30°C during normal operation testing in the flat state, as provided in this embodiment of the invention. Figure 3cThis is a photoluminescence image of the flexible plasma electrode during normal operation test in a flat state, as provided in the embodiments of the present invention. Figure 4a This is a discharge electrical waveform diagram of a test experiment of a flexible plasma electrode under normal operation in a bent state, provided in an embodiment of the present invention. Figure 4b This is an image showing the highest surface temperature of the flexible plasma electrode at around 35°C during a normal operation test under the bent state, as provided in this embodiment of the invention. Figure 4c This is a photoluminescence image of the flexible plasma electrode during normal operation test under a bent state, as provided in the embodiments of the present invention. Figure 5a The embodiment of the present invention provides an electrical safety test experiment on the contact area between a flexible plasma electrode and a human body, which simulates the contact area between the discharge electrode and the human body. Under the condition of a pulse frequency of 1kHz, the light emission image of an electrode is driven. Figure 5b The embodiment of the present invention provides an electrical safety test experiment on the contact area between a flexible plasma electrode and a human body, which simulates the contact area between the discharge electrode and the human body. The test results show the light emission images of the two electrodes driven under a pulse frequency of 1kHz. Figure 5c The embodiment of the present invention provides an electrical safety test experiment on the contact area between the flexible plasma electrode and the human body, which simulates the size of the discharge electrode and the human body. The test results show the light emission images of the three electrodes driven under a pulse frequency of 1kHz. Figure 5d The embodiment of this invention provides an electrical safety test experiment on the contact area between a flexible plasma electrode and a human body, which simulates the size of the discharge electrode and the human body. Under the condition of a pulse frequency of 1kHz, the light emission image of four electrodes is driven.

[0022] Figure label: 100, First electrode layer; 110, Electrode assembly; 111, Ground electrode; 1111, First sub-ground electrode; 1112, Second sub-ground electrode; 1113, Second intermediate layer; 112, Gap; 120, First end electrode; 121, First end electrode one; 122, First end electrode two; 200, Second electrode layer; 210, High voltage electrode; 220, Second terminal electrode; 300. First intermediate layer; 400. Third electrode layer; 410. Third terminal electrode; 500, Third intermediate layer; 600, Impedance circuit; 700, Insulating medium. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0024] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0026] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0027] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0028] Compared to using plasma to treat specific tissues, especially surface dielectric barrier discharge (SDBD) for direct contact, the electrical safety of plasma when in contact with the human body is particularly important. Analysis of the breakdown mechanism during long-term discharge operation of staggered flexible electrodes reveals that the uncontrollable changes in the bending curvature of the flexible electrodes during practical applications, coupled with the positive correlation between surface charge density and curvature (i.e., greater curvature leads to higher surface charge density, higher electric field strength, and stronger discharge), result in higher temperatures at higher curvatures during normal operation. This creates a positive feedback process of localized hotspot discharge power under normal operating conditions. Furthermore, the poor heat dissipation and thermal conductivity of the staggered, thin-strip electrode arrangement exacerbate the problem of localized hotspot positive feedback breakdown. Simultaneously, the equivalent parasitic capacitance load characteristics of the electrode sheets must be considered. Under the same power supply parameters, different equivalent parasitic capacitances will generate different pulse voltage amplitudes on the electrodes. To ensure discharge across the entire electrode surface, the power supply input power needs to be adjusted. However, adjusting the power supply input power also generates varying degrees of heat on the electrodes, ultimately affecting the overall safety of the electrode.

[0029] For flexible electrodes used in biomedicine, existing solutions mainly employ a two-electrode structure. The two-electrode structure is simple, easy to manufacture, and low-cost, making it suitable for applications with lower requirements and shorter discharge times. However, due to manufacturing process errors, the two-electrode structure cannot discharge evenly across the entire electrode surface. Often, due to these errors, some areas on the electrode surface experience stronger discharges while others discharge weakly or not at all. Under increased input voltage or prolonged operation, these areas are prone to overheating, leading to thermal breakdown and damage to the electrodes. This structure is unsuitable for use as a flexible electrode structure accessible to the human body.

[0030] To overcome the limitations of the two-electrode structure, researchers have proposed using a three-electrode structure to improve the electrical safety and discharge uniformity of the electrodes. The first port (HV) is the high-voltage electrode, the second port (GND) is the ground electrode, and the third port is the third electrode.

[0031] Although the three-electrode configuration significantly improves the discharge uniformity defects of the traditional bipolar structure by introducing a third electrode to assist in potential regulation, the three-electrode structure increases the equivalent capacitance of the entire electrode. To maintain the same discharge gap, the system needs to be matched with a higher capacity power supply, and the problem of electrode thermal breakdown still exists under long-term operation.

[0032] In summary, the current electrode structure still has some problems, mainly the thermal breakdown problem under long-term operation. Therefore, it is necessary to consider the electrode structure design and thermal breakdown to design an electrode that can operate stably for a long time, adapt to bending scenarios, and is safe for human contact.

[0033] like Figure 1 As shown, the flexible plasma electrode provided in this embodiment of the invention includes a first electrode layer 100, a second electrode layer 200, and a first intermediate layer 300. The first electrode layer 100 includes a plurality of electrode components 110, each electrode component 110 including two ground electrodes 111 arranged parallel to each other, with a gap 112 formed between the two ground electrodes 111. The second electrode layer 200 is arranged parallel to and stacked with the first electrode layer 100, and includes a plurality of high-voltage electrodes 210 arranged parallel to each other, with the high-voltage electrodes 210 positioned directly opposite the gap 112. The first intermediate layer 300 is located between the first electrode layer 100 and the second electrode layer 200.

[0034] The flexible plasma electrode of this invention mainly consists of a first electrode layer 100, a second electrode layer 200, and a first intermediate layer 300. With the electrode cross-section distribution direction from bottom to top, the second electrode layer 200, the first intermediate layer 300, and the first electrode layer 100 are stacked sequentially from bottom to top, and the first electrode layer 100 and the second electrode layer 200 extend parallel to each other, ensuring that the thickness of the first intermediate layer 300 remains uniform, providing stable support and fixation for the first electrode layer 100 and the second electrode layer 200. The first electrode layer 100 is composed of multiple motor components, each electrode component 110 consisting of two parallel ground electrodes 111. The electrode components 110 are also parallel to each other, meaning the first electrode layer 100 consists of paired and parallel ground electrodes 111. A gap 112 with a certain distance is formed between the two ground electrodes 111 in each electrode component 110, thus the first electrode layer 100 is constructed by alternating ground electrodes 111 and gaps 112. The second electrode layer 200 consists of a plurality of parallel high-voltage electrodes 210. The number of high-voltage electrodes 210 is the same as the number of electrode assemblies 110. Each high-voltage electrode 210 is independently associated with an electrode assembly 110. The high-voltage electrode 210 is positioned in the gap 112 between its corresponding electrode assembly 110.

[0035] The ground electrode 111 of the first electrode layer 100 and the high voltage electrode 210 of the second electrode layer 200 form a sandwich structure. The high voltage electrode 210 is located between the two ground electrodes 111. Each high voltage electrode 210 corresponds to two independent ground electrodes 111. The high voltage electrode 210 and the two ground electrodes 111 of the corresponding electrode assembly 110 form a set of discharge units. That is, a gap 112 is formed only between the two ground electrodes 111, which are individual motor assemblies. This gap 112 is a discharge gap 112. Under the drive of the pulse voltage electric field, the air in the gap 112 undergoes air gas breakdown, generating discharge plasma, which adheres to the gap 112 region and contacts the treatment target to achieve the treatment of the wound surface.

[0036] By analyzing the breakdown mechanism of staggered flexible electrodes during long-term discharge operation, the study found that the bending curvature of the flexible electrodes changes uncontrollably during practical applications. This leads to a positive feedback process in the discharge power, resulting in local hot spots under normal operating conditions. Furthermore, the poor heat dissipation and thermal conductivity of the staggered, thin-strip electrode arrangement cause heat to accumulate at locations with higher curvature during operation, exacerbating the positive feedback breakdown problem. Simultaneously, the equivalent parasitic capacitance load characteristics of the electrode sheets need to be considered. After repeated design, processing, and testing, the sandwich structure of the flexible plasma electrode in this application was finally determined. This structural design enables more uniform electrode discharge and requires less power. For different applications, only the number of discharge units needs to be flexibly adjusted to meet the requirements without affecting the electrode discharge. In practical applications, even under arbitrary bending conditions, uniform discharge can be guaranteed, and stable normal operation can be maintained with low electrode surface temperature and reliable electrical safety.

[0037] The flexible plasma electrode of this invention consists of multiple independent discharge units. It adopts a design structure in which two ground electrodes 111 surround the entire high-voltage electrode 210. Through geometric coordination, a directional and constrained closed electric field distribution is formed between the high-voltage electrode 210 and the adjacent ground electrode 111, which effectively suppresses the field strength coupling effect between adjacent discharge units. It can ensure that the electric field forms a complete closed electric field curve between the high-voltage electrode 210 and the nearest ground electrode 111, and will not cause the electric field superposition effect in the discharge interval of adjacent groups to affect the discharge state of other groups. It realizes closed electric field constraint and discharge consistency control, and solves the problem of discharge consistency and uniformity between different electrode groups.

[0038] According to one embodiment of the present invention, each ground electrode 111 includes multiple sub-ground electrodes 111 and a second intermediate layer 1113, wherein the multiple sub-ground electrodes 111 are stacked and arranged facing each other; the second intermediate layer 1113 is located between two adjacent sub-ground electrodes 111.

[0039] In this embodiment, the ground electrode 111 of the first electrode layer 100 is composed of at least two sub-ground electrodes and a second intermediate layer 1113. The multiple sub-ground electrodes form a structure that is stacked sequentially from bottom to top, and they extend parallel to each other and are arranged facing each other. A second intermediate layer is laid between two adjacent sub-ground electrodes so that the thickness of the second intermediate layer 1113 remains uniform. The second intermediate layer 1113 provides stable fixed support for the sub-ground electrodes on its upper and lower sides.

[0040] In this embodiment, the ground electrode 111 of the first electrode layer 100 consists of two sub-ground electrodes and a second intermediate layer 1113. The two sub-ground electrodes are the first sub-ground electrode 1111 and the second sub-ground electrode 1112, respectively. The first electrode layer 100 is a structure in which the first sub-ground electrode 1111, the second intermediate layer 1113 and the second sub-ground electrode 1112 are stacked sequentially from bottom to top. The first sub-ground electrode 1111 and the second sub-ground electrode 1112 extend parallel to each other and are positioned opposite each other, so that the thickness of the second intermediate layer 1113 remains uniform. The second intermediate layer 1113 provides stable fixed support for the first sub-ground electrode 1111 and the second sub-ground electrode 1112.

[0041] In this embodiment, the upper and lower sub-ground electrodes form a dual-ground loop flexible plasma electrode. Compared to a single-layer ground electrode 111 design, the change in the number of layers is mainly to reduce the heat generated by the electrode during discharge. This achieves low heat dissipation and long-term operation of the flexible plasma electrode. During use, the presence of the dual-layer sub-ground electrodes can distribute the displacement current, reduce dielectric heat dissipation, and further reduce electrode sheet heating, ensuring stable operation of the electrode over a long period. Moreover, the high-voltage electrode 210 has a preferential discharge path with the dual-ground loop, preventing the formation of a discharge path with the human body. This improves the electrical safety of human contact during use and ensures that the total leakage current flowing into the human body is always controlled within a safe current range, regardless of the size of the contact area between the human body and the electrode.

[0042] In other embodiments, the number of ground electrode layers 111 can be adjusted. However, increasing the number of ground electrode layers 111 means a thicker electrode, which has higher mechanical strength and is more difficult to bend, thus limiting its application in medicine. Conversely, reducing the number of ground electrode layers 111 increases the heat dissipation of the electrode, raising its temperature and potentially causing overheating and breakdown during prolonged use. Two layers represent the optimal result obtained through experimentation. The number of ground electrode layers 111 does not affect the air gap depth. There are no special requirements for the air gap depth; ensuring the correct number of ground electrode layers 111 is the key factor.

[0043] In this embodiment, the ground electrode 111 has a multi-layered sub-ground electrode structure with facing sub-ground electrodes from bottom to top. The width and thickness of each sub-ground electrode layer need to be consistent to ensure the discharge uniformity of the high-voltage electrode 210 and the ground electrode 111 to the greatest extent possible, and to avoid local overheating and thermal breakdown of the electrodes. If the ground electrodes 111 are not aligned, the electric field between the high-voltage electrode 210 and the ground electrode 111 in the discharge unit will be inconsistent during the discharge process, resulting in uneven discharge. Over a long period of operation, this may lead to thermal breakdown of the electrodes.

[0044] According to one embodiment of the present invention, the width of the gap 112 is less than or equal to 5 mm.

[0045] In this embodiment, the flexible plasma electrode is applied in the biomedical field. While ensuring the effectiveness of the application, it is also necessary to ensure the safety of the human body. Therefore, this invention reduces the power required for discharge by reducing the width d of the gap 112, that is, limiting the distance between the two ground electrodes 111 of the electrode assembly 110 to within 5mm.

[0046] In this embodiment, the distance between the two ground electrodes 111 of the electrode assembly 110 can be limited to within 1 mm to achieve a better discharge effect.

[0047] According to one embodiment of the present invention, the flexible plasma electrode further includes a third electrode layer 400 and a third intermediate layer 500, with a second electrode layer 200 disposed between the third electrode layer 400 and the first electrode layer 100; the third intermediate layer 500 is located between the third electrode layer 400 and the second electrode layer 200.

[0048] In this embodiment, the flexible plasma electrode mainly consists of a first electrode layer 100, a second electrode layer 200, a first intermediate layer 300, a third electrode layer 400, and a third intermediate layer 500. With the electrode cross-section distribution direction from bottom to top, the third electrode layer 400, the third intermediate layer 500, the second electrode layer 200, the first intermediate layer 300, and the first electrode layer 100 are stacked sequentially from bottom to top. Furthermore, the third electrode layer 400, the first electrode layer 100, and the second electrode layer 200 maintain a parallel extension state, ensuring that the thickness of the third intermediate layer 500 remains uniform, providing stable support and fixation for the third electrode layer 400 and the second electrode layer 200.

[0049] The third electrode layer 400 can be configured to cover each discharge unit, achieving a uniform electric field and overall electrode temperature. This design not only significantly reduces the operating temperature of the flexible plasma electrode in contact with the skin, ensuring low-temperature comfort during human contact, but also effectively balances the temperature field distribution of multiple discharge units, eliminating the risk of breakdown of intermediate layers caused by localized heat accumulation and ensuring the continuous stability of the discharge process.

[0050] According to one embodiment of the present invention, the third electrode layer 400 covers the entire area where the electrode assembly 110 and the gap 112 are located.

[0051] In this embodiment, the distribution range of the third electrode layer 400 is the entire size of the flexible plasma electrode, covering all discharge units and the areas between them. The area of ​​the third electrode layer 400 encloses the entire plasma discharge unit area formed by the high-voltage electrode 210 and the ground electrode 111. Because the heat generated during electrode discharge is distributed across the entire electrode, compared to a partially covered third electrode layer 400 design, a single, fully covered third electrode layer 400 can effectively transfer the generated heat away. Without this full coverage, the temperature in uncovered areas would be higher than in other areas, potentially leading to thermal breakdown of the electrode during prolonged operation.

[0052] According to an embodiment of the present invention, the first electrode layer 100 further includes a plurality of first end electrodes 120, which are respectively disposed in correspondence with the multilayer sub-ground electrodes, and each first end electrode 120 is connected to all sub-ground electrodes of its corresponding layer; the second electrode layer 200 further includes a second end electrode 220, which is connected to each high voltage electrode 210; the third electrode layer 400 further includes a third end electrode 410, which is located between the first end electrode 120 and the second end electrode 220, and the third end electrode 410 is connected to each first end electrode 120 through an impedance loop 600.

[0053] In this embodiment, both the ground electrode 111 and the high voltage electrode 210 are thin strip electrodes. The first electrode layer 100 is mainly composed of electrode assembly 110 and first end electrode 120. The number of sub-ground electrode layers of each ground electrode 111 in the first electrode layer 100 is the total number of sub-ground electrode layers of the first electrode layer 100. The number of first end electrodes 120 is the same as the number of sub-ground electrode layers. One first end electrode 120 is connected to one sub-ground electrode layer. That is, one end of each sub-ground electrode layer of the first electrode layer 100 is connected to its corresponding first end electrode 120, and the other end extends in parallel and in the same direction. Multiple first end electrodes 120 are also in a state of mutual independence and relatively parallel extension. The second electrode layer 200 mainly consists of a high-voltage electrode 210 and a second terminal electrode 220. One end of each high-voltage electrode 210 is connected to the second terminal electrode 220, and the other end extends parallel to each other in the same direction. The first terminal electrode 120 and the second terminal electrode 220 are opposite to each other and arranged parallel to each other. Each first terminal electrode 120 is connected to the positive pulse high-voltage potential interface of the driving power supply, and the second terminal electrode 220 is connected to the ground potential interface of the driving power supply.

[0054] The third electrode layer 400 has a third end electrode 410, which is disposed between the first end electrode 120 and the second end electrode 220. An impedance loop 600 is provided between the third end electrode 410 and the first end electrode 120. This design effectively eliminates the static electricity accumulation generated in the third electrode layer 400 when the device is idle for a long time or under power failure by establishing a controllable charge discharge path. This not only solves the hidden danger of intermediate layer breakdown caused by charge accumulation between suspended metal electrodes, but also avoids the potential risk of discharge and sparking when the human body comes into contact with it, significantly improving the durability, operational stability and human interaction safety of the flexible plasma electrode.

[0055] An impedance loop 600 is used between the first terminal electrode 120 and the third terminal electrode 410 instead of direct grounding. The third terminal electrode 410 can be connected to different first terminal electrodes 120 through different impedance loops 600. Different impedance adjustments are made to each impedance loop 600, thereby forming independent circuit control for each first terminal electrode 120. That is, the impedance of each sub-ground electrode can be individually adjusted and controlled through its corresponding connected impedance loop 600. While achieving electrostatic discharge function, the abnormal growth of the electrode equivalent parasitic capacitance is successfully suppressed, realizing the coordinated control of electrostatic protection and parasitic capacitance, thereby ensuring that the system drive power demand is maintained within a stable and controllable range.

[0056] In this embodiment, the first electrode layer 100 includes two sub-ground electrodes, therefore there are also two first end electrodes 120. The two first end electrodes 120 are stacked from bottom to top and arranged parallel to each other. The first sub-ground electrode 1111 is connected to the first end electrode 121, and the second sub-ground electrode 1112 is connected to the first end electrode 122. The third end electrode 410 is connected to the first end electrode 121 through a first impedance loop, and the third end electrode 410 is connected to the first end electrode 122 through a second impedance loop.

[0057] According to one embodiment of the present invention, the third electrode layer 400 is a copper sheet.

[0058] In this embodiment, the third electrode layer 400 is made of copper sheet. The third electrode layer 400 needs to be manufactured using a material that meets the requirements of rapid thermal conductivity and easy bending, such as a metal material with a higher thermal conductivity than copper and easy bending. Its high thermal conductivity can quickly dissipate the Joule heat generated during the discharge process between the high voltage electrode 210 and the ground electrode 111, achieving efficient heat dissipation. Furthermore, the homogenized copper layer effectively balances the temperature field distribution of multiple discharge units, eliminating the risk of dielectric layer breakdown caused by local heat accumulation and ensuring the continuous stability of the discharge process.

[0059] According to an embodiment of the present invention, an insulating medium 700 is provided on the outer surface of the ground electrode 111, between adjacent high voltage electrodes 210, and on the surfaces opposite to the third electrode layer 400 and the third intermediate layer 500. The first intermediate layer 300, the second intermediate layer 1113, and the third intermediate layer 500 are all insulating media.

[0060] In this embodiment, the first electrode layer 100 wraps the outer surface of the ground electrode 111 with an insulating medium 700, the second electrode layer 200 fills the space between adjacent high voltage electrodes 210 with an insulating medium 700, and the third electrode layer 400 covers the surface of its back to the third intermediate layer 500 with an insulating medium 700. This forms a structure in which an insulating medium 700 is provided between each electrode and on the entire outer surface of the flexible plasma electrode, which allows the electrode of the present invention to come into direct contact with the human body, thus ensuring the effectiveness of the present invention when used.

[0061] In this embodiment, the insulating medium 700 can be made of polyimide. Besides forming a flexible plasma electrode structure, the insulating medium 700 also ensures direct human contact. By using the insulating medium 700 to separate each electrode layer, a double-layer sandwich electrode structure is formed. Finally, the entire electrode is wrapped with the insulating medium 700, preventing the metal electrodes from being exposed. Moreover, because of the presence of the insulating medium 700, the human body can directly touch the electrode surface, improving the overall effectiveness and safety of the electrode.

[0062] According to one embodiment of the present invention, the spacing between adjacent electrode assemblies 110 is the same, and the width of each gap 112 is the same.

[0063] In this embodiment, the electrode components 110 on the first electrode layer 100 are uniformly distributed, and the gap 112 between the two ground electrodes 111 of one electrode component 110 is equal. To improve the discharge and heating effect of the electrodes, the discharge units are uniformly arranged. If the width of the gap 112 is equal to the distance between two adjacent electrode components 110, it is equivalent to the ground electrodes 111 on the first electrode layer 100 being uniformly distributed.

[0064] According to one embodiment of the present invention, the high voltage electrode 210 is spaced at the same distance from the two ground electrodes 111 on both sides of its corresponding gap 112.

[0065] In this embodiment, the high-voltage electrode 210 is positioned at the center of the gap 112, equidistant from the two ground electrodes 111 that constitute the gap 112. This ensures that the high-voltage electrode 210 is centered, and that the discharge is uniform and the heat is not concentrated when it forms a discharge unit with the ground electrodes 111 surrounding it. Under the same conditions of uniformly distributed electrode assemblies 110 and gap 112, the high-voltage electrodes 210 of the second electrode layer 200 can also be uniformly distributed.

[0066] This invention proposes a dual-ground sandwich flexible plasma electrode, establishes an equivalent electrode model, analyzes the model structure of the flexible electrode with dual-ground structure, and derives the influence of the dual-ground structure design on the overall electrode electric field. The following are performance verification experiments demonstrating the advantages of the flexible plasma electrode: (1) Stability and reliability test of normal operation under electrode flat condition To meet the requirements of performance and application scenarios, the flexible electrode is designed using the dual-ground sandwich structure of this invention, as shown in the following figure. Figure 1 and Figure 2 As shown, a stable operation test was conducted using a 700W high-power microsecond pulse power supply with an input voltage of 14V, a pulse frequency of 1kHz, an equivalent electrode capacitance of 434pF (measured by the bridge at 100Hz), and an impedance (Z) of 10 megohms. The resulting discharge electrical waveform is shown below. Figure 3a As shown, the peak discharge voltage is approximately 5kV, and the peak discharge current is 160mA. Furthermore, after a ten-minute routine stability test, the electrode surface temperature was measured to be a maximum of approximately 30℃. Figure 3b As shown in the photograph, its luminescent image is as follows Figure 3c As shown, touching the electrodes with one's hand did not cause any discomfort.

[0067] (2) Reliability test of normal discharge operation under simulated electrode bending state Flexible electrodes often need to operate under bending conditions. Our bent electrode is used to simulate this actual working state. In the experiment, the electrode was subjected to extreme bending. Given the same microsecond pulse drive parameters, the characteristic test results are as follows: Figure 4a As shown, high curvature bending does indeed enhance discharge. However, with the same electrode pulse amplitude voltage remaining constant at around 5kV, the discharge is significantly enhanced at areas of greater curvature, and the highest temperature also occurs at the location of greatest curvature. The overall thermal equilibrium temperature of the electrode also increases. After running the experiment under normal conditions for 10 minutes, the highest hotspot temperature reaching final thermal equilibrium was approximately 35℃. Figure 4b and 4c As shown, the human body can touch it normally, and the electrode is operating without any abnormalities.

[0068] (3) Electrical safety test experiment on the size of the contact area between the simulated discharge electrode and the human body To verify the safety of the electrodes in contact with different human bodies, the required power output voltage for each electrode area was determined. A 700W high-power microsecond pulse power supply was used to drive one to four electrodes at a pulse frequency of 1kHz, producing the following emission images: Figure 5a , 5bAs shown in Figures 5c and 5d, the corresponding input voltages Udc are 14V, 16V, 22V, and 23V, respectively.

[0069] In the simulated human safety experiment, a metal plate covered the entire electrode, and the metal plate was connected to an equivalent human model via wires. The effective value of the current flowing through the equivalent human model was measured using a current coil to assess the safety of human contact. The measured effective values ​​of the current flowing through the normal equivalent human model were 1.66mA, 1.21mA, 1.40mA, and 2.45mA, respectively, which are below the safe effective current value for human contact (10mA). By short-circuiting the skin impedance of the equivalent human model to simulate the use of the electrode under injured conditions, the measured effective values ​​of the current flowing through the equivalent human model were 1.65mA, 0.82mA, 1.50mA, and 2.45mA, respectively. The experimental results show that, under both normal and injured conditions, even when the electrode area is increased exponentially, the effective value of the current flowing through the human body remains below the safe effective current value for human contact (10mA), ensuring safety for the human body. Furthermore, under the same contact area, the discharge state of the electrode is almost unaffected by normal or injured conditions.

[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A flexible plasma electrode, characterized in that, include: The first electrode layer includes: Multiple electrode assemblies, each of the electrode assemblies comprising: Two ground electrodes are arranged parallel to each other, with a gap between the two ground electrodes; A second electrode layer, which is parallel to and stacked with the first electrode layer, includes: Multiple high-voltage electrodes are arranged in parallel to each other, with the high-voltage electrodes facing the gap; A first intermediate layer is located between the first electrode layer and the second electrode layer; The number of high-voltage electrodes is the same as the number of electrode assemblies. Each high-voltage electrode corresponds independently to one electrode assembly. The ground electrode of the first electrode layer and the high-voltage electrode of the second electrode layer form a sandwich structure. The high-voltage electrode is located between the two ground electrodes. Each high-voltage electrode corresponds to two independent ground electrodes. The high-voltage electrode and the two ground electrodes of its corresponding electrode assembly form a set of discharge units. Each of the ground electrodes includes: Multilayer sub-ground electrodes, wherein the multiple sub-ground electrodes are stacked and arranged facing each other; The second intermediate layer is located between two adjacent sub-ground electrodes; The width of the gap is less than or equal to 5 mm.

2. The flexible plasma electrode of claim 1, wherein, Also includes: The third electrode layer, wherein the second electrode layer is laid between the third electrode layer and the first electrode layer; A third intermediate layer is located between the third electrode layer and the second electrode layer.

3. The flexible plasma electrode of claim 2, wherein, The third electrode layer covers the entire area where the electrode assembly and the gap are located.

4. The flexible plasma electrode of claim 2, wherein, The first electrode layer further includes: Multiple first end electrodes are provided, and each of the multiple first end electrodes is configured to correspond one-to-one with the sub-ground electrodes of the multiple layers. Each first end electrode is connected to all the sub-ground electrodes of its corresponding layer. The second electrode layer further includes: The second terminal electrode is connected to each of the high-voltage electrodes. The third electrode layer further includes: The third terminal electrode is located between the first terminal electrode and the second terminal electrode, and the third terminal electrode is connected to each of the first terminal electrodes through an impedance loop.

5. The flexible plasma electrode of claim 2, wherein, The third electrode layer is a copper sheet.

6. The flexible plasma electrode according to claim 2, characterized in that, An insulating medium is provided on the outer surface of the ground electrode, between adjacent high-voltage electrodes, and on the surfaces opposite to the third electrode layer and the third intermediate layer. The first intermediate layer, the second intermediate layer, and the third intermediate layer are all insulating media.

7. The flexible plasma electrode according to claim 1, characterized in that, The spacing between adjacent electrode assemblies is the same, and the width of each gap is the same.

8. The flexible plasma electrode according to claim 1, characterized in that, The high-voltage electrode is spaced at the same distance from the two ground electrodes on either side of the corresponding gap.

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